JP2619807B2 - Electromagnetic drive pump - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electromagnetically driven pump used in a field requiring chemical treatment, for example, in the chemical industry or the semiconductor industry which handles corrosive fluids.

[0002]

2. Description of the Related Art Conventionally, as an electromagnetically driven pump used in the above fields, for example, a pump chamber formed by fitting a pump case and a can case in both cases is provided. The inner rotor is mounted on the outer rotor, and the outer rotor, which is disposed outside the pump chamber and supported by the rotation motor, is rotated by the driving force of the rotation motor. The inner rotor that is driven in the transfer direction is driven to rotate, and the transfer action of the plurality of impellers formed in the inner rotor sucks the chemical from the suction port side formed in the pump chamber and discharges the chemical from the discharge port side of the pump chamber. Driving pump (JP-A-63-280888)
No.).

However, in the electromagnetically driven pump having the conventional structure, a portion which is in contact with the fluid is made of a metal material. Therefore, when the corrosive fluid handled in the semiconductor industry or the like is transported, it comes into contact with the corrosive fluid. It is not applicable to the transport of corrosive fluids because the metal parts are corroded and the pump function is impaired.

In the conventional electromagnetically driven pump disclosed in Japanese Patent Application Laid-Open No. Sho 59-188009, one end of a fixed shaft inserted through an inner rotor is directly inserted into a bearing hole formed in a ceramic can case. Since the bearing is inserted into the bearing, vibration generated when the inner rotor rotates is directly transmitted to the can case, and there is a problem in that the can case is damaged or damaged by an impact generated at that time. In addition, the fluoroplastic sleeve interposed between the bearing hole of the can case and the fixed shaft is thick, so if the sleeve is worn, the sleeve will wear on the facing surface between the bearing hole of the can case and the fixed shaft. There is a problem that not only the generated clearance becomes large and the vibration generated during rotation increases, but also the rotation of the fixed shaft is hindered.

Further, in the conventional electromagnetically driven pump disclosed in Japanese Utility Model Publication No. 54-44112, a bearing is inserted into a hole formed in a housing and fixed so as not to rotate.
Due to the complicated shape of the fitting between the hole and the bearing, stress concentration occurs at the root of each rib formed on the bearing, and the ribs in the bearing are damaged or damaged due to the radial and axial loads. There is a problem that it is easy to do.

On the other hand, the conventional bellows type pump is composed of only a fluororesin because it is applied to the chemical field, but the bellows housed in the pump chamber is expanded and contracted by pressurized air to transport the chemical solution. Pulsation occurs in the flow velocity and the flow rate of the chemical solution, so that the transport amount cannot be kept constant. In addition, there is a problem that the pressure resistance of the bellows is low and a large transport capacity cannot be secured.

[0007]

According to the first aspect of the present invention, the shaft end of a fixed shaft inserted through an inner rotor is directly inserted into a bearing hole formed in a ceramic can case. In the case of bearings, in order to solve the problem that the vibration generated during rotation of the inner rotor is directly transmitted to the can case and the can case is broken or damaged, the thrust ring bearing hole and the shaft end side of the fixed shaft are fixed. By interposing a fluororesin bearing film on the opposing peripheral surface of the bearing, the impact due to mutual contact is reduced by this bearing film, and damage or damage to the can case is prevented. By using a thin bearing film, the clearance between the opposing surfaces of the thrust ring and the fixed shaft can be reduced. And to provide the electromagnetically driven pump which can ensure high bearing accuracy.

According to a second aspect of the present invention, in addition to the object of the first aspect, a supporting member made of fluororesin is interposed between the opposing surfaces of the can case and the thrust ring. In this way, the vibration and impact of the fixed shaft generated when the inner rotor rotates are reduced by the support member,
It is an object of the present invention to provide an electromagnetically driven pump capable of reliably preventing a can case from being damaged or damaged.

According to a third aspect of the present invention, in addition to the object of the first aspect, the invention is formed on a surface of the inner rotor opposite to the bearing ring disposed on the outer periphery of the fixed shaft. It is another object of the present invention to provide an electromagnetically driven pump that can secure the mechanical strength required for the rotation stop by fitting and locking the respective rotation stop surfaces to each other and securely stop the mutual rotation.

According to a fourth aspect of the present invention, in addition to the object of the first aspect, a fitting recess formed in the support member and a detent surface formed on a surface facing the thrust ring are provided. It is an object of the present invention to provide an electromagnetically driven pump that can secure the mechanical strength required for rotation stop by fitting and fixing them together so that they can be reliably stopped.

According to a fifth aspect of the present invention, in addition to the object of the first aspect, a uniform tightening force is secured to a flange portion of the can case to prevent breakage and damage of the can case. It is an object of the present invention to provide an electromagnetically driven pump that can be used.

[0012]

According to the first aspect of the present invention, a pump case made of a fluororesin and a can case made of a ceramic are fitted in a hermetically sealed state, and these two cases are sealed.
The pump chamber is formed within, and bearing the inner rotor made of fluororesin to the pump chamber, the Pont by the driving force of the prime mover
The outer rotor, which is disposed outside the pump chamber and supported by rotation, is rotated, and the inner rotor fixed in the pump chamber is driven to rotate in the transfer direction by the magnetic force of the outer magnet fixed to the outer rotor and the inner magnet fixed to the inner rotor. An electromagnetically driven pump that sucks fluid from a suction port side formed in a pump chamber and discharges fluid from a discharge port side of a pump chamber by a transfer action of each impeller formed in the pump case and the can case. Each thrust ring made of silicon carbide is fixed to the center of the inside of the pump chamber, and a fluororesin is formed on the peripheral surface of the bearing hole of the thrust ring and the shaft end side of the fixed shaft that rotatably supports the inner rotor. It is an electromagnetically driven pump with a bearing film interposed.

[0013] The invention of claim 2 of the present invention
In addition to the configuration of the invention described in claim 1,
Support made of fluororesin between the surface facing the thrust ring
It is characterized by being an electromagnetically driven pump with interposed members
You.

According to a third aspect of the present invention, in addition to the configuration of the first aspect, the invention is formed on a surface of the inner rotor facing an insertion hole and a bearing ring disposed on the outer periphery of the fixed shaft. Further, the pump is characterized in that it is an electromagnetically driven pump in which the respective locking surfaces are fitted to each other and fitted and fixed.

According to a fourth aspect of the present invention, in addition to the configuration of the first aspect of the present invention, each of the recesses formed in the support member and the thrust ring formed on the surface facing the thrust ring is provided. It is an electromagnetically driven pump in which the stop surfaces are matched with each other and fitted and fixed.

According to a fifth aspect of the present invention, in addition to the structure of the first aspect of the present invention, a peripheral edge of the fitting side between the pump case and the can case is interposed via a seal ring made of fluororesin. Fitted in a sealed state, fitted with a fluororesin fixing ring on the flange formed on the outer periphery of the can case, and a metal fixing member fitted on the pump case side, and on the fixing ring side It is an electromagnetically driven pump in which the fitted metal fixing member is appropriately fixed by a fixing means.

[0017]

The electromagnetically driven pump according to the first aspect of the present invention is formed in both cases by fitting a pump case made of fluororesin and a can case made of ceramic in a sealed state.
A fluorine resin of the inner rotor housed in the pump chamber that,
With each thrust ring made of silicon carbide fixed to each case,
Since the fixed shaft is bearing, the mechanical strength required for the bearing is obtained, and the inside of the pump is prevented from being corroded by corrosive fluid, while the thrust ring bearing hole and the shaft end side of the fixed shaft are Since the bearing film made of fluororesin is interposed on the opposing peripheral surface of the bearing, the impact caused by the contact between the thrust ring and the fixed shaft is reduced by the bearing film.

In the electromagnetically driven pump according to a second aspect of the present invention, since the support member made of fluororesin is interposed between the center surface of the can case on the indoor side and the surface facing the thrust ring,
Vibration and impact of the fixed shaft generated when the inner rotor rotates are reduced by the support member.

According to a third aspect of the present invention, there is provided an electromagnetically driven pump, wherein the respective detent surfaces formed in the insertion hole of the inner rotor and the bearing ring are fitted to each other so as to be fitted to each other, so that the mechanical necessary for the detent is achieved. Strength can be obtained and the mutual can be reliably stopped.

In the electromagnetically driven pump according to a fourth aspect of the present invention, the detents formed in the fitting recess of the support member and the thrust ring are fitted and fixed to each other so as to be fitted to each other, so that the detent is necessary for the detent. The mechanical strength is obtained, and the two can be reliably stopped.

According to a fifth aspect of the present invention, there is provided an electromagnetically driven pump, wherein the pump case and the can case are fitted via a fluorine resin seal ring and then fitted to the flange portion of the can case. Through the fixing ring of
The metal fixing member fitted to the pump case side and the metal fixing member fitted to the fixing ring side are tightened and fixed by appropriate fixing means such as bolts and nuts. Tightening force is evenly applied,
Prevent breakage and damage of the can case.

[0022]

As described above, according to the first aspect of the present invention, the portion of the pump that comes into contact with the transport fluid is made of fluororesin, ceramic, or silicon carbide. Alternatively, the inside of the pump can be prevented from being corroded by a corrosive fluid handled in the semiconductor industry, etc., and the pressure resistance of the component parts is high,
A large transport capacity can be obtained, a constant amount of transport fluid can be supplied continuously, and the bearing part for bearing the fixed shaft is made of silicon carbide, so that the mechanical strength required for the bearing is obtained. Of course, the wear resistance is improved.

In addition, since the bearing film made of fluororesin is interposed between the bearing hole of the thrust ring and the fixed shaft, the contact between the thrust ring and the fixed shaft is prevented, and the impact due to mutual contact is prevented. Can be alleviated. As a result, it is possible to prevent the can case from being damaged or damaged.

A conventional electromagnetic pump (JP-A-59-1984)
Since the bearing film is extremely thinner than the fluororesin sleeve used in Japanese Patent No. 1800099), even if the fluororesin bearing film is worn, the clearance generated between the opposed surfaces of the thrust ring and the fixed shaft is narrow, There is an effect that high bearing accuracy can be obtained.

According to the invention described in claim 2 of the present invention,
In addition to the effect of the first aspect of the present invention, since the supporting member is interposed between the opposing surfaces of the can case and the thrust ring, the vibration and the shock of the fixed shaft generated when the inner rotor rotates can be reduced by the supporting member made of fluororesin. Relaxed,
There is an effect that the can case can be reliably prevented from being damaged or damaged.

According to the third aspect of the present invention,
In addition to the effect of the first aspect of the present invention, the detent surfaces formed on the facing surface of the above-described inner rotor insertion hole and the bearing ring disposed on the outer periphery of the fixed shaft are fitted and fixed so as to match each other. In addition, the opposing surfaces of the respective components can be stopped and fixed in the face treatment, and the rotational stress does not concentrate on the detent portions of the respective components. For this reason, it is possible to secure the mechanical strength necessary for the rotation stop, and it is possible to reliably stop the mutual rotation.

According to the invention described in claim 4 of the present invention,
In addition to the effect of the first aspect of the present invention, the fitting concave portion formed on the support member and the detent surface formed on the surface facing the thrust ring are fitted to each other and fitted and fixed. Thereby, it is possible to secure the mechanical strength necessary for stopping the rotation, and to effectively stop the mutual rotation.

According to the invention described in claim 5 of the present invention,
In addition to the effect of the first aspect of the present invention, the fluorine resin pump case and the ceramic can case are mutually tightened and fixed via the fluorine resin fixing ring fitted to the flange portion of the can case. Therefore, the clamping force is uniformly applied to the flange portion of the can case, and there is an effect that it is possible to prevent the can case from being damaged or damaged by the stress generated at the time of the fastening.

[0029]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings. The drawings show an electromagnetically driven pump for transporting corrosive fluids handled in the semiconductor industry. In FIG. 1, this electromagnetically driven pump 1 has a pump case 2 made of fluororesin and a canister made of silicon carbide (SiO). Case 3
Are fitted and fixed in a sealed state to form a pump chamber 4, and a fluororesin inner rotor 5 bearing in the pump chamber 4.
Are rotated by the magnetic force of the inner magnet 13 and the outer magnet 14, and the pump case 2 is moved by the transfer action of the plurality of impellers 5e formed on the inner rotor 5.
The structure is such that the liquid medicine is continuously transported from the suction port 2b side formed in the above to the discharge port 2c side.

The above-mentioned pump case 2 is made of PTFE, PF
A case body 2a is formed of a fluororesin such as A, and one of the divided chambers 4a constituting the pump chamber 4 is formed in the center of one side surface of the case body 2a. A suction port 2b and a discharge port 2c are formed in communication with the chamber 4a, and a fitting recess 2d for fitting and fixing a thrust ring 6 made of silicon carbide is formed in the inner central surface of the divided chamber 4a. A bearing hole 2e for inserting the one end side shaft portion 11a of the fixed shaft 11 is formed in the center of the fitting concave portion 2d. That is, as shown in FIG.
The thrust ring 6 is fitted into the fitting recess 2d formed in the case body 2a, and the thrust ring 6 is formed on the inner peripheral surface of the fitting recess 2d.
Each or a plurality of detent surfaces 2f, 2f and two or a plurality of detent surfaces 6a, 6a formed on the outer peripheral surface of the thrust ring 6 are mutually fitted and fixed so that they cannot rotate.

A bearing hole 6b for bearing the shaft portion 11a on one end side of the fixed shaft 11 is formed at the center of the thrust ring 6, and the fixed shaft 1 is inserted into the bearing hole 6b.
1 and a bearing film 6 made of fluororesin is interposed between a bearing hole 6b formed in the thrust ring 6 and a peripheral surface of the fixed shaft 11 facing the one end shaft 11a. Two or more detent surfaces 6c, 6c formed on the inner peripheral surface of the bearing hole 6b;
The one end side shaft portion 11a of the fixed shaft 11 is non-rotatably supported by matching two or a plurality of detent surfaces 11b, 11b formed on the outer peripheral surface of 1a with each other.

The above-mentioned can case 3 is made of silicon carbide (Si)
C), etc., the can body 3a is formed, and the other divided chamber 4b constituting the pump chamber 4 is formed on the open side of the can body 3a. The support member 8 is fixed, and a fitting recess 8a for fitting and fixing the thrust ring 9 made of silicon carbide is formed in the center surface of the support member 8, and a fixed shaft is formed at the center of the fitting recess 8a. A bearing hole 8b for inserting the other end side shaft portion 11c of the bearing 11 is formed. That is, the thrust ring 9 is fitted into the fitting concave portion 8a formed in the support member 8, and one or two or more detent surfaces 8c, 8c formed on the inner peripheral surface of the fitting concave portion 8a and the thrust ring 9 One or two or more detent surfaces 9a, 9a formed on the outer peripheral surface are fitted and fixed so that they cannot rotate and match each other.

Further, a bearing hole 9b for bearing the other end side shaft portion 11c of the fixed shaft 11 is formed in the center portion of the thrust ring 9, and the other end of the fixed shaft 11 is opposed to the bearing hole 9b of the thrust ring 9. The bearing hole 9b formed in the thrust ring 9 and the bearing film 10 made of fluororesin are interposed on the peripheral surface of the fixed shaft 11 facing the other end shaft portion 11c. Each detent surface 9c, 9c formed on the inner peripheral surface of 9b, and the other end side shaft portion 11
The other end side shaft portion 11c of the fixed shaft 11 is non-rotatably supported by matching the respective rotation stop surfaces 11d, 11d formed on the outer circumferential surface of the fixed shaft 11 with each other.

It should be noted that the thrust ring 9 described above corresponds to FIG.
Since the structure is the same as that of the thrust ring 6 shown in FIG.

The inner rotor 5 is, for example, a PTF
E, the rotor body 5a is formed of a fluororesin such as PFA,
An insertion hole 5b for inserting a fixed shaft 11 made of silicon carbide is formed at the center of rotation of the rotor main body 5a, and a bearing ring 12 made of silicon carbide is formed on an inner peripheral surface on both ends of the insertion hole 5b.
Are formed in each of the fitting recesses 5c, 5c for fitting. In other words, as shown in FIG. 3, each of the bearing rings 12, 1 is inserted into each of the fitting recesses 5c, 5c formed in the insertion hole 5b.
2 and one or two or more detent surfaces 5d, 5 formed on the inner peripheral surface of each of these fitting recesses 5c, 5c.
d and one or two or more detent surfaces 12a, 12a formed on the outer peripheral surface of the bearing ring 12 are fitted to each other so as to be non-rotatable, and are fixed to the center of each of the bearing rings 12, 12. Each formed bearing hole 12b, 12b
, The central shaft 11e of the fixed shaft 11 is inserted.

On the other hand, a large number of impellers 5e are formed on the outer peripheral portion of the rotor body 5a housed on the side of the divided chamber 4a of the pump chamber 4 at predetermined regular intervals in the circumferential direction.
Rotor main body 5a housed in divided chamber 4b side of pump chamber 4
The inner magnet 13 embedded in the rotor body 5a is buried in the outer peripheral portion of the rotor.
And an outer magnet 14 previously excited in an inner peripheral portion of an outer rotor 15 pivotally supported inside a casing 16.
Is fixed. That is, the rotation shaft 18 of the rotation motor 17 with the deceleration function fixed to the casing 16 is directly connected to the rotation center of the outer rotor 15, and the outer rotor 15 is rotated by the driving force of the rotation motor 17, and the inner magnet 13 and the outer magnet 14 are rotated. And the inner rotor 5 is driven to rotate in the transfer direction.

When the pump case 2 and the can case 3 are fitted and fixed, the open side peripheral portion of the divided chamber 4a formed in the pump case 2 and the open side peripheral portion of the divided room 4b formed in the can case 3 are formed. Fluoroplastic O
The fixing ring 2 made of fluororesin is fitted into the flange 3b formed on the open side peripheral portion of the can case 3.
0, a metal-made tightening ring 21 is fitted thereto, a metal casing 16 is fitted to the outer peripheral edge of the tightening ring 21, and then a metal-made fitment is fitted to the closed side flat portion of the pump case 2. The base 22 and the metal casing 16 are tightened and fixed by an appropriate number of bolts 23 and nuts 24 so that the pump case 2 and the can case 3 are fitted and fixed in a sealed state.

The illustrated embodiment is configured as described above, and the operation of transporting a chemical solution by the electromagnetically driven pump 1 will be described below. First, the outer rotor 15 is rotated by the driving force of the rotation motor 17 having a deceleration function.
Outer magnet 14 fixed to inner rotor 5 and inner rotor 5
The inner rotor 5 bearing in the pump chamber 4 is driven to rotate by the magnetic force with the inner magnet 13 fixed to the pump chamber 4 in the transfer direction. At the same time, the transfer action of each impeller 5e formed in the inner rotor 5 causes the suction port 2b of the pump case 2 to move.
The chemical solution is sucked in from the side, and the chemical solution is discharged from the discharge port 2c side of the pump case 2, so that the chemical solution can be continuously transported, the transport speed and the transport pressure are constant, the transport amount of the chemical solution is stable, and the large capacity Transport is possible.

As described above, the pump case 2, the inner rotor 5, the bearing films 7 and 10, the support member 8, and the O-ring 19, which constitute the electromagnetically driven pump 1, are formed of a fluororesin, and Since the case 3, the fixed shaft 11, the thrust rings 6, 9 and the bearing ring 12 are formed of silicon carbide, for example, the inside of the pump is corroded by a corrosive fluid handled in the chemical industry or the semiconductor industry. Since the pressure resistance of the components is high, a large transport capacity can be obtained, and a constant amount of transport fluid can be continuously supplied. Further, since the bearing portion for bearing the fixed shaft 11 is made of silicon carbide, the mechanical strength required for the bearing is obtained, and the wear resistance is improved.

Moreover, the contact between the thrust rings 6, 9 and the fixed shaft 11 is prevented by interposing the fluororesin bearing films 7, 10 on the opposing peripheral surfaces of the thrust rings 6, 9 and the fixed shaft 11. Further, since the impact due to mutual contact is reduced by the bearing films 7 and 10, there is an effect that breakage or damage of the can case 3 can be prevented. Further, a conventional electromagnetic pump (Japanese Unexamined Patent Publication No.
No. 80099), since the bearing films 7, 10 are extremely thinner than the fluororesin sleeve used in the present invention, even if the bearing films 7, 10 are worn, the distance between the opposing surfaces of the thrust rings 6, 9 and the fixed shaft 11 is reduced. The resulting clearance is narrow, and high bearing accuracy can be obtained.

Further, each detent surface 6a, 6c, 9a, 9c, 11b, 11d, 12a formed on the thrust rings 6, 9, the fixed shaft 11, and the bearing ring 12,
The respective detent surfaces 2f, 5d, 8c formed on the pump case 2, the inner rotor 5, and the support member 8 are aligned with each other, and the opposing surfaces of the respective components are detent-fixed in a face treatment. There is an effect that the rotational stress is not concentrated on the non-rotating portions, and the mechanical strength necessary for fixing and fixing each other is obtained.

In addition, by interposing the supporting member 8 made of fluororesin between the opposing surfaces of the can case 3 and the thrust ring 9, vibrations and impacts generated when the fixed shaft 11 rotates are reduced by the supporting member 8, This has the effect of reliably preventing the can case 3 from being damaged or damaged.

Further, since the pump case 2 and the can case 3 are mutually fastened and fixed via the fluorine resin fixing ring 20 fitted to the flange portion 3b of the can case 3, the flange portion 3b of the can case 3 is fixed. Has an effect of being able to prevent the can case 3 from being damaged or damaged by the stress generated at the time of tightening.

FIG. 4 shows another detent structure of the thrust rings 6 and 9. V-shaped detent surfaces 2 f and 2 f formed at two locations on the peripheral surface of the thrust ring 6 opposite to the fitting recess 2 d of the pump case 2. The V-shaped detent surfaces 6c and 11b are formed at two locations on the peripheral surface of the thrust ring 6 opposite to the bearing hole 6b and the one end side shaft portion 11a. Are matched with each other and are non-rotatable.

In the same manner as described above, two V-shaped detent surfaces 8c formed at two locations on the peripheral surface of the thrust ring 9 opposite to the fitting recess 8a of the support member 8 fixed to the can case 3.
The V-shaped detent surfaces 9c, which are formed at two places on the opposing peripheral surface of the bearing hole 9b of the thrust ring 9 and the other end side shaft portion 11c of the fixed shaft 11, are fixed to each other. 11d are aligned with each other and non-rotatable, so that each shaft 1
The bearings 1a and 11c can be non-rotatably supported, and the mechanical strength necessary to stop and fix the members to each other can be obtained.

FIG. 5 shows another rotation stopping structure of the bearing ring 12, in which the fitting recess 5 c of the inner rotor 5 and the bearing ring 1 are formed.
V-shaped detent surfaces 5 formed at two places on the peripheral surface opposite to 2
Since d and 12a are fitted with each other and fixed, the mechanical strength necessary to stop and fix each other is obtained as in the above-described embodiment.

In correspondence between the configuration of the present invention and the above-described embodiment, the prime mover of the present invention corresponds to the rotation motor 17 of the embodiment, and similarly, the fixing member is the fixing ring 2.
0 and the tightening ring 21, and the seal ring
The fixing means corresponds to the O-ring 19 and the casing 16
, The base 22, the bolts 23, and the nuts 24, but the present invention is not limited to the configuration of the above-described embodiment.

In the above embodiment, the thrust rings 6, 9
, The fixed shaft 11 and the bearing ring 12 formed on each of the detent surfaces 6a, 6c, 9a, 9c, 11b, 11d,
12a, the pump case 2, the inner rotor 5, and the support member 8, each of which has a detent surface 2 f, 5 d, 8 c.
Although the rotation is stopped and fixed in accordance with the locations, for example, the rotation may be stopped and fixed in one or three or more appropriate positions.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional side view showing an internal structure of an electromagnetically driven pump of the present invention.

FIG. 2 is a sectional view taken along the line AA of FIG.

FIG. 3 is a cross-sectional view of the bearing ring when viewed from the direction indicated by arrows BB in FIG.

FIG. 4 is a cross-sectional view showing another stop structure of the thrust ring.

FIG. 5 is a sectional view showing another rotation stopping structure of the bearing ring.

[Explanation of symbols]

 2 Pump case 3 Can case 3b Flange 4 Pump chamber 5 Inner rotor 5b Insertion hole 5c Fitting recess 5d Detent surface 6,9 Thrust ring 9a, 9c Detent surface 9b Bearing hole 7, 10 ... bearing film 8 ... support member 8a ... fitting concave part 8c ... detent surface 11 ... fixed shaft 11b, 11d ... detent surface 12 ... bearing ring 12a ... detent surface 12b ... bearing hole 13 ... inner magnet 14 ... Outer magnet 15 ... Outer rotor 16 ... Casing 17 ... Rotating motor 19 ... O-ring 20 ... Fixing ring 21 ... Tightening ring 22 ... Base 23 ... Bolt 24 ... Nut

 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yutaka Shuzo 2-66-3, Nagatano, Fukuchiyama-shi, Kyoto Nippon Pillar Industry Co., Ltd. Fukuchiyama Plant (56) References JP-A-59-1880099 JP-A-3-70897 (JP, A) JP-A-63-280888 (JP, A)

Claims (5)

(57) [Claims] A pump case made of fluororesin and a can case made of ceramic are fitted in a hermetically sealed state, and both casings are fitted together.
The pump chamber is formed in the scan, the fluororesin of the inner rotor and bearing to the pump chamber, the port by the driving force of the prime mover
The outer rotor, which is arranged outside the pump chamber and supported
Due to the magnetic force of the outer magnet fixed to the outer rotor and the inner magnet fixed to the inner rotor, the inner rotor bearing in the pump chamber is driven to rotate in the transfer direction, and the suction action formed in the pump chamber by the transfer action of each impeller formed in the inner rotor. An electromagnetically driven pump that sucks fluid from the mouth side and discharges fluid from the discharge port side of the pump chamber, wherein each thrust ring made of silicon carbide is fixed to the center of the pump case and the can case in the pump chamber side. An electromagnetically driven pump in which a fluororesin bearing film is interposed between a bearing hole of the thrust ring and a shaft end side of a fixed shaft rotatably supporting the inner rotor. 2. The electromagnetically driven pump according to claim 1, wherein a supporting member made of a fluororesin is interposed between the opposing surfaces of said can case and said thrust ring. 3. The electromagnetic drive according to claim 1, wherein the respective detent surfaces formed on opposing surfaces of the insertion hole of the inner rotor and the bearing ring disposed on the outer periphery of the outer periphery of the fixed shaft are fitted and fixed to each other. Type pump. 4. The electromagnetically driven pump according to claim 1, wherein the fitting recess formed in the support member and the respective detent surfaces formed on the surface facing the thrust ring are fitted and fixed to each other. 5. A perimeter edge of the pump case and the can case on the fitting side is hermetically fitted via a seal ring made of a fluororesin, and a fluororesin is formed on a flange formed on an outer periphery of the can case. 2. The fixing ring according to claim 1, wherein the metal fixing member fitted to the pump case side and the metal fixing member fitted to the fixing ring side are tightened and fixed by an appropriate fixing means. Electromagnetic drive pump.