JP5396695B2 - Levitation unit and levitating transfer device - Google Patents

Description

  The present invention relates to a levitation unit that levitates a thin plate such as a glass substrate with a fluid such as compressed air, and a levitation conveyance device that conveys the thin plate in the conveyance direction under the state of levitation.

  In recent years, various developments have been made on the levitation conveyance device, and the applicant of the present application has already filed an application (see Patent Document 1) as the prior art of the levitation conveyance device, and the configuration of the levitation conveyance device according to this prior art is as follows. It becomes as follows.

  That is, the levitation transport apparatus according to the prior art includes a base, and the base is provided with a transport unit that transports the thin plate in the transport direction. In addition, a plurality of levitation units that float the thin plate are arranged at intervals in the transport direction on the base, and a frame-like nozzle that ejects compressed air as a fluid is disposed on the upper surface of each levitation unit. Each nozzle is formed, and each nozzle is configured to be inclined toward the center of the unit with respect to the vertical direction.

  Accordingly, by appropriately operating the transport unit while jetting compressed air from each nozzle, the thin plate loaded into the levitation transport device can be transported in the transport direction under the state of being levitated.

Here, since each frame-shaped nozzle is configured to incline toward the unit center with respect to the vertical direction, the area surrounded by the nozzles (nozzle inner area) on the upper surface of each floating unit and the back surface of the thin plate In between, an air reservoir layer (fluid reservoir layer) having a substantially uniform pressure can be generated. Thereby, the supporting force by compressed air is fully exhibited, and the floating performance of the floating unit (in other words, the floating performance of the floating conveyance device) can be improved.
JP 2006-182563 A

  By the way, as described above, in consideration of the improvement of the flying performance of the flying unit, if each nozzle is configured to be inclined toward the unit center with respect to the vertical direction, the outer edge side of each nozzle has an acute angle. Further, as the thickness of the thin plate is reduced, the rigidity of the thin plate is reduced, and the deformation of the thin plate during conveyance is increased. Therefore, when a very thin thin plate is transported in the transport direction, if a part of the thin plate interferes with the outer edge of the nozzle, there is a problem that the thin plate is easily damaged.

  Accordingly, an object of the present invention is to provide a floating unit and a floating conveying apparatus having a novel configuration that can solve the above-described problems.

In order to solve the above-mentioned problems, the inventor of the present invention has repeated various experiments and the like, and as a result, the frame-shaped nozzle formed on the upper surface of the floating unit is inclined toward the unit center with respect to the vertical direction. In this case, if chamfering is formed on the outer edge of the nozzle, the outer edge side of the nozzle is made not to have an acute angle, and the area surrounded by the nozzle (nozzle inner area) on the upper surface of the floating unit and the back surface of the thin plate In the meantime, a novel finding that a fluid reservoir layer having a substantially uniform and stable pressure can be generated can be obtained, and the present invention has been completed. This new finding is considered to be due to the fact that the fluid ejected from the nozzle easily flows out of the inner region of the nozzle, and the flow of the fluid in the fluid reservoir layer is stabilized.

A feature of the present invention is that it is used in a levitation transport device that transports a thin plate in the transport direction under a state in which the thin plate is floated, and in the levitation unit that levitates the thin plate with a fluid, a frame-like nozzle that ejects fluid is formed on the upper surface. The nozzle is configured to incline toward the unit center with respect to the vertical direction, and the fluid ejected from the nozzle flows out of the nozzle inner region surrounded by the nozzle to the outer edge of the nozzle on the upper surface. The gist is that a frame-like chamfering for facilitating is formed along the outer edge of the nozzle, and the chamfering is inclined to the outside of the nozzle inner region with respect to the vertical direction .

In the claims and specification of the present application, “provided” means not only directly provided but also indirectly provided via an intermediate member such as a bracket. there, the term "fluid", compressed air, argon gas, other gases such as nitrogen gas, Ru meaning der containing liquid such as the treatment liquid.

According to the characteristics of the present invention, the frame-shaped nozzles are each configured to be inclined toward the unit center with respect to the vertical direction, and the chamfer is formed on the outer edge of the nozzle on the upper surface. In consideration of knowledge, a fluid reservoir layer having a substantially uniform and stable pressure is formed between the nozzle inner region on the upper surface of the levitation unit and the back surface of the thin plate, without making the outer edge side of the nozzle an acute angle. Can be generated.

  As described above, according to the present invention, a pressure that is substantially uniform and stable between the nozzle inner region on the upper surface of the levitation unit and the back surface of the thin plate, without making the outer edge side of the nozzle an acute angle. In the case of transporting an extremely thin thin plate in the transport direction, even if a part of the thin plate interferes with the outer edge of the nozzle, damage to the thin plate can be sufficiently suppressed. It is possible to sufficiently improve the ascent performance of the levitation unit by fully exerting the supporting force by the fluid.

  An embodiment of the present invention will be described with reference to FIGS.

  Here, FIG. 1 is a partial plan view of a levitation transport apparatus according to an embodiment of the present invention, FIG. 2 is an enlarged view taken along line II-II in FIG. 1, and FIG. 3 is according to an embodiment of the present invention. FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 3, FIG. 5 is a cross-sectional view taken along line VV in FIG. 3, and FIG. 6 is another diagram according to the embodiment of the present invention. FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. 6. In the drawings, “FF” indicates the forward direction, “FR” indicates the backward direction, “L” indicates the left direction, and “R” indicates the right direction.

  As shown in FIGS. 1 and 2, a levitating and conveying apparatus 1 according to an embodiment of the present invention is an apparatus that conveys a thin plate W such as a glass substrate in a conveying direction (forward direction) in a state where the thin plate W is levitated. And a base 3 extending in the front-rear direction.

  The base 3 is provided with a transport unit 5 that transports the thin plate W in the transport direction. The specific configuration of the transport unit 5 is as follows.

  That is, a plurality of rotatable support rollers 7 (a plurality of left-side support rollers 7 and a plurality of right-side support rollers 7) that support the end portions of the thin plate W are provided near the left end portion and the right end portion of the base 3. The brackets 9 are provided at intervals in the front-rear direction, and the worm wheels 11 are integrally provided on the rotation shafts 7 s of the support rollers 7. In addition, drive shafts 13 extending in the front-rear direction are provided at the left end portion and the right end portion of the base 3 so as to be rotatable via bearings (not shown) or the like. Each has a plurality of worms 15 meshed with corresponding worm wheels 11. And the conveyance motor 17 which rotates the corresponding drive shaft 13 is each provided in the front left part and front side right part of the base 3 via the bracket 19, The output shaft 17s of each conveyance motor 17 is corresponding. The drive shaft 13 is integrally connected to the front end portion of the drive shaft 13 via a coupling or the like.

  Instead of rotating the two drive shafts 13 by the two transport motors 17, the two drive shafts 13 may be rotated by the single transport motor 17. Further, instead of the transport unit 5 including the plurality of support rollers 7 and the transport motor 17, another transport unit including a clamper that holds the end of the thin plate W and can move in the transport direction may be used. I do not care.

  Between the plurality of left-side support rollers 7 and the plurality of right-side support rollers 7 on the base 3, a plurality of levitation units 21 that levitate the thin plate W with compressed air (an example of fluid) are provided in the front-rear direction and the left-right direction (in other words, In this case, they are arranged at intervals in the transport direction and the direction orthogonal to the transport direction. And the concrete structure of each levitation unit 21 is as follows.

  That is, as shown in FIGS. 3 to 5, the base 3 is provided with a unit base member 23 of the floating unit 21 via the bracket 25, and this unit base member 23 receives compressed air inside. A chamber 27 that can be supplied is provided. The chamber 27 of the unit base member 23 is connected to a compressed air supply source (not shown) such as a blower.

  A frame-shaped lower outer member 29 is provided above the unit base member 23, and an island member 31 is integrally provided inside the lower outer member 29. Further, the upper part of the island member 31 protrudes upward from the lower shell member 29, and the island member 31 is approximately 45 toward the unit center side (center side of the floating unit 21) with respect to the vertical direction outside the upper part. The outer inclined surface 31a is inclined at a predetermined angle.

  A frame-shaped upper outer member 33 is provided on the upper side of the lower outer member 29 so as to surround the island member 31. The upper outer member 33 is approximately 45 degrees toward the unit center side in the vertical direction. It has an inclined inner inclined surface 33a. A plurality of positioning projections 35 that can come into contact with the outer inclined surface 31 a of the island member 31 are integrally provided on the inner inclined surface 33 a of the upper outer member 33. Instead of the positioning protrusion 35 being integrally provided on the inner inclined surface 33 a of the upper outer member 33, a positioning protrusion that can contact the inner inclined surface 33 a of the upper outer member 33 is provided on the outer inclined surface 31 a of the island member 31. You may make it provide integrally.

  A frame-like nozzle 37 that ejects compressed air is defined between the inner inclined surface 33a of the upper shell member 33 and the outer inclined surface 31a of the island member 31, in other words, the upper surface of the floating unit 21. Is formed with a frame-shaped nozzle 37, and the nozzle 37 communicates with the chamber 27. Further, as described above, since the outer inclined surface 31a of the island member 31 and the inner inclined surface 33a of the upper outer member 33 are inclined approximately 45 degrees toward the unit center with respect to the vertical direction, the nozzle 37 is arranged in the vertical direction. It is comprised so that it may incline about 45 degree | times toward the unit center side.

  And in embodiment of this invention, it is making the principal part that the chamfer 39 is each formed in the outer edge of the nozzle 37 of each floating unit 21. FIG. This main part is the case where the inventor of the present invention repeats various experiments and the like, and the frame-shaped nozzle 37 formed on the upper surface of the floating unit 21 is inclined to the unit center side with respect to the vertical direction. In addition, when a notch (including chamfer 39) is formed in the outer edge of the nozzle 37, the outer edge side of the nozzle 37 is prevented from becoming an acute angle, and the region surrounded by the nozzle 37 on the upper surface of the levitation unit 21 (inner side of the nozzle) This is based on a novel finding that an air reservoir layer (fluid reservoir layer) S having a substantially uniform and stable pressure can be generated between the region) and the back surface of the thin plate W. In addition, this new knowledge is that the compressed air ejected from the nozzle 37 easily flows out to the outside of the nozzle inner area (opposite the unit center side), and the flow of the compressed air in the air reservoir layer S is stabilized. It is thought to be due to.

  Here, in the levitation unit 21 according to the embodiment of the present invention, the cross-sectional shape of the letter shape is exhibited by the inner edge of the nozzle 37 and the chamfer 39. As shown in FIGS. 6 and 7, in the levitating unit 21 of another aspect according to the embodiment of the present invention, a V-shaped cross-sectional shape is exhibited by the inner edge of the nozzle 37 and the chamfer 39. .

  Then, the effect | action and effect of embodiment of this invention are demonstrated.

  The compressed air is supplied to the chamber 27 of each unit base member 23 by the compressed air supply source, and the compressed air is ejected from each nozzle 37. Further, by rotating the two drive shafts 13 synchronously by driving the two conveyance motors 17, a plurality of left support rollers 7 and a plurality of right support rollers 7 are engaged by the meshing action of the worm wheel 11 and the worm 15. Rotate in one direction. Thereby, the thin plate W carried into the levitation conveyance apparatus 1 can be conveyed in the conveyance direction under the state of being levitated (a general action of the levitation conveyance apparatus 1).

  In addition to the general operation of the levitation conveyance device 1, each frame-shaped nozzle 37 is configured to be inclined 45 degrees toward the unit center with respect to the vertical direction, and a chamfer 39 is formed on the outer edge of each nozzle 37. Therefore, in consideration of the above-described new knowledge, the outer edge side of each nozzle 37 is not made to have an acute angle, and between the nozzle inner region on the upper surface of each floating unit 21 and the back surface of the thin plate W, The air reservoir layer S having a substantially uniform and stable pressure can be generated.

  Therefore, according to the embodiment of the present invention, when a very thin thin plate W is transported in the transport direction, damage to the thin plate W can be sufficiently suppressed even if a part of the thin plate W interferes with the outer edge of the nozzle 37. At the same time, the support force by the compressed air can be sufficiently exerted to improve the flying performance of the flying unit 21 (in other words, the flying performance of the flying conveyance device 1).

  In addition, this invention is not restricted to description of the above-mentioned embodiment, In addition, it can implement in a various aspect. Further, the scope of rights encompassed by the present invention is not limited to these embodiments.

It is a partial top view of the levitation conveyance apparatus which concerns on embodiment of this invention. It is an enlarged view along the II-II line in FIG. It is a top view of the levitation unit concerning the embodiment of the present invention. FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 3, showing a state where a thin plate is levitated. It is sectional drawing along the VV line in FIG. 3, Comprising: The state which floated the thin plate is shown. It is a top view of the levitation unit of another mode concerning the embodiment of the present invention. It is sectional drawing along the VII-VII line in FIG. 6, Comprising: The state which floated the thin plate is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS S Air reservoir layer W Thin plate 1 Levitation conveyance apparatus 3 Base 5 Conveyance unit 21 Levitation unit 23 Unit base member 27 Chamber 297 Lower outer member 31 Island member 31a Outer inclined surface 33 Upper outer member 33a Inner inclined surface 35 Positioning protrusion 37 Nozzle 39 chamfer

Claims (2)

In a levitation unit that is used in a levitation conveyance device that conveys a thin plate in the conveyance direction under a state where the thin plate is levitated ,
Frame-shaped nozzles for ejecting fluid are respectively formed on the upper surface, and the nozzles are configured to be inclined toward the center of the unit with respect to the vertical direction, and the fluid ejected from the nozzles on the outer edge of the nozzle on the upper surface A frame-like chamfer for facilitating the outflow of the nozzle inner area surrounded by the nozzles is formed along the outer edge of the nozzle, and the chamfer is inclined to the outside of the nozzle inner area with respect to the vertical direction. A levitation unit characterized in that it is constructed . In the levitation transport device that transports in the transport direction under the condition that the thin plate is levitated,
The base,
A transport unit which is provided on the base and transports the thin plate in the transport direction;
A levitation conveyance apparatus comprising a plurality of levitation units disposed on the base along a conveyance direction and having the configuration according to claim 1 .

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