JP3179941U - Composite sheet press-fitting device - Google Patents

Abstract

Provided is a composite sheet material press-fitting device that is suitable for press-fitting of a composite wafer and that can generate an action force of uniform temperature and pressure using an atmospheric pressure and a press-fitted film.
SOLUTION: A platform 1, a press-fitting platform 2, a membrane insertion base unit 3, and a heater 4 are provided. The platform 1 includes a mounting surface 11, the press-fitting platform 2 is formed so as to reciprocate and move toward the mounting surface 11 of the platform 1, and the membrane insertion base unit 3 straddles opposite sides of the platform 1. And is used to construct the press-fitting film 31. The press-fitting membrane 31 is located between the platform 1 and the press-fitting platform 2, and further, an air chamber R for filling gas is formed with the press-fitting platform 2, the heater 4 is provided in the press-fitting platform 2, and the air chamber R Further, a space is formed between the heater 4 and the press-fitted film 31.
[Selection] Figure 3

Description

  The present invention relates to a press-fitting device, and more particularly, to a press-fitting device for a composite sheet material that is suitable for press-fitting of a composite wafer and can generate an action force of uniform temperature and pressure by using atmospheric pressure and a press-fitting film. It is concerned.

  Conventionally, as a press-fitting device for a composite sheet material used for press-fitting a wafer, for example, a press-fitting device for a composite wafer has been proposed, for example, in the Republic of China publication No. M359788 (see Patent Document 1). By forming a plurality of concave chambers on the mounting surface of the bottom seat, one temporary area is defined on the mounting surface, whereby the base wafer is placed.

  At present, many contractors still employ the composite sheet material press-fitting device 9 as shown in FIG. The composite sheet material press-fitting device 9 includes one platform 91, one metal press-fitting plate 92, and one pinching member 93. The metal press-fit plate 92 is configured to be displaced in the vertical direction relative to the platform 91. The pinching member 93 is movably installed on the platform 91 and is used to fix the wafer 94 to be press-fitted. Among them, the platform 91 includes a single mounting surface 911, and the mounting surface 911 is used for mounting a wafer 94 to be press-fitted. The metal press-fit plate 92 is provided with one opening groove 921. The opening groove 921 is provided outside the metal press-fitting plate 92 and is formed so as to be aligned with the pressing member 93. In addition, one drive member 95 is connected to the metal press-fit plate 92. The drive member 95 is used so as to interlock with the displacement of the metal press-fitting plate 92 in the vertical direction relative to the platform 91.

  When such a conventional composite sheet press-fitting device 9 is actually used, the press-fitting device 9 is placed in one vacuum environment, and the wafer 94 to be press-fitted is first aligned using the pinching member 93. By doing so, the wafer 94 is formed so as to face the metal press-fit plate 92, and at the same time, a space pad (not shown) between the two wafers 94 is moved and removed. Then, the drive member 95 is continuously driven so that the metal press-fit plate 92 is displaced in the direction of the arrow as shown in FIG. 1 and until the metal press-fit plate 92 comes into contact with the surface of the wafer 94. Is driven until the pinching member 93 is covered. In this way, the upper and lower wafers 94 are heated simultaneously by the metal press-fitting plate 92 and the platform 91 that have received heat, so that the adhesive 941 between the two wafers 94 is melted, and then the vacuum operating environment. Under the press-fitting action force of the metal press-fitting plate 92, the press-fitting and adhering operations between the two wafers 94 can be completed.

Republic of China Notice No. M359788

  In general, various problems are likely to occur in the operation of the conventional press-fitting device 9 for composite sheet material as described above, which will be described below with reference to FIG. Since the metal press-fit plate 92 still has a microscopically uneven contact surface 922 (see FIG. 5), when the contact surface 922 of the metal press-fit plate 92 is brought into contact with the surface of the wafer 94, it is completely Can't get a tight seal. For this reason, when pressurizing force is applied to the wafer 94 by the metal press-fitting plate 92, the force applied to the surface of the wafer 94 is likely to be non-uniform, and the bonding between the wafers 94 becomes non-uniform so that the wafer There is a problem that not only the quality of the 94 bonding is lowered, but also the manufacturing loss of the wafer 94 is increased.

  In addition, since the wafer 94 must be subjected to a high temperature of 500 ° C. or more in the pasting process, the flatness of the contact surface 922 is somewhat lower if the metal press-fit plate 92 is in direct contact with the wafer and undergoes thermal expansion. It gets even rougher. For this reason, not only the gap generated by the contact between the metal press-fitting plate 92 and the surface of the wafer 94 is increased, but also the heat conduction efficiency of the metal press-fitting plate 92 is limited, and the adhesive 941 between the two wafers 94. However, there is a problem in that the distribution of heat received becomes uneven, the effect of bonding between the wafers 94 becomes low, and the yield of wafer production also deteriorates.

  Further, the metal press-fitting plate 92 usually has to be provided with an opening groove 921 having an appropriate size on the outside in order to correspond to the pinching member 93. In such a state, the action of press-fitting that occurs in the opening groove 921. Since the force is clearly insufficient, there is a problem that the quality of the wafer 94 to be manufactured is deteriorated, the production amount of the wafer is finally reduced, and the yield is deteriorated. Therefore, there has been a demand for further improvement of the conventional composite sheet press-fitting device as described above.

  The present invention has been devised in view of such problems, and the first object is to provide a sheet to be attached by providing a uniform press-fitting action force at atmospheric pressure. An object of the present invention is to provide a press-fitting device for a composite sheet material that can ensure uniform force applied to the surface of the material and can maintain a better press-fit quality of the sheet material.

  The second object of the present invention is to maintain a uniform heat received by the adhesive between the sheet materials by using a gas as a heat conducting medium, and further relatively adhere the sheet materials. An object of the present invention is to provide a press-fitting device for a composite sheet material that can increase the yield of the sheet.

  The third purpose of the present invention is to maintain the accuracy of alignment between the sheet materials, and to ensure that all the same pressure input is acquired on the surface of the sheet material, thereby increasing the production volume, An object of the present invention is to provide a press-fitting device for a composite sheet material that can increase the yield of products.

  In order to achieve the above object, a composite sheet material press-fitting device according to the present invention includes one platform, one press-fitting platform, a membrane insertion base unit, and a heater. The platform includes a single mounting surface. The press-fitting platform is formed so as to reciprocate toward the platform mounting surface. The membrane insertion base unit is provided so as to straddle opposite sides of the platform, and is used to construct a single press-fitting membrane. The press-fitting membrane is located between the platform and the press-fitting platform, and the press-fitting platform is used for gas. A single air chamber is formed for filling. The heater is provided in the press-fitting platform and is accommodated in the air chamber, and a space is formed between the heater and the press-fitting film.

  The membrane insertion base unit includes two opposing hoisting wheel support bases, and the two hoisting wheel support bases are provided on opposite sides of the platform, and one of the hoisting wheel support bases is a press-fitting membrane. The press-fitted membrane can be pulled in conjunction with another hoisting wheel support. In addition, the membrane insertion base unit includes two other auxiliary wheel support bases, which are provided on opposite sides of the platform, respectively, and each platform and two hoisting wheel support bases. It can also be used to abut the press fit film between the platforms. In addition, the platform may be provided with another annular ring, and the annular ring may be provided so as to be wound around the outer peripheral edge of the platform mounting surface. The press-fitting platform includes one press-fitting plate and one joining member, and the press-fitting plate includes one air receiving surface directed toward the platform, and the joining member is provided on the air receiving surface of the press-fitting plate, and the platform. The annular rings may be formed to correspond to each other. In addition, another support bar is included, the support bar is formed so as to penetrate the press-fitting plate of the press-fitting platform movably, and one end of the support bar penetrating the press-fitting plate is formed to extend into the air chamber. Can also be done. Further, the support bar can be formed so as to penetrate the central portion of the press-fitting plate, and can be formed so as to abut on the center position of the platform mounting surface. The heater can also be provided on one side of the press-fit plate facing the press-fit film. Also, the injection plate is provided with one injection hole, the injection hole is formed so as to communicate with the air chamber, the injection hole is used to insert a single air duct, and the air duct has one An air valve and a single air pump can be connected. In addition, one driving member is connected to each of the press-fitting platform and the support bar, and the displacement of the press-fitting platform and the support bar by the driving member can be interlocked.

  According to the composite sheet material press-fitting device of the present invention, by providing a uniform press-fitting action force at atmospheric pressure, it is ensured that the force applied to the surface of the sheet material to be attached is uniform, There is an advantage that the sheet material can maintain better press-fitting quality.

  Further, according to the composite sheet material press-fitting device of the present invention, the heat received by the adhesive between the sheet materials is kept uniform by using the gas as the heat conduction medium, and the sheet material is further relatively There is an advantage that the yield of bonding can be increased.

  Furthermore, according to the composite sheet material press-fitting device of the present invention, the accuracy of alignment between the sheet materials is maintained, and it is ensured that all the same pressure input is obtained on the surface of the sheet material. There is an advantage that the yield of the product can be increased as well as the increase.

FIG. 1 is a cross-sectional explanatory view of a composite sheet material press-fitting device of the present invention. FIG. 2 is an operation explanatory view of the composite sheet material press-fitting device of the present invention. FIG. 3 is an operation explanatory view 2 of the composite sheet material press-fitting device of the present invention. FIG. 4 is a cross-sectional explanatory view of a conventional composite sheet press-fitting device. FIG. 5 is a partially enlarged explanatory view in a press-fitting process of a conventional press-fitting device for a composite sheet material.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a cross-sectional explanatory view of a composite sheet material press-fitting device of the present invention. Referring to FIG. 1, the composite sheet material press-fitting device includes one platform 1, one press-fitting platform 2, one membrane insertion unit 3, and one heater 4. The press-fitting platform 2 is formed so as to reciprocate toward the platform 1. The heater 4 is coupled to the press-in platform 2 on the side toward the platform 1, and the membrane insertion base unit 3 is provided so as to straddle the opposing sides of the platform 1.

  The platform 1 comprises a mounting table for heating, and preferably the temperature of the platform 1 is maintained so that the paint can be completely melted and applied, or the metal can be applied directly. As long as it can be changed and can be changed according to different characteristics of the paint or metal material to be adhered, the method of the platform 1 is not limited. For example, in the present embodiment, one heating member (not shown) is selectively fitted in the platform 1, and the temperature required by the platform 1 can be adjusted by this heating member.

  The platform 1 includes a single mounting surface 11. The placement surface 11 indicates a surface on the side where the platform 1 faces the press-fitting platform 2, and the placement surface 11 is used for placing a sheet material to be attached. In addition, the platform 1 in the present embodiment is provided with one annular ring 12. The annular ring 12 is provided on the outer peripheral edge of the mounting surface 11 of the platform 1, and the diameter of the annular ring 12 is preferably formed to be larger than the size of the sheet material to be adhered, so that the press-fitting platform 2 is provided. Can provide a kind of buffering force.

  FIG. 2 is an operation explanatory view of the composite sheet press-fitting device of the present invention. Referring to FIG. 2, the press-fitting platform 2 is formed so as to reciprocate toward the mounting surface 11 of the platform 1. One driving member M is connected to the press-fitting platform 2 in this embodiment, and the displacement of the press-fitting platform 2 is interlocked by the driving member M. The press-fitting platform 2 includes one press-fitting plate 21 and one joining member 22, and the joining member 22 is provided on one air receiving surface 211 toward which the press-fitting plate 21 faces the platform 1, and in particular, the air receiving surface of the press-fitting plate 21. 211 is formed so as to surround the outer peripheral surface, and is formed so as to correspond to the annular ring 12 of the platform 1. Among them, the press-fitting plate 21 and the joining member 22 are all made of a single plate body made of a metal material, so that a high temperature when the sheet material is press-fitted can be received. In the present embodiment, the joining member 22 is made of a single piece of metal.

  In addition, one injection hole 212 is formed in the press-fitting plate 21 of the present embodiment. The injection hole 212 penetrates the press-fitting plate 21 and is especially formed in the air receiving surface 211 of the press-fitting plate 21, and the injection hole 212 is used to insert a single blower tube T. The blower tube T is formed so as to be connected to one blower pump P and one air valve V, and introduces external gas from the blower pump P via the blower tube T. Further, whether or not the gas is blown through the injection hole 212 can be controlled by the air valve V.

  The membrane insertion base unit 3 is provided so as to straddle opposite sides of the platform 1, and one press-fitting membrane 31 is installed. The press-fitting membrane 31 is positioned between the platform 1 and the press-fitting platform 2, and further, a single air chamber R for filling gas is formed with the press-fitting platform 2 (see FIG. 3 for details). Among them, it is desirable that the press-fit film 31 is made of a thin film made of an elastic material, and that the press-fit film 31 can receive an operating temperature of about 150 ° C. or more.

  In the present embodiment, the membrane insertion base unit 3 includes two opposing winding wheel support bases 3a and 3a '. As shown in FIG. 1, the two hoisting wheel support bases 3 a and 3 a ′ are preferably provided on both the left and right sides of the platform 1, and one of the hoisting wheel support bases 3 a winds the press-fitting film 31. At the same time, the press-fitting membrane 31 can be maintained between the platform 1 and the press-fitting platform 2 by pulling the press-fitting membrane 31 in conjunction with another hoisting wheel support 3a ′. In addition, it is desirable that the platform 1 and the press-fitting platform 2 are all formed so as to have an appropriate gap.

  In addition, the membrane insertion base unit 3 includes two other auxiliary wheel support bases 3b and 3b 'opposed to each other. As shown in FIG. 1, the two auxiliary wheel support bases 3b and 3b ′ are preferably provided on both the left and right sides of the platform 1, and each of the platform 1 and the two hoisting wheel support bases 3a and 3a ′. By being used to abut the press-fit film 31 between the press-fit films 31, the press-fit film 31 can come into flat contact with the sheet material to be stuck.

  The heater 4 is provided in the press-fitting platform 2 and is accommodated in the air chamber R, and a space is formed between the heater 4 and the press-fitting film 31. In the present embodiment, the heater 4 is particularly provided on the side where the press-fitting plate 21 faces the press-fitting film 31. In actual use, the heater 4 is preferably formed so as not to contact the press-fitted membrane 31 with each other, and is particularly maintained to have an interval of about 5 mm or less, so that the gas flowing in the air chamber R can be maintained. A uniform heat conduction effect can be achieved.

  The composite sheet press-fitting device of the present invention further includes one support bar 5. The support bar 5 is formed so as to penetrate the press-fitting plate 21 of the press-fitting platform 2 movably, and one end of the support bar 5 penetrating the press-fitting plate 21 is formed to extend into the air chamber R. In the present embodiment, the support bar 5 is formed so as to penetrate through the central portion of the press-fitting plate 21 in particular, so that it is preferably formed so as to contact the center position of the mounting surface 11 of the platform 1 in use. Therefore, it can be used so as to align the position of the sheet material to be adhered. Further, another drive member M ′ is connected to the support bar 5. Since the drive member M ′ is configured to operate in synchronization with the drive member M interlocking with the press-fitting platform 2, the support bar 5 is reciprocated and displaced toward the mounting surface 11 of the platform 1 according to the press-fitting platform 2. Configured as follows. Among them, the support bar 5 is formed from a bar made of metal, ceramic or thermoplastic material.

  It should be noted here that when the composite sheet press-fitting device of the present invention is actually used, the press-fitting device of the present invention is placed in a single cavity 6 and applied in a normal manner. A sheet material to be contacted (in the following description, since it is a sheet material to which a wafer is selectively bonded), this is hereinafter referred to as “wafer 7”), and the upper and lower wafers 7 are further fed. Then, the space pads 8 are separated from each other again (see FIG. 2), and a subsequent press-fitting operation is awaited. Among them, the method of feeding and aligning the two wafers 7 can be easily conceived by those skilled in the art and is not the main feature of the present invention. A brief description will be given in conjunction with the operation of the apparatus.

  Referring again to FIG. 1, the cavity 6 includes one receiving space 61. The accommodation space 61 is used for arranging the composite sheet press-fitting device of the present invention. In the present embodiment, one input port 62 and one exhaust port 63 are opened in the cavity 6. The input port 62 and the exhaust port 63 are all formed so as to communicate with the accommodation space 61. In actual use, when two wafers 7 are to be bonded, for example, as shown in FIG. 2, first, one wafer 7 is fed from the inlet 62, and the position of the wafer 7 is corrected and aligned. Thereafter, the wafer 7 is moved to a fixed position (usually, the center position of the platform 1, that is, the mounting surface 11 described above), and the wafer 7 is lifted by the space pad 8 again.

  Then, similarly, another wafer 7 is fed from the insertion port 62, and after aligning in the same manner, the wafer 7 is moved to the mounting surface 11 of the platform 1, and the two wafers 7 are arranged so as to overlap each other. And then isolated by the space pad 8. At this time, by preheating the platform 1 to a temperature required to attach the two wafers 7, the heat can be conducted so as to be evenly distributed on the wafers 7.

  Then, the housing space 61 of the cavity 6 is maintained in a vacuum working environment by first evacuating the cavity 6 from another vacuum pump P ′ connected to the exhaust port 63. Next, as shown in FIG. 2, the press-fitting platform 2 is moved again in the direction of the arrow shown in the drawing by the driving member M again, and the joining member 22 is brought into contact with the press-fitting film 31. Further, the support bar 5 is driven synchronously by another drive member M ′, and the support bar 5 extends into one end of the air chamber R in the same direction according to the press-fitting platform 2 and hits the center position of the wafer 7. When the two wafers 7 are displaced until they are in contact with each other and it is ensured that no relative sliding occurs between the two wafers 7, the space pad 8 in them can be moved away.

  FIG. 3 is an operation explanatory view 2 of the composite sheet press-fitting device of the present invention. Referring to FIG. 3, at this time, the joining member 22 is formed to abut against the annular ring 12 at the same time as pressing the press-fitting film 31. Since the press-fit film 31 can be tightly and completely adhered to the surface of the wafer 7, an air chamber R is formed between the press-fit film 31 and the press-fit plate 21, and only an adhesive is provided between the two wafers 7. The two wafers 7 are formed so as to stick to each other. In this situation, the air valve V is opened and gas is injected by the blower pump P. Further, the gas is circulated in the blower pipe T, and a sufficient amount is passed from the injection hole 212 in the direction of the arrow shown in the drawing. Gas is fed into the air chamber R. Since the pressure of the fed gas can uniformly act on the surface of the wafer 7, the two wafers 7 are formed so as to adhere to each other under a uniform pressure. At the same time, the heater 4 heats the gas in the air chamber R so that the gas conducts heat uniformly to the surface of the wafer 7 and the adhesive applied between the wafers 7 receives the heat. When the two wafers 7 are bonded to each other, the operation of attaching the wafer 7 can be completed.

  As described above, the main feature of the press-fitting device for the composite sheet material of the present invention is that the air chamber R formed between the press-fitting film 31 and the press-fitting plate 21 is filled in the air chamber R in the press-fitting process. Since the pressure of the gas can be uniformly applied to the surface of the wafer 7, the conventional problem that the metal surface is uneven can be solved. In this way, when the wafer 7 is to be press-fitted, the press-fitting film 31 is tightly and completely stuck to the surface of the wafer 7, so that the surface of the wafer 7 is evenly adhered. Since the force applied to the surface of the wafer 7 can be ensured to be uniform, the loss rate of the wafer 7 in the bonding process can be kept low, and the press-fit quality of the wafer 7 can be further improved. Further, by using the gas filled in the air chamber R as a heat conducting medium, the uniformity of heat received by the adhesive between the wafers 7 can be maintained, so the yield of wafer bonding can be increased. Can be increased.

  Further, after the press-fitting membrane 31 is used, the film insertion base unit 3 can be wound up by one of the winding wheel support bases 3a, and at the same time, a new press-fitting film is provided by another winding wheel support base 3a '. By pulling 31, the press-fitting film 31 is formed so as to be positioned between the platform 1 and the press-fitting platform 2, and can be used when a sheet material such as a wafer 7 is to be press-fitted next time. In this way, it is possible to effectively avoid shrinkage or breakage of the press-fitted film 31 due to heat for a long time through the alternating pulling of the press-fitted film 31. Since the quality of the press-fit film 31 in this process can be ensured uniformly, it can be further adhered flatly to the surface of the wafer 7, and the press-fit quality of the sheet material can be improved.

  In addition, according to the composite sheet material press-fitting device of the present invention, the accuracy of aligning the position of the wafer 7 can be maintained by using the support bar 5, and the surface of the wafer 7 has the same press-fitting. The acquisition of the acting force can be effectively ensured, whereby the time and cost required for extra processing can be kept low, and the efficiency of wafer press-fitting can be further increased.

  The present invention may be implemented in other ways without departing from the spirit and essential characteristics thereof. Accordingly, the preferred embodiments described herein are exemplary and not limiting.

DESCRIPTION OF SYMBOLS 1 Platform 11 Mounting surface 12 Annular ring 2 Press-fit platform 21 Press-fit plate 211 Air receiving surface 212 Injection hole 22 Joining member 3 Film insertion stand unit 3a Hoisting wheel support stand 3a 'Hoisting wheel support stand 3b Auxiliary wheel support stand 3b' Auxiliary wheel Support base 31 Press-in film 4 Heater 5 Support bar 6 Cavity 61 Accommodating space 62 Input port 63 Exhaust port 7 Wafer 8 Space pad 9 Composite sheet material press-in device 91 Platform 911 Mounting surface 92 Metal press-in plate 921 Open groove 922 Contact Surface 93 Clamping member 94 Wafer 941 Adhesive 95 Driving member R Air chamber T Air pipe V Air valve P Air pump P 'Vacuum pump M Driving member M' Driving member

Claims (10)

  In the composite sheet material press-fitting device having one platform (1), one press-fitting platform (2), a membrane insertion base unit (3) and a heater (4), the platform (1) has one mounting surface ( 11), and the press-fitting platform (2) is formed so as to reciprocately move toward the mounting surface (11) of the platform (1), and the membrane insertion base unit (3) is relative to the platform (1). The press-in membrane (31) is located between the platform (1) and the press-in platform (2), and is used to construct a single press-in membrane (31). (2) is a single air chamber (R) for filling the gas, and the heater (4) is provided in the press-fitting platform (2) and accommodated in the air chamber (R). Further heater (4) and press-fitting apparatus of the composite sheet material, wherein a single interval is formed between the press-fitting membrane (31).   The membrane insertion base unit (3) includes two opposing hoisting wheel support bases (3a, 3a ′), and the two hoisting wheel support bases (3a, 3a ′) are on opposite sides of the platform (1). One of the hoisting wheel supports (3a) is used for hoisting the press-fitting membrane (31), and the other hoisting wheel support (3a ') is interlocked with the press-fitting membrane (31 The composite sheet material press-fitting device according to claim 1, wherein:   The membrane insertion base unit (3) includes two other auxiliary wheel support bases (3b, 3b ′) that are opposed to each other, and the two auxiliary wheel support bases (3b, 3b ′) are relative to the platform (1). Further, it is provided on both sides, and is located between the platform (1) and the two hoisting wheel supports (3a, 3a '), respectively, and used for contacting the press-fitting membrane (31). Item 3. A composite sheet material press-fitting device according to Item 2.   The platform (1) is further provided with an annular ring (12), and the annular ring (12) is provided so as to be wound around the outer peripheral edge of the mounting surface (11) of the platform (1). A press-fitting device for a composite sheet material according to claim 1, 2 or 3.   The press-fitting platform (1) includes one press-fitting plate (21) and one joining member (22), and the press-fitting plate (21) includes one air receiving surface (211) toward the platform (1). The joining member (22) is provided on the air receiving surface (211) of the press-fitting plate (21) and is formed to correspond to the annular ring (12) of the platform (1). 5. A press-fitting device for a composite sheet material according to 4.   In addition, one support bar (5) is included, the support bar (5) is formed so as to penetrate the press-fitting plate (21) of the press-fitting platform (2), and the support bar (5) is a press-fitting plate. 6. The composite sheet material press-fitting device according to claim 5, wherein one end penetrating through (21) is formed to extend into the air chamber (R).   The support bar (5) is formed so as to penetrate through the central portion of the press-fitting plate (21) and is formed so as to contact the center position of the mounting surface (11) of the platform (1). The press-fitting device for a composite sheet material according to claim 6.   The composite sheet material press-fitting device according to claim 5, wherein the heater (4) is provided on a side where the press-fitting plate (21) faces the press-fitted film (31).   The injection plate (21) is provided with one injection hole (212), the injection hole (212) is formed to communicate with the air chamber (R), and the injection hole (212) is formed with one air pipe (T The composite sheet material according to claim 5, wherein one air valve (V) and one air pump (P) are connected to the air duct (T). Press-fitting device.   One driving member (M, M ′) is connected to the press-fitting platform (2) and the support bar (5), and the press-fitting platform (2) and the support bar (5) are displaced by the driving member (M, M ′). The press-fitting device for a composite sheet material according to claim 6, wherein the press-fitting is interlocked.

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