JP4650058B2 - Foreign matter removing apparatus and electro-optical device manufacturing method - Google Patents

Description

  The present invention relates to a foreign matter removing device and a substrate holding device for removing foreign matter adhering to the surface of a substrate of an electro-optic panel, a method for manufacturing an electro-optic device using these devices, and a foreign matter removing method.

  As a device for cleaning the surface of a substrate used for an electro-optical panel and removing attached foreign matter and dirt, a substrate cleaning device of Patent Document 1 is known. This substrate cleaning apparatus has a substrate transport mechanism for transporting a substrate to a cleaning position, and a cleaning head having a tapered tip portion. In addition, a head drive mechanism that supports the cleaning head so as to be movable perpendicularly to the substrate surface with the tip portion facing the surface of the substrate set at the cleaning position, and an ultrasonic wave attached to the rear end of the cleaning head And an ultrasonic generator that emits from the tip of the cleaning head. Then, supply and winding of the wiping cloth is supported by supporting both ends of the wiping cloth so that the wiping cloth, which is a cleaning cloth, is disposed between the substrate surface set at the cleaning position and the tip portion of the cleaning head. It has a mechanism for taking out. Further, the apparatus includes a solvent supply device that impregnates the wiping cloth with a solvent on the supply side of the wiping cloth with respect to the cleaning head, and a control unit that controls each mechanism and apparatus.

  Further, the substrate cleaning method using the substrate cleaning apparatus is configured such that the surface of the substrate carried into the cleaning position by the substrate transport mechanism is impregnated with the solvent of the wiping cloth by the tip of the cleaning head that generates ultrasonic waves. In the pressed state, the substrate and the wiping cloth are slid relative to each other to clean the substrate surface.

  Furthermore, the solvent is supplied to the wiping cloth intermittently or continuously. Further, it is possible to dry the portion of the wiping cloth that is not impregnated with the solvent and the surface of the substrate by sliding each other.

JP-A-9-205074

  The above-described substrate cleaning apparatus is an attempt to consolidate the functions of a cleaning apparatus that applies a solvent to the surface of a substrate and performs brushing, and a cleaning apparatus that applies ultrasonic waves by immersing the substrate in a solvent. However, the substrate may move due to ultrasonic vibration during cleaning, and there may be a portion that cannot be sufficiently cleaned. Also, if the substrate surface to be cleaned faces upward and the wiping cloth is pressed from above and slid against each other, the removed foreign matter is captured by the wiping cloth and then dropped by the ultrasonic vibration of the cleaning head. There was a risk of reattaching to the surface of the substrate.

  Further, it is very difficult to clean the foreign matter adhering to the surface of the substrate of the electro-optical panel with the substrate cleaning apparatus in a state where a driving relay substrate or the like is connected to the electro-optical panel. In practice, it is necessary to perform cleaning so as to avoid the relay substrate and the like, and hold the electro-optical panel and slide the wiping cloth and the surface of the electro-optical panel substrate relative to each other within a necessary cleaning range.

  The present invention has been made to solve at least one of the above-described problems, and removes all foreign matter adhering to the surface of the substrate, and generates dust from the wiping cloth or reattaches the removed foreign matter. It is an object of the present invention to provide a reduced foreign matter removing device and a substrate holding device, an electro-optical device manufacturing method using these devices, and a foreign matter removing method.

The foreign matter removing device of the present invention is a foreign matter removing device that removes foreign matter adhering to the surface of the electro-optical panel substrate to which the relay substrate is electrically connected, and is a panel holding device that holds the surface of the substrate downward. Between the substrate surface and the surface of the substrate, and the surface of the substrate held by the panel holding unit so that the wiping cloth is opposed to each other and supporting the both ends of the wiping cloth. A pressing part that is located via the wiping cloth and supports the wiping cloth from the lower surface toward the front surface side of the substrate across the width direction of the wiping cloth; and a panel holding part and a wiping cloth supported by the pressing part A moving means for moving at least one of the substrates in a wiping direction capable of wiping the surface of the substrate, and a wiping cloth pressed against the surface of the substrate with the tip of the pressing portion A control unit that controls the moving means to move the substrate and the wiping cloth relative to each other in the wiping direction, and performs a wiping operation to wipe the surface of the substrate with the wiping cloth. The electro-optical panel is held by holding the electro-optical panel and supporting a part of the surface opposite to the surface of the substrate to hold the electro-optical panel.

  According to this configuration, the panel holding unit holds the electro-optical panel while holding the relay substrate to support the electro-optical panel and supporting a part of the surface opposite to the surface of the substrate. Therefore, since the portion holding the substrate does not protrude from the surface side of the substrate, the wiping cloth can be pressed against the surface of the substrate from which foreign substances are to be removed with the tip of the pressing portion without wiping. Therefore, even if the electro-optical panel has the relay substrate, the panel holding unit can remove the foreign matter attached to the substrate without obstructing the wiping operation. In addition, since the surface of the substrate is disposed so as to face the wiping cloth downward, the generation from the wiping cloth generated by the wiping operation is greater than when the surface of the substrate from which foreign matter is to be removed is upward. It can be reduced that dust or removed foreign matter falls from the wiping cloth and reattaches to the surface of the substrate. In other words, it is possible to provide a foreign matter removing device that removes all foreign matter adhering to the surface of the substrate of the electro-optical panel and reduces dust generation from the wiping cloth and reattachment of the removed foreign matter. The configuration in which the panel holder supports a part of the surface opposite to the surface of the substrate is a state in which the posture of the electro-optical panel is almost constant when vacuum suction using a suction pad or when holding a relay substrate If it can be gripped, a support that functions as a point of action with the gripped portion as a fulcrum may be used.

  The panel holding unit is applied to at least a part of a gripping unit that grips the relay substrate connected to one side of the electro-optic panel from both sides, and at least a part of the side facing the one side of the surface opposite to the surface of the substrate. Preferably, the electro-optical panel is held by the grip portion and the panel support portion.

  According to this configuration, the relay substrate is gripped from both sides by the gripping portion, and the panel support portion contacts at least a part of the side opposite to the one side to which the relay substrate is connected on the surface opposite to the surface of the substrate. In contact therewith, the electro-optical panel is held. Therefore, the panel holding unit holds the relay substrate of the electro-optic panel without dropping it, and at least two points of the portion where the relay substrate is gripped and the portion where the panel support portion abuts. The surface can be held downward without touching the surface from which foreign matter is to be removed.

The moving means may simultaneously move the grip portion and the panel support portion in the wiping direction.
According to this configuration, the foreign substance attached to the surface of the substrate can be removed by moving the electro-optical panel in the wiping direction by the moving means while the wiping cloth is pressed against the surface of the substrate of the electro-optical panel. . Further, the moving means can be reduced in size as compared with the case where the wiping cloth and the pressing portion are moved with respect to the panel holding portion that holds the electro-optical panel.

In these foreign matter removing devices of the present invention, the apparatus further comprises a solvent application unit that is located on the supply side of the wiping cloth with respect to the pressing unit, and that applies a solvent to the wiping cloth, and the control unit It is preferable to impregnate the wiping cloth in the front portion including the distal end side of the pressing portion in the supply direction by discharging a solvent.
According to this configuration, since the wiping cloth is further provided with the solvent application unit that applies the solvent to the wiping cloth in the front portion including the tip side of the pressing part in the supply direction of the wiping cloth, the wiping in which the solvent is applied during the wiping operation The cloth can be pressed against the surface of the substrate with the tip of the pressing portion to remove foreign matters and solvent-soluble dirt. That is, foreign matter and dirt can be removed at the same time, and more efficient wiping can be performed.

  Moreover, it is preferable that the said solvent application part discharges on the surface of a wiping cloth from the nozzle in the state which mixed the solvent and air.

  According to this configuration, since the solvent and air are mixed and discharged to the wiping cloth as compared with the case where the solvent is discharged alone, the solvent is in a sprayed state, and the solvent is removed over a wider range. The surface of the wiping cloth can be impregnated.

  The control unit moves the substrate and the wiping cloth relative to each other in the first wiping direction by controlling the moving means in a state where the wiping cloth is pressed to one end of the surface of the substrate by the tip of the pressing unit. The surface of the substrate after the first wiping operation in which the tip of the pressing portion relatively passes the other end opposite to the one end of the surface of the substrate is performed at least once. In the state where the wiping cloth is pressed to the other end of the pressing portion by the tip of the pressing portion, the moving means is controlled to relatively move the substrate and the wiping cloth in the second wiping direction opposite to the first wiping direction. It is preferable that the second wiping operation is performed at least once so that the distal end portion of the pressing portion relatively passes through one end portion.

  According to this configuration, even in the first wiping operation in which the wiping is performed in the first wiping direction, even if a portion that cannot be wiped occurs at one end of the surface of the substrate touched by the tip of the pressing portion, the second wiping operation occurs. In the wiping operation, the wiping is performed so as to pass through the one end portion in the second wiping direction opposite to the first wiping direction. Therefore, foreign matters and dirt attached to the surface of the substrate can be removed more thoroughly. Moreover, the 1st and 2nd wiping operation | movement is performed in the state which pressed the wiping cloth to the one edge part of the surface of the board | substrate with the front-end | tip part of the press part. Accordingly, since the edge portion of the substrate does not enter the surface of the wiping cloth so as to be pressed, dust generation due to damage of the wiping cloth at the edge portion of the substrate can be reduced.

  Moreover, it is preferable that the said control part controls a cloth supply means so that the part of the wiping cloth pressed by the front-end | tip part of a press part may be updated for every wiping operation | movement.

  According to this configuration, since the control unit controls the cloth supply means so as to update the portion of the wiping cloth that is pressed by the tip portion of the pressing unit for each wiping operation, the surface of the substrate is always wiped. The unused portion of the cloth is pressed and the wiping operation is performed. Therefore, it is possible to further reduce a problem that the removed foreign matter is reattached.

The electro-optical device manufacturing method of the present invention is a method of manufacturing an electro-optical device including an electro-optical panel to which a relay substrate is electrically connected, and the electro-optical panel substrate using the foreign matter removing device of the above invention. Removing the foreign matter adhering to the surface of the substrate, mounting the transparent substrate on at least one surface of both surfaces of the electro-optical panel, and housing the electro-optical panel mounted with the transparent substrate in the housing And an assembly process.

  According to this method, in the step of removing the foreign matter, the generation of dust from the wiping cloth and the reattachment of the removed foreign matter is reduced on the surface of the substrate of the electro-optical panel, and the surface of the substrate is thoroughly wiped and attached. Remove foreign matter. Therefore, in the step of mounting the transparent substrate, the transparent substrate can be mounted on at least one surface of the electro-optical panel without almost any foreign matter remaining on the surface of the substrate. That is, if such an electro-optical panel is accommodated in the housing in the assembly process, it is possible to manufacture an electro-optical device on which a transparent substrate is mounted with a high yield by reducing the adhesion failure of foreign matter.

  An embodiment of the present invention is a liquid crystal display device (liquid crystal light valve) as an electro-optical device used in a projection display device (projector), and removes foreign matter and dirt adhered to the surface of the substrate of the liquid crystal display panel. An apparatus, a foreign matter removing method, and a manufacturing method of a liquid crystal display device as an electro-optical device using the foreign matter removing device will be described as examples.

(Liquid crystal display device as electro-optical device)
First, a liquid crystal display device and a liquid crystal display panel will be described. 1A and 1B are schematic views showing a liquid crystal display device. FIG. 1A is a perspective view, and FIG. 1B is a cross-sectional view taken along line AA of FIG.

  As shown in FIG. 1A, a liquid crystal display device 20 includes a liquid crystal display panel 1 having a flexible printed circuit board (FPC) 7 as a relay substrate, a case 23 as a housing for housing the liquid crystal display panel 1, and a liquid crystal display. And a metal frame 25 having an opening 25 a that covers the display panel 1. The liquid crystal display panel 1 is accommodated so that the FPC 7 protrudes from the notch 23 c of the case 23. Further, the metal frame 25 is attached to the case 23 by engaging an opening 25 c provided in the arm portion 25 b with a hook portion 23 a provided on the side surface of the case 23.

  As shown in FIG. 1B, the liquid crystal display panel 1 has a transparent substrate on the surface of the counter substrate 3 on the side where light is incident from the outside and on the surface of the element substrate 2 on the side where incident light is emitted. Dust-proof glasses 21 and 22 are provided. The light incident surface 22 a of the dust-proof glass 22 is supported by the frame portion 23 b of the case 23, and the gap between the inner wall surface 23 d of the case 23 and the outer peripheral side surface 1 a of the liquid crystal display panel 1 is filled with the adhesive 24. And the liquid crystal display panel 1 are bonded and fixed.

  The dust-proof glasses 21 and 22 provided on the light incident side and light emitting side surfaces of the liquid crystal display panel 1 prevent dust and foreign matter from adhering to the surface of the liquid crystal display panel 1, and the liquid crystal display device is used in the projection display device. 20 is attached so that dust and foreign matter adhering when projected are not conspicuous.

(Liquid crystal display panel as an electro-optical panel)
2A and 2B are schematic views showing a liquid crystal display panel, where FIG. 2A is a front view and FIG. 2B is a side view. The liquid crystal display panel 1 is a high temperature polysilicon type TFT (Thin Film Transistor) active matrix type liquid crystal display panel.

  As shown in FIGS. 2A and 2B, the liquid crystal display panel 1 includes an element substrate 2 having a TFT element and a pixel electrode connected to one terminal of the TFT element, and a counter substrate 3 having a counter electrode. And a liquid crystal sandwiched between the element substrate 2 and the counter substrate 3 and sealed with a sealing material. The element substrate 2 has a scanning line as a wiring connected to the gate electrode of the TFT element and a signal line as a wiring connected to the source electrode. Each wiring is drawn out to the peripheral portion of the element substrate 2 and connected to the output terminal of the driver IC 4 disposed on the terminal portion 2b and the output terminals of the driver ICs 5 and 6 disposed on the left and right peripheral portions. Has been. Further, the input terminals of the driver ICs 4, 5, 6 are led to the terminal portion 2 b of the element substrate 2 by wiring not shown, and are electrically connected to the terminal portion 7 a of the FPC 7 that is a relay substrate. The other terminal portion 7b of the FPC 7 is connected to an external drive circuit (not shown).

  In such a liquid crystal display panel 1, the driver ICs 4, 5, 6 send driving electric signals to the TFT elements based on the input signals from the drive circuit, and the TFT elements are switched. As a result, an electric field is applied between the pixel electrode (element substrate 2 side) and the counter electrode (opposite substrate 3 side) arranged in a matrix in the display area 8 of the liquid crystal display panel 1, whereby each substrate 2, 3 When the direction of the liquid crystal molecules aligned on the surface of the substrate is directed to the electric field direction, the deflected incident light can be modulated and emitted. In the present embodiment, the arrangement of TFT elements, pixel electrodes, counter electrodes, wirings, etc., and liquid crystal are used as well-known ones and are not shown in FIGS.

(Foreign substance removal device)
Next, the foreign substance removal apparatus of this embodiment is demonstrated based on FIGS. FIG. 3 is a schematic diagram showing a main part structure of the foreign matter removing apparatus. FIG. 3 shows a state in which the liquid crystal display panel 1 is set in the foreign matter removing apparatus 100 so as to remove the foreign matter attached to the surface 3a of the counter substrate 3.

  As shown in FIG. 3, the foreign matter removing apparatus 100 of the present embodiment includes a substrate holding device 101 that holds the surface 3a of the liquid crystal display panel 1 facing downward and transports the liquid crystal display panel 1 to a predetermined position. Yes. Further, the wiping cloth 10, which is a cloth for wiping off foreign matters, is arranged to face the surface 3 a of the liquid crystal display panel 1 arranged at a predetermined position, and both ends of the wiping cloth 10 are supported to support the wiping cloth 10. A cross supply mechanism 111 is provided as cross supply means for supplying and winding. In addition, the wiping cloth 10 is positioned between the surface 3a of the liquid crystal display panel 1 and the wiping cloth 10 across the width direction of the wiping cloth 10 from the lower surface toward the surface 3a of the counter substrate 3 as a substrate. And a cross portion transport mechanism 141 that moves the cross supply mechanism 111 and the press portion 115 together. Further, the liquid crystal display panel 1 is moved in the wiping direction in a state where the wiping cloth 10 is pressed against the surface 3 a of the liquid crystal display panel 1 by the tip 115 a of the pressing portion 115, and the surface 3 a of the liquid crystal display panel 1 is moved by the wiping cloth 10. The control part 131 (refer FIG. 8) which performs the wiping off operation which wipes off is provided. Further, a dispenser 124 is provided as a solvent application unit that applies a solvent to the wiping cloth 10 and is located on the supply side of the wiping cloth 10 with respect to the pressing part 115.

  FIG. 4 is a schematic diagram showing the substrate holding device. Specifically, it is a schematic diagram of a main part viewed from the X direction of FIG. The substrate holding device 101 holds the FPC 7 serving as a relay substrate from both sides to support the liquid crystal display panel 1 serving as an electro-optical panel, and a part of the surface of the liquid crystal display panel 1 opposite to the surface from which foreign matter is removed. A panel holding portion 101a that supports and supports the liquid crystal display panel 1 is provided. The substrate holding device 101 includes a slide mechanism 110 as a moving unit that moves the panel holding unit 101a in a desired direction. The slide mechanism 110 includes a vertical drive cylinder 109 that moves the cylinder fixed frame 106 up and down in the Z direction, a slide portion 110d on which the vertical drive cylinder 109 is disposed, and the slide portion 110d along the rail portion 110c in the Y direction. And a Y-axis drive motor 110b to be moved. In addition, a slide part 110e on which the rail part 110c is disposed and an X-axis drive motor 110a that moves the slide part 110e in the X direction along the rail part 110f are provided.

  FIG. 5 is a schematic view showing the panel holding portion, where FIG. 5 (a) is a front view and FIG. 5 (b) is a plan view. As shown in FIG. 5A, the panel holding unit 101a includes an upper holding unit 102 and a lower holding unit 103 as holding units for holding the FPC 7 protruding from the terminal unit 2b of the liquid crystal display panel 1 up and down in the Z direction. And a panel holding portion driving cylinder 107. The upper grip 102 is attached to the cylinder fixing frame 106 via a spring 108. The panel holding portion driving cylinder 107 is disposed on the upper portion of the cylinder fixing frame 106, and the rod 107a passes through the inside of the coiled spring 108 and the hole 102c of the upper gripping portion 102, and the rod tip portion 107b is lowered. It is fixed to the side grip portion 103.

  As shown in FIG. 5B, the upper gripping portion 102 has a U-shape when viewed from above, and has an arm portion 105 and a panel support portion 104 provided on the distal end side of the arm portion 105. is doing.

  The panel holding portion 101a sandwiches the FPC 7 protruding from the terminal portion 2b of the liquid crystal display panel 1 between the lower surface 102b of the upper holding portion 102 and the upper surface 103a of the lower holding portion 103, and the side surface 102a of the upper holding portion 102 is the terminal portion. The FPC 7 is gripped so as to contact the side end surface 2c of 2b. At the same time, the lower surface 104a of the panel support 104 is opposite to the peripheral portion of the surface 2a opposite to the surface 3a of the liquid crystal display panel 1 (the side facing the terminal portion as one side of the liquid crystal display panel 1 to which the FPC 7 is connected). Part) and support. As a result, the surface 3a of the liquid crystal display panel 1 faces downward in the Z direction and is held substantially parallel to the X direction. Therefore, since the mechanism is not configured to abut against and hold the surface 3a from which foreign matter is to be removed, the structure allows the surface 3a to be wiped with the wiping cloth 10 without any damage.

  Further, when removing the foreign matter adhering to the surface 2a of the liquid crystal display panel 1, the panel holding unit 101a causes the FPC 7 to face the lower surface 102b of the upper gripping portion 102 and the lower gripping portion 103 so that the surface 2a faces downward in the Z direction. The FPC 7 is gripped so that the side surface 103c of the lower gripping portion 103 is in contact with the side end surface 2c of the terminal portion 2b. At the same time, the lower surface 104a of the panel support 104 is in contact with and supported by the peripheral edge of the surface 3a opposite to the surface 2a. As a result, the surface 2a of the liquid crystal display panel 1 faces downward in the Z direction and is held in a state substantially parallel to the X direction. Therefore, since the panel holding part 101a does not contact and hold the surface 2a from which foreign matter is to be removed, it is possible to wipe the surface 2a with the wiping cloth 10 without any defects.

  As shown in FIG. 4B, in plan view, the display area 8 of the liquid crystal display panel 1 is located inside the U-shape of the panel holding portion 101a, and the display area 8 is any of the panel holding portions 101a. It has a structure that does not contact any part. That is, even if foreign matter or the like adheres to each part of the panel holding portion 101a, the foreign matter or the like is prevented from being transferred to at least the display area 8.

  As shown in FIG. 3, the cloth supply mechanism 111 includes a reel-shaped unwinding portion 113 that supports both ends of the belt-shaped wiping cloth 10 and supplies (unwinds) the wiping cloth 10, and a reel-shaped winding device. Part 114. The wiping cloth 10 is fed from the unwinding unit 113 and is wound around the winding unit 114 via the clamp rollers 116 to 120 attached in a rotatable state. The pressing portion 115 is attached to be positioned between the clamp roller 116 and the clamp roller 117, and supports the wiping cloth 10 upward from the lower surface in the Z direction. The clamp roller 117 is provided with a clamp cylinder 123 that applies tension to the wiping cloth 10 so as not to loosen by pressing the clamp roller 117 against the wiping cloth 10 in the X direction. An unwinding motor 121 is attached to the unwinding portion 113, and a unwinding motor 122 is attached to the winding portion 114. Each motor 121, 122 is, for example, a servo motor.

  The mechanical parts of the unwinding unit 113, the winding unit 114, the pressing unit 115, the clamp rollers 116 to 120, the clamping cylinder 123, and the motors 121 and 122 are all attached to the support plate 112. The support plate 112 is attached to a cross portion transport mechanism 141 provided at an angle 140 that is a part of the framework of the foreign matter removing apparatus 100. The cross portion transport mechanism 141 includes a rail 143 provided on the angle 140 and a slide portion 142 provided so as to be movable on the rail 143. The support plate 112 is attached to the slide portion 142 and is movable in the X direction.

  The cross supply mechanism 111 is covered with an exhaust hood 126 having an intake port 126b from which the pressing portion 115 protrudes from the opened portion and an exhaust port 126a connected to the exhaust device by piping.

  For the wiping cloth 10, it is preferable to use a belt-like cloth or tape in order to save the trouble of frequent replacement. The wiping cloth 10 used in the present embodiment is a microstar wiping roll (R) manufactured by Teijin Ltd., and each fiber is woven in a ratio of 70% polyester and 30% nylon. The width is approximately 40 mm, and the length is approximately 40 m. The wiping cloth 10 has unnecessary foreign matters removed and low dust generation and high foreign matter collecting performance. When the wiping cloth 10 is replaced with a new one, the cloth feeding mechanism 111 and the exhaust hood 126 are pulled out to the front of the apparatus in the X direction by the cloth conveyance mechanism 141, and the exhaust hood 126 attached in an openable / closable state is attached. A part is opened, and the winding part 114 and the unwinding part 113 around which the used wiping cloth 10 is wound are replaced with new ones.

  The dispenser 124 as a solvent application part is located on the supply side of the wiping cloth 10 with respect to the pressing part 115 protruding from the intake port 126 b of the exhaust hood 126 and is disposed outside the exhaust hood 126.

  FIG. 6 is a schematic view showing a solvent application unit. The solvent application unit is composed of a dispenser 124 having two nozzles 125. In the dispenser 124, a pipe is attached to the intake port 124a to introduce compressed air, and a pipe is attached to the intake port 124b to supply the solvent. be introduced. The introduced compressed air and solvent are mixed inside the dispenser 124 and discharged from the nozzle 125 toward the surface of the wiping cloth 10. The two nozzles 125 are attached to the dispenser 124 at an appropriate interval so that the discharged solvent is impregnated in the width direction of the wiping cloth 10. Since the solvent discharged from the nozzle 125 is mixed with compressed air, it is in a sprayed state so that the solvent can be applied evenly to the surface of the wiping cloth 10. Further, the direction, angle, nozzle diameter, and length of the nozzle 125 are adjusted so that the front wiping cloth 10 including the tip 115a side of the pressing part 115 in the supply direction of the wiping cloth 10 can be impregnated with the solvent. ing.

  FIG. 7 is a schematic perspective view showing the pressing portion. The main body of the pressing portion 115 is made of a metal such as stainless steel, which is a conductive hard member, and the tip portion 115a has a sword tip shape. Further, a soft member 115b such as a foamed urethane resin sheet is bonded and fixed over the length L so as to correspond to the width direction of the wiping cloth 10 at the distal end portion 115a. When the front surface 115a of the pressing portion 115 supports the wiping cloth 10 from the lower surface and presses the surfaces 2a and 3a of the liquid crystal display panel 1, the wiping cloth 10 is brought into close contact with the surfaces 2a and 3a to be wiped off. Is possible.

  The pressing portion 115 is fixed to the support plate 112 while being inclined with respect to the Z direction. This is because the surface of the liquid crystal display panel 1 is brought into surface contact when pressed against the wiping cloth 10. Note that a driving unit that changes the inclination angle of the pressing unit 115 may be provided on the support plate 112 in accordance with the movement direction in the X direction of the liquid crystal display panel 1 held by the panel holding unit 101a. Preferably, the wiping cloth 10 should be pressed in a direction in which the tip 115a is substantially perpendicular to the surface of the moving liquid crystal display panel 1. In this way, it is possible to maintain the surface contact state of the wiping cloth 10 in a substantially constant state with respect to changes in the moving direction of the liquid crystal display panel 1.

  FIG. 8 is a block diagram showing an electrical and mechanical configuration of the foreign matter removing apparatus. As shown in FIG. 8, the electrical and mechanical configuration of the foreign substance removal apparatus 100 includes a substrate holding device 101, a cross supply mechanism 111, a solvent application mechanism 130, a substrate holding device 101, and each mechanism 111, 130. It is roughly divided into a control unit 131 for controlling. The control unit 131 includes a calculation unit (CPU) 132 that performs calculation and execution instructions, a storage unit 133, a timer 134 that measures time, and a counter 135 that counts the number of times of wiping.

  In the substrate holding device 101, a vertical driving cylinder 109 for moving the panel holding portion 101a up and down in the Z direction is connected to a compressed air source 129 via an electromagnetic valve 109a. The electromagnetic valve 109a is electrically connected to the control unit 131. The panel holding portion driving cylinder 107 having the rod tip portion 107b fixed to the lower holding portion 103 is connected to a compressed air source 129 via an electromagnetic valve 107c. The electromagnetic valve 107c is electrically connected to the control unit 131. The X-axis drive motor 110a and the Y-axis drive motor 110b that move the panel holding unit 101a in the X and Y directions are electrically connected to the control unit 131, respectively. The control unit 131 electrically opens and closes the electromagnetic valve 109a to send the compressed air to the vertical drive cylinder 109 to move the panel holding unit 101a up and down in the Z direction. Further, by opening and closing the electromagnetic valve 107 c, compressed air is sent to the panel holding unit driving cylinder 107, and the lower gripping part 103 is moved to grip the FPC 7 with the upper gripping part 102. Further, the X axis driving motor 110a and the Y axis driving motor 110b are driven to move the panel holding portion 101a in the X and Y directions. The slide mechanism 110 of the substrate holding device 101 is provided with a plurality of sensors (not shown) for detecting the position of the liquid crystal display panel 1 in order to position the liquid crystal display panel 1 at predetermined positions in the X, Y, and Z directions. It has been. As the sensor, a light sensitive type, a contact type, an electromagnetic type, or the like can be adopted. Of course, these sensors are also electrically connected to the control unit 131.

  In the cross supply mechanism 111, the unwinding motor 121 that drives the unwinding unit 113 has an encoder 121 a inside, and both are electrically connected to the control unit 131. A winding motor 122 that drives the winding unit 114 is electrically connected to the control unit 131. The clamping cylinder 123 is connected to the compressed air source 129 through an electromagnetic valve 123a. The electromagnetic valve 123a is electrically connected to the control unit 131. The controller 131 supplies the wiping cloth 10 by driving the unwinding motor 121 and the winding motor 122. Further, the rotation number of the unwinding motor 121 is stored in the storage unit 133 as needed based on the signal from the encoder 121a, and the unwinding amount due to the rotation of the unwinding motor 121 is calculated by the calculation unit 132, so that a predetermined winding is performed. The unwinding motor 121 is driven so as to obtain the unloading amount. Further, the winding motor 122 is driven in accordance with the rotation of the unwinding motor 121. Furthermore, the end point of the wiping cloth 10 is predicted from the accumulated number of revolutions stored in the storage unit 133, and an alarm lamp (not shown) for notifying the end point detection is turned on. The control unit 131 opens and closes the electromagnetic valve 123a to send compressed air to the clamping cylinder 123, and moves the clamp roller 117 in the X direction to apply tension to the wiping cloth 10.

  The solvent application mechanism 130 includes a solvent tank 127 that stores a solvent, two electromagnetic valves 124 c and 128, and a dispenser 124. The solvent tank 127 is connected to a compressed air source 129 via an electromagnetic valve 128. The solvent tank 127 is connected to the dispenser 124 by a pipe, and the solvent is sent through the pipe. The dispenser 124 is connected to the compressed air source 129 via an electromagnetic valve 124c. The electromagnetic valve 124c is electrically connected to the control unit 131. The controller 131 opens and closes the electromagnetic valve 128 to send the compressed air to the solvent tank 127, and the stored solvent is sent to the dispenser 124. Further, the electromagnetic valve 124 c is opened and closed to send pressurized air to the dispenser 124, and the sent pressurized air is mixed with a solvent in the dispenser 124 and discharged from the nozzle 125. The control unit 131 reads the wiping operation program and the corresponding solvent application program stored in the storage unit 133, sends the solvent application timing to the electromagnetic valve 124c as an electrical signal, and wipes the solvent from the dispenser 124. 10 is applied.

  In the foreign matter removing apparatus 100 according to the present embodiment, the control unit 131 first presses the wiping cloth 10 against one end of the surface of the substrate of the liquid crystal display panel 1 with the tip 115 a of the pressing unit 115. The panel holding portion 101a is moved in the direction of wiping, and the first wiping operation in which the tip portion 115a of the pressing portion 115 relatively passes through the other end portion on the opposite side of the one end portion of the surface of the substrate. Repeat three times. Next, the substrate holding device 101 is moved in the second wiping direction opposite to the first wiping direction with the wiping cloth 10 pressed against the other end of the surface of the substrate by the tip 115a of the pressing portion 115. Thus, the second wiping operation in which the distal end portion 115a of the pressing portion 115 relatively passes through the one end portion of the surface of the substrate is performed three times. Further, the unwinding motor 121 and the winding motor 122 of the cloth supply mechanism 111 are driven so that the portion of the wiping cloth 10 to be pressed is updated every wiping operation. Further, before the first wiping operation of the first and second wiping operations is performed, the wiping cloth 10 is impregnated by discharging the solvent from the dispenser 124.

(Foreign matter removal method)
Next, a foreign matter removing method using the foreign matter removing apparatus of the present embodiment will be described with reference to FIGS. FIG. 9 is a flowchart showing a foreign matter removing method, and FIGS. 10A to 10D and 11E to 11H are schematic views of the foreign matter removing apparatus showing the foreign matter removing method.

  As shown in FIG. 9, the foreign matter removing method of the present embodiment includes a panel transport positioning step in which the surface of the liquid crystal display panel 1 is directed downward and the liquid crystal display panel 1 and the wiping cloth 10 are arranged to face each other at a predetermined position. I have. Further, the liquid crystal display panel 1 is relatively moved in the first wiping direction in a state where the wiping cloth 10 is pressed to one end portion of the surface of the liquid crystal display panel 1 which is disposed to be opposed to the predetermined position. , A first wiping step in which the pressed wiping cloth 10 part passes through the other end of the surface of the liquid crystal display panel 1 three times, and the other end of the surface of the liquid crystal display panel 1 In a state where the wiping cloth 10 is pressed, the liquid crystal display panel 1 is relatively moved in the second wiping direction opposite to the first wiping direction, and the pressed wiping cloth 10 is at one end. And a second wiping step for performing the wiping operation of passing through 3 times.

  Further, in the first wiping step and the second wiping step, a step of updating the portion of the wiping cloth 10 that is pressed against the surface of the liquid crystal display panel 1 by the tip portion 115a of the pressing portion 115 for each wiping operation. Contains. In addition, a solvent application step of applying a solvent to the surface of the wiping cloth 10 before performing the first wiping operation is provided.

  Step S1 in FIG. 9 is a panel transport positioning step. In step S1, as shown in FIG. 10A, the control unit 131 opens the electromagnetic valve 107c of the substrate holding device 101, drives the panel holding unit driving cylinder 107, and causes the panel holding unit 101a to display a liquid crystal display panel. 1 is held. In this case, the surface 3a is held downward in the Z direction so as to remove foreign matters attached to the surface 3a of the liquid crystal display panel 1. Then, the control unit 131 drives the X-axis driving motor 110a and the Y-axis driving motor 110b to move the panel holding unit 101a, and the liquid crystal display panel 1 is placed at a predetermined position where the surface 3a faces the wiping cloth 10. Is transported and positioned. Then, the process proceeds to step S2.

  Step S2 in FIG. 9 is a solvent coating process. In step S2, as shown in FIG. 10A, the control unit 131 opens the electromagnetic valves 128 and 124c of the solvent application mechanism 130 to send the solvent 11 from the solvent tank 127 to the dispenser 124 and from the pressurized air source 129 to the dispenser. The compressed air is sent to 124, and the solvent 11 is applied (sprayed) to the wiping cloth 10 from the nozzle 125 of the dispenser 124. The controller 131 activates the timer 134 to apply the solvent 11 at a predetermined set time, and then closes the electromagnetic valves 128 and 124c to end the solvent application. Step S2 may proceed simultaneously with the panel holding and positioning step of step S1. In addition, although the organic solvent acetone was used as the solvent 11, it is preferable to use the organic solvent which has moderate volatility and degreasing power. The solvent 11 may be alcohols, ketones, or a mixture of these organic solvents. Then, the process proceeds to step S3.

  Step S3 in FIG. 9 is a step of pressing the surface of the liquid crystal display panel 1 against the wiping cloth 10. In step S3, as shown in FIG. 10B, the control unit 131 opens and closes the electromagnetic valve 109a of the substrate holding device 101 to drive the vertical drive cylinder 109, and lowers the panel holding unit 101a in the Z direction. Let Then, one end portion 3c of the surface 3a of the liquid crystal display panel 1 is pressed against the portion of the wiping cloth 10 supported by the tip portion 115a of the pressing portion 115. In this case, the wiping cloth 10 is set to be pressed against one end 3c on the surface 3a in order to prevent the wiping cloth 10 from being damaged by the edge of the peripheral edge of the counter substrate 3 of the liquid crystal display panel 1. Has been. Then, the process proceeds to Step S4.

  Step S4 in FIG. 9 is a panel sliding step in which the liquid crystal display panel 1 is slid in the wiping direction with respect to the wiping cloth 10. In step S4, as shown in FIGS. 10B and 10C, the control unit 131 uses the wiping cloth 10 pressed against one end 3c of the surface 3a of the liquid crystal display panel 1 to drive the X-axis. The motor 110a is driven to move the panel holding portion 101a in the first wiping direction in the X direction, and is stopped when the tip portion 115a of the pressing portion 115 relatively passes the other end portion 3b of the surface 3a. As a result, the surface 3a is completely wiped with the wiping cloth 10, and a wiping operation is performed to remove the adhered foreign matter. Then, the process proceeds to step S5.

  Step S5 in FIG. 9 is a step of updating the portion of the wiping cloth 10 that is pressed. In step S5, as shown in FIG. 10 (d), the control unit 131 opens and closes the electromagnetic valve 109a to drive the vertical drive cylinder 109, and raises the panel holding unit 101a in the Z direction. Then, the unwinding motor 121 and the winding motor 122 are driven, and the wiping cloth 10 is sent out from the unwinding portion 113 by a predetermined length, and is wound around the winding portion 114. Thereby, the part of the wiping cloth 10 to be pressed is updated to an unused state. Then, the process proceeds to step S6.

  Step S6 in FIG. 9 is a step of determining the number of cleanings by the wiping operation (the number of wiping operations). In step S6, the control unit 131 determines whether or not the wiping operation has been performed a predetermined number of times. In this case, since the predetermined number of times in the first wiping process is set to three times, the control unit 131 reads the number of times counted by the counter 135 and returns to step S3 if the number of times is not finished. Repeat the wiping operation. If completed three times, the process proceeds to step S7.

  Step S7 in FIG. 9 is a panel transport positioning step for positioning the liquid crystal display panel 1 at a predetermined position, similar to the previous step S1. In step S7, in this case, as shown in FIG. 11E, the control unit 131 presses the other end 3b on the surface 3a of the liquid crystal display panel 1 opposite to the one end 3c described above. The X-axis driving motor 110a is driven to move the panel holding portion 101a to a predetermined position facing the tip portion 115a of the portion 115. Then, the process proceeds to step S8.

  Step S8 in FIG. 9 is a solvent application process. In step S <b> 8, as shown in FIG. 11E, the control unit 131 applies the solvent 11 to the wiping cloth 10 from the nozzle 125 of the dispenser 124. The details are the same as in step S2, and will not be described. Then, the process proceeds to step S9.

  Step S9 in FIG. 9 is a step of pressing the surface 3a of the liquid crystal display panel 1 against the wiping cloth 10. In step S9, as shown in FIG. 11 (f), the control unit 131 opens and closes the electromagnetic valve 109a to drive the vertical drive cylinder 109, and lowers the panel holding unit 101a in the Z direction. Accordingly, the other end 3b of the surface 3a of the liquid crystal display panel 1 is pressed against the portion of the wiping cloth 10 supported by the tip 115a of the pressing portion 115. Then, the process proceeds to step S10.

  Step S <b> 10 in FIG. 9 is a panel sliding step in which the liquid crystal display panel 1 is slid with respect to the wiping cloth 10. In step S10, as shown in FIGS. 11 (f) and 11 (g), the control unit 131 uses the wiping cloth 10 pressed against the other end 3b of the surface 3a of the liquid crystal display panel 1 to drive the X-axis. The motor 110a is driven to move the panel holding portion 101a in the second wiping direction opposite to the first wiping direction in the X direction, and the tip 115a of the pressing portion 115 is relatively positioned at one end of the surface 3a. Stop after passing through part 3c. As a result, the surface 3a is completely wiped with the wiping cloth 10, and a wiping operation is performed to remove the adhered foreign matter. Then, the process proceeds to step S11.

  Step S11 in FIG. 9 is a step of updating the portion of the wiping cloth 10 to be pressed. In step S11, as shown in FIG. 11 (h), the control unit 131 opens and closes the electromagnetic valve 109a to drive the vertical drive cylinder 109, and raises the panel holding unit 101a in the Z direction. Then, the unwinding motor 121 and the winding motor 122 are driven, and the wiping cloth 10 is sent out from the unwinding portion 113 by a predetermined length, and is wound around the winding portion 114. Thereby, the part of the wiping cloth 10 to be pressed is updated to an unused state. Then, the process proceeds to step S12.

  Step S12 in FIG. 9 is a step of determining the number of times of cleaning by the wiping operation. In step S12, the control unit 131 determines whether or not the wiping operation has been performed a predetermined number of times. In this case, since the predetermined number of times in the second wiping process is set to three times, the control unit 131 reads the number of times counted by the counter 135 and returns to step S9 if the number of times is not finished. Repeat the wiping operation. If it is finished three times, the wiping operation is finished.

  The removal of the foreign matter adhering to the surface 3a of the liquid crystal display panel 1 is completed through the above steps. Of course, when removing the foreign matter adhering to the surface 2a opposite to the surface 3a, the liquid crystal display panel 1 is held on the panel holding portion 101a so that the surface 2a faces downward in the Z direction. Step S12 may be performed. Alternatively, two foreign substance removing devices 100 may be prepared, and in one apparatus, foreign substances attached to the surface 3a may be removed, and in the other apparatus, foreign substances attached to the surface 2a may be removed.

  In the foreign matter removing method of the present embodiment, the wiping operation is performed three times in the first direction in the first wiping step, and the wiping operation is performed three times in the second direction opposite to the first direction in the second wiping step. I do. Therefore, even if there is a portion that cannot be wiped off at one end 3c of the surface of the liquid crystal display panel 1 in the first wiping step, the portion that could not be wiped off earlier in the second wiping step is wiped off. The operation is such that it can be wiped off thoroughly.

  Further, the wiping cloth 10 pressed against the surface of the liquid crystal display panel 1 is updated every wiping operation, and the wiping operation is always performed with the unused wiping cloth 10. Therefore, it is possible to reduce a problem that the wiped foreign matter is reattached to the surface of the liquid crystal display panel 1. Furthermore, the solvent 11 is applied to the surface of the unused wiping cloth 10 before the first wiping step and the second wiping step are started. Therefore, simultaneously with the removal of the foreign matter, the soil soluble in the solvent 11 is also removed. In addition, the solvent application step is performed once before the wiping operation that is performed three times is started. Therefore, in the second and subsequent times, the surface wiping operation is performed by the unused portion of the wiping cloth 10 to which the solvent is not applied. Therefore, even if the solvent remains on the surface in the first wiping operation, the second and subsequent times. It is possible to dry. That is, it is possible to make the surface clean without causing stains due to the solvent.

  In the foreign matter removing method of the present embodiment, even if the FPC 7 as a relay substrate is connected to the liquid crystal display panel 1, the panel holding unit 101a holds the liquid crystal display panel 1 by holding the FPC 7 from both sides. Sometimes, the foreign matter and dirt attached to the surface of the liquid crystal display panel 1 are removed without the wiping cloth 10 touching the FPC 7.

(Manufacturing method of liquid crystal display device as electro-optical device)
The manufacturing method of the liquid crystal display device 20 includes a step of removing foreign matter adhering to the surface of the liquid crystal display panel 1, and dust-proof glasses 21 and 22 as transparent substrates on the light incident side and light emission side surfaces of the liquid crystal display panel 1. And a process of assembling the liquid crystal display panel 1 in a case 23 serving as a housing. In the step of removing the foreign matter, before the dust-proof glasses 21 and 22 are mounted, the foreign matter and dirt adhering to the surfaces of the substrates 2 and 3 are removed to make the surface clean. In the step of attaching the dustproof glasses 21 and 22, the dustproof glasses 21 and 22 are attached to the liquid crystal display panel 1 having a clean surface using an adhesive. In the assembly process, the liquid crystal display panel 1 on which the dustproof glasses 21 and 22 are mounted is accommodated in the case 23 and the metal frame 25 is attached. The manufacturing method of the liquid crystal display device 20 of the present embodiment uses the foreign matter removing apparatus 100 of the above embodiment in the step of removing foreign matter. In the liquid crystal display panel 1, driver ICs 4, 5, 6 and an FPC 7 are disposed as electronic components. The foreign matter removing apparatus 100 can wipe off the surface with the wiping cloth 10 so as not to affect these electronic components and remove the foreign matter and dirt. The device 20 can be manufactured.

The effects of this embodiment are as follows.
(1) In the foreign matter removing apparatus 100 of the present embodiment, the panel holding unit 101a supports the liquid crystal display panel 1 by holding the FPC 7 from both sides and is opposite to the surface of the liquid crystal display panel 1 from which the foreign matter is to be removed. The liquid crystal display panel 1 is held by supporting the peripheral edge of the surface. Accordingly, since the portion for holding the liquid crystal display panel 1 is not in contact with the surface side of the liquid crystal display panel 1 from which the foreign matter is to be removed, the front surface of the pressing portion 115 is placed on the surface from which the foreign matter is to be removed. The part 115a can be pressed and wiped without wrinkles. Therefore, even if the liquid crystal display panel 1 has the FPC 7, the panel holding part 101a can remove foreign substances adhering to the surface without being disturbed in the wiping operation. Further, since the surface of the liquid crystal display panel 1 is disposed so as to face the wiping cloth 10 downward, the wiping cloth 10 generated by the wiping operation is compared with the case where the surface from which foreign matter is to be removed is upward. It is possible to reduce the generation of dust and the removed foreign matter from the wiping cloth 10 and reattaching to the surface of the liquid crystal display panel 1. In other words, a foreign matter removing apparatus 100 is provided that removes foreign matter adhering by wiping the surfaces of the substrates 2 and 3 of the liquid crystal display panel 1 thoroughly and reducing dust generation from the wiping cloth 10 and reattachment of the removed foreign matter. can do.

  (2) The foreign matter removing device 100 is located on the supply side of the wiping cloth 10 with respect to the pressing part 115 and includes a dispenser 124 as a solvent application part that applies a solvent to the surface of the wiping cloth 10. Accordingly, the wiping cloth 10 impregnated with the solvent is pressed against the surface of the liquid crystal display panel 1, and the controller 131 performs a wiping operation to adhere to the surfaces 2a and 3a of the liquid crystal display panel 1. In addition to removing foreign matter, dirt attached to the surfaces 2a and 3a can be removed at the same time.

  (3) In the foreign matter removing apparatus 100, the cross supply mechanism 111 is covered with an exhaust hood 126 having an intake port 126b and an exhaust port 126a protruding from a portion where the pressing portion 115 is opened. Therefore, if the exhaust port 126a is connected to the exhaust device by piping, the dust generated by the wiping cloth 10 generated during the wiping operation or the removed foreign matter is sucked together with the surrounding air from the intake port 126b and exhausted from the exhaust port 126a. can do. That is, it is possible to provide the foreign matter removing apparatus 100 in which dust generation from the wiping cloth 10 and removed foreign matter are further prevented from reattaching to the surface of the liquid crystal display panel 1.

  (4) In the foreign matter removing apparatus 100, a soft member 115 b is provided at the distal end portion 115 a of the pressing portion 115 so as to correspond to the width direction of the wiping cloth 10. Therefore, when the surface of the liquid crystal display panel 1 is pressed against the wiping cloth 10 supported by the tip portion 115a, the surface and the pressed part of the wiping cloth 10 are more closely adhered to each other, and the surface is wiped with the wiping cloth 10. It can be wiped off evenly. Further, since the main body of the pressing portion 115 is made of a conductive metal, static electricity generated by friction between the surface and the wiping cloth 10 can be released to the pressing portion 115 side. That is, it is possible to reduce foreign matters such as dust due to static electricity from reattaching to the surface, and it is possible to reduce surface destruction due to static electricity of the substrates 2 and 3 constituting the liquid crystal display panel 1.

  (5) In the foreign matter removing method of the present embodiment using the foreign matter removing device 100, the surface of the liquid crystal display panel 1 from which foreign matter is to be removed is wiped in the first wiping direction in the first wiping step. Later, in the second wiping step, a wiping operation is performed in a second wiping direction opposite to the first wiping direction. Therefore, even if there is a portion that cannot be wiped off at one end of the surface of the liquid crystal display panel 1 in the first wiping step, the surface including the portion that could not be wiped off earlier in the second wiping step is wiped off. It is possible to remove foreign matters and dirt adhered by wiping without hesitation.

  (6) Since the foreign matter removing method of the present embodiment includes a step of updating the portion of the wiping cloth 10 that is pressed every time the wiping operation is performed, on the surface of the wiping cloth 10 that is always unused, The foreign matter adhering to the surface of the liquid crystal display panel 1 can be removed. That is, it is possible to reduce the removed foreign matter and dirt from reattaching to the surface.

  (7) In the foreign matter removing method of the present embodiment, the liquid crystal display panel 1 and the wiping cloth 10 are relatively slid in either one of the first wiping direction and the second wiping direction. Therefore, since the wiping direction is not changed in a state where the surface of the liquid crystal display panel 1 is pressed against the wiping cloth 10, it is possible to reduce the generation of dust generated by the pressed wiping cloth 10 being pulled in different directions. .

  (8) The foreign matter removing method of the present embodiment starts the wiping operation after pressing one end of the surface of the liquid crystal display panel 1 against the wiping cloth 10, and the pressing portion 115 relatively moves the other end. The wiping operation stops at the passed position. Therefore, since the edge of the side end portion of the liquid crystal display panel 1 is not wiped off so as to enter the wiping cloth 10, the wiping cross 10 is damaged by the edge of the side end portion to generate dust, or in the worst case, the rupture is broken. Can be reduced.

  (9) In the method of manufacturing the liquid crystal display device 20 of the present embodiment, the surface of the liquid crystal display panel 1 is thoroughly wiped using the foreign matter removing device 100 to remove the attached foreign matter and dirt, and then the liquid crystal display panel 1 The dust-proof glasses 21 and 22 are attached to the surfaces on the light incident side and light emitting side. Accordingly, it is possible to manufacture the liquid crystal display device 20 including the dust-proof glasses 21 and 22 with reduced yield by reducing foreign matter defects and dirt defects.

Modifications other than the above embodiment are as follows.
(Modification 1) In the foreign substance removal apparatus 100, the structure in which the surface of the liquid crystal display panel 1 and the wiping cloth 10 are slid relative to each other is not limited to the above embodiment. The cross supply mechanism 111 and the pressing unit 115 may be integrated with the liquid crystal display panel 1 arranged at a predetermined position, and the cross transport mechanism 141 may be moved and slid. Further, both the substrate holding device 101 and the cross portion transport mechanism 141 may be moved and slid.

  (Modification 2) The structure of the panel holding portion 101a is not limited to the above embodiment. For example, the FPC 7 is gripped from both sides by the upper gripping portion 102 and the lower gripping portion 103, and the panel support portion 104 supports the side end surface of the liquid crystal display panel 1 on the side opposite to the side where the FPC 7 is provided. The display panel 1 may be held. In this way, it is possible to hold the liquid crystal display panel 1 in a state where the panel support 104 does not touch the surface from which foreign matter is to be removed. That is, the surface can be wiped off with the wiping cloth 10 without being obstructed by the panel holding portion 101a. Further, when removing foreign matter only on one surface of the liquid crystal display panel 1, it is possible to support any part of the opposite surface. For example, the liquid crystal display panel 1 can be supported by attaching a suction pad to the arm unit 105 and vacuum-sucking the opposite surface. Furthermore, if the FPC 7 is gripped by the upper gripping portion 102 and the lower gripping portion 103 as gripping portions, the panel support portion 104 and the arm portion 105 are not required if they can be gripped in a substantially horizontal state. it can.

  (Modification 3) In the foreign matter removal method using the foreign matter removal apparatus 100, the method of wiping the wiping cloth 10 against one end of the surface of the liquid crystal display panel 1 is not limited to the above embodiment. For example, the first wiping step and the second wiping step may be reversed. Moreover, it is not always necessary to perform wiping three times. For example, the wiping operation may be performed three times in the first wiping step, and the single wiping operation may be performed in the second wiping step. Alternatively, the wiping operation may be performed once each.

  (Modification 4) In the foreign matter removal method using the foreign matter removal apparatus 100, the solvent application step may be performed once every time after the step of renewing the wiping cloth 10 every time the wiping operation is performed.

(A) is a schematic perspective view which shows a liquid crystal display device, (b) is sectional drawing cut | disconnected by the AA line of (a). (A) is a front view which shows a liquid crystal surface panel, (b) is a side view which shows a liquid crystal display panel. The schematic diagram which shows the principal part structure of a foreign material removal apparatus. The schematic diagram which shows a board | substrate holding | maintenance apparatus. (A) is a schematic front view which shows a panel holding part, (b) is a schematic plan view which shows a panel holding part. Schematic which shows a solvent application part. The schematic perspective view which shows a press part. The block diagram which shows the electrical and mechanical structure of a foreign material removal apparatus. The flowchart which shows the foreign material removal method. (A)-(d) is the schematic of the foreign material removal apparatus which shows the foreign material removal method. (E)-(h) is the schematic of the foreign material removal apparatus which shows the foreign material removal method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Liquid crystal display panel as an electro-optical panel, 2 ... Element board | substrate as a board | substrate, 2a ... The surface of the element board | substrate as a surface of a board | substrate, 3 ... Counter board | substrate as a board | substrate, 3a ... DESCRIPTION OF SYMBOLS 3b ... One edge part of the surface of a board | substrate, 3c ... The other edge part of the surface of a board | substrate, 7 ... FPC as a relay substrate, 10 ... Wiping cloth, 11 ... Solvent, 20 ... Liquid crystal display device as an electro-optical device DESCRIPTION OF SYMBOLS 21,22 ... Dust-proof glass as a transparent substrate, 23 ... Case as a housing | casing, 100 ... Foreign substance removal apparatus, 101a ... Panel holding part, 102 ... Upper side holding part as a holding part, 103 ... Lower side as a holding part Gripping part 104 ... Panel support part 110 ... Sliding mechanism as moving means 111 ... Cross feeding mechanism as cross feeding means, 115 ... Pressing part, 115a ... Tip part of pressing part, 15b ... soft member, 124 ... dispenser as solvent coating unit, 125 ... nozzle, 126 ... exhaust hood, 126a ... exhaust port, 126b ... inlet.

Claims (8)

A foreign matter removing device that removes foreign matter attached to the surface of the electro-optic panel substrate to which the relay substrate is electrically connected ,
A panel holding portion for holding the surface of the substrate facing downward;
Cloth supply means arranged to face the surface of the substrate held by the panel holding portion so as to face the wiping cloth and to support and supply both ends of the wiping cloth;
A pressing portion that is located between the surface of the substrate and the surface of the substrate, and that supports the wiping cross from the lower surface of the wiping loss toward the surface of the substrate across the width direction of the wiping cross; ,
Moving means for moving at least one of the panel holding part and the wiping cloth supported by the pressing part in a wiping direction capable of wiping the surface of the substrate;
In a state where the wiping cloth is pressed against the surface of the substrate by the tip of the pressing portion, the moving means is controlled to move the substrate and the wiping cloth relative to each other in the wiping direction. And a controller that performs a wiping operation for wiping the surface of the substrate.
The panel holding unit holds the electro-optical panel by holding the relay substrate and supporting the electro-optical panel, and supporting a part of the surface opposite to the surface of the substrate. Foreign matter removal device.   The panel holding portion includes a gripping portion for gripping the relay substrate connected to one side of the electro-optic panel from both sides, and at least a side of the side opposite to the one side of the surface opposite to the surface of the substrate. 2. The foreign matter removing apparatus according to claim 1, further comprising a panel support portion that contacts and supports a part of the electro-optical panel, wherein the electro-optical panel is held by the grip portion and the panel support portion. The foreign matter removing apparatus according to claim 2, wherein the moving unit moves the grip portion and the panel support portion simultaneously in the wiping direction. A solvent application unit that is located on the supply side of the wiping cloth with respect to the pressing unit and that applies a solvent to the wiping cloth,
Wherein the control unit 1 through claim, characterized in that impregnating by discharging the solvent from the solvent coating unit to the wiping cloth before the portion including the distal end portion side of the pressing portion in the supply direction of the wiping cloth The foreign matter removing apparatus according to any one of claims 3 to 4 .   The foreign matter removing apparatus according to claim 4, wherein the solvent application unit discharges the solvent and air from a nozzle onto the surface of the wiping cloth in a mixed state.   The control unit controls the moving unit to relatively move the substrate and the wiping cloth in a state where the wiping cloth is pressed to one end of the surface of the substrate by the tip of the pressing unit. At least one first wiping operation in which the tip end portion of the pressing portion relatively moves through the other end portion on the opposite side of the one end portion of the surface of the substrate. After the rotation, the moving means is controlled so that the substrate and the wiping cloth are relative to each other while the wiping cloth is pressed to the other end of the surface of the substrate by the tip of the pressing portion. To the second wiping direction opposite to the first wiping direction, and the second wiping operation in which the tip of the pressing portion relatively passes through the one end is performed at least once. That is characterized by Foreign matter removing apparatus according to any one of claims 1 to 5.   The said control part controls the said cloth supply means so that the part of the said wiping cloth pressed by the front-end | tip part of the said press part may be updated for every wiping operation | movement. The foreign substance removal apparatus as described in any one of Claims. A method of manufacturing an electro-optical device including an electro-optical panel to which a relay board is electrically connected,
A step of removing foreign matter adhered to the surface of the substrate of the electro-optical panel using foreign matter removing apparatus according to any one of claims 1 to 7,
Mounting a transparent substrate on at least one surface of both surfaces of the electro-optic panel;
And an assembling step of housing the electro-optical panel on which the transparent substrate is mounted in a housing.

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