JP3378494B2 - Analysis equipment - Google Patents
Analysis equipmentInfo
- Publication number
- JP3378494B2 JP3378494B2 JP06585498A JP6585498A JP3378494B2 JP 3378494 B2 JP3378494 B2 JP 3378494B2 JP 06585498 A JP06585498 A JP 06585498A JP 6585498 A JP6585498 A JP 6585498A JP 3378494 B2 JP3378494 B2 JP 3378494B2
- Authority
- JP
- Japan
- Prior art keywords
- container
- substance
- scavenger
- gas
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Sampling And Sample Adjustment (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、建築用部材や、電
子部品材料等を含む一般材料から発生する物質の揮発性
ガスなどを分析する分析装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an analyzing device for analyzing volatile gases of substances generated from general materials including building members and electronic component materials.
【０００２】[0002]
【従来の技術】従来、部材から発生する物質の分析を行
うには、捕集容器に被測定部材を収納し、この捕集容器
に清浄なガスを流通しながら、前記被測定部材から発生
したガス状物質を容器外に具備した捕集部材（捕集剤）
に濃縮捕集する方法が採られていた（特開平９−２９０
２０）。この時、前記ガス状物質の発生を加速する目的
で被測定部材を加熱することもある。特に前記被測定部
材がシリコンウエハである場合にはウエハアナライザと
して製品化されている（特開平４−１７９２５１）。い
ずれにしても、従来の分析技術においては、捕集部材は
被測定部材を収納した捕集容器の外部に位置する構造が
採られてきた。2. Description of the Related Art Conventionally, in order to analyze a substance generated from a member, a member to be measured was housed in a collection container, and a clean gas was passed through the collection container to generate a substance to be measured. Collection member (collection agent) equipped with a gaseous substance outside the container
A method of concentrating and collecting in the above was adopted (Japanese Patent Laid-Open No. 9-290).
20). At this time, the member to be measured may be heated for the purpose of accelerating the generation of the gaseous substance. Particularly, when the member to be measured is a silicon wafer, it is commercialized as a wafer analyzer (Japanese Patent Laid-Open No. 4-179251). In any case, in the conventional analysis technique, a structure has been adopted in which the collecting member is located outside the collecting container accommodating the member to be measured.
【０００３】[0003]
【発明が解決しようとする課題】上記のように被測定部
材から発生するガス状物質を分析する従来からの分析装
置では、被測定部材を加熱してガス状物質の発生速度を
加速するための手段として、加熱装置を具備した装置が
一般的であった。しかしながら、前記物質の発生量は被
測定部材の熱特性によつて変化するため、実際の使用環
境に則した条件での分析が望ましく、一般の建築部材等
では常温（室温）での分析が望まれていた。In the conventional analyzer for analyzing the gaseous substance generated from the member to be measured as described above, the member to be measured is heated to accelerate the generation rate of the gaseous substance. As a means, a device equipped with a heating device was generally used. However, since the amount of the above substances generated changes depending on the thermal characteristics of the member to be measured, it is desirable to analyze under conditions that match the actual usage environment, and for general building members, analysis at room temperature (room temperature) is desirable. It was rare.
【０００４】そこで、常温で分析する方法について誠意
検討を行った結果、被測定部材から発生する物質は捕集
容器内壁、特に容器内部のガス排出口付近に吸着し易
く、容器外部の捕集部材に捕集される量が実際の発生量
よりかなり少なくなり、発生物質の分析精度及び感度が
低下する大きな要因となっていることが判った。また、
前記発生物質が一旦容器内壁に吸着すると、脱離が困難
であることも判った。特に、物質の発生量の少ない部材
の測定においては捕集効率が著しく低下するため、常温
では正確な分析ができないという問題があった。Therefore, as a result of conducting a sincere study on a method of analyzing at room temperature, the substance generated from the member to be measured is easily adsorbed on the inner wall of the collection container, particularly near the gas discharge port inside the container, and the collection member outside the container. It was found that the amount collected in the sample was much smaller than the actual amount generated, which was a major factor in reducing the analysis accuracy and sensitivity of the generated substance. Also,
It has also been found that once the generated substance is adsorbed on the inner wall of the container, it is difficult to desorb it. In particular, there is a problem in that accurate analysis cannot be performed at room temperature because the collection efficiency is significantly reduced in the measurement of a member that generates a small amount of substances.
【０００５】本発明は、上述の如き従来の課題を解決す
るためになされたもので、その目的は、常温の被測定部
材が発生するガス状物質を高感度で精度よく且つ簡便に
分析することができる分析装置及びその分析方法を提供
することである。The present invention has been made to solve the above-mentioned conventional problems, and an object thereof is to analyze a gaseous substance generated by a member to be measured at room temperature with high sensitivity, accuracy, and simplicity. It is an object of the present invention to provide an analyzer and a method for analyzing the same.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
に、第１の発明の特徴は、ガス導入口とガス排出口を有
し、内部に被測定部材を収納する容器と、前記容器の内
壁に形成され、且つ外部のガス排出管に連通するガス排
出口を少なくとも覆うように配置された捕集剤とを備え
たことを特徴とする。In order to achieve the above object, the first aspect of the present invention is characterized by a container having a gas inlet and a gas outlet, which accommodates a member to be measured therein, and the container. And a scavenger formed so as to cover at least a gas discharge port formed on the inner wall and communicating with an external gas discharge pipe.
【０００７】この第１の発明によれば、捕集剤はガス状
の発生物質が吸着し易い容器の内壁に形成されたガス排
出口を覆っている。この覆い方は容器内壁とガス排出管
の境界を捕集剤の一部が覆うように、且つガス排出口を
捕集剤が塞ぐ形で覆っていればよいが、望ましくは、ガ
ス排出口付近の容器の内壁面を含む形で、広範囲に覆う
方が、捕集するガスのロスが少なくなる。According to the first aspect of the present invention, the scavenger covers the gas outlet formed on the inner wall of the container in which the gaseous substance is easily adsorbed. This cover may cover the boundary between the inner wall of the container and the gas discharge pipe so that part of the scavenger covers the gas discharge port, and the gas discharge port may be covered with the scavenger, but preferably the vicinity of the gas discharge port. By covering a wide area with the inner wall surface of the container, the loss of the collected gas is reduced.
【０００８】上記のように捕集剤を配置し、前記容器内
に被測定部材を収納して、前記ガス排出管より容器内の
ガスをポンプなどで排気すると、高純度空気などの清浄
ガスがガス導入口から容器内に流入し、前記捕集剤を通
って排気される。この時、常温の被測定部材から発生す
るガス状物質が容器の内壁面やガス排出口に吸着される
ことなく前記捕集剤に捕集される。When the scavenger is arranged as described above, the member to be measured is housed in the container, and the gas in the container is exhausted from the gas discharge pipe by a pump or the like, clean gas such as high-purity air is generated. It flows into the container through the gas inlet and is discharged through the scavenger. At this time, the gaseous substance generated from the member to be measured at room temperature is collected by the collector without being adsorbed on the inner wall surface of the container or the gas discharge port.
【０００９】ここで、捕集剤の材料には、ガスの流入を
阻害しない通気性のあるグラファイトカーボンブラッ
ク、カーボンモレキュラーシーブ、２，６−ジフエニレ
ンオキサイド樹脂、スチレンジビニルベンゼン共重合
体、ヤシガラ活性炭、ガラスビーズ、シリカゲル、ガラ
ス繊維、石英繊維等が挙げられる。容器の材料には、金
属、ガラス、セラミックス等が挙げられる。容器に導入
する清浄ガスは、空気、ヘリウム、窒素等のガスが挙げ
られ、被分析成分を含まない高純度ガス（９９．９９９
６以上）であることが好ましい。Here, as the material of the scavenger, air-permeable graphite carbon black which does not inhibit the inflow of gas, carbon molecular sieve, 2,6-diphenylene oxide resin, styrenedivinylbenzene copolymer, coconut husk. Activated carbon, glass beads, silica gel, glass fibers, quartz fibers and the like can be mentioned. Examples of the material of the container include metal, glass, ceramics and the like. Examples of the clean gas to be introduced into the container include gases such as air, helium, and nitrogen, and a high-purity gas (99.999) that does not contain an analyte.
6 or more) is preferable.
【００１０】本発明を用いることによって、室温下で微
量しか発生しない物質や、従来のように捕集剤が前記容
器の外部に設置されていた場合、容器内壁またはガス排
出管内壁に吸着されやすかった物質も、ロスなく捕集剤
に捕集し、且つロスなく測定装置に供給されるため、発
生物質を精度よく且つ高感度に分析可能になる。By using the present invention, when a substance that generates only a trace amount at room temperature or a scavenger as in the conventional case is installed outside the container, it is easily adsorbed on the inner wall of the container or the inner wall of the gas discharge pipe. These substances are also collected in the scavenger without loss and are supplied to the measuring device without loss, so that the generated substances can be analyzed accurately and with high sensitivity.
【００１１】第２の発明の特徴は、前記捕集剤の一部が
着脱自在になっていることを特徴とする。A feature of the second invention is that a part of the scavenger is detachable.
【００１２】第３の発明の特徴は、前記容器全体及び前
記排出管を加熱する加熱装置とを備えたことを特徴とす
る。A third aspect of the invention is characterized by comprising a heating device for heating the entire container and the discharge pipe.
【００１３】第４の発明の特徴は、前記加熱装置によっ
て前記容器を加熱して前記捕集剤で補修された物質を加
熱分離し、この分離物質が前記加熱装置で加熱された前
記ガス排出管を通して供給される測定装置を備えたこと
を特徴とする。A feature of the fourth invention is that the container is heated by the heating device to heat and separate the substance repaired by the scavenger, and the separated substance is heated by the heating device. It is characterized by comprising a measuring device supplied through the.
【００１４】[0014]
【発明の実施の形態】以下、本発明の実施の形態を図面
に基づいて説明する。図１は、本発明の分析装置の第１
の実施の形態を示したブロック図である。被測定部材１
００を収納する部材収納容器１にガス導入管２とガス排
出管３が接続されている。部材収納容器１の内部には、
この容器１の内壁の全面を覆うように捕集剤４が配置さ
れ、更に、この捕集剤４の内側に被測定部材１００が載
置されている。ガス排出管３は流路切替バルブ５を介し
て、ポンプ６と測定装置７に接続されている。また、ポ
ンプ６の排気側にはガスメーター８が取り付けられてい
る。更に、部材収納容器１は筐体９の内部に設置され、
この筐体９は加熱ヒーター１０により加熱されること
で、内部の部材収納容器１を暖めるようになっている。
また、ガス排出管３側は切替バルブ５も含めて加熱ヒー
ター１１により暖められるようになっている。これらヒ
ーター１０、１１への通電量は図示されない制御装置に
より制御され、部材収納容器１及びガス排出管３側の配
管の温度を設定温度に保持するようになっている。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a first analysis device of the present invention.
3 is a block diagram showing an embodiment of FIG. Measured member 1
A gas introduction pipe 2 and a gas discharge pipe 3 are connected to a member storage container 1 for storing 00. Inside the member storage container 1,
The collecting agent 4 is arranged so as to cover the entire inner wall of the container 1, and the member to be measured 100 is placed inside the collecting agent 4. The gas discharge pipe 3 is connected to a pump 6 and a measuring device 7 via a flow path switching valve 5. A gas meter 8 is attached to the exhaust side of the pump 6. Further, the member storage container 1 is installed inside the housing 9,
The housing 9 is heated by the heater 10 to warm the internal member storage container 1.
The gas exhaust pipe 3 side, including the switching valve 5, is heated by the heater 11. The amount of electricity supplied to the heaters 10 and 11 is controlled by a control device (not shown), and the temperature of the pipes on the side of the member storage container 1 and the gas discharge pipe 3 is maintained at the set temperature.
【００１５】次に本実施の形態の動作について説明す
る。まず、図示の如く、部材収納容器１内に被測定部材
１００、捕集剤４を配置する。この時は、加熱ヒーター
１０、１１には通電せず、被測定部材１００は常温で部
材収納容器１内に載置する。次に、切替バルブ５をポン
プ６側に切り換えてポンプ６を動作させて部材収納容器
１内を排気するため、ガス導入管２を通して、高純度
（９９．９９％以上）の空気が流速１リットル／分で部
材収納容器１内部に導入され、これを１０００分間続け
る。これにより、ガス導入管２より部材収納容器１内に
導入された空気は捕集剤４を通過した後、ガス排出管３
から外部に排気される。この時、被測定部材１００から
発生するガス状物質は、捕集剤４を通過する際に、この
捕集剤４により捕捉される。尚、ガス導入管２の開口部
は捕集剤４の内側に位置するように設定されている。Next, the operation of this embodiment will be described. First, as illustrated, the member to be measured 100 and the collecting agent 4 are placed in the member storage container 1. At this time, the heaters 10 and 11 are not energized, and the measured member 100 is placed in the member storage container 1 at room temperature. Next, since the switching valve 5 is switched to the pump 6 side to operate the pump 6 to exhaust the inside of the member storage container 1, high-purity (99.99% or more) air has a flow rate of 1 liter through the gas introduction pipe 2. It is introduced into the member storage container 1 at a speed of 1 / minute, and this is continued for 1000 minutes. As a result, the air introduced into the member storage container 1 from the gas introduction pipe 2 passes through the scavenger 4, and then the gas discharge pipe 3
Exhausted from the outside. At this time, the gaseous substance generated from the member to be measured 100 is captured by the scavenger 4 when passing through the scavenger 4. The opening of the gas introduction pipe 2 is set to be located inside the scavenger 4.
【００１６】上記した１０００分間の高純度空気の部材
収納容器１内への導入の後、ポンプ６の動作を停止する
と共に、切替バルブ５を測定装置７側に切り換える。そ
の後、加熱ヒーター１０、１１に通電して、部材収納容
器１全体を３００℃まで加熱すると共に、ガス排出管３
側の測定装置７までの配管を３００℃程度に保温する。After the high-purity air is introduced into the member container 1 for 1000 minutes, the operation of the pump 6 is stopped and the switching valve 5 is switched to the measuring device 7 side. After that, the heaters 10 and 11 are energized to heat the entire member storage container 1 to 300 ° C., and the gas exhaust pipe 3
The piping to the measuring device 7 on the side is kept warm at about 300 ° C.
【００１７】これにより、捕集剤４により捕捉されてい
た被測定部材１００からの発生物質が加熱離脱され、ガ
ス排出管３を通って測定装置７に導入され、ここで分析
される。加熱離脱したガスは部材収納容器１からガス排
出口を通って、ガス排出管３内に流入していくが、この
時、部材収納容器１の内壁全体及びガス排出管３内が３
００℃程度に加熱されているため、発生物質は前記ガス
排出口付近やガス排出管３などの内壁に吸着されること
なく、測定装置７へ導入される。As a result, the substance generated from the member to be measured 100, which has been captured by the scavenger 4, is released by heating, introduced into the measuring device 7 through the gas discharge pipe 3, and analyzed there. The gas released by heating flows into the gas discharge pipe 3 from the member storage container 1 through the gas discharge port. At this time, the entire inner wall of the member storage container 1 and the inside of the gas discharge pipe 3 become 3
Since the substance is heated to about 00 ° C., the generated substance is introduced into the measuring device 7 without being adsorbed on the inner wall of the gas discharge port or the gas discharge pipe 3.
【００１８】測定装置７は導入された被分析物質をコー
ルドトラップ、再加熱などして、ガスクロマトグラフィ
ー（ＧＣ）による分析や、質量分析（ＭＳ）を行ない、
例えば、ＤＯＰ（フタル酸ジ−２−エチルヘキシル）を
定量した。このＤＯＰは従来の室温における捕集法では
容器内壁等に吸着されやすく、分析できなかった物質の
ーつである。The measuring device 7 carries out analysis by gas chromatography (GC) and mass spectrometry (MS) by cold trapping and reheating the introduced substance to be analyzed.
For example, DOP (di-2-ethylhexyl phthalate) was quantified. This DOP is a substance that could not be analyzed because it was easily adsorbed on the inner wall of the container by the conventional collection method at room temperature.
【００１９】この結果をもとに、各メーカーの評価用部
材から発生したＤＯＰの発生速度を計算すると、それぞ
れＡ社で２００ｎｇ／ｈ−ｍ2 、Ｂ社で７０ｎｇ／ｈ−
ｍ2、ｃ社で２０ｎｇ／ｈ−ｍ2 となり有意差が認めら
れた。Based on these results, the rate of DOP generated from the evaluation member of each manufacturer was calculated to be 200 ng / h-m 2 for Company A and 70 ng / h- for Company B, respectively.
20ng / h-m 2 becomes significant difference was observed in m 2, c Corporation.
【００２０】一方、捕集剤４を部材収納容器１と測定装
置７間のガス排出管３の途中に配置した場合、Ａ社〜Ｃ
社の部材から捕集されたＤＯＰはいずれも定量下限以下
で有意差は認められなかった。On the other hand, when the scavenger 4 is arranged in the middle of the gas discharge pipe 3 between the member storage container 1 and the measuring device 7, companies A to C
The DOP collected from members of the same company was below the lower limit of quantification, and no significant difference was observed.
【００２１】本実施の形態によれば、部材収納容器１の
内壁全体を覆うように配置された捕集剤４の内側に被測
定部材１００を載置して、常温でこの部材１００から発
生する物質を部材収納容器１の内壁に触れさせる前にロ
スなく前記捕集剤４にて捕捉する。その後、この捕集剤
４を加熱して、前記捕集物質を脱離させて、測定装置７
に導入する際に、部材収納容器１全体及びガス排出管３
側の測定装置７までの配管全体を加熱保温するため、脱
離物質が途中のガス排出口や配管で吸着されることが防
止され、測定装置７へロスなく導入することができる。
これにより、常温の部材１００から発生する物質が微量
であったり、或いは容器１の内壁や配管内壁に吸着され
やすい性質のものであっても、ロスなく捕集して、且つ
測定装置７へ被測定物質をロスなく導入することができ
るため、高感度で、且つ精度の高い測定を行なうことが
できる。According to the present embodiment, the member to be measured 100 is placed inside the scavenger 4 which is arranged so as to cover the entire inner wall of the member storage container 1, and is generated from this member 100 at room temperature. Before the substance comes into contact with the inner wall of the member storage container 1, the substance is captured by the scavenger 4 without loss. After that, the scavenger 4 is heated to release the scavenger, and the measuring device 7
When it is introduced into the container, the entire member storage container 1 and the gas discharge pipe 3
Since the entire pipe up to the measuring device 7 on the side is heated and kept warm, the desorbed substance can be prevented from being adsorbed to the gas discharge port or the pipe on the way, and can be introduced into the measuring device 7 without loss.
As a result, even if a small amount of substance is generated from the member 100 at room temperature, or even if the substance has a property of being easily adsorbed to the inner wall of the container 1 or the inner wall of the pipe, the substance is collected without loss and is collected by the measuring device 7. Since the substance to be measured can be introduced without loss, highly sensitive and highly accurate measurement can be performed.
【００２２】尚、上記の実施の形態では、捕集剤４を部
材収納容器１の内壁全体を覆うように配置したが、部材
１００から発生する物質は主に部材収納容器１とガス排
出管３の接続付近のガス排出口付近に吸着されるため、
前記ガス排出口がある付近を少なくとも覆うように捕集
剤４を配置しても、発生物質はロスなく捕集剤４に捕集
され、ほぼ同様の効果を得ることができる。In the above embodiment, the scavenger 4 is arranged so as to cover the entire inner wall of the member storage container 1, but the substances generated from the member 100 are mainly the member storage container 1 and the gas discharge pipe 3. Since it is adsorbed near the gas outlet near the connection of
Even if the scavenger 4 is arranged so as to cover at least the vicinity of the gas outlet, the generated substance is collected by the scavenger 4 without loss, and substantially the same effect can be obtained.
【００２３】また、上記実施の形態では、捕集剤４は部
材収納容器１内部に設置したまま加熱することで、捕集
された物質を加熱脱離して分析したが、捕集される物質
によっては、加熱することによって分解するものもある
ので、捕集剤４を容器１から取り外し、捕集した物質を
溶媒抽出することで分析するようにしても、上記と同様
の効果がある。この場合、容器１から取り外す捕集剤は
その一部でもよく、この部分を予め取り外しやすいよう
に着脱自在の構造にしておいてもよい。Further, in the above-mentioned embodiment, the trapping agent 4 is heated while being installed inside the member storage container 1 so that the trapped substance is thermally desorbed and analyzed. Since some of them decompose by heating, the same effect as above can be obtained even if the scavenger 4 is removed from the container 1 and the collected substance is analyzed by solvent extraction. In this case, the scavenger to be removed from the container 1 may be a part of it, or this part may be preliminarily provided with a detachable structure so that it can be easily removed.
【００２４】図２は、本発明の分析装置の第２実施の形
態を示したブロック図である。本例はガス排出管３の途
中に着脱自在のトラップ管１２を挿入できる構造となっ
ていて、ガス排出管３が直接測定装置に接続される経路
が省略されている。残りの部材収納容器１側の構成は図
１に示した第１の実施の形態と同様の構成である。FIG. 2 is a block diagram showing a second embodiment of the analyzer of the present invention. This example has a structure in which a detachable trap tube 12 can be inserted in the middle of the gas exhaust pipe 3, and the path through which the gas exhaust pipe 3 is directly connected to the measuring device is omitted. The configuration of the remaining member storage container 1 side is the same as that of the first embodiment shown in FIG.
【００２５】次に本実施の形態の動作について説明す
る。捕集剤４を部材収納容器１の内壁全体を覆うように
配置し、この捕集剤４の内側に被測定部材１００を載置
する。トラップ管１２を外して、ガス排出管３をポンプ
６に直接接続し、ポンプ６を動作させて排気する。これ
により、ガス導入管２を通して、高純度（９９．９９％
以上）の空気を流速１リットル／分で部材収納容器１内
部に導入し、これを１０００分間続ける。この間、常温
でこの部材１００から発生する物質を部材収納容器１の
内壁に触れさせる前にロスなく前記捕集剤４にて捕捉す
る。その後、被測定部材１００を取り除き、ガス排出管
３の途中にトラップ管１２を装着した後、加熱ヒーター
１０、１１に通電して、部材収納容器１、ガス排出管３
を加熱して、捕集剤４の捕集物質を加熱脱離させると共
に、ポンプ６によりガスを排気して、捕集物質をロスな
くトラップ管１２で捕捉する。その後、トラップ管１２
を外して、図示されない測定装置のところへ持ってき
て、トラップ管１２により捕捉した前記物質を測定装置
に供給して分析を行なう。Next, the operation of this embodiment will be described. The scavenger 4 is arranged so as to cover the entire inner wall of the member storage container 1, and the member to be measured 100 is placed inside the scavenger 4. The trap pipe 12 is removed, the gas discharge pipe 3 is directly connected to the pump 6, and the pump 6 is operated to exhaust the gas. As a result, high purity (99.99%) is achieved through the gas introduction pipe 2.
The above air is introduced into the member storage container 1 at a flow rate of 1 liter / minute, and this is continued for 1000 minutes. During this period, the substance generated from the member 100 at room temperature is captured by the scavenger 4 without loss before it is brought into contact with the inner wall of the member storage container 1. After that, the member to be measured 100 is removed, the trap tube 12 is attached in the middle of the gas exhaust pipe 3, and then the heaters 10 and 11 are energized to supply the member storage container 1 and the gas exhaust pipe 3.
Is heated to desorb the trapped substance of the trapping agent 4, and the gas is exhausted by the pump 6 to trap the trapped substance in the trap tube 12 without loss. Then, the trap tube 12
Then, the sample is taken to a measuring device (not shown), and the substance captured by the trap tube 12 is supplied to the measuring device for analysis.
【００２６】本実施の形態も常温の部材１００から発生
する物質が微量であったり、或いは部材収納容器１内壁
やガス排出管３の内壁に吸着されやすい性質のものであ
っても、最終的にトラップ管１２によりロスなく捕捉で
きるため、高感度で、且つ精度の高い測定を行なうこと
ができる。従って、従来の室温における捕集法では容器
１の内壁等に吸着されやすく、分析できなかったＤＯＰ
などの物質も定量でき、高感度に分析することができる
ようになる。Also in this embodiment, even if the amount of the substance generated from the member 100 at room temperature is very small or the substance is easily adsorbed to the inner wall of the member storage container 1 or the inner wall of the gas discharge pipe 3, Since it can be captured without loss by the trap tube 12, highly sensitive and highly accurate measurement can be performed. Therefore, in the conventional collection method at room temperature, the DOP which was easily adsorbed on the inner wall of the container 1 and the like could not be analyzed.
Substances such as can be quantified and can be analyzed with high sensitivity.
【００２７】[0027]
【発明の効果】以上詳細に説明したように、本発明によ
れば、室温下で微量しか発生しない物質や、部材収納容
器内壁またはガス排出管内壁に吸着されやすかった物質
も、ロスなく捕集剤に捕集することができ、且つロスな
く測定装置に導入することが出来るため、高感度且つ高
精度に分析することができ、部材を加熱することなく、
使用環境に近い温度条件で前記発生物質を評価すること
ができる。As described above in detail, according to the present invention, a substance that is generated only in a trace amount at room temperature or a substance that is easily adsorbed on the inner wall of the member storage container or the inner wall of the gas discharge pipe is collected without loss. Since it can be collected in the agent and can be introduced into the measuring device without loss, it is possible to analyze with high sensitivity and high accuracy, without heating the member,
The generated substance can be evaluated under temperature conditions close to the environment of use.
【００２８】また、本発明によれば、着脱自在のトラッ
プ管に発生物質をロスなく集めるため、測定装置が離れ
た場所にあっても、常温発生物質を高感度且つ高精度に
分析を行なうことができる。Further, according to the present invention, since the generated substance is collected in the detachable trap tube without loss, the room temperature generated substance can be analyzed with high sensitivity and high accuracy even if the measuring device is located far away. You can
【００２９】また、本発明によれば、常温発生物質を最
も効率的に捕集剤で捕集することができる。Further, according to the present invention, the room temperature generating substance can be collected most efficiently by the collecting agent.
【００３０】また、本発明によれば、捕集剤より加熱分
離できない常温発生物質を高感度且つ高精度に分析する
ことができる。Further, according to the present invention, it is possible to analyze a room temperature generating substance which cannot be heat-separated by the scavenger with high sensitivity and high accuracy.
【図１】本発明の分析装置の第１の実施の形態を示した
ブロック図である。FIG. 1 is a block diagram showing a first embodiment of an analyzer of the present invention.
【図２】本発明の分析装置の第２の実施の形態を示した
ブロック図である。FIG. 2 is a block diagram showing a second embodiment of the analyzer of the present invention.
１ 部材収納容器 ２ ガス導入管 ３ ガス排出管 ４ 捕集剤 ５ 流路切替バルブ ６ ポンプ ７ 測定装置 ８ ガスメーター ９ 筐体 １０、１１ 加熱ヒーター １２ トラップ管 １００ 被測定部材 1 member storage container 2 gas introduction pipes 3 gas discharge pipe 4 Collection agent 5 flow path switching valve 6 pumps 7 Measuring device 8 gas meters 9 housing 10, 11 heating heater 12 trap tubes 100 member to be measured
───────────────────────────────────────────────────── フロントページの続き (72)発明者 酒井 公人 神奈川県川崎市幸区小向東芝町１ 株式 会社東芝 研究開発センター内 (56)参考文献 特開 平10−90240（ＪＰ，Ａ) 特開 平２−262055（ＪＰ，Ａ) 特開 平９−61321（ＪＰ，Ａ) 特開 平７−83808（ＪＰ，Ａ) 特開 平５−256842（ＪＰ，Ａ) 特開 平３−41341（ＪＰ，Ａ) 特開 平７−209151（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) G01N 30/00 G01N 1/22 G01N 30/08 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kimito Sakai 1 Komukai Toshiba-cho, Sachi-ku, Kawasaki-shi, Kanagawa Toshiba Research and Development Center Co., Ltd. (56) References Kaihei 2-262055 (JP, A) JP 9-61321 (JP, A) JP 7-83808 (JP, A) JP 5-256842 (JP, A) JP 3-41341 ( JP, A) JP-A-7-209151 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) G01N 30/00 G01N 1/22 G01N 30/08
Claims (4)
被測定部材を収納する容器と、 前記容器の内壁に形成され、且つ外部のガス排出管に連
通するガス排出口を少なくとも覆うように配置された捕
集剤とを備えたことを特徴とする分析装置。1. A container having a gas inlet and a gas outlet for accommodating a member to be measured therein, and a gas outlet formed on an inner wall of the container and communicating with an external gas outlet pipe. And a collector arranged in such a manner.
ることを特徴とする請求項１記載の分析装置。2. The analyzer according to claim 1, wherein a part of the scavenger is removable.
加熱装置とを備えたことを特徴とする請求項１記載の分
析装置。3. The analyzer according to claim 1, further comprising a heating device that heats the entire container and the discharge pipe.
て前記捕集剤で補修された物質を加熱分離し、この分離
物質が前記加熱装置で加熱された前記ガス排出管を通し
て供給される測定装置を備えたことを特徴とする請求項
１記載の分析装置。4. A measuring device in which the container is heated by the heating device to thermally separate the substance repaired by the scavenger, and the separated substance is supplied through the gas discharge pipe heated by the heating device. The analyzer according to claim 1, further comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06585498A JP3378494B2 (en) | 1998-03-16 | 1998-03-16 | Analysis equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP06585498A JP3378494B2 (en) | 1998-03-16 | 1998-03-16 | Analysis equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11258218A JPH11258218A (en) | 1999-09-24 |
| JP3378494B2 true JP3378494B2 (en) | 2003-02-17 |
Family
ID=13299028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP06585498A Expired - Fee Related JP3378494B2 (en) | 1998-03-16 | 1998-03-16 | Analysis equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3378494B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4389078B2 (en) * | 2002-12-04 | 2009-12-24 | 株式会社日立プラントテクノロジー | Method for measuring organic volatiles in organic materials |
| JP2005241473A (en) * | 2004-02-26 | 2005-09-08 | Perkinelmer Japan Co Ltd | Air pollutant collecting device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02262055A (en) * | 1989-03-31 | 1990-10-24 | Toshiba Corp | Organic-substance analyzer for semiconductor wafer |
| US4987767A (en) * | 1989-06-09 | 1991-01-29 | Research Corporation Technologies, Inc. | Exposive detection screening system |
| JPH0341341A (en) * | 1989-07-07 | 1991-02-21 | Fujitsu Ltd | gas analyzer |
| JP3299562B2 (en) * | 1992-03-12 | 2002-07-08 | ジーエルサイエンス株式会社 | Trace organic compound analysis method and device |
| JP3243079B2 (en) * | 1993-09-16 | 2002-01-07 | 株式会社日立製作所 | Atmospheric pressure heated gas desorption equipment |
| JP3395471B2 (en) * | 1995-08-21 | 2003-04-14 | ソニー株式会社 | Trace organic matter analyzer |
| JP3409975B2 (en) * | 1996-09-11 | 2003-05-26 | 株式会社東芝 | Pollutant analyzer |
-
1998
- 1998-03-16 JP JP06585498A patent/JP3378494B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11258218A (en) | 1999-09-24 |
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