JP4613800B2 - Levitation device and transfer device - Google Patents

Description

  The present invention relates to a levitation device and a conveyance device, and more particularly to a device that levitates and conveys an object using a fluid such as compressed air.

Conventionally, a fluid (for example, compressed air) compressed through a special nozzle or a porous member is jetted between a workpiece (object) and a floating unit (levitation device; base member) to float the workpiece. A workpiece floating device and a workpiece transfer device using this floating device are known (see, for example, Patent Document 1 and Patent Document 2).
International Publication No. WO03 / 060961 Pamphlet JP 2000-62950 A

  By the way, in the conventional levitation apparatus, the formation of the pressure for levitating the work depends on the flow path pressure loss between the work and the levitation unit, that is, from the levitation unit (nozzle or porous member). When the jetted compressed air flows between the workpiece and the levitation unit until the compressed air is released to the atmosphere, the workpiece is supported by the flowing compressed air. There is a problem that it is difficult to lift the workpiece with a uniform force because the air pressure is different.

  The present invention has been made in view of the above problems, and in an object levitation device that floats an object using a fluid or a conveyance device that conveys an object while levitation, the object is levitated with a substantially uniform force. It is an object of the present invention to provide a levitation device that can carry out an object, and a conveyance device that can convey an object while levitation with a substantially uniform force.

The invention according to claim 1 is a transport device that transports an object having a planar portion in a transport direction while levitating an object, and is arranged in the transport direction and is levitated using a fluid. And a conveying force applying means for applying a force to the object to convey the object levitated by the levitating device, each levitating device including a base member having a planar upper surface, and the base An annular fluid ejection hole that is provided on the upper surface of the member and ejects fluid, and at least the upper surface side of the base member in the fluid ejection hole of each levitation device extends over the entire circumference of the fluid ejection hole. The upper surface of the base member is directed to the inside of a region surrounded by the opening of the fluid ejection hole, and the base member of each levitation device includes a lower member and the lower member. Provided in the center of the top surface of the An inner member having a lower surface and an outer member provided on the upper surface of the lower member so as to surround the inner member, and the fluid ejection hole is formed between the inner member and the outer member, The height dimension on the inflow side of the fluid ejection hole between the lower surface of the inner member and the upper surface of the lower member is larger than the width dimension of the fluid ejection hole.

According to a second aspect of the present invention, in the transfer device according to the first aspect, a width of the fluid ejection hole is defined by a protrusion provided on at least one of the inner member and the outer member. It is comprised as follows.

According to a third aspect of the present invention, in the conveying device according to the first or second aspect, a throttle element is provided in the fluid ejection hole in each levitation device.

According to a fourth aspect of the present invention, there is provided a levitation apparatus for levitating an object having a planar portion using a fluid, a base member having a planar upper surface, and an upper surface of the base member. An annular fluid ejection hole provided along the outer periphery of the upper surface, and at least the upper surface side of the base member in the fluid ejection hole extends over the entire circumference of the fluid ejection hole. It faces the inside of a region surrounded by the opening of the fluid ejection hole in the upper surface of the member, and the base member is provided on the lower member and the upper surface central portion of the lower member and is flat. An inner member having a lower surface and an outer member provided on the upper surface of the lower member so as to surround the inner member, and the fluid ejection hole is formed between the inner member and the outer member, The lower surface of the inner member Characterized in that it is larger than the width dimension of the height of the inflow side of the fluid jetting holes be between the upper surface of the lower member is the fluid jetting holes.

According to a fifth aspect of the present invention, in the levitation device according to the fourth aspect, a width of the fluid ejection hole is defined by a protrusion provided on at least one of the inner member and the outer member. It is comprised as follows.

According to a sixth aspect of the present invention, in the transfer device according to the fourth or fifth aspect, a throttle element is provided in the fluid ejection hole.

  Advantageous Effects of Invention According to the present invention, there is an effect that an object can be levitated with a substantially uniform force in an object levitating apparatus that levitates an object using a fluid and a conveying apparatus that conveys an object while levitating.

[First Embodiment]
FIG. 1 is a perspective view showing a schematic configuration of a transfer apparatus 1 according to the first embodiment of the present invention, FIG. 2 is a plan view showing a schematic configuration of the transfer apparatus 1, and FIG. It is a figure which shows the III arrow in FIG.

  The conveyance device 1 is configured to horizontally move an object (for example, a work such as a thin rectangular glass substrate for an LCD (liquid crystal display)) W using a fluid (for example, air) having a planar portion. It is a device that conveys in one direction (the direction of arrow AR1), and includes a levitation device 3 and a conveyance force applying means 5.

  When the object to be transported by the transport device 1 is a thin glass substrate for LCD or the like that needs to be transported in a clean environment, the transport device 1 is used in a clean environment such as a clean room. Is done. Hereinafter, the glass substrate W will be described as an example of the object to be conveyed.

  The levitation device 3 includes a base member 7 having a flat upper surface, and the base member 7 is provided with an annular fluid ejection hole 9 for ejecting compressed air.

  The fluid ejection hole 9 is provided on the upper surface of the base member 7 so that the opening 11 substantially surrounds a predetermined region (a region indicated by hatching in FIG. 2) 13 of the upper surface of the base member 7. .

  Here, the levitation device 3 will be described in more detail.

  4A is a cross-sectional view of the levitation device 3 (showing the IVA-IVB cross section in FIG. 2), and FIG. 4B is a pressure distribution of the levitation device 3 corresponding to FIG. 4A. FIG.

  As shown in FIGS. 1, 2, and 4 (a), the fluid ejection hole 9 extends in a narrow width from the opening 11 to a predetermined depth and is formed in an annular shape.

Further, the fluid ejection hole 9 is located at least on the upper surface side (at least in the vicinity of the upper surface) of the base member 7 along the entire circumference of the fluid ejection hole 9 as shown in FIG. so that the face. In other words, when viewed in a plan view, the deep part of the fluid ejection hole 9 is located farther from the predetermined region 13 than the shallow part.

  Further, the base member edge 15 which is an annular portion existing outside the predetermined region 13 is formed to have a narrow width when seen in a plan view.

  Further, the transport device 1 includes a plurality of levitation devices 3, and each base member 7 is close to a base (not shown) (a base of the transport device 1), for example, and has a planar portion on the upper surface. A plurality of them are arranged in the horizontal direction so as to exist in one plane.

  The edge 15 of the base member 7 is formed to have a narrow width at least at each end in the transport direction of the glass substrate W, and the base members 7 are mutually connected at least in the transport direction of the glass substrate W. It is only necessary to be close.

  More specifically, when viewed in plan, the base member 7 of the levitation device 3 is formed in a rectangular shape, the longitudinal direction of the base member 7 coincides with the transport direction of the glass substrate W, and the width direction of the base member 7 is It is provided so as to coincide with the width direction of the conveying device 1 (see FIGS. 1 and 2).

Further, as shown in FIG. 4A, the base member 7 is integrated with a lower member 19 having an annular groove 17 on the upper surface and a central portion of the lower member 19 on the upper surface of the lower member 19. An inner member 21 having a flat lower surface and an outer member 23 slightly spaced from the inner member 21 so as to surround the inner member 21 with the upper surface of the lower member 19. It is configured.

  In addition, the IVC-IVD cross section in FIG. 2 is configured similarly to the cross section shown in FIG.

An annular fluid ejection hole 9 that is elongated and faces inward is formed by a gap between the inner member 21 and the outer member 23. As clearly shown in FIG. 4, the height dimension on the inflow side of the fluid ejection hole 9 between the lower surface of the inner member 21 and the upper surface of the lower member 19 is larger than the width dimension of the fluid ejection hole 9. It has become.

  Also, compressed air is supplied from a compressed air supply device (not shown) to the groove 17 of the lower member 19, and the supplied compressed air is ejected from the fluid ejection hole 9.

  Next, the transport force applying means 5 for applying a horizontal force to the glass substrate W in order to transport the glass substrate W levitated by the levitation device 3 will be described in detail.

  The conveying force applying means 5 includes a plurality of rollers 27 as shown in FIGS. These rollers 27 are arranged on both sides of the transport device 1 in the transport direction of the glass substrate W, and are provided to be rotatable with respect to the base of the transport device 1. Each of these rollers 27 is rotated at the same rotational speed by an actuator such as a motor (not shown) via a power transmission member (not shown) such as a chain.

  The upper end portion of each roller 27 exists on one horizontal plane, and the glass substrate W is placed on each roller 27, and each roller 27 rotates to convey the glass substrate W. .

  As shown in FIG. 3, the upper end of each roller 27 is provided slightly above the upper surface of the base member 7.

  In addition, you may comprise the conveyance force provision means 5 with a belt conveyor instead of comprising with a roller as mentioned above, or comprised so that the glass substrate W may be clamped and conveyed.

  Next, the operation of the transport device 1 will be described.

  As shown in FIG. 1, when the glass substrate W is being transported by the transport device 1, the glass substrate W is levitated by the levitation device 3.

  This floating state will be described in detail.

  As shown in FIG. 4A, the compressed air is ejected to the upper surface of the base member 7 through the fluid ejection hole 9.

  An annular air curtain is formed by the compressed air ejected from the annular fluid ejection hole 9, and as shown in FIG. 4B, a pressure forming portion A having a substantially constant pressure is formed in the predetermined region 13. . Then, the glass substrate W floats supported by the pressure forming part A.

  According to the levitation device 3, the opening 11 of the fluid ejection hole 9 is provided so as to substantially surround the predetermined region 13 on the upper surface of the base member 7, so that the glass substrate W is placed on the base member 7. When it is placed and compressed air is ejected from the opening 11, an annular air curtain is formed by the fluid ejection hole 9.

  As in the prior art, the generation of pressure for floating the glass substrate W hardly depends on the flow path pressure loss between the glass substrate W and the base member. Since the pressure forming portion A, which is a region that is supported by a constant fluid pressure, is formed between the glass substrate W and the base member 7 in the predetermined region 13, the glass substrate W is applied with a substantially uniform force. Can surface.

  Since the glass substrate W can be floated with a substantially uniform force in this way, the deflection of the glass substrate W can be reduced when the glass substrate W with low rigidity is floating.

  Further, unlike the conventional case where the glass substrate is supported depending on the flow path pressure loss, the glass substrate W is supported by the pressure forming portion A in which the air pressure is substantially constant, so that the compressed air is reduced. This makes it easy to increase the distance between the glass substrate W and the base member 7, so that the glass substrate W can be floated greatly.

  Since the distance between the glass substrate W and the base member 7 can be increased in this way, the possibility that the glass substrate W contacts the base member 7 can be avoided.

  Further, according to the levitation device 3, since the glass substrate W is supported by the pressure forming unit A with a substantially uniform force, the end portion of the thin plate-like glass substrate W having a small rigidity is separated from the pressure forming unit A. Even if it comes off, the end portion is difficult to contact the base member 7.

  Further, according to the levitation device 3, the pressure forming portion A is formed by a device having a simple configuration in which the opening 11 of the fluid ejection hole 9 is provided so as to substantially surround the predetermined region 13 on the upper surface of the base member 7. Can be formed.

  Further, according to the levitation device 3, the fluid ejection hole 9 is opened in the base member 7 so as to face the inside of the predetermined region 13 at least near the upper surface of the base member 7. The pressure forming portion A can be easily formed in the region 13, and the pressure forming portion A can be formed efficiently.

  Further, according to the levitation device 3, the fluid ejection hole 9 extends long with a narrow width and is formed in an annular shape, so that the base member 7 for forming the fluid ejection hole 9 can be easily processed and fluid The ejection hole 9 is less likely to be clogged with foreign matter.

  Further, according to the levitation device 3, the glass substrate W is supported by the pressure forming part A that generates a substantially uniform pressure, and the base member edge 15 in which the pressure forming part A is not formed has a narrow width. Since the base members 7 are provided close to each other, when the glass substrate W having a low rigidity supported by the compressed air on the base member 7 is transferred to the next base member 7 Even so, the bending of the end portion of the glass substrate W can be reduced, and the glass substrate W can be prevented from coming into contact with the base member 7.

  Further, according to the transfer device 1, the glass substrate W is supported by the pressure forming part A that generates a substantially uniform pressure, and the base member edge 15 in which the pressure forming part A is not formed is It is formed in a narrow width at each end in the transport direction of the glass substrate W, and since the base member 7 is provided close to each other in the transport direction of the glass substrate W, it is compressed on the base member 7. Even when the glass substrate W with low rigidity supported by air is transported and transferred to the next base member 7, it is possible to reduce the bending of the end portion of the glass substrate W, and the glass substrate W Can be prevented from contacting the base member 7.

  By the way, the fluid ejection hole 9 in the levitation device 3 has an opening provided on the upper surface of the base member, and when the floating object is placed on the base member with the planar portion facing downward, The fluid is formed so that a pressure forming portion (a region having a predetermined area when viewed in plan) is formed (between the object and the base member) to support the object with a substantially constant fluid pressure. It is an example of the fluid ejection hole which ejects.

  That is, as shown in FIG. 5 (a diagram showing a modification of the fluid ejection hole), the installation angle of the fluid ejection hole 9a may be substantially perpendicular to the upper surface of the base member 7a (the lower surface of the glass substrate W). As shown in FIG. 6 (a diagram showing a variation of the fluid ejection hole), a plurality of small circular fluid ejection holes 9b are provided in an annular shape so as to be adjacent to each other so as to form a pressure forming portion. Also good.

  In the transport apparatus 1, the case where the glass substrate W is transported in the horizontal direction has been described as an example. However, when the glass substrate W is transported in a slightly inclined direction with respect to the horizontal direction, the transport apparatus is also used. 1 can be applied.

[Second Embodiment]
FIG. 7 is a perspective view showing a schematic configuration of a levitation device 50 used in a transport device according to a second embodiment of the present invention, and FIG. 8 shows a VIIIA-VIIIA cross section and a VIIIB-VIIIB cross section in FIG. It is a figure shown, and is a figure corresponding to Fig.4 (a). FIG. 9 is a perspective view showing a state where the levitation device 50 is disassembled.

  The floating device 50 of the transfer device according to the second embodiment is different from the floating device 3 of the transfer device according to the first embodiment in that the width of the fluid ejection hole 9 is defined by the protrusion 51, and other points. Is configured in substantially the same manner as the levitation device 3 and has substantially the same effect.

  That is, the fluid ejection hole 9 of the levitation device 50 is formed between the first member (inner member 21) and the second member (outer member 23a). The width of the fluid ejection hole 9 is defined by a minute protrusion 51 provided on at least one member.

  Explaining with an example, a lower member (a lower member configured similarly to the lower member according to the first embodiment) 19 is formed in a rectangular plate shape. A rectangular annular groove 17 is provided on the upper surface.

  The inner member 21 (an inner member configured in the same manner as the inner member according to the first embodiment) 21 is formed in the shape of an equilateral quadrangular pyramid having the same length of each leg (length of four oblique sides). ing.

  The outer member 23 a has the same thickness (height) as the inner member 21 and is formed in a “B” shape. On the four inner slopes 53 of the outer member 23a, minute protrusions 51 are integrally provided.

  More specifically, a projection 51A having a narrow width and extending in the height direction of the slope (the direction of air flow) is provided at substantially the center in the longitudinal direction of the first slope 53A of the outer member 23a. . Similarly, a protrusion 51B is also provided on the second slope 53B adjacent to the first slope 53A, and the third slope 53C adjacent to the second slope 53B is also provided. The protrusion 51C is provided, and the protrusion 51D is also provided on the fourth slope 53D adjacent to the first slope 53A and the third slope 53C.

  And in the state which assembled | attached the inner member 21 and the outer member 23a to the lower member 19 using fastening members, such as a volt | bolt, and completed the floating apparatus 50, each slope 55 (55A, 55B, 55C) of the inner member 21 is carried out. 55D), the slopes 53 (53A, 53B, 53C, 53D) inside the outer member 23a are parallel to each other with a predetermined slight distance (a distance corresponding to the height of each projection 51). Exists in position. That is, the tip of each protrusion 51 comes into contact with each inclined surface 55 of the inner member 21, and the width of the fluid ejection hole 9 (the distance between the inclined surface 55 of the inner member 21 and the inclined surface 53 of the outer member 23a) is determined. It has become.

As can be understood from FIG. 7, the appearance of the levitation device 50 (base member 7) in which the inner member 21 and the outer member 23 a are assembled to the lower member 19 is a rectangular annular opening at the center of the upper surface. (Opening portion of fluid ejection hole 9) 11 is formed in a rectangular parallelepiped shape.

  In the levitation device 50, each protrusion 51 is formed in an elongated quadrangular prism shape, but may be formed in other forms (for example, a small rectangular parallelepiped shape or a cylindrical shape), and the position of the protrusion is at the central portion of the slope. It may be an end, and a plurality of projections may be provided on one slope.

  Furthermore, when the inner member 21 and the outer member 23a are assembled to the lower member 19, the width of the fluid ejection hole 9 (the distance between the inclined surface 55 of the inner member 21 and the inclined surface 53 of the outer member 23a) is accurately determined. It is only necessary to provide the minimum necessary protrusions that can be improved. For example, in the outer member 23a shown in FIG. 9, the protrusion 51C of the third slope 53C may be deleted and the protrusion 51D of the fourth slope 53D may be deleted.

  In the levitation device 50, the protrusion is provided only on the outer member 23a. However, the protrusion may be provided only on the inner member 21 (slope 55), or the protrusion may be provided on both the outer member 23a and the inner member 21. Good. That is, as described above, at least one of the outer member 23a and the inner member 21 may be provided with a protrusion.

  According to the levitation device 50, since the width of the fluid ejection hole 9 is defined by the protrusion 51, it becomes easy to make the width of the fluid ejection hole 9 with high accuracy, and the levitation device 50 that is easy to assemble is provided. can do.

  That is, in the levitation device according to the present invention, if the accuracy of the width of the fluid ejection hole 9 is poor and varies, the amount of air ejected from the fluid ejection hole 9 is biased. It becomes difficult to form. That is, the accuracy of the width of the fluid ejection hole 9 greatly affects the performance when the object is levitated.

  In the levitation device 3 according to the first embodiment, when the inner member 21 and the outer member 23 are assembled to the lower member 19 in order to improve the accuracy of the width of the fluid ejection hole 9, for example, a shim is attached to the fluid ejection hole 9. After installing the inner member 21 and the outer member 23 to the lower member 19 after being installed in the part, the shim was removed, and the floating device 3 provided with the fluid ejection holes 9 with good width accuracy was obtained. The method using such a shim requires a lot of time for assembly.

  In the levitation device 50, the projection 51 is provided on the outer member 23a, and the width of the fluid ejection hole 9 is determined by the projection 51. Therefore, it is not necessary to use a shim during assembly, and the width of the fluid ejection hole 9 is highly accurate. It becomes easy to make things.

  The outer member 23a is formed by, for example, injection molding of resin, but each protrusion 51 of the outer member 23a has a form in which no undercut occurs.

  By forming by injection molding, it becomes easy to integrally form the outer member 23a having the slopes 53 and the protrusions 51, the number of parts of the levitation device 50 is reduced, and the number of assembly steps can be further reduced. Note that the inner member 21 and the lower member 19 are also preferably formed by injection molding of resin.

  Subsequently, a levitation device 61 that is a modification of the levitation device 50 according to the second embodiment will be described.

  10 and 11 are views showing a state in which the levitation device 61 is disassembled, FIG. 12 is a view showing a state in which the levitation device 61 is assembled together with an arrow XII in FIG. 11, and FIG. It is a figure which shows the XIII arrow in FIG.

  The levitation device 61 includes an inner member 62 in which the lower member 19 and the inner member 21 of the levitation device 50 are integrated. In the inner member 62, instead of the groove 17, air is supplied to the fluid ejection hole 9 in a portion corresponding to the lower member 19 of the levitation device 50 and a portion corresponding to the skirt of the inner member 21 of the levitation device 50. For this purpose, a through hole 63 is provided.

  The levitation device 61 includes a support member 65 having a “U” -shaped cross section in a plane perpendicular to the longitudinal direction. Then, the inner member 62 and the outer member 23a are integrally installed so as to close the opening groove 66 on the upper portion of the supporting member 65, and between the inner member 62 and the outer member 23a thus installed (of the supporting member 65). Spacers 67 are integrally installed in the longitudinal direction), and the end portions in the longitudinal direction of the support member 65 are closed by the lid member 69, so that a space 68 is formed inside the support member 65.

  When compressed air is supplied to the space 68 from an air pressure supply source (not shown), the compressed air is ejected from the fluid ejection hole 9, and the workpiece W can be lifted as shown in FIG.

  The spacer 67 may be omitted, and only the inner member 62 and the outer member 23a may be provided side by side on the support member 65.

  In this way, by forming the support member 65 by assembling the inner member 62 and the like, it becomes easy to form a highly versatile long floating device 61. That is, the length can be easily changed at the time of manufacture and used for various conveying devices without preparing several standardized floating devices having different lengths.

  By the way, in each of the levitating devices 3, 50, 61, as shown in FIG. 14 (a diagram showing a schematic form of the outer member), the outer member 23a is formed in a “B” shape. As shown in FIG. 16, the outer member 23a may be configured by combining two “L” -shaped members, or by combining four “I” -shaped members to form the outer member 23a. It may be configured. Further, the outer member 23a may be configured by combining one “U” -shaped one and one “I” -shaped one.

[Third Embodiment]
FIG. 17 is a cross-sectional view showing a schematic configuration of a levitation device 80 used in a transport device according to a third embodiment of the present invention, and corresponds to FIG. FIG. 18 is a perspective view showing a schematic configuration of the intermediate member 81.

  The levitation device 80 of the transfer device according to the third embodiment differs from the levitation device 3 of the transfer device according to the first embodiment in that the throttle element 82 is provided in the fluid ejection hole 9. The point is configured in substantially the same manner as the levitating device 3, and has substantially the same effect.

  For example, in the levitation device 80, a thin plate-like intermediate member (non-breathable intermediate member such as resin) 81 is sandwiched between the inner member 21 and the outer member 23 and the lower member 19. A plurality of through-holes 83 having a diameter smaller than the width of the fluid ejection hole 9 are provided in a row corresponding to the fluid ejection holes 9 of the intermediate member 81, Each of the through holes 83 constitutes the throttle element 82. Since each through hole 83 has a small diameter, it is processed by, for example, photoetching.

  In addition, as the intermediate member 81, a member having air permeability such as a porous material may be adopted to constitute the throttle element 82. The porous material is preferably soft.

  According to the levitation device 80, since the throttle element 82 is provided in the fluid ejection hole 9, even if the accuracy of the width of the fluid ejection hole 9 is slightly deteriorated, the amount of air ejected from the fluid ejection hole 9 is biased. Generation | occurrence | production can be avoided and the stable pressure formation part A can be formed.

  Therefore, the levitating device 80 can be easily assembled by assembling the intermediate member 81, the inner member 21, and the outer member 23 to the lower member 19 without using shims.

  By the way, the levitation apparatus 90 which is a modification exists also in the levitation apparatus 80 of 3rd Embodiment so that the levitation apparatus 61 which is a modification may exist in the levitation apparatus 50 of 2nd Embodiment.

  FIG. 19 is a cross-sectional view showing a levitation device 90 that is a modification of the levitation device 80 according to the third embodiment, and corresponds to FIG.

  In the levitation device 90, an intermediate member 81 is integrally installed so as to close the opening groove 66 on the upper portion of the support member 65, and an inner member 62 is integrally installed on the intermediate member 81, and the inner member 62 is installed. The outer member 23 is integrally installed. Further, a spacer 67 is used as necessary.

  In the levitation device 80 and the levitation device 90 as well, the outer member 23 may be divided as shown in FIGS. 15 and 16. Further, in the levitating device 3 according to the first embodiment, a modification as shown in FIG. 13 can be considered. Furthermore, a levitation device including the protrusion 51 and the aperture element 82 can be considered.

It is a perspective view which shows schematic structure of the conveying apparatus which concerns on the 1st Embodiment of this invention. It is a top view which shows schematic structure of a conveying apparatus. It is a figure which shows the III arrow in FIG. 4A is a cross-sectional view of the levitation device (a diagram showing the IVA-IVB cross section in FIG. 2), and FIG. 4B shows the pressure distribution of the levitation device corresponding to FIG. 4A. FIG. It is a figure which shows the modification of a fluid ejection hole. It is a figure which shows the modification of a fluid ejection hole. It is a perspective view which shows schematic structure of the levitating apparatus used for the conveying apparatus which concerns on the 2nd Embodiment of this invention. It is a figure which shows the VIIIA-VIIIA cross section in FIG. 7, and a VIIIB-VIIIB cross section, and is a figure corresponding to Fig.4 (a). It is a perspective view which shows the state which decomposed | disassembled the floating apparatus. It is a figure which shows the state which decomposed | disassembled the floating apparatus. It is a figure which shows the state which decomposed | disassembled the floating apparatus. It is a figure which shows the state which assembled | attached the levitating apparatus while showing the XII arrow in FIG. It is a figure which shows the XIII arrow in FIG. It is a figure which shows the schematic form of an outer side member. It is a figure which shows the schematic form of an outer side member. It is a figure which shows the schematic form of an outer side member. It is sectional drawing which shows schematic structure of the levitating apparatus used for the conveying apparatus which concerns on the 3rd Embodiment of this invention, and is a figure corresponding to FIG. It is a perspective view which shows schematic structure of an intermediate member. It is sectional drawing which shows the levitation apparatus which is a modification of the levitation apparatus which concerns on 3rd Embodiment, and is a figure corresponding to FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Transfer apparatus 3, 50, 61, 80, 90 Levitation apparatus 5 Transfer force provision means 7, 7a Base member 9, 9a, 9b Fluid ejection hole 11 Opening part 13 Area | region 15 Base member edge 21 Inner member 23, 23a Outer member 51 Projection 82 Aperture element

Claims (6)

In a transport device that transports an object with a planar portion in the transport direction while levitating,
  A plurality of levitation devices that are lined up in the conveying direction and levitate using a fluid;
  Conveying force application means for applying a force to the object in order to convey the object levitated by the levitation device;
  Each levitation device
  A base member having a planar upper surface;
  An annular fluid ejection hole provided on the upper surface of the base member and ejecting fluid;
  At least the upper surface side of the base member in the fluid ejection hole of each levitation device is inside the region surrounded by the opening of the fluid ejection hole on the upper surface of the base member over the entire circumference of the fluid ejection hole. It came to face,
  Furthermore, the base member of each levitation device surrounds the inner member on the lower member, an inner member provided at the center of the upper surface of the lower member and having a flat lower surface, and an upper surface of the lower member. The fluid ejection hole is formed between the inner member and the outer member, and the fluid ejection hole is between the lower surface of the inner member and the upper surface of the lower member. An inflow side height dimension of the fluid is larger than a width dimension of the fluid ejection hole. In the conveyance apparatus of Claim 1,
  A conveying apparatus, wherein a width of the fluid ejection hole is defined by a protrusion provided on at least one of the inner member and the outer member. In the conveyance apparatus of Claim 1 or Claim 2,
  A conveying device, wherein a throttle element is provided in the fluid ejection hole in each levitation device. In a levitation device that levitates an object having a planar portion using a fluid,
  A base member having a planar upper surface;
  An annular fluid ejection hole provided on the upper surface of the base member along the outer edge of the upper surface of the base member and ejecting fluid;
  At least the upper surface side of the base member in the fluid ejection hole faces the inside of the region surrounded by the opening of the fluid ejection hole on the upper surface of the base member over the entire circumference of the fluid ejection hole. Because
  The base member includes a lower member, an inner member provided at a central portion of the upper surface of the lower member and having a flat lower surface, and an outer member provided on the upper surface of the lower member so as to surround the inner member. A fluid ejection hole is formed between the inner member and the outer member, and the height between the lower surface of the inner member and the upper surface of the lower member and on the inflow side of the fluid ejection hole A levitation device characterized in that a dimension is larger than a width dimension of the fluid ejection hole. The levitation device according to claim 4,
  A levitation device, wherein a width of the fluid ejection hole is defined by a protrusion provided on at least one of the inner member and the outer member. In the conveying apparatus of Claim 4 or Claim 5,
  A levitation device, wherein a throttle element is provided in the fluid ejection hole.

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