JP5831352B2 - Wire saw guide roller and its outer roller - Google Patents

Description

The present invention includes a guide roller for a wire guide that is provided rotatably in the wire saw, it relates to the outward row La.

  A wire saw is used as a means for cutting out a wafer from a semiconductor ingot. In this wire saw, a number of cutting wires are stretched in a line, and a large number of thin pieces are cut out simultaneously from one workpiece.

  The wire saw is provided with a guide roller having a large number of guide grooves for guiding the wire. The guide roller is composed of an inner roller and an outer roller mounted on the outer periphery of the inner roller. By dividing the outer roller in the circumferential direction, the outer roller remains mounted on the wire saw support device. Japanese Patent Application Laid-Open No. H10-228707 describes that only the above can be exchanged.

  FIG. 2 is an exploded perspective view of the wire saw guide roller described in Patent Document 1. The wire saw guide roller 1 is configured by attaching a pair of semi-cylindrical outer rollers 3 to the inner roller 2. The outer roller 3 is composed of a metal segment and a polyurethane resin layer 4 provided on the outer peripheral surface of the metal segment, and a wire saw guide groove 4 a is provided in the polyurethane resin layer 4.

  Patent Document 2 describes that a wire saw guide roller is made of carbon fiber reinforced synthetic resin (CFRP) and a polyurethane layer is provided on the outer peripheral surface thereof.

JP-A-9-216222 JP2011-665

  When a metal shell is used as the outer roller of the wire saw guide roller, the weight of the outer roller becomes large, and the replacement work is troublesome.

  The wire saw device does not move the wire saw only in one direction, but reciprocates to cut the ingot, and the wire saw roller rotates at different speeds alternately at high speed.

  A wire saw roller having a heavy shell on its surface has a large rotational inertia force, so that it takes time to reverse, and a large reverse driving force is applied at the time of reverse, and the power cost also increases. Further, if the inertia force of the wire saw guide roller is large, the wire saw is displaced and the silicon wafer cutting accuracy is lowered.

  Further, since the metal material has a large coefficient of thermal expansion, the outer roller is thermally expanded by frictional heat between the wire saw roller and the wire saw, and the roundness of the wire saw roller is lowered.

The present invention is lightweight, has a low thermal expansion and high strength, yet providing an outer roller that can be attached to contact form on the outer peripheral surface of the inner roller of the wire saw guide roller, a wire saw guide row La using the outer roller For the purpose.

The outer roller of the present invention is an outer roller attached to an inner roller of a wire saw guide roller, and is a semi-cylindrical fiber-reinforced thermosetting resin molded body obtained by halving a fiber-reinforced thermosetting resin cylinder. The reinforcing fiber of the molded body extends in the hoop direction and the helical direction, the central portion of the outer roller in the axial center direction is larger in diameter than the end portion in the axial center direction, (YX) / X is 0.0009 to 0.0030, where X is the maximum inner diameter at the end in the axial direction and X is the maximum inner diameter at the center in the axial direction. To do.

  The wire saw guide roller of the present invention uses this outer roller.

  As a result of various studies by the inventor, in the outer roller made of a half-cylindrical fiber reinforced resin molded body obtained by dividing the cylinder into two (half) in the direction including the cylinder axis, By making the center part slightly larger in diameter than the end part, the repulsive force of the fiber reinforced resin molding can be effectively used, and the adhesion degree of the wire saw roller to the inner roller can be improved. It has been found that the deviation is suppressed and the rotation accuracy is improved.

  This is because the outer roller made of the fiber-reinforced resin molded body of the present invention is not only lighter and has a lower coefficient of thermal expansion than metal, but also the difference in dimensional deformation over time at the center and end is suppressed. As a result, the fastening force to the inner roller can be made substantially uniform regardless of the portion, and it has been found that the degree of adhesion to the inner roller is made substantially uniform and improved as a whole. In addition, the outer roller is less distorted by heat generated with the use of the wire saw roller. In addition, since the inertial force during rotation of the wire saw roller is reduced, high-accuracy cutting is possible. Moreover, since this outer side roller is lightweight, replacement | exchange is also easy.

It is the side view and front view of the outer side roller which concern on embodiment. It is a disassembled perspective view of the conventional wire saw guide roller.

  Hereinafter, the embodiment of the present invention will be described in more detail with reference to FIG.

  The outer roller 5 according to the embodiment of FIG. 1 is made of fiber reinforced synthetic resin. The outer roller 5 has a semi-cylindrical shape in which a cylinder is divided in half. Similar to FIG. 2, a pair of outer rollers are attached to the outer peripheral surface of the inner roller.

  The outer roller 5 usually has an outer diameter (diameter in the X and Y directions in FIG. 1) of 100 to 500 mm, particularly about 160 to 400 mm. The wall thickness of the outer roller 5 (difference between the outer radius and the inner radius) is preferably about 5 to 40 mm, particularly about 10 to 30 mm. The axial length L of the outer roller 5 is usually 50 to 2000 mm, particularly about 300 to 1200 mm.

  When the maximum inner diameter at the center of the outer roller 5 in the axial center line direction is Y and the maximum inner diameter at both ends is X, (Y−X) / X is 0.0003 to 0.0030, particularly 0.0003 to It is 0.0025, and the central portion has a very large diameter.

  The central portion of the outer roller 5 is a range of 25% to 75% from one end in the axial direction excluding the range of 25% of the total length in the axial direction from both ends of the outer roller 5 in the axial direction. Represents. Further, the end portion of the outer roller 5 represents a range from the end edge of the outer roller 5 in the axial direction to 1% of the total length in the axial direction.

  The inner diameter of the outer roller includes the coordinates of measurement points set at seven or more equal intervals in the circumferential direction on the cross-section or end face of the semicircular outer roller, or a virtual circle that passes closest to them. Calculated and obtained as the diameter of this virtual circle.

The outer roller 5 is manufactured by halving a cylindrical molded body. This cylindrical shaped body has a substantially equal inner diameter from one end side to the other end side in the cylinder axis direction. Specifically, it preferably has a specific [Delta] D _{/ D max} of the difference [Delta] D and _{D max} of the maximum inner diameter _{D max} and the minimum inside diameter _{D min} is 0.002 or less, especially 0.0005 or less. When this half-cylindrical shaped body is divided in half, the bimetallic effect due to the difference in the residual stress during thermosetting of the thermosetting resin, that is, the difference in the linear expansion coefficient between the outside and inside of the shaped body due to the tensile stress of the fiber Thus, both ends of the halved cylindrical body in the axial center direction contract slightly in a direction to reduce the inner diameter X, and the central maximum inner diameter Y is slightly larger than the end maximum inner diameter X as described above. An outer roller is obtained.

  The cylindrical formed body is preferably manufactured by a filament winding method using a filament winding machine.

  In the filament winding method, roving (fiber) is impregnated with resin (thermosetting resin composition) as an adhesive and given a constant tension, while traversing the rotating mandrel (form) and winding it regularly. After being wound to a predetermined thickness, it is cured by heating. Thereafter, the mandrel is withdrawn to obtain a cylindrically formed form.

The following two types are used as the filament winding pattern.
(1) Helical winding: A fiber is wound around a mandrel so that the oblique angle with respect to the axial direction is about ± 5 ° to 85 °.
(2) Hoop winding: A fiber is wound around a mandrel in a direction of about 90 ° with respect to the axial direction.

When manufacturing a cylindrical shaped body by the filament winding method, a hoop winding layer is arranged on the inner peripheral side, and a helical winding layer is arranged at a position of 50 to 90%, particularly 70 to 90%, on the outer surface side in the entire thickness. It is preferable to do this. If an excessively large helical winding layer on the outer circumferential side is formed, not only the inner diameter (X) of both ends of the semi-cylindrical outer roller becomes larger than the inner diameter (Y) of the central portion, The overall average of the inner diameter becomes too large.
In the present invention, hoop winding may be mixed in a part of the helical layer in order to increase the fiber content in the fiber-reinforced resin molded body and improve the mechanical strength. In such a case, the hoop winding content in the helical layer is preferably 30% by volume or less, and more preferably 5% to 20%.
If a large number of hoop winding layers are arranged on the outer peripheral side, the expansion rate in the circumferential direction on the outer surface is excessively reduced, and the value of the inner diameter (X) of the end portion of the semi-cylindrical outer roller by the helical winding layer becomes too small (Y− In some cases, the value of X) / X may be greater than 0.0030, or an improper attachment to the inner roller may occur.

  When a cylindrical shaped body for producing the outer roller is formed by the filament winding method, (YX) / X is in the range of 0.0003 to 0.0030 depending on the fiber and the resin material. Thus, the ratio of the helical winding layer and the hoop winding layer is appropriately selected.

  Carbon fibers or glass fibers are suitable as the fibers in the fiber reinforced synthetic resin constituting the outer roller. As the carbon fiber, PAN-based carbon fiber is suitable. The average fiber diameter of the carbon fibers is preferably 5 to 20 μm, particularly 7 to 12 μm. Synthetic resins are typified by thermosetting resins such as epoxy resins, phenol resins, urethane resins, bismaleimides, polyether ether ketone resins, polyether imide resins, polyphenyl sulfone resins, polyamide resins, polycarbonate resins, and PMMA. A thermoplastic resin such as an acrylic resin is preferable, and an epoxy resin is particularly preferable. When carbon fiber is used as the fiber, the proportion of the carbon fiber in the carbon fiber reinforced synthetic resin is preferably about 40 to 85% by weight, particularly about 50 to 80% by weight, especially about 60 to 75% by weight. In the case of glass fiber, the proportion of glass fiber in the glass fiber reinforced resin is preferably about 40 to 90% by weight, particularly 50 to 85% by weight, particularly about 60 to 80% by weight.

  The elastic modulus (tensile elastic modulus, hereinafter the same) of the cylindrical formed body and the outer roller that halves it is preferably 5 to 50 GPa, more preferably 10 to 40 GPa. When the elastic modulus is smaller than 5 GPa, the rigidity when the outer roller is mounted on the inner roller is not sufficient, and the outer roller deforms due to expansion and contraction of urethane applied to the outermost layer, and the roundness is increased. The cylindricity may be insufficient. In addition, when the elastic modulus is larger than 50 GPa, when the outer roller is attached to the inner roller, deformation due to tightening torque is less likely to occur in a fastener such as a bolt, and the outer roller is less likely to be in close contact with the inner roller.

  When the outer diameter of the inner roller is small, the load (generated stress) on the fastening portion tends to be larger due to the smaller radius of curvature. In this case, it is preferable that the value of (Y−X) / X in the previous range is higher.

The thermal expansion coefficient of the outer roller is preferably −1.5 × 10 ⁻⁶ to + 4.0 × 10 ⁻⁶ / ° C. A fiber-reinforced synthetic resin molded product having a thermal expansion coefficient of −1.5 × 10 ⁻⁶ / ° C. or less has a high carbon fiber content and a low strength of the molded product. If the coefficient of thermal expansion is greater than 4.0 × 10 ⁻⁶ / ° C., when used as a wire saw roller, the roller may expand due to heat generated when the ingot is cut, and cutting accuracy may be reduced.

  A polyurethane resin layer is formed on the outer peripheral surface of the outer roller by a casting method or the like, and a wire saw groove (wire groove) is formed in the polyurethane resin layer by cutting in the circumferential direction (half circumferential direction) as shown in FIG. . The pitch of the wire grooves is set according to the thickness of the sliced wafer or the like. The cross-sectional shape of the wire groove is preferably a V shape. In addition to polyurethane, high-density polyethylene, low-density polyethylene, polytetrafluoroethylene, polyacetal, polycarbonate, polystyrene, polypropylene, and the like can also be used, and polyurethane or high-density polyethylene, particularly polyurethane, is particularly preferable.

  The outer roller 5 is attached to the inner roller via a sleeve by a fixing member such as a bolt, a nut and a screw, particularly preferably a bolt. The bolts are spaced apart from the outer peripheral edge of the outer roller 5, and also at appropriate intervals in the non-peripheral part (near the middle in the circumferential direction and near the middle in the axial direction). Provided.

  The outer roller 5 has a central portion in the axial direction that is slightly larger in diameter than both ends, and the difference in dimensional deformation with time at the central portion and the end portion is suppressed. The fastening force to can be made substantially uniform regardless of the part. Therefore, when the central portion in the axial center direction including the center portion is also pressed against the inner roller by the bolt, both ends of the axial center direction are also pressed against the inner roller by the bolt with the same force. The entire surface is pressed against the inner roller in close contact.

  Hereinafter, the present invention will be described more specifically with reference to examples and comparative examples. However, the present invention is not limited to the following examples unless it exceeds the gist. The materials, conditions, and the like used are examples for explanation, and can be changed as appropriate according to product specifications.

  The evaluation methods and measurement methods employed in the following examples and comparative examples are as follows.

<Carbon fiber content>
The carbon fiber content (Vf) was calculated from the true specific gravity and bulk specific gravity of the fiber reinforced synthetic resin molding. The true specific gravity was determined from the result of cutting a fiber reinforced synthetic resin molded product into 5 cm square pieces, pulverizing them with a mill, and measuring them with a gas displacement method (JIS R1620). The bulk specific gravity was determined from the result of measuring the density in water by the Archimedes method in JIS Z8807. From these results, the carbon fiber content (Vf) was calculated by the following formula. The glass fiber content was calculated in the same manner.
Volume content (Vf) = (C + D × (F-1)) / (ED)
A: Density of water at the water temperature at the time of measurement (g / cm ³ )
B: True specific gravity (g / cm ³ )
C: Bulk specific gravity (g / cm ³ )
D: Density of epoxy resin (g / cm ³ )
E: Density of carbon fiber (g / cm ³ )
F: Void ratio (%) = (B−A) / B × 100

<Coefficient of thermal expansion>
The thermal expansion coefficient was measured in accordance with JIS K7197 by using a DL 1500 manufactured by ULVAC and cutting a test piece into a size of 100 mm in height, 20 mm in width, and 20 mm in length from the fiber reinforced synthetic resin molded body.

<Elastic modulus>
The elastic modulus was a calculated value calculated by “The Laminator Version 3.7” which is a physical property simulation software in the configuration of each molded body.

<Inner and outer diameter measurement>
A three-dimensional measuring instrument (Xyzax JD800D manufactured by Tokyo Seimitsu Co., Ltd.) was used for measuring the inner and outer diameters of the outer roller.

<Vibration measurement>
The outer roller was fixed to the inner roller, and rotation blur and abnormal noise were observed when the roll was rotated at an average wire feed speed of 700 m / min.

[Example 1]
Using a filament winding device, PAN-based carbon fiber (“Pyrofil TR50-12L” manufactured by Mitsubishi Rayon Co., Ltd., tensile elastic modulus 230 GPa) is sent from the bobbin of the creel cart, and impregnated with resin by impregnating liquid epoxy resin with a resin bath. A mandrel having a surface length of 1800 mm and a diameter of 300 mm was wound while applying tension.

  The stacking angle of the carbon fibers was set such that the axial direction of the mandrel was 0 °, the 90 ° layer as the hoop layer was 15%, and the ± 30 ° layer as the helical layer was 85%. The hoop layer was the inner layer side and the helical layer was the outer layer side. This angle indicates a set value in the filament winding apparatus. The total winding thickness was 22 mm.

Next, after curing the epoxy resin at 150 ° C. for 6 hours in a curing furnace, the mandrel was decentered to produce a cylindrical carbon fiber reinforced resin molded body (CFRP). The carbon fiber content (Vf) of this CFRP was 65% by volume. The thermal expansion coefficient of this CFRP in the cylindrical axis direction was −0.4 × 10 ⁻⁶ / ° C., and the elastic modulus in the circumferential direction was 20.7 GPa.

  A split molded body was formed by performing end cutting and half cutting of the above-described cylindrical formed body using a cutting machine. A semi-cylindrical outer roller for a wire saw roller having a length of 500 mm was produced by polishing the outer surface of the divided molded body to perform outer diameter adjustment processing, drilling, attaching a sleeve, and the like. The weight of the outer roller was 7.6 kg per piece.

  A total of 7 points in each piece so that the inner and outer diameters of the outer roller are equally spaced in the circumferential direction at each of 5 mm, 125 mm, 250 mm, 375 mm, and 495 mm from one end using a three-dimensional measuring machine. And calculated by forming a virtual circle from each coordinate. Table 1 shows the results of the inner diameter measurement. From the data of Table 1, the central portion maximum diameter (Y) of this outer roller was 299.88 mm, and the end maximum diameter (X) was 299.61 mm. (Y-X) /X=0.27/299.61=0.00090, which was found to be greater than 0.0003.

  After forming a polyurethane resin layer having a thickness of 7.5 mm on the outer periphery of the outer roller by a casting method, outer periphery processing and groove processing (pitch 1.0 mm, groove width 0.1 mm) were performed. Next, through a sleeve portion, it was fixed with a bolt to a metal inner roller having a diameter of 300 mm to produce a wire saw roller. With this wire saw roller, no rotational shake or abnormal noise was observed even when the wire feed speed was rotated at 700 m / min.

  Since the outer roller has an appropriate elastic modulus, it can be easily attached to the inner roller and fixed with a bolt. The maximum difference in outer diameter before fixing the outer roller (difference between the maximum outer diameter at the center and the maximum outer diameter at the end) is 0.25 mm, whereas the maximum difference in outer diameter after fixing is less than 0.1 mm. Met. As described above, since no gap is formed between the outer roller and the inner roller, the wafer cutting accuracy is improved.

[Comparative Example 1]
Using a filament winding device, a PAN-based carbon fiber ("Pyrofil TR50-12L" manufactured by Mitsubishi Rayon Co., Ltd.) is sent out from the bobbin of the creel cart, and the resin is impregnated by impregnating a liquid epoxy resin with a resin bath. The carbon fiber was wound while applying tension to a mandrel having a surface length of 1800 mm and a diameter of 304 mm.The carbon fiber is 60% of the 90 ° layer (inner circumferential layer) that is the hoop layer, and the ± 30 ° layer (outer circumference) of the helical layer. Layer) was 40%, and the winding thickness was 22 mm.

Next, after curing the epoxy resin at 150 ° C. for 6 hours in a curing furnace, the mandrel was decentered to produce a cylindrical body made of CFRP. The carbon fiber content (Vf) of this CFRP cylinder was 66%. The thermal expansion coefficient in the axial direction of this CFRP cylindrical body was 4.4 × 10 ⁻⁶ / ° C., and the elastic modulus in the circumferential direction was 35 GPa.

  The above-mentioned cylindrical body is cut into an end portion and a half cut by using a cutting machine to form a semi-cylindrical molded body, and this semi-cylindrical molded body is further subjected to outer diameter adjustment processing, hole processing, sleeve mounting, and the like. Thus, an outer roller having a length of 500 mm in the axial direction was produced. The weight of the outer roller was 7.6 kg per piece.

  When the inner and outer diameters of the outer roller were measured in the same manner as in Example 1, the central maximum diameter (Y) was 300.70 mm, and the end maximum diameter (X) was 299.48 mm. The value of (Y−X) / X was 0.00409, which was larger than 0.0030.

After forming a polyurethane resin layer having a thickness of 7.5 mm on the outer periphery of the outer roller, outer periphery processing and groove processing were performed. Next, the roller was fixed to the metal inner roller with a bolt through the sleeve portion to produce a wire saw roller. The wire saw roller in which a gap was generated between the inner roller and the outer roller produced wire runout and abnormal noise when the wire feed speed was rotated at 700 m / min.

[Comparative Example 2]
Using a filament winding device, a PAN-based carbon fiber ("Pyrofil TR50-12L" made by Mitsubishi Rayon Co., Ltd., tensile elastic modulus 230 GPa) is sent from the bobbin of the creel cart, and the resin is impregnated with a liquid epoxy resin by a resin bath. It was impregnated and wound around a mandrel having a surface length of 1800 mm and a diameter of 304 mm while applying tension. The carbon fiber had a 90% layer as a hoop layer on the outer peripheral side at 35% and a ± 30 ° layer as a helical layer on the inner peripheral side at a ratio of 65%. The total winding thickness was 22 mm.

Next, after curing the epoxy resin at 150 ° C. for 6 hours in a curing furnace, the mandrel was decentered to produce a cylindrical body made of CFRP. The carbon fiber content (Vf) of this CFRP cylinder was 65%. The thermal expansion coefficient in the axial direction of the CFRP is 1.8 × 10 ⁻⁶ / ° C., and the elastic modulus in the circumferential direction is 73 GPa.

  The above-mentioned cylindrical body is cut into a half-cylindrical shape by performing end cutting and half-cutting using a cutting machine, and this semi-cylindrical shaped body is further subjected to outer diameter adjustment processing, hole processing, sleeve mounting, etc. As a result, an outer roller for a wire saw roller having a length of 500 mm was produced. The weight of this outer roller was 7.7 kg per piece.

  When the inner diameter and outer diameter of the outer roller were measured in the same manner as in Example 1, the central portion maximum diameter (Y) of this outer roller was 299.54 mm, and the end maximum diameter (X) was 299.67 mm. Met. Since the value of (Y-X) / X was -0.00043, which was smaller than 0.0003, it was difficult to fix the bolts when attached to a φ300 mm metal inner roller.

  After forming a polyurethane resin layer having a thickness of 7.5 mm on the outer periphery of the outer roller, outer periphery processing and groove processing were performed. Next, the roller was fixed to the metal inner roller with a bolt through the sleeve portion to produce a wire saw roller. The wire saw roller in which a gap was generated between the inner roller and the outer roller produced wire runout and abnormal noise when the wire feed speed was rotated at 700 m / min.

  The outer roller had a maximum difference in outer diameter of 0.19 mm before fixing, whereas the maximum difference in outer diameter after fixing was 0.1 mm or more.

[Example 2]
Filament winding molding was performed under the same conditions as in Example 1 except that glass fiber (“T30ER1150FW35RW” tensile elastic modulus 70 GPa manufactured by Owens Corning Japan) was used instead of carbon fiber.

Next, after the epoxy resin was cured at 150 ° C. for 6 hours in a curing furnace, the mandrel was decentered to produce a cylindrical body made of GFRP (glass fiber reinforced synthetic resin). The glass fiber content (Vf) of this GFRP cylinder was 68% by volume. The thermal expansion coefficient in the cylinder axis direction of this GFRP cylinder was 8.5 × 10 ⁻⁶ / ° C., and the elastic modulus in the circumferential direction was 11.5 GPa.

  By performing end cutting and half cutting using a cutting machine, the above cylindrical body is formed into a semi-cylindrical formed body, and by further performing outer diameter adjustment processing, hole processing, sleeve mounting, etc. An outer roller for a wire saw roller having a length of 500 mm was produced. The weight of this outer roller was 8.5 kg per piece.

  When the inner and outer diameters of the outer roller were measured in the same manner as in Example 1, the central maximum diameter (Y) was 299.88 mm and the end maximum diameter (X) was 299.58 mm. The value of (Y−X) / X was 0.0010, which was larger than 0.0003.

  After forming a polyurethane resin layer having a thickness of 7.5 mm on the outer periphery of the outer roller, outer periphery processing and groove processing were performed. Next, the roller was fixed to the metal inner roller with a bolt through the sleeve portion to produce a wire saw roller. The wire saw roller had good adhesion to the inner roller, and no gap was formed between the outer roller and the inner roller. When this wire saw roller was rotated at a wire feed speed of 700 m / min, no rotational shake or abnormal noise was observed.

  The outer roller had an appropriate elastic modulus, and was easily attached to the inner roller and bolted. The maximum difference in outer diameter before fixing the outer roller was 0.27 mm, whereas the maximum difference in outer diameter after fixing was less than 0.1 mm. Since no gap is formed between the inner roller and the outer roller, the wafer cutting accuracy is also improved.

[Example 3]
Using a filament winding device, a PAN-based carbon fiber ("Pyrofil TR50-12L" made by Mitsubishi Rayon Co., Ltd., tensile elastic modulus 230 GPa) is sent from the bobbin of the creel cart, and the resin is impregnated with a liquid epoxy resin by a resin bath. It was impregnated and wound around a mandrel having a surface length of 1800 mm and a diameter of 300 mm while applying tension. For the carbon fiber, a 30 ° layer which is a helical layer on the outer peripheral side is 70%, and a ± 30 ° layer which is a hoop layer is 30% on the inner peripheral side. The total winding thickness was 22 mm.

Next, after the epoxy resin was cured at 150 ° C. for 6 hours in a curing furnace, the mandrel was decentered to produce a cylindrical body made of CFRP. The CFRP cylindrical body had a carbon fiber content (Vf) of 67%. The CFRP cylindrical body had a thermal expansion coefficient of 1.8 × 10 ⁻⁶ / ° C. in the cylindrical axis direction, and an elastic modulus in the circumferential direction of 38.0 GPa.

  By performing end cutting and half cutting using a cutting machine, the above cylindrical body is formed into a semi-cylindrical formed body, and by further performing outer diameter adjustment processing, hole processing, sleeve mounting, etc. An outer roller for a wire saw roller having a length of 500 mm was produced. The weight of the outer roller was 7.6 kg per piece.

  When the inner and outer diameters of the outer roller were measured in the same manner as in Example 1, the central maximum diameter (Y) was mm and the end maximum diameter (X) was mm. The value of (Y−X) / X was 0.0020, which was larger than 0.0003.

  After forming a polyurethane resin layer having a thickness of 7.5 mm on the outer periphery of the outer roller, outer periphery processing and groove processing were performed. Next, the roller was fixed to the metal inner roller with a bolt through the sleeve portion to produce a wire saw roller. The wire saw roller had good adhesion to the inner roller, and no gap was formed between the outer roller and the inner roller. When this wire saw roller was rotated at a wire feed speed of 700 m / min, no rotational shake or abnormal noise was observed.

1 Wire saw guide roller 2 Inner roller 3, 5 Outer roller

Claims (6)

In the outer roller attached to the inner roller of the wire saw guide roller,
It consists of a semi-cylindrical fiber-reinforced thermosetting resin molded product obtained by halving a cylindrical body made of fiber-reinforced thermosetting resin,
The reinforcing fiber of the molded body extends in the hoop direction and the helical direction,
The central portion of the outer roller in the axial direction is larger in diameter than the end portion in the axial direction,
(YX) / X is 0.0009 to 0.0030, where X is the maximum inner diameter at the end in the axial direction and Y is the maximum inner diameter at the center in the axial direction. Outer roller of the wire saw guide roller.   The outer roller of the wire saw guide roller according to claim 1, wherein an elastic modulus in a circumferential direction of the outer roller is 5 to 50 GPa. The outer roller of the wire saw guide roller according to claim 1 or 2, wherein the outer roller has a coefficient of thermal expansion in the axial direction of -1.5 x 10 ^-6 to +4.0 x 10 ^-6 / ° C. .   The outer roller of the wire saw guide roller according to any one of claims 1 to 3, wherein the reinforcing fiber extends in a helical direction on an inner peripheral side and extends in a hoop direction on an outer peripheral side. .   4. A wire saw guide roller comprising an inner roller rotatably supported and a pair of semi-cylindrical outer rollers fixed on the outer peripheral surface of the inner roller, wherein the outer roller is of claim 1 to 3. A wire saw guide roller, which is the outer roller according to any one of the preceding claims. In claim 5, the outer roller is fixed to the inner roller by a fixing member,
The wire saw guide roller, wherein the fixing member is disposed at each of a central portion and both end portions in the axial direction of the outer roller.

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