JP4093897B2 - Surface heating type infrared radiation heating device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a surface heating type infrared radiation heating apparatus that heat-treats a medium-area disc-shaped material at a high speed with a uniform temperature distribution.
[0002]
[Prior art]
A conventional surface heating type infrared radiation heating apparatus is composed of a composite type reflection mirror and an infrared lamp, and the composite type reflection mirror is a combination of a hollow parabolic reflection mirror and a cylindrical reflection mirror, An infrared lamp is installed at the focal point of the parabolic reflection mirror, the infrared ray is irradiated from the infrared lamp to the heated object, and the infrared ray irradiated from the infrared lamp is reflected by the straight light and the parabolic reflection mirror. It is possible to heat the heated object including the reflected light that is reflected and the oblique reflected light that is reflected by the cylindrical reflecting mirror (see, for example, Patent Document 1).
[0003]
[Patent Document 1]
Japanese Patent Laid-Open No. 10-82589
[Problems to be solved by the invention]
In developing high-quality semiconductor materials such as silicon and silicon carbide, it is extremely important to heat-treat the semiconductor material at a high temperature and a uniform temperature distribution in a clean atmosphere. Even with the above known conventional apparatus, the semiconductor material can be heat-treated at a high temperature and with a uniform temperature distribution, but there is a problem that only the disk-like material having a small area of about 10φ can be heat-treated.
In view of this problem, the present invention provides a novel surface heating infrared radiation heating apparatus capable of heat-treating a disk-shaped material having a medium area of about 50φ at a high temperature and a uniform temperature distribution.
[0005]
[Means for solving the problems]
Therefore, the surface heating type infrared radiation heating device of the present invention is composed of a composite type reflection mirror and an infrared lamp, and the composite type reflection mirror is a combination of a hollow conical reflection mirror and a cylindrical reflection mirror. The infrared rays radiated from the lamp include straight light, reflected light reflected by the conical reflecting mirror, and oblique reflected light reflected by the cylindrical reflecting mirror, and irradiates and heats the heated object.
According to the present invention, a combination of the composite reflection mirror and the hollow conical reflection mirror and the cylindrical reflection mirror, the infrared light radiated from the infrared lamp goes straight and the straight light reflected by the conical reflection mirror. The disk-shaped material having a medium area of about 50φ can be heated at a high speed and heated by the reflected light parallel to the light and the oblique reflected light reflected by the cylindrical reflecting mirror.
[0006]
In addition, the present invention provides a disc-shaped heat equalizing mechanism at the bottom of the composite reflection mirror, and the infrared radiation intensity radiated in the horizontal direction and reflected from the cone-shaped reflection mirror is radiated straight from the infrared lamp. It is made uniform to irradiate the heated object, and the entire heated object is heated substantially uniformly.
According to the present invention, a disc-shaped heat equalizing mechanism is installed at the lower part of the composite reflection mirror, and the infrared rays radiated straight from the infrared lamp and the infrared rays radiated from the infrared lamp in the horizontal direction and reflected by the conical reflection mirror are reflected. Since the radiation intensity is made uniform, the heated object is irradiated, and the entire heated object is heated substantially uniformly, a medium-area disk-like material of about 50φ is raised at a high speed and with a substantially uniform temperature distribution. Can be heated and heat treated.
[0007]
Further, in the present invention, the disk-shaped heat equalization mechanism is a transparent support plate having a thin periphery, and is composed of a central heat equalizing disk thicker than the transparent support plate supported by the transparent support plate. It is.
According to the present invention, the disc-shaped soaking mechanism is a transparent support plate having a thin periphery, and is supported by the transparent support plate, and is configured by a central soaking disc thicker than the transparent support plate. Therefore, the irradiation intensity of infrared rays transmitted through the central soaking disk is weakened to make the irradiation intensity of infrared rays transmitted through the surrounding thin transparent support plate substantially uniform, the heating of the whole heated object is made substantially uniform, and about 50φ A medium-area disk-shaped material can be heated at a high speed with a substantially uniform temperature distribution and heat-treated.
[0008]
Further, in the present invention, a vacuum chamber having a transparent disk provided thereon is disposed below the composite reflection mirror, and a heated object is placed in the vacuum chamber so that infrared rays radiated from the infrared lamp are emitted from the transparent circle. The whole heated product is heated to a substantially uniform temperature distribution through the plate and irradiated with the heated product.
In the present invention, a heated object is placed in a vacuum chamber, and the heated object is irradiated in the vacuum chamber to heat the entire heated object to a substantially uniform temperature distribution. The entire heated object can be heated.
[0009]
Furthermore, in the present invention, a transparent cylinder is provided in the vacuum chamber so as to be fixed to the transparent disk.
In the present invention, since the transparent cylinder is provided in the vacuum chamber so as to be fixed to the transparent disk, the oblique irradiation light radiated from the infrared lamp or the oblique reflection light reflected by the cylindrical reflecting mirror is transmitted to the transparent cylinder. Totally reflects on the inner surface of the outer wall, does not radiate infrared rays from the infrared lamp to the outside of the heated object, irradiates the heated object with straight light, uniformizes the heating of the entire heated object, improves the heating efficiency, and is uniform at high speed The temperature is raised with a temperature distribution, and heat treatment can be performed in a clean atmosphere.
[0010]
In the present invention, the surface heating type infrared radiation heating device according to any one of claims 1 to 5 is attached to both the upper and lower portions of the vacuum chamber, and infrared rays are irradiated from both the upper and lower surfaces of the heated object. The entire heated product is heated to a uniform temperature distribution.
In the present invention, infrared rays are irradiated from both the upper surface and the lower surface of the heated object, and the entire heated object is heated to a uniform temperature distribution, so that heat treatment can be performed very quickly and with high efficiency.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described based on examples shown in the drawings. In the figure, reference numeral 1 denotes a composite reflection mirror, which is configured by combining a hollow conical reflection mirror 2 located at the upper part and a hollow cylindrical reflection mirror 3 provided continuously to the conical reflection mirror 2. . An infrared lamp 4 is provided at the center of the conical reflecting mirror 2.
The composite reflection mirror 1 is fixed on an upper lid 6 of a cylindrical vacuum chamber 5 described later. A through-hole window 7 is provided in the upper lid 6 of the cylindrical vacuum chamber 5, and a transparent disk 8 is vacuum-sealed by an O-ring 31 and fixed by a presser ring 13 at the position of the through-hole window 7. The diameter of the through-hole window 7 in which the transparent disk 8 is vacuum-sealed by the O-ring 31 and fixed by the holding ring 13 is equal to the inner diameter of the cylindrical reflection mirror 3 of the composite reflection mirror 1, and an infrared lamp Infrared rays from 4 pass through the transparent disk of the through-hole window 7 and irradiate a heated object to be described later.
[0012]
The infrared rays radiated from the infrared lamp 4 are a straight light directly irradiated from the infrared lamp 4, an oblique irradiation light directly irradiated from the infrared lamp 4, a reflected light reflected by the conical reflection mirror 2, and a cylindrical shape. And obliquely reflected light reflected by the reflecting mirror 3. Most of the reflected light reflected by the conical reflection mirror 2 becomes a straight light parallel to the straight light directly irradiated from the infrared lamp 4, and irradiates a heated object made of a medium-area disk-shaped material.
As described above, the composite reflection mirror 1 is fixed to the upper lid 6 of the vacuum chamber 5, but a disk-shaped heat equalizing mechanism 9 is provided between the composite reflection mirror 1 and the upper lid 6 of the vacuum chamber 5. It is. The disc-shaped soaking mechanism 9 is a transparent support plate 10 with a thin periphery, and is composed of a central soaking disc 11 that is thicker than the transparent support plate 10 supported by the transparent support plate 10. The disc-shaped heat equalization mechanism is supported by sandwiching the periphery of the thin transparent support plate 10 between the lower part of the cylindrical reflection mirror 2 of the composite reflection mirror 1 and the upper cover 6 of the vacuum chamber 5.
[0013]
As described above, the upper lid 6 is transparent to sandwich the periphery of the thin transparent support plate 10 of the disk-shaped heat equalizing mechanism 9 between the lower portion of the cylindrical reflecting mirror 2 and the upper lid 6 of the vacuum chamber 5. A presser ring 13 for pressing and fixing the disc 8 is provided, and the periphery of the thin transparent support plate 10 is sandwiched on the presser ring 13.
The upper lid 6 of the vacuum chamber 5 is detachable from the vacuum chamber 5. The upper lid 6 is detached from the vacuum chamber 5 while the composite reflection mirror 1 is fixed on the upper lid 6. The heated part 16 to be described later can be taken in and out from the open part.
[0014]
A transparent cylinder 12 positioned in the vacuum chamber 5 is fixed to a transparent disc 8 which is vacuum-sealed by an O-ring 31 and fixed by a presser ring 13 to the upper lid 6 of the vacuum chamber 5.
Below the vacuum chamber 5, the lower composite reflection mirror 1, the infrared lamp 4, and the disc-shaped heat equalization mechanism 9 are symmetrically located below the upper composite reflection mirror 1, the infrared lamp 4, and the disk-shaped heat equalization mechanism 9. Is provided. For this purpose, a through hole window 7 is provided in the bottom plate 15 of the vacuum chamber 5 in the same manner as the lid 6, and a transparent disk 8 is fixed by a press ring 13, and the transparent disk 8 is placed in the vacuum chamber 5. The transparent cylinder 12 to be positioned is fixed.
A heated object mounting table 14 on which the heated object 16 is mounted is provided in the vacuum chamber 5. The heated object mounting table 14 is provided with a through hole 17 in the center, and the heated object 16 is mounted on the edge of the through hole 17.
Further, cooling water for cooling the composite reflection mirror 1 is allowed to flow through the composite reflection mirror 1. Cooling water is sent from the cooling water inlet 18 and the cooling water exits from the cooling water outlet 19. It is like that.
[0015]
FIG. 3 is an external view of the surface heating type infrared radiation heating apparatus of the present invention. As shown in the figure, the surface heating type infrared radiation heating apparatus of the present invention is supported by a support frame 20. Specifically, the vacuum chamber 5 is supported at the center of the upper horizontal base 21 of the support frame 20, and the lower composite reflection mirror 1 is supported downward.
At least two screw shafts 22 and 22 are erected on the upper horizontal base 21 so that the screw shafts 22 and 22 are rotatable. Screws 23 and 23 are formed on the respective screw shafts 22 and 22, a bevel gear 24 is fixed to the lower end of any screw shaft 22, and a shaft support 25 is provided on the upper horizontal table 21. A bevel gear 24 is provided on a horizontal shaft 26 rotatably supported by 25, and the screw shaft 22 is rotated by meshing these bevel gears 24 and 24 and rotating an operation handle 27 provided on the horizontal shaft 26. . The two screw shafts 22 and 22 are connected to each other by an endless chain 28 at their upper ends so as to operate synchronously.
[0016]
Female screws 29, 29 are screwed into the screws 23, 23 of the respective screw shafts 22, and the female screws 29 are connected to a connection support plate 30 fixed to the upper cover 6 of the vacuum chamber 5. is there. With this configuration, the screw shafts 22, 22 are rotated to move the female screws 29, 29 up and down, the upper cover 6 of the vacuum chamber 5 and the upper composite reflection mirror 1 are moved up and down, and the upper cover 6 of the vacuum chamber 5. Open and close.
[0017]
When the heated object 16 is heated by the surface heating type infrared radiation heating apparatus of the present invention configured as described above, the upper lid 6 of the vacuum chamber 5 is opened as described above, and the heated object 16 is placed on the heated object mounting table 14. Is placed. Thereafter, the upper lid 6 is lowered and closed, and the air in the vacuum chamber 5 is evacuated by a vacuum pump so that the vacuum chamber 5 is evacuated. Thereafter, the infrared lamp 4 is turned on to emit infrared rays. The infrared rays radiated from the infrared lamp 4 are reflected by the conical reflection mirror 2 and the straight traveling light that travels straight from the infrared lamp 4 to the heating object 16, the oblique irradiation light that is directly irradiated from the infrared lamp 4 to the heating object 16, and the like. In this case, the straightly traveling light and the oblique irradiation light applied to the heated object 16 and the oblique reflection light reflected by the cylindrical reflection mirror 3 are included.
[0018]
The radiant intensity distribution of the infrared irradiation light as described above has a strong central portion and a weak outer peripheral portion, as shown in FIG. Therefore, in the apparatus of the present invention, the infrared ray at the center is absorbed by the disc-shaped heat equalizing mechanism 9 provided between the composite reflection mirror 1 and the transparent disc 8 provided on the upper lid 6 of the vacuum chamber 5, thereby The infrared intensity distribution of FIG. 2 has an approximate trapezoidal shape as shown in FIG. Further, in the apparatus of the present invention, the periphery of the heated object 16 is heated by the transparent cylinder 12 in the vacuum chamber 5 by the irradiation light totally reflected on the inner surface of the outer wall of the transparent cylinder 12, and the infrared intensity distribution to the heated object is shown in FIG. It becomes a trapezoidal shape like c, and a disk-shaped heated object with a medium area can be heated equally over the entire surface.
[0019]
【The invention's effect】
The surface heating type infrared radiation heating apparatus of the present invention is composed of a composite type reflection mirror and an infrared lamp, and the composite type reflection mirror is a combination of a hollow conical reflection mirror and a cylindrical reflection mirror. Infrared lamps that are used to irradiate and heat a heated object include straight light, reflected light reflected by a conical reflecting mirror, and oblique reflected light reflected by a cylindrical reflecting mirror. A circular plate having a medium area of about 50φ by linearly traveling infrared light, reflected light parallel to the straight light reflected by the conical reflecting mirror, and oblique reflected light reflected by the cylindrical reflecting mirror. The material can be heated at high speed and heat-treated.
[0020]
Further, in the present invention, a disc-shaped heat equalizing mechanism is installed at the lower portion of the composite type reflection mirror, and the infrared rays radiated straight from the composite type reflection mirror and the infrared lamp are emitted in the horizontal direction and reflected by the conical reflection mirror. Irradiation intensity of infrared rays is made uniform to irradiate a heated object, and the entire heated object is heated substantially uniformly. Therefore, a disk-shaped material having a medium area of about 50φ has a high speed and a substantially uniform temperature distribution. The temperature can be raised and heat treatment can be performed.
[0021]
Further, in the present invention, the disk-shaped heat equalization mechanism is a transparent support plate having a thin periphery, and is formed of a central transparent disc having a thickness greater than that of the transparent support plate supported by the transparent support plate. Therefore, the intensity of infrared light transmitted through the central transparent disk is weakened to make it substantially uniform with the intensity of infrared light transmitted through the surrounding thin transparent support plate, and the heating of the whole heated object is made substantially uniform. A disk-shaped material having an area can be heated at a high speed with a substantially uniform temperature distribution and heat-treated.
[0022]
Further, in the present invention, a vacuum chamber having a transparent disk provided thereon is disposed below the composite reflection mirror, and a heated object is placed in the vacuum chamber so that infrared rays radiated from the infrared lamp are emitted from the transparent circle. Since the entire heated product is heated to a substantially uniform temperature distribution through the plate and irradiated with the heated product, the heating efficiency can be improved and the entire heated product can be heated in a clean atmosphere at high speed.
[0023]
Further, in the present invention, since the transparent chamber is provided with a transparent cylinder fixed to the transparent disk, the oblique irradiation light directly irradiated from the infrared lamp or the cylindrical reflection mirror is reflected in the vacuum chamber. The oblique reflected light is totally reflected on the inner surface of the outer wall of the transparent cylinder, and the infrared rays from the infrared lamp are not radiated to the outside of the heated object. The temperature can be increased with a uniform temperature distribution at high speed, and heat treatment can be performed in a clean atmosphere.
[0024]
In the present invention, the surface heating type infrared radiation heating device according to any one of claims 1 to 5 is attached to both the upper and lower portions of the vacuum chamber, and infrared rays are irradiated from both the upper and lower surfaces of the heated object. Since the entire heated product is heated to a uniform temperature distribution, the heat treatment can be performed in a clean atmosphere with extremely high speed and high efficiency.
[Brief description of the drawings]
FIG. 1 is a cross-sectional front view showing an embodiment of a surface heating type infrared radiation heating apparatus of the present invention.
FIG. 2 is a diagram showing an intensity distribution of infrared irradiation of the heating device of the present invention.
FIG. 3 is an external view of a surface heating type infrared radiation heating apparatus of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Composite type reflection mirror 2 Cone-shaped reflection mirror 3 Cylindrical reflection mirror 4 Infrared lamp 5 Vacuum chamber 6 Upper lid 7 Through-hole window 8 Transparent disk 9 Disk-shaped heat equalization mechanism 10 Transparent support plate 11 Temperature equalization disk 12 Transparent Cylinder 13 Presser ring 14 Heated object mounting base 15 Bottom plate 16 Heated object 17 Through hole 18 Cooling water inlet 19 Cooling water outlet 20 Supporting base 21 Upper horizontal base 22 Screw shaft 23 Screw 24 Bevel gear 25 Shaft support 26 Horizontal shaft 27 Operation handle 28 Endless chain 29 Female screw 30 Connection support plate 31 O-ring

Claims (4)

It is composed of a composite reflection mirror and an infrared lamp. The composite reflection mirror is a combination of a hollow conical reflection mirror and a cylindrical reflection mirror. The infrared radiation emitted from the infrared lamp is a straight beam and a conical shape. It includes reflected light reflected by the reflecting mirror and oblique reflected light reflected by the cylindrical reflecting mirror, and is designed to irradiate and heat a heated object. The disc-shaped soaking mechanism is a transparent support plate with a thin periphery, and is composed of a central soaking disc thicker than the transparent support plate supported by this transparent support plate, and an infrared lamp Surface heating type infrared rays that are designed to irradiate the heated object by uniformizing the radiation intensity of the infrared ray radiated more straight and the infrared ray radiated in the horizontal direction and reflected by the conical reflection mirror, and heating the entire heated item substantially uniformly. Radiation Apparatus. A vacuum chamber provided with a transparent disk on the top is disposed below the composite reflection mirror. A heated object is placed in the vacuum chamber, and infrared rays emitted from the infrared lamp pass through the transparent disk and are heated. The surface heating infrared radiation heating apparatus according to claim 1 , wherein the entire heated product is heated to a substantially uniform temperature distribution by irradiating with heat. The surface heating infrared radiation heating apparatus according to claim 2 , wherein a transparent cylinder is provided in the vacuum chamber so as to be fixed to the transparent disk. The surface heating type infrared radiation heating device according to any one of claims 1 to 3 is attached to both the upper and lower portions of the vacuum chamber, and infrared rays are irradiated from both the upper and lower surfaces of the heated object so that the entire heated object is uniform. A surface heating type infrared radiation heating device that heats and heats to a proper temperature distribution.

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