JP7184049B2 - ゲート絶縁型トランジスタ - Google Patents
ゲート絶縁型トランジスタ Download PDFInfo
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- JP7184049B2 JP7184049B2 JP2019557036A JP2019557036A JP7184049B2 JP 7184049 B2 JP7184049 B2 JP 7184049B2 JP 2019557036 A JP2019557036 A JP 2019557036A JP 2019557036 A JP2019557036 A JP 2019557036A JP 7184049 B2 JP7184049 B2 JP 7184049B2
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- 239000012535 impurity Substances 0.000 claims description 215
- 239000004020 conductor Substances 0.000 claims description 99
- 238000002955 isolation Methods 0.000 claims description 93
- 239000000463 material Substances 0.000 claims description 35
- 238000009413 insulation Methods 0.000 claims description 24
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 229920005591 polysilicon Polymers 0.000 claims description 5
- 210000000746 body region Anatomy 0.000 description 41
- 239000000758 substrate Substances 0.000 description 40
- 239000011229 interlayer Substances 0.000 description 28
- 229910052782 aluminium Inorganic materials 0.000 description 22
- 239000010410 layer Substances 0.000 description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 229910052757 nitrogen Inorganic materials 0.000 description 9
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 9
- 229910010271 silicon carbide Inorganic materials 0.000 description 9
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 238000002161 passivation Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910005883 NiSi Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Description
特開2014-150126号公報に記載のMOSFETの一実施形態においては、素子分離層は酸化物などの絶縁体によって構成されている。素子分離層を絶縁体によって形成する方法としては、炭化珪素基板にトレンチを形成した後、当該トレンチの内部を絶縁体で埋めることが考えられる。しかしながら、上記形成方法を採用する場合には、プロセス的に工程数が大幅に増加してしまう。
本開示によれば、工程数を大幅に増加することなくセンス領域と活性領域とを分離可能なゲート絶縁型トランジスタを提供することができる。
まず、本開示の実施形態の概要について説明する。
以下、実施の形態について図に基づいて説明する。なお、以下の図面において、同一または相当する部分には同一の参照番号を付し、その説明は繰り返さない。本明細書中の結晶学的記載においては、個別方位を[]、集合方位を<>、個別面を()、集合面を{}でそれぞれ示している。また結晶学上の指数が負であることは、通常、”-”(バー)を数字の上に付すことによって表現されるが、本明細書中では数字の前に負の符号を付している。
まず、第1実施形態に係るゲート絶縁型トランジスタ100の一例としてのMOSFET100の構成について説明する。
図1に示されるように、第1ソース配線44は、第1ソース端子S1に接続されている。第2ソース配線54は、第2ソース端子S2に接続されている。ドレイン電極70は、ドレイン端子Dに接続されている。第1ゲート電極42は、第1ゲート端子G1に接続されている。第2ゲート電極52は、第2ゲート端子G2に接続されている。第1ゲート端子G1は、第2ゲート端子G2と電気的に接続されている。
第1実施形態に係るMOSFETによれば、活性領域10には、第1側面17と、第1側面17に連なる第1底面18とにより規定される第1ゲートトレンチ19が設けられている。分離トレンチ39は、センス領域20と活性領域10とを分離している。これにより、センス領域20と活性領域10とが電気的に分離される。第1絶縁膜41は、第1側面17および第1底面18の双方に接している。第1導電体42は、第1絶縁膜41上に設けられている。第2絶縁膜61は、分離トレンチ39内に設けられている。第2導電体62は、第2絶縁膜61上に設けられている。第1絶縁膜41は、第2絶縁膜61と同じ材料により構成されている。第1導電体42は、第2導電体62と同じ材料により構成され、かつ第2導電体62から電気的に分離されている。これにより、分離トレンチ39を第1ゲートトレンチ19と同時に形成することができる。そのため、工程数を増やすことなく、センス領域20と活性領域10とを分離することができる。また分離トレンチ39を容易に埋めることができる。さらに分離トレンチ39が第2絶縁膜61および第2導電体62によって埋められることで、分離トレンチ39上に段差が発生することを抑制することができる。そのため、電極に電力を供給するためのアルミニウム配線を形成する際に、当該配線の付き回りの不具合が発生することを抑制することができる。
次に、第2実施形態に係るMOSFET100の構成について説明する。第2実施形態に係るMOSFETは、電流センサ素子の代わりに温度センサを有している構成において、第1実施形態に係るMOSFETと異なっており、その他の構成については、第1実施形態に係るMOSFETとほぼ同じである。以下、第1実施形態に係るMOSFETと異なる構成を中心に説明する。
図6に示されるように、第3電極95は、電源3の正極側に接続されている。第4電極98は、電源3の負極側に接続されている。第4電極98と、電源3の負極との間に、電流計4が設けられている。電源3を用いて、第3電極95と第4電極98との間に電圧が印加されると、第3コンタクト領域91と第5不純物領域23と第4コンタクト領域92とを通って、第3電極95と第4電極98との間を電流が流れる。第3電極95と第4電極98との間を流れる電流は、電流計4によって検出される。
次に、第3実施形態に係るMOSFET100の構成について説明する。第3実施形態に係るMOSFETは、温度センサ素子がダイオードである構成において、第2実施形態に係るMOSFETと異なっており、その他の構成については、第2実施形態に係るMOSFETとほぼ同じである。以下、第2実施形態に係るMOSFETと異なる構成を中心に説明する。
次に、第4実施形態に係るMOSFET100の構成について説明する。第4実施形態に係るMOSFETは、電流センサ素子を有する第1実施形態に係るMOSFETと、温度センサを有する第2実施形態または第3実施形態に係るMOSFETとを組み合わせた構成を有している。以下、第1~3実施形態の各々に係るMOSFETと異なる構成を中心に説明する。
Claims (7)
- 活性領域と、
前記活性領域から離間したセンス領域と、
前記センス領域を取り囲み、かつ前記センス領域と前記活性領域とを分離する分離トレンチとを備え、
前記活性領域は、第1導電型を有する第1不純物領域と、前記第1不純物領域上に設けられ、前記第1導電型と異なる第2導電型を有する第2不純物領域と、前記第1不純物領域から隔てられるように前記第2不純物領域上に設けられ、かつ前記第1導電型を有する第3不純物領域とを含み、
前記活性領域には、第1側面と、前記第1側面に連なる第1底面とにより規定される第1ゲートトレンチが設けられており、
前記第1側面は、前記第1不純物領域と、前記第2不純物領域と、前記第3不純物領域とにより構成されており、
前記第1底面は、前記第1不純物領域により構成されており、
前記第1側面および前記第1底面の双方に接する第1絶縁膜と、
前記第1絶縁膜上に設けられた第1導電体と、
前記分離トレンチ内に設けられた第2絶縁膜と、
前記第2絶縁膜上に設けられた第2導電体とを備え、
前記分離トレンチは、前記第1不純物領域に達しており、
前記第1絶縁膜は、前記第2絶縁膜と同じ材料により構成され、
前記第1導電体は、前記第2導電体と同じ材料により構成され、かつ前記第2導電体から電気的に分離されており、
前記センス領域は、電流センサ素子と、温度センサ素子とを有し、
前記センス領域には、前記電流センサ素子と前記温度センサ素子とを分離し、かつ前記分離トレンチに連なる境界トレンチが設けられている、ゲート絶縁型トランジスタ。 - 前記電流センサ素子は、前記第1導電型を有しかつ前記第1不純物領域に電気的に接続された第4不純物領域と、前記第2導電型を有しかつ前記第4不純物領域上に設けられた第5不純物領域と、前記第4不純物領域から隔てられるように前記第5不純物領域上に設けられかつ前記第1導電型を有する第6不純物領域とを有し、さらに、
前記センス領域には、第2側面と、前記第2側面に連なる第2底面とにより規定される第2ゲートトレンチが設けられており、
前記第2側面は、前記第4不純物領域と、前記第5不純物領域と、前記第6不純物領域とにより構成されており、
前記第2底面は、前記第4不純物領域により構成されており、さらに、
前記第2側面および前記第2底面の双方に接する第3絶縁膜と、
前記第3絶縁膜上に設けられた第3導電体とを備え、
前記第1導電体は、前記第3導電体と電気的に接続されている、請求項1に記載のゲート絶縁型トランジスタ。 - 前記温度センサ素子は、前記第1導電型を有しかつ前記第1不純物領域に電気的に接続された第4不純物領域と、前記第2導電型を有しかつ前記第4不純物領域上に設けられた第5不純物領域と、前記第2導電型を有しかつ前記第5不純物領域よりも高い不純物濃度を有する第6不純物領域とを有し、さらに、
前記第3不純物領域と電気的に接続されるソース電極と、
前記第5不純物領域および前記第6不純物領域の各々と電気的に接続される第4導電体とを備え、
前記ソース電極は、前記第4導電体から電気的に分離されている、請求項1に記載のゲート絶縁型トランジスタ。 - 前記分離トレンチの深さは、前記第1ゲートトレンチの深さ以上である、請求項1~請求項3のいずれか1項に記載のゲート絶縁型トランジスタ。
- 前記分離トレンチの深さは、前記第1ゲートトレンチの深さと同じである、請求項4に記載のゲート絶縁型トランジスタ。
- 前記分離トレンチの延在方向に対して垂直な断面における前記分離トレンチの幅は、前記第1ゲートトレンチの延在方向に対して垂直な断面における前記第1ゲートトレンチの幅以上である、請求項1~請求項5のいずれか1項に記載のゲート絶縁型トランジスタ。
- 前記第1導電体および前記第2導電体の材料は、ポリシリコンである、請求項1~請求項6のいずれか1項に記載のゲート絶縁型トランジスタ。
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