JP5486141B2 - 光開始反応 - Google Patents
光開始反応 Download PDFInfo
- Publication number
- JP5486141B2 JP5486141B2 JP2002518321A JP2002518321A JP5486141B2 JP 5486141 B2 JP5486141 B2 JP 5486141B2 JP 2002518321 A JP2002518321 A JP 2002518321A JP 2002518321 A JP2002518321 A JP 2002518321A JP 5486141 B2 JP5486141 B2 JP 5486141B2
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- JP
- Japan
- Prior art keywords
- photoinitiator
- inhibited
- methylene
- substrate
- dioxolane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 57
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 239000000203 mixture Substances 0.000 claims abstract description 17
- 230000005855 radiation Effects 0.000 claims abstract description 16
- 239000000126 substance Substances 0.000 claims abstract description 10
- 238000009826 distribution Methods 0.000 claims abstract description 4
- 230000003213 activating effect Effects 0.000 claims abstract description 3
- -1 4-methylphenylthio Chemical group 0.000 claims description 29
- 239000003999 initiator Substances 0.000 claims description 28
- 150000002576 ketones Chemical class 0.000 claims description 10
- 150000001875 compounds Chemical class 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 6
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 4
- 239000003377 acid catalyst Substances 0.000 claims description 4
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 claims description 4
- YIKSHDNOAYSSPX-UHFFFAOYSA-N 1-propan-2-ylthioxanthen-9-one Chemical compound S1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C(C)C YIKSHDNOAYSSPX-UHFFFAOYSA-N 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- 229930006711 bornane-2,3-dione Natural products 0.000 claims description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 3
- VNQXSTWCDUXYEZ-UHFFFAOYSA-N 1,7,7-trimethylbicyclo[2.2.1]heptane-2,3-dione Chemical compound C1CC2(C)C(=O)C(=O)C1C2(C)C VNQXSTWCDUXYEZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 claims description 2
- KKGJWZWLSWPADQ-UHFFFAOYSA-N 3-benzylsulfonyl-1-(2-hydroxyphenyl)-2-phenylpropan-1-one Chemical compound OC1=CC=CC=C1C(=O)C(C=1C=CC=CC=1)CS(=O)(=O)CC1=CC=CC=C1 KKGJWZWLSWPADQ-UHFFFAOYSA-N 0.000 claims description 2
- XKTYXVDYIKIYJP-UHFFFAOYSA-N 3h-dioxole Chemical compound C1OOC=C1 XKTYXVDYIKIYJP-UHFFFAOYSA-N 0.000 claims description 2
- PFHLXMMCWCWAMA-UHFFFAOYSA-N [4-(4-diphenylsulfoniophenyl)sulfanylphenyl]-diphenylsulfanium Chemical compound C=1C=C([S+](C=2C=CC=CC=2)C=2C=CC=CC=2)C=CC=1SC(C=C1)=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 PFHLXMMCWCWAMA-UHFFFAOYSA-N 0.000 claims description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical group C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 claims description 2
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 claims description 2
- 125000002524 organometallic group Chemical group 0.000 claims description 2
- 239000002243 precursor Substances 0.000 claims 14
- VHMYBWIOLGKSHO-UHFFFAOYSA-N 2-methylidene-1,3-dioxolane Chemical group C=C1OCCO1 VHMYBWIOLGKSHO-UHFFFAOYSA-N 0.000 claims 13
- 239000012952 cationic photoinitiator Substances 0.000 claims 3
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 claims 2
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 claims 1
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 claims 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 claims 1
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 claims 1
- RIWRBSMFKVOJMN-UHFFFAOYSA-N 2-methyl-1-phenylpropan-2-ol Chemical compound CC(C)(O)CC1=CC=CC=C1 RIWRBSMFKVOJMN-UHFFFAOYSA-N 0.000 claims 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical group S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims 1
- MGFYSGNNHQQTJW-UHFFFAOYSA-N iodonium Chemical group [IH2+] MGFYSGNNHQQTJW-UHFFFAOYSA-N 0.000 claims 1
- LYXOWKPVTCPORE-UHFFFAOYSA-N phenyl-(4-phenylphenyl)methanone Chemical compound C=1C=C(C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 LYXOWKPVTCPORE-UHFFFAOYSA-N 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 9
- 238000004132 cross linking Methods 0.000 abstract description 3
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 125000002091 cationic group Chemical group 0.000 description 14
- 239000011347 resin Substances 0.000 description 14
- 229920005989 resin Polymers 0.000 description 14
- WNXJIVFYUVYPPR-UHFFFAOYSA-N 1,3-dioxolane Chemical compound C1COCO1 WNXJIVFYUVYPPR-UHFFFAOYSA-N 0.000 description 13
- 229910052709 silver Inorganic materials 0.000 description 11
- 239000004332 silver Substances 0.000 description 11
- 238000003384 imaging method Methods 0.000 description 10
- 150000003254 radicals Chemical class 0.000 description 9
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 8
- 238000006862 quantum yield reaction Methods 0.000 description 8
- KKBHSBATGOQADJ-UHFFFAOYSA-N 2-ethenyl-1,3-dioxolane Chemical compound C=CC1OCCO1 KKBHSBATGOQADJ-UHFFFAOYSA-N 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 239000002253 acid Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000009472 formulation Methods 0.000 description 6
- 238000006116 polymerization reaction Methods 0.000 description 6
- 239000011541 reaction mixture Substances 0.000 description 6
- 238000003848 UV Light-Curing Methods 0.000 description 5
- 238000013459 approach Methods 0.000 description 5
- 239000000178 monomer Substances 0.000 description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 4
- 238000003776 cleavage reaction Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical group I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 4
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 4
- 235000019341 magnesium sulphate Nutrition 0.000 description 4
- KJIFKLIQANRMOU-UHFFFAOYSA-N oxidanium;4-methylbenzenesulfonate Chemical compound O.CC1=CC=C(S(O)(=O)=O)C=C1 KJIFKLIQANRMOU-UHFFFAOYSA-N 0.000 description 4
- 238000010992 reflux Methods 0.000 description 4
- 230000007017 scission Effects 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 3
- 239000000839 emulsion Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000006552 photochemical reaction Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 3
- SSZWWUDQMAHNAQ-UHFFFAOYSA-N 3-chloropropane-1,2-diol Chemical compound OCC(O)CCl SSZWWUDQMAHNAQ-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 2
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000005844 autocatalytic reaction Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 238000010538 cationic polymerization reaction Methods 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- ZONYXWQDUYMKFB-UHFFFAOYSA-N flavanone Chemical compound O1C2=CC=CC=C2C(=O)CC1C1=CC=CC=C1 ZONYXWQDUYMKFB-UHFFFAOYSA-N 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000012044 organic layer Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- LPNYRYFBWFDTMA-UHFFFAOYSA-N potassium tert-butoxide Chemical compound [K+].CC(C)(C)[O-] LPNYRYFBWFDTMA-UHFFFAOYSA-N 0.000 description 2
- 238000007152 ring opening metathesis polymerisation reaction Methods 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- ICYIEJOFSVBVOR-UHFFFAOYSA-N 2,2-bis(ethenyl)-1,3-dioxolane Chemical class C=CC1(C=C)OCCO1 ICYIEJOFSVBVOR-UHFFFAOYSA-N 0.000 description 1
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
- LBLYYCQCTBFVLH-UHFFFAOYSA-N 2-Methylbenzenesulfonic acid Chemical compound CC1=CC=CC=C1S(O)(=O)=O LBLYYCQCTBFVLH-UHFFFAOYSA-N 0.000 description 1
- XMLYCEVDHLAQEL-UHFFFAOYSA-N 2-hydroxy-2-methyl-1-phenylpropan-1-one Chemical compound CC(C)(O)C(=O)C1=CC=CC=C1 XMLYCEVDHLAQEL-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- OAZWDJGLIYNYMU-UHFFFAOYSA-N Leucocrystal Violet Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 OAZWDJGLIYNYMU-UHFFFAOYSA-N 0.000 description 1
- 206010034960 Photophobia Diseases 0.000 description 1
- 206010070834 Sensitisation Diseases 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- DBHQYYNDKZDVTN-UHFFFAOYSA-N [4-(4-methylphenyl)sulfanylphenyl]-phenylmethanone Chemical compound C1=CC(C)=CC=C1SC1=CC=C(C(=O)C=2C=CC=CC=2)C=C1 DBHQYYNDKZDVTN-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 150000001728 carbonyl compounds Chemical class 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 208000013469 light sensitivity Diseases 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012669 liquid formulation Substances 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000002921 oxetanes Chemical class 0.000 description 1
- 230000000886 photobiology Effects 0.000 description 1
- 238000001782 photodegradation Methods 0.000 description 1
- 238000006303 photolysis reaction Methods 0.000 description 1
- 230000015843 photosynthesis, light reaction Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920001470 polyketone Polymers 0.000 description 1
- 239000002685 polymerization catalyst Substances 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 238000007348 radical reaction Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007142 ring opening reaction Methods 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical group [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 239000003930 superacid Substances 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Polymerisation Methods In General (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Description
ビニルジオキソラン構造はケトン光開始剤である出発物質から製造できるが、該構造を製造するために他の方法も利用可能である。
場合によりモノ又はポリ−[4−(フェニルチオジフェニル)]スルホニウム・ヘキサフルオロホスフェート又はヘキサフルオロアンチモネート と組み合わされる、ビス[4−(ジフェニルスルホニオ)−フェニル]スルフィド・ビス−ヘキサフルオロホスフェート又はヘキサフルオロアンチモネート、
ビス[4−(ジ(4−(2−ヒドロキシエチル)フェニル)スルホニオ−フェニル]スルフィド・ビスヘキサフルオロホスフェート
ビス[4−(ジ(4−(2−ヒドロキシエチル)フェニル)スルホニオ−フェニル]スルフィド・ビスヘキサフルオロアンチモネート、
(η5−2,4−シクロペンタジエニル)[(1,2,3,4,5,6−η)−メチルエチル−ベンゼン]−鉄(II)・ヘキサフルオロホスフェート、
4−イソプロピル−4−メチルジフェニルヨードニウム又はジフェニルヨードニウム・ヘキサフルオロホスフェート、
テトラ−(ペンタフルオロフェニル)ボラート、又は
2’−ヒドロキシ−2−フェニル−3−トルエンスルホニル−プロピオフェノン;
幅広い処方が可能である。一般に、カチオン性の酸生成光開始剤について、その量は作用する物質の0.25から3重量%の範囲にある。潜在的開始剤については、実際に作業がされる範囲は作用する物質の3から10重量%である。
同様に、フレクソ印刷板及び他の画像印刷系の製造においても適用がみられる。
1 一次及び二次画像化(PCB産業)
2 可視光開始剤のUVにより開始される高感度化
3 可視光に活性な処方物を取り扱い容易にすること
4 厚い膜の硬化の制御
5 UV硬化処方物の貯蔵寿命の改善
以下の実施例は、本発明の方法で使用できるジオキソランの調製を説明する。
2−フェニル−2’−[4−(4−メチルフェニルチオ)フェニル]−4−メチレン−1,3−ジオキソラン
Dean-Stark装置/凝縮器を備えた500mlの丸底フラスコからなる装置に、以下の物質を加えた:25.37 gの[4−(4−メチルフェニルチオ)フェニル]フェニルケトン、9.21 gの(±)−3−クロロ−1,2−プロパンジオール、0.25 gのp−トルエンスルホン酸1水和物、及び200 mLのトルエン。反応が完了するまで(水が回収されるまで)、得られた反応混合物を加熱して大気圧で還流した。
<実施例2>
カンホルキノンのジ−ビニルジオキソラン誘導体の合成
2−フェニル−2’−[4−(4−メチルフェニルチオ)フェニル]−4−メチレン−1,3−ジオキソラン
Dean-Stark装置/凝縮器を備えた500mlの丸底フラスコからなる装置に、以下の物質を加えた:37.4 gのカンホルキノン、50 gの(±)−3−クロロ−1,2−プロパンジオール、0.2 gのp−トルエンスルホン酸1水和物、及び300 mLのベンゼン。反応が完了するまで(水が回収されるまで)、得られた反応混合物を加熱して大気圧で還流した。
Claims (15)
- 重合及び/又は架橋可能な組成物と色が変化する物質とから選択される反応性基材を支持体に塗布し;メチレン−1,3−ジオキソラン環を含有し活性化されるとケトンを生成する潜在的光開始剤であって、反応性基材とともに塗布された該開始剤を活性化し;生成したケトン光開始剤を有する該反応性基材を、化学線によって該組成物が重合及び/又は架橋する、あるいは色が変化する光反応条件に露出する;工程を含む、光開始反応を行う方法であって、
該方法の少なくとも一つの段階で化学線に露出する結果として、基材がその構成において局所的に修飾され、生成した重合及び/又は架橋組成物、あるいは色の変化する物質が該支持体上での分布において基材の修飾された位置に対応する、
上記の方法。
- 潜在的光開始剤が、ジフェニルケトンの阻害されたメチレン−1,3−ジオキソラン前駆体、2,2−ジメトキシ−2−フェニル−アセトフェノンの阻害されたメチレン−1,3−ジオキソラン前駆体、ジエトキシアセトフェノンの阻害されたメチレン−1,3−ジオキソラン前駆体、1−ヒドロキシ−シクロヘキシル−フェニルケトンの阻害されたメチレン−1,3−ジオキソラン前駆体、2−ヒドロキシ−2−メチル−1−フェニル−プロパン−1−オンの阻害されたメチレン−1,3−ジオキソラン前駆体、2−メチル−1−[4−(メチルチオ)フェニル]−2−モロフォリノプロパン−1−オンの阻害されたメチレン−1,3−ジオキソラン前駆体、2−ベンジル−2−N,N−ジメチルアミノ−1−(4−モルフォリノフェニル)−1−ブタノンの阻害されたメチレン−1,3−ジオキソラン前駆体、イソプロピルチオキサントンの阻害されたメチレン−1,3−ジオキソラン前駆体、カンホルキノンの阻害されたメチレン−1,3−ジオキソラン前駆体、[4−(4−メチルフェニルチオ)フェニル]−フェニルケトンの阻害されたメチレン−1,3−ジオキソラン前駆体、4−フェニルベンゾフェノンの阻害されたメチレン−1,3−ジオキソラン前駆体、2−エチルアントラキノンの阻害されたメチレン−1,3−ジオキソラン前駆体、又はジヨードブトキシフルオロンの阻害されたメチレン−1,3−ジオキソラン前駆体である請求項1の方法。
- 潜在的光開始剤が基材の3〜10%の量で使用される請求項1又は2の方法。
- 組成物が重合及び/又は架橋しない様な条件で光開始剤を活性化した後、フォトマスクを用いて像に合わせて化学線に基材を露出することにより、重合及び/又は架橋された組成物がその分布をとる請求項1乃至3の何れかに記載の方法。
- 潜在的光開始剤が保護された光開始剤であり、予備的な光反応条件でおきる光反応において脱保護される、請求項1乃至4の何れかに記載の方法。
- 予備的な光反応条件に、潜在的光開始剤を脱阻害するための酸触媒を生成するカチオン性光開始剤の存在が含まれる請求項5の方法。
- 予備的な条件のセットに、ヨードニウム若しくはスルホニウム塩、有機金属化合物の塩の形態、又はα−スルホニルオキシケトンの存在が含まれる請求項6の方法。
- カチオン性光開始剤が:
モノ又はポリ−[4−(フェニルチオジフェニル)]スルホニウム・ヘキサフルオロホスフェート又はヘキサフルオロアンチモネート と組み合わされる、ビス[4−(ジフェニルスルホニオ)−フェニル]スルフィド・ビス−ヘキサフルオロホスフェート又はヘキサフルオロアンチモネート、
ビス[4−(ジ(4−(2−ヒドロキシエチル)フェニル)スルホニオ−フェニル]スルフィド・ビスヘキサフルオロホスフェート
ビス[4−(ジ(4−(2−ヒドロキシエチル)フェニル)スルホニオ−フェニル]スルフィド・ビスヘキサフルオロアンチモネート、
(η5−2,4−シクロペンタジエニル)[(1,2,3,4,5,6−η)−(メチルエチル)−ベンゼン]−鉄(II)・ヘキサフルオロホスフェート、
4−イソプロピル−4−メチルジフェニルヨードニウム又はジフェニルヨードニウム・ヘキサフルオロホスフェート、
テトラ−(ペンタフルオロフェニル)ボラート、又は
2’−ヒドロキシ−2−フェニル−3−トルエンスルホニル−プロピオフェノン;
から選択される、請求項7の方法。
- カチオン性光開始剤が基材の0.25〜3重量%の量で使用される請求項6乃至8の何れかの方法。
- それぞれの光反応条件に2つの異なる波長での化学線の印加が含まれる請求項5乃至9の何れかの方法。
- 化学線がUVである請求項1乃至10の何れかの方法。
- 潜在的光開始剤が保護された光開始剤であり、予備的な条件で熱的に脱保護される、請求項1乃至4の何れかの方法。
- 予備的な条件に、潜在的光開始剤を脱阻害するための酸触媒を生成するよう熱分解しうる開始剤化合物の存在が含まれる、請求項12の方法。
- 該開始剤化合物が阻害されたp−トルエンスルホン酸である請求項13の方法。
- 基材がアクリル基材である請求項1乃至14の何れかの方法。
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