JP7312235B2 - Organic film forming apparatus and cleaning method for organic film forming apparatus - Google Patents

Description

TECHNICAL FIELD Embodiments of the present invention relate to an organic film forming apparatus and a cleaning method for the organic film forming apparatus.

An organic film forming apparatus includes, for example, a chamber capable of maintaining an atmosphere pressure-reduced below atmospheric pressure, and a heater provided inside the chamber to heat a workpiece. Such an organic film forming apparatus heats a substrate coated with a solution containing an organic material and a solvent in an atmosphere whose pressure is reduced below atmospheric pressure to evaporate the solvent contained in the solution, thereby forming an organic film. to form (See Patent Document 1, for example)
Here, when the solution is heated, substances contained in the solution may sublimate (vaporize). The components contained in the sublimate may solidify and adhere to the inner wall of the chamber whose temperature is lower than that of the heated workpiece. If the solid adhering to the inner wall of the chamber or the like peels off from the inner wall or the like of the chamber, there is a risk that it will turn into foreign matter such as particles and adhere to the surface of the workpiece.

Therefore, cleaning is performed periodically or as needed to remove solid matter adhering to the inner wall of the chamber. For example, in a technical field different from an organic film forming apparatus, such as a semiconductor manufacturing apparatus, in a state in which the chamber is sealed, the inside of the chamber is exhausted and the cleaning gas is supplied to the inside of the chamber sequentially. , a technique for discharging foreign matter inside the chamber has been proposed. (See Patent Document 2)
However, in the organic film forming apparatus, cleaning (for example, cleaning in which the inside of the chamber is exhausted and the cleaning gas is supplied to the inside of the chamber in a sealed state in sequence) like the semiconductor manufacturing apparatus is performed. It was found that the foreign matter could not be sufficiently removed even if the cleaning process was carried out.
Therefore, development of an organic film forming apparatus and a cleaning method of the organic film forming apparatus capable of sufficiently removing foreign matter such as particles in the chamber has been desired.

JP 2019-184229 A Japanese Patent Application Laid-Open No. 2002-184708

The problem to be solved by the present invention is to provide an organic film forming apparatus and a cleaning method for the organic film forming apparatus that can sufficiently remove foreign substances in the chamber.

An organic film forming apparatus according to an embodiment includes a chamber having an opening for loading or unloading a workpiece and capable of maintaining an atmosphere reduced to a pressure lower than atmospheric pressure; a door capable of opening and closing the opening of the chamber;
an exhaust section capable of evacuating the interior of the chamber; a support section provided inside the chamber capable of supporting the workpiece; a heating section provided inside the chamber capable of heating the workpiece; at least one nozzle provided inside the chamber and capable of supplying a cleaning gas toward the opening of the chamber; and a gas control unit connected to the nozzle and capable of controlling supply and stop of the supply of the cleaning gas. and a controller capable of controlling the gas control unit, wherein the controller controls the gas control unit to direct gas from the nozzle toward the opening of the chamber when the opening of the chamber is open. The cleaning gas is allowed to flow .

According to the embodiments of the present invention, an organic film forming apparatus and a cleaning method for the organic film forming apparatus are provided, which can sufficiently remove foreign matter inside the chamber.

1 is a schematic perspective view for illustrating an organic film forming apparatus according to an embodiment; FIG. 5 is a graph for illustrating the work processing process; 4A and 4B are schematic cross-sectional views for illustrating the action of the cleaning unit; FIG. 5 is a graph showing a case where particle discharge by the exhaust section and particle discharge by the cleaning section are combined. It is a graph when only particles are discharged by the cleaning unit. It is a graph when only particles are discharged by the cleaning unit. FIG. 10 is a schematic cross-sectional view for illustrating a cleaning unit according to another embodiment; FIG. 10 is a schematic cross-sectional view for illustrating a cleaning unit according to another embodiment; It is a schematic perspective view for illustrating the organic film forming apparatus which concerns on other embodiment. FIG. 10 is a schematic cross-sectional view for illustrating a cleaning unit according to another embodiment; It is a schematic perspective view for illustrating the organic film forming apparatus which concerns on other embodiment. FIG. 10 is a schematic cross-sectional view for illustrating a cleaning unit according to another embodiment;

Hereinafter, embodiments will be illustrated with reference to the drawings. In addition, in each drawing, the same reference numerals are given to the same constituent elements, and detailed description thereof will be omitted as appropriate.

FIG. 1 is a schematic perspective view for illustrating an organic film forming apparatus 1 according to this embodiment.
Note that the X direction, Y direction, and Z direction in FIG. 1 represent three directions orthogonal to each other. The vertical direction in this specification can be the Z direction.

A workpiece 100 before forming an organic film has a substrate and a solution applied to the upper surface of the substrate.
The substrate can be, for example, a glass substrate, a semiconductor wafer, or the like. However, the substrate is not limited to those illustrated.
A solution includes, for example, an organic material and a solvent. The organic material is not particularly limited as long as it can be dissolved by a solvent. The solution can be, for example, a varnish containing polyamic acid. However, the solution is not limited to the exemplified one.

As shown in FIG. 1, the organic film forming apparatus 1 is provided with a chamber 10, an exhaust section 20, a processing section 30, a cooling section 40, a cleaning section 50, and a controller 60, for example.

The controller 60 includes, for example, an arithmetic unit such as a CPU (Central Processing Unit) and a storage unit such as a memory. The controller 60 can be, for example, a computer or the like. The controller 60 controls the operation of each element provided in the organic film forming apparatus 1 based on the control program stored in the storage unit.

The chamber 10 has an airtight structure capable of maintaining an atmosphere pressure-reduced below atmospheric pressure. The chamber 10 has a box shape. The external shape of the chamber 10 is not particularly limited. The external shape of the chamber 10 can be, for example, a rectangular parallelepiped. The chamber 10 can be made of metal such as stainless steel, for example.

In the Y direction, one end of the chamber 10 may be provided with a flange 11 . The flange 11 may be provided with a sealing material 12 such as an O-ring. The opening 11 a of the chamber 10 on the side where the flange 11 is provided can be opened and closed by a door 13 . A driving device (not shown) presses the door 13 against the flange 11 (sealing material 12) to close the opening 11a of the chamber 10 in an airtight manner. The opening 11a of the chamber 10 is opened by separating the door 13 from the flange 11 by a driving device (not shown), and the workpiece 100 can be carried in or out through the opening 11a. Also, by opening the opening 11a of the chamber 10, cleaning by the cleaning unit 50, which will be described later, becomes possible.
That is, the chamber 10 has an opening 11a for loading or unloading the workpiece 100, and is capable of maintaining an atmosphere that is reduced in pressure below atmospheric pressure. The door 13 can open and close the opening 11 a of the chamber 10 .

A flange 14 may be provided at the other end of the chamber 10 in the Y direction. The flange 14 may be provided with a sealing material 12 such as an O-ring. The opening of the chamber 10 on the side where the flange 14 is provided can be opened and closed with a lid 15 . For example, the lid 15 can be detachably attached to the flange 14 using fastening members such as screws. When performing maintenance or the like, the lid 15 is removed to expose the opening of the chamber 10 on the side where the flange 14 is provided.

A cooling unit 16 can be provided on the outer wall of the chamber 10 and the outer surface of the door 13 . A cooling water supply unit (not shown) is connected to the cooling unit 16 . The cooling unit 16 can be, for example, a water jacket. If the cooling unit 16 is provided, it is possible to prevent the temperature of the outer wall of the chamber 10 and the temperature of the outer surface of the door 13 from becoming higher than a predetermined temperature.

The exhaust part 20 exhausts the inside of the chamber 10 . The exhaust section 20 has, for example, a first exhaust section 21 , a second exhaust section 22 and a third exhaust section 23 .
The first exhaust part 21 is connected to, for example, an exhaust port 17 provided on the bottom surface of the chamber 10 .
The first exhaust section 21 has, for example, an exhaust pump 21a and a pressure control section 21b.
The exhaust pump 21a can be an exhaust pump that performs rough evacuation from atmospheric pressure to a predetermined pressure. Therefore, the exhaust pump 21a has a larger displacement than the later-described exhaust pump 22a. The exhaust pump 21a can be, for example, a dry vacuum pump.

The pressure controller 21b is provided, for example, between the exhaust port 17 and the exhaust pump 21a. The pressure control unit 21b controls the internal pressure of the chamber 10 to a predetermined pressure based on the output of a vacuum gauge (not shown) that detects the internal pressure of the chamber 10 . The pressure control unit 21b can be, for example, an APC (Auto Pressure Controller).

A cold trap 24 for trapping the exhausted sublimate is provided between the exhaust port 17 and the pressure control section 21b. A valve 25 is provided between the exhaust port 17 and the cold trap 24 . The valve 25 serves to prevent fluid from entering the cold trap 24 during the cooling process described below.

The second exhaust part 22 is connected to, for example, an exhaust port 18 provided on the bottom surface of the chamber 10 .
The second exhaust section 22 has, for example, an exhaust pump 22a and a pressure control section 22b.
After the rough evacuation by the exhaust pump 21a, the exhaust pump 22a evacuates to a predetermined lower pressure. The evacuation pump 22a has, for example, an evacuation capability capable of evacuating to a high-vacuum molecular flow region. For example, the exhaust pump 22a can be a turbo molecular pump (TMP) or the like.

The pressure control section 22b is provided, for example, between the exhaust port 18 and the exhaust pump 22a. The pressure controller 22b controls the internal pressure of the chamber 10 to a predetermined pressure based on the output of a vacuum gauge (not shown) that detects the internal pressure of the chamber 10 . The pressure control unit 22b can be, for example, an APC. A cold trap 24 and a valve 25 can be provided between the exhaust port 18 and the pressure control unit 21b, like the first exhaust unit 21.

In the above description, the exhaust port 17 and the exhaust port 18 are provided on the bottom surface of the chamber 10 as an example, but the exhaust port 17 and the exhaust port 18 can also be provided on the ceiling surface of the chamber 10, for example. If the exhaust port 17 and the exhaust port 18 are provided on the bottom surface or the ceiling surface of the chamber 10 , an airflow can be formed inside the chamber 10 toward the bottom surface or the ceiling surface of the chamber 10 .

Here, when the workpiece 100 coated with the solution containing the organic material and the solvent is heated, the substance contained in the solution may sublime (vaporize). The components contained in the sublimate may solidify and adhere to the inner wall of the chamber 10 whose temperature is lower than that of the heated workpiece 100 . If the solid adhering to the inner wall of the chamber 10 or the like peels off from the inner wall or the like of the chamber 10 , there is a risk that it will become foreign matter such as particles and adhere to the surface of the workpiece 100 .

In this case, if an airflow directed toward the bottom surface or the ceiling surface of the chamber 10 is formed inside the chamber 10, foreign substances such as sublimates and particles are easily discharged to the outside of the chamber 10 along with the airflow. Therefore, foreign matter such as particles can be prevented from adhering to the workpiece 100 .

The processing section 30 has, for example, a frame 31 , a heating section 32 , a support section 33 , a soaking section 34 , a soaking plate support section 35 , and a cover 36 .
Inside the processing unit 30, a processing region 30a and a processing region 30b are provided. The processing areas 30a and 30b are spaces in which the workpiece 100 is processed. A workpiece 100 is supported inside the processing areas 30a, 30b. The processing area 30b is provided above the processing area 30a. In addition, although the case where two processing areas are provided is illustrated, it is not limited to this. Only one processing area may be provided, or more than two processing areas may be provided. In this embodiment, as an example, two processing regions are provided, but one processing region and three or more processing regions can be similarly considered.

The processing regions 30 a and 30 b are provided between the heating units 32 . The processing regions 30a and 30b are surrounded by a soaking section 34 (an upper soaking plate 34a, a lower soaking plate 34b, a side soaking plate 34c, and a side soaking plate 34d).

As will be described later, the upper heat equalizer plate 34 a and the lower heat equalizer plate 34 b are formed by supporting a plurality of plate-like members by a plurality of heat equalizer support portions 35 . Therefore, the processing region 30a and the space inside the chamber 10 are connected through gaps provided between the upper heat equalizing plates 34a and between the lower heat equalizing plates 34b. Also, between the upper heat equalizer plate 34a (lower heat equalizer plate 34b) and the side heat equalizer plate 34c, and between the upper heat equalizer plate 34a (lower heat equalizer plate 34b) and the side heat equalizer plate 34d. A gap is formed. Therefore, when the pressure in the space between the inner wall of the chamber 10 and the processing section 30 is reduced, the pressure in the space inside the processing region 30a is also reduced. Note that the processing region 30b has the same structure as the processing region 30a, so the description thereof is omitted.

If the pressure in the space between the inner wall of the chamber 10 and the processing section 30 is reduced, the heat released from the processing regions 30a and 30b to the outside can be suppressed. That is, heating efficiency and heat storage efficiency can be improved. Therefore, the electric power applied to the heater 32a, which will be described later, can be reduced. Further, if the power applied to the heater 32a can be reduced, the temperature of the heater 32a can be suppressed from exceeding a predetermined temperature, so the life of the heater 32a can be lengthened.

Moreover, since the heat storage efficiency is improved, the temperature of the processing regions 30a and 30b can be raised quickly. Therefore, it is possible to cope with processing that requires a rapid temperature rise. Moreover, since it is possible to suppress the temperature of the outer wall of the chamber 10 from increasing, the cooling unit 16 can be simplified.

The frame 31 has a frame structure made of elongated plate material, shaped steel, or the like. The external shape of the frame 31 can be made similar to the external shape of the chamber 10 . The external shape of the frame 31 can be, for example, a rectangular parallelepiped.

A plurality of heating units 32 are provided. The heating units 32 can be provided below the processing regions 30a and 30b and above the processing regions 30a and 30b. The heating section 32 provided below the processing regions 30a and 30b serves as a lower heating section. The heating section 32 provided above the processing regions 30a and 30b serves as an upper heating section. The lower heating section faces the upper heating section. When a plurality of processing areas are vertically stacked, the upper heating section provided in the lower processing area can also serve as the lower heating section provided in the upper processing area.

The heating unit 32 is provided inside the chamber 10 and heats the workpiece 100 .
For example, the lower surface (back surface) of the workpiece 100 supported by the processing area 30a is heated by the heating unit 32 provided below the processing area 30a. The upper surface (surface) of the workpiece 100 supported by the processing area 30a is heated by the heating unit 32 shared by the processing areas 30a and 30b.

The lower surface (back surface) of the workpiece 100 supported by the processing area 30b is heated by the heating unit 32 shared by the processing areas 30a and 30b. The upper surface (surface) of the workpiece 100 supported by the processing area 30b is heated by the heating unit 32 provided above the processing area 30b.
By doing so, the number of heating units 32 can be reduced, so that power consumption, manufacturing cost, and space can be reduced.

Each of the plurality of heating units 32 has at least one heater 32a and a pair of holders 32b. In addition, below, the case where several heater 32a is provided is demonstrated. The heater 32a has a bar shape and extends in the Y direction between the pair of holders 32b. A plurality of heaters 32a can be arranged side by side in the X direction. A plurality of heaters 32a can be provided at regular intervals, for example. The heater 32a can be, for example, a sheathed heater, a far-infrared heater, a far-infrared lamp, a ceramic heater, a cartridge heater, or the like. Also, various heaters can be covered with a quartz cover.

In this specification, the term "rod-shaped heater" includes various heaters covered with a quartz cover. Moreover, the cross-sectional shape of the “rod” is not limited, and includes, for example, a columnar shape and a prismatic shape.
Also, the heater 32a is not limited to the illustrated one. The heater 32a may be any heater that can heat the workpiece 100 in an atmosphere that is reduced in pressure below atmospheric pressure. That is, the heater 32a may be any device that utilizes heat energy by radiation.

The specifications, number, spacing, and the like of the plurality of heaters 32a in the upper heating section and the lower heating section can be appropriately determined according to the composition of the solution to be heated (solution heating temperature), the size of the workpiece 100, and the like. The specifications, number, intervals, etc. of the plurality of heaters 32a can be appropriately determined by performing simulations, experiments, and the like.

The space in which the plurality of heaters 32a are provided is surrounded by a holder 32b, an upper heat soaking plate 34a, a lower heat soaking plate 34b, a side heat soaking plate 34c, and a side heat soaking plate 34d. A gap is provided between the upper heat equalizing plates 34a and between the lower heat equalizing plates 34b. Therefore, part of the cooling gas supplied to the space provided with the plurality of heaters 32a from the cooling unit 40, which will be described later, flows into the processing region 30a or the processing region 30b. However, the space provided with the plurality of heaters 32a can be regarded as a substantially closed space. Therefore, by supplying the cooling gas from the cooling unit 40 to the space in which the plurality of heaters 32a are provided, the plurality of heaters 32a, the upper heat soaking plate 34a, the lower heat soaking plate 34b, the side heat soaking plate 34c, and the side heat soaking plate 34c The partial heat soaking plate 34d can be cooled.

A pair of holders 32b extend in the X direction (for example, the longitudinal direction of the processing regions 30a and 30b). The pair of holders 32b are opposed to each other in the Y direction. One holder 32b is fixed to the end face of the frame 31 on the door 13 side. The other holder 32b is fixed to the end surface of the frame 31 opposite to the door 13 side. The pair of holders 32b can be fixed to the frame 31 using, for example, fastening members such as screws. A pair of holders 32b hold non-heat generating portions near the ends of the heater 32a. The pair of holders 32b can be formed, for example, from an elongated metal plate or shaped steel. Materials for the pair of holders 32b are not particularly limited, but materials having heat resistance and corrosion resistance are preferable. The material of the pair of holders 32b can be, for example, stainless steel.

The support portion 33 is provided inside the chamber 10 and supports the workpiece 100 . For example, the support section 33 supports the workpiece 100 between the upper heating section and the lower heating section. A plurality of support portions 33 can be provided. A plurality of support portions 33 are provided below the processing region 30a and below the processing region 30b. The plurality of support portions 33 can be rod-shaped bodies.

One end (upper end) of the plurality of support portions 33 contacts the lower surface (back surface) of the workpiece 100 . Therefore, the shape of one end of each of the plurality of support portions 33 is preferably hemispherical. If the shape of one end of the plurality of support portions 33 is hemispherical, it is possible to suppress damage to the lower surface of the workpiece 100 . In addition, since the contact area between the lower surface of the work 100 and the plurality of support portions 33 can be reduced, heat transmitted from the work 100 to the plurality of support portions 33 can be reduced.

Since the workpiece 100 is heated by radiation thermal energy in an atmosphere whose pressure is reduced below atmospheric pressure, the distance from the upper heating section to the upper surface of the workpiece 100 and the distance from the lower heating section to the lower surface of the workpiece 100 are The distance is such that thermal energy by radiation can reach the workpiece 100 .

The other ends (lower ends) of the plurality of support portions 33 can be fixed to, for example, a plurality of rod-shaped members or plate-shaped members that are bridged between the pair of frames 31 . In this case, it is preferable that the plurality of support portions 33 be detachably provided on a rod-shaped member or the like. In this way, work such as maintenance is facilitated.

The number, arrangement, intervals, etc., of the plurality of support portions 33 can be appropriately changed according to the size and rigidity (deflection) of the workpiece 100 .
The material of the plurality of support portions 33 is not particularly limited, but a material having heat resistance and corrosion resistance is preferable. The material of the plurality of support portions 33 can be, for example, stainless steel.

The heat soaking section 34 has a plurality of upper heat soaking plates 34a, a plurality of lower heat soaking plates 34b, a plurality of side heat soaking plates 34c, and a plurality of side heat soaking plates 34d. The plurality of upper heat soaking plates 34a, the plurality of lower heat soaking plates 34b, the plurality of side heat soaking plates 34c, and the plurality of side heat soaking plates 34d are plate-shaped.

The plurality of upper heat soaking plates 34a are provided on the lower heating section side (workpiece 100 side) in the upper heating section. The plurality of upper heat soaking plates 34a are separated from the plurality of heaters 32a. That is, gaps are provided between the upper surfaces of the plurality of upper heat equalizing plates 34a and the lower surfaces of the plurality of heaters 32a. The plurality of upper heat soaking plates 34a are arranged side by side in the X direction. A gap is provided between the plurality of upper heat equalizing plates 34a. If the gap is provided, the dimensional difference due to thermal expansion can be absorbed. Therefore, it is possible to prevent the upper heat equalizing plates 34a from interfering with each other and causing deformation. Moreover, as described above, the pressure in the spaces of the processing regions 30a and 30b can be reduced through this gap.

The plurality of lower heat equalizing plates 34b are provided on the upper heating section side (workpiece 100 side) in the lower heating section. The plurality of lower heat soaking plates 34b are separated from the plurality of heaters 32a. That is, gaps are provided between the lower surfaces of the plurality of lower heat equalizing plates 34b and the upper surfaces of the plurality of heaters 32a. A plurality of lower heat equalizing plates 34b are arranged side by side in the X direction. A gap is provided between the plurality of lower heat equalizing plates 34b. If the gap is provided, the dimensional difference due to thermal expansion can be absorbed. Therefore, it is possible to prevent the lower heat equalizing plates 34b from interfering with each other and causing deformation. Moreover, the pressure in the space of the processing regions 30a and 30b can be reduced through this gap.

The side soaking plates 34c are provided on both sides of the processing regions 30a and 30b in the X direction. The side heat equalizing plate 34 c can be provided inside the cover 36 . Further, as described above, the side heat equalizing plate 34c is provided with a gap between it and the upper heat equalizing plate 34a or the lower heat equalizing plate 34b. Via this gap, the pressure in the space of the processing regions 30a and 30b can be reduced.

The side soaking plates 34d are provided on both sides of the processing regions 30a and 30b in the Y direction. The side heat soaking plate 34d provided on the door 13 side can be provided on the door 13 with a gap from the cover 36. As shown in FIG. The side heat equalizing plate 34 d provided on the lid 15 side can be provided inside the cover 36 . Further, as described above, the side heat equalizing plate 34d is provided with a gap between it and the upper heat equalizing plate 34a or the lower heat equalizing plate 34b. Via this gap, the pressure in the space of the processing regions 30a and 30b can be reduced.

In the present embodiment, the gaps provided between the upper heat equalizer plates 34a, between the lower heat equalizer plates 34b, etc. , and between the upper heat soaking plate 34a (lower heat soaking plate 34b) and the side heat soaking plate 34d. The reason for this will be described later.

As described above, the plurality of heaters 32a are bar-shaped and arranged side by side at predetermined intervals. When the heater 32a is rod-shaped, heat is radiated radially from the central axis of the heater 32a. In this case, the shorter the distance between the center axis of the heater 32a and the heated portion, the higher the temperature of the heated portion. Therefore, when the workpiece 100 is held so as to face the plurality of heaters 32a, the area of the workpiece 100 located directly above or below the heaters 32a is either directly above or below the space between the plurality of heaters 32a. The temperature becomes higher than the area of the workpiece 100 located directly below. That is, when the workpiece 100 is directly heated using the plurality of bar-shaped heaters 32a, the temperature of the heated workpiece 100 has an in-plane distribution.

If the temperature of the workpiece 100 has an in-plane distribution, the quality of the formed organic film may deteriorate. For example, there is a possibility that bubbles will be generated in the part where the temperature is high, or the composition of the organic film will change in the part where the temperature is high.

The organic film forming apparatus 1 according to the present embodiment is provided with a plurality of upper heat soaking plates 34a and a plurality of lower heat soaking plates 34b. Therefore, the heat radiated from the plurality of heaters 32a is incident on the plurality of upper heat soaking plates 34a and the plurality of lower heat soaking plates 34b, and is radiated toward the workpiece 100 while propagating in the plane direction inside these. . As a result, the in-plane temperature distribution of the workpiece 100 can be suppressed, and the quality of the formed organic film can be improved.

Since the plurality of upper heat soaking plates 34a and the plurality of lower heat soaking plates 34b propagate incident heat in the plane direction, these materials are preferably made of materials with high thermal conductivity. The plurality of upper heat soaking plates 34a and the plurality of lower heat soaking plates 34b can be made of, for example, aluminum, copper, stainless steel, or the like. Note that when a material that is easily oxidized such as aluminum or copper is used, a layer containing a material that is not easily oxidized is preferably provided on the surface.

A portion of the heat radiated from the plurality of upper heat equalizer plates 34a and the plurality of lower heat equalizer plates 34b is directed to the sides of the processing area. Therefore, the above-described side soaking plates 34c and 34d are provided on the sides of the processing area. Part of the heat incident on the side heat soaking plates 34c and 34d is radiated toward the workpiece 100 while propagating in the plane direction of the side heat soaking plates 34c and 34d. Therefore, the heating efficiency of the workpiece 100 can be improved.

The material of the side heat equalizer plates 34c, 34d can be the same as the material of the upper heat equalizer plate 34a and the lower heat equalizer plate 34b described above.

In the above description, the case where a plurality of upper heat soaking plates 34a and a plurality of lower heat soaking plates 34b are arranged side by side in the X direction is illustrated. , can also be a single plate-like member.

A plurality of heat equalizer support portions 35 are arranged side by side in the X direction. The heat equalizer support part 35 can be provided directly under between the upper heat equalizer plates 34a in the X direction. The plurality of heat equalizer support portions 35 can be fixed to the pair of holders 32b using fastening members such as screws. A pair of heat equalizer support portions 35 detachably support both ends of the upper heat equalizer plate 34a. The plurality of heat equalizer support portions 35 that support the plurality of lower heat equalizer plates 34b can also have the same configuration.

If the upper and lower heat equalizer plates 34a and 34b are supported by the pair of heat equalizer plate support portions 35, even if the upper and lower heat equalizer plates 34a and 34b thermally expand, the upper heat equalizer plates Interference between 34a and lower heat equalizing plate 34b can be suppressed. Therefore, deformation of the upper heat soaking plate 34a and the lower heat soaking plate 34b can be suppressed.

The cover 36 has a plate shape and covers the top surface, bottom surface and side surfaces of the frame 31 . That is, the inside of the frame 31 is covered with the cover 36 . However, the cover 36 on the side of the door 13 can be provided on the door 13, for example.

Although the cover 36 surrounds the processing areas 30a and 30b, gaps are provided at the boundary between the top and side surfaces of the frame 31, the boundary between the side surfaces and the bottom surface of the frame 31, and near the door 13. FIG.

Also, the covers 36 provided on the top and bottom surfaces of the frame 31 are divided into a plurality of pieces. A gap is provided between the divided covers 36 . That is, the internal space of the processing section 30 (processing regions 30a and 30b) communicates with the internal space of the chamber 10 through these gaps. Therefore, the pressure in the processing regions 30a, 30b can be made to be the same as the pressure in the space between the inner wall of the chamber 10 and the cover 36. FIG. The cover 36 can be made of, for example, stainless steel.

The cooling unit 40 supplies cooling gas to the region where the heating unit 32 is provided. For example, the cooling unit 40 cools the soaking unit 34 surrounding the processing regions 30a and 30b with the cooling gas, and indirectly cools the workpiece 100 in a high temperature state by the cooled soaking unit 34 . Further, for example, the cooling unit 40 can supply cooling gas to the workpiece 100 to directly cool the workpiece 100 in a high temperature state.

That is, the cooling unit 40 can cool the workpiece 100 indirectly and directly. The cooling unit 40 can also serve as a cleaning unit 50 that supplies a cleaning gas G, which will be described later, to the processing regions 30a and 30b in the cleaning process, which will be described later.

The cooling unit 40 has, for example, a first gas supply path 40a and a second gas supply path 40b.
First, the first gas supply path 40a will be described. The first gas supply path 40 a has a nozzle 41 , a gas source 42 , a gas controller 43 and a switching valve 54 .

As shown in FIG. 1, the nozzle 41 can be connected to a space provided with a plurality of heaters 32a. For example, the nozzle 41 can pass through the cover 36 and be attached to the side heat soaking plate 34c, the frame 31, or the like. A plurality of nozzles 41 can be provided in the Y direction (see FIG. 3). Note that the number and arrangement of the nozzles 41 can be changed as appropriate. For example, the nozzles 41 can be provided on one side of the processing section 30 in the X direction, or can be provided on both sides of the processing section 30 .

A gas source 42 supplies cooling gas to the nozzle 41 . The gas source 42 can be, for example, a high pressure gas cylinder, factory piping, or the like. Also, a plurality of gas sources 42 can be provided.

The cooling gas is preferably a gas that hardly reacts with the heated workpiece 100 . The cooling gas can be, for example, nitrogen gas, rare gas, or the like. The rare gas is, for example, argon gas or helium gas. If the cooling gas is nitrogen gas, the running cost can be reduced. Since helium gas has a high thermal conductivity, the cooling time can be shortened by using helium gas as the cooling gas.
The temperature of the cooling gas can be, for example, room temperature (eg, 25° C.) or lower.

A gas control unit 43 is provided between the nozzle 41 and the gas source 42 . The gas control unit 43 can, for example, control at least one of the supply and stop of the cooling gas and the flow velocity and flow rate of the cooling gas.

Moreover, the supply timing of the cooling gas can be set after the heat treatment for the workpiece 100 is completed. Note that the completion of the heat treatment can be after the temperature at which the organic film is formed is maintained for a predetermined period of time.

The switching valve 54 is a valve for switching between the first gas supply path 40a and the second gas supply path 40b. The switching valve 54 is provided outside the chamber 10 between the nozzle 41 and the gas control section 43 .

Next, the second gas supply path 40b will be explained. The second gas supply path 40b is provided for cleaning the inside of the chamber 10 in a cleaning process to be described later. The second gas supply path 40 b discharges foreign matter such as particles inside the chamber 10 to the outside of the chamber 10 through the opening 11 a of the chamber 10 . For example, the second gas supply path 40b supplies the cleaning gas G inside the processing regions 30a, 30b to form an airflow toward the opening 11a of the chamber 10. FIG.

In this embodiment, the second gas supply path 40b also functions as the "cleaning section" of the invention. Hereinafter, the second gas supply path 40b may also be referred to as the cleaning section 50. As shown in FIG.

The cleaning section 50 has, for example, a nozzle 41 , a gas source 52 , a gas control section 53 and a switching valve 54 . In this case, the cleaning section 50 is connected to the first gas supply path 40a via the switching valve 54. As shown in FIG.

A gas source 52 supplies cleaning gas G to the plurality of nozzles 41 . The gas source 52 can be, for example, a high pressure gas cylinder, factory piping, or the like. Also, a plurality of gas sources 52 can be provided.

The cleaning gas G is preferably a gas that does not easily react with the heated inner wall of the chamber 10 and the elements inside the chamber 10 . The cleaning gas G can be, for example, clean dry air, nitrogen gas, carbon dioxide (CO ₂ ), rare gas, or the like. The rare gas is, for example, argon gas or helium gas. In this case, if the cleaning gas G is clean dry air or nitrogen gas, the running cost can be reduced.

The cleaning gas G can be the same as the cooling gas described above, or it can be different. If the cleaning gas G is the same as the cooling gas, either the gas source 52 or the gas source 42 can be provided.
The temperature of the cleaning gas G can be, for example, room temperature (eg, 25° C.).

The gas controller 53 is provided between the switching valve 54 and the gas source 52 . The gas control unit 53 can, for example, control the supply of the cleaning gas G and stop the supply. The gas control unit 53 can also control at least one of the flow velocity and flow rate of the cleaning gas G, for example. The flow velocity and flow rate of the cleaning gas G can be appropriately changed according to the size of the chamber 10 and the shape, number and arrangement of the nozzles 41 . The velocity and flow rate of the cleaning gas G can be appropriately obtained by, for example, conducting experiments and simulations.

Next, the operation of the organic film forming apparatus 1 will be illustrated.
FIG. 2 is a graph for illustrating the process of processing the workpiece 100. As shown in FIG.
As shown in FIG. 2, the organic film forming process includes a work loading process, a temperature raising process, a heat treatment process, a cooling process, a work unloading process, and a cleaning process.
First, in the work loading step, the opening/closing door 13 is separated from the flange 11 and the work 100 is loaded into the internal space of the chamber 10 . When the workpiece 100 is loaded into the internal space of the chamber 10, the internal space of the chamber 10 is decompressed to a predetermined pressure by the exhaust section 20. As shown in FIG.

When the internal space of the chamber 10 is depressurized to a predetermined pressure, power is applied to the heater 32a. Then, as shown in FIG. 2, the temperature of the workpiece 100 rises. A process in which the temperature of the workpiece 100 rises is called a temperature raising process. In this embodiment, the temperature raising process is performed twice (temperature raising processes (1) and (2)). The predetermined pressure may be any pressure at which the polyamic acid in the solution is not oxidized by reacting with the oxygen remaining in the internal space of the chamber 10 . The predetermined pressure may be, for example, 1×10 ⁻² to 100 Pa. In other words, it is not always necessary to evacuate with the second exhaust unit 22. After the first exhaust unit 21 starts exhausting, if the internal space of the chamber 10 has a pressure within the range of 10 to 100 Pa, , the heating of the workpiece 100 by the heating unit 32 may be started.

After the temperature raising process, a heat treatment process is performed. The heat treatment step is a step of maintaining a predetermined temperature for a predetermined time. In this embodiment, a heat treatment step (1) and a heat treatment step (2) can be provided.
The heat treatment step (1) can be, for example, a step of heating the workpiece 100 at a first temperature for a predetermined period of time and discharging moisture, gas, and the like contained in the solution. The first temperature may be, for example, 100.degree. C. to 200.degree.

By performing the heat treatment step (1), it is possible to prevent moisture and gas contained in the solution from being contained in the finished organic film. Note that the first heat treatment step can be performed a plurality of times while changing the temperature depending on the components of the solution, or the first heat treatment step can be omitted.

The heat treatment step (2) is a step of maintaining the substrate (workpiece 100) coated with the solution at a predetermined pressure and temperature for a predetermined time to form an organic film. The second temperature may be a temperature at which imidation occurs, for example, 300° C. or higher. In this embodiment, the heat treatment step (2) is performed at 400° C. to 600° C. in order to obtain an organic film with a high degree of packing of molecular chains.

The cooling step is a step of lowering the temperature of the workpiece 100 on which the organic film is formed. In this embodiment, it is performed after the heat treatment step (2). The workpiece 100 is cooled to a temperature at which it can be carried out. For example, if the temperature of the work 100 to be carried out is normal temperature, the work 100 can be carried out easily. However, in the organic film forming apparatus 1, the workpiece 100 is continuously heat-treated. Therefore, if the temperature of the work 100 is set to room temperature every time the work 100 is unloaded, the time for raising the temperature of the next work 100 will be longer. That is, there is a possibility that productivity may decrease. The temperature of the unloaded workpiece 100 may be, for example, 50.degree. C. to 90.degree. Let this carry-out temperature be the third temperature.

The controller 60 closes the valve 25 of the first exhaust section 21 . Then, by controlling the cooling unit 40 and supplying cooling gas to the space in which the plurality of heaters 32a are provided, the temperature of the workpiece 100 is lowered indirectly and directly.

Therefore, the gaps provided between the upper heat equalizer plates 34a and between the lower heat equalizer plates 34b, etc., are the gaps between the upper heat equalizer plates 34a (lower heat equalizer plates 34b) and the side heat equalizer plates 34c. , and the gap provided between the upper heat equalizer plate 34a (lower heat equalizer plate 34b) and the side heat equalizer plate 34d. By doing so, when the cooling unit 40 supplies the cooling gas, the amount of the cooling gas directed toward the workpiece 100 can be increased. Also, the amount of cooling gas exhausted from the processing regions 30a, 30b can be reduced. Therefore, the workpiece 100 can be efficiently cooled.

In addition, immediately after the organic film is formed, the internal pressure of the chamber 10 is lower than the atmospheric pressure, that is, the amount of gas inside the chamber 10 is small. Therefore, even if the cooling gas is supplied to the inside of the chamber 10, it is possible to suppress scattering of solidified components contained in the sublimate due to the supplied cooling gas.

The controller 60 closes the valve 25 of the second exhaust section 22 and opens the valve 25 of the third exhaust section 23 when the output of a vacuum gauge (not shown) that detects the internal pressure of the chamber 10 becomes the same pressure as the atmospheric pressure. , the cooling gas is constantly exhausted.

The controller 60 may control the switching valve 54 to supply the cleaning gas G to the space provided with the plurality of heaters 32a when the value detected by the thermometer (not shown) is 200° C. or less. When the cleaning gas G is CDA and the cooling gas is N2 or a rare gas, the amount of N2 or rare gas used can be reduced.

In the work unloading process, when the temperature of the work 100 with the organic film formed thereon reaches the third temperature, the supply of the cooling gas or the cleaning gas G introduced into the chamber 10 is stopped. Then, the opening/closing door 13 is separated from the flange 11, and the workpiece 100 is carried out.

As described above, when the sublimate contacts an element having a lower temperature than the heated workpiece 100, the components contained in the sublimate may solidify and adhere to the element.

However, since the upper heat soaking plate 34a and the lower heat soaking plate 34b are heated, it is possible to prevent the components contained in the sublimate from adhering to the upper heat soaking plate 34a and the lower heat soaking plate 34b. can. In addition, as described above, an air flow is formed inside the chamber 10 toward the bottom surface (or the ceiling surface) of the chamber 10 provided with the exhaust port 17 or the exhaust port 18. It is discharged out of the chamber 10 on an air current.

As described above, it was thought that the sublimate would be discharged out of the chamber 10 , so it was thought that the components contained in the sublimate could be prevented from adhering to the workpiece 100 . Therefore, conventionally, after the work 100 is carried out, the next work 100 is carried into the chamber 10, and the above steps are repeated.

However, it was found that a small amount of sublimate actually adhered to the inner wall of the chamber 10 . A small amount of sublimate adheres to the inner wall of the chamber 10 by repeating the formation process of the organic film. As a result, the solid produced from the sublimate is larger. The solids produced from the sublimate are peeled off from the inner wall of the chamber 10 when they grow to a certain size. A solid separated from the inner wall of the chamber 10 may become foreign matter such as particles and adhere to the surface of the workpiece 100 .

In general, an anti-adhesion plate is provided to prevent the sublimate from adhering to the inner wall of the chamber, and the anti-adhesion plate is replaced periodically. However, this method requires complicated replacement work. Therefore, the present inventors have studied cleaning for removing the solids generated from the sublimate from the inner wall of the chamber 10 and the like.

Next, the cleaning method of the organic film forming apparatus according to the present embodiment will be described together with the operation of the cleaning unit 50. FIG.
FIG. 3 is a schematic cross-sectional view for illustrating the action of the cleaning section 50. As shown in FIG.
To avoid complication, elements provided inside the chamber 10 are omitted from the drawing.

As shown in FIG. 3, the cleaning section 50 supplies the cleaning gas G into the chamber 10 when the opening 11a of the chamber 10 is open (when the door 13 is separated from the flange 11). For example, the controller 60 controls the gas control section 53 to flow the cleaning gas G from the nozzle 41 into the heating section 32 when the opening 11 a of the chamber 10 is open . The cleaning gas G is supplied from inside the heating part 32 into the inside of the chamber 10 .

As described above, the gaps provided between the upper heat equalizer plates 34a and between the lower heat equalizer plates 34b are formed between the upper heat equalizer plates 34a (lower heat equalizer plates 34b) and the side heat equalizer plates 34c. , and between the upper heat equalizer plate 34a (lower heat equalizer plate 34b) and the side heat equalizer plate 34d. Therefore, when the cleaning unit 50 supplies the cleaning gas G, the amount of the cleaning gas G supplied to the processing regions 30a and 30b can be increased.

The cleaning gas G supplied inside the chamber 10 is discharged to the outside of the chamber 10 through the opening 11 a of the chamber 10 . At this time, foreign substances such as sublimates and particles inside the chamber 10 are carried by the airflow of the cleaning gas G and discharged to the outside of the chamber 10 . Note that the heater 32a, the holder 32b, the soaking part 34, and the soaking plate support part 35 rub against each other due to thermal expansion. When they rub against each other, tiny metal pieces are generated. This metal piece is also included in foreign matter. Further, when the airflow is formed inside the chamber 10, the components (solids) of the sublimate adhering to the inner wall of the chamber 10 and the elements provided inside the chamber 10 are peeled off, and the chamber 10 It can be discharged to the outside.

In this case, the cleaning gas G can be supplied to the interior of the chamber 10 periodically or as needed. That is, a cleaning process can be provided separately from the process of processing the workpiece 100, and the cleaning gas G can be supplied to the inside of the chamber 10 in the cleaning process.

Also, the cleaning gas G can be supplied into the chamber 10 between the unloading of the processed work 100 from the chamber 10 and the loading of the next work 100 to be processed into the chamber 10 . That is, even in a series of processes for processing the workpiece 100, cleaning by the cleaning unit 50 can be performed when the workpiece 100 is not inside the chamber 10. FIG.

If the cleaning unit 50 is provided, foreign substances such as sublimates and particles inside the chamber 10 can be discharged to the outside of the chamber 10 by being carried by the airflow of the cleaning gas G. FIG. In addition, the components (solids) of the sublimate adhering to the inner wall of the chamber 10 can be peeled off and discharged to the outside of the chamber 10 .
That is, if the cleaning section 50 is provided, it is possible to sufficiently remove the foreign matter inside the chamber 10 .

Next, the effect of the cleaning section 50 will be further described.
FIG. 4 is a graph showing a combination of particle discharge by the exhaust section 20 and particle discharge by the cleaning section 50 .
In discharging the particles by the exhaust unit 20, the operation of decompressing the inside of the chamber 10 and returning the decompressed interior of the chamber 10 to the atmospheric pressure was repeated ten times.
In discharging the particles by the cleaning unit 50 , the cleaning gas G was simultaneously supplied from the plurality of nozzles 41 after the particles were discharged by the exhaust unit 20 . That is, before the particles are discharged by the cleaning unit 50, the particles are discharged by the exhaust unit 20 in advance.

As can be seen from FIG. 4 , particles of various sizes can be discharged by discharging particles by the exhaust unit 20 and by the cleaning unit 50 .

FIG. 5 is a graph when only particles are discharged by the cleaning unit 50 .
In discharging the particles by the cleaning unit 50 , the cleaning gas G was simultaneously supplied from the plurality of nozzles 41 .
As can be seen from FIG. 5, particles of various sizes can be discharged only by discharging particles by the cleaning unit 50. FIG.

Here, a comparison between FIGS. 4 and 5 will be made. As can be seen from the comparison between FIGS. 4 and 5, there is a large difference in the number of particles discharged immediately after the start of particle discharge by the cleaning unit 50, regardless of whether the particles are discharged by the exhaust unit 20 in advance or not. no. This means that sufficient removal of particles by the exhaust section 20 is difficult. In other words, even if foreign matter such as particles can be removed to some extent by cleaning the chamber 10 in a sealed state by exhausting the inside of the chamber 10 and supplying gas to the inside of the chamber 10 in this order, Foreign matter such as particles cannot be sufficiently removed.
On the other hand, if cleaning is performed by the cleaning unit 50, as can be seen from FIG. 5, the foreign substances inside the chamber 10 can be sufficiently removed.

Here, the detected amounts of particles of various sizes between 3 minutes and 5 minutes after the start of particle discharge by the cleaning unit 50 will be compared between FIG. 4 and FIG. As can be seen from the comparison between FIGS. 4 and 5, when the elapsed time from the start of particle discharge by the cleaning unit 50 is between 3 minutes and 5 minutes, the amount of particles detected in FIG. 4 is smaller. Therefore, the particle discharge time by the cleaning unit 50 can be shortened. In other words, it is more preferable to perform particle discharge by the exhaust unit 20 and particle discharge by the cleaning unit 50 . However, if the particles are discharged by the exhaust unit 20 while the work 100 is inside the chamber 10 , the particles may adhere to the surface of the work 100 . It is preferable that the discharge of particles by the exhaust unit 20 and the discharge of particles by the cleaning unit 50 be performed while the organic film forming apparatus 1 is on standby.

FIG. 6 is also a graph when only particles are discharged by the cleaning unit 50 .
However, in the case of FIG. 6, the cleaning gas G was sequentially supplied from a plurality of nozzles 41 . For example, after the cleaning gas G is supplied from a plurality of arbitrary nozzles 41 for a predetermined period of time and the supply of the cleaning gas G from the plurality of nozzles 41 is stopped, the cleaning gas G is supplied from the other plurality of nozzles 41 for a predetermined period of time. supplied. In this case, the cleaning gas G may be sequentially supplied from the plurality of nozzles 41 provided above, or may be sequentially supplied from the plurality of nozzles 41 provided below. The cleaning gas G may be supplied in order from the nozzles 41 of . Also, the number of nozzles 41 used for supplying the cleaning gas G may be one.

As can be seen from FIG. 6, the detected amount of particles decreases during an elapsed time of 3 minutes from the start of particle discharge by the cleaning unit 50 . However, when the elapsed time from the start of particle discharge by the cleaning unit 50 is 4 minutes, the detected amount of particles increases. This is probably because the airflow of the cleaning gas G inside the chamber 10 changed by changing the supply of the cleaning gas from the plurality of nozzles 41 concerned to the other plurality of nozzles 41 . It is considered that the change in the airflow of the cleaning gas G within the chamber 10 caused the particles, which could not be discharged by the previous airflow of the cleaning gas G, to be discharged to the outside of the chamber 10 .

Therefore, as can be seen from the comparison between FIGS. 5 and 6, by sequentially supplying the cleaning gas G from the plurality of nozzles 41 concerned to the other plurality of nozzles 41, the number of discharged particles can be greatly increased. . This means that foreign matter inside the chamber 10 can be removed more effectively.

FIG. 7 is a schematic cross-sectional view for illustrating a cleaning portion 50a according to another embodiment.
Similar to the cleaning section 50 described above, the cleaning section 50a has, for example, a plurality of nozzles 41, a gas source 52, and a gas control section 53. As shown in FIG.
In addition, as shown in FIG. 6, the cleaning unit 50a can further have a detection unit 56. As shown in FIG.

The detector 56 can be provided at a position facing the opening 11 a of the chamber 10 . The detection unit 56 detects foreign matter such as particles contained in the cleaning gas G discharged from the opening 11 a of the chamber 10 . The detector 56 can be, for example, a particle counter.

If the detection unit 56 is provided, the end point of cleaning can be detected. For example, when the number of foreign substances detected by the detection unit 56 is equal to or less than a predetermined value, the controller 60 controls the gas control unit 53 to stop the supply of the cleaning gas G and terminate the cleaning work. can be made
If the end point of cleaning can be detected, it is possible to reduce the consumption of cleaning gas G compared to the case where cleaning is terminated by time management or the like. Also, foreign matter inside the chamber 10 can be removed more appropriately.

FIG. 8 is a schematic cross-sectional view for illustrating a cleaning portion 50b according to another embodiment.
Similar to the cleaning unit 50 described above, the cleaning unit 50b has, for example, multiple nozzles 41, a gas source 52, and a gas control unit 53. As shown in FIG.
Moreover, as shown in FIG. 8, the cleaning unit 50b can further include a detection unit 56 and a housing 55. As shown in FIG.

The housing 55 has an airtight structure and can be provided at a position facing the opening 11 a of the chamber 10 . The detector 56 can be provided inside the housing 55 . Enclosure 55 can be, for example, a mini-environment (local clean environment).

As described above, the cleaning gas G discharged from the chamber 10 contains foreign matter such as particles. Therefore, foreign matter discharged from the chamber 10 may diffuse into the atmosphere in which the organic film forming apparatus 1 is installed. When foreign matter such as diffused particles reaches devices and elements around the organic film forming apparatus 1, contamination and failure may occur. In some cases, it is not preferable for the operator to inhale foreign matter such as particles or the cleaning gas G.

If the housing 55 is provided, it is possible to suppress diffusion of the foreign matter and the cleaning gas G discharged from the chamber 10 into the atmosphere in which the organic film forming apparatus 1 is installed.

FIG. 9 is a schematic perspective view for illustrating an organic film forming apparatus 1a according to another embodiment.
Similar to the cleaning section 50 described above, the cleaning section 150 has, for example, a plurality of nozzles 41, a gas source 52, and a gas control section 53. FIG.
Also, as shown in FIG. 9, the cleaning unit 150 may further include another cleaning unit 50c.

The cleaning section 50 c has a nozzle 51 , a gas source 52 and a gas control section 53 .
As shown in FIG. 9, nozzles 51 can be connected to the sides of chamber 10 . A plurality of nozzles 51 can be provided on the side surface of the chamber 10 . The nozzle 51 of this embodiment has a tubular shape with a closed tip. The closed tip of nozzle 51 extends to the side of chamber 10 opposite the side of chamber 10 where nozzle 51 is provided. A side surface of the nozzle 51 is provided with a plurality of nozzle holes 51a. Note that the number and arrangement of the nozzles 51 can be changed as appropriate. For example, a plurality of nozzles 51 can be arranged side by side in the Y direction on the side surface of the chamber 10 . It is also possible to provide nozzles 51 on both opposing sides of the chamber 10 . A nozzle 51 can also be provided that penetrates both opposing sides of the chamber 10 . A plurality of nozzles 51 can be arranged in the X direction and provided on the lid 15 .

FIG. 10 is a schematic cross-sectional view illustrating a cleaning unit 150 according to another embodiment.
As shown in FIG. 10, the cleaning gas G can be introduced into the chamber 10 through the nozzle hole 51a of the nozzle 51. As shown in FIG. By providing the cleaning part 50c, the airflow of the cleaning gas G formed by the nozzle 41 can be reinforced. Alternatively, an airflow different from the airflow of the cleaning gas G formed by the nozzles 41 can be generated. Therefore, particles that could not be discharged by the airflow of the cleaning gas G formed by the nozzle 41 are discharged to the outside of the chamber 10 . Therefore, the number of emitted particles can be greatly increased. This means that foreign matter inside the chamber 10 can be removed more effectively.

Also, in the cooling process, cooling gas can be supplied into the chamber from the cleaning unit 50c. If the supply timing of the cooling gas is set immediately after the organic film is formed or while the internal pressure of the chamber 10 is being returned to the atmospheric pressure, the cooling time and the time to return to the atmospheric pressure can be overlapped. That is, it is possible to substantially shorten the cooling time. Sublimate adheres to the inner wall of the chamber 10 . Therefore, in order to prevent the sublimate from being separated from the inner wall of the chamber 10 and flowing into the processing areas 30a and 30b, the amount of cooling gas supplied from the cleaning unit 50c is set to be larger than the amount of cooling gas supplied from the cooling unit 40. preferably less.

In this embodiment, one nozzle 51 is provided with a plurality of nozzle holes, but the present invention is not limited to this. For example, one nozzle 51 may have one nozzle hole. In this case, the nozzle 51 has a tubular shape with a flange provided at the open tip. The nozzle 51 is then airtightly connected to the hole in the side of the chamber 10 . That is, the hole in the side surface of the chamber 10 may function as the nozzle hole 51a. Alternatively, if the nozzle 51 is airtightly connected to a hole provided in the lid 15, the hole provided in the lid 15 may function as the nozzle hole 51a.

FIG. 11 is a schematic perspective view for illustrating an organic film forming apparatus 1b according to another embodiment.
Similar to the cleaning section 150 described above, the cleaning section 250 has, for example, a plurality of nozzles 41, a gas source 52, a cleaning section 50c, and a gas control section 53. FIG.
Also, as shown in FIG. 11, the cleaning unit 250 may further include another cooling unit 140 .

The cooling unit 140 supplies cooling gas to the work 100 inside the processing areas 30a and 30b. That is, the cooling unit 140 directly cools the workpiece 100 in a high temperature state.
The cooling section 140 differs from the cooling section 40 in that it has a nozzle 141 instead of the nozzle 41 .

At least one nozzle 141 can be provided inside the processing regions 30a and 30b (see FIG. 12). The nozzle 141 can pass through the lid 15 and the cover 36, for example, and can be attached to the side heat equalizing plate 34d, the frame 31, or the like. In this embodiment, the nozzle 141 is attached at a position where the cooling gas can be supplied to the back surface of the workpiece 100 . Also, a plurality of nozzles 141 can be provided in the X direction. Alternatively, the nozzle 141 can be cylindrical with a closed end. A plurality of holes may be provided in the side surface of the nozzle 141 and inserted from the side surface of the chamber 10 .

In the cooling process, the cooling gas is discharged from the nozzle 141 parallel to the workpiece 100 . Although the door 13 is open in FIG. 12, the door 13 is closed in the cooling step described below. The cooling gas is supplied from the nozzle 141 substantially parallel to the back surface of the workpiece 100 (that is, the surface supported by the support portion 33). Thereby, the space between the work 100 and the support portion 33 is filled with cooling gas, and the work 100 can be directly cooled. Also, the cooling gas supplied from the nozzle 141 and passed through the back surface of the workpiece 100 is discharged out of the chamber 10 from an outlet (not shown). A plurality of (for example, four) outlets are provided in the ceiling portion of the chamber 10 . When the cooling gas is supplied to the chamber 10 in the cooling process, the heat in the chamber 10 moves upward, so that the heat can be efficiently discharged through the exhaust port provided in the ceiling. Furthermore, by sequentially supplying the cooling gas from the nozzles 141 positioned on the lower side in the chamber 10 among the plurality of nozzles 141 , an airflow is created in the chamber 10 toward the ceiling side of the chamber 10 . As a result, particles in the chamber 10 can be efficiently discharged from the discharge port.

Here, when the cooling process is started, the internal pressure of the chamber 10, which was lower than the atmospheric pressure, gradually approaches the atmospheric pressure by supplying the cooling gas. At this time, when the internal pressure of the chamber 10 rapidly approaches the atmospheric pressure, the workpiece 100 supported by the support portion 33 moves due to the pressure fluctuation, rubbing against the support portion 33 and generating particles. Therefore, first, after the cooling process is started, until the internal pressure of the chamber 10 reaches a predetermined pressure, the cooling gas is supplied only from the nozzle 41 to indirectly cool the workpiece 100 . The cooling gas supplied from the nozzle 41 is supplied to the soaking section 34 without being directly supplied to the workpiece 100 . As a result, the internal pressure of the chamber 10 gradually increases while avoiding sudden changes in the pressure in the vicinity of the workpiece 100 . After that, when the internal pressure of the chamber 10 reaches a predetermined pressure, the cooling gas is also supplied from the nozzle 141 to directly cool the workpiece 100 . The predetermined pressure is a pressure at which the work 100 does not move due to pressure fluctuations caused by supplying the cooling gas from the nozzle 141, and is determined in advance by experiments or the like. Since the cooling gas is supplied from the nozzle 141 after the internal pressure of the chamber 10 rises to some extent, the work 100 does not move due to pressure fluctuations. As a result, it is possible to effectively suppress the generation of particles due to rubbing between the workpiece 100 and the support portion 33 .

Further, a plurality of nozzles (not shown) for blowing air from the bottom surface of the chamber 10 toward the ceiling may be provided at the end of the chamber 10 on the side of the opening 11a. In this way, an airflow directed from the bottom surface to the ceiling of the chamber 10 can be formed, so that the particles blown off by the nozzles 141 and 41 can be efficiently carried to the discharge port and discharged. The airflow formed by this nozzle (not shown) also serves as an air curtain that prevents particles from entering from outside the chamber 10 when the door 13 is open.

A plurality of nozzles (not shown) for blowing air from the ceiling to the bottom of the chamber 10 may be provided. When used as an air curtain (when the door 13 is open), an air current may be formed from the ceiling to the bottom of the chamber 10 . In this case, it is possible to form an air curtain in which air flows in the same direction as the downflow in the clean room in which the organic film forming apparatus 1 is installed, so that particles can be prevented from entering the chamber 10 more effectively. .

Further, a nozzle (not shown) for blowing air from the bottom surface of the chamber 10 toward the ceiling may be provided not only on the opening 11a side but also on the lid 15 side. After being discharged from the cooling nozzle 141, the cooling gas flows toward the door 13 via the back surface of the workpiece 100, and the flow velocity gradually decreases. By the time the cooling gas collides with the door 13 and the lid 15 side, the flow velocity of the cooling gas is considerably low, and the cooling gas tends to stagnate on the wall surface on the lid 15 side. As a result, the particles remain attached to the wall surface on the side of the lid 15, and the particles attached to the side wall surface of the lid 15 adhere to the workpiece to be processed next. By providing nozzles for blowing air from the bottom surface of the chamber 10 toward the ceiling along the wall surface on the lid 15 side, particles adhering to the wall surface can be efficiently discharged from the discharge port.

When cooling the workpiece 100 indirectly and directly, cooling gas is supplied from the cooling unit 40 and the cooling unit 140 in the cooling process. That is, the workpiece 100 can be directly cooled using the nozzle 141 of the cooling section 140 . By doing so, it is possible to substantially shorten the cooling time.

FIG. 12 is a schematic cross-sectional view illustrating a cleaning unit 250 according to another embodiment.
By providing the cooling part 140, it becomes possible to supply the cleaning gas G to the inside of the processing regions 30a and 30b also from the nozzles 141. FIG. Therefore, the airflow of the cleaning gas G formed by the nozzles 41 can be reinforced. Therefore, particles that could not be discharged by the airflow of the cleaning gas G formed by the nozzle 41 are discharged to the outside of the chamber 10 . Therefore, the number of emitted particles can be greatly increased. This means that foreign matter inside the chamber 10 can be removed more effectively.

As described above, the cleaning method of the organic film forming apparatus according to the present embodiment includes the chamber 10 having the opening 11a for loading or unloading the workpiece 100 and capable of maintaining an atmosphere reduced from the atmospheric pressure. It is a cleaning method for an organic film forming apparatus.
In the cleaning method of the organic film forming apparatus according to the present embodiment, when the opening 11a of the chamber 10 is open , the cleaning gas G flowing toward the opening 11a of the chamber 10 is caused to flow inside the chamber 10. Form.

Also, the flow of the cleaning gas G is formed by sequentially supplying the cleaning gas G from the plurality of nozzles 41 .

Further, when the number of foreign substances contained in the cleaning gas G discharged from the opening 11a of the chamber 10 is equal to or less than a predetermined value, the formation of the flow of the cleaning gas G is stopped. The workpiece 100 is not supported inside the chamber 10 when forming the flow of the cleaning gas G that flows toward the opening 11 a of the chamber 10 .

Further, by sequentially supplying the cleaning gas G from the plurality of nozzles 51 and/or the plurality of nozzles 141, the flow of the cleaning gas G formed by sequentially supplying the cleaning gas G from the plurality of nozzles 41 is reinforced. may Alternatively, by sequentially supplying the cleaning gas G from the plurality of nozzles 51 and/or the plurality of nozzles 141, the flow of the cleaning gas G is different from the flow of the cleaning gas G formed by sequentially supplying the cleaning gas G from the plurality of nozzles 41. flow may be formed.

The embodiments have been illustrated above. However, the invention is not limited to these descriptions.
Appropriate design changes made by those skilled in the art with respect to the above embodiments are also included in the scope of the present invention as long as they have the features of the present invention.
For example, the shape, dimensions, arrangement, etc. of the organic film forming apparatus 1 are not limited to those illustrated and can be changed as appropriate.
Moreover, each element provided in each of the above-described embodiments can be combined as much as possible, and a combination thereof is also included in the scope of the present invention as long as it includes the features of the present invention.
For example, when performing the cleaning process, not only the opening 11a of the chamber 10 but also the third exhaust section 23 may be opened . By doing so, the cleaning gas G is also discharged from the third exhaust part, so that the foreign matter inside the chamber 10 can be sufficiently removed.

1 organic film forming apparatus, 10 chamber, 11a opening, 20 exhaust section, 30 processing section, 30a processing region, 30b processing region, 32 heating section, 32a heater, 50 cleaning section, 50a cleaning section, 50b cleaning section, 51 nozzle, 52 gas source, 53 gas control section, 54 switching valve, 55 housing, 60 controller, 100 workpiece, G cleaning gas

Claims (11)

a chamber having an opening for loading or unloading a workpiece and capable of maintaining an atmosphere reduced below atmospheric pressure;
a door capable of opening and closing the opening of the chamber;
an exhaust unit capable of exhausting the interior of the chamber;
a support provided inside the chamber and capable of supporting the workpiece;
a heating unit provided inside the chamber and capable of heating the workpiece;
at least one nozzle provided inside the chamber and capable of supplying a cleaning gas toward an opening of the chamber;
a gas control unit connected to the nozzle and capable of controlling supply and stop of supply of the cleaning gas;
a controller capable of controlling the gas control unit;
with
The controller controls the gas control unit to flow the cleaning gas from the nozzle toward the opening of the chamber when the opening of the chamber is open. A plurality of the nozzles are provided,
2. The organic film forming apparatus according to claim 1, wherein said cleaning gas is sequentially supplied from said plurality of nozzles. a cooling unit that supplies cooling gas to the inside of the heating unit;
a first cleaning unit connected to the nozzle;
a switching valve provided between the nozzle and the cleaning unit;
a controller capable of controlling the switching valve;
further comprising
The cooling unit is connected to the switching valve,
2. The organic film forming apparatus according to claim 1, wherein the controller can select whether to supply the cooling gas or the cleaning gas from the nozzle to the interior of the heating unit by controlling the switching valve. . Having an exhaust port in the ceiling of the chamber that can exhaust the gas in the chamber,
The controller sequentially supplies the cooling gas from the nozzle positioned on the lower side of the chamber among the plurality of nozzles when the switching valve is controlled to supply the cooling gas from the plurality of nozzles. 4. The organic film forming apparatus according to claim 3, wherein the control is performed so as to at least one second nozzle provided on the side of the chamber and capable of supplying a cleaning gas into the chamber;
a second cleaning unit connected to the second nozzle;
further comprising
5. The organic film forming apparatus according to claim 3, wherein said controller can select to supply cleaning gas from said nozzle or said second nozzle or both. further comprising a detection unit for detecting foreign matter contained in the cleaning gas discharged from the opening of the chamber;
6. The method according to any one of claims 1 to 5, wherein the controller controls the gas control unit to stop the supply of the cleaning gas when the number of foreign substances detected by the detection unit is equal to or less than a predetermined value. The organic film forming apparatus according to any one of the above. 7. The organic film forming apparatus according to claim 1, further comprising a housing having an airtight structure and provided at a position facing the opening of said chamber. A cleaning method for an organic film forming apparatus having a chamber capable of maintaining an atmosphere pressure-reduced below atmospheric pressure, the cleaning method comprising:
A cleaning method for an organic film forming apparatus, comprising forming a flow of cleaning gas inside the chamber toward the opening of the chamber when the opening of the chamber is opened. 9. The method of cleaning an organic film forming apparatus according to claim 8, wherein the flow of the cleaning gas is formed by sequentially supplying the cleaning gas from a plurality of nozzles. 10. The organic film forming method according to claim 9 , wherein the formation of the flow of the cleaning gas is stopped when the number of foreign substances contained in the cleaning gas discharged from the opening of the chamber is equal to or less than a predetermined value. How to clean the equipment. 11. The cleaning of the organic film forming apparatus according to any one of claims 8 to 10, wherein the workpiece is not supported inside the chamber when forming the flow of cleaning gas that flows toward the opening of the chamber. Method.

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