JP6177621B2 - Sheet sticking device and sheet sticking method - Google Patents

Description

  The present invention relates to a sheet sticking apparatus and a sheet sticking method for sticking an adhesive sheet to an adherend.

  Conventionally, in a semiconductor manufacturing process, in order to facilitate handling of a semiconductor wafer, a mounting sheet (adhesive sheet) is attached to a semiconductor wafer (hereinafter sometimes simply referred to as “wafer”) and a ring frame (adhered body). A sheet sticking device that sticks and integrates has been proposed (see, for example, Patent Document 1).

JP 2005-159044 A

  However, in the sheet sticking device described in Patent Document 1, when the adhesive force of the adhesive sheet is weak, the adhesive sheet is peeled off from the adherend due to the weight of the wafer, etc., and falls with the wafer. Therefore, it is necessary to increase the pressing force when attaching the adhesive sheet to the adherend. However, when the pressing force is increased, there is a conflicting problem that the adherend and the wafer are damaged.

  The objective of this invention is providing the sheet sticking apparatus and the sheet sticking method which can stick an adhesive sheet to a to-be-adhered body so that it may not peel easily even if it does not enlarge pressing force.

In order to achieve the above object, the sheet sticking device of the present invention is a sheet sticking device for sticking an adhesive sheet to an adherend, and the adhesive sheet is attached to one surface of the adherend. And an other surface pasting portion that is displaced in a direction away from the pasting surface of the sheet main body stuck to the adherend and can be stuck to the other surface of the adherend, and is stuck to the adherend. Further, a displacement means for displacing the other surface pasting part in a direction away from the pasting surface by being moved from the opposite side of the pasting surface of the adhesive sheet to the side of the pasting surface by a driving device, and the other surface displaced. A pressing means for pressing the sticking portion against the other surface, the pressing means pressing the displaced other surface sticking portion against the other surface, and the pressing member against the surface of the other surface. With a second drive to move in the direction And wherein the are.

  Furthermore, it is preferable that the sheet sticking device of the present invention further includes a regulating unit that regulates movement of the adherend by applying a reaction force against the pressing force of the pressing unit to the adherend.

  On the other hand, the sheet sticking method of the present invention is a sheet sticking method for sticking an adhesive sheet to an adherend, and the adhesive sheet includes a sheet main body attached to one surface of the adherend and the adherend. Displaced in a direction away from the attachment surface of the sheet body attached to the body, and has an other surface attachment portion that can be attached to the other surface of the adherend, and the displaced other surface attachment portion is the other surface. It is characterized by pressing.

  According to the present invention as described above, the adhesive sheet can be applied to two different surfaces of the adherend by pressing and applying the other surface application portion to the other surface without increasing the pressing force. However, the adhesive sheet can be attached to the adherend so that it does not easily peel off.

Furthermore, in Rukoto sheet sticking apparatus equipped with displacement means, for example, or when the rigidity of the adhesive sheet is high, when such an adhesive layer between the other surface sticking part and the sheet main body are connected, attached other surface Even if the portion does not naturally displace due to gravity or the like in the direction away from the attachment surface of the sheet body, the other surface attachment portion can be reliably displaced in the direction away.

  In addition, if the sheet sticking device includes a restricting means, when the pressing means presses and sticks the other surface sticking portion, the adherend and the other face sticking are performed by the pressing force of the pressing means and the reaction force of the restricting means. It is possible to press with the part interposed therebetween, and the other surface sticking part can be reliably stuck. Furthermore, the movement of the adherend can be restricted by the restricting means, and the adherend can be prevented from being locally deformed by the pressing force.

The side view of the sheet sticking apparatus which concerns on embodiment of this invention. FIG. 2 is a partial perspective view of FIG. 1. (A)-(C) are operation | movement explanatory drawings of the sheet sticking apparatus of FIG. The partial side view of FIG. Operation | movement explanatory drawing of the sheet sticking apparatus which concerns on the modification of this invention. (A), (B) is operation | movement explanatory drawing of the sheet sticking apparatus which concerns on the other modification of this invention.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, an embodiment of the invention will be described with reference to the drawings.
In this embodiment, for example, when directions such as up, down, left, right, front, back, etc. are shown, all of FIG. When viewed from the appropriate orientation), the top, bottom, left, and right directions are parallel to the page, the front is the front direction perpendicular to the page, and the back is the back direction orthogonal to the page. To do.

  1 and 2, a sheet sticking device 10 is a device for sticking an adhesive sheet AS to a ring frame RF as an adherend, and the adhesive sheet AS is a sheet to be stuck to one surface RF1 of the ring frame RF. It has a main body AS1 and an other surface application portion AS2 that is displaced in a direction away from the application surface of the sheet main body AS1 attached to the ring frame RF and can be attached to the other surface RF2 of the ring frame RF, The pressing means 20 that presses the displaced other surface pasting portion AS2 against the other surface RF2, the displacement means 30 that displaces the other surface pasting portion AS2 in the direction away from the pasting surface of the sheet body AS1, and the pressing force of the pressing means 20 By applying a counter reaction force to the ring frame RF, the regulating means 40 for regulating the movement of the ring frame RF, the ring frame RF and the wafer W The supporting means 50 which is movable while supporting, positioned above the support means 50 and a sticking means 60 for sticking the adhesive sheet AS on the wafer WF and the ring frame RF.

  The adhesive sheet AS is obtained by laminating an adhesive AD layer on one surface of the base sheet BS, and a part of the entire circumference of the sheet body AS1 and the connection side JP at four positions in the sheet body AS1. The other surface sticking part AS2 formed non-annularly by the cut CU made non-continuous is provided. When the outer portion AS3 is affixed to one surface RF1 of the ring frame RF, the sheet body AS1 is formed with a pasting surface that is a plane including the interface between the outer portion AS3 and the one surface RF1, and the outer portion AS3. The inner portion AS4 located inside is attached to the wafer WF. The other surface pasting part AS2 is because the rigidity of the adhesive sheet AS is high, or the other side pasting part AS2 and the sheet body AS1 are connected by an adhesive AD or a connecting part (not shown) that can be easily cut. The other-surface pasting portion AS2 is not naturally displaced in a direction away from the pasting surface of the sheet main body AS1 due to gravity or the like.

  The wafer WF has a protective sheet PS attached to the lower surface on which a circuit is formed, is disposed in the opening of the ring frame RF, and an adhesive sheet AS is attached to one surface RF1 of the ring frame RF. It is integrated with the ring frame RF.

  As shown in FIGS. 3 and 4, the pressing means 20 is configured so that the pressing roller 21 accommodated in the displacing means 30, the arm 22 that supports the pressing roller 21, and the arm 22 can be rotated about the axis P <b> 1. A linear motor 24 as a driving device having a slider 23 to be supported, and a winding spring 25 for urging the arm 22 in the clockwise direction in FIG. 3 about the axis P1 are provided.

  The displacement means 30 includes a support member 32 supported by an output shaft 31A of a linear motion motor 31 as a drive device supported by a frame (not shown), and drive devices provided at four locations near the outer edge of the support member 32. And a bending member 34 supported by an output shaft 33A (see FIG. 3) of the rotation motor 33. The bending member 34 includes a support portion 35 extending in the left-right direction in FIG. 3, a pressing means holding portion 37 extending downward from the support portion 35 and having a concave groove 36 opened to the left in FIG. An inclined member 39 is provided below the holding portion 37 and formed with an inclined surface 38 that extends rightward in FIG. 3 as it goes downward. In the concave groove 36, the linear motor 24 is disposed, and a curved surface portion 36A that guides the pressing roller 21 and assists in and out of the concave groove 36 is formed.

  As shown in FIG. 3, the regulating means 40 includes a contact member 41 that contacts the outer portion AS3 from above, a shaft 42 that supports the contact member 41 and is slidable with respect to the support portion 35, An urging means 43 such as a spring or a resin for urging the contact member 41 downward is provided.

  The support means 50 is provided such that a suction hole (not shown) communicated with a pressure reduction means such as a pressure reduction pump or a vacuum ejector (not shown) is formed on the upper surface of the support table 50, and can be projected and retracted from the upper surface of the outer table 51 by a driving device (not shown). In addition, a linear motor 54 as a driving device having an inner table 52 formed on the upper surface with a suction hole (not shown) communicated with a decompression means such as a decompression pump or a vacuum ejector (not shown) and a slider 53 that supports the outer table 51. And. On the upper surface of the outer table 51, a recess 55 corresponding to the other surface pasting portion AS2 of the adhesive sheet AS is formed.

  Affixing means 60 folds back the release sheet RL, a support roller 61 that supports the original fabric RS on which the adhesive sheet AS is temporarily attached onto the strip-shaped release sheet RL, a plurality of guide rollers 62 that guide the original fabric RS. By a peeling plate 63 as a peeling means for peeling the adhesive sheet AS from the peeling sheet RL, a pressing roller 64 for pressing and sticking the adhesive sheet AS to the wafer WF and the ring frame RF, and a rotation motor 65 as a driving device. A pinch roller 67 that sandwiches the release sheet RL between the driving roller 66 and a drive roller 66 that is driven, and a collection roller 68 that is driven by a driving device (not shown) and collects the release sheet RL.

In the sheet sticking apparatus 10 described above, a procedure for sticking the adhesive sheet AS to the wafer WF and the ring frame RF will be described.
First, after the operator sets the original fabric RS as shown in FIG. 1 and inputs an operation start signal, the pasting means 60 drives the rotation motor 65 and a driving device (not shown) to feed out the original fabric RS and bond it. When it is detected by a detection means such as an optical sensor (not shown) or an imaging means that the leading end of the sheet AS is peeled by a predetermined amount at the tip of the peeling plate 63, the pasting means 60 is connected to the rotation motor 65 and a driving device (not shown). The driving is stopped, and the sheet sticking device 10 enters a standby state. Next, the ring frame RF is placed on the upper surface of the outer table 51 waiting at the position indicated by the solid line in FIG. When the wafer WF is mounted, the support means 50 drives a decompression means (not shown) to suck and hold the ring frame RF and the wafer WF, and to move the inner table 52 up and down, so that one surface RF1 of the ring frame RF and the wafer WF And the upper surface of the same are positioned in the same plane. Next, when the support means 50 drives the linear motor 54 and moves the slider 53 to the left, it is detected by a detection means such as an optical sensor or imaging means (not shown) that the ring frame RF has reached a predetermined position. The pasting means 60 drives the rotation motor 65 and a driving device (not shown) to feed out the original fabric RS in synchronism with the conveyance of the ring frame RF, and the peeling plate 63 on one surface RF1 of the ring frame RF and the upper surface of the wafer WF. The adhesive sheet AS peeled in step 1 is pressed by the pressing roller 64 and pasted. When it is detected by a detection means such as an optical sensor or an imaging means (not shown) that the ring frame RF to which the adhesive sheet AS is attached has reached the position indicated by the two-dot chain line in FIG. The drive of 54 is stopped.

  Next, when the displacing means 30 drives the linear motion motor 31 and lowers the bending member 34 into the recess 55 of the outer table 51 as shown in FIG. And the connecting portion with the sheet main body AS1 is disengaged and displaced in a direction away from the sticking surface of the sheet main body AS1. At this time, since the inclined surface 38 is formed on the inclined member 39, the displacement of the other surface pasting portion AS2 can be started from the position farthest from the connecting side JP, and the other surface pasting portion AS2 is gradually displaced. It is possible to displace the other surface pasting part AS2 in a state where it is reliably connected by the connecting side JP. As the bending member 34 is lowered, the contact member 41 comes into contact with the outer portion AS3, and when the bending member 34 is lowered to a predetermined position, the displacement means 30 stops driving the linear motion motor 31.

  Next, when the pressing means 20 drives the linear motor 24 and raises the slider 23, the pressing roller 21 is guided to the curved surface portion 36A, the pressing roller 21 protrudes from the concave groove 36, and the other surface pasting portion AS2 is ringed. Affix and press on the other surface RF2 of the frame RF. As a result, as shown in FIG. 3C, the adhesive sheet AS is pasted so as to sandwich the ring frame RF between the other surface pasting portion AS2 and the outer side portion AS3. At this time, since the contact member 41 is in contact with the outer side portion AS3, it is possible to restrict the ring frame RF from being moved upward by the pressing force of the pressing roller 21, so that the other surface pasting portion AS2 is moved to the other surface. It can be reliably affixed to RF2. When the other surface pasting part AS2 is pasted on the other surface RF2, the pressing means 20 drives the linear motor 24 to lower the slider 23 and return it to the position shown in FIG.

  Next, the displacing means 30 drives the linear motion motor 31 to return the bending member 34 to the position shown in FIG. 3A, and the wafer WF integrated with the ring frame RF is manually or manually conveyed by a conveying means (not shown). While transporting to the next step, the support means 50 drives the linear motor 54 to return the outer table 51 to the position indicated by the solid line in FIG. 1, and thereafter the same operation as described above is repeated.

According to this embodiment, there are the following effects.
That is, the adhesive sheet AS can be applied to two different surfaces of the ring frame RF by pressing the other surface application portion AS2 on the other surface RF2 so that it does not easily peel off without increasing the pressing force. The adhesive sheet AS can be attached to the ring frame RF.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described primarily with respect to particular embodiments, but may be configured for the above-described embodiments without departing from the scope and spirit of the invention. Various modifications can be made by those skilled in the art in terms of materials, quantity, and other detailed configurations. Therefore, the description limiting the shape, material, etc. disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such is included in this invention.

  For example, as shown in FIG. 5, it is possible to correspond to an adhesive sheet ASα in which the other surface sticking portion AS5 protrudes outward from the outer edge of the ring frame RF. In the case of such an adhesive sheet ASα, the displacing means 30 drives the rotation motor 33 to rotate the bending member 34 by 180 degrees about the axis P2, and the other surface sticking portion as shown by a two-dot chain line in FIG. What is necessary is just to press AS5 to the other surface RF2, and to stick. Moreover, other surface sticking part AS2 and AS5 should just be formed in the at least 1 location of adhesive sheet AS. Further, the bending member 34 may be provided so as not to be rotatable so as to be positioned inward and outward of the ring frame RF in correspondence with the other-surface pasting portions AS2 and AS5 without providing the rotation motor 33. Good.

Further, the pressing means 20 and the bending member 34 may each be constituted by one body or two bodies. In such a case, the displacement means is constituted by an articulated robot or the like as a driving device, and the pressing means 20 or the bending member 34 is bent. What is necessary is just to set it as the structure which moves the member 34 according to the position of other surface sticking part AS2, and is not limited to a number at all.
Further, the pressing means 20 and the bending member 34 may be provided so as to be independently movable. For example, the other-surface pasting portion AS2 is displaced by the bending member 34 so that the bending member 34 interferes with the operation of the pressing means 20. After being moved to a position that does not become the same, the other surface pasting portion AS2 can be pressed and pasted to the other surface RF2 by the separate pressing means 20.
For example, when the width of the ring frame RF is wide, the pressing means 20 is attached to the other surface only on the inner surface that forms the opening of the ring frame RF or only on the outer surface that forms the outer edge of the ring frame RF. The part AS2 may be affixed, and the sheet main body AS1 and the other surface affixing part AS2 may be affixed to two surfaces that are not located in the same plane.

  Further, the pressing means may be, for example, a pressing means 20B as shown in FIG. 6, and is accommodated in a recess 55B formed in the outer table 51, and the pressing roller 21B is movable in the left-right direction by the slider 23B of the linear motor 24B. It may be configured. Further, the pressing means may be configured to press and paste the other-surface pasting portion AS2 by causing a plate or the like to contact the other-surface pasting portion AS2 or injecting gas instead of the pressing roller 21. . Further, the pressing means 20 is provided with an articulated robot as a driving device, functions as a displacement means for displacing the other surface pasting part AS2, and presses and sticks the other side pasting part AS2 to the other surface RF2. May be.

  Further, for example, the displacement means 30 may be configured to bend by injecting gas toward the other surface pasting portion AS2, or the rigidity of the adhesive sheet AS is low and the other surface pasting portion AS2 is naturally formed by gravity. When displacing in a direction away from the sticking surface of the main body AS1, the displacing means 30 may be omitted. Further, the displacing means 30 may be configured to displace the other surface pasting portion AS2 upward. In this case, the ring frame RF is placed on the outer table 51 so that the adhesive sheet AS is positioned downward, The structure which injects gas upward toward the other surface sticking part AS2 on the upper surface of the table 51 may be adopted, and the pressing means 20 may be configured to press the upper side of the ring frame RF.

  The restricting means 40 may be any appropriate means for restricting movement of the ring frame RF in the pressing direction by applying a reaction force against the pressing force of the pressing means 20 to the ring frame RF. 43 may be omitted. Further, the regulating means 40 may not be provided.

Further, when the ring frame RF is transported by another device or the like, the sheet sticking device of the present application may not have the support means 50.
In addition, in the case where an adhesive sheet AS previously attached to the ring frame RF is to be applied to the sheet, the attaching means 60 may not be provided.
Further, the wafer WF is not essential, and the sheet sticking apparatus 10 may stick only the adhesive sheet AS to the ring frame RF.
Further, the adhesive sheet AS may be one in which the other surface pasting portion AS2 is not connected to the sheet main body AS1 at all other than the connecting side JP.
Further, the adhesive sheet AS may be formed in an annular shape by cutting continuously on the entire circumference without connecting the other surface pasting portion AS2 at the connecting side JP.

In addition, the material, type, shape, and the like of the adhesive sheet and adherend in the present invention are not particularly limited, and may be a rectangle other than a circle, an ellipse, or other shapes. For example, the adhesive sheet is a single layer having only an adhesive layer, one having an intermediate layer between the base sheet and the adhesive layer, and having three or more layers such as having a cover layer on the upper surface of the base sheet, Further, it may be a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer, and the double-sided adhesive sheet has a single-layer or multi-layer intermediate layer, It may be a single layer or multiple layers without any. Further, as the adherend, in addition to the ring frame RF having one opening in one plane, for example, one having a plurality of openings in one plane, or at a predetermined angle. One having a plurality of openings on two or more surfaces by bending, or one having a plurality of openings on a curved surface by bending at a predetermined curvature may be used. In the case of a frame member having an opening on a curved surface, the pasting surface is not a flat surface but a curved surface along the curved surface. Further, it may be a frame member or a plate-like member having a hole in the center, or may be a non-closed loop shape such as a C-shape, U-shape, V-shape, or U-shape, or no opening. It may be an adherend. Further, in place of the wafer WF, food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards and optical disks, glass plates, steel plates, ceramics, wood plates, resin plates, etc. Other members and articles can also be targeted. It should be noted that the adhesive sheet is replaced with functional and intended readings, for example, any shape such as a label for information description, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, etc. Any sheet, film, tape or the like can be attached to any adherend as described above.
Each means in the present invention is not limited in any way as long as it can perform the operation or function described for those means, and moreover, it is completely limited to the structure of only one embodiment shown in the above embodiment. is not. For example, the pressing means is not limited as long as it presses the displaced other-surface pasting portion against the other surface as long as it is within the range in light of the technical common sense at the beginning of the application (other means). Will be omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 20 Pressing means 30 Displacement means 40 Control means AS Adhesive sheet AS1 Sheet main body AS2 Other surface sticking part RF Ring frame (adhered body)
RF1 One side RF2 The other side

Claims (4)

A sheet sticking device for sticking an adhesive sheet to an adherend,
The adhesive sheet is displaced in a direction away from a sticking surface of the sheet main body attached to one surface of the adherend and the sheet main body attached to the adherend, and is attached to the other surface of the adherend. It has an other side application part that can be attached,
Displacement means for displacing the other surface pasting part in a direction away from the pasting surface by being moved by a driving device from the opposite side of the pasting surface of the adhesive sheet pasted to the adherend to the side of the pasting surface. When,
A pressing means for pressing the displaced other surface pasting portion against the other surface ;
The pressing means includes a pressing member that presses the displaced other surface pasting portion against the other surface, and a second driving device that moves the pressing member in the surface direction of the other surface. A sheet sticking device. A sheet sticking device for sticking an adhesive sheet to an adherend,
The adhesive sheet is displaced in a direction away from a sticking surface of the sheet main body attached to one surface of the adherend and the sheet main body attached to the adherend, and is attached to the other surface of the adherend. It has an other side application part that can be attached,
Displacement means for displacing the other surface pasting part in a direction away from the pasting surface by being moved by a driving device from the opposite side of the pasting surface of the adhesive sheet pasted to the adherend to the side of the pasting surface. When,
A pressing means for pressing the displaced other surface pasting portion against the other surface ;
The sheet pressing apparatus , wherein the pressing means ejects gas and presses the displaced other surface pasting portion against the other surface . A sheet sticking device for sticking an adhesive sheet to an adherend,
The adhesive sheet is displaced in a direction away from a sticking surface of the sheet main body attached to one surface of the adherend and the sheet main body attached to the adherend, and is attached to the other surface of the adherend. It has an other side application part that can be attached,
Displacement means for displacing the other surface pasting portion in a direction away from the pasting surface by jetting gas from the opposite side of the pasting surface in the adhesive sheet stuck to the adherend,
A pressing means for pressing the displaced other surface pasting portion against the other surface ;
The pressing means includes a pressing member that presses the displaced other surface pasting portion against the other surface, and a drive device that moves the pressing member in the surface direction of the other surface. Sheet pasting device. A sheet sticking device for sticking an adhesive sheet to an adherend,
The adhesive sheet is displaced in a direction away from a sticking surface of the sheet main body attached to one surface of the adherend and the sheet main body attached to the adherend, and is attached to the other surface of the adherend. It has an other side application part that can be attached,
Displacement means for displacing the other surface pasting portion in a direction away from the pasting surface by jetting gas from the opposite side of the pasting surface in the adhesive sheet stuck to the adherend,
A pressing means for pressing the displaced other surface pasting portion against the other surface ;
The sheet pressing apparatus , wherein the pressing means ejects gas and presses the displaced other surface pasting portion against the other surface .

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