JP7083262B2 - Heating device - Google Patents

Description

The techniques disclosed herein relate to heating devices.

A heating device (also referred to as "susceptor") that heats an object (for example, a semiconductor wafer) to a predetermined processing temperature (for example, about 400 to 650 ° C.) while holding it is known (see, for example, Patent Document 1). .. The heating device is used as a part of a semiconductor manufacturing device such as a film forming apparatus (CVD deposition apparatus, sputtering film forming apparatus, etc.) or an etching apparatus (plasma etching apparatus, etc.).

Generally, the heating device includes a holder and a support. The holding body has a surface (hereinafter referred to as "holding surface") substantially orthogonal to a predetermined direction (hereinafter referred to as "first direction") and a surface opposite to the holding surface (hereinafter referred to as "back surface"). It is a plate-shaped member having and. Further, the support is a tubular member that is joined to the back surface of the holding body and has a through hole extending in the first direction. A resistance heating element is arranged inside the holder, and a plurality of power receiving electrodes (electrode pads) electrically connected to the resistance heating element are arranged on the back surface of the holder. Further, a plurality of electrode terminals are housed in the through holes formed in the support, and each electrode terminal is joined to a corresponding power receiving electrode via a metal brazing material. Further, in the through hole formed in the support, a plurality of insulating tubes corresponding to the plurality of electrode terminals are housed. Each insulating tube is formed with a through hole for accommodating the corresponding electrode terminal. When a voltage is applied to the resistance heating element via the electrode terminal and the power receiving electrode, the resistance heating element generates heat, and the object (for example, a semiconductor wafer) held on the holding surface of the holding body is, for example, 400 to 650 ° C. It is heated to the extent.

Japanese Patent Publication No. 2011-525719

In the configuration of the conventional heating device, there is a problem that a short circuit between the power receiving electrodes formed on the second surface of the holding body may occur.

This specification discloses a technique capable of solving the above-mentioned problems.

The techniques disclosed herein can be realized, for example, in the following forms.

(1) The heating device disclosed in the present specification is composed of an insulator, and has a substantially planar first surface substantially orthogonal to the first direction and a second surface opposite to the first surface. A tubular shape that is composed of a plate-shaped holding body having a surface thereof, an insulator, and is joined to the second surface of the holding body to form a first through hole extending in the first direction. At a position where the support, the resistance heating element arranged inside the holder, and the first through hole of the support on the second surface of the holder overlap with the first through hole in the first direction. A plurality of power receiving electrodes arranged and electrically connected to the resistance heating element, and a plurality of electrode terminals provided corresponding to the plurality of power receiving electrodes, each of which is at least a part of the support. A plurality of electrode terminals arranged in the first through hole and bonded to the corresponding power receiving electrode via a metal brazing material, and at least a part thereof in the first through hole of the support. A second through hole arranged therein and provided corresponding to the plurality of electrode terminals, extending in the first direction and accommodating at least a part of the corresponding electrode terminals. In a heating device comprising a plurality of insulating tubes formed by the above and heating an object held on the first surface of the holding body, both ends of each insulating tube in the first direction. The end of the holder on the side close to the holding body does not face the holding body in the second direction orthogonal to the first direction, and is one on the second surface of the holding body. At least one combination of the concave portion and the convex portion is formed in the specific region sandwiched between the first region in which the power receiving electrode is arranged and the second region in which the other power receiving electrode is arranged. .. According to the present heating apparatus, on the second surface of the holding body, the identification sandwiched between the first region in which one power receiving electrode is arranged and the second region in which the other power receiving electrode is arranged. Since at least one combination of the concave portion and the convex portion is formed in the region, the creepage distance between one power receiving electrode and the other power receiving electrode can be made relatively long. Therefore, according to this heating device, it is possible to suppress the occurrence of a short circuit between the power receiving electrodes formed on the second surface of the holding body.

(2) In the heating device, the convex portion is formed in a portion adjacent to the first region and a portion adjacent to the second region in the specific region on the second surface of the holder. The configuration may be characterized in that it is formed. In this heating device, in the specific region on the second surface of the holding body, a convex portion is formed instead of a concave portion in a portion adjacent to the first region and a portion adjacent to the second region. Therefore, according to this heating device, it is possible to effectively suppress the occurrence of a short circuit between the power receiving electrodes formed on the second surface of the holding body, and a metal brazing material for joining the power receiving electrode and the electrode terminal. It is possible to suppress the outflow of metal and realize a strong bond.

The techniques disclosed in the present specification can be realized in various forms, for example, in the form of a heating device, a semiconductor manufacturing device, a manufacturing method thereof, and the like.

It is a perspective view which shows schematic appearance structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100 in 1st Embodiment. It is explanatory drawing which enlarges and shows the cross-sectional structure of the heating apparatus 100 in the X1 part of FIG. It is explanatory drawing which enlarges and shows the cross-sectional structure of the heating apparatus 100 in the X2 part of FIG. It is explanatory drawing which shows the XY cross-sectional structure of the heating apparatus 100 at the position of IX-IX of FIG. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100X in the comparative example. It is explanatory drawing which shows schematic the cross-sectional structure of the heating apparatus 100a in 2nd Embodiment.

A. First Embodiment:
A-1. Configuration of heating device 100:
FIG. 1 is a perspective view schematically showing an external configuration of the heating device 100 according to the first embodiment, and FIGS. 2 to 6 are explanatory views schematically showing a cross-sectional configuration of the heating device 100 according to the first embodiment. Is. FIG. 2 shows the XZ cross-sectional configuration of the heating device 100 at the positions II-II of FIGS. 3 to 6, and FIG. 3 shows the XY cross-section of the heating device 100 at the positions III-III of FIG. The configuration is shown, FIG. 4 shows the XY cross-sectional configuration of the heating device 100 at the IV-IV position of FIG. 2, and FIG. 5 shows the heating device at the VV position of FIG. The XY cross-sectional configuration of 100 is shown, and FIG. 6 shows the XY cross-sectional configuration of the heating device 100 at the position of VI-VI in FIG. Further, FIG. 7 is an explanatory view showing an enlarged cross-sectional structure of the heating device 100 in the X1 part of FIG. 2, and FIG. 8 is an enlarged explanatory view showing the cross-sectional structure of the heating device 100 in the X2 part of FIG. FIG. 9 is an explanatory diagram showing an XY cross-sectional configuration of the heating device 100 at the position of IX-IX in FIG. 7. FIG. Each figure shows XYZ axes that are orthogonal to each other to identify the direction. In the present specification, for convenience, the Z-axis positive direction is referred to as an upward direction, and the Z-axis negative direction is referred to as a downward direction, but the heating device 100 is actually installed in a direction different from such an orientation. You may. The same applies to FIGS. 10 and later. Further, in the present specification, the direction orthogonal to the Z-axis direction is also referred to as a plane direction.

The heating device 100 is a device that heats an object (for example, a semiconductor wafer W) to a predetermined processing temperature (for example, about 400 to 650 ° C.) while holding the object, and is also called a susceptor. The heating device 100 is used, for example, as a part of a semiconductor manufacturing device such as a film forming apparatus (CVD deposition apparatus, sputtering film forming apparatus, etc.) or an etching apparatus (plasma etching apparatus, etc.). As shown in FIGS. 1 and 2, the heating device 100 includes a holder 10 and a support 20.

The holding body 10 has a surface (hereinafter referred to as “holding surface”) S1 substantially orthogonal to the Z-axis direction (vertical direction) and a surface opposite to the holding surface S1 (hereinafter referred to as “back surface S2”). It is a substantially disk-shaped member, and is composed of, for example, an insulator such as ceramics containing AlN (aluminum nitride) or _{Al2O3 (} alumina) as a main component. In the present specification, the main component means the component having the highest content ratio (weight ratio). The diameter of the holding body 10 is, for example, about 100 mm or more and 500 mm or less, and the thickness of the holding body 10 (dimensions in the Z-axis direction) is, for example, about 3 mm or more and 20 mm or less. The Z-axis direction (vertical direction) corresponds to the first direction in the claims, the holding surface S1 of the holding body 10 corresponds to the first surface in the claims, and the back surface S2 of the holding body 10. Corresponds to the second surface in the claims.

The support 20 is a substantially circular tubular member extending in the substantially Z direction, and is composed of, for example, an insulator such as ceramics containing AlN or _Al2O3 as a main component _, like the holder 10. As shown in FIG. 2, the support 20 is formed with a through hole 22 extending in the Z-axis direction from the upper surface S3 to the lower surface S4 of the support 20. The shape of the cross section (XY cross section) orthogonal to the Z-axis direction of the through hole 22 is substantially circular (see FIG. 4 and the like). The through hole 22 formed in the support 20 has a substantially constant inner diameter over substantially the entire Z-axis direction, but as shown in FIG. 8, constitutes an enlarged diameter portion 23 having an enlarged inner diameter at the lower end portion. There is. The outer diameter of the support 20 is, for example, about 30 mm or more and 90 mm or less, and the height (dimensions in the Z-axis direction) of the support 20 is, for example, about 100 mm or more and 300 mm or less. The through hole 22 formed in the support 20 corresponds to the first through hole in the claims.

As shown in FIGS. 2 and 7, the holding body 10 and the supporting body 20 are arranged so that the back surface S2 of the holding body 10 and the upper surface S3 of the supporting body 20 face each other in the Z-axis direction. The support 20 is joined to the vicinity of the center of the back surface S2 of the holding body 10 via a joining portion 30 formed of a known joining material.

As shown in FIGS. 2 and 3, two resistance heating elements 50 as heaters for heating the holding body 10 are arranged inside the holding body 10. Each resistance heating element 50 is made of a conductive material such as tungsten or molybdenum. In the present embodiment, each resistance heating element 50 constitutes a linear pattern extending substantially concentrically in a semicircular shape in the Z-axis direction.

Further, as shown in FIGS. 7 and 9, a plurality of positions (4 in the present embodiment) overlap with the through hole 22 formed in the support 20 in the Z-axis direction view in the back surface S2 of the holding body 10. One) first recess 11 is formed. In the present embodiment, the shape of each first recess 11 in the Z-axis direction is substantially circular. A power receiving electrode (electrode pad) 54 for supplying power to the resistance heating element 50 is provided in each of the first recesses 11. That is, in the present embodiment, a plurality of (four in the present embodiment) power receiving electrodes 54 are provided at positions overlapping the through holes 22 formed in the support 20 in the Z-axis direction in the back surface S2 of the holding body 10. Have been placed. In the present embodiment, the shape of each power receiving electrode 54 in the Z-axis direction is substantially circular.

As shown in FIGS. 2 and 3, one end of each resistance heating element 50 is arranged near the center of the holding body 10 in the Z-axis direction, and the holding body is attached to the one end. The upper end of the via conductor 52 arranged near the center of 10 is connected. Further, as shown in FIGS. 2 and 7, the lower end of the via conductor 52 connected to the one end of each resistance heating element 50 is connected to the power receiving electrode 54 arranged on the back surface S2 of the holding body 10. Has been done. Further, the other end of each resistance heating element 50 is arranged near the outer peripheral portion of the holding body 10, and the other end is not shown, but the via conductor 52 and the driver arranged on the holding body 10 are arranged. It is connected to a power receiving electrode 54 arranged on the back surface S2 of the holding body 10 via an electrode (not shown). As a result, each resistance heating element 50 is in a state of being electrically connected to the power receiving electrode 54 via the via conductor 52 and the like.

As shown in FIG. 2, in the through hole 22 formed in the support 20, a plurality (four in the present embodiment) provided corresponding to the plurality of (four in the present embodiment) power receiving electrodes 54. ) The electrode terminal unit 70 is housed. Each electrode terminal unit 70 is composed of a first columnar member 71, a second columnar member 72, and a metal stranded wire 73. The electrode terminal unit 70 corresponds to an electrode terminal within the scope of claims.

The first columnar member 71 constituting the electrode terminal unit 70 is a substantially columnar conductive member arranged on the holding body 10 side (that is, the upper side) with respect to the metal stranded wire 73, and is formed of, for example, nickel. ing. As shown in FIG. 7, the diameter of the end portion (that is, the upper end portion) of the first columnar member 71 on the holding body 10 side is smaller than the diameter of the other portion (for example, 5 mm or more and 8 mm or less). The upper end of the first columnar member 71 is joined to the power receiving electrode 54 via a metal brazing material 56 (for example, a gold brazing material). Further, as shown in FIG. 2, the other (lower) end of the first columnar member 71 is joined to the metal stranded wire 73 by, for example, caulking.

The second columnar member 72 constituting the electrode terminal unit 70 is a substantially columnar conductive member arranged on the side (that is, the lower side) away from the holding body 10 with respect to the metal stranded wire 73, for example. It is made of nickel. As shown in FIG. 2, the end portion (that is, the upper end portion) of the second columnar member 72 on the holding body 10 side is joined to the metal stranded wire 73 by, for example, caulking. Also, as shown in FIGS. 2 and 8, the other (lower) end of the second columnar member 72 projects downward from the through hole 22 of the support 20. The diameter of the lower end portion of the second columnar member 72 is smaller than the diameter of the other portion (for example, 5 mm or more and 8 mm or less). Further, a male screw 79 is formed in the middle of the lower end portion of the second columnar member 72.

The metal stranded wire 73 constituting the electrode terminal unit 70 is a stranded wire having a certain degree of flexibility, and is formed of, for example, nickel. The diameter of the metal stranded wire 73 is, for example, 1 mm or more and 3 mm or less. During the use of the heating device 100, the temperature of the holding body 10 rises due to the heat generated by the resistance heating element 50, so that the first columnar member between the holding body 10 and the support 20 and relatively close to the holding body 10 A thermal expansion difference may occur between the 71 and the second columnar member 72, which is relatively far from the holding body 10. When such a difference in thermal expansion occurs, stress is generated in the electrode terminal unit 70. Since the metal stranded wire 73 constituting the electrode terminal unit 70 has a certain degree of flexibility, the stress generated in the electrode terminal unit 70 can be absorbed and relaxed.

The lower end of the second columnar member 72 constituting the electrode terminal unit 70 is connected to a power source (not shown) directly or via a connector (not shown). When a voltage is applied from the power source to each resistance heating element 50 via each electrode terminal unit 70, each power receiving electrode 54, each via conductor 52, etc., each resistance heating element 50 generates heat, and the holding surface S1 of the holding body 10 The object held on the object (for example, the semiconductor wafer W) is heated to a predetermined temperature (for example, about 400 to 650 ° C.).

As shown in FIGS. 2, 4 and 5, a plurality of (four in this embodiment) electrode terminal units 70 are provided in the through holes 22 formed in the support 20. Insulated tubes 40 (four in this embodiment) are housed. Each insulating tube 40 is a substantially circular tubular member extending in the Z-axis direction, and is composed of, for example, an insulator such as ceramics containing AlN (aluminum nitride) or _{Al2O3 (} alumina) as a main component. As shown in FIG. 7, among both ends of the insulating tube 40 in the Z-axis direction, the end portion (that is, the upper end portion) on the side closer to the holding body 10 is in contact with the back surface S2 of the holding body 10 and is a surface. Not facing the retainer 10 in the direction. Further, as shown in FIGS. 7 and 8, each insulating tube 40 is formed with a through hole 42 extending in the Z-axis direction. The shape of the cross section (XY cross section) orthogonal to the Z-axis direction of the through hole 42 is substantially circular. The through hole 42 formed in the insulating tube 40 corresponds to the second through hole in the claims.

As shown in FIGS. 2, 7, and 8, the corresponding electrode terminal unit 70 is housed in the through hole 42 formed in each insulating tube 40. More specifically, a part of the corresponding electrode terminal unit 70 (hereinafter referred to as "first portion P1") is housed in the through hole 42 formed in each insulating tube 40. In the present embodiment, the first portion P1 of the electrode terminal unit 70 is a portion of the electrode terminal unit 70 excluding the lower end portion of the second columnar member 72. As shown in FIG. 7, the inner diameter R1 of the through hole 42 formed in the insulating tube 40 is substantially the same as the maximum outer diameter R2 of the first portion P1 in the electrode terminal unit 70. Therefore, the relative movement of the electrode terminal unit 70 with respect to the insulating tube 40 in the plane direction (direction orthogonal to the Z-axis direction) is restricted.

As shown in FIGS. 7 and 9, a plurality of (four) second recesses 12 are formed on the back surface S2 of the holding body 10. Each second recess 12 is a substantially annular groove (slit) that surrounds the first recess 11 (that is, surrounds the power receiving electrode 54). Therefore, a region on the back surface S2 of the holding body 10 in which one power receiving electrode 54 is arranged (hereinafter referred to as “first region A1”) and a region in which the other power receiving electrode 54 is arranged (hereinafter referred to as “first region A1”). At least one combination of the concave portion and the convex portion is formed in the region (hereinafter referred to as “specific region Ax”) sandwiched between the region (2) and the region (hereinafter referred to as “specific region Ax”). Specifically, for example, in the back surface S2 of the holding body 10, the second recess 12 surrounding the first region A1 is referred to as a "second recess 12 on the first region A1 side", and the second region A2. Assuming that the second recess 12 surrounding the above is referred to as "the second recess 12 on the second region A2 side", the specific region Ax sandwiched between the first region A1 and the second region A2 has a second recess. The first convex portion 13 formed between the region A1 of 1 and the second concave portion 12 on the first region A1 side, the second concave portion 12 on the first region A1 side, and the first region. A second convex portion 14 formed between the second concave portion 12 on the A1 side and the second concave portion 12 on the second region A2 side, and a second concave portion 12 on the second region A2 side. A third convex portion 15 formed between the second region A2 and the second concave portion 12 on the second region A2 side is formed. The first convex portion 13 is formed in a portion of the specific region Ax on the back surface S2 of the holding body 10 adjacent to the first region A1, and the third convex portion 15 is the specific region Ax. Of these, it is formed in a portion adjacent to the second region A2.

Further, as shown in FIGS. 2, 5 and 8, the cap member (hereinafter, described later) is located at the position of the enlarged diameter portion 23 (that is, the position near the lower end) in the through hole 22 formed in the support 20. A "upper cap member 80") is housed to distinguish it from other cap members. The upper cap member 80 is a plate-shaped member that is substantially circular in the Z-axis direction, and is composed of, for example, an insulator such as ceramics containing AlN (aluminum nitride) or _{Al2O3 (} alumina) as a main component. The upper cap member 80 is also called a retainer.

As shown in FIG. 8, the outer diameter of the upper cap member 80 is substantially the same as the inner diameter of the enlarged diameter portion 23 in the through hole 22 formed in the support 20. Therefore, the upper cap member 80 is in a state of being supported by the support 20 so that the relative movement in the plane direction with respect to the support 20 is restricted. The outer peripheral surface of the upper cap member 80 and the inner peripheral surface of the enlarged diameter portion 23 of the through hole 22 formed in the support 20 may be joined to each other by, for example, an inorganic adhesive. Further, in the present embodiment, in the Z-axis direction, the upper surface of the outer peripheral portion of the upper cap member 80 is related to the step (the boundary between the enlarged diameter portion 23 and the other portion) of the through hole 22 formed in the support 20. As a result, the movement of the upper cap member 80 to the upper side is restricted.

Further, as shown in FIG. 5, two convex portions 84 projecting in the surface direction (diameter direction) are formed on the outer peripheral surface of the upper cap member 80. The two convex portions 84 formed on the upper cap member 80 are fitted with the two concave portions (slits) 24 formed on the inner peripheral surface of the through hole 22 (the enlarged diameter portion 23) formed in the support 20. is doing. As a result, the relative rotation (rotation about the Z axis) of the upper cap member 80 with respect to the support 20 is restricted.

Further, as shown in FIGS. 5 and 8, a plurality of (four) through holes 82 extending in the Z-axis direction are formed in the upper cap member 80. The shape of the cross section of each through hole 82 orthogonal to the Z-axis direction is substantially circular. The lower end of the insulating tube 40 is housed in the through hole 82 formed in the upper cap member 80. As shown in FIG. 8, the inner diameter R4 of the through hole 82 formed in the upper cap member 80 is substantially the same as the outer diameter R3 of the lower end portion of the insulating tube 40. Therefore, the relative movement of the insulating pipe 40 (particularly, the lower end portion of the insulating pipe 40) with respect to the upper cap member 80 in the plane direction (direction orthogonal to the Z-axis direction) is restricted, and as a result, the upper cap member 80 is supported. The relative movement of the insulating tube 40 in the plane direction with respect to the support 20 is restricted.

As shown in FIGS. 2, 6 and 8, the position of the enlarged diameter portion 23 (that is, the position near the lower end) in the through hole 22 formed in the support 20 and below the upper cap member 80. At the position on the side, a cap member (hereinafter, referred to as "lower cap member 90" to distinguish it from the above-mentioned upper cap member 80) is accommodated. The lower cap member 90 is a plate-shaped member that is substantially circular in the Z-axis direction, and is composed of, for example, an insulator such as ceramics containing AlN (aluminum nitride) or _{Al2O3 (} alumina) as a main component. .. The lower cap member 90 is also called a retainer.

As shown in FIG. 8, the outer diameter of the lower cap member 90 is substantially the same as the inner diameter of the enlarged diameter portion 23 in the through hole 22 formed in the support 20. Therefore, the lower cap member 90 is in a state of being supported by the support 20 so that the relative movement in the plane direction with respect to the support 20 is restricted. The outer peripheral surface of the lower cap member 90 and the inner peripheral surface of the enlarged diameter portion 23 of the through hole 22 formed in the support 20 may be joined to each other by, for example, an inorganic adhesive. Further, in the present embodiment, the upper surface of the lower cap member 90 is in contact with the lower surface of the upper cap member 80 in the Z-axis direction, whereby the movement of the lower cap member 90 to the upper side is restricted. There is.

Further, as shown in FIG. 6, two convex portions 94 protruding in the surface direction (diameter direction) are formed on the outer peripheral surface of the lower cap member 90. The two convex portions 94 formed on the lower cap member 90 are the above-mentioned two concave portions (slits) 24 formed on the inner peripheral surface of the through hole 22 (the enlarged diameter portion 23) formed in the support 20. Is fitted with. As a result, the relative rotation (rotation around the Z axis) of the lower cap member 90 with respect to the support 20 is restricted.

Further, as shown in FIGS. 6 and 8, a plurality of (four) through holes 92 extending in the Z-axis direction are formed in the lower cap member 90. The shape of the cross section of each through hole 92 orthogonal to the Z-axis direction is non-circular. More specifically, as shown in the partially enlarged view in FIG. 6, the shape of the cross section orthogonal to the Z-axis direction of each through hole 92 is a substantially D-shaped shape (that is, a circle, the center point of the circle). The shape of the larger part when divided into two parts by a straight line that does not pass through). A part of the electrode terminal unit 70 (hereinafter referred to as “second portion P2”) is housed in the through hole 92 formed in the lower cap member 90. In the present embodiment, the second portion P2 of the electrode terminal unit 70 is the above-mentioned first portion P1 (a portion housed in the through hole 42 formed in the insulating tube 40) of the electrode terminal unit 70. It is the part adjacent to the lower side. That is, the second portion P2 of the electrode terminal unit 70 is a part of the portion of the second columnar member 72 whose diameter has been reduced. The cross-sectional shape of the second portion P2 of the electrode terminal unit 70 orthogonal to the Z-axis direction is substantially the same as the cross-sectional shape of the through hole 92 formed in the lower cap member 90. That is, the cross-sectional shape of the second portion P2 in the electrode terminal unit 70 is non-circular, and more specifically, it is substantially D-shaped. Since the lower cap member 90 and the second portion P2 of the electrode terminal unit 70 have such a configuration, the second portion P2 of the electrode terminal unit 70 is in the Z-axis direction with respect to the lower cap member 90. Relative rotation (rotation around the Z axis) is restricted around an axis parallel to.

The fact that the second portion P2 of the electrode terminal unit 70 is restricted from rotating relative to the lower cap member 90 about an axis parallel to the Z-axis direction is, for example, as follows. It can also be expressed in. That is, as shown in FIG. 6, in the heating device 100 of the present embodiment, the second portion P2 of the electrode terminal unit 70 and the lower cap member 90 have a second cross section (XY cross section) orthogonal to the Z-axis direction. When the center point of the smallest virtual circle including the outer shape of the portion P2 is set to the center point P0, the length (width) L2 of the through hole 92 at the position passing through the center point P0 is set at the position passing through the center point P0. There is a length L2 shorter than the maximum length (width) L1 of the second portion P2 of. When this condition is satisfied, it can be said that the second portion P2 is restricted from rotating relative to the lower cap member 90.

As shown in FIGS. 2 and 8, a male screw 79 is formed in a part of the electrode terminal unit 70 on the lower end side (hereinafter referred to as “third portion P3”), and the third portion P3 has a male screw 79 formed therein. The nut 68 is screwed. The upper surface of the nut 68 is in contact with the lower surface of the lower cap member 90. In this way, the electrode terminal unit 70 is fixed to the lower cap member 90 so that the movement of the electrode terminal unit 70 in the Z-axis direction with respect to the lower cap member 90 is restricted by screwing.

A-2. Manufacturing method of heating device 100:
The manufacturing method of the heating device 100 of the present embodiment is as follows, for example. First, the holding body 10 and the supporting body 20 are manufactured.

The method for producing the holding body 10 is, for example, as follows. First, an organic such as toluene is added to a mixture of 100 parts by weight of aluminum nitride powder, 1 part by weight of yttrium oxide _{( Y2O3} ) powder, 20 parts by weight of an acrylic binder, and an appropriate amount of a dispersant and a plasticizer. A solvent is added and mixed with a ball mill to prepare a slurry for a green sheet. This green sheet slurry is formed into a sheet by a casting device and then dried to prepare a plurality of green sheets.

Further, a metallized paste is prepared by adding a conductive powder such as tungsten or molybdenum to a mixture of an organic solvent such as aluminum nitride powder, an acrylic binder and terpineol and kneading the mixture. By printing this metallized paste using, for example, a screen printing device, an unsintered conductor layer that later becomes a resistance heating element 50, a power receiving electrode 54, or the like is formed on a specific green sheet. Further, by printing with the via holes provided in advance on the green sheet, an unsintered conductor portion that will later become the via conductor 52 is formed.

Next, a plurality of these green sheets (for example, 20 sheets) are thermocompression bonded, and if necessary, the outer periphery is cut to produce a green sheet laminate. This green sheet laminated body is cut by machining to produce a substantially disk-shaped molded body, the molded body is degreased, and the degreased body is further fired to produce a fired body. The surface of this fired body is polished. The holding body 10 is manufactured by the above steps.

Further, a method for manufacturing the support 20, for example, is as follows. First, an organic solvent such as methanol is added to a mixture of 100 parts by weight of aluminum nitride powder, 1 part by weight of yttrium oxide powder, 3 parts by weight of PVA binder, and an appropriate amount of a dispersant and a plasticizer, and a ball mill is used. Mix to obtain a slurry. This slurry is granulated with a spray dryer to prepare a raw material powder. Next, the raw material powder is filled in the rubber mold in which the core corresponding to the through hole 22 is arranged, and cold hydrostatic pressure pressing is performed to obtain a molded product. The obtained molded body is degreased, and the degreased body is further fired. The support 20 is manufactured by the above steps.

Next, the holding body 10 and the supporting body 20 are joined. After wrapping the back surface S2 of the holding body 10 and the upper surface S3 of the support 20 as necessary, for example, rare earths, organic solvents, etc. are applied to at least one of the back surface S2 of the holding body 10 and the upper surface S3 of the support 20. Is uniformly applied to a known bonding agent which has been mixed and made into a paste, and then degreased. Next, the back surface S2 of the holding body 10 and the upper surface S3 of the support body 20 are overlapped with each other, and normal pressure firing is performed while applying a load to join the holding body 10 and the support body 20.

After joining the holding body 10 and the supporting body 20, the insulating tube 40 is inserted into each through hole 22 of the supporting body 20. Further, the electrode terminal unit 70 (first portion P1) is inserted into the through hole 42 formed in each insulating tube 40, and then the upper cap member 80 is installed. At this time, the lower end portion of the insulating tube 40 is inserted into each through hole 82 formed in the upper cap member 80. Next, the lower cap member 90 is installed. At this time, the electrode terminal unit 70 (second portion P2) is inserted into each through hole 92 formed in the lower cap member 90. After that, the upper end portion of the electrode terminal unit 70 (specifically, the first columnar member 71) is brazed to the power receiving electrode 54 with, for example, a gold brazing material.

Then, if necessary, the upper cap member 80 and the lower cap member 90 are adhered to the support 20 with an inorganic adhesive. Finally, the nut 68 is screwed into the male screw 79 formed on the electrode terminal unit 70 (third portion P3). By the above manufacturing method, the heating device 100 having the above-described configuration is manufactured.

A-3. Effect of the first embodiment:
As described above, the heating device 100 of the present embodiment includes the holding body 10 and the supporting body 20. The holding body 10 is a plate-shaped member having a substantially planar holding surface S1 substantially orthogonal to the Z-axis direction and a back surface S2 on the opposite side of the holding surface S1. The support 20 is a tubular member that is joined to the back surface S2 of the holding body 10 and has a through hole 22 extending in the Z-axis direction. Further, a resistance heating element 50 is arranged inside the holding body 10. A plurality of power receiving electrodes 54 electrically connected to the resistance heating element 50 are arranged at positions overlapping the through holes 22 of the support 20 on the back surface S2 of the holding body 10 in the Z-axis direction. Further, the heating device 100 of the present embodiment includes a plurality of electrode terminal units 70 provided corresponding to the plurality of power receiving electrodes 54. At least a part of each electrode terminal unit 70 is arranged in the through hole 22 of the support 20. The electrode terminal unit 70 is joined to the corresponding power receiving electrode 54 via the metal brazing material 56. Further, the heating device 100 of the present embodiment includes a plurality of insulating tubes 40 provided corresponding to the plurality of electrode terminal units 70. At least a part of each insulating tube 40 is arranged in the through hole 22 of the support 20. Each insulating tube 40 is formed with a through hole 42 extending in the Z-axis direction, and the through hole 42 accommodates at least a part of the corresponding electrode terminal unit 70. Further, in the heating device 100 of the present embodiment, the end portion (upper end portion) of both ends of each insulating tube 40 in the Z-axis direction on the side close to the holding body 10 faces the holding body 10 in the surface direction. do not have. Further, in the back surface S2 of the holding body 10, in the specific region Ax sandwiched between the first region A1 in which one power receiving electrode 54 is arranged and the second region A2 in which the other power receiving electrode 54 is arranged. , At least one combination of the concave portion and the convex portion (first convex portion 13, second concave portion 12 on the first region A1 side, second convex portion 14, second concave portion on the second region A2 side). 12, the third convex portion 15) is formed.

Since the heating device 100 of the present embodiment has such a configuration, it is possible to increase the creepage distance between one power receiving electrode 54 and the other power receiving electrode 54. That is, unlike the heating device 100X of the comparative example shown in FIG. 10, the second recess 12 is not formed in the specific region Ax sandwiched between the first region A1 and the second region A2, and as a result, the second recess 12 is not formed. In the configuration in which only one second convex portion 14 is formed in the specific region Ax, the creepage distance L between one power receiving electrode 54 and the other power receiving electrode 54 is relatively short. On the other hand, as shown in FIG. 7, in the heating device 100 of the present embodiment, at least one combination of the concave portion and the convex portion in the specific region Ax (the first convex portion 13, the second on the first region A1 side). Since the concave portion 12, the second convex portion 14, the second concave portion 12 on the second region A2 side, and the third convex portion 15) are formed, one power receiving electrode 54 and the other one power receiving electrode are formed. The creepage distance L between 54 is relatively long. Therefore, according to the heating device 100 of the present embodiment, it is possible to suppress the occurrence of a short circuit between the power receiving electrodes 54 formed on the back surface S2 of the holding body 10.

In particular, in the heating device 100 of the present embodiment, in the specific region Ax on the back surface S2 of the holding body 10, the portion adjacent to the first region A1 and the portion adjacent to the second region A2 are not concave but convex. (First convex portion 13 and third convex portion 15) are formed. Therefore, according to the heating device 100 of the present embodiment, it is possible to effectively suppress the occurrence of a short circuit between the power receiving electrodes 54 formed on the back surface S2 of the holding body 10, and the power receiving electrodes 54 and the electrode terminal unit 70. It is possible to suppress the outflow of the metal brazing material 56 for joining with and to realize a strong joining.

B. Second embodiment:
FIG. 11 is an explanatory diagram schematically showing a cross-sectional configuration of the heating device 100a according to the second embodiment. FIG. 11 shows the XZ cross-sectional configuration of the heating device 100a of the second embodiment at the same position as that of FIG. 7 (position of the X1 portion in FIG. 2). Hereinafter, among the configurations of the heating device 100a of the second embodiment, the same configurations as those of the heating device 100 of the first embodiment described above will be appropriately described by adding the same reference numerals.

As shown in FIG. 11, the heating device 100a of the second embodiment mainly differs from the heating device 100 of the first embodiment in the configuration of the back surface S2 of the holding body 10. Specifically, in the heating device 100 of the first embodiment, the first recess 11 is formed in the back surface S2 of the holding body 10, but in the heating device 100a of the second embodiment, the back surface S2 of the holding body 10 is formed. The first recess 11 is not formed in. In the heating device 100a of the second embodiment, similarly to the heating device 100 of the first embodiment, a plurality of (four) second recesses 12 are formed on the back surface S2 of the holding body 10, and each of them is formed. The second recess 12 is a substantially annular groove (slit) that surrounds the power receiving electrode 54 formed on the back surface S2 of the holding body 10. Therefore, in the heating device 100a of the second embodiment, similarly to the heating device 100 of the first embodiment, a region (first region A1) in which one power receiving electrode 54 on the back surface S2 of the holding body 10 is arranged is used. At least one combination of the concave portion and the convex portion is formed in the region (specific region Ax) sandwiched between the region (second region A2) in which the other power receiving electrode 54 is arranged. Specifically, for example, in the specific region Ax sandwiched between the first region A1 and the second region A2, the second recess 12 on the first region A1 side and the first region A1 side A second convex portion 14 formed between the second concave portion 12 and the second concave portion 12 on the second region A2 side and a second concave portion 12 on the second region A2 side are formed. ing.

As described above, in the heating device 100a of the second embodiment, similarly to the heating device 100 of the first embodiment, the first region A1 and the like on the back surface S2 of the holding body 10 where one power receiving electrode 54 is arranged and the like. At least one combination of a concave portion and a convex portion in a specific region Ax sandwiched between a second region A2 in which one power receiving electrode 54 is arranged (second concave portion 12 on the first region A1 side, first The convex portion 14 of 2 and the second concave portion 12) on the second region A2 side are formed. Therefore, according to the heating device 100a of the second embodiment, the creepage distance L between one power receiving electrode 54 and the other power receiving electrode 54 is relatively long, as in the heating device 100 of the first embodiment. It is possible to suppress the occurrence of a short circuit between the power receiving electrodes 54 formed on the back surface S2 of the holding body 10.

C. Modification example:
The technique disclosed in the present specification is not limited to the above-described embodiment, and can be transformed into various forms without departing from the gist thereof, and for example, the following modifications are also possible.

The configuration of the heating device 100 in the above embodiment is merely an example and can be variously modified. For example, in the above embodiment, the electrode terminal unit 70 is composed of three members, a first columnar member 71, a second columnar member 72, and a metal stranded wire 73, but the electrode terminal unit 70 is 1. It may be composed of one or two members, or may be composed of four or more members.

Further, in the above embodiment, the lower end portion of the electrode terminal unit 70 projects outward from the through hole 22 of the support 20 and the through hole 42 of the insulating tube 40, but the entire electrode terminal unit 70 is the entire support 20. It may be accommodated in the through hole 22 of the above and the through hole 42 of the insulating tube 40.

Further, the shape of the cross section (XY cross section) orthogonal to the Z-axis direction of the through hole 92 formed in the lower cap member 90 in the above embodiment and the inside of the through hole 92 of the lower cap member 90 in the electrode terminal unit 70. The shape of the cross section (XY cross section) orthogonal to the Z-axis direction of the second portion P2, which is the housed portion, is merely an example and can be arbitrarily deformed. Further, the shape of the XY cross section of the through hole 92 of the lower cap member 90 and the shape of the XY cross section of the second portion P2 of the electrode terminal unit 70 do not necessarily have to be substantially the same.

Further, in the above embodiment, the upper cap member 80 and the lower cap member 90 are housed in the through hole 22 of the support 20, but at least one of the upper cap member 80 and the lower cap member 90 is. It may be arranged outside the through hole 22 instead of inside the through hole 22 of the support 20. Even with such a configuration, the upper cap member 80 and / or the lower cap member 90 can be attached to another part of the support 20 (for example, the lower surface S4 of the support 20) by using an adhesive, a joining member, or the like. It is possible to fix it to.

Further, in the above embodiment, the convex portion 84 is formed on the outer peripheral surface of the upper cap member 80, and the convex portion 84 is fitted with the concave portion 24 formed on the inner peripheral surface of the through hole 22 of the support 20. However, on the contrary, even if a concave portion is formed on the outer peripheral surface of the upper cap member 80 and the concave portion fits with the convex portion formed on the inner peripheral surface of the through hole 22 of the support 20. good. Similarly, in the above embodiment, the convex portion 94 is formed on the outer peripheral surface of the lower cap member 90, and the convex portion 94 is the concave portion 24 formed on the inner peripheral surface of the through hole 22 of the support 20. Although it is fitted, on the contrary, a concave portion is formed on the outer peripheral surface of the lower cap member 90, and the concave portion is fitted with a convex portion formed on the inner peripheral surface of the through hole 22 of the support 20. You may do so. The number of convex portions or concave portions formed on each member can be arbitrarily changed. Further, it is not always necessary that each member has these protrusions or recesses.

Further, in the above embodiment, the heating device 100 includes the upper cap member 80 and the lower cap member 90, but the heating device 100 includes at least one of the upper cap member 80 and the lower cap member 90. It may not be. Further, in the above embodiment, the electrode terminal unit 70 is fixed to the lower cap member 90 so as to be restricted from moving in the Z-axis direction with respect to the lower cap member 90 by screwing, but the electrode terminal unit 70 is fixed. Is not limited to screwing, and may be fixed by other means (for example, means using a fixing member). Further, the electrode terminal unit 70 does not necessarily have to be fixed to the lower cap member 90.

Further, the shape and the number of each member constituting the heating device 100 of the above embodiment are merely examples and can be variously deformed. For example, in the above embodiment, the heating device 100 is provided with four combinations of the electrode terminal unit 70 and the power receiving electrode 54 bonded to the electrode terminal unit 70, and the combination is provided in the heating device 100. The number can be set arbitrarily. In the above embodiment, all of the combinations have the same configuration, but if at least one of the combinations has the configuration of the above embodiment, the remaining combinations have other configurations. May be good.

Further, the heating device 100 of the above embodiment may further include a temperature measuring body such as a thermocouple or a platinum resistor, and other constituent members such as a high frequency electrode.

Further, the forming material of each member constituting the heating device 100 in the above embodiment is merely an example, and each member may be formed of another material. For example, in the above embodiment, the holding body 10 and the support 20 may be made of ceramics containing aluminum nitride or alumina as a main component, may be made of other ceramics, or may be an insulating material other than ceramics. It may be made of.

Further, the method for manufacturing the heating device 100 in the above embodiment is merely an example, and various modifications can be made.

10: Holding body 11: First concave portion 12: Second concave portion 13: First convex portion 14: Second convex portion 15: Third convex portion 20: Support 22: Through hole 23: Enlarged portion 24: Recess 30: Joint 40: Insulation tube 42: Through hole 50: Resistance heating element 52: Via conductor 54: Power receiving electrode 56: Metal brazing material 68: Nut 70: Electrode terminal unit 71: First columnar member 72: Second columnar member 73: Metal stranded wire 79: Male screw 80: Upper cap member 82: Through hole 84: Convex part 90: Lower cap member 92: Through hole 94: Convex part 100: Heating device A1: First Area A2: Second area Ax: Specific area L: Creeping distance P1: First part P2: Second part P3: Third part S1: Holding surface S2: Back surface S3: Top surface S4: Bottom surface

Claims (1)

A plate-shaped retainer composed of an insulator and having a substantially planar first surface substantially orthogonal to the first direction and a second surface opposite to the first surface.
A tubular support composed of an insulator, joined to the second surface of the retainer, and formed with a first through hole extending in the first direction.
A resistance heating element arranged inside the holder and
In the first directional view, a plurality of power receiving electrodes arranged at positions overlapping the first through hole of the support on the second surface of the holder and electrically connected to the resistance heating element. When,
A plurality of electrode terminals provided corresponding to the plurality of power receiving electrodes, each of which has at least a part thereof arranged in the first through hole of the support and is supported via a metal brazing material. With a plurality of electrode terminals bonded to the power receiving electrode
Each is a plurality of insulating tubes having at least a part thereof arranged in the first through hole of the support and provided corresponding to the plurality of electrode terminals, extending in the first direction and corresponding to the plurality of insulating tubes. A plurality of insulating tubes having a second through hole for accommodating at least a part of the electrode terminal to be formed.
In a heating device for heating an object held on the first surface of the holder.
The end of each end of the insulating tube in the first direction closer to the holder does not face the holder in the second direction orthogonal to the first direction. ,
Recessed and convex in a specific region on the second surface of the retainer sandwiched between a first region in which one of the power receiving electrodes is arranged and a second region in which the other power receiving electrode is arranged. At least one combination with the part is formed ,
The convex portion is formed in a portion of the specific region on the second surface of the retainer adjacent to the first region and a portion adjacent to the second region.
A heating device characterized by that.

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