JP4826253B2 - Method for manufacturing ceramic multilayer substrate and ceramic multilayer substrate - Google Patents

Description

  The present invention relates to a method for manufacturing a ceramic multilayer substrate and a ceramic multilayer substrate, and more particularly to a method for manufacturing a ceramic multilayer substrate having via-hole conductors for conducting ceramic layers and a ceramic multilayer substrate.

  In recent years, electronic devices such as mobile communication terminal devices have been required to be downsized and highly functional, and circuit boards on which various mounting components such as semiconductor devices are mounted are also downsized and highly reliable. Is desired. In order to meet such demands, it is formed by laminating a plurality of ceramic layers, inside which a conductor pattern that constitutes a necessary circuit is disposed, and various mounting parts can be mounted on the surface. Ceramic multilayer substrates that can cope with high-density wiring, thin layers, high frequencies, and the like have been widely used.

In general, the ceramic multilayer substrate is processed as described below:
(1) A step of applying a ceramic green sheet slurry to form a ceramic green sheet;
(2) forming a through hole for forming a via-hole conductor in the ceramic green sheet;
(3) forming a via-hole conductor by filling a through-hole for forming a via-hole conductor with a conductive paste;
(4) forming a conductive pattern for in-plane conductors by printing a conductive paste on the surface of the ceramic green sheet;
(5) forming a green ceramic laminate by sequentially laminating ceramic green sheets;
(6) Manufactured through a step of firing an unfired ceramic laminate.

  By the way, when a conductive paste is filled in the through hole for forming a via-hole conductor formed in the ceramic green sheet, the ceramic green sheet placed on the table P is usually used as shown in FIG. After the via hole conductor 54 is formed by filling the through hole 52 of 51 with a conductive paste 53 through a metal mask (or screen mask) 64 or the like, as shown in FIG. The sheet 51 is lifted from the base P to take out the ceramic green sheet 51 on which the via-hole conductor 54 is formed. At this time, the via-hole conductor 54 may drop from the through hole 52 of the ceramic green sheet 51 in some cases. . In particular, as the thickness T of the ceramic green sheet 51 is thinner and the diameter D of the through hole 52 is larger, that is, as the value of D / T is larger, the via-hole conductor 54 is more likely to drop off.

  Furthermore, in recent years, via hole conductors are often used as mounting lands as products become smaller and thinner, mounting strength is improved, and mounting parts are enlarged. In this case, since it is often necessary to form a large size for the purpose, and a reduction in thickness is also required, the problem of the via-hole conductor falling off becomes more serious.

  In addition, when a ceramic multilayer substrate is manufactured using a ceramic green sheet that is not sufficiently filled with a via-hole conductor at a required location, that is, a ceramic green sheet lacking a via-hole conductor, a desired wiring pattern cannot be obtained, There is a problem that it becomes impossible to obtain a ceramic multilayer substrate having desired characteristics.

  Further, the dropout of the via-hole conductor 54 from the through hole 52 may occur when handling the ceramic green sheet 51 on which the via-hole conductor 54 is formed or stacking it.

  Therefore, in order to solve such a problem, as shown in FIG. 16A, the back tape 61 is attached to the lower surface side of the ceramic green sheet 51 in which the through holes 52 are formed. As shown in FIG. 6B, after the via hole conductor 54 is formed by filling the through hole 52 with the conductive paste 53, the ceramic green sheet 51 is lifted together with the back tape 61 from the base P so that the via hole conductor 54 does not fall off. Then, as shown in FIG. 16C, a via hole conductor forming method is proposed in which the back tape 61 is removed to prevent the via hole conductor 54 from falling off (see Patent Document 1).

  Further, in Patent Document 1, as shown in FIG. 17, a green sheet 51a with a carrier film in which a carrier film 55 is bonded to the lower surface of a ceramic green sheet 51 is used, and both the ceramic green sheet 51 and the carrier film 55 are penetrated. After the through hole 52a is formed, the back tape 61 is pasted on the lower surface of the carrier film 55 (FIG. 17A), and the via hole conductor 54 is formed by filling the through hole 52a with the conductive paste 53 (FIG. 17). (b)) A predetermined circuit pattern 62 is printed on the surface of the ceramic green sheet 51 by a method such as screen printing (FIG. 17C), and after the conductive paste 53 (via-hole conductor 54) is dried, the back tape 61 is peeled off (FIG. 17 (d)), and another green sheet 51 is laminated, and then the carrier film is filled. 55 is removed methods in (FIG. 17 (e)) as has been proposed.

  However, in the case of the method of Patent Document 1, it is necessary to attach the back tape to the ceramic green sheet one by one after forming the through hole for the via hole, which greatly increases the number of steps and requires a large amount of the back tape. Therefore, there is a problem that the manufacturing cost is greatly increased due to an increase in man-hours and an increase in material costs.

  In addition, in the case of the method of Patent Document 1, it is possible to prevent the conductive paste (via hole conductor) from falling off when handling the ceramic green sheet after the conductive paste is filled, as shown in FIG. Then, after laminating the other ceramic green sheet 51 on the green sheet with carrier film 51a, when peeling off the carrier film 55, the conductive paste 53 accompanies the carrier film 55 (the conductive paste 53 is removed from the carrier film 55). The phenomenon occurs.

The phenomenon that the conductive paste 53 is taken on the carrier film 55 also tends to occur as the thickness T of the ceramic green sheet 51 decreases and the diameter D of the through hole 52a increases, that is, as the value of D / T increases. There is.
JP 2001-111221 A

  The present invention solves the above-mentioned problem, and the via-hole conductor filled in the through hole of the ceramic green sheet backed by the carrier film is used when handling the ceramic green sheet or peeling the carrier film. A method for manufacturing a ceramic multilayer substrate capable of manufacturing a highly reliable ceramic multilayer substrate that does not drop off and prevents via hole conductors from dropping, and a highly reliable ceramic multilayer substrate without via hole conductor falling off The purpose is to provide.

In order to solve the above problems, a method for manufacturing a ceramic multilayer substrate according to claim 1 of the present application is as follows.
Forming a through hole penetrating at least the ceramic green sheet with respect to the ceramic green sheet backed by a carrier film;
Forming a via-hole conductor in the ceramic green sheet by filling the through-hole with a conductive paste ;
In order to prevent the via hole conductor from being missing from the ceramic green sheet so as to straddle at least a part of the surface of the ceramic green sheet from at least a part of the end surface of the via hole conductor on the surface of the ceramic green sheet. Forming a loss prevention pattern of
Peeling the ceramic green sheet from the carrier film;
Laminating a plurality of ceramic green sheets including the ceramic green sheet provided with the via-hole conductor and the omission prevention pattern , peeled from the carrier film , and forming a green sheet laminate,
Firing the green sheet laminate and sintering the green sheet laminate.

According to a second aspect of the present invention, there is provided the method for manufacturing a ceramic multilayer substrate according to the first aspect of the present invention, wherein after the omission prevention pattern is formed, an in-plane conductor in the green sheet laminate is formed on the surface of the ceramic green sheet. And a step of forming a conductive pattern.

According to a third aspect of the present invention, there is provided a method for manufacturing a ceramic multilayer substrate according to the first or second aspect of the invention, wherein the chipping prevention pattern is mainly composed of ceramic and / or glass that is fired simultaneously with the green sheet laminate. The insulating material is formed in such a manner that at least a part of the end face of the via-hole conductor is exposed.

A method for manufacturing a ceramic multilayer substrate according to claim 4, in the configuration of the invention of claim 3, said missing prevention pattern is characterized by the formation so as to cover the entire outer periphery of the end face of the via-hole conductor.

According to a fifth aspect of the present invention, there is provided a method for manufacturing a ceramic multilayer substrate according to the third aspect of the present invention, wherein the chipping prevention pattern covers an essential part of the outer periphery of the end face of the via-hole conductor and at least a part of the outer periphery. It is characterized in that it is formed in such a manner that it is not covered.

According to a sixth aspect of the present invention, there is provided the method for manufacturing a ceramic multilayer substrate according to the fifth aspect, wherein the in-plane conductor is formed so as to cover the exposed portion of the end surface of the via-hole conductor. And a lead part connected to the conductor connection part, and the connection part between the lead part and the conductor connection part is not covered with the omission prevention pattern on the outer periphery of the end face of the via-hole conductor It is characterized by being formed.

A method for manufacturing a ceramic multilayer substrate according to claim 7, characterized in that in the configuration of the invention of claim 1 or 2, said missing prevention pattern is formed of a resin that disappears in the step of firing the green sheet laminate It is said.

According to an eighth aspect of the present invention, there is provided a method for manufacturing a ceramic multilayer substrate according to the seventh aspect , wherein the missing prevention pattern is formed so as to cover the entire end face of the via-hole conductor.

A method for manufacturing a ceramic multilayer substrate according to claim 9, in the configuration of the invention of claim 8, said missing prevention pattern, be formed so as to cover the entire surface of the ceramic green sheet where the via-hole conductor is formed It is characterized by.

The method for producing a ceramic multilayer substrate according to claim 10 is characterized in that, in the configuration of the invention according to claim 1 or 2 , the lack prevention pattern does not substantially sinter at the firing temperature of the green sheet laminate. It is characterized in that it is formed of an insulating material mainly composed of ceramic so that at least a part of the end face of the via-hole conductor is exposed.

The method for manufacturing a ceramic multilayer substrate according to claim 11 is the configuration of the invention according to claim 10 , wherein the thickness of the omission prevention pattern made of an insulating material whose main component is hardly sinterable ceramic is 1 to 20 μm. In addition, the omission prevention pattern is formed so as to cover the entire surface of the ceramic green sheet excluding the exposed portion of the end face of the via-hole conductor.

The method for producing a ceramic multilayer substrate according to claim 12 is the low-temperature sintering capable of firing the ceramic green sheet simultaneously with the Ag-based conductor material or the Cu-based conductor material in the configuration of the invention according to claims 1-11. The via hole conductor is mainly composed of an Ag-based conductor material or a Cu-based conductor material.

The invention of the ceramic multilayer substrate of claim 13 of the present application is
A ceramic laminate formed by laminating a plurality of ceramic layers, an in-plane conductor disposed between the layers of the ceramic layers constituting the ceramic laminate, and a via-hole conductor for connecting the layers of the ceramic layers A ceramic multilayer substrate comprising:
At least part of the end surface of the via hole conductor is exposed from at least part of the end surface of the via hole conductor so as to straddle at least part of the surface of the ceramic layer that is flush with the end surface of the via hole conductor. In this aspect, an insulating pattern is provided, and the insulating pattern is provided in a plurality of ceramic layers .

According to a fourteenth aspect of the present invention, there is provided the ceramic multilayer substrate according to the thirteenth aspect , wherein the insulating pattern is mainly composed of ceramic and / or glass that is sintered simultaneously with the ceramic laminate. It is characterized by being.

The invention of claim 15 is the ceramic multilayer substrate according to claim 13 , wherein the insulating pattern is based on a hardly sinterable ceramic that does not substantially sinter at the firing temperature of the ceramic layer. The thickness is 1 to 20 μm.

According to a sixteenth aspect of the present invention, there is provided the ceramic multilayer substrate according to any one of the thirteenth to fifteenth aspects, wherein the end surface of the via-hole conductor is exposed to the uppermost layer and / or the lowermost layer of the ceramic laminate. It is characterized by being.

The invention of claim 17 is the ceramic multilayer substrate according to any one of claims 13 to 16 , wherein the ceramic layer is a low-temperature sintered ceramic capable of co-firing with an Ag-based conductor material or a Cu-based conductor material. The via hole conductor is mainly composed of an Ag-based conductor material or a Cu-based conductor material.

According to a first aspect of the present invention, there is provided a ceramic multilayer substrate manufacturing method comprising: forming a through hole penetrating at least a ceramic green sheet on a ceramic green sheet lined with a carrier film; and filling the through hole with a conductive paste. hole forming a via-hole conductor in a ceramic green sheet, the surface of the ceramic green sheet, from at least a portion of the end face of the via-hole conductors, so as to extend over at least a portion of the ceramic green sheet surface, from the ceramic green sheet by forming a loss preventing pattern for preventing conductor is missing, a step of peeling the ceramic green sheet from the carrier film was peeled off from the carrier film, Serra having a via-hole conductor and the missing prevention pattern A step of laminating a plurality of ceramic green sheets including a green sheet and forming a green sheet laminate, and a step of firing the green sheet laminate to sinter the green sheet laminate. It is possible to efficiently manufacture a highly reliable ceramic multilayer substrate with desired characteristics by connecting via hole conductors to the ceramic green sheet with the omission prevention pattern, and suppressing and preventing the via hole conductors from being lost due to external force. It becomes possible.

  Further, for example, when the omission prevention pattern is formed by using a conventional conductor pattern printing process or the like, the omission prevention pattern can be formed without particularly complicating the manufacturing process. It is possible to efficiently manufacture a highly reliable ceramic multilayer substrate while suppressing an increase in cost.

The ceramic green sheet is lined with a carrier film, and at least a via hole conductor filling through hole penetrating the ceramic green sheet is formed, and a via hole conductor is formed by filling the through hole with a conductive paste. since the way, since the missing prevention pattern functions to anchoring hole conductors in the ceramic green sheet, it is possible to ing to prevent falling off of the conductive paste at the time of peeling the carrier film.

Further, as in the method for manufacturing a ceramic multilayer substrate according to claim 2 , in the configuration of the invention according to claim 1, after forming the omission prevention pattern, an in-plane conductor in the green sheet laminate is formed on the surface of the ceramic green sheet. When a process for forming a conductive pattern is provided, missing of the via-hole conductor is reliably prevented in the handling process of the ceramic green sheet, and the conductor pattern that becomes an in-plane conductor in the green sheet laminate and the via-hole conductor It is possible to form the battery in such a manner as to ensure conduction, which is meaningful.

Further, as in the method for manufacturing a ceramic multilayer substrate according to claim 3 , in the configuration of the invention according to claim 1 or 2 , the omission prevention pattern is mainly composed of ceramic and / or glass that is fired simultaneously with the green sheet laminate. When the insulating material is formed in such a manner that at least part of the end face of the via-hole conductor is exposed (when a pattern made of an insulating material (insulating pattern) is formed as a missing prevention pattern) , ceramic Both the green sheet and the omission prevention pattern (insulating pattern) include ceramic and glass, and it is possible to improve the omission prevention effect by the omission prevention pattern that functions to connect the via-hole conductor to the ceramic green sheet.

Further, as in the method for manufacturing a ceramic multilayer substrate according to claim 4 , in the configuration of the invention according to claim 3 , the omission prevention pattern is formed so as to cover the entire outer periphery of the end surface of the via-hole conductor. It becomes possible to securely connect the outer peripheral portion of the easy end face to the ceramic green sheet, and the present invention can be more effectively realized.

Further, as in the method for manufacturing a ceramic multilayer substrate according to claim 5 , in the configuration of the invention according to claim 3 , the omission prevention pattern covers the main part of the outer periphery of the end surface of the via-hole conductor, and at least a part of the outer periphery. When formed in such a manner that it does not cover, for example, the in-plane conductor to be connected to the via-hole conductor is securely connected to the via-hole conductor through a region having no step where no omission prevention pattern is formed. It becomes possible.

  Note that if the in-plane conductor is connected to the via-hole conductor through the stepped region where the omission prevention pattern is formed, disconnection may occur at the stepped portion, and the in-plane conductor is drawn out from the region without the step. Compared to the case, reliability may be lowered.

Further, as in the method for manufacturing a ceramic multilayer substrate according to claim 6 , in the configuration of the invention according to claim 5 , a conductor connection portion formed so that the in-plane conductor covers the exposed portion of the end face of the via-hole conductor; A lead portion connected to the conductor connecting portion, and the connecting portion between the lead portion and the conductor connecting portion is formed in a portion of the outer periphery of the end surface of the via-hole conductor that is not covered by the missing prevention pattern. In this case, the in-plane conductor is surely connected to the via-hole conductor in the exposed portion of the via-hole conductor, and the lead-out portion and the conductor connecting portion are connected to a region having no step where no omission prevention pattern is formed. It is possible to arrange the connecting portion, and it is possible to efficiently manufacture a ceramic multi-layer substrate with high connection reliability in which the lead portion and the conductor connecting portion are securely connected by the connecting portion. It becomes possible.

Moreover, like the manufacturing method of the ceramic multilayer substrate of claim 7 , in the configuration of the invention of claim 1 or 2 , the omission prevention pattern is formed of a resin that disappears in the step of firing the green sheet laminate. In this case, the loss prevention pattern disappears in the firing process, and the electrical connection between the conductor pattern such as the wiring pattern and the via-hole conductor is ensured. Therefore, the electrical connection between the conductor pattern such as the wiring pattern and the via-hole conductor must be established. Without consideration, it is possible to form an optimal pattern for preventing the loss of via-hole conductors in the manufacturing process, and to improve the reliability of preventing the via-hole conductors from falling off.

Further, in the structure of the invention according to claim 7 , when the missing prevention pattern is formed so as to cover the entire end face of the via-hole conductor as in the method for manufacturing the ceramic multilayer substrate according to claim 8 , the via-hole conductor is dropped. This makes it possible to improve the reliability of prevention and is meaningful.

Further, as in the method for manufacturing a ceramic multilayer substrate according to claim 9 , in the configuration of the invention according to claim 8 , the missing prevention pattern is formed so as to cover the entire surface of the ceramic green sheet on which the via-hole conductor is formed. In this case, for example, a high-precision printing mask or the like is used to form a predetermined shape omission prevention pattern, or an optical sensor or the like is required to form an omission prevention pattern at a predetermined position. Therefore, it is possible to efficiently prevent missing via-hole conductors, simplify the manufacturing process, and reduce costs.

In addition, as in the method for manufacturing a ceramic multilayer substrate according to claim 10 , in the configuration of the invention according to claim 1 or 2 , it is difficult to prevent the missing prevention pattern from being substantially sintered at the firing temperature of the green sheet laminate. When an insulating material mainly composed of a sinterable ceramic is used so that at least a part of the end face of the via hole conductor is exposed, the via hole is suppressed while shrinking when the green sheet laminate is sintered. It becomes possible to efficiently manufacture a ceramic multilayer substrate with high reliability and no missing conductor.

Note that when the omission prevention pattern is formed from an insulating material whose main component is a hardly sinterable ceramic that does not substantially sinter at the firing temperature of the green sheet laminate ( when the insulation pattern is formed as an omission prevention pattern) ) But for example, as a ceramic material, in the case of using the low-temperature co-fired ceramic (LTCC) containing glass component, the diffusion of the glass component from the ceramic material, insulation mainly composed of sintering-resistant ceramic Since the material layer is densified, it is possible to obtain a ceramic multilayer substrate having practicality while ensuring adhesion between ceramic layers.

Further, 1 to 20 [mu] m as in the method for producing a ceramic multilayer substrate according to claim 11, in the configuration of the invention of claim 10, the thickness of the missing prevention pattern using an insulating material composed mainly of sintering-resistant ceramic And when the omission prevention pattern is formed so as to cover the entire surface of the ceramic green sheet excluding the exposed portion of the end face of the via-hole conductor, the direction perpendicular to the laminating direction when the green sheet laminate is sintered It is possible to reliably suppress shrinkage in the (planar direction), and use a complicated pattern printing mask to form a predetermined pattern, or expensive to form a missing prevention pattern at a predetermined position. Without the need for equipment such as an optical sensor, it is possible to form an omission prevention pattern with a greater omission prevention effect. It is possible to prevent the missing of the conductor efficiently. As a result, the manufacturing process can be simplified and the cost can be reduced.

  Also, when the thickness of the omission prevention pattern is 1 to 20 μm, the omission prevention pattern made of the insulating material is formed so as to cover the entire surface of the ceramic green sheet excluding the exposed portion of the end face of the via-hole conductor. For example, when a low-temperature co-fired ceramic (LTCC) added with a glass component is used as the ceramic material, the adhesion between the ceramic layers is ensured by diffusion of the glass component from the ceramic material, and practicality is improved. The provided ceramic multilayer substrate can be obtained.

  The thickness of the omission prevention pattern is set to 1 to 20 μm. When the thickness is less than 1 μm, the effect of suppressing shrinkage is insufficient, and when the thickness exceeds 20 μm, the glass component is missing from the ceramic material. This is because the diffusion to the prevention pattern is not sufficiently diffused, so that the adhesion between the ceramic layers may not be ensured.

Further, as in the method for producing a ceramic multilayer substrate according to claim 12 , the ceramic green sheet is mainly composed of a low-temperature sintered ceramic material that can be fired simultaneously with an Ag-based conductor material or a Cu-based conductor material. A ceramic multilayer substrate provided with a via-hole conductor that is free from defects by simultaneously firing a ceramic material and a conductor material by using a material mainly composed of an Ag-based conductor material or a Cu-based conductor material as a via-hole conductor. It becomes possible to manufacture efficiently.

A ceramic multilayer substrate according to claim 13 of the present invention includes a ceramic laminate formed by laminating a plurality of ceramic layers, an in-plane conductor disposed between ceramic layers constituting the ceramic laminate, and an interlayer between ceramic layers. A multilayer ceramic substrate having a via-hole conductor for connecting the at least one portion of the end face of the via-hole conductor to at least a portion of the surface of the ceramic layer that is flush with the end face of the via-hole conductor, In addition, an insulating pattern (a missing prevention pattern made of an insulating material) is provided in such a manner that at least a part of the end face of the via-hole conductor is exposed, and the insulating pattern is provided in a plurality of ceramic layers. Therefore, the via-hole conductor is disposed so as to straddle at least part of the surface of the ceramic layer from the end face of the via-hole conductor. Is securely held by the insulating pattern, it is possible to provide a highly reliable ceramic multilayer substrate.

Further, as in the ceramic multilayer substrate according to claim 14 , in the structure of the invention according to claim 13 , as the insulating pattern (a missing prevention pattern made of an insulating material) , a ceramic sintered simultaneously with the ceramic laminate and / or By using a glass-based component, a ceramic multilayer substrate with an insulating pattern to prevent the loss of via holes by simultaneous firing, a high reliability, a simple firing process, and low manufacturing costs It becomes possible to provide.

Further, as in the invention of the ceramic multilayer substrate of claim 15 , in the structure of the invention of claim 13 , the insulating pattern has a thickness in the range of 1 to 20 μm and is substantially sintered at the firing temperature of the ceramic layer. When the non-sinterable ceramic is used as a main component, it is possible to provide a highly reliable ceramic multilayer substrate that suppresses shrinkage in the firing process and does not have a missing via-hole conductor.

Further, as in the ceramic multilayer substrate of claim 16 , in the configuration of any one of claims 13 to 15 , the end face of the via-hole conductor is exposed in the uppermost layer and / or the lowermost layer of the ceramic laminate. In this case, the exposed end face of the via-hole conductor can be used as a mounting land for mounting on the mounting board.

Further, as in the ceramic multilayer substrate of claim 17 , in the structure of any one of claims 13 to 16 , the ceramic layer is a low-temperature sintered ceramic material that can be fired simultaneously with an Ag-based conductor material or a Cu-based conductor material In the case where the via-hole conductor is composed mainly of an Ag-based conductor material or a Cu-based conductor material, the ceramic material and the conductor material are simultaneously fired, so that the cost is low. It is possible to provide a manufactured multilayer substrate with no via hole conductor missing and high reliability.

  The features of the present invention will be described in more detail below with reference to examples of the present invention.

  FIGS. 1-8 is a figure which shows the manufacturing method of the ceramic multilayer substrate concerning Example 1 of this invention. Hereinafter, the manufacturing method of the ceramic multilayer substrate of Example 1 of the present invention will be described with reference to FIGS.

(1) First, as shown in FIG. 1A, a ceramic green sheet 1 backed by a carrier film 2 is prepared.
In this embodiment, as the ceramic green sheet 1, for example, a low-temperature sintered ceramic raw material powder in which barium oxide, aluminum oxide, silicon oxide, calcium oxide, boron oxide and the like are mixed, an organic binder such as polyvinyl butyral, di- A slurry prepared by adding and mixing a plasticizer such as n-butyl phthalate and a solvent such as toluene or isopropyl alcohol and molding the slurry on a carrier film 2 by a method such as a doctor blade method was used.

The low-temperature sintered ceramic raw material powder is a ceramic raw material powder that can be fired at 1050 ° C. or less and can be fired simultaneously with Cu, Ag, or the like. Specifically, a glass composite ceramic raw material powder containing an auxiliary such as amorphous glass or crystallized glass in a ceramic filler such as alumina, a crystallized glass ceramic raw material powder that precipitates crystals such as cordierite, or Examples thereof include non-glass-based ceramic raw material powder that generates glass as an auxiliary agent during the firing cycle.
In addition, various known organic binders, plasticizers, solvents and the like can be used. Furthermore, additives such as a dispersant can be added.

  (2) Next, as shown in FIG. 1B, a through hole 3 for a via hole is formed in the ceramic green sheet 1. At this time, the through hole 3 is formed so as to penetrate the carrier film 2 together with the ceramic green sheet 1.

The via-hole 3 for via holes is more likely to drop out of the via-hole conductor 4 (FIG. 1C) as the diameter of the through-hole 3 is larger and the thickness of the ceramic green sheet 1 is thinner. In particular, the maximum dimension of the planar shape of the through hole 3 for via holes (for example, the diameter when the planar shape of the through hole 3 is circular, and the length of the diagonal line when the planar shape is square) is D, and the ceramic green sheet 1 When the thickness obtained by adding the thickness of the carrier film 2 is t, and the following equation (1) is satisfied, the via-hole conductor 4 (FIG. 1 (c)) is missing during the ceramic green sheet handling process. Since it is easy, it is particularly meaningful to apply the present invention.
D / t> 3.0 (1)

  In addition, via-hole conductors with a large planar area are often used as mounting lands for surface-mounted components and IC packages, or as mounting lands on the motherboard of ceramic multilayer substrates, and are usually formed on the front and back surfaces of ceramic multilayer substrates. Often done. In addition, it becomes possible to improve joint strength by using such a via-hole conductor as a mounting land.

  (3) Then, as shown in FIG. 1 (c), the via hole conductor 4 is formed by filling the through hole 3 for the via hole of the ceramic green sheet 1 manufactured as described above with a conductive paste.

  (4) Next, as shown in FIG. 1 (d) and FIG. 4 (a), among the via-hole conductors 4 formed by filling the conductive paste, the predetermined via-hole conductors 4 are not missing. A missing prevention pattern 5 is formed for prevention.

  The omission prevention pattern 5 can be formed for all the through holes 3 for via holes. However, the omission prevention pattern is formed only for the through holes having a large diameter, in which the via hole conductor is easily lost. Also good.

  Examples of the material used for forming the omission prevention pattern 5 include a resin paste, a conductive paste, or a ceramic paste as described below.

<Resin paste>
As a paste for forming the omission prevention pattern 5, for example, a resin paste whose main component is a resin such as polypropylene can be used. When such a resin paste is used, the omission prevention pattern is burned out when the green sheet laminate is baked, so the shape of the omission prevention pattern can be freely selected and the degree of freedom in the manufacturing process can be improved. Is possible.
For example, when a resin paste is used, it is possible to dispose the missing prevention pattern 5 over the entire surface of the ceramic green sheet 1 including the end face 4 a of the via hole conductor 4, and at this time, the missing prevention pattern 5 serves as the end face of the via hole conductor 4. Since it is in contact with a wide area of the entire surface of 4a and the entire surface of the ceramic green sheet 1, the effect of preventing the via-hole conductor 4 from being lost can be further increased.

<Conductive paste>
As a paste for forming the omission prevention pattern 5, a conductive paste mainly composed of metal may be used. In this case, it is desirable from the viewpoint of sinterability to use the same type of composition as the conductive paste used for the conductor pattern 6 constituting the wiring pattern or the like.
Further, when the conductive paste is used to form the omission prevention pattern 5, the omission prevention pattern 5 covers the entire end face 4a of the via-hole conductor 4 and the surface of the ceramic green sheet 1 around the end face 4a of the via-hole conductor 4. Can be arranged as follows. At this time, the omission prevention pattern 5 is in contact with the entire end face 4a of the via-hole conductor 4, and also has excellent adhesion to the via-hole conductor 4, so that the via-hole conductor 4 is held more securely and has a great omission prevention effect. Can be obtained.
Further, when a conductive paste is used as the paste for forming the omission prevention pattern 5, the omission prevention pattern 5 protrudes from the outer peripheral portion of the end surface 4a of the via-hole conductor 4 to the surface of the ceramic green sheet 1 (for example, 4 (a), 4 (c) and FIG. 5 (a), (b), the distance A) is preferably 20 to 200 μm, and most preferably 50 to 100 μm. If the distance A is less than 20 μm, a sufficient omission prevention effect cannot be obtained, and if it exceeds 200 μm, it becomes an obstacle to miniaturization. On the other hand, by setting the distance A to 50 to 100 μm, it is possible to ensure a sufficient omission prevention effect without hindering downsizing of the product.

<Ceramic paste>
A ceramic paste containing ceramic as a main component may be used as the paste for forming the omission prevention pattern 5. In the case of using a ceramic paste to form the omission prevention pattern 5, it is necessary to use a ceramic of the same system as the ceramic constituting the ceramic green sheet 1 (that is, the ceramic laminate 21 (FIG. 2)) from the viewpoint of sinterability. desirable.
When ceramic paste is used to form the omission prevention pattern 5, the omission prevention pattern 5 is formed from the outer peripheral portion of the end face 4a of the via-hole conductor 4 in such a manner that at least a part of the end face 4a of the via-hole conductor 4 is exposed. The via hole conductor 4 can be disposed so as to straddle the surface of the ceramic green sheet 1 around the end face 4a. Further, when the ceramic paste is used, a loss prevention pattern (insulating pattern) 5 made of an insulator is formed. Therefore, compared with the case where the conductive paste is used, the area of the end face 4a of the via-hole conductor 4, that is, the electrode It is possible to prevent the via-hole conductor 4 from being lost while avoiding an excessively large area.
Even when a ceramic paste is used as a paste for forming the omission prevention pattern 5, a protrusion distance (for example, from the outer peripheral portion of the end face 4 a of the via hole conductor 4 to the surface of the ceramic green sheet 1 of the omission prevention pattern 5 (for example, 5 (a) and 5 (b), the distance A) is preferably 20 to 200 μm, and most preferably 50 to 100 μm. If the distance A is less than 20 μm, a sufficient omission prevention effect cannot be obtained, and if it exceeds 200 μm, it becomes an obstacle to miniaturization. However, in the case of ceramic paste, even if it exceeds 200 μm, there is no problem if the entire surface of other via-hole conductors is not covered. On the other hand, by setting the distance A to 50 to 100 μm, it is possible to ensure a sufficient omission prevention effect without hindering downsizing of the product.

(5) Then, after forming the omission prevention pattern in (4) above, further printing a conductive paste, as shown in FIGS. 1 (e), 4 (b) and 4 (c), the surface conductor The conductor pattern 6 constituting the conductor pattern 6 constituting the in-plane conductor 6 '' is formed. As shown in FIG. 3 and FIGS. 5A and 5B, in the first embodiment, the terminal electrode 6 ′ ″ is formed by the end face 4a of the via-hole conductor 4.
The conductor pattern 6 constituting the in-plane conductor includes a conduction connecting portion 6a disposed so as to reach the end face 4a of the via-hole conductor 4 over the omission prevention pattern 5, the lead portion 6b, and the conductor connecting portion 6a. A connection portion 6c for connecting the lead portion 6b, and is connected to the via-hole conductor 4 via the lead portion 6b, the connection portion 6c, and the conductor connection portion 6a.
The conductor pattern 6 constituting the terminal electrode is disposed in a region from the top of the missing prevention pattern 5 to the end face 4a of the via-hole conductor 4, and is securely connected to the via-hole conductor 4.

  In forming the conductor pattern 6 constituting the in-plane conductor so as to be connected to the via-hole conductor 4, as shown in FIG. 6A, the end surfaces 4a of the via-hole conductor 4 are arranged on a pair of sides facing each other. The loss prevention pattern 5 may be formed by printing a conductive paste so as to cover the outer peripheral portion. Further, as shown in FIG. 6 (b), by printing a conductive paste from above, a conductor connecting portion 6a that conducts with the end face 4a of the via-hole conductor 4, a lead portion 6b, a conductor connecting portion 6a, It is also possible to configure so that a conductor pattern 6 including a connection portion 6c for connecting the lead portion 6b is formed.

  As shown in FIGS. 6A and 6B, the omission prevention pattern 5 is formed in such a manner as not to cover at least a part of the outer periphery, and this omission prevention pattern is not formed. When the conductor pattern 6 is electrically connected to the via-hole conductor 4 through the region, a ceramic having desired characteristics is suppressed and prevented from being broken in the conductor pattern constituting the in-plane conductor (wiring pattern). A multilayer substrate can be obtained.

  Furthermore, as shown in FIGS. 7A and 7B, for example, as shown in FIGS. 7A and 7B, the omission prevention pattern 5 is not covered with the omission prevention pattern 5 on only one side of each side of the end face 4a of the via-hole conductor 4. Such a configuration is also possible, and the specific shape of the omission prevention pattern 5 is not particularly limited.

  The same conductive paste is used as the conductive paste for filling the through holes for via holes, the conductive paste for forming the conductor pattern, and the conductive paste for forming the omission prevention pattern with the conductive paste. It is also possible to use different types of conductive paste.

  Further, as the conductive paste, for example, a conductive powder mainly composed of a metal such as Ag, Au, Cu, Ni, Ag / Pt, Ag / Pd, and the like, in which a predetermined amount of an organic vehicle is added, It is possible to use a conductive paste obtained by stirring and kneading with three rolls or the like. The average particle diameter and particle shape of the conductor powder are not particularly limited. For example, it is desirable that the average particle diameter is 0.3 μm to 10 μm and no coarse powder or aggregated powder is included.

  The conductive paste for filling the through holes for via holes contains glass frit and ceramic raw material powder in a proportion of 70% by weight or less in order to match the sintering shrinkage with the ceramic green sheet. Also good. In other words, the conductive paste has various composition ratios for the purpose of matching the shrinkage rate with the ceramic green sheet, adjusting the resistivity, and adjusting the adhesion strength with the ceramic green sheet. Can be used.

  (6) Then, as shown in FIGS. 2A and 2B, the ceramic green sheets 1 produced as described above are laminated in a predetermined order, and a green sheet laminate (unfired ceramic laminate) 11 is obtained. Form. When the ceramic green sheets 1 are laminated, the ceramic green sheets 1 are peeled off from the carrier film 2 and laminated together with other ceramic green sheets as necessary, so that the green sheets as shown in FIG. A laminate (unfired ceramic laminate) 11 is formed.

(7) Then, by firing the green sheet laminate (unfired ceramic laminate) 11 under predetermined conditions, as shown in FIG. 2 (c), the surface conductor 6 ′, the in-plane conductor 6 ″, etc. A ceramic multilayer substrate (ceramic laminate) 21 including the conductor pattern 6 to be formed, the via-hole conductor 4, the terminal electrode 6 ′ ″ formed by the end face 4 a of the predetermined via-hole conductor 4 is obtained.
In the first embodiment, as shown in FIG. 2C, the lower end face 4a of the via-hole conductor 4 exposed on the lower surface side of the ceramic multilayer substrate (ceramic laminate) 21 is the terminal electrode 6 of the ceramic multilayer substrate. '''.

  (8) Then, after plating the conductor exposed on the surface, the semiconductor device 7, the surface mounting component (for example, chip capacitor) 8, etc. are reflow-soldered or the like and the ceramic multilayer substrate 21 through the solder 10. By mounting on the surface of the ceramic multilayer module 31, the ceramic multilayer module 31 is completed (FIG. 2C).

In addition, as shown in FIG. 3, it is also possible to attach the metal case 9 to the upper surface side of the ceramic multilayer module 31, and to make the ceramic multilayer module 31a with a metal case.
2C and 3 show an example in which the missing prevention pattern 5 remains even after baking.

  Further, in the case of a so-called multi-cavity method in which one parent substrate is divided so that a plurality of ceramic multilayer substrates can be obtained simultaneously, the ceramic green sheets of (6) above are laminated and pressure-bonded. At the time when the multilayer body (unfired ceramic multilayer body) 11 is formed, grooves are formed on the break line, and the semiconductor device 7, surface mount component (for example, chip capacitor) 8, etc. are formed in the step (8). A ceramic multilayer module 31 as shown in FIG. 2C can be obtained by mounting on the surface of the ceramic multilayer substrate 21 and then dividing.

  In the method for manufacturing the ceramic multilayer substrate of Example 1, the missing prevention pattern 5 serves to suppress the via hole conductor 4 and the ceramic green sheet 1 from being connected, and to suppress and prevent the via hole conductor 4 from being lost due to external force. A highly reliable ceramic multilayer substrate 21 having desired characteristics without missing the via-hole conductor 4 can be efficiently manufactured.

  In the first embodiment, the case where the through hole for the via hole conductor is also formed in the carrier film supporting the ceramic green sheet has been described as an example. However, as shown in FIG. The present invention can also be applied to the case where only the through hole 3 is formed and the through hole is not formed in the carrier film 2, and also in this case, the effect of preventing the via hole conductor 4 from being lost is obtained. Obtainable.

FIGS. 9-12 is a figure which shows the manufacturing method of the ceramic multilayer substrate concerning the other Example (Example 2) of this invention. 9-12, the part which attached | subjected the same code | symbol as FIGS. 1-8 has shown the part which is the same or it corresponds.
In Example 2, a resin paste was used as a material for forming a missing prevention pattern, and the missing prevention pattern was formed on the entire surface of the ceramic green sheet.

Hereinafter, a method for manufacturing the ceramic multilayer substrate of Example 2 will be described.
(1) First, as shown in FIG. 9A, a ceramic green sheet 1 lined with a carrier film 2 is prepared.

  (2) Then, as shown in FIG. 9B, a through hole 3 for a via hole is formed in the ceramic green sheet 1. At this time, the through hole 3 is formed so as to penetrate the carrier film 2 together with the ceramic green sheet 1.

  (3) Then, as shown in FIG. 9C, the via hole conductor 4 is formed by filling the via hole 3 for the via hole of the ceramic green sheet 1 manufactured as described above with a conductive paste.

  (4) Next, as shown in FIG. 9 (d), the upper surface of a predetermined ceramic green sheet 1 used in such a manner that the end face 4a of the via-hole conductor 4 is exposed on the surface of the ceramic multilayer substrate 21. A resin paste is applied to the entire surface to form a missing prevention pattern 5 (5a) made of a resin paste layer. In Example 2, a resin paste mainly composed of polypropylene or the like can be used as the resin paste.

(5) Thereafter, as shown in FIG. 10 (a), the ceramic green sheet 1 provided with the via-hole conductor 4, the omission prevention pattern 5 (5a), and the conductor pattern 6 formed in the step (4) above. The end face 4a of the via-hole conductor 4 in the ceramic green sheet 1 provided with the missing prevention pattern 5 (5a) and the other ceramic green sheet provided with the missing prevention pattern 5 (5a) is the surface of the ceramic multilayer substrate 21. The green sheet laminate (unfired ceramic laminate) is formed by laminating in a predetermined order so as to be exposed on the (lower surface). When the ceramic green sheets 1 are laminated, the ceramic green sheets 1 are peeled off from the carrier film 2 and are laminated together with other ceramic green sheets as necessary, whereby a green sheet as shown in FIG. A laminate (unfired ceramic laminate) 11 is formed.
In the above embodiment, from the viewpoint of sinterability, the omission prevention pattern is laminated so as to be disposed at a position to be the outermost layer of the laminate, but depending on the case, it may be applied to ceramic green sheets other than the outermost layer. It is also possible to provide a missing prevention pattern 5 (5a) made of a resin paste layer.

(6) Then, by firing the green sheet laminate (unfired ceramic laminate) 11 under predetermined conditions, the resin paste is burnt, decomposed and disappeared, and the ceramic green sheet and the conductive paste are sintered. 11A, the terminal electrode formed by the surface conductor 6 ′ (4) with the via-hole conductor 4 exposed on the surface, the in-plane conductor 6 ″, and the end face 4a of the via-hole conductor 4 as shown in FIG. A ceramic multilayer substrate (ceramic laminate) 21 provided with the conductor pattern 6 constituting 6 ′ ″ (4a), the via-hole conductor 4 and the like is obtained.

  (7) Then, after plating the conductor exposed on the surface, as shown in FIG. 11 (b), the semiconductor device 7, surface mount component (for example, chip capacitor) 8, etc. are placed on the surface of the ceramic multilayer substrate 21. By mounting, the ceramic multilayer module 31 is completed.

  In addition, as shown in FIG. 3, it is also possible to attach the metal case 9 to the upper surface side of the ceramic multilayer module 31, and to make the ceramic multilayer module 31a with a metal case.

  In the method for manufacturing the ceramic multilayer substrate of Example 2, since the resin paste used for the missing prevention pattern 5 (5a) disappears in the firing step, the shape and structure of the missing prevention pattern 5 (5a) are determined. In the manufacturing process, the shape and structure of the omission prevention pattern 5 (5a) are not restricted in order to ensure electrical connection between the via-hole conductor 4 and the conductor pattern 6 constituting the wiring pattern or the like. It is possible to form an omission prevention pattern 5 (5a) that is optimal for preventing the via-hole conductor 4 from falling off, and to improve the reliability of preventing the via-hole conductor 4 from falling off.

  In Example 2, a resin paste is applied to the entire surface of the ceramic green sheet 1 to form the omission prevention pattern 5 (5a) of the via-hole conductor 4, but as shown in FIG. It is also possible to apply the resin paste only to the end face 4a of the via-hole conductor 4 and the periphery thereof to form the missing prevention pattern 5 (5a) only at a predetermined position on the upper surface of the ceramic green sheet 1.

13 and 14 are views showing a method for manufacturing a ceramic multilayer substrate according to still another embodiment (Example 3) of the present invention. In FIGS. 13 and 14, the same reference numerals as those in FIGS. 1 to 8 denote the same or corresponding parts.
In this example 3, the omission prevention pattern is formed of a material mainly composed of a hardly sinterable ceramic that does not substantially sinter at the firing temperature of the green sheet laminate. And the function of suppressing shrinkage in the direction (plane direction) orthogonal to the stacking direction of the green sheet laminate in the firing step.

Hereinafter, a method for manufacturing the ceramic multilayer substrate of Example 3 will be described.
(1) First, as shown in FIG. 13A, a ceramic green sheet 1 backed by a carrier film 2 is prepared.

  (2) Then, as shown in FIG. 13 (b), a through hole 3 for a via hole is formed in the ceramic green sheet 1. At this time, the through hole 3 is formed so as to penetrate the carrier film 2 together with the ceramic green sheet 1.

  (3) Then, as shown in FIG. 13C, the via hole conductor 4 is formed by filling the through hole 3 for the via hole of the ceramic green sheet 1 produced as described above with a conductive paste.

  (4) Next, as shown in FIG. 13 (d), the entire upper surface of the ceramic green sheet 1 excluding the central portion of the end face 4a of the via-hole conductor 4 is substantially at the firing temperature of the green sheet (green sheet laminate). The shrinkage-suppressing layer 5b, which has a function of suppressing shrinkage in the direction (plane direction) perpendicular to the stacking direction of the green sheet laminate, is prevented from being lost in the firing process. The pattern 5 is formed.

In forming the omission prevention pattern 5 (shrinkage suppression layer 5b), an alumina powder is dispersed in an organic vehicle to prepare a slurry, and this slurry is removed from the central portion of the end face 4a of the via-hole conductor 4 by using a ceramic green. By applying to the entire upper surface of the sheet 1, the missing prevention pattern 5 (shrinkage suppression layer 5b) is formed.
Moreover, the missing prevention pattern 5 (shrinkage suppression layer 5b) adjusts the coating thickness so that the thickness after firing becomes 1 to 20 μm. This is because when the thickness after firing is less than 1 μm, the effect of suppressing shrinkage becomes insufficient, and when the thickness exceeds 20 μm, the diffusion of the glass component from the ceramic material to the omission prevention pattern is sufficiently suppressed. Therefore, the adhesiveness between the ceramic layers may not be ensured.
In addition, the omission prevention pattern 5 (shrinkage suppression layer 5b) mainly composed of a hardly sinterable ceramic has almost no shrinkage in the firing step, and the thickness thereof does not change greatly before and after firing.

  (5) Next, as shown in FIG. 13 (e), a conductive paste 6 is printed on the upper surface of the ceramic green sheet 1 including the end face 4 a of the via-hole conductor 4 to form a conductor pattern 6.

  (6) Thereafter, as shown in FIG. 14 (a), the ceramic green sheet 1 provided with the via-hole conductor 4, the omission prevention pattern 5 (5b), the conductor pattern 6, etc., formed in the step (5). By laminating in a predetermined order, a green sheet laminate (unfired ceramic laminate) 11 is formed as shown in FIG. When the ceramic green sheets 1 are laminated, the ceramic green sheets 1 are peeled off from the carrier film 2 and sequentially laminated together with other ceramic green sheets as shown in FIG. 14B. A green sheet laminate (unfired ceramic laminate) 11 is formed.

(7) Then, the green sheet laminate (unfired ceramic laminate) 11 is fired under predetermined conditions, whereby a surface conductor 6 ′, an in-plane conductor 6 ″, a terminal as shown in FIG. A ceramic multilayer substrate (ceramic laminate) 21 including the conductor pattern 6 constituting the electrode 6 ′ ″ and the like, the via-hole conductor 4 and the like is obtained.
In Example 3, since the shrinkage suppression layer 5 b is used as the omission prevention pattern 5, the green sheet laminate 11 is shrunk in the laminating direction in the firing process of the green sheet laminate 11. A highly reliable ceramic multilayer substrate having a desired dimensional accuracy and shape accuracy, and having no via-hole conductor 4 missing, can be prevented from shrinking in a direction orthogonal to the direction (plane direction). Obtainable. Moreover, since the shrinkage | contraction suppression layer as a missing prevention pattern straddles both the via-hole conductor and a ceramic green sheet, generation | occurrence | production of the void which may arise between them at the time of baking can be prevented.

  (8) Then, after plating the surface conductor 6 ′ exposed on the surface, the semiconductor device 7, the surface mount component (for example, chip capacitor) 8 and the like are mounted on the ceramic multilayer substrate 21 as shown in FIG. The ceramic multilayer module 31 is completed by mounting on the surface.

  In addition, as shown in FIG. 3, it is also possible to attach the metal case 9 to the upper surface side of the ceramic multilayer module 31, and to make the ceramic multilayer module 31a with a metal case.

  In the method for producing a ceramic multilayer substrate of Example 3, the shrinkage suppression layer 5b also used as the missing prevention pattern 5 functions to prevent the via hole conductor 4 from being lost, and the green sheet laminate in the firing step (Ceramic laminate after firing) In order to fulfill the function of suppressing the shrinkage in the planar direction of 11, a highly reliable ceramic multilayer substrate 21 having a high planar dimensional accuracy and no missing via-hole conductor 4 is obtained. Can do.

  The present invention is not limited to the above embodiments, but the type of material constituting the via-hole conductor, the shape of the via-hole conductor, the arrangement of the via-hole conductor on the ceramic multilayer substrate, and the configuration of the omission prevention pattern Various applications and modifications can be made within the scope of the invention with respect to materials and specific shapes.

As described above, according to the present invention, it is possible to efficiently and surely manufacture a highly reliable ceramic multilayer substrate with no missing via-hole conductors.
Therefore, the present invention can be widely applied to the field of ceramic multilayer substrates, ceramic multilayer modules using the same, and manufacturing techniques thereof.

(a)-(e) is a figure which shows the manufacturing method of the ceramic multilayer substrate concerning Example 1 of this invention. (a)-(c) is a figure which shows the manufacturing method of the ceramic multilayer substrate concerning Example 1 of this invention. It is a figure which shows the ceramic multilayer module with a metal case using the ceramic multilayer substrate concerning Example 1 of this invention. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining the characteristic of the manufacturing method of the ceramic multilayer substrate concerning Example 1 of this invention, (a) is a top view which shows the state which formed the omission prevention pattern, (b) is a surface from the top of an omission prevention pattern. The top view which shows the state which formed the conductor pattern used as an inner conductor, (c) is the cc sectional view taken on the line of (b). It is a figure explaining the characteristic of the manufacturing method of the ceramic multilayer substrate concerning Example 1 of this invention, (a) is front sectional drawing which shows the vicinity of a terminal electrode, (b) is a bottom view. It is a figure explaining the modification of the manufacturing method of the ceramic multilayer substrate concerning Example 1 of this invention, (a) is a figure which shows the state which formed the omission prevention pattern, (b) is a conductor from the omission prevention pattern. It is a figure which shows the state in which the pattern was formed. It is a figure explaining the other modification of the manufacturing method of the ceramic multilayer substrate concerning Example 1 of this invention, (a) is a figure which shows the state in which the omission prevention pattern was formed, (b) is the top of the omission prevention pattern It is a figure which shows the state which formed the conductor pattern from. It is a figure which shows the further another modification of the manufacturing method of the ceramic multilayer substrate concerning Example 1 of this invention. (a)-(d) is a figure which shows the manufacturing method of the ceramic multilayer substrate concerning Example 2 of this invention. (a), (b) is a figure which shows the manufacturing method of the ceramic multilayer substrate concerning Example 2 of this invention. (a), (b) is a figure which shows the manufacturing method of the ceramic multilayer substrate concerning Example 2 of this invention. It is a figure which shows the modification of the manufacturing method of the ceramic multilayer substrate concerning Example 2 of this invention. (a)-(e) is a figure which shows the manufacturing method of the ceramic multilayer substrate concerning Example 3 of this invention. (a)-(c) is a figure which shows the manufacturing method of the ceramic multilayer substrate concerning Example 3 of this invention. (a), (b) is a figure which shows the formation method of the via-hole conductor in the manufacturing process of the conventional ceramic multilayer substrate. (a)-(c) is a figure which shows the formation method of the other conventional via-hole conductor. (a)-(e) is a figure which shows the conventional formation method of another via-hole conductor.

DESCRIPTION OF SYMBOLS 1 Ceramic green sheet 2 Carrier film 3 Via hole for via hole 4 Via hole conductor 4a End surface of via hole conductor 5 (5a) Missing prevention pattern 5b Shrinkage suppression layer 6 Conductor pattern 6 'Surface conductor 6''In-plane conductor 6''' Terminal Electrode 6a Conductor connection portion 6b Lead portion 6c Connection portion 7 Semiconductor device 8 Surface mount component 9 Metal case 10 Solder 11 Green sheet laminate (unfired ceramic laminate)
21 Ceramic multilayer substrate (ceramic laminate)
31 Ceramic multilayer module 31a Ceramic multilayer module with metal case D Maximum dimension of planar shape of via hole for via hole t Thickness of ceramic green sheet plus carrier film thickness

Claims (17)

Forming a through hole penetrating at least the ceramic green sheet with respect to the ceramic green sheet backed by a carrier film;
Forming a via-hole conductor by filling the through hole with a conductive paste ;
In order to prevent the via hole conductor from being missing from the ceramic green sheet so as to straddle at least a part of the surface of the ceramic green sheet from at least a part of the end surface of the via hole conductor on the surface of the ceramic green sheet. Forming a loss prevention pattern of
Peeling the ceramic green sheet from the carrier film;
Laminating a plurality of ceramic green sheets including the ceramic green sheet provided with the via-hole conductor and the omission prevention pattern , peeled from the carrier film , and forming a green sheet laminate,
Firing the green sheet laminate, and sintering the green sheet laminate. A method for producing a ceramic multilayer substrate, comprising: After forming the missing prevention pattern, said ceramic green sheet surface, said characterized in that it comprises a step of forming a conductive pattern serving as a plane conductors in the green sheet laminate, the multilayer ceramic substrate of claim 1, wherein Manufacturing method. The omission prevention pattern is formed in such a manner that at least a part of the end face of the via-hole conductor is exposed by an insulating material mainly composed of ceramic and / or glass that is fired simultaneously with the green sheet laminate. The method for producing a ceramic multilayer substrate according to claim 1, wherein: 4. The method for manufacturing a ceramic multilayer substrate according to claim 3 , wherein the missing prevention pattern is formed so as to cover the entire outer periphery of the end face of the via-hole conductor. 4. The ceramic multilayer substrate according to claim 3 , wherein the missing prevention pattern is formed in such a manner as to cover a main part of the outer periphery of the end face of the via-hole conductor and not to cover at least a part of the outer periphery. Production method. The in-plane conductor includes a conductor connection portion formed so as to cover the exposed portion of the end surface of the via-hole conductor, and a lead portion connected to the conductor connection portion, and the lead portion and the conductor 6. The method of manufacturing a ceramic multilayer substrate according to claim 5 , wherein the connection portion with the connection portion is formed in a portion of the outer periphery of the end face of the via-hole conductor that is not covered with the missing prevention pattern. 3. The method for manufacturing a ceramic multilayer substrate according to claim 1, wherein the loss prevention pattern is formed of a resin that disappears in the step of firing the green sheet laminate. 8. The method for manufacturing a ceramic multilayer substrate according to claim 7 , wherein the missing prevention pattern is formed so as to cover the entire end face of the via-hole conductor. 9. The method for manufacturing a ceramic multilayer substrate according to claim 8 , wherein the missing prevention pattern is formed so as to cover the entire surface of the ceramic green sheet on which the via-hole conductor is formed. At least a part of the end face of the via-hole conductor is exposed by an insulating material whose main component is a hard-to-sinter ceramic that is not substantially sintered at the firing temperature of the green sheet laminate. The method for producing a ceramic multilayer substrate according to claim 1, wherein the method is formed. The ceramic green sheet excluding the exposed portion of the end face of the via-hole conductor while the thickness of the omission prevention pattern made of an insulating material whose main component is hardly sinterable ceramic is 1 to 20 μm. The method for producing a ceramic multilayer substrate according to claim 10 , wherein the ceramic multilayer substrate is formed so as to cover the entire surface. The ceramic green sheet is mainly composed of a low-temperature sintered ceramic material that can be fired simultaneously with an Ag-based conductor material or a Cu-based conductor material, and the via-hole conductor is made of an Ag-based conductor material or a Cu-based conductor material. The method for producing a ceramic multilayer substrate according to any one of claims 1 to 11 , wherein the method is a main component. A ceramic laminate formed by laminating a plurality of ceramic layers, an in-plane conductor disposed between the layers of the ceramic layers constituting the ceramic laminate, and a via-hole conductor for connecting the layers of the ceramic layers A ceramic multilayer substrate comprising:
At least part of the end surface of the via hole conductor is exposed from at least part of the end surface of the via hole conductor so as to straddle at least part of the surface of the ceramic layer that is flush with the end surface of the via hole conductor. An insulating pattern is provided in such a manner, and the insulating pattern is provided on a plurality of ceramic layers . 14. The ceramic multilayer substrate according to claim 13 , wherein the insulating pattern is mainly composed of ceramic and / or glass that is sintered simultaneously with the ceramic laminate. The ceramic multilayer according to claim 13 , wherein the insulating pattern is mainly composed of a hardly-sinterable ceramic that does not substantially sinter at the firing temperature of the ceramic layer, and has a thickness of 1 to 20 µm. substrate. The ceramic multilayer substrate according to any one of claims 13 to 15 , wherein an end face of the via-hole conductor is exposed in an uppermost layer and / or a lowermost layer of the ceramic laminate. The ceramic layer is mainly composed of a low-temperature sintered ceramic material that can be simultaneously fired with an Ag-based conductor material or a Cu-based conductor material, and the via-hole conductor is mainly composed of an Ag-based conductor material or a Cu-based conductor material. The ceramic multilayer substrate according to any one of claims 13 to 16 , wherein

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