JP5996067B2 - IMAGING DEVICE, ITS CONTROL METHOD, AND IMAGING SYSTEM - Google Patents

Description

The present invention relates to an imaging apparatus suitable for medical diagnosis and industrial nondestructive inspection, a control method thereof, and an imaging system including the imaging apparatus . In particular, each comprises a plurality of pixels including conversion elements and switch elements in a matrix, the imaging apparatus and a control method thereof detector for converting a radiation or light into an electric signal, and relates to an imaging system.

  2. Description of the Related Art In recent years, a radiation imaging apparatus using a flat panel detector (hereinafter referred to as “FPD”) formed of a semiconductor material is practically used as an imaging apparatus used for medical image diagnosis and nondestructive inspection using X-rays. It is beginning to become. In this radiation imaging apparatus using FPD, radiation such as X-rays transmitted through a subject such as a patient is converted into an analog electrical signal by FPD, and the analog electrical signal is converted from analog to digital to obtain a digital image signal. It is a device capable of digital photography. For example, in medical image diagnosis, a radiation imaging apparatus having such an FPD is used as a digital imaging apparatus for still image shooting such as general shooting or moving image shooting such as fluoroscopic shooting.

  In such an imaging apparatus, when X-ray imaging is performed, it is necessary to synchronize the X-ray irradiation by the X-ray generator and the operation of the imaging apparatus. Specifically, the imaging apparatus enters an accumulation operation for accumulating electric signals based on X-rays transmitted through the subject at the start of X-ray irradiation, and reads the accumulated electric signals after the X-ray irradiation ends. It is necessary to start the read operation.

  As a method of synchronizing the X-ray irradiation by the X-ray generator and the operation of the imaging device, a method of connecting the X-ray generator and the imaging device using a cable, and an X-ray irradiation without connecting using a cable Is detected by the imaging apparatus, and the imaging apparatus is operated in accordance with the detected X-ray irradiation.

  In addition, as a method for detecting the X-ray irradiation by the imaging apparatus, for example, techniques disclosed in Patent Document 1 and Patent Document 2 below are known. Patent Document 1 describes a technique of adding signals of adjacent pixels and sequentially reading the added signals when detecting X-ray irradiation. Japanese Patent Application Laid-Open No. 2004-228561 describes a technique for detecting X-ray irradiation by sequentially reading out signals of arbitrarily selected determination pixels.

JP 2001-116646 A JP-A-2005-143802

  In the above-described detection of X-ray irradiation, it is necessary to detect X-ray irradiation in a state where there is no subject or in a region where the amount of X-ray transmission from the subject is large. However, since it is not known how the subject is arranged before imaging, it is necessary to detect X-rays in a wide area of the detection unit. In addition, since the imaging device uses a planar detector formed of a semiconductor material, if the accumulation time is long, dark current increases and image quality deteriorates. For this reason, it is necessary to accurately detect the X-ray pulse width (width from the start of irradiation to the end of irradiation) and perform imaging with a minimum accumulation time. For this reason, it is necessary to read out signals in a wide area of the detection unit at high speed in detecting X-ray irradiation.

  In Patent Document 1, since signals added in adjacent pixels are sequentially read out, signals in a wide area of the detection unit can be read out, but it takes time to read out the signals, and the X-ray pulse width cannot be detected accurately. In Patent Document 2, since signals of arbitrarily selected pixels are sequentially read out, if the number of selected pixels is small, the amount of X-ray irradiation with respect to the selected pixels is small and it may be difficult to detect the signal. Further, when the number of selected pixels is increased, it takes time to read out signals, and the X-ray pulse width cannot be monitored accurately.

  The present invention has been made in view of such problems, and can detect X-ray (radiation) irradiation more accurately and synchronize X-ray irradiation and the operation of the imaging apparatus more accurately. An object of the present invention is to provide a possible imaging apparatus, a control method thereof, and an imaging system.

Imaging apparatus of the present invention, to control and detection units each for converting a plurality of pixels including conversion elements and switch elements provided in a matrix, the radiation or light into an electric signal, the conduction state before Symbol switching element a drive moving circuit part that, an imaging apparatus and a control unit for controlling the drive circuit section in accordance with a signal obtained from the detection unit, the control unit is discontinuous by the driving circuit unit Start of radiation or light irradiation, which is performed by comparing a signal obtained from the detection unit by a first operation for simultaneously turning on the switch elements of a plurality of rows with a threshold value. Alternatively, based on the determination of termination, the driving circuit unit obtains an image based on a second operation for causing the switch element to be in a non-conductive state and a signal accumulated in the plurality of pixels in the second operation. In the drive circuit section A third operation for bringing the switch elements into a conductive state in units of rows, and the drive circuit unit simultaneously conducting the switch elements in the plurality of discontinuous rows with respect to the detection unit that has performed the third operation. A fourth operation for bringing the switch element into a state, and a fifth operation for bringing the switch element into a non-conductive state in a state in which no radiation or light is irradiated by the drive circuit unit with respect to the detection unit in which the fourth operation has been performed. And the switch elements are connected to the drive circuit unit in units of rows so that an offset image for performing the subtraction process with the image is acquired based on the signals accumulated in the plurality of pixels in the fifth operation. The drive circuit unit is controlled so as to perform the sixth operation for setting the state.
The present invention also includes a method for controlling the imaging device described above and an imaging system including the imaging device described above.

  ADVANTAGE OF THE INVENTION According to this invention, the imaging device which can detect irradiation of X-ray (radiation) more correctly, and can synchronize X-ray irradiation and operation | movement of an imaging device more correctly, its control method, and imaging A system can be provided.

It is a block diagram showing an example of an imaging device concerning a 1st embodiment of the present invention. 1 is a schematic equivalent circuit diagram illustrating an example of an imaging apparatus according to a first embodiment of the present invention. FIG. 3 is an equivalent circuit diagram illustrating an example of details of a read circuit unit (first read circuit unit) illustrated in FIGS. 1 and 2. 3 is a flowchart illustrating an example of a processing procedure by the control method of the imaging apparatus according to the first embodiment of the present invention. 3 is a timing chart illustrating an example of an imaging operation of the imaging apparatus according to the first embodiment of the present invention. 3 is a timing chart illustrating an example of an imaging operation of the imaging apparatus according to the first embodiment of the present invention. It is an equivalent circuit diagram which shows an example of the imaging device which concerns on the 2nd Embodiment of this invention. 6 is a timing chart illustrating an example of an imaging operation of an imaging apparatus according to a second embodiment of the present invention. It is an equivalent circuit diagram which shows an example of the imaging device which concerns on the 3rd Embodiment of this invention. 10 is a timing chart illustrating an example of an imaging operation of an imaging apparatus according to a third embodiment of the present invention. 1 is a schematic configuration diagram of a radiation imaging system using a portable radiation imaging apparatus capable of performing fluoroscopic imaging and still image imaging, showing an application example of the present invention.

  Hereinafter, embodiments (embodiments) for carrying out the present invention will be described with reference to the drawings. In this specification, X-rays will be described as an example of radiation. However, in the present invention, not only X-rays but also electromagnetic waves such as γ-rays, α-rays, and β-rays are included in the radiation. To do.

(First embodiment)
FIG. 1 is a block diagram illustrating an example of an imaging apparatus according to the first embodiment of the present invention. 1 includes a detection unit 101, a drive circuit unit 102, a read circuit unit 103, a signal processing unit 106 including an A / D conversion unit 104 and a digital data processing unit 105, a power supply unit 107, and a control. Circuit portion 108.

  The detection unit 101 includes a plurality of pixels for converting radiation or light into an analog electrical signal in a matrix. The drive circuit unit 102 drives the plurality of pixels of the detection unit 101 in units of rows in order to output analog electric signals in parallel from the plurality of pixels of the detection unit 101 in units of rows.

  In the present embodiment, for simplification of description, the detection unit 101 has a form having pixels of 8 rows and 8 columns, and a first pixel group 101a and a second pixel group each including four pixel columns. 101b. A pixel signal that is an analog electric signal output from a pixel of the first pixel group 101a is read by the corresponding first readout circuit unit 103a. The pixel signal 113 read out in parallel from a plurality of pixels by the first readout circuit unit 103a and subjected to parallel-serial conversion is converted into digital data 114 by the corresponding first A / D conversion unit 104a. Similarly, a pixel signal which is an analog electric signal from the second pixel group 101b is read by the corresponding second readout circuit unit 103b and the second A / D conversion unit 104b and converted into digital data. .

  The digital data from the first A / D conversion unit 104a and the second A / D conversion unit 104b is subjected to signal processing, digital multiplex processing, offset correction, and the like by the digital data processing unit 105, and a digital image signal (115) is output.

  The signal processing unit 106 includes a reading circuit unit 103 including a first reading circuit unit 103a and a second reading circuit unit 103b, and a first A / D conversion unit 104a and a second A / D conversion unit 104b. An A / D conversion unit 104 and a digital data processing unit 105 are included.

  The imaging apparatus 100 includes a power supply unit 107 that applies a bias corresponding to each component to the signal processing unit 106. The power supply unit 107 supplies the reference voltages Vref1 and Vref2 to the reading circuit unit 103, and supplies the reference voltage Vref3 to the A / D conversion unit 104. The imaging apparatus 100 further includes a control circuit unit 108 for controlling at least one of the drive circuit unit 102, the signal processing unit 106, and the power supply unit 107. The control circuit unit 108 supplies a control signal 118 to the power supply unit 107. The control circuit unit 108 supplies control signals 116, 117, and 120 to the reading circuit unit 103. The control circuit unit 108 supplies a control signal 129 to the A / D conversion unit 104 and supplies a control signal 130 to the digital data processing unit 105. The control circuit unit 108 supplies a control signal 119 to the drive circuit unit 102, and the drive circuit unit 102 supplies a drive signal 111 to the detection unit 101 based on the control signal 119.

  FIG. 2 is a schematic equivalent circuit diagram showing an example of the imaging apparatus according to the first embodiment of the present invention. In addition, the same structure as the structure demonstrated using FIG. 1 is provided with the same code | symbol, and the detailed description is omitted.

The detection unit 101 includes a plurality of pixels 201 arranged in a matrix. In FIG. 2, 8 × 8 pixels 201 are arranged over 8 rows and 8 columns. The pixel 201 includes a conversion element S (S _{11 to} S ₈₈ ) that converts radiation or light into electric charge, and a switch element T (T _{11 to} T ₈₈ ) that outputs an electrical signal corresponding to the electric charge.

The drive circuit unit 102 sets the switch elements (T _{11 to} T ₈₈ ) in a conductive state in units of rows, and makes the switch elements conductive so that the switch elements in a plurality of discontinuous rows are at least temporarily in a conductive state. It is possible to control the state. When the switch element is in a conductive state, the switch element outputs an electrical signal corresponding to the electric charge converted by the conversion element. This operation of the switch element is referred to as an output operation. On the other hand, when the switch element is in a non-conductive state, the switch element accumulates electric charge in the conversion element. This operation of the switch element is referred to as an accumulation operation.

  As the conversion element S that converts light into electric charge, a photoelectric conversion element such as a PIN photodiode that is disposed on an insulating substrate such as a glass substrate and uses amorphous silicon as a main material is preferably used. Further, as the conversion element S that converts radiation into electric charge, an indirect type conversion including a wavelength conversion body that converts radiation into light in a wavelength band that can be detected by the photoelectric conversion element on the radiation incident side of the photoelectric conversion element described above. An element or a direct conversion element that directly converts radiation into electric charge is preferably used.

  The switch element T is formed of a transistor having a control terminal and two main terminals. In the case of a pixel in which the photoelectric conversion element is provided on an insulating substrate, a thin film transistor (TFT) is preferably used.

  One electrode of the conversion element S is electrically connected to one of the two main terminals (source electrode and drain electrode) of the switch element T, and the other electrode is electrically connected to the bias power source Vs via a common wiring. Connected to.

The switch elements T of a plurality of pixels in the row direction, for example, the plurality of switch elements T _{11 to} T ₁₈ in the first row, have their control terminals electrically connected in common to the drive wiring G ₁ in the first row. . Then, a drive signal for controlling the conduction state and the non-conduction state of the switch element T is given from the drive circuit unit 102 in units of rows via the drive wiring (G ₁ or the like). The drive signal includes a conduction voltage for making the switch element T conductive and a non-conduction voltage for making the switch element T non-conductive.

The switch elements T of the plurality of pixels in the column direction, for example, the plurality of switch elements T _{11 to} T ₈₁ in the first column, have their other main terminals electrically connected to the signal wiring Sig ₁ in the first column. . While the switch element T is in a conductive state, the switch element T outputs an electrical signal corresponding to the charge of the conversion element to the readout circuit unit 103 via the signal wiring Sig ₁ .

A plurality of signal lines Sig _{1 to} Sig ₈ arranged in the column direction transmit electric signals output from a plurality of pixels of the detection unit 101 to the readout circuit unit 103 in parallel. In the present embodiment, as shown in FIG. 1, the detection unit 101 is divided into a first pixel group 101 a and a second pixel group 101 b that form a set of four pixel columns. Analog electric signals output from the first pixel group 101 a are read in parallel by the corresponding first read circuit unit 103 a in the read circuit unit 103. Further, the analog electric signals output from the second pixel group 101b are read in parallel by the second reading circuit portion 103b. At this time, the readout circuit unit 103 is configured to be able to add or average the electrical signals output from the switch elements included in the pixels 201 in the column direction. That is, when detecting the start or end of radiation irradiation, the signal processing unit 106 adds or averages the electrical signals output from the switch elements included in the pixels 201 in the column direction to generate a detection signal. Is possible.

  The first readout circuit unit 103a samples and holds the first amplification circuit unit 202a that amplifies the electrical signal output in parallel from the first pixel group 101a and the electrical signal from the first amplification circuit unit 202a. A first sample-and-hold circuit unit 203a. The first readout circuit unit 103a includes a first multiplexer 204a that sequentially outputs the electrical signals read in parallel from the first sample and hold circuit unit 203a and outputs the electrical signals as serial image signals. Furthermore, the first readout circuit unit 103a includes a first variable amplification unit 205a that is an output buffer that outputs an impedance-converted image signal.

  Similarly, the second readout circuit unit 103b includes a second amplification circuit unit 202b, a second sample and hold circuit unit 203b, a second multiplexer 204b, and a second variable amplification unit 205b.

  The electric signal from the pixel is input to the first variable amplification unit 205a or the second variable amplification unit 205b via the signal buffer SFS. The noise component is input to the first variable amplification unit 205a or the second variable amplification unit 205b via the noise buffer SFN.

  The electric signal and noise component from the pixel input to the first variable amplification unit 205a are subtracted and output, and input to the first A / D conversion unit 104a. Similarly, the electrical signal and noise component from the pixel input to the second variable amplification unit 205b are subtracted and output, and input to the second A / D conversion unit 104b.

  The reference voltage Vref3 is input from the power supply unit 107 to the first A / D conversion unit 104a and the second A / D conversion unit 104b. Here, the reference voltage Vref2 is input to the gates of the signal buffer SFS of the first readout circuit unit 103a and the second readout circuit unit 103b from the power source unit 107 through the reset switch SRS at a predetermined timing.

  Further, the reference voltage Vref2 is input to the gates of the noise buffer SFN of the first readout circuit unit 103a and the second readout circuit unit 103b from the power supply unit 107 through the reset switch SRN at a predetermined timing. That is, the reset switch SR resets the inputs of the variable amplifiers 205a and 205b at a predetermined timing by applying the reference voltage Vref2 to the gate of the buffer SF at a predetermined timing.

  The control circuit unit 108 controls the imaging device 100. The control circuit unit 108 includes a comparison unit 501 that compares the detection signal 115 output from the signal processing unit 106 with a threshold value and determines the presence or absence of X-ray (radiation) or light irradiation. The control circuit unit 108 also includes a timing generation unit 502 that controls the imaging device 100 (the drive circuit unit 102, the signal processing unit 106, and the like) based on the result of the comparison unit 501. In addition, the control circuit unit 108 (timing generation unit 502) supplies a control signal 116 to the first amplifier circuit unit 202a and the second amplifier circuit unit 202b. Further, the control circuit unit 108 (timing generation unit 502) supplies a control signal 117a to the reset switches SRS and SRN, respectively, and supplies a control signal 117b to the first multiplexer 204a and the second multiplexer 204b. Yes. The control circuit unit 108 (timing generation unit 502) provides control signals 120s, 120n, and 120oe to the first sample hold circuit unit 203a and the second sample hold circuit unit 203b. Further, the control circuit unit 108 (timing generation unit 502) controls the first A / D conversion unit 104a and the second A / D conversion unit 104b by supplying a control signal 129, respectively, and performs digital data processing. The unit 105 is controlled by giving a control signal 130.

  FIG. 3 is an equivalent circuit diagram illustrating an example of the details of the read circuit unit 103 (first read circuit unit 103a) illustrated in FIGS. The first amplifying circuit unit 202a amplifies and outputs an electrical signal (pixel signal) read from the pixel, an integration capacitor Cf, and an integration capacitor Cf, corresponding to each signal line. And an amplifying circuit having a reset switch RC for resetting. The output electric signal is input to the inverting input terminal of the operational amplifier A, and the amplified electric signal is output from the output terminal. The reference voltage Vref <b> 1 is input from the power supply unit 107 to the normal rotation input terminal of the operational amplifier A. An integration capacitor Cf is disposed between the inverting input terminal and the output terminal of the operational amplifier A, and a reset switch RC is connected in parallel with the integration capacitor Cf.

  The first sample hold circuit unit 203a includes an odd row signal sample hold circuit, an even row signal sample hold circuit, an odd row noise sample hold circuit, and an even row noise sample hold circuit corresponding to each amplifier circuit. ing.

  The odd-row signal sample-hold circuit includes a sampling switch SHOS that samples an electrical signal from an odd-row pixel and a sampling capacitor Chos that holds an odd-row pixel signal. The even-row signal sample-hold circuit has a sampling switch SHES that samples even-row pixel signals and a sampling capacitor Ches that holds even-row pixel signals. The odd-numbered noise sample-and-hold circuit has a sampling switch SHON that samples the noise component of the operational amplifier A before sampling the odd-numbered pixel signals, and a sampling capacitor Chon that holds the noise signal. The even-row noise sample-hold circuit has a sampling switch SHEN that samples the noise of the operational amplifier A before sampling the even-row pixel signals, and a sampling capacitor Chen that holds the noise signal.

  Each of the first multiplexers 204a includes a switch MSOS corresponding to the odd-row signal sample hold circuit, a switch MSES corresponding to the even-row signal sample hold circuit, and corresponding to each amplifier circuit. . Further, a switch MSON is provided corresponding to the odd-numbered row noise sample and hold circuit, and a switch MEN is provided corresponding to the even-numbered row noise sample and hold circuit, corresponding to each amplifier circuit. Then, by sequentially selecting each switch, an operation of converting a parallel signal of a pixel signal or a noise component into a serial signal is performed.

  Next, the operation of the imaging apparatus of the present invention will be described with reference to FIG. 4, FIG. 5, and FIG. FIG. 4 is a flowchart illustrating an example of a processing procedure according to the control method of the imaging apparatus according to the first embodiment of the present invention. 4 is performed based on control by the control circuit unit 108, for example. 5 and 6 are timing charts showing an example of the imaging operation of the imaging apparatus according to the first embodiment of the present invention.

  Here, first, an operation for detecting the start of X-ray irradiation irradiated in a pulsed manner (hereinafter referred to as an X-ray irradiation start detection operation) will be described. In this example, the operation for detecting the start of X-ray irradiation will be described. However, this is an example, and for example, the operation for detecting the start of light irradiation can also be applied.

First, in order to detect the start of X-ray irradiation, the drive circuit unit 102, based on the control of the control circuit unit 108, at least a plurality of discontinuous rows, here two rows of the first row and the eighth row. The switch elements T _{11 to} T ₁₈ and T _{81 to} T ₈₈ are made conductive at the same time. This corresponds to “detection drive wiring ON” in step S201 of FIG. Thereby, the imaging device detects the X-rays irradiated to the conversion elements S _{11 to} S ₁₈ and S _{81 to} S ₈₈ . Here, the switch elements included in the pixels in the plurality of discontinuous rows are turned on, and the pixels in the plurality of discontinuous rows are arranged in the outermost row of the detection unit 101. However, the drive circuit unit 102 can change a row of pixels including a switch element that is turned on in the detection output operation based on the control of the control circuit unit 108. For example, the drive circuit unit 102 can change a row of pixels including a switch element that is rendered conductive in the detection output operation in accordance with a user input based on the control of the control circuit unit 108. In addition, for example, the drive circuit unit 102 can change the row of pixels including a switch element that is turned on in the detection output operation in accordance with the part of the subject to be imaged based on the control of the control circuit unit 108. is there.

With the switch elements T _{11 to} T ₁₈ and T _{81 to} T ₈₈ in a conductive state, a control signal 116 is given from the control circuit unit 108, the integration capacitor Cf is reset by the reset switch RC, and the amplifier circuit is reset.

  Next, control signals 120n and 120oe are supplied from the control circuit unit 108 to the sample and hold circuit units 203a and 203b. As a result, the sampling switch SHON of the odd-numbered row noise sample and hold circuit is turned on, and the noise component of the amplifier circuit is transferred from the reset amplifier circuit to the sampling capacitor Chon. Then, the sampling switch SHON is made non-conductive and the noise component is held in the sampling capacitor Cho.

Then, for resetting the conversion element is also a dark current without monitoring the X-ray, also other two rows of the switching elements T ₁₁ through T ₁₈ and T ₈₁ through T _88, at steps S202 and S203 in FIG. 4, conduct switching element As a state, the conversion element is reset. During this time, the switch elements T _{11 to} T ₁₈ and T _{81 to} T ₈₈ continue to maintain the conduction state and detect the start of X-ray irradiation. Here, as shown in the timing chart of FIG. 6, the dark current resetting operation may be turned off after a plurality of lines or all the lines are continuously turned on and the start of X-ray irradiation is confirmed. As in the timing chart, G2 to G7 may be sequentially turned on / off to be reset.

  Next, after the sampling switch SHON is turned off, the control circuit unit 108 gives the control signals 120s and 120oe to the sample and hold circuit units 203a and 203b. As a result, the sampling switch SHOS of the odd-row signal sample-hold circuit is turned on, the signal is transferred to the sampling capacitor Chos, and then the sampling switch SHOS is turned off.

When X-rays are irradiated from the X-ray generator (radiation generator) to the conversion elements S _{11 to} S ₁₈ and S _{81 to} S ₈₈ of the detection unit 101, each conversion element S is irradiated with the irradiated X-rays. A corresponding charge is generated. Here, the generated charge is transferred to the integration capacitor Cf of the amplifier circuit, and the difference between the sampling switch SHON being non-conductive and the sampling switch SHOS being non-conductive is a pixel signal that is an electrical signal. appear.

  Subsequently, the imaging apparatus 100 performs the following signal processing. A control signal 117a is supplied from the control circuit unit 108 to the reset switches SRS and SRN. Accordingly, the reset switches SRS and SRN are turned on, the reference voltage Vref2 is applied to the gates of the buffers SFS and SFN, and the inputs of the variable amplifiers 205a and 205b are reset.

  Next, the reset switches SRS and SRN are turned off, and the control signal 117b is given from the control circuit unit 108 to the multiplexers 204a and 204b. In response, the switch MSOS1 and the switch MSON1 of the first multiplexer 204a are turned on. Accordingly, the pixel signal of the pixel in the first column is input to the first variable amplification unit 205a via the buffer SFS and the noise component via the buffer SFN. Further, the switch MOS5 and the switch MSON5 of the second multiplexer 204b are turned on simultaneously. As a result, the pixel signals of the pixels in the fifth column to which the noise component has been added are input to the second variable amplifying unit 205b via the buffer SFS and the noise component via the buffer SFN, respectively.

  The pixel signal to which the noise component is added and the noise component are subjected to differential processing in the variable amplification units 205a and 205b. Then, the differentially processed pixel signal is amplified and output from each of the variable amplification units 205a and 205b. Thereby, the noise component of each amplifier circuit is removed from the output from the amplifier circuit. The A / D converters 104 a and 104 b convert the output pixel signals into digital data AD_DATA_a and AD_DATA_b, respectively, and output the digital data to the digital data processor 105.

  Next, pixel data output operation is performed for the second and sixth columns, and the digital data AD_DATA_a and AD_DATA_b are output from the A / D conversion units 104a and 104b to the digital data processing unit 105, respectively. Similarly, pixel data output operations for the third to fourth columns and the seventh to eighth columns are sequentially performed.

  In the above-described embodiment, the switches MMOS1 to MOS4 and the switches MSON1 to MSON1 are sequentially switched and converted into digital data, respectively. However, it is also possible to increase the speed of detecting the start of X-ray (radiation) or light irradiation by simultaneously turning on four switches and converting the summed and averaged signals into digital data at once. it can. In the above-described embodiment, the two readout circuit units 103, 103a and 103b, are operated. However, only one of the readout circuit units 103 may be operated and detection may be performed while suppressing power consumption. Further, at the time of detection, the Cf capacity of the reading circuit unit 103 may be made larger than when reading a subject image, which will be described later, so that the signal for detection can be enlarged and read. In addition, in order to increase the reading speed, the time constant of the filter in the reading circuit unit 103 can be reduced.

  The signal converted into digital data is input to the digital data processing unit 105, and the addition value of AD_DATA_a and AD_DATA_b, or the averaged average value, maximum value, or minimum value is calculated (generated) as the detection signal 115. Is done. Then, the control circuit unit 108 inputs the detection signal 115 to the comparison unit 501, and the comparison unit 501 compares the detection signal 115 with a threshold value to determine the presence or absence of X-ray irradiation. This corresponds to step S204 in FIG. Here, when the X-ray start pulse is detected, it is determined that X-ray irradiation has started when a detection signal 115 larger than a preset threshold value is input to the comparison unit 501.

  The threshold is set by measuring the noise level in advance and setting it to a value with a sufficient margin with respect to the noise level. Alternatively, a differential value from the previous monitor result may be calculated and evaluated by an increase amount.

  In this embodiment, the comparison unit 501 is configured in the control circuit unit 108. However, for example, the comparison unit 501 may be configured in the digital data processing unit 105 to perform comparison determination. If X-ray irradiation has not been started as a result of the comparison determination (step S204 / NO in FIG. 4), the process returns to step S202 in FIG. 4, and “detection drive wiring ON” is continuously performed. On the other hand, when the X-ray irradiation is started as a result of the comparison determination (step S204 / YES in FIG. 4), the operation proceeds to the accumulation operation.

In the accumulation operation, the switch elements other than the two rows of the switch elements T _{11 to} T ₁₈ and T _{81 to} T ₈₈ are brought into a non-conducting state at “drive lines other than the detection drive lines OFF” in step S205 of FIG. Then, in the same manner as the X-ray irradiation start detection operation, the readout circuit units 103a and 103b are operated by “signal readout” in step S206 of FIG.

The digital data processing unit 105 calculates (generates) the added value of AD_DATA_a and AD_DATA_b that are input, or an averaged average value, maximum value, or minimum value as the detection signal 115. Then, the control circuit unit 108 inputs the detection signal 115 to the comparison unit 501 and compares it with a threshold value (“threshold value> detection signal?” In step S207 in FIG. 4), and determines the presence or absence of X-ray irradiation. . In detection of the end of X-ray irradiation, when the detection signal 115 becomes smaller than a preset threshold value, it is determined that X-ray irradiation has ended. Further, the threshold value at this time may be changed from the threshold value during the X-ray irradiation start detection operation. In addition to the two rows of switch elements T _{11 to} T ₁₈ and T _{81 to} T ₈₈ , since the switch elements are turned off, charges are generated in each conversion element in accordance with the irradiated X-rays, and each conversion is performed. Charge is accumulated in the element.

  When the end of X-ray irradiation is confirmed (step S207 / YES in FIG. 4), the process proceeds to a reading operation. On the other hand, when the end of X-ray irradiation is not confirmed (step S207 / NO in FIG. 4), the process returns to step S206 in FIG.

In the readout operation as “subject image readout” in step S208 in FIG. 4, a control signal is transmitted from the control circuit unit 108 to the readout circuit units 103a and 103b and the drive circuit unit 102. As a result, the drive circuit unit 102 turns off the switch elements in a plurality of discontinuous rows. The driving circuit unit 102 sequentially from the drive line G ₁ of the first row to the drive wire G _8, continue to supply a conducting voltage, the electric charge accumulated in the conversion element is read out.

  First, the control signal 116 is given from the control circuit unit 108 to the amplifier circuit unit 202, the integration capacitor Cf is reset by the reset switch RC, and the amplifier circuit is reset. Next, control signals 120 n and 120 oe are supplied from the control circuit unit 108 to the sample hold circuit unit 203. As a result, the sampling switch SHON of the odd-numbered row noise sample and hold circuit is turned on, and the noise component of the amplifier circuit is transferred from the reset amplifier circuit to the sampling capacitor Chon. after that. The sampling switch SHON is turned off and the noise component is held in the sampling capacitor Chon.

Next, the control circuit section control signal 119 to the drive circuit unit 102 to 108 is supplied, the driving circuit unit 102 outputs a conduction voltage to the driving line G ₁ in the first row on the basis thereof the switch element T ₁₁ through T ₁₈ Is turned on. When the switch elements T _{11 to} T ₁₈ are in a conductive state, an electrical signal corresponding to the electric charge accumulated in the conversion elements S _{11 to} S ₁₈ is output to the integration capacitor Cf and converted into an electrical signal output from the amplifier circuit. Proportional output appears. Then, after sufficient electrical signals are output, the switch elements T _{11 to} T ₁₈ are brought into a non-conducting state.

  Next, control signals 120 s and 120 oe are supplied from the control circuit unit 108 to the sample hold circuit unit 203. Thereby, the sampling switch SHOS of the odd-row signal sample-hold circuit is turned on, and the signal is transferred to the sampling capacitor Chos. Thereafter, the sampling switch SHOS is turned off, and the pixel signal corresponding to the X-ray irradiated to the sampling capacitor Chos is stored.

Next, a control signal 117a is given from the control circuit unit 108 to the reset switches SRS and SRN. Thereby, the reset switches SRS and SRN are turned on, the reference voltage Vref ₂ is applied to the gates of the buffers SFS and SFN, and the inputs of the variable amplifiers 205a and 205b are reset.

  Next, the reset switches SRS and SRN are made non-conductive, and a control signal 117b is given from the control circuit unit 108 to each multiplexer. In response, the switch MSOS1 and the switch MSON1 of the first multiplexer 204a are turned on. As a result, the pixel signal of the pixel in the first column is input to the first variable amplification unit 205a via the buffer SFS and the noise component via the buffer SFN. Further, the switch MOS5 and the switch MSON5 of the second multiplexer 204b are turned on simultaneously. Thereby, the pixel signal of the pixel in the fifth column to which the noise component is added is input to the second variable amplification unit 205b via the buffer SFS and the noise component via the buffer SFN.

  The pixel signal to which the noise component is added and the noise component are subjected to differential processing in each variable amplifier. Then, the difference-processed pixel signal is amplified and output from the variable amplifier. Thereby, the noise component of each amplifier circuit is removed from the output from the amplifier circuit. Each A / D conversion unit 104a, 104b converts each output pixel signal into digital data S (1, 1), S (1, 5) and outputs the digital data to the digital data processing unit 105.

  Next, pixel data output operation is performed for the second and sixth columns, and the digital data S (1,2) and S (1,6) are processed by the digital data from the A / D conversion units 104a and 104b. Is output to the unit 105. Similarly, pixel data output operations for the third to fourth columns and the seventh to eighth columns are sequentially performed. Similarly, a subject image irradiated with X-rays can be acquired by operating the second to eighth lines in the same manner.

  Further, in the timing chart of FIG. 5 and the “offset correction image reading” in step S209 of FIG. 4, an offset image that is not irradiated with X-rays is acquired. For this reason, after the readout operation after X-ray irradiation, the X-ray irradiation start detection operation, the accumulation operation, and the readout operation are repeated once again at the same time in the absence of X-ray irradiation, and an offset image is acquired. Then, the digital data processing unit 105 performs subtraction processing on the subject image and the offset image to perform offset correction.

In the present embodiment, in order to detect the start and end of X-ray irradiation, the switch elements T _{11 to} T _{18 in the} first row and the switch elements T _{81 to} T in the eighth row as the switch elements in a plurality of discontinuous rows. _{Although 88} is used, if the same row is continuously used for monitoring, the conversion element S and the switch element T may be deteriorated. Therefore, the switch elements T _{11 to} T ₁₈ in the first row and the switch elements T _{21 to} T _{28 in the} second row, and the switch elements T _{81 to} T _{88 in} the eighth row and the switch element T _{71 in the} seventh row are used. and through T _78, respectively used alternately, it is possible to suppress the deterioration.

Further, in the present embodiment, the pixels that detects the second line of the X-ray including a switch element T ₁₁ through T ₁₈ and T ₈₁ through T _88, because that is not the accumulation operation, the X-ray information in the read operation is There will be no signal line. Therefore, it is possible to interpolate by correcting the defect with the pixel in the adjacent row as the pixel in the outer peripheral portion which is not used by the user or as the pixel in the defective row. Here, the defect correction is performed by, for example, the digital data processing unit 105, and the digital data processing unit 105 that performs the defect correction constitutes a “correction unit”. Further, when used as a defective row, if adjacent rows on both sides (upper and lower sides) of the row are performing the accumulation operation, correction can be performed using pixel signals (electrical signals) of pixels in the upper and lower rows. The correction accuracy can be increased. For this reason, when detecting X-rays, it is possible to detect a wide range of X-rays at high speed by detecting them in non-adjacent discontinuous rows, and to accurately detect the start or end of X-ray irradiation. It is possible to perform highly accurate defect correction.

  Further, in X-ray imaging, a technician who performs imaging selects a site before imaging, and determines the conditions of the X-ray generator according to the site. Therefore, the detection line of the detection unit 101 can be improved by arranging the detection line in a region where the amount of X-ray transmission is large in conjunction with the part to be imaged. For example, when photographing the chest, an area that is directly input to the imaging apparatus 100 without X-rays passing through the subject, such as the armpit of the subject or the side of the neck, can easily detect the start or end of X-ray irradiation. . When imaging is performed without selecting a region, an engineer arbitrarily selects a row to be used for detection. For example, the control circuit unit 108 detects the selection and controls the drive circuit unit 102 to perform X-rays. It is also possible to detect the start or end of irradiation.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIGS. The second embodiment is different from the first embodiment in the configuration of the imaging device. Note that a detailed description of the same apparatus configuration and operation as in the first embodiment will be omitted.

  FIG. 7 is an equivalent circuit diagram illustrating an example of an imaging apparatus according to the second embodiment of the present invention. FIG. 8 is a timing chart showing an example of the imaging operation of the imaging apparatus according to the second embodiment of the present invention.

In the first embodiment, the drive wirings G _{1 to} G ₈ are all common in the row direction, but in the second embodiment, they are separated at the center of the detection unit 101. That is, the plurality of pixels in the row of the detection unit 101 are divided into a plurality of groups (two in the example of FIG. 7). The drive wirings GR _{1 to} GR ₈ are supplied with a drive signal from the drive circuit unit 102a, and the drive lines GL _{1 to} GL ₈ are supplied with a drive signal from the drive circuit unit 102b.

Therefore, in the X-ray irradiation start detection operation and the accumulation operation, the drive wiring GR ₁ is controlled to turn on the switch elements T _{11 to} T ₁₄ , and the drive wiring GR ₈ is controlled to turn on the switch elements T _{81 to} T ₈₄ . . Further, the drive wiring GL ₃ is controlled to turn on the switch elements T _{35 to} T ₃₈ , and the drive wiring GL ₅ is controlled to turn on the switch elements T _{55 to} T ₅₈ . Thereby, the start and end of the X-ray pulse are detected. Therefore, as compared with the first embodiment, the positions of pixels that detect X-ray irradiation can be distributed and the detection rate of the start or end of X-ray irradiation can be increased.

(Third embodiment)
Next, a third embodiment of the present invention will be described with reference to FIGS. The third embodiment is different from the first and second embodiments in the configuration of the imaging device. Detailed description of the apparatus configuration and operation similar to those of the first and second embodiments is omitted.

  FIG. 9 is an equivalent circuit diagram illustrating an example of an imaging apparatus according to the third embodiment of the present invention. FIG. 10 is a timing chart showing an example of the imaging operation of the imaging apparatus according to the third embodiment of the present invention.

In the first and second embodiments, the signal wirings Sig _{1 to} Sig ₈ are all common in the column direction, but in the third embodiment, they are separated at the center of the detection unit 101. The signal wirings SigU _{1 to} SigU ₄ are connected to the readout circuit unit 103a, and the signal wirings SigU _{5 to} SigU ₈ are connected to the readout circuit unit 103b. The signal wirings SigD _{1 to} SigD ₄ are connected to the readout circuit unit 103c, and the signal wirings SigD _{5 to} SigD ₈ are connected to the readout circuit unit 103d.

Therefore, in the X-ray irradiation start detection operation and the accumulation operation, the drive wiring GR ₁ is controlled to turn on the switch elements T _{11 to} T ₁₄ , and the drive wiring GR ₈ is controlled to turn on the switch elements T _{81 to} T ₈₄ . . Further, the drive wiring GL ₃ is controlled to turn on the switch elements T _{35 to} T ₃₈ , and the drive wiring GL ₅ is controlled to turn on the switch elements T _{55 to} T ₅₈ . Thereby, the start or end of X-ray irradiation is detected.

  In the first and second embodiments, the signal charges at the time of X-ray monitoring for two rows are added to the integration capacitor Cf of the readout circuit unit 103. However, in this embodiment, the signal charges for two rows are added by the adder 503 in the control circuit unit 108, and then the presence or absence of the start or end of X-ray irradiation is determined by the comparison unit 501.

  In the case of moving image shooting, by dividing the signal wiring Sig at the center, the reading operation can be performed at a high speed and the frame rate can be increased. Therefore, the detection of X-ray irradiation in the X-ray irradiation start detection operation and the accumulation operation is performed by converting the signals after being read by the reading circuit units 103a to 103d into digital data by the A / D conversion units 104a to 104d and adding them. The X-ray pulse can be monitored by adding in the unit 503.

(Application examples)
Next, FIGS. 11A and 11B show an application example to a movable radiation imaging system using the present invention. FIG. 11A shows an application example of the present invention, and is a schematic configuration diagram of a radiation imaging system using a portable radiation imaging apparatus capable of fluoroscopic imaging and still image imaging. FIG. 11A shows an example in which the imaging apparatus 100 is detached from the C-type arm 601 and imaging is performed using the radiation generator 206 provided in the C-type arm 601. Here, the C-shaped arm 601 holds the radiation generator 206 and the imaging device 100.

  The display unit 602 is a display medium capable of displaying an image based on the image data obtained by the imaging apparatus 100, and the bed 603 is a table on which the subject 604 is placed. The cart 605 allows the radiation generator 206, the imaging device 100, and the C-type arm 601 to move, and the movable control device (control computer) 606 has a configuration capable of controlling them.

  The control device 606 can perform image processing on the image signal obtained by the imaging device 100 and transmit the image signal to the display unit 602 or the like. The image data generated by the image processing by the control device 606 can be transferred to a remote place by a transmission means such as a telephone line. Thereby, it can be displayed on a display in another place such as a doctor room or stored in a storage means such as an optical disk, and can be diagnosed by a remote doctor. Further, the transmitted image data can be recorded as a film by a film processor. Note that a part or all of the configuration of the control circuit unit 108 in the above-described embodiment of the present invention may be provided in the imaging device 100, or may be provided in the control device 606. For example, when the control circuit unit 108 is provided in the imaging device 100, the control device 606 may be configured to transmit a control signal to the control circuit unit 108.

  FIG. 11B is a schematic configuration diagram of a radiation imaging system using a portable radiation imaging apparatus capable of fluoroscopic imaging and still image imaging, showing an application example of the present invention. In FIG. 11B, the same components as those in FIG. 11A are denoted by the same reference numerals, and detailed description thereof is omitted.

  FIG. 11B illustrates an example in which the imaging apparatus 100 is detached from the C-type arm 601 and imaging is performed using a radiation generation apparatus 607 different from the radiation generation apparatus 206 provided in the C-type arm 601. As described above, when imaging is performed using another radiation generation apparatus 607, synchronization is performed by detecting the start or end of X-ray irradiation without communication between the radiation generation apparatus 607 and the imaging apparatus 100 via a cable or wirelessly. You can take pictures.

  The embodiment of the present invention can be realized by, for example, a computer executing a program. Also, means for supplying a program to a computer, for example, a computer-readable storage medium such as a CD-ROM recording such a program, or a transmission medium such as the Internet for transmitting such a program is also applied as an embodiment of the present invention. Can do. The above program can also be applied as an embodiment of the present invention. The above program, storage medium, transmission medium, and program are included in the scope of the present invention. In each embodiment of the present invention, the digital data processing unit 105 of the imaging apparatus 100 performs the correction process, but the present invention is not limited thereto. You may carry out with the image processing apparatus outside the imaging devices 100, such as the control apparatus 606. FIG. In addition, an invention that can be easily imagined from each embodiment of the present invention is also included in the scope of the present invention.

DESCRIPTION OF SYMBOLS 101 Detection part, 102 Drive circuit part, 103a, 103b Reading circuit part, 104a, 104b A / D conversion part, 105 Digital data processing part, 106 Signal processing part, 107 Power supply part, 108 Control circuit part, 201 Pixel, 202a, 202b amplifier circuit unit, 203a, 203b sample hold circuit unit, 204a, 204b multiplexer, 205a, 205b variable amplifier unit, 501 comparison unit, 502 timing generation unit

Claims (13)

A detecting unit, each of which converts a plurality of pixels including conversion elements and switch elements provided in a matrix, the radiation or light into an electric signal,
A drive moving the circuit part that controls the conduction state of the prior SL switching element,
A control unit that controls the drive circuit unit according to a signal obtained from the detection unit;
An imaging device comprising:
The control unit compares a signal obtained from the detection unit by the first operation with a threshold value by a first operation that causes the switch elements in a plurality of discontinuous rows to be in a conductive state simultaneously by the drive circuit unit. Based on the determination of the start or end of radiation or light irradiation, the driving circuit unit causes the switch element to be in a non-conductive state, and the plurality of pixels in the second operation. A third operation for causing the drive circuit unit to turn on the switch elements in a row unit so that an image based on the signal accumulated in the signal is acquired; and the detection unit that has performed the third operation A fourth operation for simultaneously bringing the switch elements of the plurality of discontinuous rows into a conductive state by the drive circuit unit, and radiation by the drive circuit unit with respect to the detection unit on which the fourth operation has been performed. Is for performing a subtraction process on the image based on a fifth operation that causes the switch element to be in a non-conducting state in the absence of light irradiation, and a signal accumulated in the plurality of pixels in the fifth operation. An image pickup apparatus that controls the drive circuit unit to perform a sixth operation of causing the drive circuit unit to conduct the switch element in a row unit so that an offset image is acquired. . The control unit includes a comparison unit that performs the determination, and a control circuit unit that controls the drive circuit unit based on the determination,
When the comparison unit determines that radiation or light irradiation has started, the control circuit unit maintains the conduction state of the switch elements in the discontinuous rows and other than the discontinuous rows. The image pickup apparatus according to claim 1, wherein the drive circuit unit is controlled so that the switch elements in a row are turned off. When the comparison unit determines that radiation or light irradiation has been completed, the control circuit unit controls the drive circuit unit so that the switch elements in the plurality of discontinuous rows are turned off. The imaging apparatus according to claim 2 . The switch element is formed of a transistor,
The imaging apparatus according to claim 1, wherein one electrode of the conversion element and a source electrode or a drain electrode of the transistor are electrically connected. A signal processing unit for generating a detection signal by adding or averaging signals output from the switching elements of the discontinuous rows;
5. The imaging apparatus according to claim 1, wherein a readout circuit unit included in the signal processing unit performs addition or averaging of the electrical signals output from the switch elements in a column direction. .   The imaging device according to claim 1, wherein a plurality of pixels in a row of the detection unit are divided into a plurality of groups.   The imaging device according to claim 1, wherein the pixels in the plurality of discontinuous rows are arranged in an outermost row of the detection unit.   The imaging device according to claim 1, wherein the drive circuit unit is capable of changing driving of the switch elements in the plurality of discontinuous rows.   The imaging device according to claim 8, wherein the driving circuit unit can change driving of the switch elements in the plurality of discontinuous rows in accordance with a user input.   The imaging device according to claim 8, wherein the driving circuit unit can change driving of the switch elements in the plurality of discontinuous rows according to a part of a subject to be photographed.   The correction unit that further performs defect correction on the pixels in the plurality of discontinuous rows with the pixels in a row adjacent to the plurality of discontinuous rows. The imaging device described. The imaging device according to any one of claims 1 to 11,
A control computer for transmitting a control signal to the control unit ;
An imaging system comprising: Each comprising a plurality of pixels in a matrix comprising a conversion element and a switch element, a detector for converting radiation or light into an electric signal, and drive the dynamic circuit unit that controls the conduction state of the prior SL switching element, A method for controlling an imaging apparatus having:
A first operation for simultaneously bringing the switch elements of a plurality of discontinuous rows into a conductive state by the drive circuit unit;
Based on the determination of the start or end of irradiation of radiation or light, which is performed by comparing the signal obtained from the detection unit by the first operation with a threshold value, the switch element is made non-conductive by the drive circuit unit A second operation to be
A third operation for causing the drive circuit unit to turn on the switch elements in a row unit so that an image based on signals accumulated in the plurality of pixels in the second operation is acquired;
A fourth operation for bringing the switch elements in the plurality of discontinuous rows into a conductive state simultaneously by the drive circuit unit after the third operation;
A fifth operation for causing the switch element to be in a non-conducting state without radiation or light irradiation by the drive circuit unit after the fourth operation;
The switch elements are placed in a conductive state in units of rows in the drive circuit unit so that an offset image for performing the subtraction process with the image is acquired based on signals accumulated in the plurality of pixels in the fifth operation. And a sixth operation that
A method for controlling an imaging apparatus, comprising:

Images