JP7446667B2 - Cutting blade, how to attach the cutting blade, and how to process the workpiece - Google Patents

Description

The present invention relates to a cutting blade used for processing a workpiece, a method for mounting the cutting blade on a spindle, and a method for processing a workpiece using the cutting blade.

BACKGROUND ART In electronic devices such as mobile phones and personal computers, a device chip that includes devices such as electronic circuits has become an essential component. Device chips are produced by dividing the front side of a wafer made of a semiconductor material such as silicon into multiple regions along dividing lines (street), forming devices in each area, and then cutting the wafer along the dividing lines. Obtained by dividing.

When dividing a plate-shaped workpiece, such as a wafer, into small pieces such as device chips, for example, a cutting device with an annular grindstone tool called a cutting blade attached to a spindle, which is the rotation axis, is used. used. By rotating the cutting blade at high speed and cutting into the workpiece along the dividing line, the workpiece can be cut and divided into a plurality of small pieces.

The structure of cutting blades is roughly divided into a hub type in which an annular cutting blade is fixed to a base, and a washer type (hubless type) consisting of only an annular cutting blade (for example, see Patent Document 1). ). When this washer-type cutting blade is attached to a spindle, for example, a mount flange having a cylindrical boss portion and a holding flange having an opening corresponding to the boss portion are used. The mounting procedure is, for example, as follows.

First, fix the mount flange to the tip of the spindle. Next, the cutting blade and the holding flange are attached to the mount flange in this order so that the boss portion is inserted into the opening of the cutting blade and the opening of the holding flange. Then, a fixing nut is fastened to the boss portion, and the cutting blade is fixed so as to be sandwiched between the holding flange and the mount flange.

Japanese Patent Application Publication No. 2013-99799

By the way, the rigidity of the holding flange is lower than that of the mount flange, so if force is applied to the holding flange when fastening the fixing nut to the boss, the holding flange will be deformed and the cutting blade will warp. This warping of the cutting blade becomes even greater when the spindle rotates and centrifugal force is applied to each part. If the cutting blade warps too much, it is not possible to maintain sufficiently high machining accuracy.

The present invention has been made in view of these problems, and its objectives are to provide a cutting blade that can maintain high machining accuracy, a cutting blade mounting method used when mounting this cutting blade on a spindle, Another object of the present invention is to provide a method for processing a workpiece using this cutting blade.

According to one aspect of the present invention, the device is mounted on the spindle so as to be sandwiched between a first flange fixed to the spindle and a second flange corresponding to the first flange, and used when processing a workpiece. a cutting blade, a first surface that contacts the first flange when mounted on the spindle; and a cutting blade that is located on the opposite side of the first surface and contacts the second flange when mounted on the spindle. an annular cutting edge portion having a second surface that rotates, and a mark portion provided on the cutting edge portion, and a radially outer portion of the cutting edge portion is attached to the spindle and does not rotate. The mark portion is curved in a direction from the second surface toward the first surface in the state , and the amount of curvature is smaller than a predetermined threshold value when the mark portion is mounted on the spindle and rotated. , a cutting blade is provided in which the first surface and the second surface are disposed in a distinguishable manner.

According to another aspect of the present invention, there is provided a cutting blade mounting method used when mounting the above-mentioned cutting blade on the spindle, the first surface of the cutting blade being brought into contact with the first flange. a blade attachment step of attaching the cutting blade to the first flange; a fixing step of fixing the second flange to the first flange so that the cutting blade is sandwiched and fixed between the first flange and the second flange. A method of mounting a cutting blade is provided.

According to still another aspect of the present invention, there is provided a method for processing a workpiece, which is used when processing the workpiece using the cutting blade described above, wherein the first surface of the cutting blade is a blade attachment step of attaching the cutting blade to the first flange so as to contact the first flange; and attaching the second flange to the second side of the cutting blade attached to the first flange. a flange attachment step of attaching a second flange to the first flange; fixing the second flange to the first flange so that the cutting blade is sandwiched and fixed between the first flange and the second flange; A workpiece comprising: a fixing step; and a machining step of machining the workpiece by rotating the cutting blade fixed by the first flange and the second flange to cut into the workpiece. A method for processing an object is provided.

A cutting blade according to one aspect of the present invention includes an annular cutting edge portion having a first surface in contact with a first flange and a second surface opposite to the first surface, and the cutting blade portion has a radial direction. The outer portion is curved toward a first flange that contacts the first surface. Therefore, when the radially outer portion of the cutting edge curves toward the second flange due to deformation of the second flange, the curvature toward the second flange cancels the curvature toward the first flange. , the flatness of the cutting edge becomes higher. This makes it possible to maintain high machining accuracy.

Further, the cutting blade according to one aspect of the present invention includes a mark portion provided on the cutting blade portion in a manner that allows the first surface and the second surface to be distinguished. Therefore, the direction of the cutting blade can be easily determined based on the mark portion. In other words, there is no need to use special instruments or methods to determine the direction of curvature of the cutting edge.

It is a perspective view showing an example of composition of a cutting device. It is an exploded perspective view showing an example of composition of a cutting unit. FIG. 3(A) is a side view showing an example of the structure of the cutting blade, and FIG. 3(B) is a sectional view showing an example of the structure of the cutting blade. FIG. 4(A) is a front view showing a cutting blade attached to a spindle, and FIG. 4(B) is a front view showing how a workpiece is being machined.

Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view showing a configuration example of a cutting device 2 according to this embodiment. Note that in FIG. 1, some of the components are shown as functional blocks. In addition, the X-axis direction (back-and-forth direction, processing feed direction), Y-axis direction (left-right direction, indexing feed direction), and Z-axis direction (height direction, cutting feed direction) used in the following explanation are perpendicular to each other. be.

As shown in FIG. 1, the cutting device 2 includes a base 4 that supports each component. An opening 4a is formed in the front corner of the upper surface of the base 4, and a cassette elevator 6 that is raised and lowered by a lifting mechanism (not shown) is disposed within the opening 4a. A cassette 8 that can accommodate a plurality of workpieces 11 is placed on the upper surface of the cassette elevator 6. Note that in FIG. 1, only the outline of the cassette 8 is shown for convenience of explanation.

The workpiece 11 is, for example, a disk-shaped wafer formed using a semiconductor material such as silicon (Si). The surface side of the workpiece 11 is divided into a plurality of small regions by a plurality of processing lines (streets) that intersect with each other, and a device such as an IC (Integrated Circuit) is formed in each small region. There is.

A dicing tape 13 having a larger diameter than the workpiece 11 is attached to the back side of the workpiece 11 . Furthermore, an annular frame 15 having a generally circular opening is fixed to the outer peripheral portion of the dicing tape 13. That is, the workpiece 11 is supported by the frame 15 via the dicing tape 13.

In this embodiment, the workpiece 11 is a disk-shaped wafer made of silicon or the like, but there are no restrictions on the material, shape, structure, size, etc. of the workpiece 11. For example, a substrate made of other materials such as semiconductors, ceramics, resins, metals, etc. can also be used as the workpiece 11. Similarly, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of devices. The workpiece 11 does not need to have a device formed thereon. Further, the dicing tape 13 may be attached to the back side of the workpiece 11.

A rectangular opening 4b that is long in the X-axis direction is formed on the side of the cassette elevator 6. A first moving mechanism (processing feed mechanism) 10 that moves an X-axis moving table (not shown) in the X-axis direction is arranged within the opening 4b. A table cover 10a is arranged above the X-axis moving table. Moreover, bellows-shaped dust-proof and drip-proof covers 10b are attached to the front and rear of the table cover 10a. The table cover 10a and the dust-proof and drip-proof cover 10b cover the upper part of the opening 4b.

A chuck table 12 that holds the workpiece 11 during machining is provided above the X-axis moving table in such a manner that it is exposed from the table cover 10a. The chuck table 12 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis that is generally parallel to the Z-axis direction (vertical direction). Further, the chuck table 12 is moved in the X-axis direction together with the X-axis moving table by the first moving mechanism 10 described above (processing feed).

A part of the upper surface of the chuck table 12 is a holding surface 12a for holding the workpiece 11. The holding surface 12a is formed approximately parallel to the X-axis direction and the Y-axis direction, and is connected to a suction source (not shown) through a suction path (not shown) provided inside the chuck table 12. has been done. Additionally, four clamps 14 are provided around the chuck table 12 to which an annular frame 15 that supports the workpiece 11 can be fixed.

A transport unit (not shown) for transporting the workpiece 11 (frame 15) described above to the chuck table 12 and the like is arranged above the opening 4b. The workpiece 11 transported by the transport unit is placed on the holding surface 12a of the chuck table 12, for example, so that the front side is exposed upward.

A cantilever-shaped support structure 20 is arranged on the side of the opening 4b. A second moving mechanism (index feed mechanism, incision feed mechanism) 22 is arranged at the upper part of the front surface of the support structure 20. The second moving mechanism 22 includes a pair of Y-axis guide rails 24 that are fixed to the front surface of the support structure 20 and are generally parallel to the Y-axis direction. A Y-axis moving plate 26 that constitutes the second moving mechanism 22 is attached to the Y-axis guide rail 24 in a slidable manner.

A nut portion (not shown) is provided on the back side (rear side) of the Y-axis moving plate 26. A Y-axis ball screw 28, which is generally parallel to the Y-axis guide rail 24, is rotatably connected to this nut portion. A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 28 . When the Y-axis ball screw 28 is rotated by the Y-axis pulse motor, the Y-axis moving plate 26 moves in the Y-axis direction along the Y-axis guide rail 24.

A pair of Z-axis guide rails 30 that are generally parallel to the Z-axis direction are fixed to the surface (front surface) of the Y-axis moving plate 26 . A Z-axis moving plate 32 is slidably attached to the Z-axis guide rail 30. A nut portion (not shown) is provided on the back side (rear side) of the Z-axis moving plate 32.

A Z-axis ball screw 34, which is generally parallel to the Z-axis guide rail 30, is rotatably connected to this nut portion. A Z-axis pulse motor 36 is connected to one end of the Z-axis ball screw 34 . When the Z-axis ball screw 34 is rotated by the Z-axis pulse motor 36, the Z-axis moving plate 32 moves in the Z-axis direction along the Z-axis guide rail 30.

A cutting unit 38 used when processing the workpiece 11 is arranged below the Z-axis moving plate 32. FIG. 2 is an exploded perspective view showing an example of the configuration of the cutting unit 38. The cutting unit 38 includes a spindle housing 40 having a cylindrical shape. As shown in FIG. 2, the space inside the spindle housing 40 accommodates a spindle 42 that serves as a rotating shaft that is generally parallel to the Y-axis direction.

A tip (one end) 42 a of the spindle 42 is exposed to the outside of the spindle housing 40 . Further, the tip end 42a of the spindle 42 is formed with an opening 42b having a thread on the inner circumferential surface. On the other hand, a rotational drive source (not shown) such as a motor is connected to the base end (other end) of the spindle 42 .

A mount flange (first flange) 44 made of metal such as stainless steel is attached to the tip 42a of the spindle 42. The mount flange 44 includes a cylindrical boss portion 46 and a disk-shaped flange portion 48 that projects radially outward from the base end portion of the boss portion 46 . An opening (not shown) into which the tip 42a of the spindle 42 is inserted is formed in the center of the flange portion 48. Furthermore, an opening 46 a that communicates with the opening of the flange portion 48 is formed in the center of the boss portion 46 .

Therefore, by inserting the tip 42a of the spindle 42 into the opening of the flange 48 and tightening the fixing bolt 50 into the opening 42b of the tip 42a through the opening 46a of the boss 46, the mount flange 44 is attached to the spindle 42. Fixed. By fixing the mount flange 44 to the spindle 42, the mount flange 44 can be rotated together with the spindle 42.

A washer type (hubless type) cutting blade 52 is attached to the mount flange 44 from the tip of the boss portion 46 . FIG. 3(A) is a side view showing an example of the configuration of the cutting blade 52, and FIG. 3(B) is a sectional view showing an example of the configuration of the cutting blade 52. The cutting blade 52 includes an annular cutting edge portion 54 and a mark portion 56 provided on the cutting edge portion 54.

The cutting edge portion 54 is formed by fixing abrasive grains such as diamond with a binder such as ceramics, resin, metal, etc., and has a first surface 54a disposed on the mount flange 44 (flange portion 48) side. , and a second surface 54b opposite to the first surface 54a. A circular opening 54c large enough to insert the boss 46 is provided in the center of the cutting edge 54. The cutting blade 52 is attached to the mount flange 44 so that the boss portion 46 is inserted into the opening 54c.

Note that the diameter of the proximal end 46b of the boss 46 is larger than the diameter of the distal end 46c of the boss 46. Specifically, the diameter of the base end side 46b is approximately the same as the diameter of the opening 54c of the cutting blade 52, or slightly smaller than the diameter of the opening 54c. Therefore, when the proximal end 46b is inserted into the opening 54c of the cutting blade 52, the cutting blade 52 is placed at a predetermined position in the radial direction determined by the proximal end 46b.

Further, when the cutting blade 52 is attached to the mount flange 44 as described above, the first surface 54a of the cutting blade 52 comes into contact with the support surface 48a provided on the boss portion 46 side of the flange portion 48. The support surface 48a is formed in a generally flat annular shape so as to be able to support the cutting blade 52 over its entire circumference.

With the cutting blade 52 attached to the mount flange 44, a holding flange (second flange) 58 made of metal such as stainless steel is attached to the mount flange 44 from the tip of the boss portion 46. The holding flange 58 is formed into a disk shape with a circular opening 58a in the center large enough to insert the boss portion 46, and is attached to the mount flange 44 so that the boss portion 46 is inserted into the opening 58a. It will be done.

When the holding flange 58 is attached to the mount flange 44, a support surface (not shown) provided on the cutting blade 52 side of the holding flange 58 comes into contact with the second surface 54b of the cutting blade 52. The support surface of the holding flange 58 on the side of the cutting blade 52 is formed into a generally flat annular shape so that the cutting blade 52 can be supported over the entire circumference.

With the cutting blade 52 and the holding flange 58 attached to the mount flange 44, a fixing nut 60 is attached to the boss portion 46 of the mount flange 44. A thread is formed on the outer peripheral surface of the tip of the boss portion 46, and the nut 60 is formed with an opening 60a having a thread on the inner peripheral surface that corresponds to the thread of the boss portion 46. .

Therefore, the holding flange 58 can be fixed to the mount flange 44 by tightening the nut 60 onto the boss portion 46. As a result, the cutting blade 52 is fixed so as to be sandwiched between the holding flange 58 and the mount flange 44. This allows the cutting blade 52 to rotate together with the spindle 42.

As shown in FIG. 1, a camera 62 is fixed to the lower part of the Z-axis moving plate 32, which is used to take an image of the workpiece 11 etc. held by the chuck table 12. When the second moving mechanism 22 moves the Y-axis moving plate 26 in the Y-axis direction, the cutting unit 38 and camera 62 move in the Y-axis direction (indexing feed). Furthermore, when the second moving mechanism 22 moves the Z-axis moving plate 32 in the Z-axis direction, the cutting unit 38 and camera 62 move in the Z-axis direction.

An opening 4c is formed at a position opposite to the opening 4a with respect to the opening 4b. A cleaning unit 64 for cleaning the processed workpiece 11 and the like is arranged inside the opening 4c. A control unit 66 is connected to components such as the cassette elevator 6, the first moving mechanism 10, the chuck table 12, the second moving mechanism 22, the cutting unit 38, the camera 62, and the cleaning unit 64. The control unit 66 controls each component of the cutting device 2 according to the conditions when processing the workpiece 11, for example.

By the way, the rigidity of the holding flange 58 is lower than that of the mount flange 44, and when force is applied to the holding flange 58 when fastening the fixing nut 60 to the boss portion 46, the holding flange 58 deforms and the cutting blade The cutting edge portion 54 of 52 is warped. With the cutting blade 52 warped in this way, it is not possible to maintain sufficiently high machining accuracy.

For example, when the fixing nut 60 is tightened onto the boss portion 46, a force acts on the center portion of the presser flange 58 in a direction that presses the center portion of the presser flange 58 against the mount flange 44. Therefore, the holding flange 58 is slightly deformed such that the radially outer region of the support surface is separated from the second surface 54b of the cutting blade 52.

As a result, the radially inner portion A of the cutting edge 54 is supported by the support surface of the presser flange 58, but the radially outer portion B of the cutting edge 54 is sufficiently supported by the support surface of the presser flange 58. will no longer be supported. Then, the radially outer portion B of the cutting edge portion 54 warps toward the holding flange 58. In other words, the radially outer portion B of the cutting edge portion 54 is warped in the direction from the first surface 54a toward the second surface 54b.

Therefore, in this embodiment, as shown in FIG. 3(B), the radially outer portion B of the cutting edge portion 54 is curved in advance toward the mount flange 44 that contacts the first surface 54a. put. That is, the radially outer portion B of the cutting edge portion 54 is curved in the direction from the second surface 54b toward the first surface 54a.

As a result, when the radially outer portion B of the cutting edge 54 curves toward the retainer flange 58 due to deformation of the retainer flange 58, the warpage toward the retainer flange 58 causes the curve toward the mount flange 44. This cancels out the flatness of the cutting edge 54. Therefore, by using this cutting blade 52, it becomes possible to maintain high machining accuracy.

Note that the warpage of the cutting edge portion 54 of the cutting blade 52 becomes even larger when the spindle 42 rotates and centrifugal force acts on each portion. Therefore, it is desirable that the radially outer portion B of the cutting edge 54 be slightly curved toward the mount flange 44 when the cutting edge 54 is attached to the spindle 42 and is not rotating. . On the other hand, in a state where the spindle 42 rotates and centrifugal force acts on each part, it is desirable that the flatness of the cutting edge part 54 is sufficiently high.

Therefore, in this embodiment, when the cutting blade part 54 of the cutting blade 52 is mounted on the spindle 42 so as to be sandwiched between the mount flange 44 and the holding flange 58 and is not rotating, the radially outer side of the cutting blade part 54 is The amount of curvature of the cutting edge 54 when it is not attached to the spindle 42 is adjusted so that the portion B of the cutting edge 54 curves toward the mount flange 44.

In the present embodiment, when the cutting blade 52 is mounted on the spindle 42 and rotated so as to be sandwiched between the mount flange 44 and the holding flange 58, the radially outer portion of the cutting blade 54 is The amount of curvature of the cutting edge portion 54 when it is not attached to the spindle 42 is adjusted so that the amount of curvature of B is smaller than a predetermined threshold value.

The amount of curvature (warpage) of the cutting edge portion 54 is, for example, the distance between the tangential plane in a region corresponding to the inner portion A of the second surface 54b and the region corresponding to the outer portion B of the second surface 54b. It can be expressed as Similarly, the amount of curvature of the cutting edge 54 is expressed as the distance between the tangential plane in a region corresponding to the inner portion A of the first surface 54a and the region corresponding to the outer portion B of the first surface 54a. It's okay.

For example, if the amount of curvature of the cutting edge portion 54 during machining is smaller than 1 μm (that is, the predetermined threshold value is 1 μm), it is considered that the machining accuracy can be maintained sufficiently high. Therefore, consider a condition in which the amount of curvature of the cutting edge 54 is smaller than 1 μm when the spindle 42 is rotated at a rotation speed of about 10,000 rpm to 30,000 rpm, which is suitable for processing the workpiece 11.

In order to satisfy this condition, for example, when the cutting edge 54 is attached to the spindle 42 and not rotating, the amount of curvature of the outer portion B of the cutting edge 54 in the direction toward the mount flange 44 must be 1 μm. The thickness should be approximately 10 μm. Further, for example, when the cutting edge 54 is not attached to the spindle 42, the amount of curvature of the portion B of the cutting edge 54 toward the mount flange 44 may be set to about 30 μm to 70 μm.

The cutting blade 52 that satisfies these conditions can be realized, for example, by adjusting conditions such as the shape of the mold, heating temperature, and pressure when firing the cutting blade portion 54. However, the above-mentioned conditions are merely examples, and the cutting blade according to the present invention does not necessarily have to satisfy these conditions.

In this embodiment, a mark portion 56 is provided on the second surface 54b of the cutting edge portion 54 so that the first surface 54a and the second surface 54b can be distinguished. Therefore, the orientation of the cutting blade 52 can be easily determined based on the mark portion 56. In other words, there is no need to use special instruments or methods to determine the direction of curvature of the cutting edge 54.

The mark portion 56 is formed on the second surface 54b of the cutting edge portion 54, for example, by applying paint. However, the mark portion 56 may be formed on the first surface 54a of the cutting edge portion 54. Further, there are no particular restrictions on the method of forming the mark portion 56 or the form of the mark portion 56. For example, an uneven structure may be formed on the first surface 54a or the second surface 54b of the cutting edge portion 54, and this may be used as the mark portion 56.

Next, a method of mounting the cutting blade 52 on the spindle 42 and a method of processing a workpiece including this method of mounting the cutting blade will be described. FIG. 4(A) is a front view showing a state in which the cutting blade 52 is attached to the spindle 42. When mounting the cutting blade 52 on the spindle 42, the cutting blade 52 is first mounted on the mount flange 44 (blade mounting step).

Specifically, the cutting blade 52 is attached to the mount flange 44 so that the first surface 54a of the cutting blade 52 is brought into contact with the support surface 48a of the mount flange 44. Note that since a mark portion 56 is provided on the cutting edge portion 54 of the cutting blade 52, the orientation of the cutting blade 52 can be easily confirmed based on the mark portion 56.

Next, the holding flange 58 is attached to the mount flange 44 (flange attaching step). Specifically, the presser flange 58 is attached to the mount flange 44 so that the support surface of the presser flange 58 is brought into contact with the second surface 54b of the cutting blade 52 attached to the mount flange 44.

After that, the holding flange 58 is fixed to the mount flange 44 (fixing step). Specifically, the nut 60 is fastened to the boss portion 46 of the mount flange 44 . Thereby, the cutting blade 52 is fixed so as to be sandwiched between the mount flange 44 and the holding flange 58.

As described above, in this embodiment, when the cutting blade 52 is mounted on the spindle 42 so as to be sandwiched between the mount flange 44 and the holding flange 58 and is not rotating, the diameter of the cutting blade 54 is The amount of curvature of the cutting edge portion 54 when it is not attached to the spindle 42 is adjusted so that the outer portion B of the direction is curved toward the mount flange 44. Therefore, as shown in FIG. 4(A), even after being mounted on the spindle 42, the cutting edge portion 54 does not become completely flat.

After the cutting blade 52 is mounted on the spindle 42 using such a cutting blade mounting method, the workpiece 11 is machined using the cutting blade 52. First, the workpiece 11 is held on the chuck table 12 (holding step). Specifically, for example, the workpiece 11 is placed on the holding surface 12a of the chuck table 12 so that the front side is exposed upward, and the negative pressure of the suction source is applied to the holding surface 12a. At the same time, an annular frame 15 is fixed with a clamp 14.

After the workpiece 11 is held on the chuck table 12, the cutting blade 52 fixed by the mount flange 44 and the holding flange 58 is rotated to cut into the workpiece 11 on the chuck table 12 (processing step ). FIG. 4(B) is a front view showing how the workpiece 11 is being processed.

In this embodiment, when the cutting blade 52 is mounted on the spindle 42 and rotated so as to be sandwiched between the mount flange 44 and the holding flange 58, the radially outer portion B of the cutting blade 54 is rotated. The amount of curvature of the cutting blade 54 when not attached to the spindle 42 is adjusted so that the amount of curvature is smaller than a predetermined threshold. Therefore, as shown in FIG. 4(B), when the spindle 42 is rotated, the cutting blade 52 becomes sufficiently flat due to the action of centrifugal force.

That is, by relatively moving the chuck table 12 and the cutting unit 38 and causing the cutting blade 52 to cut into the workpiece 11, the workpiece 11 can be processed with high accuracy. Although FIG. 4B shows an example of cutting the workpiece 11 using the cutting blade 52, the cutting blade 52 may also be used to form grooves or the like in the workpiece 11.

As described above, the cutting blade 52 according to the present embodiment is an annular cutting blade having a first surface 54a that contacts the mount flange (first flange) 44 and a second surface 54b opposite to the first surface 54a. A radially outer portion B of the cutting edge portion 54 is curved toward the mount flange 44 that contacts the first surface 54a. Therefore, when the radially outer portion B of the cutting edge 54 warps toward the holding flange 58 due to deformation of the holding flange (second flange) 58, etc., the curvature toward the holding flange 58 causes the mount flange 44 to warp toward the holding flange 58. The flatness of the cutting edge portion 54 is increased by canceling out the curvature toward . This makes it possible to maintain high machining accuracy.

Further, the cutting blade 52 according to the present embodiment includes a mark portion 56 provided on the cutting edge portion 54 in such a manner that the first surface 54a and the second surface 54b can be distinguished. Therefore, the orientation of the cutting blade 52 can be easily determined based on the mark portion 56. In other words, there is no need to use special instruments or methods to determine the direction of curvature of the cutting edge 54.

Note that the structures, methods, etc. according to the embodiments and modifications described above can be modified and implemented as desired without departing from the scope of the objective of the present invention.

2: Cutting device 4: Base 4a: Opening 4b: Opening 4c: Opening 6: Cassette elevator 8: Cassette 10: First moving mechanism (processing feed mechanism)
10a: Table cover 10b: Dust-proof and drip-proof cover 12: Chuck table 12a: Holding surface 14: Clamp 20: Support structure 22: Second movement mechanism (index feed mechanism, incision feed mechanism)
24: Y-axis guide rail 26: Y-axis moving plate 28: Y-axis ball screw 30: Z-axis guide rail 32: Z-axis moving plate 34: Z-axis ball screw 36: Z-axis pulse motor 38: Cutting unit 40: Spindle housing 42: Spindle 42a: Tip (one end)
42b: Opening 44: Mount flange (first flange)
46: Boss portion 46a: Opening 46b: Base end side 46c: Tip side 48: Flange portion 48a: Support surface 50: Bolt 52: Cutting blade 54: Cutting blade portion 54a: First surface 54b: Second surface 54c: Opening 56 : Mark part 58 : Holding flange (second flange)
58a: Opening 60: Nut 60a: Opening 62: Camera 64: Cleaning unit 66: Control unit 11: Workpiece 13: Dicing tape 15: Frame A: Inner part B: Outer part

Claims (3)

A cutting blade mounted on the spindle so as to be sandwiched between a first flange fixed to the spindle and a second flange corresponding to the first flange, and used when processing a workpiece,
It has a first surface that contacts the first flange when mounted on the spindle, and a second surface that is opposite to the first surface and contacts the second flange when mounted on the spindle. an annular cutting edge;
A mark portion provided on the cutting edge portion,
The radially outer portion of the cutting edge is curved in a direction from the second surface toward the first surface when mounted on the spindle and not rotating , and when mounted on the spindle and rotated. configured such that the amount of curvature is less than a predetermined threshold ;
A cutting blade characterized in that the mark portion is provided in such a manner that the first surface and the second surface can be distinguished. A cutting blade mounting method used when mounting the cutting blade according to claim 1 on the spindle, comprising:
a blade attachment step of attaching the cutting blade to the first flange so that the first surface of the cutting blade contacts the first flange;
a flange attachment step of attaching the second flange to the first flange so that the second flange contacts the second surface of the cutting blade attached to the first flange;
A fixing step of fixing the second flange to the first flange so that the cutting blade is sandwiched and fixed between the first flange and the second flange. Method. A method for processing a workpiece, which is used when processing the workpiece using the cutting blade according to claim 1 ,
a blade attachment step of attaching the cutting blade to the first flange so that the first surface of the cutting blade contacts the first flange;
a flange attachment step of attaching the second flange to the first flange so that the second flange contacts the second surface of the cutting blade attached to the first flange;
a fixing step of fixing the second flange to the first flange so that the cutting blade is sandwiched and fixed between the first flange and the second flange;
A processing step of machining the workpiece by rotating the cutting blade fixed by the first flange and the second flange to cut into the workpiece. How to process the workpiece.