JP2548148Y2 - Magnetic shield room - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a magnetically shielded room, for example, to an improvement of a magnetically shielded room provided with a door in a room for measuring biomagnetism, a room for installing EB exposure of a semiconductor facility, and the like. Things.

[Conventional technology]

Conventionally, a magnetic shield room of this type has a simple square or rectangular plane shape in terms of workability and area efficiency during use.

FIG. 3 shows an example of this, in which the four walls, the ceiling and the floor are formed by attaching thin plates having high magnetic permeability such as permalloy or silicon steel plate.

A door 3 is provided on the wall 2. This door 3
Is provided at a position distant from the experimental site 5 in consideration of the use of experiments such as biomagnetism in the magnetic shield room 1.

[Problem to be solved by the invention] However, in the site in the magnetically shielded room 1,
The most likely cause of the decrease in shielding performance and where the magnetism easily leaks is the contact gap 4 between the door 3 and the wall portion 2. In a conventional magnetic shield room having a simple square or rectangular planar shape,
As shown in FIG. 3, the influence range of the magnetic field leaked from the contact gap 4 between the door 3 and the wall 2 extends to the center of the magnetically shielded room 1, and is used in experiments such as biomagnetism in the magnetically shielded room 1. It is not possible to secure the shielding performance suitable for a wide range, and there is a possibility that the experiment may be performed in a limited area or the experiment may not be performed in some cases.

The present invention has been made to solve such a conventional problem, and an object thereof is to provide a magnetically shielded room capable of reducing an influence range of a magnetic field leaked from a contact gap between a door and a wall. It is to provide.

[Means for solving the problem]

The magnetic shield room according to the first aspect is a magnetic shield room surrounded by a magnetic shield material and provided with a door on a wall portion, the magnetic shield room being connected to a main body of the magnetic shield room, and having a substantially trapezoidal cross section. A front room is provided, and the door is provided in the front room.

3. The magnetic shield room according to claim 2, wherein the magnetic shield room is surrounded by a magnetic shielding material and includes a wall door, wherein one side wall of the magnetic shield room main body, a wall provided with the door, and the shield room. The front chamber is formed by the shield wall protruding into the main body.

[Action]

In the magnetic shield room according to the first aspect, when a magnetic field leaks from the contact gap between the door and the wall, a magnetic circuit is formed by the magnetic shielding material attached to the inner wall surface of the front room, and the magnetic field leakage occurs. Can be mainly applied only to the front room and not to the center of the magnetically shielded room.

In the magnetic shield room according to the second aspect, when a magnetic field leaks from the contact gap between the door and the wall, a magnetic circuit is formed by the magnetic shielding material attached to the inside of the wall and the magnetic shield wall. In addition, the influence range due to the magnetic field leakage can be limited to the front room mainly defined by the magnetic shield wall and the wall, and can be prevented from reaching the center of the magnetic shield room.

〔Example〕

 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 shows a magnetically shielded room according to an embodiment of the present invention. Reference numeral 11 denotes a wall portion formed by attaching a thin plate having high magnetic permeability such as permalloy or silicon steel plate.

The wall 11 is also provided with a ceiling and a floor which are similarly formed by attaching a thin plate having high magnetic permeability such as permalloy or silicon steel plate.

Further, a magnetic shield room main body 12 having a rectangular or square cross section surrounded by the wall portion 11 and a front chamber 131 connected to the main body and having a substantially trapezoidal cross section are formed.

The door 14 is provided on a wall portion 131A of the front room 131 farthest from the center 10A of the magnetically shielded room 10.

According to the magnetic shield room 10 thus configured,
The magnetic field leaked from the contact gap 15 between the door 14 and the wall 131A enters from the contact gap 15 toward the center 10A of the magnetically shielded room 10, but is connected to and opposed to the wall 131A. In the anterior chamber 131 formed of a thin plate of high magnetic permeability such as permalloy or silicon steel plate attached to the walls 131B and 131C, and the central part 1 of the magnetic shield room 10
The area of disturbance of the magnetic field distribution does not extend to 0A. That is, although the isomagnetic field lines near the door 14 are dense and the magnetic field distribution is disordered, it stops in the anterior chamber 131, and the gradient of the magnetic field suddenly decreases toward the center 10A. Confirmed by

In this embodiment, the front chamber 13 having a substantially trapezoidal cross section is provided on one side.
Although the case where 1 is provided has been described, a similar room may be continuously provided at a portion on the opposite side of the front room 131, and the overall shape may be a boat shape.

FIG. 2 shows a magnetically shielded room according to another embodiment of the present invention, wherein a door 142 provided on a wall 111 near a corner,
The front chamber 134 is formed by the side wall 112 of the main body of the magnetic shield room 121 and the magnetic shield wall 16.

The magnetic shield wall 16 is provided with a thin plate having a high magnetic permeability such as permalloy or silicon steel plate, and is located slightly closer to the center 10A than the door 142.

According to the present embodiment, the contact gap 152 between the door 142 and the wall 111
Leakage magnetic field from, permalloy or silicon steel plate attached to the wall portion 111 and the magnetic shield wall 16 and the wall portion 112 which are connected and opposed thereto, the entry range is almost stopped in the front room 134, Center 10A of magnetically shielded room 10
Not reach.

The performance of a magnetically shielded room is better when it is smaller than it is when it is larger.However, in a miniaturized magnetically shielded room, how to prevent magnetic leakage from the contact gap between the door and the wall It is desired in a magnetically shielded room to prevent such a situation and to secure a state with a small magnetic gradient in the center of the magnetically shielded room. From such a viewpoint, the magnetic shield room of the present invention can sufficiently meet the demand.

[Effect of the invention]

The magnetic shield room according to claim 1 is a magnetic shield room surrounded by a magnetic shield material and provided with a door on a wall, wherein a front room connected to the magnetic shield room main body has a substantially trapezoidal cross section. Therefore, the range of influence due to magnetic field leakage from the contact gap between the door and the wall is mainly only the front room, does not reach the center of the magnetically shielded room, the area with high shielding performance is wide, and the entire magnetically shielded room Also improves the shielding rate. Also, by concentrating the through-holes such as the ventilation port and the sleeve in the front room, the shielding performance in the magnetically shielded room can be further enhanced.

The magnetic shield room according to claim 2, wherein the magnetic shield room is surrounded by a magnetic shielding material and includes a door on a wall portion, wherein one side wall portion of the magnetic shield room main body, a wall portion provided with the door, Because the front room is composed of a shield wall protruding into the magnetic shield room main body, the range affected by magnetic field leakage from the contact gap between the door and the wall is mainly formed by the magnetic shield wall and the wall It became only the front room that was done, it did not reach the center of the magnetic shield room,
The area with high shielding performance is widened, and the shielding rate of the entire magnetic shield room is improved. In addition, by concentrating the through-holes such as the ventilation port and the sleeve in the front room, the shielding performance in the magnetically shielded room can be further enhanced.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a configuration of a magnetic shield room according to an embodiment of the present invention. FIG. 2 is a cross-sectional view showing a configuration of a magnetic shield room according to another embodiment of the present invention. FIG. 3 is a cross-sectional view showing the configuration of a conventional magnetic shield room. [Description of Signs of Main Parts] 10: Magnetically shielded room 11,131A, 131B, 131C, 132A, 132B, 132C, 111, 112 ... Wall 12: Magnetically shielded room 13, 131, 132, 134, ... Front room 14, 141, 142 ... Door 15, 151, 152 ... gap

──────────────────────────────────────────────────の Continuation of the front page (51) Int.Cl. ⁶ Identification code Agency reference number FI Technical display location G12B 17/02 G12B 17/02 H01L 21/66 H01L 21/66 L H05K 9/00 H05K 9/00 N (72) creator Kazuki Higashiyama 8-21-1, Ginza, Chuo-ku, Tokyo Inside Takenaka Corporation Tokyo Main Store (72) Keita Yamazaki 2-5-114 Minamisuna, Koto-ku, Tokyo Takenaka Corporation In-store technology research institute (72) Inventor Kenichi Umino 2-5-14-1 Minamisuna, Koto-ku, Tokyo Co., Ltd.In-store technical institute Takenaka Corporation (72) Inventor Kiyoaki Okuda 8-2-1-1, Ginza, Chuo-ku, Tokyo Co., Ltd. Takenaka Corporation Tokyo Main Store (72) Inventor Yasuyuki Nishi 4-1-1-13 Honcho, Chuo-ku, Osaka-shi, Osaka Takenaka Corporation Osaka Main Store (72) Inventor Kiyoshi Kazuo 6-7-1, Koriyama, Taihaku-ku, Sendai-city, Miyagi Prefecture Tokinnai Co., Ltd. (72) Inventor Shoichi Sato 6-7-1, Koriyama, Tajiro-ku, Sendai City, Miyagi Prefecture Tokinnai Co., Ltd. (72) Inventor Yoshinori Uchikawa 2-31-31 Minami-Oizumi, Nerima-ku, Tokyo (72) Inventor Makoto Kotani 821-24 Minami-Otani, Machida-shi, Tokyo (56) References JP-A-1-278680 (JP, A)

Claims (2)

(57) [Scope of request for utility model registration] 1. A magnetic shield room surrounded by a magnetic shield material and provided with a door on a wall portion, wherein a front chamber connected to a main body of the magnetic shield room and having a substantially trapezoidal cross section is provided. A magnetically shielded room, wherein the door is provided in the front room. 2. A magnetically shielded room surrounded by a magnetically shielding material and provided with a door on a wall, wherein one side wall of the magnetically shielded room main body, a wall provided with the door, and A magnetically shielded room characterized by forming a front room with a protruding shield wall.