JP7157631B2 - processing equipment - Google Patents

Description

The present invention relates to a processing apparatus for inspecting processing quality during processing of a workpiece.

In general, cutting grooves, laser-processed grooves, modified layers, and other processed parts are formed (processed) along dividing lines (street) formed on the surface or back of the workpiece using a cutting blade or laser beam. There are known processing devices for These processing apparatuses have a function (kerf check function) for periodically checking the processing quality during processing of the above-described processed portion (see, for example, Patent Documents 1 and 2).

The measurement items to be checked include, for example, how much the position of the processed portion deviates from the specified position, the thickness of the processed portion, and the vertical and horizontal size of chipping that occurs in the processed portion. Images captured by the camera are used to detect the presence or absence of abnormalities in each measurement item, and if an abnormality occurs in a measurement item, the processing of the part to be processed is immediately stopped to prevent processing defects caused by the abnormality from spreading over a wide area. is set to not With this kind of kerf check function, when an abnormality is reported in various set measurement items, the processing of the processed part is temporarily stopped, and the operator who is called by the report adjusts the processing conditions and equipment settings as appropriate. Afterwards, the machining of the part to be machined can be resumed.

Japanese Patent No. 6029271 JP 2013-74198 A

However, in actual worksites, even if an abnormality is detected in a highly important measurement item, for example, an inexperienced operator can resume processing of the workpiece without adjusting the device settings to make them appropriate. There is a possibility that it will not be possible to stop the occurrence of machining defects due to the abnormality.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a processing apparatus that can prevent an operator from easily restarting processing according to a measurement item in which an abnormality in processing quality is detected. do.

In order to solve the above-described problems and achieve the object, the present invention provides a chuck table for holding a workpiece having a machining street on a holding surface, and a chuck table for holding the workpiece held on the chuck table. A processing unit that processes along a street, an imaging unit that captures an image of a workpiece held on the chuck table, and a processing quality based on an image of the street of the workpiece processed by the processing unit. a kerf check unit for confirming the kerf check unit, the kerf check unit includes a plurality of measurement items for confirming the quality of the processing, and a measurement storage unit for storing the allowable range of each measurement item a stop determination unit that measures the measurement item based on the image and, if the measurement result exceeds the allowable range, stops the processing of the workpiece by the processing unit in an unrestartable state; a restart condition setting unit for setting, for each measurement item, a condition for restarting the machining that has been stopped by the judgment of the unit.

According to this configuration, since the restart condition setting section for setting conditions for restarting machining for various measurement items is provided, conditions corresponding to the importance of the measurement items can be set for each measurement item. For this reason, for measurement items with a high degree of importance, for example, only operators or process managers who have the prescribed qualifications can restart the operation. It is possible to suppress resumption of machining by judgment. Therefore, it is possible to suppress the occurrence of defective products due to the abnormality.

In this configuration, the condition set in the restart condition setting section may be input of a password.

Further, a worker identification unit for identifying a worker who restarts the processing of the processing unit may be provided, and the conditions set in the restart condition setting unit may be set based on the identification result of the worker identification unit. good.

According to the present invention, since a restart condition setting unit that sets conditions for restarting machining for various measurement items is provided, a condition corresponding to the importance of each measurement item can be set for each measurement item. For this reason, for measurement items with a high degree of importance, for example, only operators or process managers who have the prescribed qualifications can restart the operation. It is possible to suppress resumption of machining by judgment.

FIG. 1 is a perspective view showing the configuration of a cutting device according to this embodiment. FIG. 2 is a perspective view of a workpiece to be processed. FIG. 3 is a diagram showing an example of a screen displaying allowable values and ranks set corresponding to a plurality of measurement items. FIG. 4 is a flow chart showing the operation procedure during the kerf check of the cutting device. FIG. 5 is a schematic diagram showing a machining operation for cutting a workpiece. FIG. 6 is a schematic diagram showing the operation of imaging the processed groove by the imaging unit. FIG. 7 is a diagram showing an example of an input screen for inputting conditions for restarting the machining operation.

A form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in configuration can be made without departing from the gist of the present invention.

FIG. 1 is a perspective view showing the configuration of a cutting device according to this embodiment. FIG. 2 is a perspective view of a workpiece to be processed. A cutting device (processing device) 1 is a device for cutting a workpiece 100 . In this embodiment, the workpiece 100 is, for example, a disk-shaped semiconductor device wafer or optical device wafer whose base material is silicon, sapphire, gallium, or the like. A workpiece 100 has streets (planned division lines) 102 formed in a grid pattern on a front surface 101 (or a rear surface 104), and devices 103 are formed in each area partitioned by the streets 102. FIG. The cutting device 1 cuts along the streets 102 to divide the workpiece 100 into device chips. A dicing tape 105 is attached to the back surface 104 of the workpiece 100 , and an annular frame 106 is attached to the dicing tape 105 . Thereby, the workpiece 100 is supported by the annular frame 106 via the dicing tape 105 . Moreover, the workpiece 100 includes not only a disk-shaped wafer but also a package substrate, a ceramic substrate, a glass substrate, etc. formed in a rectangular plate-like shape.

The cutting device 1 includes a device main body 2 and a cover body 3 covering the upper portion of the device main body 2, as shown in FIG. The cover body 3 has wall plates 3A provided on each side surface and a top surface, respectively, and is formed in a box shape with an open bottom surface. At least a part of the wall plate 3A is formed of a transparent plate, so that the inside of the cover body 3 can be viewed from the outside. The cutting device 1 includes an indicator lamp 5 erected on the top wall plate 3A of the cover body 3, a touch input type display panel 6 provided on one side wall plate 3A, and a lower portion of the display panel 6. and a worker identification unit 7 provided in.

The indicator lamp 5, for example, lights up in green during normal operation, and flashes in red when an abnormality (error) occurs during cutting. The display panel 6 displays the operation status and various types of information when the workpiece 100 is processed, and inputs various setting values and operation commands for controlling the cutting device 1 . In this embodiment, the machining conditions for machining the workpiece 100, the allowable values (permissible ranges) of a plurality of measurement items for checking the machining quality applied to the workpiece 100, and the machining operation of the cutting device 1 A resume operation command or the like is input when resuming the operation. Further, the worker identification unit 7 reads worker information from a worker identification card 111 owned by an operator (worker) 110 or a worker identification tag 112 attached to work clothes, and reads the operator information. 110 is identified. Further, the worker identification unit 7 may wirelessly communicate with the worker identification card 111 or the worker identification tag 112 within a predetermined distance (for example, 80 cm) to obtain worker information through wireless communication.

The cutting apparatus 1 also includes a rotatable chuck table 10 that sucks and holds a workpiece 100 supported by an annular frame 106 on a holding surface 11, and supplies cutting fluid to the workpiece 100 held on the chuck table 10. and a cutting unit (processing unit) 20 for cutting (processing) the workpiece 100 with a cutting blade 21 while cutting (processing) the workpiece 100 . The cutting apparatus 1 also includes a processing feed unit 30 that moves the chuck table 10 in the X-axis direction (processing feed direction) and an indexing unit that moves the cutting unit 20 in the Y-axis direction (index feed direction) perpendicular to the X-axis direction. A feed unit 40 , a cutting feed unit 50 for moving the cutting unit 20 in the Z-axis direction (vertical direction) orthogonal to the X-axis direction and the Y-axis direction, respectively, and a control unit 60 .

The cutting apparatus 1 also includes a cassette elevator 71 on which a cassette 70 containing a plurality of workpieces 100 before and after cutting is placed, and a cassette elevator 71 for moving the cassette 70 in the Z-axis direction, and a cleaning apparatus for cleaning the workpieces 100 after cutting. and a conveying means (not shown) for conveying the workpiece 100 between the cassette 70 , the chuck table 10 and the washing means 80 .

The chuck table 10 is arranged on the upper surface of the rectangular parallelepiped apparatus main body 2, and has a holding surface 11 on which a workpiece 100 is placed and sucked. and a clamp portion 12 for fixing an annular frame 106 adhered to 100 . The chuck table 10 has a disk shape in which a portion constituting the holding surface 11 is made of porous ceramic or the like, and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The placed workpiece 100 is held by suction. The chuck table 10 is configured to be movable in the X-axis direction on the upper surface of the apparatus main body 2 by the processing feed unit 30, and to be rotatable about an axis parallel to the Z-axis direction by a rotation drive source (not shown). , and adjusted to an arbitrary rotation angle with respect to the cutting unit 20 .

The cutting unit 20 processes the workpiece 100 held on the chuck table 10 with the cutting blade 21 . The cutting unit 20 is fixed to a portal frame 8 erected on the upper surface of the apparatus main body 2 via an indexing feed unit 40 and a cutting feed unit 50 . Therefore, the cutting unit 20 can move in the Y-axis direction and the Z-axis direction to position the cutting blade 21 at an arbitrary position on the holding surface 11 of the chuck table 10 . In the present embodiment, the cutting apparatus 1 is configured to include two cutting units 20 arranged facing each other in the Y-axis direction (index feed direction) with the chuck table 10 interposed therebetween. may be configured.

The cutting unit 20 has a cutting blade 21 , a housing 22 and an imaging unit 23 . The cutting blade 21 is a very thin disc-shaped and ring-shaped cutting grindstone. The housing 22 accommodates a spindle connected to the cutting blade 21 and a motor (both not shown) for rotating the spindle. The image pickup unit 23 is a camera having an image pickup device such as a CCD (Charge Coupled Device) image sensor that takes an image using visible light. In addition, the imaging unit 23 may be an infrared camera having an imaging element such as an infrared CCD image sensor that captures an image by capturing infrared rays irradiated to the workpiece 100, or may include a normal camera and an infrared camera. may be configured as follows. The image pickup unit 23 takes an image of the cut groove (machined portion) machined along the street 102 and sends an image signal to the control unit 60, for example, during a kerf check for confirming the machining quality of the cut groove (machined portion).

The processing feed unit 30 is arranged in the apparatus main body 2, and moves the chuck table 10 in the X-axis direction parallel to the holding surface 11, thereby moving the chuck table 10 and the cutting unit 20 relatively in the X-axis direction. Process and feed along. The processing feed unit 30 includes, for example, a motor, a ball screw, a guide rail, etc., and relatively moves a movable base 31 to which the chuck table 10 is fixed in the X-axis direction with respect to the apparatus body 2 .

The index feed unit 40 and the cut feed unit 50 are provided on the portal frame 8 described above. The indexing feed unit 40 relatively moves the chuck table 10 and the cutting unit 20 along the Y-axis direction by moving the cutting unit 20 parallel to the holding surface 11 in the Y-axis direction. . As shown in FIG. 1, the indexing feed unit 40 includes a pair of guide rails 41 arranged on the portal frame 8 and extending in the Y-axis direction, a ball screw 42 arranged parallel to the guide rails 41, and A blade moving base 43 that has a nut (not shown) screwed onto the ball screw 42 inside and that moves along the guide rail 41 is provided. A motor 44 for rotating the ball screw 42 is connected to one end of the ball screw 42 , and the rotation of the ball screw 42 causes the blade moving base 43 to move along the guide rail 41 in the Y-axis direction.

The cutting feed unit 50 relatively feeds the chuck table 10 and the cutting unit 20 along the Z-axis direction by moving the cutting unit 20 in the Z-axis direction orthogonal to the holding surface 11 . As shown in FIG. 1, the cutting feed unit 50 includes a pair of guide rails 51 arranged on the blade moving base 43 and extending in the Z-axis direction, a ball screw 52 arranged parallel to the guide rails 51, It has a nut (not shown) to be screwed onto the ball screw 52 inside, and a cutting movement base 53 that moves along the guide rail 51 . The cutting unit 20 described above is supported on the cutting movement base 53 . A motor 54 for rotating the ball screw 52 is connected to one end of the ball screw 52 , and the rotation of the ball screw 52 causes the incision moving base 53 to move along the guide rail 51 in the Z-axis direction.

The control unit 60 controls each of the above-described components that constitute the cutting device 1 . That is, the control unit 60 causes the cutting apparatus 1 to perform cutting on the workpiece 100 and a kerf check performed during the cutting. Here, the kerf check is an operation for checking the processing quality of a cutting groove (machined portion; also called a processing groove) machined along the street 102. The size of the generated chipping is measured, and if the measured value exceeds the allowable value, it is displayed on the display lamp 5 and the display panel 6 as an abnormality occurrence.

The control unit 60 includes an arithmetic processing section 61 and a kerf check section 62 that performs a kerf check under the control of the arithmetic processing section 61 . The arithmetic processing unit 61 includes a microprocessor such as a CPU (central processing unit), executes a computer program, and performs various controls for controlling the cutting apparatus 1 and for controlling the kerf check operation. Generate a signal. The generated control signal is output to each component of the cutting device 1 via an input/output interface (not shown).

The kerf check section 62 includes a measurement storage section 63 , a stop determination section 64 , a display command section 65 , a restart condition setting section 66 and a restart condition input determination section 67 . The measurement storage unit 63 stores a plurality of measurement items for confirming the processing quality, an allowable value (allowable range) set for each measurement item, and an importance rank set for each measurement item. FIG. 3 is a diagram showing an example of a screen displaying allowable values and ranks set corresponding to a plurality of measurement items. A setting screen 90 shown in FIG. 3 is displayed on the display panel 6 .

The setting screen 90 displays a captured image 91 of the cut groove 107, and also displays a set allowable value 92 and a rank 93 for each of a plurality of measurement items. "Off-center" in the measurement item refers to the amount of deviation between the center 102A of the street 102 and the center 107A of the cutting groove 107. As shown in FIG. Further, "kerf width Max" refers to the maximum value of the groove width of the cutting groove 107 (excluding chipping), and "kerf width Min" refers to the minimum value of the groove width of the cutting groove 107. "Kerf center to chipping" refers to the length from the center 107A of the cutting groove 107 to the tip of the maximum chipping 108 produced in the cutting groove 107. FIG. "Max chipping" refers to the length of the maximum chipping 108 in the groove width direction. "Chipping area" refers to the total chipping area of the cut groove 107 .

The allowable values of these measurement items are set values that can maintain the processing quality. The rank of the measurement item is a rank indicating the importance of the measurement item, and in this embodiment, it is set in two stages: "Check", which is a normal rank, and "Call", which has a higher rank of importance than "Check". ing. Allowable values and ranks corresponding to measurement items are input and set in advance by an operator or a process manager (hereinafter referred to as a process manager, etc.) with a predetermined qualification, for example, by operating the display panel 6, and are stored in measurement memory. It is stored in the section 63 and managed so that the operator of the cutting device 1 cannot easily change it.

During the kerf check, the stop determination unit 64 determines whether or not the measurement result of the measurement item measured based on the captured image exceeds the allowable value. When it is determined that the cutting unit 20 is present), a stop signal for temporarily stopping the machining operation by the cutting unit 20 is output to the arithmetic processing unit 61 . In particular, the stop determination unit 64 determines that the measurement result of a measurement item (rank “Call” in this embodiment) set to have a high degree of importance among the measurement items exceeds the allowable value (a serious abnormality has occurred). ), a restart prohibition stop signal is output to the arithmetic processing unit 61 to stop the machining operation by the cutting unit 20 in a state in which restart is prohibited (restart is not possible).

The display command unit 65 causes the display panel 6 to display the measurement item exceeding the allowable value as abnormal based on the determination result of the stop determination unit 64 . In addition, the display command unit 65 causes the display panel 6 to display an input screen for inputting conditions for restarting the machining operation and for prompting a restart operation.

The restart condition setting unit 66 sets a condition (restart condition) for restarting the machining operation that has been stopped by the determination of the stop determination unit 64 for each measurement item. In this embodiment, the restart conditions for measurement items with low importance (rank "Check" in this embodiment) are determined by the operator operating a predetermined restart button after confirming and adjusting the processing conditions and device settings. Set to resume machining operations. In addition, the restart condition for the measurement item with high importance (rank "Call" in this embodiment) is that after the operator confirms and adjusts the processing conditions and device settings, the process manager enters a predetermined password, In addition, it is set to restart the machining operation by operating a predetermined restart button. Also, instead of inputting the above-described password, the worker information of the worker identification card 111 or the worker identification tag 112 such as the process manager may be input through the worker identification unit 7 .

The restart condition input determination unit 67 determines whether or not a predetermined restart condition (password or operator information) has been input for a measurement item with a high degree of importance, and permits the restart of the machining operation if it has been input. As a result, only process managers, etc., can resume processing operations for measurement items with high importance. Operation can be resumed. Therefore, it is possible to prevent an inexperienced operator from easily resuming machining in a situation where the cause of the abnormality has not been sufficiently resolved, and therefore, it is possible to suppress the occurrence of defective products due to the abnormality. .

Next, the operation of the cutting device 1 during the kerf check will be described. In particular, the operation when a serious abnormality occurs in a highly important measurement item will be described. FIG. 4 is a flow chart showing the operation procedure during the kerf check of the cutting device. FIG. 5 is a schematic diagram showing a machining operation for cutting a workpiece. FIG. 6 is a schematic diagram showing the operation of imaging the processed groove by the imaging unit. FIG. 7 is a diagram showing an example of an input screen for inputting conditions for restarting the machining operation.

First, the arithmetic processing section 61 uses the pair of cutting units 20 to cut the workpiece 100 (step ST1). In the example of FIG. 5, one cutting unit 20 has a cutting blade 21 with a thick blade, and the other cutting unit 20 has a cutting blade 21 with a thinner blade thickness than the one cutting unit. In this configuration, the cutting blade 21 with a thick blade cuts the surface of the workpiece 100, and the cutting blade 21 with a thin blade cuts the rest to form a machining groove (machined portion) 107. Step cutting is performed. do. According to this, since the TEG pattern formed on the surface of the street is removed with a blade with a thick blade pressure, and then the workpiece is cut with a blade with a thin blade pressure, clogging of the cutting blade 21 with a thin blade thickness can occur. can be suppressed, the damage given to the cutting blade 21, which has a particularly thin blade thickness, can be minimized. Therefore, back surface chipping that occurs on the back surface 104 side of the workpiece 100 can be suppressed.

Next, each time a predetermined number (for example, 10) of streets 102 are cut, the arithmetic processing unit 61 creates an arbitrary (final) cut groove (machined groove) 107 in the imaging unit 23 as shown in FIG. An image is taken (step ST2). Then, the arithmetic processing section 61 causes the kerf check section 62 to perform a kerf check based on the captured image. Specifically, the stop determination unit 64 acquires the measurement results of each measurement item measured based on the captured image, and determines whether or not these measurement results are within the allowable range of the measurement item ( step ST3). If it is determined in step ST3 that the measurement result is within the allowable range of the measurement item (step ST3; Yes), the machined cutting groove 107 is appropriate, and the process ends.

On the other hand, in the judgment of step ST3, if the measurement result is not within the allowable range of the measurement item (step ST3; No), that is, if the allowable value of the measurement item is exceeded, an abnormality occurs in the machined cutting groove 107. Therefore, the stop determination unit 64 temporarily stops the machining operation (step ST4). In particular, the stop determination unit 64 determines that the measurement result of a measurement item (rank "Call" in FIG. 3) set to have a high degree of importance among the measurement items is not within the allowable range (a serious abnormality has occurred). In this case, a restart prohibition stop signal is output to the arithmetic processing unit 61 to stop the machining operation by the cutting unit 20 in a state in which the restart is prohibited.

Here, when a serious abnormality has occurred in a measurement item with a high degree of importance, the display command unit 65 causes the display panel 6 to display the cut resume button 121 and the password input area 122 for the restart condition shown in FIG. to display the input screen 120. Next, the restart condition input determining section 67 determines whether or not a predetermined restart condition (for example, a password) has been input for the measurement item with high importance (step ST5). If it is determined in step ST5 that the predetermined restart condition is not input on the input screen 120 (step ST5; No), the process waits until input is made.

On the other hand, if a predetermined restart condition (for example, a password) has been entered on the input screen 120 (step ST5; Yes), the cutting restart button 121 is operated to restart the machining operation (step ST6). In this embodiment, the predetermined restart condition is that the process manager or the like inputs a password. For this reason, when a serious abnormality occurs in a highly important measurement item, the on-site operator goes to the process manager, etc., and together with the process manager, confirms the processing conditions and equipment settings, and By performing the adjustment, it is possible to quickly identify the location of the cause of the occurrence of the current abnormality and eliminate the cause. Furthermore, since the process manager or the like enters a predetermined password in the input area 122 and operates the cutting restart button 121, the machining operation can be restarted only by the judgment of an inexperienced operator. In addition, it is possible to prevent the machining from being easily restarted in a situation where the cause of the abnormality has not been sufficiently resolved, and thus it is possible to suppress the production of defective products due to the abnormality.

In addition, if an abnormality occurs in a measurement item that is not highly important, it can be dealt with by the on-site operator alone. , the cutting restart button 121 can be operated to restart the machining operation. According to this configuration, it is possible to reduce the processing stop time due to an abnormality related to a less important measurement item, and improve productivity.

As described above, the cutting apparatus 1 according to the present embodiment includes the chuck table 10 that holds the workpiece 100 having the streets 102 on the holding surface 11, and the workpiece 100 held by the chuck table 10 that is machined along the streets 102. , an imaging unit 23 for imaging the workpiece 100 held on the chuck table 10, and an image of the cutting groove 107 formed in the street 102 of the workpiece 100 by the cutting unit 20. a kerf check unit 62 for checking the machining quality of the cutting groove 107, the kerf check unit 62 having a plurality of measurement items for checking the machining quality and a measurement storage unit 63 for storing the allowable range of each measurement item. and a stop determination unit 64 that measures a measurement item based on the image, and stops the machining of the workpiece 100 by the cutting unit 20 in a state where it cannot be restarted when the measurement result exceeds the allowable range, and a stop determination unit 64 A restart condition setting unit 66 is provided for setting conditions for restarting the machining stopped by the determination of 64 for each measurement item. For this reason, it is possible to set conditions for each measurement item according to the importance of the measurement item. Since it is possible to resume processing, it is possible to suppress the resumption of processing based on the judgment of the operator at the site according to the importance of the measurement item in which the abnormality occurred. Therefore, it is possible to suppress the occurrence of defective products due to the abnormality.

Further, according to this embodiment, since the condition set in the restart condition setting unit 66 is the input of a password, an operator or a process manager with a predetermined qualification can easily input the restart condition. .

Further, a worker identification unit 7 for identifying a worker who restarts the machining of the cutting unit 20 is provided, and the conditions set in the restart condition setting unit 66 are set based on the identification result of the worker identification unit 7. Therefore, the worker identification unit 7 reads the worker information from the worker identification card 111 or the worker identification tag 112 of an operator or process manager who has a predetermined qualification, for example, so that the input operation of the restart condition can be performed more easily. can be facilitated.

It should be noted that the present invention is not limited to the above embodiments. That is, various modifications can be made without departing from the gist of the present invention. In this embodiment, the configuration includes the cutting unit (processing unit) 20 that cuts the workpiece 100 with the cutting blade 21, but the configuration is not limited to this. A laser processing unit (processing unit) that irradiates a laser beam having a wavelength that is absorptive to the work piece 100 along the streets 102 of the work piece 100, and a laser processing groove (work piece) along the streets 102. may be formed and a kerf check of this laser machined groove may be performed. Further, a laser processing section (processing unit) that irradiates a laser beam having a wavelength that is transparent to the workpiece 100 along the street 102 with the focal point positioned inside the workpiece 100 is provided. A modified layer (processed portion) may be formed along 102 and a kerf check may be performed on this modified layer. In this case, since the modified layer is formed inside the workpiece 100, an imaging unit 23 equipped with an infrared CCD is used.

Also, in the present embodiment, chipping and the like have been exemplified as measurement items for confirming the quality of processing, but measurement items other than chipping may be provided. For example, the device 103 and the street 102 are provided with a unique pattern (key pattern) used to detect the position and orientation of the street 102 of the workpiece 100 . The distance between this key pattern and the position to be cut (the center of the street 102) is registered as a predetermined distance. For this reason, the distance between (the center of) the machined cutting groove 107 and the key pattern is set as a measurement item, and the distance between (the center of) the cutting groove 107 and the key pattern is measured during cutting, and the measurement result is within the allowable range. It may be determined whether or not the distance is within (within a predetermined distance).

1 Cutting equipment (processing equipment)
6 display panel 7 operator identification unit 10 chuck table 11 holding surface 20 cutting unit (processing unit)
21 cutting blade 23 imaging unit 60 control unit 61 arithmetic processing unit 62 kerf check unit 63 measurement storage unit 64 stop judgment unit 65 display command unit 66 restart condition setting unit 67 restart condition input judgment unit 100 workpiece 102 street 107 cutting groove ( machined groove, machined part)
108 chipping 110 operator 111 operator identification card 112 operator identification tag 120 input screen 121 cut restart button 122 input area

Claims (3)

A chuck table for holding a workpiece having a machining street on a holding surface, a machining unit for machining the workpiece held by the chuck table along the street, and a workpiece held by the chuck table. A processing apparatus comprising: an imaging unit that captures an image of a workpiece; and a kerf check section that checks the quality of processing based on an image of the street of the workpiece processed by the processing unit, the processing apparatus comprising:
The kerf check unit
a plurality of measurement items for confirming the quality of the processing, a measurement storage unit for storing the allowable range of each measurement item;
a stop determination unit that measures the measurement item based on the image, and stops the processing of the workpiece by the processing unit in a non-resumable state when the measurement result exceeds the allowable range;
A processing apparatus comprising: a restart condition setting unit that sets, for each measurement item, a condition for restarting the processing stopped by the judgment of the stop judgment unit. 2. The processing apparatus according to claim 1, wherein the condition set in said restart condition setting unit is input of a password. further comprising a worker identification unit that identifies a worker who causes the processing unit to resume processing;
2. The processing apparatus according to claim 1, wherein the condition set in said restart condition setting section is set based on the identification result of said worker identification unit.

Images