JP6140025B2 - Optical surface shape detection system, surface shape detection method, and surface shape detection program - Google Patents

Description

  The present invention relates to an optical surface shape detection system, a surface shape detection method, and a surface shape detection program.

  There is a confocal microscope as a surface shape detector capable of detecting the surface shape of an observation object. In the confocal microscope, laser light emitted from a laser light source is condensed on an observation object by an objective lens. The reflected light from the observation object is collected by the light receiving lens and enters the light receiving element through the pinhole. The laser light is scanned two-dimensionally on the surface of the observation object. Further, the distribution of the amount of light received by the light receiving element is changed by changing the relative distance between the observation object and the objective lens. The peak of the amount of light received appears when the surface of the observation object is focused.

  An ultra-deep image having a very high depth of focus can be obtained based on the peak intensity of the received light amount distribution. Further, a height image showing the surface shape of the observation object can be obtained based on the peak position of the received light amount distribution. By using such a confocal microscope, the surface shape of the observation object can be detected with high accuracy (see, for example, Patent Document 1).

JP2012-155209A

  In the optical microscope as described above, the surface roughness of the observation object can be obtained based on the detected surface shape. For measuring the surface roughness of the observation object, in addition to optically detecting the surface shape of the observation object as described above, a stylus type that detects the surface roughness of the observation object using a stylus is used. A roughness meter is used. In the stylus type roughness meter, the stylus is scanned on the surface of the observation object. Based on the movement of the stylus, the roughness of the surface of the observation object is measured.

  The surface roughness of the observation object detected by the optical microscope is different from the surface roughness of the observation object detected by the stylus type roughness meter. Specifically, with a stylus type roughness meter, a detection limit value is determined according to the size of the tip of the stylus, and unevenness smaller than the detection limit value cannot be detected. On the other hand, in an optical microscope or the like, the detection limit value can be reduced by adjusting the size of the spot of light irradiated on the observation object. Therefore, when surface roughness is measured optically with an optical microscope or the like, it is possible to measure finer roughness than when surface roughness is measured with a stylus type roughness meter. There are advantages. On the other hand, when measuring the surface roughness optically, it is impossible to obtain the same measurement result as a stylus type roughness meter. Therefore, the data obtained by the optical microscope cannot be compared and collated with the data obtained by the stylus type roughness meter.

  An object of the present invention is to provide an optical surface shape detection system, a surface shape detection method, and a surface shape detection program capable of obtaining data that can be compared and collated with data obtained by a stylus type roughness meter. That is.

(1) An optical surface shape detection system according to a first aspect of the invention is an optical surface shape detection system for detecting the surface shape of an observation object, and provides light to the light receiving element and the surface of the observation object. An optical system for irradiating and irradiating the observation object to the light receiving element, a surface shape data generating unit for generating surface shape data representing the surface shape of the observation object based on an output signal of the light receiving element, and a virtual A stylus data storage unit that stores stylus data representing the shape of the stylus that is set automatically, the surface shape data generated by the surface shape data generation unit, and the stylus data stored in the stylus data storage unit And a stylus detection data generation unit that generates stylus detection data corresponding to the movement of the stylus when the stylus moves on the surface of the observation object. The stylus has a reference position and a curved tip. And stylus data Includes curvature information about the curvature of the tip, stylus detection data is representative of the trajectory of the reference position in the case of moving the surface of the stylus is observed object.

  In this optical surface shape detection system, light is irradiated on the surface of the observation object and the irradiated light is guided to the light receiving element. Surface shape data representing the surface shape of the observation object is generated by the surface shape data generation unit based on the output signal of the light receiving element. Further, stylus data representing the virtually set stylus shape is stored in the stylus data storage unit. Based on the generated surface shape data and stored stylus data, the stylus detection data generation unit generates stylus detection data corresponding to the movement of the stylus when the stylus moves on the surface of the observation object. Is done.

  Thus, surface shape data having high accuracy can be obtained by optically detecting the surface shape of the observation object. Further, stylus detection data equivalent to the case where the surface shape of the observation object is detected using the stylus is obtained based on the surface shape data. In this case, stylus detection data can be handled in the same way as data obtained by a stylus roughness meter. This makes it possible to compare and collate the stylus detection data with the data obtained from the stylus roughness meter. Therefore, by selectively using the surface shape data and the stylus detection data, it is possible to efficiently compare and collate various data.

Also, stylus is moved, and a reference position and a curved tip, stylus data includes a curvature information about the curvature of the tip, stylus detection data, the surface of the probe is observed object to display the trajectory of the reference position in the case of.

Thereby, the locus | trajectory of the reference | standard position of a stylus can be calculated | required based on curvature information.

( 2 ) The stylus further has a taper portion continuously extending from the tip portion, the taper portion has a diameter that increases as the distance from the tip portion increases, and the stylus data further includes a taper angle formed by the taper portion. May be included.

  In this case, the locus of the reference position of the stylus can be obtained based on the curvature information and the taper angle. Further, the shape of the set stylus is substantially equal to the actual shape of the stylus. Therefore, stylus detection data can be brought close to data obtained by a stylus type roughness meter.

( 3 ) Based on the curvature information included in the stylus data, the stylus detection data generation unit obtains the locus of the reference position when the tip moves while contacting the surface of the observation object, and uses the stylus data as the stylus data. A stylus detection that represents the trajectory of the reference position when either the tip or the taper moves while touching the observation object by correcting the obtained trajectory based on the taper angle of the included taper. Data may be generated.

  In this case, the amount of calculation is greatly reduced as compared with the case where the locus of the reference position is directly obtained when the tapered portion is present. Thereby, stylus detection data can be generated quickly without increasing the processing load.

( 4 ) The optical surface shape detection system may further include a curvature information setting unit operated by a user in order to set curvature information.

  In this case, the user can set the curvature information to a desired value. Therefore, the user can set the curvature information so as to coincide with a stylus that is generally used, and the curvature information can be set differently.

( 5 ) The stylus detection data generation unit performs filtering processing to remove high-frequency noise from the surface shape data, generates stylus detection data based on the surface shape data after the filtering processing, and is included in the stylus data The cut-off wavelength in the filtering process may be determined based on the curvature information.

  In this case, high-frequency noise can be appropriately removed from the surface shape data by the filtering process. In addition, since the stylus detection data is generated based on the surface shape data after the filtering process, the stylus detection data can be made closer to data obtained by a stylus roughness meter.

( 6 ) The tip has a spherical shape, the curvature information includes a radius of curvature, and the stylus detection data generation unit performs a filtering process using a Gaussian filter or a moving average filter, and sets a cutoff wavelength in the filtering process to the tip It may be determined to be a value not less than 1 and not more than 8 times the radius of curvature.

  In this case, high frequency noise can be appropriately removed from the surface shape data. Thereby, the stylus detection data can be made closer to the data obtained by the stylus type roughness meter.

( 7 ) The stylus detection data generation unit may perform a filtering process using a moving average filter, and determine the moving average score based on the determined cutoff wavelength.

  In this case, high frequency noise can be appropriately removed from the surface shape data. Thereby, the stylus detection data can be made closer to the data obtained by the stylus type roughness meter.

( 8 ) The stylus detection data generation unit may perform a filtering process using a median filter and determine a filter size in the filtering process according to curvature information.

  In this case, high frequency noise can be appropriately removed from the surface shape data. Thereby, the stylus detection data can be made closer to the data obtained by the stylus type roughness meter.

( 9 ) The optical surface shape detection system may further include a filtering intensity setting unit operated by a user to set the intensity of the filtering process.

  In this case, the filtering process can be performed with a desired intensity. Therefore, the accuracy of the stylus detection data can be adjusted.

( 10 ) The optical surface shape detection system generates optical image data representing the surface shape of the observation object based on the surface shape data, and also represents a surface shape of the observation object based on the stylus detection data. An image data generation unit that generates image data, an image selection unit that is operated by a user to select one of optical image data and stylus image data generated by the image data generation unit, and an image selection unit You may further provide the display part which displays the image based on one of the selected optical image data and stylus image data.

  In this case, the user can visually recognize the surface shape of the observation object based on the surface shape data and the surface shape of the observation object based on the stylus detection data. Further, when the user operates the image selection unit, these images can be selectively displayed on the display unit.

( 11 ) A surface shape detection method according to a second invention is a surface shape detection method for detecting the surface shape of an observation object, and irradiates the observation object with light while irradiating the surface of the observation object with light. A step of guiding the emitted light to the light receiving element, a step of generating surface shape data representing the surface shape of the observation object based on an output signal of the light receiving element, and a stylus representing a virtually set shape of the stylus Based on the step of storing data and the generated surface shape data and stored stylus data, stylus detection data corresponding to the movement of the stylus when the stylus moves on the surface of the observation object is generated. and a step of, stylus includes a reference position and a curved tip, stylus data includes a curvature information about the curvature of the tip, stylus detection data, the stylus observation target When moving the surface of It illustrates a locus of that reference position.

  In this surface shape detection method, light is irradiated on the surface of the observation object and the irradiated light is guided to the light receiving element. Surface shape data representing the surface shape of the observation object is generated based on the output signal of the light receiving element. In addition, stylus data representing a virtually set stylus shape is stored. Based on the generated surface shape data and stored stylus data, stylus detection data corresponding to the movement of the stylus when the stylus moves on the surface of the observation object is generated.

Thus, surface shape data having high accuracy can be obtained by optically detecting the surface shape of the observation object. Further, stylus detection data equivalent to the case where the surface shape of the observation object is detected using the stylus is obtained based on the surface shape data. In this case, stylus detection data can be handled in the same way as data obtained by a stylus roughness meter. This makes it possible to compare and collate the stylus detection data with the data obtained from the stylus roughness meter. Therefore, by selectively using the surface shape data and the stylus detection data, it is possible to efficiently compare and collate various data.
The stylus has a reference position and a curved tip, the stylus data includes curvature information regarding the curvature of the tip, and the stylus detection data indicates that the stylus moves on the surface of the observation object. The locus of the reference position in the case of Thereby, the locus | trajectory of the reference | standard position of a stylus can be calculated | required based on curvature information.

( 12 ) A surface shape detection program according to a third aspect of the invention is a surface shape detection program for causing a processing device to execute a surface shape detection process for detecting the surface shape of an observation object, on the surface of the observation object. A process for irradiating light and guiding the light irradiated to the observation target to the light receiving element, a process for generating surface shape data representing the surface shape of the observation target based on the output signal of the light receiving element, and a virtual setting Of the stylus when the stylus moves on the surface of the object to be observed based on the processing for storing the stylus data representing the shape of the stylus and the generated surface shape data and the stored stylus data. The processing device generates processing for generating stylus detection data corresponding to movement , the stylus has a reference position and a curved tip, and the stylus data includes curvature information regarding the curvature of the tip. Including stylus detection Chromatography data is representative of the trajectory of the reference position in the case of moving the surface of the stylus is observed object.

According to the surface shape detection program, the surface of the observation object is irradiated with light and the irradiated light is guided to the light receiving element. Surface shape data representing the surface shape of the observation object is generated based on the output signal of the light receiving element. In addition, stylus data representing a virtually set stylus shape is stored. Based on the generated surface shape data and stored stylus data, stylus detection data corresponding to the movement of the stylus when the stylus moves on the surface of the observation object is generated.

Thus, surface shape data having high accuracy can be obtained by optically detecting the surface shape of the observation object. Further, stylus detection data equivalent to the case where the surface shape of the observation object is detected using the stylus is obtained based on the surface shape data. In this case, stylus detection data can be handled in the same way as data obtained by a stylus roughness meter. This makes it possible to compare and collate the stylus detection data with the data obtained from the stylus roughness meter. Therefore, by selectively using the surface shape data and the stylus detection data, it is possible to efficiently compare and collate various data.
The stylus has a reference position and a curved tip, the stylus data includes curvature information regarding the curvature of the tip, and the stylus detection data indicates that the stylus moves on the surface of the observation object. The locus of the reference position in the case of Thereby, the locus | trajectory of the reference | standard position of a stylus can be calculated | required based on curvature information.

  The stylus detection data that can be compared and collated with the data obtained by the stylus type roughness meter is obtained.

It is a block diagram which shows the structure of the confocal microscope system which concerns on one embodiment of this invention. It is a figure for defining an X direction, a Y direction, and a Z direction. It is a figure which shows the relationship between the position of the Z direction of an observation target object, and the light reception intensity | strength of a light receiving element in one pixel. It is a figure which shows the surface shape of an observation target object. It is a figure which shows the scanning method of the laser beam at the time of the production | generation of cross-section curve data. It is a figure which shows the connection method of the cross-section curve data in a some strip | belt-shaped area | region. It is a figure for demonstrating the relationship between the cross-section curve represented by cross-section curve data, and a stylus. It is a figure for demonstrating the relationship between the cross-section curve represented by cross-section curve data, and a stylus. It is a figure for demonstrating the relationship between the cross-section curve represented by cross-section curve data, and a stylus. It is a figure for demonstrating the relationship between the cross-section curve represented by cross-section curve data, and a stylus. It is a figure for demonstrating the relationship between the cross-section curve represented by cross-section curve data, and a stylus. It is a figure which shows the cross-sectional curve represented by stylus detection data. It is a figure for demonstrating the function g (x) showing the shape of a stylus. It is a figure for demonstrating the type | formula showing a stylus cross-section curve. It is a figure for demonstrating the type | formula showing a stylus cross-section curve. It is the elements on larger scale of the cross-sectional curve represented by cross-section curve data. It is a figure which shows the process which produces | generates stylus detection data from the cross-section curve data of FIG. It is the elements on larger scale of the stylus section curve expressed by stylus detection data. It is a figure which shows the example of a display of a display part. It is a figure which shows a stylus setting image. It is a flowchart which shows the surface shape detection process in a confocal microscope system. It is a figure for demonstrating the other example of the production | generation method of stylus detection data. It is a figure for demonstrating the other example of the production | generation method of stylus detection data. It is a figure for demonstrating the other example of the production | generation method of stylus detection data. It is a figure which shows an example of a stylus initial setting image. It is a figure which shows the other example of a stylus. It is a figure which shows the scanning direction of a laser beam, and the actual moving direction of a stage.

  Hereinafter, an optical surface shape detection system according to an embodiment of the present invention will be described with reference to the drawings. In the present embodiment, a confocal microscope system will be described as an example of the optical surface shape detection system according to the present invention.

(1) Basic Configuration of Confocal Microscope System FIG. 1 is a block diagram showing a configuration of a confocal microscope system 500 according to an embodiment of the present invention. As shown in FIG. 1, the confocal microscope system 500 includes a measurement unit 100, a PC (personal computer) 200, an operation unit 250, a control unit 300, and a display unit 400. The measurement unit 100 includes a laser light source 10, an XY scan optical system 20, a light receiving element 30, an illumination white light source 40, a color CCD (charge coupled device) camera 50, and a stage 60. An observation object S is placed on the stage 60.

  The laser light source 10 is a semiconductor laser, for example. The laser light emitted from the laser light source 10 is converted into parallel light by the lens 1, passes through the half mirror 4, and enters the XY scan optical system 20. Instead of the laser light source 10, another light source such as a mercury lamp may be used. In this case, a band pass filter is disposed between the light source such as a mercury lamp and the XY scan optical system 20. Light emitted from a light source such as a mercury lamp passes through a band-pass filter, becomes monochromatic light, and enters the XY scan optical system 20.

  The XY scan optical system 20 is, for example, a galvanometer mirror. The XY scan optical system 20 has a function of scanning a laser beam in the X direction and the Y direction on the surface of the observation object S on the stage 60. The definitions of the X direction, the Y direction, and the Z direction will be described later. The laser beam scanned by the XY scanning optical system 20 is reflected by the half mirror 5, then passes through the half mirror 6, and is focused on the observation object S on the stage 60 by the objective lens 3. Instead of the half mirrors 4 to 6, a polarization beam splitter may be used.

  The laser light reflected by the observation object S passes through the objective lens 3 and the half mirror 6, then is reflected by the half mirror 5, and passes through the XY scan optical system 20. The laser beam that has passed through the XY scan optical system 20 is reflected by the half mirror 4, collected by the lens 2, and transmitted through the pinhole of the pinhole member 7 and the ND (Neutral Density) filter 8 to receive the light receiving element 30. Is incident on. As described above, the reflection type confocal microscope system 500 is used in the present embodiment, but when the observation object S is a transparent body such as a cell, a transmission type confocal microscope system is used. Also good.

  The pinhole of the pinhole member 7 is disposed at the focal position of the lens 2. The ND filter 8 is used to attenuate the intensity of laser light incident on the light receiving element 30. Therefore, when the intensity of the laser beam is sufficiently attenuated, the ND filter 8 may not be provided.

  In the present embodiment, the light receiving element 30 is a photomultiplier tube. A photodiode and an amplifier may be used as the light receiving element 30. The light receiving element 30 outputs an analog electric signal (hereinafter referred to as a light receiving signal) corresponding to the amount of received light. The control unit 300 includes two A / D converters (analog / digital converter), a FIFO (First In First Out) memory, and a CPU (Central Processing Unit). The light reception signal output from the light receiving element 30 is sampled at a constant sampling period by one A / D converter of the control unit 300 and converted into a digital signal. Digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signals stored in the FIFO memory are sequentially transferred to the PC 200 as pixel data.

  The illumination white light source 40 is, for example, a halogen lamp or a white LED (light emitting diode). White light generated by the illuminating white light source 40 is reflected by the half mirror 6 and then condensed by the objective lens 3 onto the observation object S on the stage 60.

  White light reflected by the observation object S passes through the objective lens 3, the half mirror 6 and the half mirror 5 and enters the color CCD camera 50. An imaging element such as a CMOS (complementary metal oxide semiconductor) image sensor may be used in place of the color CCD camera 50. The color CCD camera 50 outputs an electrical signal corresponding to the amount of received light. The output signal of the color CCD camera 50 is sampled at a constant sampling period by another A / D converter of the control unit 300 and converted into a digital signal. Digital signals output from the A / D converter are sequentially transferred to the PC 200 as camera data.

  The control unit 300 supplies pixel data and camera data to the PC 200 and controls the light receiving sensitivity (gain) of the light receiving element 30 and the color CCD camera 50 based on a command from the PC 200. Further, the control unit 300 controls the XY scanning optical system 20 based on a command from the PC 200 to scan the laser light on the observation object S in the X direction and the Y direction.

  The objective lens 3 is provided so as to be movable in the Z direction by the lens driving unit 63. The control unit 300 can move the objective lens 3 in the Z direction by controlling the lens driving unit 63 based on a command from the PC 200. Thereby, the position of the observation target S relative to the objective lens 3 in the Z direction can be changed.

  The PC 200 includes a CPU (Central Processing Unit) 210, a ROM (Read Only Memory) 220, a work memory 230, and a storage device 240. The ROM 220 stores a system program. The working memory 230 includes a RAM (Random Access Memory), and is used for processing various data. The storage device 240 is composed of a hard disk or the like. The storage device 240 stores a surface shape detection program. The storage device 240 is used for storing various data such as pixel data and camera data given from the control unit 300. Details of the surface shape detection program will be described later.

  The CPU 210 generates image data based on the pixel data given from the control unit 300. Hereinafter, the image data generated based on the pixel data is referred to as confocal image data. An image displayed based on the confocal image data is referred to as a confocal image.

  The CPU 210 generates image data based on the camera data given from the control unit 300. Hereinafter, the image data generated based on the camera data is referred to as camera image data. An image displayed based on the camera image data is called a camera image.

  The CPU 210 performs various processes on the generated confocal image data and camera image data using the work memory 230, and displays a confocal image based on the confocal image data and a camera image based on the camera image data on the display unit 400. Let Further, the CPU 210 gives a driving pulse to the stage driving unit 62 described later.

  The operation unit 250 is configured by a keyboard and a mouse, for example. The display unit 400 is configured by, for example, a liquid crystal display panel or an organic EL (electroluminescence) panel.

  The stage 60 has an X direction moving mechanism, a Y direction moving mechanism, and a Z direction moving mechanism. Stepping motors are used for the X direction moving mechanism, the Y direction moving mechanism, and the Z direction moving mechanism.

  The X direction moving mechanism, the Y direction moving mechanism, and the Z direction moving mechanism of the stage 60 are driven by a stage operation unit 61 and a stage driving unit 62. The user can move the stage 60 in the X direction, the Y direction, and the Z direction relative to the objective lens 3 by manually operating the stage operation unit 61.

  The stage drive unit 62 moves the stage 60 relative to the objective lens 3 in the X direction, the Y direction, and the Z direction by supplying current to the stepping motor of the stage 60 based on the drive pulse given from the PC 200. be able to.

(2) Confocal Image, Ultra Depth Image, and Height Image An operation example of the confocal microscope system 500 will be described. FIG. 2 is a diagram for defining the X direction, the Y direction, and the Z direction. As shown in FIG. 2, the observation object S is irradiated with the laser light condensed by the objective lens 3. In the present embodiment, the direction of the optical axis of the objective lens 3 is defined as the Z direction. Further, two directions orthogonal to each other on the surface orthogonal to the Z direction are defined as an X direction and a Y direction, respectively. The X, Y, and Z directions are indicated by arrows X, Y, and Z, respectively.

  The relative position of the surface of the observation object S with respect to the objective lens 3 in the Z direction is referred to as the position of the observation object S in the Z direction. The confocal image data is generated for each unit area. The unit area is determined by the magnification of the objective lens 3.

  While the position of the observation object S in the Z direction is constant, the XY scanning optical system 20 scans the laser beam in the X direction at the end in the Y direction in the unit region. When the scanning in the X direction is completed, the laser beam is shifted by the XY scanning optical system 20 at a constant interval in the Y direction. In this state, the laser beam is scanned in the X direction. Thus, in each unit region, the laser beam is scanned on a plurality of measurement lines (scanning lines) parallel to the X direction. Next, the objective lens 3 is moved in the Z direction. Thereby, the scanning in the X direction and the Y direction of the unit area is performed in a constant state where the position of the objective lens 3 in the Z direction is different from the previous time. The unit region is scanned in the X and Y directions at a plurality of positions in the Z direction of the observation object S.

  Confocal image data is generated by scanning in the X and Y directions for each position of the observation object S in the Z direction. As a result, a plurality of confocal image data having different positions in the Z direction within the unit region is generated.

  Here, the number of pixels in the X direction of the confocal image data is determined by the scanning speed of the laser beam in the X direction by the XY scanning optical system 20 and the sampling period of the control unit 300. The number of samples in one X-direction scan (one scan line) is the number of pixels in the X direction. Further, the number of pixels in the Y direction of the confocal image data in the unit area is determined by the amount of shift in the Y direction of the laser beam by the XY scan optical system 20 at the end of scanning in the X direction. The number of scanning lines in the Y direction is the number of pixels in the Y direction. Furthermore, the number of confocal image data in the unit area is determined by the number of movements of the observation object S in the Z direction. Based on the plurality of confocal image data in the unit area, ultra-depth image data and height image data are generated by a method described later.

  In the example of FIG. 2, first, a plurality of confocal image data of the observation object S in the unit region s1 is generated at the initial position of the stage 60, and ultra-depth image data and height image data of the unit region s1 are generated. Is done. Subsequently, the stage 60 is sequentially moved to generate a plurality of confocal image data of the observation object S in the unit regions s2 to s4 and to generate ultra-depth image data and height image data of the unit regions s2 to s4. Is done. In this case, the unit regions s1 to s4 may be set so that adjacent unit regions partially overlap each other. Thereby, by performing pattern matching, the ultra-depth image data and the height image data of the plurality of unit regions s1 to s4 can be connected with high accuracy. In particular, when the total area of the plurality of unit regions is larger than the pixel data acquisition range described later, a portion corresponding to the area of the portion that protrudes from the acquisition range is set as an overlapping portion.

  FIG. 3 is a diagram showing the relationship between the position of the observation object S in the Z direction and the light receiving intensity of the light receiving element 30 in one pixel. As shown in FIG. 1, the pinhole of the pinhole member 7 is disposed at the focal position of the lens 2. Therefore, when the surface of the observation object S is at the focal position of the objective lens 3, the laser light reflected by the observation object S is condensed at the pinhole position of the pinhole member 7. Thereby, most of the laser beam reflected by the observation object S passes through the pinhole of the pinhole member 7 and enters the light receiving element 30. In this case, the light receiving intensity of the light receiving element 30 is maximized. As a result, the voltage value of the light reception signal output from the light receiving element 30 is maximized.

  On the other hand, when the observation object S is at a position out of the focal position of the objective lens 3, the laser light reflected by the observation object S is condensed at a position before or after the pinhole of the pinhole member 7. . Thereby, most of the laser light reflected by the observation object S is blocked by the portion around the pinhole of the pinhole member 7, and the light receiving intensity of the light receiving element 30 is reduced. As a result, the voltage value of the light reception signal output from the light receiving element 30 decreases.

  Thus, a peak appears in the light reception intensity distribution of the light receiving element 30 in a state where the surface of the observation object S is at the focal position of the objective lens 3. The received light intensity distribution in the Z direction is obtained for each pixel from a plurality of confocal image data of each unit region. Thereby, the peak position and peak intensity (peak received light intensity) of the received light intensity distribution are obtained for each pixel.

  Data representing peak positions in the Z direction for a plurality of pixels in each unit area is referred to as height image data, and an image displayed based on the height image data is referred to as a height image. The height image represents the surface shape of the observation object S. In addition, data representing the peak intensity for a plurality of pixels in each unit area is referred to as ultra-deep image data, and an image represented based on the ultra-depth image data is referred to as an ultra-depth image. The ultra-deep image is an image obtained in a state where all parts of the surface of the observation object S are in focus. The PC 200 generates a plurality of confocal image data of the unit region based on the plurality of pixel data of the unit region given from the control unit 300, and the height image data and the super image of the unit region based on the plurality of confocal image data. Generate depth image data.

(3) Sectional Curve FIG. 4 is a diagram showing the surface shape of the observation object S. As shown in FIG. 4A, the surface of the observation object S has a shape in which undulations continue. When the surface of the observation object S is cut along a vertical plane (in this example, the XZ plane), the curve on the surface of the observation object S that appears on the cut surface is called a cross-sectional curve. Data representing a cross-sectional curve is referred to as cross-sectional curve data.

  As shown in FIG. 4B, a cross-sectional shape having a relatively short undulation period and a relatively small undulation interval on the surface of the observation object S is called roughness. A curve obtained by extracting a component having a wavelength shorter than the predetermined cutoff wavelength λc from the cross-sectional curve is called a roughness curve. As shown in FIG. 4C, a cross-sectional shape having a undulation period longer than the roughness undulation period on the surface of the observation object S is called undulation. A curve obtained by extracting a component having a wavelength longer than the predetermined cutoff wavelength λc from the cross-sectional curve is called a waviness curve.

  The roughness curve of FIG. 4B and the undulation curve of FIG. 4C may be generated based on the cross-sectional curve data, or may be generated based on stylus detection data described later.

  The surface shape may mean a surface roughness as shown in FIG. 4B, or may mean a surface undulation as shown in FIG. 4C. Alternatively, the surface shape may mean a shape including both roughness and waviness as shown in FIG.

(4) Generation of Section Curve Data An example of the operation of the confocal microscope system 500 when generating section curve data will be described. FIG. 5 is a diagram illustrating a laser beam scanning method when generating cross-sectional curve data. FIG. 6 is a diagram illustrating a method of connecting cross-sectional curve data in a plurality of belt-like regions.

  As shown in FIG. 5, when the cross-sectional curve data is generated, a plurality (three in FIG. 5) of strip-like regions s10 that are continuous along the X direction are set as the pixel data acquisition range. For example, a camera image of the observation object S is displayed on the screen of the display unit 400 (FIG. 1), and a pixel data acquisition range is set on the image by the user.

  In each belt-like region s10, laser light is scanned on a plurality of measurement lines parallel to the X direction. Thereby, the PC 200 acquires pixel data based on a plurality of measurement lines from the control unit 300. The width of each band-like region s10 may be shorter than the width of the unit region in the Y direction, or may be equal to the width of the unit region in the Y direction. When the width of each strip region s10 is shorter than the width of the unit region in the Y direction, the number of measurement lines included in each strip region s10 is smaller than the number of measurement lines included in the unit region of FIG. The number of measurement lines and the length of each measurement line included in each belt-like region s10 may be a predetermined value or may be set as appropriate by the user.

  The total length of the plurality of strip-like regions s10 (hereinafter referred to as evaluation length) is set by the user. The number of strip-like regions s10 is determined according to the number of measurement lines and the evaluation length of each strip-like region s10.

  In each strip region s10, a plurality of pixel data having different positions in the Z direction are acquired. Based on the obtained plurality of pixel data, the peak position of each measurement line is obtained. Based on the acquired peak position of each measurement line, cross-sectional curve data of each measurement line is generated.

  As shown in FIG. 6, cross-sectional curve data of a plurality (three in FIG. 6) of strip-like regions s10 are connected to each other. Specifically, cross-sectional curve data of a plurality of measurement lines whose positions in the Y direction coincide with each other between the plurality of strip-like regions s10. Thereby, cross-sectional curve data for the number of measurement lines is generated in a range including the plurality of strip-like regions s10. In FIG. 6, in order to visually express the cross-section curve data, the cross-section curve displayed based on the cross-section curve data of each band-like region s10 is shown by a solid line.

  In this example, a plurality of band-like regions s10 arranged in a line in the X direction are set as the pixel data acquisition range. However, the present invention is not limited to this, and a plurality of band-like regions s10 arranged in a plurality of columns in the X direction are set as pixel data. It may be set as an acquisition range.

(5) Stylus detection data In the stylus type roughness meter, the stylus is scanned on the surface of the observation object S, and the movement of the stylus is detected, whereby the surface of the observation object S is detected. Data representing the shape is obtained. In the present embodiment, data equivalent to data obtained by a stylus roughness meter (hereinafter referred to as stylus detection data) is generated based on the cross-sectional curve data.

  Here, stylus detection data will be described. 7 to 11 are diagrams showing a relationship between a cross-section curve (hereinafter referred to as an optical cross-section curve) represented by the cross-section curve data and a stylus. 7 to 11, a solid line indicates an optical cross-sectional curve, and an alternate long and short dash line indicates a stylus that is virtually set. The optical cross-sectional curves in FIGS. 7 to 11 are optical cross-sectional curves represented by cross-sectional curve data after filtering processing described later, and coincide with the actual cross-sectional curve of the observation object S with high accuracy. FIG. 12 is a diagram showing a stylus cross-sectional curve. In FIG. 12, a solid line shows a stylus cross-section curve, and a dotted line shows an optical cross-section curve.

  As shown in FIG. 7, the tip of the stylus ST is provided with a tapered portion TA having a diameter that gradually decreases downward, and a spherical contact portion TE provided at the lower end of the tapered portion TA. . In addition, in FIGS. 7-11, the contact part TE is shown circularly. A reference point SS is set at the center of the lower end of the contact part TE. In the present embodiment, the shape (cross-sectional shape) of the stylus ST in two dimensions (on the XZ plane) is set. The shape of the stylus ST includes, for example, an angle (hereinafter referred to as a taper angle) θ formed by the taper portion TA and a curvature radius (hereinafter referred to as a tip radius) TR of the contact portion TE. The set shape of the stylus ST is stored as stylus data in the work memory 230 or the storage device 240 of FIG.

  The stylus cross-section curve SC (FIG. 12) corresponds to the trajectory of the reference point SS when the stylus ST moves while contacting the surface of the observation object S. In this case, the center line CL of the stylus ST passing through the center of the taper part TA and the center of the contact part TE is set to coincide with the Z direction.

  When the reference point SS is in contact with the surface of the observation object S, the stylus cross section curve SC (FIG. 12) representing the surface portion coincides with the optical cross section curve DC. On the other hand, when the reference point SS is not in contact with the surface of the observation object S and the other part of the contact part TE or the taper part TA is in contact with the surface of the observation object S, the stylus cross-section curve representing the surface part SC does not coincide with the optical cross section curve DC. In this case, since the reference point SS is located above the observation object S, the stylus sectional curve SC is located above the optical sectional curve DC.

  In the example of FIGS. 7 to 11, the optical cross-sectional curve DC includes a flat portion 51 perpendicular to the Z direction, a convex portion 52 having inclined portions 52 a and 52 b, and a rectangular concave portion 53. As shown in FIG. 7, when the stylus ST moves on the flat portion 51, the reference point SS of the stylus ST contacts the flat portion 51. Thereby, as shown in FIG. 12, the portion of the stylus cross section curve SC representing the flat portion 51 coincides with the optical cross section curve DC.

  As shown in FIG. 8, when the stylus ST moves obliquely upward on the inclined portion 52a of the convex portion 52, the reference point SS is separated from the inclined portion 52a. As shown in FIG. 9, when the stylus ST reaches the upper end portion of the convex portion 52 (the boundary portion between the inclined portion 52 a and the inclined portion 52 b), the reference point SS comes into contact with the upper end portion of the convex portion 52. As shown in FIG. 10, when the stylus ST moves obliquely downward on the inclined portion 52b of the convex portion 52, the reference point SS is separated from the inclined portion 52a.

  Accordingly, as shown in FIG. 12, the portion of the stylus sectional curve SC representing the inclined portions 52 a and 52 b of the convex portion 52 does not coincide with the optical sectional curve DC, and the stylus sectional curve SC representing the upper end portion of the convex portion 52. This part corresponds to the optical cross section curve DC. Further, since the contact portion TE has a spherical shape, the portion of the optical cross-section curve DC representing the upper end portion of the convex portion 52 changes discontinuously so as to form a corner, whereas the upper end portion of the convex portion 52 is changed. The portion of the stylus section curve SC that is represented changes smoothly so as to draw an arc.

  As shown in FIG. 11, when the stylus ST moves on the concave portion 53, the portion of the tapered portion TA on one side of the contact portion TE and the portion of the tapered portion TA on the other side of the contact portion TE are one side of the concave portion 53. It contacts the edge and the other edge, respectively. Thereby, the movement of the stylus ST in the Z direction is hindered, and the reference point SS does not reach the bottom 53 a of the recess 53. Therefore, the portion of the stylus cross section curve SC that represents the recess 53 does not match the optical cross section curve DC.

  Thus, the details of the optical cross section curve DC are not reflected in the stylus cross section curve SC. Further, as described above, since the entry of the contact portion TE into the concave portion 53 may be hindered, the displacement of the stylus sectional curve SC in the Z direction is smaller than the displacement of the optical sectional curve DC in the Z direction. The accuracy of the stylus cross-section curve SC varies depending on the shape of the stylus ST.

  The relationship between the stylus sectional curve SC and the shape of the stylus ST will be described. FIG. 13 is a diagram for explaining a function g (x) representing the shape of the stylus ST. In FIG. 13, the x-axis corresponds to the X direction, and the z-axis corresponds to the Z direction. The intersection of the x-axis and the z-axis is set as the reference point SS, and g (0) = 0. Regarding the function g (x), x may be finite or infinite. When x is infinite, the taper portion TA may be set to extend infinitely.

  If the function representing the optical cross section curve DC is f (x), the stylus cross section curve SC is represented by the following equation.

z (x) = max {f (x + τ) −g (τ)} (1)
In Expression (1), x represents a position (coordinate) in the X direction on the XZ plane, and z (x) represents a position (coordinate) in the Z direction at the position x in the X direction. max indicates the maximum value that can be taken when the domain of x in the function g (x) in FIG. 13 is given to the variable τ.

14 and 15 are diagrams for explaining the expression (1). 14, the position of the reference point SS of the stylus ST in the X direction is _{x 1.} The stylus ST contacts the optical cross-sectional curve DC at a position P1 that is separated from the reference point SS in the X direction by τ ₁ (τ ₁ is a negative value). In this case, the height _{h 0} of the position P1, f is represented by _{(x 1} + τ _1), the difference Δh between the height h ₁ of the height _{h 0} and the reference point SS in position P1, g (tau ₁₎ It is represented by Therefore, the height h ₁ of the reference point SS is represented by {f (x ₁ + τ ₁ ) −g (τ ₁ )}.

As shown in FIG. 15, by changing the value of τ while maintaining the value of x, the position of the stylus ST in the X direction is constant, and the contact position between the stylus ST and the optical sectional curve DC ( The height of the reference point SS when the (intersection position) is different is obtained. Specifically, when the stylus ST intersects the optical cross-sectional curve DC at a position P2 that is away from the reference point SS in the X direction by τ ₂ (τ ₂ is a negative value), the height h _{2 of the} reference point SS. Is represented by {f (x ₁ + τ ₂ ) −g (τ ₂ )}. When the stylus ST intersects the optical cross-sectional curve DC at a position P3 separated from the reference point SS in the X direction by τ ₃ (τ ₃ is a positive value), the height h ₃ of the reference point SS is {f ( x ₁ + τ ₃ ) −g (τ ₃ )}. When the stylus ST intersects the optical cross-sectional curve DC at a position P4 that is separated from the reference point SS in the X direction by τ ₄ (τ ₄ is a negative value), the height h ₄ of the reference point SS is {f ( x ₁ + τ ₄ ) −g (τ ₄ )}. In this case, {f (x ₁ + τ ₁ ) −g (τ ₁ )}, which is the maximum value of {f (x ₁ + τ) −g (τ)}, matches the value represented by the stylus section curve SC. .

  Further, by changing the value of x, the height of the reference point SS when the position of the stylus ST in the X direction is different is obtained, and the maximum value coincides with the value represented by the stylus section curve SC. . Therefore, the value of the stylus cross-section curve SC at an arbitrary position in the X direction is represented by max {f (x + τ) −g (τ)}.

(6) Generation of Stylus Detection Data A method for generating stylus detection data will be described. FIG. 16 is a partially enlarged view of the cross-sectional curve represented by the cross-sectional curve data. FIG. 17 is a diagram illustrating a process of generating stylus detection data from the cross-sectional curve data of FIG. FIG. 18 is a partially enlarged view of the stylus sectional curve SC represented by the stylus detection data generated from the sectional curve data of FIG.

  The optical cross section curve DC in FIG. 16 includes high frequency noise HN. When the stylus detection data SC is generated from the cross-sectional curve data DC containing the high-frequency noise HN, the accuracy of the stylus cross-sectional curve SC is lowered as shown by a dotted line in FIG.

  Therefore, in order to remove the high frequency noise HN from the optical cross section curve DC, the cross section curve data is filtered by a low pass filter. FIG. 17 shows an optical cross-sectional curve DC represented by the cross-sectional curve data after the filtering process. As described above, the optical cross-sectional curve DC after the filtering process coincides with the actual cross-sectional curve of the observation object S with high accuracy. Hereinafter, a low-pass filter used for removing high-frequency noise is referred to as a noise filter. As the noise filter, for example, a Gaussian filter, a simple moving average filter, or a median filter is used.

  The cut-off wavelength (cut-off frequency) of the noise filter is preferably determined according to the curvature radius (tip radius) TR or the diameter of the contact portion TE of the stylus ST.

  For example, when a Gaussian filter or a moving average filter is used as the noise filter, it is preferable that the cutoff wavelength is set to be not less than 0.5 times and not more than 4 times the diameter of the contact part TE. When the cutoff wavelength is 0.5 times or more the diameter of the contact part TE, high frequency noise can be appropriately removed. Since the cutoff wavelength is 4 times or less the diameter of the contact portion TE, components other than high-frequency noise are prevented from being removed from the cross-sectional curve data.

  When a moving average filter is used, the cutoff wavelength is approximately equal to a value obtained by multiplying the moving average number by the sampling interval and dividing the multiplied value by 0.443 (moving average number × sampling interval / 0.443). Thus, it is preferable that the moving average score is set. The moving average score is the number of sampling points used for calculating the moving average. The sampling interval is a sampling period of the light reception signal output from the light receiving element 30.

  When a median filter is used as the noise filter, it is preferable that the filter size (score) centered on the point of interest is determined according to the radius of curvature (tip radius) TR of the contact portion TE of the stylus ST. For example, the number of points on one side and the other side of the point of interest is 0.5 times or more and 4 times or less the value obtained by dividing the diameter of the contact portion TE by the sampling interval (2 × tip radius TR / sampling interval). Is preferred. When the above score is 0.5 times or more of (2 × tip radius TR / sampling interval), high frequency noise can be appropriately removed. When the score is 4 times or less of (2 × TR / sampling interval), components other than high-frequency noise are prevented from being removed from the cross-sectional curve data.

  Next, stylus detection data representing the stylus cross-section curve SC of FIG. 18 is generated based on the optical cross-section curve DC after filtering and preset stylus data. For example, the above formula (1) is used to generate the stylus detection data. In this case, a function representing the optical cross-sectional curve DC represented by the cross-sectional curve data after the filtering process is used as f (x) in Expression (1).

(7) Display by Display Unit The optical sectional curve DC represented by the sectional curve data or the stylus sectional curve SC represented by the stylus detection data is displayed on the screen of the display unit 400 of FIG. FIG. 19 is a diagram illustrating a display example of the display unit 400. In the example of FIG. 19, an image display area 410 and an analysis result display area 430 are displayed on the screen of the display unit 400. In the image display area 410, an ultra-deep linear image based on ultra-deep linear data described later is displayed. In addition, a plurality of measurement lines are displayed on the ultradeep linear image. The displayed measurement lines are a part or all of the preset measurement lines of all the measurement lines irradiated with the laser light.

  The analysis result display area 430 includes a cross-section curve display unit 431, a contour curve display unit 432, a parameter setting unit 433, and a parameter display unit 434. The user designates one of a plurality of measurement lines on the ultra-deep linear image displayed in the image display area 410 by operating the operation unit 250 (FIG. 1). The cross-section curve display unit 431 displays an optical cross-section curve or a stylus cross-section curve corresponding to one of a plurality of measurement lines designated by the user. In this case, image data corresponding to the optical cross-sectional curve is generated based on the cross-sectional curve data, and the optical cross-sectional curve is displayed based on the image data. Further, image data corresponding to the stylus cross section curve is generated based on the stylus detection data, and the stylus cross section curve is displayed based on the image data.

  The contour curve display unit 432 displays a roughness curve or a waviness curve corresponding to the cross-section curve displayed on the cross-section curve display unit 431. That is, when an optical cross-sectional curve is displayed on the cross-sectional curve display unit 431, a roughness curve or a waviness curve corresponding to the optical cross-sectional curve is displayed on the contour curve display unit 432. When the stylus cross-section curve is displayed on the cross-section curve display portion 431, a roughness curve or a waviness curve corresponding to the stylus cross-section curve is displayed on the contour curve display portion 432.

  When the optical cross-sectional curve is displayed on the cross-sectional curve display unit 431, image data corresponding to the optical cross-sectional curve may be generated based on the cross-sectional curve data after the filtering process (see FIG. 17). Furthermore, image data corresponding to the roughness curve and the waviness curve may be generated based on the cross-sectional curve data after the filtering process.

  The user operates the operation unit 250 (FIG. 1), so that the parameter setting unit 433 discriminates the roughness curve from the undulation curve, the cutoff wavelength λc, the lower limit wavelength λs of the roughness curve, and the upper limit wavelength of the undulation curve. λf can be set. The parameter setting unit 433 includes a display switching unit and a setting image display unit (not shown). The user can selectively display the optical section curve and the stylus section curve on the section curve display section 431 by selecting the display switching section of the parameter setting section 433 by operating the operation section 250 (FIG. 1). . For example, the display of the optical cross section curve and the stylus cross section curve is switched by one click of the mouse of the operation unit 250. In this case, the display of the optical cross section curve and the stylus cross section curve can be easily switched. Further, the user selects a setting image display instruction unit of the parameter setting unit 433 by operating the operation unit 250 (FIG. 1), thereby displaying a stylus setting image for setting the stylus detection data generation condition on the display unit 400. Can be displayed on the screen.

  FIG. 20 is a diagram illustrating a stylus setting image. The stylus setting image 440 of FIG. 20 is displayed on the screen of the display unit 400 so as to overlap at least part of the image display area 410 and the analysis result display area 430 of FIG. As shown in FIG. 20, the stylus setting image 440 includes a radius setting unit 441, an angle setting unit 442, and a filter strength setting unit 443. The user operates the operation unit 250 (FIG. 1) to input a numerical value to the radius setting unit 441 and set the tip radius TR as stylus data. Further, the user operates the operation unit 250 (FIG. 1) to input a numerical value to the angle setting unit 442 and set the taper angle θ as stylus data. The taper angle θ is set to 60 degrees, for example.

  The radius setting unit 441 and the angle setting unit 442 may set the tip radius TR and the taper angle θ by selecting one value from a plurality of previously stored values. For example, 2 μm, 5 μm, and 10 μm, which are standards determined by ISO (International Organization for Standardization) or the like, are stored in advance as the tip radius TR, and one of these values may be selectable.

  The user operates the operation unit 250 (FIG. 1) to set the noise filter strength in the filter strength setting unit 443. For example, the strength of the noise filter is set by selecting any one of “strong”, “medium”, “weak”, and “none”.

  For example, when a median filter is used as the noise filter, when “medium” is selected, a value obtained by dividing the diameter of the contact portion TE by the sampling interval (2 × tip radius TR / sampling interval) is set as the filter size. When “weak” is selected, the half value is set as the filter size, and when “strong” is selected, twice the value is set as the filter size. When “None” is selected, the filtering process is not performed.

  In the stylus setting image 440, the type of noise filter may be selectable. For example, any one of the Gaussian filter, the moving average filter, and the median filter may be selectable.

  When the user selects the “OK” button 444 of the stylus setting image, the above various settings are updated to the input value and the selected intensity, and the stylus setting image is closed. When the user selects the “cancel” button 445 or “x” button 446 of the stylus setting image, the stylus setting image is closed without updating the above settings.

  The parameter display unit 434 displays the surface texture parameters calculated for each of the plurality of measurement lines. The surface texture parameters include various parameters such as maximum peak height Rp, maximum valley depth Rv, maximum height Rz, average height Rc, and arithmetic average roughness Ra. When the optical cross-sectional curve is displayed on the cross-sectional curve display unit 431, the surface property parameter calculated based on the cross-sectional curve data is displayed on the parameter display unit 434. When the stylus cross section curve is displayed on the cross section curve display section 431, the surface property parameter calculated based on the stylus detection data is displayed on the parameter display section 434.

  Further, the parameter display unit 434 includes an average value, a maximum value, a minimum value, a difference between the maximum value and the minimum value, a standard deviation (σ), and a tripled standard of the surface texture parameters calculated for a plurality of measurement lines. A deviation (3σ) may be displayed. By calculating the average value of the surface texture parameters calculated for a plurality of measurement lines, the reliability of the calculated surface texture parameters is improved even when unnecessary portions are not removed from the cross-sectional curve data described later. be able to.

  In addition to the average value of the surface property parameters, the parameter display unit 434 may display the center value of the surface property parameters calculated for a plurality of measurement lines, and an average value of several numerical values around the center value. May be displayed. Further, the parameter display unit 434 may display a numerical value having a large deviation from the average value and display an average value of the remaining numerical values.

(8) Surface Shape Detection Processing FIG. 21 is a flowchart showing surface shape detection processing in the confocal microscope system 500. The CPU 210 of the PC 200 in FIG. 1 executes surface shape detection processing according to the surface shape detection program stored in the storage device 240.

  As described above, the control unit 300 controls the XY scan optical system 20 of FIG. 1 and moves the position of the objective lens 3 in the Z direction, and pixel data based on the light reception signal output from the light receiving element 30. Is given to the CPU 210 of the PC 200. CPU210 acquires the pixel data of the some measurement line of the one strip | belt-shaped area | region from the control part 300 (step S1). Thereby, a plurality of pixel data having different positions in the Z direction are acquired in a plurality of measurement lines in one band-like region. The CPU 210 generates a plurality of cross-section curve data of the band-like region based on the acquired pixel data of the plurality of measurement lines (step S2) and stores the data in the work memory 230.

  In this case, each sectional curve data represents a peak position in the Z direction for a plurality of pixels on each measurement line. The cross-sectional curve represents the surface shape on the measurement line. At this time, a plurality of ultra-deep linear data corresponding to a plurality of measurement lines in the band-like region is generated. The ultra-deep linear data is data representing peak intensities for a plurality of pixels on each measurement line. An image displayed based on the ultra-deep linear data is referred to as an ultra-deep linear image.

  Next, the CPU 210 determines whether or not the cross-sectional curve data for all the strip-like regions has been generated (step S3). When the cross-sectional curve data of all the strip-like regions has not been generated, the CPU 210 returns to the process of step S1. CPU210 moves the stage 60 to the position which can produce | generate the cross-sectional curve data of the following strip | belt-shaped area | region, and repeats the process of step S1-S3. As a result, a plurality of pixel data having different positions in the Z direction are acquired in a plurality of measurement lines in all the band-like regions. The CPU 210 generates a plurality of cross-sectional curve data of the belt-like region based on the acquired pixel data of the plurality of measurement lines, and stores the data in the work memory 230.

  Next, the CPU 210 connects the cross-sectional curve data of the plurality of band-like regions using the work memory 230 (step S4). Thereby, cross-section curve data of a preset acquisition range is generated. Next, the CPU 210 estimates a portion of the cross-sectional curve data in which dust or the like is attached to the observation object S as an unnecessary portion, and removes the unnecessary portion estimated from the cross-sectional curve data (step S5). Thereby, even when dust, scratches or holes are present on a part of the plurality of measurement lines, the surface shape of the observation object S can be detected more accurately based on the cross-sectional curve data from which unnecessary portions are removed. Can do. A method for estimating the unnecessary portion of the cross-sectional curve data will be described later.

  Subsequently, the CPU 210 calculates roughness curve data and waviness curve data based on each cross-section curve data and calculates a surface property parameter (step S6). Next, CPU210 performs a filtering process with respect to each cross-section curve data (step S7). Thereby, high frequency noise is removed from each cross-section curve data (FIG. 17).

  Next, CPU210 produces | generates stylus detection data based on each cross-section curve data after a filtering process (step S8). Next, the CPU 210 calculates roughness curve data and waviness curve data based on each generated stylus detection data, calculates a surface texture parameter, and calculates a surface texture parameter (step S9). Thereby, the CPU 210 ends the surface shape detection process.

  Based on the cross-sectional curve data and the stylus detection data generated in this way, an optical cross-sectional curve or a stylus cross-sectional curve is displayed on the screen of the display unit 400 (FIG. 19). Further, based on the calculated roughness curve data and undulation curve data, the roughness curve or the undulation curve is displayed on the screen of the display unit 400. Further, the calculated surface property parameter is displayed on the screen of the display unit 400.

  The generation of the stylus detection data in step S8 may be performed immediately after the generation of the cross-section curve data, or may be performed when the display of the stylus cross-section curve is selected by the user. The calculation of the roughness curve data, the waviness curve data, and the surface property parameter in step S9 is performed immediately after the generation of the stylus detection data, for example.

(9) Effect of Embodiment In the confocal microscope system 500 according to the present embodiment, cross-sectional curve data representing the cross-sectional curve of the observation object S is generated based on the output signal of the light receiving element 30, and the Stylus detection data is generated based on the cross-sectional curve data.

  Since the stylus detection data represents the locus of the reference point SS of the stylus ST when the virtually set stylus ST moves while contacting the surface of the observation object S, the stylus detection data is obtained by using a stylus type roughness meter. It is equivalent to the data obtained. Therefore, stylus detection data can be handled in the same way as data obtained by a stylus type roughness meter. Therefore, it is possible to compare and collate stylus detection data with data obtained by a stylus type roughness meter. Further, by selectively using high-precision cross-section curve data and stylus detection data, various data can be compared and collated efficiently.

  In the present embodiment, stylus detection data is generated based on the cross-sectional curve data after high-frequency noise is removed by filtering processing. Thereby, stylus detection data can be brought close to data obtained by a stylus type roughness meter. In addition, since the cutoff wavelength in the filtering process is set based on the tip radius TR of the stylus ST, high-frequency noise can be appropriately removed from the cross-sectional curve data.

(10) Another Example of Method for Generating Stylus Detection Data Another example of the method for generating stylus detection data will be described with respect to differences from the examples in FIGS. 22-24 is a figure for demonstrating the other example of the production | generation method of stylus detection data.

  In this example, after high-frequency noise is removed from the optical cross-sectional curve DC by the filtering process, as shown in FIGS. 22A to 22C, only the contact portion TE moves while being in contact with the optical cross-sectional curve DC. The trajectory of the reference point SS is obtained as the stylus section curve SCa. In this example, the contact part TE is set to be spherical (circular in two dimensions).

  For the portion of the optical cross section curve DC where the stylus ST moves without the taper portion TA contacting, the stylus cross section curve SCa matches the stylus cross section curve SC of FIG. Specifically, as shown in FIG. 22A, the portion of the stylus sectional curve SCa representing the flat portion 51 and the convex portion 52 coincides with the stylus sectional curve SC of FIG.

  On the other hand, the stylus cross-sectional curve SCa does not match the stylus cross-sectional curve SC of FIG. As described above, when the stylus ST moves on the concave portion 53, the tapered portion TA contacts the edge of the concave portion 53 (FIG. 11). For this reason, the contact portion TE is prevented from entering the recess 53, and the reference point SS does not reach the bottom 53a of the recess 53. On the other hand, as shown in FIG. 22B and FIG. 22C, when the taper portion TA does not exist, the contact portion TE can enter the recess 53. Therefore, the reference point SS comes into contact with the bottom 53a of the recess 53. Accordingly, the portion of the stylus cross section curve SCa representing the recess 53 does not coincide with the stylus cross section curve SC of FIG.

  Next, a portion to be corrected of the stylus sectional curve SCa is detected based on the taper angle θ set as the stylus data. In this example, when the taper portion TA exists, the angle of the trajectory of the reference point SS with respect to the Z direction does not become smaller than the angle (θ / 2) of the taper portion TA with respect to the Z direction. Therefore, the portion of the stylus cross-sectional curve SCa that forms an angle smaller than the angle (θ / 2) with respect to the Z direction is detected as a portion to be corrected.

  Specifically, as shown in FIG. 23, portions PT1 and PT2 of the stylus cross-sectional curve SCa representing the recess 53 form an angle smaller than the angle (θ / 2) with respect to the Z direction. Therefore, the parts PT1 and PT2 are detected as parts to be corrected.

  Next, by correcting the portions PT1 and PT2 of the detected stylus cross-section curve SCa, a stylus cross-section curve SCa that matches the locus of the reference point SS when the taper portion TA exists is obtained. Specifically, as shown in FIG. 24, the portions PT1 and PT2 are corrected so that the angles of the portions PT1 and PT2 with respect to the Z direction coincide with the angle (θ / 2), respectively. Thereby, the stylus cross-sectional curve SCa similar to the stylus cross-sectional curve SC of FIG. 18 is obtained.

  As in this example, a stylus cross-section curve SCa representing the locus of the reference point SS when only the contact portion TE moves on the optical cross-section curve DC is obtained, and the stylus cross-section curve SCa is corrected, thereby calculating the amount of calculation. Is greatly reduced.

(11) Stylus initial setting image In the above example, the parameter setting unit 433 in FIG. In addition, in the stylus setting image of FIG. 20, stylus detection data generation conditions are set. An initial setting image (hereinafter referred to as a stylus initial setting image) for performing the initial setting of the presence / absence of the stylus cross-section curve and the generation conditions of the stylus detection data may be separately displayed on the screen of the display unit 400.

  FIG. 25 is a diagram illustrating an example of a stylus initial setting image. The stylus initial setting image 450 of FIG. 25 includes a display setting unit 451, a radius setting unit 452, an angle setting unit 453, and a filter strength setting unit 454.

  The user can switch presence / absence of the display of the stylus cross section curve in the cross section curve display section 431 of FIG. 19 in the display setting section 451 by operating the operation section 250 (FIG. 1). For example, when the display setting unit 451 is checked by clicking the mouse, the stylus cross-section curve is displayed on the cross-section curve display unit 431 (FIG. 19) as an initial setting. When the display setting unit 451 is not checked, an optical cross-sectional curve is displayed on the cross-sectional curve display unit 431 (FIG. 19) as an initial setting.

  In the radius setting unit 452, the angle setting unit 453, and the filter strength setting unit 454, as with the radius setting unit 441, the angle setting unit 442, and the filter strength setting unit 443 in FIG. Is input. Stylus detection data is generated with the input content as an initial setting.

(11) Other examples of stylus In the above example, the stylus ST has the tapered portion TA and the contact portion TE, but the shape of the stylus ST is not limited to this. It is preferable to change the shape of the stylus ST according to the data to be compared and verified. FIG. 26 is a diagram illustrating another example of the stylus ST. Differences between the stylus STa and STb in FIGS. 26A and 26B will be described.

  The stylus STa of FIG. 26A further includes a side surface portion TG in addition to the contact portion TE and the taper portion TA. The side surface portion TG is parallel to the Z direction and is provided so as to extend upward from the upper end portion of the taper portion TA. When the stylus STa is used, the length of the tapered portion TA is set as the stylus data. Since the length of the taper portion TA is finite, the movement of the contact portion TE in the Z direction is easily allowed. Therefore, the accuracy of the stylus detection data is increased.

  The stylus STb of FIG. 26B does not include the taper portion TA but includes the side surface portion TG. The side surface part TG continuously extends from the contact part TE. When the stylus STb is used, the taper portion TA does not prevent the movement of the contact portion TE in the Z direction. Therefore, the accuracy of the stylus detection data becomes higher. In this case, stylus detection data representing the stylus section curve SCa of FIG. 23 is obtained.

  In the stylus ST, STa, and STb described above, the contact portion TE has a spherical shape, but the contact portion TE may have another curved shape. In that case, instead of the curvature radius of the contact portion TE, other curvature information related to the curvature of the contact portion TE is set as the stylus data.

(12) Stage Movement Correction Due to an attachment error of the stage 60, the scanning direction of the laser beam by the XY scanning optical system 20 of FIG. 1 may not completely match the actual movement direction of the stage 60. is there. Therefore, the movement correction of the stage 60 may be performed when the actual movement direction of the stage 60 is inclined with respect to the scanning direction of the laser beam.

  FIG. 27 is a diagram showing the scanning direction of the laser beam and the actual moving direction of the stage 60. FIG. 27A shows the movement of the stage 60 when the movement correction of the stage 60 is not performed, and FIG. 27B shows the movement of the stage 60 when the movement correction of the stage 60 is performed. Indicated. Here, the scanning direction of the laser light is defined as the X direction, and the direction orthogonal to the scanning direction of the laser light is defined as the Y direction. The direction in which the stage 60 actually moves when the stage 60 moves in the X direction is the X ′ direction, and the direction in which the stage 60 actually moves when the stage 60 moves in the Y direction is the Y ′ direction. .

  In FIG. 27, the stage 60 before movement is indicated by a solid line, and the stage 60 after movement is indicated by a dotted line. Before the stage 60 moves, a measurement line SL1 having a start point SP1 and an end point EP1 is formed by scanning the laser beam in the X direction. Further, a measurement line SL2 having a start point SP2 and an end point EP2 is formed by scanning the laser beam in the X direction after the stage 60 is moved.

  The CPU 210 commands the movement of the stage 60 by giving one or both of a driving pulse for movement in the X direction and a driving pulse for movement in the Y direction to the stage driving unit 62 in FIG. When the CPU 210 commands the movement of the stage 60 in the X direction by the distance Lx, the stage 60 actually moves by the distance Lx in the X ′ direction as shown in FIG. The stage 60 moves from the X-direction axis by the distance Ly in the Y ′ direction. In this case, the stage 60 moves in the X direction and also in the Y direction. Therefore, the end point EP1 of the measurement line SL1 before the movement of the stage 60 does not match the start point SP2 of the measurement line SL2 after the movement of the stage 60.

  In the present embodiment, as shown in FIG. 27B, the CPU 210 commands the movement of the stage 60 by the distance Lx in the X direction and commands the movement of the distance Ly in the −Y direction. Accordingly, the stage 60 actually moves in the X ′ direction by the distance Lx and moves in the −Y ′ direction by the distance Ly. In this case, the stage 60 moves in the X direction and does not move in the Y direction. By such movement correction of the stage 60, the end point EP1 of the measurement line SL1 before the movement of the stage 60 coincides with the start point SP2 of the measurement line SL2 after the movement of the stage 60.

  Whether or not the actual moving direction of the stage 60 is inclined with respect to the scanning direction of the laser light may be determined in advance by an operator at the time of manufacturing the confocal microscope system, or before the generation of the sectional curve data by the user. May be determined. The movement correction amount is calculated based on, for example, a change in camera image data when the stage 60 is actually moved. In this case, in order to accurately detect the moving direction of the stage 60, a chart having a clear scale or design may be placed on the stage 60.

(13) Method for Estimating Unnecessary Portion of Cross Section Curve Data In step S5 in FIG. 21, the unnecessary portion of the cross sectional curve data is estimated by various methods described below.

(13-1) Estimation Method Based on Cross-Section Curve Data The height of the portion of the observation object S where there is an attachment such as dust is higher than the height of the unevenness on the surface of the observation object S where there is no attachment. high. Therefore, the cross-sectional curve data corresponding to the portion of the observation target S where the deposit is present has a higher value than the cross-section curve data corresponding to the portion of the observation target S where the deposit is not present. The CPU 210 binarizes the cross-section curve data into “1” and “0” with an appropriate threshold value. As a result, the binarized data corresponding to the portion of the observation object S where no deposit is present is “0”, and the binarization data corresponding to the portion of the observation object S where the deposit is present is “1”. Become. In this case, the CPU 210 can estimate the section curve data corresponding to the binarized data “1” as an unnecessary part.

  Further, the depth of the scratch or hole on the surface of the observation object S is larger than the depth of the unevenness on the surface of the observation object S. The CPU 210 binarizes the cross-section curve data into “1” and “0” with an appropriate threshold value. As a result, the binarized data corresponding to the flaw or hole portion is “0”, and the binarized data corresponding to the portion of the observation object S where no flaw or hole is present is “1”. In this case, the CPU 210 can estimate the section curve data corresponding to the binarized data of “0” as an unnecessary part.

(13-2) Estimation method based on ultra-deep linear data Generally, since the surface of the observation object S made of metal or the like has a high reflectance, it corresponds to a portion of the observation object S where there is no deposit such as dust. The ultra-deep linear data that has a high value. On the other hand, since the portion of the observation object S where the deposits such as dust are present has a lower reflectance than the metal or the like, the ultra-deep linear data corresponding to the portion of the observation target S where the deposits such as dust exist. Has a low value. The CPU 210 binarizes the ultra-deep linear data into “1” and “0” with an appropriate threshold value. As a result, the binarized data corresponding to the portion of the observation target S where no deposit is present is “1”, and the binarization data corresponding to the portion of the observation target S where the deposit is present is “0”. Become. In this case, the CPU 210 can estimate the section curve data corresponding to the binarized data of “0” as an unnecessary part.

(13-3) Estimation Method Based on Camera Image Data Similar to the case of estimation based on cross-sectional curve data and ultra-deep linear data, the CPU 210 binarizes the camera image data with an appropriate threshold value, so that the cross-sectional curve Unnecessary portions of data can be estimated.

  In addition, the CPU 210 can estimate an unnecessary portion of the cross-sectional curve data due to adhered matter such as dust, scratches and holes by image processing of the camera image data.

(13-4) Other Estimation Methods Unnecessary portions of the cross-sectional curve data may be estimated by combining two or more estimation methods among the above estimation methods. Thereby, the unnecessary part of cross-sectional curve data can be estimated more reliably.

  In addition, the estimation of unnecessary portions of the cross-sectional curve data may be performed by visual observation by the user. In this case, in the image display area 410 in FIG. 19, the cross-sectional curve of the observation object S based on the cross-section curve data, the super-depth line of the observation object S based on the ultra-deep linear data, or the observation object based on the camera image data A camera image of the object S is displayed.

  By operating the operation unit 250, the user can instruct a cross-sectional curve, a super-depth line, or an unnecessary portion on the camera image displayed in the image display area 410. Based on the user's instruction, the CPU 210 can estimate the section curve data portion corresponding to the section curve, the ultra-deep line, or the unnecessary section on the camera image as the unnecessary section.

  By estimating the unnecessary portion of the cross-section curve data by the user's visual observation, the cross-section curve data is appropriately not required for the observation target S having a low reflectance or the observation target S having large unevenness or large inclination. The part can be estimated.

(14) Other embodiments (14-1)
In the above-described embodiment, each band-like region s10 includes a plurality of measurement lines, and the cross-sectional curve data corresponding to each of the plurality of measurement lines is generated. However, the present invention is not limited to this. Each belt-like region s10 may include only one measurement line, and only the cross-sectional curve data corresponding to the one measurement line may be generated. In this case, one section curve data is generated by connecting the section curve data of the plurality of strip-like regions s10 arranged in the X direction.

(14-2)
In the above embodiment, a plurality of band-like areas are set as the pixel data acquisition range, and the laser beam is scanned on the measurement lines in each band-like area, thereby generating cross-sectional curve data corresponding to each measurement line. However, the method of generating the sectional curve data is not limited to this.

  For example, the cross-sectional curve data may be generated as follows. As shown in FIG. 2 or 5, a plurality of confocal image data is generated for each unit region or band-like region, and height image data and ultra-depth image data are generated based on the plurality of confocal image data. The Based on the generated height image data or ultra-depth image data, the height image or ultra-depth image is displayed on the screen of the display unit 400. A range in which the cross-sectional curve data is to be acquired is set on the image, and cross-sectional curve data corresponding to the set range is generated based on the plurality of confocal image data.

  In this case, cross-sectional curve data in a desired range can be generated based on confocal image data acquired in advance, and stylus curve data can be generated based on the cross-sectional curve data. Therefore, an optical cross section curve or stylus cross section curve in a desired range can be easily displayed on the screen of the display unit 400. In addition, the roughness curve, the waviness curve, and the surface property parameter corresponding to them can be easily displayed on the screen of the display unit 400.

(14-3)
In the above embodiment, the stylus detection data represents the surface shape of the observation object S in two dimensions. However, the present invention is not limited to this, and the stylus detection data may represent the surface shape of the observation object S in three dimensions. In this case, the shape of the stylus is set in three dimensions as stylus data.

(14-4)
In the above embodiment, the CPU 210 of the PC 200 may have the function of the control unit 300. In this case, the control unit 300 may not be provided.

(14-5)
In the above embodiment, the laser beam is scanned on the observation object S in the X direction and the Y direction by controlling the XY scan optical system 20, but the present invention is not limited to this. Laser light may be scanned on the observation object S in the X ′ direction and the Y ′ direction by moving the stage 60.

  Further, line light (for example, elongated light extending in the X direction) may be used as the laser light. In this case, instead of the XY scan optical system 20, a Y scan optical system that does not perform scanning in the X direction is used. Further, instead of the light receiving element 30, a line CCD camera or the like including a plurality of light receiving elements arranged in a direction corresponding to the X direction is used.

(14-6)
In the above-described embodiment, the relative position of the observation object S with respect to the objective lens 3 in the Z direction is changed by moving the objective lens 3 in the Z direction. However, the present invention is not limited to this. The relative position of the observation object S with respect to the objective lens 3 in the Z direction may be changed by moving the stage 60 in the Z direction.

(14-7)
In the above embodiment, the portion of the cross-sectional curve data in which dust or the like is attached to the observation object S is removed as an unnecessary portion, but the present invention is not limited to this. When the reliability of the calculated surface property parameter is high, the portion of the cross-sectional curve data in which dust or the like is attached to the observation object S may not be removed as an unnecessary portion.

(14-8)
The above embodiment is an example in which the present invention is applied to a confocal microscope system, but the present invention may be applied to other optical microscope systems. For example, the present invention may be applied to an optical microscope system including an interference microscope or a triangulation microscope.

  Further, the present invention may be applied not only to a microscope but also to other optical surface state detection systems that can optically detect the surface shape of an observation object.

(15) Correspondence between each component of claim and each part of embodiment The following describes an example of the correspondence between each component of the claim and each part of the embodiment. It is not limited.

  In the above embodiment, the confocal microscope system 500 is an example of an optical surface shape detection system, the light receiving element 30 is an example of a light receiving element, and the lenses 1, 2, the objective lens 3, and the laser light source 10 are optical systems. For example, the cross-section curve data is an example of surface shape data, the storage device 240 is an example of a stylus data storage unit, the reference point SS is an example of the reference position of the stylus, and the stylus detection data is stylus It is an example of detection data.

  Further, the contact portion TE is an example of a tip portion, the tip radius TR is an example of curvature information, the taper portion TA is an example of a taper portion, the taper angle θ is an example of a taper angle, and the display unit 400 is It is an example of a display part. The CPU 210 is an example of a surface shape data generation unit, a stylus detection data generation unit, and an image data generation unit, and the operation unit 250 is an example of a curvature information setting unit, a filtering strength setting unit, and an image selection unit.

As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.
(16) Reference form
An optical surface shape detection system according to a reference form is an optical surface shape detection system for detecting a surface shape of an observation object, and irradiates light onto the light receiving element and the surface of the observation object and observes the object. An optical system that guides the light irradiated to the object to the light receiving element, a surface shape data generating unit that generates surface shape data representing the surface shape of the observation object based on the output signal of the light receiving element, and a virtual setting Based on the stylus data storage unit that stores stylus data representing the shape of the stylus, the surface shape data generated by the surface shape data generation unit, and the stylus data stored in the stylus data storage unit Is provided with a stylus detection data generation unit that generates stylus detection data corresponding to the movement of the stylus when moving on the surface of the observation object.
The surface shape detection method according to the reference form is a surface shape detection method for detecting the surface shape of an observation object, and irradiates light on the surface of the observation object and receives light irradiated on the observation object. A step of leading to the device, a step of generating surface shape data representing the surface shape of the observation object based on an output signal of the light receiving device, and a step of storing stylus data representing the shape of the stylus that is virtually set And generating stylus detection data corresponding to the movement of the stylus when the stylus moves on the surface of the observation object based on the generated surface shape data and the stored stylus data. It is a thing.
The surface shape detection program according to the reference form is a surface shape detection program for causing a processing device to execute a surface shape detection process for detecting a surface shape of an observation object, and irradiates light on the surface of the observation object. A process for guiding the light irradiated to the observation object to the light receiving element, a process for generating surface shape data representing the surface shape of the observation object based on the output signal of the light receiving element, and a virtually set of stylus A touch corresponding to the movement of the stylus when the stylus moves on the surface of the observation object based on the processing for storing the stylus data representing the shape, the generated surface shape data, and the stored stylus data. The processing device generates the needle detection data.

  The present invention can be effectively used for various optical microscope systems and the like.

DESCRIPTION OF SYMBOLS 1, 2 Lens 3 Objective lens 4-6 Half mirror 7 Pinhole member 8 ND filter 10 Laser light source 20 XY scan optical system 30 Light receiving element 40 White light source for illumination 50 Color CCD camera 60 Stage 61 Stage operation part 62 Stage drive Unit 63 lens driving unit 100 measuring unit 200 PC
210 CPU
220 ROM
230 Working Memory 240 Storage Device 300 Control Unit 400 Display Unit 500 Confocal Microscope System DC Optical Section Curve S Observation Object s1 to s4 Unit Area s10 Strip Area SC Stylus Section Curve SCa Stylus Section Curve SS Reference Point ST, STa, STb Stylus TA Taper part TE Contact part TG Side part

Claims (12)

An optical surface shape detection system for detecting the surface shape of an observation object,
A light receiving element;
An optical system that irradiates the surface of the observation object with light and guides the light irradiated to the observation object to the light receiving element;
A surface shape data generation unit for generating surface shape data representing the surface shape of the observation object based on an output signal of the light receiving element;
A stylus data storage unit for storing stylus data representing the shape of the virtually set stylus;
Based on the surface shape data generated by the surface shape data generation unit and the stylus data stored in the stylus data storage unit, the movement of the stylus when the stylus moves on the surface of the observation object. With a stylus detection data generation unit for generating corresponding stylus detection data ,
The stylus has a reference position and a curved tip,
The stylus data includes curvature information regarding the curvature of the tip,
The optical surface shape detection system, wherein the stylus detection data represents a locus of the reference position when the stylus moves on the surface of an observation target. The stylus further has a tapered portion that continuously extends from the tip portion,
The tapered portion has a diameter that increases as the distance from the tip portion increases.
The stylus data further includes a taper angle of the tapered portion is formed, the optical surface shape detecting system according to claim 1. The stylus detection data generation unit
Based on the curvature information included in the stylus data, the locus of the reference position when the tip moves while contacting the surface of the observation object,
In the case where either the tip portion or the tapered portion moves while being in contact with the observation object by correcting the obtained locus based on the taper angle of the tapered portion included in the stylus data. The optical surface shape detection system according to claim 2 , wherein the stylus detection data representing a locus of the reference position is generated. The optical surface shape detection system according to any one of claims 1 to 3 , further comprising a curvature information setting unit operated by a user to set the curvature information. The stylus detection data generation unit
Performing a filtering process to remove high frequency noise from the surface shape data, generating the stylus detection data based on the surface shape data after the filtering process,
The optical surface shape detection system according to any one of claims 1 to 4 , wherein a cutoff wavelength in the filtering process is determined based on the curvature information included in the stylus data. The tip has a spherical shape;
The curvature information includes a radius of curvature,
The stylus detection data generation unit
Performing the filtering process using a Gaussian filter or a moving average filter,
The optical surface shape detection system according to claim 5 , wherein a cutoff wavelength in the filtering process is determined to be a value that is 1 to 8 times a radius of curvature of the tip. The stylus detection data generation unit
Performing the filtering process using a moving average filter,
The optical surface shape detection system according to claim 6 , wherein a moving average score is determined based on the determined cutoff wavelength. The stylus detection data generation unit
Perform the filtering process using a median filter,
The optical surface shape detection system according to claim 5 , wherein a filter size in the filtering process is determined according to the curvature information. The optical surface shape detection system according to any one of claims 5 to 8 , further comprising a filtering intensity setting unit operated by a user to set the intensity of the filtering process. An image data generating unit that generates optical image data representing the surface shape of the observation object based on the surface shape data and generates stylus image data representing the surface shape of the observation object based on the stylus detection data When,
An image selection unit operated by a user to select one of the optical image data and the stylus image data generated by the image data generation unit;
The optical system according to any one of claims 1 to 9 , further comprising: a display unit that displays an image based on one of the optical image data selected by the image selection unit and the stylus image data. Surface shape detection system. A surface shape detection method for detecting a surface shape of an observation object,
Irradiating the surface of the observation object with light and guiding the light irradiated to the observation object to the light receiving element;
Generating surface shape data representing a surface shape of an observation object based on an output signal of the light receiving element;
Storing stylus data representing a virtually set stylus shape;
Based on the probe data generated surface shape data and storage, and a step of generating a stylus detection data corresponding to the movement of the stylus when the stylus moves the surface of the observed object ,
The stylus has a reference position and a curved tip,
The stylus data includes curvature information regarding the curvature of the tip,
The surface shape detection method in which the stylus detection data represents a trajectory of the reference position when the stylus moves on the surface of an observation object . A surface shape detection program for causing a processing device to execute a surface shape detection process for detecting a surface shape of an observation object,
A process of irradiating the surface of the observation object with light and guiding the light irradiated to the observation object to the light receiving element;
Processing for generating surface shape data representing the surface shape of the observation object based on the output signal of the light receiving element;
Processing to store stylus data representing the shape of the virtually set stylus;
A process of generating stylus detection data corresponding to the movement of the stylus when the stylus moves on the surface of the object to be observed based on the generated surface shape data and stored stylus data;
Causing the processing device to execute ,
The stylus has a reference position and a curved tip,
The stylus data includes curvature information regarding the curvature of the tip,
The stylus detection data is a surface shape detection program that represents a locus of the reference position when the stylus moves on the surface of an observation target .

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