JP5274006B2 - Wire grid polarizer and manufacturing method thereof - Google Patents

Abstract

A wire grid polarizer having a flat metal grid surface and manufacturing method thereof are provided to form a metal grid of a good shape by covering an end part of the metal grid with a metal corpuscle. A metal layer part(3A) is formed on a base material(2). A metal corpuscle part(3B) is formed by cohering a metal corpuscle. A metal grid(3) comprises the metal layer part and the metal corpuscle part. An end part contacting of the base materials is covered with the metal corpuscle part. The end part on the other side of the surface contacting of the base material is flatted.

Description

  The present invention relates to a wire grid polarizer and a manufacturing method thereof.

In recent years, wire grid polarizers that are excellent in light utilization efficiency and easy to reduce in thickness have attracted attention. Several methods have been proposed as a method for manufacturing a wire grid polarizer.
For example, in the prior art of Patent Document 1, a metal thin film is formed on a glass substrate by vapor deposition, and a polymer made of a thermosetting material or a UV curable material is applied on the metal thin film, and a fine pattern is formed on the surface. A wire grid polarizer (wire grid polarizer) that forms a wire grid on a glass substrate by transferring a fine pattern to a polymer using a mold and etching the polymer and metal thin film using this fine pattern as a mask. A method is described.
On the other hand, Patent Document 2 discloses a technique for forming a wire grid with metal fine particles.
A polarizer (wire grid polarizer) described in Patent Document 2 includes a substrate, an oriented molecular film formed on the surface of the substrate, in which periodic grooves are formed parallel to each other by an alignment process, and along the grooves. By heat-treating the metal particles arranged on the line, the metal particles are provided with metal fine wires arranged parallel to each other along the groove.
JP 2005-316495 A JP 2006-251056 A

However, the conventional wire grid polarizer and the manufacturing method thereof have the following problems.
In the prior art described in Patent Document 1, since the metal thin film is formed by vapor deposition, fine unevenness may occur, and defects such as surface scratches and pinholes may occur. Therefore, in the nanometer order, since the surface of the metal thin film is not necessarily flat, there is a problem that fine patterning cannot be performed satisfactorily and a defect of a wire grid (metal lattice) may occur. In particular, if there are pinholes or large scratches, the wire grid is lost in those portions, so that the polarization component in the absorption axis direction is transmitted through the lost portion of the wire grid. For this reason, the degree of polarization (extinction ratio) is reduced. Accordingly, for example, when such a wire grid polarizing element is used in a liquid crystal display (LCD), it may cause a decrease in contrast.
On the other hand, there is a technique described in Patent Document 2 as a technique for forming a metal lattice without using vacuum film formation such as vapor deposition. In this technique, an alignment treatment is performed by rubbing an oriented molecular film with an acrylic or polyester cloth in a certain direction to form parallel and periodic grooves. Then, this oriented molecular film is immersed in a solution in which metal particles are dispersed and pulled up in the parallel direction so that the metal particles are linearly arranged in the grooves and heat-treated to form fine metal wires (metal lattices). To do. Therefore, although there is no technical problem of forming a metal thin film with a smooth surface, the accuracy of forming the fine metal wire depends on the accuracy of forming the groove based on the orientation characteristics of the oriented molecular film. Compared to the case of fine patterning, the degree of freedom of the shape pattern, pitch, cross-sectional area, etc. of the fine metal wires is small, and this is not necessarily a technique that can replace the manufacturing method of fine patterning after forming a metal film.

  This invention is made | formed in view of the above problems, and it aims at providing the wire grid polarizer from which the shape of a metal lattice becomes favorable, and its manufacturing method.

In order to solve the above-described problems, a wire grid polarizer of the present invention is a wire grid polarizer formed by forming a fine metal lattice on a light-transmitting substrate, and the metal lattice includes the base A structure comprising a metal film portion formed on a material and a metal fine particle portion formed by agglomerating metal fine particles, and at least an end portion of the metal lattice opposite to the substrate is covered with the metal fine particle portion. And
According to this invention, since the metal lattice is covered with the metal fine particle portion formed by aggregating the metal fine particles, the metal fine particle portion is covered even if the thickness of the metal film portion varies in the height direction. Thus, a metal grid having a substantially constant thickness in the height direction can be obtained. For this reason, defects in the metal lattice are reduced, and good polarization characteristics can be obtained.

The method of manufacturing a wire grid polarizer of the present invention includes a metal film forming step of forming a metal film layer on a light-transmitting substrate by vacuum film formation, and the metal film layer is formed in the metal film forming step. A metal fine particle layer forming step of forming a metal fine particle layer in which a metal fine particle dispersion in which metal fine particles are dispersed in a liquid is applied on the substrate and dried to form a metal fine particle layer, and the metal fine particles Etching using the fine concavo-convex pattern forming step of forming a fine concavo-convex pattern with a resin on the metal fine particle layer formed in the layer forming step, and the fine concavo-convex pattern formed in the fine concavo-convex pattern forming step as a mask, The metal fine particle layer below the concave portion of the fine concavo-convex pattern, or the metal fine particle layer and the metal film layer are removed up to the base material to form a metal lattice on the base material. A method and an etching process.
According to this invention, by providing the metal fine particle layer forming step, even if the metal film layer formed in the metal film forming step has a layer thickness non-uniformity or a defect such as a pinhole or a flaw, Metal fine particles are aggregated on the resulting metal film layer. For this reason, the surface is flattened and the layer thickness as the metal layer including the metal fine particle layer is made uniform. Thereby, in the fine concavo-convex pattern forming step, a fine concavo-convex pattern made of resin is satisfactorily formed. Then, the metal fine particle layer or the metal fine particle layer and the metal film layer can be removed up to the base material by an etching process, thereby forming a metal lattice having a substantially uniform layer thickness. Therefore, defects in the metal lattice are reduced, and a metal lattice having good polarization characteristics can be formed.
The present invention is a manufacturing method for manufacturing the wire grid polarizer according to claim 1.

  According to the wire grid polarizer and the method of manufacturing the same of the present invention, it is possible to improve the shape of the metal grid by covering the tip of the metal grid with the aggregated metal fine particles.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
A wire grid polarizer and a manufacturing method thereof according to an embodiment of the present invention will be described.
FIG. 1A is a schematic partial plan view showing a schematic configuration of an example of a wire grid polarizer manufactured by a method of manufacturing a wire grid polarizer according to an embodiment of the present invention. FIG.1 (b) is AA sectional drawing in Fig.1 (a). It should be noted that the number, shape, dimensional ratio, etc. of each part are exaggerated so that these drawings are easy to see (the same applies to the following drawings).

  As shown in FIGS. 1A and 1B, the wire grid polarizer 1 of the present embodiment has a substantially rectangular cross section having a width w and a height h on one surface of a light-transmitting substrate 2. A plurality of metal lattices 3 are formed in parallel at a pitch p (where p> w), and resin lattices 4 having substantially the same width and thickness t are formed on each metal lattice 3. For this reason, the resin lattice 4 of the present embodiment constitutes a lattice pattern composed of parallel line groups having the same pitch p as the metal lattice 3.

The light transmittance of the base material 2 should just have the light transmittance with respect to the wavelength of the light which the wire grid polarizer 1 should permeate | transmit at a use condition.
The base material 2 can take appropriate forms such as a plate shape, a sheet shape, and a film shape. In the drawing, it is a flat plate shape, but may be curved.
Examples of the material of the substrate 2 include glass, acrylic resin, polyester resin, polyethylene terephthalate (PET) which is a kind of polyester resin, polycarbonate (PC) resin, cyclic olefin polymer (COP), cyclic olefin copolymer (COC), A norbornene resin, a polyimide resin, or the like can be used.
When a flexible resin film is used, the manufacturing efficiency can be improved by adopting a so-called roll-to-roll manufacturing process.

Although the pitch p of the metal grating 3 varies depending on the wavelength region in which the wire grid polarizer 1 is used, for example, when used for wavelengths in the visible light region, 50 nm to 200 nm is preferable.
In addition, the thickness h of the metal grating 3 is preferably 150 nm to 250 nm, and is preferably 175 nm to 200 nm in order to obtain better optical performance.

As shown in FIG. 1B, the metal lattice 3 of the present embodiment is a metal lattice 3a (hereinafter referred to as type I) in which a metal film portion 3A and a metal fine particle portion 3B are laminated in this order from the upper surface of the substrate 2. ), A metal lattice 3b composed of only the metal fine particle portion 3B (hereinafter referred to as type II), and a height h from the upper surface of the base material 2 and a range lower than the height h from the upper surface of the metal fine particle portion 3B and the base material 2 It consists of a metal lattice 3c (hereinafter referred to as type III) composed of the formed metal film part 3A.
For this reason, in any of the types I to III, the metal lattice 3 is covered with the metal fine particle portion 3B at least at the end portion (hereinafter also referred to as the tip portion) opposite to the substrate 2.
Further, the metal lattice 3 is a portion composed of the metal fine particle portion 3B from the end portion on the base material 2 side (hereinafter also referred to as the base end portion) to the end portion on the opposite side of the base material 2 like the metal lattices 3b and 3c. It has.

The metal film part 3A is a metal part formed by vacuum film formation. For this reason, inside the metal film part 3A, metal atoms are stacked in the height direction and are closely metal-bonded to each other.
As the material of the metal film portion 3A, for example, a metal such as aluminum, silver, gold, copper, molybdenum, tantalum, tin, nickel, indium, magnesium, iron, chromium, silicon, or an alloy including these may be employed. it can. Moreover, it is good also as a structure which laminated | stacked these metals or alloys in the height direction using multiple.
Aluminum is particularly suitable because it has a high attenuation coefficient and can exhibit good polarization characteristics.

The metal fine particle portion 3B aggregates metal fine particles larger than metal atoms so as to maintain electrical continuity with each other, which is provided to align the height of the tip of the metal lattice 3 or improve flatness. It is a metal part.
As the metal fine particles, those that are called metal nanoparticles are suitable, and an appropriate particle diameter is adopted depending on the degree of unevenness at the tip of the metal lattice 3 and the size of the recess to be flattened. be able to. For example, it is preferable to select from a range of particle diameters from 1 nm to 100 nm.
The material of the metal fine particles is preferably the same type as that of the metal film portion 3A, but may be of a different type. For example, fine metal particles such as aluminum, silver, copper, molybdenum, tantalum, nickel, iron, chromium, and silicon can be employed.
Such a metal fine particle portion 3B can be identified from the metal film portion 3A because the metal fine particle portion 3B can observe the metal fine particles and has a coarse aggregate structure as compared with the metal film portion 3A. is there.

Since the resin lattice 4 is provided so as to cover the metal lattice 3, it has a function of protecting the surface of the metal lattice 3 and preventing oxidation of the metal lattice 3.
The material of the resin is not particularly limited, and an appropriate material can be adopted according to the manufacturing method described later.

Next, the manufacturing method of the wire grid polarizer of this embodiment which manufactures such a wire grid polarizer 1 is demonstrated.
Drawing 2 (a-1) is a typical process explanatory view of plane view of a metal film formation process of a manufacturing method of a wire grid polarizer concerning an embodiment of the present invention. FIG. 2A-2 is a cross-sectional view taken along the line BB in FIG. FIG.2 (b-1) is typical process explanatory drawing of the planar view of the metal microparticle layer formation process of the manufacturing method of the wire grid polarizer which concerns on embodiment of this invention. FIG. 2B-2 is a cross-sectional view taken along the line CC in FIG. FIG.3 (c-1) is typical process explanatory drawing of the planar view of the fine uneven | corrugated pattern formation process of the manufacturing method of the wire grid polarizer which concerns on embodiment of this invention. FIG.3 (c-2) is DD sectional drawing in FIG.3 (c-1). FIG.3 (d-1) is typical process explanatory drawing of the planar view of the etching process of the manufacturing method of the wire grid polarizer which concerns on embodiment of this invention. FIG.3 (d-2) is EE sectional drawing in FIG.3 (d-1).

This method includes a metal film forming step, a metal fine particle layer forming step, a fine unevenness pattern forming step, and an etching step, and a method of manufacturing the wire grid polarizer 1 by performing these steps in the order described below. It is.
In addition, when the base material 2 consists of a resin film which has flexibility, these processes are sequentially implemented along a conveyance direction in the state stretched by the roll to roll using a continuous film. Can do.

In the metal film forming step, as shown in FIGS. 2 (a-1) and (a-2), the metal film layer 6 is formed by vacuum film formation on a certain range (hereinafter referred to as a film formation range) on the substrate 2. It is a process of forming.
Since the film formation range of the present embodiment is larger than the rectangular region partially enlarged in FIG. 2A-1, the boundary of the film formation range is not particularly illustrated.
In the present specification, the “film formation range” means a range in which the metal film layer 6 should be formed in order to form the metal lattice 3. The film forming range is set by, for example, an opening using a mask member or a shielding plate. Even within the film forming range, the metal film layer 6 may be partially lost due to manufacturing defects or the like, and is distinguished from “filmed regions” excluding such defects.

As the vacuum film forming method, various known methods can be appropriately employed. For example, a vacuum deposition method using resistance heating, induction heating, electron beam (EB) heating, an ion assist deposition method, ion plating, sputtering, or the like can be employed. Further, as a chemical vapor deposition (CVD) method, a thermal CVD method, a plasma CVD method, or the like can also be employed.
In such a vacuum film forming method, defects such as pinholes and scratches may occur depending on the surface state of the substrate 2 and the manufacturing conditions. In addition, the film thickness obtained by the vacuum film formation method can be expected to be macroscopically uniform, but the film formation proceeds as the metal material that has reached the substrate 2 grows. Unevenness occurs, resulting in unevenness in the film thickness, and uneven shapes are formed on the surface.

In the present embodiment, by such a vacuum deposition method, a metal film layer 6 in height on the substrate 2 (the thickness) h ₁ was targeted. Here, the height h ₁ is such that the surface 6 a of the metal film layer 6 does not exceed the height h from the base material 2 even if the unevenness of the film thickness or the uneven surface shape occurs as described above. Set a target value.
Surface 6a, as schematically shown in FIG. 2 (a-2), becomes with an irregular shape which can not be ignored with respect to the target height h ₁ of the metal film layer 6. And these uneven | corrugated shapes are irregular patterns as a whole, as shown in FIG. 2 (a-1) in plan view, where smooth uneven surfaces with different inclination directions and bending amounts are in contact with each other at the boundary. It is a two-dimensional distribution so as to draw.
Further, the uneven shape of the metal film layer 6 may be formed by partially increasing or decreasing the film thickness due to the difference in the amount of metal attached. In addition, when the surface of the substrate 2 has defects such as scratches or foreign matter, or the metal film layer 6 is lost between the substrate 2 and the surface 6a, such as the pinhole 5, There is also.
In the conventional manufacturing method, when a pinhole is generated, the metal lattice is lost, and the polarization component in the absorption axis direction is transmitted, which causes a decrease in the degree of polarization (extinction ratio).

Next, a metal fine particle layer forming step is performed.
In this step, as shown in FIGS. 2 (b-1) and (b-2), the metal fine particle dispersion liquid 7 is applied so as to cover the film formation range on the substrate 2 on which the metal film layer 6 is formed. And drying to form the metal fine particle layer 8 in which the metal fine particles are aggregated.

The metal fine particle dispersion 7 is obtained by mixing and dispersing metal fine particles for constituting the metal fine particle portion 3B in a liquid. In addition, if necessary, after drying, a resin serving as a binder for bonding metal fine particles to form an aggregate may be mixed.
The particle size of the metal fine particles to be mixed is an average particle size that allows the metal fine particles to enter the concave-convex recesses made of the surface 6a, the pinholes 5 and the like and flatten the recesses to an acceptable flatness. Select the diameter or particle size distribution.
As the liquid, for example, one or more liquids or mixed liquids selected from water, alcohol, toluene, xylene, propylene glycol monomethyl ether (PGME), and the like can be used.
For example, acrylic, polyester, urethane, silicone, epoxy, and synthetic rubber resins can be used as the binder resin.
The composition of the metal fine particle dispersion 7 is set so that the metal fine particle dispersion 7 has an appropriate fluidity so that the metal fine particle dispersion 7 can flow after coating and the surface 7a can be flattened.

As a coating method of the metal fine particle dispersion 7, a known coating method can be employed.
In the case where the substrate 2 has a flat plate shape or a sheet shape, for example, spin coating, dip coating, spray coating, an ink jet method, a wire bar method and the like are suitable.
Moreover, when the base material 2 consists of a continuous film, microgravure, die coating, comma coating, lip coating, etc. are suitable, for example.
In this step, by using any one of these coating methods, the metal fine particle dispersion liquid 7 is applied from the base material 2 to the height h ₂ so as to cover the film formation range. The height h ₂ is set to a value larger than the height h so that the surface descends after drying and is positioned at the height h from the base material 2.
As a result, the metal fine particle dispersion liquid 7 penetrates into the concave-convex concave portion of the surface 6 a and further exceeds the convex portion, and the surface 6 a and the pinhole 5 in the film forming range are covered with the metal fine particle dispersion liquid 7.

Since the metal fine particle dispersion 7 has appropriate fluidity, the metal fine particle dispersion 7 flows from the convex portion to the concave portion on the surface 7a even if unevenness occurs to some extent due to coating unevenness at first. The unevenness of the surface 7a is relaxed, and the surface 7a is flattened.
Further, in the pinhole 5, the metal fine particle dispersion 7 penetrates into the pinhole 5, so that the metal fine particle dispersion 7 is filled from the substrate 2 to the surface 7 a.
In this manner, a metal layer portion having a flat surface 7 a with a height h ₂ is formed on the substrate 2 by the metal film layer 6 and the metal fine particle dispersion 7.

Next, the metal fine particle dispersion 7 in this state is dried.
As a drying means, an appropriate means can be adopted according to the liquid or resin contained in the metal fine particle dispersion 7.
For example, when the liquid is evaporated or volatilized, it is preferably heated and dried. For example, a known drying means such as drying by heating a substrate with a hot plate, heating drying with an oven, or hot air drying by blowing hot air can be used.
In addition, when the resin of the metal fine particle dispersion 7 is polymerized and cured by ultraviolet (UV) light or EB, the resin can be dried by irradiation with UV light or EB. When the binder resin is used, it is easy to improve the dispersion state of the metal fine particles, and the content ratio of the metal fine particles in the metal fine particle dispersion 7 can be increased. Therefore, the material cost can be reduced and the process time can be shortened.
Surface 7a of the fine metal particle dispersion 7, it is dried in this way, although is slightly lower than the height h ₂ with a decrease in volume, the liquid is substantially uniformly evaporated from the surface 7a, the volatile Therefore, the flattened state is maintained.

Next, the dried metal fine particle dispersion 7 is further heated to form an aggregate in which the metal fine particles are bonded to each other. As the heating means, the same means as in the case of performing heat drying, that is, means such as a hot plate, an oven, or hot air blowing can be employed.
The heating condition is preferably higher than the recrystallization temperature of the metal, for example, in the case of aluminum, it is heated for about 30 minutes so that the metal fine particles become 200 ° C. Thereby, metal fine particles are combined to form an aggregate, and a metal fine particle layer 8 having a height from the base material 2 of h is formed.
At this time, the surface 8a is kept in the same flat state as when the metal fine particle dispersion 7 is dried.
In addition, when the binder resin is included in the metal fine particle dispersion 7, the metal fine particle layer 8 bonded more firmly is formed by this heating in combination with the sublimation of the binder resin.
The heating step for forming the agglomerates of metal fine particles may be omitted and used in a dry state. In this case, since the density of the metal fine particle aggregate is low, the performance as a polarizer is slightly inferior, but there is an effect of shortening the process.
The metal fine particle layer forming step is thus completed.

Next, a fine concavo-convex pattern forming step is performed.
In this step, as shown in FIGS. 3 (c-1) and (c-2), a fine concavo-convex pattern is formed by the resin lattice 4 on the surface 8 a of the metal fine particle layer 8.
As a method for forming the resin lattice 4, a well-known photolithography method or nanoimprint method can be employed.

For example, in the case of the photolithography method, first, a positive type or negative type photoresist is applied on the surface 8 a of the metal fine particle layer 8 with a constant film thickness. As a coating method, the same coating method as that applied with the metal fine particle dispersion 7 in the metal fine particle layer forming step can be employed. At this time, since the surface 8a is flattened, a photoresist can be satisfactorily applied and adhesion can be improved. Further, variations in the thickness of the photoresist can be reduced.
Next, the photomask corresponding to the lattice pattern composed of the parallel lines of the resin lattice 4 is subjected to equal magnification exposure or reduced exposure. At this time, since the surface 8a is flat, there is little scattering on the surface 8a, and even if the surface 8a is scattered, there is little variation depending on the location, so that an accurate pattern can be exposed. Further, since there is little variation in the film thickness of the photoresist, uneven exposure is also reduced.
Then, by performing development, drying, rinsing, and the like, a resin lattice 4 made of a photoresist to which a photomask pattern is transferred is formed.

In the case of the nanoimprint method, first, a mold having an uneven shape in which the lattice pattern of the resin lattice 4 is inverted is prepared. Then, a thermoplastic resin or a UV curable resin is applied on the surface 8a. At this time, since the surface 8a is flattened, a thermoplastic resin or a UV curable resin can be satisfactorily applied, and adhesion can be improved. Further, variation in the film thickness of the thermoplastic resin or the UV curable resin can be reduced.
In the case of a thermoplastic resin, a heated mold is pressed against the applied thermoplastic resin, the uneven shape of the mold is transferred to the thermoplastic resin, and demolded.
In the case of a UV curable resin, UV light is irradiated through the mold in a state where the mold is pressed against the applied UV curable resin. Then, the mold is removed after the UV curable resin is cured along the uneven shape of the mold.
In this way, the resin lattice 4 made of a thermoplastic resin or a UV curable resin is formed.

When a thin resin layer remains on the surface 8a between adjacent resin lattices 4 depending on the shape of the recess of the mold, so-called residue portions are formed, for example, reactive ions using oxygen gas or the like By removing by etching or the like, a resin lattice 4 as shown in FIG. 3C-2 is formed.
However, when the residue portion is removed in the next etching step, the residue portion may be left in this step.

Next, an etching process is performed.
In this step, as shown in FIGS. 3D-1 and 3D-2, etching is performed using the fine concavo-convex pattern formed by the resin lattice 4 as a mask, and the metal below the concave portion of the fine concavo-convex pattern is formed. In this step, the fine particle layer 8 or the metal film is removed up to the base material 2 to form the metal lattice 3 on the base material 2. However, when the concave portion of the fine concavo-convex pattern is formed by the residue portion in the nanoimprint method, the residue portion is also removed together with the metal fine particle layer 8 and the like.

In this step, the base material 2 in a state where the resin lattice 4 is formed in the fine concavo-convex pattern forming step is placed between electrodes of a dry etching apparatus (not shown) in which the degree of vacuum is 1.33 × 10 ² Pa (1 Torr) or less. Carry in. Then, a mixed gas of boron trichloride and chlorine is supplied as a reactive gas between the electrodes, and a plasma 100 is generated by applying a high frequency voltage such as 400 kHz or 13.56 MHz to the electrodes. Then, plasma 100 is sprayed onto the base material 2 from the side where the resin lattice 4 is provided, and the metal fine particle layer 8 and the metal film layer 6 are reactive ion etched using the resin lattice 4 as a mask.
When the metal fine particle layer 8 or the metal film layer 6 between the adjacent resin lattices 4 is removed up to the base material 2, the etching process is finished.

  As a result, as shown in FIG. 3 (d-2), the metal fine particle layer 8 and the metal film layer 6 on the substrate 2 remain only under the resin lattice 4, and the metal fine particle layer 8 and the metal film layer 6 are retained. The metal fine particle part 3B and the metal film part 3A are formed by these parts. Therefore, a wire grid polarizer 1 as shown in FIGS. 1A and 1B is manufactured.

  According to the wire grid polarizer 1 of the present embodiment, since the tip of the metal lattice 3 is covered with the metal fine particle part 3B, the thickness of the metal film layer 6 is not uniform, Even if there are defects or scratches on the upper side, the shape of the metal lattice 3 can be improved. That is, the height h from the base material 2 and the cross-sectional shape are substantially constant. Thereby, for example, a decrease in the degree of polarization (extinction ratio) due to the loss of the metal lattice 3 can be reduced, and the polarization characteristics can be improved.

  Further, in the wire grid polarizer 1, since the metal fine particle portion 3B made of an aggregate of metal fine particles is formed at the front end portion of the metal lattice 3, the reflectance at the front end portion is lowered, and as a result, the liquid crystal display device Even if it is used as a so-called upper polarizing plate closer to the viewer than the liquid crystal panel in FIG. 1, it is possible to prevent a decrease in contrast due to reflection of external light.

  Moreover, according to the manufacturing method of the wire grid polarizer 1 of the present embodiment, since the metal fine particle forming step of applying the metal fine particle dispersion 7 and forming the metal fine particle layer 8 is provided, it is obtained by vacuum film formation. Further, since the flattened surface 8a is formed, the patterning of the fine uneven pattern on the surface 8a is facilitated, and the resin lattice 4 serving as an accurate mask can be formed. For this reason, the defect of a fine uneven | corrugated pattern can be reduced and the manufacture quality of the wire grid polarizer 1 can be improved.

Next, a first modification of the present embodiment will be described.
Fig.4 (a) is typical sectional drawing which shows schematic structure of the wire grid polarizer which concerns on the 1st modification of embodiment of this invention.

As shown in FIG. 4A, the wire grid polarizer 1A of this modification is obtained by removing the resin lattice 4 from the wire grid polarizer 1 of the above embodiment.
In order to remove the resin lattice 4, for example, by appropriately setting the coating thickness of the resin lattice 4 for forming the resin lattice 4, the metal fine particle layer 8 and the metal film layer 6 are formed by the etching process of the above embodiment. The resin lattice 4 on the metal lattice 3 can also be removed during the etching.
In addition, in order to remove the resin lattice 4 after the etching step of the above embodiment, a resin lattice removal step for performing dry etching such as reactive ion etching using a reactive gas such as oxygen or CF ₄ is provided. Also good. In this case, the reaction product with the reactive gas in the etching process deposited between the metal lattices 3 together with the resin lattice 4 can be removed at the same time.

Next, a second modification of the present embodiment will be described.
FIG.4 (b) is typical sectional drawing which shows schematic structure of the wire grid polarizer which concerns on the 2nd modification of embodiment of this invention.

As shown in FIG. 4B, the wire grid polarizer 1 </ b> B of the present modification has the plurality of metal gratings 3 at the tips of the plurality of metal gratings 3 of the wire grid polarizer 1 </ b> A of the first modification. A protective layer 9 for covering is formed. That is, the protective layer 9 is a layered member that faces the substrate 2 with the metal grid 3 interposed therebetween.
The protective layer 9 may be configured as a single layer that covers the tips of all the metal grids 3 or may be provided with a plurality of protective layers 9 by dividing the metal grid 3 into a plurality of regions as necessary. .

As a material of the protective layer 9, for example, a transparent dielectric such as silicon oxide, aluminum oxide, titanium oxide, magnesium oxide, and zinc oxide is suitable.
As a method for forming the protective layer 9, the same vacuum film forming method as described in the metal film forming step of the above embodiment can be employed.
However, at the time of this vacuum film formation, in order to make the optical performance of the wire grid polarizer 1B good, as shown in FIG. It is preferable to form the protective layer 9 so that only the tip portion is covered.
For this reason, when using vacuum vapor deposition, ion-assisted vapor deposition, or an ion plate, it is preferable to form a film from an oblique direction with respect to the normal direction of the substrate 2.
In the case of using sputtering, it is preferable to form the film in a relatively low degree of vacuum (high pressure) so that the variation in directionality of the film formation particles is reduced.

According to the wire grid polarizer 1 </ b> B of the present modified example, the protective layer 9 is provided at the tip of the plurality of metal grids 3, so that there are no protective layers 9 or a plurality of metal grids 3 like the resin grid 4. The mechanical strength of the wire grid polarizer 1 </ b> B can be increased compared to the case where the wire grid polarizer 1 </ b> B is not provided. Moreover, the hardness and friction resistance of the wire grid polarizer 1B can be improved by providing the protective layer 9 with good hardness and friction resistance on the surface opposite to the substrate 2.
Further, when the wire grid polarizer 1B is bonded to the LCD substrate with an adhesive, it is possible to prevent the space between the adjacent metal grids 3 from being filled with the adhesive. Thereby, it is possible to prevent the optical performance from being deteriorated by filling the space between the adjacent metal gratings 3 with an adhesive or the like.

Next, third and fourth modifications of the present embodiment will be described. These modifications are modifications related to the formation pattern of the metal grid of the wire grid polarizer.
FIG. 5A is a schematic plan view showing a schematic configuration of a wire grid polarizer according to a third modification of the embodiment of the present invention. FIG. 5B is a schematic plan view showing a schematic configuration of a wire grid polarizer according to a fourth modification of the embodiment of the present invention.

As shown in FIG. 5A, the wire grid polarizer 1C according to the third modification is not provided in the extending direction of the metal grid 3 and the resin grid 4 in the wire grid polarizer 1 of the above embodiment. A continuous portion 10 is provided.
However, the illustrated discontinuous portion 10 is an example. Any number of the discontinuous portions 10 may be provided in the extending direction as long as the polarization characteristic is within an allowable range, and the positions of the discontinuous portions 10 of the adjacent metal gratings 3 may be shifted. The discontinuous portion 10 needs to have a length equal to or less than one-tenth of the wavelength of light because the deterioration of polarization characteristics is within an allowable range, and is smaller in size than the pinhole or the like. Is.

  As shown in FIG. 5 (b), the wire grid polarizer 1D of the fourth modification is the same as the wire grid polarizer 1 of the above embodiment, in which the metal grid 3 and the resin grid 4 are not parallel lines but have a constant pitch. This is a curved lattice pattern.

  In the above description, the metal lattice 3 has been described as an example in which types I, II, and III are mixed. However, this is because the pinhole 5 and the like exist in the metal film layer 6 as an example. It is. When the metal film layer 6 has no defect of the metal film layer 6 such as the pinhole 5, all the metal lattices 3 may be of type I.

  Further, the constituent elements described in the above embodiments and modifications may be implemented in appropriate combination within the scope of the technical idea of the present invention, if technically possible. For example, in the wire grid polarizers 1A and 1B of the first and second modified examples, the pattern of the metal grating 3 is discontinuous in the extending direction as in the third modified example, or as in the fourth modified example. Modifications such as bending may be performed.

Here, a case will be described where the names of the correspondence relationship between the terminology of the above embodiment and the terminology of the claims are different.
The resin lattice 4 is an embodiment of a fine uneven pattern.

It is the typical fragmentary top view which shows schematic structure of an example of the wire grid polarizer manufactured with the manufacturing method of the wire grid polarizer which concerns on embodiment of this invention, and its AA sectional drawing. Schematic process explanatory drawing of the planar view of the metal film formation process of the manufacturing method of the wire grid polarizer which concerns on embodiment of this invention, and a metal fine particle layer formation process, and each BB sectional drawing, CC sectional drawing It is. It is typical process explanatory drawing of planar view of the fine unevenness | corrugation pattern formation process and etching process of the manufacturing method of the wire grid polarizer which concerns on embodiment of this invention, and DD sectional drawing, EE sectional drawing of each. . It is typical sectional drawing which shows schematic structure of the wire grid polarizer which concerns on the 1st, 2nd modification of embodiment of this invention. It is a typical top view which shows schematic structure of the wire grid polarizer which concerns on the 3rd, 4th modification of embodiment of this invention.

Explanation of symbols

1, 1A, 1B, 1C, 1D Wire grid polarizer 2 Base material 3, 3a, 3b, 3c Metal lattice 3A Metal film portion 3B Metal fine particle portion 4 Resin lattice (fine uneven pattern)
3 Pinhole 6 Metal film layer 7 Metal fine particle dispersion 8 Metal fine particle layer 6a, 7a, 8a Surface 9 Protective layer 10 Discontinuous part

Claims (2)

A wire grid polarizer formed by forming a fine metal lattice on a light transmissive substrate,
The metal grid is
And the metal film portion formed on the substrate, and a metal particle portion composed by aggregating the fine metal particles, an end portion of at least the base material of the metal grating opposite side is from the metal fine particles portion,
The metal grid is
A wire-lid polarizer comprising a portion made of the metal fine particle portion that covers a side surface of the metal film layer and extends from an end portion on the base material side to an end portion on the opposite side to the base material . A metal film forming step of forming a metal film layer by vacuum film formation on a light-transmitting substrate;
A metal fine particle layer in which metal fine particles are dispersed in a liquid is applied onto the substrate on which the metal film layer has been formed in the metal film forming step, and dried to form a metal fine particle layer in which the metal fine particles are aggregated. A metal fine particle layer forming step to be formed;
A fine concavo-convex pattern forming step of forming a fine concavo-convex pattern with a resin on the metal fine particle layer formed in the metal fine particle layer forming step;
Etching is performed using the fine concavo-convex pattern formed in the fine concavo-convex pattern forming step as a mask, and the metal fine particle layer below the concave portion of the fine concavo-convex pattern, or the metal fine particle layer and the metal film layer are An etching step of removing the base material and forming a metal lattice on the base material,
The metal grid is
A method for producing a wire-type polarizer, comprising a portion that covers the side surface of the metal film layer and includes the metal fine particle portion from an end portion on the substrate side to an end portion on the opposite side to the substrate .

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