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JP4907838B2 - Memory device having a recessed gate structure - Google Patents

Memory device having a recessed gate structure Download PDF

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JP4907838B2
JP4907838B2 JP2002586384A JP2002586384A JP4907838B2 JP 4907838 B2 JP4907838 B2 JP 4907838B2 JP 2002586384 A JP2002586384 A JP 2002586384A JP 2002586384 A JP2002586384 A JP 2002586384A JP 4907838 B2 JP4907838 B2 JP 4907838B2
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gate
oxide layer
trench
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layer
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JP2004530300A (en
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ディ．ダルカン マーク
リー ロジャー
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マイクロン テクノロジー， インク．
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66568—Lateral single gate silicon transistors
    • H01L29/66613—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation
    • H01L29/66621—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation using etching to form a recess at the gate location
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/05—Making the transistor
    • H10B12/053—Making the transistor the transistor being at least partially in a trench in the substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/34—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the transistor being at least partially in a trench in the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
    • H01L29/7834—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with a non-planar structure, e.g. the gate or the source or the drain being non-planar
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
    • H10B12/312—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor with a bit line higher than the capacitor

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Memories (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Thin Film Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Description

本発明は、ＤＲＡＭ（dynamic random access memory）セルに関し、詳細には、それを形成するための新規なプロセスに関する。   The present invention relates to a dynamic random access memory (DRAM) cell, and in particular to a novel process for forming it.

ＤＲＡＭは、典型的には、アクセスデバイス、例えば、ＭＯＳＦＥＴ（metal-oxide-semiconductor field effect transistor）に結合された電荷蓄積コンデンサ（または、セルコンデンサ）を備えている。このＭＯＳＦＥＴは、当該コンデンサに電荷を供給したり、当該コンデンサから電荷を除去したりする機能を有するから、蓄積された電荷によって定義された論理状態に影響を及ぼす。当該コンデンサに蓄積された電荷の量は、電極（または、蓄積ノード）の面積と、電極間の間隔と、によって決定される。ＤＲＡＭの動作条件、例えば、動作電圧と、漏れ速度と、リフレッシュ速度とにより、一定の最小電荷がコンデンサに蓄積されることが、一般に、規定されることになる。   A DRAM typically includes a charge storage capacitor (or cell capacitor) coupled to an access device, such as a metal-oxide-semiconductor field effect transistor (MOSFET). Since this MOSFET has a function of supplying electric charge to the capacitor and removing electric charge from the capacitor, it influences the logic state defined by the accumulated electric charge. The amount of charge stored in the capacitor is determined by the area of the electrodes (or storage nodes) and the spacing between the electrodes. Depending on the operating conditions of the DRAM, eg, operating voltage, leakage rate, and refresh rate, it will generally be specified that a certain minimum charge is stored in the capacitor.

メモリ容量が益々増加していることから、記憶セルをさらに多く詰め込まなければならないが、これら記憶セルにそれぞれ必要なキャパシタンスは、維持されることになる。これは、仮に次世代の拡張されたメモリアレイデバイスの製造を成功させる場合には、ＤＲＡＭ製造技術に対する要求が厳しくなる、ということである。最近、セルコンデンサの充填密度を高め、及び／又は、同時にトランジスタサイズを縮小する試みがなされているが、限られた成果しか得られていない。例えば、１つのアプローチは、基板上に形成されたトランジスタゲート電極と、ソース／ドレイン領域との長さを短くして、集積密度を高めることである。残念ながら、閾値電圧の低下、および／または、いわゆるショートチャネル効果（short channel effect）、例えば、パンチスルー現象（punch through）が現れる可能性が高い。周知のスケーリング方法が、上記の不都合な点を改善するのに効果的である。しかし、このアプローチによれば、基板密度は増大するが、供給電圧を低下させる必要があり、このため、電気ノイズに関するマージンが減少し、閾値電圧が変動することになる。   As memory capacity increases more and more, more storage cells must be packed, but the capacitance required for each of these storage cells will be maintained. This means that if the next-generation expanded memory array device is successfully manufactured, the demand for DRAM manufacturing technology becomes severe. Recently, attempts have been made to increase the packing density of cell capacitors and / or simultaneously reduce transistor size, but with limited success. For example, one approach is to shorten the length of the transistor gate electrodes formed on the substrate and the source / drain regions to increase the integration density. Unfortunately, there is a high probability that a threshold voltage drop and / or a so-called short channel effect, for example punch through, will appear. Known scaling methods are effective in improving the above disadvantages. However, according to this approach, the substrate density is increased, but the supply voltage needs to be lowered, which reduces the margin for electrical noise and fluctuates the threshold voltage.

したがって、ＩＣ（integrated circuit）の集積度が向上し、しかもショートチャネル効果を防止することができるＭＯＳ半導体デバイスを形成する方法に対するニーズがある。   Therefore, there is a need for a method of forming a MOS semiconductor device that can improve the integration degree of an IC (integrated circuit) and prevent the short channel effect.

本発明は、メモリデバイス、例えば、窪み付きゲート構造（recessed gate structure）を有するＤＲＡＭアクセストランジスタを形成する方法を提供する。半導体基板上に、まず、絶縁用のフィールド酸化物領域が形成され、ついで、トランジスタグループが窒化シリコン層にパターン形成され、エッチングされる。そして、隣接し隆起した窒化シリコン構造に関し、その後にデポジットされたポリシリコンであって、ゲート構造形成のためのポリシリコンを研磨するため、トランジスタトレンチに隣接するフィールド酸化物領域に窪みが設けられる。   The present invention provides a method of forming a memory device, for example, a DRAM access transistor having a recessed gate structure. A field oxide region for insulation is first formed on a semiconductor substrate, and then a transistor group is patterned into a silicon nitride layer and etched. A recess is then provided in the field oxide region adjacent to the transistor trench to polish the polysilicon that has been deposited and subsequently deposited with respect to the adjacent raised silicon nitride structure for gate structure formation.

本発明の上記およびその他の利点は、本発明の例示的な実施形態の詳細な説明および添付の図面からより明らかとなるであろう。   These and other advantages of the invention will become more apparent from the detailed description of exemplary embodiments of the invention and the accompanying drawings.

以下、本発明の特定の例示的な実施形態を詳細に説明する。これら実施形態については、当業者が本発明を実施できる程度に詳細に説明するが、当然、他の実施形態を利用することができ、構造的、論理的、および電気的な変更を行うことができる。   Reference will now be made in detail to certain exemplary embodiments of the invention. These embodiments will be described in detail to the extent that those skilled in the art can implement the present invention, but other embodiments can of course be used to make structural, logical and electrical changes. it can.

以下の説明で使用する「ウェハ」または「基板」という用語には、露出した半導体表面を有する任意の半導体ベースの構造を含めることができる。ウェハおよび構造には、ＳＯＩ（silicon-on insulator）と、ＳＯＳ（silicon-on sapphire）と、ドープド半導体及びアンドープド半導体と、ベース半導体基礎により支持されたシリコンのエピタキシャル層と、その他の半導体構造とが含まれることは、当然のことである。この半導体はシリコンベースである必要はない。この半導体は、シリコンゲルマニウムか、ゲルマニウムか、又はガリウム砒素とすることができる。   As used in the following description, the term “wafer” or “substrate” can include any semiconductor-based structure having an exposed semiconductor surface. Wafers and structures include SOI (silicon-on insulator), SOS (silicon-on sapphire), doped and undoped semiconductors, silicon epitaxial layers supported by a base semiconductor base, and other semiconductor structures. It is natural to be included. This semiconductor need not be silicon-based. The semiconductor can be silicon germanium, germanium, or gallium arsenide.

各図面を説明する。各図において、同様の要素は同様の番号を付してあり、図１〜図２２は、本発明の例示的な実施形態に従って形成されたアクセストランジスタを有するＤＲＡＭメモリデバイス１００（図２２）の形成方法を示す。図１の半導体基板１０上には、薄い熱成長酸化物層１２が、慣用の半導体処理技法に従って、約５０Åから約２００Åの厚さに形成されている。次に、基板１０および酸化物層１２の上に、絶縁層１４、例えば、約１００Åから約１０００Åの窒化シリコン（Ｓｉ3Ｎ4）層１４（図１）が、デポジットされる。窒化シリコン層１４は、周知のポジションプロセス、例えば、とりわけ、ＣＶＤ（chemical vapor deposition）によるスパッタリングや、電子サイクロトロン共鳴プラズマ強化ＣＶＤによる低温デポジションにより、形成することができる。以下、絶縁層１４を「窒化シリコン層１４」というが、この絶縁層１４は例えば酸化シリコンその他の絶縁材料で形成することもできることから、当然、本発明は、窒化シリコンを使用することに限定されるものではない。 Each drawing will be described. In each figure, like elements are similarly numbered, and FIGS. 1-22 illustrate the formation of a DRAM memory device 100 (FIG. 22) having access transistors formed in accordance with an exemplary embodiment of the invention. The method is shown. A thin thermally grown oxide layer 12 is formed on the semiconductor substrate 10 of FIG. 1 to a thickness of about 50 to about 200 inches according to conventional semiconductor processing techniques. Next, over the substrate 10 and the oxide layer 12, an insulating layer 14, for example, a silicon nitride (Si 3 N 4 ) layer 14 (FIG. 1) of about 100 to about 1000 デ is deposited. The silicon nitride layer 14 can be formed by a well-known position process, for example, sputtering by chemical vapor deposition (CVD) or low temperature deposition by electron cyclotron resonance plasma enhanced CVD, among others. Hereinafter, the insulating layer 14 is referred to as a “silicon nitride layer 14”. However, since the insulating layer 14 can be formed of, for example, silicon oxide or other insulating material, the present invention is naturally limited to using silicon nitride. It is not something.

次に、窒化シリコン層１４が、窒化シリコン層１４上に約１０００Åから約１００００Åの厚さに形成されたフォトレジスト層１５（図２）を使用して、パターン形成される。フォトレジスト層１５はマスク（図示せず）を用いてパターン形成されるが、窒化シリコン層１４は、パターン形成されたフォトレジストを介して、異方エッチングされ、これにより、幅Ｗが約１０００Åから約２０００Åの複数の窒化シリコン列１８と、ＳＴＩ（shallow trenches for isolation）２０とが得られる。これを図３に示す。ＳＴＩ２０を得るため、窒化シリコン層１４と、酸化物層１２と、基板１０とを、全て、深さ約１０００Åから約１００００Åまで、好ましくは、約５０００Åまで、エッチングする。ＳＴＩ２０を形成した後、フォトレジスト層１５が、例えば酸素プラズマのような慣用の技法によるか、あるいはＵＶ照射で基板１０を照射してフォトレジストを劣化させることによって、除去され、図４の構造が得られる。   Next, the silicon nitride layer 14 is patterned using a photoresist layer 15 (FIG. 2) formed on the silicon nitride layer 14 to a thickness of about 1000 to about 10,000 inches. The photoresist layer 15 is patterned using a mask (not shown), but the silicon nitride layer 14 is anisotropically etched through the patterned photoresist, thereby reducing the width W from about 1000 mm. A plurality of silicon nitride rows 18 of about 2000 mm and shallow trenches for isolation (STI) 20 are obtained. This is shown in FIG. In order to obtain the STI 20, the silicon nitride layer 14, the oxide layer 12, and the substrate 10 are all etched to a depth of about 1000 mm to about 10,000 mm, preferably to about 5000 mm. After forming the STI 20, the photoresist layer 15 is removed by conventional techniques such as oxygen plasma or by irradiating the substrate 10 with UV radiation to degrade the photoresist, resulting in the structure of FIG. can get.

ＳＴＩ２０が形成された（図３〜図４）後、図５に示すように、これらトレンチに、絶縁誘電体２１が充填される。トレンチ２０を充填するため、絶縁に適した任意の誘電体を採用することができる。例示的な実施形態においては、トレンチ２０は、ＨＤＰ（high density plasma）酸化物、すなわち、狭いトレンチを効率的に充填する高い能力を有する材料で、充填されている。あるいはまた、トレンチ２０を絶縁誘電体２１で充填する前に、トレンチ底部の隅部を滑らかにし、しかもトレンチ充填用の誘電体における応力を減少させるため、例えば酸化物または窒化シリコンの絶縁層（図示せず）を、これらトレンチの側壁に形成することもできる。   After the STI 20 is formed (FIGS. 3 to 4), these trenches are filled with an insulating dielectric 21, as shown in FIG. In order to fill the trench 20, any dielectric suitable for insulation can be employed. In the exemplary embodiment, trench 20 is filled with high density plasma (HDP) oxide, ie, a material that has a high ability to efficiently fill narrow trenches. Alternatively, before the trench 20 is filled with the insulating dielectric 21, for example, an oxide or silicon nitride insulating layer (see FIG. 5) may be used to smooth the corners of the trench bottom and reduce stress in the trench filling dielectric. (Not shown) can also be formed on the sidewalls of these trenches.

図６を説明する。窒化シリコン列１８に対して、パターン形成しエッチングして、領域Ａを、絶縁誘電体２１およびトランジスタトレンチ２２に隣接して、形成する。トランジスタトレンチ２２を得るため、窒化シリコン層１４と、酸化物層１２と、基板１０とを、全て、リアクティブイオンエッチングにより、例えば深さ約１０００Åから約１００００Åまでエッチングする。トランジスタトレンチ２２には、次に詳細に説明するように、後で、ＤＲＡＭメモリデバイス１００（図２２）のゲート構造が形成されることになる。トランジスタトレンチ２２を形成するため、基板１０を、約５００Åから約５０００Åの深さλ（図６）まで、エッチングする。   FIG. 6 will be described. The silicon nitride column 18 is patterned and etched to form region A adjacent to the insulating dielectric 21 and transistor trench 22. In order to obtain the transistor trench 22, the silicon nitride layer 14, the oxide layer 12, and the substrate 10 are all etched by reactive ion etching, for example, to a depth of about 1000 mm to about 10,000 mm. The transistor trench 22 will later be formed with the gate structure of the DRAM memory device 100 (FIG. 22), as will be described in detail below. To form transistor trench 22, substrate 10 is etched to a depth λ (FIG. 6) of about 500 to about 5000 inches.

トランジスタトレンチ２２（図６）を形成し、領域Ａ（図６）を形成した後、窪み構造２４を、絶縁領域Ｂに隣接して得るため、絶縁誘電体２１を、図７に示すように、選択性エッチング液を用いて部分的にエッチングする。例えばプラズマエッチングのような方向性エッチングプロセスにより、絶縁誘電体２１を、約５００Åから約３０００Åの深さδ（図７）まで、エッチングする。次に説明するように、その後にデポジットされたポリシリコンであって、窒化シリコン層１４からの残留窒化シリコンに関するポリシリコンを、化学機械的に研磨することができるようにするため、絶縁誘電体２１に窪みが設けられる。本発明をより良く理解するため、窪み構造２４（図７）と、絶縁領域Ｂ（図７）との断面図を、トランジスタトレンチ２２に関連させて、図８および図９に示す。   After forming the transistor trench 22 (FIG. 6) and forming the region A (FIG. 6), the insulating dielectric 21 is obtained as shown in FIG. Partial etching is performed using a selective etching solution. The insulating dielectric 21 is etched to a depth δ (FIG. 7) of about 500 mm to about 3000 mm by a directional etching process such as plasma etching. In order to be able to chemically and mechanically polish subsequently deposited polysilicon, which is related to the residual silicon nitride from the silicon nitride layer 14, as will be described below, the insulating dielectric 21 A depression is provided in the In order to better understand the present invention, cross-sectional views of the recessed structure 24 (FIG. 7) and the insulating region B (FIG. 7) are shown in FIGS.

図１０を説明する。図１０は、図７の１０−１０′線断面図であって、領域Ａとトランジスタトレンチ２２とを示す。この時点においては、トランジスタゲート構造を形成する処理ステップは、慣用の半導体処理技法に従って進行する。であるから、薄いゲート酸化物層２９が、まず、図１１に示すように、トランジスタトレンチ２２の側壁および底部に形成される。薄いゲート酸化物層２９を、酸素雰囲気中で、約６００℃から約１０００℃の間の温度で、約３０Åから約１００Åの厚さまで、熱成長させることができる。   FIG. 10 will be described. 10 is a cross-sectional view taken along the line 10-10 ′ of FIG. 7 and shows the region A and the transistor trench 22. FIG. At this point, the processing steps to form the transistor gate structure proceed according to conventional semiconductor processing techniques. Thus, a thin gate oxide layer 29 is first formed on the sidewalls and bottom of the transistor trench 22, as shown in FIG. The thin gate oxide layer 29 can be thermally grown in an oxygen atmosphere at a temperature between about 600 ° C. and about 1000 ° C. to a thickness of about 30 ° to about 100 °.

ついで、ポリシリコン層３０（図１２）が、領域Ａ、Ｂ上にともに形成され、同様に、基板１０のトランジスタトレンチ２２と、窪み構造２４内部に形成される。ポリシリコン層３０は、ＬＰＣＶＤプロシージャにより、約３００℃から約７００℃の温度で、薄いゲート酸化物層２９上にデポジットさせることができる。ポリシリコン層３０をデポジットした後、ポリシリコン層３０を、図１３に示すように、領域Ａの窒化シリコン層１４面かその近傍まで平坦化して、ポリシリコンゲート層３２を形成する。平坦化するため、ＣＭＰ（chemical mechanical polishing）を使用することができるが、必要なら、他の適切な方法も使用することができる。ポリシリコンのＣＭＰが、窒化物層１４上でどのようにして停止するかをより良く理解するには、図１４〜図１５を参照されたい。図１４〜図１５は、図７の１４−１４′線断面図と、１５−１５′線断面図であるが、導電層３０をデポジットし研磨した後の図である。   Next, a polysilicon layer 30 (FIG. 12) is formed on the regions A and B, and is similarly formed inside the transistor trench 22 and the recess structure 24 of the substrate 10. The polysilicon layer 30 can be deposited on the thin gate oxide layer 29 at a temperature of about 300 ° C. to about 700 ° C. by an LPCVD procedure. After depositing the polysilicon layer 30, the polysilicon layer 30 is planarized to the surface of the silicon nitride layer 14 in the region A or in the vicinity thereof, as shown in FIG. CMP (chemical mechanical polishing) can be used to planarize, but other suitable methods can be used if desired. To better understand how polysilicon CMP stops on the nitride layer 14, refer to FIGS. 14 to 15 are cross-sectional views taken along line 14-14 ′ and 15-15 ′ of FIG. 7, and are views after the conductive layer 30 is deposited and polished.

図１６を説明する。図１６は、図１３の構造において、ポリシリコンゲート層３２と薄いゲート酸化物層２９の一部とを、約１００Åから約５００Åだけ、エッチングした後の図である。図１６に示したように、窪み領域３４とポリシリコンゲート３３とを得るため、ポリシリコンゲート層３２と、薄いゲート酸化物層２９の一部とが、選択的に、領域Ａの窒化シリコン１４まで、エッチングされる。   FIG. 16 will be described. FIG. 16 shows the structure of FIG. 13 after the polysilicon gate layer 32 and a portion of the thin gate oxide layer 29 have been etched by about 100 to about 500 inches. As shown in FIG. 16, in order to obtain the recessed region 34 and the polysilicon gate 33, the polysilicon gate layer 32 and a part of the thin gate oxide layer 29 selectively form the silicon nitride 14 in the region A. Etched until.

本発明の例示的な実施形態においては、次に、ポリシリコンゲート３３上に、誘電体層３５（図１７）が形成され、図１６の窪み領域３４が完全に充填される。誘電体層３５は、例えば酸化物材料を含むことができ、例えば慣用の堆積方法と、その後のＣＭＰによる研磨で形成することができる。   In the exemplary embodiment of the invention, a dielectric layer 35 (FIG. 17) is then formed on the polysilicon gate 33, filling the recessed region 34 of FIG. The dielectric layer 35 can include, for example, an oxide material, and can be formed by, for example, a conventional deposition method and subsequent polishing by CMP.

あるいはまた、シリサイド（図示せず）を形成することができる金属層を、約２００Åから約５００Åの厚さまで、ポリシリコンゲート３３上にデポジットさせることもできる。デポジットするため、ＲＦまたはＤＣによるスパッタリングを利用することができるが、ＣＶＤのような他の同様の方法も使用することができる。シリサイドを形成することができる金属をデポジットした後、ポリシリコンゲート３３と直接接触する金属が、そのシリサイドに転化するようにするため、基板１０に、典型的には、約１０から６０秒間、窒素雰囲気中で、約６００℃から約８５０℃で、ＲＴＡ（rapid thermal anneal）を行う。図１８に示すように、シリサイド領域３７は、ポリシリコンゲート３３上に導電領域を形成する。好ましくは、この難熔性を有する金属は、シリサイドのように、低抵抗で、抵抗率が小さい。しかし、この難熔性の金属シリサイドには、チタン、コバルト、タングステン、タンタル、モリブデン、および白金を含む任意の難熔性金属を備えることができるが、この任意の難熔性金属に含まれるものはこれらに限定されるものではない。   Alternatively, a metal layer capable of forming silicide (not shown) can be deposited on the polysilicon gate 33 to a thickness of about 200 to about 500 mm. RF or DC sputtering can be utilized to deposit, but other similar methods such as CVD can also be used. After depositing a metal capable of forming a silicide, the substrate 10 is typically exposed to nitrogen for about 10 to 60 seconds so that the metal in direct contact with the polysilicon gate 33 is converted to the silicide. RTA (rapid thermal anneal) is performed at about 600 ° C. to about 850 ° C. in an atmosphere. As shown in FIG. 18, the silicide region 37 forms a conductive region on the polysilicon gate 33. Preferably, the metal having low solubility has a low resistance and a low resistivity like silicide. However, the hardly fusible metal silicide can comprise any hardly fusible metal including titanium, cobalt, tungsten, tantalum, molybdenum, and platinum, but is included in any of the hardly fusible metals. Is not limited to these.

選択性エッチング液を用いて任意の未反応金属を除去した後、領域Ａの窒化物部分を、例えばエッチングによって除去し（図１９）、ＤＲＡＭメモリデバイス１００のゲートスタック９０（図２０）の形成を完了する。ゲートスタック９０を完成させるための次の処理ステップにおいては、ポリシリコンゲート３３上に形成されたシリサイド領域３７を参照し例示するが、本発明はこの実施形態に限定されるものではないことは当然のことであり、他の実施形態、例えば、誘電材料３５（図１７）のような誘電材料を含むゲートスタックであって、ポリシリコンゲート上に形成されたゲートスタックを形成する実施形態も、企図されていることは当然のことである。いずれにしろ、キャップ材料を基板１０上にデポジットし、基板上を平坦化し、これにより、キャップ領域６０（図２０）をシリサイド領域３７上に形成する。このキャップ材料は、窒化シリコンまたは酸化シリコンのようなシリコン誘電体で形成することができるが、ＴＥＯＳまたはカーバイドも使用することができる。   After removing any unreacted metal using a selective etchant, the nitride portion of region A is removed, for example, by etching (FIG. 19) to form the gate stack 90 (FIG. 20) of DRAM memory device 100. Complete. In the next processing step for completing the gate stack 90, the silicide region 37 formed on the polysilicon gate 33 will be illustrated and exemplified, but it should be understood that the present invention is not limited to this embodiment. Other embodiments are also contemplated, for example, gate stacks comprising a dielectric material such as dielectric material 35 (FIG. 17) to form a gate stack formed on a polysilicon gate. It is a matter of course. In any case, the cap material is deposited on the substrate 10 and the substrate is planarized, thereby forming the cap region 60 (FIG. 20) on the silicide region 37. The cap material can be formed of a silicon dielectric such as silicon nitride or silicon oxide, but TEOS or carbide can also be used.

この時点で、ゲート酸化物層２９と、ポリシリコンゲート３３と、シリサイド領域３７と、窒化物キャップ６０とをそれぞれ有する窪みを有するゲートスタック９０（図２０）が形成される。次に、ゲートスタックで画定される隣接するトランジスタのソース領域９２（図２１）とドレイン領域９４（図２１）のドーパント注入から、ゲート構造をマスクする必要がある慣用の注入プロセスで、窪みを有するゲートスタック９０を使用することができる。   At this point, a gate stack 90 (FIG. 20) is formed having depressions each having a gate oxide layer 29, a polysilicon gate 33, a silicide region 37, and a nitride cap 60. Next, with a conventional implantation process where the gate structure needs to be masked from dopant implantation in the source region 92 (FIG. 21) and drain region 94 (FIG. 21) of adjacent transistors defined by the gate stack, with a recess. A gate stack 90 can be used.

フロープロセスにおける次のステップは、図２１に示した窒化物スペーサ９５ａ、９５ｂの形成である。次に、導体および／またはコンデンサ用の接触開口を、例えばＢＰＳＧのような酸化物層９３を貫いて、半導体基板１０内に形成するための慣用の処理ステップを、窒化物スペーサ９５ａ、９５ｂで保護された窪みを有するゲートスタック９０に対して、施すことができる。そこで、慣用の処理ステップは、導体９６およびコンデンサ９７を形成するため実施することができ、同様に、ＤＲＡＭメモリデバイス１００のような半導体デバイスを製造するのに必要な他の相互接続構造を形成するために実施することができる。これら全てを図２２に示す。   The next step in the flow process is the formation of nitride spacers 95a, 95b shown in FIG. Next, conventional process steps for forming contact openings for conductors and / or capacitors through the oxide layer 93, such as BPSG, in the semiconductor substrate 10 are protected with nitride spacers 95a, 95b. Can be applied to a gate stack 90 having a recessed portion. Thus, conventional processing steps can be performed to form conductors 96 and capacitors 97, as well as other interconnect structures necessary to manufacture semiconductor devices such as DRAM memory device 100. Can be implemented. All of these are shown in FIG.

本発明の実施形態に従って形成された窪みを有するゲートスタック９０（図２０〜２２）は、図２３に示すように、メモリ回路４４８、例えばＤＲＡＭメモリデバイス１００を含むプロセッサベースのシステム４００中のような任意のＩＣ構造で使用することができる。コンピュータシステムのようなプロセッサシステムは、一般に、ＣＰＵ（central processing unit）４４４、例えば、マイクロプロセッサ、デジタル信号プロセッサその他のプログラマブルデジタルロジックデバイスであって、バス４５２を介してＩ／Ｏ（input/output）デバイス４４６と通信するもの、を備えている。メモリ４４８はバス４５２を介してシステムと通信する。   A gate stack 90 (FIGS. 20-22) having a recess formed in accordance with an embodiment of the present invention, such as in a processor-based system 400 that includes a memory circuit 448, eg, DRAM memory device 100, as shown in FIG. It can be used with any IC structure. A processor system, such as a computer system, is generally a central processing unit (CPU) 444, such as a microprocessor, digital signal processor, or other programmable digital logic device that is connected to a bus 452 through an I / O (input / output). One that communicates with the device 446. Memory 448 communicates with the system via bus 452.

上記の説明および図面は、本発明の特徴および利点を達成する例示的な実施形態の例示に過ぎない。本発明の精神および範囲から逸脱しない限り、特定のプロセス条件および構造に対して修正および置換を行うことができる。したがって、本発明は、上記の説明および図面によって限定されず、ただ、特許請求の範囲によってのみ限定されるものである。   The above description and drawings are merely illustrative of exemplary embodiments that achieve the features and advantages of the present invention. Modifications and substitutions may be made to specific process conditions and structures without departing from the spirit and scope of the present invention. Accordingly, the present invention is not limited by the above description and drawings, but only by the claims.

本発明の方法に従ってＤＲＡＭアクセストランジスタがその上に形成される半導体デバイスの一部の３次元図を示す図である。FIG. 3 shows a three-dimensional view of a portion of a semiconductor device on which a DRAM access transistor is formed according to the method of the present invention. 図１のデバイスの、図１に示す処理ステップに続く処理ステップの３次元図である。FIG. 2 is a three-dimensional view of processing steps of the device of FIG. 1 following the processing steps shown in FIG. 図１のデバイスの、図２に示す処理ステップに続く処理ステップの３次元図である。3 is a three-dimensional view of the processing steps of the device of FIG. 1 following the processing steps shown in FIG. 図１のデバイスの、図３に示す処理ステップに続く処理ステップの３次元図である。FIG. 4 is a three-dimensional view of the processing steps of the device of FIG. 1 following the processing steps shown in FIG. 図１のデバイスの、図４に示す処理ステップに続く処理ステップの３次元図である。FIG. 5 is a three-dimensional view of the processing steps of the device of FIG. 1 following the processing steps shown in FIG. 図１のデバイスの、図５に示す処理ステップに続く処理ステップの３次元図である。FIG. 6 is a three-dimensional view of the processing steps of the device of FIG. 1 following the processing steps shown in FIG. 図１のデバイスの、図６に示す処理ステップに続く処理ステップの３次元図である。FIG. 7 is a three-dimensional view of the processing steps of the device of FIG. 1 following the processing steps shown in FIG. 図７のデバイスの８−８′線断面図である。FIG. 8 is a cross-sectional view of the device of FIG. 図７のデバイスの９−９′線断面図である。FIG. 9 is a cross-sectional view of the device of FIG. 7 taken along line 9-9 ′. 図７のデバイスの１０−１０′線断面図である。FIG. 10 is a cross-sectional view of the device of FIG. 7 taken along the line 10-10 ′. 図１０のデバイスの、図１０に示す処理ステップに続く処理ステップの断面図である。FIG. 11 is a cross-sectional view of the processing steps of the device of FIG. 10 following the processing steps shown in FIG. 図１０のデバイスの、図１１に示す処理ステップに続く処理ステップの断面図である。FIG. 12 is a cross-sectional view of the processing step of the device of FIG. 10 following the processing step shown in FIG. 11. 図１０のデバイスの、図１２に示す処理ステップに続く処理ステップの断面図である。FIG. 13 is a cross-sectional view of the processing steps of the device of FIG. 10 following the processing steps shown in FIG. 図７のデバイスの、図１２に示す処理ステップに続く処理ステップの１４−１４′線断面図である。FIG. 14 is a cross-sectional view of the device of FIG. 7 taken along line 14-14 ′ of the processing step following the processing step shown in FIG. 図７のデバイスの、図１２に示す処理ステップに続く処理ステップの１５−１５′線断面図である。FIG. 15 is a cross-sectional view of the device of FIG. 7 taken along the line 15-15 ′ of the processing step following the processing step shown in FIG. 図１０のデバイスの、図１３に示す処理ステップに続く処理ステップの断面図である。FIG. 14 is a cross-sectional view of the processing steps of the device of FIG. 10 following the processing steps shown in FIG. 13. 図１０のデバイスの、図１６に示す処理ステップに続く、本発明の第１実施形態による処理ステップの断面図である。FIG. 17 is a cross-sectional view of the processing steps of the device of FIG. 10 following the processing steps shown in FIG. 16 according to the first embodiment of the present invention. 図１０のデバイスの、図１６に示す処理ステップに続く、本発明の第２実施形態による処理ステップの断面図である。FIG. 17 is a cross-sectional view of the processing steps of the device of FIG. 10 according to the second embodiment of the present invention following the processing steps shown in FIG. 図１８のデバイスの、図１８に示す処理ステップに続く処理ステップの断面図である。FIG. 19 is a cross-sectional view of the processing steps of the device of FIG. 18 following the processing steps shown in FIG. 図１８のデバイスの、図１９に示す処理ステップに続く処理ステップの断面図である。FIG. 20 is a cross-sectional view of the processing step of the device of FIG. 18 following the processing step shown in FIG. 19. 図１８のデバイスの、図２０に示す処理ステップに続く処理ステップの断面図である。FIG. 21 is a cross-sectional view of the processing steps of the device of FIG. 18 following the processing steps shown in FIG. 図１８のデバイスの、図２１に示す処理ステップに続く処理ステップの断面図である。FIG. 22 is a cross-sectional view of the processing steps of the device of FIG. 18 following the processing steps shown in FIG. 21. 本発明の方法に従って形成されたＤＲＡＭアクセストランジスタを有するコンピュータシステムの図である。1 is a diagram of a computer system having a DRAM access transistor formed in accordance with the method of the present invention. FIG.

Claims (5)

半導体基板の約１０００Åから２０００Åの幅を有するトレンチに形成されたＭＯＳ半導体デバイスのゲート構造において、
前記トレンチの側壁および底部に形成された厚さが約３０Åから約１００Åを有するゲート酸化物層と、
前記ゲート酸化物層の上に重ねて設けられ、所定幅のまま少なくとも一部分を前記半導体基板の表面上にも位置させるとともに、前記表面上の側壁が前記ゲート酸化物層で覆われたポリシリコンゲートと、
前記ポリシリコンゲートの上部に重ねて設けた誘電体層と、
前記表面上の前記ゲート酸化物層の上のスペーサと
を有することを特徴とするＭＯＳ半導体デバイスのゲート構造。In the gate structure of a MOS semiconductor device formed in a trench having a width of 2000Å about 1000Å of semiconductor substrate,
A gate oxide layer having a thickness of about 30 to about 100 mm formed on the sidewalls and bottom of the trench ;
The overlapping is provided on the gate oxide layer, at least a portion remains of a predetermined width with is also located on the surface of the semiconductor substrate, the polysilicon gate sidewalls on said surface is covered with the gate oxide layer When,
A dielectric layer provided on top of the polysilicon gate ;
Gate structure of a MOS semiconductor device and having a spacer on the gate oxide layer on said surface. 半導体基板のトレンチに形成されたゲート構造であって、前記トレンチの側壁および底部に形成されたゲート酸化物層と、
前記ゲート酸化物層の上に重ねて設けられ、所定幅のまま少なくとも一部分を前記半導体基板の表面上にも位置させるとともに、前記表面上の側壁が前記ゲート酸化物層で覆われたポリシリコンゲートと、
前記ポリシリコンゲートの上に重ねて設けた誘電体層と、
前記表面上の前記ゲート酸化物層の上の窒化物スペーサと
を有するゲート構造と、
前記ゲート構造の両側に位置するソース領域およびドレイン領域であって、前記ゲート構造から、少なくとも前記スペーサの厚さだけ間隔を置いて配置されたソース領域およびドレイン領域と、
前記半導体基板の前記表面上に位置させたコンデンサと
を備えたことを特徴とするＤＲＡＭセル。A gate structure formed on a semiconductor substrate a trench, a gate oxide layer formed on the sidewalls and bottom of said trench,
A polysilicon gate provided over the gate oxide layer, with at least a portion of the gate oxide layer being located on the surface of the semiconductor substrate with a predetermined width, and having a sidewall on the surface covered with the gate oxide layer When,
A dielectric layer overlaid on the polysilicon gate ;
A gate structure having a nitride spacer on the gate oxide layer on the surface;
Source and drain regions located on opposite sides of the gate structure, the source and drain regions being spaced from the gate structure by at least the thickness of the spacer;
A DRAM cell comprising a capacitor positioned on the surface of the semiconductor substrate . 請求項２において、前記半導体基板のトレンチは、約１０００Åから約２０００Åの幅を有することを特徴とするＤＲＡＭセル。 3. The DRAM cell according to claim 2 , wherein the trench of the semiconductor substrate has a width of about 1000 to 2000 mm. 請求項２において、前記ゲート酸化物層は、厚さ約３０Åから約１００Åを有することを特徴とするＤＲＡＭセル。 3. The DRAM cell of claim 2 , wherein the gate oxide layer has a thickness of about 30 to about 100 inches. 請求項２において、前記ゲート構造は、前記ポリシリコンゲート上に形成されたシリサイド領域を更に有することを特徴とするＤＲＡＭセル。 3. The DRAM cell according to claim 2 , wherein the gate structure further includes a silicide region formed on the polysilicon gate .
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