JP3828501B2 - Optical switch device - Google Patents

Description

【００４３】
つぎに、連結部のねじれにより発生する回転モーメント（逆方向の回転モーメント）について説明する。以下では、一対の連結部１２３のねじれ方向のバネ定数をｋ_y1とし、一対のミラー連結部１２４のねじれ方向のバネ定数をｋ_y2とする。
まず、図２（ａ）に示すように、可動枠１１０がストッパー１３２の上端に接触するまでの間について説明する。ミラー１１１の回動角度をθとすると、このθは、ミラー１１１と可動枠１１０のなす角度θ₁と、可動枠１１０と可動枠１０９（枠部１０７による平面）とのなす角度θ₂との和となる。なお、図２では、連結部１２３及びミラー連結部１２４は示していない。
【００４４】
ここで、静電力により発生する回転モーメントＭ（θ）と、連結部１２３，ミラー連結部１２４のねじれにより発生する逆方向の回転モーメントとの間には、以下の（５）式，（６）式に示す関係が成り立つ。
Ｍ（θ）＝２×ｋ_y1×θ₁・・・（５）
Ｍ（θ）＝２×ｋ_y2×θ₂・・・（６）
なお、「θ＝θ₁＋θ₂・・・（７）」である。また、バネ定数は、１つの連結部の値である。
【００４５】
このように、一対の連結部１２３及び一対のミラー連結部１２４には、各々同じ力が加わるため、ねじれ角度θ₁及びθ₂には、以下の（８）式に示す関係が成立する。
θ₁：θ₂＝ｋ_y2：ｋ_y1・・・（８）
【００４６】
ここで、可動枠１１０の枠体の半径をｒ１とし、ミラー１１１が枠部１０７による平面と水平の場合の枠部１１０とストッパー１３２の上端との距離をｄ１とする。このとき、可動枠１１０がストッパー１３２に接したときの可動枠１１０の回動角度は、ｔａｎ^-1（ｄ１／ｒ１）であり、この回動角度までは、ミラー１１１とともに可動枠１１０も回動する。可動枠１１０がストッパー１３２に接したときのミラー１１１の回動角度θは、「θ＝（ｋ_y1＋ｋ_y2）／ｋ_y2×ｔａｎ^-1（ｄ１／ｒ１）」となる。従って、θ＜（ｋ_y1＋ｋ_y2）／ｋ_y2×ｔａｎ^-1（ｄ１／ｒ１）の領域では、ミラー１１１とともに可動枠１１０も回動する。
【００４７】
ミラー１１１の回動角度θが「θ≧（ｋ_y1＋ｋ_y2）／ｋ_y2×ｔａｎ^-1（ｄ１／ｒ１）」の範囲では、可動枠１１０はストッパー１３２に接触してこれ以上回動しない。さらに、制御電極１０２，１０４に印加する電圧を大きくすると、ミラー１１１のみが回動しはじめる。この状態では、ミラー連結部１２４におけるねじれによる回転モーメントだけが発生し、静電力により発生する回転モーメントＭ（θ）と、ミラー連結部１２４のねじれにより発生する逆方向の回転モーメントとの間には、以下の（９）式に示す関係が成り立つ。
Ｍ（θ）＝２×ｋ_y2×（θ−ｔａｎ^-1（ｄ１／ｒ１））・・・（９）
【００４８】
図３は、制御電極に印加する制御電圧（Ｖ１＜Ｖ２＜Ｖ３＜Ｖ４＜Ｖ５＜Ｖ６）による静電力によってミラー１１１に生じる回転モーメントＭ及び連結部１２３，ミラー連結部１２４のねじれにより発する回転モーメントと、ミラー１１１の回動角度との関係を、直線（実線）で示した特性図である。図３において、各制御電圧（Ｖ１＜Ｖ２＜Ｖ３＜Ｖ４＜Ｖ５＜Ｖ６）における静電力によって生じる回転モーメントは、曲線で示している。
【００４９】
なお、点線（直線）の一方は、バネ定数ｋ₁の連結部１２３のねじれにより発する回転モーメントと回動角度との関係「Ｍ＝２×ｋ_y1θ」を示している。また、点線（直線）の他方は、バネ定数ｋ₂のミラー連結部１２４のねじれにより発する回転モーメントと回動角度との関係「Ｍ＝２×ｋ_y2θ」を示している。ここでは、ｋ_y1＜ｋ_y2の場合を示しており、バネ定数の大きいミラー連結部１２４のねじれによる回転モーメントと回動角度との関係を示す点線の方が、傾きが大きい。
【００５０】
図３に示すように、「θ＜（ｋ_y1＋ｋ_y2）／ｋ_y2×ｔａｎ^-1（ｄ１／ｒ１）」の領域、すなわち、可動枠１１０がストッパー１３２に接していない状態では、ミラー１１１とともに可動枠１１０も回動する。この状態で、ミラー１１１と可動枠１０９とを連結する仮想的な連結部を考えると、仮想的な連結部における等価的なバネ定数ｋ_yは、以下の（１０）式により示される。
ｋ_y＝２×ｋ_y1×ｋ_y2／（ｋ_y1＋ｋ_y2）・・・（１０）
【００５１】
このように、連結部１２３とミラー連結部１２４とを合わせた仮想的な連結部のバネ定数は、一対の連結部１２３及び一対のミラー連結部１２４のいずれか一方だけの場合に比較して小さくなる。このため、図３に示すように、可動枠１１０がストッパー１３２に接していない状態では、実線で示すように、「Ｍ＝２×ｋ_y1θ」で示される点線（直線）よりも傾きが小さい。
【００５２】
このとき、例えば、Ｖ＝Ｖ２における回動角度θは、Ｖ＝Ｖ２における静電力による回転モーメントを示す曲線と「Ｍ＝２×ｋ_yθ」で示される直線との交点となる。この交点は、Ｖ＝Ｖ２における静電力による回転モーメントを示す曲線と「Ｍ＝２×ｋ_y1θ」との交点よりも右方向となり、同じ制御電圧Ｖ２において、より大きな回動角度が得られていることを示している。
【００５３】
一方、「θ≧（ｋ_y1＋ｋ_y2）／ｋ_y2×ｔａｎ^-1（ｄ１／ｒ１）」の領域、すなわち、可動枠１１０がストッパー１３２に接し、ミラー１１１のみが回動する状態では、ミラー１１１の回動に作用する連結部は、ミラー連結部１２４だけとなる。この場合、ミラー連結部１２４により発生する回転モーメントＭは、「Ｍ＝２×ｋ_y2×（θ−ｔａｎ^-1（ｄ１／ｒ１））」と示すことができる。この式で示される直線は、「Ｍ＝２×ｋ_y2」で示される直線と傾きが等しく、「Ｍ＝−２×ｋ_y2×ｔａｎ^-1（ｄ１／ｒ１）」を通る直線となる。
【００５４】
この状態では、図３に示すように、Ｖ＝Ｖ４における静電力による回転モーメントを示す曲線との交点が存在し、この交点で示される状態で２つのモーメントが釣り合い、ミラー１１１が静止する。さらに、Ｖ＝Ｖ５における静電力による回転モーメントを示す曲線との交点も存在し、より高い制御電圧を印加しても、２つのモーメントが釣り合う状態が得られ、ミラー１１１を制御電極に接触させることなく静止させることが可能となる。
【００５５】
以上に説明したように、本実施の形態によれば、可動枠１１０がストッパー１３２に接触するまでは、一対の連結部１２３や一対のミラー連結部１２４が単独の場合よりも小さいバネ定数が実現され、より小さい静電力でより大きな回動角度が得られる。また、可動枠１１０がストッパー１３２に接触した以降は、ミラー連結部１２４のバネ定数となり、この状態までのバネ定数より大きくなる。このため、有る程度大きな制御電圧を印加しても、ミラー１１１を制御電極に接触させることなく静止させることが可能となり、従来より大きな回動角度を得られるようになる。
【００５６】
ところで、上述した実施の形態では、連結部１２３及びミラー連結部１２４を通る回動軸を中心としたミラー１１１の回動について説明したが、連結部１２１，１２２を通る回動軸を中心としたミラー１１１の回動についても同様である。この場合、例えば、制御電極１０４，１０５に制御電圧を印加し、ミラー１１１がＸ軸を回動軸として回動するものとして考えればよい。例えば、一対の連結部１２２におけるバネ定数ｋ_x2を一対の連結部１２３におけるバネ定数ｋ_y2に対応させ、一対の連結部１２１におけるバネ定数ｋ_x1を一対のミラー連結部１２４におけるバネ定数ｋ_y1に対応させればよい。
【００５７】
また、上記実施の形態では、バネ定数をｋ_y1＜ｋ_y2としたが、これに限るものではなく、例えば、ｋ_y1＝ｋ_y2としてもよい。ｋ_y1＝ｋ_y2としても、可動枠１１０がストッパー１３２に接触するまでの合成した仮想的なバネ定数ｋ_yは、ｋ_y1，ｋ_y2のどちらよりも小さくなり、可動枠１１０がストッパー１３２に接触した後で、ミラー１１１に作用するバネ定数を大きくすることができる。
【００５８】
なお、上述では、連結部を平面視矩形の板部材から構成したが、これに限るものではない。例えば、ジグザグの部分など、回動軸の方向とは異なる方向に延在する延在部を備え、ジグザグに形成された連結部を用いるようにしても良い。また、文献１（Tae-Sik Kim,et.AL,"ELECTROSTATIC MICROMIRROR WITH BUILT-IN LARGE AIR-GAP FOR WIDE RANGE OF ROTATIONAL ACTUATION",2001 International Conference on Optical MEMS,pp99-pp100）、文献２（澤田他、”Single Crystalline Mirror Actuated Electrostatically by Terraced Erectloades With High-Aspect Ration Torsion Spring",2001 International Conference on Optical MEMS,pp23-pp24）、文献３（水野他、"A 2-AXIS COMB-DRIVEN MICROMIRROR ARRAY FOR 3-D MEMS SWITCHS",2002 International Conference on Optical MEMS,pp17-18）に示されているトーションバネを用いるようにしても良い。
【００５９】
［実施の形態２］
つぎに、本発明の他の実施の形態について説明する。
図４は、本実施の形態における光スイッチ装置の構成例を示す概略的な平面図（ａ），断面図（ｂ），（ｃ）である。図４では、主に光スイッチ装置の１構成単位である一つのミラーを備えたスイッチ素子を部分的に示している。
図４に示す光スイッチ装置の構成について説明すると、まず、例えば単結晶シリコンなどの半導体からなる基板４０１の素子領域上に、制御電極４０２，４０３，４０４，４０５が形成されている。制御電極４０２，４０３，４０４，４０５は、各々がほぼ円板を４等分した形状である。
【００６０】
また、基板４０１の素子領域上には、支持部材４０６が形成されている。素子領域においては、ほぼ中央に、制御電極４０２，４０３，４０４，４０５が形成され、これらを囲うように、支持部材４０６は形成されている。支持部材４０６は、例えば、平面視格子状に形成され、この一つのマスが一つの素子領域に対応している。
このように形成された支持部材４０６に支持されて、枠部４０７が形成されている。枠部４０７は、制御電極４０２，４０３，４０４，４０５の上の領域に開口部を備え、この開口部の内側に、リング状の可動枠４０８，４０９，４１０，４１１，４１２及び円形のミラー４１３を備えている。
【００６１】
可動枠４０８は、上記開口部の中心を通る直線（回動軸）上に配置された一対の連結部４２１により、枠部４０７に張着しかつ軸着している。なお、以降では、上記回動軸をＸ軸とする。可動枠４０９は、連結部４２１の内側でＸ軸の上に配置された一対の連結部４２２により、可動枠４０８に張着しかつ軸着している。同様に、可動枠４１０は、Ｘ軸の上に配置された一対の連結部４２３により、可動枠４０９に張着しかつ軸着している。
【００６２】
また、可動枠４１１は、上記Ｘ軸に直交するＹ軸の上に配置された一対の連結部４２４により、枠部４１０に張着しかつ軸着している。可動枠４１２は、上記Ｙ軸の上に配置された一対の連結部４２５により、枠部４１１に張着しかつ軸着している。また、ミラー４１３は、Ｙ軸の上に配置された一対のミラー連結部４２６により、枠部４１２に張着しかつ軸着している。
【００６３】
なお、連結部４２１，４２２，４２３，４２４，４２５及びミラー連結部４２６は、例えば、トーションバースプリングなど、ねじりを受けて弾性変形する棒状や板状のばね部材である。
従って、可動枠４０８，４０９，４１０は、Ｘ軸を回動軸として回動可能とされ、可動枠４１１，４１２，ミラー４１３は、Ｙ軸を回動軸として回動可能とされている。
【００６４】
本実施の形態では、以上に示した可動枠４０８，４０９，４１０，４１１，４１２及びミラー４１３を備えた可動構造体の下にあたる基板４０１の上に、一対のストッパー４３１，４３２及び一対のストッパー４３３，４３４を設けた。ストッパー４３１〜４３４は、枠部４０７と制御電極４０２，４０３，４０４，４０５との間の素子領域に設けられている。また、ストッパー４３１〜４３４は、制御電極４０２，４０３，４０４，４０５の形成面より上記可動構造体の方向に伸びる、棒状の部材である。
【００６５】
ストッパー４３１は、連結部４２４，４２５，ミラー連結部４２６を通る回動軸（Ｙ軸）の下に配置され、かつ、可動枠４０８の下に配置されている。また、ストッパー４３２は、連結部４２４，４２５，ミラー連結部４２６を通る回動軸の下に配置され、かつ、可動枠４０９の下に配置されている。加えて、ストッパー４３２は、ストッパー４３１より低く形成されている。
【００６６】
一方、ストッパー４３３は、連結部４２１，４２２，４２３を通る回動軸（Ｘ軸）の下に配置され、かつ、可動枠４１１の下に配置されている。また、ストッパー４３４は、連結部４２１，４２２，４２３を通る回動軸の下に配置され、かつ可動枠４１２の下に配置されている。加えて、ストッパー４３４は、ストッパー４３３より低く形成されている。
なお、例えば、ストッパー４３１は、可動枠４０８の回動範囲を制限するものであり、必ずしも、連結部４２４，４２５，ミラー連結部４２６を通る回動軸の下に配置されている必要はない。これは、他のストッパーについても同様である。
【００６７】
従って、可動枠４０８の可動範囲は、ストッパー４３１により制限され、可動枠４０９の可動範囲は、ストッパー４３２により制限され、可動枠４１１の可動範囲は、ストッパー４３３により制限され、可動枠４１２の可動範囲は、ストッパー４３３により制限される。また、ストッパー４３１により制限される可動枠４０８の可動範囲は、ストッパー４３２により制限される可動枠４０９の可動範囲より小さい。同様に、ストッパー４３３により制限される可動枠４１１の可動範囲は、ストッパー４３４により制限される可動枠４１２の可動範囲より小さい。
【００６８】
つぎに、本実施の形態における光スイッチ装置の動作例について説明する。例えば、ミラー４１３をグランド（接地）電位に固定し、制御電極４０２，４０４に電圧を印加すると、前述した（１）を用いて説明したように、ミラー４１３と制御電極４０２，４０４との間に静電力が生じる。この静電力により、前述した（４）式を用いて説明したように、制御電極４０２，４０４に所定の電圧Ｖを印加したときの静電力による回転モーメントが、ミラー４１３に発生する。
【００６９】
ここで、可動枠４１１の枠体の部分の半径をｒ１とし、可動枠４１２の枠体の部分の半径をｒ２とする。また、可動枠４１１，４１２，及びミラー４１３が、枠部４０７の平面に水平な状態における、ストッパー４３３の上部から可動枠４１１までの距離をｄ１とし、ストッパー４３４の上部から可動枠４１２までの距離をｄ２とする。一方、一対の連結部４２４のバネ定数をｋ_y1、一対の連結部４２５のバネ定数をｋ_y2、一対のミラー連結部４２６のバネ定数をｋ_y3とし、ｋ_y1＜ｋ_y2＜ｋ_y3であるものとする。なお、バネ定数は、１つの連結部の値である。
【００７０】
以下、連結部のねじれにより発生する回転モーメントについて説明する。まず、図５（ａ）に示すように、可動枠４１１がストッパー４３３の上端に接触するまでの間について説明する。ここでは、連結部４２４，４２５，及びミラー連結部４２６を通るＹ軸を回動軸として回動する場合を例にする。なお、図５では、連結部４２４，４２５及びミラー連結部４２６は示していない。
【００７１】
可動枠４１１がストッパー４３３の上端に接するまでは、ミラー４１３から見た等価的なバネ定数ｋ_yは、以下の（１１）式により示される。
ｋ_y＝２×ｋ_y1×ｋ_y2×ｋ_y3／（ｋ_y2×ｋ_y3＋ｋ_y1×ｋ_y3＋ｋ_y1×ｋ_y2）・・・（１１）
従って、ｋ_y＜ｋ_y1＜ｋ_y2＜ｋ_y3であり、ミラー４１３から見た等価的なバネ定数は小さく、制御電極４０２，４０４に印加する電圧が小さくても、ミラー４１３（及び可動枠４１１，４１２）を容易に回動させることができる。
【００７２】
可動枠４１１がストッパー４３３の上端に接してこれ以上回動不能となった後、さらに制御電極４０２，４０４に印加する電圧を大きくすると、可動枠４１２とミラー４１３とが、さらに回動する。この場合、ミラー４１３から見た等価的なバネ定数ｋ_y’は、以下の（１２）式により示される。
ｋ_y’＝２×ｋ_y2×ｋ_y3／（ｋ_y2＋ｋ_y3）・・・（１２）
従って、この場合の等価的なバネ定数ｋ_y’は、ｋ_y1の値によらず、バネ定数ｋ_yより大きくなる。
【００７３】
さらに印加する電圧を大きくし、図５（ｂ）に示すように可動枠４１２がストッパー４３４の上端に接すると、可動枠４１２もこれ以上回動不能となる。この状態より、さらに制御電極４０２，４０４に印加する電圧を印加すると、図５（ｃ）に示すように、ミラー４１３だけが回動する。この場合のミラー４１３から見た等価的なバネ定数は、ｋ_y3であり、前述した等価的なバネ定数ｋ_y，ｋ_y’より大きくなる。従って、この状態より大きくミラー４１３を回動させるためには、より大きな電圧を制御電極４０２，４０４に印加する必要がある。
【００７４】
上述した可動枠４１１，４１２，及びミラー４１３の回動について、図６を用いて説明する。図６は、制御電極に印加する制御電圧（Ｖ１＜Ｖ２＜Ｖ３＜Ｖ４＜Ｖ５＜Ｖ６）による静電力によってミラー４１３に生じる回転モーメントＭ及び連結部４２４．４２５，ミラー連結部４２６のねじれにより発する回転モーメントと、ミラー４１３の回動角度との関係を、直線（実線）で示した特性図である。図６において、各制御電圧（Ｖ１＜Ｖ２＜Ｖ３＜Ｖ４＜Ｖ５＜Ｖ６）における静電力によって生じる回転モーメントは、曲線で示している。
【００７５】
なお、点線（直線）の１つは、バネ定数ｋ_y1の連結部４２４のねじれにより発する回転モーメントと回動角度との関係「Ｍ＝２×ｋ_y1θ」を示している。また、他の点線（直線）の１つは、バネ定数ｋ_y2の連結部４２５のねじれにより発する回転モーメントと回動角度との関係「Ｍ＝２×ｋ_y2θ」を示している。また、残りの点線（直線）は、バネ定数ｋ_y3のミラー連結部４２６のねじれにより発する回転モーメントと回動角度との関係「Ｍ＝２×ｋ_y3θ」を示している。ここでは、ｋ_y1＜ｋ_y2＜ｋ_y3の場合を示しており、バネ定数の大きいミラー連結部４２６のねじれによる回転モーメントと回動角度との関係を示す点線の傾きが、最も大きい。
【００７６】
図６において、可動枠４１１の傾きが「ｔａｎ^-1（ｄ１／ｒ１）」となるとき、すなわち、可動枠４１１がストッパー４３３に接触するときのミラー４１３の傾きをθ₁とすると、これは、以下の（１３）式で示される。
θ₁＝ｔａｎ^-1（ｄ１／ｒ１）＋ｋ_y1／ｋ_y2×ｔａｎ^-1（ｄ１／ｒ１）＋ｋ_y1／ｋ_y3×ｔａｎ^-1（ｄ１／ｒ１）・・・（１３）
【００７７】
０≦θ≦θ₁の範囲では、ミラー４１３から見た等価的なバネ定数ｋ_yは、「ｋ_y＝２×ｋ_y1×ｋ_y2×ｋ_y3／（ｋ_y2×ｋ_y3＋ｋ_y1×ｋ_y3＋ｋ_y1×ｋ_y2）」であるので、いずれの点線よりも小さな傾きの直線となる。従って、例えば、連結部４２４，４２５，またミラー連結部４２６のいずれかを単独で用いた場合に比較しても、制御電極４０２，４０４に印加する制御電圧をより小さくして、より大きな回動角度が得られる。
【００７８】
また、可動枠４１２の傾きが「ｔａｎ^-1（ｄ２／ｒ２）」となるとき、すなわち、可動枠４１２がストッパー４３４に接触するときのミラー４１３の傾きをθ₂とすると、これは、以下の（１４）式で示される。
θ₂＝ｔａｎ^-1（ｄ２／ｒ２）＋ｋ_y2／ｋ_y3×｛ｔａｎ^-1（ｄ２／ｒ２）−ｔａｎ^-1（ｄ１／ｒ１）｝・・・（１４）
【００７９】
θ₁≦θ≦θ₂の範囲では、ミラー４１３から見た等価的なバネ定数ｋ_yは、「ｋ_y＝２×ｋ_y2×ｋ_y3／（ｋ_y2＋ｋ_y3）」であるので、Ｍ＝２×ｋ_y2θの点線よりも小さな傾きの直線となる。また、θ₁≦θ≦θ₂の範囲で、静電力によるモーメントを示すいずれかの曲線と交点をもつので、制御電極４０２，４０４に印加する制御電圧によって、制御電極４０２，４０４に接触しない範囲で、ミラー４１３を静止状態とする制御が可能となる。
【００８０】
さらに、θ₂＜θの範囲では、可動枠４１１及び可動枠４１２は固定されており、ミラー４１３のみが回動する状態となる。このときのミラー４１３から見たバネ定数は、２×ｋ_y3であり、θ₂＜θの範囲の実線は、Ｍ２×ｋ_y3θの点線の傾きと等しくなる。θ₂＜θの範囲の実線は、図６に示すように、Ｖ＝Ｖ４の曲線と交点があり、この状態においても、制御電極４０２，４０４に印加する制御電圧によって、制御電極４０２，４０４に接触しない範囲で、ミラー４１３を静止状態とする制御が可能となる。図６に示す状態では、ミラー４１３を静止状態にできる最大の回動角度θは、θ₂より大きく、３つの点線と６つの曲線とのいずれの交点より、大きい値となっている。
【００８１】
なお、図４では、例えば、一対のストッパー４３４とこれより高い一対のストッパー４３３とを、各々備えるようにしたが、これに限るものではない。
例えば、図７に示すように、ミラー４１３の中心部に近いほど、基板４０１からの高さがなだらかに低くなっている一対のストッパー７３２により、図４に示すストッパー４３３とストッパー４３４とを組み合わせた効果を得るようにしても良い。ストッパー７３２の高い部分は、可動枠４１１の下部に配置し、ストッパー７３２の低い部分は、可動枠４１２の下部に配置する。
【００８２】
また、図８に示すように、ミラー４１３の中心部に近い方に、基板４０１からの高さが低い部分を備えた一対のストッパー８３２により、図４に示すストッパー４３３とストッパー４３４とを組み合わせた効果を得るようにしても良い。ストッパー８３２の高い部分は、可動枠４１１の下部に配置し、ストッパー８３２の低い部分は、可動枠４１２の下部に配置する。
【００８３】
ところで、図９に示すように、ミラー１１１に近づくほどミラー１１１の中央部に向かって細くなるように積層された複数の構造体からなる制御電極９０４，９０５を、ミラー１１１の下部に配置するようにしても良い。制御電極９０４，９０５は、図１に示す制御電極１０４，１０５に対応している。図１に示す制御電極１０２，１０３も、同様の構成としても良い。
【００８４】
また、図１０に示すように、ミラー１１１の下にあたる領域内でかつ制御電極９０４，９０５の外側の領域に、センサ電極９５４，９５５を設けるようにしても良い。図１０に示す光スイッチ装置は、基板１０１に、各制御電極の駆動電圧を制御する制御回路１００１と、センサ電極９５４，９５５に接続するセンサ回路１００２，１００３を備える。本光スイッチ装置は、ミラー１１１が所定の角度に回動した状態を、センサ電極９５４，９５５及びセンサ回路１００２，１００３により検出するようにしたものである。
【００８５】
これらの構成により検出したミラー１１１の回動角度の情報を、制御回路１００１に帰還させることで、ミラー１１１の回動角度をより高い精度で制御できる。例えば、センサ電極９５４とこの上部のミラー１１１の部分との間の距離に応じた信号をセンサ回路１００２より制御回路１００１に対して出力すればよい。なお、センサ電極９５４，９５５は、連結部１２１，１２２が配置されている回動軸の下に配置すればよい。また、図示していないが、図１に示す連結部１２３，ミラー連結部１２４が配置されている回動軸の下に、一対のセンサ電極を設け、各々センサ回路に接続し、上述と同様にしても良い。
【００８６】
【発明の効果】
以上説明したように、本発明では、ミラーと同じ回動軸で回動する可動枠の可動範囲の下にあたる基板の上にストッパーを設け、可動枠の回動がストッパーにより制限されるまでは、ミラーは連結部材とミラー連結部材の両方がねじれることで回動し、可動枠の回動がストッパーにより停止されると、ミラーはミラー連結部材がねじれることで回動するようにした。
この結果、本発明によれば、ミラーの回動の状態をミラーの回動動作の途中で変化させることが可能となり、電極などの基板の上に固定されている部材に接触しない範囲で、ミラーをより大きな回動角度で静止できるようになるという優れた効果が得られる。
【図面の簡単な説明】
【図１】 本発明の実施の形態における光スイッチ装置の構成例を示す概略的な平面図（ａ），断面図（ｂ），（ｃ）である。
【図２】 図１の光スイッチ装置の動作例を示す概略的な断面図である。
【図３】 ミラーに生じる回転モーメントＭ及び連結部のねじれにより発する回転モーメントと、ミラーの回動角度との関係を、直線（実線）で示した特性図である。
【図４】 本発明の他の実施の形態における光スイッチ装置の構成例を示す概略的な平面図（ａ），断面図（ｂ），（ｃ）である。
【図５】 図４の光スイッチ装置の動作例を示す概略的な断面図である。
【図６】 ミラーに生じる回転モーメントＭ及び連結部のねじれにより発する回転モーメントと、ミラーの回動角度との関係を、直線（実線）で示した特性図である。
【図７】 本発明の他の実施の形態における光スイッチ装置の構成例を示す概略的な断面図である。
【図８】 本発明の他の実施の形態における光スイッチ装置の構成例を示す概略的な断面図である。
【図９】 本発明の他の実施の形態における光スイッチ装置の構成例を示す概略的な断面図である。
【図１０】 本発明の他の実施の形態における光スイッチ装置の構成例を示す概略的な断面図である。
【図１１】 従来よりある光スイッチ装置の構成例を示す概略的な断面図（ａ），平面図（ｂ）である。
【図１２】 ミラーに生じる回転モーメントＭ及び連結部のねじれにより発する回転モーメントと、ミラーの回動角度との関係を、直線（実線）で示した特性図である。
【符号の説明】
１０１…基板、１０２，１０３，１０４，１０５…制御電極、１０６…支持部材、１０７…枠部、１０８，１０９，１１０…可動枠、１１１…ミラー、１２１，１２２，１２３…連結部、１２４…ミラー連結部、１３１，１３２…ストッパー。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical switch device that changes a path of signal light by a rotating mirror.
[0002]
[Prior art]
An optical switch device is an indispensable component for wavelength division multiplexing (WDM), which is indispensable in an optical network as a base in an Internet communication network or the like. This type of optical switch device includes an optical waveguide type and a MEMS (Micro Electro Mechanical System) type. Among them, a MEMS type optical switch device having a fine movable reflecting surface is considered promising (non- Patent Document 1).
[0003]
This MEMS optical switch device includes a fixed structure and a reflective structure having a movable mirror. For example, as shown in FIG. 11, the optical switch device includes a fixed structure including a substrate 1101 and electrodes 1102, 1103, 1104, 1105, a frame 1107 supported by a support member 1106, a movable frame 1108 that rotates, and a mirror 1109. And a reflecting structure. Further, as shown in the plan view of FIG. 11B, the movable frame 1108 and the mirror 1109 are rotatably connected by connecting portions 1121 and 1122 to enable the biaxial operation of the mirror 1109. The connecting portions 1121 and 1122 are bar-like or plate-like spring members that are elastically deformed by receiving a twist, such as a torsion bar spring.
[0004]
In this optical switch device, when the mirror 1109 is fixed to the ground (ground) potential and, for example, a voltage is applied to the electrodes 1102 and 1104, an electrostatic force is generated between the mirror 1109 and the electrodes 1102 and 1104. Due to this electrostatic force, a rotational moment is generated in the mirror 1109, and the mirror 1109 rotates about a rotation axis passing through the connecting portion 1122. At this time, the connecting portion 1122 is twisted by the turning operation of the mirror 1109, and a rotating moment in the direction opposite to the electrostatic force according to the turning angle of the mirror 1109 is generated in the connecting portion 1122.
[0005]
When the rotational moment due to the electrostatic force described above and the rotational moment due to the torsion of the connecting portion 1122 are balanced, the mirror 1109 stops rotating and stops. From this state, when the voltage applied to the electrodes 1102 and 1104 is increased, the rotational moment due to the electrostatic force also increases, and the mirror 1109 further tilts at a new angle that balances the rotational moment due to the twist and the rotational moment due to the electrostatic force. The mirror 1109 stops rotating and stops.
[0006]
These mirror operations will be described in more detail with reference to FIG. FIG. 12 is a graph showing the rotational moment (M) on the vertical axis and the rotation angle (θ) of the mirror 1109 on the horizontal axis, and when the voltage applied to the electrodes 1102 and 1104 is changed from V1 to V6. The relationship between the inclination of the mirror 1109 and the rotational moment is shown.
Since the electrostatic force is proportional to the square of the voltage, the rotational moment increases as the voltage increases. Furthermore, since the electrostatic force is inversely proportional to the square of the distance, when the inclination of the mirror 1109 increases and the distance approaches, the rotational moment further increases.
[0007]
On the other hand, the rotational torque in the reverse direction at the connecting portion 1122 is proportional to the angle of twist. When the proportionality constant is k (spring constant), the relationship between the rotational moment and the angle in the reverse direction can be represented by a straight line having an inclination k passing through the origin of the graph shown in FIG. FIG. 12 shows two types of spring constants k. ₁ , K ₂ (K ₁ <K ₂ ). The spring constant is a value of one connecting portion.
[0008]
In general, in such a MEMS element, it is desirable that the mirror 1109 can obtain a larger rotation angle at a lower voltage. Therefore, here, the spring constant of the connecting portion 1122 is k. ₁ Consider the case. M = 2k ₁ The straight line θ has an intersection with a curve indicating a rotational moment due to electrostatic force when V ≦ V3. At these intersections, the rotational moment due to electrostatic force balances with the rotational moment in the reverse direction due to torsion, and the mirror 1109 is stationary at the rotation angle indicated by the X coordinate of the intersection.
[0009]
However, the curve of V = V4 is always a straight line M = 2k at any rotation angle. ₁ It is above θ. This indicates that the rotational moment due to the electrostatic force is larger than the rotational moment in the reverse direction due to the twist of the connecting portion 1122 at any movement angle. In this case, one end of the mirror 1109 is drawn in the direction of the electrodes 1102 and 1104 by an electrostatic force to come into contact (pull-in). In the case of V = V4, in the case of the spring constant coupling portion 1122 that comes into contact with the electrode, the rotational moment of the electrostatic force when the voltage applied to the electrodes 1102 and 1104 is a specific voltage V in a range larger than V3 and smaller than V4 Thus, the largest rotation angle in the range where no contact is made is obtained.
[0010]
When the spring constant of the coupling portion 1122 is reduced, as described above, the rotational moment due to the electrostatic force is always greater than the rotational moment in the reverse direction due to the torsion of the coupling portion 1122, as described above. In such a state, it becomes difficult to control the rotation angle of the mirror 1109 by the magnitude of the voltage applied to the electrodes 1102, 1103, 1104, and 1105.
[0011]
On the other hand, if the spring constant of the connecting portion 1122 is increased, it is possible to avoid a state in which the rotational moment due to electrostatic force always exceeds the rotational moment in the reverse direction due to torsion. For example, the spring constant of the connecting part 1122 is set to k ₂ (K ₁ <K ₂ ), The straight line by the connecting portion 1122 is M = 2k ₂ θ and M = 2k1 ₁ It is a straight line with a larger slope than θ. In this case, until V = V6, there is an intersection with a curve indicating the rotational moment due to the electrostatic force, and if the voltage applied to the electrode is up to V6, the mirror 1109 does not contact any electrode. It becomes possible to make it stand still at the rotation angle.
[0012]
However, when the spring constant is increased in this way, the rotation angle when the same voltage is applied is set to the spring constant k. ₁ The rotation angle when applying a high voltage V6 is smaller than ₁ As a result, the rotation angle does not become much larger than when the voltage V3 is applied.
[0013]
[Non-Patent Document 1]
Tae-Sik Kim, Sang-Shin Lee, Youngjoo Yee, Jong UK Bu, Hyun-Ho Oh, Chil-Geun Park, and Man-Hyo Ha "ELECTROSTATIC MICROMIRROR WITH BUILT-IN LARGE Air-GAP FOR WIDE RANGE OF ROTATIONAL ACTUATION" , International Conference Optical MEMS 2001, IEEE / LEOS, p99,100 (2001)
[0014]
[Problems to be solved by the invention]
As described above, in the conventional optical switch device, if the spring constant of the connecting portion is reduced, the mirror can be rotated with a low voltage. Easy to touch. For this reason, it is very difficult to finely control the rotation angle of the mirror when the end of the mirror is close to the electrode. Therefore, although the mirror rotates greatly, it is difficult to stand still with the mirror movable angle being increased.
[0015]
On the other hand, when the spring constant of the connecting portion is increased, even when the end portion of the mirror is close to the electrode, if the voltage is increased, it is difficult to rotate until the end portion of the mirror comes into contact with the electrode. However, if the spring constant of the connecting portion is increased, the rotation angle of the mirror cannot be increased.
[0016]
The present invention has been made to solve the above-described problems, so that the mirror can be stopped at a larger rotation angle as long as it does not come into contact with a member fixed on a substrate such as an electrode. The purpose is to.
[0017]
[Means for Solving the Problems]
An optical switch device according to the present invention includes a frame member that is supported on a substrate so as to be spaced apart via a support member, and a pair of openings in an opening region of the frame member. First Pass these through the connecting member First A plate-like shape that is supported so as to be pivotable about a pivot axis and has an open area. First A movable frame, Within the opening region of the first movable frame, a pair of second connecting members that pass through a second rotation shaft different from the first rotation shaft are supported and opened around the second rotation shaft. A plate-like second movable frame having a region; this Second Within the opening area of the movable frame Second Via a pair of mirror coupling members that pass through the pivot axis Second A mirror having a reflecting portion that is supported rotatably about a rotation axis and reflects light; Second on the first pivot Provided on the substrate under the movable range of the movable frame Second At least a stopper that limits the range of rotation of the movable frame in the direction of the substrate is provided, and the optical switch operation is performed by displacing the reflecting portion by the rotation of the mirror.
According to this optical switch device, Second Until the rotation of the movable frame is limited by the stopper, the mirror Second Both the connecting member and the mirror connecting member rotate by twisting, Second When the rotation of the movable frame is stopped by the stopper, the mirror is rotated by twisting the mirror connecting member.
[0018]
In the optical switch device, the stopper is Two locations on the first pivot If each is provided, the rotational movement in both directions around the rotational axis of the movable frame is limited by each stopper.
In the above optical switch device, Second The connecting member and the mirror connecting member are each Second It is a spring member that is elastically deformed by receiving a twist by the rotation of the movable frame and the mirror, and the spring constant due to the twist of the mirror connecting member, Second What is necessary is just to make it the state larger than the spring constant by the twist of a connection member.
[0019]
Another optical switch device according to the present invention passes through a frame member that is supported on a substrate while being spaced apart via a support member, and a pair of first connecting members within an opening region of the frame member. A plate-like first movable frame that is supported rotatably about the first rotation axis and has an opening area, and a pair of second connections that pass through the first rotation axis in the opening area of the first movable frame. A plate-like second movable frame that is supported so as to be rotatable about a first rotation axis through a member and has an opening area, and is different from the first rotation axis in the opening area of the second movable frame. A mirror having a reflecting portion that is supported rotatably about the second rotation axis and reflects light via a pair of mirror connecting members passing through the second rotation axis; On the second pivot And at least a stopper provided on a substrate under the movable range of the first movable frame for limiting a rotation range of the first movable frame in the direction of the substrate, and the reflecting portion is displaced by rotating the mirror. An optical switch operation is performed.
According to this optical switch device, in the rotation of the mirror about the first rotation axis, the mirror is connected to the first connection member and the second connection member until the rotation of the first movable frame is limited by the stopper. When the first movable frame is stopped by the stopper, the mirror is rotated by twisting the second connecting member.
[0020]
In the optical switch device, the stopper is Two locations on the second pivot If each is provided, the rotational movement in both directions around the first rotational axis of the first movable frame is limited by each stopper.
In the optical switch device, the first connecting member and the second connecting member are spring members that are elastically deformed by being twisted by the rotation of the first movable frame and the second movable frame, respectively. The spring constant may be larger than the spring constant due to torsion of the first connecting member.
[0021]
Another optical switch device according to the present invention passes through a frame member that is supported on a substrate so as to be spaced apart via a support member, and a pair of first connecting members within an opening region of the frame member. First A plate-shaped first movable frame that is supported rotatably about a rotation axis and has an opening area, and an opening area of the first movable frame. Second different from the first rotation axis A plate-like second movable frame that is supported so as to be rotatable about the rotation axis via a pair of second connecting members passing through the rotation axis, and has an opening region; A plate-like shape that is supported rotatably about the second rotation shaft via a pair of third connecting members passing through the second rotation shaft within the opening region of the second rotation frame and has an opening region A third movable frame of This first 3 A mirror having a reflecting portion that is supported rotatably about the rotation axis and reflects light via a pair of mirror connecting members that pass through the rotation axis within the opening region of the movable frame; On the first pivot A first stopper for limiting a rotation range of the first movable frame in the direction of the substrate provided on the substrate under the movable range of the first movable frame; On the first pivot A mirror having at least a second stopper lower than the first stopper for restricting a rotation range in the direction of the substrate of the second movable frame provided on the substrate under the movable range of the second movable frame; The optical switch operation is performed by displacing the reflection portion by the above.
[0022]
In the optical switch device, the first stopper is: First Rotating shaft Up of 2 places And the second stopper can be First Rotating shaft Up of 2 places May be provided respectively. Further, the first stopper and the second stopper may be integrally formed, and the integrally formed first stopper and second stopper are Two locations on the first pivot May be provided respectively.
In the optical switch device, the first connecting member, the second connecting member, and the mirror connecting portion are each a first movable frame, a second movable frame, and a spring member that is elastically deformed by being twisted by the rotation of the mirror. The spring constant due to torsion of the second connecting member is larger than the spring constant due to torsion of the first connecting member, and the spring constant due to torsion of the mirror connecting member is larger than the spring constant due to torsion of the second connecting member. Good.
[0023]
Another optical switch device according to the present invention passes through a frame member that is supported on a substrate while being spaced apart via a support member, and a pair of first connecting members within an opening region of the frame member. A plate-like first movable frame that is supported rotatably about the first rotation axis and has an opening area, and a pair of second connections that pass through the first rotation axis in the opening area of the first movable frame. A pair of plate-like second movable frames that are supported so as to be rotatable about the first rotation axis through the member and have an opening area, and a pair that passes through the first rotation axis in the opening area of the second movable frame. A plate-like third movable frame that is supported rotatably about the first rotation axis through the third connecting member and has an opening region, and the first rotation within the opening region of the third movable frame. Reflection that is supported rotatably about the second rotation axis and reflects light through a pair of mirror connecting members that pass through a second rotation axis that is different from the axis And a mirror having a, On the second pivot A first stopper for limiting a rotation range of the first movable frame in the direction of the substrate provided on the substrate under the movable range of the first movable frame; On the second pivot A mirror having at least a second stopper lower than the first stopper for restricting a rotation range in the direction of the substrate of the second movable frame provided on the substrate under the movable range of the second movable frame; The optical switch operation is performed by displacing the reflection portion by the above.
[0024]
In the optical switch device, the first stopper is the first stopper. 2 Rotating shaft Up of 2 places And the second stopper is also provided on the second 2 Rotating shaft Up of 2 places It suffices if each is provided. Further, the first stopper and the second stopper may be integrally formed, and the integrally formed first stopper and second stopper are the first stopper and the second stopper, respectively. 2 Rotating shaft Up of 2 places It suffices if each is provided.
[0025]
In the above optical switch device, the first connecting member, the second connecting member, and the third connecting portion are elastically deformed by being twisted by the rotation of the first movable frame, the second movable frame, and the third movable frame, respectively. The spring constant of the second connecting member is greater than the spring constant due to the torsion of the first connecting member, and the spring constant due to the torsion of the third connecting member is greater than the spring constant due to the torsion of the second connecting member. It may be a thing.
[0026]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[Embodiment 1]
First, a first embodiment of the present invention will be described. FIG. 1 is a schematic plan view (a), cross-sectional views (b), and (c) showing a configuration example of the optical switch device according to the present embodiment. In FIG. 1, a switch element provided with one mirror, which is one constituent unit of an optical switch device, is partially shown.
[0027]
The configuration of the optical switch device shown in FIG. 1 will be described. First, control electrodes 102, 103, 104, and 105 are formed on an element region of a substrate 101 made of a semiconductor such as single crystal silicon. Each of the control electrodes 102, 103, 104, and 105 has a shape that substantially divides a disk into four equal parts.
[0028]
A support member 106 is formed on the element region of the substrate 101. In the element region, control electrodes 102, 103, 104, and 105 are formed substantially at the center, and a support member 106 is formed so as to surround them. The support member 106 is formed, for example, in a lattice shape in plan view, and one mass corresponds to one element region.
[0029]
On the other hand, a frame portion 107 is formed by being supported by the support member 106. The frame 107 includes an opening in the region above the control electrodes 102, 103, 104, and 105, and includes ring-shaped movable frames 108, 109, 110, and a circular mirror 111 inside the opening. Yes.
[0030]
The movable frame 108 is stretched and pivotally attached to the frame portion 107 by a pair of connecting portions 121 arranged on a straight line (rotating shaft) passing through the center of the opening. The connecting portion 121 is a rod-like or plate-like spring member that is elastically deformed by receiving a twist, such as a torsion bar spring.
The movable frame 109 is attached to and pivotally attached to the movable frame 108 by a pair of connecting portions 122 disposed on the rotating shaft inside the connecting portion 121. The connecting portion 122 is also a bar-like or plate-like spring member that is elastically deformed by receiving a twist, such as a torsion bar spring.
[0031]
The movable frame 108 can be rotated around a rotation axis passing through the connecting portion 121, and the movable frame 109 can be rotated around a rotation axis passing through the connecting portion 122. Moreover, the connection part 121 and the connection part 122 are arrange | positioned on the same rotation axis | shaft, and the movable frame 108 and the movable frame 109 rotate centering on the same rotation axis.
[0032]
In addition, the movable frame 110 is stretched and pivotally attached to the movable frame 109 by a pair of connecting portions 123 disposed on a rotation axis orthogonal to the rotation axis passing through the connection portions 121 and 122. The connecting portion 123 is also a bar-like or plate-like spring member that is elastically deformed by receiving a torsion, such as a torsion bar spring.
The mirror 111 is disposed on the inner side of the movable frame 110 and is attached to the movable frame 110 and pivotally attached thereto by a pair of mirror coupling portions 124 disposed on a rotation shaft passing through the coupling portion 123.
[0033]
The movable frame 110 can be rotated around a rotation axis passing through the connecting portion 123, and the mirror 111 can be rotated around a rotation axis passing through the mirror connecting portion 124. Moreover, the connection part 123 and the mirror connection part 124 are arrange | positioned on the same rotation axis | shaft, and the movable frame 110 and the mirror 111 rotate centering on the same rotation axis.
[0034]
Although not shown, the control electrodes 102, 103, 104, 105 and the support member 106 are formed on an interlayer insulating film formed on the surface of the substrate 101. An integrated circuit (not shown) composed of a plurality of elements is formed on the substrate 101 under the interlayer insulating film. A control circuit (not shown) is configured as a part of the integrated circuit. For example, the control circuit generates a predetermined potential difference between any selected control electrode and the mirror 111. As a result, an electric charge is induced in the selected control electrode and the mirror 111, an electrostatic force acts, and the mirror 111 rotates.
[0035]
In the present embodiment, the pair of stoppers 131 and the pair of stoppers 132 are provided on the substrate 101 under the movable structure including the movable frames 108, 109, 110 and the mirror 111 described above. The stoppers 131 and 132 are provided in the element region between the frame portion 107 and the control electrodes 102, 103, 104, and 105. The stoppers 131 and 132 are rod-shaped members that extend in the direction of the movable structure from the formation surface of the control electrodes 102, 103, 104, and 105.
[0036]
The stopper 131 is disposed below the rotating shaft that passes through the connecting portion 123 and the mirror connecting portion 124, and is disposed below the movable frame 108. Further, the stopper 132 is disposed below the pivot shaft passing through the connecting portions 121 and 122 and is disposed below the movable frame 110.
Therefore, the movable range of the movable frame 108 is limited by the stopper 131, and the movable range of the movable frame 110 is limited by the stopper 132. For example, the stopper 131 limits the rotation range of the movable frame 108 and does not necessarily have to be disposed below the rotation shaft passing through the connecting portion 123 and the mirror connecting portion 124. The same applies to the stopper 132.
[0037]
Next, an operation example of the optical switch device according to the present embodiment will be described. For example, when the mirror 111 is fixed to the ground (ground) potential and a voltage is applied to the control electrodes 102 and 104, an electrostatic force is generated between the mirror 111 and the control electrodes 102 and 104.
Here, the electrostatic force F acting between two electrodes arranged in parallel with each other is expressed as follows, where V is the voltage applied between the two electrodes, d is the distance between the electrodes, and S is the electrode area. 1) It is shown by the formula.
F = ε ₀ × V ² × S / d ² ... (1)
[0038]
Accordingly, when the voltage V is applied to the control electrodes 102 and 104 with the mirror 111 and the movable frame being in a horizontal state, the distance between the mirror 111 and the control electrodes 102 and 104 is d, and the distance from the center of the mirror 111 is x. The force received by the minute portion of the area dS is expressed by the following equation (2). In the equation (2), it is assumed that a minute portion of the area dS is parallel to each control electrode. In addition, here, the rotation axis of the mirror 111 is the Y axis, and the portion separated by x is a portion on the left side in the drawing of FIG.
[0039]
F = ε ₀ × V ² dS (d · x × tan θ) ² ... (2)
[0040]
Accordingly, the rotational moment M about the Y axis due to the minute portion of the area dS is expressed by the following equation (3).
M = x × ε ₀ × V ² ds / (d · x × tan θ) ² ... (3)
[0041]
Therefore, the rotational moment due to the electrostatic force when a predetermined voltage V is applied to the control electrodes 102 and 104 is expressed by the following equation (4) obtained by integrating the equation (3) with respect to the area of the corresponding control electrode.
[0042]
[Expression 1]

[0043]
Next, the rotational moment (rotational moment in the reverse direction) generated by the twist of the connecting portion will be described. In the following, the spring constant in the torsional direction of the pair of connecting parts 123 is k. _y1 And the spring constant in the twist direction of the pair of mirror connecting portions 124 is k. _y2 And
First, as shown in FIG. 2A, a description will be given until the movable frame 110 comes into contact with the upper end of the stopper 132. When the rotation angle of the mirror 111 is θ, this θ is an angle θ formed by the mirror 111 and the movable frame 110. ₁ And an angle θ between the movable frame 110 and the movable frame 109 (a plane formed by the frame portion 107) ₂ And the sum. In FIG. 2, the connecting portion 123 and the mirror connecting portion 124 are not shown.
[0044]
Here, between the rotational moment M (θ) generated by the electrostatic force and the reverse rotational moment generated by the torsion of the connecting portion 123 and the mirror connecting portion 124, the following equations (5), (6) The relationship shown in the equation holds.
M (θ) = 2 × k _y1 × θ ₁ ... (5)
M (θ) = 2 × k _y2 × θ ₂ ... (6)
In addition, “θ = θ ₁ + Θ ₂ (7) ". The spring constant is a value of one connecting portion.
[0045]
In this way, the same force is applied to the pair of connecting portions 123 and the pair of mirror connecting portions 124, respectively. ₁ And θ ₂ The relationship shown in the following equation (8) is established.
θ ₁ : Θ ₂ = K _y2 : K _y1 ... (8)
[0046]
Here, the radius of the frame body of the movable frame 110 is r1, and the distance between the frame portion 110 and the upper end of the stopper 132 when the mirror 111 is horizontal with the plane formed by the frame portion 107 is d1. At this time, the rotation angle of the movable frame 110 when the movable frame 110 contacts the stopper 132 is tan ^-1 The movable frame 110 is also rotated together with the mirror 111 up to this rotation angle. The rotation angle θ of the mirror 111 when the movable frame 110 is in contact with the stopper 132 is “θ = (k _y1 + K _y2 ) / K _y2 Xtan ^-1 (D1 / r1) ". Therefore, θ <(k _y1 + K _y2 ) / K _y2 Xtan ^-1 In the area (d1 / r1), the movable frame 110 also rotates together with the mirror 111.
[0047]
The rotation angle θ of the mirror 111 is “θ ≧ (k _y1 + K _y2 ) / K _y2 Xtan ^-1 In the range of (d1 / r1) ”, the movable frame 110 contacts the stopper 132 and does not rotate any further. Further, when the voltage applied to the control electrodes 102 and 104 is increased, only the mirror 111 starts to rotate. In this state, only the rotational moment due to the twist in the mirror connecting portion 124 is generated, and the rotation moment M (θ) generated by the electrostatic force and the reverse rotational moment generated due to the twist of the mirror connecting portion 124 are between. The relationship shown in the following formula (9) is established.
M (θ) = 2 × k _y2 × (θ-tan ^-1 (D1 / r1)) (9)
[0048]
FIG. 3 shows the rotational moment M generated in the mirror 111 by the electrostatic force due to the control voltage (V1 <V2 <V3 <V4 <V5 <V6) applied to the control electrode, and the rotational moment generated by the twist of the connecting portion 123 and the mirror connecting portion 124. FIG. 5 is a characteristic diagram showing a relationship between the rotation angle of the mirror 111 and a straight line (solid line). In FIG. 3, the rotational moment generated by the electrostatic force at each control voltage (V1 <V2 <V3 <V4 <V5 <V6) is shown by a curve.
[0049]
One of the dotted lines (straight line) is the spring constant k ₁ The relationship between the rotational moment generated by the twist of the connecting portion 123 and the rotation angle “M = 2 × k _y1 θ ”. The other of the dotted lines (straight line) is the spring constant k. ₂ The relation “M = 2 × k between the rotation moment generated by the twist of the mirror connecting portion 124 and the rotation angle” _y2 θ ”. Where k _y1 <K _y2 The dotted line indicating the relationship between the rotation moment and the rotation angle caused by the twist of the mirror connecting portion 124 having a large spring constant has a larger inclination.
[0050]
As shown in FIG. 3, “θ <(k _y1 + K _y2 ) / K _y2 Xtan ^-1 In the area of (d1 / r1) ”, that is, in a state where the movable frame 110 is not in contact with the stopper 132, the movable frame 110 also rotates together with the mirror 111. In this state, when considering a virtual coupling portion that couples the mirror 111 and the movable frame 109, an equivalent spring constant k in the virtual coupling portion. _y Is expressed by the following equation (10).
k _y = 2 × k _y1 × k _y2 / (K _y1 + K _y2 ) ... (10)
[0051]
As described above, the spring constant of the virtual connecting portion including the connecting portion 123 and the mirror connecting portion 124 is smaller than that of either one of the pair of connecting portions 123 and the pair of mirror connecting portions 124. Become. For this reason, as shown in FIG. 3, in a state where the movable frame 110 is not in contact with the stopper 132, as shown by a solid line, “M = 2 × k _y1 The inclination is smaller than the dotted line (straight line) indicated by “θ”.
[0052]
At this time, for example, the rotation angle θ at V = V2 is expressed by a curve indicating the rotational moment due to the electrostatic force at V = V2 and “M = 2 × k”. _y This is the intersection with the straight line indicated by “θ”. This intersection point is a curve indicating the rotational moment due to the electrostatic force at V = V2 and “M = 2 × k”. _y1 It indicates that the rotation angle is rightward with respect to the intersection with “θ”, and that a larger rotation angle is obtained at the same control voltage V2.
[0053]
On the other hand, “θ ≧ (k _y1 + K _y2 ) / K _y2 Xtan ^-1 In the region of (d1 / r1), that is, in a state where the movable frame 110 is in contact with the stopper 132 and only the mirror 111 is rotated, the connecting portion acting on the rotation of the mirror 111 is only the mirror connecting portion 124. In this case, the rotational moment M generated by the mirror connecting portion 124 is “M = 2 × k _y2 × (θ-tan ^-1 (D1 / r1)) ". The straight line represented by this equation is “M = 2 × k _y2 The slope is equal to the straight line indicated by “M = −2 × k _y2 Xtan ^-1 (D1 / r1) ".
[0054]
In this state, as shown in FIG. 3, there is an intersection with a curve indicating the rotational moment due to the electrostatic force at V = V4, and the two moments are balanced in the state indicated by this intersection, and the mirror 111 is stationary. Further, there is an intersection with a curve indicating a rotational moment due to electrostatic force at V = V5, and even when a higher control voltage is applied, a state where the two moments are balanced is obtained, and the mirror 111 is brought into contact with the control electrode. It becomes possible to make it stand still.
[0055]
As described above, according to the present embodiment, until the movable frame 110 comes into contact with the stopper 132, a smaller spring constant is realized than when the pair of connecting portions 123 and the pair of mirror connecting portions 124 are alone. Thus, a larger rotation angle can be obtained with a smaller electrostatic force. Further, after the movable frame 110 comes into contact with the stopper 132, the spring constant of the mirror connecting portion 124 is obtained, which is larger than the spring constant up to this state. For this reason, even if a certain large control voltage is applied, the mirror 111 can be kept stationary without being brought into contact with the control electrode, and a larger rotation angle can be obtained than in the prior art.
[0056]
By the way, in embodiment mentioned above, although rotation of the mirror 111 centering on the rotating shaft which passes along the connection part 123 and the mirror connection part 124 was demonstrated, it was centered on the rotating shaft which passes along the connection parts 121 and 122. The same applies to the rotation of the mirror 111. In this case, for example, it may be considered that a control voltage is applied to the control electrodes 104 and 105 and the mirror 111 rotates about the X axis as a rotation axis. For example, the spring constant k at the pair of connecting portions 122 _x2 The spring constant k at the pair of connecting portions 123 _y2 And the spring constant k at the pair of connecting portions 121 _x1 The spring constant k at the pair of mirror connecting portions 124 _y1 What is necessary is just to correspond.
[0057]
In the above embodiment, the spring constant is set to k. _y1 <K _y2 However, it is not limited to this. For example, k _y1 = K _y2 It is good. k _y1 = K _y2 However, the combined virtual spring constant k until the movable frame 110 contacts the stopper 132 _y Is k _y1 , K _y2 The spring constant acting on the mirror 111 can be increased after the movable frame 110 comes into contact with the stopper 132.
[0058]
In the above description, the connecting portion is made of a plate member having a rectangular shape in plan view, but is not limited thereto. For example, an extending part that extends in a direction different from the direction of the rotation axis, such as a zigzag part, may be used, and a connecting part formed in a zigzag may be used. Reference 1 (Tae-Sik Kim, et.AL, "ELECTROSTATIC MICROMIRROR WITH BUILT-IN LARGE AIR-GAP FOR WIDE RANGE OF ROTATIONAL ACTUATION", 2001 International Conference on Optical MEMS, pp99-pp100), Reference 2 (Sawada et al. , “Single Crystalline Mirror Actuated Electrostatically by Terraced Erectloades With High-Aspect Ration Torsion Spring”, 2001 International Conference on Optical MEMS, pp23-pp24, Reference 3 (Mizuno et al., “A 2-AXIS COMB-DRIVEN MICROMIRROR ARRAY FOR 3- D MEMS SWITCHS ", 2002 International Conference on Optical MEMS, pp17-18) may be used.
[0059]
[Embodiment 2]
Next, another embodiment of the present invention will be described.
FIG. 4 is a schematic plan view (a), cross-sectional views (b), and (c) showing a configuration example of the optical switch device according to the present embodiment. In FIG. 4, the switch element provided with one mirror which is mainly one structural unit of the optical switch device is partially shown.
The configuration of the optical switch device shown in FIG. 4 will be described. First, control electrodes 402, 403, 404, and 405 are formed on an element region of a substrate 401 made of a semiconductor such as single crystal silicon. Each of the control electrodes 402, 403, 404, and 405 has a shape that substantially divides the disc into four equal parts.
[0060]
A support member 406 is formed on the element region of the substrate 401. In the element region, control electrodes 402, 403, 404, and 405 are formed almost at the center, and a support member 406 is formed so as to surround them. The support member 406 is formed in, for example, a lattice shape in plan view, and this one mass corresponds to one element region.
A frame portion 407 is formed by being supported by the support member 406 thus formed. The frame portion 407 has an opening in a region above the control electrodes 402, 403, 404, and 405, and ring-shaped movable frames 408, 409, 410, 411, 412 and a circular mirror 413 are provided inside the opening. It has.
[0061]
The movable frame 408 is stretched and pivotally attached to the frame portion 407 by a pair of connecting portions 421 arranged on a straight line (rotating shaft) passing through the center of the opening. Hereinafter, the rotation axis is referred to as the X axis. The movable frame 409 is stretched and pivotally attached to the movable frame 408 by a pair of coupling portions 422 disposed on the X axis inside the coupling portion 421. Similarly, the movable frame 410 is stretched and pivotally attached to the movable frame 409 by a pair of connecting portions 423 arranged on the X axis.
[0062]
In addition, the movable frame 411 is stretched and pivotally attached to the frame portion 410 by a pair of connecting portions 424 disposed on the Y axis orthogonal to the X axis. The movable frame 412 is stretched and pivotally attached to the frame portion 411 by a pair of connecting portions 425 disposed on the Y axis. Further, the mirror 413 is attached to the frame portion 412 and pivotally attached thereto by a pair of mirror connecting portions 426 disposed on the Y axis.
[0063]
The connecting portions 421, 422, 423, 424, 425 and the mirror connecting portion 426 are rod-like or plate-like spring members that are elastically deformed by being twisted, such as a torsion bar spring.
Therefore, the movable frames 408, 409, and 410 can be rotated about the X axis as a rotation axis, and the movable frames 411, 412, and the mirror 413 can be rotated about the Y axis as a rotation axis.
[0064]
In this embodiment, a pair of stoppers 431 and 432 and a pair of stoppers 433 are provided on the substrate 401 that is below the movable structure including the movable frames 408, 409, 410, 411, and 412 and the mirror 413 described above. , 434. The stoppers 431 to 434 are provided in the element region between the frame portion 407 and the control electrodes 402, 403, 404, and 405. The stoppers 431 to 434 are rod-shaped members that extend in the direction of the movable structure from the formation surface of the control electrodes 402, 403, 404, and 405.
[0065]
The stopper 431 is disposed below the rotation axis (Y axis) passing through the coupling portions 424, 425 and the mirror coupling portion 426 and below the movable frame 408. In addition, the stopper 432 is disposed below the rotating shaft that passes through the connecting portions 424, 425 and the mirror connecting portion 426, and is disposed below the movable frame 409. In addition, the stopper 432 is formed lower than the stopper 431.
[0066]
On the other hand, the stopper 433 is disposed below the rotation axis (X axis) passing through the connecting portions 421, 422, and 423 and is disposed below the movable frame 411. In addition, the stopper 434 is disposed below the rotating shaft that passes through the connecting portions 421, 422, and 423, and is disposed below the movable frame 412. In addition, the stopper 434 is formed lower than the stopper 433.
For example, the stopper 431 limits the rotation range of the movable frame 408 and does not necessarily have to be arranged below the rotation shaft passing through the connecting portions 424, 425, and the mirror connecting portion 426. The same applies to the other stoppers.
[0067]
Accordingly, the movable range of the movable frame 408 is limited by the stopper 431, the movable range of the movable frame 409 is limited by the stopper 432, the movable range of the movable frame 411 is limited by the stopper 433, and the movable range of the movable frame 412 is Is limited by the stopper 433. Further, the movable range of the movable frame 408 limited by the stopper 431 is smaller than the movable range of the movable frame 409 limited by the stopper 432. Similarly, the movable range of the movable frame 411 restricted by the stopper 433 is smaller than the movable range of the movable frame 412 restricted by the stopper 434.
[0068]
Next, an operation example of the optical switch device according to the present embodiment will be described. For example, when the mirror 413 is fixed to the ground (ground) potential and a voltage is applied to the control electrodes 402 and 404, as described with reference to (1) described above, the mirror 413 is interposed between the control electrodes 402 and 404. An electrostatic force is generated. Due to this electrostatic force, as described with reference to the above-described equation (4), a rotational moment due to the electrostatic force when a predetermined voltage V is applied to the control electrodes 402 and 404 is generated in the mirror 413.
[0069]
Here, the radius of the frame portion of the movable frame 411 is r1, and the radius of the frame portion of the movable frame 412 is r2. Further, when the movable frames 411, 412 and the mirror 413 are horizontal to the plane of the frame portion 407, the distance from the upper part of the stopper 433 to the movable frame 411 is d1, and the distance from the upper part of the stopper 434 to the movable frame 412 Is d2. On the other hand, the spring constant of the pair of connecting portions 424 is k _y1 , The spring constant of the pair of connecting portions 425 is k _y2 , The spring constant of the pair of mirror connecting portions 426 is k _y3 And k _y1 <K _y2 <K _y3 Suppose that The spring constant is a value of one connecting portion.
[0070]
Hereinafter, the rotational moment generated by the twist of the connecting portion will be described. First, as shown in FIG. 5A, a description is given of the period until the movable frame 411 contacts the upper end of the stopper 433. Here, a case where the Y axis passing through the connecting portions 424, 425, and the mirror connecting portion 426 is used as a rotating shaft is taken as an example. In FIG. 5, the connecting portions 424 and 425 and the mirror connecting portion 426 are not shown.
[0071]
Until the movable frame 411 contacts the upper end of the stopper 433, an equivalent spring constant k viewed from the mirror 413 is obtained. _y Is expressed by the following equation (11).
k _y = 2 × k _y1 × k _y2 × k _y3 / (K _y2 × k _y3 + K _y1 × k _y3 + K _y1 × k _y2 (11)
Therefore, k _y <K _y1 <K _y2 <K _y3 The equivalent spring constant viewed from the mirror 413 is small, and the mirror 413 (and the movable frames 411 and 412) can be easily rotated even if the voltage applied to the control electrodes 402 and 404 is small.
[0072]
If the voltage applied to the control electrodes 402 and 404 is further increased after the movable frame 411 comes into contact with the upper end of the stopper 433 and cannot be rotated any more, the movable frame 412 and the mirror 413 are further rotated. In this case, the equivalent spring constant k viewed from the mirror 413 _y 'Is represented by the following equation (12).
k _y '= 2 × k _y2 × k _y3 / (K _y2 + K _y3 ) ... (12)
Therefore, the equivalent spring constant k in this case _y 'Is k _y1 Spring constant k regardless of the value of _y Become bigger.
[0073]
When the applied voltage is further increased and the movable frame 412 is in contact with the upper end of the stopper 434 as shown in FIG. 5B, the movable frame 412 can no longer be rotated. In this state, when a voltage to be applied to the control electrodes 402 and 404 is further applied, only the mirror 413 rotates as shown in FIG. The equivalent spring constant seen from the mirror 413 in this case is k _y3 And the above-described equivalent spring constant k _y , K _y 'Become bigger. Therefore, in order to rotate the mirror 413 larger than this state, it is necessary to apply a larger voltage to the control electrodes 402 and 404.
[0074]
The above-described rotation of the movable frames 411, 412 and the mirror 413 will be described with reference to FIG. FIG. 6 is generated by the rotational moment M generated in the mirror 413 by the electrostatic force due to the control voltage (V1 <V2 <V3 <V4 <V5 <V6) applied to the control electrode and the twist of the connecting portion 424.425 and the mirror connecting portion 426. It is the characteristic view which showed the relationship between a rotational moment and the rotation angle of the mirror 413 with the straight line (solid line). In FIG. 6, the rotational moment generated by the electrostatic force at each control voltage (V1 <V2 <V3 <V4 <V5 <V6) is shown by a curve.
[0075]
One dotted line (straight line) is the spring constant k. _y1 The relationship between the rotational moment generated by the twist of the connecting portion 424 and the rotation angle “M = 2 × k _y1 θ ”. Also, one of the other dotted lines (straight line) is the spring constant k _y2 The relationship between the rotational moment generated by the twist of the connecting portion 425 and the rotation angle “M = 2 × k _y2 θ ”. The remaining dotted line (straight line) is the spring constant k. _y3 The relationship between the rotational moment generated by the twist of the mirror connecting portion 426 and the rotation angle “M = 2 × k _y3 θ ”. Where k _y1 <K _y2 <K _y3 In this case, the inclination of the dotted line indicating the relationship between the rotation moment and the rotation angle due to the twist of the mirror connecting portion 426 having a large spring constant is the largest.
[0076]
In FIG. 6, the inclination of the movable frame 411 is “tan”. ^-1 (D1 / r1) ”, that is, the inclination of the mirror 413 when the movable frame 411 contacts the stopper 433 is θ ₁ Then, this is expressed by the following equation (13).
θ ₁ = Tan ^-1 (D1 / r1) + k _y1 / K _y2 Xtan ^-1 (D1 / r1) + k _y1 / K _y3 Xtan ^-1 (D1 / r1) (13)
[0077]
0 ≦ θ ≦ θ ₁ Is equivalent to the spring constant k seen from the mirror 413. _y Is "k _y = 2 × k _y1 × k _y2 × k _y3 / (K _y2 × k _y3 + K _y1 × k _y3 + K _y1 × k _y2 ) ”, The straight line has a smaller slope than any of the dotted lines. Therefore, for example, even when any one of the connecting portions 424, 425, and the mirror connecting portion 426 is used alone, the control voltage applied to the control electrodes 402, 404 is made smaller and the rotation is further increased. An angle is obtained.
[0078]
The inclination of the movable frame 412 is “tan”. ^-1 (D2 / r2) ", that is, the inclination of the mirror 413 when the movable frame 412 contacts the stopper 434 is θ ₂ Then, this is expressed by the following equation (14).
θ ₂ = Tan ^-1 (D2 / r2) + k _y2 / K _y3 × {tan ^-1 (D2 / r2) -tan ^-1 (D1 / r1)} (14)
[0079]
θ ₁ ≦ θ ≦ θ ₂ Is equivalent to the spring constant k seen from the mirror 413. _y Is "k _y = 2 × k _y2 × k _y3 / (K _y2 + K _y3 ) ", So M = 2 × k _y2 The straight line has a smaller slope than the dotted line of θ. And θ ₁ ≦ θ ≦ θ ₂ Therefore, the mirror 413 is brought into a static state in a range where it does not come into contact with the control electrodes 402 and 404 by the control voltage applied to the control electrodes 402 and 404. Control becomes possible.
[0080]
Furthermore, θ ₂ In the range of <θ, the movable frame 411 and the movable frame 412 are fixed, and only the mirror 413 rotates. The spring constant seen from the mirror 413 at this time is 2 × k _y3 And θ ₂ <The solid line in the range of θ is M2 × k _y3 It becomes equal to the inclination of the dotted line of θ. θ ₂ The solid line in the range of <θ has an intersection with the curve of V = V4, as shown in FIG. Within the range, the mirror 413 can be controlled to be stationary. In the state shown in FIG. 6, the maximum rotation angle θ that can bring the mirror 413 to the stationary state is θ ₂ The value is larger than any intersection of the three dotted lines and the six curves.
[0081]
In FIG. 4, for example, a pair of stoppers 434 and a pair of stoppers 433 higher than this are provided, but the present invention is not limited to this.
For example, as shown in FIG. 7, the stopper 433 and the stopper 434 shown in FIG. 4 are combined with a pair of stoppers 732 whose height from the substrate 401 gradually decreases as the center of the mirror 413 is closer. You may make it acquire an effect. The high portion of the stopper 732 is disposed below the movable frame 411, and the low portion of the stopper 732 is disposed below the movable frame 412.
[0082]
Further, as shown in FIG. 8, the stopper 433 and the stopper 434 shown in FIG. 4 are combined by a pair of stoppers 832 having a portion with a low height from the substrate 401 closer to the center of the mirror 413. You may make it acquire an effect. The high portion of the stopper 832 is disposed below the movable frame 411, and the low portion of the stopper 832 is disposed below the movable frame 412.
[0083]
By the way, as shown in FIG. 9, control electrodes 904 and 905 made up of a plurality of structures stacked so as to become thinner toward the center of the mirror 111 as it approaches the mirror 111 are arranged below the mirror 111. Anyway. The control electrodes 904 and 905 correspond to the control electrodes 104 and 105 shown in FIG. The control electrodes 102 and 103 shown in FIG. 1 may have the same configuration.
[0084]
Further, as shown in FIG. 10, sensor electrodes 954 and 955 may be provided in a region below the mirror 111 and in a region outside the control electrodes 904 and 905. The optical switch device shown in FIG. 10 includes a control circuit 1001 that controls the drive voltage of each control electrode and sensor circuits 1002 and 1003 that are connected to the sensor electrodes 954 and 955 on a substrate 101. In the present optical switch device, the state in which the mirror 111 is rotated by a predetermined angle is detected by the sensor electrodes 954 and 955 and the sensor circuits 1002 and 1003.
[0085]
Information on the rotation angle of the mirror 111 detected by these configurations is fed back to the control circuit 1001, so that the rotation angle of the mirror 111 can be controlled with higher accuracy. For example, a signal corresponding to the distance between the sensor electrode 954 and the upper mirror 111 may be output from the sensor circuit 1002 to the control circuit 1001. In addition, what is necessary is just to arrange | position the sensor electrodes 954 and 955 under the rotating shaft in which the connection parts 121 and 122 are arrange | positioned. Although not shown, a pair of sensor electrodes are provided under the rotation shaft on which the connecting portion 123 and the mirror connecting portion 124 shown in FIG. May be.
[0086]
【The invention's effect】
As described above, in the present invention, a stopper is provided on the substrate under the movable range of the movable frame that rotates on the same rotation axis as the mirror, and until the rotation of the movable frame is limited by the stopper, The mirror is rotated by twisting both the connecting member and the mirror connecting member, and when the rotation of the movable frame is stopped by the stopper, the mirror is rotated by twisting the mirror connecting member.
As a result, according to the present invention, it is possible to change the state of rotation of the mirror in the middle of the rotation operation of the mirror, and within a range that does not contact a member fixed on the substrate such as an electrode. It is possible to obtain an excellent effect that can be stopped at a larger rotation angle.
[Brief description of the drawings]
FIG. 1 is a schematic plan view (a), cross-sectional views (b), and (c) showing a configuration example of an optical switch device according to an embodiment of the present invention.
2 is a schematic cross-sectional view showing an operation example of the optical switch device of FIG. 1. FIG.
FIG. 3 is a characteristic diagram showing, in a straight line (solid line), the relationship between the rotational moment M generated in the mirror, the rotational moment generated by the twist of the connecting portion, and the rotational angle of the mirror.
FIG. 4 is a schematic plan view (a), cross-sectional views (b), and (c) showing a configuration example of an optical switch device according to another embodiment of the present invention.
5 is a schematic cross-sectional view showing an operation example of the optical switch device of FIG.
FIG. 6 is a characteristic diagram showing the relationship between the rotational moment M generated in the mirror and the rotational moment generated by the twist of the connecting portion, and the rotational angle of the mirror, as a straight line (solid line).
FIG. 7 is a schematic cross-sectional view showing a configuration example of an optical switch device according to another embodiment of the present invention.
FIG. 8 is a schematic cross-sectional view showing a configuration example of an optical switch device according to another embodiment of the present invention.
FIG. 9 is a schematic cross-sectional view illustrating a configuration example of an optical switch device according to another embodiment of the present invention.
FIG. 10 is a schematic cross-sectional view showing a configuration example of an optical switch device according to another embodiment of the present invention.
11A and 11B are a schematic cross-sectional view (a) and a plan view (b) showing a configuration example of a conventional optical switch device.
FIG. 12 is a characteristic diagram showing the relationship between the rotational moment M generated in the mirror and the rotational moment generated by the twist of the connecting portion, and the rotational angle of the mirror, as a straight line (solid line).
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 101 ... Board | substrate, 102, 103, 104, 105 ... Control electrode, 106 ... Support member, 107 ... Frame part, 108, 109, 110 ... Movable frame, 111 ... Mirror, 121, 122, 123 ... Connection part, 124 ... Mirror Connecting part, 131, 132 ... stopper.

Claims (18)

A frame member that is supported on the substrate while being spaced apart via a support member;
A plate-shaped first movable frame having a pivotally supported and open area about the first pivot axis through these through a pair of first connecting member in the opening region of the frame member,
The first said movable frame of the opening area from the first rotation shaft via the second connecting member a pair through a different second pivot shaft supported rotatably about the second turning axis And a plate-like second movable frame having an opening region,
Having a reflection part for reflecting the second the second through the pair of mirror coupling member through the rotation shaft is rotatably supported about the second turning axis and the light in the opening area of the movable frame Mirror,
A stopper for limiting a rotation range of the second movable frame in the direction of the substrate provided on the substrate, which is below the movable range of the second movable frame on the first rotation axis; Prepared,
An optical switch device that performs an optical switch operation by displacing the reflecting portion by rotating the mirror. The optical switch device according to claim 1,
The optical switch device, wherein the stoppers are respectively provided at two positions on the first rotation shaft . The optical switch device according to claim 1 or 2,
The second connecting member and the mirror connecting member are spring members that are elastically deformed by being twisted by the rotation of the second movable frame and the mirror, respectively.
An optical switch device, wherein a spring constant due to twisting of the mirror connecting member is larger than a spring constant due to twisting of the second connecting member. A frame member that is supported on the substrate while being spaced apart via a support member;
A plate-like first movable frame that is rotatably supported around a first rotation shaft passing through a pair of first connecting members in an opening region of the frame member and has an opening region;
A plate-like shape that is supported rotatably about the first rotation shaft via a pair of second connecting members passing through the first rotation shaft within the opening region of the first movable frame and has an opening region. A second movable frame;
The second movable frame is supported so as to be rotatable about the second rotation axis via a pair of mirror connecting members passing through a second rotation axis different from the first rotation axis within the opening region of the second movable frame; A mirror having a reflecting part for reflecting light;
A stopper for limiting a rotation range of the first movable frame in the direction of the substrate provided on the substrate, which is below the movable range of the first movable frame on the second rotation axis; Prepared,
An optical switch device that performs an optical switch operation by displacing the reflecting portion by rotating the mirror. The optical switch device according to claim 4, wherein
The optical switch device, wherein the stoppers are respectively provided at two positions on the second rotation shaft . The optical switch device according to claim 4 or 5,
The first connecting member and the second connecting member are spring members that are elastically deformed by being twisted by the rotation of the first movable frame and the second movable frame, respectively.
The optical switch device, wherein a spring constant due to the twist of the second connecting member is larger than a spring constant due to the twist of the first connecting member. A frame member that is supported on the substrate while being spaced apart via a support member;
A plate-shaped first movable frame having a pivotally supported and open area about the first pivot axis through these through a pair of first connecting member in the opening region of the frame member,
The first movable frame is supported so as to be rotatable about the second rotation shaft through a pair of second connecting members passing through a second rotation shaft different from the first rotation shaft within the opening region of the first movable frame. And a plate-like second movable frame having an opening region;
A plate-like shape having an opening area that is supported rotatably about the second rotation axis via a pair of third connecting members that pass through the second rotation axis within the opening area of the second movable frame. A third movable frame;
A mirror having a reflecting portion that is supported rotatably about the rotation axis and reflects light through a pair of mirror connecting members passing through the second rotation axis within the opening region of the third movable frame; ,
A first stopper for limiting a rotation range of the second movable frame in the direction of the substrate provided on the substrate that is below the movable range of the second movable frame on the first rotation axis; ,
The first stopper that restricts a rotation range of the third movable frame in the direction of the substrate provided on the substrate, which is below the movable range of the third movable frame on the first rotation axis. A lower second stopper and at least
An optical switch device that performs an optical switch operation by displacing the reflecting portion by rotating the mirror. The optical switch device according to claim 7, wherein
The optical switch device, wherein the first stopper is provided at two positions on the first rotation shaft . The optical switch device according to claim 7, wherein
The optical switch device, wherein the second stopper is provided at two positions on the first rotation shaft . The optical switch device according to claim 7, wherein
The optical switch device, wherein the first stopper and the second stopper are integrally formed. The optical switch device according to claim 10, wherein
The optical switch device, wherein the first stopper and the second stopper formed integrally are respectively provided at two locations on the first rotation shaft . The optical switch device according to any one of claims 7 to 11,
The second connecting member, the third connecting member, and the mirror connecting portion are spring members that are elastically deformed by being twisted by the rotation of the second movable frame, the third movable frame, and the mirror, respectively.
The spring constant due to the twist of the third connecting member is larger than the spring constant due to the twist of the second connecting member,
An optical switch device, wherein a spring constant due to twisting of the mirror connecting member is larger than a spring constant due to twisting of the third connecting member. A frame member that is supported on the substrate while being spaced apart via a support member;
A plate-like first movable frame that is rotatably supported around a first rotation shaft passing through a pair of first connecting members in an opening region of the frame member and has an opening region;
A plate-like shape that is supported rotatably about the first rotation shaft via a pair of second connecting members passing through the first rotation shaft within the opening region of the first movable frame and has an opening region. A second movable frame;
A plate-like shape having an opening area that is rotatably supported around the first rotation axis via a pair of third connecting members that pass through the first rotation axis within the opening area of the second movable frame. A third movable frame;
A pair of mirror connecting members that pass through a second rotation shaft different from the first rotation shaft within the opening region of the third movable frame, and are supported rotatably about the second rotation shaft; A mirror having a reflecting part for reflecting light;
A first stopper for limiting a rotation range of the first movable frame in the direction of the substrate provided on the substrate, which is below the movable range of the first movable frame on the second rotation axis; ,
The first stopper for restricting a rotation range of the second movable frame in the direction of the substrate, which is provided on the substrate and below the movable range of the second movable frame on the second rotation axis. A lower second stopper and at least
An optical switch device that performs an optical switch operation by displacing the reflecting portion by rotating the mirror. The optical switch device according to claim 13, wherein
The optical switch device, wherein the first stopper is provided at two positions on the second rotating shaft . The optical switch device according to claim 13, wherein
The optical switch device, wherein the second stopper is provided at two positions on the second rotation shaft . The optical switch device according to claim 13, wherein
The optical switch device, wherein the first stopper and the second stopper are integrally formed. The optical switch device according to claim 16, wherein
The optical switch device characterized in that the first stopper and the second stopper formed integrally are respectively provided at two positions on the second rotating shaft . The optical switch device according to any one of claims 13 to 17,
The first connecting member, the second connecting member, and the third connecting portion are spring members that are elastically deformed by being twisted by the rotation of the first movable frame, the second movable frame, and the third movable frame, respectively. ,
The spring constant due to torsion of the second connecting member is larger than the spring constant due to torsion of the first connecting member,
An optical switch device, wherein a spring constant due to twisting of the third connecting member is larger than a spring constant due to twisting of the second connecting member.

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