JP2023142037A - Transfer device and transfer method - Google Patents

Abstract

To provide a transfer device and a transfer method capable of preventing a wasted time from being wasted in predetermined processing of a transported object after transport.SOLUTION: A transfer device includes sheet holding means 10 capable of holding an adhesive sheet AS, and displacement means 20 for displacing the sheet holding means 10, pasting an adhesive sheet AS held by the sheet holding means 10 on a transported object WK, and transporting the transported object WK, and when the transport of the transported object WK is completed, the sheet holding means 10 separates the adhesive sheet AS and leaves the adhesive sheet AS on the transported object WK.SELECTED DRAWING: Figure 1

Description

The present invention relates to a transport device and a transport method.

2. Description of the Related Art A conveyance device is known that carries an object by attaching an adhesive sheet to the object and conveys the object (for example, see Patent Document 1).

JP2008-277688A

In the transfer device 10 (transfer device) described in Patent Document 1, if the wafer W (object to be transferred) is extremely thin or a fragile member, it may be damaged in the next process at the destination. Predetermined processing (hereinafter simply referred to as "predetermined processing") for processing or inspecting the transported object must be carefully performed, taking into account the adverse effects such as deformation and damage to the transported object. Therefore, there arises an inconvenience in that time is wasted in performing predetermined processing on the conveyed object after being conveyed.

An object of the present invention is to provide a conveyance device and a conveyance method that can prevent wasted time from being wasted in predetermined processing of an object to be conveyed after being conveyed.

The present invention employs the configuration described in the claims.

According to the present invention, when the conveyance of the conveyed object is completed, the sheet holding means separates the adhesive sheet and leaves the adhesive sheet on the conveyed object, so that the conveyed object continues to be supported by the adhesive sheet at the conveyance destination. be done. Therefore, in the next process at the destination, there is no need to carefully perform predetermined processing in consideration of adverse effects on the transported objects, and it is possible to prevent wasted time from being wasted in predetermined processing of the transported objects after transport. can do.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory diagram of a conveyance device and an operation explanatory diagram of the device according to an embodiment of the present invention.

Hereinafter, one embodiment of the present invention will be described based on the drawings.
Note that the X-axis, Y-axis, and Z-axis in this embodiment are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis perpendicular to the predetermined plane. do. Furthermore, in this embodiment, when viewing from the front in FIG. 1A, which is parallel to the Y-axis, and indicating a direction without specifying a figure, "top" is the direction of the arrow on the Z-axis. ``Bottom'' is the opposite direction, ``left'' is the direction of the arrow on the X axis, ``right'' is the opposite direction, ``front'' is the direction toward the front in Figure 1 parallel to the Y axis, and ``back'' is the opposite direction. . Note that all figures without direction arrows are views viewed from the same direction as FIG. 1(A).

The conveying device EA of the present invention includes a sheet holding means 10 that carries out a sheet holding step of holding an adhesive sheet AS, and a sheet holding means 10 that is displaced to move the adhesive sheet AS held by the sheet holding means 10 to a conveyed object WK. The displacement means 20 performs a displacement step of conveying the object WK, and heat as a predetermined first energy is applied to the adhesive sheet AS attached to the object WK. a first energy applying means 30 that performs a first energy applying step of deforming the adhesive sheet AS so as to follow the surface shape of the sheet; and a pressing means 40 that performs a pressing step of pressing the adhesive sheet AS against the conveyed object WK. , a second energy applying means 50 for performing a second energy applying step of applying ultraviolet rays as a predetermined second energy to the adhesive sheet AS attached to the transported object WK, and supplying the adhesive sheet AS; The supply means 60 for carrying out the above, the first mounting table 70 on which the transported object WK is placed, and the second mounting table 80 as a transport destination for the transported object WK are arranged in the vicinity.
Note that the adhesive sheet AS of this embodiment is provided so as to be deformable by heat as a predetermined first energy, and to be curable by ultraviolet rays as a predetermined second energy, and is centered at the adhesive sheet center ASC. It is said to be circular in shape.
Moreover, the transported object WK of this embodiment has a circular shape centered on the transported object center WKC.

The sheet holding means 10 includes a holding member 11 having a holding surface 11A that can be sucked and held by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector, and when the conveyance of the object WK is completed, the adhesive sheet is removed. AS is separated and the adhesive sheet AS is left on the conveyed object WK.

The displacement means 20 is composed of a plurality of arms, and is a so-called articulated robot as a driving device capable of displacing an object supported by a tip arm 21A, which is a working part, to any position and any angle within its working range. It is equipped with 21.
Note that the distal end arm 21A is provided to be able to rotate the holding member 11 within the plane of the holding surface 11A around a rotation center 11AC located within the holding surface 11A.

The first energy imparting means 30 includes a hot air blower 31 that heats a gas such as the atmosphere or gas with a heating device (not shown) such as a coil heater or a heating side of a heat pipe, and blows the heated gas as hot air HA. .

The pressing means 40 includes a direct-acting motor 41 as a drive device whose torque can be adjusted, and a pressing roller 42 as a pressing member rotatably supported by its output shaft 41A.

The second energy application means 50 includes an irradiation device 51 that irradiates ultraviolet rays generated by an LED (Light Emitting Diode) lamp, a high pressure mercury lamp, a low pressure mercury lamp, a metal halide lamp, a xenon lamp, a halogen lamp, or the like. There is.

The supply means 60 includes a base plate 61 that directly or indirectly supports the components constituting the supply means 60, and a support roller 62 that supports the raw fabric RS on which the adhesive sheet AS is temporarily attached to the strip-shaped release sheet RL. , a guide roller 63 for guiding the raw fabric RS, a peeling plate 64 as a peeling means for folding back the release sheet RL at the peeling edge 64A and peeling the adhesive sheet AS from the release sheet RL, and a rotation motor as a driving device. The drive roller 65 is supported by an output shaft (not shown) of 65A and pinches the release sheet RL between the pinch roller 65B, and is supported by the output shaft of a drive device (not shown). A collecting roller 66 is provided as a collecting means that always applies a predetermined tension to the release sheet RL existing between the roller 65B and collects the release sheet RL.

The first mounting table 70 can be, for example, an object discharge table of a grinding device that grinds the object WK to a predetermined thickness.
The second mounting table 80 can be, for example, an object receiving table of a singulation device that singulates the object WK into pieces of a predetermined size and shape.

The operation of the above conveyance device EA will be explained.
First, a user (hereinafter simply referred to as "user") of the transport device EA (hereinafter simply referred to as "user") moves the transport device EA and the supply means 60 in which each member is placed at the initial position shown by the solid line in FIG. After setting the original fabric RS as shown in the figure, a signal to start automatic operation is inputted via an operation means (not shown) such as an operation panel or a personal computer. Then, the supply means 60 drives the rotary motor 65A to feed out the original fabric RS, and when the leading adhesive sheet AS reaches a predetermined position above the peeling plate 64, as shown in FIG. Stop driving 65A.

Next, as shown in FIG. 1(A), when the transported object WK is placed on the first mounting table 70, the displacement means 20 drives the articulated robot 21, and the two points in FIG. As shown by the chain line, the rotation center 11AC is overlapped with the adhesive sheet center ASC, and the holding surface 11A is brought into contact with the upper surface of the leading adhesive sheet AS. Thereafter, the sheet holding means 10 drives a decompression means (not shown) to start suction and holding on the holding surface 11A, and then the supply means 60 drives the rotary motor 65A to feed out the original web RS, and the displacement means 20 The articulated robot 21 is driven to move the holding member 11 in the moving direction (to the left) of the adhesive sheet AS in accordance with the moving speed of the adhesive sheet AS. As a result, the adhesive sheet AS is peeled off from the release sheet RL at the folded part of the release sheet RL and held by the holding member 11, as shown by the two-dot chain line in FIG. When the entire AS is peeled off from the release sheet RL and the next adhesive sheet AS following the first adhesive sheet AS reaches a predetermined position above the release plate 64, the supply means 60 stops driving the rotation motor 65A.

Next, the displacement means 20 drives the articulated robot 21, and as shown in FIG. The adhesive sheet AS is pressed and attached to the upper surface of the transported object WK on the first mounting table 70. As a result, an integrated object UP is formed in which the adhesive sheet AS is attached to the transported object WK. At this time, a protruding portion ASH protruding from the transported object WK is formed on the adhesive sheet AS. Then, the displacement means 20 drives the articulated robot 21, and as shown in FIG. 1(C), the rotation center 11AC is placed in the processing center DC. As a result, the outer edge portion (adhesive sheet AS) of the integrated object UP is applied to the first energy applying area of the first energy applying means 30, the pressing area of the pressing means 40, and the second energy applying area of the second energy applying means 50. will be placed in

Next, the displacement means 20 drives the articulated robot 21, and as shown in FIG. 1(C), the holding member 11 is moved around the rotation center 11AC within the plane of the holding surface 11A, as seen from above when viewed from above. While rotating in the rotational direction RD, the first energy applying means 30 drives the hot air blower 31 to start blowing hot air HA to the adhesive sheet AS. As a result, the protruding portion ASH of the adhesive sheet AS that has passed through the first energy applying region is heated by the hot air HA, as shown by the two-dot chain line in FIG. It deforms so as to follow the pattern and adheres to the lower surface of the object to be transported WK. Thereafter, when the protruding portion ASH is deformed over the entire circumference, the first energy applying means 30 stops driving the hot air blower 31.

Thereafter, the pressing means 40 drives the direct-acting motor 41 to raise the pressing roller 42 and press the adhesive sheet AS against the conveyed object WK with a predetermined pressing force, as shown in FIG. 1(D). As a result, the adhesive sheet AS is pressed against the outer edge of the conveyed object WK, and when the adhesive sheet AS is pressed over the entire circumference, the pressing means 40 drives the linear motor 41 and initializes the pressing roller 42. return to position. In this way, by attaching the adhesive sheet AS to the object to be transported WK, the object to be transported WK has improved resistance against external force (hereinafter simply referred to as "resistance") due to the support of the adhesive sheet AS. Moreover, by attaching the adhesive sheet AS to the upper and lower surfaces of the transported object WK, the drag force of the transported object WK is further improved.

Next, the second energy applying means 50 drives the irradiation device 51 to start irradiating the adhesive sheet AS with ultraviolet rays UV, as shown in FIG. 1(E). As a result, the adhesive sheet AS that has passed through the second energy application region is cured by the ultraviolet rays. Then, when the adhesive sheet AS is cured over the entire circumference, the second energy applying means 50 stops driving the irradiation device 51, the displacement means 20 stops driving the articulated robot 21, and the rotation of the holding member 11 is stopped. stop. In this way, by curing the adhesive sheet AS attached to the transported object WK, the drag force of the transported object WK is further improved.

Next, when the displacement means 20 drives the articulated robot 21 and places the integrated object UP on the second mounting table 80 as shown in FIG. 1(F), the sheet holding means 10 drives the decompression means (not shown). , and release the adsorption/holding on the holding surface 11A. Thereafter, the displacement means 20 drives the articulated robot 21 to separate the holding member 11 from the integrated object UP and return the holding member 11 to the initial position, as shown in FIG. The action is repeated.

According to the embodiment described above, when the conveyance of the conveyed object WK is completed, the sheet holding means 10 separates the adhesive sheet AS and leaves the adhesive sheet AS on the conveyed object WK, so that the conveyance destination (the first The conveyed object WK on the second mounting table 80 continues to be supported by the adhesive sheet AS. Therefore, in the next process at the transport destination, it is no longer necessary to carefully perform predetermined processing in consideration of the adverse effects on the transported object WK, and time is wasted on predetermined processing for the transported object WK after transport. can be prevented.
Furthermore, by pasting the adhesive sheet AS on the outer edge of the transported object WK, it is possible to prevent the predetermined processing of the central portion of the transported object WK from being obstructed in the next process at the destination. .

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to the means and steps; It is not limited at all to the process. For example, the displacement means may be any device that can displace the sheet holding means, attach the adhesive sheet held by the sheet holding means to the object to be conveyed, and convey the object. There is no limitation in any way as long as it is within the technical scope in light of common technical knowledge (the same applies to other means and processes).

The sheet holding means 10 may be configured to hold the adhesive sheet AS without being displaced by the displacement means 20, for example, when a driving device such as a worker or an articulated robot brings the adhesive sheet AS close to the holding surface 11A. However, one adhesive sheet AS or a plurality of adhesive sheets AS may be held, or a gas such as the atmosphere or gas may be blown onto the adhesive sheet AS from the holding surface 11A, and the adhesive sheet AS may be bonded from the holding surface 11A. The sheet AS may be separated, or the holding member 11 made of a member through which at least one of the first energy and the second energy can pass may be used, or the holding member 11 may be made of a member that allows at least one of the first energy and the second energy to pass through. At least one of the first energy and the second energy can be applied to the side of the adhesive sheet AS that the holding member 11 comes into contact with by employing a holding member 11 provided with a penetrating means such as a through hole or groove that allows the may be applied, a holding member 11 made of a member through which both the first energy and the second energy cannot pass may be adopted, or the holding member 11 may be held on the entire upper surface of the adhesive sheet AS. A holding member may be employed that holds the adhesive sheet AS by bringing the surfaces 11A into contact with each other. In this case, when the adhesive sheet AS is deformed by the first energy applying means 30, the portion of the adhesive sheet AS that moves due to the deformation. It is also possible to release the retention of the .

The displacement means 20 attaches one adhesive sheet AS held by the sheet holding means 10 to one conveyed object WK, or attaches one adhesive sheet AS held by the sheet holding means 10 to a plurality of conveyed objects. WK, a plurality of adhesive sheets AS held by the sheet holding means 10 are pasted to one conveyed object WK, a plurality of adhesive sheets AS held by the sheet holding means 10 are pasted to a plurality of conveyed objects WK. The conveyed object WK may be conveyed by attaching the adhesive sheet AS to the sheet, or by displacing the sheet holding means 10, for example, the adhesive sheet AS, which is non-circular or linear, may be attached to a circular or U-shaped condition. The sheet holding means 10 may be moved so as to deform and hold it, or the sheet holding means 10 may be configured to hold the adhesive sheet AS in a non-circular or linear shape without deforming it into an annular state or a U-shaped state. The sheet holding means 10 may be moved, or an adhesive sheet AS of a size that does not protrude from the outer edge of the object WK may be used, and the adhesive sheet AS may be attached to the object WK so that no protruding portion ASH is formed. Alternatively, one or more adhesive sheets AS may be attached to each of both sides of the conveyed object WK, or the holding member 11 may be rotated around a position other than the rotation center 11AC. , without rotating the holding member 11, for example, by moving the holding member 11 along a linear trajectory, an elliptical trajectory, etc., the first energy is applied to the adhesive sheet AS, the second energy is applied, and the pressing force is applied. Alternatively, after the conveyed object WK placed on the first mounting table 70 is held and conveyed by the sheet holding means 10, the conveyed object WK is again applied. It may be placed on the first mounting table 70.

The first energy applying means 30 may apply electromagnetic waves such as ultraviolet rays, infrared rays, visible rays, sound waves, X-rays, or gamma rays, or heat such as hot water or cold air as the predetermined first energy. As long as the adhesive sheet AS can be deformed in consideration of its properties, properties, properties, materials, compositions, configurations, etc., any energy may be used as the first energy, and the same energy may be used as the first energy. Alternatively, a plurality of energies may be applied, a different energy may be used as the first energy, and one or more may be applied, or a structure may be adopted in which the energy is moved away from and approaches the integrated object UP placed at a predetermined position. The adhesive sheet AS may be disposed inside the holding member 11, the first energy may be applied to the adhesive sheet AS from above, below, or from the side, or the adhesive sheet AS may be attached to the conveyed object WK. The first energy may be applied to the adhesive sheet AS by itself moving without or while moving the sheet AS, or the first energy may be applied all at once to the adhesive sheet AS attached to the conveyed object WK. It may be provided with guiding means such as a guide shaft, rotating belt, roller, etc. that guides the adhesive sheet AS portion that moves due to deformation in the desired direction, or a reduced pressure atmosphere including vacuum may be provided. The transport device EA of the present invention may be provided with a pressure reduction means to apply a predetermined first energy to the adhesive sheet AS attached to the transported object WK in the reduced pressure atmosphere. , it doesn't have to be equipped.

The pressing means 40 does not have to approach the integral object UP from a distance, or the displacement means 20 may press the integral object UP against the pressing roller 42 and press the adhesive sheet AS against the conveyed object WK. A predetermined pressing force for pressing AS against the transported object WK can be arbitrarily set, or the pressing member may be moved by a drive device whose torque cannot be adjusted to press the adhesive sheet AS against the transported object WK. The configuration may be such that the adhesive sheet AS attached to the transported object WK is pressed all at once, and the transport device EA of the present invention may or may not be equipped with it.

The second energy applying means 50 may apply electromagnetic waves such as ultraviolet rays, infrared rays, visible rays, sound waves, X-rays, or gamma rays, or heat such as hot water or cold air as the predetermined second energy, and may apply heat such as hot water or cold air to the adhesive sheet AS. Any kind of energy may be used as the second energy as long as the adhesive sheet AS can be cured in consideration of the characteristics, properties, properties, materials, composition, structure, etc., and any energy can be used as the second energy. Alternatively, only a part of the adhesive sheet AS located on the top surface, bottom surface, side surface, etc. of the transported object WK may be cured, or the same energy may be used as second energy and one or more may be applied. However, a different energy may be used as the second energy, and one or more may be applied, the structure may be such that the second energy is applied to the integrated object UP placed at a predetermined position, or the second energy may be applied to the integrated object UP placed at a predetermined position. The second energy may be applied to the adhesive sheet AS from above, below, or from the side of the adhesive sheet AS, or the adhesive sheet AS attached to the conveyed object WK may not be moved. While moving, the second energy may be applied to the adhesive sheet AS by itself, or the second energy may be applied all at once to the adhesive sheet AS attached to the transported object WK, Alternatively, the conveying apparatus EA of the present invention may be provided with a depressurizing means for forming a reduced pressure atmosphere including a vacuum, and apply a predetermined second energy to the adhesive sheet AS attached to the transported object WK in the reduced pressure atmosphere. It may or may not be provided.

The supplying means 60 is configured to form a closed loop or a notch in the entire short width direction in the band-shaped adhesive sheet base temporarily attached to the band-shaped release sheet RL, thereby supplying a predetermined area partitioned by the notch. The adhesive sheet AS may be peeled off and supplied from the original fabric RS which has been made into the adhesive sheet AS, or a band-shaped adhesive sheet original fabric in which a band-shaped adhesive sheet base material is temporarily attached to a band-shaped release sheet RL is used. Then, in the middle of unwinding the belt-shaped adhesive sheet raw material, a cut in the adhesive sheet base material in a closed loop shape or across the entire short width direction is formed with a cutting blade serving as a cutting means, and a predetermined area partitioned by the cut is formed. The adhesive sheet AS may be peeled off and supplied from the original fabric RS on which the adhesive sheet AS is made, or the adhesive sheet AS may be peeled off from the original fabric RS on which the adhesive sheet AS is temporarily attached to the release sheet RL. The sheet AS may be peeled off and supplied, or the adhesive sheet AS may be peeled off and supplied from the original fabric RS that has been fan-folded, for example, without being wound. It is also possible to adopt a collection means that collects the release sheet RL by, for example, fan-folding it without winding it, cutting it into pieces with a shredder, etc., or collecting it casually, or it is possible to adopt a collection means that collects the release sheet RL without winding it. Alternatively, the adhesive sheet AS that is not temporarily attached to the release sheet RL may be fed by feeding it, or the adhesive sheet AS may be fed in any shape, such as circular, non-circular, or linear. Alternatively, the adhesive sheets AS may be supplied one by one or in a flat stack, and may or may not be provided in the conveying device EA of the present invention. , if the conveying device EA of the present invention is not equipped with the adhesive sheet AS, the adhesive sheet AS may be supplied to the sheet holding means 10 by an operator or a driving device such as an articulated robot.

The first mounting table 70 and the second mounting table 80 perform electrolytic plating and electroless plating on the transported object WK, as well as those that perform sandblasting, painting, etching, engraving, cutting, drilling, and parts on the transported object WK. In addition to a discharging table or receiving table for objects to be transported that performs installation, heating, cooling, surface inspection, condition inspection, etc., any type of table may be used, such as a mere table on which the transported object WK is placed. , it may be movable or stationary, or it may be one on which only one or a plurality of objects WK or integral objects UP are placed.
At least one of the first mounting table 70 and the second mounting table 80 may or may not be included in the transport device EA of the present invention.

The conveyance device EA may be configured to move the supplying means 60 without or while moving the holding member 11, and hold the adhesive sheet AS supplied by the supplying means 60 on the holding member 11, or the holding member 11 may be moved. At least one of the first energy applying means 30, the pressing means 40, and the second energy applying means 50 without rotating or linearly moving the holding member 11, or while rotating or linearly moving the holding member 11. The adhesive sheet AS may be configured to be rotatably moved or linearly moved to apply the first and second energy or pressing force to the adhesive sheet AS.
The conveying device EA arranges the first energy applying means 30, the pressing means 40, and the second energy applying means 50 so that the second energy applying step is performed immediately after the first energy applying step, and then the pressing step is performed. Alternatively, if there is time available before the adhesive sheet AS is cured by the second energy applying means 50, the first energy applying step may be performed immediately after the second energy applying step. The first energy applying means 30, the pressing means 40, and the second energy applying means 50 may be arranged or driven so that the pressing step is performed thereafter.
The conveying device EA may include a cooling device that performs a cooling step of cooling the adhesive sheet AS heated by at least one of the first energy applying device 30 and the second energy applying device 50. Such cooling means include, for example, a cold air blower that cools air or gas using a cooling means such as a Peltier element or the cooling side of a heat pipe, and blows the cooled gas as cold air, or a fan that blows air. For example, any configuration may be used as long as the adhesive sheet AS heated by at least one of the first energy applying means 30 and the second energy applying means 50 can be cooled. In addition, when a cooling means is included, the conveyance apparatus EA may arrange the cooling means so that the cooling step is carried out immediately after the first energy application step, immediately after the pressing step, or immediately after the second energy application step. , or may be configured to cool the adhesive sheet AS attached to the transported object WK all at once.

The adhesive sheet AS may not have a circular shape, but may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, a polygonal ring shape, or other shapes, and may have an outer edge having the same shape as the outer edge of the transported object WK. The first energy may be a size that does not protrude from the outer edge of the transported object WK, or electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, hot water, cold air, etc. can be used as the predetermined first energy. It may be deformable, it may be deformed with contraction or expansion due to the first energy, it may be deformed without contraction or expansion, or it may be deformed with no contraction or expansion due to the first energy. It may be hardened by using electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, hot water or cold air as a predetermined second energy, or it may be hardened by using predetermined second energy such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays. It may be hardened along with expansion, hardened with expansion, hardened without shrinkage or expansion, or hardened without being hardened by the second energy.
The conveyed object WK may be provided with an annular or non-annular convex portion at the outer edge or inside the outer edge, or may have an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or a circular or polygonal ring instead of a circular shape. The shape may be any other shape, and another sheet may be attached to at least one of one surface WK1 and the other surface WK2.

The materials, types, shapes, etc. of the adhesive sheet AS, other sheets, and transported object WK in the present invention are not particularly limited. For example, the adhesive sheet AS, other sheets, and the conveyed object WK may be circular, oval, polygonal such as a triangle or square, or other shapes, and the adhesive sheet AS and other sheets may be pressure-sensitive. Adhesive forms such as adhesive or heat-sensitive adhesive may be used. When heat-sensitive adhesive sheet AS or other sheets are adopted, an appropriate coil for heating the adhesive sheet AS or other sheets may be used. The adhesive may be bonded by an appropriate method such as providing a heating means such as a heater or a heating side of a heat pipe. In addition, such adhesive sheets AS and other sheets include, for example, a single-layer adhesive sheet, a two-layer adhesive sheet consisting of a base material and an adhesive layer, and a double-layer adhesive sheet consisting of a base material and an adhesive layer. Three layers or three or more layers with one or more intermediate layers laminated between them, three or more layers with one or more cover layers laminated on the top surface of the base material, base material, intermediate layer Or, what type of adhesive sheet can be used, such as one with a removable cover layer, a single-layer double-sided adhesive sheet consisting only of an adhesive layer, or a double-sided adhesive sheet with adhesive layers laminated on both outermost surfaces of one or more intermediate layers? It can be anything. Furthermore, the objects to be transported WK include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wooden plates, resin, etc. The object may be a single object or a composite formed of two or more of them, and members or articles of any form can be targeted. Adhesive sheet AS and other sheets can be interpreted in terms of functionality and usage, such as labels for information writing, decorative labels, protective sheets, dicing tapes, die attach films, die bonding tapes, and recording layer forming resins. Any sheet, film, tape, etc. may be used.

The driving equipment in the above embodiment includes a rotary motor, a direct-acting motor, a linear motor, a single-axis robot, an electric equipment such as an articulated robot with joints of two or three or more axes, an air cylinder, a hydraulic cylinder, and a rodless cylinder. Actuators such as cylinders and rotary cylinders can be used, and a direct or indirect combination of these can also be used.
In the above embodiment, when a rotating member such as a roller is employed, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be made of deformable material such as rubber or resin. It may be made of a member, the surface of the rotating member or the rotating member itself may be made of a member that does not deform, or other members such as rotating or non-rotating shafts or blades may be used instead of the roller. Alternatively, if a pressing device such as a pressing roller or a pressing head or a pressing member that presses the object to be pressed is used, rollers, round bars, blades can be used in place of or in combination with the examples exemplified above. In addition to materials and brush-like members, it is also possible to use a method that uses air or gas to be blown onto the material, and the pressing member may be made of a deformable member such as rubber, resin, or sponge. Alternatively, if a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off the object to be peeled is used, instead of the ones exemplified above. Alternatively, members such as plate-shaped members, round bars, rollers, etc. may be used in combination, or the material to be peeled off may be made of deformable members such as rubber or resin, or it may be made of non-deformable members. Alternatively, if something that supports (holds) the supported member (held member) such as a support (holding) means or a support (holding) member is adopted, a gripping means such as a mechanical chuck or a chuck cylinder may be used. , Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, drive equipment, etc. are used to support (hold) the supported member. Alternatively, if a cutting means or cutting member that cuts the member to be cut or forms a cut or a cutting line in the member to be cut is employed, it may be used in place of or in combination with the above-mentioned examples. , cutter blades, laser cutters, ion beams, thermal power, heat, water pressure, heating wires, spraying of gas or liquid, etc. are used to cut the objects, or a combination of appropriate drive equipment is used to move the object to be cut. Alternatively, it may be cut after being cut.

EA... Conveyance device 10... Sheet holding means 20... Displacement means 30... First energy applying means 50... Second energy applying means AS... Adhesive sheet HA... Hot air (first energy)
UV…Ultraviolet light (secondary energy)
WK...Object to be transported

Claims (4)

a sheet holding means capable of holding an adhesive sheet;
Displacing means for displacing the sheet holding means, affixing the adhesive sheet held by the sheet holding means to an object to be transported, and transporting the object to be transported,
The conveying device is characterized in that the sheet holding means separates the adhesive sheet and leaves the adhesive sheet on the conveyed object when conveyance of the conveyed object is completed. The adhesive sheet is provided to be deformable by a predetermined first energy,
The method further includes a first energy applying means for applying the predetermined first energy to the adhesive sheet attached to the conveyed object and deforming the adhesive sheet so as to follow the surface shape of the conveyed object. The conveyance device according to claim 1, characterized in that: The adhesive sheet is provided to be curable by a predetermined second energy,
3. The conveyance apparatus according to claim 1, further comprising second energy applying means for applying the predetermined second energy to the adhesive sheet attached to the conveyed object. a sheet holding step of holding the adhesive sheet with a sheet holding means;
displacing the sheet holding means, affixing the adhesive sheet held by the sheet holding means to a conveyed object, and carrying out a displacement step of conveying the conveyed object;
In the sheet holding step, when the conveyance of the conveyed object is completed, the sheet holding means separates the adhesive sheet and leaves the adhesive sheet on the conveyed object.