JP2021177160A - Vertical type test device and sheet-like probe thereof - Google Patents

Abstract

To provide a vertical type test device, and a sheet-like probe thereof.SOLUTION: A sheet-like probe includes a sheet body, a first contact part, an advancing/retreating part and a second contact part. The sheet body has a predetermined length in the longitudinal direction and a predetermined thickness in the thickness direction vertical to the longitudinal direction; a ratio value obtained by dividing the predetermined length by the predetermined thickness is 25-85; the first contact part is formed to extend from the upper edge of the sheet body. the advancing/retreating part is constituted so as to curve and extend toward a direction separated from the sheet body from the lower edge of the sheet body; especially, the advancing/retreating part has a recovery elastic force against an external force; and the second contact part is formed to extend from the end of the advancing/retreating part separated from the sheet body in the advancing/retreating part.SELECTED DRAWING: Figure 2

Description

The present invention relates to a probe head, particularly to a vertical test apparatus and a sheet-like probe thereof.

The existing vertical test apparatus includes a plurality of substrates and a plurality of conductive probes inserted through the plurality of substrates. In addition, each conductive probe is positioned by the misalignment of the two substrate elements provided on opposite sides of the partition. In that case, each conductive probe is deformed to form a curved portion. Thereby, it is possible to provide the amount of elastic movement required for performing the test with the conductive probe. Therefore, the conductive probe in the existing vertical test apparatus is not easy to embed, maintain, and replace, so that it is difficult to reduce the production cost and the maintenance cost.

An embodiment of the present invention provides a vertical test device and a sheet-like probe thereof that can effectively improve potential defects of the conductive probe of the existing vertical test device.

An embodiment of the present invention discloses a vertical test apparatus including a first substrate element and a second substrate element arranged so as to correspond to each other, and a plurality of sheet-shaped probes. Among them, the first substrate element includes two first substrates, and a plurality of first elongated holes are formed in each of the two first substrates. Each of the first elongated holes is parallel to the length direction. Among them, the plurality of the first elongated holes in the one first substrate have the plurality of the first lengths in the other first substrate along the height direction perpendicular to the length direction. It is arranged corresponding to each hole. Both ends of the plurality of sheet-shaped probes insert the first substrate element and the second substrate element, respectively, and each of the sheet-shaped probes has a sheet body, a first contact portion, an advancing / retreating portion, and the like. And a second contact part is included. The sheet body is inserted into and arranged in the two first elongated holes which are bored in each of the first substrates and arranged in correspondence with each other, and is sandwiched between the two first substrates. .. Among them, the sheet body has a predetermined length in the length direction, the sheet body has a predetermined thickness in the thickness direction perpendicular to the length direction and the height direction, and the predetermined thickness. The value of the ratio of the length divided by the thickness is 25 to 85. The first contact portion is formed by extending from the upper edge of the sheet body. Moreover, the first contact portion is exposed from the two first substrates. The advancing / retreating portion is formed by bending from the lower edge of the seat body toward the direction away from the seat body. Moreover, the extending distance that the advancing / retreating portion extends in the length direction is twice or less the predetermined length. Among them, the advancing / retreating portion is interposed between the first substrate element and the second substrate element. Further, the advancing / retreating portion has a recovery elastic force that resists an external force. The second contact portion is formed by extending along the height direction from the end portion of the advancing / retreating portion away from the seat body. Moreover, the second contact portion inserts the second substrate element.

An embodiment of the present invention further discloses a sheet-like probe including a sheet body, a first contact portion, an advancing / retreating portion, and a second contact portion. The sheet body has a predetermined length in the length direction, the sheet body has a predetermined thickness in the thickness direction perpendicular to the length direction, and the predetermined length is the thickness. The value of the divided ratio is 25-85. The first contact portion is formed by extending from the upper edge of the sheet body. The advancing / retreating portion is formed by bending from the lower edge of the seat body toward the direction away from the seat body. Moreover, the extending distance of the advancing / retreating portion along the length direction is twice or less the predetermined length. Above all, the advancing / retreating portion has a recovery elastic force that resists an external force. The second contact portion is formed by extending along the height direction from the end portion of the advancing / retreating portion away from the seat body.

Based on the above, the vertical test apparatus and the sheet-shaped probe thereof disclosed in the embodiment of the present invention are positioned on the first substrate element by the sheet body. It is possible to provide the amount of elastic movement required for testing the sheet-shaped probe without relying on the displacement of the substrate element of 2. Therefore, the insertion and maintenance of the sheet-shaped probe by the vertical test apparatus can be facilitated, and the manufacturing cost and the maintenance cost can be reduced.

It is a perspective schematic diagram which shows the vertical type test apparatus of embodiment which concerns on this invention. It is a perspective schematic diagram which shows the sheet-like probe of the embodiment which concerns on this invention. It is sectional drawing which shows the vertical type test apparatus of embodiment which concerns on this invention. FIG. 3 is a schematic perspective view showing another embodiment of the sheet-shaped probe in FIG. 2. FIG. 5 is a schematic perspective view showing still another embodiment of the sheet-shaped probe in FIG. 4. It is sectional drawing which shows the vertical type test apparatus of 2nd Embodiment which concerns on this invention. It is a lower surface schematic diagram of the vertical type test apparatus in FIG. It is a schematic diagram which shows the embedding of the probe by the vertical type test apparatus in FIG. It is a perspective schematic diagram which shows the vertical type test apparatus of 3rd Embodiment which concerns on this invention. It is a perspective schematic diagram which shows the vertical type test apparatus of 4th Embodiment which concerns on this invention. It is a lower surface schematic diagram which shows the vertical type test apparatus in FIG.

[First Embodiment]
See FIGS. 1-5. 1 to 5 are the first embodiment of the present invention. The vertical test apparatus 1000 disclosed in the present embodiment has an adapter plate 200 (space) that abuts the probe head 100 and one side of the probe head 100 (for example, the upper side of the probe head 100 in FIG. 1). Includes "transformer". The other side of the probe head 100 (lower side of the probe head 100 in FIG. 1) is for abutting a test object (device semiconductor test, DUT), and although not shown, the test object is not shown. For example, a semiconductor wafer can be mentioned.

In order to make the present embodiment easy to understand and to show each element configuration and the connection relationship of the vertical test apparatus 1000 for convenience, only the local structure of the vertical test apparatus 1000 is shown in the drawings, but the present invention is an example of the drawings. I would like to explain that you are not limited to. Hereinafter, each element configuration of the probe head 100 and its connection relationship will be described.

The probe head 100 includes a first substrate element 1, a second substrate element 2 arranged at intervals from the first substrate element 1, the first substrate element 1, and the second substrate. A plurality of gaskets 3 located between the elements 2 and a partition 4 sandwiched between the first substrate element 1 and the second substrate element 2 by the plurality of gaskets 3, and both ends. Includes a plurality of sheet-like probes 5 through which the first substrate element 1 and the second substrate element 2 are inserted, respectively.

In the present embodiment, the first substrate element 1 and the second substrate element 2 are arranged so as to correspond to each other, and the probe head 100 includes the first substrate element 1 and the second substrate element. First, I would like to explain that it does not include any board elements other than 2. Further, in the present embodiment, the sheet-shaped probe 5 will be described together with the above-mentioned elements (for example, the first substrate element 1 and the second substrate element 2). , May be combined with another element or used independently (eg, sold).

Among them, the first substrate element 1 includes two first substrates 11 and a heightened plate 12 sandwiched between the two first substrates 11. A plurality of first elongated holes 111 are formed in each of the two first elongated substrates 11, and each of the first elongated holes 111 (extending direction) is parallel to the length direction L. Among them, the plurality of the first elongated holes 111 in the one first substrate 11 are a plurality of the plurality of the first elongated holes 111 in the other first substrate 11 along the height direction H perpendicular to the length direction L. It is arranged so as to correspond to the first elongated hole 111. In the present embodiment, any one of the first elongated holes 111 is formed in a rectangular shape, but the present invention is not limited to this example.

The heightened plate 12 may be formed in an annular shape. Further, the heightened plate 12 is configured to be sandwiched by a part of outer edges facing each other in the two first substrates 11. Thereby, the two first substrates 11 are arranged in parallel with each other at intervals, but the present invention is not limited to this example. For example, in another embodiment (not shown) according to the present invention, the heightening plate 12 is omitted, and protrusions are arranged on the outer edges of the two first substrates 11 facing each other, and the protrusions are formed. It may be configured to abut against each other.

In the present embodiment, the second substrate element 2 is formed as a single substrate, and a plurality of second perforations 21 are formed therein. Each of the plurality of the second perforations 21 is located directly below the plurality of the first oblong holes 111 (for example, in the present embodiment, each of the second perforations 21 is located directly below the corresponding first oblong holes 111. However, the present invention is not limited to this example). Moreover, the size of each of the first elongated holes 111 is larger than the size of the corresponding second perforation 21. In another embodiment (not shown) according to the present invention, the second substrate element 2 may include a plurality of substrates and a heightened plate taught between any two adjacent substrates.

The plurality of gaskets 3 are the surfaces of the first substrate element 1 and the second substrate element 2 adjacent to each other (for example, the lower surface of the first substrate 11 below in FIG. 3 and the second surface, respectively. It is arranged on the upper surface of the substrate element 2). Moreover, each of the plurality of gaskets 3 is arranged on a part of the corresponding outer edges of the first substrate element 1 and the second substrate element 2. Among them, any one of the gaskets 3 can be adjusted according to the needs of the user, and for example, the gasket 3 may be selectively removed.

Further, the partition 4 may be formed in a ring shape. The partition 4 is between the first substrate element 1 and the second substrate element 2 by a part of the opposite outer edges of the plurality of gaskets 3 (for example, the partition 4 is an edge of the probe head 100). (Placed according to the partition) is sandwiched. As a result, the first substrate element 1 and the second substrate element 2 are arranged in parallel with each other at intervals, but the present invention is not limited to this example. For example, in another embodiment (not shown) according to the present invention, the partition 4 is omitted, and the protrusions that abut each other are provided at the positions of the outer edges of the first substrate element 1 and the second substrate element 2. It may be configured to be placed. As a result, the partition 4 of the probe head 100 may be omitted or replaced with another element. Since the partition 4 is not strongly related to the improvement points of the present invention, the details of the partition 4 will be omitted here.

One end of the plurality of sheet-shaped probes 5 inserts the plurality of the first elongated holes 111 of the two first substrates 11 in the first substrate element 1, respectively, and the plurality of the sheets. The other end of the shape probe 5 inserts a plurality of second perforations 21 in the second substrate element 2, respectively. Furthermore, a part of each sheet-shaped probe 5 (for example, the following advancing / retreating portion 54) is located between the first substrate element 1 and the second substrate element 2. Among them, in the present embodiment, the sheet-shaped probe 5 has a conductive one-piece structure. Moreover, the sheet-shaped probe 5 may be manufactured by the microelectromechanical system (MEMS) technology, but the present invention is not limited to this example.

By the way, in FIG. 1 of the present embodiment, a plurality of the sheet-shaped probes 5 are arranged in a row along one edge of the probe head 100, but another not shown in the present embodiment has been described. In the portion, the plurality of sheet-shaped probes 5 may be arranged along at least two edges of the probe head 100, but may be further arranged along one edge of the probe head 100. The sheet probe 5 may also be arranged in at least two rows. That is, the arrangement mode of the plurality of sheet-shaped probes 5 in the probe head 100 can be adjusted according to actual needs, and is not limited to the example of the present embodiment.

Since the plurality of sheet-shaped probes 5 of the probe head 100 in the present embodiment are substantially the same, the following can be given as an example of one sheet-shaped probe 5, but the present invention is not limited to this example. For example, in another embodiment (not shown) according to the present invention, the plurality of sheet-shaped probes 5 in the probe head 100 may be formed in different structures. Further, for easy understanding, the sheet-shaped probe 5 will be described below with the sheet-shaped probe 5 in a situation where the probe head 100 is in the insertion position.

The sheet-shaped probe 5 includes a sheet body 51, a first contact portion 52 formed by extending from the upper edge of the sheet body 51, and an advancing / retreating portion 54 formed by extending from the lower edge of the sheet body 51. , A second contact portion 53 formed by extending from the end portion of the advancing / retreating portion 54. Specifically, the sheet body 51 is correspondingly inserted through the two first elongated holes 111, and the second contact portion 53 is correspondingly inserted through the second perforation 21. The advancing / retreating portion 54 connects the seat body 51 and the second contact portion 53. The first contact portion 52 is exposed on the surface of the first substrate element 1. Seen from another viewing angle, one end of the first contact portion 52 facing the first substrate element 1 according to the present embodiment (for example, the upper edge of the first contact portion 52 in FIG. 3) The sheet body 51, the advancing / retreating portion 54, and the second contact portion 53 are sequentially formed.

Further, each of the sheet main bodies 51 is arranged in the two first elongated holes 111 corresponding to each other in the different first substrate 11, and each of the sheet main bodies 51 is the two said first. It is sandwiched by the substrate 11 of 1. That is, the sheet body 51 is arranged in the two first elongated holes 111 corresponding to each other, and is fixed to the first substrate element 1. Therefore, the two first substrates 11 move relative to each other in parallel with each other to generate a frictional force on the sheet body 51. Thereby, the sheet-shaped probe 5 can be stably fixed. Therefore, when the probe head 100 is further moved or swiveled, the sheet-shaped probe 5 is less likely to fall off.

Further, the cross section of the seat body 51 perpendicular to the height direction H is substantially rectangular. The sheet body 51 has a predetermined length L51 in the length direction L, and the sheet body 51 has a predetermined thickness in the thickness direction D perpendicular to the length direction L and the height direction H. The value of the ratio of having D51 and dividing the length L51 by the thickness D51 is 25 to 85.

In the present embodiment, for example, as shown in FIGS. 1 to 3 or 4 to 5, the surface of the first contact portion 52 perpendicular to the thickness direction D is substantially T-shaped or L-shaped. Present. Moreover, the first contact portion 52 is exposed to the two first substrates 11, but the present invention is not limited to this example. For example, in another embodiment (not shown) according to the present invention, the first contact portion 52 may be formed in a rectangular shape. Further, the probe head 100 employs the plurality of sheet-shaped probes 5 shown in FIGS. 4 to 5 at the same time in the arrangement pattern of the plurality of sheet-shaped probes 5 shown in FIG. 1, and further employs the first contact portion. By arranging the 52s so as to be separated from each other, the distance between the two first contact portions 52 can be increased, and the spacing arrangement distance of the adapter plate 200 can be further changed. Difficulty can be reduced.

That is, the first contact portion 52 is configured close to one end of the sheet body 51, and the length of the first contact portion 52 in the length direction L is the length of the sheet body 51. Larger than L51, the first contact portion 52 may be located on the upper edge of the first substrate element 1 (eg, above the first substrate element 1 in FIG. 3). More specifically, the first contact portion 52 is locked to a surface of the first substrate element 1 away from the second substrate element 2, and is an upper end portion of the first contact portion 52. Is fixed to the adapter plate 200.

The advancing / retreating portion 54 is formed by bending from the lower edge of the seat body 51 in a direction away from the seat body 51. Among them, the advancing / retreating portion 54 is located between the first substrate element 1 and the second substrate element 2. That is, the advancing / retreating portion 54 is arranged in the space surrounded by the partition 4. Furthermore, the extending distance L54 in the length direction L of the advancing / retreating portion 54 is larger than the length L51. In the present embodiment, the extending distance L54 along the length direction L in the advancing / retreating portion 54 is preferably not more than twice the length L51, but the present invention is not limited thereto.

Among them, the advancing / retreating portion 54 has a curved portion 541, and the curved portion 541 of the advancing / retreating portion 54 has a recovery elastic force capable of resisting an external force, whereby the sheet-shaped probe 5 operates. Provide the required amount of movement in case. Among them, the cross section of the curved portion 541 perpendicular to the height direction H is substantially rectangular, and the radius of curvature of the curved portion 541 is the second contact from the sheet body 51. The invention is not limited to this example, although it may be configured to gradually increase towards part 53. For example, in another embodiment (not shown) according to the present invention, the curved portion 541 does not have to have an arc-shaped structure such as a wavy shape.

The second contact portion 53 is formed by extending along the height direction H from an end portion of the advancing / retreating portion 54 away from the seat body 51 (for example, the lower edge of the advancing / retreating portion 54 in FIG. 1). The cross section of the second contact portion 53 perpendicular to the height direction H is substantially rectangular. A part of the second contact portion 53 is correspondingly located in the second perforation 21, and another portion of the second contact portion 53 extends from the second perforation 21, that is, the figure. It is located below the second substrate element 2 in 3. The second contact portion 53 is used to detachably abut the test object.

By the way, since the first contact portion 52 and the second contact portion 53 of the sheet-shaped probe 5 are formed according to their respective uses, the first contact portion 52 and the second contact portion 52 are formed. There is no possibility of exchanging with the contact part 53 of. For example, the first contact portion 52 of the plurality of sheet-shaped probes 5 in the present embodiment is fixed to the adapter plate 200, while the second contact portion 53 of the plurality of sheet-shaped probes 5 is fixed to the adapter plate 200. , Used to detachably contact the test object. Therefore, it is said that the configurations of the second contact portion 53 and the first contact portion 52 have no motivation to replace each other.

Further, when the sheet-shaped probe 5 is inserted into the corresponding first elongated hole 111, each of the sheet-shaped probes 5 is sequentially said to have an embedding angle of less than 45 degrees with respect to the height direction H. It may be inserted into the substrate element 1 of 1 and the second substrate element 2. The sheet body 51 is fixed to the corresponding first elongated hole 111, a part of the second contact portion 53 is inserted into the second perforation 21, and the second contact portion 53 is formed. An end portion away from the first contact portion 52 projects from the surface of the second substrate element 2.

Specifically, the first contact portion 52, the advance / retreat portion 54, and the second contact portion 53 of the sheet-shaped probe 5 are all the length direction L and the height direction H of the sheet body 51. Although it is preferable to be arranged in a virtual space formed along the above, the present invention is not limited to this example.

When each of the second contact portions 53 abuts on the test object, each of the second contact portions 53 can be reliably connected to the test object by the elastic force of the curved portion 541 of the advance / retreat portion 54. .. As a result, the connection between the second contact portion 53 and the test object becomes more stable.

Based on the above, the sheet-shaped probe 5 in the vertical test apparatus 1000 is positioned on the first substrate element 1 by the sheet body 51, whereby the first substrate element 1 and the said. The advancing / retreating portion 54 can provide the amount of elastic movement required for testing with the sheet-shaped probe 5 without relying on the misalignment with the second substrate element 2, distinguishing it from existing configurations. The vertical test apparatus 1000 and the sheet probe 5 thereof can be further provided. Further, since the sheet-shaped probe 5 can be positioned without misalignment between the first substrate element 1 and the second substrate element 2, the length of the sheet-shaped probe 5 is effectively reduced. It can effectively enhance the efficacy of the test.

[Second Embodiment]
See FIGS. 6-8. 6 to 8 show a second embodiment of the present invention. Since the present embodiment is substantially the same as the first embodiment, the same points of the two embodiments are not repeated. The differences between the present embodiment and the first embodiment will be described below.

In each of the sheet-shaped probes 5 in the present embodiment, the advancing / retreating portion 54 is arranged in a projection area P on which the sheet body 51 is orthographically projected along the height direction H, whereby the sheet-shaped probes 5 are arranged. , The first substrate element 1 and the second substrate element 2 are sequentially inserted along the height direction H.

Specifically, in all of the first contact portion 52, the advance / retreat portion 54, and the second contact portion 53 of the sheet-shaped probe 5, the sheet body 51 has the length direction L and the height direction H. The present invention is not limited to this example, although it is preferably located in a virtual space extending along the above.

Based on the above, the sheet-shaped probe 5 in the vertical test apparatus 1000 is arranged in the projection area P on which the sheet body 51 is orthographically projected along the height direction H, similarly to the advance / retreat portion 54. You may. As a result, the sheet-shaped probe 5 can move directly up and down along the height direction H, so that the sheet-shaped probe 5 can be used for embedding efficiency and maintenance work of the probe of the sheet-shaped probe 5. There are merits.

[Third Embodiment]
See FIG. FIG. 9 shows a third embodiment of the present invention. Since the present embodiment is substantially the same as the first embodiment, the same points of the two embodiments are not repeated. The differences between the present embodiment and the first embodiment will be described below.

In this embodiment, the first substrate element 1 is arranged in two corresponding first elongated holes 111. A hozo 112 (with a substantially rectangular cross section) is formed in one of the first elongated holes 111 in the two first elongated holes 111, and the said in the other first elongated hole 111. The rectangle 112 is not formed, but the invention is not limited to this example. For example, in another embodiment (not shown) according to the present invention, one hozo 112 may be formed in each of the two corresponding first elongated holes 111, but the present invention is limited to these examples. Not done.

Hozo holes 511 are recessed in the surface of the sheet body 51 that is perpendicular to the thickness direction D in the portions of the sheet body 51 that are correspondingly arranged in the two first elongated holes 111. The hozo holes 511 are arranged so as to correspond to the hozo 112, and the hozo holes 511 penetrate to both sides of the sheet body 51, but the present invention is not limited to this example. For example, in another embodiment (not shown) according to the present invention, the hozo hole 511 may accommodate two hozo 112 at the same time, but the present invention is not limited to these examples.

Further, by moving the first substrate 11 on which the hozo 112 is formed in the thickness direction D, each of the hozo 112 corresponds to the hozo hole 511 of the sheet-shaped probe 5. By inserting the sheet body 51, the sheet body 51 can be more stably fixed to the first substrate element 1.

Based on the above, the sheet-shaped probe 5 in the vertical test apparatus 1000 further adds the sheet-shaped probe 5 by the hozo 112 in the first elongated hole 111 arranged correspondingly to the hozo hole 511. It is stably fixed to the first substrate element 1, whereby the sheet-shaped probe 5 can be prevented from falling off from the first substrate element 1.

[Fourth Embodiment]
See FIGS. 10 and 11. 10 and 11 are the fourth embodiments of the present invention. Since the present embodiment is substantially the same as the first embodiment, the same points of the two embodiments are not repeated. The differences between the present embodiment and the first embodiment will be described below.

In the present embodiment, the plurality of sheet-shaped probes 5 are inserted between the first substrate element 1 and the second substrate element 2, and the plurality of second contact portions 53 have the thickness. Arranged in a row along direction D. The plurality of seat bodies 51 are arranged at different positions on the opposite side of the second contact portion 53 from the row. Therefore, the plurality of sheet-shaped probes 5 in the vertical test apparatus 1000 can be combined with the first contact portion 52 with correspondingly different adapter plates 200 by the above-mentioned arrangement pattern, and further, the sheet. The applicability of the shape probe 5 can be enhanced. Further, as shown in FIG. 10, the probe head 100 effectively expands the distance between two adjacent first contact portions 52 in the arrangement pattern of the plurality of first contact portions 52. The distance between the adapter plates 200 can be further affected. For example, the probe head 100 shown in FIG. 10 only needs to be further connected to a circuit board, and can achieve an increase in electrical quality or a decrease in cost.

1000: Vertical test apparatus 100: Probe head 1: First substrate element 11: First substrate 111: First elongated hole 112: Hozo 12: Heightened plate 2: Second substrate element 21: Second Perforation 3: Gasket 4: Partition 5: Sheet probe 51: Sheet body 511: Hozo hole 52: First contact portion 53: Second contact portion 54: Advance / retreat portion 541: Curved portion 200: Adapter plate L: Length Direction H: Height direction D: Thickness direction P: Projection area L51: Length D51: Thickness L54: Extended distance

Claims (10)

A vertical test apparatus including a first substrate element and a second substrate arranged so as to correspond to each other, and a plurality of sheet-shaped probes.
The first substrate element includes two first substrates, and a plurality of first elongated holes are arranged in each of the two first substrates, and each of the first elongated holes is in the length direction. The plurality of the first elongated holes in one of the first substrates are parallel to the above, and the plurality of the first elongated holes in the first substrate are formed along the height direction perpendicular to the length direction of the first. Arranged correspondingly to the long hole,
Each of both ends of the plurality of sheet-shaped probes inserts the first substrate element and the second substrate element, and the sheet-shaped probe has a sheet body, a first contact portion, an advancing / retreating portion, and a second. Including the contact part of
Each of the sheet bodies belongs to the different first substrate and is inserted into the two elongated holes corresponding to each other, and each of the sheet bodies is sandwiched between the two first substrates. The sheet body has a predetermined length in the length direction, the sheet body has a predetermined thickness in the thickness direction perpendicular to the length direction and the height direction, and the predetermined length. The value of the ratio obtained by dividing the width by the predetermined thickness is 25 to 85.
The first contact portion is formed by extending from the upper edge of the sheet body, and the first contact portion is exposed to the two first substrates.
The advancing / retreating portion is formed by bending from the lower edge of the seat body toward a direction away from the seat body, and the extending distance of the advancing / retreating portion along the length direction is equal to or less than the predetermined length. The advancing / retreating portion is located between the first substrate element and the second substrate element, and the advancing / retreating portion has a recovery elastic force that resists an external force.
The second contact portion is formed by extending in the height direction from an end portion of the advancing / retreating portion distant from the sheet body, and the second contact portion inserts the second substrate element. A vertical test device characterized by In the portion of each of the sheet-shaped probes to be arranged in the two first elongated holes correspondingly, a hozo hole is recessed in the surface of the sheet body perpendicular to the thickness direction, so as to correspond to the hozo hole. By arranging hozos in at least one of the two first elongated holes in the first substrate element and moving the first substrate on which the hozos are arranged in the thickness direction. The vertical test apparatus according to claim 1, wherein each hozo is correspondingly inserted into the hozo hole in the sheet-shaped probe. In each of the sheet-shaped probes, the sheet body is formed by extending the sheet body along the length direction and the height direction in each of the first contact portion, the advance / retreat portion, and the second contact portion. The vertical test apparatus according to claim 1, which is located in a virtual space. In each of the sheet-shaped probes, the advancing / retreating portion has a curved portion, and the radius of curvature of the curved portion gradually increases from the sheet body according to the second contact portion, and the curved portion resists an external force. The vertical test apparatus according to claim 1, which has a recovery elastic force to be obtained. The extending distance of the advancing / retreating portion of each sheet-shaped probe in the length direction is larger than the predetermined length, and each sheet-shaped probe is less than 45 degrees with respect to the height direction. The first substrate element and the second substrate element are inserted at an embedding angle, the plurality of the second contact portions are arranged in a row along the thickness direction, and the plurality of the sheet bodies are misaligned. The vertical test apparatus according to claim 1, which is arranged on the opposite side with respect to the row of the second contact portions. In each of the sheet-shaped probes, the advancing / retreating portion is located in the projection area where the sheet body is orthographically projected toward the height direction, so that the sheet-shaped probes are sequentially projected along the height direction. The vertical test apparatus according to claim 1, which is inserted into the first substrate element and the second substrate element. In each of the sheet-shaped probes, the first contact portion is formed in a T-shape or an L-shape, and the first contact portion is an end of the first substrate element separated from the second substrate element. The vertical test apparatus according to claim 1, which is locked to a portion. The vertical test apparatus further includes an adapter plate, and any of the first contact portions of the sheet-shaped probe is fixed to the adapter plate, and the second contact portion of each sheet-shaped probe is removed. The vertical test apparatus according to claim 1, which is used to make possible contact with an object to be tested. The vertical test device further
A plurality of gaskets arranged on the surfaces of the first substrate element and the second substrate element adjacent to each other, respectively.
A partition sandwiched between the first substrate element and the second substrate element by the plurality of gaskets.
A heightened plate sandwiched between the two first substrates,
Including
The vertical test apparatus according to claim 1, wherein any one of the gaskets can be selectively removed from the vertical test apparatus. A sheet-like probe including a sheet body, a first contact portion, an advancing / retreating portion, and a second contact portion.
The sheet body has a predetermined length in the length direction, the sheet body has a predetermined thickness in the thickness direction perpendicular to the length direction, and the predetermined length is the predetermined thickness. The value of the ratio divided by is 25-85,
The first contact portion is formed by extending from the upper edge of the sheet body.
The advancing / retreating portion is formed by bending from the lower edge of the seat body toward a direction away from the seat body, and the extending distance of the advancing / retreating portion in the length direction is 2 of the predetermined length. It is less than double, and the advancing and retreating part has a recovery elastic force that can resist an external force.
The sheet-shaped probe is characterized in that the second contact portion is formed by extending along the height direction from an end portion of the advancing / retreating portion away from the sheet body.

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