JP7169061B2 - Cutting method - Google Patents

Description

TECHNICAL FIELD The present invention relates to a cutting method for cutting a workpiece having a ductile material that overlaps a planned cutting line.

When a workpiece having metal that overlaps the planned cutting line, such as a QFN (Quad Flat Non-leaded package) or CSP (Chip Size Package) package substrate, is cut along the planned cutting line with a rotating cutting blade, the metal is removed. Due to its ductility, metal burrs are generated at the boundary between the cutting groove and the surface of the workpiece. If burrs occur, short circuits may occur between terminals, or defective mounting may occur due to the burrs dropping during subsequent handling.

Therefore, in order to solve these problems, after cutting the workpiece along the planned cutting line with the cutting blade, the so-called There is a method of removing burrs by tracing the cutting groove by up-cutting (see, for example, Patent Document 1), and a method of removing burrs by cutting by contacting the upper end of the cutting groove with a cutting tool (see, for example, Patent Document 2). Proposed.

JP-A-2001-077055 Japanese Unexamined Patent Application Publication No. 2016-016501

However, even if the cutting groove is traced with a cutting blade rotating in the direction opposite to that during cutting, as in the method described in Patent Document 1, the burr is only bent, and it is difficult to completely remove the burr. Moreover, the method described in Patent Document 2 can only remove burrs generated outside the surface of the workpiece, and cannot remove burrs in the cutting groove.

SUMMARY OF THE INVENTION An object of the present invention is to make it possible to remove burrs more easily and reliably than before.

The present invention is a cutting method for cutting a workpiece having a ductile material that has a scheduled cutting line set and overlaps the scheduled cutting line, wherein a rotating cutting blade cuts to a depth that reaches at least the ductile material. a cutting groove forming step of forming a cutting groove in the workpiece by cutting along the planned cutting line and forming an uncut portion under the cutting groove; and performing the cutting groove forming step. or, following the cutting groove forming step, a deburring step of ejecting a fluid along the cutting groove from a deburring fluid nozzle to remove the burrs of the ductile material generated in the cutting groove forming step; an uncut portion cutting step of cutting the uncut portion along the scheduled cutting line using a cutting blade after performing the removing step, wherein the deburring fluid nozzle is behind the cutting position in the processing progress direction. The burr removal step is performed on the same scheduled cutting line as the scheduled cutting line on which the cutting groove forming step is being performed , and is located on the rear side of the cutting position from the deburring fluid nozzle in the processing progress direction. Jet the fluid diagonally toward the
In this cutting method, the cutting groove forming step is performed in a forward path in which the cutting blade cuts the workpiece from one end side to the other end side, and the uncut portion cutting step is performed by the cutting blade cutting the workpiece from one end side to the other end side. It is desirable that the cutting be performed in a return pass for cutting from the other end side toward the one end side.
Further, the cutting groove forming step is performed with a first cutting blade attached to a first spindle, and the uncut portion cutting step is performed with a second cutting blade attached to a second spindle. preferably
In the cutting groove forming step, the thickness of the uncut portion is preferably 10% of the thickness of the workpiece.

In the cutting method according to the present invention, a cutting groove is formed in the workpiece by cutting the workpiece along the planned cutting line by cutting the rotating cutting blade to a depth reaching the ductile material and cutting. During the cutting groove forming step of forming an uncut portion under the groove, or during the cutting groove forming step or subsequent to the cutting groove forming step, the and a burr removing step for removing burrs of the ductile material, the burrs of the ductile material generated by cutting the workpiece can be removed more easily and more reliably than before. In addition, since the uncut portion is formed under the cutting groove, when removing burrs by injecting fluid along the cutting groove, chip flying and cutting of the tape attached to the back surface of the workpiece may occur. can be prevented, the fluid ejection force can be increased to improve the burr removal performance. Furthermore, since the size of the fluid ejection port can be increased, it becomes easier to adjust the position of the fluid ejection nozzle. Further, productivity can be improved by performing the burr removing step during the cutting groove forming step.
The cutting groove forming step is performed in the outward path in which the cutting blade cuts the workpiece from one end side to the other end side, and the uncut portion cutting step is performed while the cutting blade cuts the workpiece from the other end side to the one end side. If the cutting is performed in the return path of cutting by pressing, the cutting groove forming step and the uncut portion cutting step can be performed in one reciprocating motion, and the productivity can be improved.
When the cutting groove forming step is performed with a first cutting blade mounted on a first spindle and the rest cutting step is performed with a second cutting blade mounted on a second spindle, at least the cutting groove Since the forming step and the uncut portion cutting step can be performed in parallel, productivity can be improved. Further, in this case, if the burr removing step is performed while the cutting groove forming step is being performed, the cutting groove forming step, the burr removing step, and the uncut portion cutting step can be performed in parallel.

FIG. 1(a) is a plan view showing a workpiece. FIG. 1(b) is a bottom view showing the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows the structure of the cutting device of 1st Embodiment. 4 is a front view illustrating the configuration of cutting means; FIG. FIG. 4 is a front view showing a state in which a cutting blade has cut into one end side of a workpiece; FIG. 5(a) is a sectional view showing a state in which burrs are formed in the cutting groove. FIG. 5(b) is a cross-sectional view showing a state in which a fluid is sprayed onto the cutting groove. FIG. 5(c) is a cross-sectional view showing a state where burrs are removed. FIG. 4 is a front view showing a state in which a cutting blade that cuts from one end side of a workpiece cuts to the other end side of the workpiece; FIG. 4 is a cross-sectional view showing a state in which an uncut portion of a workpiece is cut; FIG. 11 is a side view illustrating another configuration of the cutting means; It is a perspective view which shows the structure of the cutting device of 2nd Embodiment. FIG. 4 is a cross-sectional view showing a state in which a fluid is sprayed onto the cut groove while moving the deburring fluid nozzle in the width direction of the cut groove. FIG. 4 is a plan view showing a state in which an injection spot of fluid injected into a cutting groove formed by a cutting blade moves across the cutting groove; FIG. 4 is a plan view showing a state in which cutting is performed simultaneously with a first cutting blade and a second cutting blade; FIG. 5 is a cross-sectional view showing a state in which the fluid is sprayed onto the cut groove while the deburring fluid nozzle is swung in the width direction of the cut groove. FIG. 10 is a plan view showing a state in which an injection spot of fluid injected into a cutting groove formed by a first cutting blade draws a circular trajectory and traverses the cutting groove;

1 First embodiment (reciprocating cut processing)
(1-1) Workpiece and Apparatus Configuration The workpiece W shown in FIGS. 1A and 1B is a package substrate such as a CSP (Chip Size Package) substrate to which the present invention is applied. As shown in FIG. 1(a), grid-like cutting lines L are set on the surface Wa of the workpiece W, and device chips are embedded in the respective device regions D defined by the cutting lines L. . A ductile material M is provided inside the workpiece W so as to overlap the planned cutting line L, and is exposed on the surface Wa. As shown in FIG. 1B, the back surface Wb of the workpiece W is provided with a resin sealing portion R for sealing the device chip. The workpiece W having the ductile material M overlaid on the planned cutting line L in this way is cut along the planned cutting line L using the cutting device 1 illustrated in FIG. be. The present invention is not limited to package substrates, but is also suitable for disk-shaped workpieces such as silicon wafers with TEGs (Test Element Groups) provided on a planned cutting line, wafers with resin films, and the like.

A cutting device 1 shown in FIG. 2 is a device for cutting a workpiece held by a holding means 10 with a cutting means 20 . The cutting device 1 has a stationary base 2 . On the stationary base 2, an X-axis direction moving means 30 for moving the holding means 10 in the machining feed direction (X-axis direction) and an indexing feed direction (Y-axis direction) for the cutting means 20 orthogonal to the X-axis direction are provided. ), and a Z-axis direction moving means 50 for moving the cutting means 20 in the Z-axis direction.

The holding means 10 comprises a holding table 11 for holding the workpiece. The holding table 11 includes a suction section 12 and four clamp sections 13 arranged outside the suction section 12 . This clamp part 13 fixes the annular frame when the back surface of the workpiece is attached to the adhesive tape and the outer peripheral portion of the adhesive tape is attached to the annular frame. As will be described later, the workpiece W may be held by the holding means 10 via a rectangular jig as shown in FIG. 9 without using an adhesive tape or an annular frame. A lower portion of the holding means 10 is connected to a rotation driving portion 14 that rotates the holding table 11 .

The X-axis direction moving means 30 includes a ball screw 31 arranged on the stationary base 2 and extending in the X-axis direction, a pair of guide rails 32 arranged parallel to the ball screw 31, and connected to one end of the ball screw 31. It comprises a motor 33 for rotating the ball screw 31, a bearing portion 34 for supporting the other end of the ball screw 31, and a movable base 35 whose internal nut is screwed onto the ball screw 31 and whose lower portion is in sliding contact with the guide rail 32. When the motor 33 rotates the ball screw 31 in both forward and reverse directions, the moving base 35 is guided by the guide rail 32 and moves in the X direction. The motor 33 is controlled by a control means 60 having a CPU, memory, and the like.

The Y-axis direction moving means 40 is arranged on the stationary base 2 and includes a ball screw 41 extending in the Y-axis direction, a pair of guide rails 42 arranged in parallel with the ball screw 41 , and one end of the ball screw 41 . It is provided with a motor 43 connected to rotate the ball screw 41, and a movable base 44 whose internal nut is screwed onto the ball screw 41 and whose lower part is in sliding contact with the guide rail 42. The motor 43 rotates the ball screw 41 forward and backward. By rotating it, the movable base 44 is guided by the guide rail 42 and moved in the Y direction. Motor 43 is controlled by control means 60 .

The Z-axis direction moving means 50 is arranged on the moving base 44, and includes a ball screw 51 extending in the Z-axis direction, a pair of guide rails 52 arranged parallel to the ball screw 51, and one end of the ball screw 51. It comprises a motor 53 connected to rotate the ball screw 51, and an elevating block 54 whose internal nut is screwed onto the ball screw 51 and whose side portion is in sliding contact with the guide rail 52. The motor 53 rotates the ball screw 51 forward and backward. By rotating the lifting block 54, the lifting block 54 is guided by the guide rail 52 and moves in the Z direction. Motor 53 is controlled by control means 60 .

The cutting means 20 includes a spindle housing 23 that is cantilevered by an elevating block 54 and extends in the Y direction; and a cutting blade 22 mounted thereon. The spindle 21 is connected to a motor (not shown) housed in a spindle housing 23 , and the cutting blade 22 rotates together with the spindle 21 .

An alignment means 70 is fixed to the spindle housing 23 . The alignment means 70 has an imaging means 71 for imaging the workpiece W, and moves along with the cutting means 20 in the X-axis direction, the Y-axis direction, and the Z-axis direction.

The control means 60 detects the position of the workpiece W to be cut based on the image captured by the imaging means 71, and controls the cutting means 20, the X-axis direction moving means 30, the Y-axis direction moving means 40, and the Z-axis direction moving means. The workpiece W is cut while driving and controlling the means 50 .

As shown in FIG. 3, the cutting means 20 has a blade cover 24 that covers the cutting blade 22 from above. The cutting blade 22 is a washer blade formed into a disc shape by hardening diamond abrasive grains with a resin or metal bond, for example. A hub blade may be provided with a cutting whetstone in which diamond abrasive grains and the like are dispersed in a nickel base material on the outer periphery of a circular base.

The blade cover 24 is provided with cutting water supply nozzles 25 and 250 and a deburring fluid nozzle 26 . The cutting water supply nozzles 25 are a pair of nozzles for supplying cutting water to the cutting blade 22, and are arranged to sandwich the cutting blade 22 in the Y-axis direction. The cutting water supply nozzle 25 has a hanging portion 25a extending downward from the lower end of the blade cover 24 and a horizontal portion 25b extending in the X-axis direction from the lower end of the hanging portion 25a. A horizontal portion 25b of the cutting water supply nozzle 25 is provided with a jetting slit (not shown) for jetting cutting water toward the cutting blade 22 so as to face the cutting blade. The cutting water supply nozzle 25 is connected to a cutting water supply source 81 through a cutting water supply path (not shown) formed inside the blade cover 24, a cutting water supply pipe 27a connected to the blade cover 24, and a valve 83. When the valve 83 is open, the cutting water 81a flowing out from the cutting water supply source 81 passes through the cutting water supply pipe 27 and the cutting water supply channel (not shown) formed inside the blade cover 24, and flows into the cutting water supply. The cutting blade 22 is supplied to the contact position (cutting position P1) between the cutting blade 22 and the workpiece W by being jetted toward the front surface and the back surface of the cutting blade 22 from the injection slit of the nozzle 25 .

The blade cover 24 supplies cutting water to the contact position (cutting position P1) between the cutting blade 22 and the workpiece W by ejecting cutting water from the outer peripheral side of the cutting blade toward the cutting blade 22. A cutting water supply nozzle 250 is also provided. The cutting water supply nozzle 250 is connected to a cutting water supply source 81 through a cutting water supply path (not shown) formed inside the blade cover 24, a cutting water supply pipe 27b connected to the blade cover 24, and a valve 83. there is

The deburring fluid nozzle 26 is a nozzle for spraying a deburring fluid on the cutting groove formed in the workpiece W cut by the cutting blade 22 to remove burrs formed on the upper end of the cutting groove. A deburring fluid nozzle 26 is provided at the −X side end of the blade cover 24 . The deburring fluid nozzle 26 preferably jets the deburring fluid 82a obliquely toward the -X side of the cutting position P1 so that deburring can be performed at a position closer to the cutting position P1. You can shoot straight down. When the workpiece is machined, the holding table 11 that holds the workpiece moves in the -X direction. means behind the The deburring fluid nozzle 26 is connected to a deburring fluid supply source 82 via a deburring fluid supply pipe 28 and a valve 84, and when the valve 84 is open, the deburring fluid flowing out of the deburring fluid supply source 82 The fluid 82 a is jetted from the deburring fluid nozzle 26 through the deburring fluid supply pipe 28 . High-pressure pure water or city water, for example, is used as the deburring fluid 82a.

(1-2) Cutting Method Next, a cutting method for dividing a workpiece into individual devices using the cutting apparatus 1 will be described. The workpiece is not particularly limited in terms of shape, material, etc., as long as it has a ductile material overlaid on the line to be cut.

A workpiece W shown in FIG. 4 is the package substrate shown in FIG. The workpiece W is held by suction on the holding table 11 of the holding means 10 while being supported by the annular frame F via the adhesive tape T adhered to the rear surface Wb. The annular frame F is fixed at four points by clamp portions 13 .

(a) Cutting groove forming step and burr removing step After the workpiece W is held by the holding means 10, the surface Wa of the workpiece W is imaged by the imaging means 71 shown in FIG. A line is detected. After that, the cutting means 20 is driven by the Y-axis direction moving means 40 to move in the Y-axis direction, and the line to be cut to be cut and the cutting blade 22 are aligned in the Y-axis direction.

Then, the Z-axis direction moving means 50 lowers the cutting means 20 to move the lower end of the cutting blade 22 in the Z-axis direction to the height position between the front surface Wa and the back surface Wb of the workpiece W. When the holding means 10 is driven by the X-axis direction moving means 30 to move in the X-axis direction, the rotating cutting blade 22 cuts into the detected planned cutting line, as shown in FIG. As such, cutting begins.

The X-axis direction moving means 30 shown in FIG. 1 feeds the holding means 10 in the -X direction, so that cutting progresses along the planned cutting line (cutting groove forming step). The cutting of the workpiece W in the cutting groove forming step is performed by a so-called down-cut that cuts the workpiece W downward in front of the relative movement direction (+X direction) of the cutting blade 22 with respect to the workpiece W. be. During cutting, the valve 83 is opened as shown in FIG. 4, and cutting water 81a is supplied from the cutting water supply nozzles 25 and 250 to the cutting position P1 shown in FIG. By performing this cutting, as shown in FIG. 5A, a cutting groove U that does not penetrate to the back surface Wb is formed in the workpiece W, and an uncut portion E is formed under the cutting groove U. be done. A burr B made of a ductile material M is formed at the upper end of the cutting groove U. As shown in FIG.

During the cutting groove forming step, the valve 84 shown in FIG. 3 is also opened, and as shown in FIG. is jetted, and the deburring fluid 82a lands on the deburring position P2 on the workpiece W shown in FIG. 3 (deburring step). Then, in the burr removing step, the burr B formed on the upper end of the cutting groove U is removed as shown in FIG. 5(c) immediately after it is formed.

(b) Uncut Portion Cutting Step As shown in FIG. 6, when the cutting blade 22 relatively moves to the +X side end of the planned cutting line L to be cut, a cutting groove U is formed along the planned cutting line. Then, while continuing to jet the deburring fluid 82a from the deburring fluid nozzle 26, when the holding means 10 is further moved in the -X direction by the distance between the cutting position P1 and the deburring position P2 shown in FIG. 84 is closed to stop the ejection of the deburring fluid 82a, and the feeding of the holding means 10 in the -X direction by the X-axis direction moving means 30 shown in FIG. 1 is stopped. At this time, the valve 83 is kept open, and cutting water jetting from the cutting water supply nozzles 25 and 250 continues. Then, while rotating the cutting blade 22 at a high speed, the Z-axis direction moving means 50 further lowers the cutting means 20 in the -Z direction to cut the cutting blade 22 to a depth reaching the adhesive tape T as shown in FIG. At the same time, the X-axis direction moving means 30 feeds the holding means 10 in the +X direction, and cuts the workpiece W along the planned cutting line L in the direction opposite to the cutting groove forming step. During this time, cutting water 81 a is jetted from the cutting water supply nozzles 25 and 250 .

The cutting of the workpiece W in the uncut portion cutting step is a so-called up-cut that cuts the workpiece W upward in front of the relative movement direction (−X direction) of the cutting blade 22 with respect to the workpiece W. be implemented. By performing this cutting, as shown in FIG. 7, the uncut portion E is cut and penetrates to the rear surface Wb.

When the cutting blade 22 relatively moves to the -X side end of the planned cutting line L, the X-axis direction moving means 30 shown in FIG. raises the cutting means 20 in the +Z direction to separate the cutting blade 22 from the workpiece W. Next, the planned cutting line L to be cut next and the cutting blade 22 are aligned in the Y-axis direction. Positioned in the department. Then, the valve 84 is opened to restart the jetting of the deburring fluid 82a, and the cutting groove forming step, the burr removing step, and the uncut portion cutting step are performed on the planned cutting line L in the same manner as described above. After these series of steps have been performed for all the planned cutting lines L in the same direction of the workpiece W, the holding table 11 is rotated by 90 degrees, and similarly the cutting groove forming step, the burr removing step and the uncut portion are performed. A part cutting step is performed. Then, when the uncut portion cutting step for the final planned cutting line L is completed, the division of the workpiece W into the individual device packages D is completed.

As described above, the cutting method of the first embodiment cuts the workpiece W along the planned cutting line L by cutting the rotating cutting blade 22 to a depth reaching the ductile material M. , a cutting groove forming step of forming a cutting groove U in the workpiece W and forming an uncut portion E under the cutting groove U; and a burr removing step of removing the burrs B of the ductile material M generated in the cutting groove forming step by spraying the burrs B of the ductile material M generated by cutting the workpiece W into the conventional easier and more reliable to remove. When the deburring fluid 82a is ejected while the workpiece W is completely cut into individual pieces, the deburring fluid 82a that has reached the surface Wa of the workpiece W pushes the chips through the gaps between the adjacent chips. Since it wraps around to the back surface side and pushes up the chip, chip flying occurs. Chip flying can be prevented when the burr B is removed by injecting the 82a. Further, when the deburring fluid 82a is ejected while the workpiece W is completely cut into individual pieces, the deburring fluid 82a ejected into the gap between the adjacent chips collides directly with the adhesive tape T. Therefore, there is a high possibility that the adhesive tape T will break. However, in the present invention, since the uncut portion E is formed in the workpiece W, chip flying and cutting of the adhesive tape T can be reliably prevented. Furthermore, since there is no risk of chip flying or cutting of the adhesive tape T, the ejection force of the deburring fluid 82a can be increased to improve deburring performance. In addition, since the injection size of the deburring fluid nozzle 26 can be increased, the position of the deburring fluid nozzle 26 can be easily adjusted.

Further, in order to perform the burr removing step for removing burrs generated in the cutting groove immediately after the cutting groove is formed on the same scheduled cutting line L as the cutting line L on which the cutting groove forming step is being performed, A groove forming step and a burr removing step can be efficiently performed.

In the first embodiment, the cutting groove forming step and the burr removing step are performed by moving the cutting blade 22 from one end of the workpiece W (−X side end of the planned cutting line L) to the other end (+X side end). In the uncut portion cutting step, the cutting blade 22 moves from the other end side of the workpiece W (+X side end of the planned cutting line L) to one end (−X side end) Since it is carried out in the return path of cutting toward, the cutting groove forming step, the burr removing step, and the uncut portion cutting step can be efficiently carried out. In addition, chipping of the surface of the workpiece W is suppressed by performing cutting by down cutting in the outward path. In the cutting groove forming step, the cutting groove may be formed so that the tip of the cutting blade 22 reaches at least the ductile material M. For example, the thickness of the uncut portion E is set to about 10% of the thickness of the workpiece W. , it is possible to perform cutting without lowering the feed rate in the step of cutting the uncut portion in up-cutting.

In the first embodiment, as shown in FIG. 3, the deburring fluid nozzle 26 deburrs toward a position near the cutting position P1 on the -X side so that deburring can be performed at a position closer to the cutting position P1. It is configured to jet the fluid 82a obliquely. In order to jet the deburring fluid 82a to the end of the cutting groove U, after the center of the cutting blade 22 reaches the end of the cutting groove U, the distance between the cutting position P1 and the deburring position P2 is If the cutting position P1 and the deburring position P2 are close to each other when the workpiece W needs to be fed in the -X direction, the burr B will be removed immediately after it is formed by cutting. can improve throughput. The distance between the cutting position P1 and the deburring position P2 is preferably 5 mm or less, and the incident angle of the deburring fluid 82a with respect to the surface Wa of the workpiece W may be 0° or more and less than 90°. By setting the distance between the cutting position P1 and the deburring position P2 to 5 mm or less, the throughput is reliably improved.

Instead of the deburring fluid nozzle 26 having the configuration shown in FIG. 3, for example, as shown in FIG. Fluid nozzles 29 can also be employed.

2 Second embodiment (step cut processing)
(2-1) Workpiece and Device Configuration The workpiece W shown in FIG. 9 is a package substrate such as a CSP (Chip Size Package) substrate (see FIG. 1). A cutting apparatus 100 shown in FIG. 9 applies a first cutting means 120 having a first cutting blade 121 and a second cutting blade 131 (see FIG. 12) to a workpiece W held by a holding means 110. It is an apparatus for performing cutting by a second cutting means 130 provided.

On the stationary base 101 of the cutting device 100, an X-axis direction moving means 140 for reciprocating the holding means 110 in the X-axis direction is provided. The X-axis direction moving means 140 includes a ball screw 141 having an axis in the X-axis direction, a pair of guide rails 142 arranged parallel to the ball screw 141, a motor 143 for rotating the ball screw 141, and an internal nut. It is composed of a movable plate 145 which is screwed onto the ball screw 141 and whose bottom portion is in sliding contact with the guide rail 142 . When the motor 143 rotates the ball screw 141, the movable plate 145 is guided by the guide rail 142 and moves in the X-axis direction. moves in the X-axis direction along with the movement of , the workpiece W held by the holding means 110 is fed for cutting in the X-axis direction.

The holding means 110 has a rectangular jig 111 . The jig 111 has a suction holding portion 112 for holding the workpiece W by suction on its upper surface. The jig 111 is fixed on the rotary table 113 provided on the movable plate 145 . An escape groove corresponding to the planned cutting line of the workpiece W is formed on the upper surface of the jig 111 . A workpiece W is held on a rotary table 113 via a jig 111 . The rotary table 113 is rotationally driven by a rotary mechanism having a motor (not shown).

On the −X direction side of the stationary base 101 , a gate-shaped column 102 is erected so as to straddle the X-axis direction moving means 140 . On the front surface of the portal column 102, there are a first Y-axis direction moving means 150 for reciprocating the first cutting means 120 in the Y-axis direction and a second Y-axis direction moving means 150 for reciprocating the second cutting means 130 in the Y-axis direction. , and the Y-axis direction moving means 160 are arranged in a pair.

The first Y-axis direction moving means 150 includes a ball screw 151 having an axial center in the Y-axis direction, a pair of guide rails 152 arranged parallel to the ball screw 151, a motor 153 for rotating the ball screw 151, an internal A nut is screwed onto the ball screw 151 and a movable plate 154 whose side portion is in sliding contact with the guide rail 152 . When the motor 153 rotates the ball screw 151, the movable plate 154 is guided by the guide rail 152 and moves in the Y-axis direction, and the first cutting means 120 supported by the movable plate 154 moves to the movable plate. 154 is indexed and fed in the Y-axis direction.

The second Y-axis direction moving means 160 includes a ball screw 161 having an axial center in the Y-axis direction, a pair of guide rails 162 arranged parallel to the ball screw 161, a motor 163 for rotating the ball screw 161, an internal A nut is screwed onto the ball screw 161 and a movable plate 164 whose side portion is in sliding contact with the guide rail 162 . When the motor 163 rotates the ball screw 161, the movable plate 164 is guided by the guide rail 162 and moves in the Y-axis direction, and the second cutting means 130 supported by the movable plate 164 moves to the movable plate. 164 is indexed and fed in the Y-axis direction. The pair of guide rails 152 of the first Y-axis direction moving means 150 and the pair of guide rails 162 of the second Y-axis direction moving means 160 are common members.

The movable plate 154 of the first Y-axis direction moving means 150 is provided with a first Z-axis direction moving means 170 for vertically moving the first cutting means 120 in the Z-axis direction. The first Z-axis direction moving means 170 includes a ball screw 171 having an axis in the Z-axis direction, a pair of guide rails 172 arranged parallel to the ball screw 171, a motor 173 for rotating the ball screw 171, an internal A nut is screwed onto the ball screw 171 and a support member 174 whose side portion is in sliding contact with the guide rail 172 . When the motor 173 rotates the ball screw 171, the support member 174 is guided by the guide rail 172 and moves in the Z-axis direction. is cut and fed in the Z-axis direction along with the movement of .

Further, the movable plate 164 of the second Y-axis direction moving means 160 is provided with a second Z-axis direction moving means 180 for vertically moving the second cutting means 130 in the Z-axis direction. The second Z-axis direction moving means 180 includes a ball screw 181 having an axis in the Z-axis direction, a pair of guide rails 182 arranged parallel to the ball screw 181, a motor 183 for rotating the ball screw 181, an internal A nut is screwed onto the ball screw 181 and a support member 184 whose side portion is in sliding contact with the guide rail 182 . When the motor 183 rotates the ball screw 181, the support member 184 is guided by the guide rail 182 and moves in the Z-axis direction. is cut and fed in the Z-axis direction along with the movement of .

The first cutting means 120 includes a spindle 122 whose axial direction is perpendicular to the horizontal direction (Y-axis direction) with respect to the movement direction (X-axis direction) of the holding means 110, and a housing that rotatably supports the spindle 122. 123, a blade cover 124 that covers the first cutting blade 121, and a motor (not shown) that rotates the spindle 122. As the motor rotates the spindle 122, it is fixed to the tip of the spindle 122. The first cutting blade 121 rotates at high speed.

The second cutting means 130 includes a spindle 132 (see FIG. 12) whose axial direction is perpendicular to the horizontal direction (Y-axis direction) with respect to the moving direction (X-axis direction) of the holding means 110, and a rotating spindle 132. It includes a housing 133 that supports the cutting blade 131, a blade cover 134 that covers the second cutting blade 131, and a motor (not shown) that rotates the spindle 132. As the motor rotates the spindle 132, the spindle 132 The second cutting blade 131 fixed to the tip of the is rotated at high speed.

Alignment means 191 and 192 are fixed to the housing 123 of the first cutting means 120 and the housing 133 of the second cutting means 130, respectively. Each of the alignment means 191 and 192 has imaging means 193 and 194 for imaging the workpiece W, and moves in the Y-axis direction and the Z-axis direction together with the first cutting means 120 and the second cutting means 130, respectively.

The blade cover 124 of the first cutting means 120 is provided with the cutting water supply nozzles 25 and 250 and the deburring fluid nozzle 26 shown in FIG. 3, like the cutting means 20 of the first embodiment. . The first cutting means 120 cuts the workpiece W with the first cutting blade 121 while supplying cutting water 81 a from the cutting water supply nozzles 25 and 250 to the first cutting blade 121 . At this time, as shown in FIG. 10, the first cutting means 120 sprays the deburring fluid 82a from the deburring fluid nozzle 26 onto the cutting groove U of the workpiece W cut by the first cutting blade 121. , the burr B formed on the upper end of the cutting groove U is removed. The deburring fluid nozzle 26 is supported by the blade cover 124 via nozzle moving means (not shown). The nozzle moving means cuts the deburring fluid nozzle 26 so that the jet spot SP formed by jetting the deburring fluid 82a onto the surface Wa of the workpiece W as shown in FIG. 11 traverses the cutting groove U. It is moved in the width direction (Y-axis direction) of the groove U.

The blade cover 134 of the second cutting means 130 is provided with the cutting water supply nozzles 25 and 250 shown in FIG. The second cutting means 130 cuts the workpiece W with the second cutting blade 131 while supplying cutting water 81 a from the cutting water supply nozzles 25 and 250 to the second cutting blade 131 . The second cutting means 130 may not be equipped with the deburring fluid nozzle 26 during step cutting.

Each driving part of the cutting device 100 shown in FIG. 9 is controlled by the control means 200 . That is, the control means 200 detects the position of the workpiece W to be cut based on an image captured by one of the imaging means 193 and 194 (for example, the imaging means 193), and the first cutting means 120 and the second cutting means cutting means 130, X-axis direction moving means 140, first Y-axis direction moving means 150, second Y-axis direction moving means 160, first Z-axis direction moving means 170 and second Z-axis direction moving means 180 etc. are drive-controlled, and the workpiece W is cut. Note that even when the position to be cut is detected only by the imaging means 193 , both the imaging means 193 and 194 are used to check the cut grooves formed by cutting by imaging (kerf check).

(2-2) Cutting Method Next, a cutting method for dividing the workpiece W into individual devices D by step cutting using the cutting device 100 will be described.

(a) Cutting groove forming step and burr removing step After the workpiece W is held by the holding means 110, the surface Wa of the workpiece W is imaged by the imaging means 193 of the first cutting means 120, and the surface Wa of the workpiece W is to be cut. A planned cutting line L is detected. After that, the first cutting means 120 is driven by the first Y-axis direction moving means 150 to move in the Y-axis direction, and the position of the planned cutting line L to be cut and the first cutting blade 121 in the Y-axis direction While the alignment is performed, the first Z-axis direction moving means 170 lowers the first cutting means 120 to position the lower end of the first cutting blade 121 in the Z-axis direction so that the first cutting blade 121 is ductile. Align with the position reaching the material M. Then, the holding means 110 is driven by the X-axis direction moving means 140 to move to the -X side, and the -X side end of the planned cutting line L to be cut is positioned at the +X side position of the first cutting blade 121. be done.

Thereafter, while rotating the first cutting blade 121 at a high speed, the X-axis direction moving means 140 feeds the holding means 110 in the -X direction, thereby moving the workpiece W along the planned cutting line L as shown in FIG. cutting. During this time, the cutting water 81a is supplied from the cutting water supply nozzles 25 and 250 to the first cutting blade 121, and the deburring fluid 82a is jetted along the cutting groove U of the workpiece W from the deburring fluid nozzle . That is, also in this embodiment, the burr removing step is performed during the cutting groove forming step.

The cutting of the workpiece W in the cutting groove forming step is a so-called down cut in which the workpiece W is cut downward in front of the relative movement direction (+X direction) of the first cutting blade 121 with respect to the workpiece W. carried out by By performing this cutting, as in the first embodiment, a cutting groove U is formed in the workpiece W as shown in FIG. E is formed. A burr B made of a ductile material M is formed at the upper end of the cutting groove U. As shown in FIG.

Then, in the burr removing step that is performed during the cutting groove forming step, as shown in FIG. By jetting the deburring fluid 82a along the cutting groove U of the workpiece W, the burr B on the upper end of the cutting groove U is removed.

The center of the first cutting blade 121 relatively moves to the +X side end of the planned cutting line L, and the workpiece W is processed in the -X direction by the distance between the cutting position P1 and the deburring position P2. Then, the X-axis direction moving means 140 stops feeding the holding means 110 in the -X direction, and the first Z-axis direction moving means 170 moves the first cutting means 120 upward in the +Z direction. , the cutting blade 121 is separated from the workpiece W. Next, the first cutting blade 121 is positioned on the X-direction extension line of the planned cutting line L to be cut next, and the positions of the cutting line L and the first cutting blade 121 in the Y direction match, and cutting The -X side end of the planned cutting line L to be cut is positioned at the position on the +X side of the first cutting blade 121, and the first cutting blade 121 is positioned at a predetermined Z-direction height. Then, the cutting groove forming step and the burr removing step are performed on the planned cutting line L in the same manner as described above. By closing the valve 84 shown in FIG. 3 while the holding means 110 is moving in the +X direction, the jetting of the deburring fluid is stopped.

(b) Uncut portion cutting step When the cutting groove forming step and the burr removing step for the first planned cutting line L are completed, and the step for forming the cutting groove and the burr removing step for the second planned cutting line L is performed. , the second cutting means 130 is driven by the second Y-axis direction moving means 160 based on the detection result of the line to be cut by the imaging means 193 performed before performing the cutting groove forming step, and is moved in the Y-axis direction. The second cutting blade 131 is positioned on the planned cutting line L of the first line, and the second cutting blade 131 is moved so that the lower end of the second cutting blade 131 is positioned slightly below the back surface Wb of the workpiece W. The position of the cutting blade 131 in the Z-axis direction is adjusted.

After that, the cutting groove forming step and the burr removing step for the second scheduled cutting line L are performed, and at the same time, the uncut portion cutting step for the first scheduled cutting line L is performed. That is, as shown in FIG. 12, the first cutting blade 121 is positioned on the planned cutting line L where the cutting grooves are to be formed, and the second cutting blade 131 is positioned on the planned dividing line L on which the cutting grooves U are formed. is positioned to send the holding means 110 in the -X direction. As a result, the second cutting line L is cut by the first cutting blade 121 and the burr B is removed by the deburring fluid 82a, and at the same time, the first cutting line L is cut by the second cutting blade 131. Cutting of the remaining portion is performed. During this time, cutting water 81a is supplied from the cutting water supply nozzles 25 and 250 to the first cutting blade 121 and the second cutting blade 131, respectively. Moreover, the deburring fluid is supplied from the deburring fluid nozzle to the burrs formed by cutting with the first cutting blade 121 .

The cutting of the workpiece W in the uncut portion cutting step is also a so-called down cut in which the workpiece W is cut downward in front of the movement direction (+X direction) of the second cutting blade 131 relative to the workpiece W. carried out by The uncut portion E is removed by performing this cutting.

Thereafter, the cut groove forming step and the burr removing step are performed for the scheduled cutting lines L from the third line onward, and at the same time, the uncut portion cutting step for the scheduled cutting lines L from the second line onward are performed. These series of steps are performed for all the scheduled cutting lines L of the workpiece W, and when the uncut portion cutting step for the last scheduled cutting line L is completed, each individual workpiece W is The division to device D is completed.

It should be noted that the interval between the adjacent planned cutting lines is short, and due to the structure of the first cutting means 120 and the second cutting means 130, the first cutting blade 121 and the second cutting blade 131 are separated from the neighboring planned cutting lines. If there is a possibility that the first cutting means 120 and the second cutting means 130 will collide when trying to position them above, the scheduled cutting line where the uncut portion is cut by the second cutting blade 131 is , may be several lines away from the planned cutting line on which the cutting groove is formed by the first cutting blade 121 .

As described above, also in the cutting method of the second embodiment, the rotating first cutting blade 121 is caused to cut to a depth reaching the ductile material M to cut along the scheduled cutting line L. , a cutting groove forming step of forming a cutting groove U in the workpiece W and forming an uncut portion E under the cutting groove U; and a burr removing step of removing the burrs B of the ductile material M generated in the cutting groove forming step by spraying the burrs B of the ductile material M generated by cutting the workpiece W into the conventional easier and more reliable to remove.
In particular, a package substrate having a cavity (concave portion) formed on the planned cutting line L is likely to have burrs during cutting, so the application of the present invention is effective.

Also in the second embodiment, since the burr removing step is performed on the same scheduled cutting line L as the scheduled cutting line L on which the cutting groove forming step is being performed, the cutting groove forming step and the burr removing step are efficiently performed. It is possible.

Further, in the second embodiment, the grooving step is performed with a first cutting blade 121 mounted on a first spindle 122 and the rest cutting step is mounted on a second spindle 132. Since it is performed by the second cutting blade 131, the cutting groove forming step, the burr removing step, and the cutting groove forming step can be performed in parallel, which is more efficient.

In the second embodiment, as shown in FIGS. 10 and 11, the deburring fluid nozzle 26 is moved in the width direction (Y-axis direction) of the cutting groove U so that the injection spot SP of the deburring fluid 82a is By traversing the cutting groove U, the central portion of the injection spot SP where the flow velocity of the deburring fluid 82a is the fastest is applied to both sides in the width direction of the upper end of the cutting groove U where the burr B is formed, The burrs B can be removed efficiently.

It should be noted that the embodiments of the present invention are not limited to the above-described embodiments, and may be variously changed, replaced, and modified without departing from the spirit of the technical idea of the present invention.

For example, in the above embodiment, the burr removing step is performed during the cutting groove forming step, but the burr removing step may be performed after the cutting groove forming step. For example, the burr removal step may be performed for each scheduled cutting line L each time the cutting groove forming step for one scheduled cutting line L is completed, or all scheduled cutting lines in the same direction of the workpiece W may be removed. The burr removing step may be performed after the cutting groove forming step for L is completed.

In the above embodiment, high-pressure pure water is used as the deburring fluid 82a, but high-pressure liquid or gas mixed with abrasive grains, dry ice air, or the like may be used.

Furthermore, in the first embodiment, the cutting groove forming step is performed by the cutting blade 22 by down-cutting in the outward path from one end side to the other end side of the workpiece W, and the uncut portion cutting step is performed by the cutting blade 22 is performed by up-cutting in the return path from the other end side to the one end side of the workpiece W, but the step of cutting the uncut portion is not performed in the return path, and the cutting blade 22 is removed after the step of forming the cutting groove is performed. It is also possible to return to the one end side of the workpiece W and carry out the uncut portion cutting step by down-cutting in the forward pass.

10 and 11, instead of linearly reciprocating the deburring fluid nozzle 26 in the width direction of the cutting groove U, like the deburring fluid nozzle 26a shown in FIG. The jet spot SP (FIG. 11) of the deburring fluid 82a may traverse the cutting groove U by swinging it in the width direction of the cutting groove U about 260. FIG. Further, as shown in FIG. 14, the deburring fluid nozzle 26 may be rotationally moved so that the injection spot SP of the deburring fluid 82a draws a circular trajectory while crossing the cutting groove U. As shown in FIG.

Further, in the second embodiment, cutting in both the cutting groove forming step and the uncut portion cutting step is performed by down-cutting. The partial cutting step may be performed by up-cutting.

The deburring fluid nozzle 26 may be linearly reciprocated in the width direction of the cutting groove U, oscillated in the width direction of the cutting groove U, or rotated so that the injection spot SP draws a circular orbit. The configuration may be employed in the first embodiment.

1: Cutting Device 2: Stationary Base 10: Holding Means 11: Holding Table 12: Suction Part 13: Clamp Part 14: Rotary Drive Part 20: Cutting Means 21: Spindle 22: Cutting Blade 23: Spindle Housing 24: Blade Cover 25 , 250: Cutting water supply nozzle 25a: Hanging portion 25b: Horizontal portion 26: Deburring fluid nozzle 26a: Shaft 27: Cutting water supply pipe 28: Deburring fluid supply pipe 29: Deburring fluid nozzle 30 X-axis direction moving means 31: Ball screw 32: Guide rail 33: Motor 34: Bearing 35: Moving base 40: Y-axis direction moving means 41: Ball screw 42: Guide rail 43: Motor 44: Moving base 50: Z-axis direction moving means 51: Ball screw 52 : guide rail 53: motor 54: elevating block 60: control means 70: alignment means 71: imaging means
81: Cutting water supply source 82: Deburring fluid supply source 81a: Cutting water 82a: Deburring fluid 83, 84: Valve 100: Cutting device 101: Stationary base 102: Portal column 110: Holding means 111: Jig 112 : Suction holding part 113: rotary table 120: first cutting means 121: first cutting blade 122: spindle 123: housing 124: blade cover 130: second cutting means 131: second cutting blade 132: spindle 133 : Housing 134: Blade cover 140: X-axis direction moving means 141: Ball screw 142: Guide rail 143: Motor 145: Movable plate 150: First Y-axis direction moving means 151: Ball screw 152: Guide rail 153: Motor 154: Movable Plate 160: Second Y-axis moving means 161: Ball screw 162: Guide rail 163: Motor 164: Movable plate 170: First Z-axis moving means 171: Ball screw 172: Guide rail 173: Motor 174: Support member 180 : second Z-axis direction moving means 181: ball screw 182: guide rail 183: motor 184: support member 191: alignment means 192: alignment means 193: imaging means 194: imaging means 200: control means B: burr D: device E : Uncut portion F: Annular frame L: Planned cutting line (planned cutting line)
M: Ductile material P1: Cutting position P2: Deburring position R: Resin sealing part SP: Injection spot T: Adhesive tape U: Cutting groove W: Workpiece Wa: Front surface Wb: Back surface

Claims (4)

A cutting method for cutting a workpiece having a ductile material in which a scheduled cutting line is set and which overlaps the scheduled cutting line,
A cutting groove is formed in the workpiece by cutting along the planned cutting line by cutting the rotating cutting blade to a depth reaching at least the ductile material, and an uncut portion is left under the cutting groove. a cutting groove forming step to form;
During the cutting groove forming step or subsequent to the cutting groove forming step, a fluid is ejected from a deburring fluid nozzle along the cutting groove to remove burrs of the ductile material generated in the cutting groove forming step. a deburring step for
After performing the burr removing step, the uncut portion cutting step of cutting the uncut portion along the planned cutting line using the cutting blade;
with
The deburring fluid nozzle is arranged behind the cutting position in the direction of progress of processing, and the deburring step is performed on the same scheduled cutting line as the cutting scheduled line on which the cutting groove forming step is being performed. Fluid is jetted obliquely from the deburring fluid nozzle toward the rear side of the cutting position in the direction of progress of processing.
cutting method. The cutting groove forming step is performed in a forward path in which the cutting blade cuts from one end side of the workpiece toward the other end side,
The uncut portion cutting step is performed on a return trip in which the cutting blade cuts from the other end side of the workpiece toward the one end side.
The cutting method according to claim 1. the cutting groove forming step is performed with a first cutting blade mounted on a first spindle;
the step of cutting rest is performed with a second cutting blade mounted on a second spindle;
The cutting method according to claim 1. 2. The cutting method according to claim 1, wherein in said cutting groove forming step, the thickness of said uncut portion is set to 10% of the thickness of said workpiece.

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