JP4185486B2 - Multilayer piezoelectric element - Google Patents

Description

  The present invention relates to a laminated piezoelectric element used for an ultrasonic motor (vibration motor), for example.

As a conventional multilayer piezoelectric element for an ultrasonic motor, for example, one described in Patent Document 1 is known. The multilayer piezoelectric element described in Patent Document 1 is formed by laminating a piezoelectric body having four divided electrodes arranged in 2 rows and 2 columns and a piezoelectric body having one electrode, out of the four divided electrodes. Two divided electrodes located on the diagonal are simultaneously driven.
Special table 2003-501988 gazette

  However, in the above prior art, electrical connection between two divided electrodes located diagonally among the four divided electrodes, and electrical connection between corresponding electrodes in piezoelectric layers of different layers are all lead wires. Therefore, it takes time and effort to manufacture the multilayer piezoelectric element. Further, in recent years, in order to cope with the miniaturization and space saving of the multilayer piezoelectric element, it is desired to make an external connection such as a voltage source only on one surface of the multilayer piezoelectric element.

  An object of the present invention is to provide a multilayer piezoelectric element that eliminates the need for connection between electrodes by lead wires and allows connection to the outside only on one surface.

  The present invention provides a first piezoelectric body having four first internal electrode portions arranged in two rows and two columns, and four second piezoelectric elements arranged in two rows and two columns so as to correspond to the first internal electrode portions. A laminated body having a structure in which a second piezoelectric body having an internal electrode portion and a third piezoelectric body having a third internal electrode portion including a region corresponding to each first internal electrode portion are laminated; Two first internal electrode portions located on one of the first internal electrode portions are connected to each other, and the other two first internal electrode portions are isolated from each other. Of the electrode parts, the two second internal electrode parts located at the other diagonal are connected to each other, the other two second internal electrode parts are isolated, and each side surface of the laminate has each side Two first internal electrode portions connected to the first internal electrode portion, each second internal electrode portion, and the third internal electrode portion and located at one diagonal, and corresponding Two first internal electrode portions located between the two second internal electrode portions and the third internal electrode portion, or on the other diagonal, and corresponding two second internal electrode portions and third internal electrode portions, Between these, at least three terminal electrodes for applying a voltage are provided.

  When such a multilayer piezoelectric element is used to drive a movable body such as a rotating body disposed on the side of the piezoelectric element, for example, a pressing projection that engages the movable body with the multilayer piezoelectric element. And the displacement of the laminated piezoelectric element is transmitted to the movable body through the protrusions. For example, when a voltage is applied between the two first internal electrode portions located at one diagonal and the two second internal electrode portions and the third internal electrode portions corresponding to the two first internal electrode portions, approximately S is applied to the stacked piezoelectric element. A character-shaped displacement is generated, and the movable body is driven in a predetermined direction by this displacement, and the two first internal electrode portions located at the other diagonal, the two second internal electrode portions corresponding to the first internal electrode portion, and the third internal electrode When a voltage is applied between the electrodes, a substantially S-shaped displacement in the opposite direction is generated in the laminated piezoelectric element, and the movable body is driven in the opposite direction by this displacement. Here, since all the terminal electrodes for applying a voltage as described above are provided on one side surface of the multilayer body, connection with an external voltage source is performed only on the one side surface of the multilayer body. be able to. Moreover, by providing such a terminal electrode on the side surface of the laminated body, electrical connection between the internal electrode portions by a lead wire becomes unnecessary.

  Preferably, on one side surface of the multilayer body, the first side electrode connected to the isolated first internal electrode portion and the corresponding second internal electrode portion located on the one side, respectively, and located on the one side A second side electrode connected to the isolated second internal electrode part and the corresponding first internal electrode part, and a third side electrode connected to the third internal electrode part, and the other side of the laminate A side surface of the second side electrode connected to the isolated first internal electrode portion and the corresponding second internal electrode portion located on the other side, and an isolated second internal electrode portion located on the other side. And a fifth side electrode connected to the corresponding first internal electrode part, respectively, and at least three terminal electrodes are a first side electrode, a second side electrode, and a third side electrode.

  In this case, when a voltage is applied between the first side electrode and the third side electrode, two first internal electrode portions located at one diagonal and two second internal electrode portions corresponding to the first internal electrode portion and the third When a voltage is applied between the internal electrode part and a voltage is applied between the second side electrode and the third side electrode, the two first internal electrode parts located on the other diagonal and the corresponding ones A voltage is applied between the two second internal electrode portions and the third internal electrode portion. In such a configuration, only three connection points with the external voltage source are required. Further, it is not necessary to provide external electrodes for connecting an external voltage source on the upper and lower surfaces of the laminate.

  The first piezoelectric body further includes a first lead portion connected to the isolated first internal electrode portion located on the other side of the multilayer body and extending toward the side surface on one side, and the second piezoelectric body includes: A second lead portion connected to the isolated second internal electrode portion located on the other side of the multilayer body and extending toward the side surface on one side is further included. A first side electrode connected to the isolated first internal electrode part and the corresponding second internal electrode part, respectively, and the isolated second internal electrode part and the corresponding first internal electrode part located on the one side; Second side electrode connected to each other, third side electrode connected to the third internal electrode part, fourth side electrode connected to the first lead part, and fifth side face connected to the second lead part Electrodes, and at least three terminal electrodes include a first side electrode, a second side electrode, 3 the side electrodes may be configured as a fourth side electrode and the fifth side electrode.

  In this case, when a voltage is applied between the first side surface electrode and the fourth side surface electrode and the third side surface electrode, two first internal electrode portions located at one diagonal and two second internal electrodes corresponding thereto When a voltage is applied between the electrode portion and the third internal electrode portion and a voltage is applied between the second side surface electrode, the fifth side surface electrode, and the third side surface electrode, A voltage is applied between the first internal electrode portion and the two second and third internal electrode portions corresponding to the first internal electrode portion. In such a configuration, the terminal electrode connected to the external voltage source may be provided only on one side surface of the laminate. Further, it is not necessary to provide external electrodes for connecting an external voltage source on the upper and lower surfaces of the laminate.

  The present invention also provides a first piezoelectric body having four first internal electrode portions arranged in two rows and two columns, and four four rows arranged in two rows and two columns so as to correspond to the first internal electrode portions. A laminate having a structure in which a second piezoelectric body having a second internal electrode part is laminated, and two first internal parts located at diagonally opposite one of the four first internal electrode parts The electrode parts are connected to each other, the other two first internal electrode parts are isolated, and the two second internal electrode parts located at the other diagonal of the four second internal electrode parts are connected to each other. The other two second internal electrode portions are isolated, and are connected to each first internal electrode portion and each second internal electrode portion on one side surface of the laminated body and located at one diagonal. Corresponds to two first internal electrode portions located between the two first internal electrode portions and the corresponding two second internal electrode portions or on the other diagonal Is characterized in that at least three terminal electrodes for applying a voltage between the two second inner electrode portion is provided that.

  When such a multilayer piezoelectric element is used to drive a movable body such as a rotating body disposed on the side of the piezoelectric element, for example, a pressing projection that engages the movable body with the multilayer piezoelectric element. And the displacement of the laminated piezoelectric element is transmitted to the movable body through the protrusions. For example, when a voltage is applied between two first internal electrode portions located at one diagonal and two corresponding second internal electrode portions, a substantially S-shaped displacement occurs in the stacked piezoelectric element. When the movable body is driven in a predetermined direction by this displacement and a voltage is applied between the two first internal electrode portions located at the other diagonal and the two second internal electrode portions corresponding to the first internal electrode portions, A substantially S-shaped displacement in the opposite direction occurs in the piezoelectric element, and the movable body is driven in the opposite direction by this displacement. Here, since all the terminal electrodes for applying a voltage as described above are provided on one side surface of the multilayer body, connection with an external voltage source is performed only on the one side surface of the multilayer body. be able to. Moreover, by providing such a terminal electrode on the side surface of the laminated body, electrical connection between the internal electrode portions by a lead wire becomes unnecessary. Furthermore, there are only two types of piezoelectric bodies to be used, such as a first piezoelectric body and a second piezoelectric body.

  Preferably, the side surface on one side of the multilayer body includes a first side electrode connected to the isolated first internal electrode portion and the isolated second internal electrode portion located on the one side, and a position on the one side. A second side electrode connected to the other first internal electrode part and a third side electrode connected to the other second internal electrode part located on the one side are provided, The side surface is provided with a fourth side electrode connected to the isolated first internal electrode portion and the isolated second internal electrode portion located on the other side, respectively, and at least one of the upper surface and the lower surface of the stacked body, An auxiliary electrode for connecting the first side electrode and the fourth side electrode is provided, and at least three terminal electrodes are a first side electrode, a second side electrode, and a third side electrode.

  In this case, when a voltage is applied between the first side electrode and the second side electrode, between the two first internal electrode portions located at one diagonal and the two second internal electrode portions corresponding thereto. When a voltage is applied between the first side electrode and the third side electrode, two first internal electrode portions located on the other diagonal and two second internal electrodes corresponding thereto A voltage is applied between the two parts. In such a configuration, only three connection points with the external voltage source are required.

  The first piezoelectric body further includes a first lead portion connected to the isolated first internal electrode portion located on the other side of the multilayer body and extending toward the side surface on one side, and the second piezoelectric body includes: A second lead portion connected to the isolated second internal electrode portion located on the other side of the multilayer body and extending toward the side surface on one side is further included. A first side electrode connected to the isolated first internal electrode part and the isolated second internal electrode part, and a second side electrode connected to the other first internal electrode part located on the one side; The third side electrode connected to the other second internal electrode part located on the one side, the fourth side electrode connected to the first lead part, and the fifth side electrode connected to the second lead part And at least three terminal electrodes include a first side electrode, a second side electrode, a third side electrode, It may be configured as a side electrode and the fifth side electrode.

  In this case, when a voltage is applied between the first side electrode, the fourth side electrode, and the second side electrode, two first internal electrode portions located at one diagonal and two second internal electrodes corresponding thereto When a voltage is applied between the first side electrode and the fifth side surface electrode and the third side surface electrode, two first internal electrode portions located on the other diagonal side are applied. A voltage is applied between the two corresponding second internal electrode portions. In such a configuration, the terminal electrode connected to the external voltage source may be provided only on one side surface of the laminate. Further, it is not necessary to provide external electrodes for connecting an external voltage source on the upper and lower surfaces of the laminate.

  Further, a side surface on one side of the laminate is connected to a first side electrode connected to the isolated first internal electrode portion located on the one side and an isolated second internal electrode portion located on the one side. And the third side electrode connected to the other first internal electrode part and the other second internal electrode part located on the one side, respectively, and the other side surface of the multilayer body. Includes a fourth side electrode connected to the isolated first internal electrode part located on the other side and a fifth side electrode connected to the isolated second internal electrode part located on the other side. A first auxiliary electrode that connects the first side electrode and the fourth side electrode, and a second auxiliary electrode that connects the second side electrode and the fifth side electrode on at least one of the upper surface and the lower surface of the laminate. And at least three terminal electrodes include a first side electrode, a second side electrode, and a third side It may be configured as an electrode.

  In this case, when a voltage is applied between the first side electrode and the third side electrode, the gap between the two first internal electrode portions located at one diagonal and the two second internal electrode portions corresponding thereto. When a voltage is applied to the second side electrode and a voltage is applied between the second side electrode and the third side electrode, two first internal electrode portions located on the other diagonal side and two second internal electrodes corresponding thereto A voltage is applied between the two parts. In such a configuration, only three connection points with the external voltage source are required.

  The first piezoelectric body further includes a first lead portion connected to the isolated first internal electrode portion located on the other side of the multilayer body and extending toward the side surface on one side, and the second piezoelectric body includes: A second lead portion connected to the isolated second internal electrode portion located on the other side of the multilayer body and extending toward the side surface on one side is further included. A first side electrode connected to the isolated first internal electrode part located; a second side electrode connected to the isolated second internal electrode part located on the one side; and another side electrode located on the one side A third side electrode connected to the first internal electrode part and the other second internal electrode part, a fourth side electrode connected to the first lead part, and a fifth side electrode connected to the second lead part And at least three terminal electrodes include a first side electrode, a second side electrode, a third side electrode, It may be configured as a side electrode and the fifth side electrode.

  In this case, when a voltage is applied between the first side surface electrode and the fourth side surface electrode and the third side surface electrode, two first internal electrode portions located at one diagonal and two second internal electrodes corresponding thereto When a voltage is applied between the second side electrode, the fifth side electrode, and the third side electrode, two first internal electrode units located on the other diagonal side A voltage is applied between the two corresponding second internal electrode portions. In such a configuration, the terminal electrode connected to the external voltage source may be provided only on one side surface of the laminate. Further, it is not necessary to provide external electrodes for connecting an external voltage source on the upper and lower surfaces of the laminate.

  Furthermore, the present invention provides a first piezoelectric body having four first internal electrode portions arranged in two rows and two columns, and four four rows arranged in two rows and two columns so as to correspond to the first internal electrode portions. A laminated body having a structure in which a second piezoelectric body having a second internal electrode part is laminated, and two first internal electrodes located on one side of the laminated body among the four first internal electrode parts The other two first internal electrode portions are isolated, and of the four second internal electrode portions, the two second internal electrode portions located on the other side of the stacked body are connected to each other. The other two second internal electrode portions are isolated, and are connected to each first internal electrode portion and each second internal electrode portion on one side surface of the multilayer body, and are provided with four first internal electrode portions. Between two first internal electrode portions located at one of the diagonals and two corresponding second internal electrode portions, or four first internal electrodes It is provided that at least three terminal electrodes for applying a voltage are provided between two first internal electrode portions located at the other diagonal of the pole portions and two corresponding second internal electrode portions. It is a feature.

  When such a multilayer piezoelectric element is used to drive a movable body such as a rotating body disposed on the side of the piezoelectric element, for example, a pressing projection that engages the movable body with the multilayer piezoelectric element. And the displacement of the laminated piezoelectric element is transmitted to the movable body through the protrusions. For example, when a voltage is applied between two first internal electrode portions located at one diagonal and two corresponding second internal electrode portions, a substantially S-shaped displacement occurs in the stacked piezoelectric element. When the movable body is driven in a predetermined direction by this displacement and a voltage is applied between the two first internal electrode portions located at the other diagonal and the two second internal electrode portions corresponding to the first internal electrode portions, A substantially S-shaped displacement in the opposite direction occurs in the piezoelectric element, and the movable body is driven in the opposite direction by this displacement. Here, since all the terminal electrodes for applying a voltage as described above are provided on one side surface of the multilayer body, connection with an external voltage source is performed only on the one side surface of the multilayer body. be able to. Moreover, by providing such a terminal electrode on the side surface of the laminated body, electrical connection between the internal electrode portions by a lead wire becomes unnecessary. Furthermore, the piezoelectric body to be used may be at least two types such as the first piezoelectric body and the second piezoelectric body.

  Preferably, the first piezoelectric body further includes two first lead portions that are respectively connected to two isolated first internal electrode portions located on the other side of the multilayer body and extend toward one side surface, The second piezoelectric body further includes a second lead portion connected to each second internal electrode portion located on the other side of the multilayer body and extending toward the side surface on one side, and on the side surface on one side of the multilayer body. The first side electrode connected to each of the first internal electrode portions and the second lead portion located on the one side and the two second internal electrode portions connected to the two second internal electrode portions located on the one side, respectively. Two side electrodes and two third side electrodes respectively connected to the two first lead portions are provided, and at least three terminal electrodes include the first side electrode, the two second side electrodes, and the two third electrodes. It is a side electrode.

  In this case, when a voltage is applied between the first side electrode, the one second side electrode, and the one third side electrode, the two first internal electrode portions located on one diagonal and the two corresponding thereto When a voltage is applied between two second internal electrode portions and a voltage is applied between the first side electrode, the other second side electrode, and the other third side electrode, the other internal electrode portion is positioned at the other diagonal. A voltage is applied between the two first internal electrode portions and the two second internal electrode portions corresponding thereto. In such a configuration, the terminal electrode connected to the external voltage source may be provided only on one side surface of the laminate. Further, it is not necessary to provide external electrodes for connecting an external voltage source on the upper and lower surfaces of the laminate. Furthermore, the first piezoelectric body and the second piezoelectric body can have the same structure. In this case, only one type of piezoelectric body is used.

  According to the present invention, it is not necessary to connect electrodes by lead wires, so that it is possible to facilitate the production of the multilayer piezoelectric element. In addition, since it is possible to connect to the outside only on one side of the multilayer piezoelectric element, when using the multilayer piezoelectric element, wiring efficiency for connection to the outside is improved and space saving is achieved. It becomes possible.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a multilayer piezoelectric element according to the present invention will be described in detail with reference to the drawings.

  First, a first embodiment of a multilayer piezoelectric element according to the present invention will be described with reference to FIGS. FIG. 1 is a plan view when the multilayer piezoelectric element of the present embodiment is applied to an ultrasonic motor (vibration motor).

  In the figure, the laminated piezoelectric element 1 includes a rectangular parallelepiped laminated body 2, and a pressing projection 4 that engages with the rotating body 3 is provided on one end surface of the laminated body 2. As shown in FIG. 2, the multilayer body 2 includes a plurality of piezoelectric layers 5 and a plurality of internal electrode layers 6. The piezoelectric layer 5 is made of, for example, a piezoelectric ceramic material mainly composed of PZT (lead zirconate titanate). The internal electrode layer 6 is made of a conductive material mainly composed of Ag and Pd.

  Specifically, the laminate 2 is formed by laminating a lid piezoelectric member 7 and electrode-attached piezoelectric members 8 to 10 as shown in FIG. These piezoelectric bodies 7 to 10 have a rectangular shape. The dimensions of the piezoelectric bodies 7 to 10 are, for example, about 6 mm in length, 1.5 mm in width, and about 100 μm in thickness. The lid-use piezoelectric body 7 shown in FIG. 3A constitutes the uppermost piezoelectric layer 5.

  In the piezoelectric body 8 with electrodes shown in FIG. 3B, four internal electrode portions 12 </ b> A to 12 </ b> D constituting a part of the plurality of internal electrode layers 6 are formed on the upper surface of the piezoelectric portion 11 constituting the piezoelectric layer 5. Is. The internal electrode portions 12A to 12D are arranged in 2 rows and 2 columns (field shape). Among the internal electrode portions 12A to 12D, the internal electrode portions 12B and 12C located at one diagonal are connected to each other via the connection portion 13, and the internal electrode portions 12A and 12D located at the other diagonal are isolated. Yes.

  In the piezoelectric body 9 with electrodes shown in FIG. 3C, four internal electrode portions 15 </ b> A to 15 </ b> D constituting a part of the plurality of internal electrode layers 6 are formed on the upper surface of the piezoelectric portion 14 constituting the piezoelectric layer 5. Is. The internal electrode portions 15A to 15D are arranged in 2 rows and 2 columns so as to correspond to the internal electrode portions 12A to 12D. Among the internal electrode portions 15A to 15D, the internal electrode portions 15A and 15D positioned at one diagonal (the diagonal corresponding to the internal electrode portions 12A and 12D) are connected to each other via the connection portion 16, and the other diagonal The internal electrode portions 15B and 15C located at (diagonal corresponding to the internal electrode portions 12B and 12C) are isolated.

  The electrode-attached piezoelectric body 10 shown in FIG. 3D is obtained by forming internal electrode portions 18 constituting a part of the plurality of internal electrode layers 6 on the upper surface of the piezoelectric portion 17 constituting the piezoelectric layer 5. The internal electrode portion 18 includes regions corresponding to the internal electrode portions 12A to 12D and the internal electrode portions 15A to 15D.

  The laminated body 2 has a structure in which a piezoelectric body 10 with an electrode, a piezoelectric body 9 with an electrode, a piezoelectric body 10 with an electrode, a piezoelectric body 8 with an electrode, and a piezoelectric body 7 for a lid are stacked from below. At this time, the internal electrode portions 12A to 12D and the internal electrode portions 15A to 15D have regions that overlap each other. Moreover, the internal electrode part 18 has the area | region which overlaps with internal electrode part 12A-12D and internal electrode part 15A-15D.

  As shown in FIG. 2, the internal electrode portions 12A, 12B, 15A, 15B located on the side surface 2a side of the multilayer body 2 are exposed on the side surface 2a. The internal electrode portions 12C, 12D, 15C, 15D located on the other side surface 2b side of the multilayer body 2 are exposed on the side surface 2b. The internal electrode portion 18 is exposed on both side surfaces 2 a and 2 b of the multilayer body 2.

  The side surface 2a of the laminate 2 is connected to the side terminal electrode 19 connected to the internal electrode portions 12A and 15A, the side terminal electrode 20 connected to the internal electrode portions 12B and 15B, and the internal electrode portions 18. Side terminal electrodes 21 are provided. The side terminal electrode 21 is formed between the side terminal electrodes 19 and 20. The side surface 2b connected to the internal electrode portions 12C and 15C, the side surface terminal electrode 23 connected to the internal electrode portions 12D and 15D, and the internal electrode portions 18 are connected to the side surface 2b of the multilayer body 2. Side terminal electrodes 24 are provided. The side terminal electrode 24 is formed between the side terminal electrodes 22 and 23. The side terminal electrodes 19 to 24 are made of, for example, a conductive material mainly containing any one of Ag, Au, and Cu.

  When manufacturing such a laminated piezoelectric element 1, first, for example, a plurality of piezoelectric ceramic green sheets mainly composed of PZT are manufactured. This green sheet corresponds to the above-described lid piezoelectric body 7 and piezoelectric portions 11, 14, and 17. Next, by printing an internal electrode on one surface of the green sheet using, for example, a screen printing method, the electrode-attached green sheet corresponding to the above-described electrode-attached piezoelectric bodies 8 to 10 is formed. Next, these green sheets are laminated in a predetermined number and order, and further pressed, and then fired at a predetermined temperature and cut to form the above laminate 2.

  Thereafter, the side terminal electrodes 19 to 21 are formed on the side surface 2a of the multilayer body 2 and the side terminal electrodes 22 to 24 are formed on the side surface 2b of the multilayer body 2 using, for example, a baking process, a sputtering method, an electroless plating method, or the like. To do. Finally, a polarization process is performed on such a laminate 2. Thereby, the multilayer piezoelectric element 1 is completed.

  In the multilayer piezoelectric element 1 configured as described above, with the internal electrode portion 18 as a ground electrode, the internal electrode portions 12A and 12D located at one diagonal and the corresponding internal electrode portions 15A and 15D When an AC voltage (for example, 5 to 10 V at 200 kHz) is applied between the internal electrode portions 18, an electric field is generated between the internal electrode portions 12 A and 12 D and the internal electrode portions 15 A and 15 D and the internal electrode portion 18. As a result, the piezoelectric layer 5 between the internal electrode layers 6 vibrates in a state where a substantially S-shaped bending deformation occurs as shown in FIG. Then, this vibration is transmitted to the pressing projection 4, and the pressing projection 4 periodically contacts the rotating body 3 in the direction as shown in FIG. 4A, and the rotating body 3 is caused by the frictional force at this time. Will rotate clockwise.

  When the same AC voltage is applied between the internal electrode portions 12B and 12C located on the other diagonal and the corresponding internal electrode portions 15B and 15C and the internal electrode portion 15, the internal electrode portions 12B and 12C and An electric field is generated between the internal electrode portions 15B and 15C and the internal electrode portion 18. Then, the piezoelectric layer 5 between the internal electrode layers 6 vibrates in a state where a substantially S-shaped bending deformation is caused on the opposite side as shown in FIG. Then, this vibration is transmitted to the pressing projection 4, and the pressing projection 4 periodically contacts the rotating body 3 in the direction as shown in FIG. 4B, and the rotating body 3 is caused by the frictional force at this time. Will rotate counterclockwise.

  Thus, by supplying voltage to the internal electrode parts 12A, 12D, 15A, 15D or the internal electrode parts 12B, 12C, 15B, 15C located diagonally in this manner, the central part of the laminate 2 is pressed. Since the piezoelectric layer 5 is displaced (vibrated), the rotating body 3 can be stably rotated in both directions.

  By the way, as a laminated body of a conventional multilayer piezoelectric element, for example, as shown in FIG. 5, the lid piezoelectric body 7 and the piezoelectric body 10 with electrodes and the piezoelectric body 201 with electrodes are laminated. is there. The electrode-attached piezoelectric body 201 is formed by forming four internal electrode portions 203 </ b> A to 203 </ b> D on the upper surface of the piezoelectric portion 202. The internal electrode portions 203A to 203D are arranged in 2 rows and 2 columns and are isolated from each other.

  Such a laminated body 200 composed of the piezoelectric body for lid 7 and the piezoelectric bodies 10 and 201 with electrodes, for example, as shown in FIG. 6, is formed by alternately laminating piezoelectric bodies 10 and 201 with electrodes and further on them. It is formed by stacking piezoelectric bodies 7. On the side surface 200a of the laminate 200, a side electrode 204 connected to each internal electrode portion 203A, a side electrode 205 connected to each internal electrode portion 203B, and a side electrode 206 connected to each internal electrode portion 18 are provided. Is provided. On the side surface 200b of the multilayer body 200, a side electrode 207 connected to each internal electrode portion 203C, a side electrode 208 connected to each internal electrode portion 203D, and a side electrode 209 connected to each internal electrode portion 18 Is provided. In addition, upper surface electrodes 210 to 214 connected to the side surface electrodes 204 to 208 are provided on the upper surface 200 c of the multilayer body 200. Thereby, a laminated piezoelectric element is formed.

  In such a laminated piezoelectric element, in order to apply a voltage between the internal electrode portions 203A and 203D located at one diagonal and the internal electrode portion 18, the side electrodes 204 and 208 and the side electrode 206 or the side electrode A voltage is applied between the upper surface electrodes 210 and 214 and the upper surface electrode 212. In order to apply a voltage between the internal electrode portions 203B and 203C located at the other diagonal and the internal electrode portion 18, the side electrode 205, 207 and the side electrode 206 or the side electrode 209, or the top electrode 211 , 213 and the upper surface electrode 212 are applied with a voltage.

  However, when the side electrodes 204 to 209 are connected to the external voltage source, both side surfaces 200a and 200b of the multilayer body 200 are required, so that a wide space for wiring is taken and a flexible printed circuit board ( FPC) or the like cannot be used to connect to an external voltage source. On the other hand, when the connection with the external voltage source is performed by the upper surface electrodes 210 to 214, it is difficult to connect by the FPC or the like unless the electrode position is designed well, and many electrodes for connecting to the external voltage source are provided. Since it is necessary to form on the upper surface 200c of the multilayer body 200, it takes time to manufacture the multilayer piezoelectric element.

  On the other hand, in the multilayer piezoelectric element 1 of the present embodiment, the internal electrode portions 12B and 12C located at one diagonal are connected via the connection portion 13, and the internal electrode portions 15A and 15A located at the other diagonal are connected. The 15Ds are connected to each other through the connection unit 16. The side surface terminal electrodes 19 to 21 are provided on the side surface 2 a of the multilayer body 2, and the side surface terminal electrodes 22 to 24 are provided on the side surface 2 b of the multilayer body 2. For this reason, in order to apply a voltage between the internal electrode portions 12A and 12D and the internal electrode portions 15A and 15D and the internal electrode portion 18 located at one diagonal, the side terminal electrode 19 and the side terminal electrode 21 A voltage may be applied between the side terminal electrode 23 and the side terminal electrode 24. In order to apply a voltage between the internal electrode portions 12B and 12C and the internal electrode portions 15B and 15C and the internal electrode portion 18 located on the other diagonal, the side terminal electrode 20 and the side terminal electrode 21 A voltage may be applied between the side terminal electrode 22 and the side terminal electrode 24. In this case, since the connection with the external voltage source can be performed by only one of the side surfaces 2a and 2b of the laminated body 2, it is not necessary to take up a large space for wiring, and the connection with the external voltage source can be established with the FPC. Etc. can be easily performed.

  Also, the internal electrode portions 12B and 12C, the internal electrode portions 15A and 15D, the internal electrode portions 12A and 15A, the internal electrode portions 12B and 15B, the internal electrode portions 12C and 15C, the internal electrode portions 12D and 15D, The electrical connection between the internal electrode portions 18 of different layers does not have to be performed using lead wires. Further, it is not necessary to form external electrodes on the upper surface and the lower surface of the laminate 2 for connection with an external voltage source. As described above, the manufacturing process of the multilayer piezoelectric element can be simplified.

  Furthermore, since there are only three connection points to the external voltage source, that is, the side terminal electrodes 19 to 21 or the side terminal electrodes 22 to 24, workability when the multilayer piezoelectric element 1 is operated is improved.

  Note that the laminated structure of the laminated body 2 is not limited to the structure shown in FIG. 2. For example, the piezoelectric body 10 with an electrode, the piezoelectric body 9 with an electrode, the piezoelectric body 10 with an electrode, the piezoelectric body 9 with an electrode, and the electrodes The piezoelectric body 10 with electrodes, the piezoelectric body 8 with electrodes, the piezoelectric body 10 with electrodes, the piezoelectric body 8 with electrodes, and the piezoelectric body 7 for lids are, in short, at least one side of the piezoelectric bodies 8 and 9 with electrodes is the piezoelectric body 10 with electrodes. May be stacked so as to be adjacent to each other.

  A second embodiment of the multilayer piezoelectric element according to the present invention will be described with reference to FIGS. In the figure, the same or equivalent members as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  FIG. 7 is a plan view and both side views showing the multilayer piezoelectric element of the present embodiment. In the figure, a laminated piezoelectric element 30 includes a laminated body 31 instead of the laminated body 2 described above. The laminated body 31 is formed by laminating the piezoelectric body 7 for lid and the piezoelectric bodies 10, 32, 33 with electrodes as shown in FIG.

  The electrode-attached piezoelectric body 32 shown in FIG. 8B has internal electrode portions 12 </ b> A to 12 </ b> D formed on the upper surface of the piezoelectric portion 11. Similarly to the electrode-attached piezoelectric body 8 shown in FIG. 3B, the internal electrode portions 12B and 12C are connected to each other through the connection portion 13, and the internal electrode portions 12A and 12D are isolated. In addition, on the upper surface of the piezoelectric portion 11, a lead portion 34 is formed extending from the isolated internal electrode portion 12D toward the side surface on the opposite side (internal electrode portion 12B side).

  The piezoelectric body 33 with an electrode shown in FIG. 8C has internal electrode portions 15 </ b> A to 15 </ b> D formed on the upper surface of the piezoelectric portion 14. Similarly to the electrode-attached piezoelectric body 9 shown in FIG. 3C, the internal electrode portions 15A and 15D are connected to each other through the connection portion 16, and the internal electrode portions 15B and 15C are isolated. In addition, on the upper surface of the piezoelectric portion 14, a lead portion 35 extending from the isolated internal electrode portion 15C toward the side surface on the opposite side (internal electrode portion 15A side) is formed.

  The laminated body 31 has a structure in which a piezoelectric body 10 with an electrode, a piezoelectric body 33 with an electrode, a piezoelectric body 10 with an electrode, a piezoelectric body 32 with an electrode, and a piezoelectric body 7 for a lid are stacked from below. As shown in FIG. 7, the internal electrode portions 12A, 12B, 15A, 15B and the lead portions 34, 35 located on the side surface 31a side of the multilayer body 31 are exposed on the side surface 31a. The internal electrode portions 12C, 12D, 15C, 15D located on the other side surface 31b side of the multilayer body 31 are exposed on the side surface 31b. The internal electrode portion 18 is exposed on both side surfaces 31 a and 31 b of the piezoelectric body 31.

  A side surface terminal electrode 36 connected to the internal electrode portions 12A and 15A, a side surface terminal electrode 37 connected to the internal electrode portions 12B and 15B, and each internal electrode portion 18 are connected to the side surface 31a of the multilayer body 31. A side terminal electrode 38, a side terminal electrode 39 connected to the lead portion 34, and a side terminal electrode 40 connected to the lead portion 35 are provided. The side terminal electrodes 36 and 37 are formed on both sides of the side terminal electrode 38. Side terminal electrodes 40 and 39 are formed outside the side terminal electrodes 36 and 37.

  In the multilayer piezoelectric element 30 configured as described above, the internal electrode portions 12A and 12D positioned at one diagonal and the internal electrode portions 15A and 15D corresponding to the internal electrode portions 18A and 15D in a state where the internal electrode portion 18 is a ground electrode. In order to generate an electric field between the internal electrode portion 18, an alternating voltage is applied between the side terminal electrodes 36 and 39 and the side terminal electrode 38. In order to generate an electric field between the internal electrode portions 12B and 12C located on the other diagonal and the corresponding internal electrode portions 15B and 15C and the internal electrode portion 18, the side terminal electrodes 37 and 40 and the side surface electrodes An AC voltage is applied between the terminal electrode 38.

  In the present embodiment as described above, since the connection to the external voltage source can be performed only by one side surface 31a of the laminate 31, the space efficiency for wiring is improved and it is easy to use the FPC or the like. Can be connected. Further, it is not necessary to connect the electrodes using lead wires, and it is not necessary to form external electrodes on the side surface 31b, the upper surface, and the lower surface of the multilayer body 31 for connection to an external voltage source. Thereby, the manufacturing process of a multilayer piezoelectric element can be simplified.

  A modification of the multilayer piezoelectric element 30 according to the second embodiment is shown in FIG. In the same figure, the laminated body 31 is comprised using the piezoelectric bodies 41 and 42 with an electrode as shown to FIG.10 (b), (c) instead of the piezoelectric bodies 32 and 33 with an electrode.

  In addition to the internal electrode portions 12A to 12D and the lead portion 34, the electrode-attached piezoelectric body 41 further includes a lead portion 43 that extends from the isolated internal electrode portion 12A toward the opposite side (the internal electrode portion 12C side). ing. In addition to the internal electrode portions 15A to 15D and the lead portion 35, the electrode-attached piezoelectric body 42 further includes a lead portion 44 that extends from the isolated internal electrode portion 15B toward the opposite side (internal electrode portion 15D side). ing. The lead portions 43 and 44 are exposed on the side surface 31 b of the stacked body 31.

  The side surface 31b of the multilayer body 31 is connected to the side terminal electrode 45 connected to the internal electrode portions 12C and 15C, the side terminal electrode 46 connected to the internal electrode portions 12D and 12D, and each internal electrode portion 18. A side terminal electrode 47, a side terminal electrode 48 connected to the lead portion 43, and a side terminal electrode 49 connected to the lead portion 44 are provided.

  In the multilayer piezoelectric element 30 configured as described above, the internal electrode portions 12A and 12D, the internal electrode portions 15A and 15D, and the internal electrode portion 18 that are located at one diagonal in a state where the internal electrode portion 18 is a ground electrode. In order to generate an electric field between the side terminal electrodes 36 and 39 and the side terminal electrode 38, an AC voltage may be applied, or between the side terminal electrodes 46 and 48 and the side terminal electrode 47. An alternating voltage may be applied. In order to generate an electric field between the internal electrode portions 12B and 12D and the internal electrode portions 15B and 15D and the internal electrode portion 18 located on the other diagonal, the side terminal electrodes 37 and 40 and the side terminal electrodes 38 An AC voltage may be applied between the side terminal electrodes 45 and 49 and the side terminal electrodes 47. Accordingly, when the multilayer piezoelectric element 30 is displaced, the connection location and connection form of the external voltage source can be selected as appropriate.

  A third embodiment of the multilayer piezoelectric element according to the present invention will be described with reference to FIGS. In the figure, the same or equivalent members as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  FIG. 11 is a plan view and both side views showing the multilayer piezoelectric element of the present embodiment. In the figure, a multilayer piezoelectric element 50 of this embodiment includes a multilayer body 51 instead of the multilayer body 2 in the first embodiment. The laminated body 51 is formed by laminating a piezoelectric body for lid 7 and piezoelectric bodies 52 and 53 with electrodes as shown in FIG.

  A piezoelectric body 52 with electrodes shown in FIG. 12B has internal electrode portions 12 </ b> A to 12 </ b> D formed on the upper surface of the piezoelectric portion 11. Similarly to the electrode-attached piezoelectric body 8 shown in FIG. 3B, the internal electrode portions 12B and 12C are connected to each other through the connection portion 13, and the internal electrode portions 12A and 12D are isolated.

  A piezoelectric body 53 with electrodes shown in FIG. 12C has internal electrode portions 15 </ b> A to 15 </ b> D formed on the upper surface of the piezoelectric portion 14. Similarly to the electrode-attached piezoelectric body 9 shown in FIG. 3C, the internal electrode portions 15A and 15D are connected to each other through the connection portion 16, and the internal electrode portions 15B and 15C are isolated.

  The laminated body 51 has a structure in which piezoelectric bodies 52 and 53 with electrodes are alternately laminated, and further, the lid piezoelectric body 7 is laminated thereon. At this time, the internal electrode portions 12A to 12D and the internal electrode portions 15A to 15D have regions that overlap each other. As shown in FIG. 11, the internal electrode portions 12A, 12B, 15A, and 15B located on the side surface 51a side of the multilayer body 51 are exposed on the side surface 51a. The internal electrode portions 12C, 12D, 15C, 15D located on the other side surface 51b side of the multilayer body 51 are exposed on the side surface 51b.

  The side surface 51a of the multilayer body 51 is connected to the side terminal electrodes 54 connected to the internal electrode portions 12A and 15B, the side terminal electrodes 55 connected to the internal electrode portions 12B, and the internal electrode portions 15A. Side terminal electrodes 56 are provided. The side terminal electrodes 55 and 56 are formed on both sides of the side terminal electrode 54. The side surface 51b of the multilayer body 51 is connected to the side terminal electrodes 57 connected to the internal electrode portions 12D and 15C, the side terminal electrodes 58 connected to the internal electrode portions 12C, and the internal electrode portions 15D. Side terminal electrodes 59 are provided. The side terminal electrodes 58 and 59 are formed on both sides of the side terminal electrode 57. An auxiliary electrode 60 that connects the side surface terminal electrodes 54 and 57 is provided on the upper surface 51 c of the multilayer body 51. The auxiliary electrode 60 may be provided on the lower surface of the stacked body 51. The auxiliary electrode 60 is formed of the same conductive material as the side terminal electrodes 54 to 59.

  In the multilayer piezoelectric element 50 configured as described above, the internal electrode portions 12A, 12D, 15B, and 15C that are the ground electrodes in the internal electrode portions 12A, 12D, 15B, and 15C correspond to the internal electrode portions 12A and 12D that are located at one diagonal. When an AC voltage is applied between the internal electrode portions 15A and 15D, an electric field is generated between the internal electrode portions 12A and 12D and the internal electrode portions 15A and 15D, and the piezoelectric layer 5 between these internal electrode layers 6 is It vibrates in a state of causing a substantially S-shaped bending deformation (see FIG. 4A). When the same AC voltage is applied between the internal electrode portions 12B and 12C located on the other diagonal and the corresponding internal electrode portions 15B and 15C, the internal electrode portions 12B and 12C and the internal electrode portions 15B and 15B An electric field is generated between 15C and the piezoelectric layer 5 between the internal electrode layers 6 vibrates in a state where a substantially S-shaped bending deformation (see FIG. 4B) occurs on the opposite side.

  Here, in order to generate an electric field between the internal electrode portions 12A, 12D and the internal electrode portions 15A, 15D located at one diagonal, between the side terminal electrode 56 and the side terminal electrode 54 or the side terminal electrode. An AC voltage is applied between 57 and the side terminal electrode 59. Further, in order to generate an electric field between the internal electrode portions 12B and 12C and the internal electrode portions 15B and 15C located at the other diagonal, between the side terminal electrode 55 and the side terminal electrode 54 or the side terminal electrode 57. An AC voltage is applied between the terminal electrode 58 and the side terminal electrode 58.

  In the present embodiment as described above, since the connection to the external voltage source can be performed only by any one of the side surfaces 51a and 51b of the multilayer body 51, the space efficiency for wiring is improved, and the FPC and the like are installed. And can be easily connected. Further, it is not necessary to connect the electrodes using lead wires, and it is not necessary to form many external electrodes on the upper surface and the lower surface of the multilayer body 51 for connection to an external voltage source. Thereby, the manufacturing process of a multilayer piezoelectric element can be simplified.

  Furthermore, since only three connection points to the external voltage source are required, workability when operating the multilayer piezoelectric element is improved. Further, only two types of piezoelectric bodies 52 and 53 with electrodes may be prepared as the piezoelectric bodies with electrodes constituting a part of the laminated body 51.

  A laminated piezoelectric element according to a fourth embodiment of the present invention will be described with reference to FIGS. In the figure, the same or equivalent members as those in the first embodiment and the third embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  FIG. 13 is a plan view and both side views showing the multilayer piezoelectric element of the present embodiment. In the figure, a laminated piezoelectric element 70 of the present embodiment includes a laminated body 71 instead of the laminated body 51 in the third embodiment. The laminated body 71 is formed by laminating a piezoelectric body for lid 7 and piezoelectric bodies 72 and 73 with electrodes as shown in FIG.

  A piezoelectric body 72 with electrodes shown in FIG. 14B has internal electrode portions 12 </ b> A to 12 </ b> D formed on the upper surface of the piezoelectric portion 11. Similarly to the electrode-attached piezoelectric body 52 shown in FIG. 12B, the internal electrode portions 12B and 12C are connected to each other through the connection portion 13, and the internal electrode portions 12A and 12D are isolated. In addition, on the upper surface of the piezoelectric portion 11, a lead-out portion 74 extending from the isolated internal electrode portion 12D toward the side surface on the opposite side (internal electrode portion 12B side) is formed.

  A piezoelectric body 73 with an electrode shown in FIG. 14C has internal electrode portions 15 </ b> A to 15 </ b> D formed on the upper surface of the piezoelectric portion 14. Similar to the electrode-attached piezoelectric body 53 shown in FIG. 12C, the internal electrode portions 15A and 15D are connected to each other through the connection portion 16, and the internal electrode portions 15B and 15C are isolated. In addition, a lead portion 75 extending from the isolated internal electrode portion 15C toward the opposite side (internal electrode portion 15A side) is formed on the upper surface of the piezoelectric portion 14.

  The laminated body 71 has a structure in which the piezoelectric bodies 72 and 73 with electrodes are alternately laminated, and the lid piezoelectric body 7 is further laminated thereon. As shown in FIG. 13, the internal electrode portions 12A, 12B, 15A, 15B and the lead portions 74, 75 located on the side surface 71a side of the multilayer body 71 are exposed on the side surface 71a. The internal electrode portions 12C, 12D, 15C, 15D located on the other side surface 71b side of the multilayer body 71 are exposed on the side surface 71b.

  The side surface 71a of the laminate 71 is connected to the side terminal electrodes 76 connected to the internal electrode portions 12A and 15B, the side terminal electrodes 77 connected to the internal electrode portions 12B, and the internal electrode portions 15A. Side terminal electrodes 78, side terminal electrodes 79 connected to the lead portions 74, and side terminal electrodes 80 connected to the lead portions 75 are provided. The side terminal electrodes 77 and 78 are formed on both sides of the side terminal electrode 76. Side terminal electrodes 79 and 80 are formed outside the side terminal electrodes 77 and 78.

  In the multilayer piezoelectric element 70 configured as described above, with the internal electrode portions 12A, 12D, 15B, and 15C serving as ground electrodes, the internal electrode portions 12A and 12D positioned at one diagonal and the corresponding internal electrodes In order to generate an electric field between the portions 15 </ b> A and 15 </ b> D, an alternating voltage is applied between the side terminal electrodes 78 and 79 and the side terminal electrode 76. In order to generate an electric field between the internal electrode portions 12B and 12C located on the other diagonal and the corresponding internal electrode portions 15B and 15C, the side terminal electrodes 77 and 80 and the side terminal electrode 76 An AC voltage is applied between them.

  In the present embodiment as described above, since the connection to the external voltage source can be performed only by one side surface 71a of the multilayer body 71, the space efficiency for wiring is improved and it is easy to use the FPC or the like. Can be connected. Further, it is not necessary to connect the electrodes using lead wires, and it is not necessary to form external electrodes on the side surface 71b, the upper surface, and the lower surface of the laminate 71 for connection to an external voltage source. Thereby, the manufacturing process of a multilayer piezoelectric element can be simplified. Furthermore, as the piezoelectric body with electrodes that constitute a part of the laminate 71, only two types of piezoelectric bodies 72 and 73 with electrodes need be prepared.

  In the fourth embodiment, the side surface terminal electrodes 76 to 80 are provided only on the side surface 71a of the multilayer body 71. However, as illustrated in FIGS. Two side terminal electrodes may be provided. In this case, a lead portion extending from the internal electrode portion 12A to the opposite side is provided on the piezoelectric body with electrode 72, and a lead portion extending to the opposite side from the internal electrode portion 15B is provided to the piezoelectric body with electrode 73. .

  A fifth embodiment of the multilayer piezoelectric element according to the present invention will be described with reference to FIGS. In the figure, the same or equivalent members as those in the first embodiment and the third embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  FIG. 15 is a plan view and both side views showing the multilayer piezoelectric element of the present embodiment. In the figure, a multilayer piezoelectric element 90 of this embodiment includes a multilayer body 91 instead of the multilayer body 51 in the third embodiment. The laminated body 91 is formed by laminating a piezoelectric body for lid 7 and piezoelectric bodies 92 and 93 with electrodes as shown in FIG.

  A piezoelectric body 92 with electrodes shown in FIG. 16B has internal electrode portions 12 </ b> A to 12 </ b> D formed on the upper surface of the piezoelectric portion 11. Similarly to the electrode-attached piezoelectric body 52 shown in FIG. 12B, the internal electrode portions 12B and 12C are connected to each other through the connection portion 13, and the internal electrode portions 12A and 12D are isolated. Further, on the upper surface of the piezoelectric portion 11, a lead portion 94 extending from the isolated internal electrode portion 12D toward the opposite end face side (internal electrode portion 12C side) is formed.

  A piezoelectric body 93 with electrodes shown in FIG. 16C has internal electrode portions 15 </ b> A to 15 </ b> D formed on the upper surface of the piezoelectric portion 14. Similar to the electrode-attached piezoelectric body 53 shown in FIG. 12C, the internal electrode portions 15A and 15D are connected to each other through the connection portion 16, and the internal electrode portions 15B and 15C are isolated. Further, a lead portion 95 extending from the isolated internal electrode portion 15C toward the opposite end face side (internal electrode portion 15D side) is formed on the upper surface of the piezoelectric portion 14.

  The laminated body 91 has a structure in which piezoelectric bodies 92 and 93 with electrodes are alternately laminated and the lid piezoelectric body 7 is further laminated thereon. As shown in FIG. 15, the internal electrode portions 12A, 12B, 15A, and 15B located on the side surface 91a side of the multilayer body 91 are exposed on the side surface 91a. The lead portions 94 and 95 located on the other side surface 91b side of the stacked body 91 are exposed on the side surface 91b.

  The side surface 91a connected to each internal electrode portion 12A, the side surface terminal electrode 97 connected to each internal electrode portion 15B, and each internal electrode portion 12B, 15A are connected to the side surface 91a of the multilayer body 91. Side terminal electrodes 98 are provided. The side terminal electrode 98 is formed between the side terminal electrodes 96 and 97. A side surface electrode 99 connected to each lead portion 94 and a side electrode 100 connected to each lead portion 95 are provided on the side surface 91 b of the multilayer body 91. Further, an auxiliary electrode 101 that connects the side terminal electrode 96 and the side electrode 99 and an auxiliary electrode 102 that connects the side terminal electrode 97 and the side electrode 100 are provided on the upper surface 91 c of the multilayer body 91.

  In the multilayer piezoelectric element 90 configured as described above, the internal electrode portions 12B, 12C, 15A, and 15D are ground electrodes, and the internal electrode portions 12A and 12D that are located at one diagonal and the corresponding internal electrodes. In order to generate an electric field between the portions 15 </ b> A and 15 </ b> D, an AC voltage is applied between the side terminal electrode 96 and the side terminal electrode 98. Further, in order to generate an electric field between the internal electrode portions 12B and 12C located on the other diagonal and the corresponding internal electrode portions 15B and 15C, between the side terminal electrode 97 and the side terminal electrode 98, Apply AC voltage.

  In the present embodiment as described above, since the connection to the external voltage source can be performed only by one side surface 91a of the laminated body 91, the space for wiring is improved and the connection is easily performed using the FPC or the like. can do. Moreover, it is not necessary to connect the electrodes using lead wires, and it is not necessary to form many external electrodes on the upper surface and the lower surface of the laminate 91 for connection to an external voltage source. Thereby, the manufacturing process of a multilayer piezoelectric element can be simplified.

  Furthermore, since only three connection points to the external voltage source are required, workability when operating the multilayer piezoelectric element is improved. In addition, as the piezoelectric body with electrodes constituting a part of the laminated body 91, only two types of piezoelectric bodies 92 and 93 with electrodes need be prepared.

  In the above embodiment, the auxiliary electrodes 101 and 102 are provided on the upper surface 91c of the multilayer body 91. However, the auxiliary electrodes 101 and 102 may be provided on the lower surface of the multilayer body 91. Further, without providing the lead portions 94 and 95 in the piezoelectric bodies 92 and 93 with electrodes, the internal electrode portions 12D and 15C are directly exposed to the side surface 91b of the multilayer body 91, and the side electrodes 99 and 100 are respectively connected to the internal electrode portion 12D. , 15C may be connected. In this case, one of the auxiliary electrodes 101 and 102 is provided on the upper surface 91 c of the multilayer body 91, and the other of the auxiliary electrodes 101 and 102 is provided on the lower surface of the multilayer body 91.

  A sixth embodiment of the multilayer piezoelectric element according to the present invention will be described with reference to FIGS. In the figure, the same or equivalent members as those in the first embodiment and the third embodiment are denoted by the same reference numerals, and description thereof is omitted.

  FIG. 17 is a plan view and a side view showing the multilayer piezoelectric element of the present embodiment. In the figure, the multilayer piezoelectric element 110 of the present embodiment includes a multilayer body 111 instead of the multilayer body 51 in the third embodiment. The laminated body 111 is formed by laminating a piezoelectric body for lid 7 and piezoelectric bodies 112 and 113 with electrodes as shown in FIG.

  A piezoelectric body 112 with electrodes shown in FIG. 18B has internal electrode portions 12 </ b> A to 12 </ b> D formed on the upper surface of the piezoelectric portion 11. Similarly to the electrode-attached piezoelectric body 52 shown in FIG. 12B, the internal electrode portions 12B and 12C are connected to each other through the connection portion 13, and the internal electrode portions 12A and 12D are isolated. In addition, on the upper surface of the piezoelectric portion 11, a lead portion 114 extending from the isolated internal electrode portion 12D toward the side surface on the opposite side (internal electrode portion 12B side) is formed.

  The piezoelectric body 113 with electrodes shown in FIG. 18C has internal electrode portions 15 </ b> A to 15 </ b> D formed on the upper surface of the piezoelectric portion 14. Similar to the electrode-attached piezoelectric body 53 shown in FIG. 12C, the internal electrode portions 15A and 15D are connected to each other through the connection portion 16, and the internal electrode portions 15B and 15C are isolated. Further, a lead portion 115 extending from the isolated internal electrode portion 15C toward the opposite side surface (internal electrode portion 15A side) is formed on the upper surface of the piezoelectric portion 14.

  The laminated body 111 has a structure in which the piezoelectric bodies 112 and 113 with electrodes are alternately laminated, and the lid piezoelectric body 7 is further laminated thereon. As shown in FIG. 17, the internal electrode portions 12A, 12B, 15A, 15B and the lead portions 114, 115 located on the side surface 111a side of the multilayer body 111 are exposed on the side surface 111a. The internal electrode portions 12C, 12D, 15C, and 15D located on the other side surface 111b side of the multilayer body 111 are exposed on the side surface 111b.

  A side surface electrode 116 connected to each internal electrode portion 12A, a side surface terminal electrode 117 connected to each internal electrode portion 15B, and each internal electrode portion 12B, 15A are connected to the side surface 111a of the multilayer body 111. A side terminal electrode 118, a side terminal electrode 119 connected to each lead portion 114, and a side terminal electrode 120 connected to each lead portion 115 are provided. The side terminal electrodes 116 and 117 are formed on both sides of the side terminal electrode 118. Side terminal electrodes 120 and 119 are formed outside the side terminal electrodes 116 and 117.

  In the multilayer piezoelectric element 110 configured as described above, with the internal electrode portions 12B, 12C, 15A, and 15D serving as ground electrodes, the internal electrode portions 12A and 12D positioned at one diagonal and the corresponding internal electrodes In order to generate an electric field between the portions 15 </ b> A and 15 </ b> D, an alternating voltage is applied between the side terminal electrodes 116 and 119 and the side terminal electrode 118. In order to generate an electric field between the internal electrode portions 12B and 12C located on the other diagonal and the corresponding internal electrode portions 15B and 15C, the side terminal electrodes 117 and 120 and the side terminal electrodes 118 An AC voltage is applied between them.

  In the present embodiment as described above, since it is possible to connect to the external voltage source only by one side surface 111a of the multilayer body 111, the space efficiency for wiring is improved and it is easy to use FPC or the like. Can be connected. In addition, it is not necessary to connect the electrodes using lead wires, and it is not necessary to form external electrodes on the side surface 111b, the upper surface, and the lower surface of the stacked body 111 for connection to an external voltage source. Thereby, the manufacturing process of a multilayer piezoelectric element can be simplified. Furthermore, only two types of piezoelectric bodies 112 and 113 with electrodes may be prepared as piezoelectric bodies with electrodes that constitute a part of the laminate 111.

  In the sixth embodiment, the side surface terminal electrodes 116 to 120 are provided only on the side surface 111a of the multilayer body 111. However, as illustrated in FIGS. Two side terminal electrodes may be provided. In this case, a lead portion extending from the internal electrode portion 12A to the opposite side is provided on the piezoelectric body 112 with electrodes, and a lead portion extending to the opposite side from the internal electrode portion 15B is provided to the piezoelectric body with electrodes 113. .

  A seventh embodiment of the multilayer piezoelectric element according to the present invention will be described with reference to FIGS. In the figure, the same or equivalent members as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  FIG. 19 is a plan view and a side view showing the multilayer piezoelectric element of the present embodiment. In the figure, a multilayer piezoelectric element 130 of this embodiment includes a multilayer body 131 instead of the multilayer body 2 in the first embodiment. The laminated body 131 is formed by laminating a piezoelectric body for lid 7 and piezoelectric bodies 132 and 133 with electrodes as shown in FIG.

  A piezoelectric body 132 with electrodes shown in FIG. 20B has internal electrode portions 12 </ b> A to 12 </ b> D formed in 2 rows and 2 columns on the upper surface of the piezoelectric portion 11. Among the internal electrode portions 12A to 12D, the internal electrode portions 12A and 12B located on one side are connected to each other via the connection portion 134, and the internal electrode portions 12C and 12D on the other side are isolated.

  Further, on the upper surface of the piezoelectric portion 11, a lead-out portion 135 extending from the isolated internal electrode portion 12C toward the side surface on the opposite side (internal electrode portion 12A side) and an opposite side (internal electrode portion) from the isolated internal electrode portion 12D. A lead portion 136 extending toward the side surface on the (12B side) and a lead portion 137 extending from the connection portion 134 toward the side surface on the opposite side (internal electrode portions 12C, 12D side) are formed. The lead portion 137 is formed so as to be sandwiched between the internal electrode portions 12C and 12D.

  A piezoelectric body 133 with electrodes shown in FIG. 20C has internal electrode portions 15A to 15D formed in two rows and two columns on the upper surface of the piezoelectric portion 14 so as to correspond to the internal electrode portions 12A to 12D. . Among the internal electrode portions 15A to 15D, the internal electrode portions 15C and 15D located on one side are connected to each other through the connection portion 138, and the internal electrode portions 15A and 15B on the other side are isolated.

  Further, on the upper surface of the piezoelectric portion 14, a lead portion 139 extending from the isolated internal electrode portion 15A toward the side surface on the opposite side (internal electrode portion 15C side) and an opposite side (internal electrode portion) from the isolated internal electrode portion 15B are provided. A lead portion 140 extending toward the side surface on the 15D side and a lead portion 141 extending from the connection portion 138 toward the opposite side surface (internal electrode portions 15A and 15B side) are formed. The lead portion 141 is formed so as to be sandwiched between the internal electrode portions 15A and 15B.

  In a state where the electrode-attached piezoelectric body 132 is rotated 180 degrees, the internal electrode portions 12A to 12D and the lead-out portions 135 to 137 in the electrode-attached piezoelectric body 132 are shaped and arranged in the internal electrode portions 15A to 15A in the electrode-attached piezoelectric body 133. 12D and the shape and arrangement | positioning site | part of drawer part 139-141 correspond. That is, the electrode-attached piezoelectric bodies 132 and 133 have the same structure.

  The laminated body 131 has a structure in which the piezoelectric bodies 132 and 133 with electrodes are alternately laminated, and the lid piezoelectric body 7 is further laminated thereon. At this time, the internal electrode portions 12A to 12D and the internal electrode portions 15A to 15D have regions that overlap each other. As shown in FIG. 19, the internal electrode portions 15A and 15B, the connection portion 134, and the lead portions 135, 136, and 141 located on the side surface 131a side of the multilayer body 131 are exposed on the side surface 131a. The internal electrode portions 12C and 12D, the connection portion 138, and the lead portions 137, 139, and 140 located on the other side surface 131b side of the multilayer body 131 are exposed on the side surface 131b.

  The side surface 131a of the multilayer body 131 is connected to the side terminal electrodes 142 connected to the connection portions 134 and the lead portions 141, the side terminal electrodes 143 connected to the internal electrode portions 15A, and the internal electrode portions 15B. The side terminal electrodes 144, the side terminal electrodes 145 connected to the lead portions 135, and the side terminal electrodes 146 connected to the lead portions 136 are provided. The side terminal electrodes 143 and 144 are formed on both sides of the side terminal electrode 142. Side terminal electrodes 145 and 146 are formed outside the side terminal electrodes 143 and 144.

  In the multilayer piezoelectric element 130 configured as described above, with the internal electrode portions 12A, 12B, 15C, and 15D serving as ground electrodes, the internal electrode portions 12A and 12D located at one diagonal and the corresponding internal electrodes In order to generate an electric field between the portions 15 </ b> A and 15 </ b> D, an AC voltage is applied between the side terminal electrodes 143 and 146 and the side terminal electrode 142. Further, in order to generate an electric field between the internal electrode portions 12B and 12C located on the other diagonal and the corresponding internal electrode portions 15B and 15C, the side terminal electrodes 144 and 145, the side terminal electrode 142, AC voltage is applied during

  According to the present embodiment as described above, since the connection to the external voltage source can be performed only by one side surface 131a of the stacked body 131, the space efficiency for wiring is improved and the connection is easily performed using FPC or the like. can do. In addition, it is not necessary to connect the electrodes using lead wires, and it is not necessary to form external electrodes on the side surface 131b, the upper surface, and the lower surface of the stacked body 131 for connection to an external voltage source. Thereby, the manufacturing process of a multilayer piezoelectric element can be simplified.

  Furthermore, since the electrode-attached piezoelectric bodies 132 and 133 that constitute a part of the laminated body 131 have the same structure, only one type of electrode-attached piezoelectric body may be prepared. Thereby, for example, when the electrodes are formed by a printing method, only one print pattern is required, which is further advantageous in terms of manufacturing.

  In the sixth embodiment, the side terminal electrodes 142 to 146 are provided only on the side surface 131a of the multilayer body 131. However, as shown in FIGS. Two side terminal electrodes may be provided. Further, when the side surface terminal electrode is not provided on the side surface 131b of the multilayer body 131 as described above, the lead portions 139 and 140 are not necessarily provided in the electrode-attached piezoelectric body 133.

  Although several preferred embodiments of the multilayer piezoelectric element according to the present invention have been described above, the present invention is not limited to the above embodiments. In other words, any configuration can be used as long as the terminal electrodes for connecting to the external voltage source are concentrated on only one side surface of the laminate without connecting the electrodes using lead wires. May be.

  For example, as a modification of the first embodiment, the internal electrode portions 12A, 12B, 12D of the piezoelectric body 8 with electrodes, the internal electrode portions 15A, 15B, 15C of the piezoelectric body 9 with electrodes, and the internal electrodes of the piezoelectric body 10 with electrodes Seven terminal electrodes respectively connected to the portion 18 may be provided on the side surface 2 a or the side surface 2 b of the multilayer body 2. As a modification of the third embodiment, six terminals connected to the internal electrode portions 12A, 12B, 12D of the piezoelectric body 52 with electrodes and the internal electrode portions 15A, 15B, 15C of the piezoelectric body 53 with electrodes, respectively. An electrode may be provided on the side surface 51 a or the side surface 51 b of the multilayer body 51. In these cases, another internal electrode may be formed on the laminated body, or auxiliary electrodes may be provided on the upper surface, the lower surface, and the end surface of the laminated body.

  In the above-described embodiment, the multilayer piezoelectric element is applied to an actuator that performs a rotational motion. However, the multilayer piezoelectric element according to the present invention can also be applied to an actuator that performs a linear motion.

It is a top view at the time of applying a 1st embodiment of a lamination type piezoelectric element concerning the present invention to an ultrasonic motor. It is a both-sides view of the laminated body shown in FIG. It is a top view of the various piezoelectric materials for comprising the laminated body shown in FIG. It is a conceptual diagram which shows the state which the laminated body shown in FIG. 1 displaces. It is a top view of the various piezoelectric materials for comprising the laminated body of the conventional multilayer piezoelectric element. It is the top view and both side view of a laminated body formed using the various piezoelectric materials shown in FIG. It is the top view and both side view which show 2nd Embodiment of the lamination type piezoelectric element concerning this invention. It is a top view of the various piezoelectric materials for comprising the laminated body shown in FIG. It is the top view and both side view which show the modification of 2nd Embodiment of the laminated piezoelectric element concerning this invention. FIG. 10 is a plan view of various piezoelectric bodies for constituting the laminated body shown in FIG. 9. It is the top view and both side view which show 3rd Embodiment of the lamination type piezoelectric element concerning this invention. It is a top view of the various piezoelectric materials for comprising the laminated body shown in FIG. It is the top view and both side view which show 4th Embodiment of the lamination type piezoelectric element concerning this invention. It is a top view of the various piezoelectric material for comprising the laminated body shown in FIG. It is the top view and both side view which show 5th Embodiment of the laminated piezoelectric element concerning this invention. FIG. 16 is a plan view of various piezoelectric bodies for constituting the laminated body shown in FIG. 15. It is the top view and both side view which show 6th Embodiment of the laminated piezoelectric element concerning this invention. FIG. 18 is a plan view of various piezoelectric bodies for constituting the laminated body shown in FIG. 17. It is the top view and both side view which show 7th Embodiment of the lamination type piezoelectric element concerning this invention. FIG. 20 is a plan view of various piezoelectric bodies for constituting the laminate shown in FIG. 19.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Laminated piezoelectric element, 2 ... Laminated body, 2a, 2b ... Side surface, 8 ... Piezoelectric body with an electrode (1st piezoelectric body), 9 ... Piezoelectric body with an electrode (2nd piezoelectric body), 10 ... Piezoelectric body with an electrode (Third piezoelectric body), 12A to 12D ... internal electrode part (first internal electrode part), 13 ... connection part, 15A to 15D ... internal electrode part (second internal electrode part), 18 ... internal electrode part (third Internal electrode portion), 19 ... side terminal electrodes (first side electrode, fourth side electrode, terminal electrode), 20 ... side terminal electrodes (second side electrode, fifth side electrode, terminal electrode), 21 ... side terminal electrodes (Third side electrode, terminal electrode), 22 ... side terminal electrode (second side electrode, fifth side electrode, terminal electrode), 23 ... side terminal electrode (first side electrode, fourth side electrode, terminal electrode), 24 ... side terminal electrode (third side electrode, terminal electrode), 30 ... laminated piezoelectric element, 31 ... laminated body, 3 a, 31b ... side face, 32 ... piezoelectric body with electrode (first piezoelectric body), 33 ... piezoelectric body with electrode (second piezoelectric body), 34 ... lead-out part (first lead part), 35 ... lead-out part (second) Lead part), 36... Side terminal electrode (first side electrode, terminal electrode), 37 .. Side terminal electrode (second side electrode, terminal electrode), 38 .. Side terminal electrode (third side electrode, terminal electrode), 39 ... side terminal electrode (fourth side electrode, terminal electrode), 40 ... side terminal electrode (fifth side electrode, terminal electrode), 41 ... piezoelectric body with electrode (first piezoelectric body), 42 ... piezoelectric body with electrode (first 2 piezoelectric bodies), 43... Drawer part (first drawer part), 44 .. drawer part (second drawer part), 45 .. side terminal electrode (second side electrode, terminal electrode), 46 .. side terminal electrode (first) Side electrode, terminal electrode), 47 ... Side terminal electrode (third side electrode, end Electrode), 48 .. side terminal electrode (fourth side electrode, terminal electrode), 49 .. side terminal electrode (fifth side electrode, terminal electrode), 50 .. laminated piezoelectric element, 51 .. laminated body, 51 a, 51 b. , 51c ... upper surface, 52 ... piezoelectric body with electrode (first piezoelectric body), 53 ... piezoelectric body with electrode (second piezoelectric body), 54 ... side terminal electrode (first side electrode, fourth side electrode, terminal electrode) 55 ... side terminal electrodes (second side electrodes, terminal electrodes), 56 ... side terminal electrodes (third side electrodes, terminal electrodes), 57 ... side terminal electrodes (first side electrodes, fourth side electrodes, terminal electrodes) 58 ... side terminal electrodes (second side electrodes, terminal electrodes), 59 ... side terminal electrodes (third side electrodes, terminal electrodes), 60 ... auxiliary electrodes, 70 ... stacked piezoelectric elements, 71 ... stacked bodies, 71a, 71b ... side surfaces, 72 ... electrode-attached piezoelectric body (first piezoelectric body), 73 ... electric Piezoelectric body with poles (second piezoelectric body), 74 ... lead-out part (first lead-out part), 75 ... lead-out part (second lead-out part), 76 ... side terminal electrode (first side electrode, terminal electrode), 77 ... Side terminal electrode (second side electrode, terminal electrode), 78 ... Side terminal electrode (third side electrode, terminal electrode), 79 ... Side terminal electrode (fourth side electrode, terminal electrode), 80 ... Side terminal electrode (first 5 side electrodes, terminal electrodes), 90 ... multilayer piezoelectric element, 91 ... multilayer body, 91a, 91b ... side surface, 91c ... upper surface, 92 ... piezoelectric body with electrodes (first piezoelectric body), 93 ... piezoelectric body with electrodes ( Second piezoelectric body), 96: Side terminal electrode (first side electrode, terminal electrode), 97: Side terminal electrode (second side electrode, terminal electrode), 98: Side terminal electrode (third side electrode, terminal electrode) 99 ... side electrode (fourth side electrode), 100 ... side electrode (fifth) Surface electrode), 101 ... auxiliary electrode (first auxiliary electrode), 102 ... auxiliary electrode (second auxiliary electrode), 110 ... laminated piezoelectric element, 111 ... laminated body, 111a, 111b ... side surface, 112 ... piezoelectric body with electrode (First piezoelectric body), 113... Piezoelectric body with electrode (second piezoelectric body), 114... Extraction section (first extraction section), 115... Extraction section (second extraction section), 116. Side electrode, terminal electrode) 117 ... Side terminal electrode (second side electrode, terminal electrode), 118 ... Side terminal electrode (third side electrode, terminal electrode), 119 ... Side terminal electrode (fourth side electrode, terminal electrode) , 120... Side terminal electrode (fifth side electrode, terminal electrode) 130... Stacked piezoelectric element 131. Stacked body 131 a and 131 b. Electrode with electrode ( 2 piezoelectric bodies), 135, 136 ... drawer part (first drawer part), 141 ... drawer part (second drawer part), 142 ... side terminal electrode (first side electrode, terminal electrode), 143, 144 ... side terminal Electrodes (second side electrodes, terminal electrodes), 145, 146... Side terminal electrodes (third side electrodes, terminal electrodes).

Claims (10)

A first piezoelectric body having four first internal electrode portions arranged in two rows and two columns, and four second internal electrode portions arranged in two rows and two columns so as to correspond to the first internal electrode portions. A laminated body having a structure formed by laminating a second piezoelectric body having a third piezoelectric body having a third internal electrode portion including a region corresponding to each first internal electrode portion,
Of the four first internal electrode portions, the two first internal electrode portions located on either diagonal are connected, and the other two first internal electrode portions are isolated,
Of the four second internal electrode portions, two second internal electrode portions located on the other diagonal are connected to each other, and the other two second internal electrode portions are isolated,
The two first internal electrodes that are connected to the first internal electrode portions, the second internal electrode portions, and the third internal electrode portions on one side surface of the multilayer body and located at one diagonal The two first internal electrode portions and the corresponding two second internal electrodes located between the electrode portion and the corresponding two second internal electrode portions and the third internal electrode portion or on the other diagonal A laminated piezoelectric element, wherein at least three terminal electrodes for applying a voltage are provided between a portion and a third internal electrode portion. On the one side surface of the laminate, the first side electrode connected to the isolated first internal electrode portion and the corresponding second internal electrode portion located on the one side, respectively, A second side electrode connected to the isolated second internal electrode part and the corresponding first internal electrode part, respectively, and a third side electrode connected to the third internal electrode part;
On the other side surface of the laminate, the isolated first internal electrode portion located on the other side and the fourth side electrode connected to the corresponding second internal electrode portion, respectively, and the other side surface are located. An isolated second internal electrode part and a corresponding fifth internal electrode connected to the corresponding first internal electrode part,
The multilayer piezoelectric element according to claim 1, wherein the at least three terminal electrodes are the first side electrode, the second side electrode, and the third side electrode. The first piezoelectric body further includes a first lead part connected to the isolated first internal electrode part located on the other side of the multilayer body and extending toward the side surface on the one side,
The second piezoelectric body further includes a second lead portion connected to the isolated second internal electrode portion located on the other side of the multilayer body and extending toward a side surface on the front side,
On the one side surface of the laminate, the first side electrode connected to the isolated first internal electrode portion and the corresponding second internal electrode portion located on the one side, respectively, A second side electrode connected to the isolated second internal electrode part and the corresponding first internal electrode part, a third side electrode connected to the third internal electrode part, and the first lead A fourth side surface electrode connected to the portion and a fifth side surface electrode connected to the second lead portion,
2. The laminate according to claim 1, wherein the at least three terminal electrodes are the first side electrode, the second side electrode, the third side electrode, the fourth side electrode, and the fifth side electrode. Type piezoelectric element. A first piezoelectric body having four first internal electrode portions arranged in two rows and two columns, and four second internal electrode portions arranged in two rows and two columns so as to correspond to the first internal electrode portions. A laminated body having a structure formed by laminating a second piezoelectric body having
Of the four first internal electrode portions, the two first internal electrode portions located on either diagonal are connected, and the other two first internal electrode portions are isolated,
Of the four second internal electrode portions, two second internal electrode portions located on the other diagonal are connected to each other, and the other two second internal electrode portions are isolated,
One side surface of the laminate is connected to the first internal electrode portions and the second internal electrode portions, and corresponds to the two first internal electrode portions located at one diagonal. At least three for applying a voltage between two second internal electrode portions, or between the two second internal electrode portions corresponding to the two first internal electrode portions located on the other diagonal A laminated piezoelectric element provided with a terminal electrode. On the side surface of the one side of the laminate, the first side electrode connected to the isolated first internal electrode portion and the isolated second internal electrode portion located on the one side, respectively, A second side electrode connected to the other first internal electrode part located, and a third side electrode connected to the other second internal electrode part located on the one side;
The side surface on the other side of the laminate is provided with a fourth side electrode connected to the isolated first internal electrode part and the isolated second internal electrode part located on the other side,
At least one of the upper surface and the lower surface of the laminate is provided with an auxiliary electrode that connects the first side electrode and the fourth side electrode,
The multilayer piezoelectric element according to claim 4, wherein the at least three terminal electrodes are the first side electrode, the second side electrode, and the third side electrode. The first piezoelectric body further includes a first lead part connected to the isolated first internal electrode part located on the other side of the multilayer body and extending toward the side surface on the one side,
The second piezoelectric body further includes a second lead portion connected to the isolated second internal electrode portion located on the other side of the multilayer body and extending toward the side surface on the one side,
On the side surface of the one side of the laminate, the first side electrode connected to the isolated first internal electrode portion and the isolated second internal electrode portion located on the one side, respectively, A second side electrode connected to the other first internal electrode part located; a third side electrode connected to the other second internal electrode part located on the one side; and the first lead part. A fourth side electrode connected and a fifth side electrode connected to the second lead portion;
5. The laminate according to claim 4, wherein the at least three terminal electrodes are the first side electrode, the second side electrode, the third side electrode, the fourth side electrode, and the fifth side electrode. Type piezoelectric element. The side surface on the one side of the multilayer body has a first side electrode connected to the isolated first internal electrode portion located on the one side, and the isolated second internal electrode portion located on the one side. A second side electrode connected to each other, and a third side electrode connected to each of the other first internal electrode part and the other second internal electrode part located on the one side,
On the other side surface of the laminate, a fourth side electrode connected to the isolated first internal electrode part located on the other side, and the isolated second internal electrode part located on the other side, And a connected fifth side surface electrode,
A first auxiliary electrode that connects the first side electrode and the fourth side electrode, and a second side electrode that connects the second side electrode and the fifth side electrode are connected to at least one of the upper surface and the lower surface of the laminate. 2 auxiliary electrodes,
The multilayer piezoelectric element according to claim 4, wherein the at least three terminal electrodes are the first side electrode, the second side electrode, and the third side electrode. The first piezoelectric body further includes a first lead part connected to the isolated first internal electrode part located on the other side of the multilayer body and extending toward the side surface on the one side,
The second piezoelectric body further includes a second lead portion connected to the isolated second internal electrode portion located on the other side of the multilayer body and extending toward the side surface on the one side,
The side surface on the one side of the multilayer body has a first side electrode connected to the isolated first internal electrode portion located on the one side, and the isolated second internal electrode portion located on the one side. A second side electrode connected to the second side electrode, a third side electrode connected to the other first internal electrode part and the other second internal electrode part located on the one side, and the first lead part, A fourth side electrode connected and a fifth side electrode connected to the second lead portion;
5. The laminate according to claim 4, wherein the at least three terminal electrodes are the first side electrode, the second side electrode, the third side electrode, the fourth side electrode, and the fifth side electrode. Type piezoelectric element. A first piezoelectric body having four first internal electrode portions arranged in two rows and two columns, and four second internal electrode portions arranged in two rows and two columns so as to correspond to the first internal electrode portions. A laminated body having a structure formed by laminating a second piezoelectric body having
Of the four first internal electrode portions, two first internal electrode portions located on one side of the laminate are connected to each other, and the other two first internal electrode portions are isolated,
Of the four second internal electrode portions, two second internal electrode portions located on the other side of the multilayer body are connected to each other, and the other two second internal electrode portions are isolated,
The one side surface of the multilayer body is connected to the first internal electrode portions and the second internal electrode portions, and is located at one of the four first internal electrode portions diagonally. Corresponds to two first internal electrode portions located between the two first internal electrode portions and the corresponding two second internal electrode portions, or at the other diagonal of the four first internal electrode portions. A multilayer piezoelectric element comprising at least three terminal electrodes for applying a voltage between the two second internal electrode portions. The first piezoelectric body further includes two first lead portions connected to the two isolated first internal electrode portions located on the other side of the multilayer body and extending toward the side surface on the one side. ,
The second piezoelectric body further includes a second lead portion connected to each second internal electrode portion located on the other side of the multilayer body and extending toward the side surface on the one side,
On the side surface on the one side of the laminate, the first side electrode connected to the first internal electrode portion and the second lead portion located on the one side, respectively, and the 2 located on the one side. Two second side electrodes connected to the two second internal electrode parts, respectively, and two third side electrodes connected to the two first lead parts, respectively,
The multilayer piezoelectric element according to claim 9, wherein the at least three terminal electrodes are the first side electrode, the two second side electrodes, and the two third side electrodes.

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