JP5445509B2 - Image forming apparatus, image forming method, and component mounting apparatus - Google Patents

Description

  The present invention relates to an image forming apparatus and an image forming method for forming a three-dimensional recognition image of a measurement object such as an electronic component, and a component mounting apparatus using the image forming apparatus.

  In recent years, with the miniaturization and high functionality of electronic devices, finer and higher density electronic device mounting forms are rapidly progressing. For this reason, in the component mounting field in which electronic components are mounted on a substrate, further improvement in mounting position accuracy is required. In mounting work of electronic components on a substrate, electronic components held by a mounting head The position and shape are optically detected (see Patent Document 1). In the prior art example shown in Patent Document 1, a three-dimensional shape inspection is performed by measuring an electronic component held by a head unit with a three-dimensional sensor, and lead bending, missing of a bump, etc. based on the inspection result. In addition, it is determined whether or not there is an abnormality in the electronic component, and position correction is performed when the electronic component is mounted on the substrate.

  As a three-dimensional sensor, here, scanning light obtained by scanning laser light in the main scanning direction with a polygon mirror is incident on the measurement target surface of an electronic component moving in the sub-scanning direction via an fθ lens, and the reflected light is incident on the surface. A configuration in which light is received by a PSD (position detection element) is used, and three-dimensional shape data of an electronic component including information in the height direction is generated based on a light reception position detection result of PSD.

JP-A-10-51195

  As described above, in the three-dimensional sensor using the PSD, the amount of light reflected by the measurement target surface and received by the PSD is the characteristic of the PSD used and the characteristic of the electronic circuit that processes the signal output from the PSD. It is required to match. That is, the PSD is configured to detect the light receiving position based on an electric signal generated when the charge generated by light reception reaches the end electrode, and therefore, the amount of received light is excessive with respect to the characteristics of the PSD. In this case, erroneous detection occurs due to charges generated by one scanning operation being not completely output until the next light reception but staying on the light receiving surface.

  For example, if the amount of light received from the lead of a lead component such as QFP is excessive, the charge that has not been completely removed is output during the next scan, so that the portion where the lead is not originally present is detected. When scanning, a detection signal indicating the presence of a lead may be output as noise. On the other hand, when the amount of received light is too small, erroneous detection occurs in the same manner, and the black portion where the lead is missing in the recognition image indicating the detection result despite scanning the portion where the lead is originally present. A phenomenon appears.

  Since such a problem occurs due to a large change in the amount of reflected light depending on the state of the measurement target surface of the component, a correct detection result can always be obtained only by selecting the PSD to be used. It ’s difficult. It is also conceivable to arrange a plurality of PSDs at different light receiving angles and selectively use them according to the type of component to be measured. However, a problem arises when the amount of received light is too large or too small. It is difficult to always maintain a proper light amount. Thus, in the conventional three-dimensional recognition of parts using PSD, there is a problem that it is difficult to form a stable three-dimensional recognition image and obtain a correct part recognition result due to a change in the amount of received light. there were.

  Therefore, an object of the present invention is to provide an image forming apparatus, an image forming method, and a component mounting apparatus that can form a stable three-dimensional recognition image and obtain a correct component recognition result.

The image forming apparatus of the present invention receives height reflected by the brightness of each pixel in the two-dimensional image indicating the plane information of the measurement target surface by receiving reflected light of the light irradiated on the measurement target surface of the component. An image forming apparatus that forms a three-dimensional recognition image representing the above-mentioned, and is relatively moved in a sub-scanning direction orthogonal to the main scanning direction and scanning means that scans the light generated by the light generating means in the main scanning direction. Scanning light incident means for making the scanned scanning light incident on the measurement target surface from a predetermined incident direction, and two pairs of position detection elements arranged symmetrically with respect to the incident direction. A first position detecting element group, wherein the inclination angle of the light receiving surface of the position detecting element with respect to the measurement target surface is set different for each pair, and the inclination angle is smaller; A second position detection element group having a higher degree, and a position detection unit that detects a light receiving position of the reflected light from the measurement target surface of the scanning light by each position detection element of the two position detection element groups A received light amount determination unit that determines whether or not the amount of light received by each of the position detection elements is within a predetermined range, and a light reception position detection result of the reflected light by the position detection elements belonging to the same position detection element group A light reception position detection result determination unit for determining whether or not the magnitude of the difference between the light detection position is equal to or less than a predetermined reference value, and the light reception amount determination unit and the light reception position detection result determination unit based on the light reception position detection result of the position detection unit And an image forming unit that forms the three-dimensional recognition image of the measurement target surface in consideration of the determination result, and the image forming unit receives each of the position detection elements of the first position detection element group. The amount of light is the predetermined amount The light reception position detection result determination unit that is determined by the light reception amount determination unit to be within a range, and that the magnitude of the difference between the light reception position detection results in the first position detection element group is within the predetermined reference value. if it is determined by the light receiving position detection result of the first position detecting element group is adopted as the light receiving position detection result of the scanning site, the position detecting elements of said first position detecting element group has received When at least one of the light amounts exceeds the predetermined range, the light reception amount determination unit determines that the difference between the light reception position detection results in the first position detection element group is the predetermined reference. If it is determined by the light receiving position detection result determination unit when the value is exceeded, the light receiving position detection result for the scanning site is determined by the second position detection element group. The three-dimensional recognition image is formed by using the light reception position detection result.

According to the image forming method of the present invention, height information is obtained by brightness of each pixel in a two-dimensional image indicating planar information of the measurement target surface by receiving reflected light of light irradiated on the measurement target surface of the component. An image forming method for forming a three-dimensional recognition image representing an image, wherein the light generated by the light generation means is scanned in the main scanning direction, and is relatively moved in the sub-scanning direction orthogonal to the main scanning direction. A scanning light incident process in which the scanned scanning light is incident on the measurement target surface from a predetermined incident direction, and two pairs of position detecting elements arranged symmetrically with respect to the incident direction. A first position detecting element group, wherein the inclination angle of the light receiving surface of the position detecting element with respect to the measurement target surface is set different for each pair, and the inclination angle is smaller; A second position detection element group having a higher degree, and a position detection unit that detects a light receiving position of the reflected light from the measurement target surface of the scanning light by each position detection element of the two position detection element groups The position detection step of detecting the light receiving position of the reflected light from the measurement target surface of the scanning light, and the received light amount determination step of determining whether or not the amount of light received by each position detection element is within a predetermined range And a light receiving position detection result determining step for determining whether or not the magnitude of the difference in the light receiving position detection result of the reflected light by the position detecting elements belonging to the same position detecting element group is a predetermined reference value or less, An image forming step of forming the three-dimensional recognition image of the measurement target surface in consideration of the light reception amount determination step and the light reception position detection result determination step based on the light reception position detection result in the position detection step. Thus, it is determined that the light quantity received by each position detection element of the first position detection element group is within the predetermined range in the light reception amount determination step, and the light reception position detection result determination step If it is determined that the magnitude of the difference between the light reception position detection results in one position detection element group is within the predetermined reference value, the first position detection element is used as the light reception position detection result for the scanning region. employ light receiving position detection result of the group to form the three-dimensional recognition image, at least one of the light quantity which each position detection element of the first position detecting element group in the received light amount determination process has been received is The magnitude of the difference between the light reception position detection results in the first position detection element group in the light reception position detection result determination step that is determined to exceed the predetermined range. Is determined to exceed the predetermined reference value, the light reception position detection result by the second position detection element group is adopted as the light reception position detection result for the scanning portion to form the three-dimensional recognition image. .

The component mounting apparatus of the present invention is a component mounting apparatus that mounts a component taken out from the component supply unit onto a board held by the board holding unit, and takes out the component from the component supply unit by moving a mounting head. The component mounting mechanism mounted on the substrate and the reflected light of the light irradiated on the measurement target surface of the component held by the mounting head are received to indicate plane information of the measurement target surface 2 An image forming apparatus that forms a three-dimensional recognition image that represents height information according to the luminance of each pixel in the three-dimensional image, and the position and height of the electrode portion of the component based on the three-dimensional recognition image formed by the image forming apparatus A recognition unit for recognizing the thickness, and a control unit for controlling the component mounting mechanism and the image forming apparatus, wherein the image forming apparatus mainly runs the light generated by the light generating unit. Scanning means for scanning in the direction, scanning light incident means for causing the scanned scanning light to enter the measurement target surface that moves relative to the sub-scanning direction orthogonal to the main scanning direction from a predetermined incident direction, respectively Are two position detection element groups composed of a pair of position detection elements arranged symmetrically with respect to the incident direction, and the inclination angle of the light receiving surface of the position detection element with respect to the measurement target surface is in each pair. A first position detecting element group that is set differently and has a smaller inclination angle; and a second position detection element group that has a larger inclination angle, and receives reflected light from the measurement target surface of the scanning light. A position detection unit for detecting the position by each of the position detection elements of the two position detection element groups, and a received light amount determination unit for determining whether the amount of light received by each of the position detection elements is within a predetermined range; The same A light receiving position detection result determining unit that determines whether or not a difference in a light receiving position detection result of the reflected light by the position detecting elements belonging to the position detecting element group is equal to or less than a predetermined reference value; and An image forming unit that forms the three-dimensional recognition image of the measurement target surface in consideration of the determination results of the received light amount determination unit and the received light position detection result determination unit based on the received light position detection result, The received light amount determination unit determines that the amount of light received by each position detection element of the first position detection element group is within the predetermined range, and the light reception position detection in the first position detection element group If the light reception position detection result determination unit determines that the magnitude of the difference between the results is within the predetermined reference value, the first position detection is performed as a light reception position detection result for the scanning region. Adopted receiving position detection result by the element group, determining the each position detection element of the first position detecting element group exceeds at least one said predetermined range of said amount of light received by the light receiving amount determiner Or if the light receiving position detection result determination unit determines that the difference between the light receiving position detection results in the first position detection element group exceeds the predetermined reference value, The three-dimensional recognition image is formed by adopting the light reception position detection result by the second position detection element group as the light reception position detection result.

  According to the present invention, there are two pairs of position detection element groups that are arranged symmetrically with respect to the incident direction to the measurement target surface and that have different inclination angles of the light receiving surface with respect to the measurement target surface for each pair. A position detection unit that detects a light receiving position of reflected light from the measurement target surface, a received light amount determination unit that determines whether or not the amount of light received by each position detection element is within a predetermined range, and the same position detection element A light receiving position detection result determining unit for determining whether or not the magnitude of the difference in the light receiving position detection result of the reflected light by the position detecting elements belonging to the group is equal to or less than a predetermined reference value, and detecting the light receiving position of the position detecting unit Stable even when the amount of received light changes significantly by taking into account the determination results of the received light amount determination unit and the received light position detection result determination unit based on the result to form a three-dimensional recognition image of the measurement target surface Create and correct 3D recognition image It can be obtained component recognition results.

The top view of the component mounting apparatus of one embodiment of this invention Structure explanatory drawing of the three-dimensional sensor used for the image forming apparatus of one embodiment of this invention Explanatory drawing of the three-dimensional measurement by the three-dimensional sensor used for the image forming apparatus of one embodiment of this invention Explanatory drawing of the three-dimensional recognition image formed with the image forming apparatus of one embodiment of this invention The block diagram which shows the structure of the control system of the component mounting apparatus of one embodiment of this invention Explanatory drawing of the example of recognition defect generation | occurrence | production in the image forming apparatus of one embodiment of this invention 1 is a block diagram showing a configuration of a data processing unit in a three-dimensional sensor used in an image forming apparatus according to an embodiment of the present invention. Functional explanatory diagram of the ch selection module of the data processing unit in the three-dimensional sensor used in the image forming apparatus according to the embodiment of the present invention Functional explanatory diagram of a PSD angle selection module of a data processing unit in a three-dimensional sensor used in an image forming apparatus according to an embodiment of the present invention 3 is a flowchart showing three-dimensional image formation processing by the image forming apparatus according to the embodiment of the present invention. Explanatory drawing of the three-dimensional component recognition process by the image forming apparatus of one embodiment of this invention

  Next, embodiments of the present invention will be described with reference to the drawings. First, the structure of the component mounting apparatus will be described with reference to FIG. In FIG. 1, a substrate transport mechanism 2 is disposed on a base 1a in the X direction (substrate transport direction). The substrate transport mechanism 2 transports the substrate 3 carried in from the upstream device, and positions and holds the substrate 3 on the substrate holder provided in the transport path. Component supply units 4 </ b> A and 4 </ b> B are arranged on both sides of the substrate transport mechanism 2. A tray feeder 5 for supplying a component tray 6 is mounted on the component supply unit 4A, and a plurality of tape feeders 8 are arranged in parallel on the component supply unit 4B.

  The component tray 6 stores a three-dimensional component of a type provided with an electrode portion having a three-dimensional shape, such as a lead or a bump, such as QFP or BGA. A plurality of component trays 6 are stacked and stored in a storage container such as a magazine, and the tray feeder 5 positions the component tray 6 at a predetermined component take-out position, whereby the three-dimensional component 7 is obtained by a component mounting mechanism described below. Supplied to the parts pick-up position. The tape feeder 8 feeds the component to the component pick-up position by the component mounting mechanism by pitch-feeding the carrier tape holding the component to be mounted.

  A Y-axis moving table 9 having a Y-direction driving mechanism using a linear motor is disposed at one end of the base 1a in the X-direction. Similarly, the Y-axis moving table 9 has an X-direction driving mechanism using a linear motor. X-axis moving tables 10A and 10B having the above are coupled so as to be movable in the Y direction. A mounting head 11 is mounted on the X-axis moving tables 10A and 10B so as to be movable in the X direction. The mounting head 11 includes a plurality of unit transfer heads 12 each having a suction nozzle 12a (see FIG. 2) that sucks and holds a component at the lower end, and includes a Y-axis moving table 9 and X-axis moving tables 10A and 10B. , The mounting head 11 moves between the component supply units 4A and 4B and the substrate transport mechanism 2, and the components taken out from the component supply units 4A and 4B are held by the substrate holding unit of the substrate transfer mechanism 2. Mounted on the substrate 3.

  Therefore, the Y-axis moving table 9, the X-axis moving tables 10 </ b> A and 10 </ b> B, and the mounting head 11, which are head moving mechanisms, take out the components from the component supply units 4 </ b> A and 4 </ b> B by moving the mounting head 11 and mount them on the substrate 3. Configure the component mounting mechanism. A substrate camera 13 that moves integrally with the mounting head 11 is mounted on the X-axis moving tables 10A and 10B. By moving the substrate camera 13 above the substrate 3 held by the substrate transport mechanism 2, The board camera 13 captures and recognizes the mounting position of the board 3.

  A component camera 14, a 3D sensor 15, and a nozzle stocker 16 are disposed between the substrate transport mechanism 2 and the component supply unit 4A. A component camera is disposed between the substrate transport mechanism 2 and the component supply unit 4B. 14. A nozzle stocker 16 is provided. The component camera 14 is a line camera using a line sensor, and the component camera 14 is held by the mounting head 11 when the mounting head 11 that has taken out components from the component supply units 4A and 4B moves above the component camera 14. The captured part is imaged from below. Thereby, two-dimensional information such as the position and shape of the component is acquired.

  The 3D sensor 15 performs a process for forming a three-dimensional image on the three-dimensional component 7 taken out from the component supply unit 4A. That is, the measurement target surface 7P (see FIG. 3) of the three-dimensional component 7 held by the mounting head 11 is irradiated with laser light, and the reflected light of the irradiated laser light is received, whereby the measurement target surface 7P. It has a function as an image forming apparatus that forms a three-dimensional recognition image representing height information by the brightness of each pixel in a two-dimensional image representing planar information.

  Next, the structure of the 3D sensor 15 will be described with reference to FIG. 2A and 2B respectively show arrows in the Y direction and the X direction of the 3D sensor 15, and are held by the suction nozzle 12a of the unit transfer head 12 above the 3D sensor 15. The three-dimensional component 7 moves in the scanning direction (X direction) at a predetermined scanning speed. In FIG. 2B, a laser light source unit 21 (light generating means) that emits laser light as measurement light has a light axis vertically upward at the bottom of the housing 20 provided with an opening 20a on the top surface. A condensing lens 22 that condenses the laser light is disposed above the laser light source unit 21.

  The light emitted from the laser light source 21 is condensed by the condenser lens 22 and irradiated upward (arrow a), and further reflected by the mirror 27 in the horizontal direction (arrow b), and a polygon mirror having a polygonal reflecting surface. 23 is incident. Incident light incident on the reflecting surface is reflected upward, enters the fθ lens 24 positioned above, and is projected vertically upward. At this time, when the polygon mirror 23 is rotated by the rotation drive unit 23a (FIG. 2A) (arrow c), the irradiation light projected through the mirror 27 is in the order of arrows e1, e2, e3 (arrows). d-direction), that is, in the main scanning direction, enters the measurement target surface 7P (see FIG. 3A) of the three-dimensional component 7 located above the opening 20a from the vertically lower side.

  The measurement target surface 7 </ b> P moves relative to the 3D sensor 15 in the sub-scanning direction orthogonal to the Y direction, which is the main scanning direction, by moving the unit transfer head 12. In the above configuration, the polygon mirror 23 rotated by the rotation driving unit 23a is a scanning unit that scans the laser light generated by the laser light source unit 21 in the main scanning direction. The fθ lens 24 moves the scanning light of the scanned laser light with respect to the measurement target surface 7P that moves relative to the sub scanning direction (X direction) orthogonal to the main scanning direction by moving the unit transfer head 12. It is a scanning light incident means for making the light incident from a vertically lower direction which is a predetermined incident direction.

  On both sides of the incident direction of the laser beam, a pair of first PSDs 25AR, 25AL (first position detection element group 25A) and one pair are positioned obliquely below where the reflected light from the three-dimensional component 7 can be received. The second PSDs 25BR and 25BL (second position detection element group 25B) are symmetrical with respect to the vertical incident direction (see arrow h shown in FIG. 3), and the light receiving surface 25a (see FIG. 3B) is inclined. Arranged upwards.

  Each PSD of the first position detection element group 25A and the second position detection element group 25B has a function of detecting the light receiving position of the spot light incident on the light receiving surface 25a. By using the detection result, the height position of the measurement target portion of the measurement target surface 7P is detected by the triangulation method. In other words, the light incident on the measurement target surface 7P through the fθ lens 24 is reflected downward by the respective parts on the lower surface of the three-dimensional component 7 and is condensed by the condenser lens 26 to be reflected by the two position detection element groups 25A and 25B. Light is received by the light receiving surface 25a of each PSD (arrows f and g).

  Here, the inclination angles of the light receiving surfaces 25a of the PSDs belonging to the first position detecting element group 25A and the second position detecting element group 25B with respect to the measurement target surface 7P are the first PSDs 25AR and 25AL belonging to the first position detecting element group 25A. The inclination angle θ2 at which the second PSDs 25BR and 25BL belonging to the second position detection element group 25B are inclined with respect to the measurement target surface 7P is more than the inclination angle θ1 at which the measurement target surface 7P is inclined. It is set to be large (see FIG. 3B).

  In other words, in the present embodiment, the position detection unit 25 that detects the light receiving position of the reflected light from the three-dimensional component 7 is arranged symmetrically across the incident direction, and the first position detection element having a smaller inclination angle. It has a group 25A and a second position detection element group 25B having a larger inclination angle. That is, the inclination angle of the light receiving surface 25a of each PSD belonging to each position detection element group with respect to the measurement target surface 7P is set differently for each pair. The light receiving position of the reflected light from the measurement target surface 7P of the scanning light is detected by each PSD of the two position detecting element groups 25A and 25B, and the data acquired by receiving each PSD is a data processing unit. Data processing is performed by 15a, and a three-dimensional image forming process described later is performed.

  Next, the shape of the three-dimensional part 7 to be measured and the function of the 3D sensor 15 will be described with reference to FIGS. As shown in FIG. 3A, the three-dimensional component 7 to be mounted is a leaded component having a structure in which a plurality of leads 7b extend from four sides of a rectangular main body 7a. The leading end portion of the lead 7b is a lead leg portion 7c which is positioned below the bottom surface 7d of the lower surface of the main body portion 7a and bent in the horizontal direction. When the three-dimensional component 7 is mounted on the substrate 3, the lead leg portion 7b The lead contact surface 7e on the lower surface of the portion 7c contacts the circuit electrode of the substrate 3. In mounting the leaded component having such a configuration, it is required that the lead leg portion 7c is in the same plane as much as possible and all the leads 7b are in contact with the circuit electrodes of the substrate 3 evenly in the mounted state. For this reason, in the component mounting operation for the three-dimensional component 7, in addition to the planar shape of the lead 7 b in the horizontal plane, the shape abnormality in the height direction (so-called lead floating) is measured and the 3D sensor 15 performs three-dimensional measurement. A three-dimensional recognition image of the component 7 is acquired.

  In the three-dimensional recognition of the three-dimensional component 7 by the 3D sensor 15, the laser beam is scanned in the main scanning direction (Y direction) by the above-described scanning means, and the three-dimensional component 7 is moved in the X direction by the mounting head 11. Thus, the laser beam is scanned two-dimensionally on the measurement target surface 7P. That is, as shown in FIG. 4A, while the laser beam is scanned in the main scanning direction (Y direction) along the scanning line SL by the above-described scanning means (arrow k), the mounting head 11 causes the three-dimensional component 7 to be scanned. Is moved in the sub-scanning direction (X direction) at a predetermined scanning speed (arrow l), thereby moving the scanning lines SL at predetermined scanning line intervals.

  FIG. 3A shows a state in which the incident light of the laser beam thus scanned is incident on the lead contact surface 7e of one lead 7b from the vertically lower incident direction (arrow h). The reflected light (arrow i1) of the incident light is received by the light receiving surface of the first PSD 25A via the condenser lens 26. At this time, the electrical signals output from the end electrodes A and B at both ends of the first PSD 25A are used as data. By receiving the processing unit 15a, the light receiving position d1 on the light receiving surface is detected. Although only the case of the first PSDs 25AR and 25AL has been illustrated and described here, the same applies to the second PSDs 25BR and 25BL.

  Here, the first PSD 25AR, 25AL, second PSD 25BR, 25BL are arranged in pairs with respect to the incident optical axis and used as a position detection element group, which generates non-uniform reflected light such as minute protrusions near the incident point of the measurement light. This is because even when there is a factor and the reflected light in a specific direction is blocked, the reflected light in the other direction is surely received to obtain a normal measurement result. That is, in this embodiment, each position detection element group is provided with two R / L signal acquisition channels (hereinafter abbreviated as Rch and Lch), and signal data acquired by Rch and Lch. Are appropriately selected or combined to be used as data for image formation.

  Based on the light receiving position d1 thus detected, the height of the lead leg portion 7c at the incident position is obtained by the triangulation method. A lead 7b indicated by a broken line indicates a state at a low position. In this case, a light receiving position d2 different from the light receiving position d1 on the light receiving surface 25a of the first PSD 25AR, 25AL is received by receiving reflected light (arrow i2). As a result, the height of the lead 7b indicated by the broken line is obtained. In this way, the height information indicating the three-dimensional shape of the three-dimensional component 7 on the measurement target surface 7P is detected by obtaining the height of each scanning point while scanning the laser beam over the entire range of the measurement target surface 7P. can do. In the present embodiment, the three-dimensional recognition image representing the height information of each scanning point shown in FIG. 4B is formed by the luminance of each pixel in the two-dimensional image representing the plane information of the measurement target surface 7P. I am doing so.

  In FIG. 4B, on the recognition screen 29 showing the three-dimensional recognition image, the planar shapes of the bottom surface 7d, the lead back surface 7f, and the lead contact surface 7e are shown in the background portion 29a represented by the dark image. It is displayed with different brightness depending on the height. That is, the lowermost lead contact surface 7e is represented with the highest luminance, and the bottom surface 7d and the lead back surface 7f are represented with the lower luminance in this order. In the component recognition for inspecting the position and shape of the three-dimensional component 7 by performing image recognition processing on the three-dimensional recognition image formed in this way, the extension length a, the lead width b, and the lead pitch p of the lead 7b. In addition to the presence / absence of a shape / position defect in a horizontal plane such as the above, it is possible to detect the presence / absence of a defect in a height direction such as a lead float h, that is, a three-dimensional shape.

  Here, referring to FIG. 3B, the arrangement posture of the PSD belonging to the first position detection element group 25A and the second position detection element group 25B in the 3D sensor 15 and the amount of light received by each light receiving surface 25a. Will be described. Here, the first PSD 25AR and the second PSD 25BR will be described, but the same applies to the first PSD 25AL and the second PSD 25BL.

  The first PSD 25AR is arranged with a predetermined inclination angle θ1 (for example, 15 °) with respect to the measurement target surface 7P, and the second PSD 25BR has an inclination angle θ2 (for example, 35 °) larger than the inclination angle θ1 with respect to the measurement target surface 7P. Is arranged in. Therefore, the incident angle when the reflected light (arrows j1, j2) from the upper measurement object enters the light receiving surface 25a is smaller at the incident angle α2 at the second PSD25BR than at the incident angle α1 at the first PSD25AR. Become. Therefore, the amount of light received by the light receiving surface 25a per unit area in the first PSD 25AR and the second PSD 25BR is larger in the first PSD 25AR having a smaller inclination angle θ1 than in the second PSD 25BR if the intensity of the incident reflected light is the same.

  Since the amount of light received by the light receiving surface 25a varies greatly depending on the reflection state, the amount of light received by the light receiving surface 25a per unit area is the surface property of the scanning target part, that is, the total amount that reflects incident light in a specific direction. It varies greatly depending on whether it is in a reflection state or in a diffuse reflection state in which incident light is reflected in a random direction. When the variation in the amount of light received by the light receiving surface 25a deviates from the predetermined light amount range defined by the operating characteristics of the first PSD 25AR, 25AL, second PSD 25BR, 25BL, the high output from these PSDs The information does not necessarily reflect the three-dimensional shape of the measurement target surface 7P correctly, and a three-dimensional recognition image including locally incorrect information is formed. A mode of occurrence of a problem caused by the excessive / small amount of light and a countermeasure for the present embodiment will be described later.

  Next, the configuration of the control system will be described with reference to FIG. The control device 30 (control unit) includes a component mounting mechanism, that is, a substrate transport mechanism 2, a Y-axis movement table 9, an X-axis movement table 10A, an X-axis movement table 10B, a head drive mechanism, a component supply unit 4A, and a component supply unit 4B. The component mounting operation for mounting the components taken out from the component supply unit 4A and the component supply unit 4B on the substrate 3 is executed. The recognition unit 31 is controlled by the control device 30 to perform recognition processing on the recognition image acquired by the board camera 13, the component camera 14, and the 3D sensor 15. By recognizing the recognition image acquired by the board camera 13, the position of the component mounting point on the board 3 is recognized.

  By recognizing the recognition image acquired by the component camera 14, the identification of the component held in the mounting head 11 and the misalignment state are detected. By performing a recognition process on the three-dimensional recognition image acquired by the 3D sensor 15, the component state of the component having the three-dimensional shape portion of the three-dimensional component 7 held by the 3D sensor 15 is detected. That is, the recognition unit 31 recognizes the position and height of the electrode part (see the lead 7b shown in FIG. 3) of the three-dimensional component 7 based on the three-dimensional recognition image formed by the 3D sensor 15 as the image forming apparatus. Perform the process.

  The 3D sensor 15 performs data processing on the output signal from the position detection unit 25 having the first position detection element group 25A (first PSD 25AR, 25AL) and the second position detection element group 25B (second PSD 25BR, 25BL). A portion 15a is provided. The data processing unit 15a processes these output signals to form a three-dimensional image of the measurement target surface 7P of the three-dimensional component 7. The storage unit 32 stores inspection data for determining whether or not there is an abnormality in the component inspection by the component camera 14 and the 3D sensor 15 in addition to various programs and data necessary for executing the component mounting operation. The input / output unit 33 performs input processing for inputting operation commands and data using a keyboard, a touch panel, and the like, and output processing for displaying a screen on the display panel.

  Next, with reference to FIG. 6, a description will be given of an example of a problem that occurs in a three-dimensional image due to an excessive or too small amount of light received by the PSD during image formation using the 3D sensor 15 having the above-described configuration. FIG. 6A shows a part of the three-dimensional component 7 to be recognized, and here, erroneous recognition that occurs when the lead contact surface 7e in the portion (A) (B) indicated by an ellipse is the recognition target. Will be described. In the three-dimensional recognition for the three-dimensional component 7, the parts (A) and (B) are scanned as the scanning lines SL1 and SL2, respectively, and the respective scanning points are shown in FIG. It becomes the acquisition target of information.

  FIG. 6B shows the received light amounts of the first PSD 25AR (or 25AL) and the second PSD 25BR (or 25BL) in the scanning process described above, and the received light amount graphs (A) and (B) are shown in FIG. The figure shows received light amount data acquired by scanning the region (a) and (b) shown in (a). Here, the received light amount curves L1 and L2 indicate the received light amounts individually received by the first PSD 25AR (or 25AL) and the second PSD 25BR (or 25BL), respectively. In addition, the first threshold value TH1 and the second threshold value TH2 set in the received light amount graphs (a) and (b) are obtained by the first PSD25AR (or 25AL) and the second PSD25BR (or 25BL) to obtain a normal light reception position detection result. This is a threshold value that defines the amount of light that can be generated. In other words, the first PSD 25AR (or 25AL) and the second PSD 25BR (or 25BL) are normally operated only when a light amount within a predetermined range in which the upper limit value is the first threshold value TH1 and the lower limit value is the second threshold value TH2 is received. Detect the light receiving position.

  In the example shown in FIG. 6B, in the received light amount graph (A), the received light amount curve L1 is within an appropriate range defined by the first threshold value TH1 and the second threshold value TH2, and the received light amount curve L2 is the second light amount curve L2. The value is smaller than the threshold value TH2. In other words, for the part (A) shown in FIG. 6A, the light reception position detection result by the first PSD 25AR (or 25AL) that gives the light reception amount curve L1 within the appropriate range of the light reception amount is normal, but the light reception amount Indicates that the light reception position detection result by the second PSD 25BR (or 25BL) that gives the light reception amount curve L2 deviating from the appropriate range is not correct.

  That is, according to the light receiving position detection result by the first PSD 25AR (or 25AL), as shown in FIG. 4 (b), the planar shapes of the bottom surface 7d, the lead back surface 7f, and the lead contact surface 7e are in accordance with the respective heights. 3D recognition images displayed with different brightness can be obtained. On the other hand, when the light receiving position detection result by the second PSD 25BR (or 25BL) is used, as shown in the image example (A) in FIG. The range of the lead contact surface 7e that should originally appear as a high brightness portion is partially lost and appears as a black missing portion E1 included in the dark image range.

  In the received light amount graph (b), the received light amount curve L1 partially becomes a large value exceeding the first threshold value TH1 and partially protrudes from the specified threshold range. The example in the case where it exists in the threshold value range prescribed | regulated by threshold value TH1 and 2nd threshold value TH2 is shown. In other words, for the part (b) shown in FIG. 6A, although the light reception position detection result by the second PSD 25BR (or 25BL) that gives the light reception amount curve L2 in which the light reception amount is within the threshold range is normal, This indicates that the light reception position detection result by the first PSD 25AR (or 25BL) that gives the light reception amount curve L1 whose amount is out of the threshold range is not correct.

  That is, according to the light receiving position detection result by the second PSD 25BR (or 25BL), as shown in FIG. 4B, the planar shapes of the bottom surface 7d, the lead back surface 7f, and the lead contact surface 7e are in accordance with the respective heights. 3D recognition images displayed with different brightness can be obtained. On the other hand, when the light reception position detection result by the first PSD 25AR (or 25AL) is used, as shown in the image example (b) of FIG. The range of the lead contact surface 7e that appears as a high luminance portion appears as a noise portion E2 that partially protrudes into the dark image range on the subsequent scanning line side. This phenomenon is because the amount of light received is excessive, so that the charge due to the light received in one scan stays without being completely removed from the end electrodes A and B (FIG. 3 (a)) until the next scan, It occurs when this staying part becomes an error.

  In this embodiment, in order to prevent detection failure caused by excess or deficiency of the amount of light received by the position detection element, the position detection unit 25 used in the 3D sensor 15 is configured to change the light reflected from the same part. In a configuration having two pairs of position detection element groups (first position detection element group 25A and second position detection element group 25B) capable of receiving light with a light amount, as described below, an appropriate light amount range Only when the difference between the light reception position detection results by two PSDs belonging to the same position detection element group is within the reference value, and the data is used for forming a three-dimensional image. I am trying to adopt it.

  Hereinafter, in order to prevent such a detection defect, the configuration of the data processing unit 15a in the present embodiment will be described with reference to FIGS. 7, 8, and 9. FIG. As shown in FIG. 7, the data processing unit 15a receives an output from each PSD constituting the position detection unit 25 and performs predetermined data processing, a received light amount determination unit 34, a received light position detection result determination unit 35, and an image. The image forming unit 36 further includes a height calculating module 37, a channel selecting module 38, a PSD angle selecting module 39, and an image forming module 40 as processing function modules.

  The received light amount determination unit 34 performs processing for determining whether or not the amount of light received by each PSD constituting the position detection unit 25 is within a predetermined range. The light reception position detection result determination unit 35 performs a process of determining whether or not the magnitude of the difference in the light reception position detection result of the reflected light by the PSDs belonging to the same position detection element group is equal to or less than a predetermined reference value. The determination by the light reception position detection result determination unit 35 is executed only when the amount of light received by the light reception amount determination unit 34 is determined to be within a predetermined range. The image forming unit 36 forms a three-dimensional recognition image of the measurement target surface 7P based on the light reception position detection result of the position detection unit 25 and the determination results of the light reception amount determination unit 34 and the light reception position detection result determination unit 35. Perform the process.

  The height calculation module 37 performs a process of obtaining the height of the measurement target part by the method shown in FIG. 3A based on the light reception position detection result of the position detection unit 25. The ch selection module 38 selects which of Rch and Lch signal data output from the position detection unit 25 is to be used based on the determination results of the received light amount determination unit 34 and the received light position detection result determination unit 35. It has a processing function. The PSD angle selection module 39 has a function of selecting signal data from PSDs belonging to either the first position detection element group 25A or the second position detection element group 25B having different inclination angles. In the image forming module 40, the height calculation result calculated by the height calculation module 37 using the signal data from the PSD specified by selecting the channel and further selecting the position detection element group in this way. Based on the above, a process of forming a three-dimensional image of the measurement target surface 7P is performed.

  The data selection function by the channel selection module 38 will be described with reference to FIG. In the determination correspondence table shown in FIG. 8, the R-side light intensity upper limit determination field 38Ra, the R-side light intensity lower limit determination field 38Rb, the L-side light intensity upper limit determination field 38La, and the L-side light intensity lower limit determination field 38Lb are all determined by the received light amount determination unit 34. The R-side position detection difference determination column 38Rc and the L-side position detection difference determination column 38Lc correspond to the determination results by the light receiving position detection result determination unit 35.

  That is, in the R-side light intensity upper limit determination field 38Ra and the L-side light intensity upper limit determination field 38La, the light intensity upper limit: OK (NG) is equal to or less than the first threshold value TH1 set in advance as shown in FIG. In the R-side light intensity lower limit determination field 38Rb and the L-side light intensity lower limit determination field 38Lb, the light intensity lower limit: OK (NG) is equal to or greater than (less than) a second threshold TH2 set in advance. It is shown that. In the R-side position detection difference determination field 38Rc and the L-side position detection difference determination field 38Lc, | R−L |: OK (NG) is the absolute value of the difference between the light receiving positions based on the Rch and Lch signal data. Indicates that the value is within (exceeded) a reference value determined in advance as being in a normal state. In addition, when the conditions of the light quantity upper limit: OK and the light quantity lower limit: OK are not satisfied, the determination of the R side position detection difference determination column 38Rc and the L side position detection difference determination column 38Lc is not performed.

  Based on these light reception amount determination results and light reception position detection result determination results, it is determined which of the Rch and Lch signal data is to be used. That is, in both Rch and Lch, the amount of received light is within an appropriate range, the light amount upper limit: OK, the light amount lower limit: OK is satisfied, and the absolute value of the difference between the light receiving positions is within a reference value (| R−L |: In the case of (OK), as shown in (a) of FIG. 8, a value obtained by averaging the Rch and Lch signal data is adopted as the data for image formation.

  On the other hand, in the Lch, the upper limit of the light amount: OK and the lower limit of the light amount: OK are satisfied, but the upper limit of the light amount: OK and the lower limit of the light amount: OK are not satisfied in the Rch. As shown in (b), Lch signal data is adopted as image formation data. On the other hand, if the conditions for the Rch are below the upper limit of the light quantity and above the lower limit of the light quantity are satisfied, but the conditions for the Lch are below the upper limit of the light quantity and above the lower limit of the light quantity are not satisfied, As shown, Rch signal data is employed as data for image formation.

  In FIG. 8, cases other than (a), (b), and (c) in which signal data are normally output are handled as follows. First, in either of Rch and Lch, although the conditions of the upper limit of light quantity: OK and the lower limit of light quantity: OK are satisfied, signal data from the channel is not output when | R−L |: NG. Further, in both Rch and Lch, when the light amount upper limit is NG and the light amount lower limit is OK, a fixed data value (1023) indicating that the light amount is an excessive singular point is output. In other cases, that is, in the case of | R−L |: NG in both Rch and Lch, or in the case of either Rch or Lch, the upper limit of light quantity: OK and the lower limit of light quantity: NG, a fixed data value ( 0) is output. Such handling is set for convenience, and can be changed as appropriate within a range that is considered appropriate in actual operation.

  Next, the data selection function by the PSD angle selection module 39 will be described with reference to FIG. Here, after the channel selection by the channel selection module 38 is performed, the signal data output from the first position detection element group 25A or the second position detection element group 25B having different inclination angles is adopted. Is to select. Also in the PSD angle selection module 39, the PSD to be adopted is selected based on the light reception amount determination result by the light reception amount determination unit 34. That is, in the determination correspondence table shown in FIG. 9, the received light amount determination result combination fields 39a and 39b are respectively for the first position detection element group 25A (first PSD) and the second position detection element group 25B (second PSD). The types of combinations of received light amount determination results for each of Rch and Lch are shown. Here, OK for Rch and Lch indicates a case where the light amount upper limit: OK and the light amount lower limit: OK conditions shown in FIG. 8 are both satisfied and the light amount is in the proper range. In addition, NG for Rch and Lch indicates cases other than those described above, where the light amount is too large or too small outside the appropriate range.

  Based on the combination of the received light amount determination results, the signal data (first PSD data) output from the first position detection element group 25A and the signal data (second PSD data) output from the second position detection element group 25B. ) Is selected. That is, when the conditions of Rch: OK and Lch: OK are satisfied in both the first PSD and the second PSD, the first PSD data and the second PSD data are averaged as shown in FIG. The value is adopted as data for image formation. In this case, the first PSD data may be used alone.

  If the RPS: OK and Lch: OK conditions are satisfied in the first PSD, but at least one of Rch or Lch is NG in the second PSD, as shown in FIG. Are employed as data for image formation. If the RPS: OK and Lch: OK conditions are satisfied in the second PSD, but at least one of Rch or Lch is NG in the first PSD, as shown in FIG. Are employed as data for image formation. In the case of (d), (e), and (f) described above, a value obtained by averaging Rch and Lch signal data is used as image forming data.

  In the case of Rch: OK and Lch: NG in the second PSD, as shown in FIG. 9G, the second PSD data and the Rch signal data are adopted as image formation data. Further, in the case of Rch: NG and Lch: OK in the second PSD, as shown in (h) of FIG. 9, the second PSD data and the Lch signal data are employed as image formation data. In other cases, that is, in either the first PSD or the second PSD, when Rch: NG and Lch: NG, the fixed data value (0) is output.

  That is, in the above configuration, the image forming unit 36 defines the light amounts received by the position detection elements (first PSDs 25AR, 25AL) of the first position detection element group 25A by the first threshold value TH1 and the second threshold value TH2. The received light amount determining unit 34 determines that the light amount is within a predetermined range (light amount upper limit: OK and light amount lower limit: OK), and the difference between the light reception position detection results in the first position detection element group 25A is a predetermined reference. If the light reception position detection result determination unit 35 determines that the value is within the value (| R−L |: OK), the light reception position detection by the first position detection element group 25A is performed as the light reception position detection result for the scanning part. The result (first PSD data) is adopted to form a three-dimensional recognition image (see the first PSD data indicated by (d) and (e) in FIG. 9).

  The amount of light received by each of the position detection elements (first PSDs 25AR, 25AL) of the first position detection element group 25A exceeds a predetermined range defined by the first threshold value TH1 and the second threshold value TH2 (light amount) The upper limit: NG or the lower limit of light intensity: NG) is determined by the received light amount determination unit 34, or the magnitude of the difference between the received light position detection results in the first position detection element group 25A exceeds a predetermined reference value (| RL) |: NG) and the light reception position detection result determination unit 35, the light reception position detection result (second PSD data) by the second position detection element group 25B is adopted as the light reception position detection result for the scanning portion. To form a three-dimensional recognition image. (Refer to the first PSD data shown in (f) (g) (h) in FIG. 9).

  Next, a three-dimensional image forming method by the image forming apparatus of this embodiment will be described with reference to FIG. 11 in accordance with the flow of FIG. Here, a three-dimensional recognition image in which height information is represented by the brightness of each pixel in a two-dimensional image indicating plane information of the measurement target surface by receiving reflected light of the light irradiated to the measurement target surface of the component Form.

  First, recognition of a 3D part (three-dimensional part 7) is started (ST1). That is, the X-axis movement table 10 </ b> A in which the three-dimensional component 7 is taken out from the component tray 6 by the component supply unit 4 </ b> A moves above the 3D sensor 15. Next, a component scan is executed (ST2). That is, the X-axis moving table 10A holding the three-dimensional component 7 is scanned while scanning the laser light generated by the laser light source unit 21 serving as light generation means in the main scanning direction (Y direction) with the polygon mirror 23 (scanning process). Relative movement is performed at a predetermined scanning speed in the sub-scanning direction (X direction) (see FIG. 4A). Next, the scanning light is incident on the measurement target surface 7P of the three-dimensional component 7 from a predetermined incident direction (scanning light incident process).

  Then, the light receiving position is detected (ST4). That is, the light receiving position of the reflected light from the measurement target surface 7P of the incident scanning light is detected by the position detection unit 25 having the above-described configuration (position detection step). As a result, each part serving as a base of the three-dimensional image data including the height information of each part of the measurement target surface 7P by each PSD belonging to the first position detection element group 25A and the second position detection element group 25B. The light receiving position of is acquired. At this time, scanning is also performed on the portions (A) and (B) indicated by ellipses in FIG. 11A as in the example shown in FIG.

  Next, the amount of received light is determined (ST5). That is, the received light amount determination unit 34 determines whether or not the amount of light received by each PSD belonging to the first position detection element group 25A and the second position detection element group 25B is within a predetermined range (light reception amount determination step). ). Next, light reception position detection result determination is performed (ST6). That is, whether or not the magnitude (| R−L |) of the difference in the light reception position detection result of the reflected light by the position detection elements belonging to the same position detection element group is equal to or smaller than a predetermined reference value is detected. It is determined by the result determination unit 35 (light reception position detection result determination step).

  Next, image formation is performed (ST7). That is, based on the light reception position detection result by the position detection unit 25 in the position detection step, the light reception amount detection unit 34 in the light reception amount determination step and the light reception position detection result in the light reception position detection result determination unit 35 in the light reception position detection result determination step In consideration of the determination result, a three-dimensional recognition image of the measurement target surface 7P is formed (image forming step).

  In this image formation, as described with reference to FIGS. 8 and 9, the amount of light received by each position detection element (first PSD 25AR, 25AL) of the first position detection element group 25A in the received light amount determination step is a predetermined amount. It is determined that it is within the range (light amount upper limit: OK and light amount lower limit: OK), and the magnitude of the difference in the light reception position detection result in the first position detection element group 25A is within a predetermined reference value (| R− If it is determined that L |: OK), a light reception position detection result (first PSD data) by the first position detection element group 25A is adopted as a light reception position detection result for the scanning part to form a three-dimensional recognition image. To do.

  Then, it is determined that the amount of light received by each of the position detection elements of the first position detection element group 25A exceeds a predetermined range (light quantity upper limit: NG or light quantity lower limit: NG), or the first position detection element. If it is determined that the magnitude of the difference between the light reception position detection results in the group 25A exceeds a predetermined reference value (| R−L |: NG), the second position detection is performed as the light reception position detection result for the scanning portion. A three-dimensional recognition image is formed by using the light reception position detection result (second PSD data) by the element group 25B.

  By performing such data processing at the time of image formation, PSD data employed by the image forming module 40 for image formation, that is, image forming data selected from the first PSD data and the second PSD data, is based on the data. It is ensured that the amount of incident light received is always within an appropriate range. That is, as shown in FIG. 11B, the received light amount curve L indicating the received light amount of the data is always between the first threshold value TH1 and the first threshold value TH2. Accordingly, as shown in FIG. 11 (c), scanning of any of the parts (A) and (B) does not lead to problems caused by the excessive or too small amount of light illustrated in FIG. 6C. In addition, it is possible to obtain a correct three-dimensional recognition image in which the planar shapes of the bottom surface 7d, the lead back surface 7f, and the lead contact surface 7e are displayed with different luminances according to the respective heights.

  The three-dimensional recognition image formed in this way is subjected to recognition processing by the recognition unit 31, thereby performing a component state inspection (ST8). That is, for the three-dimensional component 7 to be inspected, the shape in a horizontal plane such as the extension length a, the lead width b, and the lead pitch p of the lead 7b shown in FIG. Is inspected. Then, by comparing the inspection result with the inspection data stored in the storage unit 32, it is determined whether or not the component state is normal (ST9). If it is determined that the component state is normal, 3D component recognition is terminated (ST11), and the process proceeds to the next operation step for component mounting operation. If it is determined in (ST8) that the component state is not normal, an error notification is performed by the notification means of the input / output unit 33 (ST10).

  As described above, in the three-dimensional image formation for the three-dimensional component shown in the present embodiment, the inclination angle of the light receiving surface with respect to the measurement target surface arranged symmetrically with respect to the incident direction on the measurement target surface 7P. Has two pairs of position detection element groups 25A and 25B that are different for each pair, and the position detection unit 25 that detects the light reception position of the reflected light from the measurement target surface of the scanning light, and each position detection element receives light. The magnitude of the difference between the received light amount detection unit 34 for determining whether the amount of light is within a predetermined range and the received light position detection result of the reflected light by the position detection elements belonging to the same position detection element group is a predetermined reference value. A light reception position detection result determination unit 35 that determines whether or not the light reception position detection result is below. Based on the light reception position detection result of the position detection unit 25, the determination results of the light reception amount determination unit 34 and the light reception position detection result determination unit 35 are taken into account. 3 of the measurement target surface 7P It is obtained by the structure forming the original recognition image. Thereby, even when the amount of received light changes greatly, a stable three-dimensional recognition image can be formed and a correct component recognition result can be obtained.

  The image forming apparatus, the image forming method, and the component mounting apparatus according to the present invention have an effect that a stable three-dimensional recognition image can be formed and a correct component recognition result can be obtained. This is useful for applications that perform shape inspection and position correction of electronic components in the apparatus.

DESCRIPTION OF SYMBOLS 1 Component mounting apparatus 2 Substrate conveyance mechanism 3 Substrate 4A, 4B Component supply part 5 Tray feeder 6 Component tray 7 Three-dimensional part 7a Main body part 7b Lead 7P Measurement object surface 11 Mounting head 15 3D sensor 21 Laser light source part 23 Polygon mirror 24 fθ Lens 25 Position detection unit 25A First position detection element group 25B Second position detection element group 25AR, 25AL First PSD
25BR, 25BL 2nd PSD

Claims (3)

By receiving reflected light of the light irradiated on the measurement target surface of the component, a three-dimensional recognition image representing height information is formed by the brightness of each pixel in the two-dimensional image indicating the plane information of the measurement target surface. An image forming apparatus that
Scanning means for scanning the light generated by the light generating means in the main scanning direction;
A scanning light incident means for causing the scanned scanning light to enter the measurement target surface that moves relative to the sub-scanning direction orthogonal to the main scanning direction from a predetermined incident direction;
Each of the two position detection element groups is composed of a pair of position detection elements arranged symmetrically with respect to the incident direction, and the inclination angle of the light receiving surface of the position detection element with respect to the measurement target surface is in each pair. And a second position detection element group having a smaller inclination angle and a second position detection element group having a larger inclination angle, the reflected light from the measurement target surface of the scanning light. A position detection unit that detects a light receiving position by each position detection element of the two position detection element groups;
A received light amount determination unit that determines whether or not the amount of light received by each of the position detection elements is within a predetermined range;
A light receiving position detection result determining unit that determines whether or not the magnitude of the difference in the light receiving position detection result of the reflected light by the position detecting elements belonging to the same position detecting element group is equal to or less than a predetermined reference value;
An image forming unit that forms the three-dimensional recognition image of the measurement target surface in consideration of the determination results of the light reception amount determination unit and the light reception position detection result determination unit based on the light reception position detection result of the position detection unit;
In the image forming unit, the received light amount determining unit determines that the amount of light received by each position detecting element of the first position detecting element group is within the predetermined range, and the first position detecting element If the light receiving position detection result determination unit determines that the difference between the light receiving position detection results in the group is within the predetermined reference value, the first light receiving position detection result for the scanning region is the first light receiving position detection result. Adopting the light reception position detection result by the position detection element group,
Wherein each position detection element of the first position detecting element group is determined by the light receiving amount determining unit exceeds at least one said predetermined range of said amount of received light, or the first position detecting element group If the light reception position detection result determination unit determines that the magnitude of the difference in the light reception position detection result exceeds the predetermined reference value, the second position detection is performed as the light reception position detection result for the scanning region. An image forming apparatus characterized in that the three-dimensional recognition image is formed by using a light reception position detection result by an element group. By receiving reflected light of the light irradiated on the measurement target surface of the component, a three-dimensional recognition image representing height information is formed by the brightness of each pixel in the two-dimensional image indicating the plane information of the measurement target surface. An image forming method
A scanning step of scanning the light generated by the light generating means in the main scanning direction;
A scanning light incident step in which the scanned scanning light is incident on the measurement target surface that is relatively moved in the sub-scanning direction orthogonal to the main scanning direction from a predetermined incident direction;
Each of the two position detection element groups is composed of a pair of position detection elements arranged symmetrically with respect to the incident direction, and the inclination angle of the light receiving surface of the position detection element with respect to the measurement target surface is in each pair. And a second position detection element group having a smaller inclination angle and a second position detection element group having a larger inclination angle, the reflected light from the measurement target surface of the scanning light. A position detection step of detecting a light reception position of reflected light from the measurement target surface of the scanning light by a position detection unit that detects a light reception position by each position detection element of the two position detection element groups;
A received light amount determination step for determining whether or not the amount of light received by each of the position detection elements is within a predetermined range;
A light reception position detection result determination step for determining whether or not the magnitude of the difference in the light reception position detection result of the reflected light by the position detection elements belonging to the same position detection element group is equal to or less than a predetermined reference value;
An image forming step of forming the three-dimensional recognition image of the measurement target surface in consideration of the determination result in the received light amount determination step and the received light position detection result determination step based on the received light position detection result in the position detection step,
In the received light amount determination step, it is determined that the amount of light received by each position detection element of the first position detection element group is within the predetermined range, and in the received light position detection result determination step, the first light amount is determined. If it is determined that the magnitude of the difference between the light reception position detection results in the position detection element group is within the predetermined reference value, the light reception position detection result for the scanning site is determined by the first position detection element group. Using the light receiving position detection result to form the three-dimensional recognition image,
Wherein it is determined that at least one of the amount of light each position detecting element is received in the first position detecting element group in the light receiving amount determining step exceeds a predetermined range, in and the light receiving position detection result determination step If it is determined that the magnitude of the difference between the light reception position detection results in the first position detection element group exceeds the predetermined reference value, the second position detection is performed as a light reception position detection result for the scanning region. An image forming method, wherein the three-dimensional recognition image is formed by using a light reception position detection result by an element group. A component mounting apparatus for mounting a component taken out from a component supply unit on a substrate held by a substrate holding unit,
A component mounting mechanism for removing a component from the component supply unit by moving a mounting head and mounting the component on the substrate;
By receiving the reflected light of the light irradiated on the measurement target surface of the component held by the mounting head, height information is obtained according to the brightness of each pixel in the two-dimensional image indicating the plane information of the measurement target surface. An image forming apparatus for forming a three-dimensional recognition image representing
A recognition unit for recognizing the position and height of the electrode unit of the component based on the three-dimensional recognition image formed by the image forming apparatus, and a control unit for controlling the component mounting mechanism and the image forming apparatus.
The image forming apparatus scans the scanning target with respect to a scanning unit that scans the light generated by the light generating unit in a main scanning direction, and the measurement target surface that relatively moves in a sub scanning direction orthogonal to the main scanning direction. Scanning light incident means for making the scanned light incident from a predetermined incident direction;
Each of the two position detection element groups is composed of a pair of position detection elements arranged symmetrically with respect to the incident direction, and the inclination angle of the light receiving surface of the position detection element with respect to the measurement target surface is in each pair. And a second position detection element group having a smaller inclination angle and a second position detection element group having a larger inclination angle, the reflected light from the measurement target surface of the scanning light. A position detection unit that detects a light receiving position by each position detection element of the two position detection element groups;
Difference between the received light amount determination unit for determining whether or not the amount of light received by each position detection element is within a predetermined range, and the detection result of the received light position of the reflected light by the position detection elements belonging to the same position detection element group A light receiving position detection result determination unit for determining whether or not the magnitude of the light receiving position is equal to or less than a predetermined reference value;
An image forming unit that forms the three-dimensional recognition image of the measurement target surface in consideration of the determination results of the light reception amount determination unit and the light reception position detection result determination unit based on the light reception position detection result of the position detection unit, In the image forming unit, the received light amount determination unit determines that the amount of light received by each position detection element of the first position detection element group is within the predetermined range, and the first position detection element group If the light receiving position detection result determination unit determines that the magnitude of the difference in the light receiving position detection result is within the predetermined reference value, the first position is obtained as the light receiving position detection result for the scanning site. Adopting the detection position detection result by the detection element group,
Wherein each position detection element of the first position detecting element group is determined by the light receiving amount determining unit exceeds at least one said predetermined range of said amount of received light, or the first position detecting element group If the light reception position detection result determination unit determines that the magnitude of the difference in the light reception position detection result exceeds the predetermined reference value, the second position detection is performed as the light reception position detection result for the scanning region. A component mounting apparatus, wherein the three-dimensional recognition image is formed by using a light reception position detection result by an element group.

Images