JP4685523B2 - Circulating purification equipment - Google Patents

Description

  The present invention relates to a circulating purification apparatus that purifies by removing oxygen and hydrogen contained in air or an inert gas and supplies the purified air or inert gas again.

  For example, in a manufacturing factory of an organic EL display, manufacturing is performed in an inert gas (for example, nitrogen) atmosphere in order to prevent oxidation of organic substances constituting the organic EL display and reaction with water. That is, the manufacturing process of the organic EL display is performed in a box (chamber, glove box) that is supplied with an inert gas and has an inert gas atmosphere.

However, in order to make the inside of the box an inert gas atmosphere, the inert gas supplied into the box is directly discharged out of the box. For this reason, in recent years, an inert gas circulation purification apparatus has been proposed in order to reduce the consumption of the inert gas by reusing the inert gas discharged outside the box (see, for example, Patent Document 1). ). In the circulation purification apparatus, the exhaust gas discharged to the outside of the box is supplied to the circulation purification apparatus via a pipe, and the exhaust gas is purified by the circulation purification apparatus and supplied to the box again.
JP-A-8-173748

  By the way, this type of circulating purification apparatus preferably has a structure in which an inert gas is supplied to a plurality of boxes and circulated by a single apparatus in consideration of an installation space in a manufacturing factory. For this reason, in the circulation purification apparatus, a plurality of circulation circuits are formed so that an inert gas can be supplied to the plurality of boxes. However, when a plurality of circulation circuits are formed, if a control device for controlling the operation of the circulation circuit is mounted for each circulation circuit, the device may be increased in size.

  The present invention has been made paying attention to such problems existing in the prior art, and its purpose is to suppress the enlargement of the apparatus even when a plurality of circulation circuits are formed. An object of the present invention is to provide a circulating purification apparatus capable of achieving the above.

In order to solve the above-mentioned problem, the invention according to claim 1 is connected to an inert gas or air supply destination, and the inert gas is connected via a plurality of circulation circuits formed with the supply destination. In the circulation purification device for circulating gas or air, the circulation circuit receives the inert gas or air discharged from the supply destination, and removes oxygen and moisture contained in the inert gas or air, wherein comprises a purification unit for purifying the inert gas or air, the control of the circulation of the plurality of circulation circuit, comprising a single control unit that executes independently for each circulation circuit, wherein the purification unit, the non A purification cylinder for purifying the active gas or air, wherein the control unit replaces the purification cylinder with the inert gas or air, a reduction regeneration process for reducing and regenerating the purification cylinder, and the inert gas. Supplying gas or air A self-circulation process that circulates without passing through and a circulation process that circulates the inert gas or air with the supply destination, and automatically selects and processes each process according to the state of the circulation circuit. The gist is to make it.

  According to a second aspect of the present invention, in the circulation purification apparatus according to the first aspect, the control unit, as a control mode, operates an online mode for operating the circulation circuit from the outside via a communication function, and the circulation purification apparatus. The gist of the present invention is to have an offline mode in which the circulation circuit is operated via an operation unit mounted on the vehicle, and a maintenance mode in which various components constituting the circulation circuit are individually operated during maintenance.

According to a third aspect of the present invention, in the circulating purification apparatus according to the first or second aspect , the purification unit has a plurality of purification cylinders, and the control unit communicates with the supply destination. In response to the instruction to switch the purification cylinder that circulates the inert gas or air, the purification cylinder to be circulated is switched and the circulation process is continuously performed, while the reduction and regeneration process of the purification cylinder that is not the circulation object is simultaneously performed. The gist is to execute.

According to a fourth aspect of the present invention, in the circulation purification apparatus according to any one of the first to third aspects, the inert gas is circulated in the circulation circuit, and the control unit is configured to supply the supply gas. The gist is to automatically adjust the circulation flow rate of the inert gas based on the measurement results of the oxygen amount and the water amount.

According to a fifth aspect of the present invention, in the circulating purification apparatus according to any one of the first to fourth aspects, the control unit automatically adjusts the pressure based on the measurement result of the internal pressure of the supply destination. The gist is to adjust.

The invention according to claim 6 is the circulating purifier according to any one of claims 1 to 5 , wherein the inert gas is circulated in the circulation circuit and oxygen is supplied. A supply source is connected, and the control unit receives an oxygen supply instruction to the supply destination, supplies the oxygen from the oxygen supply source to the supply destination via the circulation circuit, and The gist is to perform an air purge process for increasing the oxygen concentration.

The invention described in claim 7, in the circulation purification device according to any one of claims 1 to 6, wherein together with the inert gas is circulated in the circulation circuit, the inert gas An inert gas supply source to be supplied is connected, and the control unit receives an inert gas supply instruction to the supply destination, and from the inert gas supply source to the supply destination via the circulation circuit The gist of the present invention is to supply an inert gas and execute a gas purge process for increasing the inert gas concentration at the supply destination.

  According to the present invention, an increase in the size of the apparatus can be suppressed even when a plurality of circulation circuits are formed.

Hereinafter, an embodiment in which the present invention is embodied in an inert gas circulation purification apparatus (hereinafter simply referred to as “circulation purification apparatus”) will be described with reference to FIGS.
FIG. 1 shows an inert gas circulation purification system S. As shown in FIG. 1, the circulation purification system S includes a circulation purification device 11 and a box (for example, a chamber or a glove box) G as a supply destination of an inert gas (nitrogen in this embodiment). Yes. The box G is formed in a box shape formed by assembling a resin panel, for example. In the circulation purification system S, the circulation purification device 11 serves as a forward path for supplying the inert gas purified by the purification cylinder 31 (see FIGS. 2 and 3) provided in the circulation purification device 11 to the box G. An outgoing line 10a is provided. Further, the circulation purification device 11 includes a return pipe 10 b as a return path for supplying the inert gas (exhaust gas) discharged from the box G to the purification cylinder 31.

  The circulation purification device 11 and the box G are connected to each other via the outgoing line 10a and the return line 10b. In the circulation purification system S, the inert gas discharged from the box G is received by the purification cylinder 31 through the return pipe 10b, the inert gas is purified by the purification cylinder 31, and the purified inert gas is transferred. It is re-supplied to the box G via the pipe line 10a and circulated. Further, a circulation circuit for circulating the inert gas is formed between the box G and the circulation purification apparatus 11, and the circulation circuit is a closed circuit that eliminates contact of the inert gas with the atmosphere.

  Further, the circulation purification apparatus 11 includes an inert gas supply source N as a supply source of an inert gas supplied to the box G, and a reducing gas (this embodiment) for reducing and regenerating the purification cylinder 31. A reducing gas supply source H for supplying hydrogen) is connected. Further, the circulation purification apparatus 11 is connected to an oxygen supply source D for supplying oxygen into the box G in order to replace the inside of the box G with an inert gas atmosphere into an atmospheric pressure atmosphere (oxygen concentration of about 20%). In the circulation purification system S, the inert gas is supplied from the inert gas supply source N to the circulation purification device 11, and after the purification cylinder 31 is replaced by the inert gas, the inert gas is sent from the circulation purification device 11. It is supplied to the box G through the pipe line 10a. And the inside of the box G is made into inert gas atmosphere, and the manufacturing process of an organic electroluminescent display is performed in this box G, for example.

  In the present embodiment, the direction in which the inert gas flows from the circulation purification device 11 to the box G via the forward conduit 10a and the direction in which the inert gas flows from the box G to the circulation purification device 11 via the return conduit 10b are determined. The circulation direction of the inert gas in the circulation purification system S and the circulation purification apparatus 11 is used. In the circulation purification system S, the reducing gas is supplied from the reducing gas supply source H to the purification cylinder 31 of the circulation purification apparatus 11, and the purification cylinder 31 is reduced and regenerated by the reducing gas.

Next, the circulation purification apparatus 11 will be described. FIG. 2 is a diagram schematically showing the connection between the internal configuration of the circulation purification apparatus 11 and the box G.
As shown in FIG. 2, the circulation purification device 11 includes four purification units 22 that purify inert gas. In the circulatory purification apparatus 11 of the present embodiment, one box G is connected to one purification unit 22 via an outgoing line 10a and a return line 10b. Between the box G and the circulation purification apparatus 11, four circulation circuits C1, C2, C3, C4 each including four purification sections 22 are formed. Further, the inert gas supply source N, the reducing gas supply source H, and the oxygen supply source D are connected to the respective circulation circuits C1 to C4 and are shared. Each refining unit 22 is provided with a plurality (two in this embodiment) of refining cylinders 31. In FIG. 2, “1A”, “1B”, “2A”, “2B”, “3A”, “3B”, “4A”, and “4B” are shown in order to distinguish the two refining cylinders 31 provided in each refining unit 22. Are also shown. The numerals 1 to 4 indicate the circulation circuits to which the two belong. The alphabets A and B distinguish the two purification cylinders 31 for each circulation circuit. For example, “1A” indicates the first purification cylinder 31 provided in the purification unit 22 of the circulation circuit C1, and “1B” indicates the second purification cylinder 31 provided in the purification unit 22 of the circulation circuit C1. Show. Further, in the following description, the purification cylinders 31 (1A, 2A, 3A, 4A) of the respective purification units 22 marked with the alphabet “A” are designated as “A cylinder side purification cylinder 31” and the alphabet “B”. The refinement cylinder 31 (1B, 2B, 3B, 4B) of each refinement | purification part 22 to which it attached | subjected may be expressed as "the refinement cylinder 31 of the B cylinder side."

  The circulation purification apparatus 11 includes a controller 23 as a control unit that controls the four purification units 22 (four circulation circuits C1 to C4). The controller 23 is connected to an operation panel 32 (shown in FIG. 4) used when instructing the controller 23 to perform various controls (operations of the circulation circuits C1 to C4). The controller 23 and the operation panel 32 are electrically connected. Further, a communication unit 24 is connected to the controller 23, and a command device (such as a personal computer) 26 as an external device provided separately from the circulation purification device 11 is connected to the communication unit 24 via a communication cable 25. Has been. Wired communication is performed between the controller 23 and the command device 26 via the communication unit 24 and the communication cable 25.

  In the circulation purification apparatus 11, the controller 23 controls the operation of the circulation circuits C <b> 1 to C <b> 4 based on an instruction by operating the operation panel 32 or an instruction from the instruction device 26 received by the communication unit 24 via the communication cable 25. It has become. In the circulation purification apparatus 11 of the present embodiment, a plurality of circulation circuits C1 to C4 are controlled separately (individually) by one controller 23. That is, the controller 23 is configured to independently execute control (control related to circulation) according to the operation of each of the circulation circuits C1 to C4. For example, only the circulation circuit C1 can be stopped, or only the circulation circuit C2 can be activated and circulated. Further, the circulation purification device 11 is configured to be remotely operable by a communication function between the controller 23 and the command device 26.

  Next, the structure of the circulation purification apparatus 11 will be described with reference to FIGS. FIG. 3 schematically shows the internal structure of the circulation purification apparatus 11, specifically showing the arrangement of the purification cylinder 31, the filter F, the partition plate 29, and the circulation pump P constituting the circulation purification apparatus 11. Yes. In FIG. 3, pipes, valves and the like constituting the circulation purification device 11 are omitted.

  The circulation purification device 11 includes a case 27 made of a metal square box. 3 is the front surface side of the case 27, and the surface facing the front surface of the case 27 is the rear surface of the case 27. In a state where the circulation purification apparatus 11 is installed in a factory or the like, an operation panel 32 is disposed on the front surface of the case 27, and an operator stands on the front surface of the case 27 so as to operate the operation panel 32. It has become. That is, in the circulatory refining device 11, work by an operator is performed on the front side of the case 27.

  The front side and the rear side of the case 27 are closed by attaching a closing plate (blocking cover) (not shown), while the case 27 is opened by removing the closing plate from the case 27. Therefore, FIG. 3 shows a state where the front side of the case 27 is opened by removing the closing plate on the front side of the case 27.

  As shown in FIG. 3, in the case 27, two partition plates 29 that divide the case 27 into a front side and a rear side are provided (standing). Within the case 27, eight purification cylinders 31 are provided (stand-up) on the rear surface side of the case 27 with respect to the partition plate 29. The eight purification cylinders 31 are arranged side by side in the horizontal direction of the case 27 (in the horizontal direction in the drawing of FIG. 3). The filter F is suspended and supported by a suspension member (not shown) on the front side of the case 27 with respect to the partition plate 29 in the case 27 and on the upper side in the case 27. The filter F is provided to remove impurities in the inert gas supplied to the box G. A circulation pump P is disposed in the case 27 on the front side of the case 27 with respect to the partition plate 29 and on the lower side in the case 27. The circulation pump P is provided to supply the inert gas discharged from the box G to the purification cylinder 31 and to supply the purified inert gas purified by the purification cylinder 31 to the box G again. ing.

  The purification cylinder 31 has a cylindrical cylinder body in which a catalyst layer (not shown) filled with a catalyst and an adsorbent layer (not shown) filled with an adsorbent are along the axial direction of the cylinder body. Are stacked. In this embodiment, nickel is used as the catalyst, and the nickel has a high oxygen scavenging ability, and further has the ability to capture a small amount of carbon monoxide, hydrogen, carbon dioxide, and the like. In this embodiment, synthetic zeolite is used as the adsorbent, and the synthetic zeolite has a water removing ability, and further has a ability to remove a small amount of carbon dioxide, carbon monoxide, and the like. The cylinder main body is filled with a catalyst and an adsorbent in a filling amount that can suitably exhibit the oxygen scavenging ability of the catalyst layer and the water removing ability of the adsorbent layer. The catalyst layer and the adsorbent layer are arranged such that a catalyst layer is disposed on the upstream side in the flow direction and an adsorbent layer is disposed on the downstream side in the flow direction along the flow direction of the inert gas with respect to the purification cylinder 31. ing. That is, when the inert gas flowing through the purification cylinder 31 is introduced into the purification cylinder 31, it passes through the catalyst layer, then passes through the adsorbent layer, and is led out of the purification cylinder 31. Yes. The purification cylinder 31 has an inlet (not shown) for introducing an inert gas connected to the return pipe 10b and a outlet (not shown) for leading the inert gas connected to the outgoing pipe 10a. By this, it arrange | positions between the outward conduit 10a and the return conduit 10b.

  Further, the refining cylinder 31 accommodates a heater (not shown) as heating means for heating the catalyst layer and the adsorbent layer. In the refining cylinder 31, the temperature is adjusted so that the heating temperature of the catalyst layer and the adsorbent layer by the heater is lower in the catalyst layer than in the adsorbent layer. And in the refinement | purification cylinder 31, when an inert gas is introduce | transduced, oxygen, carbon monoxide, hydrogen, a carbon dioxide, etc. in an inert gas will be capture | acquired by a catalyst layer, and in an inert gas in an adsorbent layer. Moisture is absorbed and removed.

Next, the configuration of the operation panel 32 will be described with reference to FIG.
The operation panel 32 is provided with a touch panel type display screen 33. An emergency stop switch 34 is provided on the upper right side of the display screen 33. Further, a power lamp 35, a buzzer switch 36, and a reset switch 37 are provided in the middle right portion of the display screen 33. In addition, an online start switch 38, an offline start switch 39, and an offline stop switch 40 are provided at the lower right of the display screen 33.

  The circulation purification apparatus 11 of the present embodiment includes a plurality (three) of control modes including an online mode, an offline mode, and a maintenance mode as control modes (control formats). The online mode is a mode in which the controller 23 executes control (operates the circulation circuits C1 to C4) in accordance with an instruction from the command device 26 provided outside via the communication function. During the online mode, the input operation on the display screen 33 is invalid. The online mode is activated by pressing the online start switch 38. The offline mode is a mode in which the input operation on the display screen 33 is validated, and the controller 23 executes control according to the input operation (operates the circulation circuits C1 to C4). The offline mode is activated by pressing the offline start switch 39 and is ended by pressing the offline stop switch 40. The maintenance mode is a mode in which various devices in the circulation circuit (purification unit 22, valve, circulation pump P, filter F, etc.) are individually operated, and a mode for maintenance work (for example, replacement of the filter F, etc.). It is. The maintenance mode can be switched by performing an input operation on the display screen 33 during the offline mode. During the maintenance mode, the operation of the circulation purification apparatus 11 (controller 23) is temporarily stopped, and is resumed from the stopped state after the maintenance mode is finished.

  Next, the circuit configuration of the circulation purification apparatus 11 will be specifically described with reference to FIG. The circulation purification apparatus 11 includes four circulation circuits C1 to C4 (four systems), and the operations of the circulation circuits C1 to C4 (operations related to the circulation of the inert gas) are the same. Now, description will be made using one circulation circuit C1.

  As shown in FIG. 5, in the return pipe 10b connected to the box G, the first introduction pipe constituting a part of the return pipe 10b is located upstream of the purification cylinders 1A and 1B in the flow direction of the inert gas. It branches to 12a and the 2nd introduction pipe 12b. The first introduction pipe 12a is connected to the introduction port of the purification cylinder 1A, and the second introduction pipe 12b is connected to the introduction port of the purification cylinder 1B. Valves 52a and 52b are provided on the first introduction pipe 12a and the second introduction pipe 12b. In addition, a circulation pump P is provided on the return pipe 10b upstream of the inert gas in the flow direction rather than branching into the first introduction pipe 12a and the second introduction pipe 12b. The circulation pump P is electrically connected to the controller 23.

  A first outlet pipe 13a that constitutes a part of the outgoing pipe 10a is connected to the outlet of the purification cylinder 1A, and a second outlet pipe that constitutes a part of the outgoing pipe 10a is connected to the outlet of the purification cylinder 1B. 13b is connected. Valves 53a and 53b are provided on the first outlet pipe 13a and the second outlet pipe 13b. The first lead-out pipe 13a and the second lead-out pipe 13b are converged on one outgoing pipe 10a and connected to the box G. A filter F and a flow rate sensor 60 are provided on the outgoing line 10a. The flow sensor 60 measures the flow rate of the inert gas that circulates in the circulation circuit C1. The flow sensor 60 is electrically connected to the controller 23. The measurement result of the flow sensor 60 is transmitted to the controller 23 and displayed on the display screen 33 of the operation panel 32.

  Further, a bypass passage 10c that bypasses and communicates with the box G is provided between the inlet side of the box G in the forward conduit 10a and the outlet side of the box G in the return conduit 10b. Is provided with a valve 58 capable of opening and closing the bypass passage 10c. A valve 50 is provided on the outgoing pipe 10a and downstream of the bypass passage 10c in the direction of the inert gas flow, and on the return pipe 10b, the inert gas in the flow direction of the bypass passage 10c. A valve 51 is provided on the upstream side.

  The box G is provided with an oxygen meter 41, a dew point meter 42, and a pressure sensor 43. The oximeter 41 measures the amount of oxygen in the box G. The dew point meter 42 measures the dew point in the box G. The pressure sensor 43 measures the pressure (internal pressure) of the box G. The oximeter 41, the dew point meter 42, and the pressure sensor 43 are electrically connected to the controller 23. The measurement results of the oximeter 41, the dew point meter 42, and the pressure sensor 43 are transmitted to the controller 23 and displayed on the display screen 33 of the operation panel 32.

  Further, a pipe 10d is connected to the inert gas supply source N, and the pipe 10d is branched into branch pipes 14a and 14b. The branch pipe 14a is connected to the first outlet pipe 13a, and the branch pipe 14b is connected to the second outlet pipe 13b. Valves 54a and 54b are provided on the branch pipes 14a and 14b, respectively. A filter 61, a valve 62, a regulator 63, and a check valve 64 are provided on the pipe line 10d.

  Further, a pipe 10e is connected to the reducing gas supply source H, and the pipe 10e is branched into branch pipes 15a and 15b. The branch pipe 15a branched from the pipe 10e is connected to the first outlet pipe 13a, and the branch pipe 15b is connected to the second outlet pipe 13b. Valves 55a and 55b are provided on the branch pipes 15a and 15b, respectively. Further, a filter 65, a valve 66, a regulator 67, a check valve 68, and a throttle 69 are provided on the pipe line 10e, and a pressure sensor 70 is further connected.

  Further, a pipe line 10f is connected to the oxygen supply source D, and the pipe line 10f is connected to the upstream line 10a upstream of the filter F in the flow direction of the inert gas. A filter 75, a valve 76, a regulator 77, and a check valve 78 are provided on the pipe line 10f. The oxygen supply source D, the pipe line 10f, the filter 75, the valve 76, the regulator 77, and the check valve 78 constitute an atmospheric pressure replacement line M that replaces the inside of the box G from an inert gas atmosphere to an atmospheric pressure atmosphere. ing.

  A first discharge pipe 16a is connected to the first introduction pipe 12a, a second discharge pipe 16b is connected to the second introduction pipe 12b, and the first discharge pipe 16a and the second discharge pipe 16b are connected to the discharge pipe 16. It is connected to the. Valves 56a and 56b are provided on the first and second discharge pipes 16a and 16b, respectively. Further, a first pressure release pipe 17a is connected to the first introduction pipe 12a, a second pressure release pipe 17b is connected to the second introduction pipe 12b, and the first pressure release pipe 17a and the second pressure release pipe are connected. 17 b is connected to the pressure release pipe 17. Valves 57a and 57b are provided on the first and second pressure release pipes 17a and 17b, respectively. A valve 72 is provided on the pressure relief pipe 17, and a vacuum pump 71 is connected to the pressure relief pipe 17. The vacuum pump 71 is electrically connected to the controller 23.

  Further, in the return pipe 10b, an exhaust pipe 80 is connected downstream of the circulation pump P in the flow direction of the inert gas and upstream of the branch point to the first introduction pipe 12a and the second introduction pipe 12b. Has been. A valve 81 is provided on the exhaust pipe 80. In the return pipe 10b, the circulation pump P, the exhaust pipe 80, and the valve 81 constitute a discharge mechanism for discharging the inert gas in the box G. A pressure sensor 73 is provided between the exhaust pipe 80 and the circulation pump P. The pressure sensor 73 measures the pressure in the circulation circuit C1. The pressure sensor 73 is electrically connected to the controller 23.

  In the circulatory purification apparatus 11, the purification unit 22 includes first and second introduction pipes 12a and 12b, valves 52a and 52b on the first and second introduction pipes 12a and 12b, and a purification cylinder 31 (1A, 1B), first and second outlet pipes 13a and 13b, and valves 53a and 53b on the first and second outlet pipes 13a and 13b. Further, the forward duct 10a includes first and second outlet pipes 13a and 13b, and the return duct 10b includes first and second introduction pipes 12a and 12b.

  Next, the operation of the circulation circuits C1 to C4 under the control of the controller 23 will be described with reference to FIG. In the circulation purification apparatus 11 of the present embodiment, each of the circulation circuits C1 to C4 performs a replacement operation, a reduction regeneration operation, a self-circulation operation, a box circulation operation, an air purge operation, and a gas purge operation. Since each of these operations is a common operation that can be executed by each of the circulation circuits C1 to C4, in the following description, the operation of the circulation circuit C1 shown in FIG. 5 will be described. In the following description, it is assumed that valves not specifically described in the description are in a closed state.

  The replacement operation is an operation of replacing the inside of the purification cylinder 31 with an inert gas (nitrogen in this embodiment). In the replacement operation, a plurality of cylinders including all the circulation circuits C1 to C4 operate one by one without simultaneously operating.

  The controller 23 sets the valve 57a of the first depressurizing pipe 17a and the valve 72 of the depressurizing pipe 17 to an open state when the purifying cylinder 1A provided in the refining unit 22 of the circulation circuit C1 is replaced. The pump 71 is driven. By driving the vacuum pump 71, the purification cylinder 1A is evacuated. Then, the controller 23 returns the valve 57a and the valve 72 to the closed state, and sets the valve 62 of the pipe line 10d and the valve 54a of the branch pipe line 14a to the open state. By this setting, the inert gas from the inert gas supply source N passes through the filter 61 that removes impurities and the regulator 63 that decompresses the inert gas, and is purified from the branch pipe 14a connected to the pipe 10d. 1A is supplied. The inside of the purification cylinder 1A supplied with the inert gas is filled with the inert gas and replaced. After the replacement of the purification cylinder 1A, the controller 23 returns the valve 54a and the valve 62 to the closed state.

  Further, when the controller 23 replaces the purification cylinder 1B provided in the purification unit 22 of the circulation circuit C1, the controller 23 sets the valve 57b of the second pressure release pipe 17b and the valve 72 of the pressure release pipe 17 to the open state. Then, the vacuum pump 71 is driven. By driving the vacuum pump 71, the purification cylinder 1B is evacuated. Then, the controller 23 returns the valve 57b and the valve 72 to the closed state, and sets the valve 62 of the pipe line 10d and the valve 54b of the branch pipe line 14b to the open state. With this setting, the inert gas from the inert gas supply source N is supplied into the purification cylinder 1B from the branch pipe 14b connected to the pipe 10d as described above. The inside of the purification cylinder 1B supplied with the inert gas is filled with the inert gas and replaced. After the replacement of the purification cylinder 1B, the controller 23 returns the valve 54b and the valve 62 to the closed state.

Next, the reduction regeneration operation will be described.
The reduction regeneration operation is an operation of reducing the catalyst layer in the purification cylinder 31 and regenerating the adsorbent layer. Similar to the replacement operation, the reduction regeneration operation operates one by one without including a plurality of cylinders including all the circulation circuits C1 to C4.

  When the controller 23 performs the regenerating and regenerating operation of the purification cylinder 1A provided in the purification unit 22 of the circulation circuit C1, the valve 66 of the pipe 10e, the valve 55a of the branch pipe 15a, and the valve 56a of the first discharge pipe 16a. Set to open. By this setting, the reducing gas (hydrogen in this embodiment) of the reducing gas supply source H passes through the filter 65 for removing impurities and the regulator 67 for reducing the reducing gas, and is connected to the pipe 10e. 15a is supplied into the purification cylinder 1A. Further, the controller 23 turns on the heater in the refining cylinder 1A at the start of the reduction regeneration operation to heat the catalyst layer and the adsorbent layer. Then, oxygen trapped in the catalyst layer reacts with hydrogen, which is a reducing gas, to become water and is released from the catalyst. Further, water adsorbed on the adsorbent layer is also released from the adsorbent. These detached water passes through the first discharge pipe 16a and the discharge pipe 16 together with the reducing gas and is discharged. Further, the controller 23 sets the valve 57a of the first pressure release pipe 17a and the valve 72 of the pressure release pipe 17 to the open state, and drives the vacuum pump 71 to evacuate the inside of the purification cylinder 1A.

  By this reduction regeneration operation, the catalyst layer and the adsorbent layer of the purification cylinder 1A are reduced and regenerated, and the oxygen scavenging ability of the catalyst layer and the water removal ability of the adsorbent layer are restored. After reduction regeneration of the purified cylinder 1A, the controller 23 returns the valve 66, the valve 55a, the valve 56a, the valve 57a, and the valve 72 to the closed state. Further, after the reduction regeneration, the controller 23 sets the valve 62 and the valve 54a to an open state, and supplies an inert gas (nitrogen) into the purification cylinder 1A.

  Further, the controller 23 sets the valve 66, the valve 55b, and the valve 56b to the open state when the refining cylinder 1B provided in the refining unit 22 of the circulation circuit C1 is subjected to the reduction regeneration operation. With this setting, the reducing gas from the reducing gas supply source H is supplied from the branch pipe 15b into the purification cylinder 1B. Further, the controller 23 turns on the heater in the refining cylinder 1B at the start of the reduction regeneration operation to heat the catalyst layer and the adsorbent layer. Then, as described above, the water separated from the catalyst layer and the adsorbent layer is discharged through the second discharge pipe 16b and the discharge pipe 16 together with the reducing gas. Further, the controller 23 sets the valve 57b and the valve 72 to the open state, and drives the vacuum pump 71 to evacuate the inside of the purification cylinder 1B.

  By this reduction and regeneration operation, the catalyst layer and the adsorbent layer of the purification cylinder 1B are reduced and regenerated. After the reduction regeneration of the purification cylinder 1B, the controller 23 returns the valve 66, the valve 55b, the valve 56b, the valve 57b, and the valve 72 to the closed state. Further, after the reduction regeneration, the controller 23 sets the valve 62 and the valve 54b to an open state, and supplies an inert gas (nitrogen) into the purification cylinder 1B.

Next, the self-circulating operation will be described.
The self-circulation operation is an operation in which the inert gas is circulated in the circulation circuits C1 to C4 without being circulated between the circulation purification device 11 and the box G. In the self-circulation operation, only one of the two purification cylinders 31 provided in one circulation circuit operates, and each cylinder can be operated simultaneously in all the circulation circuits C1 to C4. More specifically, for example, the A cylinder side of each of the circulation circuits C1 to C4 can be simultaneously self-circulating.

  When the controller 23 performs the self-circulation operation on the side of the purification cylinder 1A provided in the purification unit 22 of the circulation circuit C1, the valve 58 of the bypass passage 10c, the valve 53a of the first outlet pipe 13a, and the first introduction pipe 12a The valve 52a is set to an open state, and the circulation pump P is driven. With this setting, the inert gas is circulated on the refining cylinder 1A side without being supplied to the box G. That is, the inert gas passes through the refining cylinder 1A → the first outlet pipe 13a → the outgoing pipe path 10a → the bypass path 10c → the return pipe path 10b → the circulation pump P → the first introduction pipe 12a and returns to the purification cylinder 1A again. .

  Further, when the controller 23 performs the self-circulation operation on the side of the purification cylinder 1B provided in the purification unit 22 of the circulation circuit C1, the valve 58 of the bypass passage 10c, the valve 53b of the second outlet pipe 13b, and the second introduction pipe The valve 52b of 12b is set to an open state, and the circulation pump P is driven. With this setting, the inert gas is self-circulated on the purification cylinder 1B side without being supplied to the box G (without passing through the box G). That is, the inert gas passes through the refining cylinder 1B → the second outlet pipe 13b → the outgoing pipe path 10a → the bypass path 10c → the return pipe path 10b → the circulation pump P → the second introduction pipe 12b and returns to the purification cylinder 1B again. .

Next, the box circulation operation will be described.
The box circulation operation is an operation of circulating an inert gas between the circulation purification device 11 and the box G. In the box circulation operation, only one of the two refining cylinders 31 provided in one circulation circuit operates, and each of the circulation circuits C1 to C4 can simultaneously operate each one cylinder. Specifically, for example, it is possible to simultaneously perform box circulation operation on the A cylinder side of each circulation circuit C1 to C4.

  When the controller 23 performs the box circulation operation on the side of the purification cylinder 1A provided in the purification unit 22 of the circulation circuit C1, the valve 50 of the outgoing line 10a, the valve 53a of the first outlet pipe 13a, and the first introduction pipe 12a The valve 52a is set in an open state, and the circulation pump P is driven. By this setting, the inert gas is supplied to the box G and circulates in the box on the side of the purification cylinder 1A. That is, the inert gas passes through the refining cylinder 1A → the first outlet pipe 13a → the outgoing line 10a → the box G → the return pipe 10b → the circulation pump P → the first introduction pipe 12a and returns to the purification cylinder 1A again. The inert gas that has returned to the purification cylinder 1A passes through the purification cylinder 1A, so that oxygen contained in the inert gas and a small amount of carbon monoxide, hydrogen, carbon dioxide, and the like are removed in the catalyst layer. At the same time, moisture contained in the inert gas and a small amount of carbon monoxide and carbon dioxide are adsorbed in the adsorbent layer. Then, the purified inert gas is supplied again to the box G from the purification cylinder 1A.

  In addition, when the controller 23 performs the box circulation operation on the side of the purification cylinder 1B provided in the purification unit 22 of the circulation circuit C1, the valve 50 of the outgoing line 10a, the valve 53b of the second outlet pipe 13b, and the second introduction The valve 52b of the pipe 12b is set to an open state, and the circulation pump P is driven. By this setting, the inert gas is supplied to the box G and circulates in the box on the side of the purification cylinder 1B. That is, the inert gas passes through the refining cylinder 1B → the second outlet pipe 13b → the outgoing line 10a → the box G → the return pipe 10b → the circulation pump P → the second introduction pipe 12b and returns to the purification cylinder 1B again. The inert gas returned to the purification cylinder 1B is purified in the same manner as described above, and the purified inert gas is supplied again to the box G from the purification cylinder 1B.

Next, the air purge operation will be described.
The air purge operation is an operation for increasing the oxygen concentration in the box G in an inert gas atmosphere. The air purge operation is an operation provided to replace the inside of the box G with an environment suitable for humans when a person enters or exits the box G. In the air purge operation, a plurality of circulation circuits C1 to C4 can be operated simultaneously.

  When the controller 23 executes an air purge operation for increasing the oxygen concentration in the box G connected to the circulation circuit C1, the valve 50 of the forward line 10a, the valve 51 of the return line 10b, and the valve of the exhaust pipe 80 81 and the valve 76 of the pipe line 10f are set to an open state, and the circulation pump P is driven. With this setting, oxygen from the oxygen supply source D passes through the filter 75 that removes impurities and the regulator 77 that decompresses oxygen, and is supplied into the box G from the outgoing line 10a. The inside of the box G supplied with oxygen is filled with oxygen, and the oxygen concentration is increased. In the air purge operation of the present embodiment, the operation is performed to increase the oxygen concentration by 20%.

Next, the gas purge operation will be described.
The gas purge operation is an operation for bringing the inside of the box G into an optimum inert gas atmosphere. In the gas purge operation, a plurality of circulation circuits C1 to C4 can be operated simultaneously.

  When the controller 23 performs the gas purge operation of the box G connected to the circulation circuit C1, the valve 62 of the pipe line 10d, the valve 54a of the branch pipe line 14a (or the valve 54b of the branch pipe line 14b), and the outgoing pipe The valve 50 of the passage 10a is set to an open state. With this setting, the inert gas from the inert gas supply source N is supplied into the box G.

Hereinafter, a procedure for executing each operation described above under the control of the controller 23 will be described.
When the circulation purification apparatus 11 is initially started (when the initial power is turned on), the controller 23 enters a standby state in the offline mode. Then, the controller 23 automatically sets the circulation purification system S so that the inert gas can be circulated when the online start switch 38 or the offline start switch 39 is pressed. First, the controller 23 executes a replacement process for performing the replacement operation of the purification cylinders 31 of all the circulation circuits C1 to C4. In the replacement process, the controller 23 controls to perform the replacement operation one cylinder at a time. Specifically, the controller 23 includes the refining cylinder 1A of the circulation circuit C1, the purification cylinder 1B, the purification cylinder 2A of the circulation circuit C2, the purification cylinder 2B, the purification cylinder 3A of the circulation circuit C3, the purification cylinder 3B, and the circulation circuit C4. The replacement operation is performed in the order of the purification cylinder 4A → the purification cylinder 4B.

  When the replacement process is completed by replacing all the purification cylinders 31 with each other, the controller 23 executes a reduction regeneration process for causing the purification cylinders 31 of all the circulation circuits C1 to C4 to perform a reduction regeneration operation. In the reduction regeneration process, the controller 23 controls to perform the reduction regeneration operation for each cylinder. The controller 23 of the present embodiment first performs the regenerating and regenerating operation on the A cylinder side refining cylinder 31 one by one, and then causes the B cylinder side refining cylinder 31 to perform the regenerating and regenerating operation one by one. Specifically, first, the controller 23 performs the reduction regeneration operation in the order of the purification cylinder 1A of the circulation circuit C1, the purification cylinder 2A of the circulation circuit C2, the purification cylinder 3A of the circulation circuit C3, and the purification cylinder 4A of the circulation circuit C4. Then, all the refining cylinders 31 on the A cylinder side are in a state where reduction regeneration is completed. Thereafter, the controller 23 performs the reduction regeneration operation in the order of the purification cylinder 1B of the circulation circuit C1, the purification cylinder 2B of the circulation circuit C2, the purification cylinder 3B of the circulation circuit C3, and the purification cylinder 4B of the circulation circuit C4. It is assumed that the purification cylinder 31 has completed reduction regeneration.

  When the reduction regeneration of the purification cylinder 31 is completed, the circulation circuit is in a state where self-circulation is possible. For this reason, the controller 23 performs self-circulation so that the self-circulation operation is performed in each of the circulation circuits C1 to C4 using the A-cylinder-side purification cylinders 31 when all the A-cylinder-side purification cylinders 31 have completed reduction regeneration. Execute the process. That is, when the reduction regeneration operation is alternately performed on the A cylinder side and the B cylinder side, it takes time for all the circulation circuits C1 to C4 to be in a self-circulating state. Therefore, in the present embodiment, the reductive regeneration operation is first performed on the refining cylinder 31 on the A cylinder side, thereby shortening the time until all the circulation circuits C1 to C4 can be self-circulated. As a result, the time until the circulation circuits C1 to C4 can perform the box circulation operation can be shortened. Then, the controller 23 causes the purification cylinder 31 on the A cylinder side to self-circulate and at the same time causes the purification cylinder 31 on the B cylinder side to be reduced and regenerated. Note that the purification cylinder 31 on the B cylinder side has already been performing the self-circulation operation on the A cylinder side at the time of completion of the reduction regeneration, and therefore will stand by in a state where self-circulation is possible.

  The controller 23 can circulate the inert gas by causing the recirculation circuits C1 to C4 to self-circulate in the recycle cylinder 31 on the A cylinder side and reducing and regenerating all the refining cylinders 31 on the B cylinder side. In this state, the circulating purification apparatus 11 is put on standby. When the controller 23 receives a circulation instruction from the command device 26 (in the online mode) or a circulation instruction from the operation panel 32 (in the offline mode), the controller 23 executes a box circulation process for causing the circulation circuits C1 to C4 to perform a box circulation operation. To do. The circulation instruction can be specified by individually specifying the circulation circuits C1 to C4, and the controller 23 causes the designated circulation circuit to perform a box circulation operation.

  Thereafter, when the controller 23 receives a circulation switching instruction (in the online mode) from the command device 26 or a circulation switching instruction (in the offline mode) from the operation panel 32, the controller 23 switches the refining cylinder 31 performing the box circulation operation. For example, in the circulation circuit C1, when the refining cylinder 1A is in the box circulation operation and the refining cylinder 1B is in the standby state, the controller 23 receives the circulation switching instruction, thereby causing the refining cylinder 31 to perform the box circulation operation. Switch to 1B. The circulation switching instruction can be specified by individually specifying the circulation circuits C1 to C4, and the controller 23 switches the box circulation operation of the designated circulation circuit.

  Then, when the controller 23 receives the circulation switching instruction and switches, the controller 23 automatically causes the refining cylinder 31 that is the switching source to perform a reduction regeneration operation. For example, as described above, when the refining cylinder 31 that performs the box circulation operation is switched from the refining cylinder 1A to the refining cylinder 1B, the controller 23 causes the refining cylinder 1A to perform a reduction regeneration operation. When the circulation is switched, the reduction regeneration operation is automatically performed without an instruction from the operator, so that the circulation purification apparatus 11 can be continuously operated without stopping when the next circulation switching is performed. . That is, since it is possible to prevent the operator from forgetting the instruction, it is possible to keep the refining cylinder 31 to be switched to stand by in a circulatorable state at the next circulation switching.

  When the controller 23 receives an air purge start instruction (in the online mode) from the command device 26 or an air purge start instruction (in the offline mode) from the operation panel 32, the controller 23 executes an air purge process for causing the circulation circuits C1 to C4 to perform an air purge operation. To do. The air purge start instruction can be specified by individually specifying the circulation circuits C1 to C4, and the controller 23 causes the instructed circulation circuit to perform an air purge operation.

  In the air purge process, the controller 23 stops the operation of the circulation circuit and performs the air purge operation by stopping the operation. Then, the controller 23 determines whether or not the oxygen amount in the box G measured by the oximeter 41 is equal to or greater than a predetermined set value. If the determination result is affirmative, the controller 23 displays on the display screen 33 of the operation panel 32 that the air purge has been completed (it is possible to enter and exit the box G). Further, when the determination result is affirmative (when the oxygen amount becomes equal to or greater than the set value), the controller 23 ends the air purge operation. Thereafter, when the controller 23 receives the circulation instruction, the controller 23 resumes the circulation.

  When the controller 23 receives a gas purge start instruction (in the online mode) from the command device 26 or a gas purge start instruction (in the offline mode) from the operation panel 32, the controller 23 executes a gas purge process for causing the circulation circuits C1 to C4 to perform a gas purge operation. To do. The gas purge start instruction can be instructed by individually specifying the circulation circuits C1 to C4, and the controller 23 causes the instructed circulation circuit to perform a gas purge operation.

  In the gas purge process, the controller 23 stops the circulation process of the circulation circuit and performs a gas purge operation by stopping the circulation process. Then, the controller 23 determines whether or not the oxygen amount in the box G measured by the oximeter 41 is equal to or less than a predetermined set value, and the dew point in the box G measured by the dew point meter 42 is determined in advance. It is determined whether or not the set value is less than or equal to the set value. When the determination results of both the determinations are affirmative (when the oxygen amount is equal to or less than the set value and the dew point is equal to or less than the set value), the gas purge operation is terminated. Then, when the gas purge operation is finished, the controller 23 automatically switches the operation of the circulation circuit to the self-circulation operation.

  Further, the controller 23 controls the circulation flow rate based on the measurement results of the oximeter 41 and the dew point meter 42 during the box circulation operation of the circulation circuits C1 to C4. This control is performed by inverter control of the circulation pump P. The controller 23 gradually decreases the circulating flow rate within a range where the oxygen amount and dew point in the box G satisfy the predetermined conditions. The controller 23 circulates the inert gas based on the set flow rate set from the operation panel 32, and reduces the circulating flow rate within a range satisfying the condition based on the measurement result.

  The controller 23 receives the measurement result of the pressure sensor 43 and constantly monitors the internal pressure in the box G. Then, when the internal pressure exceeds a predetermined value, the controller 23 performs pressure control by setting the valve 81 of the exhaust pipe 80 to an open state and exhausting the inert gas. The predetermined value is set based on the breakdown voltage of the box G. Further, the pressure control is performed by using the gas supply function provided in the circulation purification device 11 in addition to the exhaust function described above.

Therefore, according to the present embodiment, the following effects can be obtained.
(1) A single controller 23 for controlling a plurality of circulation circuits C1 to C4 is mounted on the circulation purification apparatus 11, and each circulation circuit C1 to C4 is independently controlled. Therefore, even when a plurality of circulation circuits C <b> 1 to C <b> 4 are formed, the enlargement of the circulation purification device 11 can be suppressed by mounting the single controller 23 on the circulation purification device 11. Further, by independently controlling the circulation circuits C1 to C4, it is possible to individually start and stop, and to improve operability.

(2) The controller 23 has a plurality of control modes. For this reason, a control mode can be switched according to a use, and operativity can be improved.
(3) The controller 23 selects a replacement process, a reduction regeneration process, a self-circulation process, and a circulation process according to the state of the circulation circuits C1 to C4 and automatically processes them. For this reason, the burden of the operator of the circulation purification apparatus 11 can be reduced, and operability can be improved. In addition, since forgetting the operation of the operator is suppressed, the efficiency can be improved without stopping the operation of the circulating purification apparatus 11.

  (4) When the refining cylinder 31 to be circulated through the box is switched, the refining cylinder 31 that is not to be circulated (the refining cylinder 31 on the unused side) is automatically reduced and regenerated. For this reason, one refinement | purification cylinder 31 can be made to wait in the circulation possible state until the next switching of the refinement | purification cylinder 31. FIG. Therefore, when the purification cylinder 31 is switched, the circulation of the inert gas is not temporarily stopped, and the inert gas can be continuously supplied.

  (5) The controller 23 automatically adjusts the circulation flow rate of the inert gas based on the oxygen amount and the moisture amount in the box G. For this reason, the load to the workpiece | work installed in the box G can be reduced. Moreover, energy consumption can be suppressed by lowering the circulation flow rate in a state where a necessary amount of inert gas is supplied.

  (6) The controller 23 automatically adjusts the internal pressure based on the internal pressure in the box G. For this reason, destruction of the box accompanying the increase in the internal pressure in the box due to the supply of the inert gas can be suppressed.

  (7) The controller 23 executes an air purge process for increasing the oxygen concentration in the box G. An operator may enter or leave the box G due to maintenance or the like. For this reason, it is possible to increase the oxygen concentration in the inert gas atmosphere in the box G and replace the interior of the box G with an environment suitable for the human body.

  (8) The controller 23 executes a gas purge process for increasing the inert gas concentration in the box G. For this reason, the inside of the box G can be replaced with an optimal inert gas atmosphere.

  (9) The controller 23 executes self-circulation processing. Even when the inert gas is not circulated with the box G (for example, during maintenance of the box G), the inert gas is purified by itself when it is switched to the circulation instruction by self-circulation. An inert gas can be immediately supplied into the box G. Therefore, it is possible to shorten the time until the environment in the box G is optimized.

  (10) The inert gas can be reused by purifying and circulating the inert gas with the circulation purification device 11. As a result, an increase in cost associated with a large consumption of inert gas can be suppressed. Moreover, since the closed circuit is comprised between the circulation purification apparatus 11 and the box G, the purity fall of the inert gas by contact with inert gas and air | atmosphere can be prevented.

In addition, you may change this embodiment as follows.
In the embodiment, the number of circulation circuits formed between the box G and the circulation purification device 11 may be changed. For example, two, three, five, etc. may be used.

In the embodiment, the inert gas is supplied to one box G by one circulation circuit, but a plurality of circulation circuits may be connected to one box G to supply the inert gas.
In the embodiment, the inert gas is embodied as nitrogen, but may be embodied in helium, argon, or xenon in addition to nitrogen. Further, air may be circulated by the circulation purification device 11.

In the embodiment, synthetic zeolite is used as the adsorbent, but alumina or silica gel may be used.
In the embodiment, wireless communication may be performed between the controller 23 and the command device 26.

The block diagram which shows typically the circulation purification system of an inert gas. The schematic diagram which shows the circulation purification apparatus of an inert gas. FIG. 3 is a front sectional view showing the inside of an inert gas circulation purification device. The front view which shows an operation panel. The circuit diagram of a circulation purification system.

Explanation of symbols

  C1 to C4 ... circulation circuit, D ... oxygen supply source, G ... box, N ... inert gas supply source, 11 ... circulation purification device, 22 ... purification unit, 23 ... controller (control unit), 31 ... purification cylinder, 32 ... operation panel (operation part), 41 ... oximeter, 42 ... dew point meter, 43 ... pressure sensor.

Claims (7)

In a circulation purification apparatus connected to a supply destination of an inert gas or air and circulating the inert gas or air through a plurality of circulation circuits formed between the supply destination and the supply destination,
The recirculation circuit receives the inert gas or air discharged from the supply destination, removes oxygen and moisture contained in the inert gas or air, and purifies the inert gas or air. Including
A single control unit that executes the control related to the circulation of the plurality of circulation circuits independently for each circulation circuit ,
The purification unit has a purification cylinder for purifying the inert gas or air,
The control unit circulates the inert gas or air without passing through the supply destination, a replacement process for replacing the refined cylinder with the inert gas or air, a reduction regeneration process for reducing and regenerating the purified cylinder, and the supply destination. A self-circulation process and a circulation process in which the inert gas or air is circulated with the supply destination are executed, and each process is selected according to the state of the circulation circuit and automatically processed. Circulating purification equipment. The control unit, as a control mode, an online mode for operating the circulation circuit from the outside via a communication function, an offline mode for operating the circulation circuit via an operation unit mounted on the circulation purification device, The circulation purification apparatus according to claim 1, further comprising a maintenance mode in which various components constituting the circulation circuit are individually operated during maintenance. The purification section has a plurality of purification cylinders,
The control unit receives a switching instruction of a purification cylinder that circulates the inert gas or air to and from the supply destination, switches the purification cylinder to be circulated and continuously executes the circulation process, while circulating The circulating purification apparatus according to claim 1 or 2 , wherein the reduction regeneration process of the refined cylinders that are no longer targeted is executed simultaneously. The inert gas is circulated in the circulation circuit,
The said control part automatically adjusts the circulation flow rate of the said inert gas based on the measurement result of the oxygen amount of the said supply destination, and a moisture content, The any one of Claims 1-3 characterized by the above-mentioned. The circulating purification apparatus according to 1. Wherein the control unit, circulating purification device according to any one of claims 1 to 4, characterized in that for automatically adjusting the pressure based on the measurement result of the supply destination of pressure. The inert gas is circulated in the circulation circuit, and an oxygen supply source for supplying oxygen is connected thereto,
The control unit receives an oxygen supply instruction to the supply destination, supplies the oxygen from the oxygen supply source to the supply destination through the circulation circuit, and performs an air purge process for increasing the oxygen concentration of the supply destination. The circulation purification apparatus according to any one of claims 1 to 5 , wherein the circulation purification apparatus is executed. The inert gas is circulated in the circulation circuit, and an inert gas supply source for supplying the inert gas is connected thereto,
The control unit receives an inert gas supply instruction to the supply destination, supplies the inert gas from the inert gas supply source to the supply destination via the circulation circuit, and inactivates the supply destination. The circulating purifier according to any one of claims 1 to 6 , wherein a gas purging process for increasing the gas concentration is performed.

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