JP7383333B2 - blade with base - Google Patents

Description

The present invention relates to a blade with a base mounted on a rotating shaft.

By dividing a semiconductor wafer including a plurality of devices such as an IC (Integrated Circuit) and an LSI (Large Scale Integration), a plurality of device chips each including a device are manufactured. In addition, by dividing a package substrate formed by covering a plurality of device chips mounted on a substrate with a resin sealing material (mold resin), a plurality of device chips each having a plurality of device chips covered with mold resin can be divided. of packaged devices are manufactured.

For example, a cutting device equipped with a rotating shaft (spindle) on which a blade for cutting the workpiece is attached is used to divide the workpiece, such as the semiconductor wafer or package substrate described above. The workpiece is cut by rotating a blade attached to a rotating shaft to cut into the workpiece.

Blades used to cut workpieces include electroformed hub blades with cutting edges in which abrasive grains made of diamond, etc. are fixed with plating of nickel, etc., and bonded blades, in which abrasive grains are made of metal, ceramics, resin, etc. An annular blade consisting of a cutting edge fixed by a cutting edge is known. When cutting a workpiece, an appropriate blade is appropriately selected depending on the material of the workpiece.

An electroformed hub blade is made up of a disc-shaped base made of aluminum or the like, and an annular cutting edge formed along the outer periphery of the base. It is attached to a blade mount fixed to the tip. On the other hand, the annular blade is attached to the tip of the rotating shaft so as to be sandwiched between a flange (fixed flange) provided on the blade mount and a detachable flange.

As described above, the electroformed hub blade and the annular blade have different mounting methods on the rotating shaft, and the shape, dimensions, etc. of the blade mount fixed to the rotating shaft also differ depending on the type of blade. Therefore, for example, when replacing an electroformed hub blade with an annular blade, it is necessary to also replace the blade mount, which makes the blade replacement work inefficient.

Therefore, in recent years, a blade with a base in which an annular blade is bonded to a disc-shaped base has been proposed (for example, see Patent Document 1). When this blade with a base is used, it becomes possible to attach an annular blade to a blade mount for an electroformed hub blade, and there is no need to replace the blade mount.

Japanese Patent Application Publication No. 2012-135833

The above blade with a base is manufactured by bonding the base and the blade together with an adhesive, but at this time, it is necessary to align the base and the blade. Therefore, in bonding the base and the blade together, a jig is used to bring the blade into contact with a predetermined position on the base.

However, when a jig is used to align the base and the blade, it is necessary to design the jig according to the dimensions of the blade with the base and to attach the base and the blade to the jig. This makes bonding the base and the blade complicated and reduces the production efficiency of the blade with the base.

Furthermore, when bonding is performed, the adhesive may be spread between the base and the blade and may protrude from the bonding area between the base and the blade. In this case, there is a risk that the quality of the blade with the base will deteriorate, such as the adhesive adhering to the outer periphery of the blade and adversely affecting processing or deteriorating the appearance of the blade.

The present invention has been made in view of this problem, and an object of the present invention is to provide a blade with a base that allows easy alignment of the base and the blade.

According to one aspect of the present invention, there is provided a blade with a base mounted on a rotating shaft, including an annular base and an annular blade fixed to a first surface of the base and having an opening formed in the center. a blade, the base has a convex portion protruding from the first surface and having an outer peripheral edge shape corresponding to the shape of the opening, and the convex portion is formed along the outer peripheral edge. The base and the blade are aligned by inserting the convex part into the opening, and a fixing nut for fixing the blade to the threaded part is tightened. The base and the blade are fixed by being fixed, and the tip of the rotating shaft includes a disk-shaped flange portion having an annular convex portion on the outer periphery, and a support protruding from the center of the flange portion. A blade mount including a shaft is fixed, and when the support shaft is inserted into the opening, the blade with a base does not come into contact with the distal end surface of the convex portion of the flange portion.

Preferably, the threaded portion is formed such that the rotational direction of the fixation nut when tightened onto the threaded portion is opposite to the rotational direction of the rotating shaft. Also preferably, the diameter of the fixing nut is smaller than the diameter of the base . Furthermore, according to another aspect of the present invention, there is provided a blade with a base mounted on a rotating shaft, the blade having an annular base and an opening fixed to the first surface of the base. the base has a convex portion that protrudes from the first surface and has an outer peripheral edge that corresponds to the shape of the opening; A threaded portion is formed along the threaded portion, and when the convex portion is inserted into the opening, the base and the blade are aligned, and the blade is fixed to the threaded portion. The base and the blade are fixed by tightening the fixing nut, and the tip of the rotating shaft has a disc-shaped flange part with an annular convex part on the outer periphery, and a disc-shaped flange part at the center of the flange part. A blade mount is fixed, the blade mount having a support shaft protruding from the opening, the diameter of the fixing nut being larger than the inner diameter of the convex part of the flange, and when the support shaft is inserted into the opening, the fixing nut A blade with a base is provided, the blade being in contact with the distal end surface of the convex portion of the flange portion.

A blade with a base according to one aspect of the present invention includes an annular base and an annular blade fixed to a first surface of the base and having an opening in the center, and the base includes: The base has a convex portion that protrudes from the first surface and has an outer peripheral edge that corresponds to the shape of the opening of the blade. Further, the convex portion has a threaded portion formed along the outer periphery.

In the above blade with a base, the base and the blade are aligned by inserting the convex part of the base into the opening of the blade, so a jig for alignment is not required. This makes it possible to easily align the base and the blade. In addition, in the blade with base 2 described above, the base and the blade are fixed by tightening the fixing nut to the threaded part of the convex part of the base, so adhesive is used to fix the base and the blade. There's no need. This prevents the quality of the base-attached blade from deteriorating due to the adhesive.

It is an exploded sectional view showing a blade with a base. FIG. 3 is a cross-sectional view showing a blade with a base in which the base and the blade are fixed. It is a perspective view showing a cutting device. It is a perspective view showing a cutting unit. It is an exploded sectional view showing a blade with a base concerning a modification.

Embodiments of the present invention will be described below with reference to the accompanying drawings. First, a configuration example of the blade with a base according to the present embodiment will be described. FIG. 1 is an exploded sectional view showing the blade 2 with a base.

The blade with a base 2 includes an annular base 4 and an annular blade 6. The base 4 is made of aluminum, for example, and includes a first surface 4a and a second surface 4b that are parallel to each other, and an outer peripheral edge 4c. Furthermore, a circular opening 4d is formed in the center of the base 4, passing through the base 4 from the first surface 4a to the second surface 4b.

An annular convex portion 4e protruding from the first surface 4a toward the blade 6 is provided around the opening 4d so as to surround the opening 4d. The convex portion 4e is formed along the contour of the opening 4d, and includes an annular outer peripheral edge 4f. Further, the convex portion 4e includes a threaded portion 4g formed along the outer peripheral edge 4f on the distal end side thereof.

The blade 6 is formed by fixing abrasive grains made of diamond, cubic boron nitride (cBN), etc., with a bonding material made of metal, ceramics, resin, etc., for example. However, the abrasive grains and bond material contained in the blade 6 are not limited, and are appropriately selected according to the specifications of the blade 2 with a base.

The blade 6 includes a first surface 6a and a second surface 6b that are parallel to each other, and an outer peripheral edge 6c. Furthermore, a circular opening 6d is formed in the center of the blade 6, passing through the blade 6 from the first surface 6a to the second surface 6b.

By fixing the base 4 and the blade 6, a blade 2 with a base in which the base 4 and the blade 6 are integrated can be obtained. FIG. 2 is a sectional view showing the blade 2 with a base to which the base 4 and the blade 6 are fixed.

The convex portion 4e of the base 4 is formed such that the shape of the outer peripheral edge 4f corresponds to the opening 6d of the blade 6. For example, the convex portion 4e is formed such that the diameter of the outer periphery 4f and the diameter of the opening 6d are equal, and the shape of the outer periphery 4f matches the shape of the outline of the opening 6d. When fixing the base 4 and the blade 6, the base 4 and the blade 6 are brought into contact so that the convex portion 4e is inserted into the opening 6d.

When the protrusion 4e is inserted into the opening 6d, the outer peripheral edge 4f of the protrusion 4e comes into contact with the blade 6 inside the opening 6d, and the base 4 and the blade 6 are arranged in a predetermined positional relationship with each other. . Thereby, the base 4 and the blade 6 are aligned.

As described above, in the blade 2 with a base according to the present embodiment, the base 4 and the blade 6 are aligned by inserting the protrusion 4e of the base 4 into the opening 6d of the blade 6. . Therefore, a jig for positioning is not required, and the base 4 and the blade 6 can be easily aligned.

Note that the diameter of the outer peripheral edge 6c of the blade 6 is larger than the diameter of the outer peripheral edge 4c of the base 4. Therefore, when the base 4 and the blade 6 are coupled, the outer circumferential edge 6c of the blade 6 is disposed radially outward of the base 4 than the outer circumferential edge 4c of the base 4, and protrudes from the outer circumferential edge 4c.

When processing a workpiece using the blade 2 with a base, the blade 6 is cut into a dresser board to wear it out, and the shape of the blade 6 is adjusted to be concentric with the rotation axis (rounding). will be held. Therefore, at the stage when the base 4 and the blade 6 are fixed, the center of the base 4 and the center of the blade 6 do not necessarily need to be completely aligned.

Next, the base 4 and the blade 6 are fixed by tightening the fixing nut 8 to the threaded portion 4g of the convex portion 4e. The fixing nut 8 is formed in an annular shape, and a circular opening 8a corresponding to the outer peripheral edge 4f of the convex portion 4e is formed in the center of the fixing nut 8. Further, the opening 8a is provided with a thread groove corresponding to the threaded portion 4g formed on the convex portion 4e of the base 4.

Here, the height of the convex portion 4e of the base 4 (the length in the left-right direction in FIG. 2) is larger than the width (the length in the left-right direction in FIG. 2) of the opening 6d of the blade 6. It is formed. Therefore, when the protrusion 4e is inserted into the opening 6d, the tip of the protrusion 4e protrudes from the second surface 6b side of the blade 6. A threaded portion 4g is formed along the outer peripheral edge 4f at the tip of the protruding convex portion 4e.

With the convex portion 4e of the base 4 inserted into the opening 6d of the blade 6, when the fixing nut 8 is positioned at the tip of the convex portion 4e and rotated, the fixing nut 8 tightens against the threaded portion 4g toward the blade 6. It will be done. As a result, the blade 6 is sandwiched between the base 4 and the fixing nut 8, and the base 4 and the blade 6 are fixed.

When the base 4 and the blade 6 are bonded together using an adhesive as in the past, the adhesive spreads between the base 4 and the blade 6 during bonding, and the bond between the base 4 and the blade 6 is broken. It may go out of scope. In this case, there is a risk that the quality of the blade with the base will deteriorate, such as the adhesive adhering to the outer circumference of the blade 6 and adversely affecting processing or deteriorating the appearance of the blade 6.

On the other hand, in the blade 2 with a base according to the present embodiment, the base 4 and the blade 6 are fixed by tightening the fixing nut 8 to the threaded part 4g formed on the convex part 4e of the base 4. There is no need to use an adhesive to fix 4 and blade 6. Thereby, it is possible to prevent quality deterioration of the base-equipped blade 2 due to the adhesive.

Note that the threaded portion 4g is such that the rotational direction of the fixed nut 8 when tightening the fixed nut 8 to the threaded portion 4g is opposite to the rotational direction of the rotating shaft 40 (see FIG. 4) on which the blade with base 2 is attached. It is preferable to form it so that it becomes like this. Thereby, when processing the blade 2 with a base using the blade 2 with a base, it is possible to prevent the fastening of the fixing nut 8 from loosening due to rotation of the rotating shaft 40.

Next, a configuration example of a cutting device that cuts a workpiece using the blade 2 with a base will be described. FIG. 3 is a perspective view showing a cutting device 20 that cuts the workpiece 11. As shown in FIG.

Examples of the workpiece 11 cut by the cutting device 20 include semiconductor wafers with devices such as IC (Integrated Circuit) and LSI (Large Scale Integration), CSP (Chip Size Package) substrates, and QFN (Quad Flat Non -Leaded Package) board and other package substrates. However, there are no restrictions on the type, material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a substrate made of ceramic, resin, metal, or the like.

The cutting device 20 includes a base 22 that supports each component, and a cover 24 that covers the upper surface of the base 22 is provided above the base 22. A space in which the workpiece 11 is processed is formed inside the cover 24, and a cutting unit 26 to which the blade 2 with a base is mounted is arranged in this space. The cutting unit 26 is connected to a moving mechanism (not shown), and this moving mechanism moves the cutting unit 26 in the front-rear direction (Y-axis direction, index feed direction) and vertical direction (Z-axis direction).

Further, below the cutting unit 26, a chuck table 28 for holding the workpiece 11 is provided. The upper surface of the chuck table 28 constitutes a holding surface that holds the workpiece 11, and a suction source (not shown) is connected to this holding surface via a suction path (not shown). With the workpiece 11 placed on the chuck table 28, the workpiece 11 is suction-held by the chuck table 28 by applying negative pressure from a suction source to the holding surface.

The chuck table 28 is connected to a moving mechanism (not shown), and this moving mechanism moves the chuck table 28 in the left-right direction (X-axis direction, processing feed direction). Further, the chuck table 28 is connected to a rotation mechanism (not shown), and this rotation mechanism rotates the chuck table 28 around a rotation axis that is generally parallel to the vertical direction (Z-axis direction).

Furthermore, a cassette elevator 30 is installed at the front corner of the base 22. A cassette 32 that can accommodate a plurality of workpieces 11 is placed on the upper surface of the cassette elevator 30. The cassette elevator 30 is configured to be able to move up and down, and adjusts the height (vertical position) of the cassette 32 so that the workpiece 11 can be carried in and out appropriately.

A touch panel type monitor 34 serving as a user interface is provided on the front surface 24a side of the cover 24. This monitor 34 monitors each component of the cutting device 20 along with the cutting unit 26, the moving mechanism connected to the cutting unit 26, the chuck table 28, the moving mechanism and rotating mechanism connected to the chuck table 28, the cassette elevator 30, etc. It is connected to a control unit (not shown) that controls the operation.

FIG. 4 is a perspective view showing the cutting unit 26. The cutting unit 26 includes a rotating shaft (spindle) 40 arranged along the Y-axis direction.

The rotating shaft 40 is housed in a cylindrical spindle housing 42. A tip (one end) of the rotating shaft 40 is exposed outside the spindle housing 42, and a blade mount 44 is fixed to the tip of the rotating shaft 40. Further, a motor (not shown) that rotates the rotating shaft 40 is connected to the other end side (base end side) of the rotating shaft 40.

The blade mount 44 includes a disk-shaped flange portion (fixed flange) 46 and a support shaft 48 protruding from the center of a surface 46a of the flange portion 46. An annular convex portion 46b protruding from the surface 46a is provided on the surface 46a side of the outer peripheral portion of the flange portion 46. The convex portion 46b has a distal end surface 46c at its distal end, and the distal end surface 46c is formed approximately parallel to the surface 46a.

The support shaft 48 is formed into a cylindrical shape, and a threaded portion 48a is provided on the outer circumferential surface of the tip thereof. When the support shaft 48 is inserted into the opening 4d of the base 4, the blade 2 with the base is mounted on the blade mount 44.

Furthermore, an annular fixing nut 50 is fastened to the tip of the support shaft 48 . A circular opening 50a corresponding to the diameter of the support shaft 48 is formed in the center of the fixing nut 50. A thread groove corresponding to the threaded portion 48a formed in the support shaft 48 is provided in the opening 50a.

When the fixing nut 50 is fastened to the threaded portion 48a of the support shaft 48 with the support shaft 48 inserted into the opening 4d of the base 4, the opening 6d of the blade 6, and the opening 8a of the fixing nut 8, the base The blade 2 with a base is held between the first surface 4a of the base 4 (see FIG. 1, etc.) and the convex portion 46b of the flange portion 46. Thereby, the blade 6 is fixed to the tip of the rotating shaft 40.

As shown in FIG. 2, the tip of the convex portion 4e of the base 4 protrudes from the second surface 6b of the blade 6, and the fixing nut 8 is fastened to this protruding portion. Here, the height of the convex portion 46b of the flange portion 46 is set larger than the protrusion amount of the convex portion 4e and the width (thickness) of the fixing nut 8. Therefore, when mounting the blade 2 with a base on the blade mount 44, the convex portion 4e or the fixing nut 8 will not come into contact with the surface 46a of the flange portion 46 and the mounting of the blade 2 with a base will not be hindered.

When the rotary shaft 40 is rotated with the blade 2 with a base attached to the cutting unit 26, the blade 2 with a base rotates around the axis of the rotary shaft 40. The workpiece 11 is then cut by causing the rotating blade 6 to cut into the workpiece 11 held by the chuck table 28 (see FIG. 3).

As described above, the blade with base 2 according to the present embodiment includes the annular base 4 and the annular blade 6 fixed to the first surface 4a side of the base 4 and having an opening 6d in the center. , and the base 4 has a convex portion 4e that protrudes from the first surface 4a and has an outer peripheral edge shape corresponding to the shape of the opening 6d. Further, the convex portion 4e has a threaded portion 4g formed along the outer peripheral edge.

In the above blade 2 with a base, the protrusion 4e of the base 4 is inserted into the opening 6d of the blade 6 to align the base 4 and the blade 6. No jig is required. This makes it possible to easily align the base 4 and the blade 6.

In addition, in the blade 2 with a base described above, the base 4 and the blade 6 are fixed by tightening the fixing nut 8 to the threaded part 4g of the convex part 4e of the base 4. There is no need to use adhesive to fix it. This prevents the quality of the base-equipped blade 2 from deteriorating due to the adhesive.

Note that although FIGS. 1 and 2 show an example in which the diameter (outer diameter) of the fixing nut 8 is smaller than the diameter of the base 4 (diameter of the outer peripheral edge 4c), the diameter of the fixing nut 8 can be changed as appropriate. . FIG. 5 is an exploded sectional view showing a blade 2 with a base according to a modification. In the blade 2 with a base shown in FIG. 5, a fixing nut 8 whose diameter is equivalent (for example, the same) as the diameter of the base 4 is used to fix the base 4 and the blade 6.

If the diameter of the fixing nut 8 is equal to the diameter of the base 4, when the fixing nut 8 is tightened to fix the base 4 and the blade 6, the contact area between the fixing nut 8 and the second surface 6b of the blade 6 will be reduced. becomes larger. As a result, the blade 6 is firmly held between the base 4 and the fixing nut 8, and it is possible to suppress vibrations of the blade 6 when cutting the workpiece 11 with the blade 6.

Further, the diameter of the fixing nut 8 may be larger than the inner diameter of the convex portion 46b formed on the flange portion 46 of the blade mount 44 (see FIG. 4). In this case, when the blade 2 with the base is attached to the blade mount 44, the fixing nut 8 comes into contact with the tip surface 46c of the protrusion 46b, and the blade 6 does not come into contact with the tip surface 46c of the protrusion 46b. This can prevent the abrasive grains contained in the blade 6 from coming into contact with the tip end surface 46c of the convex portion 46b and changing the shape of the tip end surface 46c.

Note that if the outer circumferential portion of the fixing nut 8 protrudes further outward in the radial direction of the base 4 than the outer circumferential edge 4c of the base 4, the fixing nut 8 will be covered when cutting the workpiece 11 with the outer circumferential portion of the blade 6. It may come into contact with the workpiece 11 easily, resulting in machining defects.

Therefore, the diameter of the fixing nut 8 is preferably equal to or less than the diameter of the base 4. Alternatively, the amount by which the fixing nut 8 protrudes from the outer circumferential edge 4 c of the base 4 toward the outside in the radial direction of the base 4 (the protruding amount of the fixing nut) is the amount by which the blade 6 protrudes from the outer circumferential edge 4 c of the base 4 toward the radially outer side of the base 4 . It is preferable that the amount is 1/2 or less of the amount by which the blade protrudes outward in the radial direction (the amount by which the blade protrudes). This makes it difficult for the fixing nut 8 to come into contact with the workpiece 11 during cutting, making it possible to suppress the occurrence of machining defects.

In addition, the structure, method, etc. according to the above embodiments can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

2 Blade with base 4 Base 4a First surface 4b Second surface 4c Outer edge 4d Opening 4e Convex portion 4f Outer edge 4g Threaded portion 6 Blade 6a First surface 6b Second surface 6c Outer edge 6d Opening 8 Fixing nut 8a opening 20 cutting device 22 base 24 cover 24a front 26 cutting unit 28 chuck table 30 cassette elevator 32 cassette 34 monitor 40 rotating shaft (spindle)
42 Spindle housing 44 Blade mount 46 Flange part (fixed flange)
46a Surface 46b Convex portion 46c Tip surface 48 Support shaft 48a Threaded portion 50 Fixing nut 50a Opening portion 11 Workpiece

Claims (4)

A blade with a base mounted on a rotating shaft,
It has an annular base and an annular blade fixed to the first surface side of the base and having an opening in the center,
The base has a convex portion protruding from the first surface and having an outer peripheral edge shape corresponding to the shape of the opening,
The convex portion has a threaded portion formed along the outer peripheral edge,
By inserting the convex part into the opening, the base and the blade are aligned, and by tightening the fixing nut for fixing the blade to the threaded part, the base and the blade are aligned. the blade is fixed,
A blade mount including a disk-shaped flange portion having an annular convex portion on the outer periphery and a support shaft protruding from the center of the flange portion is fixed to the tip of the rotating shaft,
A blade with a base, characterized in that when the support shaft is inserted into the opening, the base does not come into contact with the tip end surface of the convex part of the flange part. 2. The threaded portion is formed such that the rotational direction of the fixation nut when tightening the fixation nut onto the threaded portion is opposite to the rotational direction of the rotating shaft. Blade with base. The blade with a base according to claim 1 or 2, wherein the diameter of the fixing nut is smaller than the diameter of the base.. A blade with a base mounted on a rotating shaft,
It has an annular base and an annular blade fixed to the first surface side of the base and having an opening in the center,
The base has a convex portion protruding from the first surface and having an outer peripheral edge shape corresponding to the shape of the opening,
The convex portion has a threaded portion formed along the outer peripheral edge,
By inserting the convex part into the opening, the base and the blade are aligned, and by tightening the fixing nut for fixing the blade to the threaded part, the base and the blade are aligned. the blade is fixed,
A blade mount including a disk-shaped flange portion having an annular convex portion on the outer periphery and a support shaft protruding from the center of the flange portion is fixed to the tip of the rotating shaft,
The diameter of the fixing nut is larger than the inner diameter of the convex part of the flange part,
A blade with a base, wherein when the support shaft is inserted into the opening, the fixing nut comes into contact with the tip end surface of the convex part of the flange part.