JP5266792B2 - X-ray inspection equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray inspection system for teaching necessary observation points and observation directions for inspecting an article without providing the article to be inspected and also improving workability in the teaching work. <P>SOLUTION: The X-ray inspection system displays the three-dimensional model M of an object to be inspected, based on three-dimensional information and dimension information of the object to be input and installation location information to a sample stage 13; stores a plurality of observation points, observation directions, and observation magnification when the object is observed on the three-dimensional model M, which are sequentially set; and moves the sample stage 13 and the relative position between an X-ray generator 11 and an X-ray detector so as to obtain the observation points, the observation directions, and the observation magnification according to the sequence set when an actual object is observed. Setting with the display of the three-dimensional model based on 3D CAD data allows one to easily grasp the observation points and the observation directions of the object without providing the object and to achieve facilitation and efficiency of the teaching work. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

  In the present invention, an object such as various industrial products is arranged between an X-ray generator and an X-ray detector, and transmitted X-rays obtained by irradiating the object with X-rays from the X-ray generator are X-rays. The present invention relates to an X-ray inspection apparatus that detects an X-ray fluoroscopic image of an object using a detection output detected by a detector.

  For example, fluoroscopic methods using X-rays are frequently used for applications in which the presence or absence of defects inside an article is inspected nondestructively. In the fluoroscopy method using X-rays, the target article is placed between an X-ray generator and an X-ray detector arranged opposite to each other, and X-rays are irradiated to detect X-rays transmitted through the article. An X-ray inspection apparatus is used that detects with an instrument and constructs an X-ray fluoroscopic image of the article.

  In this type of X-ray inspection apparatus, usually, a pair of an X-ray generator and an X-ray detector and a moving mechanism that relatively moves the object to be fluoroscopically provided are provided. The point can be seen through from any direction.

  When repeatedly observing a large number of articles having the same shape and dimensions, such as when inspecting the presence or absence of voids inside an aluminum die cast part, using such an article fluoroscopic method using an X-ray inspection apparatus It is useful to use an X-ray inspection apparatus having a so-called teaching function (see, for example, Patent Document 1).

In an X-ray inspection apparatus having a teaching function, generally, prior to actual observation, an operator manually moves an object relative to the X-ray generator and the X-ray detector using the object, Positioning at observation points (teaching points) and registering each of these points in sequence is adopted. When observing an actual object, the moving mechanism is automatically changed so that the observation points are changed in the registered order. Drive control.
A method is also employed in which an object is photographed by a CCD camera or the like, and observation points are sequentially registered using an optical image of the object while an application incorporated in the X-ray apparatus is activated.
JP 2004-117214 A

  By the way, according to the above-described conventional X-ray inspection apparatus having a teaching function, in teaching, the actual article to be processed is necessary, and teaching cannot be performed without the actual article. As a method of teaching without using the real thing, the target article is photographed with an optical camera, etc., and the observation point and the observation direction are set sequentially using the appearance image, or the planar design of the article Although a method of making the same setting using the figure is conceivable, there is a problem that it is difficult for the operator to sensuously grasp the observation point, the observation direction, etc., regardless of which method is adopted.

  In addition, in a conventional X-ray inspection apparatus having a teaching function, a plurality of observation points and observation directions are registered sequentially, and the observation points and observation directions are changed in that order during actual observation. In the process of changing from one observation point to the next observation point, the relative movement speed between the pair of the X-ray generator and X-ray detector by the moving mechanism and the object is the risk of dropping the object. In some cases, the setting can be made in consideration of the above, but the observation (perspective) in the process of moving between the two observation points, that is, the point of performing the flowing observation is not considered.

  Furthermore, in an X-ray inspection apparatus equipped with a conventional teaching function, during actual observation, each observation point and observation direction registered by teaching are automatically changed sequentially until reaching the final observation point. There is also a problem that if a series of operations are not completed or the operation is not stopped, it is not possible to return to an already observed point or to observe a point other than the registered observation point.

  The main problem of the present invention is that it is possible to teach an observation point, an observation direction, etc. necessary for inspecting the article without preparing the target article, and in the teaching work, an observation point, an observation direction, etc. It is an object of the present invention to provide an X-ray inspection apparatus that makes it easy for an operator to grasp sensuously and can improve workability.

  Another object of the present invention is to provide an X-ray inspection apparatus capable of performing a flowing observation that continuously changes an observation point, an observation direction, and the like.

  Still another object of the present invention is to move at a specified point in time when performing actual observation under the procedure registered by teaching, particularly when performing observation that flows as described above. To provide an X-ray inspection apparatus that can reproduce the state of a mechanism and can easily reproduce a fluoroscopy of a portion that needs to be reconfirmed on a fluoroscopic image that changes every moment in a flowing observation work. is there.

In order to solve the above-described problems, an X-ray inspection apparatus according to the present invention is provided with a sample stage for placing an object between an X-ray generator and an X-ray detector arranged to face each other. A moving mechanism for moving the position of the sample stage relative to the apparatus and the X-ray detector, and transmitting X-rays obtained by irradiating an object on the sample stage with the X-rays from the X-ray generator In an X-ray inspection apparatus which detects with an X-ray detector and obtains an X-ray image of an object using the detection output, the inputted three-dimensional shape information and dimension information of the object and the object on the sample stage A three-dimensional model display means for displaying a three-dimensional model of the object based on the installation position information, and a plurality of observation points and observation directions when actually observing the object on the displayed three-dimensional model; And observation magnification set sequentially Setting means, storage means for sequentially storing each set observation point and observation direction, and observation magnification, and the observation point and observation direction during actual observation of the object according to the stored contents, and Control means for driving and controlling the moving mechanism so that the observation magnification changes sequentially , and further, after the setting by the setting means is completed, based on the setting contents stored in the storage means, the three-dimensional model is visualized This is characterized by having simulation display means for displaying the setting contents for simulation by displaying the animation of the three-dimensional model .

  Here, in the present invention, in addition to setting the observation point, the observation direction, and the observation magnification in the setting contents by the setting means, the observation direction and the observation magnification are continuously changed, and the change speed thereof is set. A configuration including the setting contents to be set (claim 2) can be suitably employed.

  Further, in the present invention, based on the input three-dimensional shape information and dimension information of the target object and the installation position information of the target object on the sample stage, the setting content by the setting means is changed to the actual target object. It is preferable to adopt a configuration (Claim 3) that limits the range in which the object and the apparatus structure do not interfere during observation.

Further, in the present invention, during the actual observation of the object based on the contents of the storage means, the observation field of view is changed every 3 times in synchronization with the driving of the moving mechanism, separately from the X-ray fluoroscopic image of the object. You may employ | adopt the structure ( Claim 4 ) provided with the observation visual field display means displayed using a dimensional model.

Furthermore, in the present invention, when actually observing the object based on the contents of the storage means, the position information of the moving mechanism at that time is stored by designating the display state of an arbitrary perspective image, and a series of It is also possible to adopt a configuration in which the state of the moving mechanism at the time of the designation can be reproduced after the observation operation is finished ( Claim 5 ).

  The present invention uses, for example, 3D shape information and dimension information of an object such as 3D CAD data and arrangement position information on a sample stage, and uses a 3D model such as a wire frame model or a surface model of the object. It is intended to facilitate teaching without using a real object by displaying and enabling the observation point, observation direction, observation magnification, and the like to be sequentially set on the three-dimensional model.

  That is, by using the three-dimensional shape information and dimension information such as 3D CAD data of the object and the installation position information on the sample stage, the relative position between the pair of the X-ray generator and the X-ray detector and the sample stage can be calculated. The relationship with the position of the object appearing in the field of view of the X-ray detector and the relationship with the obtained X-ray fluoroscopic image can be obtained. In the present invention, by sequentially setting the observation point, the observation direction, etc. using the display of the three-dimensional model based on the three-dimensional shape information of the target object, these setting contents are stored in order, and the actual target object is stored. The moving mechanism is automatically controlled according to the stored contents during observation. That is, teaching can be performed using the display of the three-dimensional model. By using such a three-dimensional model, it is easy to grasp three-dimensionally from which direction and what point the object is observed, and teaching work can be made easy and efficient.

  In the invention according to claim 2, in addition to setting the observation point, the observation direction, and the observation magnification as setting contents at the time of teaching, the observation direction and the observation magnification can be continuously changed and the change speed can be set. With this configuration, when observing an actual target object, it is possible to perform the observation as described above, in which the perspective field changes continuously.

  Further, when the three-dimensional shape information and dimension information of the object and the installation position information for the apparatus are used, the relative position relationship between the object structure such as the X-ray generator and the X-ray detector and the object can be known. The invention according to claim 3 is configured to prohibit setting of a positional relationship in which an object structure and an apparatus structure such as an X-ray generator and an X-ray detector interfere with each other during teaching using a three-dimensional model. doing. This eliminates the possibility of collision between the object and the apparatus during actual observation without using the actual object.

By using the animation display of the three-dimensional model, the X-ray fluoroscopic image obtained with each observation point, observation direction, and observation magnification set is displayed after the teaching is finished, simulating the three-dimensional model as a fluoroscopic image. In other words, the setting contents can be displayed for simulation, and the invention according to claim 1 is also characterized by having this function.

Similarly, by using an animation display of a three-dimensional model, a three-dimensional model can be displayed every time the observation field of view is synchronized with the driving of the moving mechanism during the actual observation operation based on the teaching contents stored in the storage means. The invention according to claim 4 is characterized in that it has this function.

And like the above-mentioned invention according to claim 2, when the observation direction and the observation magnification are continuously changed and the change speed can be arbitrarily set, and the observation that flows during actual observation is performed. In particular, there may be situations where the operator wishes to observe again during the series of observation operations. In the invention according to claim 5 , by designating in the display state of an arbitrary perspective image during the actual observation operation, the position information of the moving mechanism at that time is stored, and after the end of the series of observation operations, The state of the moving mechanism is reproduced, and an X-ray fluoroscopic image in a designated state can be displayed.

  According to the present invention, by using the three-dimensional shape information and dimensions of the object and the installation position information on the sample stage, the observation point, the observation direction, and the observation magnification required for the inspection on the three-dimensional model of the object. Etc. can be set and stored in advance, and the operation according to the stored contents can be automatically and repeatedly executed when an actual article is inspected. That is, according to the present invention, teaching using a three-dimensional model can be performed without requiring an article to be inspected, and teaching is performed using a three-dimensional model. Compared with the case where a typical design model is used, the direction and position are easily understood by the operator, and teaching work can be facilitated and made more efficient.

  Further, as in the invention according to claim 2, by enabling the setting of the operation for continuously changing the observation direction and the observation magnification, so-called flowing observation in which the X-ray fluoroscopic field changes continuously is possible. Thus, the inspection efficiency can be further improved.

In teaching using a three-dimensional model, by restricting the setting contents so that interference between the object and the device structure does not occur (Claim 3), the object can be observed during actual observation without using the actual object. Can be prevented from colliding with the device structure, and the teaching display result can be confirmed by providing a simulation display function using animation of a three-dimensional model ( Claim 1 ). An easy-to-use X-ray inspection apparatus can be obtained.

In addition, when the object is actually observed, the observation field of view is displayed by an animation or the like using a three-dimensional model ( Claim 4 ), so that the operator is observing which position of the object from which direction. Can be easily grasped.

And, by observing the actual target object after teaching, by designating it at any time, the observation situation at the designated time point is reproduced ( Claim 5 ). It is possible to prevent a defect or the like from being overlooked.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a configuration diagram of an embodiment of the present invention, and is a diagram illustrating a perspective view showing a configuration of an apparatus main body and a block diagram showing a system configuration.

  The apparatus main body 1 is mainly composed of an X-ray generator 11, an X-ray detector 12, and a sample stage 13 for placing and moving an object. The X-ray generator 11 and the X-ray detector 12 are supported by a common support arm 14 in a state of facing each other. The support arm 14 is supported with respect to the column 15 via a tilting mechanism 16 and a Z stage 17. By driving the tilting mechanism 16, the X-ray generator 11 and the X-ray detector 12 are kept in a horizontal state while maintaining an opposing state. While tilting (turning) about the axis and driving the Z stage 17, the pair of the X-ray generator 11 and the X-ray detector 12 is maintained in the opposite state in the vertical direction together with the tilting mechanism 16 (z-axis direction). )

  The X-ray generator 11 generates cone-beam X-rays, and the X-ray detector 12 is a two-dimensional X-ray detector such as an FPD (flat panel detector).

  The sample stage 13 is disposed adjacent to the column 15. The sample stage 13 mounts an object and rotates around a vertical rotation axis, and an XY table that moves the rotation table 18 in two axial directions (x and y axis directions) orthogonal to each other on a horizontal plane. 19 is the main constituent.

  The tilt mechanism 16, the Z stage 17, the rotary table 18 and the XY table 19 are driven and controlled by a control signal supplied from an axis control unit 21, and the axis control unit 21 is an arithmetic / control device 22 mainly composed of a computer. Is under the control of. The tube current and tube voltage of the X-ray generator 11 are supplied from the X-ray controller 23, and the X-ray controller 23 is also under the control of the arithmetic / control device 22.

  The output of the X-ray detector 12 is taken into the arithmetic / control device 22 via the image data acquisition circuit 24. In the arithmetic / control device 22, the transmitted X-rays of the object detected by the X-ray detector 12 are used. Then, an X-ray fluoroscopic image of the object is constructed and displayed on the display unit 25.

  An operation unit 26 including a jog dial, a keyboard, a mouse, a joystick, etc., which will be described later, is connected to the calculation / control device 22, and the tilting mechanism 16, Z is connected via the axis control unit 21 by manual operation of the operation unit 26. Drive control signals can be supplied to the stage 17, the rotary table 18, and the XY table 19 to be moved arbitrarily. Further, in automatic operation after teaching, which will be described later, the calculation / control unit 22 automatically drives and controls the XY table 19 and the like based on the teaching content.

  In X-ray fluoroscopy of the object, the XY stage 19 is driven to move the object on the rotary table 18 in the y-axis direction, and the Z stage 17 is driven to detect the X-ray generator 11 and the X-ray detection. The observation point (the field of view of the X-ray detector 12) can be changed by moving the pair of the detectors 12 in the z-axis direction, and the rotating table 18 is driven to rotate the object or tilting. By driving the mechanism 16 and tilting the pair of the X-ray generator 11 and the X-ray detector 12, the observation direction (the fluoroscopic direction) can be changed. Furthermore, the observation magnification (perspective magnification) can be changed by driving the XY table 19 to move the object in the x-axis direction.

  The arithmetic / control device 22 is linked to the 3D CAD system 3, and the 3D design data (three-dimensional shape information and dimensional information) of the object is transferred from the 3D CAD system 3 to the arithmetic / control device 22. The calculation / control device 22 can display a three-dimensional model of the object, for example, a wire frame model or a surface model, based on the data. In addition, by operating the operation unit 26, it is possible to input the installation position information of the target object on the rotary table 18, and using the input information and the transfer information described above, a three-dimensional model of the target object is used. Teaching can be performed like this.

  2A, 2B, and 2C show an example of a three-dimensional shape of an object in a plan view, a front view, and a right side view. With such a three-dimensional model displayed on the display unit 25, the operator operates the operation unit 26 to perform teaching when inspecting an actual object, that is, an observation point, an observation direction, and an observation. A series of observation operations in which the magnification and the like are sequentially changed can be set. FIG. 3 shows an idea diagram thereof. The positional relationship r between the three-dimensional model M of the object and the driving system model (rotation table 18 and XY table 19) m inside the X-ray, for example, the object is rotated in the posture shown in the front view of FIG. It is installed on the table 18, and the installation position is set such that the left and right and front and rear centers of FIG. 2B and the rotation center of the rotary table 18 coincide with each other. The change procedure V is set.

  The actual display method of the three-dimensional model at the time of teaching is not particularly limited. For example, a 3D CAD system or the like that is commonly used in a 3D CAD system or the like can be used in accordance with the observation direction. Rotate the three-dimensional model, move the three-dimensional model with the center of the display screen as the center of observation (field of view center), and change the size of the three-dimensional model according to the observation magnification. be able to. An example is shown in FIG. In the example of FIG. 4, the initial observation direction is the direction of the front view of FIG. 2B (FIG. 4A), and the observation point is moved in the y and z axis directions without changing the observation direction. (FIGS. 4B and 4C), and then the observation direction is changed to rotate around the z axis (FIGS. 4D and 4E).

  The state in which the X-ray fluoroscopic images as illustrated in FIGS. 4A to 4E are obtained is the three-dimensional shape information and dimensional information of the object, and the installation position information of the object on the rotary table 18. Is uniquely expressed by the combination of the rotation angle of the rotary table 18 and the position of the XY table 19 in the x and y axis directions, the tilt angle of the tilt mechanism 16 and the position of the Z stage 17 in the z axis direction. The calculation / control device 22 stores the position and angle of each of these moving mechanisms for obtaining each taught state. Further, the arithmetic / control device 22 uses the three-dimensional shape information and dimension information of the object and the installation position information on the rotary table 18 to thereby rotate the rotary table 18, the position of the XY table 19, and the tilting mechanism. In relation to the positions of the X-ray generator 11 and the X-ray detector 12 by the 16 and the Z stage 17, the range in which the object interferes with the device structure such as the X-ray generator 11 and the X-ray detector 12 can be known. During the teaching operation described above, setting to the operation range of the moving mechanism that interferes with the object and the apparatus structure is prohibited.

In the above teaching, the states shown in FIGS. 4A to 4E may be stopped for a certain period of time using the teaching points as the teaching points, and the movement speeds (observation points) between these teaching points may be stopped. And the change speed of the observation direction), or without stopping at each teaching point as described above, using each state of FIGS. 4A to 4E as a passing point, It can also be a so-called flowing observation in which the observation direction is continuously changed. For such a setting, for example, a jog dial 26a as shown in FIG. In the example of FIG. 5, it is considered that the setting of the observation point or the direction of change of the observation direction, the speed of the change in each direction, and the stop can be performed by operating one jog dial J.

  In the above embodiment, after teaching performed without the need for an object as described above, the teaching content is converted into a three-dimensional model by a display method according to the display illustrated in FIG. Teaching simulation can be performed by animation display imitating a fluoroscopic image. By displaying such a simulation, the operator can confirm the contents of teaching.

  Then, when inspecting the actual object, the object is placed in the posture and position as input at the time of teaching, and an execution command for automatic operation is given, so that the calculation / control device 22 follows the teaching content. Signals for automatically driving and controlling the rotary table 18, the XY table 19, the Z stage 17 and the tilting mechanism 16 are supplied to the axis control unit 21 every moment. In the meantime, an X-ray fluoroscopic image of the object is displayed on the display 25. In addition to the display, information on the observation point, the observation direction, and the observation magnification is displayed on the display 25. Can do. An example is shown in FIG.

  In the example of FIG. 6, a fluoroscopic image display area At for displaying an X-ray fluoroscopic image and an animation display area Aa for displaying a three-dimensional model animation are set on the display screen of the display unit 25. By displaying the display area Aa, the X-ray fluoroscopic image displayed at that time notifies which point of the entire object is observed from which direction and under what magnification. Yes.

  That is, in the animation display area Aa, the three-dimensional model M that always represents the entire object is always displayed, and in accordance with the rotation of the rotary table 18 around the z axis and the tilting mechanism 16 tilting around the y axis, The observation direction is notified by rotating the three-dimensional model in the corresponding direction, and is superimposed on the three-dimensional model on the animation display area Aa, and the visual field at that time of the X-ray detector 12, that is, the X-ray fluoroscopy at that time By displaying a frame Q representing the display range of the image, information on the observation point and the observation magnification is notified.

  Further, by clicking on an arbitrary point on the X-ray fluoroscopic image, the click point P is displayed at a corresponding position in the frame Q displayed in the animation display area Aa. With such a display, for example, in the inspection of voids in aluminum die-cast parts, it is possible to click on the position of the void on the X-ray fluoroscopic image and know where the position is in the entire part. This is effective when the pass / fail status is determined by the location of the.

  Further, during observation by a series of automatic driving based on teaching contents, the operation unit 26 is operated and specified at an arbitrary time point, so that the state of the rotary table 18, the XY table 19, the tilt mechanism 16 and the Z stage 17 at that time point Is stored, and a drive control signal is supplied to the axis control unit 21 so that the state is reproduced after the end of a series of automatic operations. Thereby, the designated observation state is reproduced and an X-ray fluoroscopic image is displayed. This function is especially useful when the inspection of voids in aluminum die-cast parts is performed with the flow observation as described above, and the pass / fail judgment is made from the X-ray fluoroscopic image that changes every moment during automatic operation. It is useful because it is possible to observe again the presence, position, size, etc. of voids that could not be lowered.

In the configuration diagram of the embodiment of the present invention, it is a diagram showing a perspective view showing the configuration of the apparatus body and a block diagram showing the system configuration. It is explanatory drawing of the example of the three-dimensional shape of the target object observed by embodiment of this invention, (A), (B) and (C) are a top view, a front view, and a right view. It is an idea figure for demonstrating the teaching method using the three-dimensional model in embodiment of this invention. It is explanatory drawing of the example of the display method at the time of teaching using the three-dimensional model in embodiment of this invention. It is explanatory drawing of the example of the jog dial used at the time of teaching using the three-dimensional model in embodiment of this invention. It is explanatory drawing of the example of the display mode of the indicator 25 in embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Apparatus main body 11 X-ray generator 12 X-ray detector 13 Sample stage 14 Support arm 15 Column 16 Tilt mechanism 17 Z stage 18 Rotation table 19 XY table 21 Axis control part 22 Calculation / control apparatus 23 X-ray controller 24 Image data acquisition Circuit 25 Display 26 Operation unit 3 3D CAD system Aa Animation display area At Perspective image display area M 3D model P Click point Q Frame

Claims (5)

A sample stage for disposing an object is provided between the X-ray generator and the X-ray detector arranged to face each other, and the position of the sample stage relative to the X-ray generator and the X-ray detector is moved relatively. A transmission mechanism is provided, and transmitted X-rays obtained by irradiating an object on the sample stage with X-rays from the X-ray generator are detected by the X-ray detector, and the detection output is used to detect the object. In an X-ray inspection apparatus for obtaining an X-ray image,
3D model display means for displaying a 3D model of the object based on the inputted 3D shape information and dimension information of the object and the installation position information of the object on the sample stage, and the displayed 3 On the dimensional model, setting means for sequentially setting a plurality of observation points, observation directions, and observation magnifications when actually observing the object, and the set observation points, observation directions, and observation magnifications. In accordance with the storage contents, storage means for storing in order, and control means for driving and controlling the moving mechanism so that the observation point, the observation direction, and the observation magnification sequentially change during actual observation of the object ,
Further, after the setting by the setting unit is completed, the three-dimensional model is simulated as a perspective image based on the setting content stored in the storage unit, and the setting content is simulated by displaying an animation of the three-dimensional model. An X-ray inspection apparatus comprising simulation display means for performing display .   In addition to setting the observation point, the observation direction, and the observation magnification, the setting contents by the setting means include setting contents for continuously changing the observation direction and the observation magnification and setting the change speed thereof. The X-ray inspection apparatus according to claim 1.   Based on the input three-dimensional shape information and dimensions of the target object and information on the position of the target object on the sample stage, the setting content by the setting means is determined when the target object is actually observed. The X-ray inspection apparatus according to claim 1, wherein a limit is added to a range in which the object does not interfere. During actual observation of the object based on the contents of the storage means, the observation field of view is displayed using the three-dimensional model in synchronization with the driving of the moving mechanism, separately from the fluoroscopic image of the object. 4. The X-ray inspection apparatus according to claim 1, further comprising observation visual field display means . When actually observing the object based on the contents of the storage means, the position information of the moving mechanism at that time is stored by specifying it in the display state of an arbitrary perspective image, and at the time of the specification after the end of a series of observation operations 5. The X-ray inspection apparatus according to claim 1, wherein the X-ray inspection apparatus is configured to reproduce a state of the moving mechanism.

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