JP6450238B2 - Peeling device - Google Patents

Description

  The present invention relates to a peeling apparatus that peels two plate-like bodies bonded together.

  As a technique for forming a predetermined pattern or thin film on a plate-like body such as a glass substrate or a semiconductor substrate, a technique for transferring a pattern or thin film (hereinafter referred to as “pattern etc.”) carried on another plate-like body onto the substrate. is there. In this technique, after two plates are brought into close contact with each other and a pattern or the like is transferred from one to the other, it is necessary to peel the two plates without damaging the pattern or the like.

  As a technique that can be used for this purpose, for example, there is one described in Patent Document 1. In this technique, a close contact body composed of a first plate body and a second plate body that are in close contact with each other is held in a horizontal posture by the first plate body being sucked and held on a stage. Then, the plurality of peeling means arranged on the second plate-like body sequentially contact the second plate-like body and move in a direction away from the first plate-like body while holding the second plate-like body. The peeling between the first plate-like body and the second plate-like body proceeds in a predetermined peeling direction. At this time, the roller-like contact member moves in the peeling direction while coming into contact with the surface of the second plate-like body, so that the peeling is managed to proceed at a constant speed.

JP 2014-189350 A

  When the size of the plate-like body is increased, further improvement is required in the above-described conventional technology. That is, a large plate-like body is likely to be bent, and a mechanism for carrying in and out of the apparatus is required while maintaining the plate-like body in a horizontal state. In addition, since the roller-shaped contact member becomes longer with an increase in the size of the plate-like body, the pressing force applied to the plate-like body may become uneven due to the deflection of the roller. Such variations in the pressing force can cause damage to the transfer object and poor peeling.

  As described above, in order to perform peeling well even for a large plate-like body, it is necessary to cope with the bending of the plate-like body and the roller-like member. In this respect, there is room for improvement in the above-described conventional technology. It is left.

  This invention is made in view of the said subject, and provides the technique which can perform peeling favorably also about a large sized plate-shaped object in the peeling apparatus which peels the two plate-shaped objects bonded together. For the purpose.

According to one aspect of the present invention, in the peeling apparatus for peeling the first plate-like body and the second plate-like body, whose main surfaces are bonded to each other, the upper surface is a substantially horizontal holding surface in order to achieve the above object. A holding means for holding the first plate-like body placed on the holding surface with the main surface opposite to the second plate-like body facing downward, and an opening provided in the holding surface The first plate-like shape moves between the protruding position where the upper end protrudes above the holding surface and the retracted position where the upper end retracts below the holding surface within the opening. A support member for separating the body from the holding surface and supporting it from below; and holding the second plate-like body to move away from the first plate- like body to move the second plate-like body to the first A peeling means for peeling from the plate-like body, and a main member on the opposite side of the second plate-like body from the first plate-like body. And a restricting means for restricting the progress of peeling of the second plate-shaped member by said peeling means in contact with.

  Here, the restricting means includes a plurality of roller members, each of which abuts on the second plate-like body to form a contact nip with the second plate-like body, and each of the plurality of roller members. A support part that is rotatably supported around an axis of rotation along an axial direction parallel to the holding surface and independent from each other, and the support part is moved in a peeling direction that is parallel to the holding surface and perpendicular to the axial direction. The contact nips formed by each of the roller members are spaced apart from each other in the axial direction, and the positions of the rear end portions in the peeling direction of the contact nips are equal in the peeling direction, The opening portion of the holding surface is provided at a position corresponding to a gap portion between two contact nips adjacent in the axial direction.

  In the invention configured as described above, the peeling is performed by moving the second plate member in the direction of separating the second plate member from the first plate member held on the holding surface. The contact nip formed by the roller member contacting the second plate-like body regulates the progress of peeling, and the contact nip moves in the peeling direction, whereby the progress of peeling is managed. Thereby, peeling can be favorably advanced.

  When there is a single roller member for restricting the progress of peeling, if the size of the second plate-like body, particularly the length in the axial direction of the roller, increases, the axial variation of the roller diameter and the deflection during operation will occur. Since it becomes easy to generate | occur | produce, there exists a possibility that the contact pressure with respect to the 2nd plate-shaped body in a contact nip may vary to an axial direction. If the contact pressure varies in this manner, the function of regulating peeling differs depending on the position in the axial direction, so that the progress of peeling cannot be properly managed, which may cause peeling failure. Moreover, in order to manufacture a long roller member with high processing accuracy, a higher manufacturing technique is required, resulting in an increase in apparatus cost.

  On the other hand, in the present invention, a plurality of roller members are arranged in the axial direction, and each roller member is supported independently of each other. Therefore, the length of each roller member in the axial direction may be shorter, and fluctuations and deflections of the roller diameter can be reduced. Thereby, the contact pressure in the contact nip can be made uniform, and the peeling can be favorably progressed. Further, the manufacturing cost can be reduced as compared with the case of manufacturing a long roller.

  Moreover, in this invention, the supporting member is provided in the opening part provided in the holding surface of a holding means. The support member supports the first plate-like body in a state of being separated from the holding surface. Thereby, for example, when the bonded first plate and second plate are placed on the holding surface or when the peeled first plate is carried out of the holding surface, the first plate The body can be prevented from being bent and can be easily accessed from the outside.

  In the part corresponding to the periphery of the opening of the holding surface in the first plate-like body placed on the holding surface, when the pressure from the roller member is applied, a high stress acts locally on the part, and the first plate The body may be damaged. Further, such stress concentration may cause separation failure. On the other hand, in the present invention, since the opening is provided at a position corresponding to the gap between the plurality of contact nips formed by the plurality of roller members, the first and second plate-like bodies are the roller members immediately above the opening. No pressure from Thereby, damage to the plate-like body and peeling failure due to pressing on the opening can be prevented.

  As described above, in the present invention, a plurality of roller members arranged in the axial direction contact the second plate-like body to form a contact nip, and a portion corresponding to the gap between the contact nips on the holding surface of the holding unit A support member is provided that protrudes from the opening provided in the first support member and supports the first plate-like body. For this reason, in this invention, even when the size of a 1st and 2nd plate-shaped object becomes large sized, these peeling can be performed favorably.

It is a perspective view which shows one Embodiment of the peeling apparatus concerning this invention. It is a perspective view which shows the main structures of this peeling apparatus. It is a figure which shows the structure of a roller unit. It is sectional drawing which shows the structural example of a lifter mechanism. It is a block diagram which shows the electric constitution of this peeling apparatus. It is a figure which shows operation | movement of each part in the process of peeling operation | movement. It is a figure which shows the contact state of a roller unit and a workpiece | work. It is the figure which compared the case where a peeling roller is single and a plurality of cases. It is a figure which shows the positional relationship of the opening part on a stage, and a peeling roller. It is a figure which shows the positional relationship of a stage and the workpiece | work mounted on this. It is a figure which shows the modification of a peeling apparatus. It is a figure which shows the example of a combination of the peeling roller from which a roller diameter differs.

  FIG. 1 is a perspective view showing an embodiment of a peeling apparatus according to the present invention. In order to uniformly indicate directions in the following drawings, XYZ orthogonal coordinate axes are set as shown in the lower right of FIG. Here, the XY plane represents a horizontal plane and the Z axis represents a vertical axis. More specifically, the (+ Z) direction represents a vertically upward direction.

  This peeling apparatus 1 is an apparatus for peeling two plate-like bodies carried in with the main surfaces in close contact with each other. For example, it is used in a part of a pattern forming process for forming a predetermined pattern on the surface of a substrate such as a glass substrate or a semiconductor substrate. More specifically, in this pattern formation process, a pattern forming material is uniformly applied to a blanket surface as a carrier that temporarily carries a pattern to be transferred to a substrate, which is a transfer target (application process), and a pattern is formed. The coating layer is patterned by pressing a plate whose surface is processed according to the shape against the coating layer on the blanket (patterning step), and the blanket thus formed is brought into close contact with the substrate (transfer step), thereby forming a pattern. Is finally transferred from the blanket to the substrate.

  At this time, the apparatus can be suitably applied for the purpose of separating the plate and the blanket that are in close contact in the patterning step, or the substrate and the blanket that is in close contact in the transfer step. Of course, it may be used for both of these, and may be used for other purposes. For example, the present invention can also be applied to a peeling process when transferring a thin film carried on a carrier to a substrate.

  This peeling apparatus 1 has a structure in which a stage block 3 and an upper suction block 5 are respectively fixed on a main frame 11 attached to a housing. In FIG. 1, the housing is not shown to show the internal structure of the apparatus. In addition to these blocks, the peeling apparatus 1 includes a control unit 70 (FIG. 5).

  The stage block 3 has a stage 30 for placing a close contact body (hereinafter referred to as “work”) in which a plate or a substrate and a blanket are in close contact, and the stage 30 is a flat surface whose upper surface is substantially horizontal. The horizontal stage part 31 which became and the taper stage part 32 where the upper surface became a plane which has the inclination of several degrees (for example, about 2 degree | times) with respect to a horizontal surface are provided. An initial peeling unit 33 is provided on the taper stage portion 32 side of the stage 30, that is, in the vicinity of the end portion on the (−Y) side. Further, the roller unit 4 is provided so as to straddle the horizontal stage portion 31.

  On the other hand, the upper suction block 5 is erected from the main frame 11 and has a support frame 50 provided so as to cover the upper part of the stage block 3, a first suction unit 51 attached to the support frame 50, and a second An adsorption unit 52, a third adsorption unit 53, and a fourth adsorption unit 54 are provided. These adsorption units 51 to 54 are arranged in order in the (+ Y) direction. Note that the number of adsorption units is not limited to the above, but is arbitrary.

  FIG. 2 is a perspective view showing the main configuration of the peeling apparatus. More specifically, FIG. 2 shows the structure of the stage 30, the roller unit 4, and the second suction unit 52 among the components of the peeling apparatus 1. The stage 30 includes a horizontal stage portion 31 whose upper surface 310 is a substantially horizontal surface and a tapered stage portion 32 whose upper surface 320 is a tapered surface. The upper surface 310 of the horizontal stage unit 31 has a plane size that is slightly larger than the plane size of the workpiece to be placed.

  The tapered stage portion 32 is provided in close contact with the (−Y) side end portion of the horizontal stage portion 31, and the upper surface 320 has a horizontal surface 321 and a tapered surface 322. More specifically, a portion of the upper surface 320 of the taper stage portion 32 that is in contact with the horizontal stage portion 31 is a horizontal surface 321 that is located at the same height (Z-direction position) as the upper surface 310 of the horizontal stage portion 31. On the other hand, on the (−Y) direction side with respect to the horizontal plane 321, the upper surface 320 of the tapered stage portion 32 descends downward, that is, recedes in the (−Z) direction as it moves away from the horizontal stage portion 31 in the (−Y) direction. A tapered surface 322 having Therefore, in the entire stage 30, the horizontal surface 321 of the upper surface 310 of the horizontal stage portion 31 and the horizontal surface 321 of the upper surface 320 of the tapered stage portion 32 continuously form an integral horizontal surface, and the (−Y) side end of the horizontal surface. A tapered surface 322 is connected to the portion. The ridge line portion E where the horizontal plane 321 and the tapered surface 322 are connected has a linear shape extending in the X direction.

  A lattice-like groove is formed on the upper surface 310 of the horizontal stage portion 31. More specifically, a lattice-like groove 311 is provided at the center of the upper surface 310 of the horizontal stage portion 31, and the groove 312 surrounds the region where the groove 311 is formed. It is provided at the periphery. These grooves 311 and 312 are connected to a later-described negative pressure supply unit 74 (FIG. 5) via a control valve, and suction and hold a workpiece placed on the stage 30 by supplying a negative pressure. It functions as an adsorption groove. The two types of grooves 311 and 312 are not connected on the stage, and are connected to the negative pressure supply unit 74 through control valves independent of each other. In addition to strong adsorption using both grooves, Adsorption using only one groove is also possible.

  As shown in FIG. 1, an initial peeling unit 33 is disposed near the (−Y) side end of the stage 30. The initial peeling unit 33 has a bar-shaped pressing member 331 extending in the X direction above the taper stage portion 32, and the pressing member 331 is supported by a support arm 332. The support arm 332 is attached to the column member 334 via a guide rail 333 extending in the vertical direction, and the support arm 332 moves up and down with respect to the column member 334 by the operation of the lifting mechanism 335. The column member 334 is supported by a base portion 336 attached to the main frame 11, but the position adjustment mechanism 337 can adjust the position in the Y direction of the column member 334 on the base portion 336 within a predetermined range. .

  As will be described later, in the state where the workpiece is placed at a predetermined position on the stage upper surface 310, the (−Y) side end portion of the workpiece projects above the taper stage portion 32. In response to a control command from the control unit 70, the support arm 332 moves downward, and the lower end of the pressing member 331 contacts the work and pushes it downward. This creates a trigger for exfoliation.

  The roller unit 4 is provided so as to straddle the stage 30 configured as described above. Specifically, a pair of guide rails 351 and 352 extend in the Y direction along both ends in the X direction of the horizontal stage portion 31, and these guide rails 351 and 352 are fixed to the main frame 11. ing. The roller unit 4 is slidably attached to the guide rails 351 and 352.

  The roller unit 4 includes sliders 41 and 42 slidably engaged with the guide rails 351 and 352, respectively, and extends in the X direction across the upper portion of the stage 30 so as to connect the sliders 41 and 42. The lower angle 43 is provided. An upper angle 45 is attached to the lower angle 43 via an appropriate lifting mechanism 44 so as to be movable up and down. A plurality of, in this example, three roller assemblies 40 are attached to the upper angle 45.

  FIG. 3 shows the structure of the roller unit. More specifically, FIG. 3A is an exploded perspective view showing the structure of the main part of the roller unit 4, and FIG. 3B is a view of the main part of the roller unit 4 viewed from the X direction. Each of the roller assemblies 40 includes a cylindrical peeling roller 401 whose longitudinal direction is the X direction, and a roller support portion 402 that rotatably supports the peeling roller 401 around a rotation axis along the X direction.

  The peeling roller 401 has a structure in which the surface of a metal core formed of a metal material such as iron, stainless steel, aluminum alloy, or brass is covered with a surface layer made of an elastic material such as rubber. Have. The roller support unit 402 rotatably supports the peeling roller 401, and the peeling roller 401 freely rotates around the rotation axis.

  Each roller assembly 40 is fixed to the upper angle 45 by an appropriate fixing member, for example, a screw 46. The upper angle 45 is a member having a substantially L-shaped cross section perpendicular to the X direction and extending in the X direction. The upper angle 45 is provided with a plurality of through holes 451 whose longitudinal direction is the Y direction, and a screw 46 is inserted into each of the through holes 451. Two through holes 451 are provided for one roller assembly 40 corresponding to both ends of the roller support portion 402 in the X direction.

  Each roller assembly 40 is fixed to the upper angle 45 by two screws 46 respectively. As shown in FIG. 3B, a positioning reference surface 452 finished in a vertical plane is provided below the upper angle 45. The (+ Y) side end surface of the roller support portion 402 is abutted against the positioning reference surface 452, so that the positions of the roller assemblies 40 are aligned. Since the through hole 451 is a long hole, the mounting position of each roller assembly 40 to the upper angle 45 can be adjusted within a predetermined range around the Y direction and the Z axis. Further, a separately prepared shim (spacer) 403 is sandwiched between the upper angle 45 and the roller support portion 402 as necessary, so that the Z-direction position of the roller assembly 40 is adjusted.

  Each roller assembly 40 has the same structure, but by adopting the above structure, it is possible to correct a positional shift caused by a variation in finished dimensions by an adjustment operation. When the roller assembly 40 is assembled, the position adjustment function is used to make adjustments in advance so that the rotation axes of the peeling rollers 401 coincide with each other.

  In this example, the three roller assemblies 40 all have the same structure, and the size, that is, the diameter and the length in the X direction of the peeling roller 401 are equal to each other. The rotation axes of the plurality of peeling rollers 401 coincide with each other. However, as will be described later, a plurality of peeling rollers having different sizes and rotation axes can also be used.

  Returning to FIG. 2, the description will be continued. When the upper angle 45 is lowered downward, that is, in the (−Z) direction by the elevating mechanism 44, the lower surface of the peeling roller 401 comes into contact with the upper surface of the work placed on the stage 30. On the other hand, in a state where the upper angle 45 is positioned upward, that is, in a position in the (+ Z) direction by the elevating mechanism 44, the peeling roller 401 is separated upward from the upper surface of the workpiece.

  The roller unit 4 is movable in the Y direction by a motor 353 attached to the main frame 11. More specifically, the lower angle 43 is connected to, for example, a ball screw mechanism 354 as a conversion mechanism that converts the rotational motion of the motor 353 into linear motion, and when the motor 353 rotates, the lower angle 43 moves to the guide rails 351, 351. It moves in the Y direction along 352, and thereby the roller unit 4 moves in the Y direction. The movable range of the peeling roller 401 accompanying the movement of the roller unit 4 is the vicinity of the (−Y) side end portion of the horizontal stage portion 31 in the (−Y) direction, and the horizontal stage portion 31 ( The position is set to the outside of the (+ Y) side end, that is, the position further advanced to the (+ Y) side.

  Next, the configuration of the second adsorption unit 52 will be described. The first to fourth adsorption units 51 to 54 all have the same structure, and here, the structure of the second adsorption unit 52 will be described as a representative. The second suction unit 52 includes a beam member 521 that extends in the X direction and is fixed to the support frame 50. The beam member 521 has a pair of vertical downwards, that is, a (−Z) direction. The column members 522 and 523 are attached at different positions in the X direction. A plate member 524 is attached to the column members 522 and 523 via a guide rail that is hidden in the drawing so as to be lifted and lowered. The plate member 524 is lifted and lowered by a lifting mechanism 525 including a motor and a conversion mechanism (for example, a ball screw mechanism). Driven.

  A bar-shaped pad support member 526 extending in the X direction is attached to the lower portion of the plate member 524, and a plurality of suction pads 527 are arranged at equal intervals in the X direction on the lower surface of the pad support member 526. FIG. 2 shows a state where the second suction unit 52 is moved upward from the actual position. However, when the plate member 524 is moved downward by the lifting mechanism 525, the suction pad 527 is moved to the horizontal stage portion 31. It can be lowered to a position very close to the upper surface 310, and comes into contact with the upper surface of the workpiece when the workpiece is placed on the stage 30. A negative pressure from a negative pressure supply unit 74 described later is applied to each suction pad 527, and the upper surface of the workpiece is sucked and held.

  The horizontal stage portion 31 and the taper stage portion 32 of the stage 30 are formed separately and can be separated. The taper stage 32 can be moved toward and away from the horizontal stage 31 in the horizontal direction by a horizontal movement mechanism (not shown). Since the taper stage portion 32 is in close contact with the side surface of the horizontal stage portion 31, the horizontal stage portion 31 and the taper stage portion 32 integrally function as the stage 30.

  In addition to the suction grooves 311 and 312 described above, openings 313 and 314 having different shapes are provided on the upper surface 310 of the horizontal stage portion 31. More specifically, a plurality of first openings 313 having an oval shape are dispersedly arranged at a plurality of flat portions between the suction grooves 311 and the suction grooves 312 on the upper surface 310 of the horizontal stage portion 31. . In addition, substantially circular second openings 314 are provided at four locations spaced apart from each other at the center of the upper surface 310 of the horizontal stage portion 31. Neither the first opening 313 nor the second opening 314 is connected to the suction grooves 311 and 312 on the upper surface 310 of the horizontal stage portion 31. For this reason, the suction groove 311 is divided around the second opening 314. A lifter mechanism is disposed in the openings 313 and 314.

  FIG. 4 is a cross-sectional view showing a configuration example of the lifter mechanism. Here, the structure of the lifter mechanism 36 disposed in the second opening 314 will be described as an example. However, the lifter mechanism disposed in the first opening 313 can also be changed by appropriately changing the shape of the lifter pin. It is possible to apply the same structure. The lifter mechanism 36 includes a lifter pin 361 inserted through a second opening 314 provided in the horizontal stage unit 31, a housing 362 attached to the bottom surface of the horizontal stage unit 31, and a lifter pin 361 provided in the housing 362 for raising and lowering the lifter pin 361. And a driving unit 363 to be operated. As the driving unit 363, various actuators such as an air cylinder, a solenoid, and a piezoelectric actuator can be used.

  When the drive unit 363 is operated in accordance with a control command from the control unit 70, the lifter pin 361 has its upper end retracted downward from the stage upper surface 310 and the upper end is the stage upper surface. It moves up and down between the protruding positions shown in FIG. As shown in FIG. 3C, the plurality of lifter pins 361 are positioned at the protruding positions, so that the work WK (described later) can be supported in a state of being separated from the stage upper surface 310. When the upper ends of the plurality of lifter pins 361 are positioned at the same height, the workpiece WK can be supported in a horizontal posture. In order to hold the workpiece more reliably, each lifter pin 361 may have a suction holding function.

  FIG. 5 is a block diagram showing the electrical configuration of the peeling apparatus. Each part of the apparatus is controlled by a control unit 70. The control unit 70 is supplied to a CPU 701 that controls the operation of the entire apparatus, a motor control unit 702 that controls motors provided in each unit, a valve control unit 703 that controls valves provided in each unit, and each unit. A negative pressure control unit 704 for controlling the negative pressure, and a user interface (UI) unit 705 having a function of receiving an operation input from the user and notifying the user of the state of the apparatus.

  The motor control unit 702 includes motors such as a motor 353 and lift mechanisms 335, 44, and 365 provided in the stage block 3, a horizontal movement mechanism, and a lift mechanism 525 provided in each suction unit 51 to 54 of the upper suction block 5. Drive control of the group. In addition, although the motor is typically described here as the drive source of each movable part, it is not limited to this, and various actuators, such as an air cylinder, a solenoid, and a piezoelectric element, are driven according to the use. It may be used as a source. The negative pressure control unit 704 controls the magnitude of the negative pressure generated by the negative pressure supply unit 74 and supplied to each unit as necessary. In addition, when the negative pressure supplied from the outside, such as factory power, can be used, the peeling device may not include the negative pressure supply unit.

  The valve control unit 703 is provided on a piping path connected to the suction grooves 311 and 312 provided in the horizontal stage unit 31 from the negative pressure supply unit 74, and individually supplies a predetermined negative pressure to these suction grooves. Valve group V3, a valve group V5 for supplying a predetermined negative pressure to each suction pad 517, etc. provided on a piping path connected from the negative pressure supply unit 74 to the suction pad 517 of each suction unit 51-54, etc. To control.

  Next, operation | movement of the peeling apparatus 1 comprised as mentioned above is demonstrated. The peeling operation performed by the peeling device 1 is basically the same as the peeling operation in the peeling device described in Patent Document 1 (Japanese Patent Laid-Open No. 2014-189350). Therefore, a detailed description of the peeling operation in the peeling apparatus 1 is omitted, and here, the movement of each part in the peeling operation will be briefly described.

  FIG. 6 is a diagram showing the operation of each part in the process of the peeling operation. Here, a blanket BL as a pattern carrier on which a predetermined pattern is formed in advance by a pattern forming material and a substrate SB as a transfer body onto which the pattern is transferred are bonded to each other through a pattern. An operation of separating the blanket BL and the substrate SB from the work WK as the object work WK will be described. The peeling operation is executed by the CPU 701 executing a predetermined control program and the control unit 70 controlling each part of the apparatus.

  First, the workpiece WK is carried into the peeling apparatus 1 from the outside and placed at a predetermined position on the stage 30. At this time, the lifter pins disposed in the openings 313 and 314 are positioned at the projecting position projecting upward from the stage upper surface 310, thereby facilitating the delivery of the work WK from the external transfer device. After receiving the work WK, the lifter pin is lowered to the retracted position, whereby the work WK is placed on the stage upper surface 310.

  In an initial state immediately after the work WK is carried in, the work WK is sucked and held by one or both of the suction grooves 311 and 312, and the pressing member 331 of the initial peeling unit 33, the peeling roller 401 of the roller unit 4, the first to first The suction pads 517 to 547 of the four suction units 51 to 54 are all separated from the work WK. Each of the suction units 51 to 54 is disposed with a sufficient gap between the suction pads 517 to 547 and the substrate SB so as not to interfere with the roller unit 4 traveling in the Y direction. The peeling roller 401 is in a state of being separated from the work WK at a position slightly closer to the (+ Y) side than the suction pad 517 of the first suction unit 51. The peeling operation is executed from this state.

  In the peeling operation, the first suction unit 51 is first lowered, and the suction pad 517 supplied with negative pressure comes into contact with the upper surface of the (−Y) side end of the substrate SB to suck and hold the substrate SB. Further, the peeling roller 401 descends and comes into contact with the upper surface of the substrate SB. From this state, as shown in FIG. 6A, the pressing member 331 descends and pushes down the end of the blanket BL. The end of the blanket BL protrudes above the taper stage 32, and there is a gap between its lower surface and the upper surface 320 of the taper stage 32. Therefore, when the pressing member 331 presses the end of the blanket BL downward, the end of the blanket BL is bent downward along the tapered surface of the taper stage portion 32. As a result, the end of the substrate SB sucked and held by the first suction unit 51 and the blanket BL are separated from each other and peeling is started.

  Subsequently, as shown in FIG. 6B, the first suction unit 51 starts to rise, and the peeling roller 401 moves in the (+ Y) direction while rolling against the surface of the substrate SB. As a result, the separation between the substrate SB and the blanket BL proceeds in the (+ Y) direction. However, since the separation roller 401 is in contact, the separation proceeds beyond the region where the separation roller 401 contacts the substrate SB. Never do. By moving the peeling roller 401 in the (+ Y) direction at a constant speed while contacting the substrate SB, the progressing speed of the peeling can be kept constant.

  The suction units 52, 53, and 54 are sequentially lowered with respect to the substrate SB after the separation roller 401 has passed, and abut against the substrate SB after separation from the blanket BL and hold it. Specifically, as shown in FIG. 6C, the second suction unit 52 starts to descend and proceeds toward the substrate SB when the peeling roller 401 passes through a position immediately below the second suction unit 52. When the suction pad 527 comes into contact with the upper surface of the substrate SB, the second suction unit 52 starts to hold the substrate SB by the negative pressure supplied from the negative pressure supply unit 74.

  The second suction unit 52 starts to rise when the suction holding of the substrate SB is started. Thereafter, the substrate SB is held by the first suction unit 51 and the second suction unit 52. Thereby, the board | substrate SB which peeling with the blanket BL advances is hold | maintained more reliably, and the problem that the board | substrate SB bends downward and re-contacts with the blanket BL, or falls from the suction pad 517 is prevented. Moreover, the effect which advances peeling favorably is also acquired by maintaining the angle of board | substrate SB and blanket BL in the peeling boundary line vicinity appropriately.

  Similarly, the other suction units 53 and 54 start descending when the peeling roller 401 passes below the suction unit, and start sucking and holding when the suction pad comes into contact with the substrate SB, thereby raising the substrate SB. Pull up upward. Each suction unit stops when it rises from the stage 30 to a predetermined height.

  As shown in FIG. 6 (d), the most downstream (ie, the (+ Y)) suction unit 54 in the peeling progress direction holds the substrate SB and moves up to a predetermined position, so that the substrate SB and the blanket BL are separated. Complete separation and stripping is complete. When the peeling roller 401 and the pressing member 331 are retracted to a position separated from both the substrate SB and the blanket BL, the substrate SB and the blanket BL separated from each other can be carried out. At this time, the lifter pin is positioned again at the protruding position, so that the blanket BL remaining on the stage 30 is supported while being separated from the stage upper surface 310. Thereby, delivery of the blanket BL to an external conveyance apparatus becomes easy. Thus, the substrate SB and the blanket BL are carried out, and the peeling operation is completed.

  FIG. 7 is a diagram showing a contact state between the roller unit and the workpiece. When the roller unit 4 is lowered while the workpiece WK is placed on the stage 30, the three peeling rollers 401 come into contact with the upper surface of the substrate SB to form a contact nip. As shown in FIG. 7, three contact nips formed between the three peeling rollers 401 and the upper surface of the substrate SB are denoted by reference numerals N1, N2, and N3 in order from the (−X) side to the (+ X) side. . The contact nips N1, N2, and N3 are separated from each other in the X direction. That is, the gap G12 between the contact nips N1 and N2 and the gap G23 between the contact nips N2 and N3 in the X direction are both greater than zero.

  In the Y direction, as indicated by dotted lines in the figure, the positions of the (−Y) side end portions of the contact nips N1 to N3 extending in the X direction are the same. As the roller unit 4 moves, the contact nips N1 to N3 move in the (+ Y) direction, and the (−Y) side end of the contact nips N1 to N3 corresponds to the rear end in the movement direction. Since the peeling of the substrate SB from the blanket BL proceeds in the (+ Y) direction, the (−Y) side end portions of the contact nips N1 to N3 can also be referred to as rear end portions in the peeling progress direction.

  On the upstream side in the peeling progress direction from the rear end portions of the contact nips N1 to N3, that is, on the (−Y) side, the substrate SB is already peeled off by the suction unit 51 or the like and is separated from the blanket BL. On the other hand, on the downstream side, that is, on the (+ Y) side, the progress of peeling is regulated by the peeling roller 401, and the substrate SB and the blanket BL are still in close contact with each other. Therefore, the rear end portions of the contact nips N1 to N3 hit the boundary between the peeled area and the non-peeled area.

  The rear end portions of the three contact nips N1 to N3 have the same Y-direction position, and the contact nips N1 to N3 move in the (+ Y) direction while maintaining this relationship. The boundary line (hereinafter referred to as “peel line”) proceeds in the (+ Y) direction while keeping a straight line extending in the X direction. Thereby, it is possible to reduce the influence of the stress concentration caused by the local change in the progressing speed of the peeling, and to make the peeling proceed well. In order to prevent the peeling line from being disturbed, the gaps G12 and G23 between the contact nips are preferably narrowed as far as possible in terms of structure. For example, when the substrate SB is relatively rigid like a glass substrate, it has been confirmed by experiments of the present inventor that there is no problem in peeling quality even if the gap between the peeling rollers is about 10 millimeters.

  From the viewpoint of forming a straight peeling line, it is ideal to press the (−X) side end portion of the substrate SB from the (+ X) side end portion with a single roller member. However, this is not always easy in increasing the substrate size.

  FIG. 8 is a diagram comparing the case of a single peeling roller and the case of a plurality of peeling rollers. When the peeling roller is a single member, as shown in FIG. 8A, the length of the roller member R must be at least longer than the length of the substrate SB in the X direction. In recent years, the length may be 1 meter or more, and it has become difficult to manufacture such a long and sufficient roller member with high dimensional accuracy. Although it is conceivable to increase the roller diameter, the suction pad 517 or the like cannot be brought into contact with the substrate SB in the vicinity of the contact nip, which may cause a problem in peeling quality. In addition, the manufacturing cost increases due to the increase in rigidity and size of the surrounding members accompanying an increase in roller mass.

  Further, as shown in FIG. 8B, when the long roller member R is pressed against the substrate SB, the roller member R bends, and a sufficient pressing force acts on the substrate SB in the vicinity of the end near the bearing. However, a sufficient pressing force may not be applied particularly at the central portion. Such uneven pressing can cause peeling failure. Although it is possible to suppress bending by bringing the backup roller into contact with the roller member R, particularly when the roller surface is made of an elastic material, the effect of backup cannot be sufficiently obtained due to elastic deformation of the surface layer. Sometimes.

  In view of such a problem, in the roller unit 4 of this embodiment, as shown in FIG. 8C, the separation roller 401 is divided into a plurality of pieces in the X direction, and these positions are aligned and moved integrally. By doing so, the above-described problem of the single roller is solved while obtaining the same peeling restriction effect as that of the single roller member. That is, by shortening the length in the X direction of each peeling roller 401, it is possible to suppress a variation in dimensions and to prevent the occurrence of bending.

  Further, even if the individual peeling rollers 401 are short, in a structure in which they are supported by a single support shaft, the unevenness of the pressing force may still be caused by the bending of the support shaft. In this embodiment, since each peeling roller 401 is independently supported by the roller support portion 402, fluctuations in both end positions of each peeling roller 401 are suppressed, and the pressing force to the substrate SB is made more uniform. Can do.

  Furthermore, by dividing the peeling roller, there is an effect that the substrate SB can be pressed while avoiding the opening provided in the stage. That is, in this embodiment, as shown in FIG. 8C, the dimension of the peeling roller 401 is such that the gap between two adjacent peeling rollers is located above the opening 314 provided in the stage upper surface 310. And the position of the opening 314 are set.

  When the workpiece becomes large, it becomes difficult to maintain the workpiece in a horizontal posture when the workpiece is carried into and out of the stage 30. In this embodiment, the lifter pins protrude from the openings 313 and 314 distributed on the stage upper surface 310 to support the work from below, thereby suppressing the bending of the work and maintaining the horizontal posture. However, in terms of pressing by the peeling roller, it is preferable that the stage is as flat as possible and has no opening.

  FIG. 9 is a diagram showing the positional relationship between the opening on the stage and the peeling roller. As shown in FIG. 9A, when the peeling roller is a single roller member R, or even if the peeling roller is divided into a plurality of parts, one roller member R is arranged above the opening 314. At this time, the work WK (substrate SB and blanket BL) pressed by the roller member R is pushed into the opening 314 at the position of the opening 314. At this time, stress concentration occurs on the substrate SB and the blanket BL, particularly at a position corresponding to the peripheral edge of the opening 314, which may cause damage to the substrate SB or the blanket BL. Further, when a pattern is carried between the substrate SB and the blanket BL, the pattern may be broken at the position.

  On the other hand, in this embodiment, as shown in FIG. 9B, the gap portion between the two peeling rollers 401 is positioned above the opening 314 of the horizontal stage portion 31. The gap G12 (or G23) between them is larger than the diameter of the opening 314 (more precisely, the opening diameter in the X direction) Dx. For this reason, it is avoided that the workpiece | work WK is pressed by the peeling roller 401 above the opening 314 or its peripheral part, and stress concentration as described above does not occur.

  As described above, the gap between the opening on the stage and the peeling roller is desirably as small as possible from the viewpoint of peeling quality. Therefore, it is preferable to make the lifter pin thinner and the opening smaller as long as the strength capable of supporting the workpiece can be ensured. It is also preferable to make the gap between the peeling rollers as small as possible.

  FIG. 10 is a diagram showing the positional relationship between the stage and the workpiece placed on the stage. In the work WK in which the substrate SB and the blanket BL are in close contact, the blanket BL has a larger planar size than the substrate SB. Therefore, the entire surface of the substrate SB faces the blanket BL, while the blanket BL has a central portion facing the substrate SB, but the peripheral portion is a blank portion that does not face the substrate SB. Yes. An effective area AR that functions as a device by effectively transferring the pattern is set in the central portion of the surface area of the substrate SB except the peripheral edge.

  The workpiece WK is placed on the stage 30 so that the entire effective area AR of the substrate SB is positioned on the upper surface 310 of the horizontal stage unit 31. On the other hand, on the outside of the effective area AR, the (−Y) side end of the substrate SB is positioned at a position slightly protruding to the (−Y) side from the ridge line portion E at the boundary between the horizontal plane and the tapered surface of the stage 30. Is done.

  In the figure, a region R1 with dots indicates a region where the blanket BL is adsorbed by the adsorption groove 311. The region R1 sucked by the suction groove 311 covers the entire effective region AR. A region R2 indicates a region where the blanket BL is sucked by the suction groove 312. The suction groove 312 sucks the blanket BL outside the effective area AR. Therefore, for example, in the aspect in which the blanket BL is sucked only by the suction groove 312, it is avoided that the pattern in the effective area AR is affected by the suction.

  A region R3 indicates a region where the pressing member 331 of the initial peeling unit 33 contacts the substrate SB at the start of peeling. In this region R3, the blanket BL is pushed down by the pressing member 331, that is, in the (−Z) direction, so that peeling is started between the substrate SB and the blanket BL.

  A region R4 indicates a region of the upper surface of the substrate SB that is sucked by the suction pad 517 of the suction unit 51. The substrate SB is sucked and held by the suction unit 51 in the region R4 and pulled upward, that is, in the (+ Z) direction, so that the substrate SB is separated from the blanket BL and peeling proceeds.

  A region R5 indicates the opening position of the opening 314 on the stage. The opening 314 is provided in the effective area AR of the substrate SB in order to support the center portion of the work WK with the lifter pins 361. For this reason, when the workpiece WK is pressed by the peeling roller 401 above the opening 314, the pattern may be damaged. In this embodiment, the region R5 corresponding to the opening 314 is set to a gap portion generated in the X direction between the contact nips N1, N2, and N3 formed by the three peeling rollers 401 with the substrate SB. . In other words, the opening 314 is provided below the portion of the effective area AR of the substrate SB that does not contact any of the three peeling rollers 401.

  In this example, a total of four regions R5 corresponding to the openings 314 are provided, two at different positions in the X direction and the Y direction. The two regions R5 having different positions in the X direction are dispersedly arranged in the gap portions between the contact nips N1 and N2 and between the contact nips N2 and N3. Further, the two regions R5 having different positions in the Y direction are at the same position in the X direction, and both are in positions corresponding to the gap portion of the contact nip. With this arrangement, all the four regions R5 are free from pressing by the peeling roller 401. Thereby, pattern tearing or the like at the opening 314 can be prevented.

  On the other hand, from the viewpoint of favoring the peeling, it is desirable that the contact nip be formed as continuously as possible from the (−X) side end of the substrate SB to the (+ X) side end. Therefore, only a minimum gap for avoiding the opening 314 is provided at the position of the opening 314 in the X direction, and a continuous contact nip is formed in the other regions. That is, when considering a virtual band-shaped region having substantially the same width as the X-direction length of the opening 314 and extending in the Y direction including the position of the opening 314, a partial region obtained by dividing the upper surface of the substrate SB by the band-shaped region. It is preferable that one peeling roller 401 is in contact with each of the two, and it is more preferable that the length of each peeling roller 401 in the X direction is as close as possible to the width of the corresponding partial region.

  As shown in FIG. 10, in this example, the region other than the thin strip-shaped region including the region R5 corresponding to the opening 314 on the upper surface of the substrate SB is any of the contact nips N1 to N3 formed by the three peeling rollers 401. Will pass through and will be pressed by the peeling roller 401. By providing a plurality of openings 314 in one belt-like region, it is possible to increase the number of lifter pins disposed without increasing the area of the substrate SB that is not pressed by the peeling roller 401.

  A region R6 indicates a lower surface region of the blanket BL with which a lifter pin disposed in the opening 313 on the stage abuts. The lifter pin is in contact with the lower surface of the blanket BL in a region of the work WK where the substrate SB and the blanket BL overlap and outside the effective region AR. Thereby, it is possible to prevent the pressing force from being applied to the pattern or the like in the effective area AR during the support. Further, since the workpiece WK is supported by the rigidity of the substrate SB and the blanket BL, even a large and heavy workpiece WK can be reliably supported.

  As described above, in this embodiment, while avoiding the pressing at the opening 314, the widest possible range of the substrate SB is pressed by the peeling roller 401 and the peeling progresses favorably, and the work is provided with a plurality of lifter pins 361. From the viewpoint of maintaining the horizontal posture of WK, the arrangement and dimensions of each part are determined so as to achieve both.

  As described above, in this embodiment, the blanket BL is sucked and held by the stage 30 so that the blanket BL and the substrate SB are bonded to each other, and the suction unit 51 and the like hold the substrate SB. It moves upward, that is, in a direction away from the blanket BL. At this time, the peeling roller 401 contacts the substrate SB and moves in the peeling direction, that is, the (+ Y) direction in conjunction with the movement of the suction unit 51 and the like, thereby restricting the progress of peeling.

  A plurality of peeling rollers 401 are arranged in the X direction orthogonal to the peeling direction, and these move integrally in the peeling direction, so that the peeling line at the boundary between the peeled area and the non-peeled area is kept linear. While proceeding in the peeling direction. By doing so, it is possible to suppress peeling failure caused by locally changing the peeling progress speed. When the peeling roller is a single roller member, there is a problem that the pressing force becomes non-uniform due to the bending of the roller and a problem that the manufacturing cost of the roller increases, but it is divided into a plurality of peeling rollers 401. By doing so, such a problem can be avoided.

  Further, in this embodiment, in order to hold the workpiece WK in the horizontal posture in the vicinity of the stage 30, the lifter pins 361 project from the upper surface 310 of the stage to support the workpiece WK from the lower surface. In order to dispose the lifter pins 361, an opening 314 is provided in the stage upper surface 310. The opening 314 is provided at a position corresponding to a gap portion of the contact nips N <b> 1 to N <b> 3 formed by the plurality of peeling rollers 401 on the stage upper surface 310. Therefore, the workpiece WK is not pressed by the peeling roller 401 above the opening 314, and stress concentration occurs on the workpiece WK at the position of the opening 314, thereby preventing a peeling failure.

  As described above, in this embodiment, the blanket BL and the substrate SB correspond to the “first plate-like body” and the “second plate-like body” of the present invention, respectively. In the above embodiment, the stage 30 functions as the “holding means” of the present invention, and the upper surface 310 of the horizontal stage portion 31 corresponds to the “holding surface” of the present invention. The second opening 314 corresponds to an “opening” in the present invention. Moreover, in the said embodiment, the lifter pin 361 functions as a "supporting member" of the present invention, and the adsorption units 51 to 54 function as "peeling means" of the present invention.

  Further, the roller unit 4 functions as the “regulating means” of the present invention, and the peeling roller 401 functions as the “roller member” of the present invention. The roller support portion 402 and the upper angle 45 function as a “support frame” and a “base member” of the present invention, respectively, and these integrally function as a “support portion” of the present invention. Further, the motor 353 and the ball screw mechanism 354 integrally function as the “moving mechanism” of the present invention.

  The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, the peeling apparatus 1 of the above embodiment includes four sets of adsorption units 51 to 54 as the “peeling means” of the present invention, but the number of the peeling means arranged is arbitrary. Just one.

  FIG. 11 is a view showing a modification of the peeling apparatus. In this modified example, the second to fourth suction units 52 to 54 are omitted from the peeling device 1 of the above embodiment, and only one suction unit 51 is provided as “peeling means”. Except for this point, the configuration of each part is the same as that of the above embodiment, and a detailed description thereof will be omitted. In this modification, the suction unit 51 holds the (−Y) side end portion of the substrate SB forming the workpiece WK, and the peeling roller 401 moves in the (+ Y) direction in conjunction with the suction unit 51 ascending. The peeling proceeds. As described above, even in a configuration having only one peeling means, the same effect as in the above embodiment can be obtained by applying the stage 30 and the roller unit 4 described above.

  In the above embodiment, the three roller assemblies 40 have the same structure, and the three peeling rollers 401 have the same size. However, the plurality of peeling rollers may have different lengths, and the diameters of the peeling rollers may be different as will be exemplified below.

  FIG. 12 is a view showing a combination example of peeling rollers having different roller diameters. In the example shown in FIG. 12A, three peeling rollers 461, 462, and 463 are arranged from the (−X) side to the (+ X) side. Of these, the central peeling roller 462 is larger in diameter than the other peeling rollers 461 and 463, and has a short axial direction (X direction). By changing the position of the rotation axis (indicated by the two-dot chain line) of the central peeling roller 462 and the position of the rotation axis (indicated by the one-dot chain line) of the other peeling rollers 461 and 463 in the Z direction, these are both substrates. It is possible to make it contact | abut.

  As shown in FIG. 12 (b), the contact nips N61, N62, and N63 formed by the contact of the release rollers 461, 462, and 463 with the substrate SB are rear end portions in the (+ Y) direction, which is the release direction, That is, the Y-direction positions of the (−Y) side end portions of the contact nip must be aligned with each other. As described above, the rear end portion of the contact nip is a boundary between the peeled region and the non-peeled region, and if the positions of the rear end portions are aligned in the contact nip formed by a plurality of peeling rollers, the peeling line is arranged in the X direction. Can be a straight line. The front end portion of the contact nip is in an unpeeled region, and it is not necessary to align the position between the contact nips. Such a positional relationship can be realized by making the rotational axis position of the central peeling roller 462 different from the rotational axis positions of the other peeling rollers 461 and 463 in the Y direction.

  As described above, the plurality of peeling rollers need only have the same shape as long as the positions of the formed contact nips are separated in the axial direction and the positions of the rear ends of the contact nips in the release direction are aligned. There is no. When all are made into the same shape like the said embodiment, it becomes possible to aim at reduction of manufacturing cost compared with the case where a roller member of a different shape is manufactured. On the other hand, when it is necessary to vary the size of the contact nip, the size and position of each peeling roller may be adjusted so that the contact nip has the above positional relationship.

  Moreover, in the said embodiment, although position adjustment with respect to the upper angle 45 is possible about all the three sets of roller assemblies 40, the position may be previously decided about one of several peeling rollers. This is because the positional relationship similar to the above can be obtained by adjusting the position of the other peeling roller with reference to the position of the peeling roller.

  Moreover, although the said embodiment is provided with the three peeling rollers 401, the number of peeling rollers is not limited to this. The same applies to the number of lifter pins.

  As described above, as a specific embodiment has been illustrated and described, in the present invention, the plurality of roller members may be arranged so that the diameters thereof are the same and the respective rotation axes coincide. By making the plurality of roller members have the same diameter, it is possible to reduce the manufacturing cost of the members. When the diameters of the roller members are the same, the positions of the contact nips can be made uniform by matching the respective rotation axes, and the contact pressures between the contact nips can be made uniform.

  The support portion may include a plurality of support frames that individually support each of the roller members and a base member that integrally holds the plurality of support frames. By providing the support frame individually for each roller member, the work of assembling and adjusting the support portion can be facilitated. Further, since the support frame is attached to the common base member, it is possible to move each contact nip as the base member moves while maintaining the relative positional relationship between the contact nips. .

  In this case, it is preferable that the mounting position of at least one of the support frames with respect to the base member is adjustable. By doing so, it is possible to perform alignment between a plurality of contact nips formed by a plurality of roller members, and it is possible to more appropriately manage the progress of peeling by the roller members.

  Each of the support frames may be one that rotatably supports both end portions in the axial direction of one roller member. In such a configuration, since the positions of both ends of each roller member are stable, the variation in the contact pressure in the contact nip can be reduced.

  Further, the peeling means may hold the second plate-like body upstream of the roller member in the peeling direction. By separating the second plate-like body from the first plate-like body by the peeling means on the upstream side of the roller member that moves in the peeling direction while contacting the second plate-like body, the first plate-like body and the second plate-like body are separated. Peeling from the body can proceed in one direction along the peeling direction. In this case, in particular, the peeling means may be configured to hold the upstream end in the peeling direction of the second plate-like body and separate it from the first plate-like body.

  In addition, the holding surface of the holding means is provided with a plurality of openings having different positions in the axial direction, and the opening of the main surface of the second plate-like body opposite to the first plate-like body is provided. One roller member may be configured to contact each of the plurality of partial regions divided by the strip-like region extending virtually in the peeling direction. The first plate-like body can be supported more stably by disposing a plurality of openings and disposing a support member at different positions in the axial direction. In this case, if one roller member is disposed between two openings in the axial direction, a continuous contact nip without a gap can be formed in the region between the openings.

  The holding surface may be provided with a plurality of openings having the same position in the axial direction and different positions in the peeling direction. By providing a plurality of openings at different positions in the peeling direction, the first plate-like body can be supported more stably. In this case, if the axial positions of the plurality of openings are the same, the axial gap positions between the contact nips for avoiding the openings can be made the same.

  The present invention is particularly suitable when each of the roller members has a surface formed of an elastic material. In a roller member having an elastic layer on the surface, it becomes particularly difficult to form a contact nip having a uniform contact pressure when the roller member is long. By providing a plurality of roller members by applying the present invention, it is possible to form a contact nip having a uniform contact pressure and to promote the peeling well.

  The present invention can be suitably applied to a peeling process in which two plate-like bodies bonded to each other are peeled off, and in particular, can cope with an increase in the size of the plate-like body.

1 Peeling device 4 Roller unit (regulation means)
30 stages (holding means)
45 Upper angle (base member, support part)
51-54 Adsorption unit (peeling means)
310 Upper surface (holding surface) of the horizontal stage unit 31
314 Second opening (opening)
353 Motor (movement mechanism)
354 Ball screw mechanism (moving mechanism)
361 Lifter pin (support member)
401 Peeling roller (roller member)
402 Roller support (support frame, support)
BL blanket (first plate)
SB substrate (second plate)

Claims (10)

In the peeling device for peeling the first plate-like body and the second plate-like body, whose main surfaces are bonded together,
A holding means for holding the first plate-like body placed on the holding surface with the upper surface being a substantially horizontal holding surface, with the main surface opposite to the second plate-like body facing downward;
It moves between the protruding position where the upper end protrudes above the holding surface from the opening provided on the holding surface and the retracted position where the upper end retracts below the holding surface within the opening. And a supporting member that supports the first plate-like body from the holding surface at the protruding position and supports it from below.
A release means for the second holding plate-shaped body to move in a direction away from said first plate member, thereby separating the second plate member from said first plate member,
A regulating means that abuts the main surface of the second plate-like body opposite to the first plate-like body and regulates the progress of the peeling of the second plate-like body by the peeling means, Regulatory means are
A plurality of roller members each abutting against the second plate-like body to form a contact nip with the second plate-like body;
A support portion for supporting each of the plurality of roller members rotatably about a rotation axis along an axial direction parallel to the holding surface and independently of each other;
A moving mechanism for moving the support portion in a peeling direction parallel to the holding surface and perpendicular to the axial direction;
The contact nips formed by each of the roller members are separated from each other in the axial direction, the positions of the rear end portions in the peeling direction of the contact nips are equal in the peeling direction, and the opening of the holding surface is The peeling apparatus provided in the position corresponding to the gap part between the two said contact nips adjacent in the said axial direction.   The peeling apparatus according to claim 1, wherein the plurality of roller members have the same diameter and the respective rotation axes coincide with each other.   The peeling apparatus according to claim 1, wherein the support portion includes a plurality of support frames that individually support the roller members, and a base member that integrally holds the plurality of support frames.   The peeling apparatus according to claim 3, wherein an attachment position of at least one of the support frames with respect to the base member is adjustable.   Each of the said support frame is a peeling apparatus of Claim 3 or 4 which rotatably supports the both ends in the said axial direction of the said one roller member.   The peeling apparatus according to claim 1, wherein the peeling unit holds the second plate-like body upstream of the roller member in the peeling direction.   The peeling device according to claim 6, wherein the peeling unit holds an upstream end portion in the peeling direction of the second plate-like body and separates the second plate-like body from the first plate-like body.   The holding surface is provided with a plurality of openings having different positions in the axial direction, and the opening of the second plate-like body on the side opposite to the first plate-like body. The peeling device according to any one of claims 1 to 7, wherein the roller member abuts each of a plurality of partial areas divided by a strip-like area extending virtually in the peeling direction.   The peeling apparatus according to any one of claims 1 to 8, wherein the holding surface is provided with a plurality of openings having the same position in the axial direction and different positions in the peeling direction.   The peeling device according to claim 1, wherein each of the roller members has a surface made of an elastic material.

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