JP6959677B2 - Drying device - Google Patents

Description

The present invention relates to a drying device used as a work in a heating / drying step of, for example, a plate-shaped precision part, a protective layer coated on an electronic precision part such as a substrate, and the like.

The applicant has already proposed a drying device that transfers a work as a work without providing a chain or a conveyor belt that causes dust generation or heat deterioration in the work drying chamber in the manufacturing process of electronic precision parts such as substrates. This drying device is inserted into the room from a work drying chamber that dries while transferring the work housed in the closed chamber and a partition plate that closes the work drying chamber, and the partition plate is inserted while supporting the work. A hanging rod that reciprocates along the guide hole formed in the above, a slide plate that is provided so as to overlap the guide hole and that the hanging rod penetrates and slides together with the hanging rod, and a slide plate of the slide plate. Driven plates are provided on both sides so as to cover the opening of the guide hole that opens with the sliding operation of the slide plate (see Patent Document 1). This prevents hot air from being released from the guide holes provided in the partition plate of the drying chamber, improves thermal efficiency, and prevents heat damage to the drive mechanism.

In addition, we have proposed a work heating / cooling device that reduces the size of the work by stacking the work on the flat plate in the drying chamber and prevents the work from being soiled during storage or transportation. The work is kept warm in a uniform heat state while the work is laminated in a parallel state at a predetermined interval with the plate surfaces facing each other and circulated in the heat insulating greenhouse (see Patent Document 2). As a result, instead of adopting a mechanism such as providing a chain or belt in the heat insulation to transport the work, the lifting mechanism by the motor and ball screw (or cylinder and piston) is used as the power source, and those lifting mechanisms are used in the heat insulation. The work can be raised and lowered by installing it outside the room below.

Japanese Unexamined Patent Publication No. 2009-1982 Japanese Unexamined Patent Publication No. 2009-121732

However, as the size of the work increases, the amount of movement of the transfer mechanism increases when the work loaded and housed in the drying chamber is circulated and transferred in the drying chamber. In this case, the elongated guide hole in which the hanging rod connecting the moving mechanism provided outside the drying chamber and the work holding portion provided in the drying chamber moves can be closed only by the driven plate shown in Patent Document 1. It disappears.

Further, in the heat insulation of Patent Document 2, the work is held from the uppermost layer of the first work loading part to be loaded while raising the work, and the work is transferred to the uppermost layer of the second work loading part to load the work. The work is circulated by taking it out while descending. At this time, since the slide shaft moves through both side surfaces of the heat insulation, a slit-shaped through hole is formed, and the hot air of the heat insulation leaks to the outside and is easily cooled.
In addition, since the transfer mechanism is arranged through the upper space in the heat insulating room and the heat insulating room is used as a moving space, the indoor space of the heat insulating room cannot be effectively used and the thermal efficiency tends to decrease.
In particular, when the work is dried, the solvent or the like is vaporized, and when the temperature in the drying chamber is lowered, the work may be liquefied and adhere to the transfer mechanism to cause stains on the work.
Further, there is also a need to efficiently carry out the operation of continuously carrying the work before drying into the drying chamber and taking out the work after drying from the drying chamber to improve the work efficiency.

The present invention has been made to solve these problems, and an object of the present invention is to effectively utilize the indoor space of the drying chamber and to allow hot air to leak from the guide hole of the transfer mechanism for transferring the work. It is an object of the present invention to provide a drying device having improved work efficiency as well as improving thermal efficiency by preventing the above.

The present invention has the following configurations in order to achieve the above object.
A drying device in which both sides of the work are sequentially dried with a predetermined temperature profile while the thin plate-shaped work is transferred in the drying chamber in a non-contact manner while being held by the carrier, and the carrier on which the work is placed is dried. A plurality of elevating mechanisms for elevating and lowering in the room, and a work transfer mechanism in which a work holding portion for holding and transferring the work between the elevating mechanisms is suspended and supported by a hanging rod on the top plate portion of the drying chamber. The top plate portion is provided with a guide hole in a range where the hanging rod reciprocates, and an endless heat-resistant shielding belt is arranged so as to be movable along the inner surface and the outer surface in the longitudinal direction of the top plate portion. The hanging rod is inserted into the facing side portion of the heat-resistant shielding belt, and belt holes having different lengths are formed, and the inner peripheral surface of the heat-resistant shielding belt can be moved together with the hanging rod. The movable shielding plates are slidably stacked, and when the work transfer mechanism is operated to move the hanging rod from one end side to the other end side of the guide hole, the movable shielding plate is moved to the heat-resistant shielding belt. When the hanging rod abuts on the end of the belt hole, the heat-resistant shielding belt is driven to rotate for a predetermined length to form the movable shielding plate. It is characterized in that it continuously covers the remainder of the guide hole.

According to the above configuration, when the work transfer mechanism is operated and the hanging rod moves along the guide hole, the movable shielding plate slides on the inner peripheral surface of the heat-resistant shielding belt for a predetermined length to close a part of the guide hole. When the hanging rod hits the end of the belt hole, the heat-resistant shielding belt is driven and rotated for a predetermined length to continuously cover the remainder of the guide hole on the movable shielding plate. By combining the movable shielding plate and the heat-resistant shielding belt according to the length of the guide hole on the top plate in this way, even if the amount of movement of the hanging rod increases, hot air will be released from the guide hole to the outside of the drying room. It is possible to prevent leakage and improve thermal efficiency.
In addition, the top plate of the drying chamber is provided with a guide hole in the range where the hanging rod reciprocates, and an endless heat-resistant shielding belt is movably arranged along the inner and outer surfaces of the top plate. Therefore, the work can be accommodated up to the vicinity of the top plate portion, and the indoor space of the drying chamber can be widely and effectively used.

A first belt hole having a length equal to or longer than the guide hole is formed on the upper side of the top plate facing the heat-resistant shielding belt, and a second belt hole having a length shorter than the guide hole is formed on the lower side of the top plate. The movable shielding plate may be arranged on the inner peripheral surface of the heat-resistant shielding belt so as to overlap the second belt hole.
In this case, the first belt hole of the heat-resistant shielding belt does not interfere with the movement of the hanging rod, and the second belt hole pulls out the heat-resistant shielding belt to a position continuous with the movable shielding plate according to the movement of the moving rod. Can be done. Therefore, the guide hole can be closed with a simple configuration.

Specifically, when the hanging rod of the work transfer mechanism is locked to the end of the second belt hole, a flat plate-shaped shielding belt between the first belt hole and the second belt hole becomes the movable shielding plate. It may be pulled out to a continuous position to cover the remainder of the guide hole.
Thereby, the lengths of the movable shielding plate and the heat-resistant shielding belt can be combined and shielded according to the length of the guide hole.

The length of the guide hole is L1, the length of the flat plate-shaped belt between the ends of the belt holes provided on the opposite sides of the heat-resistant shielding belt is L2, and the end of the shielding plate from the through hole of the hanging rod of the movable shielding plate. Assuming that the length to the portion is L3, it is preferably formed so that L1 ≦ L2 + L3.
As a result, the guide hole length L1 provided in the top plate portion can be reliably covered by the flat plate-shaped heat-resistant shielding belt length L2 and the movable shielding plate length L3.

The elevating mechanism includes a first elevating mechanism in which a carrier on which the work is placed is laminated while being raised from the bottom of the drying chamber toward a top plate, and the work transfer mechanism causes the uppermost work to elevate the first. It may be provided with at least a pair of second elevating mechanisms that are sequentially transferred from the mechanism and laminated while being lowered.
As a result, the carrier on which the work is placed in the drying chamber is laminated and accommodated in the first elevating mechanism, and the uppermost work is transferred to the second elevating mechanism by the work transfer mechanism and laminated while being lowered to stack the work in the drying chamber. Can be efficiently circulated and dried.

The carrier on which the work is placed is lifted and lowered at the first position below the first lifting mechanism and delivered to the bottom layer of the first lifting mechanism, and at the second position below the second lifting mechanism, the rearmost of the second lifting mechanism. A carrier elevating mechanism that repeats the operation of receiving, lowering, and taking out the carrier on which the dried work is placed from the lower layer may be provided so as to be movable between the first position and the second position.
As a result, the work efficiency can be improved by repeatedly performing the operation of delivering the work before drying to the first elevating mechanism by the carrier elevating mechanism and receiving the work after drying from the second elevating mechanism.

At the first carrier elevating mechanism that raises and lowers the carrier on which the work is placed at the first position below the first elevating mechanism and delivers it to the bottom layer of the first elevating mechanism, and at the second position below the second elevating mechanism. It may be provided with a second carrier elevating mechanism for elevating and lowering the carrier on which the dried work is placed, and a carrier returning mechanism for returning the carrier from the second position to the first position and reusing it.
As a result, the work before drying is held by the first elevating mechanism while being placed on the carrier by the first carrier elevating mechanism, and the work after drying is taken out while being placed on the carrier by the second carrier elevating mechanism, and is emptied by the carrier return mechanism. By repeating the operation of returning the carrier from the second position to the first position and reusing the carrier, the tact time can be shortened and the work efficiency can be improved.

By using the above-mentioned drying device, it is possible to effectively utilize the indoor space of the drying chamber and prevent hot air from leaking from the guide hole of the transfer mechanism for transferring the work, thereby improving the thermal efficiency and the work efficiency. Can be done.

It is a top view and a front view which see through the internal structure of a drying apparatus. It is a side view which saw through the internal structure of the drying apparatus of FIG. It is a top view, a front view and a side view of a carrier. It is explanatory drawing which shows the structure of the work transfer mechanism provided in the top plate part of a drying apparatus. It is the upper view of the left side of the carrier take-out part of FIG. It is operation explanatory drawing of the heat insulation shielding belt of FIG. It is explanatory drawing of the elevating mechanism provided in the drying chamber part of FIG. It is explanatory drawing of the elevating mechanism provided in the inside of a drying chamber which concerns on another example.

Hereinafter, embodiments of the drying apparatus according to the present invention will be described with reference to the accompanying drawings. In the present embodiment, a drying device used in the manufacturing process of a thin plate-shaped precision part as a work will be illustrated and described.

The schematic configuration of the drying apparatus will be described with reference to FIGS. 1 and 2.
In the drying apparatus 1, both sides of the work are sequentially dried according to a predetermined temperature profile while the thin plate-shaped work W is transferred in the drying chamber (heating furnace) 2 in a non-contact manner while being held by the carrier K. In FIG. 1B, the work W coated on both sides and set at the work supply position P is supplied to the elevating mechanism in the drying chamber 2 by the pusher 3.
In the drying chamber 2, the carrier K on which the work W is placed is laminated while being raised from the bottom of the drying chamber 2 toward the top plate portion 4, and the work W on the uppermost side is provided by the work transfer mechanism 6. It is provided with at least a pair of second elevating mechanisms 7 that are sequentially transferred from the first elevating mechanism 5 and stacked while being lowered. The work W set at the work supply position P is supplied by the pusher 3 onto the carrier K of the carrier elevating mechanism 11 that stands by below the first elevating mechanism 5.

A carrier elevating mechanism 11 is movably provided below the first elevating mechanism 5 and the second elevating mechanism 7. The carrier elevating mechanism 11 is supported by a slider and is provided so as to be movable between a first position below the first elevating mechanism 5 and a second position below the second elevating mechanism 7. The carrier elevating mechanism 11 elevates and elevates the lifter 11b that supports the carrier K by the electric actuator 11a. The carrier elevating mechanism 11 elevates and elevates the carrier K on which the work W is placed at the first position below the first elevating mechanism 5 and delivers it to the lowermost layer of the first elevating mechanism 5. Further, the operation of receiving the carrier K on which the dried work W is placed from the lowermost layer of the second elevating mechanism 7 at the second position below the second elevating mechanism 7 and descending to take out the work W is repeated. As a result, the work efficiency can be improved by repeatedly performing the operation of passing the work W before drying to the first elevating mechanism 5 by the carrier elevating mechanism 11 and receiving the work W after drying from the second elevating mechanism 7.

As shown in FIGS. 1B and 2, the top plate portion 4 of the drying chamber 2 is provided with a work transfer mechanism 6 for transferring the work W from the first elevating mechanism 5 to the second elevating mechanism 7. In the work transfer mechanism 6, the work holding portion 6a that holds and transfers the carrier K on which the work W is placed is suspended and supported by the hanging rod 6b. As shown in FIG. 2, a heater 2a for heating the room temperature at 150 ° C. or lower, a blower 2b for circulating hot air, and the like are provided on the back side of the drying chamber 2.

In FIG. 4, the work transfer mechanism 6 is provided with a drive mechanism 6c of the work holding portion 6a on the upper surface (outer surface) of the top plate portion 4. As the drive mechanism 6c, an electric actuator or the like in which the ball screw is rotationally driven in the forward and reverse directions by a servomotor and the slider 6d is reciprocated via a nut fitted to the ball screw is preferably used. The elevating cylinder 6f is supported by the support member 6e fixed to the slider 6d. Guide rods 6e1 are provided on both sides of the support member 6e in the longitudinal direction. The tip of the cylinder rod 6g of the elevating cylinder 6f is connected to the horizontal support plate 6h. The other end of the guide rod 6e1 is fixed to the horizontal support plate 6h and guides the ascending / descending operation of the horizontal support plate 6h. The upper end side of the pair of hanging rods 6b is connected to the horizontal support plate 6h on the outside of the top plate portion 4. The pair of hanging rods 6b are inserted into the drying chamber 2 through the guide holes 4a (through holes) formed in the longitudinal direction of the top plate portion 4. A first horizontal arm 6i is connected to the lower ends of the pair of hanging rods 6b. A pair of second horizontal arms 6j are assembled so as to be orthogonal to the first horizontal arm 6i, and a total of four holding rods 6k are suspended and supported at both ends of each second horizontal arm 6j. A holding claw 6k1 is provided at the lower end of each holding rod 6k. The work holding portion 6a is composed of the first and second horizontal arms 6i and 6j and the holding rod 6k.
The work transfer mechanism 6 moves the work holding portion 6a up and down by the elevating cylinder 6f, slides the slider 6d by the driving mechanism 6c to move the work holding portion 6a in the upper space of the drying chamber 2, and the work W as described later. The carrier K on which the above is placed is transferred from the first elevating mechanism 5 side to the second elevating mechanism 7 side.

As shown in FIG. 3A, locking holes K1 for locking the holding claws 6k1 are formed at a total of four locations on both side surfaces in the longitudinal direction of the rectangular carrier K on which the work W is placed. The holding claw 6k1 of the holding rod 6k is locked in the locking hole K1 to hold the work W together with the carrier K and transfer the work W from the first lifting mechanism 5 to the second lifting mechanism 7. As shown in FIG. 3B, spacers K2 are provided at the four corners of the rectangular carrier K.
A pin K3 is projected from the upper portion of each spacer K2, and a pin hole K4 that fits with the pin K3 is provided at the lower portion. As shown in FIG. 3C, the carriers K are connected to each other by connecting the spacers K2 at the four corners so that the pins K3 and the pin holes K4 are fitted so that the workpieces W are supported in a non-contact manner.

The seal structure of the top plate portion 4 accompanying the movement of the work transfer mechanism 6 will be described with reference to FIGS. 4 to 6. As shown in FIG. 4, the top plate portion 4 is provided with a guide hole 4a in a range in which the hanging rod 6b reciprocates. If no treatment is taken for the guide hole 4a, the hot air in the drying chamber 2 may escape and the room temperature may drop. Therefore, the following seal structure is provided.
A pair of transport rollers 4b are rotatably provided at both ends of the top plate portion 4 in the longitudinal direction. An endless heat-resistant shielding belt 8 is erected on the pair of transport rollers 4b so as to be movable along the inner surface and the outer surface in the longitudinal direction of the top plate portion 4. The heat-resistant shielding belt 8 is provided at a position where it overlaps with the guide hole 4a provided in the top plate portion 4 on the inner surface and the outer surface. Various materials such as a metal belt and a resin belt are used for the heat-resistant shielding belt 8, but in this embodiment, a monomer cast nylon resin (registered trademark: MC nylon) is used because of its heat resistance and ease of processing. The transport roller 4b may be a roller for a flat belt, a toothed pulley, a sprocket wheel, or the like.

As shown in FIGS. 5A and 5B, a pair of hanging rods 6b are inserted into the facing sides of the heat-resistant shielding belt 8, and first belt holes 8a and second belt holes 8b having different lengths are formed, respectively. .. Specifically, a first belt hole 8a having a length Lα (see FIG. 5A) having a guide hole 4a or more (L1 or more) is formed in the facing top plate upper side portion 4c of the heat-resistant shielding belt 8. Further, a second belt hole 8b having a length Lβ (see FIG. 5B) shorter than the guide hole 4a is formed in the lower side portion 4d of the top plate.
Further, on the inner peripheral surface of the heat-resistant shielding belt 8 facing the lower side portion 4d of the top plate, a movable shielding plate 10 which is a long flat plate is provided so as to overlap with the second belt hole 8b. A pair of hanging rods 6b penetrate the movable shielding plate 10 at the center, and when the hanging rods 6b move, the movable shielding plate 10 slides while being overlapped with the heat-resistant shielding belt 8. The movable shielding plate 10 is preferably provided so as to be slidable along a concave groove provided in the longitudinal direction on the inner peripheral surface of the heat-resistant shielding belt 8.

As shown in FIG. 5B, the length of the guide hole 4a is L1, the length of the flat plate-shaped belt between the ends of the belt holes on the opposite sides of the heat-resistant shielding belt 8 is L2, and the through hole of the hanging rod 6b of the movable shielding plate 10 Assuming that the length from the to the end of the movable shielding plate 10 is L3, it is formed so that L1 ≦ L2 + L3. As shown in FIG. 6A, when the work transfer mechanism 6 is operated and the hanging rod 6b moves from the left end to the right end of the guide hole 4a, the movable shielding plate 10 moves along the inner peripheral surface of the heat-resistant shielding belt 8. When the hanging rod 6b abuts on the right end of the second belt hole 8b by sliding on the second belt hole 8b by a predetermined length (Lβ), the movable shielding plate 10 covers a part of the guide hole 4a. As shown in FIG. 6B, when the hanging rod 6b further moves to the right end of the guide hole 4a, the heat-resistant shielding belt 8 rotates counterclockwise by a predetermined length L4 and the movable shielding plate 10 (left half: length). Continuing from L3), the flat plate portion (the portion corresponding to the length L2) of the heat-resistant shielding belt 8 is pulled out directly below the guide hole 4a to cover the remainder of the movable shielding plate 10 that covers the guide hole 4a. As a result, the first belt hole 8a of the heat-resistant shielding belt 8 does not interfere with the movement of the hanging rod 6b, and the second belt hole 8b is in a position continuous with the movable shielding plate 10 in accordance with the movement of the hanging rod 6b. The heat-resistant shielding belt 8 can be pulled out.

By combining and shielding the movable shielding plate 10 and the heat-resistant shielding belt 8 according to the length of the guide hole 4a in this way, even if the amount of movement of the hanging rod 6b increases, the guide hole 4a can be simply configured. It is possible to prevent the hot air in the drying chamber 2 from leaking to the outside, and to improve the thermal efficiency.
Further, the top plate portion 4 of the drying chamber 2 is provided with a guide hole 4a in a range where the hanging rod 6b reciprocates, and the endless heat-resistant shielding belt 8 moves along the inner and outer surfaces of the top plate portion 4. Since the work W is arranged so as to be possible, the work W can be accommodated up to the vicinity of the top plate portion, and the indoor space of the drying chamber 2 can be widely and effectively used.

Here, the operation of transporting the work W to the drying chamber 2 will be described. In the previous step, the work W is coated on both sides with a protective layer such as a resist by printing or coating. As shown in FIG. 1C, the work W set at the work supply position P is supplied by the pusher 3 onto the carrier K supported by the carrier elevating mechanism 11 that stands by below the first elevating mechanism 5.

As shown in FIG. 7, the work W is carried into the carrier K at the lowermost part, but may be a mechanism for carrying the work W into a carrier K other than the lowermost part. At this time, the carrier K located one above the lowermost carrier K is supported by the hook-shaped first holding claw 5a, whereby the carrier laminate laminated above is supported. .. The first holding claws 5a are arranged on both sides of the carrier K, are supported so as to be movable in the height direction, and are opened and closed at an arbitrary height position. The first holding claws 5a may be provided at a plurality of locations in the height direction.

Next, the electric actuator 11a of the carrier elevating mechanism 11 is operated to raise the lifter 11b, and the carrier K on which the work W is placed is pushed up in place of the lowermost carrier K supported by the carrier support portion 5b. When the lowermost carrier K is in close contact with the carrier K located one above the carrier K, the hook-shaped first holding claw 5a hooked on the lower part of the carrier K is rotated in a direction away from the carrier K to rotate the carrier. Release the support of the laminate. When the height of one carrier K and the carrier K are raised by the first elevating mechanism 5, the first holding claw 5a is rotated in a direction closer to the lowermost carrier K, so that the carriers K are stacked upward again. The carrier laminate is supported. By repeating the above operation, the carrier K on which the work W is placed is sequentially supported by the first elevating mechanism 5. The carrier elevating mechanism 11 lowers by operating the electric actuator 11a, and a slider (not shown) operates to move from the first position to the second position below the second elevating mechanism 7. The carrier elevating mechanism 11 operates the electric actuator 11a again to move the lifter 11b to the ascending position and stands by.

As described above, the uppermost carrier K laminated and supported by the first elevating mechanism 5 is held by the work holding portion 6a of the work transfer mechanism 6, and the second holding claw provided on the adjacent second elevating mechanism 7 is provided. Delivered to 7a. The second holding claws 7a are arranged on both sides of the carrier K, are supported so as to be movable in the height direction, and are opened and closed at an arbitrary height position. A plurality of second holding claws 7a may be provided in the height direction.

By repeating the carrier transfer operation by the work transfer mechanism 6, the carrier laminate is laminated and supported on the second elevating mechanism 7 side. When the carriers K supporting a predetermined number of works W are laminated and supported on the second elevating mechanism 7, the lifter 11b of the carrier elevating mechanism 11 rises and comes into close contact with the lowermost carrier K supported by the carrier supporting portion 7b. And push it up. When the lifter 11b is in close contact with the lowermost carrier K, the hook-shaped second holding claw 7a hooked on the lower part of the carrier K is rotated in a direction away from the carrier K to temporarily release the support of the carrier laminate. .. By rotating the second holding claw 7a in the direction of approaching the carrier K one level above the lowermost portion, the carrier laminate laminated above it is supported again. The lowermost carrier K is delivered to the lifter 11b with the work W mounted on it. The lowermost carrier K delivered to the lifter 11b is lowered to a predetermined position, and only the work W is taken out from the drying chamber 2 by a taking-out mechanism (not shown). The carrier elevating mechanism 11 moves from the second position below the second elevating mechanism 7 to the first position below the first elevating mechanism 5 while supporting the carrier K, and repeats the same operation. In FIG. 1A, the flow of the work W in the drying chamber 2 is indicated by a straight arrow, and is indicated by an arrow that goes around the flow of the carrier K.

By repeating the above operation, the transport operation of the carrier K on which the work W is placed in the drying chamber 2 is repeated. The ascending operation of the carrier K on the first elevating mechanism 5 side and the descending operation of the carrier K on the second elevating mechanism 7 side may be performed in parallel or continuously.

FIG. 8 shows a configuration example of an elevating mechanism provided inside the drying chamber 2 according to another example. In FIG. 7, the carrier elevating mechanism 11 is provided so as to be movable below the first elevating mechanism 5 and the second elevating mechanism 7, but it may be provided below the first elevating mechanism 5 and the second elevating mechanism 7, respectively. good.
That is, the first carrier elevating mechanism 12 and the second elevating mechanism that elevate and lower the carrier K on which the work W is placed at the first position below the first elevating mechanism 5 and deliver it to the lowermost layer of the first elevating mechanism 5. A second carrier elevating mechanism 13 that elevates and lowers the carrier K on which the dried work W is placed at the second position below 7, and a carrier return mechanism 14 that returns the carrier K from the second position to the first position and reuses it. It has. The first carrier elevating mechanism 12 is adapted to elevate and elevate the lifter 12b that supports the carrier K by the electric actuator 12a. Further, the second carrier elevating mechanism 13 is adapted to elevate and elevate the lifter 13b that supports the carrier K by the electric actuator 13a. The carrier return mechanism 14 reciprocates between the first position and the second position by, for example, a single-axis electric slider. The carrier return mechanism 14 is adapted to orbit the empty carrier K received from the lifter 13b at the second position to the first position on the lifter 12b by a uniaxial electric slider.

As a result, the work W before drying is held by the first elevating mechanism 5 at the first position while being placed on the carrier K by the first carrier elevating mechanism 12, and the work W after drying is placed by the second carrier elevating mechanism 13. The carrier K is taken out at the second position while being left in place, and the operation of returning the empty carrier K from the second position to the first position by the carrier return mechanism 14 and reusing it is repeated. As a result, the tact time can be shortened and the work efficiency can be improved.

Further, in the above-described embodiment, a pair of a first elevating mechanism 5 on the work raising side and a second elevating mechanism 7 on the work lowering side are provided in the drying chamber 2, but the present invention is not limited to this, and for example, the first elevating mechanism is provided. After the carrier laminate is formed by the mechanism 5, the carrier laminate is moved in a plane in the drying chamber and stored in a plurality of planes, and then transferred from the first elevating mechanism 5 to the second elevating mechanism 7 by the work transfer mechanism 6 to move the work W into the drying chamber. You may take out from 2.

W Work K Carrier K1 Locking Hole K2 Spacer K3 Pin K4 Pin Hole P Work Supply Position 1 Drying Device 2 Drying Room 2a Heater 2b Blower 3 Pusher 4 Top Plate 4a Guide Hole 4b Transport Roller 4c Top Plate Top 4d Top Plate Bottom Part 5 First lifting mechanism 5a First holding claw 5b, 7b Carrier support part 6 Work transfer mechanism 6a Work holding part 6b Suspension rod 6c Drive mechanism 6d Slider 6e Support member 6f Lifting cylinder 6g Cylinder rod 6h Horizontal support plate 6i First Horizontal arm 6j 2nd horizontal arm 6k Holding rod 6k1 Holding claw 7 2nd lifting mechanism 7a 2nd holding claw 8 Heat resistant shielding belt 8a 1st belt hole 8b 2nd belt hole 10 Movable shielding plate 11 Carrier lifting mechanism 11a, 12a, 13a Electric actuator 11b, 12b, 13b Lifter 12 1st carrier elevating mechanism 13 2nd carrier elevating mechanism 14 Carrier return mechanism

Claims (7)

A drying device in which both sides of the work are sequentially dried with a predetermined temperature profile while the thin plate-shaped work is transferred in the drying chamber in a non-contact manner while being held by the carrier.
A plurality of elevating mechanisms for elevating and lowering the carrier on which the work is placed in the drying chamber, and
The top plate portion of the drying chamber is provided with a work transfer mechanism in which a work holding portion for holding and transferring the work between the elevating mechanisms is suspended and supported by a hanging rod.
The top plate portion is provided with a guide hole in a range where the hanging rod reciprocates, and an endless heat-resistant shielding belt is arranged so as to be movable along the inner surface and the outer surface in the longitudinal direction of the top plate portion. The hanging rod is inserted into the opposite side of the heat-resistant shielding belt, and belt holes having different lengths are formed, and the inner peripheral surface of the heat-resistant shielding belt is a movable shield that can move together with the hanging rod. The boards are slidably stacked and provided,
When the work transfer mechanism is operated and the hanging rod moves from one end side to the other end side of the guide hole, the movable shielding plate slides on the inner peripheral surface of the heat-resistant shielding belt for a predetermined length of time to form the guide hole. A part of the belt is closed, and when the hanging rod abuts on the end of the belt hole, the heat-resistant shielding belt is driven and rotated for a predetermined length to continuously cover the remainder of the guide hole on the movable shielding plate. Drying device. A first belt hole having a length equal to or longer than the guide hole is formed on the upper side of the top plate facing the heat-resistant shielding belt, and a second belt hole having a length shorter than the guide hole is formed on the lower side of the top plate. The drying apparatus according to claim 1 or 2, wherein the movable shielding plate is arranged on the inner peripheral surface of the heat-resistant shielding belt so as to overlap the second belt hole. When the hanging rod of the work transfer mechanism is locked to the end of the second belt hole, the flat shielding belt between the first belt hole and the second belt hole reaches a position continuous with the movable shielding plate. The drying apparatus according to claim 2, wherein the drying device is pulled out to cover the remainder of the guide hole. The length of the guide hole is L1, the length of the flat plate-shaped belt between the ends of the belt holes provided on the opposite sides of the heat-resistant shielding belt is L2, and the end of the shielding plate from the through hole of the hanging rod of the movable shielding plate. The drying apparatus according to any one of claims 1 to 3, which is formed so that L1 ≦ L2 + L3 when the length to the portion is L3. The elevating mechanism includes a first elevating mechanism in which a carrier on which the work is placed is laminated while being raised from the bottom of the drying chamber toward a top plate, and the work transfer mechanism causes the uppermost work to elevate the first. The drying apparatus according to any one of claims 1 to 4, further comprising at least a pair of second elevating mechanisms that are sequentially transferred from the mechanism and laminated while being lowered. The carrier on which the work is placed is lifted and lowered at the first position below the first lifting mechanism and delivered to the bottom layer of the first lifting mechanism, and at the second position below the second lifting mechanism, the rearmost of the second lifting mechanism. Any of claims 1 to 5, wherein a carrier elevating mechanism that repeats the operation of receiving the carrier on which the dried work is placed from the lower layer, lowering and taking out the work is provided so as to be movable between the first position and the second position. The drying device described in the crab. At the first carrier elevating mechanism that raises and lowers the carrier on which the work is placed at the first position below the first elevating mechanism and delivers it to the bottom layer of the first elevating mechanism, and at the second position below the second elevating mechanism. One of claims 1 to 5, which includes a second carrier elevating mechanism for elevating and lowering the carrier on which the dried work is placed, and a carrier returning mechanism for returning the carrier from the second position to the first position and reusing it. The drying device described in.

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