JPH04366814A - Liquid crystal display element substrate and liquid crystal display element formed by using this substrate. - Google Patents

Abstract

PURPOSE:To decrease the defects by the shorting between upper and lower substrate electrodes and to improve a yield by providing insulating members between transparent electrodes and electrode patterns, such as auxiliary metallic electrodes in such a manner that these members are larger in height than the electrode patterns. CONSTITUTION:The stripe-shaped transparent electrode patterns 15, 16 are formed on glass substrates 13, 14 and the insulating members 17, 18 having the thickness larger than the film thickness of the electrodes, i.e., the height larger than the height thereof are formed between the respective electrodes 15 and 16. The height of these insulating members 17, 18 is preferably set higher by 200 to 3000Angstrom than the height of the transparent electrode patterns 15, 16. If, therefore, two sheets of the substrates 13, 14 are stuck to each other and are loaded, this load is supported by the insulating members 17, 18 constituting higher projecting parts. Then, the failure of the electrode patterns 15, 16 is prevented. Since the projecting parts are formed of the insulating members, the failures, if any, of the projecting parts by the load, are not the cause for the shorting between the substrates 13 and 14.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display element substrate and a liquid crystal display element using the same. The present invention is a particularly effective technique for ferroelectric liquid crystal elements among liquid crystal display elements.

0002

2. Description of the Related Art As shown in FIG. 5 or 6, a liquid crystal display element is manufactured by bonding two liquid crystal display element substrates 11 and 12 with a spacer 19 interposed therebetween, and then applying a load to achieve a uniform cell gap. It is constructed by forming a gap and injecting liquid crystal into this gap. Since the liquid crystal display element substrates 11, 12 generally have transparent electrode patterns 15, 16 and metal auxiliary electrode patterns 21, 22 formed using photolithography, these electrode patterns 15, 16, 21, 22 form convex portions. ing.

By the way, when applying a load by bonding two substrates together, conventionally, as shown in FIG. 5 or 6, the load is concentrated on the electrode patterns 15, 16, 21, and 22, and 16, 21, and 22, and this fragment 51 or 61 becomes a major cause of short circuit between the upper and lower substrate electrodes, resulting in a significant decrease in yield. In the figure, 51 is a fragment of the ITO transparent electrode (ITO) 15, and 61 is a fragment of the metal (molybdenum) auxiliary electrode 21.

0004

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems in the conventional example, and reduces defects in liquid crystal display elements due to electrode shorts between upper and lower substrates, and improves the yield of liquid crystal display elements. The purpose is to achieve this goal.

[0005]

[Means for Solving the Problems] In order to achieve the above object, the present invention is characterized in that an insulating member having higher insulating properties than the electrode patterns is provided between the electrode patterns on the substrate.

[0006]

[Function] According to the present invention, since an insulating member having higher insulating properties than the electrode patterns is provided between the electrode patterns on the substrate, when two substrates are pasted together and a load is applied, the load forms a higher convex portion. Since the electrode pattern is supported by an insulating member, damage to the electrode pattern can be prevented. Furthermore, even if the convex part is damaged by a load, it will not cause a short circuit between the boards because it is made of an insulating material. Therefore, by providing an insulating member having higher insulating properties than the electrode patterns between the electrode patterns in this way, it is possible to significantly reduce defects in the liquid crystal display element due to short-circuits between the upper and lower substrate electrodes.

[0007]

【Example】

Example 1 FIG. 1 shows a cross section of a liquid crystal display element according to a first example of the present invention. The liquid crystal display element in the figure has glass substrates 13 and 14.
Striped ITO electrode (transparent electrode) pattern 1 on top
5, 16 and the ITO electrodes 15, 16 respectively.
Insulating members 17 and 18 made of SiO2 which is thicker than the film thickness
The liquid crystal display element substrates 11 and 12 formed with
The directions of the TO electrode patterns 15 and 16 are perpendicular to each other.
It is pasted together. In this case, since the load is applied to the convex portions of SiO2 17 and 18, the ITO films 15 and 16
No damage will occur. Also SiO2 17,18
Even if it breaks under load, it will not cause a short circuit between the upper and lower substrate electrodes because it is an insulator.

Below, the liquid crystal display element substrate 11 in FIG.
, 12 using the substrate 11 as an example, FIGS.
This will be explained with reference to d). First, a layer 31 of ITO, which is a transparent electrode material, is formed on a glass substrate 13 by sputtering to a thickness of 1500 Å, and a photoresist (HPR-118
2. [Fuji Hunt Electronics Technology Co., Ltd.]
]) to form a striped pattern 32 (see FIG. 3(a)
)), ITO is etched with a 1:1 solution of hydrochloric acid and ferric chloride to form an ITO transparent electrode 15 (FIG. 3(b)).
). Next, while keeping the substrate temperature below 100°C, insulating material SiO2 was deposited to a thickness of 2000 Å by sputtering.
A film is formed (FIG. 3(c)) to form portions 33 and 17. Finally, 33 parts of the SiO2 film were peeled off along with the photoresist to form the SiO2 film as shown in Figure 3(d).
A liquid crystal display element substrate 11 having a structure in which 17 is a convex portion higher than the ITO pattern 15 is completed. The substrate 12 is also produced in exactly the same manner.

According to this embodiment, a more uniform cell gap can be obtained compared to the conventional example shown in FIG. 5, and the short-circuit rate of the upper and lower substrate electrodes can be kept very small. Table 1 compares the short-circuit ratio of the upper and lower substrate electrodes of this embodiment (FIG. 1) and the conventional example (FIG. 5) by changing the spacer diameter. In addition, in Table 1, the failure rate due to short circuit between the upper and lower electrode substrates is as follows:
The measurement was performed using a liquid crystal display substrate on which zero stripe electrodes were formed.

0010

[Table 1]

[0011] Ferroelectric liquid crystal display elements require a small cell gap of several micrometers or less, but this example is suitable for cases where a small cell gap is required like this ferroelectric liquid crystal display element, as shown in Table 1. Particularly effective.

Embodiment 2 FIG. 2 shows a cross section of a liquid crystal display element according to a second embodiment of the present invention. The liquid crystal display element in the figure has glass substrates 13 and 14.
Insulating members 17, 18 made of Ta2O5, which have striped transparent electrode patterns 15, 16 and metal auxiliary electrode patterns 21, 22 on top, and are higher in height than the metal auxiliary electrodes.
The liquid crystal display element substrates 11 and 12 formed with
via the spacer 19 and the ITO electrode pattern 15
and 16 are pasted together so that their directions are perpendicular to each other.

Below, the liquid crystal display element substrate 11 in FIG.
, 12 using the substrate 11 as an example, FIGS.
This will be explained with reference to e). First, on the glass substrate 13, a layer 31 of ITO, which is a transparent electrode material, is continuously formed with a thickness of 1500 Å, and a layer 41 of Mo, which is a material of a metal auxiliary electrode, is continuously formed with a thickness of 1500 Å.
-1182, [Fuji Hunt Electronics Technology Co., Ltd.]) to form a striped pattern 32 (FIG. 4(a)). Then H3PO4, HNO3 and CH
Mo is etched using a mixed solution of 3COOH, and then ITO is etched using an HI aqueous solution (see Figure 4).
b)). Furthermore, while keeping the substrate temperature below 100℃,
35% of Ta2O5, an insulating material, is sputtered.
00 Å film was formed to form parts corresponding to 33 and 17 (Fig. 4(c)), and the photoresist was peeled off (Fig. 4(d)
)). Finally, a Mo pattern 21 is formed as an electrode auxiliary line to form an insulating member (Ta2O5) as shown in FIG. 4(e).
A liquid crystal display element substrate 11 having a structure in which the portions 17 protrude beyond the metal auxiliary electrodes 21 is completed. The substrate 12 is also produced in exactly the same manner.

By using this example, a very uniform cell gap could be obtained compared to the conventional example (FIG. 6). This is because it is more advantageous to maintain the cell gap with the Ta2O5 portion, which is a hard material, than with Mo, which is a relatively soft metal. According to this example, as in Example 1, there was also a sufficient effect on reducing the short-circuit rate of the upper and lower substrate electrodes.

[0015]

[Effects of the Invention] As explained above, according to the present invention,
By forming a convex portion higher than the electrode pattern using an insulating member, a uniform cell gap can be obtained, and furthermore, defects due to short circuit between the upper and lower substrate electrodes can be reduced, and the manufacturing yield can be improved.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing the structure of a liquid crystal display element according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing the structure of a liquid crystal display element according to another embodiment of the present invention.

3 is an explanatory diagram of the manufacturing process of the liquid crystal display element substrate in FIG. 1. FIG.

4 is an explanatory diagram of the manufacturing process of the liquid crystal display element substrate in FIG. 2. FIG.

FIG. 5 is a cross-sectional view showing the configuration of a conventional liquid crystal display element.

FIG. 6 is a cross-sectional view showing the configuration of another conventional liquid crystal display element.

[Explanation of symbols]

11, 12: Liquid crystal display element substrate, 13, 14: Glass substrate, 15, 16: Transparent electrode (ITO) pattern, 17,
18: Insulating member (SiO2 or Ta2O5), 1
9: Spacer, 21, 22: Metal (Mo) auxiliary electrode.

Claims (8)

[Claims] 1. A liquid crystal display substrate having a transparent electrode pattern on a transparent substrate, characterized in that an insulating member is provided between the transparent electrode patterns, and the height of the insulating member is higher than the transparent electrode pattern. Liquid crystal display element substrate. 2. The liquid crystal display element substrate according to claim 1, wherein the height of the insulating member is 200 Å to 3000 Å higher than the transparent electrode pattern. 3. The liquid crystal display element substrate according to claim 1, wherein the insulating member is made of a harder material than the transparent electrode material. 4. A liquid crystal display element substrate having a transparent electrode pattern and a metal auxiliary electrode pattern on a transparent substrate,
A liquid crystal display element substrate characterized in that an insulating member is provided between these electrode patterns, and the height of this insulating member is higher than either the transparent electrode pattern or the metal auxiliary electrode pattern. 5. The height of the insulating member is 200 Å to 3000 Å higher than that of the transparent electrode pattern or the metal auxiliary electrode pattern.
5. The liquid crystal display element substrate according to claim 4, wherein the liquid crystal display element substrate has a high Å. 6. The liquid crystal display element substrate according to claim 4, wherein the insulating member is made of a harder material than the metal auxiliary electrode material. 7. A liquid crystal display element comprising the liquid crystal display element substrate according to claim 1. 8. A ferroelectric liquid crystal display device characterized by using the liquid crystal display device substrate according to any one of claims 1 to 6.