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JP5355935B2 - Metal materials for electrical and electronic parts - Google Patents

Metal materials for electrical and electronic parts Download PDF

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Publication number
JP5355935B2
JP5355935B2 JP2008140186A JP2008140186A JP5355935B2 JP 5355935 B2 JP5355935 B2 JP 5355935B2 JP 2008140186 A JP2008140186 A JP 2008140186A JP 2008140186 A JP2008140186 A JP 2008140186A JP 5355935 B2 JP5355935 B2 JP 5355935B2
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layer
concentration
metal material
electrical
alloy
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JP2009007668A (en
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和生 吉田
京太 須齋
岳夫 宇野
秀一 北河
賢悟 水戸瀬
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THE FURUKAW ELECTRIC CO., LTD.
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THE FURUKAW ELECTRIC CO., LTD.
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Priority to JP2008140186A priority Critical patent/JP5355935B2/en
Priority to EP08776990A priority patent/EP2169093A4/en
Priority to CN2008800182820A priority patent/CN101743345B/en
Priority to PCT/JP2008/059928 priority patent/WO2008146885A1/en
Priority to US12/601,866 priority patent/US9263814B2/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02Contact members
    • H01R13/03Contact members characterised by the material, e.g. plating, or coating materials
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • C25D5/12Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48After-treatment of electroplated surfaces
    • C25D5/50After-treatment of electroplated surfaces by heat-treatment
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/48After-treatment of electroplated surfaces
    • C25D5/50After-treatment of electroplated surfaces by heat-treatment
    • C25D5/505After-treatment of electroplated surfaces by heat-treatment of electroplated tin coatings, e.g. by melting
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12458All metal or with adjacent metals having composition, density, or hardness gradient

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Conductive Materials (AREA)
  • Non-Insulated Conductors (AREA)

Description

本発明は、嵌合型多極コネクタの摺動部などに好適な電気電子部品用金属材料に関する。   The present invention relates to a metal material for electrical and electronic parts suitable for a sliding portion of a fitting type multipolar connector.

銅(Cu)、銅合金などの導電性基体(以下、適宜、基体と記す。)上に錫(Sn)、錫合金などのめっき層を設けためっき材料は、基体の優れた導電性と強度、およびめっき層の優れた電気接続性と耐食性とはんだ付け性を備えた高性能導体として知られており、電気・電子機器に用いられる各種の端子やコネクタなどに広く用いられている。このめっき材料は、通常、亜鉛(Zn)などの基体の合金成分(以下、適宜、基体成分と記す。)が前記めっき層に拡散するのを防止するため、基体上にバリア機能を有するニッケル(Ni)、コバルト(Co)、鉄(Fe)などが下地めっきされる。   A plating material in which a plating layer such as tin (Sn) or tin alloy is provided on a conductive substrate such as copper (Cu) or a copper alloy (hereinafter referred to as a substrate as appropriate) has excellent conductivity and strength of the substrate. In addition, it is known as a high-performance conductor having excellent electrical connectivity, corrosion resistance, and solderability of the plating layer, and is widely used for various terminals and connectors used in electrical and electronic equipment. This plating material is usually nickel (which has a barrier function on the substrate) in order to prevent the alloy component of the substrate such as zinc (Zn) (hereinafter, appropriately referred to as a substrate component) from diffusing into the plating layer. Ni), cobalt (Co), iron (Fe), and the like are subjected to base plating.

このめっき材料を端子として用いた場合、たとえば自動車のエンジンルーム内などの高温環境下では、端子表面のSnめっき層のSnが易酸化性のため、Snめっき層の表面に酸化皮膜が形成されるが、この酸化皮膜は脆いため端子接続時に破れて、その下の未酸化Snめっき層が露出して良好な電気接続性が得られる。   When this plating material is used as a terminal, for example, in a high-temperature environment such as in an engine room of an automobile, Sn of the Sn plating layer on the terminal surface is easily oxidizable, so an oxide film is formed on the surface of the Sn plating layer. However, since this oxide film is brittle, it is broken at the time of terminal connection, and the unoxidized Sn plating layer below it is exposed to obtain good electrical connectivity.

ところで近年、電子制御化が進む中で嵌合型コネクタが多極化したため、オス端子群とメス端子群を挿抜する際に多大な力が必要になり、特に、自動車のエンジンルーム内などの狭い空間では挿抜作業が困難なため前記挿抜力の低減が強く求められている。また、コネクタの挿抜力を低減することで、コネクタ接続の際の作業性が向上するため、この観点からも前記挿抜力の低減が強く求められている。   By the way, in recent years, with the progress of electronic control, the mating connector has become multipolar, so a great deal of force is required when inserting and removing the male terminal group and the female terminal group. Since insertion / extraction work is difficult, reduction of the insertion / extraction force is strongly demanded. Moreover, since the workability at the time of connector connection improves by reducing the insertion / extraction force of a connector, the reduction of the said insertion / extraction force is also calculated | required strongly also from this viewpoint.

前記挿抜力を低減する方法として、コネクタ端子表面のSnめっき層を薄くして端子間の接触圧力を弱める方法があるが、この方法はSnめっき層が軟質のため端子の接触面間にフレッティング現象が起きて端子間に導通不良が起きることがある。   As a method of reducing the insertion / extraction force, there is a method in which the Sn plating layer on the surface of the connector terminal is thinned to weaken the contact pressure between the terminals. This method is fretting between the contact surfaces of the terminals because the Sn plating layer is soft. A phenomenon may occur and poor conduction may occur between the terminals.

前記フレッティング現象とは、振動や温度変化などが原因で端子の接触面間に起きる微摺動により、端子表面の軟質のSnめっき層が摩耗し酸化して、比抵抗の大きい摩耗粉になる現象で、この現象が端子間に発生すると接続不良が起きる。そして、この現象は端子間の接触圧力が低いほど起き易い。   The fretting phenomenon is that the soft Sn plating layer on the surface of the terminal wears and oxidizes due to fine sliding that occurs between the contact surfaces of the terminal due to vibration, temperature change, etc., and becomes a wear powder having a large specific resistance. When this phenomenon occurs between terminals, a connection failure occurs. This phenomenon is more likely to occur as the contact pressure between the terminals is lower.

これに対し、例えば、特許文献1には、CuまたはCu合金にSnをめっきして、リフロー処理した後、酸素濃度が5%以下の雰囲気中で熱処理することによって、最表面に、フレッティング現象が起き難い硬質のCu−Sn金属間化合物層を形成し、低挿入性等の確保を目的とした、方法が提案されている。しかし、この方法ではめっき処理の加工性が劣るものであった。また、特許文献1には、このCu−Sn金属間化合物層のCu−Snの濃度については記載がなく、さらに、Cu−Sn金属間化合物層の表面に厚さが規制された酸化皮膜層を適正に形成させるため、ライン生産時のリフロー熱処理による加工が困難であった。   On the other hand, for example, Patent Document 1 discloses that a fretting phenomenon occurs on the outermost surface by plating Sn or Cu on a Cu or Cu alloy, performing a reflow treatment, and then performing a heat treatment in an atmosphere having an oxygen concentration of 5% or less. A method has been proposed in which a hard Cu—Sn intermetallic compound layer that is difficult to cause is formed and the purpose is to ensure low insertability. However, this method is inferior in the workability of the plating treatment. Patent Document 1 does not describe the Cu—Sn concentration of the Cu—Sn intermetallic compound layer, and further provides an oxide film layer with a regulated thickness on the surface of the Cu—Sn intermetallic compound layer. Processing by reflow heat treatment during line production was difficult to form properly.

また、特許文献2には、Cu又はCu合金からなる母材表面に、Ni層及びCu−Sn合金層からなる表面めっき層がこの順に形成された、フレッティング現象が起き難く、低挿入性等の確保を目的とした接続部品用導電材料が記載されている。しかし、この材料もめっき処理の加工性に劣るものであった。また、Cu−Sn合金層をCu−Snの濃度の平均値で規定しているため、ライン生産時のリフロー熱処理による加工が困難なものであった。   Further, in Patent Document 2, a surface plating layer made of a Ni layer and a Cu—Sn alloy layer is formed in this order on the surface of a base material made of Cu or a Cu alloy. A conductive material for connecting parts for the purpose of securing is described. However, this material is also inferior in workability of the plating treatment. Moreover, since the Cu—Sn alloy layer is defined by the average value of the Cu—Sn concentration, it is difficult to process by reflow heat treatment during line production.

また、特許文献3には、金属製の基体の表面に金属めっきを施して金属めっき層を形成し、リフロー処理によって、網目状に広がる軟らかい領域と、前記軟らかい領域の網目に囲まれた硬い領域とを混在させて形成しためっき処理材が記載されている。しかし、このめっき処理材は、高温環境下では、母材のCu成分がめっき最表面まで拡散し、酸化、さらには接触抵抗値が上昇してしまう問題があった。   In Patent Document 3, a metal plating layer is formed by performing metal plating on the surface of a metal substrate, and a reflow treatment is performed so that a soft region spreads in a mesh shape and a hard region surrounded by a mesh of the soft region. And a plating treatment material formed by mixing them. However, this plating material has a problem that, under a high temperature environment, the Cu component of the base material diffuses to the outermost surface of the plating, which causes oxidation and further increases the contact resistance value.

特許文献4には、母材表面の凹凸に沿って、数μm程度の径の粒子からなるCu−Sn合金被覆層が形成され、Sn被覆層が溶融流動して平滑化されており、それに伴い、Cu−Sn合金被覆層が一部材料表面に露出している接続部品用導電材料が記載されている。
しかし、下地にCu層が存在せず、かつNi下地が存在している場合には問題ないとしても、Cu層が存在したり、Ni下地が存在せぬ場合には、初期の状態では問題ないとしても、摺動と熱負荷が同時に加わるような実車搭載環境下では、摺動によって、純Sn部が削れた場合、Cuが表面まで拡散、さらに酸化が進み、早期に抵抗上昇に至ると考えられる。
特開2000−226645号公報 特開2004−68026号公報 特開2004−339555号公報 特開2006−77307号公報
In Patent Document 4, a Cu—Sn alloy coating layer made of particles having a diameter of about several μm is formed along the unevenness of the surface of the base material, and the Sn coating layer is melted and smoothed, and accordingly , A conductive material for connecting parts is described in which a Cu-Sn alloy coating layer is partially exposed on the surface of the material.
However, even if there is no Cu layer in the base and a Ni base is present, there is no problem in the initial state when there is a Cu layer or there is no Ni base. However, in an actual vehicle mounting environment where sliding and thermal load are applied simultaneously, if the pure Sn part is scraped off due to sliding, Cu diffuses to the surface and further oxidation proceeds, leading to an early increase in resistance. It is done.
JP 2000-226645 A JP 2004-68026 A JP 2004-339555 A JP 2006-77307 A

本発明は、容易に製造することができ、接続端子の接点部や摺動部などに好適な電気電子部品用金属材料の提供を目的とする。   An object of the present invention is to provide a metal material for electrical and electronic parts that can be easily manufactured and is suitable for a contact portion or a sliding portion of a connection terminal.

本発明は、
(1)導電性基体上にCu−Sn合金層が設けられている電気電子部品用金属材料であって、前記Cu−Sn合金層は、前記基体側から表面側に向けて徐々にCu濃度が減少しており、かつ、前記Cu−Sn合金層中に部分的にSnまたはSn合金が分散しており、前記Cu−Sn合金層のうち、前記基体側半分のCu濃度が50〜100モル%およびSn濃度が0〜50モル%であり、かつ、前記表面側半分のCu濃度が0〜95モル%およびSn濃度が5〜100モル%であることを特徴とする電気電子部品用金属材料、
(2)導電性基体上に、Ni、Co、およびFeのいずれか1種の金属またはこれらの金属を含む合金が設けられ、さらにその上にCu−Sn合金層が設けられている電気電子部品用金属材料であって、前記Cu−Sn合金層は、前記基体側から表面側に向けて徐々にCu濃度が減少しており、かつ、前記Cu−Sn合金層中に部分的にSnまたはSn合金が分散しており、前記Cu−Sn合金層のうち、前記基体側半分のCu濃度が50〜100モル%およびSn濃度が0〜50モル%であり、かつ、前記表面側半分のCu濃度が0〜95モル%およびSn濃度が5〜100モル%であることを特徴とする電気電子部品用金属材料、
)導電性基体上に、Ni、Co、およびFeのいずれか1種の金属またはこれらの金属を含む合金が2層設けられ、さらにその上にCu−Sn合金層が設けられている電気電子部品用金属材料であって、前記Cu−Sn合金層は、前記基体側から表面側に向けて徐々にCu濃度が減少しており、かつ、前記Cu−Sn合金層中に部分的にSnまたはSn合金が分散していることを特徴とする電気電子部品用金属材料
)前記Cu−Sn合金層のうち、前記基体側半分のCu濃度が50〜100モル%およびSn濃度が0〜50モル%であり、かつ、前記表面側半分のCu濃度が0〜95モル%およびSn濃度が5〜100モル%であることを特徴とする(3)に記載の電気電子部品用金属材料、
)前記Cu−Sn合金層が0.1〜3.0μmであることを特徴とする(1)〜()のいずれか1項に記載の電気電子部品用金属材料、
)(1)〜()のいずれか1項に記載の電気電子部品用金属材料の製造方法であって、前記導電性基体上または、前記Ni、Co、およびFeのいずれか1種の金属またはこれらの金属を含む合金上に、Cu、Snの順に積層し、積層体を作製する工程、前記積層体に対して、熱処理を行う工程、前記熱処理工程が行われた前記積層体に対して、冷却処理を行う工程を有することを特徴とする電気電子部品用金属材料の製造方法、
)前記熱処理は、前記積層体を炉内温度300℃以上900℃未満のリフロー炉内に3〜20秒間通過させる処理であることを特徴とする()記載の電気電子部品用金属材料の製造方法、
)前記冷却処理は、前記積層体を20〜80℃の液体中を1〜100秒かけて通過させる処理であることを特徴とする()記載の電気電子部品用金属材料の製造方法、および、
)前記冷却処理は、前記積層体を20〜60℃の気体中を1〜300秒かけて通過させ、その後20〜80℃の液体中を1〜100秒かけて通過させる処理であることを特徴とする()記載の電気電子部品用金属材料の製造方法
を提供するものである。
The present invention
(1) A metal material for electrical and electronic parts in which a Cu—Sn alloy layer is provided on a conductive substrate, and the Cu—Sn alloy layer has a Cu concentration gradually from the substrate side toward the surface side. In addition, Sn or Sn alloy is partially dispersed in the Cu—Sn alloy layer, and the Cu concentration in the half on the substrate side of the Cu—Sn alloy layer is 50 to 100 mol%. A metal material for electrical and electronic parts , wherein the Sn concentration is 0 to 50 mol%, the Cu concentration in the surface side half is 0 to 95 mol%, and the Sn concentration is 5 to 100 mol% ,
(2) An electric / electronic component in which any one metal of Ni, Co, and Fe or an alloy containing these metals is provided on a conductive substrate, and a Cu-Sn alloy layer is provided thereon. The Cu—Sn alloy layer has a Cu concentration that gradually decreases from the substrate side to the surface side, and is partially Sn or Sn in the Cu—Sn alloy layer. The alloy is dispersed, and in the Cu-Sn alloy layer, the Cu concentration in the substrate half is 50 to 100 mol% and the Sn concentration is 0 to 50 mol%, and the Cu concentration in the surface half is 0 to 95 mol% and Sn concentration is 5 to 100 mol%, a metal material for electrical and electronic parts,
( 3 ) Electricity in which two layers of any one metal of Ni, Co, and Fe or an alloy containing these metals are provided on a conductive substrate, and a Cu-Sn alloy layer is provided thereon. The Cu—Sn alloy layer is a metal material for electronic parts, and the Cu concentration of the Cu—Sn alloy layer gradually decreases from the substrate side to the surface side, and the Sn is partially contained in the Cu—Sn alloy layer. Or a metal material for electrical and electronic parts, in which an Sn alloy is dispersed ,
( 4 ) Of the Cu-Sn alloy layer, the Cu concentration in the substrate half is 50 to 100 mol% and the Sn concentration is 0 to 50 mol%, and the Cu concentration in the surface half is 0 to 95. The metal material for electric and electronic parts according to ( 3), wherein the mol% and Sn concentration are 5 to 100 mol%,
( 5 ) The metal material for electrical and electronic parts according to any one of (1) to ( 4 ), wherein the Cu—Sn alloy layer is 0.1 to 3.0 μm,
( 6 ) A method for producing a metal material for an electric / electronic component according to any one of (1) to ( 5 ), wherein either one of Ni, Co, and Fe on the conductive substrate or the Ni, Co, and Fe On the metal or alloy containing these metals, Cu and Sn are laminated in this order, a step of producing a laminated body, a step of performing a heat treatment on the laminated body, and a step of performing the heat treatment on the laminated body On the other hand, a method for producing a metal material for electrical and electronic parts, comprising a step of performing a cooling treatment,
( 7 ) The metal material for electrical and electronic parts according to ( 6 ), wherein the heat treatment is a treatment for allowing the laminate to pass through a reflow furnace having a furnace temperature of 300 ° C or higher and lower than 900 ° C for 3 to 20 seconds. Manufacturing method,
( 8 ) The method for producing a metal material for electric and electronic parts according to ( 6 ), wherein the cooling treatment is a treatment for allowing the laminate to pass through a liquid at 20 to 80 ° C. over 1 to 100 seconds. ,and,
( 9 ) The cooling treatment is a treatment of allowing the laminate to pass through a gas at 20 to 60 ° C over 1 to 300 seconds, and then passing through a liquid at 20 to 80 ° C over 1 to 100 seconds. The method for producing a metal material for electric and electronic parts according to ( 6 ), characterized in that

本発明の電気電子部品用金属材料は、リフロー熱処理により容易に製造することができ、めっき材料の耐熱性を向上させることができる。これは電気電子材料として使用すると、高温環境下であってもCu−Sn層中の基体側の豊富なCuと表面側の豊富なSnとが反応するためである。また、本発明の電気電子部品用金属材料を用いて製造した電気・電子部品は摺動中の電気接点における急激な抵抗上昇(フレッティング)を著しく抑えることができる。   The metal material for electric and electronic parts of the present invention can be easily manufactured by reflow heat treatment, and the heat resistance of the plating material can be improved. This is because, when used as an electrical and electronic material, abundant Cu on the substrate side in the Cu—Sn layer reacts with abundant Sn on the surface side even in a high temperature environment. In addition, the electrical / electronic component manufactured using the metal material for electrical / electronic component of the present invention can remarkably suppress a sudden increase in resistance (fretting) at the sliding electrical contact.

また、導電性基体上にNiなどからなる下地層が設けられた電気電子部品用金属材料では、基体成分が最外層に拡散するのを防止することができる。また下地層上にCuなどからなる中間層が設けられている材料では、Niなどの下地成分が最外層に拡散するのが防止される。従って、良好な電気接続性が安定して得られる。
また、Cu−Sn合金層中に部分的にSn、またはSn合金を分散させた材料では、高温放置時にCu−Sn合金層の下層側に存在するCuとCu−Sn合金層中に分散したSnまたはSn合金とが反応してCu−Sn合金が形成される余地があるため、Cuの表出によりCuOなどが形成されることがなく、接触抵抗が安定するという効果ももたらされる。
In addition, in the metal material for electric and electronic parts in which the base layer made of Ni or the like is provided on the conductive substrate, the substrate component can be prevented from diffusing to the outermost layer. In addition, in a material in which an intermediate layer made of Cu or the like is provided on the underlayer, the underlayer component such as Ni is prevented from diffusing into the outermost layer. Therefore, good electrical connectivity can be stably obtained.
In addition, in the material in which Sn or Sn alloy is partially dispersed in the Cu-Sn alloy layer, Cu existing in the lower layer side of the Cu-Sn alloy layer when left at high temperature and Sn dispersed in the Cu-Sn alloy layer Alternatively, there is room for the formation of a Cu—Sn alloy by reacting with the Sn alloy, so that CuO or the like is not formed by the expression of Cu, and the effect of stabilizing the contact resistance is also brought about.

本発明の電気電子部品用金属材料は、導電性基体上に、もしくは、導電性基体上に形成された下地層上に、該基体側から表面に向けて徐々にCu濃度が減少しているCu−Sn合金層が設けられているものであって、該Cu−Sn合金層は、基体側から表面に向けて徐々にCu濃度が減少しているものである。この電気電子部品用金属材料は、導電性基体上に、もしくは、導電性基体上に形成されためっき層上に、Snめっき処理し、熱処理して、Cu−Sn合金層を形成し、該Cu−Sn合金層は、基体側から表面側に向けて徐々にCu濃度を減少させて形成される。
本発明において、「Cu−Sn合金層のCu濃度が基体側から表面に向けて徐々に減少している」とは、Cu−Sn合金層が、断面において層表面からの深さが異なる少なくとも3箇所で測定したCu濃度が表面に近い方から順に低濃度であることをいう。
The metal material for electrical and electronic parts according to the present invention has a Cu concentration gradually decreasing from the substrate side toward the surface on the conductive substrate or on the base layer formed on the conductive substrate. A -Sn alloy layer is provided, and the Cu-Sn alloy layer has a Cu concentration that gradually decreases from the substrate side toward the surface. This metal material for electrical and electronic parts is subjected to Sn plating treatment on a conductive substrate or a plating layer formed on the conductive substrate, and heat treatment to form a Cu-Sn alloy layer. The -Sn alloy layer is formed by gradually decreasing the Cu concentration from the substrate side to the surface side.
In the present invention, “the Cu concentration of the Cu—Sn alloy layer is gradually decreasing from the substrate side toward the surface” means that the Cu—Sn alloy layer has a depth different from the layer surface in the cross section at least 3 It means that the Cu concentration measured at a location is a low concentration in order from the side closer to the surface.

本発明におけるCu−Sn合金層は、Cu濃度が基体側から表面に向けて徐々に減少しているものであるが、その層厚の基体側半分のCu濃度は50〜100モル%が好ましく、さらに好ましくは65〜100モル%であり、Sn濃度は残部の0〜50モル%が好ましく、さらに好ましくは0〜35モル%である(Cu、Sn以外の不可避的不純物は無視した濃度である。以下同様)。
そして、その表面側半分のCu濃度は40〜95モル%が好ましく、さらに好ましくは
65〜85モル%であり、Sn濃度は5〜60モル%が好ましく、さらに好ましくは15〜35モル%である
基体側半分のCu濃度が低すぎる(Sn濃度が高すぎる)と最表面に純Sn層が形成されやすく、かつ耐フレッティング性が悪化する。
表面側半分のSn濃度が低すぎると耐熱性が減じて、高温環境下で使用された際に、早期の抵抗上昇へとつながる。
In the Cu—Sn alloy layer in the present invention, the Cu concentration is gradually decreased from the substrate side toward the surface, but the Cu concentration in the substrate side half of the layer thickness is preferably 50 to 100 mol%, More preferably, it is 65 to 100 mol%, and the Sn concentration is preferably 0 to 50 mol% of the balance, and more preferably 0 to 35 mol% (inevitable impurities other than Cu and Sn are negligible concentrations). The same applies below).
And the Cu concentration of the surface side half is preferably 40 to 95 mol%, more preferably 65 to 85 mol%, and the Sn concentration is preferably 5 to 60 mol%, more preferably 15 to 35 mol%. If the Cu concentration in the half on the substrate side is too low (the Sn concentration is too high), a pure Sn layer is likely to be formed on the outermost surface, and the fretting resistance deteriorates.
If the Sn concentration on the surface side half is too low, the heat resistance is reduced, leading to an early increase in resistance when used in a high temperature environment.

本発明の電気電子部品用金属材料は、下地にCu層が存在していても、またNi下地が存在しない構成であったとしても、上側のCu−Sn層中のCu濃度がグラデーション形成、すなわち表面側にはSnの濃度が低いCu−Sn層であるため、CuがSnと拡散する余地が残されている。その結果、熱負荷を受けたとしても、Cuが最表面に露出し、さらに酸化することを遅らせることが可能となる。
Cu−Sn合金層の厚さは好ましくは0.1〜3.0μm、さらに好ましくは0.3〜1.5μmである。この厚さが厚すぎると拡散過程においてカーケンダルボイドが発生しやすくなり、めっき剥離の恐れが生じるとともに、熱処理温度、時間が増大することよって、めっきコストの上昇が予想される。また、薄すぎると接触抵抗の上昇、耐熱性の悪化、耐フレッティング性の悪化などが危惧される。
In the metal material for electrical and electronic parts of the present invention, the Cu concentration in the upper Cu-Sn layer is gradation formed, that is, even if the Cu layer is present on the underlayer or the Ni underlayer is not present. Since there is a Cu—Sn layer with a low Sn concentration on the surface side, there is room for Cu to diffuse with Sn. As a result, even if a thermal load is applied, Cu can be exposed to the outermost surface and further oxidized can be delayed.
The thickness of the Cu—Sn alloy layer is preferably 0.1 to 3.0 μm, more preferably 0.3 to 1.5 μm. If this thickness is too thick, Kirkendall voids are likely to occur in the diffusion process, and there is a risk of peeling of the plating, and an increase in the heat treatment temperature and time is expected to increase the plating cost. On the other hand, if it is too thin, the contact resistance may increase, heat resistance may deteriorate, and fretting resistance may deteriorate.

本発明において、導電性基体には、端子に要求される導電性、機械的強度および耐熱性を有する銅、リン青銅、黄銅、洋白、ベリリウム銅、コルソン合金などの銅合金、鉄、ステンレス鋼などの鉄合金、銅被覆鉄材やニッケル被覆鉄材などの複合材料、各種のニッケル合金やアルミニウム合金などが適宜用いられる。   In the present invention, the conductive substrate includes copper alloys such as copper, phosphor bronze, brass, white, beryllium copper and corson alloy, iron and stainless steel having the electrical conductivity, mechanical strength and heat resistance required for the terminals. Such as iron alloys, composite materials such as copper-coated iron materials and nickel-coated iron materials, various nickel alloys and aluminum alloys are appropriately used.

前記金属および合金(材料)のうち、特に銅、銅合金などの銅系材料は導電性と機械的強度のバランスに優れ好適である。前記導電性基体が銅系材料以外の場合は、その表面に銅または銅合金を被覆しておくことが好ましい。   Of the metals and alloys (materials), copper-based materials such as copper and copper alloys are particularly suitable because of their excellent balance between conductivity and mechanical strength. When the conductive substrate is other than a copper-based material, it is preferable to cover the surface with copper or a copper alloy.

本発明の電気電子部品用金属材料を得る製造方法において、Snめっきは、無電解めっきで行って形成しても良いが、電気めっきで形成するのが望ましい。Snめっきにより形成されるSn層の厚さは0.01〜5.0μmが好ましい。
最上層の電気Snめっきは、例えば硫酸錫浴を用い、めっき温度30℃以下、電流密度5A/dm で行えばよい。ただし、条件はこの限りではなく適宜設定可能である。
In the manufacturing method for obtaining the metal material for electrical and electronic parts of the present invention, Sn plating may be formed by electroless plating, but is preferably formed by electroplating. The thickness of the Sn layer formed by Sn plating is preferably 0.01 to 5.0 μm.
The uppermost electric Sn plating may be performed, for example, using a tin sulfate bath at a plating temperature of 30 ° C. or less and a current density of 5 A / dm 2 . However, the conditions are not limited to this, and can be set as appropriate.

本発明の電気電子部品用金属材料を得る製造方法においては、最上層にSnめっきされた積層体材料を熱処理する。この熱処理の条件はCu濃度が基体側から表面に向けて徐々に減少しているCu−Sn合金層を形成する条件を選択する。熱処理をリフロー処理(連続処理)により施す場合は、炉内温度300℃以上900℃未満で3〜20秒(より好ましくは5〜10秒、さらに好ましくは6〜8秒)の加熱が好ましい。
この温度と時間を採用するのは、Cu−Sn層中のCu濃度を、基体側から表層側にかけて徐々に減じていく濃度勾配的なCu−Sn層を得るためである。
また、バッチ処理により熱処理する場合は前記材料を60〜200℃の炉内に0.1〜200時間保持するのが好ましい。
In the manufacturing method for obtaining the metal material for electric and electronic parts of the present invention , the laminate material plated with Sn on the uppermost layer is heat-treated. Conditions for this heat treatment are selected to form a Cu—Sn alloy layer in which the Cu concentration gradually decreases from the substrate side toward the surface. When the heat treatment is performed by reflow treatment (continuous treatment), heating at a furnace temperature of 300 ° C. or higher and lower than 900 ° C. for 3 to 20 seconds (more preferably 5 to 10 seconds, more preferably 6 to 8 seconds) is preferable.
The reason why this temperature and time are used is to obtain a Cu-Sn layer having a concentration gradient that gradually decreases the Cu concentration in the Cu-Sn layer from the substrate side to the surface layer side.
Moreover, when heat-processing by a batch process, it is preferable to hold | maintain the said material in a 60-200 degreeC furnace for 0.1 to 200 hours.

さらに本発明の電気電子部品用金属材料を得る製造方法においては、リフロー熱処理した積層体材料を冷却槽内の液体中を1〜100秒(より好ましくは3〜10秒)かけて通過させ、急冷却するのが好ましい。液温は20〜80℃(より好ましくは30〜50)が好ましい。さらに、急冷却する前に、熱処理した積層体材料は20〜60℃の炉内雰囲気中冷風装置等の気体中を1〜300秒かけて通過させ徐冷却処理するのも好ましい。
このような冷却処理により、CuとSnの拡散を中途で強制的に終了、あるいはその拡散速度を急速に減じさせ、Cu−Sn層中のCu濃度がグラデーション的なめっき構成をより得やすくするとともに、Cu−Sn層中に純Snを分散させることが可能となる。
Furthermore, in the manufacturing method for obtaining the metal material for electric and electronic parts of the present invention , the laminate material subjected to the reflow heat treatment is passed through the liquid in the cooling tank for 1 to 100 seconds (more preferably, 3 to 10 seconds). Cooling is preferred. The liquid temperature is preferably 20 to 80 ° C. (more preferably 30 to 50). Furthermore, before the rapid cooling, the heat-treated laminate material is preferably passed through a gas such as a cold air apparatus in a furnace atmosphere at 20 to 60 ° C. over 1 to 300 seconds and subjected to a slow cooling treatment.
By such a cooling process, the diffusion of Cu and Sn is forcibly terminated midway, or the diffusion rate is rapidly reduced, and the Cu concentration in the Cu—Sn layer makes it easier to obtain a gradation plating structure. Pure Sn can be dispersed in the Cu—Sn layer.

図1は、電気電子部品用金属材料の一つの実施態様を示す概略断面図である。図1に示す態様の電気電子部品用金属材料は、たとえば導電性基体1にSnめっきをし、次いで熱処理して、基体1側から表面3に向けて徐々にCu濃度を減少させたCu−Sn合金層2が設けられているものである。この態様においては、導電性基体1としては、銅系材料、または表面に銅または銅合金が被覆されたCu母材が用いられる。この実施態様においては、上記の熱処理が加えられることにより、導電性基体1はその表面に銅または銅合金が被覆されたCu母材のCu成分がSnめっき層に熱拡散し、また、Snも上記熱処理により基体1に拡散する。そのため、Cu濃度が基体1側から表面3に向けて徐々に減少したCu−Sn合金層2が形成される。また、断面における導電性基体1とCu−Sn合金層2との境界は明瞭には形成されない。
FIG. 1 is a schematic cross-sectional view showing one embodiment of a metal material for electrical and electronic parts . The metal material for electrical and electronic parts of the embodiment shown in FIG. 1 is Cu-Sn in which, for example, Sn plating is performed on the conductive substrate 1 and then heat-treated, so that the Cu concentration is gradually reduced from the substrate 1 side toward the surface 3. The alloy layer 2 is provided. In this embodiment, as the conductive substrate 1, a copper-based material or a Cu base material whose surface is coated with copper or a copper alloy is used. In this embodiment, when the above heat treatment is applied, the conductive substrate 1 has its surface coated with copper or a copper alloy, and the Cu component of the Cu base material is thermally diffused into the Sn plating layer. It diffuses into the substrate 1 by the heat treatment. Therefore, a Cu—Sn alloy layer 2 is formed in which the Cu concentration gradually decreases from the substrate 1 side toward the surface 3. Further, the boundary between the conductive substrate 1 and the Cu—Sn alloy layer 2 in the cross section is not clearly formed.

図2は、本発明の別の一つの実施態様を示す概略断面図である。図2に示す態様の電気電子部品用金属材料は、導電性基体1にSnをめっきなどにより被覆し、次いで熱処理して、基体1側から表面3に向けて徐々にCu濃度を減少させたCu−Sn合金層2を設け、Cu−Sn合金層2中に部分的にSn(4)が分散されている。導体性基体1の材料、並びに、導電性基体1とCu−Sn合金層2の境界については、上記の図1で示す態様における場合と同様である。Sn(4)としては金属Snであっても、Sn合金(Snを50質量%以上含有する合金)であっても良い。Sn(4)の分散方法としては、任意の方法を用いることができるが、たとえば、リフロー処理やバッチ処理等の熱処理の条件を最適化して、被覆されたSnが基体1やその表面に存在するCuと完全には合金化しないようにする(具体的一例として、被覆されたSnが基体1またはその表面に存在するCuと完全に合金化する前に熱処理を終了させる)ことで金属SnやSn合金を分散させる。
前記分散状態が金属SnやSn合金(Sn濃度80モル%以上)の少なくとも一部が最外層の表面に露出し、平面視において島状または点状にSnまたはSn合金が分散していることが好ましい。さらに、前記最外層上に0乃至100nmの酸化膜が形成されていてもよい。
FIG. 2 is a schematic sectional view showing another embodiment of the present invention. The metal material for electrical and electronic parts of the embodiment shown in FIG. 2 is a Cu material in which Sn is coated on a conductive substrate 1 by plating or the like and then heat-treated to gradually reduce the Cu concentration from the substrate 1 side toward the surface 3. A Sn alloy layer 2 is provided, and Sn (4) is partially dispersed in the Cu—Sn alloy layer 2. The material of the conductive substrate 1 and the boundary between the conductive substrate 1 and the Cu—Sn alloy layer 2 are the same as those in the embodiment shown in FIG. Sn (4) may be a metal Sn or a Sn alloy (an alloy containing 50 mass% or more of Sn). Any method can be used as a dispersion method of Sn (4). For example, the coated Sn is present on the substrate 1 or its surface by optimizing the heat treatment conditions such as reflow treatment and batch treatment. Metal alloy Sn or Sn is prevented from being completely alloyed with Cu (as a specific example, the heat treatment is terminated before the coated Sn is completely alloyed with Cu present on the substrate 1 or its surface). Disperse the alloy.
The dispersion state is that at least a part of the metal Sn or Sn alloy (Sn concentration of 80 mol% or more) is exposed on the surface of the outermost layer, and the Sn or Sn alloy is dispersed in the form of islands or dots in plan view. preferable. Furthermore, an oxide film having a thickness of 0 to 100 nm may be formed on the outermost layer.

電気電子部品用金属材料の別の一つの実施態様は、導電性基体1にNi、Co、およびFeのいずれか1種の金属またはこれらの金属を主体として(50質量%以上)含む合金をめっきなどにより被覆し、さらにCu、Snの順でめっきなどにより被覆し、次いで熱処理して、基体1側から表面3に向けて徐々にCu濃度を減少させたCu−Sn合金層2を設けた電気電子部品用金属材料である。
図3は、導電性基体1上にCuをめっきなどにより被覆した、本実施態様の電気電子部品用金属材料の概略断面図である。図3に示す態様の電気電子部品用金属材料では、導電性基体1上にCu層5が設けられ、Cu層5上にSnがめっきなどにより被覆される。そして、熱処理を加えることによりCu層5からCu成分がSn層に熱拡散し、また、Snも上記熱処理によりCu層5に拡散する。そのため、Cu濃度が基体1側から表面3側に向けて徐々に減少したCu−Sn合金層2が形成される。また、断面におけるCu層5とCu−Sn合金層2との境界は明瞭には形成されていない。
Another embodiment of the metal material for electric and electronic parts is plating the conductive substrate 1 with any one metal of Ni, Co, and Fe or an alloy mainly containing these metals (50% by mass or more). And the like, followed by coating with Cu or the like in the order of Cu and Sn, followed by heat treatment to provide the Cu—Sn alloy layer 2 in which the Cu concentration is gradually decreased from the substrate 1 side toward the surface 3. It is a metal material for electronic parts.
FIG. 3 is a schematic cross-sectional view of a metal material for electrical and electronic parts according to this embodiment in which Cu is coated on the conductive substrate 1 by plating or the like. In the metal material for electric and electronic parts shown in FIG. 3, the Cu layer 5 is provided on the conductive substrate 1, and Sn is coated on the Cu layer 5 by plating or the like. Then, by applying heat treatment, the Cu component is thermally diffused from the Cu layer 5 to the Sn layer, and Sn is also diffused into the Cu layer 5 by the heat treatment. Therefore, the Cu—Sn alloy layer 2 is formed in which the Cu concentration gradually decreases from the substrate 1 side toward the surface 3 side. Further, the boundary between the Cu layer 5 and the Cu—Sn alloy layer 2 in the cross section is not clearly formed.

図4は、導電性基体1上にNiめっきを行った、本実施態様の電気電子部品用金属材料の概略断面図である。図4に示す態様の電気電子部品用金属材料では、導電性基体1上にNi層6がめっきなどにより設けられ、Ni層6上にさらにCu層、Sn層の順でめっきなどにより被覆される。ここで、熱処理を加えることにより、Ni層6上に設けられたCu層とその上に設けられたSn層とが相互に拡散し、Cu濃度が基体1側から表面3側に向けて徐々に減少したCu−Sn合金層2が形成される。また、Niめっきに代えて、Coめっき、またはFeめっきを行った場合にも同様な電気電子部品用金属材料を得ることができる。   FIG. 4 is a schematic cross-sectional view of the metal material for electrical and electronic parts of this embodiment, in which Ni plating is performed on the conductive substrate 1. In the metal material for electric and electronic parts shown in FIG. 4, the Ni layer 6 is provided on the conductive substrate 1 by plating or the like, and the Cu layer and Sn layer are further coated on the Ni layer 6 in this order by plating or the like. . Here, by applying heat treatment, the Cu layer provided on the Ni layer 6 and the Sn layer provided thereon are diffused mutually, and the Cu concentration gradually increases from the substrate 1 side toward the surface 3 side. A reduced Cu—Sn alloy layer 2 is formed. In addition, a similar metal material for electric and electronic parts can be obtained when Co plating or Fe plating is performed instead of Ni plating.

本発明の別の一つの実施態様は、導電性基体にNi、Co、およびFeのいずれか1種の金属またはこれらの金属を主体として(50質量%以上)含む合金をめっきなどにより被覆し、さらにCu、Snの順でめっきなどにより被覆し、次いで熱処理して、基体1側から表面3に向けて徐々にCu濃度を減少させたCu−Sn合金層2を設け、該Cu−Sn合金層2中に部分的にSn、またはSn合金を分散させた電気電子部品用金属材料である。
図5は、導電性基体1上にCuめっきを行った、本実施態様の電気電子部品用金属材料の概略断面図である。図5に示す態様の電気電子部品用金属材料では、導電性基体1上にCu層5がめっきなどにより設けられ、Cu層5上にSnがめっきなどにより被覆される。そして、熱処理を加えることによりCu層5からCu成分がSn層に熱拡散し、また、Snも上記熱処理によりCu層5に拡散する。そのため、Cu濃度が基体1側から表面3側に向けて徐々に減少したCu−Sn合金層2が形成される。また、断面におけるCu層5とCu−Sn合金層2との境界は明瞭には形成されていない。また、Cu−Sn合金層2中には部分的にSn(4)が分散されている。Sn(4)の分散方法については上記図2に示す態様における分散方法と同様である。
In another embodiment of the present invention, a conductive substrate is coated with any one metal of Ni, Co, and Fe or an alloy mainly containing these metals (50% by mass or more) by plating or the like, Further, Cu and Sn were coated by plating or the like in this order, and then heat treated to provide a Cu—Sn alloy layer 2 in which the Cu concentration was gradually reduced from the substrate 1 side toward the surface 3, and the Cu—Sn alloy layer 2 is a metal material for electrical and electronic parts in which Sn or an Sn alloy is partially dispersed.
FIG. 5 is a schematic cross-sectional view of the metal material for electrical and electronic parts of the present embodiment, in which Cu plating is performed on the conductive substrate 1. In the metal material for electric / electronic parts shown in FIG. 5, the Cu layer 5 is provided on the conductive substrate 1 by plating or the like, and Sn is coated on the Cu layer 5 by plating or the like. Then, by applying heat treatment, the Cu component is thermally diffused from the Cu layer 5 to the Sn layer, and Sn is also diffused into the Cu layer 5 by the heat treatment. Therefore, the Cu—Sn alloy layer 2 is formed in which the Cu concentration gradually decreases from the substrate 1 side toward the surface 3 side. Further, the boundary between the Cu layer 5 and the Cu—Sn alloy layer 2 in the cross section is not clearly formed. In addition, Sn (4) is partially dispersed in the Cu—Sn alloy layer 2. The dispersion method of Sn (4) is the same as the dispersion method in the embodiment shown in FIG.

図6は、導電性基体1上にNiめっきを行った、本実施態様の電気電子部品用金属材料の概略断面図である。図6に示す態様の電気電子部品用金属材料では、導電性基体1上にNi層6がめっきなどにより設けられ、Ni層6上にさらにCu層、Sn層の順でめっきなどにより被覆される。ここで、熱処理を加えることにより、Ni層6上に設けられたCu層とその上に設けられたSn層とが相互に拡散し、Cu濃度が基体1側から表面3側に向けて徐々に減少したCu−Sn合金層2が形成される。Cu−Sn合金層2中には部分的にSn(4)が分散されている。Sn(4)の分散方法については、上記図2に示す態様における分散方法と同様である。   FIG. 6 is a schematic cross-sectional view of the metal material for electrical and electronic parts of this embodiment, in which Ni plating is performed on the conductive substrate 1. In the metal material for electric and electronic parts shown in FIG. 6, the Ni layer 6 is provided on the conductive substrate 1 by plating or the like, and the Cu layer and Sn layer are further coated on the Ni layer 6 in this order by plating or the like. . Here, by applying heat treatment, the Cu layer provided on the Ni layer 6 and the Sn layer provided thereon are diffused mutually, and the Cu concentration gradually increases from the substrate 1 side toward the surface 3 side. A reduced Cu—Sn alloy layer 2 is formed. Sn (4) is partially dispersed in the Cu—Sn alloy layer 2. The Sn (4) dispersion method is the same as the dispersion method in the embodiment shown in FIG.

電気電子部品用金属材料の別の一つの実施態様は、導電性基体1にNi、Co、およびFeのいずれかの金属またはこれらの金属を主体として(50質量%以上)含む合金をめっきなどにより2層被覆し、さらにCu、Snの順でめっきなどにより被覆し、次いで熱処理して、基体1側から表面3側に向けて徐々にCu濃度を減少させたCu−Sn合金層2を設けた電気電子部品用金属材料である。導電性基体1に行う2種類のめっき組み合わせは、特に限定されるものではない。
Another embodiment of the metal material for electrical and electronic parts is such that the conductive substrate 1 is plated with a metal of Ni, Co, and Fe or an alloy mainly containing these metals (50 mass% or more). Two layers were coated, and further coated by plating or the like in the order of Cu and Sn, and then heat-treated to provide a Cu—Sn alloy layer 2 in which the Cu concentration was gradually decreased from the substrate 1 side to the surface 3 side. It is a metal material for electrical and electronic parts. The two types of plating combinations applied to the conductive substrate 1 are not particularly limited.

図7は、下層としてNiをめっきなどにより被覆し、上層としてCuをめっきなどにより被覆した、本実施態様の電気電子部品用金属材料の概略断面図である。図7に示す態様の電気電子部品用金属材料では、導電性基体1上に、順に、Ni層6、Cu層5が設けられ、Cu層5上に、Sn層がめっきなどにより施される。そして、熱処理を加えることによりCu層5からCu成分がSn層に熱拡散し、また、Snも上記熱処理によりCu層5に拡散する。そのため、Cu濃度が基体1側から表面3側に向けて徐々に減少したCu−Sn合金層2が形成される。また、断面におけるCu層5とCu−Sn合金層2との境界は明瞭には形成されていない。   FIG. 7 is a schematic cross-sectional view of the metal material for electrical and electronic parts of this embodiment, in which Ni is coated as a lower layer by plating or the like and Cu is coated as an upper layer by plating or the like. In the metal material for electric and electronic parts shown in FIG. 7, the Ni layer 6 and the Cu layer 5 are provided in this order on the conductive substrate 1, and the Sn layer is applied on the Cu layer 5 by plating or the like. Then, by applying heat treatment, the Cu component is thermally diffused from the Cu layer 5 to the Sn layer, and Sn is also diffused into the Cu layer 5 by the heat treatment. Therefore, the Cu—Sn alloy layer 2 is formed in which the Cu concentration gradually decreases from the substrate 1 side toward the surface 3 side. Further, the boundary between the Cu layer 5 and the Cu—Sn alloy layer 2 in the cross section is not clearly formed.

本発明の別の一つの実施態様は、導電性基体1にNi、Co、およびFeのいずれかの金属またはこれらの金属を主体として(50質量%以上)含む合金をめっきなどにより2層被覆し、さらにCu、Snの順でめっきなどにより被覆し、次いで熱処理して、基体1側から表面3側に向けて徐々にCu濃度を減少させたCu−Sn合金層を設け、該Cu−Sn合金層中に部分的にSn、またはSn合金を分散させた電気電子部品用金属材料である。導電性基体1に行う2種類のめっき組み合わせは、特に限定されるものではない。   In another embodiment of the present invention, two layers of Ni, Co, and Fe metal or an alloy mainly containing these metals (50 mass% or more) are coated on the conductive substrate 1 by plating or the like. Further, a Cu—Sn alloy layer in which Cu concentration is gradually decreased from the substrate 1 side to the surface 3 side is provided by coating with Cu or Sn in this order, followed by heat treatment, and the Cu—Sn alloy. It is a metal material for electrical and electronic parts in which Sn or Sn alloy is partially dispersed in the layer. The two types of plating combinations applied to the conductive substrate 1 are not particularly limited.

図8は、下層としてNiをめっきなどにより被覆し、上層としてCuをめっきなどにより被覆した、本実施態様の電気電子部品用金属材料の概略断面図である。図8に示す態様の電気電子部品用金属材料では、導電性基体1上に、順に、Ni層6、Cu層5が設けられ、Cu層5上に、Sn層がめっきなどにより施される。そして、熱処理を加えることによりCu層5からCu成分がSn層に熱拡散し、また、Snも上記熱処理により基体1に拡散する。そのため、Cu濃度が基体1側から表面3側に向けて徐々に減少したCu−Sn合金層2が形成される。また、断面におけるCu層5とCu−Sn合金層2との境界は明瞭には形成されていない。また、Cu−Sn合金層2中には部分的にSn(4)が分散されている。Sn(4)の分散方法については上記図2に示す態様における分散方法と同様である。   FIG. 8 is a schematic cross-sectional view of a metal material for electrical and electronic parts according to this embodiment, in which Ni is coated as a lower layer by plating or the like, and Cu is coated as an upper layer by plating or the like. In the metal material for electric and electronic parts shown in FIG. 8, the Ni layer 6 and the Cu layer 5 are sequentially provided on the conductive substrate 1, and the Sn layer is applied on the Cu layer 5 by plating or the like. Then, by applying heat treatment, the Cu component is thermally diffused from the Cu layer 5 into the Sn layer, and Sn is also diffused into the substrate 1 by the heat treatment. Therefore, the Cu—Sn alloy layer 2 is formed in which the Cu concentration gradually decreases from the substrate 1 side toward the surface 3 side. Further, the boundary between the Cu layer 5 and the Cu—Sn alloy layer 2 in the cross section is not clearly formed. In addition, Sn (4) is partially dispersed in the Cu—Sn alloy layer 2. The dispersion method of Sn (4) is the same as the dispersion method in the embodiment shown in FIG.

本発明において、最外層のCu−Sn合金層は、Cu−Sn金属間化合物層を包含するものである。本発明におけるCu−Sn金属間化合物としてはCuSn、CuSnなどが挙げられる。また、これらの金属間化合物が混在したものも包含するものである。 In the present invention, the outermost Cu—Sn alloy layer includes a Cu—Sn intermetallic compound layer. Examples of the Cu—Sn intermetallic compound in the present invention include Cu 6 Sn 5 and Cu 3 Sn. Moreover, what mixed these intermetallic compounds is also included.

また、本発明においては、好ましくは、図6、8で示す態様のように、導電性基体上にNi層6などの下地層が設けられたものである。当該下地層を設けることで基体1の成分が最外層に拡散するのが防止される。前記導電性基体1上に設ける下地層は、基体成分が最外層に熱拡散するのを防止するバリア機能を有するNi、Co、Feなどの金属、これらを主成分とするNi−P系、Ni−Sn系、Co−P系、Ni−Co系、Ni−Co−P系、Ni−Cu系、Ni−Cr系、Ni−Zn系、Ni−Fe系などの合金が好適に用いられる。これら金属および合金は、めっき処理性が良好で、価格的にも問題がない。中でも、NiおよびNi合金はバリア機能が高温環境下にあっても衰えないため推奨される。
In the present invention, preferably, as shown in FIGS. 6 and 8 , a base layer such as a Ni layer 6 is provided on a conductive substrate. Providing the base layer prevents the components of the substrate 1 from diffusing into the outermost layer. The base layer provided on the conductive substrate 1 is made of a metal such as Ni, Co, Fe or the like having a barrier function for preventing the base component from thermally diffusing to the outermost layer, Ni—P based, Ni containing Pb as a main component. Alloys such as -Sn, Co-P, Ni-Co, Ni-Co-P, Ni-Cu, Ni-Cr, Ni-Zn, and Ni-Fe are preferably used. These metals and alloys have good plating processability and no problem in price. Among these, Ni and Ni alloys are recommended because the barrier function does not deteriorate even in a high temperature environment.

前記下地層に用いるNiなどの金属(合金)は、融点が1000℃以上と高く、接続コネクタの使用環境温度は200℃以下と低いため、下地層はそれ自身熱拡散を起こし難いうえ、そのバリア機能が有効に発現される。下地層には、導電性基体の材質によっては導電性基体と後述する中間層との密着性を高める機能もある。
下地層の厚みは、0.01μm未満ではそのバリア機能が十分に発揮されなくなり、3μmを超えるとめっき歪みが大きくなって基体から剥離し易くなる。従って0.01〜3μmが好ましい。下地層の厚みの上限は端子加工性を考慮すると1.5μm、さらには0.5μmが好ましい。
Since the metal (alloy) such as Ni used for the underlayer has a high melting point of 1000 ° C. or higher and the use environment temperature of the connection connector is as low as 200 ° C. or lower, the underlayer itself hardly causes thermal diffusion and its barrier. Function is effectively expressed. The underlayer also has a function of improving the adhesion between the conductive substrate and an intermediate layer described later depending on the material of the conductive substrate.
When the thickness of the underlayer is less than 0.01 μm, the barrier function is not sufficiently exerted, and when it exceeds 3 μm, the plating distortion increases and the base layer is easily peeled off. Therefore, 0.01 to 3 μm is preferable. The upper limit of the thickness of the underlayer is preferably 1.5 μm, more preferably 0.5 μm, considering the terminal processability.

本発明の電気電子部品用金属材料は、さらに好ましくは、図8で示す態様のような、導電性基体上にNiなどからなる下地層上にCu層5からなる中間層が設けられたものである。中間層を設けることにより、Niなどの下地成分が最外層に拡散するのが防止され、良好な電気接続性が安定して得られるとともに、基体側から表面に向けて徐々にCu濃度を減少させたCu−Sn合金層の形成を容易にすることができる。中間層の厚みは0.01〜3μmが好ましい。さらには0.1〜0.5μmが好ましい。
More preferably, the metal material for electric and electronic parts of the present invention is such that an intermediate layer made of Cu layer 5 is provided on a base layer made of Ni or the like on a conductive substrate, as in the embodiment shown in FIG. is there. By providing the intermediate layer, it is possible to prevent the base component such as Ni from diffusing to the outermost layer, to stably obtain good electrical connectivity, and to gradually decrease the Cu concentration from the substrate side toward the surface. In addition, the formation of the Cu—Sn alloy layer can be facilitated. The thickness of the intermediate layer is preferably 0.01 to 3 μm. Furthermore, 0.1-0.5 micrometer is preferable.

本発明の電気電子部品用金属材料の形状は、条、丸線、角線など任意である。本発明の電気電子部品用金属材料は、常法により自動車用の嵌合型多極コネクタなどの電気電子部品に加工することができる。例えば、本発明の電気電子部品用金属材料を用いて作成したコネクタは、端子間の接触圧力を弱め、かつ、端子の接触面間にフレッティング現象が起こさせず、端子間の導通不良の発生を抑制したものとすることできる。   The shape of the metal material for electric and electronic parts of the present invention is arbitrary such as a stripe, a round wire, a square wire, and the like. The metal material for electric and electronic parts of the present invention can be processed into electric and electronic parts such as a fitting type multipolar connector for automobiles by a conventional method. For example, the connector made using the metal material for electrical and electronic parts of the present invention weakens the contact pressure between the terminals, does not cause fretting phenomenon between the contact surfaces of the terminals, and causes poor conduction between the terminals. Can be suppressed.

以下に、本発明を実施例に基づいてさらに詳細に説明するが、本発明はこれに限定されるものではない。   Hereinafter, the present invention will be described in more detail based on examples, but the present invention is not limited thereto.

参考例1
厚み0.25mmの銅の条に脱脂および酸洗をこの順に施し、次いで前記銅合金条にNi、Cu、Snをこの順に層状に電気めっきしてめっき積層体を作製した。各金属のめっき条件は以下のとおりである。
(a)Niめっき
・めっき浴組成
成分 濃度
スルファミン酸ニッケル 500g/l
ホウ酸 30g/l
・浴温度 60℃
・電気密度 5A/dm
・めっき厚 0.5μm
(b)Cuめっき
・めっき浴組成
成分 濃度
硫酸銅 180g/l
硫酸 80g/l
・浴温度 40℃
・電気密度 5A/dm
・めっき厚 0.8μm
(c)Snめっき
・めっき浴組成
成分 濃度
硫酸第一錫 80g/l
硫酸 80g/l
・浴温度 30℃
・電気密度 5A/dm
・めっき厚 0.3μm
なお、上記厚さについては、めっき時間を適宜調整することができる。
Reference example 1
A copper strip having a thickness of 0.25 mm was degreased and pickled in this order, and then Ni, Cu, and Sn were electroplated in this order on the copper alloy strip to prepare a plated laminate. The plating conditions for each metal are as follows.
(A) Ni plating / plating bath composition Component Concentration Nickel sulfamate 500 g / l
Boric acid 30g / l
・ Bath temperature 60 ℃
・ Electric density 5A / dm 2
・ Plating thickness 0.5μm
(B) Cu plating / plating bath composition Component concentration Copper sulfate 180 g / l
Sulfuric acid 80g / l
・ Bath temperature 40 ℃
・ Electric density 5A / dm 2
・ Plating thickness 0.8μm
(C) Sn plating / plating bath composition Component Concentration Stannous sulfate 80 g / l
Sulfuric acid 80g / l
・ Bath temperature 30 ℃
・ Electric density 5A / dm 2
・ Plating thickness 0.3μm
In addition, about the said thickness, plating time can be adjusted suitably.

次いでこのめっき積層体を、リフロー炉内を740℃で、7秒リフロー処理し、電気電子部品用金属材料を得た。この材料のSEM(Scanning Electron Microscope:走査型電子顕微鏡)による写真(横幅:11.7μm)を図9に示し、さらに図9のSEM写真で示される表面を含む測定部のAES(Auger Electron Spectroscopy:オージェ電子分光)装置による電子像(Cu−Sn−Niマップ)を図10に示す。これはまずFIB(Focused Ion Beam:収束イオンビーム)にて試料傾斜60度で、30度斜め断面を作成しオージェ測定(AES)分析用試料とし、さらにAES分析を30度斜め断面が水平となるように試料を傾斜して分析し、AES電子像を得て各層の厚みを測定した。また、図9に示す測定面1(11)、測定面2(12)、測定面3(13)におけるAES定性分析より求めた、SnおよびCu濃度(mol%)を表1に示す。   Next, this plated laminate was subjected to a reflow treatment in a reflow furnace at 740 ° C. for 7 seconds to obtain a metal material for electric and electronic parts. A photograph (horizontal width: 11.7 μm) of this material by SEM (Scanning Electron Microscope) is shown in FIG. 9, and further, AES (Auger Electron Spectroscopy) of the measurement part including the surface shown in the SEM photograph of FIG. FIG. 10 shows an electron image (Cu—Sn—Ni map) obtained by an Auger electron spectroscopy apparatus. First, a 30-degree oblique section is created by FIB (Focused Ion Beam) at a sample inclination of 60 degrees and used as an Auger measurement (AES) analysis sample. Further, in AES analysis, the 30-degree oblique section is horizontal. Thus, the sample was tilted and analyzed, an AES electron image was obtained, and the thickness of each layer was measured. Table 1 shows Sn and Cu concentrations (mol%) obtained by AES qualitative analysis on the measurement surface 1 (11), measurement surface 2 (12), and measurement surface 3 (13) shown in FIG.

表1および図10に示されるとおり、本参考例の材料はNi層6上に、Cu層5およびCu−Sn合金層2は略連続的に形成され、基体1側から表面に向けてCu濃度が徐々に減少させている。
As shown in Table 1 and FIG. 10, the material of this reference example was formed on the Ni layer 6, the Cu layer 5 and the Cu—Sn alloy layer 2 being formed substantially continuously, and the Cu concentration from the substrate 1 side toward the surface. Is gradually decreasing.

実施例
厚み0.25mmの銅の条に脱脂および酸洗をこの順に施し、次いで前記銅合金条にNi、Cu、Snをこの順に層状に電気めっきしてめっき積層体を作製した。各金属のめっき条件は以下のとおりである。
(a)Niめっき
・めっき浴組成
成分 濃度
スルファミン酸ニッケル 500g/l
ホウ酸 30g/l
・浴温度 60℃
・電気密度 5A/dm
・めっき厚 0.5μm
(b)Cuめっき
・めっき浴組成
成分 濃度
硫酸銅 180g/l
硫酸 80g/l
・浴温度 40℃
・電気密度 5A/dm
・めっき厚 0.8μm
(c)Snめっき
・めっき浴組成
成分 濃度
硫酸第一錫 80g/l
硫酸 80g/l
・浴温度 30℃
・電気密度 5A/dm
・めっき厚 0.5μm
なお、上記厚さについては、めっき時間を適宜調整することができる。
Example 1
A copper strip having a thickness of 0.25 mm was degreased and pickled in this order, and then Ni, Cu, and Sn were electroplated in this order on the copper alloy strip to prepare a plated laminate. The plating conditions for each metal are as follows.
(A) Ni plating / plating bath composition Component Concentration Nickel sulfamate 500 g / l
Boric acid 30g / l
・ Bath temperature 60 ℃
・ Electric density 5A / dm 2
・ Plating thickness 0.5μm
(B) Cu plating / plating bath composition Component concentration Copper sulfate 180 g / l
Sulfuric acid 80g / l
・ Bath temperature 40 ℃
・ Electric density 5A / dm 2
・ Plating thickness 0.8μm
(C) Sn plating / plating bath composition Component Concentration Stannous sulfate 80 g / l
Sulfuric acid 80g / l
・ Bath temperature 30 ℃
・ Electric density 5A / dm 2
・ Plating thickness 0.5μm
In addition, about the said thickness, plating time can be adjusted suitably.

次いでこのめっき積層体を、リフロー炉内を740℃で、7秒リフロー処理熱処理し、電気電子部品用金属材料を得た。この材料のSEMによる写真(横幅:11.7μm)を図11に示し、さらに図11のSEM写真で示される表面を含む測定部のAES装置による電子像(Cu−Sn−Niマップ)を図12に示す。また、図11に示す測定面1(21)、測定面2(22)、測定面3(23)におけるAES定性分析より求めた、SnおよびCu濃度(mol%)を表2に示す。   Subsequently, this plating laminated body was heat-treated in a reflow furnace at 740 ° C. for 7 seconds to obtain a metal material for electric and electronic parts. A SEM photograph (width: 11.7 μm) of this material is shown in FIG. 11, and an electronic image (Cu—Sn—Ni map) of the measurement part including the surface shown in the SEM photograph of FIG. Shown in Further, Table 2 shows Sn and Cu concentrations (mol%) obtained by AES qualitative analysis on the measurement surface 1 (21), measurement surface 2 (22), and measurement surface 3 (23) shown in FIG.

表2および図12に示されるとおり、本実施例の材料は基体1上に、Ni層6、Cu層5、Cu−Sn合金層2がこの順に形成され、Cu層5とCu−Sn合金層2との境界は明瞭でなく、基体1側から表面に向けてCu濃度が徐々に減少させている。また、Cu−Sn合金層2にはSn(4)がアイランド状に分散されている。   As shown in Table 2 and FIG. 12, the material of this example is the Ni layer 6, the Cu layer 5, and the Cu—Sn alloy layer 2 formed in this order on the substrate 1, and the Cu layer 5 and the Cu—Sn alloy layer. The boundary with 2 is not clear, and the Cu concentration gradually decreases from the substrate 1 side to the surface. In addition, Sn (4) is dispersed in the Cu—Sn alloy layer 2 in an island shape.

試験例1
参考例1及び実施例1で得られた各々の電気電子部品用金属材料について下記の微摺動試験を摺動往復回数1000回まで行い、接触抵抗値の変化を連続的に測定した。
Test example 1
With respect to each metal material for electric and electronic parts obtained in Reference Example 1 and Example 1, the following fine sliding test was performed up to 1000 times of sliding reciprocation, and the change in contact resistance value was continuously measured.

前記微摺動試験は次のようにして行った。
各2枚の試験用金属材料片31、32を用意し、試験用金属材料片31は曲率半径1.8mmの半球状張出部(凸部外面が最外層面)31aを設け、この半球状張出部31aに試験用金属材料片32の最外層面32aをそれぞれ脱脂洗浄後に接触圧力3Nで接触させ、この状態で両者を、温度20℃、湿度65%の環境下で、摺動距離30μmで往復摺動させ、両試験用金属材料片31、32間に開放電圧20mVを負荷して定電流5mAを流し、摺動中の電圧降下を4端子法により測定して電気抵抗の変化を1秒ごとに求めた。なお、往復運動の周波数は約3.3Hzで行った。微摺動試験前の接触抵抗値は、試験用金属材料片31、32を参考例1の材料とした場合では0.1mΩ、実施例の材料とした場合では0.5mΩであった。また、微摺動試験中の最大接触抵抗値は、試験用金属材料片31、32を参考例1の材料とした場合では4.0mΩ、実施例の材料とした場合では4.1mΩであった。
このように、参考例1及び実施例の材料は、フレッティングが発生しなかった。
The fine sliding test was performed as follows.
Each of the two test metal material pieces 31 and 32 is prepared, and the test metal material piece 31 is provided with a hemispherical overhanging portion (a convex outer surface is the outermost layer surface) 31a having a curvature radius of 1.8 mm. The outermost layer surface 32a of the test metal material piece 32 is brought into contact with the overhanging portion 31a at a contact pressure of 3 N after degreasing and cleaning, and in this state, both are slid 30 μm in an environment of a temperature of 20 ° C. and a humidity of 65%. , Sliding the plate back and forth, applying an open-circuit voltage of 20 mV between the test metal material pieces 31 and 32, passing a constant current of 5 mA, measuring the voltage drop during sliding by the four-terminal method, and measuring the change in electrical resistance by 1. Obtained every second. The frequency of reciprocating motion was about 3.3 Hz. The contact resistance value before the microsliding test was 0.1 mΩ when the test metal material pieces 31 and 32 were the materials of Reference Example 1, and 0.5 mΩ when the materials of Example 1 were used. Further, the maximum contact resistance value during the micro-sliding test was 4.0 mΩ when the test metal material pieces 31 and 32 were made of the material of Reference Example 1, and 4.1 mΩ when the material of Example 1 was used. It was.
Thus, fretting did not occur in the materials of Reference Example 1 and Example 1 .

実施例
参考例1に記載したと同様に銅合金の条にNi、Cu、Snをめっきして、めっき積層体を作製し、同様の熱処理を施して各電気電子部品用金属材料を得た。ただし、CuおよびSnのめっき厚は下記の表3にCu−Sn層で示す厚さになるものであり、Niめっきは表3に示す下地Ni層のない場合はめっきを施していない。
得られた各金属材料を供試材として試験を行い、めっき形態および評価結果を下記表3に示した。
Example 2
In the same manner as described in Reference Example 1, Ni, Cu, and Sn were plated on a copper alloy strip to prepare a plated laminate, and the same heat treatment was performed to obtain each metal material for electric and electronic parts. However, the Cu and Sn plating thicknesses are the thicknesses indicated by the Cu—Sn layer in Table 3 below, and the Ni plating is not plated when the underlying Ni layer shown in Table 3 is not provided.
The obtained metal materials were tested as test materials, and the plating forms and evaluation results are shown in Table 3 below.

上記表3および下記の表4中の項目の内容は次のとおりである。
(a)Cu−Sn形態
全面Cu−Sn、部分Cu−Sn、最表面純Snとは、材料が図14に模式的に示す層構造を有するものを意味する。
(b)銅濃度点の分析
参考例1に記載したと同様の方法で、図14に示す(1)〜(4)の各層の銅濃度を測定した。
(c)濃度分析ラインの表面純Sn有無
図14に示す部分層の表面の純Snの有無
(d)初期、160℃×120h後
供試材そのままの状態で試験を行った、または160℃×120hの熱負荷後に試験を行った。
(e)塩水噴霧後、ガス腐食後
供試材に濃度5%の塩水を噴霧した後試験を行った、または35℃のガス中で96時間腐食した後試験を行った。
(f)外観
目視により変色無しは「○」、変色のあるものは「×」とした。
(g)接触抵抗
上記試験例1に記載した微摺動前と同様に接触抵抗を測定した。接触抵抗値が5mΩ未満は「○」、5mΩ以上10mΩ未満は「△」、10mΩ以上は「×」とした。
(h)耐フレッティング性
試験例1に記載するのと同様の微摺動試験で接触抵抗を測定した。接触抵抗の上昇値が5mΩ未満は「○」、5mΩ以上10mΩ未満は「△」、10mΩ以上は「×」とした。
(i)摺動後耐熱性
自動車搭載環境を考慮すると、摺動と熱負荷が同時に、あるいは交互に繰り返されることが予想される。その現象を模擬して、摺動200回後に熱負荷80℃×100hの処理をした際の接触抵抗を測定した。接触抵抗値が5mΩ未満は「○」、5mΩ以上10mΩ未満は「△」、10mΩ以上は「×」とした。
The contents of the items in Table 3 and Table 4 below are as follows.
(A) Cu-Sn Form Full-surface Cu-Sn, partial Cu-Sn, and outermost surface pure Sn mean that the material has a layer structure schematically shown in FIG.
(B) Analysis of copper concentration point
By the same method as described in Reference Example 1, the copper concentration of each layer (1) to (4) shown in FIG. 14 was measured.
(C) Presence or absence of surface pure Sn on concentration analysis line Presence or absence of pure Sn on the surface of the partial layer shown in FIG. 14 (d) Initial test after 160 ° C. × 120 h The test was carried out after a heat load of 120 h.
(E) After spraying salt water and after gas corrosion The test material was sprayed with salt water having a concentration of 5%, and the test was performed, or the test was performed after corroding in a gas at 35 ° C. for 96 hours.
(F) Appearance Visually, “○” indicates no discoloration and “×” indicates discoloration.
(G) Contact resistance The contact resistance was measured in the same manner as before the fine sliding described in Test Example 1 above. When the contact resistance value is less than 5 mΩ, “◯” is indicated, and when the contact resistance value is 5 mΩ or more and less than 10 mΩ, “Δ” is indicated and when 10 mΩ or more is indicated, “X” is indicated.
(H) Fretting resistance Contact resistance was measured by the same microsliding test as described in Test Example 1. When the increase in contact resistance was less than 5 mΩ, “◯” was given, and “Δ” was given for 5 mΩ or more and less than 10 mΩ, and “X” was given for 10 mΩ or more.
(I) Heat resistance after sliding Considering the automobile mounting environment, sliding and thermal load are expected to be repeated simultaneously or alternately. Simulating this phenomenon, the contact resistance was measured after a heat load of 80 ° C. × 100 h after 200 slides. When the contact resistance value is less than 5 mΩ, “◯” is indicated, and when the contact resistance value is 5 mΩ or more and less than 10 mΩ, “Δ” is indicated and when 10 mΩ or more is indicated, “X” is indicated.

表3の試験No.19のように、最表面が純Snのみの場合には、耐フレッティング性および摺動後耐熱性が悪い。一方、試験No.1〜16のように、表面側のCu濃度が基体側よりも低くなっている場合には、試験No.19に比べ、耐フレッティング性が良いことがわかる。
なお、試験No.1〜15については、Cu−Sn合金層において、基体側から表面側に向けて徐々にCu濃度が減少していることを確認した。
Test No. in Table 3 When the outermost surface is pure Sn as in 19, the fretting resistance and the heat resistance after sliding are poor. On the other hand, test no. When the Cu concentration on the surface side is lower than that on the substrate side as in 1 to 16, the test No. It can be seen that compared to 19, the fretting resistance is better.
In addition, Test No. About 1-15, in the Cu-Sn alloy layer, it confirmed that Cu density | concentration was reducing gradually from the base | substrate side toward the surface side.

また、基体側半分のCu濃度が50〜100モル%であり、かつ、表面側半分のCu濃度が40〜95モル%範囲内ではない、試験No.6〜8では、範囲内であるNo.1〜5に比べて、耐フレッティング性および摺動後耐熱性が劣っていることがわかる。
同様に、Cu−Sn合金層中に部分的に純Snが分散している場合には、基体側半分のCu濃度が50〜100モル%であり、かつ、表面側半分のCu濃度が低い試験No.16でも、範囲内である試験No.11〜15に比べて、耐フレッティング性および摺動後耐熱性が劣っていることがわかる。
Further, test No. 1 in which the Cu concentration in the half on the substrate side is 50 to 100 mol% and the Cu concentration in the half on the surface side is not within the range of 40 to 95 mol%. In 6-8, it is No. which is in the range. Compared with 1-5, it turns out that the fretting resistance and the heat resistance after sliding are inferior.
Similarly, when pure Sn is partially dispersed in the Cu—Sn alloy layer, the test is such that the Cu concentration in the substrate half is 50 to 100 mol% and the Cu concentration in the surface half is low. No. 16 is also within test range. Compared with 11-15, it turns out that fretting resistance and heat resistance after sliding are inferior.

Cu−Sn合金層が0.1〜3.0μmの範囲外である試験No.9,10,17,18では、範囲内である試験No.1〜5,11〜15に比べて、耐フレッティング性および/または摺動後耐熱性が劣っている。また、Cu−Sn層の厚さが3.0μmよりも厚い場合には、試験No.9,17が示すように、160℃×120hの熱負荷後の試験において試験No.1〜5,11〜15よりも劣っており、Cu−Sn層の厚さが0.1μmよりも薄い場合には、試験No.10,18が示すように、160℃×120hの熱負荷後の試験だけでなく、塩水噴霧後、ガス腐食後試験についても、劣っていることがわかる。   Test No. in which the Cu—Sn alloy layer is outside the range of 0.1 to 3.0 μm. In 9, 10, 17, and 18, test Nos. Within the range. Compared with 1-5 and 11-15, fretting resistance and / or heat resistance after sliding is inferior. When the thickness of the Cu—Sn layer is thicker than 3.0 μm, the test No. As shown in FIGS. 9 and 17, in the test after the heat load of 160 ° C. × 120 h, the test No. When the thickness of the Cu—Sn layer is thinner than 0.1 μm, it is inferior to 1-5 and 11-15. As shown in FIGS. 10 and 18, not only the test after a heat load of 160 ° C. × 120 h but also the test after spraying with salt water and after the gas corrosion are inferior.

上述の全ての範囲内である試験No.1〜5およびNo.11〜15では、すべての評価項目でよい結果が得られている。   Test No. within the above-mentioned range. 1-5 and no. In 11 to 15, good results are obtained for all the evaluation items.

実施例
参考例1に記載したと同様に銅合金の条にNi、Cu、Snをめっきして、めっき積層体を作製し、下記表4に示す熱処理を施して各電気電子部品用金属材料を得た。ただし、CuおよびSnのめっき厚は下記の表4にCu厚、Sn層で示す厚さであり、Niめっきは表4に示す下地Ni層のないものはめっきを施していない。
得られた各金属材料を供試材として試験を行い、めっき形態および評価結果を下記表4に示した。
Example 3
In the same manner as described in Reference Example 1, Ni, Cu, and Sn were plated on a copper alloy strip to prepare a plated laminate, and heat treatment shown in Table 4 below was performed to obtain metal materials for electric and electronic parts. . However, Cu and Sn plating thicknesses are Cu thicknesses and Sn layer thicknesses shown in Table 4 below, and Ni plating without the underlying Ni layer shown in Table 4 is not plated.
The obtained metal materials were tested as test materials, and the plating forms and evaluation results are shown in Table 4 below.

表4からすべての試験のもが基体から表面側に向けて徐々にCu濃度が減少していることがわかるが、加熱温度が900℃と高い試験No.35は、その減少度合いが小さい。最表面に純Sn層を有する試験No.31〜35は耐フレッティング性が悪い。また、加熱時間や冷却時間の短い試験No.32,34は摺動後耐熱性が劣る。   From Table 4, it can be seen that the Cu concentration gradually decreased from the substrate toward the surface side. In 35, the degree of decrease is small. Test No. having a pure Sn layer on the outermost surface. 31-35 have poor fretting resistance. In addition, test No. with short heating time and cooling time. 32 and 34 are inferior in heat resistance after sliding.

気電子部品用金属材料の一実施態様を示す概略断面図である。It is a schematic cross-sectional view showing one embodiment of the electric metal material for electronic component. 本発明の電気電子部品用金属材料の一実施態様を示す概略断面図である。It is a schematic sectional drawing which shows one embodiment of the metal material for electrical and electronic components of this invention. 気電子部品用金属材料の一実施態様を示す概略断面図である。It is a schematic cross-sectional view showing one embodiment of the electric metal material for electronic component. 気電子部品用金属材料の一実施態様を示す概略断面図である。It is a schematic cross-sectional view showing one embodiment of the electric metal material for electronic component. 本発明の電気電子部品用金属材料の一実施態様を示す概略断面図である。It is a schematic sectional drawing which shows one embodiment of the metal material for electrical and electronic components of this invention. 本発明の電気電子部品用金属材料の一実施態様を示す概略断面図である。It is a schematic sectional drawing which shows one embodiment of the metal material for electrical and electronic components of this invention. 気電子部品用金属材料の一実施態様を示す概略断面図である。It is a schematic cross-sectional view showing one embodiment of the electric metal material for electronic component. 本発明の電気電子部品用金属材料の一実施態様を示す概略断面図である。It is a schematic sectional drawing which shows one embodiment of the metal material for electrical and electronic components of this invention. 参考例1の電気電子部品用金属材料のSEMによる顕微鏡写真である。 3 is a SEM micrograph of a metal material for electrical and electronic parts of Reference Example 1. 参考例1のCu−Sn−Niマップである。4 is a Cu—Sn—Ni map of Reference Example 1. 実施例の電気電子部品用金属材料のSEMによる顕微鏡写真である。2 is a SEM micrograph of a metal material for electrical and electronic parts of Example 1. FIG. 実施例のCu−Sn−Niマップである。 2 is a Cu—Sn—Ni map of Example 1. FIG. 試験例1の微摺動試験方法の斜視説明図である。6 is a perspective explanatory view of a fine sliding test method of Test Example 1. FIG. 実施例の供試材断面の説明のための層構造を模式的に示す説明図である。It is explanatory drawing which shows typically the layer structure for description of the test material cross section of Example 2 and 3. FIG.

符号の説明Explanation of symbols

1 導電性基体
2 Cu−Sn合金層
3 材料表面
4 Sn
5 Cu層
6 Ni層(下地層)
11 参考例1の測定面1
12 参考例1の測定面2
13 参考例1の測定面3
21 実施例の測定面1
22 実施例の測定面2
23 実施例の測定面3
31 試験用金属材料片
31a 試験用金属材料片に設けた半球状張出部
32 試験用金属材料片
32a 試験用金属材料片の最外層面
DESCRIPTION OF SYMBOLS 1 Conductive base | substrate 2 Cu-Sn alloy layer 3 Material surface 4 Sn
5 Cu layer 6 Ni layer (underlayer)
11 Measurement surface 1 of Reference Example 1
12 Measurement surface 2 of Reference Example 1
13 Measurement surface 3 of Reference Example 1
21 measuring surface 1 of Example 1
22 Measuring surface 2 of Example 1
23 Measuring surface 3 of Example 1
31 Metal material piece for test 31a Hemispherical overhang provided in metal material piece for test 32 Metal material piece for test 32a Outermost layer surface of metal material piece for test

Claims (9)

導電性基体上にCu−Sn合金層が設けられている電気電子部品用金属材料であって、
前記Cu−Sn合金層は、前記基体側から表面側に向けて徐々にCu濃度が減少しており、かつ、前記Cu−Sn合金層中に部分的にSnまたはSn合金が分散しており、前記Cu−Sn合金層のうち、前記基体側半分のCu濃度が50〜100モル%およびSn濃度が0〜50モル%であり、かつ、前記表面側半分のCu濃度が0〜95モル%およびSn濃度が5〜100モル%であることを特徴とする電気電子部品用金属材料。
A metal material for electrical and electronic parts in which a Cu-Sn alloy layer is provided on a conductive substrate,
In the Cu—Sn alloy layer, the Cu concentration gradually decreases from the substrate side to the surface side, and Sn or Sn alloy is partially dispersed in the Cu—Sn alloy layer , Of the Cu-Sn alloy layer, the substrate side half Cu concentration is 50 to 100 mol% and the Sn concentration is 0 to 50 mol%, and the surface side half Cu concentration is 0 to 95 mol% and A metal material for electrical and electronic parts, wherein the Sn concentration is 5 to 100 mol% .
導電性基体上に、Ni、Co、およびFeのいずれか1種の金属またはこれらの金属を含む合金が設けられ、さらにその上にCu−Sn合金層が設けられている電気電子部品用金属材料であって、
前記Cu−Sn合金層は、前記基体側から表面側に向けて徐々にCu濃度が減少しており、かつ、前記Cu−Sn合金層中に部分的にSnまたはSn合金が分散しており、前記Cu−Sn合金層のうち、前記基体側半分のCu濃度が50〜100モル%およびSn濃度が0〜50モル%であり、かつ、前記表面側半分のCu濃度が0〜95モル%およびSn濃度が5〜100モル%であることを特徴とする電気電子部品用金属材料。
A metal material for electrical and electronic parts in which any one metal of Ni, Co, and Fe or an alloy containing these metals is provided on a conductive substrate, and a Cu-Sn alloy layer is further provided thereon Because
In the Cu—Sn alloy layer, the Cu concentration gradually decreases from the substrate side to the surface side, and Sn or Sn alloy is partially dispersed in the Cu—Sn alloy layer , Of the Cu-Sn alloy layer, the substrate side half Cu concentration is 50 to 100 mol% and the Sn concentration is 0 to 50 mol%, and the surface side half Cu concentration is 0 to 95 mol% and A metal material for electrical and electronic parts, wherein the Sn concentration is 5 to 100 mol% .
導電性基体上に、Ni、Co、およびFeのいずれか1種の金属またはこれらの金属を含む合金が2層設けられ、さらにその上にCu−Sn合金層が設けられている電気電子部品用金属材料であって、
前記Cu−Sn合金層は、前記基体側から表面側に向けて徐々にCu濃度が減少しており、かつ、前記Cu−Sn合金層中に部分的にSnまたはSn合金が分散していることを特徴とする電気電子部品用金属材料。
For electric and electronic parts in which two layers of any one metal of Ni, Co, and Fe or an alloy containing these metals are provided on a conductive substrate, and a Cu-Sn alloy layer is further provided thereon A metal material,
The Cu-Sn alloy layer has a Cu concentration that gradually decreases from the substrate side to the surface side, and Sn or Sn alloy is partially dispersed in the Cu-Sn alloy layer. A metal material for electrical and electronic parts.
前記Cu−Sn合金層のうち、前記基体側半分のCu濃度が50〜100モル%およびSn濃度が0〜50モル%であり、かつ、前記表面側半分のCu濃度が0〜95モル%およびSn濃度が5〜100モル%であることを特徴とする請求項3に記載の電気電子部品用金属材料。 Of the Cu-Sn alloy layer, the substrate side half Cu concentration is 50 to 100 mol% and the Sn concentration is 0 to 50 mol%, and the surface side half Cu concentration is 0 to 95 mol% and The metal material for electrical and electronic parts according to claim 3, wherein the Sn concentration is 5 to 100 mol%. 前記Cu−Sn合金層が0.1〜3.0μmであることを特徴とする請求項1〜のいずれか1項に記載の電気電子部品用金属材料。 The metal material for electrical and electronic parts according to any one of claims 1 to 4 , wherein the Cu-Sn alloy layer is 0.1 to 3.0 µm. 請求項1〜のいずれか1項に記載の電気電子部品用金属材料の製造方法であって、
前記導電性基体上または、前記Ni、Co、およびFeのいずれか1種の金属またはこれらの金属を含む合金上に、Cu、Snの順に積層し、積層体を作製する工程、
前記積層体に対して、熱処理を行う工程、
前記熱処理工程が行われた前記積層体に対して、冷却処理を行う工程
を有することを特徴とする電気電子部品用金属材料の製造方法。
It is a manufacturing method of the metal material for electrical and electronic components of any one of Claims 1-5 ,
A step of laminating Cu and Sn in that order on the conductive substrate or the metal of any one of Ni, Co, and Fe or an alloy containing these metals to produce a laminate;
Performing a heat treatment on the laminate,
The manufacturing method of the metal material for electrical and electronic components characterized by including the process of performing the cooling process with respect to the said laminated body in which the said heat processing process was performed.
前記熱処理は、前記積層体を炉内温度300℃以上900℃未満のリフロー炉内に3〜20秒間通過させる処理であることを特徴とする請求項記載の電気電子部品用金属材料の製造方法。 The said heat processing is a process which passes the said laminated body for 3 to 20 second in the reflow furnace whose furnace temperature is 300 degreeC or more and less than 900 degreeC, The manufacturing method of the metal material for electrical and electronic components of Claim 6 characterized by the above-mentioned. . 前記冷却処理は、前記積層体を20〜80℃の液体中を1〜100秒かけて通過させる処理であることを特徴とする請求項記載の電気電子部品用金属材料の製造方法。 The said cooling process is a process which passes the said laminated body through the liquid of 20-80 degreeC over 1 to 100 second, The manufacturing method of the metal material for electrical and electronic components of Claim 6 characterized by the above-mentioned. 前記冷却処理は、前記積層体を20〜60℃の気体中を1〜300秒かけて通過させ、その後20〜80℃の液体中を1〜100秒かけて通過させる処理であることを特徴とする請求項記載の電気電子部品用金属材料の製造方法。
The cooling treatment is a treatment in which the laminate is passed through a gas at 20 to 60 ° C. over 1 to 300 seconds, and then passed through a liquid at 20 to 80 ° C. over 1 to 100 seconds. The manufacturing method of the metal material for electrical and electronic components of Claim 6 .
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