JP7162513B2 - processing equipment - Google Patents

Description

The present invention relates to processing equipment.

Various processing apparatuses are known that hold a plate-like workpiece on a chuck table, cut it with a cutting blade, thin it with a grinding wheel, and process it with a laser beam. In these processing apparatuses, each stage supports one workpiece, the workpiece is taken out from a cassette having a plurality of stages, the workpiece is processed by a chuck table, washed by a cleaning table, A fully automatic processing apparatus that returns the wafer to the cassette is often used (see, for example, Patent Document 1).

In the processing apparatus disclosed in Patent Document 1 and the like, the area other than the cassette is covered with an exterior cover for the purpose of preventing foreign matter from adhering to the workpiece and preventing unexpected injury to the operator. covered.

JP 2016-15042 A

In the processing apparatus disclosed in Patent Literature 1 and the like, the area other than the cassette is covered with an exterior cover, so it is not clear where the workpiece is positioned within the apparatus at a glance. Furthermore, the processing apparatus disclosed in Patent Document 1 etc. displays numerically how far the processing has progressed among the workpieces accommodated in the cassette, but it is difficult to understand at a glance, and it is difficult to understand at a distance. It is difficult to understand the progress by looking at the screen of the display device from the beginning.

SUMMARY OF THE INVENTION The present invention has been made in view of such problems, and an object of the present invention is to provide a processing apparatus capable of grasping the progress of processing of a workpiece.

In order to solve the above-described problems and achieve the object, the processing apparatus of the present invention comprises a chuck table that holds a workpiece, a processing unit that processes the workpiece held on the chuck table, and a workpiece. A cassette mounting area where a cassette having a plurality of stages for accommodating workpieces is mounted, a cleaning area for cleaning the workpieces, and a workpiece between the cassette, the chuck table and the cleaning area. A processing apparatus comprising a transport unit for transporting, a display screen for displaying the progress of processing of the workpiece, and a display information setting unit for setting information to be displayed on the display screen, wherein the display information The setting unit has a chuck table corresponding area corresponding to the chuck table and a cleaning corresponding area corresponding to the cleaning area . Each corresponding area is displayed in a different color . A workpiece mark for superimposing the current position of the processed workpiece on the internal map and a plurality of squares indicating the stage of the cassette are set as display information, and the squares include: It is characterized in that the same color as the corresponding area corresponding to the current position of the workpiece housed in the stage of the cassette indicated by the grid during the machining operation is displayed.

In the processing apparatus, the intra-apparatus map may include a transport unit corresponding area corresponding to a transport unit that transports the workpiece.

In the processing apparatus, a color or an identification mark indicating that the work has been carried in may be displayed in the squares indicating the stage in which the work pieces that have been carried out and returned to the cassette after being taken out of the cassette are accommodated.

The processing apparatus further includes a temporary placement area in which the workpiece carried out from the cassette placed in the cassette placement area is temporarily placed, and the transfer unit comprises the cassette, the temporary placement area, and the chuck table. and the cleaning area, and the intra-apparatus map may include a temporary placement corresponding area corresponding to the temporary placement area .

ADVANTAGE OF THE INVENTION This invention is effective in the ability to grasp|ascertain the progress condition of the process of a to-be-processed object.

FIG. 1 is a perspective view showing a configuration example of a processing apparatus according to Embodiment 1. FIG. 2 is a perspective view showing a cassette of the processing apparatus shown in FIG. 1; FIG. 3 is a diagram showing a progress display screen displayed on the display screen of the display unit of the processing apparatus shown in FIG. 1. FIG. FIG. 4 is a diagram showing an example of workpiece marks displayed on the display screen of the display unit of the processing apparatus shown in FIG. FIG. 5 is a diagram showing another example of workpiece marks displayed on the display screen of the display unit of the processing apparatus shown in FIG. FIG. 6 is a diagram showing a progress display screen when the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in FIG. 1 is temporarily placed on the rail. FIG. 7 is a diagram showing a progress display screen when the workpiece stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. 1 is transported to the first transport unit. FIG. 8 is a diagram showing a progress display screen when the workpiece stored in the second storage shelf from the bottom of the cassette of the processing apparatus shown in FIG. 1 is temporarily placed on the rail. FIG. 9 shows the workpiece stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. 1 held by the chuck table and stored in the second storage shelf from the bottom. is a diagram showing a progress display screen when the is transported to the first transport unit. FIG. 10 shows the workpieces stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. FIG. 10 is a diagram showing a progress display screen when a workpiece held on a chuck table and stored in the third storage shelf from the bottom of the cassette is temporarily placed on the rail. FIG. 11 shows that the workpiece stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. 1 is held by the spinner table and stored in the third storage shelf from the bottom of the cassette. FIG. 10 is a diagram showing a progress display screen when the workpiece is transported to the first transport unit. FIG. 12 shows the workpieces stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. FIG. 10 is a diagram showing a progress display screen when the workpiece that has been transported to the second transport unit and stored in the third storage shelf from the bottom of the cassette is held by the chuck table. FIG. 13 shows the workpiece stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. 1 temporarily placed on the rail and stored in the second storage shelf from the bottom. FIG. 10 is a diagram showing a progress display screen when an object is held on the spinner table; FIG. 14 shows the workpiece stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. is a diagram showing a progress display screen when the is temporarily placed on the rail. FIG. 15 is a diagram showing a progress display screen when the workpiece stored in the uppermost storage rack of the cassette of the processing apparatus shown in FIG. 1 is temporarily placed on the rail after cutting; be. 16 is a diagram showing a progress display screen displayed on the display screen of the display unit of the processing apparatus according to Modification 1 of Embodiment 1. FIG. 17 is a diagram showing a progress display screen displayed on the display screen of the display unit of the processing apparatus according to Modification 2 of Embodiment 1. FIG.

A form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
A processing apparatus according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of a processing apparatus according to Embodiment 1. FIG. 2 is a perspective view showing a cassette of the processing apparatus shown in FIG. 1; FIG. 3 is a diagram showing a progress display screen displayed on the display screen of the display unit of the processing apparatus shown in FIG. 1. FIG. FIG. 4 is a diagram showing an example of workpiece marks displayed on the display screen of the display unit of the processing apparatus shown in FIG. FIG. 5 is a diagram showing another example of workpiece marks displayed on the display screen of the display unit of the processing apparatus shown in FIG.

A processing apparatus 1 according to the first embodiment is a processing apparatus 1 that cuts (corresponds to processing) a workpiece 200 shown in FIG. In the first embodiment, the workpiece 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer whose base material is silicon, sapphire, gallium, or the like. A workpiece 200 has devices 203 formed in regions partitioned in a grid pattern by a plurality of division lines 202 formed in a grid pattern on a surface 201 .

In addition, the workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer having a thin central portion and a thick outer peripheral portion. A rectangular package substrate having a plurality of , a ceramic substrate, a ferrite substrate, or a substrate containing at least one of nickel and iron may be used. In Embodiment 1, the back surface 204 of the workpiece 200 is adhered to an adhesive tape 206 having an annular frame 205 attached to the outer peripheral edge thereof, and is supported by the annular frame 205 .

A processing apparatus 1 shown in FIG. 1 is an apparatus that holds a workpiece 200 on a chuck table 10 and cuts the workpiece 200 along a dividing line 202 with a cutting blade 21 . As shown in FIG. 1, the processing apparatus 1 includes a chuck table 10 that holds a workpiece 200 by suction on a holding surface 11, and a processing unit that cuts the workpiece 200 held on the chuck table 10 with a cutting blade 21. A certain cutting unit 20 , an imaging unit 30 for photographing the workpiece 200 held on the chuck table 10 , and a control unit 100 are provided.

Further, as shown in FIG. 1, the processing apparatus 1 includes an X-axis movement unit (not shown) for processing and feeding the chuck table 10 in the X-axis direction parallel to the horizontal direction, and a cutting unit 20 in parallel to the horizontal direction and the X-axis. A Y-axis movement unit (not shown) for indexing and feeding in the Y-axis direction perpendicular to the direction of the cutting unit 20, and a Z-axis for cutting and feeding the cutting unit 20 in the Z-axis direction parallel to the vertical direction perpendicular to both the X-axis direction and the Y-axis direction. and a mobile unit 40 . The processing apparatus 1 is, as shown in FIG. 1, a so-called facing dual type processing apparatus 1 having two cutting units 20, that is, a two-spindle dicer.

The chuck table 10 has a disk shape, and a holding surface 11 for holding the workpiece 200 is formed of porous ceramic or the like. In addition, the chuck table 10 is moved in the X-axis direction by the X-axis moving unit over a machining area below the cutting unit 20 and a loading/unloading area separated from the bottom of the cutting unit 20 and where the workpiece 200 is loaded/unloaded. It is provided movably and rotatably about an axis parallel to the Z-axis direction by a rotary drive source. The chuck table 10 is connected to a vacuum suction source (not shown) and is sucked by the vacuum suction source to suck and hold the workpiece 200 placed on the holding surface 11 . In Embodiment 1, the chuck table 10 sucks and holds the back surface 204 side of the workpiece 200 via the adhesive tape 206 . A plurality of clamping portions 12 for clamping the annular frame 205 are provided around the chuck table 10, as shown in FIG.

The cutting unit 20 is cutting means to which a cutting blade 21 for cutting the workpiece 200 held on the chuck table 10 is detachably mounted. The cutting units 20 are provided to be movable in the Y-axis direction by the Y-axis movement unit with respect to the workpiece 200 held on the chuck table 10, and are movable in the Z-axis direction by the Z-axis movement unit 40. freely set.

As shown in FIG. 1, one cutting unit 20 is provided on one of the pillars 4 of the gate-shaped support frame 3 erected from the apparatus main body 2 via a Y-axis movement unit, a Z-axis movement unit 40, and the like. It is The other cutting unit 20 is provided on the other column 5 of the support frame 3 via a Y-axis movement unit, a Z-axis movement unit 40, and the like, as shown in FIG. Note that the support frame 3 connects the upper ends of the pillars 4 and 5 with a horizontal beam 6 .

The cutting unit 20 can position the cutting blade 21 at any position on the holding surface 11 of the chuck table 10 by the Y-axis moving unit and the Z-axis moving unit 40 . The cutting unit 20 includes a spindle housing 22 which is movably provided in the Y-axis direction and the Z-axis direction by a Y-axis moving unit and a Z-axis moving unit 40; and a spindle (not shown) which is rotated by and has a cutting blade 21 attached to its tip.

The imaging unit 30 is fixed to the cutting unit 20 so as to move together with the cutting unit 20 . The imaging unit 30 includes an imaging device that captures an area to be divided of the workpiece 200 before cutting held on the chuck table 10 . The imaging device is, for example, a CCD (Charge-Coupled Device) imaging device or a CMOS (Complementary MOS) imaging device. The imaging unit 30 captures an image of the workpiece 200 held on the chuck table 10 to obtain an image for performing alignment for aligning the workpiece 200 and the cutting blade 21, and the obtained image. Output to control unit 100 .

The X-axis movement unit relatively feeds the chuck table 10 and the cutting unit 20 along the X-axis direction by moving the chuck table 10 in the X-axis direction, which is the feed direction. The Y-axis moving unit relatively moves the chuck table 10 and the cutting unit 20 along the Y-axis direction by moving the cutting unit 20 in the Y-axis direction, which is the indexing direction. The Z-axis moving unit 40 relatively moves the chuck table 10 and the cutting unit 20 along the Z-axis direction by moving the cutting unit 20 in the Z-axis direction, which is the direction of cutting and feeding.

The X-axis movement unit, the Y-axis movement unit and the Z-axis movement unit 40 are a well-known ball screw provided rotatably around the axis, a well-known motor for rotating the ball screw around the axis, and a chuck table 10 or a cutting unit. A well-known guide rail is provided to support the unit 20 so as to be movable in the X-axis direction, the Y-axis direction, or the Z-axis direction.

The processing apparatus 1 also includes an X-axis direction position detection unit (not shown) for detecting the position of the chuck table 10 in the X-axis direction, and a Y-axis direction position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction. A detection unit and a Z-axis direction position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction are provided. The X-axis direction position detection unit and the Y-axis direction position detection unit can be composed of a linear scale parallel to the X-axis direction or the Y-axis direction and a reading head. The Z-axis direction position detection unit detects the position of the cutting unit 20 in the Z-axis direction using motor pulses. The X-axis direction position detection unit, the Y-axis direction position detection unit, and the Z-axis direction position detection unit output the position of the chuck table 10 in the X-axis direction and the cutting unit 20 in the Y-axis direction or Z-axis direction to the control unit 100. . In the first embodiment, the positions of the constituent elements of the processing apparatus 1 in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined based on a predetermined reference position (not shown).

In addition, the processing apparatus 1 includes a cassette elevator 50 which is a cassette mounting area on which a cassette 60 containing the workpiece 200 before and after cutting is mounted on the upper surface thereof and moves the cassette 60 up and down in the Z-axis direction; It comprises a cleaning unit 70 which is a cleaning area for cleaning the workpiece 200 , a temporary placement unit 80 for loading/unloading the workpiece 200 into/from the cassette 60 , and a transport unit 90 for transporting the workpiece 200 .

As shown in FIG. 2 , the cassette 60 includes a bottom plate 61 placed on the cassette elevator 50 , a top plate 62 facing the bottom plate 61 with a gap in the Z-axis direction, and an X-axis between the bottom plate 61 and the top plate 62 . A pair of side plates 63 connecting the ends in the axial direction are provided. The pair of side plates 63 face each other with a gap in the X-axis direction. The pair of side plates 63 are each provided with storage racks 64 that are steps protruding toward each other. The cassette 60 has a plurality of storage racks 64 on each side plate 63 at equal intervals in the Z-axis direction, and ten storage racks are provided on each side plate 63 in the first embodiment. The storage racks 64 arranged on the pair of side plates 63 and opposed to each other in the X-axis direction have their upper surfaces arranged on the same plane. Each storage shelf 64 has a workpiece 200 placed on its upper surface and stores the workpiece 200 in the cassette 60 . In the first embodiment, the annular frame 205 is placed on the upper surface of each storage shelf 64 .

In this specification, when distinguishing the storage shelves 64 from each other, the numerals 64 are assigned -1, -2, -3, . In the case where the storage racks 64 are not distinguished from each other, the reference numeral 64 is simply attached and explained. In addition, in this specification, when distinguishing between the workpieces 200 stored in each storage shelf 64, the workpieces 200 stored in the lower storage shelf 64 are denoted by reference numerals 200 in order of -1, -2. , −3 .

In the first embodiment, the cassette elevator 50 has the cassette 60 placed on its upper surface, and the cassette 60 is moved up and down in the Z-axis direction by a motor (not shown).

The cleaning unit 70 has a disc shape, and is composed of a spinner table 72 having a holding surface 71 for holding the workpiece 200 formed of porous ceramic or the like, and the workpiece 200 held on the holding surface 71 of the spinner table 72 . A cleaning liquid supply nozzle (not shown) for supplying a cleaning liquid such as water is provided.

The spinner table 72 is connected to a vacuum suction source (not shown) and is sucked by the vacuum suction source to suck and hold the workpiece 200 placed on the holding surface 71 . The spinner table 72 is rotatable about an axis parallel to the Z-axis direction by a motor (not shown) or the like. In the first embodiment, the cleaning unit 70 supplies the cleaning liquid to the workpiece 200 from the cleaning liquid supply nozzle while the spinner table 72 sucking and holding the back surface 204 side of the workpiece 200 through the adhesive tape 206 rotates around the axis. The workpiece 200 held on the holding surface 71 is washed by supplying it.

The temporary placement unit 80 unloads one uncut workpiece 200 from the cassette 60 placed on the cassette elevator 50 and loads the cut workpiece 200 into the cassette 60 . The temporary placement unit 80 includes a loading/unloading unit 83 for unloading the workpiece 200 before cutting from the cassette 60 and loading the workpiece 200 after cutting into the cassette 60 , and the cassette 60 placed on the cassette elevator 50 . and a pair of rails 81, which are temporary storage areas where the uncut workpiece 200 carried out from the rails is temporarily stored and the workpiece 200 after cutting is temporarily stored. there is The temporary placement unit 80 also includes a detection sensor 82 that detects the workpiece 200 temporarily placed on the rail 81 . The detection sensor 82 outputs detection results to the control unit 100 .

The transport unit 90 transports the workpiece 200 between the cassette 60 , the rail 81 of the temporary placement unit 80 , the chuck table 10 and the spinner table 72 of the cleaning unit 70 . The transport unit 90 includes a first transport unit 91 and a second transport unit 92 . The first transport unit 91 transports the uncut workpiece 200 temporarily placed on the rails 81 of the temporary placement unit 80 to the chuck table 10 , and the cleaned workpiece on the spinner table 72 of the cleaning unit 70 . 200 onto the rails 81 of the temporary placement unit 80 . The second transport unit 92 transports the workpiece 200 after cutting on the chuck table 10 to the spinner table 72 of the cleaning unit 70 .

In this specification, since the first transport unit 91 and the second transport unit 92 have similar configurations, the first transport unit 91 will be representatively described below, and the first transport unit 92 of the second transport unit 92 will be described below. The same parts of the transport unit 91 are denoted by the same reference numerals, and the description thereof is omitted. The first transport unit 91 is provided so as to be movable in the Y-axis direction on the second support frame 7 which is erected from the apparatus main body 2 and arranged closer to the carry-in/out area than the support frame 3, and is vertically movable in the Z-axis direction. and a suction member 93 attached to the unit body 94, connected to a vacuum suction source (not shown), and holding an annular frame 205 supporting a workpiece 200 by suction. The first conveying unit 91 sucks and holds the annular frame 205 on the suction member 93 , moves the unit body 94 in the Y-axis direction and the Z-axis direction, and conveys the workpiece 200 .

The control unit 100 also controls the above-described units of the processing apparatus 1 to cause the processing apparatus 1 to perform processing operations on the workpiece 200 . Specifically, the control unit 100 causes the temporary placement unit 80 to carry out the workpiece 200 before cutting and temporarily places it on the rail 81 , and causes the first transport unit 91 to carry out the workpiece temporarily placed on the rail 81 . A workpiece 200 is transported to the chuck table 10 . The control unit 100 sucks and holds the workpiece 200 on the chuck table 10 , clamps the annular frame 205 on the clamping unit 12 , moves the chuck table 10 on the X-axis movement unit, and moves the chuck table 10 on the imaging unit 30 . The upper workpiece 200 is imaged. The control unit 100 performs alignment for aligning the positions of the workpiece 200 and the cutting blade 21, and relatively moves the chuck table 10 and the cutting blade 21 of the cutting unit 20 along the dividing line 202. A cutting blade 21 is caused to cut into the dividing line 202.例文帳に追加

After the cutting blades 21 have cut into all of the planned dividing lines 202 , the control unit 100 releases the suction holding of the chuck table 10 and the clamping of the clamping section 12 , and transfers the workpiece on the chuck table 10 to the second transport unit 92 . 200 is transported onto the spinner table 72 . The control unit 100 causes the spinner table 72 to suck and hold the workpiece 200 , causes the cleaning unit 70 to wash the workpiece 200 , releases the suction and hold of the spinner table 72 , and moves the spinner table 72 to the first transport unit 91 . The workpiece 200 on 72 is transported onto the rail 81 . After the control unit 100 positions the lower surface of the annular frame 205 that supports the workpiece 200 on the rails 81 in the cassette elevator 50 on the same plane as the upper surface of the storage rack 64, which is the same as before carrying out, the control unit 100 moves the temporary storage unit 80. A workpiece 200 on the rail 81 is loaded into the cassette 60 .

Note that the control unit 100 includes an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as ROM (read only memory) or RAM (random access memory), and an input/output unit. A computer having an interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device, and outputs control signals for controlling the processing device 1 to the processing device 1 via the input/output interface device. output to each unit that

The control unit 100 determines whether or not the workpiece 200 is temporarily placed on the rail 81 based on the detection result of the detection sensor 82 . The control unit 100 determines whether or not the chuck table 10 sucks and holds the workpiece 200 on the holding surface 11 based on the negative pressure of the vacuum suction source connected to the chuck table 10 . The control unit 100 determines whether or not the spinner table 72 is sucking and holding the workpiece 200 on the holding surface 71 based on the negative pressure of the vacuum suction source connected to the spinner table 72 . Based on the negative pressure of the vacuum suction source connected to the suction member 93 of each of the transfer units 91 and 92, the control unit 100 determines whether each of the transfer units 91 and 92 is sucking and holding the workpiece 200 on the suction member 93. determine whether or not

The processing apparatus 1 includes a display unit 110 (shown in FIG. 1) connected to the control unit 100 and having a display screen 111 for displaying the state of the processing operation, an image, etc. and an input unit used when registering The display unit 110 is configured by a liquid crystal display device or the like. The input unit is configured by an external input device such as a touch panel or a keyboard provided on the display screen 111 of the display unit 110 .

The display unit 110 is controlled by the control unit 100 to display the progress display screen 112, which is the display information shown in FIG. The progress display screen 112 shows the progress of the cutting of the workpiece 200 of the machining device 1 .

As shown in FIG. 3, the progress display screen 112 includes a start/stop input area 113 for inputting start and stop of cutting by the processing apparatus 1, and a captured image captured by the imaging unit 30 and displayed. A display area 114 , an in-apparatus map 120 , and an in-cassette map 130 are provided.

The intra-apparatus map 120 includes a temporary placement corresponding area 121 corresponding to the rail 81 of the temporary placing unit, a first transport unit corresponding area 122 corresponding to the first transport unit 91, and a chuck table corresponding area 123 corresponding to the chuck table 10. , a cleaning corresponding area 124 corresponding to the spinner table 72 of the cleaning unit 70 , and a second transport unit corresponding area 125 corresponding to the second transport unit 92 . Each corresponding area 121, 122, 123, 124, 125 is displayed with a predetermined color or a predetermined identification mark. In the first embodiment, the respective corresponding regions 121, 122, 123, 124, 125 are displayed in different colors 301, 302, 303, 304, 305 from each other. Further, in the first embodiment, the intra-apparatus map 120 has a blank area 126 that does not correspond to any of the units of the processing apparatus 1 . Blank area 126 may be used to accommodate other units of processing apparatus 1 or units added to processing apparatus 1 .

The cassette map 130 includes a plurality of squares 131 corresponding to the storage racks 64. In the first embodiment, the squares 131 correspond to the storage racks 64 on a one-to-one basis. 10 pieces are arranged in the direction and correspond to the lower storage shelf 64 to the upper storage shelf 64 among the plurality of storage shelves 64 of the cassette 60 in order from the bottom to the top. In this specification, when distinguishing the squares 131 from each other, the numerals 131 are denoted by −1, −2, −3 . However, when the squares 131 are not to be distinguished from each other, the reference numeral 131 is simply attached for explanation.

The control unit 100 also includes a display information setting section 101 for setting information to be displayed on the display screen 111, as shown in FIG. In the display information setting unit 101, the in-apparatus map 120 and the in-cassette map 130 are set as display information in order to display the above-described in-apparatus map 120 and the in-cassette map 130 on the display screen 111. FIG. That is, the display information setting unit 101 stores information indicating the in-apparatus map 120 and the in-cassette map 130 and a program or the like for displaying the in-apparatus map 120 and the in-cassette map 130 on the display screen 111 .

In addition, the display information setting unit 101 displays the work piece shown in FIGS. Marks 140 and 141 are set as display information. In Embodiment 1, the workpiece marks 140 and 141 shown in FIGS. 4 and 5 schematically show the planar shapes of the workpiece 200 and the annular frame 205 . In addition, in this specification, when distinguishing between storage racks 64 in which workpieces 200 indicated by workpiece marks 140 and 141 were stored before cutting, reference numerals 140 and 141 refer to lower storage racks 64 . -1, -2, -3, . When the storage racks 64 in which the workpiece 200 is stored before cutting are not distinguished from each other, the reference numerals 140 and 141 are simply used for explanation.

The display information setting unit 101 displays the workpiece marks 140 and 141 superimposed on respective corresponding regions 121 , 122 , 123 , 124 and 125 corresponding to the current position of the workpiece 200 within the processing apparatus 1 . In the first embodiment, the workpiece mark 140 shown in FIG. 4 is used before being carried out from the cassette 60 and held on the chuck table 10, and the workpiece mark 141 shown in FIG. 5 is held on the chuck table 10. It is used until it is carried into the cassette 60 after it is loaded. That is, the display information setting unit 101 superimposes the information indicating the workpiece marks 140 and 141 and the workpiece marks 140 and 141 on the corresponding areas 121, 122, 123, 124, and 125 of the display screen 111. programs, etc., are stored.

The display information setting unit 101 also stores a grid display program 150 and executes the grid display program 150 during the cutting process of the processing apparatus 1 . The grid display program 150 displays corresponding regions 121, 122, 123, 124, 124, 124, 124, 124, 124, 124, 124, 124, 124, 124, 124, 124, 124, 124, 124, 124, 124, 124 from each of the grids 131 corresponding to the current positions of the workpieces 200 stored in the storage racks 64 of the cassettes 60 indicated by the grids 131. A program for displaying 125 colors 301, 302, 303, 304, 305 or predetermined identification marks. In the first embodiment, the grid display program 150 displays each corresponding area 121 corresponding to the current position in the processing apparatus 1 of the workpiece 200 stored in the storage shelf 64 corresponding to each grid 131 before cutting. , 122, 123, 124, and 125 (in the first embodiment, colors 301, 302, 303, 304, and 305 that are the same as the corresponding regions 121, 122, 123, 124, and 125) are displayed in each square 131. do.

In addition, the grid display program 150 displays a color 306 or A program for displaying identification marks. The grid display program 150 displays a color 306 (for example, gray and indicated by dense parallel hatching in FIG. 3).

The function of the display information setting section 101 is that the storage device of the control unit 100 stores information indicating the intra-apparatus map 120, information indicating the intra-cassette map 130, information indicating the workpiece marks 140 and 141, and the grid display program 150. It is realized by the arithmetic processing unit performing arithmetic processing according to the computer program stored in the storage device.

The processing apparatus 1 is covered with an exterior cover (not shown) except for the cassette 60 on the apparatus main body 2, and the display unit 110 is attached to the exterior cover.

Next, in this specification, the processing operation of the processing apparatus 1 having the configuration described above will be described. FIG. 6 is a diagram showing a progress display screen when the workpiece stored in the lowest storage rack of the cassette of the processing apparatus shown in FIG. 1 is temporarily placed on the rail. FIG. 7 is a diagram showing a progress display screen when the workpiece stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. 1 is transported to the first transport unit. FIG. 8 is a diagram showing a progress display screen when the workpiece stored in the second storage shelf from the bottom of the cassette of the processing apparatus shown in FIG. 1 is temporarily placed on the rail. FIG. 9 shows the workpiece stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. 1 held by the chuck table and stored in the second storage shelf from the bottom. is a diagram showing a progress display screen when the is transported to the first transport unit. FIG. 10 shows the workpieces stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. FIG. 10 is a diagram showing a progress display screen when a workpiece held on a chuck table and stored in the third storage shelf from the bottom of the cassette is temporarily placed on the rail. FIG. 11 shows that the workpiece stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. 1 is held by the spinner table and stored in the third storage shelf from the bottom of the cassette. FIG. 10 is a diagram showing a progress display screen when the workpiece is transported to the first transport unit. FIG. 12 shows the workpieces stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. FIG. 10 is a diagram showing a progress display screen when the workpiece that has been transported to the second transport unit and stored in the third storage shelf from the bottom of the cassette is held by the chuck table. FIG. 13 shows the workpiece stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. 1 temporarily placed on the rail and stored in the second storage shelf from the bottom. FIG. 10 is a diagram showing a progress display screen when an object is held on the spinner table; FIG. 14 shows the workpiece stored in the lowest storage shelf of the cassette of the processing apparatus shown in FIG. is a diagram showing a progress display screen when the is temporarily placed on the rail. FIG. 15 is a diagram showing a progress display screen when the workpiece stored in the uppermost storage rack of the cassette of the processing apparatus shown in FIG. 1 is temporarily placed on the rail after cutting; be.

First, in the machining operation, the operator registers machining content information in the control unit 100 , places the workpiece 200 before cutting in the cassette 60 , and installs the cassette 60 on the upper surface of the cassette elevator 50 . After that, the processing apparatus 1 starts the processing operation when receiving a processing operation start instruction from the operator. In the first embodiment, the control unit 100 of the processing apparatus 1 displays the progress display screen 112 on the display screen 111 of the display unit 110, and when receiving the operator's operation on the start-stop input area 113, the processing operation of the processing apparatus 1 is performed. to start. In the first embodiment, in the machining operation, the processing apparatus 1 moves the workpieces 200 stored in the lower storage rack 64 among the workpieces 200 stored in the plurality of storage racks 64 of the cassette 60 to the upper storage rack 64 . The workpieces 200 stored in the shelf 64 are cut in order, but in the present invention, the order in which the machining apparatus 1 cuts the workpieces 200 in the cassette 60 is limited to the order shown in the first embodiment. not.

When the processing apparatus 1 starts the processing operation, the lower surface of the annular frame 205 supporting the workpiece 200-1 stored in the lowest storage rack 64-1 of the cassette elevator 50 is flush with the upper surface of the rail 81. Position the cassette 60 in the upper position. The control unit 100 causes the carry-in/out unit 83 of the temporary placement unit 80 to carry out the workpiece 200-1 stored in the lowest storage rack 64-1 from the cassette 60, and the carried-out workpiece 200-1 is carried out. Temporarily placed on the rail 81 . When the detection sensor 82 detects the workpiece 200-1 temporarily placed on the rail 81, the control unit 100 displays the bottommost position in the temporary placement corresponding area 121 of the progress display screen 112 as shown in FIG. A workpiece mark 140-1 indicating the workpiece 200-1 stored in the storage rack 64-1 is superimposed and displayed. In addition, the control unit 100 displays the same color 301 as the temporary placement corresponding area 121 in the square 131-1 corresponding to the bottom storage shelf 64-1 among the plurality of squares 131. FIG.

The control unit 100 causes the first transport unit 91 to suck and hold the annular frame 205 that supports the workpiece 200-1 temporarily placed on the rails 81 of the temporary placement unit 80, and moves the X-axis movement unit or the like to the first position. By moving the transport unit 91 and the chuck table 10 relative to each other, the first transport unit 91 is moved above the chuck table 10 . When the control unit 100 detects that the first transfer unit 91 has attracted and held the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the first transfer unit 91, the control unit 100 detects that the annular frame 205 has been sucked and held, as shown in FIG. , the workpiece mark 401-1 indicating the workpiece 200-1 stored in the lowest storage rack 64-1 is superimposed and displayed on the first transport unit corresponding area 122 of the progress display screen 112. do. In addition, the control unit 100 displays the same color 302 as the first transport unit corresponding area 122 in the square 131-1 corresponding to the bottom storage shelf 64-1 among the plurality of squares 131. FIG.

The control unit 100 moves the cassette elevator 50 to a position where the lower surface of the annular frame 205 supporting the workpiece 200-2 stored in the second storage shelf 64-2 from the bottom is flush with the upper surface of the rail 81. Let 60 be positioned. The control unit 100 causes the carry-in/out unit 83 of the temporary placement unit 80 to carry out the workpiece 200-2 stored in the storage rack 64-2, which is the second from the bottom, from the cassette 60, and the carried-out workpiece 200-2. is temporarily placed on the rail 81. When the detection sensor 82 detects the workpiece 200-2 temporarily placed on the rail 81, the control unit 100 displays the second workpiece from the bottom in the temporary placement corresponding area 121 of the progress display screen 112 as shown in FIG. A workpiece mark 140-2 indicating the workpiece 200-2 stored in the storage rack 64-2 is superimposed and displayed. In addition, the control unit 100 displays the same color 301 as the temporary placement corresponding area 121 in the grid 131-2 corresponding to the storage rack 64-2 second from the bottom among the multiple grids 131. FIG.

The control unit 100 causes the first transport unit 91 to place the workpiece 200-1 on the holding surface 11 of the chuck table 10, sucks and holds the workpiece 200-1 on the chuck table 10, and causes the clamp section 12 to hold the workpiece 200-1. Annular frame 205 is clamped. When the control unit 100 detects that the chuck table 10 has sucked and held the workpiece 200-1 based on the negative pressure of the vacuum suction source connected to the chuck table 10, the progress status is changed as shown in FIG. A workpiece mark 141-1 indicating the workpiece 200-1 stored in the lowest storage rack 64-1 is superimposed on the area 123 corresponding to the chuck table on the display screen 112 and displayed. In addition, the control unit 100 displays the same color 303 as the chuck table corresponding area 123 in the grid 131-1 corresponding to the bottom storage shelf 64-1 among the plurality of grids 131. FIG.

The control unit 100 causes the X-axis movement unit to move the chuck table 10 toward the processing area, causes the imaging unit 30 to photograph the workpiece 200-1, and based on the image obtained by the imaging unit 30. to perform the alignment. At this time, the control unit 100 displays the image captured by the imaging unit 30 in the captured image display area 114 of the progress display screen 112 .

The control unit 100 moves the workpiece 200-1 and the cutting unit 20 relatively along the dividing lines 202, and causes the cutting blades 21 to cut into the respective dividing lines 202 to cut the workpiece 200-1. 1 into individual devices 203 . When the control unit 100 causes the cutting blade 21 to cut into all the planned division lines 202 of the workpiece 200-1 suction-held on the chuck table 10, the suction-holding of the chuck table 10 and the clamping of the clamp section 12 are released. .

Further, the control unit 100 causes the first transport unit 91 to suck and hold the annular frame 205 that supports the workpiece 200-2 temporarily placed on the rails 81 of the temporary placement unit 80, and moves the X-axis movement unit or the like. The first transport unit 91 and the chuck table 10 are relatively moved to move the first transport unit 91 above the chuck table 10 . When the control unit 100 detects that the first transfer unit 91 has attracted and held the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the first transfer unit 91, the control unit 100 is shown in FIG. As shown, the workpiece mark 140-2 indicating the workpiece 200-2 stored in the storage shelf 64-2 second from the bottom is superimposed on the first transport unit corresponding area 122 of the progress display screen 112. indicate. In addition, the control unit 100 displays the same color 302 as the first transport unit corresponding area 122 in the square 131-2 corresponding to the storage rack 64-2 second from the bottom among the plurality of squares 131. FIG.

The control unit 100 causes the second transfer unit 92 to suck and hold the annular frame 205 supporting the workpiece 200-1 placed on the holding surface 11 of the chuck table 10, and moves the second transfer unit 92 to the spinner table 72. move upwards. When the control unit 100 detects that the second transfer unit 92 has attracted and held the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the second transfer unit 92, the control unit 100 is shown in FIG. , the workpiece mark 141-1 indicating the workpiece 200-1 stored in the lowest storage rack 64-1 is superimposed and displayed on the second transport unit corresponding area 125 of the progress display screen 112. do. In addition, the control unit 100 displays the same color 305 as the area 125 corresponding to the second transport unit in the square 131-1 corresponding to the bottom storage shelf 64-1 among the plurality of squares 131. FIG.

The control unit 100 causes the first transport unit 91 to place the workpiece 200-2 on the holding surface 11 of the chuck table 10, sucks and holds the workpiece 200-2 on the chuck table 10, and causes the clamp section 12 to hold the workpiece 200-2. Annular frame 205 is clamped. When the control unit 100 detects that the chuck table 10 has sucked and held the workpiece 200-2 based on the negative pressure of the vacuum suction source connected to the chuck table 10, the progress status is changed as shown in FIG. A workpiece mark 141-2 indicating the workpiece 200-2 stored in the second storage shelf 64-2 from the bottom is superimposed on the chuck table corresponding area 123 of the display screen 112 and displayed. In addition, the control unit 100 displays the same color 303 as the chuck table corresponding area 123 in the grid 131-2 corresponding to the storage rack 64-2 second from the bottom among the plurality of grids 131. FIG. Control unit 100 divides workpiece 200-2 into individual devices 203, similar to workpiece 200-1. When the control unit 100 causes the cutting blade 21 to cut into all the planned division lines 202 of the workpiece 200-2 suction-held on the chuck table 10, the suction-holding of the chuck table 10 and the clamping of the clamp section 12 are released. .

Further, the control unit 100 is positioned such that the lower surface of the annular frame 205 supporting the workpiece 200-3 stored in the third storage shelf 64-3 from the bottom of the cassette elevator 50 is flush with the upper surface of the rail 81. to position the cassette 60. The control unit 100 causes the carry-in/out unit 83 of the temporary placement unit 80 to carry out the workpiece 200-3 stored in the third storage rack 64-3 from the bottom from the cassette 60, and the carried-out workpiece 200-3. is temporarily placed on the rail 81. When the detection sensor 82 detects the workpiece 200-3 temporarily placed on the rail 81, the control unit 100 moves the workpiece 200-3 from the bottom to the temporary placement corresponding area 121 of the progress display screen 112 as shown in FIG. A workpiece mark 140-3 indicating the workpiece 200-3 stored in the storage rack 64-3 is superimposed and displayed. In addition, the control unit 100 displays the same color 301 as the temporary placement corresponding area 121 in the grid 131-3 corresponding to the storage shelf 64-3 which is the third from the bottom among the plurality of grids 131. FIG.

The control unit 100 causes the second transport unit 92 to place the workpiece 200-1 on the holding surface 71 of the spinner table 72, and causes the spinner table 72 to suck and hold the workpiece 200-1. When the control unit 100 detects that the spinner table 72 has sucked and held the workpiece 200-1 based on the negative pressure of the vacuum suction source connected to the spinner table 72, as shown in FIG. A workpiece mark 141-1 indicating the workpiece 200-1 stored in the lowest storage rack 64-1 is superimposed and displayed on the washing corresponding area 124 of the display screen 112. FIG. In addition, the control unit 100 displays the same color 304 as the cleaning corresponding area 124 in the grid 131-1 corresponding to the bottom storage shelf 64-1 among the plurality of grids 131. FIG. The control unit 100 supplies the cleaning liquid from the cleaning liquid supply nozzle to the cleaning unit 70 while rotating the spinner table 72 around the axis to clean the workpiece 200-1. After causing the cleaning unit 70 to clean the workpiece 200-1 for a predetermined time, the control unit 100 stops the rotation of the spinner table 72 and the supply of the cleaning liquid, and releases the spinner table 72 from being held by suction.

Further, the control unit 100 causes the first transport unit 91 to suck and hold the annular frame 205 that supports the workpiece 200-3 temporarily placed on the rails 81 of the temporary placement unit 80, and moves the X-axis movement unit or the like. The first transport unit 91 and the chuck table 10 are relatively moved to move the first transport unit 91 above the chuck table 10 . When the control unit 100 detects that the first transfer unit 91 has attracted and held the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the first transfer unit 91, the control unit 100 is shown in FIG. As shown, the workpiece mark 140-3 indicating the workpiece 200-3 stored in the third storage rack 64-3 from the bottom is superimposed on the first transport unit corresponding area 122 of the progress display screen 112. indicate. In addition, the control unit 100 displays the same color 302 as the first transport unit corresponding area 122 in the grid 131-3 corresponding to the storage rack 64-3 which is the third from the bottom among the plurality of grids 131. FIG.

The control unit 100 causes the second transfer unit 92 to suck and hold the annular frame 205 supporting the workpiece 200-2 placed on the holding surface 11 of the chuck table 10, and moves the second transfer unit 92 to the spinner table 72. move upwards. When the control unit 100 detects that the second transfer unit 92 has attracted and held the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the second transfer unit 92, the control unit 100 is shown in FIG. As shown, the workpiece mark 141-2 indicating the workpiece 200-2 stored in the storage shelf 64-2 second from the bottom is superimposed on the second transport unit corresponding area 125 of the progress display screen 112. indicate. In addition, the control unit 100 displays the same color 305 as the area 125 corresponding to the second transport unit in the square 131-2 corresponding to the storage rack 64-2 second from the bottom among the plurality of squares 131. FIG.

The control unit 100 causes the first transport unit 91 to place the workpiece 200-3 on the holding surface 11 of the chuck table 10, sucks and holds the workpiece 200-3 on the chuck table 10, and causes the clamp section 12 to hold the workpiece 200-3. Annular frame 205 is clamped. When the control unit 100 detects that the chuck table 10 has sucked and held the workpiece 200-3 based on the negative pressure of the vacuum suction source connected to the chuck table 10, the progress status is changed as shown in FIG. A workpiece mark 141-3 indicating the workpiece 200-3 stored in the third storage rack 64-2 from the bottom is superimposed on the chuck table corresponding area 123 of the display screen 112 and displayed. In addition, the control unit 100 displays the same color 303 as the chuck table corresponding area 123 in the grid 131-3 corresponding to the storage rack 64-3 which is the third from the bottom among the plurality of grids 131. FIG. Control unit 100 divides workpiece 200-3 into individual devices 203, as well as workpieces 200-1 and 200-2. When the workpiece 200 - 3 suction-held on the chuck table 10 is divided into individual devices 203 , the control unit 100 releases suction-holding of the chuck table 10 and clamping of the clamp section 12 .

Further, the control unit 100 causes the first transport unit 91 to suck and hold the annular frame 205 that supports the workpiece 200-1 placed on the spinner table 72, and moves the first transport unit 91 to the temporary placement unit 80. is moved upward on the rail 81 of the . When the control unit 100 detects that the first transfer unit 91 has attracted and held the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the first transfer unit 91, the control unit 100 is shown in FIG. , the workpiece mark 141-1 indicating the workpiece 200-1 stored in the lowest storage rack 64-1 is superimposed and displayed on the first transport unit corresponding area 122 of the progress display screen 112. do. In addition, the control unit 100 displays the same color 302 as the first transport unit corresponding area 122 in the square 131-1 corresponding to the bottom storage shelf 64-1 among the plurality of squares 131. FIG.

The control unit 100 causes the second transport unit 92 to place the workpiece 200-2 on the holding surface 71 of the spinner table 72, and causes the spinner table 72 to suck and hold the workpiece 200-2. When the control unit 100 detects that the spinner table 72 has sucked and held the workpiece 200-2 based on the negative pressure of the vacuum suction source connected to the spinner table 72, as shown in FIG. A workpiece mark 141-2 indicating the workpiece 200-2 stored in the second storage shelf 64-2 from the bottom is superimposed on the washing corresponding area 124 of the display screen 112 and displayed. In addition, the control unit 100 displays the same color 304 as the cleaning corresponding area 124 in the grid 131-2 corresponding to the storage rack 64-2 second from the bottom among the multiple grids 131. FIG. The control unit 100 causes the cleaning unit 70 to clean the workpiece 200-2 in the same manner as the workpiece 200-1, and releases the suction holding of the spinner table 72 when the cleaning is completed.

Further, the control unit 100 causes the first transport unit 91 to place the workpiece 200-1 on the rail 81 of the temporary placement unit 80, and the detection sensor 82 detects the temporarily placed workpiece 200-1 on the rail 81. When 1 is detected, as shown in FIG. 13, a workpiece mark indicating the workpiece 200-1 stored in the lowest storage shelf 64-1 is displayed in the temporary placement corresponding area 121 of the progress display screen 112. 141-1 are superimposed and displayed. In addition, the control unit 100 displays the same color 301 as the temporary placement corresponding area 121 in the square 131-1 corresponding to the bottom storage shelf 64-1 among the plurality of squares 131. FIG.

The control unit 100 is placed on the rail 81 of the cassette elevator 50 so that the top surface of the bottom storage shelf 64-1 that stores the workpiece 200-1 is flush with the top surface of the rail 81. Position the cassette 60 . The control unit 100 causes the loading/unloading unit 83 of the temporary placement unit 80 to load the workpiece 200-1 on the rail 81 to the storage rack 64-1 at the bottom. When the detection sensor 82 no longer detects the workpiece 200-1 temporarily placed on the rail 81, the control unit 100 moves to the bottom storage rack 64 among the plurality of squares 131 as shown in FIG. A color 306 indicating that the item has been delivered is displayed in the square 131-1 corresponding to -1.

The control unit 100 moves the cassette elevator 50 to a position where the lower surface of the annular frame 205 supporting the workpiece 200-4 stored in the fourth storage shelf 64-4 from the bottom is flush with the upper surface of the rail 81. Let 60 be positioned. The control unit 100 causes the carry-in/out unit 83 of the temporary placement unit 80 to carry out the workpiece 200-4 stored in the fourth storage rack 64-4 from the bottom from the cassette 60, and the carried-out workpiece 200-4. is temporarily placed on the rail 81. When the detection sensor 82 detects the workpiece 200-4 temporarily placed on the rail 81, the control unit 100 moves the workpiece 200-4 from the bottom to the temporary placement corresponding area 121 of the progress display screen 112 as shown in FIG. A workpiece mark 140-4 indicating the workpiece 200-4 stored in the storage rack 64-4 is superimposed and displayed. In addition, the control unit 100 displays the same color 301 as the temporary placement corresponding area 121 in the grid 131-4 corresponding to the storage rack 64-4 that is fourth from the bottom among the plurality of grids 131. FIG.

In this way, the processing apparatus 1 was stored in the storage shelf 64 of the cassette 60 indicated by the squares 131 of the in-cassette map 130 of the progress display screen 112 on the display screen 111 of the display unit 110 . Colors 301, 302, 303, 304, 305 of corresponding regions 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200 are displayed. Further, in the processing apparatus 1, a color 306 indicating that it has been carried in is displayed in the squares 131 indicating the storage shelf 64 in which the workpieces 200 that have been carried out from the cassette 60 and then returned to the cassette 60 are stored. .

Further, the processing apparatus 1 moves the workpiece 200 from the cassette 60 onto the rails 81 of the temporary placement unit 80, the first transport unit 91, the chuck table 10, the second transport unit 92, the spinner table 72, the first transport unit 91, On the rail 81 of the temporary placement unit 80, it conveys to the cassette 60 in order, and cuts it. In the first embodiment, the control unit 100 sequentially cuts the workpieces 200 in the cassette 60 from the bottom, and the detection sensor 82 is stored in the tenth storage shelf 64-10 from the bottom, which is temporarily placed on the rail 81. When the machined work piece 200-10 that has been cut is detected, as shown in FIG. A work piece mark 141-10 indicating the work piece 200-10 that has been placed is displayed superimposed thereon. In addition, the control unit 100 displays the same color 301 as the temporary placement corresponding area 121 in the square 131-10 corresponding to the tenth storage shelf 64-10 from the bottom among the plurality of squares 131. FIG. At this time, the control unit 100, as shown in FIG. A color 306 is displayed in the square 131-9 corresponding to . The control unit 100 is positioned so that the top surface of the top storage shelf 64-10 that stores the workpiece 200-10 placed on the rails 81 of the cassette elevator 50 is flush with the top surface of the rails 81. Position the cassette 60 . The control unit 100 causes the loading/unloading unit 83 of the temporary placement unit 80 to load the workpiece 200-10 on the rail 81 to the top storage shelf 64-10. Thus, the control unit 100 of the processing apparatus 1 ends the processing operation when the cutting of all the workpieces 200 in the cassette 60 is completed.

In the processing apparatus 1 according to the first embodiment, an in-apparatus map 120 and an in-cassette map 130 are set on the progress display screen 112 displayed on the display screen 111 of the display unit 110 . In the processing apparatus 1, different colors 301, 302, 303, 304, and 305 are set in respective corresponding areas 121, 122, 123, 124, and 125 of the intra-apparatus map 120. A grid 131 corresponding to the workpiece 200 inside is set. In the processing apparatus 1, for each square 131, corresponding areas 121, 122, 123, 124, and 125 corresponding to the current positions of the workpieces 200 stored in the storage shelf 64 of the cassette 60 corresponding to the square 131 are displayed. Colors 301, 302, 303, 304, 305 are displayed. For this reason, in the processing apparatus 1, the positions of the workpieces 200 unloaded from the storage racks 64 of the cassette 60 on the intra-apparatus map can be seen at a glance from the colors 301, 302, 303, 304, and 305 of the squares 131. It can be recognized by the operator. As a result, the processing apparatus 1 can grasp the progress of processing of the workpiece 200 .

Further, since the processing apparatus 1 displays the workpiece marks 140 and 141 superimposed on the respective corresponding areas 121, 122, 123, 124 and 125, by confirming the corresponding areas 121, 122, 123, 124 and 125, , the current position of each workpiece 200 can also be recognized by the operator at a glance.

Further, the processing apparatus 1 sets the transport unit corresponding areas 122 and 125 corresponding to the transport units 91 and 92 on the progress display screen 112 . As a result, the processing apparatus 1 allows the operator to recognize at a glance the state of the workpiece 200 being conveyed within the processing apparatus 1 by confirming the colors 301, 302, 303, 304, 305, etc. of the squares 131. be able to.

In addition, the processing apparatus 1 displays a color 306 indicating that it has been carried in the squares 131 corresponding to the storage shelf 64 that stores the workpiece 200 that has been carried out from the cassette 60 and carried into the cassette 60 that has undergone cutting processing. Since it is displayed, the operator can recognize the machined workpiece 200 at a glance by confirming the map 130 in the cassette.

[Modification 1]
A processing apparatus according to Modification 1 of Embodiment 1 of the present invention will be described with reference to the drawings. 16 is a diagram showing a progress display screen displayed on the display screen of the display unit of the processing apparatus according to Modification 1 of Embodiment 1. FIG. In addition, FIG. 16 attaches|subjects the same code|symbol to the same part as Embodiment 1, and abbreviate|omits description.

In the processing apparatus 1 according to Modification 1 of Embodiment 1, a cassette elevator 50 supports a plurality of (two in Modification 1) cassettes 60 stacked in the Z-axis direction. As shown in FIG. 16, the progress display screen 112 of the processing apparatus 1 according to Modification 1 has a first intra-cassette map 130-1 corresponding to the lower cassette 60 of the two cassettes 60. , and the second intra-cassette map 130-2 corresponding to the upper cassette 60, the configuration is the same as the progress display screen 112 of the first embodiment. The in-cassette maps 130-1 and 130-2 of the progress display screen 112 of the processing apparatus 1 according to Modification 1 have the same configuration as the in-cassette map 130 of the first embodiment.

In the processing apparatus 1 according to Modification 1, as in the first embodiment, the in-apparatus map 120 and the in-cassette maps 130-1 and 130-2 are set on the progress display screen 112, and the in-cassette maps 130-1 and 130-2 are set on the progress display screen 112. -2, the color 301 of the corresponding regions 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200 stored in the storage shelf 64 of the cassette 60 corresponding to the square 131. , 302, 303, 304, 305 are displayed. For this reason, in the processing apparatus 1 according to the first modification, the colors 301, 302, 303, and 304 of the squares 131 indicate where the workpieces 200 unloaded from the storage racks 64 of the cassette 60 are located on the intra-apparatus map. , 305 can be recognized by the operator at a glance, and the progress of machining of the workpiece 200 can be grasped.

[Modification 2]
A processing apparatus according to Modification 2 of Embodiment 1 of the present invention will be described with reference to the drawings. 17 is a diagram showing a progress display screen displayed on the display screen of the display unit of the processing apparatus according to Modification 2 of Embodiment 1. FIG. In addition, FIG. 17 attaches|subjects the same code|symbol to the same part as Embodiment 1, and abbreviate|omits description.

In the processing apparatus 1 according to Modification 2 of Embodiment 1, a cassette elevator 50 stacks and supports a plurality of (two in Modification 1) cassettes 60 in the Z-axis direction. As shown in FIG. 17, the progress display screen 112 of the processing apparatus 1 according to Modification 2 includes a first intra-cassette map 130-1 corresponding to the lower cassette 60 of the two cassettes 60, and the upper cassette 60 In addition to being able to switch between the first cassette map 130-1 and the second cassette map 130-2 to be displayed, it is possible to display one of the second cassette map 130-2 corresponding to the The configuration is the same as the progress display screen 112 of No. 1. Each of the cassette maps 130-1 and 130-2 of the progress display screen 112 of the processing apparatus 1 according to Modification 2 has the configuration of the cassette map 130 of the first embodiment, in addition to the cassette identification indicating the cassette 60 being displayed. A region 132 is set. In Modified Example 2, the display information setting unit 101 of the processing apparatus 1 switches between the in-cassette maps 130-1 and 130-2 displayed on the progress display screen 112 when receiving the operator's operation on the cassette identification area 132. In the present invention, the method for switching between the cassette maps 130-1 and 130-2 displayed on the progress display screen 112 is not limited to this method.

As in the first embodiment, the processing apparatus 1 according to Modification 2 sets the in-apparatus map 120 and the in-cassette maps 130-1 and 130-2 on the progress display screen 112, and sets the in-cassette maps 130-1 and 130-2. -2, the color 301 of the corresponding regions 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200 stored in the storage shelf 64 of the cassette 60 corresponding to the square 131. , 302, 303, 304, 305 are displayed. For this reason, in the processing apparatus 1 according to the second modification, the colors 301 , 302 , 303 , and 304 of the squares 131 indicate where the workpieces 200 unloaded from the storage racks 64 of the cassette 60 are located on the intra-apparatus map. , 305 can be recognized by the operator at a glance, and the progress of machining of the workpiece 200 can be grasped.

It should be noted that the present invention is not limited to the above embodiments and modifications. That is, various modifications can be made without departing from the gist of the present invention. In the above-described first embodiment and the like, different colors 301, 302, 303, 304, and 305 are displayed in each of the corresponding areas 121, 122, 123, 124, and 125 of the progress display screen 112, and each square 131 is displayed with a color to be processed. Colors 301, 302, 303, 304, 305 of corresponding regions 121, 122, 123, 124, 125 corresponding to the current position of the object 200 are displayed. However, in the present invention, different identification marks are displayed in each of the corresponding areas 121, 122, 123, 124, and 125 of the progress display screen 112, and corresponding areas corresponding to the current position of the workpiece 200 are displayed in each square 131. Identification marks 121, 122, 123, 124, and 125 may be displayed. Further, in Embodiment 1 and the like, an example in which the processing device 1 is a cutting device is shown, but the present invention is not limited to the processing device 1 being a cutting device. may be applied to the workpiece 200.

1 processing device 10 chuck table 20 cutting unit (processing unit)
50 cassette elevator (cassette placement area)
60 Cassette 64 Storage shelf (stage)
70 washing unit (washing area)
81 rail (temporary storage area)
90 transport unit 100 control unit 101 display information setting unit 111 display screen 112 progress display screen (display information)
120 Apparatus Map 121 Temporary Placement Area 122 First Transfer Unit Area 123 Chuck Table Area 124 Cleaning Area 125 Second Transfer Unit Area 131 Squares 140, 141 Workpiece Mark 200 Workpiece 301, 302, 303, 304, 305 colors (predetermined colors)
306 Color to indicate delivery

Claims (4)

a chuck table for holding a workpiece, a machining unit for machining the workpiece held by the chuck table, a cassette mounting area where a cassette having a plurality of stages for accommodating the workpiece is mounted, A display screen displaying a cleaning area for cleaning the workpiece, a transport unit for transporting the workpiece between the cassette, the chuck table, and the cleaning area, and a progress status of machining of the workpiece. and a display information setting unit for setting information to be displayed on the display screen,
In the display information setting section,
an apparatus internal map having a chuck table corresponding area corresponding to the chuck table and a cleaning corresponding area corresponding to the cleaning area , each corresponding area being displayed in a different color ;
a work piece mark for displaying the current position of the work piece unloaded from the cassette superimposed on the intra-apparatus map;
A plurality of squares indicating the stage of the cassette are set as display information,
The squares are displayed in the same color as the corresponding area corresponding to the current position of the workpiece accommodated in the stage of the cassette indicated by the squares during the machining operation . processing equipment. 2. The processing apparatus according to claim 1, wherein the intra-apparatus map includes a transport unit corresponding area corresponding to a transport unit that transports the workpiece. 3. A color or an identification mark indicating that the work has been carried in is displayed in the squares indicating the stages in which the workpieces that have been carried out from the cassette and then returned to the cassette are accommodated. Processing equipment as described. The processing apparatus further includes a temporary placement area in which the workpiece carried out from the cassette placed in the cassette placement area is temporarily placed, and the transfer unit includes the cassette, the temporary placement area, and the chuck table. 4. The processing apparatus according to any one of claims 1 to 3, wherein the workpiece is transported between the washing area and the cleaning area, and the apparatus internal map includes a temporary placement corresponding area corresponding to the temporary placement area . .

Images