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JP2021021932A5 - - Google Patents

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Publication number
JP2021021932A5
JP2021021932A5 JP2020070010A JP2020070010A JP2021021932A5 JP 2021021932 A5 JP2021021932 A5 JP 2021021932A5 JP 2020070010 A JP2020070010 A JP 2020070010A JP 2020070010 A JP2020070010 A JP 2020070010A JP 2021021932 A5 JP2021021932 A5 JP 2021021932A5
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Japan
Prior art keywords
opening
lens barrel
optical device
gas
blowing
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JP2020070010A
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Japanese (ja)
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JP7425661B2 (en
JP2021021932A (en
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Priority to KR1020200086534A priority Critical patent/KR20210012917A/en
Priority to CN202410773083.1A priority patent/CN118550164A/en
Priority to CN202010704311.1A priority patent/CN112286002B/en
Publication of JP2021021932A publication Critical patent/JP2021021932A/en
Publication of JP2021021932A5 publication Critical patent/JP2021021932A5/ja
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Claims (22)

光を通過させる開口が形成された鏡筒と、
前記開口の面積よりも大きい面積を有する表面を含み、前記表面が前記開口に面するように前記鏡筒に収容される光学部品と、
前記開口を取り囲むように配置され、前記表面に対して、前記鏡筒の外部の気体の清浄度よりも高い清浄度を有する気体を吹き付ける吹付部と、
を有することを特徴とする光学装置。
a lens barrel formed with an opening for passing light;
an optical component including a surface having an area larger than that of the opening, the optical component being accommodated in the lens barrel such that the surface faces the opening;
a blowing unit disposed so as to surround the opening and blowing a gas having a higher cleanliness than the gas outside the lens barrel onto the surface;
An optical device comprising:
前記吹付部は、前記表面に沿った方向において、前記開口の端部から離れて配置されていることを特徴とする請求項1に記載の光学装置。 2. The optical device according to claim 1, wherein the spray part is arranged away from the edge of the opening in the direction along the surface. 前記開口の端部から前記光学部品とは反対側の前記鏡筒の外部に向かって延在し、前記開口を囲う囲い部材を更に有することを特徴とする請求項1又は2に記載の光学装置。 3. The optical device according to claim 1, further comprising an enclosing member extending from the end of the aperture toward the outside of the lens barrel opposite to the optical component and surrounding the aperture. . 前記開口上における前記鏡筒の外部の気体の流量に基づいて、前記吹付部が前記表面に吹き付ける気体の流量を制御する制御部を更に有することを特徴とする請求項1乃至3のうちいずれか1項に記載の光学装置。 4. The apparatus further comprises a control section for controlling the flow rate of the gas that is blown onto the surface by the blowing section based on the flow rate of the gas outside the lens barrel on the opening. 2. The optical device according to item 1. 前記制御部は、前記開口上における前記鏡筒の外部の気体の流量の変化に応じて、前記吹付部が前記表面に吹き付ける気体の流量を変化させることを特徴とする請求項4に記載の光学装置。 5. The optical system according to claim 4, wherein the control section changes the flow rate of the gas that the spray section blows onto the surface according to a change in the flow rate of the gas outside the lens barrel on the opening. Device. 前記制御部は、
前記開口上における前記鏡筒の外部の気体の流量が増加する場合には、前記吹付部が前記表面に吹き付ける気体の流量を増加させ、
前記開口上における前記鏡筒の外部の気体の流量が減少する場合には、前記吹付部が前記表面に吹き付ける気体の流量を減少させることを特徴とする請求項5に記載の光学装置。
The control unit
when the flow rate of the gas outside the lens barrel on the opening increases, increasing the flow rate of the gas that the spray unit blows onto the surface;
6. The optical device according to claim 5, wherein when the flow rate of the gas outside the lens barrel on the opening decreases, the flow rate of the gas that is blown onto the surface by the blowing section is reduced.
前記吹付部を前記表面に沿った方向に移動させる第1移動部を更に有することを特徴とする請求項1乃至6のうちいずれか1項に記載の光学装置。 7. The optical device according to any one of claims 1 to 6, further comprising a first moving part that moves the spray part in a direction along the surface. 前記第1移動部は、前記開口上における前記鏡筒の外部の気体の流量に基づいて、前記吹付部を前記表面に沿った方向に移動させることを特徴とする請求項7に記載の光学装置。 8. The optical device according to claim 7, wherein the first moving section moves the blowing section in a direction along the surface based on a flow rate of gas outside the lens barrel above the opening. . 前記第1移動部は、前記開口上における前記鏡筒の外部の気体の流量の変化に応じて、前記開口の端部と前記吹付部との間の距離を変更するように、前記吹付部を前記表面に沿った方向に移動させることを特徴とする請求項8に記載の光学装置。 The first moving part moves the blowing part so as to change the distance between the end of the opening and the blowing part according to a change in the flow rate of the gas outside the lens barrel on the opening. 9. The optical device according to claim 8, wherein the optical device is moved in a direction along the surface. 前記第1移動部は、
前記開口上における前記鏡筒の外部の気体の流量が増加する場合には、前記開口の端部と前記吹付部との間の距離が長くなるように、前記吹付部を前記表面に沿った方向に移動させ、
前記開口上における前記鏡筒の外部の気体の流量が減少する場合には、前記開口の端部と前記吹付部との間の距離が短くなるように、前記吹付部を前記表面に沿った方向に移動させることを特徴とする請求項9に記載の光学装置。
The first moving part is
When the flow rate of the gas outside the lens barrel on the opening increases, the blowing portion is moved along the surface so that the distance between the end of the opening and the blowing portion increases. to the
When the flow rate of the gas outside the lens barrel on the opening decreases, the blowing portion is moved along the surface so that the distance between the end of the opening and the blowing portion is shortened. 10. The optical device according to claim 9, wherein the optical device is moved to .
前記吹付部を前記表面に沿った方向に直交する方向に移動させる第2移動部を更に有することを特徴とする請求項1乃至10のうちいずれか1項に記載の光学装置。 11. The optical device according to any one of claims 1 to 10, further comprising a second moving part that moves the spray part in a direction orthogonal to the direction along the surface. 前記第2移動部は、前記表面に沿った方向に直交する方向への前記光学部品の移動に応じて、前記表面と前記吹付部との間の距離が一定となるように、前記吹付部を前記表面に沿った方向に直交する方向に移動させることを特徴とする請求項11に記載の光学装置。 The second moving part moves the spray part so that the distance between the surface and the spray part is constant according to the movement of the optical component in a direction perpendicular to the direction along the surface. 12. The optical device according to claim 11, wherein the movement is in a direction perpendicular to the direction along the surface. 前記開口は、U字状の開口形状を有することを特徴とする請求項1乃至12のうちいずれか1項に記載の光学装置。 13. The optical device according to any one of claims 1 to 12, wherein the aperture has a U-shaped aperture shape. 前記吹付部が前記表面に吹き付ける気体は、フィルタで濾過された空気及び不活性ガスの少なくとも一方を含むことを特徴とする請求項1乃至13のうちいずれか1項に記載の光学装置。 14. The optical device according to any one of claims 1 to 13, wherein the gas that the blowing unit blows onto the surface includes at least one of filtered air and an inert gas. 前記吹付部は、前記鏡筒に保持されていることを特徴とする請求項1乃至14のうちいずれか1項に記載の光学装置。 15. The optical device according to any one of claims 1 to 14, wherein the spraying portion is held by the lens barrel. 前記鏡筒に設けられ、前記光学部品を保持する保持部材を更に有し、
前記吹付部は、前記保持部材に保持されていることを特徴とする請求項1乃至14のうちいずれか1項に記載の光学装置。
further comprising a holding member provided on the lens barrel and holding the optical component;
15. The optical device according to any one of claims 1 to 14, wherein the spraying portion is held by the holding member.
前記光学部品は、前記開口とは反対側に密閉空間を形成するように、前記鏡筒に取り付けられていることを特徴とする請求項1乃至15のうちいずれか1項に記載の光学装置。 16. The optical device according to any one of claims 1 to 15, wherein the optical component is attached to the lens barrel so as to form a sealed space on the side opposite to the aperture. 光を通過させる開口が形成された鏡筒と、
前記開口の面積よりも大きい面積を有する表面を含み、前記表面が前記開口に面するように前記鏡筒に収容される光学部品と、
前記鏡筒に設けられた遮蔽部とを備えた光学装置であって、
前記鏡筒の外部の気体の清浄度よりも高い清浄度を有する気体が、前記遮蔽部と前記光学部品との間の空間を通過して前記開口に向かって流れるように、前記遮蔽部が設けられていることを特徴とする光学装置。
a lens barrel formed with an opening for passing light;
an optical component including a surface having an area larger than that of the opening, the optical component being accommodated in the lens barrel such that the surface faces the opening;
An optical device comprising a shielding portion provided in the lens barrel,
The shielding part is provided so that the gas having a higher cleanliness level than the gas outside the lens barrel flows toward the opening through the space between the shielding part and the optical component. An optical device characterized by comprising:
前記光学部品と前記遮蔽部との間隔をXとし、前記光学部品と前記開口との間隔をYとしたとき、
1/100<X/Y<1/5
を満たすことを特徴とする請求項18に記載の光学装置。
When the distance between the optical component and the shielding portion is X, and the distance between the optical component and the opening is Y,
1/100<X/Y<1/5
19. The optical device according to claim 18, wherein:
マスクを介して基板を露光する露光装置であって、
前記マスクを保持して移動するステージと、
前記マスクのパターンを前記基板に投影する投影光学系と、を有し、
前記投影光学系は、
前記マスクから射出されて前記投影光学系に入射する光を通過させる開口が形成された鏡筒と、
前記開口の面積よりも大きい面積を有する表面を含み、前記表面が前記開口に面するように前記鏡筒に収容される光学部品と、
前記開口を取り囲むように配置され、前記表面に対して、前記鏡筒の外部の気体の清浄度よりも高い清浄度を有する気体を吹き付ける吹付部と、
を含むことを特徴とする露光装置。
An exposure apparatus that exposes a substrate through a mask,
a stage that holds and moves the mask;
a projection optical system for projecting the pattern of the mask onto the substrate;
The projection optical system is
a lens barrel having an aperture through which light emitted from the mask and incident on the projection optical system passes;
an optical component including a surface having an area larger than that of the opening, the optical component being accommodated in the lens barrel such that the surface faces the opening;
a blowing unit disposed so as to surround the opening and blowing a gas having a higher cleanliness than the gas outside the lens barrel onto the surface;
An exposure apparatus comprising:
マスクを介して基板を露光する露光装置であって、
前記マスクを保持して移動するステージと、
前記マスクのパターンを前記基板に投影する投影光学系と、を有し、
前記投影光学系は、
前記マスクから射出された前記投影光学系に入射する光を通過させる開口が形成された鏡筒と、
前記開口の面積よりも大きい面積を有する表面を含み、前記表面が前記開口に面するように前記鏡筒に収容される光学部品と、
前記鏡筒に設けられた遮蔽部と、を含み、
前記鏡筒の外部の気体の清浄度よりも高い清浄度を有する気体が、前記遮蔽部と前記光学部品との間の空間を通過して前記開口に向かって流れるように、前記遮蔽部が設けられていることを特徴とする露光装置。
An exposure apparatus that exposes a substrate through a mask,
a stage that holds and moves the mask;
a projection optical system for projecting the pattern of the mask onto the substrate;
The projection optical system is
a lens barrel having an aperture through which light emitted from the mask and incident on the projection optical system passes;
an optical component including a surface having an area larger than that of the opening, the optical component being accommodated in the lens barrel such that the surface faces the opening;
and a shielding portion provided on the lens barrel,
The shielding part is provided so that the gas having a higher cleanliness level than the gas outside the lens barrel flows toward the opening through the space between the shielding part and the optical component. An exposure apparatus characterized by comprising:
請求項20又は21に記載の露光装置を用いて基板を露光する工程と、
露光した前記基板を現像する工程と、
現像された前記基板から物品を製造する工程と、
を有することを特徴とする物品の製造方法。
exposing a substrate using the exposure apparatus according to claim 20 or 21;
developing the exposed substrate;
producing an article from the developed substrate;
A method for manufacturing an article, comprising:
JP2020070010A 2019-07-25 2020-04-08 Optical device, exposure device, and article manufacturing method Active JP7425661B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020200086534A KR20210012917A (en) 2019-07-25 2020-07-14 Optical apparatus, exposure apparatus, and method of manufacturing article
CN202410773083.1A CN118550164A (en) 2019-07-25 2020-07-21 Optical device, exposure device, and article manufacturing method
CN202010704311.1A CN112286002B (en) 2019-07-25 2020-07-21 Optical device, exposure device, and article manufacturing method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019137081 2019-07-25
JP2019137081 2019-07-25

Publications (3)

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JP2021021932A JP2021021932A (en) 2021-02-18
JP2021021932A5 true JP2021021932A5 (en) 2023-04-03
JP7425661B2 JP7425661B2 (en) 2024-01-31

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Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08181058A (en) * 1994-12-27 1996-07-12 Sony Corp Projection and exposure method and projection aligner used for it
WO1998057213A1 (en) * 1997-06-10 1998-12-17 Nikon Corporation Optical device, method of cleaning the same, projection aligner, and method of producing the same
JP3531914B2 (en) * 2000-04-14 2004-05-31 キヤノン株式会社 Optical apparatus, exposure apparatus, and device manufacturing method
JP2002328298A (en) * 2001-05-01 2002-11-15 Nikon Corp Optical device, exposure device and method for manufacturing them
JP3977377B2 (en) * 2005-03-04 2007-09-19 キヤノン株式会社 Exposure apparatus and device manufacturing method
JP2006339346A (en) * 2005-06-01 2006-12-14 Canon Inc Exposure device
JP2010230751A (en) * 2009-03-26 2010-10-14 Panasonic Corp Imaging apparatus

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