JP6418464B1 - Substrate conveying apparatus and substrate conveying method - Google Patents

Abstract

The present invention provides a base material transport apparatus and a base material transport method capable of stably transporting a base material such as a lead frame in a predetermined position without causing a flow defect.
A conveyor conveyance device conveys a lead frame supplied to an upper surface of a conveyor belt to an alignment table of a preheater. The preheater 5 has an alignment table 50. As described above, the alignment table 50 is provided with the two conveyance lines 53 and 54 for conveying the lead frame 4, and the lead frame 4 is conveyed on the conveyance surface 51 of the alignment table 50. Positioning of the lead frame 4 in the left-right direction is performed by a front positioning portion 56 provided on the alignment table 50 and a rear positioning portion 57 that operates as the lead frame 4 is conveyed.
[Selection] Figure 2

Description

  The present invention relates to a substrate conveying apparatus and a substrate conveying method.

  In various industrial machines, there is one that holds a base material to be processed and transports it between each process. A lead frame which is an example of such a substrate is transported by a transport mechanism such as a belt conveyor, a pusher, a transport chuck, a loader carrier, etc. as a form in which a semiconductor element is mounted in the manufacture of a package of resin-molded electronic components. Is done.

  For example, in a material supply unit in a resin sealing device that manufactures a resin molded electronic component package by sealing a semiconductor element mounted on a lead frame with resin, the lead frame accommodated in a magazine is belt conveyor by a pusher. And is conveyed to a predetermined position on the alignment table or the belt conveyor.

  The lead frame transported to a predetermined position such as such an alignment table is transferred to the loader carrier at the same position and transported to the molding die of the press section. Here, in order to perform stable conveyance by the loader carrier, the position where the lead frame is arranged on the alignment table or the like needs to be strictly positioned.

  Under these circumstances, as a device for conveying and positioning a lead frame to a delivery position to a loader carrier, for example, there is a lead frame conveying device described in Patent Document 1.

  In the lead frame transport apparatus described in Patent Document 1, a lead frame is supplied from a supply unit to a transport unit having a pair of guide rails, and transported to a predetermined position on the transport unit. The guide rail is formed in the longitudinal direction of the transport unit, and the lead frame is positioned in the width direction by controlling the opposing distance of the guide rail.

JP-A-11-168170

  Here, in the lead frame transport apparatus described in Patent Document 1, the opposing distance between the pair of guide rails is set to be slightly larger than the width of the lead frame along the longitudinal direction of the transport unit. As a result, the lead frame may be caught on the guide rail, resulting in poor flow.

  Further, even when correction of the conveyance is performed by adjusting the thrust of the press roller that advances the lead frame in the conveyance direction, there is a problem that the lead frame that is conveyed is shaken and a flow failure is caused. Further, there is a problem that the bonding wire on the lead frame is damaged due to the poor flow of the lead frame.

  The present invention was devised in view of the above points, and a base material transport apparatus capable of stable transport without causing a flow defect in transport for positioning a base material such as a lead frame at a predetermined position, and It aims at providing the conveyance method of a base material.

  In order to achieve the above object, the substrate transport apparatus of the present invention is provided with a transport path for transporting a substrate on which a semiconductor element is mounted, and transports the substrate to a predetermined position. An apparatus for transporting the base material while moving along the transport direction of the base material, and positioning the base material in a direction substantially orthogonal to the transport direction of the base material in plan view And positioning means configured to be able to come into contact with or be close to the base material as the transport means moves.

  Here, the base material can be transported toward a predetermined position by the transport means for transporting the base material while moving along the transport direction of the base material.

  The “base material” in the present invention means, for example, a lead frame or a substrate on which a semiconductor element is mounted, which is used for manufacturing a resin molded electronic component package.

  Further, the positioning means is configured to be able to contact or approach the base material as the transport means moves so as to position the base material in a direction substantially orthogonal to the transport direction of the base material in plan view. The substrate can be brought into contact with the substrate so as to deviate from the range of the appropriate conveyance path, and its position can be regulated.

  In the present invention, the “direction substantially orthogonal to the conveyance direction of the substrate in plan view” means, for example, the short direction (width direction) of the substrate if it is a rectangular substrate that is long in one direction. Is. The longitudinal direction of the base material is the transport direction.

  The “positioning means configured to be able to contact or approach the base material” according to the present invention is a positioning means provided along a transport path capable of transporting the transported base material to a predetermined position. Means that. Furthermore, the positioning here includes both the case where the substrate is conveyed while being in contact with the positioning means and the case where the substrate is not conveyed in contact with the positioning means and is conveyed while maintaining an appropriate position. It is a waste.

  Further, the positioning means performs the positioning of the base material as described above in accordance with the movement of the transport means, so that it is substantially orthogonal to the transport direction of the base material in plan view in accordance with the movement of the transported base material. The position of the substrate in the direction can be determined. That is, the positioning means can directly or indirectly detect that the substrate to be conveyed has reached the region to be positioned, and the substrate can be positioned based on this detection. Therefore, it is easy to suppress the phenomenon that the base material is caught by the positioning and the transport of the base material is stopped, which is seen in a mode in which the base material is positioned over a wide range.

  The “positioning means” referred to in the present invention is a configuration capable of positioning in a direction substantially orthogonal to the conveyance direction of the substrate in plan view, and in both directions, a member that forms a pair with the substrate sandwiched in both directions. It includes both a mode of positioning and a mode in which one of the members paired across the base material is fixed at a predetermined position and only the other is driven to push the base material.

  Further, when the positioning means has a pair of positioning portions and is configured to be able to contact or approach the base material, both of the base materials in a direction substantially orthogonal to the transport direction of the base material in a plan view. The position can be determined from the direction, and the positioning accuracy can be increased.

  In addition, when the positioning means has a pair of positioning portions and is configured to be able to contact or approach the base material while reducing the facing distance between the positioning portions, the positioning means is transported between the pair of positioning portions. The substrate can be positioned smoothly without hindering the movement of the substrate.

  In the present invention, “reducing the facing distance between positioning parts” means that both of the positioning parts that are paired with the base material are driven and the facing distance gradually decreases to a predetermined distance. One of the pair of positioning portions sandwiching the material is fixed at a predetermined position, and only the other is driven, so that the facing distance gradually decreases to a predetermined distance.

  Further, the conveying means has a conveying abutting portion that abuts on the substrate, and a conveying base that is connected to the conveying abutting portion and is connected to a drive source that drives the conveying abutting portion. A positioning base that is connected to the positioning unit, and when the positioning unit is configured to come into contact with or close to the base material by contacting the positioning base, the movement of the conveying unit and the positioning unit Can be linked. That is, it is not necessary to provide a mechanism for driving the positioning unit other than the conveying unit, and the apparatus can be reduced in size or simplified. Furthermore, the positioning device can be provided without requiring a large-scale modification to the existing apparatus provided with the transport device.

  In addition, when a guide rail provided along the transport path and capable of guiding the base material is provided, the direction and position of the base material being transported are corrected by the base material being transported coming into contact with the guide rail. Since the conveyance of the substrate is assisted, the substrate can be conveyed more stably.

  In addition, when the guide rails are provided in pairs along the transport path, the guide rails guide in both directions across the base material in a direction substantially orthogonal to the transport direction of the base material in plan view. It becomes possible, and the substrate can be transported more stably.

  In addition, when the guide rail as described above is provided and the positioning portion is configured to be movable to a position where the facing distance between the positioning portions is shorter than the facing distance between the guide rails, the guide is guided by the guide rail. With respect to the base material, the positioning portion comes closer in a direction substantially orthogonal to the transport direction of the base material in plan view, and the base material can be positioned more smoothly in the same direction.

  In order to achieve the above object, the base material transport apparatus of the present invention includes a preliminary transport means for transporting a base material on which a semiconductor element is mounted, and the base material is delivered from the preliminary transport means. A base material transport device including a base material setting unit that sets the base material at a predetermined position, while the base material setting unit moves along the transport direction of the delivered base material In order to position the base material in a direction substantially orthogonal to the transport direction of the base material in a plan view, the base material can be contacted with movement of the transport means. Or the positioning means comprised so that proximity was possible.

  Here, the base material can be transported toward a predetermined position by the transport means for transporting the base material while moving along the transport direction of the transferred base material.

  In addition, the positioning means of the base material setting unit can contact or approach the base material as the transport means moves so as to position the base material in a direction substantially orthogonal to the transport direction of the base material in plan view. With this configuration, the positioning means can come into contact with the substrate to be transported so as to be out of the range of the appropriate transport path, and the position thereof can be regulated.

  In addition, the positioning means of the base material setting unit performs the positioning of the base material as described above in accordance with the movement of the transport means, so that the base material is viewed in plan view in accordance with the movement of the transported base material. The position of the base material in a direction substantially orthogonal to the transport direction can be determined. That is, it is possible to directly or indirectly detect that the substrate to be conveyed has reached the region to be positioned, and to position the substrate based on this detection. Therefore, it is easy to suppress the phenomenon that the base material is caught by the positioning and the transport of the base material is stopped, which is seen in a mode in which the base material is positioned over a wide range.

  Moreover, a base material can be conveyed toward a base material setting part by the preliminary conveyance means which conveys the base material with which the semiconductor element is mounted.

  The “preliminary conveyance means” referred to in the present invention is a conveyance means that is provided adjacent to the base material setting unit and transfers the base material to the base material setting unit, and is a base such as a bell conveyor, a pusher, or a conveyance chuck. It means a mechanism unit capable of conveying a material.

  In order to achieve the above object, the substrate transport method of the present invention is a substrate transport method for transporting a substrate on which a semiconductor element is mounted to a predetermined position, wherein the substrate A step of positioning the front end portion in the transport direction in a direction substantially orthogonal to the transport direction in plan view, and a plane of the rear portion opposite to the front end portion of the base material as the base material is transported And a step of positioning in a direction substantially orthogonal to the conveyance direction.

  Here, the rear part of the base material which is transported so as to be out of the range of the appropriate transport path by the step of positioning the rear part opposite to the front end part of the base material in the direction substantially orthogonal to the transport direction in plan view. The position of the part can be regulated. In addition, the rear part of the base material is easily affected by a positional shift at the front end part of the base material in a direction substantially orthogonal to the transport direction in plan view. It becomes possible to perform positioning of the base material more reliably.

  In addition, by performing the step of positioning the rear part of the base material as described above with the transport of the base material, it is directly or indirectly that the transported base material has reached the region to be positioned. Based on this detection, the base material can be positioned. For this reason, it is easy to suppress the phenomenon that the base material is struck with the positioning and the transport of the base material is stopped, which is seen in the aspect of positioning the base material over a wide range.

  In addition, if a base material determines the position of the direction substantially orthogonal to a conveyance direction by planar view in two places in the conveyance direction, the direction of a base material will be conveyed and the direction substantially orthogonal to a conveyance direction by planar view. The position can be determined. Here, the `` back part opposite to the front end part of the base material '' referred to in the present invention is, for example, a region behind the front end part of the base material, but if the base material is a rectangle that is long in one direction, In order to increase the positioning accuracy in the direction substantially orthogonal to the transport direction in plan view, it is preferable to employ a rear half region in the transport direction of the base material, which is divided into two in the longitudinal direction.

  The “front end portion of the base material” in the present invention refers to the front end portion in the direction in which the base material is conveyed. For example, in the case of a rectangular base material, it means an end edge including a corner portion of the front end. It is.

  In addition, the position of the front end portion of the base material in the direction substantially orthogonal to the transport direction of the base material in plan view by the step of positioning the front end portion in the transport direction of the base material in a direction substantially orthogonal to the transport direction in plan view Can be decided.

  Further, the positioning of the rear portion opposite to the front end portion of the base material in the direction substantially orthogonal to the transport direction in plan view, and the front end portion in the base material transport direction substantially orthogonal to the transport direction in plan view By the step of positioning in the direction to be performed, positioning is performed at the front end portion and the rear portion of the base material, and the base material can be positioned more reliably at a predetermined position.

  In addition, when positioning the rear portion of the base material by reducing the facing distance between the pair of positioning portions, smooth movement without interfering with the movement of the base material conveyed between the pair of positioning portions. The substrate can be positioned.

  The base material transport device and the base material transport method according to the present invention enable stable transport without causing a flow defect in transport for positioning a base material such as a lead frame at a predetermined position.

It is a plane view schematic explanatory drawing which shows an example of the resin sealing apparatus of the package of the electronic component in which the base material conveying apparatus which concerns on this invention is provided. It is a plane view schematic explanatory drawing which shows one Embodiment of the base material conveying apparatus which concerns on this invention. It is a front view schematic explanatory drawing of the base material conveying apparatus of FIG. FIG. 6 is a schematic front view illustrating the positional relationship between the pusher and the movable lead frame guide before the lead frame is transported from the conveyor transport device to the alignment table. FIG. 5 is a schematic explanatory view in side view of the pusher and the movable lead frame guide of FIG. It is a front view schematic explanatory drawing which shows the positional relationship of a pusher and a movable lead frame guide in the state just before a lead frame is conveyed from a conveyor conveyance apparatus to an alignment stand, and a pusher drives. FIG. 6 is a side view schematic explanatory diagram of the pusher and the movable lead frame guide of FIG. It is a front view schematic explanatory drawing which shows the positional relationship of a pusher and a movable lead frame guide in the state which the pusher moved to the height position which can convey a lead frame. FIG. 7 is a schematic explanatory view in side view of the pusher and the movable lead frame guide of FIG. It is a front view schematic explanatory drawing which shows the positional relationship of a pusher and a movable lead frame guide in the state before a pusher pushes a lead frame and a movable guide rail closes. FIG. 8 is a schematic explanatory view in side view of the pusher and the movable lead frame guide of FIG. FIG. 5 is a schematic front view illustrating the positional relationship between the pusher and the movable lead frame guide in a state where the pusher conveys the lead frame to a predetermined position on the alignment table while the movable guide rail is closed. FIG. 9 is a schematic explanatory view in side view of the pusher and the movable lead frame guide of FIG.

Embodiments of the present invention will be described below with reference to the drawings.
In the present embodiment, with reference to FIG. 2, the position of the alignment table 50 with respect to the conveyor conveyance device 60 is “front” or “front”, and the position of the conveyor conveyance device 60 with respect to the alignment table 50 is “rear” or “Back”. Further, with reference to FIG. 2, the position of the transfer line 54 with respect to the transfer line 53 is “right” or “right”, and the position of the transfer line 53 with respect to the transfer line 54 is “left” or “left”. That is, with reference to FIG. 2, the direction orthogonal to the front-rear direction is the left-right direction on the transport surface 51 of the alignment table 50. 4A, the position of the pusher 52 with respect to the presser roller 68 is set to “down” or “downward”, and the position of the presser roller 68 with respect to the pusher 52 is set to “up” or “upward”. " Further, with reference to FIG. 2, the short direction of the lead frame 4 is defined as “base material width direction”, and the direction from the outer edge of the lead frame 4 to the center in the base material width direction is defined as “base material inner direction”. The direction opposite to the material inner direction is defined as “base material outer direction”.

(Resin sealing device A)
The electronic component package resin sealing apparatus A is configured using an example of a substrate transport apparatus to which the present invention is applied. As shown in FIG. 1, the resin sealing device A is resin-sealed in a material supply unit 1 that supplies a lead frame 4 (see FIG. 2) that is a base material to a preheater 5 and a press 10. Then, a resin sealing unit 2 that molds the resin molded product and an output unit 3 that receives the resin molded product, removes an unnecessary resin portion thereof, and supplies it to the next process are provided. In addition, the base material conveyance apparatus to which this invention is applied is an apparatus containing the conveyor conveyance apparatus 60 and the alignment stand 50 (refer FIG. 2) in the material supply unit 1. FIG.

  The material supply unit 1 moves to the lead frame transfer 6 (conveyor transfer device 60) that transfers the lead frame 4 toward the pre-heater 5 and the resin sealing unit 2, and delivers the lead frame 4 to the loader carrier 8. A preheater 5 is provided.

  The material supply unit 1 also includes a magazine elevator 7 to which a magazine loaded with the lead frame 4 is supplied, and a lead frame pusher 9 that pushes the lead frame 4 from the magazine toward the lead frame transfer 6. The lead frame transfer 6 is configured to be rotatable from a direction facing the magazine elevator 7 to a direction facing the pre-heater 5.

  The resin sealing unit 2 conveys the lead frame 4 and the resin tablet to the press 10 provided with the chess 101 that performs resin sealing of the lead frame 4, and receives the resin molded product after resin sealing. A loader carrier 8 is provided.

  The output unit 3 moves to the resin sealing unit 2, receives the resin molded product from the loader carrier 8, moves to the output unit 3, and removes unnecessary resin parts (cal and runner) of the resin molded product. And an output buffer 12 for transporting the resin molded product from the digger 11 and feeding it to the next process.

(Conveyor transfer device 60)
The lead frame transfer 6 is composed of a conveyor transfer device 60 (see FIGS. 2 and 3). The conveyor conveyance device 60 is a device that conveys the lead frame 4 supplied to the upper surface of the conveyor belt 62 to the alignment table 50 of the pre-heater 5. The conveyor transport device 60 is configured such that a conveyor belt 62 is stretched around a pulley 61 and the conveyor belt 62 is rotatable.

  In addition, the conveyor transport device 60 is provided with a plurality of press rollers 68 (see FIGS. 2 and 3). The presser roller 68 is a member that sandwiches the lead frame 4 with the upper surface of the conveyor belt 62 and applies a thrust force that feeds the lead frame 4 toward the alignment table 50. The conveyor transport device 60 corresponds to a “preliminary transport unit” in the claims of the present application.

  Moreover, the conveyor conveyance apparatus 60 can convey the two lead frames 4, and two adjacent conveyance lines are connected by a shaft 65 (see FIG. 2).

  That is, the conveyor transport device 60 is configured such that two lead frames 4 are supplied from the magazine to each transport line, and the lead frames 4 can be transported to the alignment table 50. The alignment table 50 is also provided with a transport line 53 and a transport line 54 that can transport two lead frames (see FIG. 2).

  Further, the conveyor transport device 60 is provided with a pair of guide rails 66 along the conveyor belt 62 (see FIGS. 2 and 3), and corrects a large shift in the left-right direction of the lead frame 4 being transported. It is configured to be possible. The opposing distance between the guide rails 66 is set to be about 0.5 mm larger than the width of the lead frame 4, and the lead frame 4 to be conveyed comes into contact with the guide rail 66 to transport the base material. Then, the position in the left-right direction is corrected, the bumping of the tip is suppressed, and the flow failure of the lead frame 4 is less likely to occur.

  Moreover, the conveyor conveyance apparatus 60 has a conveyor width adjusting mechanism including a conveyor width adjusting screw 67 (see FIG. 2). By adjusting the conveyor width adjusting screw 67, the width of the path through which the lead frame 4 is conveyed can be changed. Thereby, the conveyor conveyance apparatus 60 can respond | correspond also to the lead frame from which the magnitude | size of a width differs.

  Further, the conveyor transport device 60 is provided with a passage sensor (not shown). The passage sensor detects the timing when the pusher 52 described later comes into contact with the rear end portion 41 of the lead frame 4 and the pusher 52 starts moving from the standby position when the lead frame 4 is pushed forward and conveyed. Sensor.

  The detection position in the passage sensor is set in the vicinity of the front end portion of the conveyor transport device 60. When the passage sensor detects the passage of the rear end portion 41 of the lead frame 4, the pusher 52 provided at the rear portion of the alignment table 50 starts moving from the standby position and moves to a position where the lead frame 4 can be pushed, The conveyance of the lead frame 4 is started.

(Alignment table 50)
The preheater 5 has an alignment table 50 (see FIG. 1). The alignment table 50 is provided with two conveyance lines for conveying the lead frames 4 as described above, and the lead frames 4 are conveyed on the conveyance surface 51 of the alignment table 50 (see FIG. 2).

  In the alignment table 50, the lead frame 4 is conveyed to a predetermined position (final arrangement position), and in the next process, the loader carrier 8 (see FIG. 1) conveys the lead frame 4 to the press 10, The lead frame 4 is received at the final arrangement position of the alignment table 50. Here, in order to carry the lead frame 4 stably by the loader carrier 8, the final arrangement position of the lead frame 4 on the alignment table 50 is strictly defined.

  More specifically, the final placement position of the lead frame 4 is defined in the front-rear direction and the left-right direction, and the front-rear direction so that the lead frame 4 is within an error range of about 0.1 mm from the ideal position where the lead frame 4 is to be placed. And the position in the left-right direction is determined.

  Positioning of the lead frame 4 in the front-rear direction is performed by setting a moving distance of a pusher 52 (see FIGS. 4 to 9) for conveying the lead frame 4 and a stopper 55 (see FIG. 2) provided at the front portion of the alignment table 50. Is done by.

  The pusher 52 has a moving distance in the front-rear direction, and the pusher 52 stops after moving. Here, the stop position of the pusher 52 is set so that the front end portion 40 of the lead frame 4 comes to a predetermined position in the front-rear direction.

  Positioning of the lead frame 4 in the left-right direction is performed by a front positioning portion 56 provided on the alignment table 50 and a rear positioning portion 57 that operates as the lead frame 4 is conveyed (see FIGS. 2 and 3).

(Front positioning part 56)
The front positioning portion 56 is a member that positions the front portion 43 of the lead frame 4 in the left-right direction while guiding the front end portion 40 of the lead frame 4 conveyed by the pusher 52. The rear positioning portion 57 is a member that positions the rear portion 42 of the lead frame 4 in the left-right direction when the pusher 52 reaches a predetermined position as the pusher 52 moves. The detailed structure of the rear positioning portion 57 will be described later.

  The front positioning portion 56 includes a pair of positioning rails 560 and a positioning taper portion 561 provided at the rear portion of the positioning rail 560 (see FIG. 2).

  The facing distance between the positioning rails 560 is set to be about 0.2 mm larger than the width of the lead frame 4. Therefore, when the lead frame 4 is disposed at a predetermined position in the left-right direction, the distance between the outer edge in the longitudinal direction of the lead frame 4 and the positioning rail 560 facing the outer edge is 0.1 mm.

  Further, the positioning taper portion 561 is formed with a facing distance narrowing from the rear to the front, and serves as a member that calls the front end portion 40 of the lead frame 4 being conveyed between the pair of positioning rails 560. Yes. Further, the positioning taper portion 561 suppresses the shake of the front end portion 40 when positioning the rear portion 42 of the lead frame 4.

(Guide rail part 58)
A guide rail portion 58 is provided in a region behind the front positioning portion 56 in the alignment table 50. The guide rail part 58 is comprised from the several guide rail 580 arrange | positioned from the rear end part of the alignment stand 50 to the front (refer FIG. 2). The guide rail 580 is a member corresponding to the “guide rail” in the claims of the present application.

  Each of the plurality of guide rails 580 includes a pair of rails, and a guide taper 581 is provided on each rail. Further, a gap 59 is provided between the guide rails 580 adjacent in the front-rear direction (see FIG. 2). A gap 59 is also provided between the foremost guide rail 580 and the positioning rail 560.

  The guide rail 580 is a member for suppressing a significant positional shift in the left-right direction of the lead frame 4 to be conveyed and an excessive inclination of the front end portion 40 or the rear end portion 41 of the lead frame 4 in the left-right direction. The guide taper 581 is formed so that the facing distance decreases from the rear to the front.

  That is, the guide taper 581 has a shape that is narrowed in the left-right direction as the transport path of the lead frame 4 approaches the front positioning portion 56. Therefore, when the lead frame 4 passes through the guide rail 580, the rough position of the lead frame 4 in the left-right direction is adjusted before reaching the front positioning portion 56.

  Further, the opposing distance of the rear end portion of the guide taper 581 is formed larger than the opposing distance of the front end portion of the guide taper 581 adjacent to the rear thereof. As a result, even if the front end portion 40 of the lead frame 4 is displaced in the left-right direction in the region of the gap 59, it can be called toward the guide rail 580 adjacent to the front. The gap 59 is an area in which a holding claw (not shown) of the loader carrier 8 enters when the loader carrier 8 receives the lead frame 4 positioned at the final arrangement position.

(Pusher 52)
A pusher 52 is provided at the rear of the alignment table 50 (see FIGS. 4 to 8). The pusher 52 is a member that conveys the lead frame 4 conveyed to the alignment table 50 by the conveyor conveying device 60 so as to be further pulled toward the final arrangement position.

  The pusher 52 is in contact with the rear end portion 42 of the lead frame 4 and is connected to a push portion 520 that pushes the lead frame 4 forward, and a lower portion of the push portion 520, and is driven by a predetermined actuator or the like. A linear cam 521 that moves in the front-rear direction is provided (see FIGS. 4 to 8). The pusher 52 corresponds to “conveying means” in the claims of the present application. The push portion 520 corresponds to a “conveying contact portion” in the claims of the present application, and the linear cam 521 corresponds to a “conveyance base portion” in the claims of the present application.

  The linear cam 521 is a member that pushes the follower base 571 of the movable lead frame guide 570 of the rear positioning portion 57 (see FIGS. 4 to 8). The linear cam 521 pushes the follower base 571 in the direction toward the outside of the base material, whereby the movable lead frame guide 570 positions the rear portion 42 of the lead frame 4 in the left-right direction.

  Further, a tapered portion (not shown) is provided on the side surface of the front portion of the linear motion cam 521. The taper portion of the linear cam 521 is formed so that the width in the left-right direction decreases from the rear to the front. The taper portion of the linear cam 521 makes the linear cam 521 smoothly contact the follower base 571 of the movable lead frame guide 570, and the distance between the movable guide frame 570 and the movable guide rail 572. Is gradually shrinking.

(Rear positioning part 57)
A rear positioning portion 57 is provided at the rear portion of the alignment table 50 (see FIGS. 2 and 3). The rear positioning portion 57 is a member responsible for positioning the rear portion 42 of the lead frame 4 in the left-right direction when the lead frame 4 is positioned at the final arrangement position of the alignment table 50. The rear positioning portion 57 corresponds to “positioning means” in the claims of the present application.

  The rear positioning portion 57 is provided at the rear portion of the alignment table 50 and has a movable lead frame guide 570. The movable lead frame guide 570 has a pair of movable guide rails 572 that guide the lead frame 4 and perform positioning in the left-right direction, and a follower base 571 that is connected to the lower portion of the movable guide rail 572 ( 4 to 8). The movable guide rail 572 corresponds to the “positioning portion” in the claims of the present application, and the follower base portion 571 corresponds to the “positioning base” in the claims of the present application.

  The follower base 571 includes a roller 571a provided with a ball bearing therein (see FIGS. 4 to 8). The side surface of the linear cam 521 of the pusher 52 that moves forward contacts the roller 571a, and the roller 571a rotates while the follower base 571 is pushed from the linear cam 521 toward the outside of the substrate. Thereby, the linear cam 521 can enter smoothly between both rollers 571a.

  Further, the movable guide rail 572 and the follower base 571 are rotatably supported via a shaft 573 provided substantially parallel to the front-rear direction of the alignment table 50 (FIGS. 4B to 8). B)). Further, the movable guide rail 572 and the follower base 571 are urged by a spring (not shown) so that the upper portion of the movable guide rail 572 is inclined toward the outer side of the base material.

  In other words, the movable lead frame guide 570 has a shape in which the upper part of the movable guide rail 572 is opened in the outer side of the base material in an initial state (a state before the follower base 571 is pushed by the linear motion cam 521).

  Further, when the roller 571a of the follower base 571 comes into contact with the linear motion cam 521 of the pusher 52 that has moved forward and is pushed in the direction toward the outer side of the base material, the follower base part 571 is centered on the shaft 573. The movable guide rail 572 is configured to move integrally in the direction toward the inner side of the base material (see FIG. 8B).

  By this movement, the opposing distance of the pair of movable guide rails 572 is reduced, and the movable guide rail 572 comes close to the side surface of the rear portion 42 of the lead frame 4 being conveyed. Depending on the position of the rear portion 42 of the lead frame 4, the movable guide rail 572 contacts the lead frame 4 and adjusts the position in the left-right direction. The contact between the linear cam 521 of the pusher 52 and the roller 571a of the follower base 571 is maintained even when the lead frame 4 is conveyed to the final arrangement position, and before the loader carrier 8 receives the lead frame 4, The state where the facing distance of the movable guide rail 572 is reduced is maintained.

  Here, the position where the rear positioning portion 57 is provided is not particularly limited as long as the rear portion of the lead frame 4 to be conveyed can be positioned in the left-right direction. The position where the rear portion of the lead frame 4 can be positioned in the left-right direction is, for example, in a state where the lead frame 4 is positioned at the final arrangement position of the alignment table 50 and behind the center portion in the longitudinal direction of the lead frame 4. Examples include locations where the region can be positioned. That is, it is not always necessary to be in the vicinity of the rear end portion 41 of the lead frame 4 as long as it is a region behind the central portion in the longitudinal direction of the lead frame 4.

  Further, the rear positioning portion 57 is not limited to one constituted by one movable lead frame guide 570, and a plurality of rear positioning portions 57 may be installed.

  Further, the rear positioning portion 57 is configured to come into contact with the linear motion cam 521 of the moving pusher 52 and the opposing distance of the movable guide rail 572 is reduced, but it is not always necessary to be in this mode. For example, a configuration in which the position of the moving pusher 52 is detected and the positioning of the lead frame 4 by the movable guide rail 572 is started based on the detection result is also conceivable. However, it is not necessary to provide a separate detection mechanism for detecting the position of the pusher 52, and the apparatus can be reduced in size or simplified, or is large-scale for existing equipment having a conveying means such as the pusher 52. From the viewpoint that the rear positioning portion 57 can be provided without modification or the like, the rear positioning portion 57 is preferably configured so as to come into contact with the moving pusher 52 and the facing distance of the movable guide rail 572 is reduced.

  Hereinafter, the flow of lead frame conveyance and positioning to the final arrangement position on the alignment table in one embodiment of the substrate conveyance device to which the present invention is applied will be described. Further, the content described below is an embodiment of the substrate transport method to which the present invention is applied.

  First, the lead frame 4 is transported by the conveyor transport device 60, and the lead frame 4 is supplied from the conveyor belt 62 toward the alignment table 50. From the state where the lead frame 4 rides on the upper surface of the conveyor belt 62 and is not stretched over the alignment table 50 (see FIGS. 4A and 4B), the lead frame 4 moves to the conveyor belt 62 and the alignment table 50. Until the rear end portion 42 passes over the detection position (not shown) of the passage sensor in the conveyor belt 62 (see FIG. 5A and FIG. 5B), the pusher 52 is connected to the conveyor transport device 60. Waiting at the standby position below

  Next, when the lead frame 4 is conveyed toward the alignment table 50 by the conveyor conveyance device 60 and the rear end portion 42 of the lead frame 4 passes the detection position of the passage sensor, the passage sensor does not detect the lead frame 4. Thus, the pusher 52 rises from the standby position starting from this undetected state. The pusher 52 rises to a height position at which the push portion 520 can push the rear end portion 42 of the lead frame 4 (see FIGS. 6A and 6B).

  Subsequently, the pusher 52 moves forward, the push portion 520 comes into contact with the rear end portion 42 of the lead frame 4, and the lead frame 4 is pushed forward to start conveyance (FIGS. 7A and 7B). )reference). When the pusher 52 conveys the lead frame 4 while pushing it forward, the pusher 52 reaches a position where the linear cam 521 and the roller 571a of the follower base 571 in the movable lead frame guide 570 come into contact with each other. The roller 571a is gradually pushed toward the substrate outer side while rotating along a tapered portion (not shown) provided in the linear cam 521.

  Then, when the pusher 52 moves forward to the end portion and the roller 571a is pushed in the substrate outer direction, the movable guide rail 572 rotates around the shaft 573 in the substrate inner direction and contacts the lead frame 4. Or close to each other (see FIGS. 8A and 8B). As a result, the position of the rear portion 42 of the lead frame 4 in the left-right direction is determined.

  4A, 5A, 6A, 7A, and 8A, the positional relationship between the pusher 52 and the movable lead frame guide 570 is clarified. Therefore, the left side member of the movable lead frame guide 570 paired on the left and right is omitted.

  The timing at which the rear portion 42 of the lead frame 4 is positioned in the left-right direction by the movable lead frame guide 570 is the timing at which the front end portion 40 of the lead frame 4 passes the region of the positioning taper portion 561 in the front positioning portion 56. Is set to be almost simultaneous.

  As a result, the positioning of the front portion 43 of the lead frame 4 in the left-right direction by the front positioning portion 56 and the positioning of the rear portion 42 of the lead frame 4 in the left-right direction by the rear positioning portion 57 are performed almost simultaneously. The positioning accuracy in the left-right direction is ensured.

  Further, since the pusher 52 has a forward moving distance, the pusher 52 stops when the front end portion 40 of the lead frame 4 to be conveyed reaches the final arrangement position in the front-rear direction, and the pusher 52 The position in the front-rear direction is determined. Even if the lead frame 4 is slightly displaced further forward, the lead frame 4 is stopped at the position of the stopper 55, so that the positioning accuracy of the lead frame 4 in the front-rear direction is ensured.

  As described above, the pusher 52 conveys the lead frame 4 toward the final arrangement position on the alignment table 50. The front positioning portion 56 and the rear positioning portion 57 position the lead frame 4 in the front-rear direction and the left-right direction at the final arrangement position of the alignment table 50.

  In the substrate conveying apparatus and the substrate conveying method to which the present invention is applied, the lead 43 is positioned in the left-right direction at the timing when the lead frame 4 is conveyed to the final arrangement position. It is difficult for the frame 4 to be caught in the left-right direction, and poor flow can be suppressed.

  Further, since the lead frame 4 is conveyed while being pushed forward by the pusher 52, it is possible to prevent the lead frame 4 from being stopped by a slight bump or the like due to insufficient thrust in the middle of the conveyance path. The lead frame 4 can be stably conveyed up to 50 final arrangement positions.

As described above, an example of the base material transport apparatus according to the present invention is capable of stable transport without causing a flow defect in transport for positioning a base material such as a lead frame at a predetermined position. .
An example of the material conveying method according to the present invention is a method that enables stable conveyance without causing a flow defect in conveying a base material such as a lead frame at a predetermined position.

DESCRIPTION OF SYMBOLS 1 Material supply unit 2 Resin sealing unit 3 Output unit 4 Lead frame 40 Front end part (lead frame) 41 Rear end part 42 (lead frame) Rear part 43 (lead frame) Front part 5 Preheater 50 Alignment table 51 Transfer surface 52 Pusher 520 Push part 521 Linear motion cam 53 Transfer line 54 Transfer line 55 Stopper 56 Front positioning part 560 Positioning rail 561 Positioning taper part 57 Rear positioning part 570 Movable lead frame Guide 571 Follow base 571a Roller 572 Movable guide rail 573 Shaft 58 Guide rail 580 Guide rail 581 Guide taper 59 Clearance 6 Lead frame transfer 60 Conveyor transport device 61 Pulley 62 Conveyor belt 65 Shaft 66 Guide rail 67 Conveyor width adjusting screw 68 Presser roller 7 Magazine elevator 8 Loader carrier 9 Lead frame pusher 10 Press 101 Chess 11 Digger 12 Output buffer

Claims (8)

A substrate transport device for transporting a substrate on which a semiconductor element is mounted is provided, and transports the substrate to a predetermined position,
Conveying means for conveying the substrate while moving along the conveying direction of the substrate;
In order to position the base material in a direction substantially orthogonal to the transport direction of the base material in a plan view, positioning means configured to be able to contact or approach the base material as the transport means moves. A substrate transport apparatus. The base material transport apparatus according to claim 1, wherein the positioning unit includes a pair of positioning portions, and is configured to be able to contact or approach the base material while reducing a facing distance between the positioning portions. The transport means includes a transport contact portion that contacts the base material, and a transport base that is connected to the transport contact portion and is connected to a drive source that drives the transport contact portion.
The positioning means has a positioning base that is connected to the positioning portion,
The base material transport apparatus according to claim 2, wherein the positioning portion is configured to be able to contact or approach the base material by the contact of the transport base portion with the positioning base portion. The base material transport apparatus according to claim 1, comprising a guide rail provided along the transport path and capable of guiding the base material. A pair of guide rails are provided along the transport path, the guide rails being capable of guiding the base material,
The positioning part is configured to be movable to a position where the facing distance between the positioning parts is shorter than the facing distance between the guide rails.
The base material conveying apparatus according to claim 2 . A base comprising a preliminary transport means for transporting a base material on which a semiconductor element is mounted, and a base material setting section that delivers the base material from the preliminary transport means and sets the base material at a predetermined position. A material conveying device,
The base material setting unit is
A transport means for transporting the base material while moving along the transport direction of the passed base material;
In order to position the base material in a direction substantially orthogonal to the transport direction of the base material in a plan view, positioning means configured to be able to contact or approach the base material as the transport means moves. A substrate transport apparatus. A substrate transport method for transporting a substrate on which a semiconductor element is mounted to a predetermined position,
A step of conveying the substrate while moving along the conveyance direction of the substrate, and positioning a front end portion in the conveyance direction of the substrate in a direction substantially orthogonal to the conveyance direction in plan view; ,
As the base material is transported by the transport means , the positioning means is in contact with or close to the base material, and the rear portion of the base material opposite to the front end is substantially orthogonal to the transport direction in plan view. Positioning the direction;
A substrate transport method. The substrate transport method according to claim 7, wherein the positioning of the rear portion is performed by reducing a facing distance between the pair of positioning portions included in the positioning means .

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