JP6365851B2 - Light emitting device module and atomic oscillator - Google Patents

Description

  The present invention relates to a light emitting element module and an atomic oscillator.

  An atomic oscillator based on an electromagnetically induced transparency (EIT) method (sometimes called a CPT (Coherent Population Trapping) method) has coherency with alkali metal atoms and is different from each other. This is an oscillator that utilizes a phenomenon in which absorption of resonance light stops when two types of resonance light having a specific wavelength (frequency) are simultaneously irradiated (see Patent Document 1).

  An atomic oscillator can realize a highly accurate oscillator by accurately controlling the frequency difference between two types of light as described above. As such a light emitting element that emits two types of light, for example, a semiconductor laser is used.

US Pat. No. 6,320,472

  The light emitting element is desirably temperature-controlled with high accuracy. For example, when the temperature of the light emitting element deviates from a desired value, the frequency of light emitted from the light emitting element fluctuates, resulting in a problem that the frequency accuracy of the light emitting element is lowered. In particular, when a light-emitting element is used as a light source of an atomic oscillator, it is necessary to accurately control the frequency difference between two types of light as described above, and there may be a problem even if the frequency fluctuates slightly.

  The present invention has been made in view of the above problems, and one of the objects according to some aspects of the present invention is to provide a light-emitting element module capable of suppressing temperature fluctuation of the light-emitting element. There is to do. Another object of some embodiments of the present invention is to provide an atomic oscillator having the light emitting element module.

The light emitting element module according to the present invention is:
A temperature variable element having a temperature control surface to be temperature controlled;
A light emitting device having a first electrode and mounted on a part of the temperature control surface;
A first terminal for supplying power to the first electrode;
A wiring conducting between the first terminal and the first electrode;
Including
The wiring is thermally connected to other portions of the temperature control surface.

  According to the light emitting element module according to the present invention, the first electrode and the first terminal are electrically connected via the temperature control surface controlled to a desired temperature. Therefore, it can suppress that the temperature of a light emitting element fluctuates from a desired value, and a light emitting element module can have high frequency accuracy.

For example, a configuration in which the first terminal and the first electrode are electrically connected by the wiring without passing through the temperature control surface (that is, one end of the wiring is joined to the first terminal and the other end of the wiring is In the case where the first electrode is joined), the light emitting element may be affected by the temperature outside the package (outside temperature) due to the first terminal and the wiring, and the temperature of the light emitting element may fluctuate. More specifically, when the outside air temperature is lower than the temperature of the temperature control surface, the semiconductor element heated to the same temperature (or close temperature) as the temperature control surface by the temperature control surface passes through the wiring and the first terminal. Then, heat is dissipated. Conversely, when the outside air temperature is higher than the temperature of the temperature control surface, heat flows into the semiconductor element via the wiring and the first terminal. Therefore, in such a form, there exists a problem that the temperature of a light emitting element will fluctuate from a desired value.

  In the light emitting element module according to the present invention, the above-described problems can be solved and temperature fluctuation of the light emitting element can be suppressed.

In the light emitting device module according to the present invention,
The wiring includes a first wiring having one end joined to the first terminal and the other end thermally connected to the other portion of the temperature control surface, and one end joined to the first electrode and the other end A second wiring thermally connected to the other part of the temperature control surface.

  According to the light emitting element module according to the present invention, heating and heat absorption can be performed on the light emitting element via the first wiring and the second wiring, and fluctuation of the light emitting element from a desired temperature can be suppressed.

In the light emitting device module according to the present invention,
The temperature control surface has conductivity,
The wiring includes a first wiring having one end bonded to the first terminal and the other end bonded to the other portion of the temperature control surface,
The first terminal and the first electrode may be electrically connected via the temperature control surface.

  According to the light emitting element module according to the present invention, it is possible to suppress the light emitting element from fluctuating from a desired temperature.

In the light emitting device module according to the present invention,
The first electrode is disposed on a surface other than the mounting surface of the light emitting element,
A second wiring connecting the other part of the temperature control surface and the first electrode may be included.

  According to the light emitting element module according to the present invention, it is possible to suppress the light emitting element from fluctuating from a desired temperature.

In the light emitting device module according to the present invention,
The first electrode may be bonded to the temperature control surface.

  According to the light emitting element module according to the present invention, the first terminal, the first wiring, and the conductive temperature control surface are used without using the second wiring that electrically connects the first electrode and the temperature control surface. And can be electrically connected to the first electrode.

In the light emitting device module according to the present invention,
A first insulating member mounted on the other part of the temperature control surface;
A first pad disposed on a surface of the first insulating member;
Further including
The other end of the first wiring and the other end of the second wiring may be joined to the first pad.

  According to the light emitting element module according to the present invention, both the other end of the first wiring and the other end of the second wiring are electrically connected even if the temperature control surface does not have conductivity. Can be thermally connected to the temperature control surface.

In the light emitting device module according to the present invention,
The light emitting element has a second electrode,
A second terminal for supplying power to the second electrode;
A second insulating member mounted on the other part of the temperature control surface;
A second pad disposed on the surface of the second insulating member;
A third wiring having one end bonded to the second terminal and the other end bonded to the second pad;
And a fourth wiring having one end bonded to the second electrode and the other end bonded to the second pad.

  According to the light emitting element module according to the present invention, both the other end of the third wiring and the other end of the fourth wiring are electrically connected even when the temperature control surface does not have conductivity. Can be thermally connected to the temperature control surface.

In the light emitting device module according to the present invention,
A plurality of the second wirings may be provided.

  According to the light emitting element module according to the present invention, since the number of second wirings is larger than that of the light emitting element module, the heat of the temperature control surface can be more transferred to the light emitting element. In addition, the heat of the light emitting element can be absorbed more by the temperature control surface.

The atomic oscillator according to the present invention is
The light emitting element module according to the present invention is included.

  According to the atomic oscillator of the present invention, it is possible to irradiate the gas cell with light having high frequency accuracy, and thus it is possible to operate stably.

The perspective view which shows typically the light emitting element module which concerns on this embodiment. The perspective view which shows typically the light emitting element module which concerns on this embodiment. The top view which shows typically the light emitting element module which concerns on this embodiment. Sectional drawing which shows typically the light emitting element module which concerns on this embodiment. The top view which shows typically the light emitting element of the light emitting element module which concerns on this embodiment. The top view which shows typically the light emitting element module which concerns on the 1st modification of this embodiment. The perspective view which shows typically the light emitting element module which concerns on the 2nd modification of this embodiment. The top view which shows typically the light emitting element module which concerns on the 2nd modification of this embodiment. The perspective view which shows typically the light emitting element module which concerns on the 3rd modification of this embodiment. The perspective view which shows typically the light emitting element module which concerns on the 4th modification of this embodiment. The perspective view which shows typically the light emitting element module which concerns on the 5th modification of this embodiment. The perspective view which shows typically the light emitting element module which concerns on the 5th modification of this embodiment. The perspective view which shows typically the light emitting element module which concerns on the 6th modification of this embodiment. The top view which shows typically the light emitting element of the light emitting element module which concerns on the 6th modification of this embodiment. The perspective view which shows typically the light emitting element module which concerns on the 6th modification of this embodiment. The perspective view which shows typically the light emitting element module which concerns on the 7th modification of this embodiment. The top view which shows typically the light emitting element of the light emitting element module which concerns on the 7th modification of this embodiment. The perspective view which shows typically the light emitting element module which concerns on the 8th modification of this embodiment. The perspective view which shows typically the light emitting element module which concerns on the 9th modification of this embodiment. The figure which shows the structure of the atomic oscillator which concerns on this embodiment.

  Preferred embodiments of the present invention will be described below with reference to the drawings.

1. Light-Emitting Element Module First, a light-emitting element module according to this embodiment will be described with reference to the drawings. FIG. 1 is a perspective view schematically showing a light emitting element module 100 according to this embodiment. FIG. 2 is a perspective view schematically showing the light emitting element module 100 according to the present embodiment. FIG. 3 is a plan view schematically showing the light emitting element module 100 according to the present embodiment. 4 is a cross-sectional view taken along the line IV-IV in FIG. 3 schematically showing the light emitting element module 100 according to the present embodiment. FIG. 5 is a plan view schematically showing the light emitting element 40 of the light emitting element module 100 according to the present embodiment.

  As illustrated in FIGS. 1 to 5, the light emitting element module 100 can include a package 10, a temperature variable element 20, a temperature sensor 30, a light emitting element 40, and terminals 50 to 55.

  For convenience, FIG. 1 illustrates the configuration in the vicinity of the temperature variable element 20, and further illustrates the temperature variable element 20 in a simplified manner. 1 to 3, the lid portion 14 of the package 10 is omitted, and the light emitting element 40 is illustrated in a simplified manner.

  As illustrated in FIG. 4, the package 10 can accommodate the temperature variable element 20, the temperature sensor 30, and the light emitting element 40. The shape of the package 10 is not particularly limited as long as the temperature variable element 20, the temperature sensor 30, and the light emitting element 40 can be accommodated. Examples of the material of the package 10 include metals and ceramics.

  In the example illustrated in FIG. 4, the package 10 includes a base portion 12 and a lid portion 14. The base 12 is a plate-like member, for example. A temperature variable element 20 is mounted on the base 12.

  The lid portion 14 has a shape having a recess 15. The temperature variable element 20, the temperature sensor 30, and the light emitting element 40 can be accommodated in the recess 15. The opening of the recess 15 is sealed by the base 12.

  The lid portion 14 can have a light transmission portion 16. The light transmission part 16 is disposed above the light emitting element 40. The light emitted from the light emitting element 40 is irradiated to the outside of the package 10 through the light transmitting portion 16. The material of the light transmission part 16 will not be specifically limited if the light radiate | emitted from the light emitting element 40 can be permeate | transmitted.

  Although not shown, the package 10 has a shape in which the base has a recess, the lid has a plate-like shape, and the recess in the base is sealed with a plate-like lid, thereby allowing the temperature variable element 20 to be sealed. The temperature sensor 30 and the light emitting element 40 may be accommodated.

  The terminals 50 to 55 are provided on the base 12 as shown in FIG. More specifically, the terminals 50 to 55 penetrate the base 12 and extend from the inside of the package 10 to the outside. In the illustrated example, the terminals 50 to 55 are rod-shaped members, and one end is disposed inside the package 10 and the other end is disposed outside the package 10. Wiring is connected to one end of the terminals 50 to 55, and the temperature variable element 20, the temperature sensor 30, and the light emitting element housed in the package 10 by applying a voltage to the other ends of the terminals 50 to 55. A voltage can be applied to 40. The material of the terminals 50 to 55 is not particularly limited as long as it is conductive.

  The temperature variable element 20 is mounted on the base 12 via, for example, silver paste. The temperature variable element 20 has a temperature control surface 22 including a surface (mounting portion) 20a on which the light emitting element 40 is mounted. The planar shape of the temperature control surface 22 is not particularly limited, but in the illustrated example, it is a quadrangle (more specifically, a rectangle). The temperature control surface 22 can have conductivity. For example, conductivity may be imparted (metallized) to the temperature control surface 22 by growing a metal thin film. The temperature variable element 20 can perform at least one of heating and heat absorption with respect to the light emitting element 40 through a surface on which the light emitting element 40 is mounted (a part of the mounting portion 20a and the temperature control surface 22).

  In the illustrated example, a Peltier element is used as the temperature variable element 20. In the illustrated example, the temperature variable element 20 has pads 25 and 26 formed on the pad forming surface 24, and the pads 25 and 26 are electrically connected to the terminals 52 and 53 via wirings 63 and 64, respectively. It is connected. As a result, it is possible to apply a voltage to the temperature variable element 20 to cause a current to flow and to cause the temperature control surface 22 to generate heat. In addition, the temperature control surface 22 can absorb heat by reversing the polarity of the voltage applied to the temperature variable element 20. In this way, the temperature control surface 22 can be controlled to a desired temperature, and the temperature variable element 20 is a light emitting element mounted on the mounting portion (a part of the temperature control surface 22) 20a of the temperature control surface 22. 40 can be heated and endothermic.

  In the description according to the present invention, the term “electrically connected” is used, for example, as another specific member (hereinafter “electrically connected” to “specific member (hereinafter referred to as“ A member ”)”. B member "))" and the like. In the description of the present invention, in the case of this example, the A member and the B member are electrically connected by joining (for example, metal joining by diffusion joining, brazing, welding, etc.). The term “electrically connected” is used as including cases where the A member and the B member are electrically connected via other members.

  The temperature sensor 30 is mounted on the temperature control surface 22 via, for example, silver paste. The temperature sensor 30 can detect the temperature of the temperature control surface 22. In the illustrated example, a thermistor is used as the temperature sensor 30. In the illustrated example, the temperature sensor 30 has pads 32 and 34, and the pads 32 and 34 are electrically connected to terminals 54 and 55 via wirings 65 and 66, respectively. As a result, a voltage can be applied to the temperature sensor 30 to allow a current to flow, and the temperature of the temperature control surface 22 can be detected from the resistance value of the temperature sensor 30.

  The temperature variable element 20 and the temperature sensor 30 may be electrically connected to a temperature control circuit (see FIG. 20). The temperature control circuit can control the value of the current flowing through the temperature variable element 20 based on the temperature detected by the temperature sensor 30.

  The light emitting element 40 is mounted on the mounting portion 21a of the temperature control surface 22 via, for example, silver paste. The light emitting element 40 can emit light. As the light emitting element 40, for example, a vertical cavity surface emitting laser (VCSEL) or an edge emitting laser (Edge Emitting Laser) can be used. Since the vertical cavity surface emitting laser has a smaller threshold current than the edge emitting laser, power consumption can be reduced, and the light emitting element 40 can be particularly preferably used. Hereinafter, an example in which a vertical cavity surface emitting laser is used as the light emitting element 40 will be described.

  As illustrated in FIG. 5, the light emitting element 40 can include a first electrode 42, a second electrode 44, and a semiconductor layer 46. As shown in FIG. 4, the semiconductor layer 46 may have a first surface 46 a and a second surface 46 b that face each other. The first surface 46a is a surface (mounting surface) mounted on the temperature variable element 20, and the light emitting element 40 is mounted on the temperature control surface 22 so that the first surface 46a faces the temperature control surface 22 side. Has been. The second surface 46 b is disposed to face the light transmission part 16. As shown in FIG. 5, the first electrode 42 and the second electrode 44 are formed on the second surface 46 b side of the semiconductor layer 46. The first electrode 42 may be a cathode, and the second electrode 44 may be an anode. Examples of the material of the first electrode 42 and the second electrode 44 include gold, germanium, platinum, and alloys thereof.

  Although not shown, the semiconductor layer 46 has a structure in which an active layer and a first mirror layer and a second mirror layer sandwiching the active layer are stacked. When a voltage is applied to the first electrode 42 and the second electrode 44, recombination of electrons and holes occurs in the active layer, and light emission occurs. The light generated in the active layer reciprocates between the first mirror layer and the second mirror layer, so that laser oscillation occurs, and the light emitting element 40 can emit light from the emitting portion 48. As the active layer, the first mirror layer, and the second mirror layer, for example, a GaAs layer, an AlGaAs layer, or the like can be used.

  In the example shown in FIG. 5, the emitting portion 48 is provided on the second surface 46 b side, but the emitting portion 48 may be provided on the first surface 46 a side. In this case, the temperature variable element 20 and the base portion 12 of the package 10 can have a light transmission portion that transmits light emitted from the emission portion 48. Thereby, the light emitting element 40 can emit light from the first surface 46a side.

  The first electrode 42 is electrically connected to the first terminal 50. The first terminal 50 is a terminal for supplying power to the first electrode 42. In the example shown in FIG. 1, the first electrode 42 is electrically connected to the first terminal 50 via the first wiring 60 and the second wiring 61. One end 60a of the first wiring 60 is joined to the first terminal 50, and the other end 60b of the first wiring 60 is connected to a part (other part of the temperature control surface 22) 20b of the temperature control surface 22 other than the mounting portion 20a. Thermally connected. In the example shown in FIG. 1, the other end 60 b of the first wiring 60 is joined (directly connected) to the other portion 20 b of the temperature control surface 22.

  Here, in the description according to the present invention, the description “thermally connected” refers to the case where the wiring and the temperature control surface are joined (for example, metal joining by diffusion joining, brazing, welding, etc.) A member that conforms to the temperature of the temperature control surface is disposed between the temperature control surface and the temperature control surface, and the member and the wiring are in contact with each other. Note that the member conforming to the temperature of the temperature control surface is a member having thermal conductivity, and can transmit the heat of the temperature control surface to the wiring, and can transmit the heat of the wiring to the temperature control surface. .

One end 61 a of the second wiring 61 is joined to the first electrode 42, and the other end 61 b of the second wiring 61 is thermally connected to the other portion 20 b of the temperature control surface 22. In the illustrated example, the second wiring 6
1 is joined to the temperature control surface 22. The other end 60b of the first wiring 60 and the other end 61b of the second wiring 61 are electrically connected by the temperature control surface 22 having conductivity. That is, the first terminal 50 and the first electrode 42 are electrically connected via the temperature control surface 22. The wires 60 and 61 and the temperature control surface 22 can constitute a wire that conducts between the first terminal 50 and the first electrode 42. In the illustrated example, the other end 60 b of the first wiring 60 and the other end 61 b of the second wiring 61 are separated from each other.

  Although not shown, the other end 60b of the first wiring 60 and the other end 61b of the second wiring 61 may be joined to or in contact with each other. Further, the first wiring 60 and the second wiring 61 may be integrally formed as long as a part of the wiring is bonded or in contact with the temperature control surface 22.

  The second electrode 44 is electrically connected to the second terminal 51. In the illustrated example, the second electrode 44 is electrically connected to the second terminal 51 via the wiring 62. The second terminal 51 is a terminal for supplying power to the second electrode 44.

  Although it will not specifically limit if it is electroconductivity as a material of wiring 60-66, For example, gold | metal | money, copper, and aluminum are mentioned.

  The light emitting element module 100 according to the present embodiment has, for example, the following characteristics.

  According to the light emitting element module 100, the first electrode 42 and the first terminal 50 are electrically connected via the first wiring 60. One end 60 a of the first wiring 60 is joined to the first terminal 50, and the other end 60 b of the first wiring 60 is thermally connected (joined in the illustrated example) to the temperature control surface 22. That is, in the light emitting element module 100, the first electrode 42 and the first terminal 50 are electrically connected via the temperature control surface 22 controlled to a desired temperature. Therefore, in the light emitting element module 100, it can suppress that the temperature of the light emitting element 40 fluctuates from a desired value.

  For example, the first terminal and the first electrode are electrically connected by the first wiring without the temperature control surface (that is, one end of the first wiring is joined to the first terminal, In the form in which the other end of one wiring is joined to the first electrode), the light emitting element is affected by the temperature (outside temperature) outside the package due to the first terminal and the first wiring, and the temperature of the light emitting element fluctuates. There is a case. More specifically, when the outside air temperature is lower than the temperature of the temperature control surface, the semiconductor element heated to the same temperature (or close temperature) as the temperature of the temperature control surface by the temperature control surface includes the first wiring and the first terminal. The heat will be dissipated via. Conversely, when the outside air temperature is higher than the temperature of the temperature control surface, heat flows into the semiconductor element via the first wiring and the first terminal. Therefore, in such a form, there exists a problem that the temperature of a light emitting element will fluctuate from a desired value.

  In the light emitting element module 100 according to the present invention, the above-described problems can be solved and temperature fluctuations of the light emitting element 40 can be suppressed.

  According to the light emitting element module 100, one end 61a of the second wiring 61 is joined to the first electrode 42, and the other end 61b of the second wiring 61 is thermally applied to the temperature control surface 22 controlled to a desired temperature. They are connected (joined in the example shown). Therefore, heating and heat absorption can be performed on the light emitting element 40 via the second wiring 61, and the light emitting element 40 can be prevented from fluctuating from a desired temperature.

According to the light emitting element module 100, the material of at least the wirings 60 and 62 can be aluminum. Aluminum has a smaller thermal conductivity than gold and copper. Therefore, in the light emitting element module 100, it is possible to suppress the light emitting element 40 from being affected by the temperature outside the package 10 via the wirings 60 and 62.

2. 2. Modification of light emitting element module 2.1. First Modification Next, a light-emitting element module according to a first modification of the present embodiment will be described with reference to the drawings. FIG. 6 is a plan view schematically showing a light emitting element module 200 according to a first modification of the present embodiment, and corresponds to FIG.

  Hereinafter, in the light emitting element module 200 according to the first modification example of the present embodiment, members having the same functions as those of the constituent members of the light emitting element module 100 according to the present embodiment are denoted by the same reference numerals, and detailed description thereof is given. Is omitted.

  In the light emitting element module 200, as shown in FIG. 6, the light emitting elements 40 are arranged on an imaginary straight line L in plan view. The virtual straight line L is a straight line passing through the center O of the temperature control surface 22 having a quadrangular shape (rectangular shape in the illustrated example). In the illustrated example, the virtual straight line L is a straight line parallel to the short side 23 a of the temperature control surface 22, but may be a straight line parallel to the long side 23 b of the temperature control surface 22. The temperature control surface 22 is partitioned by a virtual straight line L into a first region 22a and a second region 22b.

  The temperature sensor 30 is disposed in the first region 22a. The other end 60b of the first wiring 60 and the other end 61b of the second wiring 61 are joined to the first region 22a. That is, the temperature sensor 30, the other end 60b of the first wiring 60, and the other end 61b of the second wiring 61 are all disposed in the first region 22a. In the illustrated example, the region closer to the pad forming surface 24 is the second region 22b and the region far from the pad forming surface 24 is the first region 22a. However, the region closer to the pad forming surface 24 is May be the second region 22b, and the region far from the pad forming surface 24 may be the first region 22a.

  When the temperature detected by the temperature sensor 30 changes, for example, the temperature control circuit 22 can be controlled to a desired temperature by changing the value of the current flowing through the temperature variable element 20 using the temperature control circuit described above. . Therefore, even if the temperature of the temperature control surface 22 fluctuates due to the influence of the temperature outside the package 10 due to the first terminal 50 and the first wiring 60, the other end 60 b of the first wiring 60 is connected to the temperature sensor 30. Since they are arranged in the same first region 22a, the temperature sensor 30 can quickly detect a temperature change and change the current value flowing through the temperature variable element 20.

  Furthermore, since the temperature sensor 30 is mounted in the first region 22a, the temperature is controlled to a desired temperature more reliably than in the second region 22b. Therefore, the temperature of the light emitting element 40 can be brought closer to the temperature of the temperature control surface 22 more reliably by the second wiring 61.

  As described above, in the light emitting element module 200, it is possible to more reliably suppress the temperature of the light emitting element 40 from fluctuating from a desired value.

2.2. Second Modified Example Next, a light emitting element module according to a second modified example of the present embodiment will be described with reference to the drawings. FIG. 7 is a perspective view schematically showing a light emitting element module 300 according to a second modification of the present embodiment, and corresponds to FIG. FIG. 8 is a plan view schematically showing a light emitting element module 300 according to a first modification of the present embodiment, and corresponds to FIG.

  Hereinafter, in the light emitting element module 300 according to the second modification of the present embodiment, the constituent members of the light emitting element module 100 according to the present embodiment, or the constituent members of the light emitting element module 200 according to the second modification of the present embodiment. Members having similar functions are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the example of the light emitting element module 100, as shown in FIG. 1, the other end 60b of the first wiring 60 and the other end 61b of the second wiring 61 are joined to the temperature control surface 22 having conductivity. On the other hand, in the light emitting element module 300, the other end 60 b of the first wiring 60 and the other end 61 b of the second wiring 61 are formed on the first insulating member 70 as shown in FIGS. 7 and 8. Bonded to the first pad 72.

  The first insulating member 70 is mounted on the other portion 20b of the temperature control surface 22 through, for example, silver paste. The first insulating member 70 may have a plate shape. A first pad 72 is formed on the first insulating member 70 (on the surface of the first insulating member 70). The first insulating member 70 has thermal conductivity and can transfer the heat of the temperature control surface 22 to the first wiring 60 and the second wiring 61. Further, the first insulating member 70 can transfer the heat of the first wiring 60 and the second wiring 61 to the temperature control surface 22. Similarly, the first pad 72 has thermal conductivity. That is, the other end 60 b of the first wiring 60 and the other end 61 b of the second wiring 61 are thermally connected to the temperature control surface 22 via the first pad 72 and the first insulating member 70.

  Examples of the material of the first insulating member 70 include ceramic and alumina having thermal conductivity. The material of the 1st pad 72 will not be specifically limited if it has heat conductivity and electroconductivity.

  According to the light emitting element module 300, the other end 60b of the first wiring 60 and the other end 61b of the second wiring 61 are electrically connected even if the temperature control surface 22 is not conductive. Both can be thermally connected to the temperature control surface 22. That is, the wirings 60 and 61 and the first pad 72 can form a wiring that conducts between the first terminal 50 and the first electrode 42.

  According to the light emitting element module 300, as shown in FIG. 8, the first insulating member 70 may be mounted in the first region 22a. Thereby, as above-mentioned, it can suppress more reliably that the temperature of the light emitting element 40 fluctuates from a desired value.

2.3. Third Modified Example Next, a light emitting element module according to a third modified example of the present embodiment will be described with reference to the drawings. FIG. 9 is a perspective view schematically showing a light emitting element module 400 according to a third modification of the present embodiment, and corresponds to FIG.

  Hereinafter, in the light emitting element module 400 according to the third modification example of the present embodiment, members having the same functions as the constituent members of the light emitting element module 300 according to the second modification example of the present embodiment are denoted by the same reference numerals. Detailed description thereof will be omitted.

  In the example of the light emitting element module 300, as illustrated in FIG. 7, the second electrode 44 and the second terminal 51 are electrically connected via the wiring 62. On the other hand, in the light emitting element module 400, as shown in FIG. 9, the second electrode 44 and the second terminal 51 are electrically connected via the third wiring 67 and the fourth wiring 68.

One end 67 a of the third wiring 67 is joined to the second terminal 51, and the other end 67 b of the third wiring 67 is joined to the other portion 20 b of the temperature control surface 22. One end 68 a of the fourth wiring 68 is joined to the second electrode 44, and the other end 68 b of the fourth wiring 68 is joined to the other portion 20 b of the temperature control surface 22. The other end 60b of the first wiring 60 and the other end 61b of the second wiring 61 are electrically connected by the temperature control surface 22 having conductivity. For example, the other end 67 b of the third wiring 67 and the other end 68 b of the fourth wiring 68 are separated from each other.

  Although not shown, the other end 67b of the third wiring 67 and the other end 68b of the fourth wiring 68 may be joined to or in contact with each other. Further, the third wiring 67 and the fourth wiring 68 may be integrally formed as long as a part of the wiring is bonded or in contact with the temperature control surface 22.

  The material of the wirings 67 and 68 is not particularly limited as long as it is conductive, and examples thereof include gold, copper, and aluminum.

  According to the light emitting element module 400, the second electrode 44 and the second terminal 51 are further electrically connected via the temperature control surface 22 controlled to a desired temperature. Therefore, the light emitting element module 400 can suppress the temperature of the light emitting element 40 from fluctuating from a desired value more reliably than the light emitting element module 300, for example.

  Although not shown, the other end 67b of the third wiring 67 and the other end 68b of the fourth wiring 68 may be joined to the first region 22a (see FIG. 8) on which the temperature sensor 30 is mounted. .

2.4. Fourth Modified Example Next, a light emitting element module according to a fourth modified example of the present embodiment will be described with reference to the drawings. FIG. 10 is a perspective view schematically showing a light emitting element module 500 according to a fourth modification of the present embodiment, and corresponds to FIG.

  Hereinafter, in the light emitting element module 500 according to the fourth modification example of the present embodiment, members having the same functions as those of the light emitting element module 400 according to the third modification example of the present embodiment are denoted by the same reference numerals. Detailed description thereof will be omitted.

  In the example of the light emitting element module 400, as shown in FIG. 9, the other end 67b of the third wiring 67 and the other end 68b of the fourth wiring 68 are joined to the temperature control surface 22 having conductivity. On the other hand, in the light emitting element module 500, as shown in FIG. 10, the other end 67b of the third wiring 67 and the other end 68b of the fourth wiring 68 are second pads formed on the second insulating member 71. 73 is joined.

  The second insulating member 71 is mounted on the other portion 20b of the temperature control surface 22 through, for example, silver paste. The second insulating member 71 may have a plate shape. A second pad 73 is formed on the second insulating member 71 (on the surface of the second insulating member 71). The second insulating member 71 has thermal conductivity and can transfer the heat of the temperature control surface 22 to the third wiring 67 and the fourth wiring 68. Further, the second insulating member 71 can transfer the heat of the third wiring 67 and the fourth wiring 68 to the temperature control surface 22. Similarly, the second pad 73 has thermal conductivity. That is, the other end 67 b of the third wiring 67 and the other end 68 b of the fourth wiring 68 are thermally connected to the temperature control surface 22 via the second pad 73 and the second insulating member 71.

  Examples of the material of the second insulating member 71 include ceramic and alumina having thermal conductivity. The material of the second pad 72 is not particularly limited as long as it has thermal conductivity and conductivity.

According to the light emitting element module 500, the other end 67b of the third wiring 67 and the other end 68b of the fourth wiring 68 are electrically connected even if the temperature control surface 22 does not have conductivity. Both can be thermally connected to the temperature control surface 22.

  Although not shown, the second insulating member 71 may be mounted on the first region 22a (see FIG. 8) where the temperature sensor 30 is mounted.

2.5. Fifth Modification Next, a light emitting element module according to a fifth modification of the present embodiment will be described with reference to the drawings. FIG. 11 is a perspective view schematically showing a light emitting element module 600 according to a fifth modification of the present embodiment, and corresponds to FIG.

  Hereinafter, in the light emitting element module 600 according to the fifth modification example of the present embodiment, members having the same functions as those of the constituent members of the light emitting element module 100 according to the present embodiment are denoted by the same reference numerals, and detailed description thereof. Is omitted. This means that a light emitting element module 700 according to a sixth modification, a light emitting element module 800 according to a seventh modification, a light emitting element module 900 according to an eighth modification, and a light emitting element module according to a ninth modification, which will be described later. The same applies to 1000.

  In the example of the light emitting element module 100, the first electrode 42 and the second electrode 44 are formed on the second surface 46 b side of the semiconductor layer 46 as shown in FIGS. 1 and 5. In contrast, in the light emitting element module 600, as shown in FIG. 11, the first electrode 42 is formed on the first surface 46a side of the semiconductor layer 46, and the second electrode 44 is formed on the second surface 46b of the semiconductor layer 46. Formed on the side. That is, the light emitting element 40 of the light emitting element module 600 has a configuration in which the semiconductor layer 46 is sandwiched between the first electrode 42 and the second electrode 44. The first electrode 42 is joined to the mounting portion 20 a of the temperature control surface 22.

  In the light emitting element module 600, the first terminal 50 is electrically connected to the first electrode 42 via the first wiring 60 and the conductive temperature control surface 22 without using the second wiring 61 (see FIG. 1). Can be connected. That is, the first wiring 60 and the temperature control surface 22 can form a wiring that conducts between the first terminal 50 and the first electrode 42.

  In the light emitting element module 600, as shown in FIG. 12, the second electrode 46 and the second terminal 51 may be electrically connected by a third wiring 67 and a fourth wiring 68. The other end 67 b of the third wiring 67 and the other end 68 b of the fourth wiring 68 may be joined to the second pad 73. The second pad 73 may be formed on the second insulating member 71 mounted on the temperature control surface 22. For the third wiring 67, the fourth wiring 68, the second pad 73, and the second insulating member 71, the contents described in the above “light emitting element module 500 according to the fourth modification” can be applied.

2.6. Sixth Modification Next, a light emitting element module according to a sixth modification of the present embodiment will be described with reference to the drawings. FIG. 13 is a perspective view schematically showing a light emitting element module 700 according to a sixth modification of the present embodiment, and corresponds to FIG. FIG. 14 is a plan view schematically showing the light emitting element 40 of the light emitting element module 700 according to the sixth modification of the present embodiment, and corresponds to FIG.

The example of the light emitting element module 100 has one second wiring 61 as shown in FIGS. 1 and 5. On the other hand, the example of the light emitting element module 700 has a plurality of second wirings 61 as shown in FIGS. 13 and 14. In the illustrated example, three second wirings 61 are provided, but the number is not particularly limited. Although not shown, a plurality of wirings 62 may be provided.

  According to the light emitting element module 700, since the number of the second wirings 61 is larger than that of the light emitting element module 100, the heat of the temperature control surface 22 can be transmitted to the light emitting element 40 more. Alternatively, the temperature control surface 22 can absorb more heat from the light emitting element 40. Thereby, the light emitting element module 700 can suppress more reliably that the temperature of the light emitting element 40 fluctuates from a desired value.

  In the light emitting element module 600, as shown in FIG. 15, the second electrode 44 and the second terminal 51 may be electrically connected by a third wiring 67 and a fourth wiring 68. The other end 67 b of the third wiring 67 and the other end 68 b of the fourth wiring 68 may be joined to the second pad 73. The second pad 73 may be formed on the second insulating member 71 mounted on the temperature control surface 22. For the third wiring 67, the fourth wiring 68, the second pad 73, and the second insulating member 71, the contents described in the above “light emitting element module 500 according to the fourth modification” can be applied.

2.7. Seventh Modification Next, a light emitting element module according to a seventh modification of the present embodiment will be described with reference to the drawings. FIG. 16 is a perspective view schematically showing a light emitting element module 800 according to a seventh modification of the present embodiment, and corresponds to FIG. FIG. 17 is a plan view schematically showing the light emitting element 40 of the light emitting element module 800 according to the seventh modification of the present embodiment, and corresponds to FIG.

  In the light emitting element module 800, the light emitting element 40 has a dummy electrode 49 as shown in FIG. The dummy electrode 49 is formed on the second surface 46 b side of the semiconductor layer 46. In the illustrated example, two dummy electrodes 49 are provided, but the number is not particularly limited. The dummy electrode 49 is separated from the first electrode 42 and the second electrode 44 and is electrically separated from the first electrode 42 and the second electrode 44.

  As shown in FIGS. 16 and 17, the light emitting element module 800 is provided with a fifth wiring 69. A plurality of fifth wires 69 may be provided according to the number of dummy electrodes 49. One end 69 a of the fifth wiring 69 is joined to the dummy electrode 49, and the other end 69 b of the fifth wiring 69 is joined to the temperature control surface 22. The material of the fifth wiring 69 is not particularly limited as long as it is conductive, and examples thereof include gold, copper, and aluminum.

  According to the light emitting element module 800, for example, even when the area of the first electrode 42 cannot be increased and the number of the second wirings 61 cannot be increased, the temperature via the fifth wiring 69 is increased. The heat of the control surface 22 can be transferred to the light emitting element 40. In addition, the heat of the light emitting element 40 can be absorbed through the fifth wiring 69.

2.8. Eighth Modification Next, a light-emitting element module according to an eighth modification of the present embodiment will be described with reference to the drawings. FIG. 18 is a perspective view schematically showing a light emitting element module 900 according to an eighth modification of the present embodiment, and corresponds to FIG.

In the light emitting element module 900, as shown in FIG. 18, the temperature control surface 22 includes a first portion 27a and a second portion 27b that is electrically separated from the first portion 27a. For example, as shown in FIG. 18, by selectively metallizing the first portion 27a and the second portion 27b via the insulating portion 28, the first portion 27a and the second portion 27b are electrically connected. It may be separated. Further, the first portion 27a and the second portion 27b may be electrically separated by forming a groove (not shown) in the temperature control surface 22 having conductivity.

  The first electrode 42 and the first terminal 50 are electrically connected via the first wiring 60 and the second wiring 61. One end 60a of the first wiring 60 is joined to the first terminal 50, and the other end 60b of the first wiring 60 is joined to the first portion 27a. One end 61a of the second wiring 61 is joined to the first electrode 42, and the other end 61b of the second wiring 61 is joined to the first portion 27a. The other end 60b of the first wiring 60 and the other end 61b of the second wiring 61 are electrically connected by a first portion 27a having conductivity.

  The second electrode 44 and the second terminal 51 are electrically connected via the third wiring 67 and the fourth wiring 68. One end 67a of the third wiring 67 is joined to the second terminal 51, and the other end 67b of the third wiring 67 is joined to the second portion 27b. One end 68a of the fourth wiring 68 is joined to the second electrode 44, and the other end 68b of the fourth wiring 68 is joined to the second portion 27b. The other end 67b of the third wiring 67 and the other end 68b of the fourth wiring 68 are electrically connected by a conductive second portion 27b.

  In the illustrated example, the light emitting element 40 is mounted on the first portion 27a, but may be mounted on the second portion 27b.

  According to the light emitting element module 900, temperature control is performed on the first electrode 42 and the second electrode 44 without arranging an insulating member on the temperature control surface 22 and without shorting the first terminal 50 and the second terminal 51. The heat of the surface 22 can be transferred. Further, the heat of the light emitting element 40 can be absorbed from the first electrode 42 and the second electrode 44.

2.9. Ninth Modification Next, a light-emitting element module according to a ninth modification of the present embodiment will be described with reference to the drawings. FIG. 19 is a perspective view schematically showing a light emitting element module 1000 according to a ninth modification of the present embodiment, and corresponds to FIG.

  In the light emitting element module 100, a Peltier element is used as an example of the temperature variable element 20. On the other hand, the light emitting element module 1000 uses a heater as the temperature variable element 20 as shown in FIG.

  The temperature variable element 20 can include a resistance portion 21a and conductive portions 21b and 21c that sandwich the resistance portion 21a. The conductive portion 21 b is electrically connected to the terminal 52 through the wiring 63. The conductive portion 21 c is electrically connected to the terminal 53 through the wiring 64. Thereby, a voltage can be applied to the resistance part 21 and the resistance part 21a can generate heat. The resistance portion 21 a has a temperature control surface 22, and the light emitting element 40 is mounted on the temperature control surface 22. Therefore, the light emitting element 40 can be heated by causing the resistance portion 21a to generate heat. The light emitting element module 1000 can be suitably used particularly when the temperature outside the package 10 is low.

3. Atomic Oscillator Next, an atomic oscillator according to this embodiment will be described with reference to the drawings. FIG. 20 is a diagram illustrating a configuration example of the atomic oscillator 2000 according to the present embodiment.

The atomic oscillator 2000 includes a light emitting element module (the light emitting element module 100 in the illustrated example), a temperature control circuit 2110, a gas cell 2120, a photodetector 2130, a detection circuit 2140, and a current drive circuit 2150 according to the present invention. A low frequency oscillator 2160, a detection circuit 2170, a voltage controlled crystal oscillator (VCXO: Voltage Controlled).
(Crystal Oscillator) 2180, a modulation circuit 2190, a low-frequency oscillator 2200, and a frequency conversion circuit 2210.

  The temperature control circuit 2110 can control the value of current that flows through the temperature variable element 20 of the light emitting element module 100 based on the temperature detected by the temperature sensor 30 of the light emitting element module 100. Thereby, the temperature control surface 22 of the light emitting element module 100 is temperature-controlled.

  The gas cell 2120 is a container in which gaseous alkali metal atoms are enclosed.

  The light emitting element 40 of the light emitting element module 100 generates a plurality of lights having different frequencies and irradiates the gas cell 2120. Specifically, the center wavelength λ0 (center frequency is f0) of the light emitted from the light emitting element 40 is controlled by the drive current output from the current drive circuit 2150. The light emitting element 40 is modulated using the output signal of the frequency conversion circuit 2210 as a modulation signal. That is, by superimposing the output signal (modulation signal) of the frequency conversion circuit 2210 on the drive current from the current drive circuit 2150, the light emitting element 40 generates modulated light.

  The photodetector 2130 detects the light transmitted through the gas cell 2120 and outputs a detection signal corresponding to the light intensity. When the alkali metal atom is irradiated with two types of light whose frequency difference matches the frequency corresponding to the energy difference ΔE12 between the two ground levels of the alkali metal atom, the alkali metal atom causes an EIT phenomenon. As the number of alkali metal atoms causing the EIT phenomenon increases, the intensity of light transmitted through the gas cell 2120 increases, and the voltage level of the output signal of the photodetector 2130 increases.

  The output signal of the photodetector 2130 is input to the detection circuit 2140 and the detection circuit 2170. The detection circuit 2140 synchronously detects the output signal of the photodetector 2130 using the oscillation signal of the low frequency oscillator 2160 that oscillates at a low frequency of about several Hz to several hundred Hz.

  The current driving circuit 2150 generates a driving current having a magnitude corresponding to the output signal of the detection circuit 2140, supplies the driving current to the light emitting element 40 of the light emitting element module 100, and the center wavelength λ0 (center frequency f0) of the emitted light from the light emitting element 40. ) To control. Specifically, the wavelength λ1 (frequency f1) corresponding to the energy difference between the excited level of the alkali metal atom and the first ground level, the energy between the excited level of the alkali metal atom and the second ground level. For the wavelength λ2 (frequency f2) corresponding to the difference, the center wavelength λ0 is controlled to match (λ1 + λ2) / 2 (the center frequency f0 matches (f1 + f2) / 2).

  However, the center wavelength λ0 does not necessarily need to exactly match (λ1 + λ2) / 2, and may be a wavelength in a predetermined range centered at (λ1 + λ2) / 2. In order to enable synchronous detection by the detection circuit 2140, an oscillation signal of the low frequency oscillator 2160 (the same signal as the oscillation signal supplied to the detection circuit 2140) is superimposed on the drive current generated by the current drive circuit 2150. The

  The center wavelength λ0 (center frequency f0) of light generated by the light emitting element 40 is finely adjusted by a feedback loop passing through the light emitting element 40, the gas cell 2120, the photodetector 2130, the detection circuit 2140, and the current driving circuit 2150 of the light emitting element module 100. Is done.

The detection circuit 2170 synchronously detects the output signal of the photodetector 2130 using the oscillation signal of the low frequency oscillator 2200 that oscillates at a low frequency of several Hz to several hundred Hz. Then, the oscillation frequency of the voltage controlled crystal oscillator (VCXO) 2180 is finely adjusted in accordance with the magnitude of the output signal of the detection circuit 2170. The voltage controlled crystal oscillator (VCXO) 2180 oscillates at about several MHz to several tens of MHz, for example.

  The modulation circuit 2190 modulates the output signal of the voltage controlled crystal oscillator (VCXO) 2180 using the oscillation signal of the low frequency oscillator 2200 as a modulation signal in order to enable the synchronous detection by the detection circuit 2170. The modulation circuit 2190 can be realized by a frequency mixer (mixer), a frequency modulation (FM) circuit, an amplitude modulation (AM) circuit, or the like.

  The frequency conversion circuit 2210 converts the output signal of the modulation circuit 2180 into a signal having a frequency that is ½ of the frequency corresponding to ΔE12. The frequency conversion circuit 2210 can be realized by, for example, a PLL (Phase Locked Loop) circuit.

  In the atomic oscillator 2000 configured as described above, assuming that the EIT signal is symmetrical, the light emitting element 40 of the light emitting element module 100, the gas cell 2120, the photodetector 2130, the detection circuit 2170, and the voltage controlled crystal oscillator (VCXO) 2180. By the feedback loop passing through the modulation circuit 2190 and the frequency conversion circuit 2120, the frequency of the output signal of the frequency conversion circuit 2120 is finely adjusted so as to be exactly the same as half the frequency corresponding to ΔE12. For example, if the alkali metal atom is a cesium atom, the frequency corresponding to ΔE12 is 9.192631770 GHz, so the frequency of the output signal of the frequency conversion circuit 2120 is 4.59631585 GHz.

  Then, as described above, the output signal of the frequency conversion circuit 2120 becomes a modulation signal (modulation frequency fm), and the light emitting element 40 of the light emitting element module 100 generates a plurality of lights including resonant light pairs and irradiates the gas cell 2120. .

  The atomic oscillator 2000 includes the light emitting element module 100 that can suppress temperature fluctuation of the light emitting element 40. Therefore, the light emitting element 40 of the light emitting element module 100 can irradiate the gas cell 2120 with light with high frequency accuracy. Therefore, the atomic oscillator 2000 can operate stably.

  The above-described embodiments and modifications are merely examples, and the present invention is not limited to these. For example, it is possible to appropriately combine each embodiment and each modification.

  The present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same objects and effects). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

10 packages, 12 base parts, 14 lid parts, 16 light transmission parts, 20 temperature variable elements,
20a mounting part, 20b other part, 21a resistance part, 21b conductive part,
21c conductive portion, 22 temperature control surface, 22a first region, 22b second region,
23a short side, 23b long side, 24 pad forming surface, 25 pads, 26 pads,
27a first part, 27b second part, 28 insulating part, 30 temperature sensor,
32 pads, 34 pads, 40 light emitting elements, 42 first electrode, 44 second electrode,
46 semiconductor layer, 46a first surface, 46b second surface, 49 dummy electrode, 50 first terminal, 51 second terminal, 52, 53, 54, 55 terminal, 60 first wiring,
60a, one end of the first wiring, 60b the other end of the first wiring, 61 second wiring,
61a, one end of the second wiring, 61b the other end of the second wiring,
62, 63, 64, 65, 66 wiring, 67 third wiring, 67a one end of the third wiring,
67b, the other end of the third wiring, 68 the fourth wiring, 68a, one end of the fourth wiring,
68b, the other end of the fourth wiring, 69 the fifth wiring, 69a one end of the fifth wiring,
69b, the other end of the fifth wiring, 100 to 1000 light emitting element module,
2000 atomic oscillator, 2110 temperature control circuit, 2120 gas cell,
2130 photodetector, 2140 detection circuit, 2150 current drive circuit,
2160 low frequency oscillator, 2170 detection circuit, 2180 voltage controlled crystal oscillator,
2190 Modulation circuit, 2200 Low frequency oscillator, 2210 Frequency conversion circuit

Claims (7)

A temperature-variable element having a temperature-controlled surface that is temperature-controlled and conductive;
A light emitting device having a first electrode and mounted on a part of the temperature control surface;
A first terminal for supplying power to the first electrode;
A wiring conducting between the first terminal and the first electrode;
Anda temperature sensor for detecting the temperature of the disposed in said temperature control surface the temperature control surface,
The wiring is thermally connected to other portions of the temperature control surface ;
A first insulating member mounted on the other part of the temperature control surface; and a first pad disposed on the surface of the first insulating member;
The wiring includes a first wiring having one end bonded to the first terminal and the other end bonded to the first pad, one end bonded to the first electrode, and the other end bonded to the first pad. A second wiring that includes:
The temperature sensor and the first insulating member are between the two sides of the first side and the second side of the temperature control surface in a plan view, and the light emission is performed in a direction in which the two sides are opposed to each other. The light emitting element module arrange | positioned in the area | region from the position where an element is arrange | positioned to the said 1st edge | side . In claim 1,
The light emitting element module in which the position where the said light emitting element is arrange | positioned exists on the straight line which passes along the center of the said temperature control surface. In claim 1 or 2,
The light emitting element module, wherein the first insulating member is disposed between the light emitting element and the temperature sensor in a direction in which the two sides face each other. In any one of Claims 1 thru | or 3,
The temperature control surface is a light emitting element module in which a surface on which the temperature sensor is arranged and a surface on which the first insulating member is arranged are formed from one continuous surface. In any one of Claims 1 thru | or 4 ,
The light emitting element has a second electrode,
A second terminal for supplying power to the second electrode;
A second insulating member mounted on the other part of the temperature control surface;
A second pad disposed on the surface of the second insulating member;
A third wiring having one end connected to the second terminal and the other end connected to the second pad;
And a fourth wiring having one end connected to the second electrode and the other end connected to the second pad. In any one of Claims 1 thru | or 5 ,
A light emitting element module having a plurality of the second wirings. Claims 1 including a light emitting element module according to any one of 6, atomic oscillator.

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