JP4958898B2 - 移植可能な神経刺激装置のパッケージ - Google Patents
移植可能な神経刺激装置のパッケージ Download PDFInfo
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- JP4958898B2 JP4958898B2 JP2008508845A JP2008508845A JP4958898B2 JP 4958898 B2 JP4958898 B2 JP 4958898B2 JP 2008508845 A JP2008508845 A JP 2008508845A JP 2008508845 A JP2008508845 A JP 2008508845A JP 4958898 B2 JP4958898 B2 JP 4958898B2
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
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- Radiology & Medical Imaging (AREA)
- Life Sciences & Earth Sciences (AREA)
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- General Health & Medical Sciences (AREA)
- Public Health (AREA)
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- Ophthalmology & Optometry (AREA)
- Cardiology (AREA)
- Heart & Thoracic Surgery (AREA)
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Description
本願は、2005年4月28日出願の「移植可能なチップスケールパッケージおよび低プロファイルの接眼鏡台(Implantable Chip Scale Package and Low Profile Ocular Mount)」という名称の米国特許仮出願第60/675,980号の優先権を主張するものであり、この仮出願の開示内容はここに引例に挙げることにより本件の一部を成すものとする。
本発明は、合衆国国立衛生研究所(National Institutes of Health)から授与された交付番号R24EY12893-01号の元で政府支援を受けて成し遂げられた。政府は本発明について或る種の権利を有している。
Claims (28)
- 移植可能な装置であって、
非導電性基板と、
非導電性基板を貫通する複数の導電性バイアと、
導電性隆起部を使って前記非導電性基板と前記導電性バイアからなる基板に直接取付けられているとともに、複数の導電性バイアの第1の一部グループに電気接続されているフリップチップ回路と、
前記フリップチップ回路に取付けられるとともに、前記基板にワイヤボンド法で接着され、導電性バイアの第2の一部グループに電気接続されているワイヤボンド型ハイブリッド積載回路と、
前記基板に接着された被覆部材とを備えており、
前記被覆部材と前記基板が密封パッケージを形成していることを特徴とする、移植可能な装置。 - 前記非導電性基板はセラミックを含んでいることを特徴とする、請求項1に記載の移植可能な装置。
- 前記被覆部材は金属を含んでいることを特徴とする、請求項2に記載の移植可能な装置。
- 前記導電性バイアは、金属とセラミックとのペーストを前記非導電性基板と一緒に焼成して密封封鎖を形成したものであることを特徴とする、請求項2に記載の移植可能な装置。
- 前記被覆部材は前記非導電性基板に蝋付けされていることを特徴とする、請求項3に記載の移植可能な装置。
- 前記移植可能な装置は前記非導電性基板上に多層の薄膜金属被覆部を更に備えており、前記フリップチップ回路と前記ワイヤボンド型回路とが金属線に接着されていることを特徴とする、請求項1に記載の移植可能な装置。
- 前記薄膜金属被覆部は蝋付け温度に耐えるように選択されていることを特徴とする、請求項6に記載の移植可能な装置。
- 前記薄膜金属被覆部は、チタニウム、タンタル、金、パラジウム、プラチナなどの金属、または、これら金属の各種積層体、もしくは、これら金属の各種合金のうちの1つ以上を含んでいることを特徴とする、請求項7に記載の移植可能な装置。
- バンプ形成された隆起部が前記バイアに接着されているフレキシブル回路を更に備えている、請求項1に記載の拡張可能な装置。
- 前記非導電性基板上に配置されているとともに、前記導電性バイアと接触状態にある複数の薄膜金属被覆部と、
前記薄膜金属被覆部に取付けられているフレキシブル回路とを更に備えている、請求項1に記載の移植可能な装置。 - 前記フレキシブル回路は組織を刺激するのに好適な電極配列であることを特徴とする、請求項10に記載の移植可能な装置。
- 前記フリップチップ回路の下の重合体アンダーフィルを更に備えている、請求項1に記載の移植可能な装置。
- 前記導電性隆起部は少なくとも1種類の導電性重合体を含んでいることを特徴とする、請求項1に記載の移植可能な装置。
- 前記導電性隆起部は少なくとも1種類の導電性エポキシまたはポリイミドを含んでいることを特徴とする、請求項1に記載の移植可能な装置。
- 前記導電性隆起部には、銀、プラチナ、イリジウム、チタニウムなどの各種金属と、プラチナ合金、イリジウム合金、チタニウム合金、これらの各種混合物などのうち1種類以上が充填されていることを特徴とする、請求項1に記載の移植可能な装置。
- 前記金属または前記金属合金は粉末状、薄片状、または、散剤状であることを特徴とする、請求項15に記載の移植可能な装置。
- ゲッターを更に備えている、請求項1に記載の移植可能な装置。
- 前記ゲッターは蓋の内側に設置されることを特徴とする、請求項17に記載の移植可能な装置。
- 移植可能な装置を製造する方法であって、
複数のバイアを画定している、セラミックを含有している非導電性基板を設ける工程と、
金属を含有しているセラミックペーストでバイアを埋め込む工程と、
セラミックを含有している非導電性基板を焼成する工程と、
基板を形成する工程と、
前記基板に金属リングを蝋付けする工程と、
フリップフロップ回路をバンプ形成過程を使用して前記基板に接着し、前記フリップフロップ回路をバイアの第1の一部グループに電気接続する工程と、
ハイブリッド積載回路を前記フリップフロップ回路に結合する工程と、
前記ハイブリッド積載回路をバイアの第2の一部グループにワイヤボンド法で接着する工程と、
金属蓋を金属リングに溶接する工程とを含んでいる、方法。 - 前記基板の上に多層の薄膜金属被覆部を堆積する工程と、前記バイアを前記フリップフロップ回路および前記ハイブリッド積載回路と電気接続する工程とを更に含んでいる、請求項19に記載の方法。
- 移植可能な装置を製造する方法であって、
複数のバイアが設けられているセラミック基板を形成する工程と、
金属を含有しているセラミックペーストでバイアを埋め込む工程と、
セラミック基板を焼成して、バイアを横断する密封封鎖を形成する工程と、
基板を形成する工程と、
前記基板の上面に多層の薄膜金属被覆部を付与する工程と、
金属リングを前記基板に蝋付けする工程と、
フリップチップボンド法により集積回路を前記多層の薄膜金属被覆部に接着する工程と、
金属蓋を金属リングに溶接する工程とを含んでいる、方法。 - 前記溶接する工程はレーザー溶接することを特徴とする、請求項21に記載の方法。
- 別個の構成部材を備えている積層基板を前記集積回路に接着する工程を更に含んでいる、請求項21に記載の方法。
- 前記集積回路にアンダーフィルを塗布する工程を更に含んでいる、請求項21に記載の方法。
- 前記移植可能な装置の内側にゲッターを設置する工程を更に含んでいる、請求項21に記載の方法。
- 真空中で焼結して水分を飛ばす工程を更に含んでいる、請求項21に記載の方法。
- 前記セラミック基板の底面にまた別な多層の薄膜金属被覆部を付与する工程を更に含んでいる、請求項21に記載の方法。
- バンプボンド法により前記多層の薄膜金属被覆部を電極配列に接着する工程を更に含んでいる、請求項21に記載の方法。
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US8374698B2 (en) * | 2006-08-18 | 2013-02-12 | Second Sight Medical Products, Inc. | Package for an implantable neural stimulation device |
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US20130268039A1 (en) | 2013-10-10 |
US8532776B2 (en) | 2013-09-10 |
US20060247734A1 (en) | 2006-11-02 |
US20130261717A1 (en) | 2013-10-03 |
US20110118807A1 (en) | 2011-05-19 |
US9931507B2 (en) | 2018-04-03 |
EP1879649B1 (en) | 2013-05-15 |
EP1879649A2 (en) | 2008-01-23 |
WO2006118679A3 (en) | 2007-03-08 |
AU2006241404A1 (en) | 2006-11-09 |
US7873419B2 (en) | 2011-01-18 |
US20080065208A1 (en) | 2008-03-13 |
US9415221B2 (en) | 2016-08-16 |
US7881799B2 (en) | 2011-02-01 |
AU2006241404B2 (en) | 2011-07-07 |
US20080046021A1 (en) | 2008-02-21 |
WO2006118679A2 (en) | 2006-11-09 |
US8527057B2 (en) | 2013-09-03 |
US9555244B2 (en) | 2017-01-31 |
US8473048B2 (en) | 2013-06-25 |
JP2008538980A (ja) | 2008-11-13 |
US20070041164A1 (en) | 2007-02-22 |
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