JP3314272B2 - Equipment for manufacturing metal-ceramic composite members - Google Patents
Equipment for manufacturing metal-ceramic composite membersInfo
- Publication number
- JP3314272B2 JP3314272B2 JP2000275056A JP2000275056A JP3314272B2 JP 3314272 B2 JP3314272 B2 JP 3314272B2 JP 2000275056 A JP2000275056 A JP 2000275056A JP 2000275056 A JP2000275056 A JP 2000275056A JP 3314272 B2 JP3314272 B2 JP 3314272B2
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- metal
- guide
- ceramic member
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【0001】[0001]
【発明の属する技術分野】本発明は、金属−セラミック
ス複合部材の製造装置に関するものであり、特に自動車
部品、電子部品などに好適な、酸化物、窒化物、炭化物
セラミックスと金属との強固な複合部材を製造する製造
装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing a metal-ceramic composite member, and more particularly to a solid composite of an oxide, a nitride, a carbide ceramic and a metal which is suitable for an automobile part, an electronic part and the like. The present invention relates to a manufacturing apparatus for manufacturing a member.
【0002】[0002]
【従来の技術】セラミックスの化学安定性、高融点、絶
縁性、高硬度などの特性と、金属の高強度、高靱性、易
加工性、導電性などの特性を生かした金属−セラミック
ス複合部材は、自動車、電子装置などに広く使用されて
いる。その代表的な例として、自動車ターボチャージャ
ー用のローター、大電力電子素子実装用の基板およびパ
ッケージが挙げられる。2. Description of the Related Art Metal-ceramic composite members utilizing the properties of ceramics such as chemical stability, high melting point, insulation properties, and high hardness, and the properties of metals such as high strength, high toughness, easy workability, and conductivity are known. Widely used in automobiles, electronic devices, and the like. Typical examples include a rotor for an automobile turbocharger, a substrate and a package for mounting high-power electronic devices.
【0003】従来、金属−セラミックス複合部材の主な
製造方法として、接着、めっき、メタライズ、溶射、ろ
う接、DBC、焼き嵌め、鋳ぐるみなどの方法が知られ
ている。Hitherto, as a main method for producing a metal-ceramic composite member, there have been known methods such as bonding, plating, metallizing, thermal spraying, brazing, DBC, shrink fitting, and casting.
【0004】接着法は、有機系または無機系接着剤で金
属部材とセラミックス部材を接着する方法である。めっ
き法は、セラミックス部材の表面を活性化した後めっき
液に入れて金属めっきを施す方法である。メタライズ法
は、金属粉末を含むペーストをセラミックス部材の表面
に塗布した後焼結し、金属層を形成する方法である。溶
射法は、金属(セラミックス)の溶滴をセラミックス
(金属)部材の表面に噴射し、セラミックス(金属)部
材の表面に金属(セラミックス)層を形成する方法であ
る。ろう接法は、低融点の金属または合金(ろう材)を
介在させて金属部材とセラミックス部材を接合する方法
であり、セラミックス部材にろう材を強固に接合させる
ために、ろう材にセラミックスと反応しやすい金属成分
を添加したり、上述のメタライズ、溶射などの方法で予
めセラミックス部材の接合面に金属層を形成させる。D
BC法は、酸化物セラミックス部材と銅部材との接合の
ために開発された技術で、接合時に酸素を含有する銅を
使って不活性雰囲気中で加熱するか、無酸素銅板の表面
を予め酸化処理し、酸化物層を形成してから接合する方
法である。この方法で非酸化物セラミックス部材と銅部
材を接合する場合、予め非酸化物部材の表面に酸化物層
を形成しなければならない。焼き嵌め法の場合、接合す
るセラミックス、金属部材にそれぞれ凸部と凹部を設
け、凸部の外径と凹部の内径を同じ寸法にし、接合時に
金属部材を加熱して設けた凹部の内径を拡大させ、セラ
ミックス部材の凸部をその中に差し込んでから冷却する
ことによって、金属の凹部がセラミックスの凸部を抱き
込んだ形で一体になる。鋳ぐるみ法は、焼き嵌め法に類
似した方法で、セラミックス部品の周辺に金属を鋳込
み、金属の冷却収縮でセラミックス部品を抱き込み、一
体とする方法である。[0004] The bonding method is a method of bonding a metal member and a ceramic member with an organic or inorganic adhesive. The plating method is a method in which the surface of a ceramic member is activated and then put into a plating solution to perform metal plating. The metallization method is a method in which a paste containing metal powder is applied to the surface of a ceramic member and then sintered to form a metal layer. The thermal spraying method is a method in which droplets of metal (ceramics) are sprayed onto the surface of a ceramic (metal) member to form a metal (ceramic) layer on the surface of the ceramic (metal) member. The brazing method is a method of joining a metal member and a ceramic member with a low melting point metal or alloy (brazing material) interposed therebetween. In order to firmly join the brazing material to the ceramic member, the brazing material reacts with the ceramic. A metal layer is formed on the joining surface of the ceramic member in advance by adding a metal component which is easy to be used, or by the above-described metallization, thermal spraying or the like. D
The BC method is a technique developed for joining an oxide ceramic member and a copper member. At the time of joining, heating is performed in an inert atmosphere using oxygen-containing copper or the surface of an oxygen-free copper plate is oxidized in advance. This is a method of forming an oxide layer and then bonding. When joining a non-oxide ceramic member and a copper member by this method, an oxide layer must be formed on the surface of the non-oxide member in advance. In the case of the shrink fitting method, a convex portion and a concave portion are provided on the ceramic and metal members to be joined, respectively, and the outer diameter of the convex portion and the inner diameter of the concave portion are set to the same size. Then, the convex portion of the ceramic member is inserted therein and then cooled, whereby the concave portion of the metal is integrated with the ceramic convex portion. The cast-in method is a method similar to the shrink-fitting method, in which a metal is cast around a ceramic component, and the ceramic component is embraced by cooling shrinkage of the metal to be integrated.
【0005】[0005]
【発明が解決しようとする課題】しかしこのような従来
の技術にあっては、接着法の場合は接着強度が低く、耐
熱性が乏しいとの問題点がある。めっき、メタライズ、
溶射法の場合は、形成した金属(セラミックス)が厚さ
数μm〜数十μmの薄い層状のものに限られている。焼
き嵌めおよび鋳ぐるみ法は、セラミックス部材の少なく
とも一部が金属に抱き込まれるような特定の場合に限ら
れている。DBC法では、接合できる金属が銅に限ら
れ、且つ接合温度がCu−Oの共晶点近くの狭い範囲に
限られているため、膨れ、未接のような接合欠陥が発生
しやすいという問題点がある。ろう接法の場合は、高価
なろう材を使用し、且つ接合を真空中で行わなければな
らないため、コストが非常に高く、応用範囲が限られて
いる。また、ろう材には、一般に接合する金属と他の金
属さらには非金属を添加した共晶合金が使用され、それ
自体は一般に接合する金属より硬いので、直接接合体に
比べて、ろう接体の耐ヒートサイクル寿命が短いなどの
問題点がある。However, in such a conventional technique, there is a problem that the bonding method has low bonding strength and poor heat resistance. Plating, metallization,
In the case of the thermal spraying method, the formed metal (ceramic) is limited to a thin layer having a thickness of several μm to several tens μm. Shrink fit and insert molding are limited to certain cases where at least a portion of the ceramic member is embraced by metal. In the DBC method, the metal that can be bonded is limited to copper, and the bonding temperature is limited to a narrow range near the eutectic point of Cu—O. There is a point. In the case of the brazing method, since an expensive brazing material is used and the joining must be performed in a vacuum, the cost is very high and the application range is limited. In addition, a eutectic alloy to which a joining metal and another metal or even a non-metal are added is generally used as a brazing material, and is itself harder than a joining metal. Have a short heat cycle life.
【0006】上述したように、従来の技術で金属部材と
セラミックス部材を接合する場合には、以下に示す何れ
かの問題点がある。As described above, when a metal member and a ceramic member are joined by a conventional technique, there are any of the following problems.
【0007】1)接合する金属およびセラミックス部材
は特定な形状のものに限られる。1) The metal and ceramic members to be joined are limited to those having a specific shape.
【0008】2)接合工程のコストが高く、応用範囲が
限られている。2) The cost of the joining step is high, and the range of application is limited.
【0009】3)接合体の特性(接合強度、耐熱性、耐
ヒートサイクル特性)については、要求特性を満足でき
るほどには達成されていない。3) The characteristics (bonding strength, heat resistance, heat cycle resistance) of the joined body have not been achieved to the extent that the required characteristics can be satisfied.
【0010】本発明者の一人は、上記課題を解決するた
めに、特願平4−355211号「セラミックス電子回
路基板の製造方法」において、金属−セラミックス複合
部材の新規な製造法を提案した。One of the inventors of the present invention proposed a novel method of manufacturing a metal-ceramic composite member in Japanese Patent Application No. 4-355211 "Method for Manufacturing Ceramic Electronic Circuit Board" in order to solve the above-mentioned problems.
【0011】この製造法では、まず金属を溶解した後、
該溶融金属の中にセラミックス部材を差し込むか、ある
いはセラミックス部材が設置された鋳型に溶融金属を鋳
込むことによって、溶融金属表面の酸化物を除去し、セ
ラミックス部材と金属溶湯とを酸化物を介さずに強固に
接合させてから、セラミックス部材の所定位置に所定形
状の金属体を形成させることができた。[0011] In this manufacturing method, first, after dissolving the metal,
The oxide on the surface of the molten metal is removed by inserting a ceramic member into the molten metal or casting the molten metal into a mold provided with the ceramic member, and the ceramic member and the molten metal are interposed between the molten metal and the oxide. After firmly joining the metal members, a metal body having a predetermined shape could be formed at a predetermined position of the ceramic member.
【0012】この製造法によって優れた特性を有するア
ルミニウム−セラミックス複合部材を一例として得るこ
とが出来たが、本発明は上記発明に基づいて更に改良を
重ね、すぐれた特性を有する多種多様の金属−セラミッ
クス複合部材を低コストで製造できる金属−セラミック
ス複合部材の製造装置を開発することを目的とする。Although an aluminum-ceramic composite member having excellent properties was obtained as an example by this manufacturing method, the present invention has been further improved based on the above-mentioned invention, and various kinds of metals having excellent properties have been obtained. An object of the present invention is to develop an apparatus for manufacturing a metal-ceramic composite member capable of manufacturing a ceramic composite member at low cost.
【0013】[0013]
【課題を解決するための手段】本発明者等は斯かる課題
を解決するために鋭意研究したところ、ガイド一体型ダ
イスを坩堝に挿通せしめ、金属溶湯内をセラミックス部
材を通過せしめることによって、これらの複合部材を得
ることを見出し本発明装置を得たものである。Means for Solving the Problems The inventors of the present invention have conducted intensive studies to solve the above-mentioned problems, and found that by inserting a guide-integrated die into a crucible and passing a ceramics member through a molten metal, the above-described method was adopted. To obtain the composite member of the present invention.
【0014】即ち、本発明の金属−セラミックス複合部
材の製造装置は、管状セラミックス部材を連続的に供給
するための搬送手段と、搬送されたセラミックス部材を
予熱する予熱部と、予熱されたセラミックス部材を坩堝
内の金属溶湯中を通過させてセラミックス部材の周囲面
の少なくとも一部分に金属を接合する接合部と、該接合
されたセラミックス部材を徐冷して金属−セラミックス
複合部材となす冷却部と、上記セラミックス部材を移動
可能なガイド一体型ダイスとを内蔵し、上記ガイド一体
型ダイスが、上記セラミックス部材を通過せしめる円形
断面の中心孔と、上記予熱部から上記接合部を介して上
記冷却部迄長手方向に延びるガイド部と、坩堝内で上記
中心孔に連通するよう上記ガイド部に形成した開口とよ
り成り、上記中心孔に沿ってガイドされる上記セラミッ
クス部材が上記坩堝内を通過するとき上記開口を介して
溶湯に接触することを特徴とする。また、本発明の金属
−セラミックス複合部材の製造装置は、管状セラミック
ス部材を連続的に供給するための搬送手段と、搬送され
たセラミックス部材を予熱する予熱部と、予熱されたセ
ラミックス部材を坩堝内の金属溶湯中を通過させてセラ
ミックス部材の周囲面の少なくとも一部分に金属を接合
する接合部と、該接合されたセラミックス部材を徐冷し
て金属−セラミックス複合部材となす冷却部と、上記セ
ラミックス部材を移動可能なガイド一体型ダイスとを内
蔵し、上記ガイド一体型ダイスが、上記セラミックス部
材を通過せしめる円形断面の中心孔と、この中心孔に連
通してこれから半径方向外方に延びる狭幅の複数の溝部
とを有し、上記予熱部から上記接合部を介して上記冷却
部迄長手方向に延びるガイド部と、坩堝内で上記中心孔
に連通するよう上記ガイド部に形成した開口とより成
り、上記中心孔に沿ってガイドされる上記セラミックス
部材が上記坩堝内を通過するとき上記開口を介して溶湯
に接触することを特徴とする。 [0014] That is, the metal of the present invention - apparatus for manufacturing ceramic composite member has a preheating section for preheating the conveying means for continuously supplying a tube-like ceramic member, the conveyed ceramic member, preheated ceramic A joining part for joining the metal to at least a part of the peripheral surface of the ceramic member by passing the member through the molten metal in the crucible, and a cooling unit for gradually cooling the joined ceramic member to form a metal-ceramic composite member Move the above ceramic member
Built-in guide integrated die and possible guide integrated
A circular shape that allows the die to pass through the ceramic member
From the center hole of the cross section, and from the preheating section through the joint section
The guide part extending in the longitudinal direction to the cooling part and the above in the crucible
An opening formed in the guide section to communicate with the center hole.
The ceramic guided along the center hole
When the box member passes through the crucible through the opening
It is characterized by being in contact with the molten metal. The metal of the present invention
-The manufacturing equipment for ceramic composite members is tubular ceramic.
Conveying means for continuously supplying the
Preheating section for preheating ceramic members
Pass the Lamix material through the molten metal in the crucible
Attach metal to at least a part of the surrounding surface of the mix member
And the joined ceramic member is gradually cooled.
A cooling section to form a metal-ceramic composite member
Inside with integrated guide die that can move Lamix member
The die integrated with the guide is
Center hole with a circular cross-section through which the material passes, and this center hole
A plurality of narrow grooves extending radially outwardly therefrom through
And the cooling from the preheating section via the joining section
Guide part extending in the longitudinal direction to the part, and the center hole in the crucible
And an opening formed in the guide section to communicate with the
The ceramics guided along the center hole
When the member passes through the crucible, the molten metal
Contact with
【0015】上記予熱部は、セラミックス部材が移動可
能なガイドを内蔵し、且つ、該セラミックス部材を予熱
可能な予熱ヒーターを設けてなる。The preheating section includes a guide capable of moving the ceramic member, and a preheater capable of preheating the ceramic member.
【0016】また、上記接合部は、周囲をヒーターで囲
まれた坩堝内にガイド一体型ダイスを配置していると共
に、該ダイスの下流端に温度制御手段を設けている。In addition, the joining portion has a guide-integrated die arranged in a crucible surrounded by a heater and a temperature control means at a downstream end of the die.
【0017】[0017]
【0018】更に、上記ガイド一体型ダイスには出口側
に次第に拡大するテーパー部を設けている。Further, the guide-integrated die is provided with a tapered portion gradually expanding toward the outlet.
【0019】[0019]
【作用】本発明装置において、金属−セラミックス複合
部材を連続的に製造するために、金属溶湯を連続的に供
給し、且つ溶湯の温度を一定の温度に保たなければなら
ない。この場合、金属溶湯の供給方法としては、別の溶
解炉で溶解した金属溶湯を本発明装置内の坩堝に供給
し、必要に応じて所定の接合温度に加熱・保持する方法
や、あるいは金属原料を安定に本発明装置内の坩堝に供
給し、該坩堝内で溶かし、一定の温度に加熱・保持する
方法とがあるが、これらは何れにしても、溶湯を保持す
るための坩堝と加熱ヒーターとが必要である。In the apparatus of the present invention, in order to continuously manufacture a metal-ceramic composite member, it is necessary to continuously supply a molten metal and maintain the temperature of the molten metal at a constant temperature. In this case, as a method for supplying the molten metal, a method in which the molten metal melted in another melting furnace is supplied to a crucible in the apparatus of the present invention, and if necessary, heated or held at a predetermined joining temperature, Is stably supplied to the crucible in the apparatus of the present invention, melted in the crucible, and heated and held at a constant temperature. In any case, a crucible for holding molten metal and a heater Is necessary.
【0020】室温状態のセラミックス部材を直接に金属
溶湯に挿入すると、熱衝撃でセラミックス部材が割れる
可能性があり、これを防止するためにセラミックス部材
を予熱する必要がある。この場合、セラミックス部材を
別途加熱装置において予熱し、予熱された部材を本発明
装置の搬送手段を用いて供給することも可能であるが、
加熱された部材を運ぶ時の安全上の不便さ、運搬時の熱
衝撃の問題もあることから、本発明装置の場合、ガイド
一体型ダイスを使用し金属溶湯を加熱するためのヒータ
ーの余熱を利用するとともにガイド一体型ダイスにヒー
ターを設けてセラミックス部材を予熱している。When a ceramic member in a room temperature state is directly inserted into a molten metal, the ceramic member may be broken by thermal shock, and it is necessary to preheat the ceramic member to prevent this. In this case, it is possible to preheat the ceramic member separately in a heating device and supply the preheated member using the conveying means of the device of the present invention,
Because of the inconvenience of safety when transporting the heated member and the problem of thermal shock during transportation, in the case of the apparatus of the present invention, the residual heat of the heater for heating the molten metal using the guide integrated die is used. A heater is provided on the guide-integrated die and the ceramic member is preheated.
【0021】本発明装置の特徴の一つは、如何にして金
属溶湯表面の酸化物等の汚れ層の影響を除去し、セラミ
ックス部材と清浄な金属溶湯とを接触させるかというこ
とにあり、本発明においては、セラミックス部材を金属
溶湯の内部に挿入し、且つ、溶湯の内部に入る時にセラ
ミックス部材の表面に付着した汚れを取るためにセラミ
ックス部材を溶湯の中で移動させる方法を採用した。One of the features of the apparatus of the present invention is how to remove the influence of a contaminant layer such as an oxide on the surface of a molten metal and bring a ceramic member into contact with a clean molten metal. In the present invention, a method is employed in which the ceramic member is inserted into the molten metal, and the ceramic member is moved in the molten metal in order to remove dirt attached to the surface of the ceramic member when entering the molten metal.
【0022】この溶湯中を移動させる手段は色々と考え
られるが、本発明では後述の実施例に示されるようにガ
イドを設け、ガイドを通ってセラミックス部材を溶湯の
中に挿入しながら移動させることとした。Various means for moving the molten metal are considered. In the present invention, a guide is provided as shown in an embodiment described later, and the ceramic member is moved through the guide while being inserted into the molten metal. And
【0023】セラミックス部材の表裏面の所定位置に金
属体を形成する方法として、本発明では金属溶湯で濡ら
したセラミックス部材をダイス内を通過させ、所定位置
で金属溶湯を凝固させて所定形状の金属体を形成する方
法を採用したが、この他、場合によってはダイスを設け
ずその代わりとして金属溶湯から引き出す場合に不活性
ガスを吹き付けてガスの流量でセラミックス部材の表面
に凝固する金属層の厚さを調整する方法でもよい。As a method of forming a metal body at a predetermined position on the front and back surfaces of the ceramic member, in the present invention, a ceramic member wetted with a molten metal is passed through a die, and the molten metal is solidified at a predetermined position to form a metal having a predetermined shape. In addition to the method of forming a body, in some cases, a die is not provided, and instead, when drawing out from a molten metal, an inert gas is blown and the thickness of the metal layer which solidifies on the surface of the ceramic member at a gas flow rate. It may be a method of adjusting the length.
【0024】ダイスを通して金属体を形成する場合、形
成する金属体の厚さを調整するためにダイスの中に次第
に拡大するテーパーを付けたり、またダイスの温度を調
整し凝固位置を制御することによって金属体の厚さをコ
ントロールする方法を採ってもよい。また、ダイス自体
に該テーパーを付けることによってダイスと製造した複
合部材との摩擦力を低下させ、ダイスの寿命を延ばすこ
とも出来る。When a metal body is formed through a die, a taper that gradually expands in the die to adjust the thickness of the metal body to be formed, or by controlling the solidification position by adjusting the temperature of the die. A method of controlling the thickness of the metal body may be employed. In addition, by attaching the taper to the die itself, the frictional force between the die and the manufactured composite member can be reduced, and the life of the die can be extended.
【0025】本発明で使用する金属、ガイド一体型ダイ
スの各材料の高温酸化を防ぐために、必要に応じて装置
の内部をある特定の雰囲気にする必要がある。後述する
実施例においては窒素ガス雰囲気において実施したが、
同じような効果はアルゴン、水素ガス等のような不活性
ガス、あるいは還元性のガス、またはこれらのガスの混
合物を使っても得られる。In order to prevent high-temperature oxidation of the metal used in the present invention and each material of the guide-integrated die, it is necessary to set the inside of the apparatus to a specific atmosphere as necessary. In Examples described later, the measurement was performed in a nitrogen gas atmosphere.
A similar effect can be obtained by using an inert gas such as argon or hydrogen gas, or a reducing gas, or a mixture of these gases.
【0026】なお、本発明で使用する金属としては、ア
ルミニウム、銅、鉄、ニッケル、銀もしくは金、または
これらの金属を主成分とする合金であり、一方、セラミ
ックス部材としてはアルミニウム、硅素等の酸化物、窒
化物、炭化物等である。The metal used in the present invention is aluminum, copper, iron, nickel, silver or gold, or an alloy containing these metals as a main component, while the ceramic member is aluminum, silicon or the like. Oxides, nitrides, carbides and the like.
【0027】[0027]
【0028】(実施例1)(Example 1)
【0029】図1に本発明装置の概略図を示す。本発明
装置は、左側からピンチローラー6を使って一個一個の
セラミックス部材20を連続的に供給する搬送手段1
と、ガイド一体型ダイス9を予熱ヒーター8,8´で加
熱し、ダイス中のセラミックス部材20を予熱する予熱
部2と、坩堝12内の金属を融解する溶湯ヒーター1
1,11´で金属を溶湯13とし、その溶湯13中を管
状のセラミックス部材20が通過することによってセラ
ミックス部材20の表・裏面に金属溶湯13を接触さ
せ、得られたセラミックス部材20を溶湯ヒーター1
1,11´の横に並列させた接合ヒーター14,14´
と水冷ジャケット17,17´で温度制御を行ない、接
触させた金属溶湯13を凝固させる接合部3と、セラミ
ックス部材20の割れを防ぐための該金属が接合された
セラミックス部材を徐冷する冷却手段18,18´を有
する冷却部4とを主要構成部とし、後工程として得られ
た金属−セラミックス複合部材をセラミックス部材のつ
なぎ部分で剪断するカッター19を有する剪断部5とか
ら構成されるものである。なお、上記ガイド一体型ダイ
ス9は、図1〜図3に示すように上記個々のセラミック
ス部材20を通過せしめる円形断面の中心孔と、必要に
応じてこの中心孔に連通してこれから半径方向外方に伸
びるようにした狭幅の複数の溝とを有し、更に上記予熱
部2から上記接合部3を介して上記冷却部4迄長手方向
に延びるガイド部15と、坩堝12内で上記中心孔の両
側部分を除いて上記中心孔の中央部に連通するよう上記
ガイド部に形成した上下開口とより成り、上記中心孔に
沿ってガイドされる上記セラミックス部材20は上記坩
堝12内を通過するとき上記開口を介して溶湯13に接
触するようになり、金属が接合されたセラミックス部材
全体の形状は上記ガイド部15を通ることによって所望
のサイズに定められる。 FIG. 1 shows a schematic view of the apparatus of the present invention. The apparatus according to the present invention includes a conveying unit 1 for continuously supplying ceramic members 20 one by one using a pinch roller 6 from the left side.
And a preheating section 2 for preheating the ceramic member 20 in the die by heating the guide-integrated die 9 with preheating heaters 8 and 8 ′, and a molten metal heater 1 for melting the metal in the crucible 12.
Metal and molten 13 1,11', contacting the molten metal 13 in front and back surfaces of the ceramic member 20 by a medium that molten metal 13 tubes <br/> shaped ceramic member 20 passes, resulting Heat the ceramic member 20 to the molten metal heater 1
Bonding heaters 14, 14 'arranged side by side with 1, 11'
And water cooling jackets 17 and 17 ′ for controlling the temperature and joining means 3 for solidifying the contacted metal melt 13 and cooling means for gradually cooling the ceramic member to which the metal is joined to prevent cracking of ceramic member 20. And a shearing section 5 having a cutter 19 for shearing a metal-ceramic composite member obtained at a later step at a joint of ceramic members. is there. The guide integrated die
9 are the individual ceramics as shown in FIGS.
Center hole with a circular cross-section to allow
Corresponding to this center hole and extend radially outward
And a plurality of narrow grooves so that
From the part 2 to the cooling part 4 through the joint part 3 in the longitudinal direction
And a center portion of the crucible 12 inside the crucible 12.
So that it communicates with the center of the center hole except for the side part
It consists of upper and lower openings formed in the guide part, and
The ceramic member 20 guided along the
When passing through the inside of the pot 12, it contacts the molten metal 13 through the opening.
Ceramic members that come into contact with and are joined to metal
The entire shape is desired by passing through the guide portion 15
The size is determined.
【0030】即ち、予めセラミックス部材として外径5
0mm、肉厚5mm、長さ500mmのアルミナパイプ
部材を複数個用意し、連続的に搬送手段1を用いて予熱
部2に搬送した。この場合、予熱部2は予熱ヒーター
8,8´によりガイド部15全体に熱が伝わることか
ら、該ガイド部の入口に水冷ジャケット7,7´を設け
て温度を100℃以下に保つようにしている。That is, an outer diameter of 5
A plurality of alumina pipe members having a thickness of 0 mm, a thickness of 5 mm, and a length of 500 mm were prepared, and were continuously conveyed to the preheating unit 2 using the conveying means 1. In this case, since the preheating section 2 transmits heat to the entire guide section 15 by the preheating heaters 8 and 8 ', water cooling jackets 7 and 7' are provided at the entrance of the guide section to maintain the temperature at 100 ° C or less. I have.
【0031】次いで、予熱されたセラミックス部材は、
接合部3内のアルミニウム溶湯内を通過させてセラミッ
クス部材20の表面にアルミニウムを接着させた。この
場合、一体型ダイスのガイド部15の内径はセラミック
ス部材20が通過可能な形状とし、一方、出口側の一体
型ダイスの接合部16の断面形状は図2に示すように上
下方向にセラミックス部材の厚さより幅広くなる構造と
している。Next, the preheated ceramic member is
Aluminum was adhered to the surface of the ceramic member 20 by passing through the molten aluminum in the joint 3. In this case, the inner diameter of the guide portion 15 of the integrated die is a shape through which the ceramic member 20 can pass, and the cross-sectional shape of the joint portion 16 of the integrated die on the outlet side is as shown in FIG. The structure is wider than the thickness of
【0032】この場合、金属としてのアルミニウムを坩
堝12の中にセットし、セラミックス部材20を一体型
ダイスのガイド部15の入口から入れて、その先端がガ
イド一体型ダイスの接合部16に到達するようにセット
してから、窒素ガス(N2 )雰囲気において坩堝12を
加熱し、アルミニウムを溶解する。アルミニウム溶湯1
3は出口側の一体型ダイスの接合部16の中に入るが、
この中を流れる間に先端部分の温度が融点以下に下が
り、その部分が凝固して出口を塞ぎ、溶湯の流出を防い
でいる。In this case, aluminum as a metal is set in the crucible 12, the ceramic member 20 is inserted from the entrance of the guide portion 15 of the integrated die, and the tip reaches the joint portion 16 of the integrated die. Then, the crucible 12 is heated in a nitrogen gas (N 2 ) atmosphere to dissolve the aluminum. Aluminum melt 1
3 enters the joint 16 of the integrated die on the exit side,
The temperature of the tip portion drops below the melting point while flowing through the portion, and the portion solidifies and blocks the outlet, preventing the molten metal from flowing out.
【0033】また、入口側の一体型ダイスのガイド部1
5と坩堝12あるいはセラミックス部材20との間の隙
間の中に溶湯が入らないようにするため、そのクリアラ
ンスを0.2mm以下とした。アルミニウム溶湯が75
0℃に加熱された後、入口側からセラミックス部材を連
続的に供給したところセラミックス部材は順番に該溶湯
13中に入り、溶湯13に濡れてから出口側の一体型ダ
イスの接合部16に入り、最後にはセラミックス部材の
表面に図3に示すようにアルミニウムフィンが接合した
状態で一体型ダイスの接合部16出口から連続的に押し
出された。The guide portion 1 of the integrated die on the entrance side
The clearance was set to 0.2 mm or less in order to prevent the molten metal from entering into the gap between the mold 5 and the crucible 12 or the ceramic member 20. 75 molten aluminum
After being heated to 0 ° C., when the ceramic member is continuously supplied from the inlet side, the ceramic member enters the molten metal 13 in order, gets wet with the molten metal 13 and then enters the joint 16 of the integrated die on the outlet side. Finally, as shown in FIG. 3, the surface of the ceramic member was continuously extruded from the joint 16 outlet of the integrated die in a state where the aluminum fins were joined.
【0034】この場合、接着したアルミニウムの厚さの
異なる複合部材を製造するめに、図2に示すように一体
型ダイスの接合部16内部に次第に広がる1/100の
テーパー部16´を設けると共に、接合ヒーター14,
14´と水冷ジャケット17,17´で凝固位置を調整
するようにした。In this case, in order to manufacture a composite member having different thicknesses of bonded aluminum, a 1/100 tapered portion 16 'gradually expanding inside the joint portion 16 of the integrated die as shown in FIG. Bonding heater 14,
The solidification position was adjusted by 14 'and the water cooling jackets 17, 17'.
【0035】[0035]
【発明の効果】上述のように本発明装置を用いることに
よって種々のセラミックス部材に溶湯金属を連続的に接
合できるようになり、フィンを有するまたは、有しない
管状の所定の金属−セラミックス複合部材を安価に、且
つ、大量可能に製造できる優れた連続製造装置である。As described above, the use of the apparatus according to the present invention makes it possible to continuously join molten metal to various ceramic members, with or without fins.
This is an excellent continuous production apparatus that can produce a predetermined tubular metal-ceramic composite member at low cost and in large quantities.
【図1】本発明の金属−セラミックス複合部材の製造装
置の概略断面図であるFIG. 1 is a schematic sectional view of an apparatus for manufacturing a metal-ceramic composite member of the present invention.
【図2】本発明の金属−セラミックス複合部材の製造装
置の出口側一体型ダイスの接合部の部分断面図である。FIG. 2 is a partial cross-sectional view of a joint portion of an exit-side integrated die of the apparatus for manufacturing a metal-ceramic composite member of the present invention.
【図3】本発明の金属−セラミックス複合部材の製造装
置の一体型ダイス接合部の部分断面図である。FIG. 3 is a partial sectional view of an integrated die joining portion of the apparatus for manufacturing a metal-ceramic composite member of the present invention.
1 搬送手段 2 予熱部 3 接合部 4 冷却部 5 剪断部 6 ピンチローラー 7 水冷ジャケット 7´ 水冷ジャケット 8 予熱ヒーター 8´ 予熱ヒーター 9 ガイド一体型ダイス 11 溶湯ヒーター 11´ 溶湯ヒーター 12 坩堝 13 溶湯 14 接合ヒーター 14´ 接合ヒーター 15 一体型ダイスのガイド部 16 一体型ダイスの接合部 16´ テーパー部 17 水冷ジャケット 17´ 水冷ジャケット 18 徐冷手段 18´ 徐冷手段 19 カッター 20 セラミックス部材 DESCRIPTION OF SYMBOLS 1 Conveying means 2 Preheating part 3 Joining part 4 Cooling part 5 Shearing part 6 Pinch roller 7 Water cooling jacket 7 'Water cooling jacket 8 Preheating heater 8' Preheating heater 9 Guide integrated die 11 Molten heater 11 'Molten heater 12 Crucible 13 Melt 14 Joining Heater 14 'Joining heater 15 Integrated die guide 16 Integrated die 16' Tapered 17 Water cooling jacket 17 'Water cooling jacket 18 Slow cooling means 18' Slow cooling means 19 Cutter 20 Ceramics member
───────────────────────────────────────────────────── フロントページの続き (72)発明者 相馬 将 東京都千代田区丸の内一丁目8番2号 同和鉱業株式会社内 (56)参考文献 特開 平3−234348(JP,A) 特開 平5−220545(JP,A) 特開 昭60−118366(JP,A) (58)調査した分野(Int.Cl.7,DB名) C04B 41/80 - 41/91 C04B 37/00 - 37/02 B22D 19/00 - 19/16 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Masaru Soma 1-8-2 Marunouchi, Chiyoda-ku, Tokyo Dowa Mining Co., Ltd. (56) References JP-A-3-234348 (JP, A) JP-A-5 -220545 (JP, A) JP-A-60-118366 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) C04B 41/80-41/91 C04B 37/00-37/02 B22D 19/00-19/16
Claims (5)
るための搬送手段と、搬送されたセラミックス部材を予
熱する予熱部と、予熱されたセラミックス部材を坩堝内
の金属溶湯中を通過させてセラミックス部材の周囲面の
少なくとも一部分に金属を接合する接合部と、該接合さ
れたセラミックス部材を徐冷して金属−セラミックス複
合部材となす冷却部と、上記セラミックス部材を移動可
能なガイド一体型ダイスとを内蔵し、上記ガイド一体型
ダイスが、上記セラミックス部材を通過せしめる円形断
面の中心孔と、上記予熱部から上記接合部を介して上記
冷却部迄長手方向に延びるガイド部と、坩堝内で上記中
心孔に連通するよう上記ガイド部に形成した開口とより
成り、上記中心孔に沿ってガイドされる上記セラミック
ス部材が上記坩堝内を通過するとき上記開口を介して溶
湯に接触することを特徴とする金属−セラミックス複合
部材の製造装置。1. A tube-like conveying means for the ceramic member continuously fed, a preheating section for preheating the conveyed ceramic member, a preheated ceramic member is passed through the molten metal in the crucible ceramic A joining portion for joining a metal to at least a part of a peripheral surface of the member, a cooling portion for gradually cooling the joined ceramic member to form a metal-ceramic composite member, and a movable ceramic member.
Built-in guide integrated die and integrated guide
The die cuts a circular section that allows the ceramic member to pass through.
Through the center hole of the surface and the joint from the preheating section
Guide section extending in the longitudinal direction to the cooling section, and inside the crucible
The opening formed in the above-mentioned guide part to communicate with the mandible
The ceramic being guided along the center hole
When the stainless steel passes through the crucible, it melts through the opening.
Metal characterized that you contact with hot water - apparatus for manufacturing ceramic composite member.
るための搬送手段と、搬送されたセラミックス部材を予
熱する予熱部と、予熱されたセラミックス部材を坩堝内
の金属溶湯中を通過させてセラミックス部材の周囲面の
少なくとも一部分に金属を接合する接合部と、該接合さ
れたセラミックス部材を徐冷して金属−セラミックス複
合部材となす冷却部と、上記セラミックス部材を移動可
能なガイド一体型ダイスとを内蔵し、上記ガイド一体型
ダイスが、上記セラミックス部材を通過せしめる円形断
面の中心孔と、この中心孔に連通してこれから半径方向
外方に延びる狭幅の複数の溝部とを有し、上記予熱部か
ら上記接合部を介して上記冷却部迄長手方向に延びるガ
イド部と、坩堝内で上記中心孔に連通するよう上記ガイ
ド部に形成した開口とより成り、上記中心孔に沿ってガ
イドされる上記セラミックス部材が上記坩堝内を通過す
るとき上記開口を介して溶湯に接触することを特徴とす
る金属−セラミックス複合部材の製造装置。2. A continuous supply of a tubular ceramic member.
Transporting means and the transported ceramics member
Heating preheating part and preheated ceramic member in crucible
Of the surrounding surface of the ceramic member
A joining part for joining a metal to at least a part thereof;
The cooled ceramic member is gradually cooled and the metal-ceramic composite
The cooling part, which is a composite member, and the ceramic member can be moved
Built-in guide integrated die and integrated guide
The die cuts a circular section that allows the ceramic member to pass through.
The center hole of the surface and communicate with this center hole
A plurality of narrow grooves extending outward, wherein the
Gas extending in the longitudinal direction from the joint to the cooling section through the joint.
Guide so that it communicates with the center hole in the crucible.
Openings along the center hole, and
The ceramic member passed through the crucible
Metal characterized that you contact with the molten metal through the Rutoki the opening - manufacturing apparatus of the ceramic composite member.
熱可能な予熱ヒーターを設けてなることを特徴とする請
求項1または2記載の金属−セラミックス複合部材の製
造装置。3. A metal according to claim 1 or 2, wherein the formed by providing a preheatable preheater the ceramic member to the preheating unit - manufacturing apparatus of the ceramics composite member.
制御手段を設けていることを特徴とする請求項1,2ま
たは3記載の金属−セラミックス複合部材の製造装置。4. The method of claim 1, characterized in that is provided with a temperature control means at the downstream end of the guide integrated die or
4. The apparatus for manufacturing a metal-ceramic composite member according to claim 3 .
第に拡大するテーパー部を設けていることを特徴とする
請求項1,2,3または4記載の金属−セラミックス複
合部材の製造装置。5. The apparatus for manufacturing a metal-ceramic composite member according to claim 1, wherein said guide-integrated die is provided with a tapered portion gradually expanding on an exit side.
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JP2000275056A JP3314272B2 (en) | 2000-09-11 | 2000-09-11 | Equipment for manufacturing metal-ceramic composite members |
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JP2000275056A JP3314272B2 (en) | 2000-09-11 | 2000-09-11 | Equipment for manufacturing metal-ceramic composite members |
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JP2606895A Division JP3185010B2 (en) | 1995-01-20 | 1995-01-20 | Equipment for manufacturing metal-ceramic composite members |
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JP3314272B2 true JP3314272B2 (en) | 2002-08-12 |
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