JP6448353B2

JP6448353B2 - Active vibration isolator

Info

Publication number: JP6448353B2
Application number: JP2014256583A
Authority: JP
Inventors: 宏樹布野; 紀光古澤
Original assignee: Toyo Tire and Rubber Co Ltd
Current assignee: Toyo Tire Corp
Priority date: 2014-12-18
Filing date: 2014-12-18
Publication date: 2019-01-09
Anticipated expiration: 2034-12-18
Also published as: JP2016118217A

Description

本発明は能動型防振装置に関し、特に発生力を増大できる能動型防振装置に関するものである。 The present invention relates to an active vibration isolator, and more particularly to an active vibration isolator capable of increasing a generated force.

第１取付具と筒状の第２取付具とを連結するゴム状の防振基体と、防振基体が少なくとも室壁の一部を構成する液室と、液室の別の室壁を構成し防振基体に対面する位置に設けられる加振体（ピストン部材）と、加振体を挟んで液室の反対側に配置されると共に駆動軸により加振体を軸方向へ加振するアクチュエータとを備える能動型防振装置が知られている（特許文献１）。特許文献１に開示される技術では、加振体（ピストン部材）を軸方向へ加振して液室の容積を変化させ、液室の液圧を制御することで振動を減衰できる。 A rubber-like anti-vibration base that connects the first fixture and the cylindrical second fixture, a liquid chamber in which the anti-vibration base forms at least a part of the chamber wall, and another chamber wall of the liquid chamber A vibration body (piston member) provided at a position facing the vibration isolation base, and an actuator disposed on the opposite side of the liquid chamber with the vibration body interposed therebetween and vibrating the vibration body in the axial direction by a drive shaft There is known an active vibration isolator including the above (Patent Document 1). In the technology disclosed in Patent Document 1, vibration can be attenuated by vibrating the vibrating body (piston member) in the axial direction to change the volume of the liquid chamber and controlling the liquid pressure in the liquid chamber.

特開２０１２−１０７７３４号公報JP 2012-107734 A

しかしながら上述した従来の技術では、加振体（ピストン部材）を軸方向に加振することによる発生力増大の要求がある。 However, in the conventional technology described above, there is a demand for an increase in generated force by vibrating the vibrating body (piston member) in the axial direction.

本発明は上述した要求に応えるためになされたものであり、発生力を増大できる能動型防振装置を提供することを目的としている。 The present invention has been made to meet the above-described demand, and an object thereof is to provide an active vibration isolator capable of increasing the generated force.

Means for Solving the Problems and Effects of the Invention

この目的を達成するために請求項１記載の能動型防振装置によれば、第１取付具と筒状の第２取付具とがゴム状弾性体から構成される防振基体で連結され、第２取付具の軸方向において防振基体と対面する位置にダイヤフラムが配置される。ダイヤフラムは、ゴム状弾性体から構成されると共に、少なくとも防振基体との間で液室を形成する。液室内に配置される加振体により、第２取付具の軸方向において防振基体側の第１液室およびダイヤフラム側の第２液室に液室が区画される。第２取付具の軸方向において加振体を挟んで第１液室の反対側に配置されるアクチュエータにより、加振体が駆動軸により軸方向へ加振される。加振体は、アクチュエータによる加振により全体が軸方向へ変位して第１液室および第２液室の軸方向の長さを変化させるので、加振体の受圧面積を大きくできる。よって、加振体の軸方向の変位量を大きくすることなく発生力を増大できる効果がある。 In order to achieve this object, according to the active vibration isolator according to claim 1, the first fixture and the cylindrical second fixture are connected by a vibration isolating base composed of a rubber-like elastic body, A diaphragm is disposed at a position facing the vibration isolation base in the axial direction of the second fixture. The diaphragm is composed of a rubber-like elastic body and forms a liquid chamber at least with the vibration-proofing substrate. The vibration chamber disposed in the liquid chamber divides the liquid chamber into a first liquid chamber on the vibration-proof base side and a second liquid chamber on the diaphragm side in the axial direction of the second fixture. The vibrator is vibrated in the axial direction by the drive shaft by an actuator disposed on the opposite side of the first liquid chamber with the vibrator in the axial direction of the second fixture. The entire vibration body is displaced in the axial direction by vibration by the actuator and changes the axial length of the first liquid chamber and the second liquid chamber, so that the pressure receiving area of the vibration body can be increased. Therefore, there is an effect that the generated force can be increased without increasing the axial displacement amount of the vibrating body.

環状のオリフィス形成部材は、第１液室および第１液室とを連通するオリフィスを形成し、第１液室および第２液室にそれぞれ連通してオリフィスを形成する第１開口部および第２開口部を備えている。オリフィス形成部材は、第２取付具の軸方向において加振体よりダイヤフラム側に配置されるので、オリフィス形成部材による制約を受けることなく、加振体の受圧面積を大きくできる。オリフィス形成部材は、加振体が配置された第１液室側を向いて第１開口部の周囲に縦壁が突設されるので、縦壁によってオリフィスの液流動による減衰効果を確保できる効果がある。 Ring-shaped orifice forming member, and a first liquid chamber and the first liquid chamber to form an orifice that communicates the first opening to form an orifice through each with the first liquid chamber and the second liquid chamber and the second Two openings are provided. Since the orifice forming member is disposed on the diaphragm side of the vibrating body in the axial direction of the second fixture, the pressure receiving area of the vibrating body can be increased without being restricted by the orifice forming member. Orifice forming member, since the vertical wall around the first opening toward the first liquid chamber side pressure isolator is disposed is projected, by the vertical wall can be secured damping effect due to liquid flow orifice effect There is.

請求項２記載の能動型防振装置によれば、加振体は、係合部が縦壁の側面と係合して加振体の周方向の変位を規制する一方、加振体の軸方向の変位を許容するので、加振体が周方向に変位して第１開口部を塞いでしまうことを防止できる。よって、請求項１の効果に加え、加振体によってオリフィスによる減衰効果が損なわれることを抑制しつつ、発生力を増大できる効果がある。 According to the active vibration isolator according to claim 2, the vibration exciter is engaged with the side surface of the vertical wall to restrict displacement in the circumferential direction of the vibration exciter, while the shaft of the vibration exciter Since the displacement in the direction is allowed, it is possible to prevent the vibrating body from being displaced in the circumferential direction and closing the first opening. Therefore, in addition to the effect of claim 1 , there is an effect that the generated force can be increased while suppressing the damping effect by the orifice from being impaired by the vibrating body.

請求項３記載の能動型防振装置によれば、オリフィス形成部材は、加振体の軸方向の変位を規制し縦壁と係合部との係合を維持する第１ストッパ部を備えている。加振体は、軸方向の投影において第１ストッパ部と重なる被ストッパ部を備えているので、請求項２の効果に加え、第１ストッパ部と被ストッパ部との干渉によって駆動軸の軸方向の変位を制限できると共に、加振体の軸方向の変位によって加振体が縦壁を乗り越えてオリフィスの液流動を妨げることを防止できる効果がある。 According to the active vibration isolator according to claim 3 , the orifice forming member includes the first stopper portion that restricts the axial displacement of the vibrating body and maintains the engagement between the vertical wall and the engaging portion. Yes. Since the vibrator is provided with a stoppered portion that overlaps with the first stopper portion in the axial projection, in addition to the effect of claim 2 , the axial direction of the drive shaft is caused by the interference between the first stopper portion and the stoppered portion. The displacement of the vibrating body can be restricted and the displacement of the vibrating body in the axial direction can prevent the vibrating body from getting over the vertical wall and hindering the liquid flow of the orifice.

請求項４記載の能動型防振装置によれば、防振基体は、加振体の軸方向の変位を規制し縦壁と係合部との係合を維持する第２ストッパ部を備えている。加振体は、軸方向の投影において第２ストッパ部と重なる被ストッパ部を備えているので、請求項２又は３の効果に加え、第２ストッパ部と被ストッパ部との干渉によって駆動軸の軸方向の変位を制限できると共に、加振体の軸方向の変位によって加振体が縦壁を乗り越えてオリフィスの液流動を妨げることを防止できる効果がある。 According to the active vibration isolator of claim 4 , the vibration isolating base includes the second stopper portion that restricts the axial displacement of the vibrating body and maintains the engagement between the vertical wall and the engaging portion. Yes. Since the vibration exciter includes a stoppered portion that overlaps with the second stopper portion in the axial projection, in addition to the effects of the second or third aspect , the interference of the second stopper portion and the stoppered portion causes the drive shaft to move. The displacement in the axial direction can be limited, and the displacement of the vibrating body in the axial direction can prevent the vibrating body from getting over the vertical wall and hindering the fluid flow of the orifice.

本発明の第１実施の形態における能動型防振装置の軸方向断面図である。It is an axial sectional view of the active vibration isolator in the first embodiment of the present invention. 図１のＩＩ−ＩＩ線における能動型防振装置の断面図である。It is sectional drawing of the active vibration isolator in the II-II line of FIG. オリフィス形成部材の平面図である。It is a top view of an orifice formation member. オリフィス形成部材の正面図である。It is a front view of an orifice formation member. 図４のＶ−Ｖ線におけるオリフィス形成部材の断面図である。It is sectional drawing of the orifice formation member in the VV line | wire of FIG. オリフィス形成部材および加振体の分解図である。It is an exploded view of an orifice formation member and a vibrating body. 第２実施の形態における能動型防振装置の軸方向断面図である。It is an axial sectional view of the active vibration isolator in the second embodiment. 第３実施の形態における能動型防振装置の軸方向断面図である。It is an axial sectional view of an active vibration isolator in a third embodiment. 第４実施の形態における能動型防振装置の軸方向断面図である。It is an axial sectional view of an active vibration isolator in a fourth embodiment. 第５実施の形態における能動型防振装置の軸方向断面図である。It is axial direction sectional drawing of the active vibration isolator in 5th Embodiment.

以下、本発明の好ましい実施の形態について添付図面を参照して説明する。まず、図１を参照して能動型防振装置１０の構造について説明する。図１は本発明の第１実施の形態における能動型防振装置１０の軸方向断面図であり、図２は図１のＩＩ−ＩＩ線における能動型防振装置１０の断面図である。なお、図１では、エンジンを支持する前の状態（即ち、エンジンの重量が負荷される前の状態）を図示している（図７から図１０において同じ）。 Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. First, the structure of the active vibration isolator 10 will be described with reference to FIG. FIG. 1 is an axial cross-sectional view of an active vibration isolator 10 according to the first embodiment of the present invention, and FIG. 2 is a cross-sectional view of the active vibration isolator 10 taken along line II-II in FIG. FIG. 1 shows a state before the engine is supported (that is, a state before the weight of the engine is loaded) (the same applies to FIGS. 7 to 10).

図１に示すように能動型防振装置１０は、自動車のエンジン（振動体、図示せず）を支持固定しつつ、そのエンジン振動が車体フレーム（図示せず）へ伝わることを防ぐ防振装置であり、エンジン側に取り付けられる第１取付具１１と、エンジン下方の車体フレーム側に取付けられる筒状の第２取付具１２と、これらを連結すると共にゴム状弾性体から構成される防振基体１５と、第２取付具１２に取付けられて防振基体１５との間に液室１９を形成すると共にゴム状弾性体から構成されるダイヤフラム１７と、液室１９内に配置される加振体４０と、駆動軸５２により加振体４０を軸方向へ加振変位するアクチュエータ５０とを備えている。 As shown in FIG. 1, the active vibration isolator 10 supports and fixes an automobile engine (vibrating body, not shown), and prevents the engine vibration from being transmitted to a vehicle body frame (not shown). A first fixture 11 attached to the engine side, a cylindrical second fixture 12 attached to the vehicle body frame side below the engine, and a vibration-isolating base configured by connecting these and a rubber-like elastic body 15 and the second fixture 12 to form a liquid chamber 19 between the vibration isolator base 15 and a diaphragm 17 made of a rubber-like elastic body, and a vibration body disposed in the liquid chamber 19 40 and an actuator 50 for oscillating and displacing the vibrating body 40 in the axial direction by the drive shaft 52.

第１取付具１１は、アルミニウム合金などの金属材料から略円柱状に形成される部材であり、その上端面にボルトが上向きに突設されている。このボルトを介して第１取付具１１はエンジン側に取り付けられる。第２取付具１２は、防振基体１５が加硫成形される筒状金具１３と、その筒状金具１３の下方にかしめ加工により固着される底金具１４とを備えている。筒状金具１３は上広がりの開口を有する筒状に、底金具１４は底部を有するカップ状に、それぞれ鉄鋼材料などから形成されている。底金具１４の底部にボルトが下向きに突設されている。このボルトを介して第２取付具１２は車体側に取り付けられる。 The first fixture 11 is a member formed in a substantially cylindrical shape from a metal material such as an aluminum alloy, and has a bolt projecting upward from its upper end surface. The first fixture 11 is attached to the engine side via this bolt. The second fixture 12 includes a cylindrical fitting 13 in which the vibration-proof base 15 is vulcanized and a bottom fitting 14 fixed to the lower portion of the cylindrical fitting 13 by caulking. The cylindrical metal fitting 13 is formed in a cylindrical shape having an opening extending upward, and the bottom metal fitting 14 is formed in a cup shape having a bottom portion, respectively, from a steel material or the like. A bolt projects downward from the bottom of the bottom metal fitting 14. The second fixture 12 is attached to the vehicle body via the bolt.

防振基体１５は、ゴム状弾性体から円錐台形状に形成される部材であり、第１取付具１１の下面側と筒状金具１３の上端開口部との間に加硫接着されている。防振基体１５の下端部には、筒状金具１３の内周面を覆うゴム膜１６が連なっている。ゴム膜１６は、防振基体１５から所定の距離だけ離れた位置に、膜の厚さを薄くした段差１６ａが形成されている。 The anti-vibration base 15 is a member formed in a truncated cone shape from a rubber-like elastic body, and is vulcanized and bonded between the lower surface side of the first fixture 11 and the upper end opening of the cylindrical fitting 13. A rubber film 16 covering the inner peripheral surface of the cylindrical metal fitting 13 is connected to the lower end portion of the vibration isolating base 15. The rubber film 16 is formed with a step 16 a having a reduced film thickness at a position away from the vibration isolating substrate 15 by a predetermined distance.

ダイヤフラム１７は、ゴム状弾性体から蛇腹状に屈曲したゴム膜として形成されており、上面視円環状の取付板１８に外周が加硫接着され、軸状の軸状部材５４の外周面に内周が加硫接着されている。取付板１８は、内周側が軸方向を向いて屈曲された筒状に形成されている。ダイヤフラム１７は、取付板１８の外周側が、筒状金具１３により底金具１４と共にかしめ加工により狭持固定されることで、第２取付具１２に取着される。その結果、ダイヤフラム１７の上面側と防振基体１５の下面側との間に液室１９が形成される。液室１９には、エチレングリコール等の不凍性の液体（図示せず）が封入される。 The diaphragm 17 is formed as a rubber film bent in a bellows shape from a rubber-like elastic body. The outer periphery of the diaphragm 17 is vulcanized and bonded to an annular mounting plate 18 as viewed from above. The circumference is vulcanized. The mounting plate 18 is formed in a cylindrical shape whose inner peripheral side is bent in the axial direction. The diaphragm 17 is attached to the second fixture 12 by the outer peripheral side of the mounting plate 18 being nipped and fixed together with the bottom metal fitting 14 by the cylindrical metal fitting 13. As a result, a liquid chamber 19 is formed between the upper surface side of the diaphragm 17 and the lower surface side of the vibration isolation base 15. The liquid chamber 19 is filled with an antifreeze liquid (not shown) such as ethylene glycol.

オリフィス形成部材３０は、筒状金具１３の内周面を覆うゴム膜１６の内側に配置される円環状の剛体からなる部材である。加振体４０は、オリフィス形成部材３０と共に液室１９内に配置される円盤状の部材であり、本実施の形態では、オリフィス形成部材３０より防振基体１５側に配置されている。 The orifice forming member 30 is a member made of an annular rigid body that is disposed inside the rubber film 16 that covers the inner peripheral surface of the cylindrical fitting 13. The vibration exciter 40 is a disk-shaped member that is disposed in the liquid chamber 19 together with the orifice forming member 30. In this embodiment, the vibration exciter 40 is disposed closer to the vibration isolating substrate 15 than the orifice forming member 30.

図２に示すように加振体４０は、外形が略円形状に形成されており、ゴム膜１６の内周面に外周が接触する大きさに形成されている。よって、液室１９に加振体４０が配置されることで、液室１９は、防振基体１５側の第１液室２０及びダイヤフラム１７側の第２液室２１に区画される。オリフィス形成部材３０（図１参照）は、加振体４０により区画された第１液室２０と第２液室２１とを連通するオリフィス２２を形成する。 As shown in FIG. 2, the vibrating body 40 has a substantially circular outer shape, and is formed in such a size that the outer periphery contacts the inner peripheral surface of the rubber film 16. Therefore, by arranging the vibrating body 40 in the liquid chamber 19, the liquid chamber 19 is partitioned into a first liquid chamber 20 on the vibration isolation base 15 side and a second liquid chamber 21 on the diaphragm 17 side. The orifice forming member 30 (see FIG. 1) forms an orifice 22 that communicates the first liquid chamber 20 and the second liquid chamber 21 partitioned by the vibrating body 40.

図３から図６を参照して、オリフィス形成部材３０及び加振体４０について説明する。図３はオリフィス形成部材３０の平面図であり、図４はオリフィス形成部材３０の正面図である。図５は図４のＶ−Ｖ線におけるオリフィス形成部材３０の断面図であり、図６はオリフィス形成部材３０及び加振体４０の分解図である。 The orifice forming member 30 and the vibrating body 40 will be described with reference to FIGS. FIG. 3 is a plan view of the orifice forming member 30, and FIG. 4 is a front view of the orifice forming member 30. FIG. 5 is a cross-sectional view of the orifice forming member 30 taken along the line V-V in FIG. 4, and FIG. 6 is an exploded view of the orifice forming member 30 and the vibrating body 40.

図３から図６に示すように、オリフィス形成部材３０は、軸心Ｏと直交して配置される円環状の壁部３１と、壁部３１の内周に連設されると共に軸心Ｏ方向（軸方向）へ延びる筒状の胴部３４と、胴部３４の下端部から径方向外方へフランジ状に張り出す壁部３５とを備えている。オリフィス形成部材３０は、壁部３１，３５に第１開口部３２、第２開口部３６がそれぞれ凹欠形成される。壁部３１，３５及び胴部３４を接続し第１開口部３２と第２開口部３６とを隔てる隔壁３７が、胴部３４の外周に設けられている。 As shown in FIGS. 3 to 6, the orifice forming member 30 is provided with an annular wall portion 31 that is disposed orthogonal to the axis O, and is connected to the inner periphery of the wall portion 31 and also in the direction of the axis O. A cylindrical body portion 34 extending in the (axial direction) and a wall portion 35 projecting radially outward from the lower end portion of the body portion 34 in a flange shape are provided. In the orifice forming member 30, a first opening 32 and a second opening 36 are formed in a recess in the walls 31 and 35, respectively. A partition wall 37 that connects the wall portions 31 and 35 and the body portion 34 and separates the first opening portion 32 and the second opening portion 36 is provided on the outer periphery of the body portion 34.

オリフィス形成部材３０は、第１開口部３２の周囲の壁部３１に、胴部３４の反対側へ向かって縦壁３３が突設されている。縦壁３３は、軸心Ｏと平行な壁面を有する部位であり、第１開口部３２及び隔壁３７の周方向両側および径方向内側に位置し（図３及び図４参照）、外周部分を除いて第１開口部３２を取り囲む。縦壁３３は、径方向外側の両方の端面３３ａが、壁部３１の外周面と壁部３５の外周面とを通る仮想の円筒（曲面）の上に位置する（図３及び図６参照）。そのため、オリフィス形成部材３０の縦壁３３の端面３３ａ及び壁部３１，３５の外周面を、筒状金具１３の内周面を覆うゴム膜１６に密着させることができる。 In the orifice forming member 30, a vertical wall 33 projects from a wall portion 31 around the first opening portion 32 toward the opposite side of the body portion 34. The vertical wall 33 is a portion having a wall surface parallel to the axis O, and is located on both sides in the circumferential direction and radially inward of the first opening 32 and the partition wall 37 (see FIGS. 3 and 4), excluding the outer peripheral portion. Surrounding the first opening 32. The vertical wall 33 is positioned on a virtual cylinder (curved surface) in which both end surfaces 33a on the radially outer side pass through the outer peripheral surface of the wall portion 31 and the outer peripheral surface of the wall portion 35 (see FIGS. 3 and 6). . Therefore, the end surface 33 a of the vertical wall 33 of the orifice forming member 30 and the outer peripheral surfaces of the wall portions 31 and 35 can be brought into close contact with the rubber film 16 that covers the inner peripheral surface of the cylindrical metal fitting 13.

オリフィス形成部材３０は、壁部３１の内周に連設される第１ストッパ部３８を備えている。第１ストッパ部３８は、壁部３１から胴部３４よりも径方向内側へ向かって鍔状に突出しており、軸方向（図３紙面垂直方向）視における外形が円形状の孔部３９を有している。 The orifice forming member 30 includes a first stopper portion 38 that is connected to the inner periphery of the wall portion 31. The first stopper portion 38 protrudes in a bowl shape from the wall portion 31 toward the radially inner side of the body portion 34, and has a hole portion 39 whose outer shape in the axial direction (perpendicular to the plane of FIG. 3) is circular. doing.

加振体４０は、係合部４２（図２及び図６参照）が、略円形状の外縁４１に凹設されている。係合部４２は、縦壁３３の側面の形状に合致して、軸方向視における輪郭が略扇状に形成されており、オリフィス形成部材３０に設けられた縦壁３３に係合する。これにより、加振体４０は、縦壁３３に係合部４２が係合することで、縦壁３３に沿って軸方向に移動できる一方、縦壁３３によって周方向の回転が規制される。なお、加振体４０は、外縁４１が周方向に亘ってゴム膜１６に接触し、係合部４２が全長に亘って縦壁３３の側面に接触する。 As for the vibration body 40, the engaging part 42 (refer FIG.2 and FIG.6) is recessedly provided in the substantially circular outer edge 41. As shown in FIG. The engaging portion 42 matches the shape of the side surface of the vertical wall 33, has an axially contoured outline, and engages with the vertical wall 33 provided on the orifice forming member 30. Accordingly, the vibrating body 40 can move in the axial direction along the vertical wall 33 by engaging the engaging portion 42 with the vertical wall 33, while the vertical wall 33 restricts rotation in the circumferential direction. In addition, as for the vibrating body 40, the outer edge 41 contacts the rubber film 16 over the circumferential direction, and the engaging part 42 contacts the side surface of the vertical wall 33 over the full length.

図１に戻って説明する。加振体４０は、補強部材４３を介してアクチュエータ５０の駆動軸５２に結合されている。補強部材４３は、円柱状に形成される部材であり、オリフィス形成部材３０の孔部３９（図３、図５及び図６参照）に挿通され、ダイヤフラム１７側に位置する軸方向端部から径方向外側へ向かって突出する鍔状の被ストッパ部４４が設けられている。補強部材４３は、アクチュエータ５０の軸状部材５４（駆動軸５２）が一方の軸方向端面の中央に螺着され、加振体４０の中央が、ねじ４５により別の軸方向端面の中央に固定される。 Returning to FIG. The vibrating body 40 is coupled to the drive shaft 52 of the actuator 50 via the reinforcing member 43. The reinforcing member 43 is a member formed in a columnar shape, and is inserted into the hole 39 (see FIGS. 3, 5, and 6) of the orifice forming member 30, and has a diameter from an axial end located on the diaphragm 17 side. A hook-shaped stoppered portion 44 that protrudes outward in the direction is provided. In the reinforcing member 43, the shaft-like member 54 (drive shaft 52) of the actuator 50 is screwed into the center of one axial end surface, and the center of the vibrating body 40 is fixed to the center of another axial end surface by a screw 45. Is done.

被ストッパ部４４は、筒状金具１３の内側にオリフィス形成部材３０、加振体４０及び補強部材４３が配置された状態で、軸方向の投影において少なくとも一部が第１ストッパ部３８と重なる大きさに設定されている。被ストッパ部４４は、外径が、オリフィス形成部材３０の胴部３４の内径より小さく設定され、第１ストッパ部３８は、内径が、補強部材４３の外径より大きく設定されている。これにより、加振体４０及び補強部材４３は、第１ストッパ部３８と被ストッパ部４４とが干渉するまでは軸方向に移動することができ、第１ストッパ部３８と被ストッパ部４４とが干渉すると、軸方向の移動が規制される。 The stopper portion 44 has a size in which at least a portion thereof overlaps with the first stopper portion 38 in the axial projection in a state where the orifice forming member 30, the vibrating body 40, and the reinforcing member 43 are disposed inside the cylindrical fitting 13. Is set. The stopper portion 44 has an outer diameter set smaller than the inner diameter of the body portion 34 of the orifice forming member 30, and the first stopper portion 38 has an inner diameter set larger than the outer diameter of the reinforcing member 43. Thereby, the vibrating body 40 and the reinforcing member 43 can move in the axial direction until the first stopper portion 38 and the stopper portion 44 interfere with each other, and the first stopper portion 38 and the stopper portion 44 are moved. When the interference occurs, the movement in the axial direction is restricted.

なお、オリフィス形成部材３０（図６参照）に設けられた縦壁３３は、第１ストッパ部３８と被ストッパ部４４とが干渉することなく加振体４０及び補強部材４３が軸方向に移動できる間、縦壁３３と係合部４２とが係合する（縦壁３３の軸方向の長さの範囲内で加振体４０が移動する）ように軸方向の長さＬ（図４参照）が設定されている。よって、加振体４０は縦壁３３に沿って軸方向に移動できる間、縦壁３３によって周方向の回転が規制される。従って、縦壁３３に沿って加振体４０が軸方向に移動できる間、軸心Ｏを中心に加振体４０が回転して第１開口部３２と軸方向に重なることを防止できる。 The vertical wall 33 provided on the orifice forming member 30 (see FIG. 6) allows the vibrating body 40 and the reinforcing member 43 to move in the axial direction without the first stopper portion 38 and the stopper portion 44 interfering with each other. In the meantime, the length L in the axial direction (see FIG. 4) so that the vertical wall 33 and the engaging portion 42 are engaged (the vibrating body 40 moves within the range of the length in the axial direction of the vertical wall 33) Is set. Therefore, while the vibrating body 40 can move in the axial direction along the vertical wall 33, circumferential rotation is restricted by the vertical wall 33. Therefore, while the vibrating body 40 can move in the axial direction along the vertical wall 33, the vibrating body 40 can be prevented from rotating around the axis O and overlapping the first opening 32 in the axial direction.

これにより、オリフィス形成部材３０の壁部３１，３５の外周と縦壁３３の端面３３ａとをゴム膜１６（図１参照）に密着させることで、オリフィス形成部材３０と筒状金具１３との間に、第１開口部３２を介して第１液室２０に連通し、第２開口部３６を介して第２液室２１に連通するオリフィス２２が形成される。縦壁３３及び加振体４０によって第１開口部３２と第２液室２１とが離隔されるので、第１開口部３２が第２液室２１に短絡することを防止できる。第１開口部３２と第２開口部３６との間に隔壁３７が存在するので、オリフィス２２は、第１開口部３２から第２開口部３６までオリフィス形成部材３０の外周に約１周の流路長をもつ。 As a result, the outer periphery of the wall portions 31 and 35 of the orifice forming member 30 and the end surface 33a of the vertical wall 33 are brought into close contact with the rubber film 16 (see FIG. 1). In addition, an orifice 22 communicating with the first liquid chamber 20 via the first opening 32 and communicating with the second liquid chamber 21 via the second opening 36 is formed. Since the first opening 32 and the second liquid chamber 21 are separated by the vertical wall 33 and the vibrating body 40, it is possible to prevent the first opening 32 from being short-circuited to the second liquid chamber 21. Since the partition wall 37 exists between the first opening 32 and the second opening 36, the orifice 22 flows about one round from the first opening 32 to the second opening 36 on the outer periphery of the orifice forming member 30. Has a road length.

次に加振体４０及び補強部材４３を軸方向に加振するアクチュエータ５０について説明する。アクチュエータ５０は、鉄心可動形の電磁石式のリニアアクチュエータであり、底金具１４により形成される収納空間に外部から密閉された状態で収納保持されている。アクチュエータ５０は、第２取付具１２に固定された固定子５１と、固定子５１に対して往復動可能に支持されると共に加振体４０に連結される可動子５３とを備える。可動子５３は、第２取付具１２の軸心Ｏに沿って（本実施の形態では同軸に）縦姿勢に配設された軸状の部材であり、その先端部が、加振体４０に取り付けられた軸状部材５４に同軸に連結され、可動子５３と軸状部材５４とが一体となって加振体４０を軸心Ｏ方向に沿って上下に加振変位（往復動）させる。 Next, the actuator 50 that vibrates the vibrating body 40 and the reinforcing member 43 in the axial direction will be described. The actuator 50 is an iron magnet movable type electromagnet type linear actuator, and is housed and held in a housing space formed by the bottom metal fitting 14 while being sealed from the outside. The actuator 50 includes a stator 51 fixed to the second fixture 12, and a mover 53 that is supported so as to reciprocate with respect to the stator 51 and is connected to the vibrating body 40. The mover 53 is a shaft-like member disposed in a vertical posture along the axis O of the second fixture 12 (coaxially in the present embodiment), and the tip thereof is attached to the vibrating body 40. Coaxially connected to the attached shaft-like member 54, the movable element 53 and the shaft-like member 54 are united so as to vibrate and displace (reciprocate) the vibrator 40 vertically along the axis O direction.

駆動軸５２は、可動子５３と軸状部材５４とボルトとを備えて構成される。可動子５３は、軸心Ｏに沿って貫通孔を有する筒状に形成される一方、軸状部材５４は、基端側に開口し内周面にめねじが形成されためねじ部を備え、可動子５３の基端側から挿通されたボルトの先端を軸状部材５４のめねじ部に螺合することで、可動子５３と軸状部材５４とが一体に連結され、駆動軸５２が構成される。 The drive shaft 52 includes a mover 53, a shaft-shaped member 54, and a bolt. The mover 53 is formed in a cylindrical shape having a through-hole along the axis O, while the shaft-shaped member 54 has a threaded portion that is open to the proximal end side and has a female thread formed on the inner peripheral surface thereof. The front end of the bolt inserted from the base end side of the mover 53 is screwed into the female screw portion of the shaft-like member 54, whereby the mover 53 and the shaft-like member 54 are integrally connected, and the drive shaft 52 is configured. Is done.

可動子５３は、外周面に、電磁鋼板等の磁性金属よりなる多数の金属板を積層してなる可動子鉄心としての磁性材部５５が固設される。磁性材部５５は、軸心Ｏ方向に所定間隔を隔てつつ複数個（本実施の形態では２個）が設けられている。可動子５３は、上下一対の弾性支持材である板バネ５６を介して、固定子５１に対して、軸心Ｏ方向に往復動可能に、かつ、軸心Ｏ方向位置および軸心Ｏの直交方向位置を位置決めした状態に支持されている。 The mover 53 is fixedly provided with a magnetic material portion 55 as a mover core formed by laminating a large number of metal plates made of a magnetic metal such as an electromagnetic steel plate on the outer peripheral surface. A plurality of magnetic material portions 55 (two in the present embodiment) are provided with a predetermined interval in the direction of the axis O. The mover 53 is capable of reciprocating in the direction of the axis O with respect to the stator 51 via a pair of upper and lower plate springs 56, and the position of the axis O in the direction perpendicular to the axis O. It is supported in a state where the direction position is positioned.

固定子５１は、可動子５３の外周を同軸に取り囲む環状をなし、その中空部において可動子５３を軸心Ｏ方向に往復動可能に支持しており、取付板５７によって底金具１４内に吊り下げ状態に保持されている。取付板５７は、筒状金具１３及びダイヤフラム１７の取付板１８と共に底金具１４によりかしめ固定されている。 The stator 51 has an annular shape that coaxially surrounds the outer periphery of the mover 53, and supports the mover 53 so that it can reciprocate in the direction of the axis O in its hollow portion. It is held in a lowered state. The mounting plate 57 is caulked and fixed by the bottom metal fitting 14 together with the cylindrical metal fitting 13 and the attachment plate 18 of the diaphragm 17.

固定子５１は、電磁鋼板等の磁性金属よりなる多数の環状の金属板を積層してなるヨーク５８と、ヨーク５８の中央部において磁性材部５５を挟んで相対向するように両側より径方向内方に向かって突出する一対の磁極部５９を備える。 The stator 51 is arranged in a radial direction from both sides so that a yoke 58 formed by laminating a large number of annular metal plates made of a magnetic metal such as an electromagnetic steel plate and the central portion of the yoke 58 face each other with the magnetic material portion 55 interposed therebetween. A pair of magnetic pole portions 59 projecting inward are provided.

磁性材部５５に対向する固定子５１の磁極部５９の先端（即ち、磁極部５９の内端）には、可動子５３の往復動方向（軸心Ｏ方向）に沿って隣り合った状態に並設されつつ可動子５３に対向する上下一対の円弧板状をなす永久磁石６０，６１が、それらの磁極が互いにＮＳ交互の異極をなすように、可動子５３の往復移動方向と直交する方向に磁極を並べて、かつ、互いの磁極（Ｎ極とＳ極）の並びが逆となる状態に配設されている。本実施の形態では、上下一対の永久磁石６０，６１が、磁性材部５５に対応させて、軸心Ｏ方向に２組が並設されている。 The tip of the magnetic pole part 59 of the stator 51 facing the magnetic material part 55 (that is, the inner end of the magnetic pole part 59) is adjacent to the movable element 53 along the reciprocating direction (axis O direction). A pair of upper and lower permanent magnets 60 and 61 facing the mover 53 while being arranged in parallel are orthogonal to the reciprocating direction of the mover 53 so that their magnetic poles are NS different from each other. The magnetic poles are arranged in the direction, and the arrangement of the magnetic poles (N pole and S pole) is reversed. In the present embodiment, two pairs of upper and lower permanent magnets 60 and 61 are arranged in parallel in the axis O direction so as to correspond to the magnetic material portion 55.

固定子５１の一対の磁極部５９には、それぞれその周りにコイル６２が、可動子５３の往復動方向（軸心Ｏ方向）と直交する方向の軸心周りに巻回され、一対の永久磁石６０，６１を通る磁束が発生可能に構成されている。本実施の形態では、一対の永久磁石６０，６１が、磁性材部５５を挟んで対向する固定子５１の一対の磁極部５９の内端部にそれぞれ設けられており、永久磁石６０，６１は、可動子５３の往復動方向と直交する方向で可動子５３を挟んで対向すると共に、この対向する磁極が互いに異極をなすように磁極の並びを左右（図１左右）で逆にして配設されている。 A coil 62 is wound around each of the pair of magnetic pole portions 59 of the stator 51 around an axis in a direction perpendicular to the reciprocating direction (axis O direction) of the mover 53, and a pair of permanent magnets. The magnetic flux passing through 60 and 61 can be generated. In the present embodiment, a pair of permanent magnets 60 and 61 are provided at the inner end portions of the pair of magnetic pole portions 59 of the stator 51 facing each other with the magnetic material portion 55 interposed therebetween. The magnetic poles are opposed to each other in a direction orthogonal to the reciprocating direction of the movable element 53, and the magnetic poles are arranged so that the opposing magnetic poles are different from each other so that the opposing magnetic poles are different from each other (left and right in FIG. 1). It is installed.

アクチュエータ５０のコイル６２が消磁状態にあるとき、固定子５１に対して軸心Ｏ方向（軸方向）へ変位可能に支持された駆動軸５２は、板バネ５６により支持され停止する。この状態からコイル６２に正方向の励磁電流を流すと、コイル６２に発生する起磁力の向きと上側の永久磁石６０の起磁力の向きとが同一となって、起磁力が強まる。一方、下側の永久磁石６１の起磁力の向きとコイル６２の起磁力の向きが反対になって、両者の起磁力が相殺されて弱まる。その結果、磁性材部５５に上向きの力が作用して、板バネ５６を弾性変形させながら可動子５３が上昇する。可動子５３に結合された加振体４０が上方へ移動するので、第１液室２０の容積が減少する。 When the coil 62 of the actuator 50 is in a demagnetized state, the drive shaft 52 supported so as to be displaceable in the axial center O direction (axial direction) with respect to the stator 51 is supported and stopped by a leaf spring 56. When a positive exciting current is passed through the coil 62 from this state, the direction of the magnetomotive force generated in the coil 62 is the same as the direction of the magnetomotive force of the upper permanent magnet 60, and the magnetomotive force is increased. On the other hand, the direction of the magnetomotive force of the lower permanent magnet 61 and the direction of the magnetomotive force of the coil 62 are opposite to each other, and the magnetomotive force of both is canceled and weakened. As a result, an upward force acts on the magnetic material portion 55, and the mover 53 is raised while the leaf spring 56 is elastically deformed. Since the vibrating body 40 coupled to the mover 53 moves upward, the volume of the first liquid chamber 20 decreases.

一方、コイル６２に逆方向の励磁電流を流すと、上記とは反対に、磁性材部５５に下向きの力が作用して、板バネ５６を弾性変形させながら可動子５３が下降する。可動子５３に結合された加振体４０が下方へ移動するので、第１液室２０の容積が増加する。このように、コイル６２の励磁電流の向きを正逆に交互に切り替えることで、駆動軸５２及び加振体４０を上下に加振して第１液室２０の容積を変化させることができる。 On the other hand, when an exciting current in the reverse direction is supplied to the coil 62, a downward force is applied to the magnetic material portion 55, and the mover 53 is lowered while elastically deforming the leaf spring 56. Since the vibrating body 40 coupled to the mover 53 moves downward, the volume of the first liquid chamber 20 increases. Thus, by alternately switching the direction of the excitation current of the coil 62 in the forward and reverse directions, the volume of the first liquid chamber 20 can be changed by vibrating the drive shaft 52 and the vibrating body 40 up and down.

以上のように構成された能動型防振装置１０（図１参照）の製造方法について説明する。第１取付具１１と筒状金具１３とが防振基体１５により連結された第１成形体と、ダイヤフラム１７が加硫成形されると共に取付板１８及び軸状部材５４が加硫接着された第２成形体とを、ゴム加硫金型によりそれぞれ加硫成形する。次いで、補強部材４３と第２成形体とを液体中に沈め、補強部材４３に軸状部材５４を螺着した後、補強部材４３にオリフィス形成部材３０を被せる。次に、縦壁３３（図２参照）の位置と係合部４２の位置とを合わせながら加振体４０を補強部材４３にねじ４５で固定し、中間組立体を得る。 A method of manufacturing the active vibration isolator 10 (see FIG. 1) configured as described above will be described. A first molded body in which the first fixture 11 and the cylindrical fitting 13 are connected by a vibration-proof base 15, the diaphragm 17 is vulcanized, and the mounting plate 18 and the shaft-shaped member 54 are vulcanized and bonded. The two molded bodies are each vulcanized and molded with a rubber vulcanization mold. Next, the reinforcing member 43 and the second molded body are submerged in the liquid, and after the shaft-like member 54 is screwed onto the reinforcing member 43, the orifice forming member 30 is placed on the reinforcing member 43. Next, the vibration body 40 is fixed to the reinforcing member 43 with the screw 45 while aligning the position of the vertical wall 33 (see FIG. 2) and the position of the engaging portion 42 to obtain an intermediate assembly.

次いで、第１成形体も液体中に沈め、第１成形体の下方開口から中間組立体を加振体４０側から筒状金具１３内へ挿入する。このとき、段差１６ａを超えて加振体４０をゴム膜１６の内側に配置し、段差１６ａと取付板１８との間でオリフィス形成部材３０を軸方向に挟みながら、筒状金具１３のかしめ加工により筒状金具１３に中間組立体を固定する。 Next, the first molded body is also submerged in the liquid, and the intermediate assembly is inserted into the cylindrical fitting 13 from the vibrating body 40 side through the lower opening of the first molded body. At this time, the vibrator 40 is disposed inside the rubber film 16 beyond the step 16a, and the tubular metal fitting 13 is caulked while the orifice forming member 30 is sandwiched between the step 16a and the mounting plate 18 in the axial direction. As a result, the intermediate assembly is fixed to the cylindrical fitting 13.

その後、第１取付具１１が下方となる姿勢で、この部材を液体外へ取り出し、この姿勢を維持しつつ、アクチュエータ５０をダイヤフラム１７の下面側から重ね、軸状部材５４と可動子５３とをボルトにより締結固定する。次いで、アクチュエータ５０に底金具１４を被せ、筒状金具１３の下方開口に底金具１４をかしめ加工により固着する。これにより能動型防振装置１０の製造が完了する。 Thereafter, in a posture in which the first fixture 11 is in a downward position, this member is taken out of the liquid, and while maintaining this posture, the actuator 50 is overlapped from the lower surface side of the diaphragm 17, and the shaft-like member 54 and the mover 53 are attached. Fasten with bolts. Next, the bottom metal 14 is put on the actuator 50, and the bottom metal 14 is fixed to the lower opening of the cylindrical metal 13 by caulking. Thereby, the manufacture of the active vibration isolator 10 is completed.

次いで能動型防振装置１０の動作について説明する。第１取付具１１又は第２取付具１２から比較的大振幅の低周波振動が入力される場合には、能動型防振装置１０を制御する制御装置（図示せず）によってアクチュエータ５０の動作が停止される。この状態では、オリフィス２２を介して第１液室２０と第２液室２１との間を液体が流通する。能動型防振装置１０はオリフィス２２の液体流動効果によって振動を減衰できる。 Next, the operation of the active vibration isolator 10 will be described. When a relatively large amplitude low-frequency vibration is input from the first fixture 11 or the second fixture 12, the operation of the actuator 50 is performed by a control device (not shown) that controls the active vibration isolator 10. Stopped. In this state, the liquid flows between the first liquid chamber 20 and the second liquid chamber 21 through the orifice 22. The active vibration isolator 10 can dampen vibration by the liquid flow effect of the orifice 22.

一方、第１取付具１１又は第２取付具１２から比較的微振幅の高周波振幅が入力される場合には、制御装置（図示せず）によってアクチュエータ５０のコイル６２に正弦波交流電圧や矩形波交流電圧などを印加し、可動子５３（即ち駆動軸５２）を上下に往復動変位させ、駆動軸５２に連結された加振体４０を入力振動に対して逆位相で加振変位させる。加振体４０が往復動することで、第１液室２０の液圧を吸収して振動を低減できる。 On the other hand, when a relatively high amplitude amplitude is input from the first fixture 11 or the second fixture 12, a control device (not shown) applies a sine wave AC voltage or a rectangular wave to the coil 62 of the actuator 50. An AC voltage or the like is applied, the movable element 53 (that is, the drive shaft 52) is reciprocated up and down, and the vibration exciter 40 connected to the drive shaft 52 is excited and displaced in an opposite phase to the input vibration. When the vibrating body 40 reciprocates, the liquid pressure in the first liquid chamber 20 can be absorbed and vibration can be reduced.

能動型防振装置１０によれば、液室１９内に配置される加振体４０により、軸心Ｏ方向において防振基体１５側の第１液室２０及びダイヤフラム１７側の第２液室２１に液室１９が区画される。軸心Ｏ方向において加振体４０を挟んで第１液室２０の反対側に配置されるアクチュエータ５０により、加振体４０が駆動軸５２により軸方向へ加振される。加振体４０が、第１液室２０及び第２液室２１の仕切（境界）であり、加振体４０の軸方向の変位によって第１液室２０及び第２液室２１の境界の軸方向の位置が変化する。加振体４０は、アクチュエータ５０による加振により全体が軸方向へ変位して第１液室２０及び第２液室２１の軸方向の長さを変化させるので、加振体４０の外径を筒状金具１３の内径程度まで大きくできる。筒状金具１３に収容される加振体４０の受圧面積を、収容可能な範囲の最大近くまで大きくできるので、加振体４０の軸方向の変位量を大きくしなくても発生力を増大できる。 According to the active vibration isolator 10, the first liquid chamber 20 on the vibration isolator base 15 side and the second liquid chamber 21 on the diaphragm 17 side in the axial center O direction by the vibration body 40 disposed in the liquid chamber 19. The liquid chamber 19 is partitioned. The vibration body 40 is vibrated in the axial direction by the drive shaft 52 by the actuator 50 disposed on the opposite side of the first liquid chamber 20 with the vibration body 40 interposed therebetween in the direction of the axis O. The vibrating body 40 is a partition (boundary) between the first liquid chamber 20 and the second liquid chamber 21, and the axis of the boundary between the first liquid chamber 20 and the second liquid chamber 21 due to the axial displacement of the vibrating body 40. The position of the direction changes. The vibration body 40 is entirely displaced in the axial direction by vibration by the actuator 50 and changes the axial lengths of the first liquid chamber 20 and the second liquid chamber 21, so that the outer diameter of the vibration body 40 is reduced. The inner diameter of the cylindrical fitting 13 can be increased. Since the pressure receiving area of the vibrating body 40 accommodated in the cylindrical fitting 13 can be increased to the maximum of the accommodating range, the generated force can be increased without increasing the axial displacement amount of the vibrating body 40. .

ここで、発生力を大きくするために加振体４０の軸方向の変位量を大きくする場合には、アクチュエータ５０の軸方向の変位量を大きくしなければならないので、アクチュエータ５０の大型化を要する。しかし、能動型防振装置１０は加振体４０の軸方向の変位量を変えなくても発生力を増大できるので、アクチュエータ５０を小型化できる可能性がある。特に、アクチュエータ５０の軸方向のサイズを小さくできるので、能動型防振装置１０をその分だけ軸方向にコンパクト化できる。 Here, when the axial displacement amount of the vibrating body 40 is increased in order to increase the generated force, the axial displacement amount of the actuator 50 must be increased. . However, since the active vibration isolator 10 can increase the generated force without changing the axial displacement amount of the vibrating body 40, there is a possibility that the actuator 50 can be downsized. In particular, since the axial size of the actuator 50 can be reduced, the active vibration isolator 10 can be made compact in the axial direction accordingly.

また、加振体４０は、軸心Ｏ方向においてオリフィス形成部材３０より防振基体１５側に配置されるので、オリフィス形成部材３０による制約を受けることなく、加振体４０の受圧面積を筒状金具１３の内側の範囲まで大きくできる。オリフィス形成部材３０は、オリフィス２２に連通して第１液室２０及び第２液室２１にそれぞれ開口する第１開口部３２及び第２開口部３６を備えている。加振体４０の係合部４２が、第２取付具１２側に設けられる縦壁３３と係合して加振体４０の周方向の変位を規制する一方、加振体４０の軸方向の変位を許容する。そのため、加振体４０が周方向に変位（軸心Ｏを中心に回転）して第１開口部３２と加振体４０とが軸方向に重なり、オリフィス２２による液流動を加振体４０が妨げることを防止できる。よって、加振体４０の受圧面積を大きくすることで発生力を増大できると共に、加振体４０によってオリフィス２２による減衰効果が損なわれることを抑制できる。 Further, since the vibration exciter 40 is disposed closer to the vibration isolating substrate 15 than the orifice forming member 30 in the direction of the axis O, the pressure receiving area of the exciter 40 is cylindrical without being restricted by the orifice forming member 30. It can be enlarged up to the inner range of the metal fitting 13. The orifice forming member 30 includes a first opening 32 and a second opening 36 that communicate with the orifice 22 and open into the first liquid chamber 20 and the second liquid chamber 21, respectively. While the engaging part 42 of the vibrating body 40 engages with the vertical wall 33 provided on the second fixture 12 side to restrict the circumferential displacement of the vibrating body 40, the axial direction of the vibrating body 40 Allow displacement. Therefore, the vibrating body 40 is displaced in the circumferential direction (rotated about the axis O), the first opening 32 and the vibrating body 40 overlap in the axial direction, and the vibrating body 40 causes liquid flow through the orifice 22 to flow. Can prevent obstruction. Therefore, the generated force can be increased by increasing the pressure receiving area of the vibrating body 40, and the damping effect by the orifice 22 can be suppressed from being impaired by the vibrating body 40.

縦壁３３は、第１液室２０側を向いてオリフィス形成部材３０に突設されているので、加振体４０の周方向の変位を規制する部位を別個に設ける場合と比較して、部品点数の増加を抑制できる。また、縦壁３３はオリフィス形成部材３０の第１開口部３２の周囲の壁部３１に突設される一方、係合部４２は、縦壁３３を避けて加振体４０の外縁４１に凹設されているので、係合部４２以外の加振体４０の外縁４１によって加振体４０の受圧面積を大きくできる。よって、加振体４０によってオリフィス２２による減衰効果が損なわれることを抑制しつつ、発生力を増大できる。 Since the vertical wall 33 faces the first liquid chamber 20 side and protrudes from the orifice forming member 30, the vertical wall 33 is a component compared to the case where a portion for regulating the displacement in the circumferential direction of the vibrating body 40 is provided separately. The increase in points can be suppressed. Further, the vertical wall 33 protrudes from the wall portion 31 around the first opening 32 of the orifice forming member 30, while the engaging portion 42 is recessed in the outer edge 41 of the vibrating body 40 while avoiding the vertical wall 33. Since it is provided, the pressure receiving area of the vibrating body 40 can be increased by the outer edge 41 of the vibrating body 40 other than the engaging portion 42. Therefore, the generated force can be increased while suppressing the damping effect by the orifice 22 from being impaired by the vibrating body 40.

オリフィス形成部材３０は、加振体４０の軸方向の変位を規制する第１ストッパ部３８を備えている。加振体４０の補強部材４３は、軸方向の投影において第１ストッパ部３８と重なる被ストッパ部４４を備えている。その結果、第１ストッパ部３８と被ストッパ部４４との干渉によって、駆動軸５２の軸方向の変位を制限できる。即ち、アクチュエータ５０が制御不能となり暴走した場合にダイヤフラム１７等の損傷を防止し、大振幅の振動が入力された場合にアクチュエータ５０の損傷を防止できる。 The orifice forming member 30 includes a first stopper portion 38 that restricts the axial displacement of the vibrating body 40. The reinforcing member 43 of the vibrating body 40 includes a stoppered portion 44 that overlaps the first stopper portion 38 in the axial projection. As a result, the axial displacement of the drive shaft 52 can be limited by the interference between the first stopper portion 38 and the stopper portion 44. That is, it is possible to prevent the diaphragm 17 and the like from being damaged when the actuator 50 becomes uncontrollable and runaway, and to prevent the actuator 50 from being damaged when a large amplitude vibration is input.

また、第１ストッパ部３８と被ストッパ部４４との軸方向の間隔により決定される加振体４０の軸方向（防振基体１５側）の変位量は、オリフィス形成部材３０に設けられた縦壁３３の軸方向の長さＴ（図４参照）より小さく設定される。そのため、加振体４０が軸方向へ大きく変位して係合部４２と縦壁３３との係合が解除されてしまうことを防止できる。その結果、第１開口部３２が第２液室２１に短絡することを防止できるので、第１液室２０と第２液室２１とを連通するオリフィス２２による防振性能を確保できる。 Further, the amount of displacement in the axial direction (vibration isolation base 15 side) of the vibration exciter 40 determined by the axial distance between the first stopper portion 38 and the stopper portion 44 is a vertical amount provided in the orifice forming member 30. The wall 33 is set smaller than the axial length T (see FIG. 4). Therefore, it can be prevented that the vibrating body 40 is greatly displaced in the axial direction and the engagement between the engaging portion 42 and the vertical wall 33 is released. As a result, since the first opening 32 can be prevented from being short-circuited to the second liquid chamber 21, it is possible to ensure the vibration isolation performance by the orifice 22 that communicates the first liquid chamber 20 and the second liquid chamber 21.

なお、軸心Ｏ方向における防振基体１５側への加振体４０の変位は第１ストッパ部３８により規制されるが、ダイヤフラム１７側への加振体４０の変位は、加振体４０の径方向外側の部分がオリフィス形成部材３０に当接することにより規制される。よって、加振体４０は軸方向両側の変位が規制される。 The displacement of the vibration body 40 toward the vibration isolation base 15 in the direction of the axis O is regulated by the first stopper portion 38, but the displacement of the vibration body 40 toward the diaphragm 17 side is limited by the vibration body 40. It is regulated by the radially outer portion coming into contact with the orifice forming member 30. Therefore, the displacement of the vibrating body 40 on both sides in the axial direction is restricted.

次に図７を参照して第２実施の形態について説明する。第２実施の形態では、第１実施の形態で説明した補強部材４３と比較して、補強部材１４３の外径が小さい場合について説明する。なお、第１実施の形態と同一の部分については、同一の符号を付して以下の説明を省略する。図７は第２実施の形態における能動型防振装置１１０の軸方向断面図である。 Next, a second embodiment will be described with reference to FIG. 2nd Embodiment demonstrates the case where the outer diameter of the reinforcement member 143 is small compared with the reinforcement member 43 demonstrated in 1st Embodiment. In addition, about the part same as 1st Embodiment, the same code | symbol is attached | subjected and the following description is abbreviate | omitted. FIG. 7 is a sectional view in the axial direction of the active vibration isolator 110 according to the second embodiment.

能動型防振装置１１０は、オリフィス成形部材１３０の径方向内側に、加振体４０に結合した補強部材１４３が配置されている。オリフィス形成部材１３０は、壁部３１（図６参照）の内周に連設される第１ストッパ部１３８を備えている。第１ストッパ部１３８は、壁部３１から径方向内側へ向かって鍔状に突出している。 In the active vibration isolator 110, a reinforcing member 143 coupled to the vibrating body 40 is disposed on the radially inner side of the orifice molding member 130. The orifice forming member 130 includes a first stopper portion 138 that is connected to the inner periphery of the wall portion 31 (see FIG. 6). The first stopper portion 138 protrudes in a bowl shape from the wall portion 31 toward the inside in the radial direction.

補強部材１４３は、円柱状に形成される部材であり、ダイヤフラム１７側に位置する軸方向端部から径方向外側へ向かって突出する鍔状の被ストッパ部１４４が設けられている。補強部材１４３は、ねじ４５により加振体４０に固定されている。被ストッパ部１４４は、筒状金具１３の内側にオリフィス形成部材１３０、加振体４０及び補強部材１４３が配置された状態で、軸方向の投影において少なくとも一部が第１ストッパ部１３８と重なる大きさに設定されている。これにより、加振体４０及び補強部材１４３は、第１ストッパ部１３８と被ストッパ部１４４とが干渉するまでは軸方向に移動することができ、第１ストッパ部１３８と被ストッパ部１４４とが干渉すると、軸方向の移動が規制される。 The reinforcing member 143 is a member formed in a columnar shape, and is provided with a hook-like stoppered portion 144 that protrudes radially outward from an axial end located on the diaphragm 17 side. The reinforcing member 143 is fixed to the vibrating body 40 with a screw 45. The stopper portion 144 has a size in which at least a portion thereof overlaps the first stopper portion 138 in the axial projection in a state where the orifice forming member 130, the vibrating body 40, and the reinforcing member 143 are disposed inside the cylindrical fitting 13. Is set. Accordingly, the vibrating body 40 and the reinforcing member 143 can move in the axial direction until the first stopper portion 138 and the stopper target portion 144 interfere with each other, and the first stopper portion 138 and the stopper target portion 144 are moved. When the interference occurs, the movement in the axial direction is restricted.

能動型防振装置１１０によれば、補強部材１４３の大きさや材質を適宜設定することにより、アクチュエータ５０によって軸方向に可動される可動部材（加振体４０、補強部材１４３及び駆動軸５２）の質量を適宜設定できる。また、補強部材１４３を小型化して体積を小さくすることで、補強部材１４３を構成する材料コストを削減できる。 According to the active vibration isolator 110, by appropriately setting the size and material of the reinforcing member 143, the movable member (vibrator 40, reinforcing member 143, and drive shaft 52) that is movable in the axial direction by the actuator 50 is used. The mass can be set as appropriate. Moreover, the material cost which comprises the reinforcement member 143 can be reduced by making the reinforcement member 143 small and reducing a volume.

ここで、アクチュエータ５０のコイル６２が消磁状態にあるとき、第１取付具１１に荷重が入力され防振基体１５が弾性変形して第１液室２０の内圧が上昇すると、加振体４０はアクチュエータ５０側へ押される（下降する）。第１液室２０の内圧の上昇によって加振体４０に生じる推力（第１液室２０から押し出される力）とその推力によって生じる加振体４０の変位量との比であるばね定数と、可動部材（加振体４０、補強部材１４３及び駆動軸５２）の質量とにより、可動部材の固有振動数は決定される。このばね定数は、主に板バネ５６によって決定されるが、加振体４０をゴム膜１６や縦壁３３と接触（干渉）させることにより調整できる。補強部材１４３の質量を変えることで、可動部材の質量を調整できるので、固有振動数の調整を比較的容易にできる。 Here, when the coil 62 of the actuator 50 is in a demagnetized state, when the load is input to the first fixture 11 and the vibration isolation base 15 is elastically deformed to increase the internal pressure of the first liquid chamber 20, the vibration exciter 40 is It is pushed (lowered) to the actuator 50 side. A spring constant that is a ratio of a thrust generated in the vibrating body 40 due to an increase in the internal pressure of the first liquid chamber 20 (force pushed out from the first liquid chamber 20) and a displacement amount of the vibrating body 40 generated by the thrust, and a movable The natural frequency of the movable member is determined by the mass of the members (vibrator 40, reinforcing member 143, and drive shaft 52). This spring constant is mainly determined by the leaf spring 56, but can be adjusted by bringing the vibrating body 40 into contact (interference) with the rubber film 16 and the vertical wall 33. Since the mass of the movable member can be adjusted by changing the mass of the reinforcing member 143, the natural frequency can be adjusted relatively easily.

この固有振動数を、アクチュエータ４０を駆動して防振機能を発揮させる振動の周波数帯域内に設定することで、固有振動数に略等しい振動をアクチュエータ５０は駆動軸５２に与えることができる。その結果、アクチュエータ５０の出力が小さくても共振によって加振体４０に強い振れを生じさせることができる。小出力のアクチュエータ５０を採用できるので、アクチュエータ５０を小型化（特に低背化）できる。また、加振体４０を振動させ易くできるので、コイル６２に流す電流を小さくできる。よって、アクチュエータ５０の消費電力を削減できる。 By setting this natural frequency within the frequency band of vibrations that drive the actuator 40 to exhibit the vibration isolation function, the actuator 50 can give the drive shaft 52 vibration substantially equal to the natural frequency. As a result, even if the output of the actuator 50 is small, strong vibration can be generated in the vibrating body 40 by resonance. Since the actuator 50 with a small output can be employed, the actuator 50 can be reduced in size (especially reduced in height). Further, since the vibrating body 40 can be easily vibrated, the current flowing through the coil 62 can be reduced. Therefore, the power consumption of the actuator 50 can be reduced.

次に図８を参照して第３実施の形態について説明する。第１及び第２実施の形態では、補強部材４３，１４３に設けられた被ストッパ部４４，１４４と、オリフィス形成部材３０，１３０に設けられた第１ストッパ部３８，１３８との干渉によって、防振基体１５側への加振体４０の変位を規制する場合について説明した。これに対し第３実施の形態では、加振体４０と防振基体１５との干渉によって、防振基体１５側への加振体４０の変位を規制する場合について説明する。なお、第１及び第２実施の形態と同一の部分については、同一の符号を付して以下の説明を省略する。図８は第３実施の形態における能動型防振装置２１０の軸方向断面図である。 Next, a third embodiment will be described with reference to FIG. In the first and second embodiments, the interference between the stopper portions 44 and 144 provided on the reinforcing members 43 and 143 and the first stopper portions 38 and 138 provided on the orifice forming members 30 and 130 is prevented. The case where the displacement of the vibrating body 40 toward the vibrating base 15 is described has been described. On the other hand, in the third embodiment, a case will be described in which the displacement of the vibration exciter 40 toward the vibration isolator base 15 is restricted by the interference between the vibration exciter 40 and the vibration isolator base 15. In addition, about the part same as 1st and 2nd embodiment, the same code | symbol is attached | subjected and the following description is abbreviate | omitted. FIG. 8 is a sectional view in the axial direction of the active vibration isolator 210 according to the third embodiment.

能動型防振装置２１０は、オリフィス成形部材１３０の径方向内側に、加振体４０に結合した補強部材２４３が配置されている。補強部材２４３は、円柱状に形成される部材であり、ねじ４５により加振体４０に固定されている。 In the active vibration isolator 210, a reinforcing member 243 coupled to the vibrating body 40 is disposed on the radially inner side of the orifice molding member 130. The reinforcing member 243 is a member formed in a columnar shape, and is fixed to the vibrating body 40 with a screw 45.

能動型防振装置２１０は、軸心Ｏ方向におけるダイヤフラム１７側への加振体４０の変位は、加振体４０がオリフィス形成部材１３０に当接することにより規制される。一方、防振基体１５側への加振体４０の変位は、防振基体１５とゴム膜１６との境界部分（ゴム膜１６に対して内径が小さくなる傾斜面の部分）に加振体４０の径方向外側の部分が当接することにより規制される。 In the active vibration isolator 210, the displacement of the vibration body 40 toward the diaphragm 17 in the direction of the axis O is restricted by the vibration body 40 coming into contact with the orifice forming member 130. On the other hand, the displacement of the vibration exciter 40 toward the vibration isolator base 15 is caused by the vibration exciter 40 at the boundary between the vibration isolator base 15 and the rubber film 16 (the portion of the inclined surface where the inner diameter is smaller than the rubber film 16). It is regulated by the contact of the radially outer part.

なお、防振基体１５とゴム膜１６との境界部分の軸方向の位置は、縦壁３３（図４参照）の軸方向の長さＬを考慮して設定される。防振基体１５側への加振体４０の変位によって、防振基体１５とゴム膜１６との境界部分がストッパとして機能する前に、縦壁３３から係合部４２（図６参照）が離脱することを防止するためである。 Note that the axial position of the boundary portion between the vibration isolating base 15 and the rubber film 16 is set in consideration of the axial length L of the vertical wall 33 (see FIG. 4). The engaging portion 42 (see FIG. 6) is detached from the vertical wall 33 before the boundary portion between the vibration isolating base 15 and the rubber film 16 functions as a stopper due to the displacement of the vibrating body 40 toward the vibration isolating base 15. This is to prevent this.

次に図９を参照して第４実施の形態について説明する。第３実施の形態では、防振基体１５とゴム膜１６との境界部分を、軸方向の変位を規制するストッパとして利用する場合について説明した。これに対し第４実施の形態では、防振基体３１５によるストッパ機能を強化する場合について説明する。なお、第１実施の形態から第３実施の形態と同一の部分については、同一の符号を付して以下の説明を省略する。図９は第４実施の形態における能動型防振装置３１０の軸方向断面図である。 Next, a fourth embodiment will be described with reference to FIG. In the third embodiment, the description has been given of the case where the boundary portion between the vibration isolating base 15 and the rubber film 16 is used as a stopper for restricting axial displacement. On the other hand, in the fourth embodiment, a case where the stopper function by the anti-vibration base 315 is strengthened will be described. In addition, about the part same as 1st Embodiment to 3rd Embodiment, the same code | symbol is attached | subjected and the following description is abbreviate | omitted. FIG. 9 is an axial sectional view of an active vibration isolator 310 according to the fourth embodiment.

能動型防振装置３１０は、ゴム状弾性体から構成される防振基体３１５が、第１取付具１１と第２取付具１２とを連結する。防振基体３１５は、ゴム膜１６の付け根の部分に、第２ストッパ部３１６が形成されている。第２ストッパ部３１６は軸心Ｏと直交する平坦面であり軸心Ｏ方向視が円環状に形成される。 In the active vibration isolator 310, a vibration isolating base 315 made of a rubber-like elastic body connects the first fixture 11 and the second fixture 12. The anti-vibration base 315 has a second stopper portion 316 formed at the base of the rubber film 16. The second stopper portion 316 is a flat surface orthogonal to the axis O and is formed in an annular shape when viewed in the direction of the axis O.

能動型防振装置３１０は、軸心Ｏ方向におけるダイヤフラム１７側への加振体４０の変位は、加振体４０がオリフィス形成部材１３０に当接することにより規制される。一方、防振基体３１５側への加振体４０の変位は、第２ストッパ部３１６に加振体４０の径方向外側の部分が当接することにより規制される。なお、第２ストッパ部３１６の軸方向の位置は、縦壁３３（図４参照）の軸方向の長さＬを考慮して設定される。防振基体３１５側への加振体４０の変位によって、第２ストッパ部３１６がストッパとして機能する前に、縦壁３３から係合部４２（図６参照）が離脱することを防止するためである。 In the active vibration isolator 310, the displacement of the vibration body 40 toward the diaphragm 17 in the direction of the axis O is restricted by the vibration body 40 coming into contact with the orifice forming member 130. On the other hand, the displacement of the vibration exciter 40 toward the vibration isolator base 315 is restricted by the radially outer portion of the vibration exciter 40 coming into contact with the second stopper portion 316. The axial position of the second stopper portion 316 is set in consideration of the axial length L of the vertical wall 33 (see FIG. 4). This is to prevent the engaging portion 42 (see FIG. 6) from being detached from the vertical wall 33 before the second stopper portion 316 functions as a stopper due to the displacement of the vibrating body 40 toward the vibration isolation base 315 side. is there.

能動型防振装置３１０によれば、防振基体３１５に第２ストッパ部３１６（軸心Ｏと直交する平坦面）が形成されているので、防振基体１５の傾斜面をストッパとして利用する能動型防振装置２１０（第３実施の形態）と比較して、ストッパが機能するときの受圧面積（加振体４０と防振基体３１５との接触面積）を大きくできる。その結果、第３実施の形態における能動型防振装置２１０と比較して、大振幅の振動が入力された場合など、ストッパが機能した後の加振体４０の変位を小さくできる。よって、縦壁３３から係合部４２（図６参照）をより離脱し難くできる。 According to the active vibration isolator 310, the second stopper portion 316 (a flat surface orthogonal to the axis O) is formed on the vibration isolator base 315, so that the active surface using the inclined surface of the vibration isolator base 15 as a stopper is used. Compared to the mold vibration isolator 210 (third embodiment), the pressure receiving area (the contact area between the vibration exciter 40 and the vibration isolator base 315) when the stopper functions can be increased. As a result, compared to the active vibration isolator 210 in the third embodiment, the displacement of the vibrating body 40 after the stopper functions can be reduced, for example, when a large amplitude vibration is input. Therefore, the engaging portion 42 (see FIG. 6) can be more easily separated from the vertical wall 33.

次に図１０を参照して第５実施の形態について説明する。第３及び第４実施の形態では、オリフィス形成部材１３０に第１ストッパ部１３８が設けられる場合について説明した。これに対し第５実施の形態では、第１ストッパ部１３８を省略したオリフィス形成部材２３０が配置された能動型防振装置４１０について説明する。なお、第１実施の形態から第３実施の形態と同一の部分については、同一の符号を付して以下の説明を省略する。図１０は第５実施の形態における能動型防振装置４１０の軸方向断面図である。 Next, a fifth embodiment will be described with reference to FIG. In the third and fourth embodiments, the case where the first stopper portion 138 is provided in the orifice forming member 130 has been described. On the other hand, in the fifth embodiment, an active vibration isolator 410 in which the orifice forming member 230 in which the first stopper portion 138 is omitted will be described. In addition, about the part same as 1st Embodiment to 3rd Embodiment, the same code | symbol is attached | subjected and the following description is abbreviate | omitted. FIG. 10 is an axial sectional view of an active vibration isolator 410 according to the fifth embodiment.

能動型防振装置４１０は、オリフィス成形部材２３０の径方向内側に、加振体４０に結合した補強部材２４３が配置されている。オリフィス成形部材２３０は、第１ストッパ部３８，１３８が省略されている以外は、オリフィス形成部材３０，１３０と同一に構成されている。 In the active vibration isolator 410, a reinforcing member 243 coupled to the vibrating body 40 is disposed on the radially inner side of the orifice molding member 230. The orifice molding member 230 has the same configuration as the orifice forming members 30 and 130 except that the first stopper portions 38 and 138 are omitted.

能動型防振装置４１０は、軸心Ｏ方向におけるダイヤフラム１７側への加振体４０の変位は、加振体４０がオリフィス形成部材２３０（壁部３１）に当接することにより規制される。一方、防振基体１５側への加振体４０の変位は、防振基体１５とゴム膜１６との境界部分（ゴム膜１６に対して内径が小さくなる傾斜面の部分）に加振体４０の径方向外側の部分が当接することにより規制される。 In the active vibration isolator 410, the displacement of the vibration body 40 toward the diaphragm 17 in the direction of the axis O is restricted by the vibration body 40 coming into contact with the orifice forming member 230 (wall portion 31). On the other hand, the displacement of the vibration exciter 40 toward the vibration isolator base 15 is caused by the vibration exciter 40 at the boundary between the vibration isolator base 15 and the rubber film 16 (the portion of the inclined surface where the inner diameter is smaller than the rubber film 16). It is regulated by the contact of the radially outer part.

能動型防振装置４１０によれば、オリフィス形成部材２３０は第１ストッパ部１３８が省略されているので、加振体４０がダイヤフラム１７側へ変位するときに、第１ストッパ部１３８と加振体４０との間に介在する液体により加振体４０に生じる反力を抑制できる。その反力の影響で、加振体４０の加振（振動）に位相の遅れが生じたりコイル６２に流す電流量が増加したりすることを抑制できる。よって、加振体４０の加振による防振効果を確保でき、消費電力の増加を抑制できる。 According to the active vibration isolator 410, the first stopper portion 138 is omitted from the orifice forming member 230. Therefore, when the vibrating body 40 is displaced toward the diaphragm 17, the first stopper portion 138 and the vibrating body are excited. The reaction force generated in the vibrating body 40 due to the liquid interposed between them can be suppressed. Due to the reaction force, it is possible to suppress the occurrence of a phase delay in the excitation (vibration) of the vibrating body 40 or an increase in the amount of current flowing through the coil 62. Therefore, it is possible to secure a vibration isolation effect due to the vibration of the vibrating body 40 and suppress an increase in power consumption.

以上、実施の形態に基づき本発明を説明したが、本発明は上記実施の形態に何ら限定されるものではなく、本発明の趣旨を逸脱しない範囲内で種々の改良変形が可能であることは容易に推察できるものである。例えば、縦壁３３や係合部４２の形状や大きさは、この実施形態に限定されるものではなく、種々の変更が可能である。 The present invention has been described above based on the embodiments. However, the present invention is not limited to the above embodiments, and various improvements and modifications can be made without departing from the spirit of the present invention. It can be easily guessed. For example, the shape and size of the vertical wall 33 and the engaging portion 42 are not limited to this embodiment, and various changes can be made.

上記各実施の形態では、軸心Ｏ方向においてオリフィス形成部材３０より防振基体１５，３１５側に加振体４０が配置される場合について説明したが、必ずしもこれに限られるものではなく、オリフィス形成部材３０よりダイヤフラム１７側に加振体４０を配置することは当然可能である。この場合もオリフィス形成部材３０の胴部３４の内径より加振体４０の外径を大きくできるので、加振体４０の受圧面積を大きくすることができ、発生力を大きくできる。この場合には、第１液室２０と第２開口部３６とを離隔するため、第２開口部３６を取り囲むように第２液室２１側へ突出する縦壁３３を壁部３５に設ける。 In each of the above-described embodiments, the case where the vibration exciter 40 is disposed on the vibration isolation bases 15 and 315 side of the orifice forming member 30 in the direction of the axis O has been described. Of course, it is possible to arrange the vibrating body 40 closer to the diaphragm 17 than the member 30. Also in this case, since the outer diameter of the vibrating body 40 can be made larger than the inner diameter of the body portion 34 of the orifice forming member 30, the pressure receiving area of the vibrating body 40 can be increased and the generated force can be increased. In this case, in order to separate the first liquid chamber 20 and the second opening 36, the wall 35 is provided with a vertical wall 33 that protrudes toward the second liquid chamber 21 so as to surround the second opening 36.

上記各実施の形態では、自動車のエンジンを弾性支持するエンジンマウントとして能動型防振装置１０，１１０，２１０，３１０，４１０を用いる場合について説明したが、必ずしもこれに限られるものではない。ボディマウント、デフマウント等、任意の振動体の振動を抑制する防振装置に能動型防振装置１０，１１０，２１０，３１０，４１０を適用することは当然可能である。 In each of the above-described embodiments, the case where the active vibration isolator 10, 110, 210, 310, 410 is used as an engine mount that elastically supports an automobile engine has been described. However, the present invention is not necessarily limited thereto. It is naturally possible to apply the active vibration isolator 10, 110, 210, 310, 410 to a vibration isolator that suppresses vibration of an arbitrary vibrating body such as a body mount or a differential mount.

上記実施の形態では説明を省略したが、ストッパが機能するときに、第１ストッパ部３８，１３８と被ストッパ部４４，１４４との間に緩衝材が介在するように、第１ストッパ部３８，１３８や被ストッパ部４４，１４４にゴム製等の緩衝材を設けることは当然可能である。これにより異音の発生を抑制できる。 Although the description is omitted in the above embodiment, when the stopper functions, the first stopper portion 38, so that the buffer material is interposed between the first stopper portions 38, 138 and the stopper portions 44, 144. Needless to say, it is possible to provide a cushioning material such as rubber on 138 or the stopper portions 44 and 144. Thereby, generation | occurrence | production of unusual noise can be suppressed.

上記各実施の形態では、防振基体１５の下方にダイヤフラム１７が配置されることで、第１液室２０の下方に第２液室２１が設けられる能動型防振装置１０，１１０，２１０，３１０，４１０について説明したが、必ずしもこれに限られるものではなく、防振基体１５及びダイヤフラム１７は任意の位置に配置できる。例えば、防振基体１５の上方にダイヤフラムを配置して、第１液室の上方に第２液室を設けることは当然可能である。この場合には、防振基体１５の外周に、第１液室と第２液室とを接続するオリフィスが形成される。 In each of the above-described embodiments, the diaphragm 17 is disposed below the vibration isolation base 15, so that the active vibration isolation devices 10, 110, 210, and the second liquid chamber 21 are provided below the first liquid chamber 20. Although 310 and 410 have been described, the present invention is not necessarily limited to this, and the vibration isolation base 15 and the diaphragm 17 can be arranged at arbitrary positions. For example, it is naturally possible to dispose a diaphragm above the vibration isolation base 15 and provide the second liquid chamber above the first liquid chamber. In this case, an orifice for connecting the first liquid chamber and the second liquid chamber is formed on the outer periphery of the vibration isolating substrate 15.

上記各実施の形態では、アクチュエータ５０に交流電流（正弦波信号や矩形波信号など）を通電してコイル６２を励磁し、板バネ５６で弾性支持された駆動軸５２を往復動させる場合について説明したが、必ずしもこれに限られるものではない。コイルスプリングによって駆動軸が軸心Ｏ方向の一方へ付勢されているアクチュエータの場合には、コイルに直流電流を断続的に通電してコイルの励磁・消磁を断続的に行うと、コイルの励磁によりコイルスプリングを圧縮して駆動軸を変位させ、コイルの消磁によりコイルスプリングの復元力により駆動軸を変位させることができる。このようなアクチュエータが採用された能動型防振装置においても、本実施の形態と同様の作用・効果を実現できる。 In each of the above embodiments, the case where the actuator 50 is energized with an alternating current (such as a sine wave signal or a rectangular wave signal) to excite the coil 62 and the drive shaft 52 elastically supported by the leaf spring 56 is reciprocated is described. However, it is not necessarily limited to this. In the case of an actuator in which the drive shaft is urged to one side in the direction of the axis O by the coil spring, the coil is excited when the coil is intermittently energized and deenergized by intermittently supplying a direct current to the coil. Thus, the coil spring can be compressed to displace the drive shaft, and the drive shaft can be displaced by the restoring force of the coil spring by demagnetizing the coil. Even in an active vibration isolator employing such an actuator, the same actions and effects as in the present embodiment can be realized.

１０，１１０，２１０，３１０，４１０能動型防振装置
１１第１取付具
１２第２取付具
１５，３１５防振基体
１７ダイヤフラム
１９液室
２０第１液室
２１第２液室
２２オリフィス
３０，１３０，２３０オリフィス形成部材
３１壁部（第１ストッパ部）
３２第１開口部
３３縦壁
３６第２開口部
３８，１３８第１ストッパ部
４０加振体（被ストッパ部）
４２係合部
４４，１４４被ストッパ部
５０アクチュエータ
５２駆動軸
３１６第２ストッパ部 10, 110, 210, 310, 410 Active vibration isolator 11 First fixture 12 Second fixture 15, 315 Anti-vibration base 17 Diaphragm 19 Liquid chamber 20 First liquid chamber 21 Second liquid chamber 22 Orifice 30, 130 , 230 Orifice forming member 31 Wall (first stopper)
32 1st opening part 33 Vertical wall 36 2nd opening part 38,138 1st stopper part 40 Exciting body (stopped part)
42 Engagement part 44,144 Stopped part 50 Actuator 52 Drive shaft 316 Second stopper part

Claims

A first fixture and a cylindrical second fixture;
An anti-vibration base composed of a rubber-like elastic body connecting the first fixture and the second fixture;
A rubber-like elastic body disposed at a position facing the vibration isolating base in the axial direction of the second fixture, and at least a diaphragm that forms a liquid chamber with the vibration isolating base;
A vibration body that is disposed in the liquid chamber and divides the liquid chamber into a first liquid chamber on the vibration-proof base side and a second liquid chamber on the diaphragm side in the axial direction of the second fixture;
An actuator that is disposed on the opposite side of the first liquid chamber across the vibration body in the axial direction of the second fixture, and that vibrates the vibration body in the axial direction by a drive shaft ;
An annular orifice forming member that is disposed closer to the diaphragm than the vibrating body in the axial direction of the second fixture, and that forms an orifice that communicates the second liquid chamber and the first liquid chamber. ,
The orifice forming member includes a first opening and a second opening that communicate with the first liquid chamber and the second liquid chamber, respectively, to form the orifice;
A vertical wall facing the first liquid chamber side and projecting around the first opening,
The active vibration isolator is characterized in that the vibrator is entirely displaced in the axial direction by vibration by the actuator to change the axial lengths of the first liquid chamber and the second liquid chamber. .

The vibrator is provided with an engaging portion that engages with a side surface of the vertical wall to restrict circumferential displacement of the vibrator and allows axial displacement of the vibrator. The active vibration isolator according to claim 1 .

The orifice forming member includes a first stopper portion that regulates axial displacement of the vibrating body and maintains the engagement between the vertical wall and the engaging portion,
The active vibration isolator according to claim 2 , wherein the vibrating body includes a stopper portion that overlaps the first stopper portion in the axial projection.

The vibration-proof base includes a second stopper portion that restricts the axial displacement of the vibrating body and maintains the engagement between the vertical wall and the engagement portion.
The active vibration isolator according to claim 2 or 3 , wherein the vibration exciter includes a stopper portion that overlaps the second stopper portion in an axial projection.