JP5070748B2 - 接着剤組成物、回路接続材料、接続体及び半導体装置 - Google Patents
接着剤組成物、回路接続材料、接続体及び半導体装置 Download PDFInfo
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- JP5070748B2 JP5070748B2 JP2006178590A JP2006178590A JP5070748B2 JP 5070748 B2 JP5070748 B2 JP 5070748B2 JP 2006178590 A JP2006178590 A JP 2006178590A JP 2006178590 A JP2006178590 A JP 2006178590A JP 5070748 B2 JP5070748 B2 JP 5070748B2
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- 239000004952 Polyamide Substances 0.000 description 1
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- UIIMBOGNXHQVGW-DEQYMQKBSA-M Sodium bicarbonate-14C Chemical compound [Na+].O[14C]([O-])=O UIIMBOGNXHQVGW-DEQYMQKBSA-M 0.000 description 1
- QYTDEUPAUMOIOP-UHFFFAOYSA-N TEMPO Chemical group CC1(C)CCCC(C)(C)N1[O] QYTDEUPAUMOIOP-UHFFFAOYSA-N 0.000 description 1
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- KYIKRXIYLAGAKQ-UHFFFAOYSA-N abcn Chemical compound C1CCCCC1(C#N)N=NC1(C#N)CCCCC1 KYIKRXIYLAGAKQ-UHFFFAOYSA-N 0.000 description 1
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- 125000000217 alkyl group Chemical group 0.000 description 1
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- 238000004458 analytical method Methods 0.000 description 1
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- 125000000440 benzylamino group Chemical group [H]N(*)C([H])([H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 1
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- 125000004093 cyano group Chemical group *C#N 0.000 description 1
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- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 description 1
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- 239000012153 distilled water Substances 0.000 description 1
- BXKDSDJJOVIHMX-UHFFFAOYSA-N edrophonium chloride Chemical compound [Cl-].CC[N+](C)(C)C1=CC=CC(O)=C1 BXKDSDJJOVIHMX-UHFFFAOYSA-N 0.000 description 1
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- 238000011156 evaluation Methods 0.000 description 1
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- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
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- 125000000250 methylamino group Chemical group [H]N(*)C([H])([H])[H] 0.000 description 1
- 125000004573 morpholin-4-yl group Chemical group N1(CCOCC1)* 0.000 description 1
- ZQXSMRAEXCEDJD-UHFFFAOYSA-N n-ethenylformamide Chemical compound C=CNC=O ZQXSMRAEXCEDJD-UHFFFAOYSA-N 0.000 description 1
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 1
- QNILTEGFHQSKFF-UHFFFAOYSA-N n-propan-2-ylprop-2-enamide Chemical compound CC(C)NC(=O)C=C QNILTEGFHQSKFF-UHFFFAOYSA-N 0.000 description 1
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- 125000005474 octanoate group Chemical group 0.000 description 1
- 125000001181 organosilyl group Chemical group [SiH3]* 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
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- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001195 polyisoprene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
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- 239000004814 polyurethane Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical class C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 150000004059 quinone derivatives Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 150000003440 styrenes Chemical class 0.000 description 1
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- 238000003786 synthesis reaction Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- OPQYOFWUFGEMRZ-UHFFFAOYSA-N tert-butyl 2,2-dimethylpropaneperoxoate Chemical compound CC(C)(C)OOC(=O)C(C)(C)C OPQYOFWUFGEMRZ-UHFFFAOYSA-N 0.000 description 1
- VNJISVYSDHJQFR-UHFFFAOYSA-N tert-butyl 4,4-dimethylpentaneperoxoate Chemical compound CC(C)(C)CCC(=O)OOC(C)(C)C VNJISVYSDHJQFR-UHFFFAOYSA-N 0.000 description 1
- NMOALOSNPWTWRH-UHFFFAOYSA-N tert-butyl 7,7-dimethyloctaneperoxoate Chemical compound CC(C)(C)CCCCCC(=O)OOC(C)(C)C NMOALOSNPWTWRH-UHFFFAOYSA-N 0.000 description 1
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- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 150000003673 urethanes Chemical class 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/29198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
- H01L2224/29199—Material of the matrix
- H01L2224/2929—Material of the matrix with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/29198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
- H01L2224/29298—Fillers
- H01L2224/29299—Base material
- H01L2224/293—Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/831—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
- H01L2224/83101—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
- H01L2224/83851—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester being an anisotropic conductive adhesive
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor
- H01L2924/07811—Extrinsic, i.e. with electrical conductive fillers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
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- Adhesives Or Adhesive Processes (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Combinations Of Printed Boards (AREA)
- Wire Bonding (AREA)
- Conductive Materials (AREA)
Description
本発明の接着剤組成物は、(a)熱可塑性樹脂、(b)2つ以上の(メタ)アクリロイルオキシ基を有するラジカル重合性化合物と、(c)ラジカル重合開始剤とを含有するものであり、上記ラジカル重合性化合物が有する(メタ)アクリロイルオキシ基の一部又は全部が2級炭素又は3級炭素に直接結合している。
(GPC条件)
使用機器:日立L−6000型((株)日立製作所製、商品名)
検出器:L−3300RI((株)日立製作所製、商品名)
カラム:ゲルパックGL−R420+ゲルパックGL−R430+ゲルパックGL−R440(計3本)(日立化成工業(株)製、商品名)
溶離液:テトラヒドロフラン
測定温度:40℃
流量:1.75ml/min
図1は、本発明に係る接続体の一実施形態を示す概略断面図である。図1に示す接続体1は相互に対向する第1の回路部材20及び第2の回路部材30を備えており、第1の回路部材20と第2の回路部材30との間には、これらを接続する接続部10が設けられている。
図2は、本発明に係る回路部材の接続方法の一実施形態を概略断面図により示す工程図である。
図3は、本発明の半導体装置の一実施形態を示す概略断面図である。図3に示すように、本実施形態の半導体装置2は、半導体素子50と、半導体の支持部材となる基板60及び基板60上に設けられた回路パターン61を有する半導体素子搭載用基板65を備えている。半導体素子50及び半導体素子搭載用基板65の間には、これらを電気的に接続する半導体素子接続部材80が設けられている。また、半導体素子接続部材80は基板60の主面60a上に積層され、半導体素子50は更にその半導体素子接続部材80上に積層されている。
撹拌機、温度計、冷却管及び窒素ガス導入管を備えた反応容器に窒素ガスを導入した後、2,5−ジメチル−2,5−ヘキサンジオール(東京化成製)10.00g(0.068モル)、トリエチルアミン(東京化成製)16.60g(0.164モル)及び4−ジメチルアミノピリジン(東京化成製)2.00g(0.016モル)をテトラヒドロフラン100gに反応容器内で溶解し、氷浴にて冷却した。そこへ、アクリロイルクロライド(東京化成製)14.85gをテトラヒドロフラン20gで希釈した溶液を30分間かけて滴下した。滴下後、氷冷しながら2時間撹拌し、室温(25℃)で更に5時間撹拌した。その後、反応系に析出した沈殿を濾別し、テトラヒドロフランを留去し粗成生物を得た。次に、この粗成生物にジエチルエーテル100gを加えて溶解し、蒸留水で2度、炭酸水素ナトリウム飽和水溶液で2度洗浄した後、ジエチルエーテルを留去し、オイル状の生成物7.78gを得た(収率45%)。得られた生成物の同定は、1H−NMR及び13C−NMRで行い、2つのアクリロイルオキシ基が3級炭素に直接結合したラジカル重合性化合物(RA−1)であることを確認した。
フェノキシ樹脂(重量平均分子量45000、ユニオンカーバイト社製、商品名:PKHC)40質量部を、メチルエチルケトン60質量部に溶解して、固形分40質量%のフェノキシ樹脂溶液を調整した。また、ポリブチレンアジペートジオール(重量平均分子量2000)450質量部とポリオキシテトラメチレングリコール(重量平均分子量2000)450質量部及び1,4−ブチレングリコール100質量部をメチルエチルケトン4000質量部に溶解し、ジフェニルメタンジイソシアネート390質量部を加え、70℃で反応させてウレタン樹脂を得た。得られたウレタン樹脂の重量平均分子量をGPCで測定したところ、15万であった。
RA−1:上述のとおり合成したラジカル重合性化合物、RA−2:プロピレングリコール変性ジアクリレート(新中村化学工業株式会社、商品名:APG−400)、RA−3:ビスフェノールAのプロピレングリコール変性ジアクリレート(共栄社株式会社製、商品名:ライトアクリレートBP−4PA)、RA−4:1,6−ヘキサンジオールジアクリレート(新中村化学工業株式会社、商品名:A−HD)、RA−5:ビスフェノールAのエチレングリコール変性ジアクリレート(共栄社株式会社製、商品名:ライトアクリレートBP−4EA、)、多官能ウレタンアクリレート(日立化成工業株式会社製、商品名:ヒタロイド4861)及び2−(メタ)アクリロイロキシエチルホスフェート(共栄社株式会社製、商品名:ライトエステルP−2M)を準備した。
t−ヘキシルパーオキシ−2−エチルヘキサノエート(日本油脂株式会社製、商品名:パーヘキシルO)を準備した。
ポリスチレン粒子の表面上に、厚み0.2μmのニッケルからなる層を設け、更にこのニッケルからなる層の表面上に、厚み0.02μmの金からなる層を設けた。こうして平均粒径4μm及び比重2.5の導電性粒子を作製した。
上記フェノキシ樹脂溶液87.5質量部(フェノキシ樹脂を35質量部含有)に、上記ウレタン樹脂を固形分で15質量部、ラジカル重合性化合物として、RA−1を5質量部、ヒタロイド4861を45質量部及びライトエステルP−2Mを5質量部、ラジカル重合開始剤としてパーヘキシルOを3質量部配合した。得られた溶液に上述の導電性粒子を配合分散させて、接着剤組成物の溶液を得た。導電性粒子の配合割合は、接着剤組成物の全量に対して1.5体積%であった。
ラジカル重合性化合物として、RA−1を5質量部配合することに代えてRA−2を5質量部配合した以外は実施例1と同様にして、フィルム状回路接続材料を得た。
ラジカル重合性化合物として、RA−1を5質量部、ヒタロイド4861を45質量部配合することに代えてRA−3を10質量部、ヒタロイド4861を40質量部配合した以外は実施例1と同様にして、フィルム状回路接続材料を得た。
ラジカル重合性化合物として、RA−1を5質量部、ヒタロイド4861を45質量部配合することに代えて、RA−1を配合せず、ヒタロイド4861を50質量部配合した以外は実施例1と同様にして、フィルム状回路接続材料を得た。
ラジカル重合性化合物として、RA−1を5質量部配合することに代えてRA−4を5質量部配合した以外は実施例1と同様にして、フィルム状回路接続材料を得た。
ラジカル重合性化合物として、RA−1を5質量部、ヒタロイド4861を45質量部配合することに代えてRA−5を10質量部、ヒタロイド4861を40質量部配合した以外は実施例1と同様にして、フィルム状回路接続材料を得た。
上記実施例及び比較例で得られたフィルム状回路接続材料を30mm×1.5mmに切り出し、ライン幅25μm、ピッチ50μm及び厚み8μmの銅回路配線を500本有するフレキシブル回路板(FPC基板)と、0.2μmの酸化インジウム(ITO)の薄層を形成したガラス基板(ITO基板、厚み1.1mm、表面抵抗20Ω/□)を準備した。次に、上記FPC基板とITO基板との間に、上述のようにして得られたフィルム状回路接続材料を配置した。そして、熱圧着装置(加熱方式:コンスタントヒート型、東レエンジニアリング株式会社製)を用いて、温度160℃、圧力3MPaの条件下、それらの積層方向に10秒間の加熱加圧を行い、接続体を作製した。
得られた接続体の回路間の接続抵抗をマルチメータ(アドバンテスト社製、商品名:TR6848)で測定した。なお、抵抗値は隣接する回路間の抵抗37点の平均で示した。得られた結果を表2に示す。
得られた接続体の接着強度をJIS−Z0237に準じて90度剥離法で測定し、評価した。ここで、接着強度の測定装置はテンシロンUTM−4(剥離速度50mm/min、25℃、東洋ボールドウィン株式会社製)を使用した。得られた結果を表2に示す。
得られた接続体のFPC基板裏面を下にしてホットプレートにて200℃、10秒間加熱した後、FPC基板を剥離した。そして、アセトンを染み込ませた綿棒を用い、ITO基板に付着した接着剤残渣を擦って、完全に除去するのに要した時間(リペア時間)を測定した。得られた結果を表2に示す。
Claims (6)
- (a)熱可塑性樹脂と、
(b)2つ以上の(メタ)アクリロイルオキシ基を有するラジカル重合性化合物と、
(c)ラジカル重合開始剤と、
を含有する接着剤組成物であって、
前記熱可塑性樹脂100質量部に対して、前記ラジカル重合性化合物5〜250質量部及び前記ラジカル重合開始剤0.05〜30質量部を含有し、
前記ラジカル重合性化合物が、下記一般式(A)、(B)又は(C)で表される基を有しており、
一般式(A)で表される基を有する前記ラジカル重合性化合物が、下記一般式(2)、(3)、(4)、(5)、(6)、(7)、(8)、(9)、(10)、(18)、(19)、(20)又は(21)で表される化合物を含む、接着剤組成物。
- (d)リン酸基を有するビニル化合物を、前記熱可塑性樹脂100質量部に対して、0.1〜20質量部含有する、請求項1記載の接着剤組成物。
- 導電性粒子を更に含有する、請求項1又は2記載の接着剤組成物。
- 請求項1〜3のいずれか一項に記載の接着剤組成物からなり、回路電極を有する回路部材同士を、それぞれの回路部材が有する回路電極同士が電気的に接続されるように接着するために用いられる回路接続材料。
- 対向配置された一対の回路部材と、
前記一対の回路部材の間に介在しそれぞれの回路部材が有する回路電極同士が電気的に接続されるように当該回路部材同士を接着する接続部材と、
を備え、
前記接続部材が、請求項4に記載の回路接続材料の硬化物からなる、接続体。 - 基板及び該基板上に設けられた回路電極を有する半導体素子搭載用基板と、
前記半導体素子搭載用基板に半導体素子接続部材を介して搭載され、前記回路電極と電気的に接続された半導体素子と、
を備え、
前記半導体素子接続部材が、請求項1〜3のいずれか一項に記載の接着剤組成物の硬化物からなる、半導体装置。
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