JP4820721B2 - Chemical heat exchanger - Google Patents

Description

  The present invention relates to a chemical heat exchanger that exchanges heat with respect to a chemical flowing through the inside by cooling or heating a heat exchange surface formed on an outer surface.

  Conventionally, as a heat exchanger for a chemical solution for exchanging heat with respect to a chemical solution flowing inside by cooling or heating a heat exchange surface formed on the outer surface, a semiconductor processing solution disclosed in Japanese Patent Laid-Open No. 9-229487 Cooling and heating devices are known.

The semiconductor processing liquid cooling and heating device (chemical liquid heat exchanger) disclosed in the publication forms a cooling and heating chamber by sandwiching a side wall between a pair of heat exchange substrates, and a semiconductor processing liquid is formed in the cooling and heating chamber. This is a cooling and heating device for semiconductor processing liquid that circulates the liquid and cools or heats the semiconductor processing liquid flowing through each heat exchange substrate, and at least the processing liquid contact surface side of the heat exchange substrate is an amorphous carbon layer. It is composed of a graphite base material that is coated, or the heat exchange substrate is composed of amorphous carbon.
Japanese Patent Application Laid-Open No. 9-229587

  However, the above-described conventional heat exchanger for chemical liquid (cooling and heating device for semiconductor processing liquid) has the following problems.

  First, this type of heat exchange substrate is required to have good heat conductivity because it is necessary to ensure heat exchange efficiency. Furthermore, chemical resistance and chemical resistance to chemical solutions are strong. Non-permeability to gas to prevent gas leakage is required, but in the case of amorphous carbon, chemical resistance and non-permeability to gas show very good characteristics, but thermal conductivity is not necessarily good. . For this reason, the amorphous carbon used for the heat exchange substrate is required to secure the mechanical strength by suppressing the thickness to about 1 to 3 [mm] and making it a composite plate combining a graphite base material and a reinforcing plate. For this reason, the heat transfer performance is lowered due to the contact thermal resistance between different materials, and there is a limit to improving the heat exchange efficiency.

  Secondly, in addition to the need to form a cooling and heating chamber by sandwiching the side wall between a pair of heat exchange substrates, it is necessary to configure it as a composite plate combining amorphous carbon and a graphite substrate. As a result, the structure of the entire heat exchanger becomes complicated, leading to an increase in the number of parts and a cost increase associated with a complicated manufacturing process, and a decrease in durability due to thermal expansion and contraction between different materials.

  The object of the present invention is to provide a heat exchanger for chemicals that solves the problems existing in the background art.

  In order to solve the above-described problems, the present invention configures the chemical liquid heat exchanger 1 that performs heat exchange with respect to the chemical liquid L flowing inside by cooling or heating the heat exchange surface Cu formed on the outer surface. A plurality of chemical flow holes R... For flowing the chemical liquid L inside are formed, and upper and lower surfaces serving as outer surfaces are formed as heat exchange surfaces Cu and Cd, and the chemical flow holes R are formed in the front end face 2f and the rear end face 2r. The heat exchange block 2 that is integrally formed by opening the doorway Rr ... and sintering a predetermined firing material M, and the doorway Rr ... on the front end surface 2f and the rear end surface 2r of the heat exchange block 2 are surrounded. The seal rings 41a and 41b arranged as described above, and the front end surface 2f and the rear end surface 2r of the heat exchange block 2 are in contact with each other through the seal rings 41a and 41b, and the chemical solution circulation holes R. One or more of a flow hole connecting portion 4m, a flow port connecting portion 4m, a flow port 4i through which the chemical liquid L flows into the chemical liquid flow hole R, and an outflow port portion 4o through which the chemical liquid L flows out from the chemical liquid flow hole R are provided. The pair of connection blocks 3a and 3b, and a coupler that joins one end portions and the other end portions of the pair of connection blocks 3a and 3b.

  In this case, an amorphous carbon material or a silicon carbide material (SiC) can be used as the fired material M according to a preferred aspect of the invention. Moreover, it is desirable to select the thickness of the thinnest part between the chemical solution flow holes R ... in the heat exchange block 2 and the heat exchange surfaces Cu, Cd to 2 [mm] or less.

  The chemical solution heat exchanger 1 according to the present invention having such a configuration has the following remarkable effects.

  (1) Since a predetermined fired material M, which is a single material, is sintered to provide the heat exchange block 2 that is integrally formed as a whole, the disadvantages when it is configured as a composite plate are eliminated, that is, between different materials The disadvantage that the heat transfer performance is lowered by the contact thermal resistance can be eliminated, so that the heat exchange efficiency as a heat exchanger can be improved.

  (2) Since the main basic part can be constituted by the heat exchange block 2 that is formed integrally with a predetermined baking material M and that has a plurality of chemical liquid flow holes R through which the chemical liquid L flows, the structure of the entire heat exchanger Can be simplified. Therefore, the cost can be reduced due to the significant reduction in the number of parts and the simplification of the manufacturing process, and the thermal expansion and contraction between different materials does not occur, so that durability in long-term use can be enhanced.

  (3) By connecting to the entrance / exit Rr ... opened to the front end face 2f and the rear end face 2r, respectively, the inflow for flowing the chemical liquid L into the chemical liquid circulation holes R ... Since the pair of connection blocks 3a, 3b provided with one or more of the outflow port portion 4o for allowing the chemical solution L to flow out from the port portion 4i, the chemical solution flow hole R,... The main part of the heat exchanger 1 can be easily configured (implemented).

  (4) According to a preferred embodiment, when an amorphous carbon material or a silicon carbide material is used as the firing material M, at least chemically and physically strong chemical resistance with respect to a chemical solution, and further, leakage of generated gas is prevented. The heat exchange block 2 excellent in gas impermeability, that is, the optimum heat exchange block 2 constituting the chemical liquid heat exchanger 1 can be obtained.

  Next, the best embodiment according to the present invention will be given and described in detail with reference to the drawings.

  First, components (components) of the chemical liquid heat exchanger 1 according to the present embodiment will be specifically described with reference to FIGS.

  2 shows a heat exchange block. As shown in FIGS. 3 and 4, the heat exchange block 2 is integrally formed of a predetermined firing material M, preferably an amorphous carbon material, and the entire shape is formed in a flat rectangular parallelepiped shape (plate shape). . The upper surface and the lower surface, which are the outer surfaces of the heat exchange block 2, are formed as flat heat exchange surfaces Cu, Cd. Inside the heat exchange block 2, a plurality of chemical fluid circulation holes R through which the chemical fluid L is circulated are arranged in the longitudinal direction. Form along. That is, when the longitudinal direction of the heat exchange block 2 is the front-rear direction, the chemical flow holes R are formed in the front end face 2f and the rear end face 2r of the heat exchange block 2 so that the entrances Rr ... open. The four chemical solution circulation holes R are formed in parallel and at regular intervals, and each chemical solution circulation hole R is formed in a circular cross section, between the chemical solution circulation hole R and the heat exchange surface Cu, and the chemical solution. The thickness D of the thinnest part between the flow hole R and the heat exchange surface Cd is preferably selected to be 2 [mm] or less. Further, on the front end surface 2f and the rear end surface 2r of the heat exchange block 2, seal ring accommodating portions 11 and 12 are formed by closed loop (ring-shaped) concave grooves so as to surround the entrance / exit Rr.

  The heat exchange block 2 can be manufactured using a known manufacturing method related to an amorphous carbon material. For example, a thermosetting resin represented by a phenol resin, a polyimide resin, an epoxy resin, a furan resin, or the like is molded using an injection molding machine or a compression molding machine. A heat exchange block 2 as a carbonized amorphous carbon molded body can be obtained by firing at a high temperature of several hundred degrees Celsius.

  Even if a silicon carbide material (a compound of silicon and carbide: SiC) is used as the firing material M in addition to the amorphous carbon material, good results can be obtained similarly to the amorphous carbon material. As described above, when an amorphous carbon material or a silicon carbide material is used as the firing material M, at least chemically and physically strong chemical resistance with respect to a chemical solution, and also impervious to gas that prevents leakage of generated gas. It is possible to obtain the heat exchange block 2 that is excellent in performance, that is, the optimum heat exchange block 2 that constitutes the chemical liquid heat exchanger 1.

  Reference numerals 3a and 3b denote connection blocks connected to the entrances / exits Rr ... of the chemical solution flow holes R ... in the heat exchange block 2. As shown in FIGS. 3 and 4, the connection block 3 a includes a connection main body 21, and the connection main body 21 can be brought into surface contact with the rear end surface 2 r of the heat exchange block 2, for example, a fluorine-based resin (PTFE). , PFA, etc.) and the whole is integrally formed into a block shape (plate shape). On the contact surface 3ai of the connection block 3a that contacts the rear end surface 2r, a pair of flow hole connection portions 4m and 4m are formed by recesses. Thereby, when it is made to contact | abut to the rear-end surface 2r, each flow hole connection part 4m ... is straddled and connected, respectively to the entrance / exit Rr ... of two adjacent chemical | medical solution flow holes R ... (refer FIG. 1). ). Further, a seal ring accommodating portion 22 facing the seal ring accommodating portion 11 is formed on the contact surface 3ai of the connection block 3a. The seal ring accommodating portion 22 is also formed by a closed loop (ring-shaped) concave groove in the same manner as the seal ring accommodating portion 11. Furthermore, the connection block 3a has a longer width than the heat exchange block 2, and the insertion holes 23p and 23q of the coupling bolts 31x and 32x, which are coupling tools, are formed near both ends.

  As shown in FIG. 4, the connection block 3 b includes a connection main body portion 25 and an inflow port portion 4 i and an outflow port portion 4 o formed by a cylindrical joint attached to the outer end surface of the connection main body portion 25. The connection main body 25 is integrally formed in a block shape (plate shape) with, for example, a fluorine-based resin (PTFE, PFA, etc.) so as to be able to come into surface contact with the front end surface 2f of the heat exchange block 2. In this case, the connection block 3b has an inflow hole Hi and an outflow hole Ho penetrating in the front-rear direction. The inflow hole Hi communicates with the inflow port portion 4i, and the outflow hole Ho communicates with the outflow port portion 4o. Thus, when the connection block 3b is brought into contact with the front end surface 2f of the heat exchange block 2, the inflow hole Hi is connected to the inlet / outlet Rr of the chemical liquid circulation hole R provided at one end, and the outflow hole Ho. Is connected to the entrance / exit Rr of the chemical solution circulation hole R provided at the other end. Further, a through hole connecting portion 4m is formed between the inflow hole Hi and the outflow hole Ho in the contact surface 3bi of the connection block 3b that contacts the front end surface 2f. When the connection block 3b is brought into contact with the front end face 2f, the circulation hole connecting portion 4m is connected across the entrances Rr of the two chemical liquid circulation holes R located in the middle. Further, a seal ring accommodating portion 26 facing the seal ring accommodating portion 12 is formed on the contact surface 3bi of the connection block 3b. The seal ring accommodating portion 26 is also formed by a closed loop (ring-shaped) concave groove, like the seal ring accommodating portion 12. Similarly to the connection block 3a, the connection block 3b has a longer width than the heat exchange block 2, and the insertion holes 27p and 27q for the coupling bolts 31x and 32x are formed near both ends. The inflow port portion 4i and the outflow port portion 4o can be integrally formed with, for example, a fluorine-based resin (PTFE, PFA or the like) and can be attached to the connection main body portion 25 by a screw-in method.

  Reference numeral 41 a denotes a seal ring that is accommodated across the seal ring accommodating portions 11 and 22, and reference numeral 41 b is a seal ring that is accommodated across the seal ring accommodating portions 12 and 26. The seal rings 41a and 41b are integrally formed with, for example, a fluorine-based resin. 31x and 32x indicate, for example, connecting bolts formed of stainless steel, and 31y and 32y indicate fixing nuts that are screwed to the connecting bolts 31x and 32x, respectively, for example, formed of stainless steel. 31x and fixing nuts 31y constitute a coupler. The material for forming the coupling bolts 31x and the fixing nuts 31y is not particularly limited, and a fluorine-based resin similar to the connection block 3a may be used.

  Next, a method for assembling the chemical heat exchanger 1 according to this embodiment using such components (components) will be described with reference to FIGS.

  First, as shown in FIG. 4, the seal ring 41 a is accommodated in the seal ring accommodating portion 11 of the heat exchange block 2, and the contact surface 3 ai of the connection block 3 a is brought into contact with the rear end surface 2 r of the heat exchange block 2. At this time, the remaining portion of the seal ring 41a is accommodated in the seal ring accommodating portion 22 of the connection block 3a. Further, the seal ring 41 b is accommodated in the seal ring accommodating portion 12 of the heat exchange block 2, and the contact surface 3 bi of the connection block 3 b is brought into contact with the front end surface 2 f of the heat exchange block 2. At this time, the remaining portion of the seal ring 41b is accommodated in the seal ring accommodating portion 26 of the connection block 3b.

  In this state, the coupling bolts 31x and 32x are inserted into the insertion holes 27p and 27q, respectively, and further inserted into the insertion holes 23p and 23q, and then the fixing nuts 31y and 32y are respectively attached to the tips of the coupling bolts 31x and 32x. Screw it on. Thereby, if the fixing nuts 31y and 32y are tightened, the connection blocks 3a and 3b can be coupled to the heat exchange block 2 and integrated. A heat exchange unit U configured in this way is shown in FIG.

  Further, as shown in FIG. 5, a thermo module 51u using a Peltier element is attached to one heat exchanging surface Cu of the heat exchanging block 2, and further, on the heat dissipating surface (heat absorbing surface) of the thermo module 51u. A cooling unit 52u is attached. Similarly, a thermo module 51d using Peltier elements is attached to the other heat exchange surface Cd of the heat exchange block 2, and a cooling part 52d is attached to the heat radiation surface (heat absorption surface) of the thermo module 51d. . In this case, since a plurality of straight chemical flow holes R ... are formed in parallel in the heat exchange block 2, the plurality of rectangular thermo modules 51u ..., 51d ... are connected to the heat exchange surfaces Cu, Cd. The cooling units 52u and 52d having the same dimensions (same shape) can be provided for each of the thermo modules 51u..., 51d. . The cooling units 52u and 52d can use water-cooled coolers. In FIG. 5, 53u and 53d show the water distribution pipes which circulate cooling water to the cooling parts 52u and 52d. Thereby, the heat exchanger 1 for chemical | medical solutions shown in FIG. 5 (FIG. 1) is obtained.

  Next, functions of the chemical liquid heat exchanger 1 according to the present embodiment will be described with reference to FIGS.

  When the chemical liquid L is cooled by the chemical liquid heat exchanger 1, the heat exchange surfaces Cu and Cd of the heat exchange block 2 are cooled by energizing the thermo modules 51u. At this time, the heat radiation from the heat radiation surfaces of the thermo modules 51u, 51d,... Is absorbed by the cooling parts 52u, 52d.

  On the other hand, as shown in FIG. 1, the chemical liquid L is supplied to the inflow port portion 4i. The chemical liquid L supplied to the inflow port portion 4i circulates through the first chemical liquid circulation hole R provided at one end via the inflow hole Hi, and passes through the one circulation hole connection portion 4m in the connection block 3a. While circulating through the 2nd chemical | medical solution flow hole R, furthermore, it distribute | circulates the 3rd chemical | medical solution flow hole R through the flow hole connection part 4m in the connection block 3b, and the other flow hole connection part 4m in the connection block 3a. It passes through the fourth chemical solution flow hole R. Thereafter, the chemical liquid L flowing through the fourth chemical liquid circulation hole R reaches the outflow port portion 4o through the outflow hole Ho and is discharged from the outflow port portion 4o. And the chemical | medical solution L which flows through the four chemical | medical solution distribution holes R ... is heat-exchanged, ie, cooled, via the heat exchange surfaces Cu and Cd.

  Next, the chemical heat exchanger 1 according to the modified embodiment of the present invention will be described with reference to FIGS.

  FIG. 6 shows a modification example of the heat exchange block 2. Although the heat exchange block 2 in FIGS. 1-5 showed the case where the chemical | medical solution distribution hole R was formed in the cross-sectional circle shape, the cross-sectional shape of the chemical | medical solution distribution hole R is not limited to a circle, It shows in FIG. Thus, it may be formed in a rectangular shape or an elliptical shape. In this case, in order to ensure the strength of the heat exchange surfaces Cu and Cd, the pitch between the chemical solution circulation holes R can be shortened to increase the number of chemical solution circulation holes R. Further, in order to reduce the thickness between the heat exchange surfaces Cu, Cd and the chemical solution circulation holes R, and to secure the area of the front end surface 2f (rear end surface 2r) forming the seal ring accommodating portion 12 (11), FIG. As shown in FIG. 6, steps may be formed on the upper and lower surfaces of the heat exchange block 2.

  7 and 8 show examples of changing the connection blocks 3a and 3b. The connection block 3a shown in FIG. 7 includes a connection main body portion 71, and a single through hole connection portion 4m is formed on the contact surface 3ai. Thereby, when it is made to contact | abut to the rear-end surface 2r of the heat exchange block 2, all the circulation hole connection parts 4m straddle the entrance / exit Rr ... of the chemical | medical solution circulation holes R ... respectively. Connected. Further, a port portion 4o (4i) by a cylindrical joint is attached to the outer end surface of the connection main body portion 71. Two such connection blocks 3a are prepared, and one is used as the connection block 3a and the other is used as the connection block 3b. In this case, the port portion of the connection block 3a becomes the outflow port portion 4o, and the port portion of the connection block 3b becomes the inflow port portion 4i. When the chemical liquid L flows into the inflow port portion 4i of the one connection block 3b, the chemical liquid heat exchanger 1 is on one side with respect to all the chemical liquid circulation holes R through the circulation hole connection portion 4m. Is distributed (divided) to the distribution hole connecting portion 4m of the other connection block 3a. And the chemical | medical solution L which merged in the circulation hole connection part 4m flows out from the outflow port part 4o.

  On the other hand, the connection block 3a shown in FIG. 8 includes a connection main body portion 72, and one contact hole connection portion 4m is formed on the contact surface 3ai. Thereby, when it is made to contact | abut to the rear-end surface 2r of the heat exchange block 2, all the circulation hole connection parts 4m straddle the entrance / exit Rr ... of the chemical | medical solution circulation holes R ... respectively. Connected. Further, the connection block 3 b includes a connection main body 73 and an inflow port portion 4 i and an outflow port portion 4 o formed by a cylindrical joint attached to the outer end surface of the connection main body portion 73. In this case, the contact surface 3bi is formed with a pair of flow hole connection portions 4m, 4m by recesses, and one flow hole connection portion 4m communicates with the inflow port portion 4i, and the other flow hole connection portion 4m is connected to the contact surface 3bi. It communicates with the outflow port section 4o. Thereby, when it is made to contact | abut to the front-end surface 2f of the heat exchange block 2, each flow hole connection part 4m ... is connected across the entrance / exit Rr ... of two adjacent chemical | medical solution flow holes R ..., respectively. The When the chemical liquid L flows into the inflow port portion 4i of the one connection block 3b, the chemical liquid heat exchanger 1 from the one side with respect to the two chemical liquid flow holes R and R adjacent to the flow hole connection portion 4m. After the circulation, the chemical solution L reaches the circulation hole connection portion 4m of the other connection block 3a, and once merged at the circulation hole connection portion 4m, it flows from the other side to the two adjacent chemical solution circulation holes R, R. After that, it reaches the flow hole connection portion 4m of one of the connection blocks 3b. And the chemical | medical solution L merged by this flow hole connection part 4m flows out from the outflow port part 4o. In FIG. 8, seal rings 41bp and 41bp are provided for the two through-hole connection portions 4m and 4m in the connection block 3b, respectively, and the head side of the coupling bolt 31x is screwed with respect to the connection block 3b. Shows the case of binding.

  9-11 shows the example of a change of the whole structure of the heat exchanger 1 for chemical | medical solutions. 1 to 5, the heat exchanger 1 for chemical liquid 1 has thermomodules 51u, 51d, and cooling units 52u, 52d attached to the heat exchange surfaces Cu, Cd on the upper and lower surfaces of the heat exchange block 2, respectively. However, FIGS. 9 to 11 show configurations in consideration of thinning when actually manufactured. For this reason, the chemical solution heat exchanger 1 shown in FIGS. 9 to 11 is provided with a thermo module 51d and a cooling device only on the heat exchange surface Cd side of one (lower surface) of the heat exchange block 2 (heat exchange unit U). The part 52d was attached. Further, the exemplary cooling unit 52 d is configured by a unit having the same configuration as the heat exchange unit U. In this case, since the cooling part 52d using cooling water does not need to consider chemical resistance and the like, the heat exchanging block 2 and the connection blocks 3a and 3b are other forming materials in consideration of cost and manufacturability. For example, a general carbon material can be used for the heat exchange block 2. 9-11, 4i shows an inflow port part and 4o shows an outflow port part. Since the illustrated heat exchange block 2 and the connection blocks 3a and 3b are formed thin, the inflow port portion 4i and the outflow port portion 4o cannot fall within the thickness range of the connection block 3b. Therefore, a part of the inflow port part 4i and the outflow port part 4o protrude from the upper surface of the connection block 3b. Reference numeral 75 denotes a thermostat for preventing overheating. Further, 76 denotes a plurality of pressurizing units using springs 77 and bolts and nuts 78, and performs pressure management (pressure adjustment) on the thermo modules 51d sandwiched between the heat exchange block 2 and the cooling unit 52d. In addition, in FIGS. 9-11, 79,80 shows a holding | maintenance board, 81 ... shows the lead wire of each thermomodule 51d ....

  FIG. 12 shows a size change example of the chemical liquid heat exchanger 1. In the chemical heat exchanger 1 shown in FIGS. 9 to 11, the size in which five rows of thermo modules 51 d are arranged along the formation direction of the chemical flow holes R is shown in FIG. 12 (a). The chemical heat exchanger 1 is provided with three rows of thermomodules 51d along the formation direction of the chemical flow holes R ..., while the chemical heat exchanger 1 shown in FIG. A size in which seven rows of thermo modules 51d are arranged along the direction of formation of R. Thus, if the heat exchange block 2 according to the present embodiment is used, the ability of the chemical heat exchanger 1 can be increased only by changing the size of the heat exchange block 2 in the longitudinal direction (formation direction of the chemical flow holes R ...). Can be changed easily. In particular, since the connection blocks 3a and 3b can be used for different sizes, a cost merit can be obtained.

  In addition, in FIGS. 6-12, another structure, a function, etc. can be implemented according to embodiment shown in FIGS. For this reason, in the embodiment of FIGS. 6 to 12, the same parts as those of the embodiment shown in FIGS. 1 to 5 are denoted by the same reference numerals to clarify the configuration, and detailed description thereof is omitted.

  Therefore, according to such a heat exchanger 1 for a chemical solution, a predetermined fired material M that is a single material is sintered to include the heat exchange block 2 that is integrally formed as a whole, so that it is configured as a composite plate. In this case, the disadvantage that the heat transfer performance is deteriorated due to the contact thermal resistance between different materials can be eliminated, and the heat exchange efficiency as a heat exchanger can be improved. In addition, since the main basic part can be constituted by the heat exchange block 2 formed integrally with a predetermined baking material M by forming a plurality of chemical liquid flow holes R. It can be simplified. Therefore, the cost can be reduced due to the significant reduction in the number of parts and the simplification of the manufacturing process, and the thermal expansion and contraction between different materials does not occur, so that durability in long-term use can be enhanced. In addition, the chemical solution circulation holes R ... are connected to the connecting block 3a having the circulation hole connecting portions 4m and the inflow port portion 4i for allowing the chemical solution L to flow into the chemical solution circulation holes R ... and the outflow for causing the chemical solution L to flow out from the chemical solution circulation holes R .... Since the connection block 3b including at least one of the port parts 4o is used, the main part of the chemical heat exchanger 1 can be easily configured (implemented) only by adding a coupler or the like.

  Although various embodiments have been described in detail above, the present invention is not limited to such embodiments, and the detailed configuration, shape, quantity, numerical values, and the like are within the scope not departing from the gist of the present invention. , Can be changed, added and deleted arbitrarily. For example, the chemical flow holes R can be changed into a laminar flow or a turbulent flow by changing the quantity, and the turbulent flow effect can be further enhanced by roughening the inner surface of the chemical flow holes R. it can. In addition, as the chemical solution L, various chemical solutions including a semiconductor processing solution can be applied, and if necessary, the chemical solution L can be used as it is for a solution other than the chemical solution such as water.

Sectional plan view of the main part of the heat exchanger for chemicals according to the best embodiment of the present invention, External plan view of a heat exchange unit in the chemical liquid heat exchanger, External perspective view of heat exchange block, seal ring and connection block in the chemical liquid heat exchanger, An exploded sectional plan view of a heat exchange unit in the chemical liquid heat exchanger, Appearance side view showing the entire heat exchanger for the chemical solution, The front view which shows the heat exchange block which concerns on the modified embodiment of this invention, and side sectional drawing which shows a part, Sectional plan view of the main part of a heat exchanger for chemicals according to a modified embodiment of the present invention, Sectional plan view of the main part of a heat exchanger for chemicals according to a modified embodiment of the present invention, An exploded side view of a heat exchanger for chemicals according to a modified embodiment of the present invention, The side view after the assembly in the heat exchanger for chemical | medical solutions of FIG. The top view of the heat exchanger for chemical | medical solutions of FIG. The top view of the heat exchanger for chemical | medical solutions which concerns on the modified embodiment of this invention,

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1: Heat exchanger for chemical | medical solutions, 2: Heat exchange block, 2f: Front end surface, 2r: Rear end surface, 3a: Connection block, 3b: Connection block, 4m: Through-hole connection part, 4i: Inflow port part, 4o: Outflow Port part, 41a: Seal ring, 41b: Seal ring, Cu: Heat exchange surface, Cd: Heat exchange surface, L: Chemical liquid, R ...: Chemical liquid flow hole, Rr ...: Entrance / exit of chemical liquid flow hole, M: Firing material

Claims (3)

  In a heat exchanger for a chemical solution that performs heat exchange with respect to a chemical solution that circulates inside by cooling or heating a heat exchange surface formed on the outer surface, a plurality of chemical solution circulation holes that circulate the chemical solution are formed inside, and the outer surface The upper and lower surfaces are formed as the heat exchange surface, and the heat exchange block is formed as a whole by opening the entrance and exit of the chemical solution circulation hole in the front end surface and the rear end surface and sintering a predetermined firing material. A seal ring disposed so as to surround the entrance / exit in the front end surface and the rear end surface of the heat exchange block, and abuts against the front end surface and the rear end surface of the heat exchange block via the seal ring. , A flow hole connecting portion formed by a recess for connecting the chemical liquid circulation holes, an inflow port portion for allowing the chemical liquid to flow into the chemical liquid circulation hole, and a chemical liquid flowing out from the chemical liquid circulation hole. A heat exchanger for a chemical solution, comprising: a pair of connection blocks provided with one or two or more outlet ports; and a coupler that joins one end portions and the other end portions of the pair of connection blocks. .   The chemical heat exchanger according to claim 1, wherein the firing material is an amorphous carbon material or a silicon carbide material.   The said heat exchange block selects the thickness of the thinnest part between the said chemical | medical solution distribution hole and the said heat exchange surface as 2 [mm] or less, For chemical | medical solution of Claim 1 or 2 characterized by the above-mentioned. Heat exchanger.

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