JP2022106195A - Pressurizing device - Google Patents

Abstract

To provide a pressurizing device that is high in durability and also has strong resistance to aged deterioration.SOLUTION: A pressurizing jig 1, which pressurizes and holds a laminated body B, comprises: a base plate 2 on which the laminated body B is placed; a cover plate 3, arranged to oppose to the base plate 2, which grasps the laminated body B between the base plate 2 and the cover plate; spring washers 4 arranged on the cover plate 3; and a pressurizing structure 6 that makes a pressurizing plate 5 arranged on the spring washers 4 compress the spring washers 4 and pressurizes the laminated body B. The spring washers 4 are wound spirally without overlapping with each other, whose both end parts 4a and 4b are separated from each other.SELECTED DRAWING: Figure 1

Description

The present invention relates to a pressurizing device that pressurizes and holds an object.

A pressurizing device for holding an object such as a laminated body used for a circuit board or the like in a pressurized state is known. In this type of pressurizing device, the object to be pressurized is sandwiched between the upper and lower plates, and the upper plate is pressed by a coil spring to hold the object (see Patent Documents 1, 2 and 3). The pressurizing device is supplied to a heating furnace, for example, to join objects.

Japanese Unexamined Patent Publication No. 2010-23899 Japanese Unexamined Patent Publication No. 2012-200730 Japanese Unexamined Patent Publication No. 2013-71880

In a conventional pressurizing device, pressurization of an object is performed by compression of a coil spring. Pressurizing devices are used under harsh conditions such as heating furnaces, but coil springs are exposed to harsh conditions under load and are prone to deterioration over time.

An object of the present invention is to solve the above problems, and an object of the present invention is to provide a pressurizing device having high durability and resistance to aging deterioration.

The present invention is a pressurizing device that pressurizes and holds an object, and is arranged so as to face the base portion on which the object is placed and the base portion, and sandwiches the object between the base portion. The cover portion, the compression spring arranged on the cover portion, and the pressurizing structure for compressing the compression spring by the pressurizing portion arranged on the compression spring to pressurize the object are provided, and the compression springs overlap each other. It is wound in a spiral shape without any problems, and both ends are separated.

For example, in the case of a coil spring, since it has a plurality of turns, it has an overlapping portion, and the overlapping portions may interfere with each other to reduce durability. On the other hand, in the above-mentioned pressurizing device, the object is pressurized by a compression spring that is spirally wound without overlapping and has both ends separated from each other, and does not have an overlapping portion. Therefore, even if the object is held under pressure by the compression of the compression spring, or the object is used while being repeatedly compressed and released, the durability is easily maintained and the object is resistant to deterioration over time.

Further, the compression spring may be a spring washer. Since the spring washer forms a flat ring shape in the compressed state, it has excellent stability when the object is pressed and held, and it is difficult to receive uneven pressing force in an unstable state, and it is durable. It is advantageous for the improvement of.

Further, a plurality of compression springs may be arranged on the cover portion. By arranging a plurality of compression springs, it becomes easy to uniformly press the object through the cover portion.

Further, the plurality of compression springs may be arranged along the outer edge of the cover portion. When the object is arranged so as to fit inside the outer edge of the cover portion, it becomes easy to uniformly press the object through the cover portion.

Further, the plurality of compression springs may be arranged at equal intervals. The plurality of compression springs arranged at equal intervals facilitate uniform pressurization of the object through the cover portion.

Further, a separation region is formed between both end portions of the compression spring, and the plurality of compression springs may be arranged so that the separation region faces the outer edge of the cover portion. When the compression spring is compressed, the repulsive force (pressurizing force) between both ends facing each other across the separated region becomes the largest. Therefore, by arranging the separated region so as to face the outer edge of the cover portion, it becomes easy to reliably suppress the portion along the outer edge of the cover portion, and it becomes easy to uniformly press the object through the cover portion.

Further, the pressurizing structure is attached to a plurality of strut portions which are erected on the pressurizing portion and the base portion and are arranged to face each other across the cover portion, and are attached to the strut portion, and abut against the pressurizing portion to pressurize the portion. It may be provided with a locking portion for locking the. The locking portion holds the pressurizing portion in place, and as a result, the compression spring can be compressed to pressurize the object.

Further, the pressure portion is formed with a strut through hole through which the strut portion penetrates, the strut portion is formed with an engagement hole through which the locking portion penetrates, and the locking portion is an engagement hole. And engages with the surface of the pressurizing section on the side opposite to the side of contact with the compression spring to lock the pressurizing section. By penetrating the locking part through the engaging hole and bringing it into contact with the pressing part, the pressing part can be held in place and the compression spring can be compressed, while the locking part can be moved from the engaging hole. The compression spring can be easily released by pulling it out and separating it from the pressurizing part.

According to the present invention, it is possible to provide a pressurizing device having high durability and resistance to aging deterioration.

It is a perspective view of the pressure jig which concerns on embodiment of this invention. It is a top view which shows the pressurizing jig which concerns on embodiment partially broken. It is a front view which shows the pressurizing jig which concerns on embodiment partially broken. It is a side view which shows the pressurizing jig which concerns on embodiment partially broken. It is sectional drawing along the VV line of FIG. FIG. 5 is a cross-sectional view showing a state in which the pressure plate is raised to restore the spring washer according to FIG. It is explanatory drawing which shows typically the continuous furnace.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

First, the pressurizing jig 1 (an example of the pressurizing device) according to the embodiment will be described with reference to FIGS. 1, 2, 3, and 4. The pressurizing jig 1 is introduced into the nitrogen continuous furnace 50 in a state where the laminate B used for the semiconductor substrate or the like is pressurized and held. In the nitrogen continuous furnace 50, the laminate B is heated and joined by brazing. The nitrogen continuous furnace 50 is an example of a continuous furnace, and the continuous furnace is not limited to the nitrogen continuous furnace, and may be another continuous furnace, and is appropriately selected according to the type and application of the laminated body B. .. The laminated body B is an example of an object to be pressurized by the pressurizing jig 1.

In the present embodiment, a plurality of substrate units Ba are laminated with the spacer S interposed therebetween, and the spacer S is also arranged between the substrate unit Ba and the pressurizing jig 1. Further, in the state before joining, the substrate unit Ba has a laminated body structure (see FIG. 5) formed by sandwiching the ceramic plate b2 between the pair of copper plates b1. The laminated body B according to the present embodiment is formed by the spacer S and a plurality of substrate units Ba. The laminated body B according to the present embodiment is rectangular in a plan view, but may have another shape. The spacer S only needs to be able to prevent the bonding between the substrate units Ba and the bonding between the substrate unit Ba and the pressurizing jig 1, and the carbon spacer is used in this embodiment.

The pressurizing jig 1 includes a plate-shaped base plate 2 (base portion) on which the laminated body B is placed, and a cover plate 3 (cover portion) arranged so as to face the base plate 2. The cover plate 3 sandwiches the laminated body B with the base plate 2. Further, the pressurizing jig 1 includes a plurality of spring washers 4 arranged on the cover plate 3 and a pressurizing plate 5 (pressurizing portion) arranged on the spring washers 4. Further, the pressurizing jig 1 has a pressurizing structure 6 in which the spring washer 4 is compressed by the pressurizing plate 5 to pressurize the laminated body B.

The base plate 2 has, for example, a rectangular shape, and has a region protruding from the laminated body B in a plan view, that is, an overhanging region 2a that does not overlap with the laminated body B. In the overhanging region 2a of the base plate 2, a plurality of (for example, two) columns 8 (support portions) are erected along the short sides of the base plate 2. Further, the columns 8 are arranged facing each other on both sides in the longitudinal direction (left-right direction) of the base plate 2, and the laminated body B is arranged between the pair of columns 8 facing each other on the left and right. An engaging hole 8a through which the locking claw 9 is inserted is formed in the upper portion of the support column 8.

The cover plate 3 has a rectangular shape corresponding to the shape of the laminated body B, and has one surface 3a (hereinafter referred to as “lower surface”) and the other surface 3b (hereinafter referred to as “upper surface”). The lower surface 3a is a flat surface and abuts on the laminated body B. A plurality of counterbore 3c is formed on the upper surface 3b, and the spring washer 4 is housed in each counterbore 3c. It is desirable that the depth of the counterbore 3c is such that the entire spring washer 4 fits when the spiral spring washer 4 is compressed and flattened, for example. The counterbore 3c has a donut shape (annular shape) in a plan view, and the annular spring washer 4 fits in the plan view to prevent the spring washer 4 from being displaced. The counterbore 3c functions as a positioning portion of the spring washer 4.

The pressure plate 5 has a surplus region 5a facing the overhanging region 2a of the base plate 2 in a plan view. In the surplus region 5a, a strut through hole 5b through which the strut 8 penetrates is formed. Further, a storage groove 5c is provided on the upper surface of the surplus region 5a so as to pass through the column through hole 5b. The locking claw 9 fits in the storage groove 5c.

The pressure plate 5 is arranged so as to be overlapped with the cover plate 3, and is further pushed down so as to be in contact with the spring washer 4. When pushing down the pressure plate 5, the support column 8 is passed through the support column through hole 5b provided in the excess region 5a of the pressure plate 5. The upper part of the support column 8 protrudes above the support column through hole 5b. An engaging hole 8a is provided in the upper part of the support column 8, and a locking claw 9 (locking portion) is inserted into the engaging hole 8a. The locking claw 9 penetrates the engagement hole 8a from the lateral direction and abuts on the surface (upper surface) opposite to the surface (lower surface) on the side of the pressure plate 5 that abuts on the spring washer 4 to pressurize. Lock the plate 5. A storage groove 5c is formed on the upper surface of the pressure plate 5 so as to follow the trajectory of the locking claw 9, and the locking claw 9 slides along the storage groove 5c.

When the locking claw 9 locks the pressure plate 5, the pressure plate 5 is restricted from moving upward. The restriction on the movement of the pressure plate 5 prevents the spring washer 4 from being restored, and the spring washer 4 is held in a compressed state. The pressure structure 6 according to the present embodiment includes at least a pressure plate 5, a support column 8, an engagement hole 8a, and a locking claw 9.

The spring washer 4 is formed of, for example, Inconel 750, Inconel 718, silicon nitride, carbon composite, or the like. The spring washer 4 is in an uncompressed state, for example, in a state where it is not in contact with the cover plate 3 (see FIG. 6). The spring washer 4 is an example of a compression spring that is spirally wound without overlapping and has both ends 4a and 4b separated from each other. More specifically, the spring washer 4 has a C-shaped shape, and both end portions 4a and 4b are separated from each other and are displaced in the axial direction (for example, in the vertical direction) when a spiral shape is assumed. Here, in the counterbore 3c of the cover plate 3, one end abutting the bottom of the counterbore 3c is referred to as a lower end portion 4a, and the other end portion on the opposite side is referred to as an upper end portion 4b. When the spring washer 4 is compressed by the pressure structure 6 via the cover plate 3, the lower end portion 4a and the upper end portion 4b are close to each other, the spiral shape of the spring washer 4 is eliminated, and the shape becomes substantially flat ( See FIG. 5).

The plurality of spring washers 4 are arranged so as to fit inside the outer edge 3x of the cover plate 3 without protruding from the outer edge 3x of the cover plate 3. Further, the plurality of spring washers 4 are arranged along the outer edge 3x of the cover plate 3. For example, the outer edge 3x of the cover plate 3 according to the present embodiment has a rectangular shape. Three spring washers 4 are arranged side by side along each short side of the outer edge 3x, and five spring washers 4 are arranged side by side along each long side. By arranging the plurality of spring washers 4 along the outer edge 3x of the cover plate 3, it becomes easy to uniformly press the laminated body B through the cover plate 3.

The plurality of spring washers 4 are arranged at equal intervals. Specifically, a total of 15 spring washers 4 are arranged so as to have 3 rows and 5 columns (multiple rows, multiple columns), and all the spring washers 4 are arranged at equal intervals. .. By arranging the spring washers 4 at equal intervals, it becomes easy to uniformly press the laminated body B by the cover plate 3. It should be noted that only a plurality of spring washers 4 arranged along the outer edge 3x of the cover plate 3 may be arranged at equal intervals. Further, when the center of the cover plate 3 is defined in a plan view, a plurality of spring washers 4 may be arranged so as to be point-symmetrical with respect to this center.

A separation region 4x is formed between the lower end portion 4a and the upper end portion 4b of the spring washer 4 (between both end portions). The plurality of spring washers 4 are arranged so that the separation region 4x faces the outer edge 3x of the cover plate 3. That is, when the spring washer 4 is assumed to be ring-shaped in a plan view, the spring washer 4 is arranged so that the separation region 4x is closer to the outer edge 3x of the cover plate 3 than the center point of the ring shape. .. Further supplementing, when a line connecting the separated regions 4x of the plurality of spring washers 4 is assumed, this line is arranged along the outer edge 3x of the cover plate 3.

When the spring washer 4 is compressed, the spring washer 4 has the largest repulsive force (pressurizing force) at the lower end portion 4a and the upper end portion 4b facing each other across the separation region 4x. By arranging the separation region 4x so as to face the outer edge 3x of the cover plate 3, it becomes easier to reliably suppress the portion of the cover plate 3 along the outer edge 3x, and the laminated body B is uniformly spread through the cover plate 3. It becomes easy to pressurize.

Further, in the present embodiment, except for the spring washers 4 arranged at the four corners of the rectangular outer edge 3x of the cover plate 3, the plurality of spring washers 4 are arranged so that the portion closest to the outer edge 3x is the separation region 4x. ing. Further, assuming a radiation direction passing through the separation region 4x from the center of the ring-shaped spring washer 4, no other spring washer 4 is arranged between the separation region 4x and the outer edge 3x in this radiation direction. ..

Next, a method of joining the laminated body B will be described with reference to FIG. 7. The joining method of the laminated body B according to the present embodiment includes, for example, a jig laminating step S1, a joining step S2, and a jig detaching step S3. The method for joining the laminated body B according to the present embodiment is not a batch method but a continuous method. The batch type means, for example, that a jig laminating process is performed on a plurality of laminated bodies, a joining process is performed on a plurality of laminated bodies for which the jig laminating process has been completed, and a plurality of laminating processes have been completed. It is a method of performing a jig detaching process on the body. On the other hand, the continuous method is a method in which, for example, the jig laminating step S1 to the jig removing step S3 are continuously performed for each laminated body B. Further, the system 100 that implements the continuous system includes a laminating device 11 that implements the jig laminating step S1, a joining device 12 that implements the joining step S2, and a detaching device 13 that implements the jig detaching step S3. Further, this system 100 conveys a plurality of pressurizing jigs 1 for holding the laminated body B, and continuously introduces the conveying unit 14 into the jig laminating step S1, the joining process S2, and the jig removing step S3. I have.

In the jig laminating step S1, the laminated body B is installed on the pressurizing jig 1. Specifically, in the jig laminating step S1, the laminated body B (unbonded laminated body) before joining, in which printing of the brazing material is completed, is supplied to the laminating device 11 by the transport unit 14. The laminating device 11 places the unjoined laminated body B on the base plate 2 of the pressurizing jig 1, installs the cover plate 3 and the spring washer 4 on the unjoined laminated body B, and installs the cover plate 3 and the spring washer 4. A pressure plate 5 is installed on the pressure plate 5. The pressure plate 5 is pushed down so as to compress the spring washer 4 and is held in place by the pressure structure 6. The spring washer 4 compressed by the pressure plate 5 pressurizes the cover plate 3, and the unjoined laminate B is pressed through the cover plate 3 and held in a predetermined position.

In the joining step S2, the unjoined laminated body B is joined in the nitrogen continuous furnace 50. Specifically, the continuous nitrogen furnace 50 includes a chamber 51 capable of forming a nitrogen atmosphere, and a heating section 52 provided in the chamber 51. The transport unit 14 introduces the pressurizing jig 1 holding the unjoined laminated body B into the chamber 51 of the nitrogen continuous furnace 50. In the chamber 51, the temperature of the laminated body B is raised to a predetermined temperature (bonding temperature) or higher at which the laminated body B can be bonded, and a predetermined time (bonding time) is required so that more appropriate bonding is possible. Only the junction temperature needs to be maintained.

In the jig release step S3, the pressurization of the pressurizing jig 1 on the laminated body B for which the joining is completed is released, and the laminated body B is removed from the pressurizing jig 1. The release device 13 releases the locked state of the pressure plate 5 by the pressure structure 6 of the pressure jig 1 and restores the spring washer 4. Due to the restoration of the spring washer 4, the laminated body B becomes removable (removable) from the base plate 2 and the cover plate 3, and the detaching device 13 removes the laminated body B from the pressure jig 1 and conveys it to the next process. do.

Next, the operation and effect of the pressurizing jig 1 according to the present embodiment will be described. For example, when a coil spring is used, since the coil spring has a plurality of turns, it has an overlapping portion, and the overlapping portions may interfere with each other to reduce durability. On the other hand, in the pressurizing jig 1 according to the present embodiment, the laminated body B is pressurized by a spring washer 4 (compression spring) that is spirally wound without overlapping and has both ends separated. It has no overlapping parts. Therefore, even if the laminated body B is held in a pressurized state by the compression of the spring washer 4, or is used while being repeatedly compressed and released, the durability is easily maintained and the laminate B is resistant to deterioration over time.

Further, since the spring washer 4 forms a flat ring shape in a compressed state, it is excellent in stability in a state where the laminated body B is pressed and held, and receives an unbalanced pressing force in an unstable state. It is difficult and advantageous for improving durability.

Further, in the present embodiment, a plurality of spring washers 4 are arranged on the cover plate 3, and it is easy to uniformly press the laminated body B through the cover plate 3.

Further, the plurality of spring washers 4 are arranged along the outer edge 3x of the cover plate 3, and it is easy to uniformly press the laminated body B via the cover plate 3.

Further, since the plurality of spring washers 4 are arranged at equal intervals, it is easy to uniformly press the laminated body B via the cover plate 3.

Further, the plurality of spring washers 4 are arranged so that the separation region 4x faces the outer edge 3x of the cover plate 3, so that the portion of the cover plate 3 along the outer edge 3x can be easily suppressed, and the cover plate 3 can be pressed. It is easy to uniformly press the laminated body B through the structure B.

Further, the pressure structure 6 is attached to a plurality of columns 8 which are erected on the pressure plate 5 and the base plate 2 and are arranged to face each other with the cover plate 3 interposed therebetween, and are attached to the support columns 8 and abut against the pressure plate 5. It may be provided with a locking claw 9 for locking the pressure plate 5. The pressure plate 5 is held in place by the locking claws 9, and as a result, the spring washer 4 can be compressed to pressurize the laminated body B.

Further, the pressure plate 5 is formed with a strut through hole 5b through which the strut 8 penetrates, and the strut 8 is formed with an engagement hole 8a through which the locking claw 9 penetrates. Penetrates the engagement hole 8a and abuts on the upper surface of the pressure plate 5 to lock the pressure plate 5. By penetrating the locking claw 9 through the engagement hole 8a and bringing it into contact with the pressure plate 5, the pressure plate 5 is held in place and the spring washer 4 can be compressed. On the other hand, the spring washer 4 can be easily released by pulling out the locking claw 9 from the engaging hole 8a and detaching it from the pressure plate 5.

Although the pressurizing device has been described above based on each embodiment, the present invention is not limited to these embodiments. For example, a single compression spring may be arranged on the cover portion instead of a plurality of compression springs.

The object is not limited to the laminate used for the semiconductor substrate or the like, and may be another object, for example, a joint in which a heat sink and a ceramic substrate are laminated.

1 ... Pressurizing jig, 2 ... Base plate, 3 ... Cover plate, 3x ... Outer edge, 4 ... Spring washer, 4b ... Upper end, 4b ... Lower end, 4x ... Separation area, 5 ... Pressurizing plate, 5b ... Strut penetration Hole, 6 ... Pressurized structure, 8 ... Strut portion (strut), 9 ... Locking claw (locking portion), 8a ... Engagement hole.

Claims (8)

A pressurizing device that pressurizes and holds an object.
The base on which the object is placed and
A cover portion that is arranged to face the base portion and holds the object between the base portion and the cover portion.
A compression spring arranged on the cover portion and
A pressurizing structure for compressing the compression spring by a pressurizing portion arranged on the compression spring to pressurize the object is provided.
The compression spring is a pressurizing device that is spirally wound without overlapping and has both ends separated from each other. The pressurizing device according to claim 1, wherein the compression spring is a spring washer. The pressurizing device according to claim 1, wherein a plurality of compression springs are arranged on the cover portion. The pressurizing device according to claim 3, wherein the plurality of compression springs are arranged along the outer edge of the cover portion. The pressurizing device according to claim 4, wherein the plurality of compression springs are arranged at equal intervals. A separation region is formed between both ends of the compression spring.
The pressurizing device according to claim 4 or 5, wherein the plurality of compression springs are arranged so that the separation region faces the outer edge of the cover portion. The pressurizing structure is attached to the pressurizing portion, a plurality of strut portions which are erected on the base portion and are arranged to face each other with the cover portion interposed therebetween, and are in contact with the pressurizing portion. The pressurizing device according to any one of claims 1 to 6, further comprising a locking portion for locking the pressurizing portion. The pressurizing portion is formed with a strut through hole through which the strut portion penetrates.
An engaging hole through which the locking portion penetrates is formed in the strut portion.
7. The seventh aspect of the present invention, wherein the locking portion penetrates the engaging hole and abuts on the surface of the pressurizing portion on the side opposite to the side that abuts on the compression spring to lock the pressurizing portion. Pressurizing device.

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