JP4365398B2 - 電界放出素子及びその製造方法 - Google Patents
電界放出素子及びその製造方法 Download PDFInfo
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- JP4365398B2 JP4365398B2 JP2006298134A JP2006298134A JP4365398B2 JP 4365398 B2 JP4365398 B2 JP 4365398B2 JP 2006298134 A JP2006298134 A JP 2006298134A JP 2006298134 A JP2006298134 A JP 2006298134A JP 4365398 B2 JP4365398 B2 JP 4365398B2
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- carbon nanotube
- field emission
- emission device
- substrate
- conductive adhesive
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- 238000004519 manufacturing process Methods 0.000 title claims description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 69
- 239000002041 carbon nanotube Substances 0.000 claims description 67
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 67
- 239000000853 adhesive Substances 0.000 claims description 27
- 230000001070 adhesive effect Effects 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 25
- 239000000126 substance Substances 0.000 claims description 4
- 238000004804 winding Methods 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 2
- 238000004381 surface treatment Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 16
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 230000001788 irregular Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 229940116411 terpineol Drugs 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30469—Carbon nanotubes (CNTs)
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
Description
「Spinning Continuous CNT Yarns」、Nature、▲ハン▼守善など、2002年、419巻、801ページ
10 基体
12 カーボンナノチューブ・ヤーン
14 導電接着剤
Claims (5)
- 基体と、少なくとも一本のカーボンナノチューブ・ヤーンと、導電接着剤とを備える電界放出素子であって、前記カーボンナノチューブ・ヤーンは、前記基体の表面に巻き付き、且つ前記導電接着剤の作用により基体の表面に固定されることを特徴とする電界放出素子。
- 前記導電接着剤は、導電パルプと導電粘着剤とを備えることを特徴とする請求項1に記載の電界放出素子。
- 基体を提供するステップと、
前記基体に導電接着剤を塗るステップと、
前記基体の表面に少なくとも一本のカーボンナノチューブ・ヤーンを巻き付くステップと、
導電接着剤を固化することにより、カーボンナノチューブ・ヤーン電界放出素子を形成するステップとを備える電界放出素子の製造方法。 - 巻き付く前のカーボンナノチューブ・ヤーンを化学溶剤に浸し、カーボンナノチューブ・ヤーンを縮ませるステップを更に備えることを特徴とする請求項3に記載の電界放出素子の製造方法。
- 電界放出素子に対して表面処理を行い、カーボンナノチューブが先端を現すことにするステップを更に備えることを特徴とする請求項3に記載の電界放出素子の製造方法。
Applications Claiming Priority (1)
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CNB2005101010285A CN100555529C (zh) | 2005-11-04 | 2005-11-04 | 一种场发射元件及其制备方法 |
Publications (2)
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JP2007128892A JP2007128892A (ja) | 2007-05-24 |
JP4365398B2 true JP4365398B2 (ja) | 2009-11-18 |
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JP2006298134A Active JP4365398B2 (ja) | 2005-11-04 | 2006-11-01 | 電界放出素子及びその製造方法 |
Country Status (3)
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US (1) | US7550907B2 (ja) |
JP (1) | JP4365398B2 (ja) |
CN (1) | CN100555529C (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100543905C (zh) * | 2005-09-30 | 2009-09-23 | 北京富纳特创新科技有限公司 | 一种场发射装置及其制备方法 |
CN1949449B (zh) * | 2005-10-14 | 2010-09-29 | 北京富纳特创新科技有限公司 | 电子发射器件 |
CN1988108B (zh) * | 2005-12-23 | 2010-09-01 | 清华大学 | 场发射阴极及照明装置 |
CN101086939B (zh) * | 2006-06-09 | 2010-05-12 | 清华大学 | 场发射元件及其制备方法 |
CN101192493B (zh) * | 2006-11-22 | 2011-02-02 | 鸿富锦精密工业(深圳)有限公司 | 阳极装置及其制造方法 |
CN101192490B (zh) * | 2006-11-24 | 2010-09-29 | 清华大学 | 表面传导电子发射元件以及应用表面传导电子发射元件的电子源 |
CN101192494B (zh) * | 2006-11-24 | 2010-09-29 | 清华大学 | 电子发射元件的制备方法 |
CN101471329B (zh) * | 2007-12-29 | 2012-06-20 | 清华大学 | 半导体封装件 |
TWI455260B (zh) * | 2007-12-31 | 2014-10-01 | Hon Hai Prec Ind Co Ltd | 半導體封裝件 |
CN101499389B (zh) | 2008-02-01 | 2011-03-23 | 鸿富锦精密工业(深圳)有限公司 | 电子发射器件 |
CN101538031B (zh) * | 2008-03-19 | 2012-05-23 | 清华大学 | 碳纳米管针尖及其制备方法 |
CN101868071A (zh) * | 2009-04-20 | 2010-10-20 | 清华大学 | 线热源 |
US7988893B2 (en) * | 2008-09-18 | 2011-08-02 | Tsinghua University | Method for fabricating carbon nanotube yarn |
TWI386366B (zh) * | 2008-10-03 | 2013-02-21 | Hon Hai Prec Ind Co Ltd | 奈米碳管紗的製備方法 |
CN101880035A (zh) | 2010-06-29 | 2010-11-10 | 清华大学 | 碳纳米管结构 |
CN102372255B (zh) | 2010-08-23 | 2013-11-20 | 清华大学 | 碳纳米管复合线状结构的制备装置及其制备方法 |
CN102372252B (zh) * | 2010-08-23 | 2016-06-15 | 清华大学 | 碳纳米管复合线及其制备方法 |
US8491970B2 (en) * | 2010-09-29 | 2013-07-23 | Teledyne Scientific & Imaging, Llc | Vertically aligned carbon nanotube arrays from liquid dispersions |
CN102013376B (zh) | 2010-11-29 | 2013-02-13 | 清华大学 | 场发射单元及场发射像素管 |
KR101956153B1 (ko) | 2018-10-04 | 2019-06-24 | 어썸레이 주식회사 | 탄소나노튜브를 포함하는 얀의 제조방법 및 이로부터 제조된 얀 |
KR101962215B1 (ko) | 2018-11-30 | 2019-03-26 | 어썸레이 주식회사 | 일 방향으로 정렬된 얀을 포함하는 탄소나노튜브 시트를 제조하는 방법 및 이에 의해 제조된 탄소나노튜브 시트 |
KR101992745B1 (ko) * | 2019-01-24 | 2019-06-26 | 어썸레이 주식회사 | 구조적 안정성이 우수하고 전자 방출 효율이 향상된 이미터 및 이를 포함하는 x-선 튜브 |
KR102099410B1 (ko) | 2019-04-04 | 2020-04-09 | 어썸레이 주식회사 | 세라믹계 소재로 이루어진 집속전극을 포함하는 x-선 발생장치 |
KR102099411B1 (ko) | 2019-07-26 | 2020-04-09 | 어썸레이 주식회사 | 구조적 안정성이 우수한 전계 방출 장치 및 이를 포함하는 x-선 튜브 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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HU197460B (en) * | 1986-12-12 | 1989-03-28 | Philips Nv | High-pressure gas-discharge lamp with improved electrode |
US6511527B2 (en) * | 2001-02-06 | 2003-01-28 | Ngk Insulators, Ltd. | Method of treating exhaust gas |
CN1282216C (zh) * | 2002-09-16 | 2006-10-25 | 清华大学 | 一种灯丝及其制备方法 |
CN100411979C (zh) | 2002-09-16 | 2008-08-20 | 清华大学 | 一种碳纳米管绳及其制造方法 |
-
2005
- 2005-11-04 CN CNB2005101010285A patent/CN100555529C/zh active Active
-
2006
- 2006-08-11 US US11/502,850 patent/US7550907B2/en active Active
- 2006-11-01 JP JP2006298134A patent/JP4365398B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
CN1959911A (zh) | 2007-05-09 |
US20070144780A1 (en) | 2007-06-28 |
US7550907B2 (en) | 2009-06-23 |
JP2007128892A (ja) | 2007-05-24 |
CN100555529C (zh) | 2009-10-28 |
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