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JP3299384B2 - Polarizing beam splitter - Google Patents

Polarizing beam splitter

Info

Publication number
JP3299384B2
JP3299384B2 JP10067094A JP10067094A JP3299384B2 JP 3299384 B2 JP3299384 B2 JP 3299384B2 JP 10067094 A JP10067094 A JP 10067094A JP 10067094 A JP10067094 A JP 10067094A JP 3299384 B2 JP3299384 B2 JP 3299384B2
Authority
JP
Japan
Prior art keywords
refractive index
beam splitter
polarizing beam
birefringent
ordinary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP10067094A
Other languages
Japanese (ja)
Other versions
JPH07287117A (en
Inventor
正 武田
Original Assignee
株式会社三協精機製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社三協精機製作所 filed Critical 株式会社三協精機製作所
Priority to JP10067094A priority Critical patent/JP3299384B2/en
Priority to CNB2003101142124A priority patent/CN1250987C/en
Priority to US08/421,904 priority patent/US5739952A/en
Priority to CNB951039660A priority patent/CN1134677C/en
Publication of JPH07287117A publication Critical patent/JPH07287117A/en
Application granted granted Critical
Publication of JP3299384B2 publication Critical patent/JP3299384B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、偏光ビームスプリッタ
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polarizing beam splitter.

【0002】[0002]

【従来の技術】従来、例えば光磁気ディスク等の各種光
学装置にあっては、偏光方向によって回折効率を異なら
しめる偏光ビームスプリッタが備えられている。この偏
光ビームスプリッタに関しては種々の提案がなされてお
り、例えば特開昭63−26604号公報等に記載され
ている。
2. Description of the Related Art Conventionally, various optical devices such as a magneto-optical disk are provided with a polarizing beam splitter that varies the diffraction efficiency depending on the polarization direction. Various proposals have been made for this polarizing beam splitter, and are described in, for example, JP-A-63-26604.

【0003】この特開昭63−26604号公報記載の
偏光ビームスプリッタは、複屈折媒体に形成した表面凹
凸格子の少なくとも凹部を、複屈折媒体の常光屈折率ま
たは異常光屈折率とほぼ等しい屈折率の物質で充填し、
常光または異常光を回折させるというものである。
In the polarizing beam splitter described in Japanese Patent Application Laid-Open No. 63-26604, at least a concave portion of a surface irregular lattice formed on a birefringent medium has a refractive index substantially equal to the ordinary or extraordinary refractive index of the birefringent medium. Filled with the substance
It diffracts ordinary or extraordinary light.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記偏
光ビームスプリッタにあっては、以下の問題がある。す
なわち、充填物質の屈折率を、複屈折媒体の常光屈折率
または異常光屈折率とほぼ等しい屈折率としなければな
らないので、充填物質の選択の幅が狭くなり、設計の自
由度の向上が図れないといった問題がある。
However, the polarizing beam splitter has the following problems. That is, since the refractive index of the filling material must be substantially equal to the ordinary or extraordinary refractive index of the birefringent medium, the range of choice of the filling material is reduced, and the design flexibility is improved. There is a problem that there is no.

【0005】そこで本発明は、充填物質を広く選択で
き、設計の自由度の向上が図られる偏光ビームスプリッ
タを提供することを目的とする。
SUMMARY OF THE INVENTION It is an object of the present invention to provide a polarizing beam splitter which allows a wide selection of a filling material and improves design flexibility.

【0006】[0006]

【課題を解決するための手段】請求項1の偏光ビームス
プリッタは、上記目的を達成するために、複屈折材料よ
りなり、その表面に凹凸状の周期格子が形成された複屈
折基板を備え、該凹部に、光学的等方性物質を充填し
て、上記複屈折基板と光学的等方性物質とからなる表面
を平坦状とした偏光ビームスプリッタであって、該光学
的等方性物質の屈折率(nc)と、該複屈折材料の常光
屈折率(no)、異常光屈折率(ne)との間に、以下
の式に示す関係があることによって、前記屈折率(n
c)が前記常光屈折率(no)または異常光屈折率(n
e)と略等しい物質を除いた光学的等方性物質を選択し
て充填したことを特徴とする。 nc=no+m(no−ne);(m=±1,±2,±3…) =ne+l(no−ne);(l=±1,±2,±3…)
According to a first aspect of the present invention, there is provided a polarizing beam splitter comprising a birefringent substrate made of a birefringent material and having a concave and convex periodic grating formed on a surface thereof. The concave portion is filled with an optically isotropic substance, a polarizing beam splitter having a flat surface formed of the birefringent substrate and the optically isotropic substance, The relationship between the refractive index (nc) and the ordinary light refractive index (no) and the extraordinary light refractive index (ne) of the birefringent material is represented by the following formula , whereby the refractive index (n) is obtained.
c) is the ordinary refractive index (no) or the extraordinary refractive index (n)
e) Select an optically isotropic substance except for a substance substantially equivalent to
It is characterized by being filled by filling . nc = no + m (no-ne); (m = ± 1, ± 2, ± 3 ...) = ne + 1 (no-ne); (l = ± 1, ± 2, ± 3 ...)

【0007】請求項2の偏光ビームスプリッタは、上記
目的を達成するために、請求項1に加えて、前記複屈折
基板をニオブ酸リチウムで、前記充填物質をソーダガラ
スで、それぞれ形成してなる。
According to a second aspect of the present invention, in order to achieve the above object, in addition to the first aspect, the birefringent substrate is formed of lithium niobate, and the filling material is formed of soda glass. .

【0008】[0008]

【作用】このような請求項1、2における偏光ビームス
プリッタによれば、複屈折基板の凹部に充填され上記式
を満足する充填物質及び複屈折基板は、常光または異常
光の何れか一方を回折させず、他方を回折させる。従っ
て、従来より充填物質の選択の幅が広げられる。
According to the polarizing beam splitter of the first and second aspects, the filler and the birefringent substrate, which fill the concave portions of the birefringent substrate and satisfy the above expression, diffract either ordinary light or extraordinary light. Without diffracting the other. Therefore, the range of selection of the filling substance can be broadened as compared with the related art.

【0009】[0009]

【実施例】以下、本発明の実施例を図面に基づいて説明
する。図1は本発明の一実施例を示す偏光ビームスプリ
ッタの縦断面図である。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view of a polarizing beam splitter showing one embodiment of the present invention.

【0010】同図において、符号1は、例えばニオブ酸
リチウムよりなる複屈折基板を示しており、この複屈折
基板1表面には、凹凸による周期的な格子が形成されて
いる。複屈折基板1の凹部1aには、ニオブ酸リチウム
の常光屈折率noと異常光屈折率neとの間に、後述の
7式または8式を満たす屈折率ncを有する充填物質
(但し、常光屈折率noまたは異常光屈折率neに略等
しい屈折率を有する物質を除く)として、例えば本実施
例においてはソーダガラス2が充填されている。
In FIG. 1, reference numeral 1 denotes a birefringent substrate made of, for example, lithium niobate. On the surface of the birefringent substrate 1, a periodic lattice formed by irregularities is formed. The concave portion 1a of the birefringent substrate 1 is filled with a filling material having a refractive index nc satisfying the following formula 7 or 8 between the ordinary light refractive index no and the extraordinary light refractive index ne of lithium niobate (however, ordinary light refraction). For example, in this embodiment, soda glass 2 is filled (except for a substance having a refractive index substantially equal to the refractive index no or the extraordinary light refractive index ne).

【0011】ここで、複屈折基板1の厚さをt、充填物
質2の厚さをd2、複屈折基板1の常光に対する屈折率
をno、複屈折基板1の異常光に対する屈折率をne、
充填物質2の屈折率をnc、光の波長をλ、k=2π/
λ、とすると、充填物質2の充填されていない領域(図
におけるAの領域)を通過する常光の位相は、 no・t・k …1式 充填物質2の充填されている領域(図1におけるBの領
域)を通過する常光の位相は、 {no(t−d2)+nc・d2}・k …2式 従って、常光のA、Bに対する位相差OPD(o)は、
1式−2式より、 OPD(o)=(no−nc)・d2・k …3式
Here, the thickness of the birefringent substrate 1 is t, the thickness of the filling material 2 is d2, the refractive index of the birefringent substrate 1 for ordinary light is no, the refractive index of the birefringent substrate 1 for extraordinary light is ne,
The refractive index of the filling material 2 is nc, the wavelength of light is λ, and k = 2π /
Assuming that λ, the phase of the ordinary light passing through the region where the filling material 2 is not filled (the region A in the drawing) is: no · t · k Equation 1 The region where the filling material 2 is filled (see FIG. 1) B region), the phase of ordinary light is {no (t−d2) + nc · d2} · k (2) Therefore, the phase difference OPD (o) of ordinary light with respect to A and B is
From Equations 1 and 2, OPD (o) = (no-nc) · d2 · k 3 equations

【0012】一方、Aの領域を通過する異常光の位相
は、 ne・t・k …4式 Bの領域を通過する異常光の位相は、 {ne(t−d2)+nc・d2}・k …5式 従って、異常光のA、Bに対する位相差OPD(e)
は、4式−5式より、 OPD(e)=(ne−nc)・d2・k …6式
On the other hand, the phase of the extraordinary light passing through the region A is given by: ne · t · k 4 The phase of the extraordinary light passing through the region B is given by {ne (t−d2) + nc · d2} · k ... Equation 5 Therefore, the phase difference OPD (e) of the extraordinary light with respect to A and B
From Equation 4-5, OPD (e) = (ne−nc) · d2 · k Equation 6

【0013】ここで、常光または異常光の何れか一方の
みを回折させるためには、3式または6式の何れか一方
のみがπの偶数倍となれば良い。すなわち、常光のみを
回折させるには、 OPD(e)=2pπ、(p=0,±1,±2…) また、異常光のみを回折させるには、 OPD(o)=2pπ、(p=0,±1,±2…)
Here, in order to diffract only one of the ordinary light and the extraordinary light, only one of the expressions 3 and 6 needs to be an even multiple of π. That is, to diffract only ordinary light, OPD (e) = 2pπ, (p = 0, ± 1, ± 2...) To diffract only extraordinary light, OPD (o) = 2pπ, (p = 0, ± 1, ± 2 ...)

【0014】ところが、上記条件のみでは、d2の設定
によっては、常光・異常光のうち回折させる光の中に
も、回折しない光量が存在する場合がある。本発明の偏
光ビームスプリッタは、例えば光ディスク装置のピック
アップの中に用いることができるが、このような用途に
あっては、常光・異常光のうち一方は全て回折させ、他
方は全く回折しないようにすることが望ましい。すなわ
ち、 OPD(o)=2pπ、 (p=0,±1,±2
…)、且つ OPD(e)=(2q+1)π、(q=0,±1,±2
…) 或は、 OPD(o)=(2q+1)π、(q=0,±1,±2
…)、且つ OPD(e)=2pπ、 (p=0,±1,±2
…)、であることが必要である。 すなわち、OPD(o)−OPD(e)=(2i+1)
π(i=0,±1,±2…)という条件である。
However, under the above conditions alone, depending on the setting of d2, there is a case where there is an amount of light that is not diffracted among the ordinary light and the extraordinary light that is diffracted. The polarizing beam splitter of the present invention can be used, for example, in a pickup of an optical disk device.In such an application, one of ordinary light and extraordinary light is diffracted, and the other is not diffracted at all. It is desirable to do. That is, OPD (o) = 2pπ, (p = 0, ± 1, ± 2
...) and OPD (e) = (2q + 1) π, (q = 0, ± 1, ± 2
...) or OPD (o) = (2q + 1) π, (q = 0, ± 1, ± 2
...), and OPD (e) = 2pπ, (p = 0, ± 1, ± 2
...). That is, OPD (o) -OPD (e) = (2i + 1)
π (i = 0, ± 1, ± 2...).

【0015】OPD(o)−OPD(e) ={(no−ne)−(ne−nc)}・d2・k =(no−ne)・d2・k =(2i+1)π、(i=0,±1,±2…) この式から判るように、d2はiのとり方によって無数
の値をとり得るが、最小のd2は、i=0或はi=−1
の時得られ、 d2=π/{k・|no−ne|} =λ/{2・|no−ne|}となる。
OPD (o) -OPD (e) = {(no-ne)-(ne-nc)}. D2.k = (no-ne) .d2.k = (2i + 1) .pi., (I = 0 , ± 1, ± 2...) As can be seen from this equation, d2 can take an infinite number of values depending on how i is taken, but the minimum d2 is i = 0 or i = −1.
And d2 = π / {k · | no-ne | == λ / {2 · | no-ne |}.

【0016】さらに、このd2において、前述のよう
に、OPD(o)或はOPD(e)の一方がπの偶数
倍、他方がπの奇数倍とならなくてはいけないが、ここ
で、本実施例の充填物質には、 nc=no+m(no−ne)、(但しm=±1,±2…) …7式 並びに、 nc=ne+l(no−ne)、(但しl=±1,±2…) …8式 なる材料が選択されている。
Further, in this d2, as described above, one of the OPD (o) and the OPD (e) must be an even multiple of π and the other must be an odd multiple of π. Nc = no + m (no-ne), (where m = ± 1, ± 2...) 7 and nc = ne + 1 (no-ne), (where l = ± 1, ± 2 ...) ... 8 formulas are selected.

【0017】従って、 OPD(e)=(ne−nc)・d2・k ={(ne−nc)/(no−ne)}・π ={−l(no−ne)・π}/(no−ne) =−lπ よって、充填物質のnc=ne+l(no−ne)にお
けるlが偶数の時、異常光は全て回折せず、常光は全て
回折し、lが奇数の時、異常光は全て回折し、常光は全
て回折しないようにすることができる。
Accordingly, OPD (e) = (ne−nc) · d2 · k = {(ne−nc) / (no−ne)} · π = {− 1 (no−ne) · π} / (no −ne) = − lπ Therefore, when l in the nc = ne + 1 (no-ne) of the filling material is an even number, all extraordinary light is not diffracted, all ordinary light is diffracted, and when l is odd, all extraordinary light is It can be diffracted and all ordinary light is not diffracted.

【0018】従って、本実施例においては、λ=0.6
33μmにおいて、ニオブ酸リチウムのno=2.28
6、ne=2.2であり、 nc=no+m(no−ne) =2.286−9×0.086 =1.512 nc=ne+l(no−ne) =2.2−8×0.086 =1.512 となり、ソーダガラスが利用されている。
Therefore, in this embodiment, λ = 0.6
At 33 μm, no = 2.28 for lithium niobate
6, ne = 2.2, nc = no + m (no-ne) = 2.286-9 × 0.086 = 1.512 nc = ne + 1 (no-ne) = 2.2-8 × 0.086 = 1.512, and soda glass is used.

【0019】このように、本実施例においては、複屈折
材料としてのニオブ酸リチウムよりなり、その表面に凹
凸状の周期格子が形成された複屈折基板1と、この複屈
折基板1の凹部1aに充填され、該複屈折基板1の複屈
折材料の常光屈折率noと異常光屈折率neとの間に上
記7式または8式を満たす屈折率ncを有する充填物質
(但し、常光屈折率または異常光屈折率に略等しい屈折
率を有する物質を除く)としてのソーダガラス2と、を
具備するようにしたので、上述のように、偏光ビームス
プリッタとして機能させることができるようになってい
る。
As described above, in the present embodiment, the birefringent substrate 1 made of lithium niobate as a birefringent material and having an uneven periodic lattice formed on the surface thereof, and the concave portion 1a of the birefringent substrate 1 And a filling material having a refractive index nc satisfying the above formula 7 or 8 between the ordinary refractive index no and the extraordinary refractive index ne of the birefringent material of the birefringent substrate 1 (however, the ordinary refractive index or And soda glass 2) (excluding a substance having a refractive index substantially equal to the extraordinary light refractive index), so that it can function as a polarizing beam splitter as described above.

【0020】該充填物質2の屈折率ncは、上記7式ま
たは8式を満たせば良いことから、従来より充填物質の
選択の幅を広げることができるようになっており、設計
の自由度の向上を図ることが可能となっている。
Since the refractive index nc of the filling material 2 only needs to satisfy the above equation (7) or (8), the range of choice of the filling substance can be broadened as compared with the prior art. It is possible to improve.

【0021】本発明の第2実施例として、複屈折基板材
料に水晶を用いた例を述べる。水晶はno=1.52、
ne=1.48であり、前記m、lとして、m=−1
3、l=−12とすると、 nc=no+m(no−ne) =1.52−13×0.04 =1.0 nc=ne+l(no−ne) =1.48−12×0.04 =1.0 すなわち、 d2=π/{k・|no−ne|} =λ/{2・|no−ne|}の条件下で、充填物質を
空気とすることができる。
As a second embodiment of the present invention, an example in which quartz is used as a birefringent substrate material will be described. The crystal is no = 1.52,
ne = 1.48, and m = −1 as m and l.
Assuming that 3, l = −12, nc = no + m (no−ne) = 1.52-13 × 0.04 = 1.0 nc = ne + 1 (no−ne) = 1.48−12 × 0.04 = 1.0 That is, the filling material can be air under the condition of d2 = π / {k · | no-ne |} = λ / {2 · | no-ne |}.

【0022】本発明の第3実施例として、複屈折基板材
料に方解石を用いた例を述べる。方解石はno=1.6
4、ne=1.48であり、前記m、lとして、m=−
4、l=−3とすると、 nc=no+m(no−ne) =1.64−4×0.16 =1.0 nc=ne+l(no−ne) =1.48−3×0.16 =1.0 すなわち、 d2=π/{k・|no−ne|} =λ/{2・|no−ne|}の条件下で、充填物質を
空気とすることができる。
As a third embodiment of the present invention, an example using calcite as a birefringent substrate material will be described. Calcite no = 1.6
4, ne = 1.48, and m = −, where m = −
Assuming that 4, 1 = −3, nc = no + m (no−ne) = 1.64−4 × 0.16 = 1.0 nc = ne + 1 (no−ne) = 1.48−3 × 0.16 = 1.0 That is, the filling material can be air under the condition of d2 = π / {k · | no-ne |} = λ / {2 · | no-ne |}.

【0023】以上本発明者によってなされた発明を実施
例に基づき具体的に説明したが、本発明は上記実施例に
限定されるものではなく、その要旨を逸脱しない範囲で
種々変形可能であるというのはいうまでもなく、例え
ば、上記実施例においては、複屈折基板1をニオブ酸リ
チウム、水晶、方解石により、充填物質2をソーダガラ
スより、それぞれ構成しているが、上記材料に限定され
るものではない。
Although the invention made by the inventor has been specifically described based on the embodiments, the present invention is not limited to the above-described embodiments, and can be variously modified without departing from the gist thereof. Needless to say, for example, in the above embodiment, the birefringent substrate 1 is made of lithium niobate, quartz, and calcite, and the filling material 2 is made of soda glass. However, the material is limited to the above materials. Not something.

【0024】[0024]

【発明の効果】以上述べたように、請求項1、2の偏光
ビームスプリッタによれば、複屈折材料よりなり、その
平坦状の表面に凹凸状の周期格子が形成された複屈折基
板を備え、該凹部に、光学的等方性物質を充填してなる
偏光ビームスプリッタであって、該光学的等方性物質の
屈折率(nc)と、該複屈折材料の常光屈折率(n
o)、異常光屈折率(ne)との間に、以下の式に示す
関係があることによって、前記屈折率(nc)が前記常
光屈折率(no)または異常光屈折率(ne)と略等し
い物質を除いた光学的等方性物質を選択して充填したこ
を特徴としたので、 nc=no+m(no−ne);(m=±1,±2,±3…) =ne+l(no−ne);(l=±1,±2,±3…) 該充填物質の屈折率ncは上記式を満たせば良く、従っ
て、従来より充填物質の選択の幅を広げることができ、
設計の自由度の向上を図ることが可能となる。
As described above, according to the polarizing beam splitters of the first and second aspects, the birefringent substrate which is made of a birefringent material and has an uneven periodic grating formed on a flat surface thereof is provided. A polarizing beam splitter in which the concave portions are filled with an optically isotropic substance, wherein the refractive index (nc) of the optically isotropic substance and the ordinary refractive index (n) of the birefringent material are
o) and the extraordinary light refractive index (ne) have the relationship shown in the following equation, so that the refractive index (nc) is
Absolutely equal to light refractive index (no) or extraordinary light refractive index (ne)
Selected and filled with optically isotropic material
Having characterized the door, nc = no + m (no -ne); (m = ± 1, ± 2, ± 3 ...) = ne + l (no-ne); (l = ± 1, ± 2, ± 3 ...) It is sufficient that the refractive index nc of the filling material satisfies the above expression, and therefore, the range of selection of the filling material can be broadened as compared with the related art,
The degree of freedom in design can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例を示す偏光ビームスプリッタ
の縦断面図である。
FIG. 1 is a longitudinal sectional view of a polarizing beam splitter showing one embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 複屈折基板 1a 複屈折基板の凹部 2 充填物質 DESCRIPTION OF SYMBOLS 1 Birefringent substrate 1a Depression of birefringent substrate 2 Filling substance

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 複屈折材料よりなり、その表面に凹凸状
の周期格子が形成された複屈折基板を備え、 該凹部に、光学的等方性物質を充填して、上記複屈折基
板と光学的等方性物質とからなる表面を平坦状とした偏
光ビームスプリッタであって、 該光学的等方性物質の屈折率(nc)と、該複屈折材料
の常光屈折率(no)、異常光屈折率(ne)との間
に、以下の式に示す関係があることによって、前記屈折
率(nc)が前記常光屈折率(no)または異常光屈折
率(ne)と略等しい物質を除いた光学的等方性物質を
選択して充填したことを特徴とする偏光ビームスプリッ
タ。 nc=no+m(no−ne);(m=±1,±2,±3…) =ne+l(no−ne);(l=±1,±2,±3…)
1. A birefringent substrate comprising a birefringent material and having a concave and convex periodic grating formed on a surface thereof, wherein said concave portion is filled with an optically isotropic substance, and What is claimed is: 1. A polarizing beam splitter having a flat surface made of an optically isotropic substance, comprising: a refractive index (nc) of the optically isotropic substance; an ordinary refractive index (no) of the birefringent material; between the refractive index (ne), by that is shown by the following equation, the refraction
The refractive index (nc) is the ordinary light refractive index (no) or the extraordinary light refraction.
Optically isotropic material excluding a material that is approximately equal to the rate (ne)
A polarizing beam splitter characterized by being selectively filled . nc = no + m (no-ne); (m = ± 1, ± 2, ± 3 ...) = ne + 1 (no-ne); (l = ± 1, ± 2, ± 3 ...)
【請求項2】 請求項1記載の偏光ビームスプリッタに
おいて、 前記複屈折基板をニオブ酸リチウムで、前記充填物質を
ソーダガラスで、それぞれ形成してなる偏光ビームスプ
リッタ。
2. The polarizing beam splitter according to claim 1, wherein the birefringent substrate is formed of lithium niobate, and the filling material is formed of soda glass.
JP10067094A 1994-04-14 1994-04-14 Polarizing beam splitter Expired - Fee Related JP3299384B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10067094A JP3299384B2 (en) 1994-04-14 1994-04-14 Polarizing beam splitter
CNB2003101142124A CN1250987C (en) 1994-04-14 1995-04-14 Polarized light beam splitter and optical probe using the same
US08/421,904 US5739952A (en) 1994-04-14 1995-04-14 Polarizing beam splitter and optical head assembly
CNB951039660A CN1134677C (en) 1994-04-14 1995-04-14 Seperator of polarized light beam and light detector using same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10067094A JP3299384B2 (en) 1994-04-14 1994-04-14 Polarizing beam splitter

Publications (2)

Publication Number Publication Date
JPH07287117A JPH07287117A (en) 1995-10-31
JP3299384B2 true JP3299384B2 (en) 2002-07-08

Family

ID=14280212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10067094A Expired - Fee Related JP3299384B2 (en) 1994-04-14 1994-04-14 Polarizing beam splitter

Country Status (1)

Country Link
JP (1) JP3299384B2 (en)

Also Published As

Publication number Publication date
JPH07287117A (en) 1995-10-31

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