JP2755216B2 - Manufacturing method of organic thin film EL element - Google Patents
Manufacturing method of organic thin film EL elementInfo
- Publication number
- JP2755216B2 JP2755216B2 JP7153155A JP15315595A JP2755216B2 JP 2755216 B2 JP2755216 B2 JP 2755216B2 JP 7153155 A JP7153155 A JP 7153155A JP 15315595 A JP15315595 A JP 15315595A JP 2755216 B2 JP2755216 B2 JP 2755216B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- layer
- organic
- organic thin
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims description 48
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000010408 film Substances 0.000 claims description 25
- 229920005989 resin Polymers 0.000 claims description 22
- 239000011347 resin Substances 0.000 claims description 22
- 239000011230 binding agent Substances 0.000 claims description 10
- 239000011368 organic material Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 78
- 238000000034 method Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 230000005525 hole transport Effects 0.000 description 5
- 229920006267 polyester film Polymers 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- -1 tris (8-quinolinol) aluminum Chemical compound 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010549 co-Evaporation Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 229910052744 lithium Inorganic materials 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- NRCMAYZCPIVABH-UHFFFAOYSA-N Quinacridone Chemical compound N1C2=CC=CC=C2C(=O)C2=C1C=C1C(=O)C3=CC=CC=C3NC1=C2 NRCMAYZCPIVABH-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000891 luminescent agent Substances 0.000 description 2
- 229920005990 polystyrene resin Polymers 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- UWRZIZXBOLBCON-VOTSOKGWSA-N (e)-2-phenylethenamine Chemical class N\C=C\C1=CC=CC=C1 UWRZIZXBOLBCON-VOTSOKGWSA-N 0.000 description 1
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical class C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 1
- YZVWKHVRBDQPMQ-UHFFFAOYSA-N 1-aminopyrene Chemical class C1=C2C(N)=CC=C(C=C3)C2=C2C3=CC=CC2=C1 YZVWKHVRBDQPMQ-UHFFFAOYSA-N 0.000 description 1
- ZOKIJILZFXPFTO-UHFFFAOYSA-N 4-methyl-n-[4-[1-[4-(4-methyl-n-(4-methylphenyl)anilino)phenyl]cyclohexyl]phenyl]-n-(4-methylphenyl)aniline Chemical compound C1=CC(C)=CC=C1N(C=1C=CC(=CC=1)C1(CCCCC1)C=1C=CC(=CC=1)N(C=1C=CC(C)=CC=1)C=1C=CC(C)=CC=1)C1=CC=C(C)C=C1 ZOKIJILZFXPFTO-UHFFFAOYSA-N 0.000 description 1
- NAZODJSYHDYJGP-UHFFFAOYSA-N 7,18-bis[2,6-di(propan-2-yl)phenyl]-7,18-diazaheptacyclo[14.6.2.22,5.03,12.04,9.013,23.020,24]hexacosa-1(23),2,4,9,11,13,15,20(24),21,25-decaene-6,8,17,19-tetrone Chemical class CC(C)C1=CC=CC(C(C)C)=C1N(C(=O)C=1C2=C3C4=CC=1)C(=O)C2=CC=C3C(C=C1)=C2C4=CC=C3C(=O)N(C=4C(=CC=CC=4C(C)C)C(C)C)C(=O)C1=C23 NAZODJSYHDYJGP-UHFFFAOYSA-N 0.000 description 1
- CFNMUZCFSDMZPQ-GHXNOFRVSA-N 7-[(z)-3-methyl-4-(4-methyl-5-oxo-2h-furan-2-yl)but-2-enoxy]chromen-2-one Chemical compound C=1C=C2C=CC(=O)OC2=CC=1OC/C=C(/C)CC1OC(=O)C(C)=C1 CFNMUZCFSDMZPQ-GHXNOFRVSA-N 0.000 description 1
- 239000005725 8-Hydroxyquinoline Substances 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229920002433 Vinyl chloride-vinyl acetate copolymer Polymers 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- XJHABGPPCLHLLV-UHFFFAOYSA-N benzo[de]isoquinoline-1,3-dione Chemical class C1=CC(C(=O)NC2=O)=C3C2=CC=CC3=C1 XJHABGPPCLHLLV-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- KAKZBPTYRLMSJV-UHFFFAOYSA-N butadiene group Chemical class C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000005001 laminate film Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 150000004866 oxadiazoles Chemical class 0.000 description 1
- 150000007978 oxazole derivatives Chemical class 0.000 description 1
- 229960003540 oxyquinoline Drugs 0.000 description 1
- DGBWPZSGHAXYGK-UHFFFAOYSA-N perinone Chemical class C12=NC3=CC=CC=C3N2C(=O)C2=CC=C3C4=C2C1=CC=C4C(=O)N1C2=CC=CC=C2N=C13 DGBWPZSGHAXYGK-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 150000004033 porphyrin derivatives Chemical class 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 150000004867 thiadiazoles Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/50—Forming devices by joining two substrates together, e.g. lamination techniques
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Luminescent Compositions (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は、有機薄膜のＥＬ（エレ
クトロルミネッセンス）現象を利用した発光デバイスの
製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a light emitting device utilizing the EL (electroluminescence) phenomenon of an organic thin film.
【０００２】[0002]
【従来の技術】ある種の有機薄膜を電極で挟み込み通電
すると、双方の電極から注入された正孔および電子が有
機薄膜内で再結合し、このときのエネルギーにより発光
現象が生じることが知られている。この現象を利用した
ものは有機薄膜ＥＬ素子と呼ばれ各種発光デバイスへの
応用が期待されている。ＥＬ現象は単層の有機薄膜を電
極でサンドイッチした構造でも得られるが、より低い電
圧印加で高輝度を得るためには電極から有機発光膜への
キャリアの注入効率を向上させる必要があるので、電極
と有機発光層とのエネルギー障壁を源し、有機発光膜へ
のキャリア移動を容易にすることを目的として、電極と
有機発光層との間にキャリア注入層もしくはキャリア輸
送層を付加した積層構造が提案されている。2. Description of the Related Art It is known that when a certain kind of organic thin film is sandwiched between electrodes and current is applied, holes and electrons injected from both electrodes are recombined in the organic thin film, and the energy at this time causes a light emission phenomenon. ing. A device utilizing this phenomenon is called an organic thin film EL device, and is expected to be applied to various light emitting devices. Although the EL phenomenon can be obtained even when a single-layer organic thin film is sandwiched between electrodes, it is necessary to improve the efficiency of carrier injection from the electrode into the organic light-emitting film in order to obtain high luminance with lower voltage application. A laminated structure in which a carrier injection layer or a carrier transport layer is added between the electrode and the organic light-emitting layer for the purpose of generating an energy barrier between the electrode and the organic light-emitting layer and facilitating carrier transfer to the organic light-emitting layer. Has been proposed.
【０００３】例としては、陽極／有機正孔輸送層／有機
発光層／陰極（特開昭５７−５１７８１）、陽極／有機
発光層／有機電子輸送層／陰極（Ｃ．Ａｄａｃｈｉ，
Ｔ．Ｔｕｔｓｕｉ，Ｓ．Ｓａｉｔｏ，Ａｐｐｌ．Ｐｈｙ
ｓ．Ｌｅｔｔ．，５５，１４８９（１９８９））、陽極
／複数の有機正孔注入輸送層／有機発光層／複数の有機
電子注入輸送層／陰極（特開平６−３１４５９４）など
が挙げられる。Examples of the anode / organic hole transport layer / organic light emitting layer / cathode (JP-A-57-51781), anode / organic light emitting layer / organic electron transport layer / cathode (C. Adachi,
T. Tutsui, S .; Saito, Appl. Phys
s. Lett. 55, 1489 (1989)), an anode / a plurality of organic hole injecting / transporting layers / organic light emitting layer / a plurality of organic electron injecting / transporting layers / cathode (JP-A-6-314594).
【０００４】電極材料としては、光を取り出す都合上、
陽極にはインジウム・錫酸化物（ＩＴＯ）や金箔などの
透光性薄膜が、陰極にはマグネシウム、アルミニウム、
インジウムまたはこれらを母材として銀、リチウムなど
を適宜ドーピングした薄膜が用いられている（たとえば
特開平５−１２１１７２）。As an electrode material, for convenience of extracting light,
The anode has a light-transmitting thin film such as indium tin oxide (ITO) or gold foil, and the cathode has magnesium, aluminum,
Indium or a thin film obtained by appropriately doping silver or lithium using these as a base material is used (for example, Japanese Patent Application Laid-Open No. 5-121172).
【０００５】これらの薄膜積層構造体は、一般に湿気や
熱に対する耐久性に乏しいので、光硬化性の樹脂で全面
をカバーしガラスなどを貼り付ける（特開平６−３３８
３９２）、注入口を有するガラス等の容器に入れ液体封
止材を封入する（特開平７−１１２４７）などの封止方
法が開示されている。また従来から無機ＥＬの封止方法
として用いられているラミネートフィルムで被覆する
（特開昭６０−１４７９８）方法も開示されている。[0005] Since these thin film laminated structures generally have poor durability against moisture and heat, the entire surface is covered with a photocurable resin and glass or the like is adhered thereto (JP-A-6-338).
392), a sealing method such as enclosing a liquid sealing material in a container made of glass or the like having an inlet is disclosed (JP-A-7-11247). Further, a method of coating with a laminate film, which has been conventionally used as a method for sealing inorganic EL (Japanese Patent Application Laid-Open No. 60-14798), is also disclosed.
【０００６】これらの有機薄膜ＥＬ素子の従来の製造方
法は、図３（ａ）〜（ｆ）に示すように、ガラスや樹脂
フィルムなどの透光性基板１上に陽極層２として透明電
極をスパッタ法や真空蒸着法などによって形成し
（ａ）、その上に上記したような有機正孔輸送層３、有
機発光層４、有機電子輸送層５などを、真空蒸着法、溶
液塗布法、ＬＢ法、スクリーン印刷法など公知の薄膜形
成技術によって順次積層（ｂ）〜（ｄ）、更にその上に
陰極層６として金属層を真空蒸着法やスパッタ法などを
用いて形成した後（ｅ）、外部リード８の取り付けと封
止（ｆ）を行っていた。In the conventional method of manufacturing these organic thin film EL devices, as shown in FIGS. 3A to 3F, a transparent electrode is formed as an anode layer 2 on a light-transmitting substrate 1 such as glass or resin film. (A) is formed by a sputtering method, a vacuum evaporation method, or the like, and the organic hole transporting layer 3, the organic light emitting layer 4, the organic electron transporting layer 5, and the like described above are formed thereon by a vacuum evaporation method, a solution coating method, LB (B) to (d) sequentially by a known thin film forming technique such as a screen printing method, and further, a metal layer is formed thereon as a cathode layer 6 by a vacuum evaporation method or a sputtering method (e). Attachment of the external lead 8 and sealing (f) were performed.
【０００７】[0007]
【発明が解決しようとする課題】この従来の有機ＥＬ素
子の製造方法では、単一の基板上に陽極層／有機薄膜層
／陰極層を順次積層するので、有機薄膜層を形成後に陰
極層となる金属層を形成する工程が存在する。ところ
が、一般に有機薄膜層を均一に形成することは困難であ
ることに加え、経時や温度によっても膜表面の平坦性が
変化するので、有機薄膜層を形成した後に金属層を均一
に形成するのは更に困難である。また、首尾良く有機薄
膜層を均一に形成することができたとしても、次に形成
する金属は成膜時エネルギーが高いので有機薄膜層にダ
メージを与える恐れがある。これらは積層膜の膜厚ばら
つきやピンホールの発生を招き、発光品位の著しい低下
となる。In this conventional method for manufacturing an organic EL device, an anode layer / organic thin film layer / cathode layer is sequentially laminated on a single substrate. Forming a metal layer. However, it is generally difficult to uniformly form an organic thin film layer, and the flatness of the film surface changes with time and temperature. Is even more difficult. Even if the organic thin film layer can be formed uniformly and successfully, the metal to be formed next has a high energy at the time of film formation, and may damage the organic thin film layer. These cause variations in the thickness of the laminated film and generation of pinholes, resulting in a significant decrease in light emission quality.
【０００８】[0008]
【課題を解決するための手段】本発明の有機薄膜ＥＬ素
子の製造方法は、前述した従来の製造方法の欠点である
有機薄膜層の形成後に金属層を形成する工程を排除する
ために、一方の防湿フィルム上に透光性の陽極層とｎ
（ｎ≧１）層からなる有機薄膜層のうちのｍ（ｍ≧０）
層を順に積層させて形成し、他方の防湿フィルム上に陰
極層と残りのｎ−ｍ層からなる有機薄膜層を順に積層さ
せて形成した後、双方の積層膜を対向させて貼り合わ
せ、周辺部を接着または融着封止するとともに貼り合わ
せ面の密着性を向上させるため、上記防湿フィルム上に
積層する有機薄膜層のうち、貼り合わせ界面と有機薄膜
層は、有機材を樹脂バインダーに分散させた樹脂分散膜
とし、この樹脂バインダーが軟化する温度下で圧着して
貼り合わせるようにした。 SUMMARY OF THE INVENTION The method of manufacturing an organic thin film EL device of the present invention is intended to eliminate the step of forming a metal layer after forming an organic thin film layer, which is a disadvantage of the above-mentioned conventional manufacturing method. A light-transmitting anode layer on the moisture-proof film of
M (m ≧ 0) of the organic thin film layer composed of (n ≧ 1) layers
Layers are formed by sequentially laminating the layers, and on the other moisture-proof film, an organic thin film layer composed of a cathode layer and the remaining nm layer is formed by laminating the layers in order. Adhesion or fusion sealing of parts and lamination
In order to improve the adhesion of the contact surface,
Of the organic thin film layers to be laminated, the bonding interface and the organic thin film
The layer is a resin dispersion film in which an organic material is dispersed in a resin binder.
And press bonding under the temperature at which this resin binder softens
I stuck them together.
【０００９】[0009]
【００１０】[0010]
【実施例】次に本発明の実施例について図面を参照して
説明する。図１（ａ）〜（ｅ）は本発明の有機薄膜ＥＬ
素子の製造方法の第１の実施例を示す工程図である。厚
さ１００μｍの透明ポリエステルフィルム１ａ上に陽極
層としてＩＴＯ２をスパッタ法にて形成し、フォトリソ
グラフィー法を用いて所望のパターンとし（ａ）、続い
て有機正孔輸送層３として１，１−ビス−（４−ジパラ
トリルアミノフェニル）シクロヘキサンを真空蒸着法に
より５００オングストローム形成した（ｂ）。Next, an embodiment of the present invention will be described with reference to the drawings. 1 (a) to 1 (e) show an organic thin film EL of the present invention.
FIG. 4 is a process chart showing a first example of a method for manufacturing an element. ITO2 is formed as an anode layer by sputtering on a transparent polyester film 1a having a thickness of 100 [mu] m, and a desired pattern is formed by photolithography (a). Then, 1,1-bis is formed as an organic hole transporting layer 3. -(4-Diparatolylaminophenyl) cyclohexane was formed to a thickness of 500 angstroms by a vacuum evaporation method (b).
【００１１】次に他方のポリエステルフィルム１ｂ上
に、まず陰極層６としてアルミニウムとリチウムを速度
比約７０：１で、所望のパターンのシャドウマスクを用
いて共蒸着法により２０００オングストローム形成し
（ｃ）、続いて有機発光材としてトリス（８−キノリノ
ール）アルミニウム、樹脂バインダーとしてフレーク上
のポリスチレン樹脂を重量比１：２でジクロロメタンに
溶解して２重量％の溶液を作り、ディップコート法によ
り樹脂分散型有機発光層４を７００オングストローム形
成した（ｄ）。Next, on the other polyester film 1b, 2,000 angstroms is formed as a cathode layer 6 by co-evaporation of aluminum and lithium at a speed ratio of about 70: 1 using a shadow mask having a desired pattern (c). Then, tris (8-quinolinol) aluminum as an organic luminescent material and polystyrene resin on flakes as a resin binder are dissolved in dichloromethane at a weight ratio of 1: 2 to form a 2% by weight solution, and a resin dispersion type is formed by dip coating. The organic light emitting layer 4 was formed to have a thickness of 700 Å (d).
【００１２】その後双方の積層膜を対向させ、ポリスチ
レン樹脂の軟化点である９０℃で加圧して貼り合わせ、
周辺部は外部リードと共に電熱シーラーにて融着封止し
た（ｅ）。完成した有機薄膜ＥＬ素子は印加電圧１０Ｖ
で輝度３１０ｃｄ／ｍ2 の緑色発光を得た。Thereafter, both laminated films are opposed to each other, and are bonded by pressing at 90 ° C., which is the softening point of the polystyrene resin.
The peripheral part was fused and sealed with an electric heat sealer together with external leads (e). The completed organic thin film EL element has an applied voltage of 10 V
As a result, green light emission having a luminance of 310 cd / m 2 was obtained.
【００１３】第２の実施例を図２（ａ）〜（ｅ）に示
す。厚さ１００μｍの透明ポリエステルフィルム１ａ上
には陽極層としてパターニングしたＩＴＯ２のみを形成
した（ａ）。次に他方のポリエステルフィルム１ｂ上
に、まず陰極層６としてアルミニウムとリチウムを速度
比約７０：１で、所望のパターンのシャドウマスクを用
いて共蒸着法により２０００オングストローム形成し
（ｂ）、続いて有機発光層４としてトリス（８−キノリ
ノール）アルミニウムにキナクリドンを１ｍｏｌ％ドー
プしながら共蒸着法により６５０オングストローム形成
した（ｃ）。A second embodiment is shown in FIGS. 2 (a) to 2 (e). Only patterned ITO2 was formed as an anode layer on a transparent polyester film 1a having a thickness of 100 μm (a). Next, on the other polyester film 1b, 2,000 angstroms is formed as a cathode layer 6 by co-evaporation using aluminum and lithium as a cathode layer 6 at a speed ratio of about 70: 1 using a shadow mask having a desired pattern (b). As the organic light emitting layer 4, 650 Å was formed by co-evaporation while doping quinacridone with 1 mol% to tris (8-quinolinol) aluminum (c).
【００１４】さらに、この上に有機正孔輸送剤として
１，１−ビス−（４−ジパラトリルアミノフェニル）シ
クロヘキサン、樹脂バインダーとして粉末状のポリ塩化
ビニル樹脂を重量比１：１でテトラヒドロフランに溶解
して１重量％の溶液を作り、ディップコート法により樹
脂分散型有機正孔輸送層３を５００オングストローム形
成した（ｄ）。その後双方の積層膜を対向させ、ポリ塩
化ビニル樹脂の軟化点である８０℃で加圧して貼り合わ
せ、周辺部は外部リード８と共に電熱シーラーにて融着
封止した（ｅ）。完成した有機薄膜ＥＬ素子は印加電圧
１２Ｖで輝度３４０ｃｄ／ｍ2 の緑色発光を得た。Further, 1,1-bis- (4-diparatolylaminophenyl) cyclohexane as an organic hole transporting agent and powdered polyvinyl chloride resin as a resin binder are added to tetrahydrofuran at a weight ratio of 1: 1. The resultant was dissolved to form a 1% by weight solution, and a resin-dispersed organic hole transport layer 3 was formed to a thickness of 500 Å by dip coating (d). Thereafter, the two laminated films were opposed to each other, and they were bonded together by applying pressure at 80 ° C., which is the softening point of the polyvinyl chloride resin, and the peripheral portion was fused and sealed together with the external leads 8 by an electric heat sealer (e). The completed organic thin film EL device emitted green light with a luminance of 340 cd / m 2 at an applied voltage of 12 V.
【００１５】第１の実施例では、一方の防湿フィルムに
はＩＴＯと１層の有機正孔輸送層を順に積層し、他方の
防湿フィルムには金属層と１層の有機発光層を順に積層
した。In the first embodiment, ITO and one organic hole transport layer were sequentially laminated on one moisture-proof film, and a metal layer and one organic light-emitting layer were sequentially laminated on the other moisture-proof film. .
【００１６】また、第２の実施例では一方の防湿フィル
ムにはＩＴＯのみを形成し、他方の防湿フィルムに金属
層と１層の有機発光層と１層の有機正孔輸送層を順に積
層したが、本実施例では使用しなかった電子輸送層を陰
極層と有機発光層との間に形成することもできる。Further, in the second embodiment, only ITO was formed on one moisture-proof film, and a metal layer, one organic light-emitting layer, and one organic hole transport layer were sequentially laminated on the other moisture-proof film. However, an electron transport layer not used in the present embodiment can be formed between the cathode layer and the organic light emitting layer.
【００１７】また、各有機薄膜層は複数層でも良いし、
貼り合わせ界面と有機薄膜層を有機材を樹脂バインダー
に分散させた樹脂分散膜とするならば、各有機積層膜を
どちらの防湿フィルムに割り振って積層してもよい。Each of the organic thin film layers may be a plurality of layers,
If the bonding interface and the organic thin film layer are formed as a resin dispersion film in which an organic material is dispersed in a resin binder, each organic laminated film may be allocated to any of the moisture-proof films and laminated.
【００１８】本実施例は材料を規定するものではなく、
陽極層としては金箔など、有機正孔輸送剤としては芳香
族３級アミンの他にポリフィリン誘導体など、有機発光
剤としては８−ヒドロキシキノリン金属錯体の他に、ブ
タジエン誘導体、クマリン誘導体、ベンズオキサゾール
誘導体、オキサジアゾール誘導体、オキサゾール誘導
体、チアジアゾール誘導体、スチリルアミン誘導体、ビ
ススチリルベンゼン誘導体、ビススチリルアントラセン
誘導体、ペリノン誘導体、アミノピレン誘導体など、電
子輸送剤としてはナフタルイミド誘導体、ペリレンテト
ラカルボン酸ジイミド誘導体、キナクリドン誘導体な
ど、有機薄膜ＥＬを構成する材料はすべて使用可能であ
る。また、樹脂バインダーとしては、ポリカーボネー
ト、ポリビニルカルバゾール、塩酢ビ共重合樹脂、ホル
マール樹脂などが使用可能であるが、前記した正孔輸送
剤、発光剤、電子輸送剤との相溶性を有し、既に形成し
た薄膜層を侵さない溶剤を適宜選択する必要がある。This embodiment does not specify the material,
As an anode layer, a gold foil or the like, an organic hole transporting agent other than an aromatic tertiary amine, a porphyrin derivative, or the like; as an organic luminescent agent, in addition to an 8-hydroxyquinoline metal complex, a butadiene derivative, a coumarin derivative, or a benzoxazole derivative , Oxadiazole derivatives, oxazole derivatives, thiadiazole derivatives, styrylamine derivatives, bisstyrylbenzene derivatives, bisstyrylanthracene derivatives, perinone derivatives, aminopyrene derivatives, etc., as naphthalimide derivatives, perylenetetracarboxylic diimide derivatives, quinacridone All the materials constituting the organic thin film EL, such as derivatives, can be used. Further, as the resin binder, polycarbonate, polyvinyl carbazole, vinyl chloride-vinyl acetate copolymer resin, formal resin, and the like can be used, but the above-described hole transporting agent, luminescent agent, having compatibility with the electron transporting agent, It is necessary to appropriately select a solvent which does not attack the already formed thin film layer.
【００１９】[0019]
【発明の効果】以上説明したように、本発明の有機薄膜
ＥＬ素子の製造方法は、一方の防湿フィルム上に透光性
の陽極層とｎ（ｎ≧１）層からなる有機薄膜層のうちの
ｍ（ｍ≧０）層を順に積層させて形成し、他方の防湿フ
ィルム上に陰極層と残りのｎ−ｍ層からなる有機薄膜層
を順に積層させて形成した後、双方の積層膜を対向させ
て貼り合わせ、周辺部を接着または融着封止するように
したので、有機薄膜層を形成した後に金属層を形成する
工程が存在せず、概して不均一な有機薄膜層の成膜状態
に影響して金属層も不均一になったり、金属層成膜時の
エネルギーによって既に形成した有機薄膜層がダメージ
を受けることがない。また、防湿フィルム上に積層する
有機薄膜層のうち、貼り合わせ界面となる有機薄膜層の
少なくとも１層は、有機材を樹脂バインダーに分散させ
た樹脂分散膜とし、この樹脂バインダーが軟化する温度
下で圧着して貼り合わせるようにしたので貼り合わせの
密着性も向上し、安定した性能を有した有機薄膜ＥＬ素
子を提供できる。As described above, the method of manufacturing an organic thin-film EL device of the present invention comprises a method for manufacturing an organic thin-film EL element comprising a light-transmitting anode layer and an n (n ≧ 1) layer on one moisture-proof film. M (m ≧ 0) layers are sequentially laminated, and the other moisture-proof film is formed by sequentially laminating a cathode layer and an organic thin film layer composed of the remaining nm layers. Because the peripheral part is bonded or fused and sealed, there is no step of forming a metal layer after forming the organic thin film layer. And the organic thin film layer already formed is not damaged by the energy at the time of forming the metal layer. In addition, at least one of the organic thin film layers to be the bonding interface among the organic thin film layers to be laminated on the moisture-proof film is a resin dispersion film in which an organic material is dispersed in a resin binder, at a temperature at which the resin binder softens. Since the bonding is performed by pressure bonding, the adhesion of bonding is also improved, and an organic thin film EL element having stable performance can be provided.
【図１】本発明の有機薄膜ＥＬ素子の製造方法の第１の
実施例を示す工程図。FIG. 1 is a process chart showing a first embodiment of a method for manufacturing an organic thin film EL device of the present invention.
【図２】本発明の有機薄膜ＥＬ素子の製造方法の第２の
実施例を示す工程図。FIG. 2 is a process chart showing a second embodiment of the method for manufacturing an organic thin film EL device of the present invention.
【図３】従来の有機薄膜ＥＬ素子の製造方法を示す工程
図。FIG. 3 is a process chart showing a conventional method for manufacturing an organic thin film EL device.
１ａ，１ｂ ポリエステルフィルム ２ 陽極層（ＩＴＯ） ３ 有機正孔輸送層 ４ 有機発光層 ５ 有機電子輸送層 ６ 陰極層 ７ 樹脂 ８ 外部リード 1a, 1b Polyester film 2 Anode layer (ITO) 3 Organic hole transport layer 4 Organic light emitting layer 5 Organic electron transport layer 6 Cathode layer 7 Resin 8 External lead
Claims (1)
膜層を陽極層と陰極層の間に配置した積層薄膜を防湿フ
ィルムで挾持してなる有機薄膜ＥＬ素子の製造方法にお
いて、一方の防湿フィルム上に透光性の陽極層と前記ｎ
層からなる有機薄膜層のうちのｍ（ｍ≧０）層を順に積
層させて形成し、他方の防湿フィルム上に陰極層と残り
のｎ−ｍ層からなる有機薄膜層を順に積層させて形成し
た後、双方の積層膜を対向させて貼り合わせ、周辺部を
接着または融着封止するとともに前記防湿フィルム上に
積層する有機薄膜層のうち、貼り合わせ界面となる有機
薄膜層は、有機材を樹脂バインダーに分散させた樹脂分
散膜とし、この樹脂バインダーが軟化する温度下で圧着
して貼り合わせることを特徴とする有機薄膜ＥＬ素子の
製造方法。1. A method of manufacturing an organic thin film EL device comprising a laminated thin film in which an organic thin film layer comprising an anode layer and n (n ≧ 1) layers is disposed between an anode layer and a cathode layer, is sandwiched by a moisture-proof film. A light-transmitting anode layer and the n
M (m ≧ 0) of the organic thin-film layers are formed by stacking in order, and the cathode thin film and the organic thin-film layer consisting of the remaining nm layers are stacked in order on the other moisture-proof film. After that, the two laminated films are bonded to face each other, and the peripheral portion is bonded or fused and sealed on the moisture-proof film.
Of the organic thin film layers to be laminated, the organic
The thin film layer is made of a resin component in which an organic material is dispersed in a resin binder.
Compression bonding under the temperature at which this resin binder softens
A method for producing an organic thin film EL device, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7153155A JP2755216B2 (en) | 1995-06-20 | 1995-06-20 | Manufacturing method of organic thin film EL element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7153155A JP2755216B2 (en) | 1995-06-20 | 1995-06-20 | Manufacturing method of organic thin film EL element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH097763A JPH097763A (en) | 1997-01-10 |
| JP2755216B2 true JP2755216B2 (en) | 1998-05-20 |
Family
ID=15556237
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7153155A Expired - Lifetime JP2755216B2 (en) | 1995-06-20 | 1995-06-20 | Manufacturing method of organic thin film EL element |
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| Country | Link |
|---|---|
| JP (1) | JP2755216B2 (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3278611B2 (en) | 1998-05-18 | 2002-04-30 | 日本電気株式会社 | Organic EL element sealing method |
| EP0996176B8 (en) * | 1998-10-13 | 2005-10-19 | Sony Deutschland GmbH | Method of fabricating an active matrix light-emitting display device |
| JP2000268954A (en) * | 1999-03-17 | 2000-09-29 | Matsushita Electric Ind Co Ltd | Electroluminescent element |
| GB9907931D0 (en) * | 1999-04-07 | 1999-06-02 | Univ Edinburgh | An optoelectronic display |
| JP2002158089A (en) * | 2000-11-21 | 2002-05-31 | Toppan Printing Co Ltd | Organic electroluminescent display element and its manufacturing method |
| KR100384289B1 (en) * | 2001-02-22 | 2003-05-16 | 주식회사 엘리아테크 | Organic electroluminescent display and encapsulating method thereof |
| WO2003079734A1 (en) * | 2002-03-20 | 2003-09-25 | Fuji Photo Film Co., Ltd. | Organic thin-film device and its production method |
| KR100484109B1 (en) | 2002-12-14 | 2005-04-18 | 삼성에스디아이 주식회사 | Method for making substrate and method for making Organic electro luminescence display device using the same,Organic electro luminescence display device |
| JP4598673B2 (en) * | 2003-06-13 | 2010-12-15 | パナソニック株式会社 | Light emitting element and display device |
| KR20060121149A (en) * | 2003-12-09 | 2006-11-28 | 닛폰 이타가라스 가부시키가이샤 | Surface luminance and manufacturing method thereof |
| ES2350350T3 (en) * | 2004-07-02 | 2011-01-21 | Konarka Technologies, Inc. | ORGANIC PHOTOVOLTAIC COMPONENT WITH ENCAPSULATION. |
| JP2006302556A (en) | 2005-04-18 | 2006-11-02 | Seiko Epson Corp | Manufacturing method of semiconductor device, semiconductor device, electronic device, and electronic apparatus |
| WO2009057317A1 (en) * | 2007-11-01 | 2009-05-07 | Panasonic Corporation | Light-emitting device and display device |
| JP7072437B2 (en) * | 2018-05-09 | 2022-05-20 | シャープ株式会社 | Manufacturing method of photoelectric conversion element |
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| JPH06283265A (en) * | 1993-03-25 | 1994-10-07 | Nec Kansai Ltd | Electroluminescent lamp and manufacture thereof and equipment for manufacture thereof |
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1995
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