JP6469432B2 - Rotary cathode and sputtering equipment - Google Patents

Description

  The present invention relates to a rotary cathode having a rotatable target and a sputtering apparatus having a rotary cathode.

  2. Description of the Related Art Conventionally, sputtering apparatuses that deposit particles emitted from a target on a surface of a substrate or the like while rotating a target having a cylindrical shape are known. For example, in the sputtering apparatus described in Patent Document 1, the rotary cathode is supported by the chamber so that the axial direction and the horizontal direction of the target having a cylindrical shape are parallel to each other, and the target that receives the driving force of the driving device is the target. Rotate along the circumferential direction.

JP 5-504373 A

  By the way, when the center of the rotating shaft for rotating the target is inclined with respect to the bearing center of the shaft supporting portion that supports the rotating shaft, an excessive load is applied to the rotating shaft and the shaft supporting portion when the target is rotated. In particular, since the length of the target in the axial direction tends to increase with an increase in the size of the film formation target, it is further required to suppress the load applied to the rotating shaft and the shaft support.

  The present invention has been made in view of such a situation, and an object of the present invention is to provide a rotary cathode capable of suppressing a load applied to a rotating shaft and a shaft support, and a sputtering apparatus including the rotary cathode.

A rotary cathode that solves the above problems includes a rotating shaft having a pivoted end, a target having a cylindrical shape that rotates together with the rotating shaft, and a support block that pivotally supports the pivoted end. The support block includes a case having an inner surface that defines an accommodation space that accommodates the pivot support end, and a rotational force of the pivot support end through which the pivot support end is passed in the accommodation space. A bearing including an inner ring that rotates and an outer ring that is housed in the housing space in a state where the inner ring cannot rotate about the rotation shaft, and the outer ring that the bearing includes and the inner surface that the case includes. And an elastic member positioned at at least one between the inner ring provided in the bearing and the pivot support end.
A sputtering apparatus that solves the above problems includes the rotary cathode as a cathode in sputtering.

  According to the above configuration, the deviation between the axis of the rotating shaft and the bearing center of the bearing through which the rotating shaft passes is absorbed by the elastic deformation of the elastic member. Therefore, the load applied to the support block functioning as the shaft support portion of the rotating shaft and the rotating shaft can be suppressed.

  In the rotary cathode, the elastic member may be a resin O-ring positioned between the outer ring provided in the bearing and the inner surface provided in the case.

  When the above-described rotating shaft and bearing are assembled to the case, the above-described elastic member is elastically deformed according to the position of the bearing with respect to the case and the position of the rotating shaft with respect to the bearing. The amount of deformation in this elastic deformation causes an error in the position of the bearing with respect to the case and the position of the rotating shaft with respect to the bearing. In this respect, according to the above configuration, since the position of the elastic member is specified between the outer ring provided in the bearing and the inner surface provided in the case, the assembly error caused by the elastic deformation of the elastic member is determined as the position of the bearing relative to the case. It can be kept in error. And the rotational force which a rotating shaft applies to a bearing is consumed by the inner ring | wheel with which a bearing is provided, and the rolling element with which a bearing is provided, and is not transmitted to the O-ring located between an outer ring | wheel with which a bearing is provided, and a case. Therefore, wear of the elastic member due to rotation of the rotating shaft is suppressed.

  In the rotary cathode, the bearing includes a plurality of rolling elements sandwiched between the inner ring and the outer ring, and each of the plurality of rolling elements and the O-ring are opposed to each other in the radial direction of the rotating shaft. Also good.

  Each of the plurality of rolling elements included in the bearing is pressed toward the radially outer side of the bearing from the inner ring included in the bearing, and is pressed toward the radially inner side of the bearing from the outer ring included in the bearing. According to the above configuration, since the plurality of rolling elements and the O-ring face each other in the radial direction of the bearing, the pressing force on the rolling elements is relieved, and the friction between the rolling elements and the outer ring and the rolling force are reduced. Friction between the moving body and the inner ring is suppressed.

  The rotary cathode has a cylindrical shape sandwiched between the inner ring provided in the bearing and an outer peripheral surface provided in the supported end, and has an insulating property for connecting the inner ring provided in the bearing and the supported end. And a resin sleeve.

  According to the above configuration, a resin sleeve that can easily obtain high workability compared to a ceramic material or a metal material is used for a member for obtaining electrical insulation between the pivot end and the bearing. be able to.

The apparatus block diagram which shows the apparatus structure of one Embodiment of the sputtering device in this indication. FIG. 2 is a cross-sectional view taken along line 2-2 in FIG. 1. Sectional drawing which shows the cross-section of the support block with which the rotary cathode in this indication is provided.

  Hereinafter, an embodiment of a rotary cathode and a sputtering apparatus according to the present disclosure will be described with reference to the drawings.

FIG. 1 shows a cross-sectional view of a sputtering apparatus equipped with a rotary cathode cut along a plane perpendicular to the substrate transport direction. FIG. 2 is a cross-sectional view of a sputtering apparatus including a rotary cathode cut along a vertical plane parallel to the substrate transport direction.
As shown in FIG. 1, a processing space that is a space set in a vacuum atmosphere is formed in a chamber 11 provided in the sputtering apparatus, and the processing space formed in the chamber 11 includes a rotary cathode 12, a support base 13, and the like. Is housed. For example, a sputtering gas such as argon gas or a reactive gas such as oxygen gas is appropriately supplied to the processing space of the chamber 11 according to the processing performed in the processing space.
The rotary cathode 12 includes a driving device 15, a support block 16, two shaft members 17, and a target 18.

  The drive device 15 includes a main body 22 having a recess 21 formed therein, and the main body 22 is attached to the upper wall of the chamber 11. The main body portion 22 is formed with an opening portion of a concave portion 21 that opens toward the upper wall of the chamber 11. Communicate.

  A support through hole 24 that penetrates the main body portion 22 along the horizontal direction is formed in the wall of the main body portion 22 that faces the support block 16. A support hole 25 facing the support through hole 24 is formed in a wall facing the support through hole 24 among the walls of the main body 22. One shaft member 17 of the two shaft members 17 is inserted into the support through hole 24 and the support hole 25. One shaft member 17 forms a base end rotation shaft, and is rotatably supported by the driving device 15 by a bearing 28 provided in the support through hole 24 and a bearing 29 provided in the support hole 25. .

  A driven pulley 31 is fitted from the outside of the shaft member 17 to a portion of the one shaft member 17 in the axial direction and located in the recess 21. In addition, a slip ring 36 is fitted from the outside of the shaft member 17 to a position that is closer to the base end side than the driven pulley 31 in the axial direction of one shaft member 17 and that is positioned in the recess 21. ing. The driven pulley 31 and the slip ring 36 together with the one shaft member 17 constitute a base end rotating shaft. Note that a flow path R1 through which a coolant for cooling the target 18 flows is formed inside the one shaft member 17 as indicated by an arrow in FIG.

  The support block 16 is attached to the upper wall of the chamber 11, and an insertion hole 26 extending in the horizontal direction is formed in the opposing wall that is the wall facing the driving device 15 in the support block 16. Of the two shaft members 17, the other shaft member 17 is rotatably supported by the support block 16 by a bearing 30 provided in the insertion hole 26.

  The target 18 having a cylindrical shape is connected to one shaft member 17 supported by the driving device 15 and the other shaft member 17 supported by the support block 16, and rotates when the one shaft member 17 rotates. To do.

  A motor 33 constituting a driving device is mounted on the upper wall of the main body 22. The output shaft 32 connected to the motor 33 also constitutes a driving device, has a shape extending in parallel with the axial direction of the shaft member 17, and is opposed to the concave portion 21 formed in the main body portion 22. Is arranged. A drive pulley 34 is connected to the output shaft 32 of the motor 33.

  The driven pulley 31 connected to one shaft member 17 and the drive pulley 34 connected to the output shaft 32 are connected by an endless belt 35. The belt 35 is hooked on the driving pulley 34 and the driven pulley 31 through the opening of the recess 21 formed in the main body 22 and the through hole 23 formed in the upper wall of the chamber 11, and In response to the rotation, the proximal rotation shaft is rotated.

  Above the slip ring 36 connected to one shaft member 17, a power supply brush 38 that contacts the outer peripheral surface of the slip ring 36 and a brush holder 37 that supports the power supply brush 38 above the power supply brush 38 are disposed. ing. The upper end portion of the brush holder 37 is fixed relative to the main body portion 22 and presses the power supply brush 38 toward the slip ring 36. The electric power transmitted from the power supply brush 38 to the slip ring 36 is supplied from the slip ring 36 to the target 18 through the shaft member 17.

  Then, electric power is supplied from the driving device 15 to the target 18 while rotating the target 18 based on the driving force transmitted from the driving device 15. By supplying such electric power, plasma is generated around the target 18 from the gas contained in the chamber 11, and positive ions in the generated plasma collide with the target 18. As a result, particles are released from the target 18.

  At this time, as shown in FIG. 2, the particles emitted from the target 18 are deposited on the upper surface of the substrate 14 in the process in which the substrate 14 carried into the chamber 11 through the carry-in port S <b> 1 passes under the target 18. . A thin film containing the material constituting the target 18 is formed on the upper surface of the substrate 14. The substrate 14 thus formed with the thin film is carried out of the chamber 11 through the carry-out port S2. In the present embodiment, the rotary cathodes 12 are arranged at three positions on the transport path of the substrate 14 from the carry-in entrance S1 to the carry-out exit S2, and are emitted from the targets 18 of these three rotary cathodes 12. Particles are sequentially deposited on the upper surface of one substrate 14.

With reference to FIG. 3, the structure for supporting the tip rotating shaft 100 will be described in detail.
The distal end rotating shaft 100 which is the other shaft member 17 described above is a metal member extending along the axial direction D which is one direction, and has a two-stage cylindrical shape whose diameter is reduced toward the distal end. Yes. The tip rotary shaft 100 includes a pivoted support end 101A that is a small diameter portion and a shaft flange 101B that is a large diameter portion.

  The support block 16 includes a case 16 </ b> C composed of a housing block 111 and a fixed block 112. A housing space is formed inside the case 16C, and the supported end 101A, the small diameter sleeve 102, the bearing 30, the large diameter sleeve 104, and an O-ring 105, which is an example of an elastic member, are included in the housing space. Contained.

  The fixed block 112 has a metal block shape that faces the distal end rotation shaft 100 in the axial direction D, and is fixed to the upper wall of the chamber 11. The housing block 111 is located between the target 18 and the fixed block 112 in the axial direction D. The housing block 111 has a cylindrical shape made of metal surrounding the periphery of the pivoted end 101A, and has an inward block flange 111F having an annular shape facing the shaft flange 101B.

  The insertion hole 26 that is the opening of the block flange 111F has an inner diameter DB that is larger than the outer diameter DA of the pivoted end 101A. The thickness of the block flange 111F along the axial direction D is larger than the difference between the outer diameter DA and the inner diameter DB, and the center of the housing block 111 and the center A of the distal end rotating shaft 100 are inclined at 0 ° or more and 10 or less. The block flange 111F allows the pivoted end 101A to pass through the block flange 111F.

  In the cylinder of the accommodation block 111, a small diameter sleeve 102, a bearing 30, a large diameter sleeve 104, and an O-ring 105 are accommodated in this order around the pivoted end 101A. The accommodation block 111 is fastened to the fixed block 112 in a state where the small diameter sleeve 102, the bearing 30, the large diameter sleeve 104, and the O-ring 105 are accommodated.

  The bearing 30 includes an inner ring 122 having an annular shape, an outer ring 123 having an annular shape concentric with the inner ring 122, and a plurality of rolling elements 124 sandwiched between the inner ring 122 and the outer ring 123. . Between the outer peripheral surface of the pivoted end 101 </ b> A and the inner ring 122 provided in the bearing 30, a resin-made small-diameter sleeve 102 having an insulating property is located. The inner peripheral surface of the housing block 111 is an example of an inner surface provided in the case 16C, and a large resin-made insulating material is provided between the inner peripheral surface of the housing block 111 and the outer ring 123 provided in the bearing 30. A diameter sleeve 104 is located.

  The small diameter sleeve 102 has a cylindrical shape that is sandwiched between the outer peripheral surface of the pivoted end 101 </ b> A and the inner peripheral surface of the inner ring 122 of the bearing 30. The outer peripheral surface of the small diameter sleeve 102 is fitted into the inner ring 122 of the bearing 30. On the outer peripheral surface of the small diameter sleeve 102, the C ring 102 </ b> C is fitted on the distal end side with respect to the inner ring 122, and the displacement of the inner ring 122 toward the fixed block 112 is restricted. An outward sleeve flange 102F is formed at the proximal end of the small diameter sleeve 102 in the axial direction D. The sleeve flange 102F of the small diameter sleeve 102 covers the entire end surface of the inner ring 122 in the circumferential direction, and restricts the inner ring 122 from being displaced toward the shaft flange 101B. The C-ring 102C fitted to the outer peripheral surface of the small diameter sleeve 102 and the sleeve flange of the small diameter sleeve 102 suppress the displacement of the inner ring 122 along the axial direction D with respect to the small diameter sleeve 102.

  A gap that is sufficiently smaller than the thickness of the sleeve flange 102F and the thickness of the block flange 111F in the axial direction D is formed between the sleeve flange 102F of the small diameter sleeve 102 and the block flange 111F of the housing block 111. . The gap between the small diameter sleeve 102 and the storage block 111 allows the center of the small diameter sleeve 102 to be inclined with respect to the center of the storage block 111.

  The inner peripheral surface of the small-diameter sleeve 102 has a plurality of recesses that are recessed outward in the radial direction of the small-diameter sleeve 102, and the outer peripheral surface of the pivoted end 101A is on the outer side in the radial direction of the pivoted end 101A. It has a plurality of convex portions protruding toward it. A shaft support end 101A is fitted inside the small diameter sleeve 102, and a convex portion formed on the outer peripheral surface of the shaft support end 101A is fitted in a recess formed on the inner peripheral surface of the small diameter sleeve 102. Yes. This restricts the small-diameter sleeve 102 from being displaced along the axial direction with respect to the pivoted end 101A.

  By fitting the supported end 101A into the cylinder of the small diameter sleeve 102, the inner ring 122 and the supported end 101A of the bearing 30 are moved so that the inner ring 122 of the bearing 30 is rotated with respect to the supported end 101A. Are connected by a small-diameter sleeve 102. The insulating property of the small diameter sleeve 102 insulates the voltage applied to the target 18 from the bearing 30.

  The large diameter sleeve 104 has a cylindrical shape that covers almost the entire outer ring 123 of the bearing 30. The outer ring 123 of the bearing 30 is fitted into the inner peripheral surface of the large diameter sleeve 104. An inward sleeve flange 104F is formed at the proximal end of the large diameter sleeve 104 in the axial direction D. The sleeve flange 104 </ b> F covers the base end side end face of the outer ring 123 over the entire circumferential direction of the outer ring 123. The sleeve flange 104 </ b> F and the fixed block 112 suppress the displacement of the large-diameter sleeve 104 along the axial direction D with respect to the outer ring 123 of the bearing 30.

  A gap sufficiently smaller than the thickness of the sleeve flange 104F and the thickness of the block flange 111F in the axial direction D is formed between the sleeve flange 104F of the large diameter sleeve 104 and the block flange 111F of the housing block 111. Yes. The gap between the large diameter sleeve 104 and the storage block 111 allows the center of the large diameter sleeve 104 to be inclined with respect to the center of the storage block 111.

  An insertion groove 104 </ b> G into which the O-ring 105 is fitted is formed on the outer peripheral surface of the large diameter sleeve 104 over the entire circumferential direction of the large diameter sleeve 104. Between the outer peripheral surface of the large-diameter sleeve 104 and the cylindrical inner surface of the accommodation block 111, an O-ring 105 fitted in the fitting groove 104G is located. The outer ring 123 of the bearing 30 is non-rotatably positioned with respect to the inner peripheral surface of the accommodation block 111 via the large diameter sleeve 104 and the O-ring 105.

  Then, the rotational force output from the distal end rotating shaft 100 rotates the inner ring 122 through the small diameter sleeve 102. On the other hand, the rotational force output from the inner ring 122 is converted into the rolling of the plurality of rolling elements 124 and is hardly transmitted to the large-diameter sleeve 104 fixed to the outer ring 123. As a result, the rotational force output from the tip rotary shaft 100 is absorbed by the bearing 30 and is not applied to the O-ring 105 sandwiched between the outer ring 123 and the housing block 111, and the O-ring 105 is worn by such rotational force. Is suppressed.

  The O-ring 105 is an elastic member having a ring shape having a lower elastic modulus than the small-diameter sleeve 102, the bearing 30, and the large-diameter sleeve 104, and examples thereof include nitrile rubber, ethylene propylene rubber, silicone rubber, and fluorine rubber. It is formed from the well-known elastic material. The O-ring 105 is in contact with the entire circumference in the outer circumferential surface of the large-diameter sleeve 104 and the entire circumference in the circumferential direction on the cylinder inner surface of the accommodation block 111.

  A gap corresponding to a part of the thickness of the O-ring 105 is formed between the outer peripheral surface of the large-diameter sleeve 104 and the cylindrical inner surface of the accommodation block 111. The clearance between the outer peripheral surface of the large-diameter sleeve 104 and the inner peripheral surface of the accommodation block 111 is allowed to be elastically deformed by the O-ring 105. The center is allowed to tilt with respect to the center of the containing block 111.

  When the center of the pivoted end 101A deviates from the center of the inner ring 122, such deviation is absorbed as elastic deformation of the O-ring 105, while the pivoted end 101A, the bearing 30, etc. The rotating member continues to function as a rigid body. As a result, the centering function by the O-ring 105 is exhibited between the center of the pivoted end 101 </ b> A and the center of the bearing 30. In particular, when the rotary cathode 12 is installed horizontally and / or the axis becomes longer, the amount of bending of the rotary cathode 12 itself increases and the above-described deviation increases. Accordingly, an increase in load applied to the pivoted support end 101A, the bearing 30, and the like can be suppressed.

  The O-ring 105 is disposed on a plane Cb in which a plurality of rolling elements 124 are arranged, and each of the plurality of rolling elements 124 and the O-ring 105 face each other in the radial direction of the O-ring 105 and the bearing 30. According to such an arrangement of the O-ring 105, it is possible to suppress the amount of elastic deformation in the O-ring 105 from being intensively increased or reduced in a part of the O-ring 105 in the circumferential direction.

  Each of the plurality of rolling elements 124 included in the bearing 30 is pressed toward the outside in the radial direction of the bearing 30 from the inner ring 122 included in the bearing 30, and the diameter of the bearing 30 from the outer ring 123 included in the bearing 30. It is pressed toward the inside of the direction. At this time, if each of the plurality of rolling elements 124 and the O-ring 105 are configured to face each other in the radial direction, friction between the inner ring 122 and the rolling element 124, and the rolling elements 124 and the outer ring 123. Is reduced by the elastic deformation of the O-ring 105.

  By the way, in the configuration of the support block 16 described above, a member having an elastic modulus lower than that of the O-ring 105 is not interposed between the pivoted end 101 </ b> A and the large-diameter sleeve 104. Therefore, the small-diameter sleeve 102, the bearing 30, and the large-diameter sleeve 104 each have a high coupling force such that they cannot rotate individually, It is fixed with high positioning accuracy that cannot be displaced.

  When the tip of the rotary cathode 12 is assembled, the O-ring 105 is fitted on the outer peripheral surface of the large-diameter sleeve 104 thus fixed, and these are accommodated in the accommodation block 111. According to such an assembling mode, loose coupling or individual connection between the supported end 101A and the small diameter sleeve 102, between the small diameter sleeve 102 and the bearing 30, and between the bearing 30 and the large diameter sleeve 104 is possible. Therefore, the rotary cathode 12 can be assembled with high positional accuracy.

As described above, according to the rotary cathode and the sputtering apparatus of the present embodiment, the effects listed below can be obtained.
(1) The deviation between the center of the pivoted end 101 </ b> A and the center of the bearing 30 is absorbed by the elastic deformation of the O-ring 105. Therefore, the load applied to the shaft-supported end 101A and its shaft-supporting portion is suppressed.

  (2) Since the O-ring 105 is positioned between the outer ring 123 of the bearing 30 and the housing block 111, the assembly error caused by the elastic deformation of the O-ring 105 is limited to the error in the position of the bearing 30 with respect to the housing block 111.

  (3) Since the O-ring 105 is positioned between the outer ring 123 of the bearing 30 and the accommodation block 111, the rotational force applied to the bearing 30 is not transmitted to the O-ring 105. Therefore, wear of the O-ring 105 due to the rotation of the pivoted end 101A is suppressed.

  (4) Since the O-ring 105 is positioned outside in the radial direction with respect to the plurality of rolling elements 124, the pressing force against the plurality of rolling elements 124 is relieved, and friction between the rolling elements 124 and the outer ring 123, and rolling Friction between the moving body 124 and the inner ring 122 is suppressed.

(5) Since the target 18 is cooled by the cooling water, the small diameter sleeve 102 for obtaining electrical insulation between the supported end 101A and the bearing 30 is higher than the ceramic material or the metal material. Resins that can easily be processed can be used.
In addition, the said embodiment can also be implemented with the following aspects.

[Elastic member]
The O-ring 105 may be positioned between the outer ring 123 provided in the bearing 30 and the large diameter sleeve 104. At this time, the O-ring 105 may be provided both between the outer ring 123 and the housing block 111 and between the outer ring 123 and the large diameter sleeve 104, or between the outer ring 123 and the large diameter sleeve 104. It may be provided only in between.
The large-diameter sleeve 104 may be omitted, and the O-ring 105 may be in direct contact with the outer ring 123 and the accommodation block 111.

  The O-ring 105 may be positioned between the inner ring 122 provided in the bearing 30 and the outer peripheral surface provided in the pivoted end 101A. At this time, the O-ring 105 may be provided both between the outer ring 123 and the housing block 111 and between the inner ring 122 and the pivoted end 101A, or the inner ring 122 and the pivoted end 101A. It may be provided only between. At this time, the position where the O-ring 105 is disposed may be between the inner ring 122 and the small diameter sleeve 102 as long as it is between the inner ring 122 and the pivoted end 101A. It may be between the shaft support end 101A or both of them. Alternatively, the small diameter sleeve 102 may be omitted, and the O-ring 105 may be in direct contact with the inner ring 122 and the pivoted end 101A.

  The O-ring 105 may be at a position that does not face the rolling element 124 on the outer side in the radial direction. At this time, the O-ring 105 may be provided at both a position that does not face the rolling element 124 on the outer side in the radial direction and a position that faces the rolling element 124 on the outer side in the radial direction. You may provide only in the position which does not oppose the rolling element 124. FIG.

  Note that the smaller the number of O-rings 105, the smaller the force required to displace the bearing 30 relative to the case 16C, and the easier it is to obtain the elastic deformation necessary for alignment. Further, the smaller the number of O-rings 105, the lower the possibility that O-rings 105 having different elastic moduli will be added, and the variation in alignment between the rotary cathodes can be suppressed.

  The elastic member is only required to be positioned between at least one of the outer ring 123 provided in the bearing 30 and the inner surface provided in the case 16C and between the inner ring 122 provided in the bearing 30 and the pivoted end 101A. Such an elastic member may have a shape different from that of the O-ring 105. For example, the elastic member may be a plurality of elastic blocks having a block shape equally distributed along the circumferential direction between the outer ring 123 provided in the bearing 30 and the inner surface provided in the case, or the entire circumferential direction. It may be one annular sheet having a strip shape that spans.

[sleeve]
When the bearing 30 itself has an insulating property, the small diameter sleeve 102 may be a conductive metal member. For example, a resin type bearing or a ceramic type bearing may be used as the bearing 30. While the durability of the resin type bearing and the ceramic type bearing is not high, the bearing 30 can provide insulation, so that the conductivity can be allowed in the small diameter sleeve 102 or the small diameter sleeve 102 itself can be omitted.

[Axis of rotation]
The rotation shaft may be configured to have a supported end 101A that is pivotally supported by the support block. For example, the rotation shaft is a shaft member in which the shaft flange 101B is omitted and the outer diameter is constant along the axial direction D. It may have a cylindrical shape of three or more stages having a step other than the step between the supported end 101A and the shaft flange 101B.
The shaft support structure of the rotating shaft via the elastic member and the bearing is not limited to the shaft supporting structure of the distal end rotating shaft 100, and may be applied to the shaft supporting structure of the proximal rotating shaft, or the shaft of the leading end rotating shaft You may apply to both a support structure and the support structure of a base end rotating shaft.

[Case]
The housing space formed by the case 16C is not limited to the closed space surrounded by the housing block 111 and the fixed block 112, and may be, for example, an open space formed by omitting the block flange 111F. . In short, the accommodation space formed by the case 16C may be a space that accommodates the pivoted end, the bearing, and the elastic member.
[Sputtering equipment]
The target of processing by the sputtering apparatus is not limited to the substrate 14 and may be a film.
The treatment by the sputtering apparatus may be reactive sputtering or non-reactive sputtering. The power source connected to the target 18 may be a DC power source or a high frequency power source.

  DESCRIPTION OF SYMBOLS 11 ... Chamber, 12 ... Rotary cathode, 16 ... Support block, 16C ... Case, 18 ... Target, 28, 29, 30 ... Bearing, 101A ... Supported end, 124 ... Rolling element, 122 ... Inner ring, 123 ... Outer ring, 105 ... O-ring.

Claims (2)

A rotating shaft having a pivoted end;
A target having a cylindrical shape that rotates with the rotation axis;
A support block that pivotally supports the supported end,
The support block is
A case provided with an inner surface that defines an accommodation space for accommodating the pivoted end;
An inner ring that is rotated by receiving the rotational force of the pivoted support end through the pivoted support end in the accommodating space, and is accommodated in the accommodating space in a state in which it cannot rotate around the rotational axis. A bearing comprising an outer ring,
Between the inner surface provided with said outer ring and said casing provided in the said bearing, and, and an elastic member located on at least one between the inner ring and the object to be pivotally supported end provided with the bearing,
The elastic member includes a resin O-ring located between the outer ring and the inner surface,
The bearing includes a plurality of rolling elements sandwiched between the inner ring and the outer ring,
The O-ring has a width smaller than that of the outer ring in the axial direction of the rotating shaft, and is positioned on a plane in which the plurality of rolling elements are arranged so as to face each of the rolling elements in the radial direction of the rotating shaft. ,
It has a cylindrical shape sandwiched between the inner ring provided in the bearing and the outer peripheral surface provided in the supported end, and is made of an insulating resin that connects the inner ring provided in the bearing and the supported end. A sleeve, and
The width of the sleeve is larger than the width of the bearing,
The sleeve is positioned with a gap from the inner surface;
A rotary cathode in which the center of the sleeve is allowed to be inclined with respect to the center of the case by the gap . As the cathode in the sputtering, a sputtering apparatus comprising a rotary cathode according to claim 1.

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