JP2020059594A - 収容システム - Google Patents
収容システム Download PDFInfo
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- JP2020059594A JP2020059594A JP2018193503A JP2018193503A JP2020059594A JP 2020059594 A JP2020059594 A JP 2020059594A JP 2018193503 A JP2018193503 A JP 2018193503A JP 2018193503 A JP2018193503 A JP 2018193503A JP 2020059594 A JP2020059594 A JP 2020059594A
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- 238000012546 transfer Methods 0.000 claims abstract description 117
- 238000001514 detection method Methods 0.000 claims abstract description 86
- 230000007246 mechanism Effects 0.000 claims abstract description 78
- 230000004308 accommodation Effects 0.000 claims description 39
- 238000000034 method Methods 0.000 abstract description 16
- 230000008569 process Effects 0.000 abstract description 10
- 230000003028 elevating effect Effects 0.000 description 14
- 238000012545 processing Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000005401 electroluminescence Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G65/00—Loading or unloading
- B65G65/005—Control arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G65/00—Loading or unloading
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G65/00—Loading or unloading
- B65G65/30—Methods or devices for filling or emptying bunkers, hoppers, tanks, or like containers, of interest apart from their use in particular chemical or physical processes or their application in particular machines, e.g. not covered by a single other subclass
- B65G65/32—Filling devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G69/00—Auxiliary measures taken, or devices used, in connection with loading or unloading
- B65G69/003—Restraining movement of a vehicle at a loading station using means not being part of the vehicle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G69/00—Auxiliary measures taken, or devices used, in connection with loading or unloading
- B65G69/006—Centring or aligning a vehicle at a loading station using means not being part of the vehicle
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Supplying Of Containers To The Packaging Station (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Specific Conveyance Elements (AREA)
Abstract
Description
このように、上記の構成によれば、収容物の容器への移載動作中に調整制御を実行することで、収容物を容器に移載する際に、収容物を容器内の適正収容位置に配置することができる。そのため、収容物の容器への移載動作とは別に収容物を移動させる動作を行う必要がなく、収容物が容器内の適正収容位置に配置された状態を実現することができる。よって、このような状態を実現するために必要な工程数の低減を図ることができる。
なお、上記の構成では、移載機に保持された収容物と保持部に保持された容器との相対位置の調整が、保持部による容器の保持位置の調整によって行われる。そのため、この収容システムは、移載機による収容物の保持位置の微調整が困難な場合に好適に適用することができる。
次に、収容システムのその他の実施形態について説明する。
以下、上記において説明した収容システムの概要について説明する。
このように、上記の構成によれば、収容物の容器への移載動作中に調整制御を実行することで、収容物を容器に移載する際に、収容物を容器内の適正収容位置に配置することができる。そのため、収容物の容器への移載動作とは別に収容物を移動させる動作を行う必要がなく、収容物が容器内の適正収容位置に配置された状態を実現することができる。よって、このような状態を実現するために必要な工程数の低減を図ることができる。
なお、上記の構成では、移載機に保持された収容物と保持部に保持された容器との相対位置の調整が、保持部による容器の保持位置の調整によって行われる。そのため、この収容システムは、移載機による収容物の保持位置の微調整が困難な場合に好適に適用することができる。
2:制御部
13:保持部
20:調整機構
30:位置検出装置
31:第1センサ
32:第2センサ
33:第3センサ
53:移載機
60:容器
62:収容空間
63:支持部
64:規制部
70:収容物
A1:第1調整方向
A2:第2調整方向
A3:回転方向
D1:第1検出方向
D2:第2検出方向
R:回転軸(基準面に直交する軸)
Claims (4)
- 収容物を容器に収容する収容システムであって、
前記容器を保持する保持部と、
前記保持部による前記容器の保持位置を調整する調整機構と、
前記調整機構の駆動を制御する制御部と、
前記保持部に保持されている状態の前記容器の収容空間に前記収容物を移動させて、前記収容物を前記容器に移載する移載機と、
前記収容物の位置を検出する位置検出装置と、を備え、
前記位置検出装置は、前記収容空間において前記移載機に保持されている状態の前記収容物の、前記容器に対する相対位置を検出するように設けられ、
前記制御部は、前記移載機による前記収容物の移載動作中に、前記位置検出装置の検出情報に基づき、前記収容物に対して適正位置となるように前記容器の前記保持位置を調整する調整制御を、前記収容物が前記容器に支持される前の状態で実行する、収容システム。 - 前記収容物は、平板状に形成され、
前記容器は、前記収容物を基準面に沿う状態で収容するように構成され、
前記基準面に沿うと共に互いに交差する2つの方向を第1調整方向及び第2調整方向として、
前記調整機構は、前記第1調整方向、前記第2調整方向、及び前記基準面に直交する軸周りの回転方向のそれぞれの方向に、前記容器の前記保持位置を調整可能に構成されている、請求項1に記載の収容システム。 - 前記基準面に沿うと共に互いに交差する2つの方向を第1検出方向及び第2検出方向として、
前記位置検出装置は、前記容器に対する前記収容物の前記第1検出方向の相対位置を検出する第1センサと、前記第1センサとは前記第2検出方向の異なる位置で、前記容器に対する前記収容物の前記第1検出方向の相対位置を検出する第2センサと、前記容器に対する前記収容物の前記第2検出方向の相対位置を検出する第3センサと、を備え、
前記制御部は、前記第1センサ、前記第2センサ、及び前記第3センサのそれぞれの検出情報に基づき、前記第1調整方向、前記第2調整方向、及び前記回転方向のそれぞれにおける前記容器の前記保持位置の調整量を導出するように構成されている、請求項2に記載の収容システム。 - 前記容器は、前記収容物を下方から支持する支持部を備え、
前記移載機は、前記収容物を前記支持部に対して上方から移載するように構成され、
前記支持部は、当該支持部に支持された状態の前記収容物に対して側方に配置されて、前記収容物の水平方向の移動を規制する規制部を備え、
前記適正位置は、上下方向視で前記収容物が前記規制部と重複しないような前記容器の前記保持位置であり、
前記制御部は、前記収容物が前記規制部よりも上方に位置する状態で前記調整制御を実行する、請求項1から3のいずれか一項に記載の収容システム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018193503A JP7066592B2 (ja) | 2018-10-12 | 2018-10-12 | 収容システム |
TW108136279A TWI829780B (zh) | 2018-10-12 | 2019-10-07 | 容置系統 |
US16/597,239 US11834283B2 (en) | 2018-10-12 | 2019-10-09 | Loading system |
KR1020190125313A KR20200041795A (ko) | 2018-10-12 | 2019-10-10 | 수용 시스템 |
CN201910962157.5A CN111038986B (zh) | 2018-10-12 | 2019-10-11 | 容纳系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018193503A JP7066592B2 (ja) | 2018-10-12 | 2018-10-12 | 収容システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020059594A true JP2020059594A (ja) | 2020-04-16 |
JP7066592B2 JP7066592B2 (ja) | 2022-05-13 |
Family
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JP2018193503A Active JP7066592B2 (ja) | 2018-10-12 | 2018-10-12 | 収容システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US11834283B2 (ja) |
JP (1) | JP7066592B2 (ja) |
KR (1) | KR20200041795A (ja) |
CN (1) | CN111038986B (ja) |
TW (1) | TWI829780B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7537399B2 (ja) | 2021-09-13 | 2024-08-21 | 株式会社ダイフク | 物品移載装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11848222B2 (en) * | 2020-07-09 | 2023-12-19 | Taiwan Semiconductor Manufacturing Company Ltd. | System for a semiconductor fabrication facility and method for operating the same |
KR102721580B1 (ko) * | 2022-09-07 | 2024-10-25 | 주식회사 테토스 | 회전형 기판 매거진 |
Citations (6)
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JPH08217207A (ja) * | 1995-02-07 | 1996-08-27 | Metsukusu:Kk | 薄板状ワークの位置決め収納装置 |
JP2003258060A (ja) * | 2002-03-01 | 2003-09-12 | Nakamura Tome Precision Ind Co Ltd | 基板載置位置のセンタリング方法及びその装置 |
JP2004079615A (ja) * | 2002-08-12 | 2004-03-11 | Chi Mei Optoelectronics Corp | 基板搬送ロボットシステム及びこの基板搬送ロボットシステムに用いられる基板搬送容器 |
JP2004161362A (ja) * | 2002-11-15 | 2004-06-10 | Dainippon Printing Co Ltd | ガラス基板ケース及び梱包装置 |
JP2006273521A (ja) * | 2005-03-29 | 2006-10-12 | Central Glass Co Ltd | 容器溝へのガラス板の挿入方法および装置 |
JP2006310336A (ja) * | 2005-04-26 | 2006-11-09 | Central Glass Co Ltd | ガラス板収納用箱状容器の位置調整装置 |
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JP6328534B2 (ja) * | 2014-09-30 | 2018-05-23 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
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-
2018
- 2018-10-12 JP JP2018193503A patent/JP7066592B2/ja active Active
-
2019
- 2019-10-07 TW TW108136279A patent/TWI829780B/zh active
- 2019-10-09 US US16/597,239 patent/US11834283B2/en active Active
- 2019-10-10 KR KR1020190125313A patent/KR20200041795A/ko active Pending
- 2019-10-11 CN CN201910962157.5A patent/CN111038986B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH08217207A (ja) * | 1995-02-07 | 1996-08-27 | Metsukusu:Kk | 薄板状ワークの位置決め収納装置 |
JP2003258060A (ja) * | 2002-03-01 | 2003-09-12 | Nakamura Tome Precision Ind Co Ltd | 基板載置位置のセンタリング方法及びその装置 |
JP2004079615A (ja) * | 2002-08-12 | 2004-03-11 | Chi Mei Optoelectronics Corp | 基板搬送ロボットシステム及びこの基板搬送ロボットシステムに用いられる基板搬送容器 |
JP2004161362A (ja) * | 2002-11-15 | 2004-06-10 | Dainippon Printing Co Ltd | ガラス基板ケース及び梱包装置 |
JP2006273521A (ja) * | 2005-03-29 | 2006-10-12 | Central Glass Co Ltd | 容器溝へのガラス板の挿入方法および装置 |
JP2006310336A (ja) * | 2005-04-26 | 2006-11-09 | Central Glass Co Ltd | ガラス板収納用箱状容器の位置調整装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7537399B2 (ja) | 2021-09-13 | 2024-08-21 | 株式会社ダイフク | 物品移載装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI829780B (zh) | 2024-01-21 |
KR20200041795A (ko) | 2020-04-22 |
US11834283B2 (en) | 2023-12-05 |
CN111038986B (zh) | 2023-02-21 |
US20200115173A1 (en) | 2020-04-16 |
TW202023923A (zh) | 2020-07-01 |
JP7066592B2 (ja) | 2022-05-13 |
CN111038986A (zh) | 2020-04-21 |
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