JP2020151805A - Surface-coated cutting tool with hard coating layer exhibiting excellent wear resistance - Google Patents
Surface-coated cutting tool with hard coating layer exhibiting excellent wear resistance Download PDFInfo
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- 239000010410 layer Substances 0.000 claims description 108
- 238000005520 cutting process Methods 0.000 claims description 46
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 31
- 239000011247 coating layer Substances 0.000 claims description 20
- 239000002245 particle Substances 0.000 claims description 17
- 239000013078 crystal Substances 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 13
- 238000000576 coating method Methods 0.000 claims description 13
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 7
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 4
- 229910002090 carbon oxide Inorganic materials 0.000 claims description 3
- 238000005755 formation reaction Methods 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 10
- 239000010935 stainless steel Substances 0.000 description 10
- 229910001220 stainless steel Inorganic materials 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 239000000203 mixture Substances 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 238000005299 abrasion Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- 230000006378 damage Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 238000000441 X-ray spectroscopy Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
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- Cutting Tools, Boring Holders, And Turrets (AREA)
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Abstract
Description
この発明は、ステンレス鋼等を、高熱発生を伴い、刃先に高負荷が作用する高速連続切削加工した場合に、硬質被覆層が優れた耐チッピング性を備え、長期の使用にわって優れた耐摩耗性を発揮する表面被覆切削工具（以下、被覆工具ということがある）に関するものである。 According to the present invention, the hard coating layer has excellent chipping resistance when high-speed continuous cutting of stainless steel or the like is accompanied by high heat generation and a high load acts on the cutting edge, and is excellent in long-term use. It relates to a surface-coated cutting tool (hereinafter, may be referred to as a coated tool) that exhibits abrasion resistance.
切削工具の切削性能の改善を目的として、従来、炭化タングステン（以下、ＷＣで示す）基超硬合金等で構成された工具基体（以下、これらを総称して工具基体ということがある）の表面に、硬質被覆層を形成した被覆工具があり、これらは、優れた耐摩耗性を発揮することが知られている。
前記従来の硬質被覆層を形成した被覆工具は、比較的耐摩耗性に優れるものの、高速切削条件で用いた場合に、高温強度が不足し、チッピング等の異常損耗を発生しやすいことから、硬質被覆層の高温強度の改善について、工具基体からの元素の拡散によりＴｉＮやＴｉＣＮ皮膜に他の元素を添加する提案がなされている。
For the purpose of improving the cutting performance of cutting tools, the surface of a tool substrate (hereinafter, these may be collectively referred to as a tool substrate) made of tungsten carbide (hereinafter referred to as WC) -based cemented carbide or the like. There are coating tools in which a hard coating layer is formed, and these are known to exhibit excellent wear resistance.
Although the coating tool on which the conventional hard coating layer is formed has relatively excellent wear resistance, it is hard because it lacks high-temperature strength and is prone to abnormal wear such as chipping when used under high-speed cutting conditions. Regarding the improvement of the high temperature strength of the coating layer, it has been proposed to add other elements to the TiN or TiCN film by diffusing the elements from the tool substrate.
例えば、特許文献１には、工具基体表面より２層以上被覆し、１層目の厚さを１．０〜５μｍ、２層目以降の厚さを０．５〜１０μｍとする被覆工具において、前記工具基体表面より被覆外層に向かって前記工具基体中の主成分であるＷ、Ｃｏの拡散がｘ線強度比に於いて、Ｗ強度比：０≦Ｗ／（４ａ＋５ａ＋６ａ＋Ｆｅ族）≦０．０４、Ｃｏ強度比：０≦Ｃｏ／（４ａ＋５ａ＋６ａ＋Ｆｅ族）≦０．０２の範囲内であることを特徴とする被覆工具が記載されている。 For example, Patent Document 1 describes a covering tool that covers two or more layers from the surface of a tool substrate and has a thickness of the first layer of 1.0 to 5 μm and a thickness of the second and subsequent layers of 0.5 to 10 μm. The diffusion of W and Co, which are the main components in the tool substrate, from the surface of the tool substrate toward the outer layer of the coating is the W intensity ratio: 0 ≦ W / (4a + 5a + 6a + Fe group) ≦ 0.04 in the x-ray intensity ratio. A covering tool characterized in that the Co strength ratio is within the range of 0 ≦ Co / (4a + 5a + 6a + Fe group) ≦ 0.02 is described.
また、例えば、特許文献２には、工具基体と該工具基体上に形成された１または２以上の層を有する被覆層とを含み、前記層のうち前記工具基体と接する層は、ＴｉＮ層であり、前記ＴｉＮ層は、ＴｉＮとともにＣを含み、前記Ｃは、前記ＴｉＮ層の厚み方向に濃度分布を有しており、前記濃度分布は、前記Ｃの濃度が前記工具基体側から前記被覆層の表面側にかけて減少する領域を含み、前記濃度分布において、前記Ｃの最大濃度と最小濃度の差は、１０原子％以上である、被覆工具が記載されている。 Further, for example, Patent Document 2 includes a tool substrate and a coating layer having one or more layers formed on the tool substrate, and the layer in contact with the tool substrate is a TiN layer. The TiN layer contains C together with TiN, and the C has a concentration distribution in the thickness direction of the TiN layer. In the concentration distribution, the concentration of C is from the tool substrate side to the coating layer. A covering tool is described in which the difference between the maximum concentration and the minimum concentration of C is 10 atomic% or more in the concentration distribution, which includes a region that decreases toward the surface side of the above.
近年の切削加工では、ステンレス鋼等の難切削材に対しても省力化および省エネ化の要求は強く、被覆工具に対する加工時の負荷が一段と高まっており、被覆工具には、より一層、耐チッピング性、耐欠損性、耐剥離性等の耐異常損傷性が求められるとともに、長期の使用にわって優れた耐摩耗性が求められている。 In recent cutting, there is a strong demand for labor saving and energy saving even for difficult-to-cut materials such as stainless steel, and the load during machining on the covering tool is increasing, and the covering tool is even more resistant to chipping. Abnormal damage resistance such as resistance, fracture resistance, and peel resistance is required, and excellent wear resistance is required for long-term use.
しかし、前記特許文献１に記載された被覆工具は、ステンレス鋼等の難切削材の高速連続切削加工に供した場合には、早期に寿命に至っていた。 However, the covering tool described in Patent Document 1 has reached the end of its life at an early stage when it is subjected to high-speed continuous cutting of a difficult-to-cut material such as stainless steel.
また、前記特許文献２に記載された被覆工具も、ステンレス鋼等の難切削材の高速連続切削加工に供した場合、満足する耐チッピング性、耐摩耗性を有していなかった。 Further, the covering tool described in Patent Document 2 also does not have satisfactory chipping resistance and abrasion resistance when subjected to high-speed continuous cutting of difficult-to-cut materials such as stainless steel.
そこで、本発明は、ステンレス鋼等の高速連続切削加工に供した場合であっても、その被覆層が優れた靭性を備え、長期の使用にわたって優れた耐チッピング性、耐摩耗性を発揮する被覆工具を提供することを目的とする。 Therefore, according to the present invention, the coating layer has excellent toughness even when subjected to high-speed continuous cutting of stainless steel or the like, and exhibits excellent chipping resistance and abrasion resistance over a long period of use. The purpose is to provide tools.
本発明者は、前記特許文献１〜２に記載された被覆工具がステンレス鋼等の高速断続切削加工に供した場合に、早期に寿命に至るのかを鋭意検討したところ、工具基体と被覆層との間の密着性が十分でないことを発見し、工具基体と被覆層の密着性は、工具基体に接する被覆層部分の特定部分にのみ所定量のＣを拡散させることによりなし得るという新規な知見を得た。 The present inventor diligently examined whether the covering tool described in Patent Documents 1 and 2 would reach the end of its life at an early stage when it was subjected to high-speed intermittent cutting of stainless steel or the like. It was discovered that the adhesion between the tools was not sufficient, and a new finding that the adhesion between the tool substrate and the coating layer could be achieved by diffusing a predetermined amount of C only in a specific portion of the coating layer portion in contact with the tool substrate. Got
本発明は、この知見に基づくものであって、
「（１）工具基体の表面に、第１層とその上部に第２層を含む複数の層が積層された硬質被覆層を設けた表面被覆切削工具であって、
前記硬質被覆層のうち、前記工具基材と接する前記第１層はＴｉＮ層であり、前記工具基体と前記ＴｉＮ層との界面から０．１μｍの範囲内の界面領域における前記ＴｉＮ層を構成するＴｉＮ結晶粒子の平均粒径が３０ｎｍ以下であり、該界面領域には５．０〜３５．０原子％のＣを含むことを特徴とする、表面被覆切削工具。
（２）前記界面領域には、工具基体との界面から０．１μｍの範囲内で、前記ＴｉＮ結晶粒子の粒界に、３．０〜１５．０原子％のＣｏ、３．０〜１５．０原子％のＷの少なくとも一方を含むことを特徴とする、前記（１）に記載の表面被覆切削工具。
（３）前記界面領域では、前記ＴｉＮ結晶粒の粒界におけるＣの含有割合がその粒内における含有割合よりも３．０〜１０．０原子％高いことを特徴とする前記（１）または（２）に記載の表面被覆切削工具。
（４）前記ＴｉＮ層は、０．１〜１．０μｍの平均層厚であることを特徴とする前記（１）〜（３）のいずれかに記載の表面被覆切削工具。
（５）前記第２層として、周期表の４〜６族元素およびＡｌからなる群より選ばれた１または２以上の元素からなる炭化物層、窒化物層、酸化物層、炭窒化物層、炭酸化物層、炭窒酸化物層のいずれか１層または２以上の層が、１．０〜２０．０μｍの合計層厚で形成されていることを特徴とする前記（１）〜（４）のいずれかに記載の表面被覆切削工具。」
である。
The present invention is based on this finding.
"(1) A surface-coated cutting tool provided with a hard coating layer in which a first layer and a plurality of layers including a second layer are laminated on the surface of a tool substrate.
Among the hard coating layers, the first layer in contact with the tool substrate is a TiN layer, which constitutes the TiN layer in an interface region within 0.1 μm from the interface between the tool substrate and the TiN layer. A surface coating cutting tool characterized in that the average particle size of TiN crystal particles is 30 nm or less, and the interface region contains 5.0 to 35.0 atomic% of C.
(2) In the interface region, within a range of 0.1 μm from the interface with the tool substrate, at the grain boundaries of the TiN crystal particles, Co, 3.0 to 15.0 atomic%, 3.0 to 15. The surface coating cutting tool according to (1) above, which contains at least one of 0 atomic% W.
(3) In the interface region, the content ratio of C at the grain boundary of the TiN crystal grains is 3.0 to 10.0 atomic% higher than the content ratio in the grains. The surface coating cutting tool according to 2).
(4) The surface coating cutting tool according to any one of (1) to (3) above, wherein the TiN layer has an average layer thickness of 0.1 to 1.0 μm.
(5) As the second layer, a carbide layer, a nitride layer, an oxide layer, a carbonitride layer, which is composed of one or more elements selected from the group consisting of Group 4 to 6 elements and Al in the periodic table. The above (1) to (4), wherein any one layer or two or more layers of the carbon oxide layer and the carbonitride oxide layer are formed with a total layer thickness of 1.0 to 20.0 μm. The surface coating cutting tool described in any of. "
Is.
本発明は、ステンレス鋼等の高速連続切削加工に供した場合であっても、その被覆層が優れた靭性を備え、長期の使用にわたって優れた耐チッピング性、耐摩耗性を発揮する。 According to the present invention, the coating layer has excellent toughness even when subjected to high-speed continuous cutting of stainless steel or the like, and exhibits excellent chipping resistance and abrasion resistance over a long period of use.
以下、本発明について詳述する。本明細書、特許請求の範囲で「Ｘ〜Ｙ」と表記して範囲を記載する場合は、範囲の上限と下限を含むこと（すなわち、Ｘ以上Ｙ以下）を表しており、Ｘに単位の記載がなくＹにのみ単位の記載がされているときは、Ｘの単位はＹの単位と同じである。 Hereinafter, the present invention will be described in detail. In the present specification, when the range is described as "X to Y" in the claims, it means that the upper limit and the lower limit of the range are included (that is, X or more and Y or less), and the unit is X. When there is no description and the unit is described only in Y, the unit of X is the same as the unit of Y.
硬質被覆層：
硬質被覆層は、第１層とその上部（工具表面側）の第２層からなり、工具基体に接する第１層はＣを含むＴｉＮ層であり、第２層は、周期表の４〜６族元素およびＡｌからなる群より選ばれた１または２以上の元素からなる炭化物層、窒化物層、酸化物層、炭窒化物層、炭酸化物層、炭窒酸化物層のいずれか１層または２以上の層である。
Hard coating layer:
The hard coating layer is composed of a first layer and a second layer above it (on the tool surface side), the first layer in contact with the tool substrate is a TiN layer containing C, and the second layer is 4 to 6 in the periodic table. Any one of a carbide layer, a nitride layer, an oxide layer, a carbon nitride layer, a carbon oxide layer, and a carbon dioxide oxide layer selected from the group consisting of group elements and Al or two or more elements. Two or more layers.
（１）第１層：
第１層は、ＴｉＮ層であり（ここでいうＴｉＮとは、化学量論的にＴｉとＮが化合しているものに限らない）、工具基体と硬質被覆層との密着性を向上させる目的のために設けるものである。その平均層厚は０．１〜１．０μｍである。この平均層厚の範囲とした理由は、０．１μｍ未満であると第１層を設ける前記目的が達成できず、１．０μｍを超えると上部層を薄くせざるを得ず、耐摩耗性が低下するためである。
(1) First layer:
The first layer is a TiN layer (the TiN here is not limited to a stoichiometric combination of Ti and N), and the purpose is to improve the adhesion between the tool substrate and the hard coating layer. It is provided for the purpose. Its average layer thickness is 0.1 to 1.0 μm. The reason for setting the average layer thickness within this range is that if it is less than 0.1 μm, the above-mentioned purpose of providing the first layer cannot be achieved, and if it exceeds 1.0 μm, the upper layer must be thinned and the wear resistance is improved. This is because it decreases.
第１層であるＴｉＮ層は、前記目的を達成するために、工具基体の界面から０．１μｍまでの界面領域では、Ｃ含有量が５．０〜３５．０原子％となるようにＣが存在し、前記界面領域におけるＴｉＮ結晶粒の平均粒径が３０ｎｍ以下であることが好ましい。この理由は、前記界面領域にＣが存在することにより、ＴｉＮ結晶粒の粒径が小さくなって、工具基体中成分が拡散する経路が増加して、工具基体とＴｉＮ層との密着性が向上するためである。 In order to achieve the above purpose, the TiN layer, which is the first layer, contains C so as to have a C content of 5.0 to 35.0 atomic% in the interface region from the interface of the tool substrate to 0.1 μm. It is present, and the average particle size of TiN crystal grains in the interface region is preferably 30 nm or less. The reason for this is that the presence of C in the interface region reduces the particle size of the TiN crystal grains, increases the path for the components in the tool substrate to diffuse, and improves the adhesion between the tool substrate and the TiN layer. To do.
すなわち、前記界面領域を工具基体の界面から０．１μｍまでの領域とする理由は、０．１μｍ未満であると第１層を設ける前記目的が達成できないためである。そして、拡散させるＣを含有量が５．０〜３５．０原子％とする理由は、５．０原子％未満では、後述する前記目的を達成するために必要なＴｉＮ結晶粒の結晶粒を３０ｎｍ以下とすることができず、また、３５．０原子％超えるとＣの含有量が過剰となり、ＴｉＮ層の靱性が損なわれるため工具寿命の低下につながるためである。 That is, the reason why the interface region is a region from the interface of the tool substrate to 0.1 μm is that if it is less than 0.1 μm, the purpose of providing the first layer cannot be achieved. The reason why the content of C to be diffused is 5.0 to 35.0 atomic% is that if the content is less than 5.0 atomic%, the crystal grains of TiN crystal grains necessary for achieving the above-mentioned object described later are 30 nm. This is because the following cannot be achieved, and if it exceeds 35.0 atomic%, the C content becomes excessive and the toughness of the TiN layer is impaired, which leads to a decrease in tool life.
ここで、前記界面領域のＴｉＮ粒子において、その結晶粒界におけるＣの含有割合が粒内における含有割合よりも３〜１０原子％高いことがより好ましい。その理由は、３原子％未満である場合はＣの拡散量が少ないため、付着強度向上の効果が十分ではなく、一方で１０原子％を超える場合は、Ｃ原子が過剰に粒界に存在することにより、破壊の起点となり得るためである。 Here, it is more preferable that the content ratio of C at the grain boundary of the TiN particles in the interface region is 3 to 10 atomic% higher than the content ratio in the particles. The reason is that when it is less than 3 atomic%, the amount of diffusion of C is small, so that the effect of improving the adhesion strength is not sufficient, while when it exceeds 10 atomic%, C atoms are excessively present at the grain boundaries. This is because it can be a starting point of destruction.
また、前記界面領域には、ＴｉＮ粒子の粒界に、３〜１５原子％のＣｏ、または、３〜１５原子％のＷの少なくとも一方を含むことがより好ましい。その理由は、ＣｏおよびＷの含有量がそれぞれ３原子％未満である場合は母材からの拡散量が少ないため、付着強度向上の効果が十分ではなく、一方で、ＣｏおよびＷの含有量がそれぞれ１５原子％を超えると、これらの原子が過剰に粒界に存在することにより、破壊の起点となり得るためである。 Further, it is more preferable that the interface region contains at least one of Co in 3 to 15 atomic% or W in 3 to 15 atomic% in the grain boundary of TiN particles. The reason is that when the contents of Co and W are less than 3 atomic%, the amount of diffusion from the base metal is small, so that the effect of improving the adhesion strength is not sufficient, while the contents of Co and W are high. This is because if each exceeds 15 atomic%, these atoms are excessively present at the grain boundaries and can be a starting point of destruction.
粒界は、硬質被覆層の縦断面（工具基体に垂直な断面）を電界放出型電子顕微鏡で観察し、ＥｓＢ検出器を用いた組成像により判断し、ＴｉＮ粒子の粒界および粒内におけるＣの含有量、および粒界のＣｏ、Ｗの含有量は、それぞれ、透過型電子顕微鏡を用いて観察し、エネルギー分散型Ｘ線分光法により測定する。 The grain boundaries are determined by observing the vertical cross section of the hard coating layer (cross section perpendicular to the tool substrate) with a field emission electron microscope and judging from the composition image using an EsB detector, and the grain boundaries of TiN particles and C in the grains. The content of Co and W at the grain boundaries are observed using a transmission electron microscope and measured by energy dispersion type X-ray spectroscopy.
ＴｉＮ結晶粒の粒径は３０ｎｍを超えると、工具基体中のＣｏ、Ｗ等の成分が拡散する経路の増加が十分ではなく、第１層を設ける前記目的が達成できない。なお、ＴｉＮ結晶粒の粒径の下限値は特に制約がないが、１．０ｎｍとすることが好ましい。 If the particle size of the TiN crystal grains exceeds 30 nm, the number of paths through which components such as Co and W in the tool substrate are diffused is not sufficiently increased, and the above-mentioned purpose of providing the first layer cannot be achieved. The lower limit of the particle size of the TiN crystal grains is not particularly limited, but is preferably 1.0 nm.
そして、ＴｉＮの結晶粒の粒径は、ＴｉＮ層領域に工具基体に平行な０．５μｍの長さの直線を横切る粒界の数を数え、０．７５／（横切る粒界の数）μｍとして求める。 The grain size of the TiN crystal grains is 0.75 / (the number of grain boundaries crossing) μm by counting the number of grain boundaries crossing a straight line having a length of 0.5 μm parallel to the tool substrate in the TiN layer region. Ask.
（２）第２層
第１層（ＴｉＮ層）の上部（工具表面側）の第２層は、耐摩耗性、耐チッピング性を与えるものであり、周期表の４〜６族元素およびＡｌからなる群より選ばれた１または２以上の元素からなる炭化物層、窒化物層、酸化物層、炭窒化物層、炭酸化物層、炭窒酸化物層のいずれか１層または２以上を適宜選択したものであり、その合計層厚は１．０〜２０．０μｍであることが好ましい。合計層厚をこの範囲とする理由は、１．０μｍ未満では第２層の効果が十分に発揮されず、２０．０μｍを超えると第２層の結晶粒が粗大化しやすくなって、チッピングが発生しやすくなるためである。
(2) Second layer The second layer on the upper part (tool surface side) of the first layer (TiN layer) provides abrasion resistance and chipping resistance, and is derived from Group 4 to 6 elements and Al in the periodic table. One or more of a carbide layer, a nitride layer, an oxide layer, a nitride layer, a coal oxide layer, and a carbon dioxide oxide layer composed of one or more elements selected from the above group is appropriately selected. The total layer thickness is preferably 1.0 to 20.0 μm. The reason why the total layer thickness is within this range is that if it is less than 1.0 μm, the effect of the second layer is not sufficiently exhibited, and if it exceeds 20.0 μm, the crystal grains of the second layer tend to be coarsened and chipping occurs. This is because it becomes easier to do.
なお、各層の平均層厚は、工具基体に垂直な方向の断面（層厚方向の断面、縦断面）を、走査型電子顕微鏡を用いて、適切な倍率、例えば、倍率５０００倍で観察し、刃先稜線部近傍の観察視野内５点の層厚を測定し、平均して求めた。 For the average layer thickness of each layer, a cross section in the direction perpendicular to the tool substrate (cross section in the layer thickness direction, vertical cross section) was observed using a scanning electron microscope at an appropriate magnification, for example, a magnification of 5000 times. The layer thicknesses at 5 points in the observation field near the ridgeline of the cutting edge were measured and averaged.
工具基体
工具基体は、この種の工具基体として従来公知の基材であれば、本発明の目的を達成することを阻害するものでない限り、いずれのものも使用可能である。一例を挙げるならば、超硬合金（ＷＣ基超硬合金、ＷＣの他、Ｃｏを含み、あるいはＴｉ、Ｔａ、Ｎｂ等の炭窒化物を添加したものも含むもの等）、サーメット（ＴｉＣ、ＴｉＮ、ＴｉＣＮ等を主成分とするもの等）、セラミックス（炭化チタン、炭化珪素、窒化珪素、窒化アルミニウム、酸化アルミニウムなど）、ｃＢＮ焼結体、またはダイヤモンド焼結体のいずれかであることが好ましい。
Tool Base As the tool base, any base material conventionally known as this type of tool base can be used as long as it does not hinder the achievement of the object of the present invention. For example, cemented carbide (WC-based cemented carbide, WC, as well as those containing Co or added with carbonitrides such as Ti, Ta, Nb, etc.), cermet (TiC, TiN, etc.) , TiCN or the like as a main component), ceramics (titanium carbide, silicon carbide, silicon nitride, aluminum nitride, aluminum oxide, etc.), cBN sintered body, or diamond sintered body is preferable.
製造方法
本発明に係る硬質被覆層は、第１層の成膜後に第２層を成膜するものであって、それぞれの成膜は、例えば、以下のようにして成膜することができる。ここで、第２層の成膜は、特に制約がなく、公知の成膜方法を適用することができるが、一例として、ＴｉＣＮ層を示す。
Manufacturing Method The hard coating layer according to the present invention forms a second layer after the first layer is formed, and each of the hard coating layers can be formed as follows, for example. Here, the film formation of the second layer is not particularly limited, and a known film formation method can be applied, but the TiCN layer is shown as an example.
１．第１層成膜工程
次の２工程を有する。
（１）ＴｉＮ成膜前の工程
反応ガス組成（容量％）：Ｎ２：４０．０〜６０．０％、Ｈ２：残
反応雰囲気温度：９００〜１１００℃
反応雰囲気圧力：５．０〜２０．０ｋＰａ
反応時間：１２０分〜１８０分
（２）ＴｉＮ成膜工程
反応ガス組成（容量％）：ＴｉＣｌ４：３．５〜５．０％、
Ｎ２：１５．０〜３５．０％、Ｈ２：残
反応雰囲気温度：９００〜１１００℃
反応雰囲気圧力：５．０〜２０．０ｋＰａ
1. 1. First layer film formation process It has the following two steps.
(1) Process before TiN film formation Reaction gas composition (volume%): N 2 : 40.0 to 60.0%, H 2 : Residual reaction atmosphere temperature: 900 to 1100 ° C.
Reaction atmosphere pressure: 5.0-20.0 kPa
Reaction time: 120 minutes to 180 minutes (2) TiN film formation process Reaction gas composition (volume%): TiCl 4 : 3.5 to 5.0%,
N 2 : 15.0 to 35.0%, H 2 : Residual reaction atmosphere temperature: 900 to 1100 ° C
Reaction atmosphere pressure: 5.0-20.0 kPa
２．第２層成膜工程（ＴｉＣＮ層を成膜する場合）
反応ガス組成（容量％）：ＴiＣl４：１．０〜５．０％、
ＣＨ３ＣＮ：０．５〜１．５％、Ｎ２：８．０〜２５．０％、
Ｈ２：残
反応雰囲気温度：８５０〜９２０℃
反応雰囲気圧力：５．０〜９．０ｋＰａ
2. 2. Second layer film formation process (when forming a TiCN layer)
Reaction gas composition (volume%): TiCl 4 : 1.0 to 5.0%,
CH 3 CN: 0.5-1.5%, N 2 : 8.0-25.0%,
H 2 : Residual reaction atmosphere temperature: 850 to 920 ° C
Reaction atmosphere pressure: 5.0-9.0 kPa
次に、実施例について説明する。
ここでは、本発明被覆工具の実施例として、工具基体としてＷＣ基超硬合金を用いたインサート切削工具に適用したものについて述べるが、工具基体として、前述のものを用いた場合であっても同様であるし、ドリル、エンドミルに適用した場合も同様である。
Next, an embodiment will be described.
Here, as an example of the coated tool of the present invention, a tool applied to an insert cutting tool using a WC-based cemented carbide as a tool base will be described, but the same applies even when the above-mentioned tool base is used. The same applies when applied to drills and end mills.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ３Ｃ２粉末およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、ＩＳＯ規格ＣＮＭＧ１２０４１２のインサート形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｃをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, TaC powder, NbC powder, Cr 3 C 2 powder and Co powder having an average particle size of 1 to 3 μm are prepared, and these raw material powders are blended as shown in Table 1. It was blended into the composition, further added with wax, mixed in a ball mill in acetone for 24 hours, dried under reduced pressure, press-molded into a green compact of a predetermined shape at a pressure of 98 MPa, and this green compact was pressed in a vacuum of 5 Pa at 1370. Vacuum sintered at a predetermined temperature within the range of ~ 1470 ° C. under the condition of holding for 1 hour, and after sintering, manufacture tool bases A to C made of WC-based superhard alloy having an insert shape of ISO standard CNMG120412. did.
次に、これら工具基体Ａ〜Ｃの表面に、ＣＶＤ装置を用いて、順に第１層、第２層を形成し、表４に示される本発明被覆工具１〜１２を得た。
成膜条件は、表２〜３に記載したとおりであるが、第１層の成膜工程は、概ね、次のとおりであった。
Next, a first layer and a second layer were formed on the surfaces of these tool bases A to C in order using a CVD apparatus to obtain the coated tools 1 to 12 of the present invention shown in Table 4.
The film forming conditions are as shown in Tables 2 and 3, but the film forming process of the first layer was generally as follows.
第１層成膜工程
（１）ＴｉＮ成膜前の工程
反応ガス組成（容量％）：Ｎ２：４０．０〜６０．０％、Ｈ２：残
反応雰囲気温度：９００〜１１００℃
反応雰囲気圧力：５．０〜２０．０ｋＰａ
反応時間：１２０分〜１８０分
（２）ＴｉＮ成膜工程
反応ガス組成（容量％）：ＴｉＣｌ４：３．５〜５．０％、
Ｎ２：１５．０〜３５．０％、Ｈ２：残
反応雰囲気温度：９００〜１１００℃
反応雰囲気圧力：５．０〜２０．０ｋＰａ
２．第２層成膜工程
第２層の成膜工程は、表３に示したとおりであった。
First layer film formation step (1) Step before TiN film formation Reaction gas composition (volume%): N 2 : 40.0 to 60.0%, H 2 : Residual reaction atmosphere temperature: 900 to 1100 ° C.
Reaction atmosphere pressure: 5.0-20.0 kPa
Reaction time: 120 minutes to 180 minutes (2) TiN film formation process Reaction gas composition (volume%): TiCl 4 : 3.5 to 5.0%,
N 2 : 15.0 to 35.0%, H 2 : Residual reaction atmosphere temperature: 900 to 1100 ° C
Reaction atmosphere pressure: 5.0-20.0 kPa
2. 2. Second layer film formation step The second layer film formation step was as shown in Table 3.
また、比較の目的で、工具基体Ａ〜Ｃの表面に、表２〜３に示される条件によりＣＶＤを行うことにより、表４に示す比較被覆工具１〜１２を製造した。 Further, for the purpose of comparison, comparative covering tools 1 to 12 shown in Table 4 were manufactured by performing CVD on the surfaces of the tool bases A to C under the conditions shown in Tables 2 and 3.
表４において、平均層厚は、本発明被覆工具１〜１２、比較被覆工具１〜１２の各構成層の縦断面（工具基体表面に垂直な方向の断面）を、走査型電子顕微鏡を用いて適切な倍率(倍率５０００倍)を選択して観察し、観察視野内の５点の層厚を測って平均して求めた。また、前記界面領域におけるＣ、Ｃｏ、Ｗの含有量は前述の方法により求めた。 In Table 4, the average layer thickness is the vertical cross section (cross section in the direction perpendicular to the surface of the tool substrate) of each constituent layer of the covering tools 1 to 12 of the present invention and the comparative covering tools 1 to 12, using a scanning electron microscope. An appropriate magnification (magnification of 5000 times) was selected and observed, and the layer thicknesses of 5 points in the observation field were measured and averaged. The contents of C, Co, and W in the interface region were determined by the above-mentioned method.
続いて、前記本発明被覆工具１〜１２および比較被覆工具１〜１２について、いずれもカッタ径１２５ｍｍの工具鋼製カッタ先端部に固定治具にてクランプした状態で、以下に示す、ステンレス鋼の湿式切削加工試験を実施し、切刃の逃げ面摩耗幅を測定した。表５に、切削試験の結果を示す。なお、比較被覆工具１〜１２については、チッピング発生が原因で切削時間終了前に寿命に至ったため、寿命に至るまでの時間を示す。 Subsequently, with respect to the covering tools 1 to 12 and the comparative covering tools 1 to 12 of the present invention, all of the stainless steel shown below are clamped to the tip of a tool steel cutter having a cutter diameter of 125 mm with a fixing jig. A wet cutting test was carried out, and the flank wear width of the cutting edge was measured. Table 5 shows the results of the cutting test. The comparative covering tools 1 to 12 have reached the end of their life before the end of the cutting time due to the occurrence of chipping, so the time until the end of the life is shown.
切削試験１
被削材：ＪＩＳ・ＳＵＳ３０４ 外径１００ｍｍの丸棒
切削速度：２００ｍ／秒
切り込み：１．５ｍｍ
１回転当たりの送り：０．３ｍｍ
切削時間：１５分
Cutting test 1
Work material: JIS / SUS304 Round bar with an outer diameter of 100 mm Cutting speed: 200 m / sec Cutting: 1.5 mm
Feed per rotation: 0.3 mm
Cutting time: 15 minutes
切削試験２
被削材：ＪＩＳ・ＳＵＳ３１６ 外径１００ｍｍの丸棒
切削速度：１５０ｍ／秒
切り込み：２．０ｍｍ
１回転当たりの送り：０．２ｍｍ
切削時間：１５分
Cutting test 2
Work material: JIS / SUS316 Round bar with an outer diameter of 100 mm Cutting speed: 150 m / sec Cutting: 2.0 mm
Feed per rotation: 0.2 mm
Cutting time: 15 minutes
切削試験３
被削材：ＪＩＳ・ＳＵＳ６３０ 外径１００ｍｍの丸棒
切削速度：１２０ｍ／秒
切り込み：２．０ｍｍ
１回転当たりの送り：０．１５ｍｍ
切削時間：８分
Cutting test 3
Work material: JIS / SUS630 Round bar with an outer diameter of 100 mm Cutting speed: 120 m / sec Cutting: 2.0 mm
Feed per rotation: 0.15 mm
Cutting time: 8 minutes
表５に示される結果から、本発明被覆工具は、ステンレス鋼等の高速連続切削において、優れた耐チッピング性、耐摩耗性を発揮しているが、これに対して、本発明に規定する界面領域におけるＴｉＮ層を構成するＴｉＮ結晶粒子の平均粒径、該領域に含まれているＣ含有量を満足しない比較被覆工具は、チッピングを発生し短時間で工具寿命に至っていることが明らかである。 From the results shown in Table 5, the coated tool of the present invention exhibits excellent chipping resistance and abrasion resistance in high-speed continuous cutting of stainless steel and the like, whereas the interface specified in the present invention is used. It is clear that a comparative covering tool that does not satisfy the average particle size of the TiN crystal particles constituting the TiN layer in the region and the C content contained in the region causes chipping and reaches the tool life in a short time. ..
この発明の被覆工具は、ステンレス鋼の高速連続切削加工ばかりでなく、各種の被削材の被覆工具として使用することができ、しかも、長期の使用にわたって耐チッピング性を有するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネルギー化、さらには、低コスト化にも十分満足に対応できるものである。 The covering tool of the present invention can be used not only for high-speed continuous cutting of stainless steel but also as a covering tool for various work materials, and has chipping resistance over a long period of time. It is possible to fully satisfy the improvement of the performance of the equipment, the labor saving and the energy saving of the cutting process, and the cost reduction.
Claims (5)
前記硬質被覆層のうち、前記工具基材と接する前記第１層はＴｉＮ層であり、前記工具基体と前記ＴｉＮ層との界面から０．１μｍの範囲内の界面領域における前記ＴｉＮ層を構成するＴｉＮ結晶粒子の平均粒径が３０ｎｍ以下であり、該界面領域には５．０〜３５．０原子％のＣを含むことを特徴とする、表面被覆切削工具。 A surface-coated cutting tool provided with a hard coating layer in which a first layer and a plurality of layers including a second layer are laminated on the surface of a tool substrate.
Among the hard coating layers, the first layer in contact with the tool substrate is a TiN layer, which constitutes the TiN layer in an interface region within 0.1 μm from the interface between the tool substrate and the TiN layer. A surface coating cutting tool characterized in that the average particle size of TiN crystal particles is 30 nm or less, and the interface region contains 5.0 to 35.0 atomic% of C.
As the second layer, a carbide layer, a nitride layer, an oxide layer, a carbonitride layer, a carbon oxide layer composed of one or more elements selected from the group consisting of Group 4 to 6 elements and Al in the periodic table. The invention according to any one of claims 1 to 4, wherein any one layer or two or more layers of the carbonitride oxide layer is formed with a total layer thickness of 1.0 to 20.0 μm. Surface coating cutting tool.
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| JP2019052352A Active JP7373110B2 (en) | 2019-03-20 | 2019-03-20 | Surface-coated cutting tools with hard coating layer that exhibits excellent wear resistance |
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| CN115786875A (en) * | 2022-11-23 | 2023-03-14 | 中南大学 | A coating with enhanced toughness and wear resistance, its preparation method and application |
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